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System.sccfg

System.sccfg 185 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="EfemDual">
    3. 

  3. 	<configs name="System" display="">
    4. 

  4. 		<config default="true" name="IsSimulatorMode" description="Is Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
    5. 

  5. 		<config default="true" name="IsATMMode" description="Is ATM Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
    6. 

  6. 		<config default="15" name="ATMProcessDelayTime" description="ATM Process Delay Time" max="999" min="10" paramter="" tag="" unit="" type="Integer" />
    7. 

  7. 		<config default="false" name="IsCycleMode" description="Is Cycle Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
    8. 

  8.     <config default="LotCount" name="CycleBy" description="Cycle By LotCount or WaferCount" max="0" min="0" paramter="LotCount;WaferCount" tag="ReadOnlySelection" unit="" type="String"  visible="false"/>
    9. 

  9. 		<config default="3" name="CycleCount" description="Cycle Lot Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
    10. 

  10. 		<config default="25" name="CycleWaferCount" description="Cycle Wafer Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    11. 

  11. 

  12.     <config default="true" name="IsServiceControlMode" description="Is Service Control Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
    13. 

  13. 

  14. 		<config default="true" name="AutoAlignManualTransfer" description="Auto Align Manual Transfer" max="" min="" paramter="" tag="" unit="" type="Bool" />
    15. 

  15. 		<config default="true" name="AutoPassCooling" description="Auto Pass Cooling" max="" min="" paramter="" tag="" unit="" type="Bool" />
    16. 

  16. 

  17. 		<config default="false" name="BypassInterlock" description="Bypass Interlock" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    18. 

  18. 

  19.     <config default="50" name="MaxTemperatureToleranceToTarget" description="MaxTemperatureToleranceToTarget" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    20. 

  20. 

  21.     <config default="1000" name="DataCollectionInterval" description="Data Collection Interval" max="99999" min="20" paramter="" tag="" unit="ms" type="Integer" />
    22. 

  22. 

  23.     <config default="60" name="LogsSaveDays" description="Logs Save Days" max="60000" min="0" paramter="" tag="" unit="" type="Integer" />
    24. 

  24.     <config default="false" name="IsEnableCompressLogFileFunc" description="启用压缩log文件功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    25. 

  25.     <config default="200" name="SingleLogFileMaxSize" description="如果已启用压缩log文件功能，当天前超过该设置(M)的log文件将被压缩" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    26. 

  26. 

  27. 

  28.     <config default="150" name="BufferSetPointLimit" nameView="Buffer Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    29. 

  29. 		<config default="3" name="SmallWafer" nameView="Small Wafer" description="小晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    30. 

  30. 		<config default="4" name="MidWafer" nameView="Mid Wafer" description="中晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    31. 

  31. 		<config default="6" name="BigWafer" nameView="Big Wafer" description="大晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    32. 

  32.     <config default="8" name="DefaultCreateWaferSize" nameView="Default Create WaferSize" description="默认创建Wafer尺寸" max="12" min="0" paramter="" tag="" unit="" type="Integer" />
    33. 

  33. 

  34.     <config default="false" name="ProcessEnableCheckLE"  description="是否在process时检查底座温度是否ON" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    35. 

  35. 		<configs name="Scheduler">
    36. 

  36. 			<config default="15" name="WaitLoadTimeOut" description="Wait Load TimeOut" max="1000" min="1" paramter="" tag="" unit="s" type="Double" />
    37. 

  37. 			<config default="2" name="WaferCountBelowWhichStartNewProcessJob" description="Wafer Count Below Which Start New Process Job" max="25" min="1" paramter="" tag="" unit="" type="Integer" />
    38. 

  38. 			<config default="true" name="IsRunInParallelMode"  description="并行模式" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    39. 

  39. 			<config default="true" name="GroupWaferBySequence"  description="相同sequence的job一起跑" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    40. 

  40. 			<config default="false" name="ProcessFromSlotMax"  description="Process From Slot Max" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    41. 

  41. 		</configs>
    42. 

  42. 

  43. 		<configs name="SetUp" display="">
    44. 

  44. 

  45. 			<config default="true" name="PMA.IsInstalled"  description="Is PMA Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    46. 

  46. 			
    47. 

  47. 			<config default="false" name="PMAChamber1Disabled.IsInstalled" nameView="PMAChamber1Disabled"  visible="false" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    48. 

  48. 			<config default="false" name="PMAChamber2Disabled.IsInstalled" nameView="PMAChamber2Disabled" visible="false"  description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    49. 

  49. 

  50. 			<config default="true" name="PMB.IsInstalled"  description="Is PMB Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    51. 

  51. 

  52. 			<config default="false" name="PMBChamber1Disabled.IsInstalled" nameView="PMBChamber1Disabled" visible="false"  description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    53. 

  53. 			<config default="false" name="PMBChamber2Disabled.IsInstalled" nameView="PMBChamber2Disabled" visible="false"  description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    54. 

  54. 

  55. 

  56. 			<config default="true" name="PMC.IsInstalled"  description="Is PMC Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    57. 

  57. 

  58. 			<config default="true" name="Aligner.IsInstalled"  description="Is Aligner Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    59. 

  59. 

  60. 			<config default="true" name="LLA.IsInstalled"  description="Is LLA Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    61. 

  61. 

  62. 			<config default="true" name="LLB.IsInstalled"  description="Is LLB Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    63. 

  63. 

  64. 			<config default="true" name="LP1.IsInstalled"  description="Is LP1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    65. 

  65. 

  66. 			<config default="true" name="LP2.IsInstalled"  description="Is LP2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    67. 

  67. 

  68. 			<config default="true" name="LP3.IsInstalled"  description="Is LP3 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    69. 

  69. 

  70. 			<config default="false" name="EPD.IsInstalled"  description="Is EPD Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    71. 

  71. 

  72. 		</configs>
    73. 

  73. 

  74.     <configs name="EndPoint" nameView="EndPoint" visible="false">
    75. 

  75.       <config default="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" name="EndPointDefaultValue" nameView="EndPoint Default Value" description="EndPoint Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="false" />
    76. 

  76.     </configs>
    77. 

  77. 

  78.     <configs name="Recipe" visible="false">
    79. 

  79. 			<config default="EfemDual" name="SupportedChamberType" description="Supported Chamber Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    80. 

  80. 			<config default="Process" name="SupportedProcessType" description="Supported Process Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    81. 

  81. 			<config default="PM1,PM2" name="ChamberModules" description="Chamber Modules" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    82. 

  82. 

  83. 		</configs>
    84. 

  84. 

  85. 		<configs name="SignalTower" visible="false">
    86. 

  86. 			<config default="red=1;yellow=2;green=3;blue=4;white=5;buzzer=6" name="Light" description="设置灯的种类，顺序" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    87. 

  87. 			<config default="System.IsAlarm=System in alarm status;System.IsIdle=System in idle status" name="Trigger" description="设置触发灯塔的项" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    88. 

  88. 			<config default="System.IsAlarm=on,off,off,off,off;System.IsIdle=off,on,off,off,off;" name="Value" description="设置灯塔触发的逻辑关系" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    89. 

  89. 

  90. 		</configs>
    91. 

  91. 

  92. 		<configs name="FDC">
    93. 

  93. 			<config default="Fdc" name="DataGroupName" description="FDC data group" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    94. 

  94. 			<config default="1000" name="DelayTime" description="Step Delay time before collection data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    95. 

  95. 			<config default="100" name="SampleInterval" description="interval time collection sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    96. 

  96. 		</configs>
    97. 

  97. 

  98. 		<configs name="Job">
    99. 

  99. 			<config default="10" name="BuzzerTimeWhenJobDone" description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    100. 

  100. 			<config default="true" name="EnablePopDialogWhenJobDone"  description="Whether pop window after job done" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    101. 

  101. 		</configs>
    102. 

  102. 

  103.   </configs>
    104. 

  104. 

  105.   <configs name="FA">
    106. 

  106.     <config default="HSMS" name="ConnectionMode" description="HSMS/Serial" max="0" min="0" paramter="" tag="" unit="" type="String" />
    107. 

  107.     <config default="127.0.0.1" name="LocalIpAddress" description="Local IP Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
    108. 

  108.     <config default="5021" name="LocalPortNumber" description="Local Port Number" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    109. 

  109.     <config default="127.0.0.1" name="RemoteIpAddress" description="Remote IP Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
    110. 

  110.     <config default="5020" name="RemotePortNumber" description="Remote Port Number" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    111. 

  111.     <config default="45" name="T3Timeout" description="T3 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    112. 

  112.     <config default="10" name="T5Timeout" description="T5 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    113. 

  113.     <config default="5" name="T6Timeout" description="T6 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    114. 

  114.     <config default="10" name="T7Timeout" description="T7 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    115. 

  115.     <config default="5" name="T8Timeout" description="T8 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    116. 

  116.     <config default="false" name="EnableSpooling" description="Enable Spooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    117. 

  117.     <config default="30" name="LinkTestInterval" description="Link Test Interval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    118. 

