JetVirgoPMRecipeFileContext.cs 21 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.IO;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using System.Xml;
  8. using Aitex.Common.Util;
  9. using Aitex.Core.RT.Event;
  10. using Aitex.Core.RT.Log;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.SCCore;
  13. namespace JetVirgoPM.PMs.RecipeExecutors
  14. {
  15. public class JetVirgoPMRecipeFileContext : IRecipeFileContext
  16. {
  17. public string GetRecipeDefiniton(string chamberType)
  18. {
  19. try
  20. {
  21. string recipeSchema = PathManager.GetCfgDir() + $@"\Recipe\JetVirgoPM\Process\RecipeFormat.xml";
  22. if (SC.GetValue<bool>($"{chamberType}.IsPlus"))
  23. recipeSchema = PathManager.GetCfgDir() + @"\Recipe\JetVirgoPM\Process\RecipeFormatPlus.xml";
  24. XmlDocument xmlDom = new XmlDocument();
  25. xmlDom.Load(recipeSchema);
  26. bool epdInstalled = SC.ContainsItem("System.SetUp.EPD.IsInstalled") && SC.GetValue<bool>($"System.SetUp.EPD.IsInstalled");
  27. if (!epdInstalled)
  28. {
  29. var nodeEndPoint =
  30. xmlDom.SelectSingleNode(
  31. string.Format(
  32. "/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='System.SetUp.EPDInstalled']"))
  33. as XmlElement;
  34. if (nodeEndPoint != null)
  35. {
  36. nodeEndPoint.ParentNode.RemoveChild(nodeEndPoint);
  37. }
  38. }
  39. double rfPowerRange1 = SC.GetValue<double>($"{chamberType}.Rf1.PowerRange");
  40. double rfPowerRangeBias1 = SC.GetValue<double>($"{chamberType}.BiasRf1.PowerRange");
  41. bool rfEnablePulsing1 = SC.GetValue<bool>($"{chamberType}.Rf1.EnablePulsingFunction");
  42. bool rfEnableBias1 = SC.GetValue<bool>($"{chamberType}.BiasRf1.EnableBiasRF");
  43. var nodeRfPowerBias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetPower']")) as XmlElement;
  44. var nodeMatchModeBias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetMatchProcessMode']")) as XmlElement;
  45. var nodeMatchC1Bias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetMatchPositionC1']")) as XmlElement;
  46. var nodeMatchC2Bias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetMatchPositionC2']")) as XmlElement;
  47. var nodeRfPower1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf1.SetPower']")) as XmlElement;
  48. var nodeRfPowerBiasSoft1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SoftTolerance']")) as XmlElement;
  49. var nodeRfPowerBiasHard1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.HardTolerance']")) as XmlElement;
  50. if (nodeRfPower1 != null)
  51. {
  52. nodeRfPower1.SetAttribute("Max", (int)rfPowerRange1 + "");
  53. }
  54. if (nodeRfPowerBias1 != null)
  55. {
  56. nodeRfPowerBias1.SetAttribute("Max", (int)rfPowerRangeBias1 + "");
  57. if (!rfEnableBias1)
  58. {
  59. nodeRfPowerBias1.ParentNode.RemoveChild(nodeRfPowerBias1);
  60. nodeMatchModeBias1.ParentNode.RemoveChild(nodeMatchModeBias1);
  61. nodeMatchC1Bias1.ParentNode.RemoveChild(nodeMatchC1Bias1);
  62. nodeMatchC2Bias1.ParentNode.RemoveChild(nodeMatchC2Bias1);
  63. nodeRfPowerBiasSoft1?.ParentNode.RemoveChild(nodeRfPowerBiasSoft1);
  64. nodeRfPowerBiasHard1?.ParentNode.RemoveChild(nodeRfPowerBiasHard1);
  65. }
  66. }
  67. if (!rfEnablePulsing1)
  68. {
  69. var node11 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf1.SetPulsingFrequency']")) as XmlElement;
  70. if (node11 != null)
  71. node11.ParentNode.RemoveChild(node11);
  72. var node21 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf1.SetPulsingDuty']")) as XmlElement;
  73. if (node21 != null)
  74. node21.ParentNode.RemoveChild(node21);
  75. //var node3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step/Item[@ControlName='PulsingMode']")) as XmlElement;
  76. //if (node3 != null)
  77. // node3.ParentNode.RemoveChild(node3);
  78. }
  79. double rfPowerRange2 = SC.GetValue<double>($"{chamberType}.Rf2.PowerRange");
  80. double rfPowerRangeBias2 = SC.GetValue<double>($"{chamberType}.BiasRf2.PowerRange");
  81. bool rfEnablePulsing2 = SC.GetValue<bool>($"{chamberType}.Rf2.EnablePulsingFunction");
  82. bool rfEnableBias2 = SC.GetValue<bool>($"{chamberType}.BiasRf2.EnableBiasRF");
