Mars200VCE/JetVirgoPM/PMs/PMModule.cs

using System;
using System.Diagnostics;
using System.Linq;
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using JetVirgoPM.Devices;
using JetVirgoPM.Devices.EPDs;
using JetVirgoPM.PMs.RecipeExecutors;
using JetVirgoPM.PMs.Routines;
using MECF.Framework.Common.CommonData;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Pumps.EdwardsPump;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Pumps.SkyPump;
using MECF.Framework.RT.ModuleLibrary.PMModules;
using MECF.Framework.RT.ModuleLibrary.SystemModules;

namespace JetVirgoPM.PMs
{
    public class PMModule : PMModuleBase, IRecipeExecutor
    {
        public enum MSG
        {
            Home,
            Transfer,
            PrepareTransfer,
            PostTransfer,
            Reset,
            Abort,
            Error,
            LaunchPump,
            Pump,
            Vent,
            Purge,
            CyclePurge,
            Heat,
            TransferHandoff,
            StartTransfer,
            LeakCheck,
            DeleteLeakCheck,
            MoveLiftPin1,
            MoveLiftPin2,
            MoveGuidePin1,
            MoveGuidePin2,
            MFCVerification,

            Clean,
            CleanReady,
            ATMProcess,
            Process,
            RunRecipe,
            PostProcess,
            RecipeSkipStep,
            RecipeUpdate,
            RecipeResume,
            RecipePause,
            RecipeAbort,
            PreProcess,
            AutoMode,
            ManualMode,
            LockLid,

            SetOnline,
            SetOffline,
            SelectRecipe,
            GasFlow,
            StopGasFlow,
            RfPower,
            MaxMsg
        }

        public enum STATE
        {
            Init,
            Idle,
            Homing,
            GasFlowing,
            RfPowering,
            Heating,
            LaunchingPump,
            Pumping,
            Venting,
            Purging,
            MoveLift,
            Purge,
            Transfer,
            Error,
            PrepareTransfer,
            PostTransfer,
            TransferHandoff,
            //Process,
            LeakCheck,
            Liftpin1Moving,
            Liftpin2Moving,
            GuidePin1Moving,
            GuidePin2Moving,
            PreClean,
            LoadProcessRecipe,
            ATMProcessing,
            PreProcess,
            Processing,
            PostProcess,
            OpeningLid,
            ClosingLid,
            MFCVerification,

            NotInstall
        }

        #region Fields
        private int _bigWafer = 0;
        private int _midWafer = 0;
        private int _smallWafer = 0;
        private bool _enableBiasRF1;
        private bool _enableBiasRF2;
        private bool _chamber1Disabled;
        private bool _chamber2Disabled;

        private StatsDataItemRFAndPump _statRf1OnTime;
        private StatsDataItemRFAndPump _statRf2OnTime;
        private StatsDataItemRFAndPump _statBiasRf1OnTime;
        private StatsDataItemRFAndPump _statBiasRf2OnTime;
        private StatsDataItemRFAndPump _statPumpOnTime;

        private readonly JetDualPM _chamber;
        private string _processStatus;
        private DateTime _recipeStartTime;

        //routine
        private VentRoutine _ventRoutine;
        private PumpDownRoutine _pumpRoutine;
        private StartPumpRoutine _startPumpRoutine;
        private TemperatureControlRoutine _temperatureControlRoutine;
        private GasFlowRoutine _gasFlowRoutine;
        private RfPowerRoutine _rfPowerRoutine;
        private CyclePurgeRoutine _cyclePurgeRoutine;
        private CleanRoutine _cleanRoutine;
        private PMATMProcessRoutine _ATMProcessRoutine;
        private ProcessRoutine _processRoutine;
        private PreProcessRoutine _preProcessRoutine;
        private PostProcessRoutine _postProcessRoutine;
        private LeakCheckRoutine _leakCheckRoutine;
        private PMPrepareTransferRoutine _prepareTrans;
        private PMPostTransferRoutine _postTrans;
        private PMTransferHandoffRoutine _transferHandoff;
        private PMHomeRoutine _home;
        private PMMfcVerificationRoutine _mfcVerification;

        private AutoFlag _AutoMode;
        private bool _isAlarm;
        private DateTime _pumpStartTime;
        private TimeSpan _pumpElapsedTime;
        private DateTime _rfStartTime;
        private DateTime _tcStartTime;
        private TimeSpan _rfElapsedTime;
        private TimeSpan _tcElapsedTime;
        private MovementPosition _goalLiftPin;
        private ushort _ActivatedActionID;

        private RecipeRunningInfo _recipeRunningInfo = new RecipeRunningInfo();