  118.     <config default="0" name="DeviceId" description="Device ID" max="0" min="0" paramter="" tag="" unit="" type="String" />
    119. 

  119. 

  120.     <config default="Enabled" name="DefaultCommunicationState" description="Default Communication State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    121. 

  121.     <config default="Online" name="DefaultControlState" description="Default Control State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    122. 

  122.     <config default="Local" name="DefaultControlSubState" description="Default Control SubState" max="0" min="0" paramter="" tag="" unit="" type="String" />
    123. 

  123.     <config default="1" name="LP1DefaultTransferState" description="DefaultTransferState" max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
    124. 

  124.     <config default="1" name="LP2DefaultTransferState" description="DefaultTransferState" max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
    125. 

  125.     <config default="1" name="LP3DefaultTransferState" description="DefaultTransferState" max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
    126. 

  126.   </configs>
    127. 

  127. 

  128. 

  129. 	<configs name="LP1" visible="false">
    130. 

  130. 

  131. 		<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    132. 

  132. 		<config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    133. 

  133. 	</configs>
    134. 

  134. 

  135. 	<configs name="LP2" visible="false">
    136. 

  136. 

  137. 		<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    138. 

  138. 		<config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    139. 

  139. 	</configs>
    140. 

  140. 

  141. 	<configs name="LP3" visible="false">
    142. 

  142. 

  143. 		<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    144. 

  144. 		<config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    145. 

  145. 	</configs>
    146. 

  146. 

  147. 

  148. 	<configs name="LLA" visible="false">
    149. 

  149. 

  150. 		<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    151. 

  151. 		<config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    152. 

  152. 	</configs>
    153. 

  153. 

  154. 

  155. 	<configs name="LLB" visible="false">
    156. 

  156. 

  157. 		<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    158. 

  158. 		<config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    159. 

  159. 	</configs>
    160. 

  160. 

  161. 

  162.   <configs name="CarrierInfo" visible="false">
    163. 

  163. 

  164.     <config default="0" name="UpperBankNumber8" description="Upper Arm BankNumber , WaferSize:8" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    165. 

  165.     <config default="1" name="UpperBankNumber12" description="Upper Arm BankNumber , WaferSize:12" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    166. 

  166.     <config default="2" name="LowerBankNumber8" description="Lower Arm BankNumber , WaferSize:8" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    167. 

  167.     <config default="3" name="LowerBankNumber12" description="Lower Arm BankNumber , WaferSize:12" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    168. 

  168.     <config default="0" name="LLABankNumber8" description="LLABankNumber8" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    169. 

  169.     <config default="0" name="LLBBankNumber8" description="LLBBankNumber8" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    170. 

  170.     <config default="1" name="LLABankNumber12" description="LLABankNumber12" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    171. 

  171.     <config default="1" name="LLBBankNumber12" description="LLABankNumber12" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    172. 

  172.     <config default="1" name="LLACassetteNumber" description="LLACassetteNumber" max="2" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
    173. 

  173.     <config default="2" name="LLBCassetteNumber" description="LLBCassetteNumber" max="2" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
    174. 

  174.   </configs>
    175. 

  175. 

  176. 	<configs name="TM">
    177. 

  177. 		<configs name="TMRobot">
    178. 

  178. 			<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    179. 

  179. 			<config default="30" name="PickTimeout" description="Pick Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    180. 

  180. 			<config default="30" name="PlaceTimeout" description="Place Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    181. 

  181. 			<config default="30" name="GotoTimeout" description="Goto Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    182. 

  182. 			<config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    183. 

  183. 

  184.       <config default="true" name="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    185. 

  185.       <config default="true" name="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    186. 

  186. 

  187. 			<config default="10.0.0.2:10110" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" />
    188. 

  188. 			<config default="COM29" name="PortName" description="TMRobot COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    189. 

  189. 			<config default="true" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    190. 

  190. 			<config default="1" name="UnitNumber" description="UnitNumber" max="9" min="1" paramter="" tag="" unit="" type="Integer" />
    191. 

  191. 			<config default="2" name="BodyNumber" description="Robot Body Number" max="65535" min="0" paramter="" tag="" unit="" type="Integer" />
    192. 

  192. 

  193. 			<config default="true" name="EnableCheckSum" description="EnableCheckSum" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    194. 

  194. 			<config default="true" name="EnableSeqNo" description="EnableSeqNo" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    195. 

  195. 			<config default="2" name="SpeedLevel" description="SpeedLevel" max="9" min="1" paramter="" tag="" unit="" type="Integer" />
    196. 

  196. 			<config default="0" name="CommunicationToken" description="RobotCommunicationToken" max="9999" min="0" paramter="" tag="" unit="" type="Integer" />
    197. 

  197. 			<config default="true" name="DualBlade1TransferEnable" description="DualBlade1TransferEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    198. 

  198. 			<config default="2" name="SlotCount" description="SlotCount" max="9" min="1" paramter="" tag="" unit="" type="Integer" />
    199. 

  199. 			<config default="1" name="Blade2Slots" description="Blade2Slots" max="9" min="1" paramter="" tag="" unit="" type="Integer" />
    200. 

  200. 

  201. 			<config default="1" name="RobotSpeed" description="Robot速度" max="9999" min="0" paramter="" tag="" unit="" type="Integer" />
    202. 

  202. 			<config default="2" name="TimeLimitRobotCommand" description="Robot命令超时设定" max="180" min="0" paramter="" tag="" unit="seconds" type="Integer" />
    203. 

  203. 			<config default="30" name="TimeLimitRobotHome" description="Robot回原点命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer" />
    204. 

  204. 			<config default="10" name="TimeLimitForPickWafer" description="Pick命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer"  visible="false"/>
    205. 

  205. 			<config default="20" name="TimeLimitForPlaceWafer" description="Place命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer"  visible="false"/>
    206. 

  206. 			<config default="10" name="TimeLimitForExchangeWafer" description="Exchange命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer" />
    207. 

  207. 

  208. 			<config default="2" name="InitCmdNO" description="Compaud command number for Init" max="90" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    209. 

  209. 

  210.       <config default="30" name="UpperLLAPickCmdNO" description="UpperLLAPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    211. 

  211. 			<config default="30" name="UpperLLBPickCmdNO" description="UpperLLBPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    212. 

  212.       <config default="40" name="UpperLLAPlaceCmdNO" description="UpperLLAPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    213. 

  213.       <config default="40" name="UpperLLBPlaceCmdNO" description="UpperLLBPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    214. 

  214.       <config default="50" name="LowerLLAPickCmdNO" description="LowerLLAPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    215. 

  215. 			<config default="50" name="LowerLLBPickCmdNO" description="LowerLLBPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    216. 

  216.       <config default="60" name="LowerLLAPlaceCmdNO" description="LowerLLAPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    217. 

  217. 			<config default="60" name="LowerLLBPlaceCmdNO" description="LowerLLBPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    218. 

  218. 

  219.       <config default="31" name="UpperLLAPickReadyCmdNO" description="UpperLLAPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    220. 

  220. 			<config default="31" name="UpperLLBPickReadyCmdNO" description="UpperLLBPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    221. 

  221.       <config default="41" name="UpperLLAPlaceReadyCmdNO" description="UpperLLAPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    222. 

  222.       <config default="41" name="UpperLLBPlaceReadyCmdNO" description="UpperLLBPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    223. 

  223.       <config default="51" name="LowerLLAPickReadyCmdNO" description="LowerLLAPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    224. 

  224. 			<config default="51" name="LowerLLBPickReadyCmdNO" description="LowerLLBPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    225. 

  225.       <config default="61" name="LowerLLAPlaceReadyCmdNO" description="LowerLLAPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    226. 

  226. 			<config default="61" name="LowerLLBPlaceReadyCmdNO" description="LowerLLBPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    227. 

  227. 

  228.       <config default="150" name="UpperLLA1PickCmdNO" description="UpperLLA1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    229. 

  229.       <config default="151" name="UpperLLA1PickReadyCmdNO" description="UpperLLA1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    230. 

  230.       <config default="152" name="UpperLLA2PickCmdNO" description="UpperLLA2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    231. 

  231.       <config default="153" name="UpperLLA2PickReadyCmdNO" description="UpperLLA2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    232. 

  232.       <config default="154" name="UpperLLA3PickCmdNO" description="UpperLLA3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    233. 

  233.       <config default="155" name="UpperLLA3PickReadyCmdNO" description="UpperLLA3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    234. 

  234.       <config default="156" name="UpperLLA4PickCmdNO" description="UpperLLA4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    235. 

  235.       <config default="157" name="UpperLLA4PickReadyCmdNO" description="UpperLLA4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    236. 

  236.       <config default="158" name="UpperLLA5PickCmdNO" description="UpperLLA5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    237. 

  237.       <config default="159" name="UpperLLA5PickReadyCmdNO" description="UpperLLA5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    238. 

  238.       <config default="160" name="UpperLLA6PickCmdNO" description="UpperLLA6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    239. 

