Mars200VCE/JetVirgoPM/PMs/Routines/GasFlowRoutine.cs

using System;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using JetVirgoPM.Devices;

namespace JetVirgoPM.PMs.Routines
{
    class GasFlowRoutine : PMRoutineBase, IStepRoutine
    {
        private enum RoutineStep
        {
            CheckPressure,
            StartFlow,
            StopFlow,
            CheckStable,
            End,
        };

        public bool _gasStatus = false;
        private double _pressureAlarmRange;
        private double _pressureAlarmTime;
        //private double _gasFlowAlarmRange;
        //private double _gasFlowAlarmTime;

        private double[] _mfcSetPoint = new double[6];

        public GasFlowRoutine(JetDualPM chamber) : base(chamber)
        {
            Name = "Flow gas";
            bUINotify = true;
        }

        public RState Start(params object[] objs)
        {
            if (!_chamber.IsFastPumpOpened)
            {
                StopFlow2();
                Stop("Pump 阀没有打开");
                return RState.Failed;
            }

            Reset();

            _pressureAlarmRange = SC.GetValue<double>($"{Module}.GasFlowPressureAlarmRange");
            _pressureAlarmTime = SC.GetValue<double>($"{Module}.GasFlowPressureAlarmTime");

            // open process final valve and flow
            Notify("Open valve and flow mfc");

            if(!_chamber.IsPlus)
                _chamber.OpenValve(ValveType.PURGE, true);
            _chamber.OpenValve(ValveType.PROCESS, true);

            int i = 0;
            foreach (object o in objs)
            {
                _mfcSetPoint[i++] = (double)o;
            }

            FlowMfc2((int)RoutineStep.StartFlow, _mfcSetPoint);

            _gasStatus = true;

            return Runner.Start(_chamber.Module.ToString(), Name);
        }

        public RState Monitor()
        {
            if (_chamber.HasGasOutOfRange)
            {
                Stop("流气率越界");
                _gasStatus = false;
                return RState.Failed;
            }

            Runner.End(RoutineStep.End, EndFunc, _delay_50ms);

            return Runner.Status;
        }

        public void FlowMfc2(int id, double[] mfcValues)
        {
            string reason = string.Empty;

            for (int index = 0; index < mfcValues.Length; index++)
            {
                _chamber.FlowGas(index, mfcValues[index]);
            }
        }

        public void StopFlow2()
        {
            Notify("Close valve and stop to flow MFC");

            _chamber.OpenValve(ValveType.PURGE, false);
            _chamber.OpenValve(ValveType.PROCESS, false);
            _chamber.StopAllGases();
        }

        public override void Abort()
        {
            this.StopFlow2();
            _gasStatus = false;
        }
    }
}