        #endregion

        #region Properties
        public Action<bool, bool> TransferPrepared;

        public bool IsIdle
        {
            get { return FsmState == (int)STATE.Idle; }
        }
        public bool IsAutoMode => _AutoMode == AutoFlag.Auto;

        public RecipeRunningInfo RecipeRunningInfo
        {
            get
            {
                return _recipeRunningInfo;
            }
        }

        public int Invoke(string function, params object[] args)
        {
            switch (function)
            {
                case "Home":
                    CheckToPostMessage((int)MSG.Home);
                    return (int)MSG.Home;
            }

            return (int)FSM_MSG.NONE;
        }


        public override bool IsInit
        {
            get { return FsmState == (int)STATE.Init; }
        }
        public bool IsBusy
        {
            get { return !IsInit && !IsError && !IsIdle; }
        }

        public bool IsProcessing
        {
            get { return FsmState == (int)STATE.PreProcess || FsmState == (int)STATE.Processing || FsmState == (int)STATE.PostProcess; }
        }

        private DateTime _leakCheckStartTime;
        private TimeSpan _leakCheckElapsedTime;
        private string LeakCheckElapseTime
        {
            get
            {
                if ((FsmState == (int)STATE.LeakCheck))
                    _leakCheckElapsedTime = DateTime.Now - _leakCheckStartTime;

                return string.Format("{0}:{1}:{2}", ((int)_leakCheckElapsedTime.TotalHours).ToString("00"),
                    _leakCheckElapsedTime.Minutes.ToString("00"), _leakCheckElapsedTime.Seconds.ToString("00"));
            }
        }

        private string PumpTime
        {
            get
            {
                if ((FsmState == (int)STATE.Pumping) || (FsmState == (int)STATE.PreProcess))
                    _pumpElapsedTime = DateTime.Now - _pumpStartTime;

                return string.Format("{0}:{1}:{2}", ((int)_pumpElapsedTime.TotalHours).ToString("00"),
                    _pumpElapsedTime.Minutes.ToString("00"), _pumpElapsedTime.Seconds.ToString("00"));
            }
        }

        private int StepNo
        {
            get
            {
                if ((FsmState == (int)STATE.Processing) || (FsmState == (int)STATE.PostProcess))
                {
                    return _processRoutine.CurStepNum + 1;
                }
                return 0;
            }
        }

        private int RecipeSteps
        {
            get
            {
                if ((FsmState == (int)STATE.PreProcess) || (FsmState == (int)STATE.Processing) || (FsmState == (int)STATE.PostProcess))
                {
                    return _preProcessRoutine.CurrentRecipeStepList.Count;
                }
                return 0;
            }
        }

        private string RecipeStepName
        {
            get
            {
                if ((FsmState == (int)STATE.PreProcess) || (FsmState == (int)STATE.Processing) || (FsmState == (int)STATE.PostProcess))
                {
                    return _processRoutine.CurStepComment;
                }
                return null;
            }
        }

        private double LeakRate
        {
            get { return _leakCheckRoutine.LeakRate; }
        }

        private string RecipeName
        {
            get
            {
                if ((FsmState == (int)STATE.PreProcess) || (FsmState == (int)STATE.Processing) || (FsmState == (int)STATE.PostProcess))
                {
                    return _preProcessRoutine.CurrentRecipeRunningName.Split('\\').Last();
                }
                return null;
            }
        }

        private string RFTime
        {
            get
            {
                if (FsmState == (int)STATE.RfPowering)
                    _rfElapsedTime = DateTime.Now - _rfStartTime;

                return $"{((int)_rfElapsedTime.TotalHours).ToString("00")}:{_rfElapsedTime.Minutes.ToString("00")}:{_rfElapsedTime.Seconds.ToString("00")}";
            }
        }

        private string TCTime
        {
            get
            {
                if (FsmState == (int)STATE.Heating)
                    _tcElapsedTime = DateTime.Now - _tcStartTime;

                return $"{((int)_tcElapsedTime.TotalHours).ToString("00")}:{_tcElapsedTime.Minutes.ToString("00")}:{_tcElapsedTime.Seconds.ToString("00")}";
            }
        }

        private TimeSpan _recipeElapsedTime;
        public string RecipeElapsedTime
        {
            get
            {
                if (FsmState == (int)STATE.LoadProcessRecipe || FsmState == (int)STATE.PreProcess
                                                                || FsmState == (int)STATE.Processing || FsmState == (int)STATE.PostProcess)
                    _recipeElapsedTime = DateTime.Now - _recipeStartTime;

                return string.Format("{0}:{1}:{2}", ((int)_recipeElapsedTime.TotalHours).ToString("00"),
                    _recipeElapsedTime.Minutes.ToString("00"), _recipeElapsedTime.Seconds.ToString("00"));
            }
        }