  239.       <config default="161" name="UpperLLA6PickReadyCmdNO" description="UpperLLA6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    240. 

  240.       <config default="162" name="UpperLLA7PickCmdNO" description="UpperLLA7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    241. 

  241.       <config default="163" name="UpperLLA7PickReadyCmdNO" description="UpperLLA7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    242. 

  242.       <config default="164" name="UpperLLA8PickCmdNO" description="UpperLLA8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    243. 

  243.       <config default="165" name="UpperLLA8PickReadyCmdNO" description="UpperLLA8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    244. 

  244. 

  245.       <config default="170" name="LowerLLA1PickCmdNO" description="LowerLLA1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    246. 

  246.       <config default="171" name="LowerLLA1PickReadyCmdNO" description="LowerLLA1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    247. 

  247.       <config default="172" name="LowerLLA2PickCmdNO" description="LowerLLA2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    248. 

  248.       <config default="173" name="LowerLLA2PickReadyCmdNO" description="LowerLLA2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    249. 

  249.       <config default="174" name="LowerLLA3PickCmdNO" description="LowerLLA3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    250. 

  250.       <config default="175" name="LowerLLA3PickReadyCmdNO" description="LowerLLA3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    251. 

  251.       <config default="176" name="LowerLLA4PickCmdNO" description="LowerLLA4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    252. 

  252.       <config default="177" name="LowerLLA4PickReadyCmdNO" description="LowerLLA4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    253. 

  253.       <config default="178" name="LowerLLA5PickCmdNO" description="LowerLLA5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    254. 

  254.       <config default="179" name="LowerLLA5PickReadyCmdNO" description="LowerLLA5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    255. 

  255.       <config default="180" name="LowerLLA6PickCmdNO" description="LowerLLA6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    256. 

  256.       <config default="181" name="LowerLLA6PickReadyCmdNO" description="LowerLLA6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    257. 

  257.       <config default="182" name="LowerLLA7PickCmdNO" description="LowerLLA7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    258. 

  258.       <config default="183" name="LowerLLA7PickReadyCmdNO" description="LowerLLA7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    259. 

  259.       <config default="184" name="LowerLLA8PickCmdNO" description="LowerLLA8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    260. 

  260.       <config default="185" name="LowerLLA8PickReadyCmdNO" description="LowerLLA8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    261. 

  261. 

  262.       <config default="190" name="UpperLLB1PlaceCmdNO" description="UpperLLB1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    263. 

  263.       <config default="191" name="UpperLLB1PlaceReadyCmdNO" description="UpperLLB1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    264. 

  264.       <config default="192" name="UpperLLB2PlaceCmdNO" description="UpperLLB2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    265. 

  265.       <config default="193" name="UpperLLB2PlaceReadyCmdNO" description="UpperLLB2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    266. 

  266.       <config default="194" name="UpperLLB3PlaceCmdNO" description="UpperLLB3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    267. 

  267.       <config default="195" name="UpperLLB3PlaceReadyCmdNO" description="UpperLLB3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    268. 

  268.       <config default="196" name="UpperLLB4PlaceCmdNO" description="UpperLLB4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    269. 

  269.       <config default="197" name="UpperLLB4PlaceReadyCmdNO" description="UpperLLB4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    270. 

  270.       <config default="198" name="UpperLLB5PlaceCmdNO" description="UpperLLB5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    271. 

  271.       <config default="199" name="UpperLLB5PlaceReadyCmdNO" description="UpperLLB5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    272. 

  272.       <config default="200" name="UpperLLB6PlaceCmdNO" description="UpperLLB6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    273. 

  273.       <config default="201" name="UpperLLB6PlaceReadyCmdNO" description="UpperLLB6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    274. 

  274.       <config default="202" name="UpperLLB7PlaceCmdNO" description="UpperLLB7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    275. 

  275.       <config default="203" name="UpperLLB7PlaceReadyCmdNO" description="UpperLLB7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    276. 

  276.       <config default="204" name="UpperLLB8PlaceCmdNO" description="UpperLLB8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    277. 

  277.       <config default="205" name="UpperLLB8PlaceReadyCmdNO" description="UpperLLB8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    278. 

  278. 

  279.       <config default="210" name="LowerLLB1PlaceCmdNO" description="LowerLLB1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    280. 

  280.       <config default="211" name="LowerLLB1PlaceReadyCmdNO" description="LowerLLB1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    281. 

  281.       <config default="212" name="LowerLLB2PlaceCmdNO" description="LowerLLB2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    282. 

  282.       <config default="213" name="LowerLLB2PlaceReadyCmdNO" description="LowerLLB2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    283. 

  283.       <config default="214" name="LowerLLB3PlaceCmdNO" description="LowerLLB3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    284. 

  284.       <config default="215" name="LowerLLB3PlaceReadyCmdNO" description="LowerLLB3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    285. 

  285.       <config default="216" name="LowerLLB4PlaceCmdNO" description="LowerLLB4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    286. 

  286.       <config default="217" name="LowerLLB4PlaceReadyCmdNO" description="LowerLLB4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    287. 

  287.       <config default="218" name="LowerLLB5PlaceCmdNO" description="LowerLLB5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    288. 

  288.       <config default="219" name="LowerLLB5PlaceReadyCmdNO" description="LowerLLB5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    289. 

  289.       <config default="220" name="LowerLLB6PlaceCmdNO" description="LowerLLB6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    290. 

  290.       <config default="221" name="LowerLLB6PlaceReadyCmdNO" description="LowerLLB6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    291. 

  291.       <config default="222" name="LowerLLB7PlaceCmdNO" description="LowerLLB7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    292. 

  292.       <config default="223" name="LowerLLB7PlaceReadyCmdNO" description="LowerLLB7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    293. 

  293.       <config default="224" name="LowerLLB8PlaceCmdNO" description="LowerLLB8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    294. 

  294.       <config default="225" name="LowerLLB8PlaceReadyCmdNO" description="LowerLLB8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    295. 

  295. 

  296.       <config default="230" name="UpperLLA1PlaceCmdNO" description="UpperLLA1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    297. 

  297.       <config default="231" name="UpperLLA1PlaceReadyCmdNO" description="UpperLLA1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    298. 

  298.       <config default="232" name="UpperLLA2PlaceCmdNO" description="UpperLLA2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    299. 

  299.       <config default="233" name="UpperLLA2PlaceReadyCmdNO" description="UpperLLA2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    300. 

  300.       <config default="234" name="UpperLLA3PlaceCmdNO" description="UpperLLA3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    301. 

  301.       <config default="235" name="UpperLLA3PlaceReadyCmdNO" description="UpperLLA3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    302. 

  302.       <config default="236" name="UpperLLA4PlaceCmdNO" description="UpperLLA4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    303. 

  303.       <config default="237" name="UpperLLA4PlaceReadyCmdNO" description="UpperLLA4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    304. 

  304.       <config default="238" name="UpperLLA5PlaceCmdNO" description="UpperLLA5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    305. 

  305.       <config default="239" name="UpperLLA5PlaceReadyCmdNO" description="UpperLLA5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    306. 

  306.       <config default="240" name="UpperLLA6PlaceCmdNO" description="UpperLLA6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    307. 

  307.       <config default="241" name="UpperLLA6PlaceReadyCmdNO" description="UpperLLA6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    308. 

  308.       <config default="242" name="UpperLLA7PlaceCmdNO" description="UpperLLA7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    309. 

  309.       <config default="243" name="UpperLLA7PlaceReadyCmdNO" description="UpperLLA7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    310. 

  310.       <config default="244" name="UpperLLA8PlaceCmdNO" description="UpperLLA8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    311. 

  311.       <config default="245" name="UpperLLA8PlaceReadyCmdNO" description="UpperLLA8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    312. 

  312. 

  313.       <config default="250" name="LowerLLA1PlaceCmdNO" description="LowerLLA1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    314. 

  314.       <config default="251" name="LowerLLA1PlaceReadyCmdNO" description="LowerLLA1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    315. 

  315.       <config default="252" name="LowerLLA2PlaceCmdNO" description="LowerLLA2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    316. 

  316.       <config default="253" name="LowerLLA2PlaceReadyCmdNO" description="LowerLLA2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    317. 

  317.       <config default="254" name="LowerLLA3PlaceCmdNO" description="LowerLLA3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    318. 

  318.       <config default="255" name="LowerLLA3PlaceReadyCmdNO" description="LowerLLA3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    319. 

  319.       <config default="256" name="LowerLLA4PlaceCmdNO" description="LowerLLA4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    320. 

  320.       <config default="257" name="LowerLLA4PlaceReadyCmdNO" description="LowerLLA4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    321. 

  321.       <config default="258" name="LowerLLA5PlaceCmdNO" description="LowerLLA5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    322. 

  322.       <config default="259" name="LowerLLA5PlaceReadyCmdNO" description="LowerLLA5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    323. 