  83. var nodeRfPowerBias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetPower']")) as XmlElement;
  84. var nodeMatchModeBias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetMatchProcessMode']")) as XmlElement;
  85. var nodeMatchC1Bias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetMatchPositionC1']")) as XmlElement;
  86. var nodeMatchC2Bias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetMatchPositionC2']")) as XmlElement;
  87. var nodeRfPower2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf2.SetPower']")) as XmlElement;
  88. var nodeRfPowerBiasSoft2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SoftTolerance']")) as XmlElement;
  89. var nodeRfPowerBiasHard2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.HardTolerance']")) as XmlElement;
  90. if (nodeRfPower2 != null)
  91. {
  92. nodeRfPower2.SetAttribute("Max", (int)rfPowerRange2 + "");
  93. }
  94. if (nodeRfPowerBias2 != null)
  95. {
  96. nodeRfPowerBias2.SetAttribute("Max", (int)rfPowerRangeBias2 + "");
  97. if (!rfEnableBias2)
  98. {
  99. nodeRfPowerBias2.ParentNode.RemoveChild(nodeRfPowerBias2);
  100. nodeMatchModeBias2.ParentNode.RemoveChild(nodeMatchModeBias2);
  101. nodeMatchC1Bias2.ParentNode.RemoveChild(nodeMatchC1Bias2);
  102. nodeMatchC2Bias2.ParentNode.RemoveChild(nodeMatchC2Bias2);
  103. nodeRfPowerBiasSoft2?.ParentNode.RemoveChild(nodeRfPowerBiasSoft2);
  104. nodeRfPowerBiasHard2?.ParentNode.RemoveChild(nodeRfPowerBiasHard2);
  105. }
  106. }
  107. if (!rfEnablePulsing2)
  108. {
  109. var node12 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf2.SetPulsingFrequency']")) as XmlElement;
  110. if (node12 != null)
  111. node12.ParentNode.RemoveChild(node12);
  112. var node22 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf2.SetPulsingDuty']")) as XmlElement;
  113. if (node22 != null)
  114. node22.ParentNode.RemoveChild(node22);
  115. //var node3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step/Item[@ControlName='PulsingMode']")) as XmlElement;
  116. //if (node3 != null)
  117. // node3.ParentNode.RemoveChild(node3);
  118. }
  119. string gas1Name = SC.GetStringValue($"{chamberType}.MfcGas1.GasName");
  120. bool gas1Enable = SC.GetValue<bool>($"{chamberType}.MfcGas1.Enable");
  121. int gas1N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas1.MfcN2Scale");
  122. double gas1ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas1.MfcScaleFactor");
  123. var nodeGas1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas1']")) as XmlElement;
  124. var nodeGas1Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas1.SoftTolerance']")) as XmlElement;
  125. var nodeGas1Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas1.HardTolerance']")) as XmlElement;
  126. if (nodeGas1 != null)
  127. {
  128. if (!gas1Enable)
  129. {
  130. nodeGas1.ParentNode.RemoveChild(nodeGas1);
  131. nodeGas1Soft.ParentNode.RemoveChild(nodeGas1Soft);
  132. nodeGas1Hard.ParentNode.RemoveChild(nodeGas1Hard);
  133. }
  134. else
  135. {
  136. nodeGas1.SetAttribute("DisplayName", "Gas1 " + gas1Name + " " + gas1N2Scale * gas1ScaleFactor + " " + "sccm");
  137. nodeGas1.SetAttribute("Max", (int)(gas1N2Scale * gas1ScaleFactor) + "");
  138. nodeGas1Soft.SetAttribute("DisplayName", $"{gas1Name} (Soft)(%)");
  139. nodeGas1Hard.SetAttribute("DisplayName", $"{gas1Name} (Hard)(%)");
  140. }
  141. }
  142. string gas2Name = SC.GetStringValue($"{chamberType}.MfcGas2.GasName");
  143. bool gas2Enable = SC.GetValue<bool>($"{chamberType}.MfcGas2.Enable");
  144. int gas2N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas2.MfcN2Scale");
  145. double gas2ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas2.MfcScaleFactor");
  146. var nodeGas2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas2']")) as XmlElement;
  147. var nodeGas2Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas2.SoftTolerance']")) as XmlElement;
  148. var nodeGas2Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas2.HardTolerance']")) as XmlElement;
  149. if (nodeGas2 != null)