        #endregion
        public override bool CheckAcked(int entityTaskToken)
        {
            return CheckExecuted(entityTaskToken);
        }

        public override bool IsReady
        {
            get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
        }
        public override void AssertPMReady(string description)
        {
            if (!IsReady)
            {
                LOG.Error($"{Module} {Name} {description} Assert当前状态 FsmState={FsmState} CheckAllMessageProcessed={CheckAllMessageProcessed()}");
            }
        }

        public override bool IsError
        {
            get { return FsmState == (int)STATE.Error; }
        }

        public bool IsPaused { get; set; }

        public override double ChamberPressure => _chamber.ChamberPressure;

        public bool CheckEnableRunProcess(out string reason)
        {
            throw new NotImplementedException();
        }

        public void ResetToleranceChecker()
        {
            throw new NotImplementedException();
        }

        public void OnProcessStart(string v1, string recipeName, bool v2)
        {
            throw new NotImplementedException();
        }

        public void PauseRecipe(out string reason)
        {
            throw new NotImplementedException();
        }


        public bool CheckAllDevicesStable(float v1, float v2, float v3, float v4, float v5, float v6, float v7, float v8, float v9)
        {
            throw new NotImplementedException();
        }

        public void AbortRunProcess(out string reason)
        {
            throw new NotImplementedException();
            throw new NotImplementedException();
        }

        public override bool? SlitDoorIsClose
        {
            get
            {
                if(_chamber != null)
                    return !_chamber.CheckSlitDoor1Open() && !_chamber.CheckSlitDoor2Open();
                return new bool?();
            }
        }

        public bool NotExtendSignalArrival => _chamber.IsTMRobotNotExtendToPM1 && _chamber.IsTMRobotNotExtendToPM2;

        public event Action<string> OnEnterError;

        private ModuleName _module;


        private bool _isInit;

        private StatsData _statWaferCount1;
        private StatsData _statProcessTime1;
        private StatsData _statWaferCount2;
        private StatsData _statProcessTime2;

        private Stopwatch _processTimer = new Stopwatch();

        public PMModule(ModuleName module, int slotCount) : base(slotCount)
        {
            _module = module;

            Module = module.ToString();
            Name = module.ToString();

            _enableBiasRF1 = SC.GetValue<bool>($"{Module}.BiasRf1.EnableBiasRF");
            _enableBiasRF2 = SC.GetValue<bool>($"{Module}.BiasRf2.EnableBiasRF");
            _chamber1Disabled = SC.GetValue<bool>($"System.SetUp.{Module}Chamber1Disabled.IsInstalled");
            _chamber2Disabled = SC.GetValue<bool>($"System.SetUp.{Module}Chamber2Disabled.IsInstalled");

            _chamber = DEVICE.GetDevice<JetDualPM>($"{module}.{module}");

            EnumLoop<STATE>.ForEach((item) =>
            {
                MapState((int)item, item.ToString());
            });

            EnumLoop<MSG>.ForEach((item) =>
            {
                MapMessage((int)item, item.ToString());
            });

            EnableFsm(50, IsInstalled ? STATE.Init : STATE.NotInstall);

            LeakCheckResultManager.Instance.Initialize(Module.ToString());
        }

        public override bool Initialize()
        {
            if (!IsInstalled)
                return true;

           IsOnline = false;

            InitDevice();

            InitRoutine();

            InitInterlock();

            InitFsm();

            InitOp();

            InitData();

            InitStats();

            return base.Initialize();
        }

        protected virtual void InitRoutine()
        {
            _ventRoutine = new VentRoutine(_chamber);
            _pumpRoutine = new PumpDownRoutine(_chamber);
            _startPumpRoutine = new StartPumpRoutine(_chamber);
            _temperatureControlRoutine = new TemperatureControlRoutine(_chamber);
            _prepareTrans = new PMPrepareTransferRoutine(_chamber, _ventRoutine);
            _transferHandoff = new PMTransferHandoffRoutine(_chamber);
            _postTrans = new PMPostTransferRoutine(_chamber);
            _gasFlowRoutine = new GasFlowRoutine(_chamber);
            _rfPowerRoutine = new RfPowerRoutine(_chamber, true);
            _cyclePurgeRoutine = new CyclePurgeRoutine(_chamber);
            _leakCheckRoutine = new LeakCheckRoutine(_chamber, _pumpRoutine);
            _cleanRoutine = new CleanRoutine(_chamber);
            _ATMProcessRoutine = new PMATMProcessRoutine(_chamber);
            _preProcessRoutine = new PreProcessRoutine(_chamber, _pumpRoutine);
            _processRoutine = new ProcessRoutine(_chamber, this);
            _postProcessRoutine = new PostProcessRoutine(_chamber, _ventRoutine);
            _home = new PMHomeRoutine(_chamber);
            _mfcVerification = new PMMfcVerificationRoutine(_chamber, _pumpRoutine);
        }

        protected virtual void InitData()
        {
            DATA.Subscribe($"{Module}.IsError", () => IsError);

