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Mars200VCE
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EfemDualRT
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VIDs
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_ALID.xml

_ALID.xml 2.2 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <ArrayOfVIDItem xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   <VIDItem Name="System.EFEM.AirErrorForRobot" Index="10101001" DataType="" Description="EFEM Robot Air Error" Module="System" Type="" Unit="EFEM" Parameter="AirErrorForRobot" />
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  4.   <VIDItem Name="System.EFEM.DoorOpen" Index="10101002" DataType="" Description="EFEM door open" Module="System" Type="" Unit="EFEM" Parameter="DoorOpen" />
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  5.   <VIDItem Name="System.EFEM.EmoAlarm" Index="10101003" DataType="" Description="EFEM EMO error" Module="System" Type="" Unit="EFEM" Parameter="EmoAlarm" />
    6. 

  6.   <VIDItem Name="System.EFEM.FFUAlarm" Index="10101004" DataType="" Description="EFEM FFU Error" Module="System" Type="" Unit="EFEM" Parameter="FFUAlarm" />
    7. 

  7.   <VIDItem Name="System.EFEM.IonizerAlarm" Index="10101005" DataType="" Description="EFEM Ionizer Error" Module="System" Type="" Unit="EFEM" Parameter="IonizerAlarm" />
    8. 

  8.   <VIDItem Name="System.EFEM.IsMaintain" Index="10101006" DataType="" Description="EFEM in Maintenance Mode, switch to online and turn key to auto" Module="System" Type="" Unit="EFEM" Parameter="IsMaintain" />
    9. 

  9.   <VIDItem Name="System.io.CommunicationError" Index="10202001" DataType="" Description="Can not Communication " Module="System" Type="" Unit="io" Parameter="CommunicationError" />
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  10.   <VIDItem Name="System.io.ConnectionError" Index="10202002" DataType="" Description="Can not connect with " Module="System" Type="" Unit="io" Parameter="ConnectionError" />
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  11.   <VIDItem Name="PMA.io.CommunicationError" Index="620101001" DataType="" Description="Can not Communication " Module="PMA" Type="" Unit="io" Parameter="CommunicationError" />
    12. 

  12.   <VIDItem Name="PMA.io.ConnectionError" Index="620101002" DataType="" Description="Can not connect with " Module="PMA" Type="" Unit="io" Parameter="ConnectionError" />
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  13.   <VIDItem Name="PMB.io.CommunicationError" Index="630101001" DataType="" Description="Can not Communication " Module="PMB" Type="" Unit="io" Parameter="CommunicationError" />
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  14.   <VIDItem Name="PMB.io.ConnectionError" Index="630101002" DataType="" Description="Can not connect with " Module="PMB" Type="" Unit="io" Parameter="ConnectionError" />
    15. 

  15. </ArrayOfVIDItem>
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