  323.       <config default="260" name="LowerLLA6PlaceCmdNO" description="LowerLLA6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    324. 

  324.       <config default="261" name="LowerLLA6PlaceReadyCmdNO" description="LowerLLA6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    325. 

  325.       <config default="262" name="LowerLLA7PlaceCmdNO" description="LowerLLA7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    326. 

  326.       <config default="263" name="LowerLLA7PlaceReadyCmdNO" description="LowerLLA7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    327. 

  327.       <config default="264" name="LowerLLA8PlaceCmdNO" description="LowerLLA8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    328. 

  328.       <config default="265" name="LowerLLA8PlaceReadyCmdNO" description="LowerLLA8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    329. 

  329. 

  330.       <config default="270" name="UpperLLB1PickCmdNO" description="UpperLLB1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    331. 

  331.       <config default="271" name="UpperLLB1PickReadyCmdNO" description="UpperLLB1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    332. 

  332.       <config default="272" name="UpperLLB2PickCmdNO" description="UpperLLB2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    333. 

  333.       <config default="273" name="UpperLLB2PickReadyCmdNO" description="UpperLLB2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    334. 

  334.       <config default="274" name="UpperLLB3PickCmdNO" description="UpperLLB3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    335. 

  335.       <config default="275" name="UpperLLB3PickReadyCmdNO" description="UpperLLB3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    336. 

  336.       <config default="276" name="UpperLLB4PickCmdNO" description="UpperLLB4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    337. 

  337.       <config default="277" name="UpperLLB4PickReadyCmdNO" description="UpperLLB4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    338. 

  338.       <config default="278" name="UpperLLB5PickCmdNO" description="UpperLLB5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    339. 

  339.       <config default="279" name="UpperLLB5PickReadyCmdNO" description="UpperLLB5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    340. 

  340.       <config default="280" name="UpperLLB6PickCmdNO" description="UpperLLB6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    341. 

  341.       <config default="281" name="UpperLLB6PickReadyCmdNO" description="UpperLLB6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    342. 

  342.       <config default="282" name="UpperLLB7PickCmdNO" description="UpperLLB7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    343. 

  343.       <config default="283" name="UpperLLB7PickReadyCmdNO" description="UpperLLB7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    344. 

  344.       <config default="284" name="UpperLLB8PickCmdNO" description="UpperLLB8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    345. 

  345.       <config default="285" name="UpperLLB8PickReadyCmdNO" description="UpperLLB8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    346. 

  346. 

  347.       <config default="290" name="LowerLLB1PickCmdNO" description="LowerLLB1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    348. 

  348.       <config default="291" name="LowerLLB1PickReadyCmdNO" description="LowerLLB1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    349. 

  349.       <config default="292" name="LowerLLB2PickCmdNO" description="LowerLLB2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    350. 

  350.       <config default="293" name="LowerLLB2PickReadyCmdNO" description="LowerLLB2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    351. 

  351.       <config default="294" name="LowerLLB3PickCmdNO" description="LowerLLB3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    352. 

  352.       <config default="295" name="LowerLLB3PickReadyCmdNO" description="LowerLLB3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    353. 

  353.       <config default="296" name="LowerLLB4PickCmdNO" description="LowerLLB4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    354. 

  354.       <config default="297" name="LowerLLB4PickReadyCmdNO" description="LowerLLB4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    355. 

  355.       <config default="298" name="LowerLLB5PickCmdNO" description="LowerLLB5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    356. 

  356.       <config default="299" name="LowerLLB5PickReadyCmdNO" description="LowerLLB5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    357. 

  357.       <config default="300" name="LowerLLB6PickCmdNO" description="LowerLLB6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    358. 

  358.       <config default="301" name="LowerLLB6PickReadyCmdNO" description="LowerLLB6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    359. 

  359.       <config default="302" name="LowerLLB7PickCmdNO" description="LowerLLB7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    360. 

  360.       <config default="303" name="LowerLLB7PickReadyCmdNO" description="LowerLLB7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    361. 

  361.       <config default="304" name="LowerLLB8PickCmdNO" description="LowerLLB8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    362. 

  362.       <config default="305" name="LowerLLB8PickReadyCmdNO" description="LowerLLB8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    363. 

  363. 

  364. 

  365. 			<config default="80" name="UpperPMA1PickCmdNO" description="UpperPMA1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    366. 

  366. 			<config default="81" name="UpperPMA1PickBackCmdNO" description="UpperPMA1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    367. 

  367. 			<config default="82" name="UpperPMA2PickCmdNO" description="UpperPMA2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    368. 

  368. 			<config default="83" name="UpperPMA2PickBackCmdNO" description="UpperPMA2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    369. 

  369.       <config default="84" name="UpperPMB1PickCmdNO" description="UpperPMB1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    370. 

  370. 			<config default="85" name="UpperPMB1PickBackCmdNO" description="UpperPMB1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    371. 

  371.       <config default="86" name="UpperPMB2PickCmdNO" description="UpperPMB2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    372. 

  372. 			<config default="87" name="UpperPMB2PickBackCmdNO" description="UpperPMB2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    373. 

  373. 

  374. 			<config default="88" name="UpperPMA1PickReadyCmdNO" description="UpperPMA1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    375. 

  375. 			<config default="89" name="UpperPMA2PickReadyCmdNO" description="UpperPMA2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    376. 

  376. 			<config default="90" name="UpperPMB1PickReadyCmdNO" description="UpperPMB1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    377. 

  377. 			<config default="91" name="UpperPMB2PickReadyCmdNO" description="UpperPMB2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    378. 

  378. 

  379. 			<config default="95" name="UpperPMA1PlaceCmdNO" description="UpperPMA1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    380. 

  380. 			<config default="96" name="UpperPMA1PlaceBackCmdNO" description="UpperPMA1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    381. 

  381. 			<config default="97" name="UpperPMA2PlaceCmdNO" description="UpperPMA2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    382. 

  382. 			<config default="98" name="UpperPMA2PlaceBackCmdNO" description="UpperPMA2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    383. 

  383.       <config default="99" name="UpperPMB1PlaceCmdNO" description="UpperPMB1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    384. 

  384. 			<config default="100" name="UpperPMB1PlaceBackCmdNO" description="UpperPMB1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    385. 

  385. 			<config default="101" name="UpperPMB2PlaceCmdNO" description="UpperPMB2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    386. 

  386. 			<config default="102" name="UpperPMB2PlaceBackCmdNO" description="UpperPMB2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    387. 

  387. 

  388.       <config default="103" name="UpperPMA1PlaceReadyCmdNO" description="UpperPMA1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    389. 

  389.       <config default="104" name="UpperPMA2PlaceReadyCmdNO" description="UpperPMA2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    390. 

  390.       <config default="105" name="UpperPMB1PlaceReadyCmdNO" description="UpperPMB1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    391. 

  391.       <config default="106" name="UpperPMB2PlaceReadyCmdNO" description="UpperPMB2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    392. 

  392. 

  393.       <config default="110" name="LowerPMA1PickCmdNO" description="LowerPMA1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    394. 

  394. 			<config default="111" name="LowerPMA1PickBackCmdNO" description="LowerPMA1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    395. 

  395. 			<config default="112" name="LowerPMA2PickCmdNO" description="LowerPMA2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    396. 

  396. 			<config default="113" name="LowerPMA2PickBackCmdNO" description="LowerPMA2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    397. 

  397.       <config default="114" name="LowerPMB1PickCmdNO" description="LowerPMB1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    398. 

  398. 			<config default="115" name="LowerPMB1PickBackCmdNO" description="LowerPMB1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    399. 

  399. 			<config default="116" name="LowerPMB2PickCmdNO" description="LowerPMB2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    400. 

  400. 			<config default="117" name="LowerPMB2PickBackCmdNO" description="LowerPMB2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    401. 

  401. 

  402.       <config default="118" name="LowerPMA1PickReadyCmdNO" description="LowerPMA1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    403. 

  403.       <config default="119" name="LowerPMA2PickReadyCmdNO" description="LowerPMA2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    404. 

  404.       <config default="120" name="LowerPMB1PickReadyCmdNO" description="LowerPMB1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    405. 

  405.       <config default="121" name="LowerPMB2PickReadyCmdNO" description="LowerPMB2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    406. 

  406. 

  407.       <config default="125" name="LowerPMA1PlaceCmdNO" description="LowerPMA1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    408. 

  408.       <config default="126" name="LowerPMA1PlaceBackCmdNO" description="LowerPMA1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    409. 

  409.       <config default="127" name="LowerPMA2PlaceCmdNO" description="LowerPMA2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    410. 

  410.       <config default="128" name="LowerPMA2PlaceBackCmdNO" description="LowerPMA2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    411. 

  411.       <config default="129" name="LowerPMB1PlaceCmdNO" description="LowerPMB1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    412. 

  412.       <config default="130" name="LowerPMB1PlaceBackCmdNO" description="LowerPMB1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    413. 

  413.       <config default="131" name="LowerPMB2PlaceCmdNO" description="LowerPMB2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    414. 