            DATA.Subscribe($"{Module}.State", () => FsmState);
            DATA.Subscribe($"{Module}.Status", () => StringFsmStatus);
            DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);

            DATA.Subscribe($"{Module}.WaferSize", () => WaferManager.Instance.GetWaferSize(_module, 0).ToString());
            DATA.Subscribe($"{Module}.WaferSize1", () => WaferManager.Instance.GetWaferSize(_module, 1).ToString());

            DATA.Subscribe($"{Module}.IsInMaintainMode", () => !IsOnline);

            //DATA.Subscribe($"{Name}.SelectedRecipeName", () => _recipeRunningInfo.RecipeName);

            //DATA.Subscribe($"{Name}.RecipeStepNumber", () => _recipeRunningInfo.StepNumber);
            //DATA.Subscribe($"{Name}.RecipeStepName", () => _recipeRunningInfo.StepName);
            //DATA.Subscribe($"{Name}.RecipeStepElapseTime", () => _recipeRunningInfo.StepElapseTime);
            //DATA.Subscribe($"{Name}.RecipeStepTime", () => _recipeRunningInfo.StepTime);
            //DATA.Subscribe($"{Name}.RecipeTotalElapseTime", () => _recipeRunningInfo.TotalElapseTime);
            //DATA.Subscribe($"{Name}.RecipeTotalTime", () => _recipeRunningInfo.TotalTime);

            DATA.Subscribe($"{Module}.FsmState", () => ((STATE)FsmState).ToString());
            DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)FsmPreviousState).ToString());
            DATA.Subscribe($"{Module}.FsmLastMessage", ((MSG)FsmLastMessage).ToString());
            DATA.Subscribe($"{Module}.IsAutoMode", () => IsAutoMode);

            DATA.Subscribe($"{Module}.IsAlarm", () => _isAlarm);
            DATA.Subscribe($"{Module}.ProcessStatus", () => _processStatus);
            DATA.Subscribe($"{Module}.PumpTime", () => PumpTime);
            DATA.Subscribe($"{Module}.TCTime", () => TCTime);
            DATA.Subscribe($"{Module}.StepNo", () => StepNo);
            DATA.Subscribe($"{Module}.RecipeStepName", () => RecipeStepName);
            DATA.Subscribe($"{Module}.RecipeName", () => RecipeName);
            DATA.Subscribe($"{Module}.LeakRate", () => LeakRate);
            DATA.Subscribe($"{Module}.LeakCheckElapseTime", () => LeakCheckElapseTime);
            DATA.Subscribe($"{Module}.SmallWafer", () => _smallWafer);
            DATA.Subscribe($"{Module}.BigWafer", () => _bigWafer);
            DATA.Subscribe($"{Module}.MidWafer", () => _midWafer);
            DATA.Subscribe($"{Module}.RecipeSteps", () => RecipeSteps);
            DATA.Subscribe($"{Module}.RecipeProcessTime", () => RecipeElapsedTime);
            DATA.Subscribe($"{Module}.RecipeStepTimeElapsed", () => (_processRoutine.CurStepElpasedTime / 1000).ToString("F0"));
            DATA.Subscribe($"{Module}.RecipeStepTimeSetPoint", () => (_processRoutine.CurStepTotalTime / 1000).ToString("F0"));
        }


        private void InitStats()
        {
            _statWaferCount1 = new StatsData($"{Module}.ProcessedWaferCount1", "PM1 Total processed wafer", 0);
            _statWaferCount2 = new StatsData($"{Module}.ProcessedWaferCount2", "PM2 Total processed wafer", 0);
            _statProcessTime1 = new StatsData($"{Module}.ProcessTime1", "PM1 Total process time", 0);
            _statProcessTime2 = new StatsData($"{Module}.ProcessTime2", "PM2 Total process time", 0);

