Clean.cs 528 B

123456789101112131415161718192021222324
  1. using System;
  2. using System.Collections.Generic;
  3. using Aitex.Core.RT.Event;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.RecipeCenter;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using JetVirgoPM.Devices;
  9. using MECF.Framework.Common.DBCore;
  10. using MECF.Framework.Common.Equipment;
  11. namespace JetVirgoPM.PMs.Routines
  12. {
  13. class CleanRoutine : PMRoutineBase
  14. {
  15. public CleanRoutine(JetDualPM chamber) : base(chamber)
  16. {
  17. Name = "Clean";
  18. }
  19. public object[] param;
  20. }
  21. }