  414.       <config default="132" name="LowerPMB2PlaceBackCmdNO" description="LowerPMB2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    415. 

  415. 

  416.       <config default="133" name="LowerPMA1PlaceReadyCmdNO" description="LowerPMA1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    417. 

  417.       <config default="134" name="LowerPMA2PlaceReadyCmdNO" description="LowerPMA2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    418. 

  418.       <config default="135" name="LowerPMB1PlaceReadyCmdNO" description="LowerPMB1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    419. 

  419.       <config default="136" name="LowerPMB2PlaceReadyCmdNO" description="LowerPMB2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    420. 

  420.     </configs>
    421. 

  421. 		<configs name="FFU">
    422. 

  422.       <config default="COM17" name="Address" description="FFU COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    423. 

  423. 			<config default="1" name="DeviceAddress" description="风机地址" max="1" min="1" paramter="" tag="" unit="s" type="Integer" />
    424. 

  424. 			<config default="1440" name="MaxSpeed" description="最高转速" max="1440" min="1440" paramter="" tag="" unit="s" type="Integer" />
    425. 

  425.       <config default="true" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    426. 

  426. 

  427.     </configs>
    428. 

  428. 	</configs>
    429. 

  429. 

  430.   <configs name="EFEM">
    431. 

  431. 		<config default="30" name="HomeTimeout" description="EFEM初始化超时时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    432. 

  432. 		<config default="192.168.2.8:13000" name="Address" description="地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    433. 

  433.     <config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
    434. 

  434.     <config default="false" name="IgnoreIonizerError" nameView="Ignore Ionizer alarm" description="是否忽略离子发生器报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
    435. 

  435.     <config default="false" name="IgnoreFFUError" nameView="Ignore FFU alarm" description="是否忽略FFU报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
    436. 

  436. 		<configs name="LoadPort">
    437. 

  437. 			<config default="30" name="MotionTimeout" description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    438. 

  438. 			<config default="30" name="HomeTimeout" description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    439. 

  439.       <config default="true" name="EnableAutoUnloadFoup" description="Enable Auto Unload Foup" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    440. 

  440. 			<config default="true" name="EnableAutoCarrierIdRead" description="自动读取Carrier ID" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    441. 

  441. 			<config default="25" name="SlotNumber" description="Slot Number" max="60" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    442. 

  442. 			<config default="25" name="CassetteSlotNumber" description="Cassette slot number" max="30" min="1" paramter="" tag="" unit="" type="Integer" visible="false" />
    443. 

  443.     			</configs>
    444. 

  444. 		<configs name="EfemRobot">
    445. 

  445. 			<config default="10" name="PickTimeout" description="取片超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    446. 

  446. 			<config default="10" name="PlaceTimeout" description="放片超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    447. 

  447. 			<config default="10" name="HomeTimeout" description="初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    448. 

  448. 			<config default="20" name="MapTimeout" description="Map超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    449. 

  449. 			<config default="20" name="GotoTimeout" description="Goto超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    450. 

  450. 

  451.       <config default="true" name="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    452. 

  452.       <config default="true" name="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    453. 

  453. 

  454.       <config default="12" name="DefaultMapWaferSize" description="Default Map Wafer Size" max="0" min="0" paramter="8;12" tag="ReadOnlySelection" unit="" type="String" />
    455. 

  455. 

  456.     </configs>
    457. 

  457. 		<configs name="Aligner">
    458. 

  458. 			<config default="30" name="HomeTimeout" description="HomeTimeout" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
    459. 

  459. 			<config default="30" name="AlignTimeout" description="AlignTimeout" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
    460. 

  460. 			<config default="10" name="DefaultNotchDegree" description="DefaultNotchDegree" max="360" min="0" paramter="" tag="" unit="" type="Integer"/>
    461. 

  461. 		</configs>
    462. 

  462. 	</configs>
    463. 

  463. 

  464. 

  465. 

  466. 	<configs name="PMA">
    467. 

  467. 

  468. 		<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    469. 

  469. 		<config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    470. 

  470. 		<config default="30" name="PrepareTransferTimeout" description="PrepareTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    471. 

  471. 

  472.     <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    473. 

  473.     <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    474. 

  474.     <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    475. 

  475.     <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    476. 

  476.     <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    477. 

  477.     <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    478. 

  478.     <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    479. 

  479.     <config default="120" name="CheckChamberTempTimeout" nameView="Check Chamber Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    480. 

  480.     <config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    481. 

  481.     <config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    482. 

  482.     <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    483. 

  483.     <config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    484. 

  484.     <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    485. 

  485.     <config default="0" name="PlaceAndPickDelayTime" nameView="Place And Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    486. 

  486. 

  487.     <!--<config default="150" name="ChamberHeater1SetPointLimit" nameView="Chamber Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />-->
    488. 

  488.     <config default="150" name="HeaterChamberSetPointLimit" nameView="Chamber Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    489. 

  489.     <config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    490. 

  490.     <config default="140" name="LEHeaterSetPointLimit1" nameView="LE Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    491. 

  491.     <config default="140" name="LEHeaterSetPointLimit2" nameView="LE Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    492. 

  492. 	<config default="false" name="EnableChamberWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    493. 

  493. 		 <config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    494. 

  494. 

  495. 

  496. 		<configs name="MFCVerification" nameView="MFC Verification" >
    497. 

  497.       <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    498. 

  498.       <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    499. 

  499.       <config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    500. 

  500.       <config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    501. 

  501.       <config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    502. 

  502.       <config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    503. 

  503.       <config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    504. 

  504.       <config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    505. 

  505.     </configs>
    506. 

  506. 

  507.     <configs name="Chiller1" nameView="Chiller1" >
    508. 

  508. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    509. 

  509. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    510. 

  510. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    511. 

  511. 			<config default="COM21" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    512. 

  512. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    513. 

  513. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    514. 

  514. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    515. 

  515. 		</configs>
    516. 

  516.     <configs name="Chiller2" nameView="Chiller2" >
    517. 

  517. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    518. 

  518. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    519. 

  519. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    520. 

  520. 			<config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    521. 

  521. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    522. 

  522. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    523. 

  523. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    524. 

  524. 		</configs>
    525. 

  525. 		<configs name="ElectrodeHeart1" nameView="Electrode Heart1" >
    526. 

  526. 			<config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    527. 

  527. 		</configs>
    528. 

  528. 		<configs name="ElectrodeHeart2" nameView="Electrode Heart1" >
    529. 

  529. 			<config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    530. 

  530. 		</configs>
    531. 

  531. 		<configs name="DryPump" nameView="Dry Pump" >
    532. 

  532. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    533. 

  533. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    534. 

  534. 			<config default="COM23" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    535. 

  535. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    536. 

  536. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    537. 

  537. 		</configs>
    538. 

  538. 		<configs name="Rf1" nameView="Source RF" >
    539. 

  539. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    540. 

  540. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    541. 

  541. 			<config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    542. 

  542. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="RF1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    543. 

  543. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    544. 

  544. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    545. 

  545. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    546. 

  546. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    547. 

  547. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    548. 

  548. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    549. 

  549. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    550. 

  550. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    551. 

  551. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    552. 

  552.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    553. 

  553. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    554. 

  554. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    555. 

  555. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    556. 

  556. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    557. 

  557. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    558. 

  558. 		</configs>
    559. 

  559. 		<configs name="Rf2" nameView="Source RF2" >
    560. 

  560. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    561. 

  561. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    562. 

  562. 			<config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    563. 

  563. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="RF2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    564. 

  564. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    565. 

  565. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    566. 

  566. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    567. 

  567. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    568. 

  568. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    569. 

  569. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    570. 

  570. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    571. 

  571. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    572. 

  572. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    573. 

  573.      <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    574. 

  574.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    575. 

  575.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    576. 

  576.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    577. 

  577.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    578. 

  578.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    579. 

  579. 		</configs>
    580. 

  580. 		<configs name="match1" nameView="Source Match" >
    581. 

  581. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    582. 

  582. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    583. 

  583. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    584. 

  584. 			<config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    585. 

  585. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    586. 

  586. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    587. 

  587. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    588. 

  588. 			<!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    589. 

  589. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    590. 

  590. 		</configs>
    591. 

  591. 		<configs name="match2" nameView="Source Match" >
    592. 

  592. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    593. 

  593. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    594. 

  594. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    595. 

  595. 			<config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    596. 

  596. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    597. 

  597. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    598. 

  598. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    599. 

  599. 			<!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    600. 

  600. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    601. 

  601. 		</configs>
    602. 

  602. 		<configs name="BiasRf1" nameView="Bias RF" >
    603. 

  603. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    604. 

  604. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    605. 

  605. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    606. 

  606. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    607. 

  607. 			<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    608. 

  608. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    609. 

  609. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    610. 

  610. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    611. 

  611. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    612. 

  612. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    613. 

  613. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    614. 

  614. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    615. 

  615. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    616. 

  616. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    617. 