            StatsDataManager.Instance.Subscribe($"{Module}.ProcessedWaferCount1", "PM1 Processed Wafer Count", 0);
            StatsDataManager.Instance.Subscribe($"{Module}.ProcessedWaferCount2", "PM2 Processed Wafer Count", 0);
            StatsDataManager.Instance.Subscribe($"{Module}.Rf1.RfOnTime", "Rf 1 On Time");
            StatsDataManager.Instance.Subscribe($"{Module}.Rf2.RfOnTime", "Rf 2 On Time");
            if (_enableBiasRF1)
                StatsDataManager.Instance.Subscribe($"{Module}.BiasRf1.RfOnTime", "Bias  Rf 1 On Time");
            if (_enableBiasRF2)
                StatsDataManager.Instance.Subscribe($"{Module}.BiasRf2.RfOnTime", "Bias  Rf 2 On Time");
            StatsDataManager.Instance.Subscribe($"{Module}.PumpOnTime", "Pump On Time");
            
            _statRf1OnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.Rf1.RfOnTime");
            _statRf2OnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.Rf2.RfOnTime");
            if (_enableBiasRF1)
                _statBiasRf1OnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.BiasRf1.RfOnTime");
            if (_enableBiasRF2)
                _statBiasRf2OnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.BiasRf2.RfOnTime");
            _statPumpOnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.PumpOnTime");

            DATA.Subscribe($"{Module}.ProcessTime1.Value", () => _statProcessTime1.GetValue());
            DATA.Subscribe($"{Module}.ProcessedWaferCount1.Value", () => _statWaferCount1.GetValue());
            DATA.Subscribe($"{Module}.ProcessTime2.Value", () => _statProcessTime2.GetValue());
            DATA.Subscribe($"{Module}.ProcessedWaferCount2.Value", () => _statWaferCount2.GetValue());
            DATA.Subscribe($"{Module}.Rf1.RfOnTime.Value", () => _statRf1OnTime.fromLastPM);
            DATA.Subscribe($"{Module}.Rf2.RfOnTime.Value", () => _statRf2OnTime.fromLastPM);
            DATA.Subscribe($"{Module}.PumpOnTime.Value", () => _statPumpOnTime.fromLastPM);
            if (_enableBiasRF1)
                DATA.Subscribe($"{Module}.BiasRf1.RfOnTime.Value", () => _statBiasRf1OnTime.fromLastPM);
            if (_enableBiasRF2)
                DATA.Subscribe($"{Module}.BiasRf2.RfOnTime.Value", () => _statBiasRf2OnTime.fromLastPM);
        }


        private void InitOp()
        {
            OP.Subscribe($"{Module}.Home", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Home));
            OP.Subscribe($"{Module}.Reset", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Reset));
            OP.Subscribe($"{Module}.Abort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Abort));

            OP.Subscribe($"{Module}.Pump", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Pump));
            OP.Subscribe($"{Module}.Vent", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Vent));
            OP.Subscribe($"{Module}.Purge", (string cmd, object[] args) => CheckToPostMessage((int)MSG.CyclePurge));

            OP.Subscribe($"{Module}.PutOnline", (string cmd, object[] args) => CheckToPostMessage((int)MSG.SetOnline));
            OP.Subscribe($"{Module}.PutOffline", (string cmd, object[] args) => CheckToPostMessage((int)MSG.SetOffline));
            OP.Subscribe($"{Module}.{RtOperation.PmOnline}", (cmd, args) => CheckToPostMessage((int)MSG.SetOnline));
            OP.Subscribe($"{Module}.{RtOperation.PmOffline}", (cmd, args) => CheckToPostMessage((int)MSG.SetOffline));

            OP.Subscribe($"{Name}.SelectRecipe", (string cmd, object[] args) => CheckToPostMessage((int)MSG.SelectRecipe, args[0]));