  150. {
  151. if (!gas2Enable)
  152. {
  153. nodeGas2.ParentNode.RemoveChild(nodeGas2);
  154. nodeGas2Soft.ParentNode.RemoveChild(nodeGas2Soft);
  155. nodeGas2Hard.ParentNode.RemoveChild(nodeGas2Hard);
  156. }
  157. else
  158. {
  159. nodeGas2.SetAttribute("DisplayName", "Gas2 " + gas2Name + " " + gas2N2Scale * gas2ScaleFactor + " " + "sccm");
  160. nodeGas2.SetAttribute("Max", (int)(gas2N2Scale * gas2ScaleFactor) + "");
  161. nodeGas2Soft.SetAttribute("DisplayName", $"{gas2Name} (Soft)(%)");
  162. nodeGas2Hard.SetAttribute("DisplayName", $"{gas2Name} (Hard)(%)");
  163. }
  164. }
  165. string gas3Name = SC.GetStringValue($"{chamberType}.MfcGas3.GasName");
  166. bool gas3Enable = SC.GetValue<bool>($"{chamberType}.MfcGas3.Enable");
  167. int gas3N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas3.MfcN2Scale");
  168. double gas3ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas3.MfcScaleFactor");
  169. var nodeGas3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas3']")) as XmlElement;
  170. var nodeGas3Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas3.SoftTolerance']")) as XmlElement;
  171. var nodeGas3Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas3.HardTolerance']")) as XmlElement;
  172. if (nodeGas3 != null)
  173. {
  174. if (!gas3Enable)
  175. {
  176. nodeGas3.ParentNode.RemoveChild(nodeGas3);
  177. nodeGas3Soft.ParentNode.RemoveChild(nodeGas3Soft);
  178. nodeGas3Hard.ParentNode.RemoveChild(nodeGas3Hard);
  179. }
  180. else
  181. {
  182. nodeGas3.SetAttribute("DisplayName", "Gas3 " + gas3Name + " " + gas3N2Scale * gas3ScaleFactor + " " + "sccm");
  183. nodeGas3.SetAttribute("Max", (int)(gas3N2Scale * gas3ScaleFactor) + "");
  184. nodeGas3Soft.SetAttribute("DisplayName", $"{gas3Name} (Soft)(%)");
  185. nodeGas3Hard.SetAttribute("DisplayName", $"{gas3Name} (Hard)(%)");
  186. }
  187. }
  188. string gas4Name = SC.GetStringValue($"{chamberType}.MfcGas4.GasName");
  189. bool gas4Enable = SC.GetValue<bool>($"{chamberType}.MfcGas4.Enable");
  190. int gas4N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas4.MfcN2Scale");
  191. double gas4ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas4.MfcScaleFactor");
  192. var nodeGas4 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas4']")) as XmlElement;
  193. var nodeGas4Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas4.SoftTolerance']")) as XmlElement;
  194. var nodeGas4Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas4.HardTolerance']")) as XmlElement;
  195. if (nodeGas4 != null)
  196. {
  197. if (!gas4Enable)
  198. {
  199. nodeGas4.ParentNode.RemoveChild(nodeGas4);
  200. nodeGas4Soft.ParentNode.RemoveChild(nodeGas4Soft);
  201. nodeGas4Hard.ParentNode.RemoveChild(nodeGas4Hard);
  202. }
  203. else
  204. {
  205. nodeGas4.SetAttribute("DisplayName", "Gas4 " + gas4Name + " " + gas4N2Scale * gas4ScaleFactor + " " + "sccm");
  206. nodeGas4.SetAttribute("Max", (int)(gas4N2Scale * gas4ScaleFactor) + "");
  207. nodeGas4Soft.SetAttribute("DisplayName", $"{gas4Name} (Soft)(%)");
  208. nodeGas4Hard.SetAttribute("DisplayName", $"{gas4Name} (Hard)(%)");
  209. }
  210. }
  211. string gas5Name = SC.GetStringValue($"{chamberType}.MfcGas5.GasName");
  212. bool gas5Enable = SC.GetValue<bool>($"{chamberType}.MfcGas5.Enable");
  213. int gas5N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas5.MfcN2Scale");
  214. double gas5ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas5.MfcScaleFactor");
  215. var nodeGas5 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas5']")) as XmlElement;
  216. var nodeGas5Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas5.SoftTolerance']")) as XmlElement;
  217. var nodeGas5Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas5.HardTolerance']")) as XmlElement;
  218. if (nodeGas5 != null)
  219. {
  220. if (!gas5Enable)
  221. {
  222. nodeGas5.ParentNode.RemoveChild(nodeGas5);
  223. nodeGas5Soft.ParentNode.RemoveChild(nodeGas5Soft);
  224. nodeGas5Hard.ParentNode.RemoveChild(nodeGas5Hard);
  225. }
  226. else
  227. {