  617. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    618. 

  618. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    619. 

  619. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    620. 

  620. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    621. 

  621. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    622. 

  622. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    623. 

  623. 		</configs>
    624. 

  624. 		<configs name="BiasRf2" nameView="Bias RF2" >
    625. 

  625. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    626. 

  626. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    627. 

  627. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    628. 

  628. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    629. 

  629. 			<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    630. 

  630. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    631. 

  631. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    632. 

  632. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    633. 

  633. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    634. 

  634. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    635. 

  635. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    636. 

  636. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    637. 

  637. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    638. 

  638. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    639. 

  639. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    640. 

  640. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    641. 

  641. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    642. 

  642. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    643. 

  643. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    644. 

  644. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    645. 

  645. 		</configs>
    646. 

  646. 		<configs name="BiasRf1Match" nameView="Bias Match" >
    647. 

  647. 			<config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    648. 

  648. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    649. 

  649. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    650. 

  650. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    651. 

  651. 			<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    652. 

  652. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    653. 

  653. 			<config default="false" name="EnableC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    654. 

  654. 		</configs>
    655. 

  655. 		<configs name="BiasRf2Match" nameView="Bias Match2" >
    656. 

  656. 			<config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    657. 

  657. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    658. 

  658. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    659. 

  659. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    660. 

  660. 			<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    661. 

  661. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    662. 

  662. 			<config default="false" name="EnableC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    663. 

  663. 		</configs>
    664. 

  664. 		<configs name="MfcGas1" nameView="MFC Gas1" >
    665. 

  665. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    666. 

  666. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    667. 

  667. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    668. 

  668. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    669. 

  669. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    670. 

  670. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    671. 

  671. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    672. 

  672. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    673. 

  673. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    674. 

  674. 		</configs>
    675. 

  675. 		<configs name="MfcGas2" nameView="MFC Gas2" >
    676. 

  676. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    677. 

  677. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    678. 

  678. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    679. 

  679. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    680. 

  680. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    681. 

  681. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    682. 

  682. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    683. 

  683. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    684. 

  684. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    685. 

  685. 		</configs>
    686. 

  686. 		<configs name="MfcGas3" nameView="MFC Gas3" >
    687. 

  687. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    688. 

  688. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    689. 

  689. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    690. 

  690. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    691. 

  691. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    692. 

  692. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    693. 

  693. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    694. 

  694. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    695. 

  695. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    696. 

  696. 		</configs>
    697. 

  697. 		<configs name="MfcGas4" nameView="MFC Gas4" >
    698. 

  698. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    699. 

  699. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    700. 

  700. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    701. 

  701. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    702. 

  702. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    703. 

  703. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    704. 

  704. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    705. 

  705. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    706. 

  706. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    707. 

  707. 		</configs>
    708. 

  708. 		<configs name="MfcGas5" nameView="MFC Gas5" >
    709. 

  709. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    710. 

  710. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    711. 

  711. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    712. 

  712. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    713. 

  713. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    714. 

  714. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    715. 

  715. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    716. 

  716. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    717. 

  717. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    718. 

  718. 		</configs>
    719. 

  719. 		<configs name="MfcGas6" nameView="MFC Gas6" >
    720. 

  720. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    721. 

  721. 			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    722. 

  722. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    723. 

  723. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    724. 

  724. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    725. 

  725. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    726. 

  726. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    727. 

  727. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    728. 

  728. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    729. 

  729. 		</configs>
    730. 

  730. 		<configs name="Pump" nameView="Pump" >
    731. 

  731. 			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    732. 

  732. 			<config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    733. 

  733. 			<config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    734. 

  734. 			<config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    735. 

  735. 			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    736. 

  736. 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    737. 

  737. 		</configs>
    738. 

  738. 		<configs name="Purge" nameView="Purge" >
    739. 

  739. 			<config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    740. 

  740. 			<config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    741. 

  741. 			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    742. 

  742. 			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    743. 

  743. 			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    744. 

  744. 			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    745. 

  745. 			<config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    746. 

  746. 		</configs>
    747. 

  747. 		<configs name="HeaterChamber" nameView="Heater Chamber" >
    748. 

  748. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    749. 

  749. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    750. 

  750. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    751. 

  751. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    752. 

  752. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    753. 

  753. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    754. 

  754. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    755. 

  755. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    756. 

  756. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    757. 

  757. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    758. 

  758. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    759. 

  759. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    760. 

  760. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    761. 

  761. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    762. 

  762. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    763. 

  763. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    764. 

  764. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    765. 

  765. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    766. 

  766. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    767. 

  767. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    768. 

  768. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    769. 

  769. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    770. 

  770. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    771. 

  771. 		</configs>
    772. 

  772.     <configs name="IdleClean" nameView="Idle Clean" visible="false">
    773. 

  773.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    774. 

  774.       <config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    775. 

  775.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    776. 

  776.     </configs>
    777. 

  777.     <configs name="JobClean" nameView="Job Clean" visible="false">
    778. 

  778.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    779. 

  779.       <config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    780. 

  780.       <config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    781. 

  781.       <config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    782. 

  782.       <config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    783. 

  783.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    784. 

  784.     </configs>
    785. 

  785.     <configs name="EPD" nameView="EPD Setting">
    786. 

  786.       <config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    787. 

  787.       <config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    788. 

  788.     </configs>
    789. 

  789. 	</configs>
    790. 

  790. 	<configs name="PMB">
    791. 

  791.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    792. 

  792.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    793. 

  793.     <config default="30" name="PrepareTransferTimeout" description="PrepareTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    794. 

  794. 

  795.     <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    796. 

  796.     <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    797. 

  797.     <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    798. 

  798.     <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    799. 

  799.     <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    800. 

  800.     <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    801. 

  801.     <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    802. 

  802.     <config default="120" name="CheckChamberTempTimeout" nameView="Check Chamber Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    803. 

  803.     <config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    804. 

  804.     <config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    805. 

  805.     <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    806. 

  806.     <config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    807. 

  807.     <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    808. 

  808.     <config default="0" name="PlaceAndPickDelayTime" nameView="Place And Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    809. 

  809. 

  810.     <!--<config default="150" name="ChamberHeater1SetPointLimit" nameView="Chamber Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />-->
    811. 

  811.     <config default="150" name="HeaterChamberSetPointLimit" nameView="Chamber Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    812. 

  812.     <config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    813. 

  813.     <config default="140" name="LEHeaterSetPointLimit1" nameView="LE Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    814. 

  814.     <config default="140" name="LEHeaterSetPointLimit2" nameView="LE Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    815. 

  815. 		<config default="false" name="EnableChamberWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    816. 

  816. 		 <config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    817. 

  817. 

  818. 

  819. 

  820. 		<configs name="MFCVerification" nameView="MFC Verification" >
    821. 

  821.       <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    822. 

  822.       <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    823. 

  823.       <config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    824. 

  824.       <config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    825. 

  825.       <config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    826. 

  826.       <config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    827. 

  827.       <config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    828. 

  828.       <config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    829. 

  829.     </configs>
    830. 

  830. 

  831.     <configs name="Chiller1" nameView="Chiller" >
    832. 

  832.         <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    833. 

  833.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    834. 

  834.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    835. 

  835.       <config default="COM21" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    836. 

  836.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    837. 

  837.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    838. 

  838.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    839. 

  839.     </configs>
    840. 

  840.     <configs name="Chiller2" nameView="Chiller" >
    841. 

  841.        <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    842. 

  842.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    843. 

  843.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    844. 

  844.       <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    845. 

  845.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    846. 

  846.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    847. 

  847.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    848. 

  848.     </configs>
    849. 

  849.     <configs name="ElectrodeHeart1" nameView="Electrode Heart1" >
    850. 

  850.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    851. 

  851.     </configs>
    852. 

  852.     <configs name="ElectrodeHeart2" nameView="Electrode Heart1" >
    853. 

  853.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    854. 

  854.     </configs>
    855. 

  855.     <configs name="DryPump" nameView="Dry Pump" >
    856. 

  856.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    857. 

  857.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    858. 

  858.       <config default="COM23" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    859. 

  859.       <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    860. 

  860.       <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    861. 

  861.     </configs>
    862. 

  862.     <configs name="Rf1" nameView="Source RF" >
    863. 

  863.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    864. 

  864.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    865. 

  865.       <config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    866. 

  866.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    867. 

  867.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    868. 

  868.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    869. 

  869.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    870. 

  870.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    871. 

  871.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    872. 

  872.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    873. 

  873.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    874. 

  874.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    875. 

  875.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    876. 

  876.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    877. 

  877.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    878. 

  878.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    879. 

  879.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    880. 

  880.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    881. 

  881.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    882. 

  882.     </configs>
    883. 

  883.     <configs name="Rf2" nameView="Source RF2" >
    884. 

  884.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    885. 

  885.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    886. 

  886.       <config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    887. 

  887.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    888. 

  888.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    889. 

  889.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    890. 

  890.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    891. 

  891.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    892. 