            OP.Subscribe($"{Module}.{RtOperation.GasFlow}", (cmd, args) => CheckToPostMessage((int)MSG.GasFlow, args));
            OP.Subscribe($"{Module}.{RtOperation.RfPower}", (cmd, args) => CheckToPostMessage((int)MSG.RfPower, args));
            OP.Subscribe($"{Module}.MoveLiftPin1", (cmd, args) => CheckToPostMessage((int)MSG.MoveLiftPin1, args[0]));
            OP.Subscribe($"{Module}.MoveLiftPin2", (cmd, args) => CheckToPostMessage((int)MSG.MoveLiftPin2, args[0]));
            OP.Subscribe($"{Module}.MoveGuidePin1", (cmd, args) => CheckToPostMessage((int)MSG.MoveGuidePin1, args[0], args[1]));
            OP.Subscribe($"{Module}.MoveGuidePin2", (cmd, args) => CheckToPostMessage((int)MSG.MoveGuidePin2, args[0], args[1]));
            OP.Subscribe($"{Module}.PrepareTransfer", (cmd, args) => CheckToPostMessage((int)MSG.PrepareTransfer, args[0]));
            OP.Subscribe($"{Module}.TransferHandoff", (cmd, args) => CheckToPostMessage((int)MSG.TransferHandoff, args[0]));
            OP.Subscribe($"{Module}.{RtOperation.StartPump}", (cmd, args) => CheckToPostMessage((int)MSG.LaunchPump));
            OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck, args));
            OP.Subscribe($"{Module}.{RtOperation.DeleteLeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.DeleteLeakCheck, args));
            OP.Subscribe($"{Module}.{RtOperation.LockLid}", (cmd, args) => CheckToPostMessage((int)MSG.LockLid, true));
            OP.Subscribe($"{Module}.{RtOperation.UnlockLid}", (cmd, args) => CheckToPostMessage((int)MSG.LockLid, false));
            OP.Subscribe($"{Module}.{RtOperation.RunRecipe}", (cmd, args) => CheckToPostMessage((int)MSG.RunRecipe, (string)args[0], "", true));
            OP.Subscribe($"{Module}.{RtOperation.SkipCurrentStep}", (cmd, args) => CheckToPostMessage((int)MSG.RecipeSkipStep));
            OP.Subscribe($"{Module}.{RtOperation.AbortRecipe}", (cmd, args) => CheckToPostMessage((int)MSG.RecipeAbort));
            OP.Subscribe($"{Module}.{RtOperation.PmAuto}", (cmd, args) => CheckToPostMessage((int)MSG.AutoMode));
            OP.Subscribe($"{Module}.{RtOperation.PmManual}", (cmd, args) => CheckToPostMessage((int)MSG.ManualMode));

            OP.Subscribe($"{Module}.{RtOperation.Heat}", (cmd, args) => CheckToPostMessage((int)MSG.Heat, args));
            OP.Subscribe($"{Module}.{RtOperation.MFCVerification}", (cmd, args) => CheckToPostMessage((int)MSG.MFCVerification, args));
        }

        private void InitFsm()
        {

            //Idle
            EnterExitTransition((int)STATE.Idle, FnIdle, (int)FSM_MSG.NONE, null);
            EnterExitTransition<STATE, FSM_MSG>(STATE.Error, fEnterError, FSM_MSG.NONE, null);
            //Error
            Transition(STATE.Init, MSG.Error, FnError, STATE.Error);
            Transition(STATE.Error, MSG.Reset, FnReset, STATE.Idle);
            AnyStateTransition(MSG.Error, FnError, STATE.Error);
            AnyStateTransition(FSM_MSG.WARNING, fWarning, FSM_STATE.SAME);
            AnyStateTransition((int)FSM_MSG.ALARM, fAlarm, (int)STATE.Error);
            AnyStateTransition(MSG.AutoMode, FnSetAuto, FSM_STATE.SAME);
            AnyStateTransition(MSG.ManualMode, FnSetManual, FSM_STATE.SAME);
            AnyStateTransition(MSG.SetOnline, FnSetOnline, FSM_STATE.SAME);
            AnyStateTransition(MSG.SetOffline, FnSetOffline, FSM_STATE.SAME);
            AnyStateTransition(FSM_MSG.TIMER, FnControlPressure, FSM_STATE.SAME);

            //Home
            EnterExitTransition((int)STATE.Homing, FnEnterHome, (int)FSM_MSG.NONE, FnExitHome);

            Transition(STATE.Init, MSG.Home, FnStartHome, STATE.Homing);
            Transition(STATE.Error, MSG.Home, FnStartHome, STATE.Homing);
            Transition(STATE.Idle, MSG.Home, FnStartHome, STATE.Homing);
            Transition(STATE.Homing, FSM_MSG.TIMER, FnMonitorHome, STATE.Idle);
            Transition(STATE.Homing, MSG.Error, null, STATE.Init);
            Transition(STATE.Homing, MSG.Abort, FnAbortTask, STATE.Init);

            // Gas Flow sequence
            Transition(STATE.Idle, MSG.GasFlow, FnStartGasFlow, STATE.GasFlowing);
            Transition(STATE.GasFlowing, MSG.GasFlow, FnStartGasFlow, STATE.GasFlowing);
            Transition(STATE.GasFlowing, FSM_MSG.TIMER, FnGasFlowTimeout, STATE.Idle);
            Transition(STATE.GasFlowing, MSG.StopGasFlow, FnStopGasFlow, STATE.Idle);
            Transition(STATE.GasFlowing, MSG.Abort, FnAbortGasFlow, STATE.Idle);

            //RF Power sequence
            Transition(STATE.Idle, MSG.RfPower, FnStartRfPower, STATE.RfPowering);
            Transition(STATE.GasFlowing, MSG.RfPower, FnStartRfPower, STATE.RfPowering);
            Transition(STATE.RfPowering, FSM_MSG.TIMER, FnRfPowerTimeout, STATE.Idle);
            Transition(STATE.RfPowering, MSG.Abort, FnAbortRfPower, STATE.Idle);