  228. nodeGas5.SetAttribute("DisplayName", "Gas5 " + gas5Name + " " + gas5N2Scale * gas5ScaleFactor + " " + "sccm");
  229. nodeGas5.SetAttribute("Max", (int)(gas5N2Scale * gas5ScaleFactor) + "");
  230. nodeGas5Soft.SetAttribute("DisplayName", $"{gas5Name} (Soft)(%)");
  231. nodeGas5Hard.SetAttribute("DisplayName", $"{gas5Name} (Hard)(%)");
  232. }
  233. }
  234. string gas6Name = SC.GetStringValue($"{chamberType}.MfcGas6.GasName");
  235. bool gas6Enable = SC.GetValue<bool>($"{chamberType}.MfcGas6.Enable");
  236. int gas6N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas6.MfcN2Scale");
  237. double gas6ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas6.MfcScaleFactor");
  238. var nodeGas6 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas6']")) as XmlElement;
  239. var nodeGas6Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas6.SoftTolerance']")) as XmlElement;
  240. var nodeGas6Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas6.HardTolerance']")) as XmlElement;
  241. if (nodeGas6 != null)
  242. {
  243. if (!gas5Enable)
  244. {
  245. nodeGas6.ParentNode.RemoveChild(nodeGas6);
  246. nodeGas6Soft.ParentNode.RemoveChild(nodeGas6Soft);
  247. nodeGas6Hard.ParentNode.RemoveChild(nodeGas6Hard);
  248. }
  249. else
  250. {
  251. nodeGas6.SetAttribute("DisplayName", "Gas6 " + gas6Name + " " + gas6N2Scale + " " + "sccm");
  252. nodeGas6.SetAttribute("Max", (int)(gas6N2Scale * gas6ScaleFactor) + "");
  253. nodeGas6Soft.SetAttribute("DisplayName", $"{gas6Name} (Soft)(%)");
  254. nodeGas6Hard.SetAttribute("DisplayName", $"{gas6Name} (Hard)(%)");
  255. }
  256. }
  257. return xmlDom.OuterXml;
  258. }
  259. catch (Exception ex)
  260. {
  261. LOG.Write(ex);
  262. return "";
  263. }
  264. }
  265. public IEnumerable<string> GetRecipes(string path, bool includingUsedRecipe)
  266. {
  267. try
  268. {
  269. var recipes = new List<string>();
  270. string recipePath = PathManager.GetRecipeDir() + path + "\\";
  271. if (!Directory.Exists(recipePath))
  272. return recipes;
  273. var di = new DirectoryInfo(recipePath);
  274. var fis = di.GetFiles("*.rcp", SearchOption.AllDirectories);
  275. foreach (var fi in fis)
  276. {
  277. string str = fi.FullName.Substring(di.FullName.Length);
  278. str = str.Substring(0, str.LastIndexOf('.'));
  279. if (includingUsedRecipe || (!includingUsedRecipe && !str.Contains("HistoryRecipe\\")))
  280. {
  281. recipes.Add(str);
  282. }
  283. }
  284. return recipes;
  285. }
  286. catch (Exception ex)
  287. {
  288. LOG.Write(ex);
  289. return new List<string>();
  290. }
  291. }
  292. public void PostInfoEvent(string message)
  293. {
  294. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  295. }
  296. public void PostWarningEvent(string message)
  297. {
  298. EV.PostMessage("System", EventEnum.DefaultWarning, message);
  299. }
  300. public void PostAlarmEvent(string message)
  301. {
  302. EV.PostMessage("System", EventEnum.DefaultAlarm, message);
  303. }
  304. public void PostDialogEvent(string message)
  305. {
  306. EV.PostNotificationMessage(message);
  307. }
  308. public void PostInfoDialogMessage(string message)
  309. {
  310. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  311. EV.PostPopDialogMessage(EventLevel.Information, "System Information", message);
  312. }
  313. public void PostWarningDialogMessage(string message)
  314. {
  315. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  316. EV.PostPopDialogMessage(EventLevel.Warning, "System Warning", message);
  317. }
  318. public void PostAlarmDialogMessage(string message)
  319. {
  320. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  321. EV.PostPopDialogMessage(EventLevel.Alarm, "System Alarm", message);
  322. }
  323. public string GetRecipeTemplate(string chamberId)
  324. {
  325. string schema = GetRecipeDefiniton(chamberId);
  326. XmlDocument dom = new XmlDocument();
  327. dom.LoadXml(schema);
  328. XmlNode nodeTemplate = dom.SelectSingleNode("/Aitex/TableRecipeData");
  329. return nodeTemplate.OuterXml;
  330. }
  331. }
  332. }