  892.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    893. 

  893.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    894. 

  894.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    895. 

  895.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    896. 

  896.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    897. 

  897.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    898. 

  898.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    899. 

  899.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    900. 

  900.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    901. 

  901.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    902. 

  902.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    903. 

  903.     </configs>
    904. 

  904.     <configs name="match1" nameView="Source Match" >
    905. 

  905.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    906. 

  906.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    907. 

  907.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    908. 

  908.       <config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    909. 

  909.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    910. 

  910.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    911. 

  911.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    912. 

  912.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    913. 

  913. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    914. 

  914.     </configs>
    915. 

  915.     <configs name="match2" nameView="Source Match" >
    916. 

  916.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    917. 

  917.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    918. 

  918.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    919. 

  919.       <config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    920. 

  920.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    921. 

  921.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    922. 

  922.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    923. 

  923.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    924. 

  924. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    925. 

  925.     </configs>
    926. 

  926.     <configs name="BiasRf1" nameView="Bias RF" >
    927. 

  927.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    928. 

  928.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    929. 

  929.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    930. 

  930.       <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    931. 

  931.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    932. 

  932.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    933. 

  933.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    934. 

  934.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    935. 

  935.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    936. 

  936.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    937. 

  937.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    938. 

  938.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    939. 

  939.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    940. 

  940.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    941. 

  941.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    942. 

  942.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    943. 

  943.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    944. 

  944.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    945. 

  945.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    946. 

  946. 		<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    947. 

  947.     </configs>
    948. 

  948.     <configs name="BiasRf2" nameView="Bias RF2" >
    949. 

  949.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    950. 

  950.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    951. 

  951.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    952. 

  952.       <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    953. 

  953.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    954. 

  954.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    955. 

  955.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    956. 

  956.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    957. 

  957.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    958. 

  958.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    959. 

  959.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    960. 

  960.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    961. 

  961.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    962. 

  962.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    963. 

  963.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    964. 

  964.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    965. 

  965.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    966. 

  966.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    967. 

  967.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    968. 

  968. 		<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    969. 

  969.     </configs>
    970. 

  970.     <configs name="BiasRf1Match" nameView="Bias Match" >
    971. 

  971.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    972. 

  972.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    973. 

  973.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    974. 

  974.       <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    975. 

  975.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    976. 

  976.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    977. 

  977.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    978. 

  978.     </configs>
    979. 

  979.     <configs name="BiasRf2Match" nameView="Bias Match2" >
    980. 

  980.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    981. 

  981.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    982. 

  982.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    983. 

  983.       <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    984. 

  984.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    985. 

  985.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    986. 

  986.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    987. 

  987.     </configs>
    988. 

  988.     <configs name="MfcGas1" nameView="MFC Gas1" >
    989. 

  989.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    990. 

  990.       <config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    991. 

  991.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    992. 

  992.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    993. 

  993.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    994. 

  994.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    995. 

  995.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    996. 

  996.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    997. 

  997.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    998. 

  998.     </configs>
    999. 

  999.     <configs name="MfcGas2" nameView="MFC Gas2" >
    1000. 

  1000.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    1001. 

  1001.       <config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    1002. 

  1002.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1003. 

  1003.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1004. 

  1004.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1005. 

  1005.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1006. 

  1006.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1007. 

  1007.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1008. 

  1008.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1009. 

  1009.     </configs>
    1010. 

  1010.     <configs name="MfcGas3" nameView="MFC Gas3" >
    1011. 

  1011.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    1012. 

  1012.       <config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    1013. 

  1013.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1014. 

  1014.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1015. 

  1015.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1016. 

  1016.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1017. 

  1017.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1018. 

  1018.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1019. 

  1019.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1020. 

  1020.     </configs>
    1021. 

  1021.     <configs name="MfcGas4" nameView="MFC Gas4" >
    1022. 

  1022.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    1023. 

  1023.       <config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    1024. 

  1024.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1025. 

  1025.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1026. 

  1026.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1027. 

  1027.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1028. 

  1028.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1029. 

  1029.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1030. 

  1030.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1031. 

  1031.     </configs>
    1032. 

  1032.     <configs name="MfcGas5" nameView="MFC Gas5" >
    1033. 

  1033.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    1034. 

  1034.       <config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    1035. 

  1035.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1036. 

  1036.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1037. 

  1037.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1038. 

  1038.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1039. 

  1039.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1040. 

  1040.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1041. 

  1041.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1042. 

  1042.     </configs>
    1043. 

  1043.     <configs name="MfcGas6" nameView="MFC Gas6" >
    1044. 

  1044.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    1045. 

  1045.       <config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    1046. 

  1046.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1047. 

  1047.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1048. 

  1048.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1049. 

  1049.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1050. 

  1050.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1051. 

  1051.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1052. 

  1052.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1053. 

  1053.     </configs>
    1054. 

  1054.     <configs name="Pump" nameView="Pump" >
    1055. 

  1055.       <config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    1056. 

  1056.       <config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1057. 

  1057.       <config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1058. 

  1058.       <config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1059. 

  1059.       <config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    1060. 

  1060.       <config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1061. 

  1061.     </configs>
    1062. 

  1062.     <configs name="Purge" nameView="Purge" >
    1063. 

  1063.       <config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    1064. 

  1064.       <config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1065. 

  1065.       <config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1066. 

  1066.       <config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1067. 

  1067.       <config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1068. 

  1068.       <config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1069. 

  1069.       <config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1070. 

  1070.     </configs>
    1071. 

  1071.     <configs name="HeaterChamber" nameView="Heater Chamber" >
    1072. 

  1072. 		<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1073. 

  1073. 		<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1074. 

  1074. 		<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1075. 

  1075. 		<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1076. 

  1076. 		<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1077. 

  1077.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1078. 

  1078.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1079. 

  1079.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1080. 

  1080.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1081. 

  1081.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1082. 

  1082.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1083. 

  1083.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1084. 

  1084.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1085. 

  1085.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1086. 

  1086.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1087. 

  1087.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1088. 

  1088.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1089. 

  1089.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1090. 

  1090.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1091. 

  1091.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1092. 

  1092.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1093. 

  1093.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1094. 

  1094.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1095. 

  1095.     </configs>
    1096. 

  1096.     <configs name="IdleClean" nameView="Idle Clean" visible="false">
    1097. 

  1097.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1098. 

  1098.       <config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1099. 

  1099.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1100. 

  1100.     </configs>
    1101. 

  1101.     <configs name="JobClean" nameView="Job Clean" visible="false">
    1102. 

  1102.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1103. 

  1103.       <config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1104. 

  1104.       <config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1105. 

  1105.       <config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1106. 

  1106.       <config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1107. 

  1107.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1108. 

  1108.     </configs>
    1109. 

  1109.     <configs name="EPD" nameView="EPD Setting">
    1110. 

  1110.       <config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1111. 

  1111.       <config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1112. 

  1112.     </configs>
    1113. 

  1113.   </configs>
    1114. 

  1114. 	<configs name="PMC">
    1115. 

  1115. 

  1116.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    1117. 

  1117.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    1118. 

  1118.     <config default="30" name="PrepareTransferTimeout" description="PrepareTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    1119. 

  1119. 

  1120.     <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1121. 

  1121.     <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1122. 

  1122.     <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1123. 

  1123.     <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1124. 

  1124.     <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    1125. 

  1125.     <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1126. 

  1126.     <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1127. 

  1127.     <config default="120" name="CheckChamberTempTimeout" nameView="Check Chamber Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    1128. 

  1128.     <config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1129. 

  1129.     <config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1130. 

  1130.     <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1131. 

  1131.     <config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    1132. 

  1132.     <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1133. 

  1133.     <config default="0" name="PlaceAndPickDelayTime" nameView="Place And Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    1134. 

  1134. 

  1135.     <!--<config default="150" name="ChamberHeater1SetPointLimit" nameView="Chamber Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />-->
    1136. 

  1136.     <config default="150" name="HeaterChamberSetPointLimit" nameView="Chamber Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1137. 

  1137.     <config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1138. 

  1138.     <config default="140" name="LEHeaterSetPointLimit1" nameView="LE Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1139. 

  1139.     <config default="140" name="LEHeaterSetPointLimit2" nameView="LE Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1140. 

  1140. 		 <config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    1141. 

  1141. 

  1142.     <configs name="MFCVerification" nameView="MFC Verification" >
    1143. 

  1143.       <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    1144. 

  1144.       <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    1145. 

  1145.       <config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    1146. 

  1146.       <config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    1147. 

  1147.       <config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1148. 

  1148.       <config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    1149. 

  1149.       <config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1150. 

  1150.       <config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    1151. 

  1151.     </configs>
    1152. 

  1152. 

  1153.     <configs name="Chiller1" nameView="Chiller1" >
    1154. 

  1154.        <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1155. 

  1155.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1156. 

  1156.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1157. 

  1157.       <config default="COM21" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1158. 

  1158.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1159. 

  1159.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1160. 