            // Heat substrate
            Transition(STATE.Idle, MSG.Heat, FnHeat, STATE.Heating);
            Transition(STATE.Heating, FSM_MSG.TIMER, FnHeatTimeout, STATE.Idle);
            Transition(STATE.Heating, MSG.Abort, FnAbortHeating, STATE.Idle);

            //Launch Pump sequence
            Transition(STATE.Idle, MSG.LaunchPump, FnLaunchPump, STATE.LaunchingPump);
            Transition(STATE.LaunchingPump, FSM_MSG.TIMER, FnLaunchPumpTimeout, STATE.Idle);
            Transition(STATE.LaunchingPump, MSG.Abort, FnAbortStartPumping, STATE.Idle);

            //Pump sequence
            Transition(STATE.Idle, MSG.Pump, FnStartPumpDown, STATE.Pumping);
            Transition(STATE.Venting, MSG.Pump, FnVentToPumping, STATE.Pumping);
            Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpDownTimeout, STATE.Idle);
            Transition(STATE.Pumping, MSG.Abort, FnAbortPumping, STATE.Idle);

            //vent sequence
            Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
            Transition(STATE.Pumping, MSG.Vent, FnPumpingToVent, STATE.Venting);
            Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
            Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);

            // Purge sequence
            Transition(STATE.Idle, MSG.CyclePurge, FnStartPurge, STATE.Purging);
            Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
            Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);

            //Leak check sequence
            Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
            Transition(STATE.Idle, MSG.DeleteLeakCheck, FnDeleteLeakCheck, STATE.Idle);
            Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
            Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);

            //MFC verification
            Transition(STATE.Idle, MSG.MFCVerification, FnStartMFCVerification, STATE.MFCVerification);
            Transition(STATE.MFCVerification, FSM_MSG.TIMER, FnMFCVerificationTimeout, STATE.Idle);
            Transition(STATE.MFCVerification, MSG.Abort, FnAbortMFCVerification, STATE.Idle);

            // Transfer
            Transition(STATE.Idle, MSG.PrepareTransfer, FnStartPrepareTransfer, STATE.PrepareTransfer);
            Transition(STATE.PrepareTransfer, FSM_MSG.TIMER, FnPreTransferTimeout, STATE.Idle);
            Transition(STATE.PrepareTransfer, MSG.Abort, FnAbortTask, STATE.Idle);

            Transition(STATE.Idle, MSG.PostTransfer, FnStartPostTransfer, STATE.PostTransfer);
            Transition(STATE.PostTransfer, FSM_MSG.TIMER, FnPostTransferTimeout, STATE.Idle);
            Transition(STATE.PostTransfer, MSG.Abort, FnAbortTask, STATE.Idle);

            Transition(STATE.Idle, MSG.TransferHandoff, FnStartTransferHandoff, STATE.TransferHandoff);
            Transition(STATE.TransferHandoff, FSM_MSG.TIMER, FnTransferHandoffTimeout, STATE.Idle);
            Transition(STATE.TransferHandoff, MSG.Abort, FnAbortTask, STATE.Idle);

            // lift pin
            Transition(STATE.Idle, MSG.MoveLiftPin1, FnSetLiftPin1, STATE.Liftpin1Moving);
            Transition(STATE.Idle, MSG.MoveLiftPin2, FnSetLiftPin2, STATE.Liftpin2Moving);
            Transition(STATE.Liftpin1Moving, FSM_MSG.TIMER, FnLiftpin1Timeout, STATE.Idle);
            Transition(STATE.Liftpin1Moving, FSM_MSG.TIMER, FnLiftpin2Timeout, STATE.Idle);

            // guide pin
            Transition(STATE.Idle, MSG.MoveGuidePin1, FnSetGuidePin, STATE.GuidePin1Moving);
            Transition(STATE.Idle, MSG.MoveGuidePin2, FnSetGuidePin, STATE.GuidePin2Moving);
            Transition(STATE.GuidePin1Moving, FSM_MSG.TIMER, FnGuidePin1Timeout, STATE.Idle);
            Transition(STATE.GuidePin2Moving, FSM_MSG.TIMER, FnGuidePin2Timeout, STATE.Idle);

            //ATM Process
            Transition(STATE.Idle, MSG.ATMProcess, FnStartATMProcess, STATE.ATMProcessing);
            Transition(STATE.ATMProcessing, FSM_MSG.TIMER, FnATMProcessTimeout, STATE.Idle);
            Transition(STATE.ATMProcessing, MSG.Abort, FnAbortATMProcess, STATE.Idle);
            Transition(STATE.ATMProcessing, MSG.RecipeAbort, FnAbortATMProcess, STATE.Idle);