  1160.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1161. 

  1161.     </configs>
    1162. 

  1162.     <configs name="Chiller2" nameView="Chiller2" >
    1163. 

  1163.        <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1164. 

  1164.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1165. 

  1165.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1166. 

  1166.       <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1167. 

  1167.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1168. 

  1168.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1169. 

  1169.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1170. 

  1170.     </configs>
    1171. 

  1171. 	<configs name="ElectrodeHeart1" nameView="Electrode Heart1" >
    1172. 

  1172. 		<config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    1173. 

  1173. 	</configs>
    1174. 

  1174. 	<configs name="ElectrodeHeart2" nameView="Electrode Heart1" >
    1175. 

  1175. 		<config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    1176. 

  1176. 	</configs>
    1177. 

  1177.     <configs name="DryPump" nameView="Dry Pump" >
    1178. 

  1178.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1179. 

  1179.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1180. 

  1180.       <config default="COM23" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1181. 

  1181.       <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1182. 

  1182.       <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1183. 

  1183.     </configs>
    1184. 

  1184.     <configs name="Rf1" nameView="Source RF" >
    1185. 

  1185.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1186. 

  1186.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1187. 

  1187.       <config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1188. 

  1188.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1189. 

  1189.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1190. 

  1190.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1191. 

  1191.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1192. 

  1192.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1193. 

  1193.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1194. 

  1194.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1195. 

  1195.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1196. 

  1196.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1197. 

  1197.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1198. 

  1198.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1199. 

  1199.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1200. 

  1200.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1201. 

  1201.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1202. 

  1202.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1203. 

  1203.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1204. 

  1204.     </configs>
    1205. 

  1205.     <configs name="Rf2" nameView="Source RF2" >
    1206. 

  1206.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1207. 

  1207.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1208. 

  1208.       <config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1209. 

  1209.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1210. 

  1210.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1211. 

  1211.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1212. 

  1212.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1213. 

  1213.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1214. 

  1214.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1215. 

  1215.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1216. 

  1216.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1217. 

  1217.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1218. 

  1218.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1219. 

  1219.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1220. 

  1220.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1221. 

  1221.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1222. 

  1222.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1223. 

  1223.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1224. 

  1224.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1225. 

  1225.     </configs>
    1226. 

  1226.     <configs name="match1" nameView="Source Match" >
    1227. 

  1227.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1228. 

  1228.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1229. 

  1229.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1230. 

  1230.       <config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1231. 

  1231.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1232. 

  1232.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1233. 

  1233.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1234. 

  1234.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    1235. 

  1235. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    1236. 

  1236.     </configs>
    1237. 

  1237.     <configs name="match2" nameView="Source Match" >
    1238. 

  1238.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1239. 

  1239.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1240. 

  1240.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1241. 

  1241.       <config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1242. 

  1242.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1243. 

  1243.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1244. 

  1244.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1245. 

  1245.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    1246. 

  1246. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    1247. 

  1247.     </configs>
    1248. 

  1248.     <configs name="BiasRf1" nameView="Bias RF" >
    1249. 

  1249.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1250. 

  1250.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1251. 

  1251.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1252. 

  1252.       <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1253. 

  1253.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1254. 

  1254.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1255. 

  1255.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1256. 

  1256.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1257. 

  1257.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1258. 

  1258.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1259. 

  1259.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1260. 

  1260.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1261. 

  1261.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1262. 

  1262.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1263. 

  1263.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1264. 

  1264.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1265. 

  1265.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1266. 

  1266.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1267. 

  1267.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1268. 

  1268.     </configs>
    1269. 

  1269.     <configs name="BiasRf2" nameView="Bias RF2" >
    1270. 

  1270.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1271. 

  1271.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1272. 

  1272.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1273. 

  1273.       <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1274. 

  1274.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1275. 

  1275.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1276. 

  1276.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1277. 

  1277.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1278. 

  1278.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1279. 

  1279.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1280. 

  1280.       <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1281. 

  1281.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1282. 

  1282.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1283. 

  1283.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1284. 

  1284.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1285. 

  1285.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1286. 

  1286.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1287. 

  1287.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1288. 

  1288.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1289. 

  1289.     </configs>
    1290. 

  1290.     <configs name="BiasRf1Match" nameView="Bias Match" >
    1291. 

  1291.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1292. 

  1292.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1293. 

  1293.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1294. 

  1294.       <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1295. 

  1295.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1296. 

  1296.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1297. 

  1297.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1298. 

  1298.     </configs>
    1299. 

  1299.     <configs name="BiasRf2Match" nameView="Bias Match2" >
    1300. 

  1300.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1301. 

  1301.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1302. 

  1302.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1303. 

  1303.       <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1304. 

  1304.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1305. 

  1305.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1306. 

  1306.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1307. 

  1307.     </configs>
    1308. 

  1308.     <configs name="MfcGas1" nameView="MFC Gas1" >
    1309. 

  1309.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    1310. 

  1310.       <config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    1311. 

  1311.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1312. 

  1312.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1313. 

  1313.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1314. 

  1314.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1315. 

  1315.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1316. 

  1316.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1317. 

  1317.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1318. 

  1318.     </configs>
    1319. 

  1319.     <configs name="MfcGas2" nameView="MFC Gas2" >
    1320. 

  1320.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    1321. 

  1321.       <config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    1322. 

  1322.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1323. 

  1323.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1324. 

  1324.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1325. 

  1325.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1326. 

  1326.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1327. 

  1327.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1328. 

  1328.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1329. 

  1329.     </configs>
    1330. 

  1330.     <configs name="MfcGas3" nameView="MFC Gas3" >
    1331. 

  1331.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    1332. 

  1332.       <config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    1333. 

  1333.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1334. 

  1334.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1335. 

  1335.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1336. 

  1336.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1337. 

  1337.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1338. 

  1338.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1339. 

  1339.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1340. 

  1340.     </configs>
    1341. 

  1341.     <configs name="MfcGas4" nameView="MFC Gas4" >
    1342. 

  1342.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    1343. 

  1343.       <config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    1344. 

  1344.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1345. 

  1345.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1346. 

  1346.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1347. 

  1347.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1348. 

  1348.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1349. 

  1349.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1350. 

  1350.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1351. 

  1351.     </configs>
    1352. 

  1352.     <configs name="MfcGas5" nameView="MFC Gas5" >
    1353. 

  1353.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    1354. 

  1354.       <config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    1355. 

  1355.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1356. 

  1356.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1357. 

  1357.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1358. 

  1358.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1359. 

  1359.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1360. 

  1360.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1361. 

  1361.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1362. 

  1362.     </configs>
    1363. 

  1363.     <configs name="MfcGas6" nameView="MFC Gas6" >
    1364. 

  1364.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    1365. 

  1365.       <config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    1366. 

  1366.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1367. 

  1367.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1368. 

  1368.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1369. 

  1369.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1370. 

  1370.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1371. 

  1371.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1372. 

  1372.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1373. 

  1373.     </configs>
    1374. 

  1374.     <configs name="Pump" nameView="Pump" >
    1375. 

  1375.       <config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    1376. 

  1376.       <config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1377. 

  1377.       <config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1378. 

  1378.       <config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1379. 

  1379.       <config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    1380. 

  1380.       <config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1381. 

  1381.     </configs>
    1382. 

  1382.     <configs name="Purge" nameView="Purge" >
    1383. 

  1383.       <config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    1384. 

  1384.       <config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1385. 

  1385.       <config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1386. 

  1386.       <config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1387. 

  1387.       <config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1388. 

  1388.       <config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1389. 

  1389.       <config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1390. 

  1390.     </configs>
    1391. 

  1391.     <configs name="HeaterChamber" nameView="Heater Chamber" >
    1392. 

  1392.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1393. 

  1393.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1394. 

  1394.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1395. 

  1395.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1396. 

  1396.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1397. 

  1397.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1398. 

  1398.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1399. 

  1399.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1400. 

  1400.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1401. 

  1401.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1402. 

  1402.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1403. 

  1403.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1404. 

  1404.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1405. 

  1405.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1406. 

  1406.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1407. 

  1407.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1408. 

  1408.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1409. 

  1409.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1410. 

  1410.     </configs>
    1411. 

  1411.     <configs name="IdleClean" nameView="Idle Clean" visible="false">
    1412. 

  1412.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1413. 

  1413.       <config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1414. 

  1414.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1415. 

  1415.     </configs>
    1416. 

  1416.     <configs name="JobClean" nameView="Job Clean" visible="false">
    1417. 

  1417.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1418. 

  1418.       <config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1419. 

  1419.       <config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1420. 

  1420.       <config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1421. 

  1421.       <config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1422. 

  1422.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1423. 

  1423.     </configs>
    1424. 

  1424.     <configs name="EPD" nameView="EPD Setting">
    1425. 

  1425.       <config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1426. 

  1426.       <config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1427. 

  1427.     </configs>
    1428. 

  1428.   </configs>
    1429. 

  1429. </root>
    1430.