            // PreClean sequence
            Transition(STATE.Idle, MSG.Clean, FnPreClean, STATE.PreClean);
            Transition(STATE.PreClean, FSM_MSG.TIMER, FnPreCleanTimeout, STATE.LoadProcessRecipe);

            // PreProcess sequence
            Transition(STATE.Idle, MSG.RunRecipe, FnProcessLoadRecipe, STATE.LoadProcessRecipe);
            Transition(STATE.LoadProcessRecipe, MSG.PreProcess, FnStartPreProcess, STATE.PreProcess);
            Transition(STATE.LoadProcessRecipe, MSG.Abort, null, STATE.Idle);
            Transition(STATE.LoadProcessRecipe, MSG.Error, null, STATE.Idle);
            Transition(STATE.PreProcess, FSM_MSG.TIMER, FnPreProcessTimeout, STATE.PreProcess);
            Transition(STATE.PreProcess, MSG.Abort, FnAbortPreProcess, STATE.Idle);
            Transition(STATE.PreProcess, MSG.RecipeAbort, FnAbortPreProcess, STATE.Idle);
            Transition(STATE.PreProcess, MSG.Error, FnAbortPreProcess, STATE.Error);

            // Process
            Transition(STATE.PreProcess, MSG.Process, FnStartProcess, STATE.Processing);
            Transition(STATE.Processing, FSM_MSG.TIMER, FnProcessTimeout, STATE.Processing);
            Transition(STATE.Processing, MSG.Error, FnAbortProcess, STATE.Error);
            Transition(STATE.Processing, MSG.RecipeAbort, FnAbortProcess, STATE.PostProcess);
            Transition(STATE.Processing, MSG.RecipePause, FnPauseProcess, STATE.Processing);
            Transition(STATE.Processing, MSG.RecipeResume, FnResumeRecipe, STATE.Processing);
            Transition(STATE.Processing, MSG.RecipeUpdate, FnUpdateRecipe, STATE.Processing);
            Transition(STATE.Processing, MSG.RecipeSkipStep, FnSkipStep, STATE.Processing);
            EnterExitTransition<STATE, FSM_MSG>(STATE.Processing, FnEnterProcess, FSM_MSG.NONE, FnExitProcess);

            //PostProcess sequence
            Transition(STATE.Processing, MSG.PostProcess, FnStartPostProcess, STATE.PostProcess);
            Transition(STATE.PostProcess, FSM_MSG.TIMER, FnPostProcessTimeout, STATE.Idle);
            Transition(STATE.PostProcess, MSG.Abort, FnAbortPostProcess, STATE.Idle);
            Transition(STATE.PostProcess, MSG.RecipeAbort, FnAbortPostProcess, STATE.Idle);

            EnterExitTransition<STATE, FSM_MSG>(STATE.PostProcess, null, FSM_MSG.NONE, fExitPostProcess);
        }

        protected virtual void InitDevice()
        {

        }

        protected virtual void InitInterlock()
        {

        }

        private bool FsmSelectRecipe(object[] param)
        {
            _recipeRunningInfo.RecipeName = (string)param[0];
            return true;
        }

        #region Service functions

        public override bool Home(out string reason)
        {
            CheckToPostMessage((int)MSG.Home);
            reason = string.Empty;
            return true;
        }
        public override void Reset()
        {
            if (IsError)
                CheckToPostMessage((int)MSG.Reset);
        }

        public override bool PrepareTransfer(ModuleName robot, Hand blade, int[] targetSlot, EnumTransferType transferType, out string reason)
        {
            reason = "";
            return true;
        }

        public override bool PrepareTransfer(ModuleName robot, Hand blade, int[] targetSlot, EnumTransferType transferType, double temp1, double temp2, bool EanbleCheck, out string reason, EnumDualPM autoPos = EnumDualPM.None)
        {
            CheckToPostMessage((int)MSG.PrepareTransfer, transferType.ToString(), targetSlot, temp1, temp2, EanbleCheck, (int)blade, autoPos.ToString());
            reason = string.Empty;
            return true;
        }

        public override bool TransferHandoff(ModuleName robot, Hand blade, int[] targetSlot, EnumTransferType transferType, out string reason)
        {
            CheckToPostMessage((int)MSG.TransferHandoff, transferType.ToString(), targetSlot);
            reason = string.Empty;
            return true;
        }

        public override bool PostTransfer(ModuleName robot, Hand blade, int[] targetSlot, EnumTransferType transferType, out string reason)
        {
            CheckToPostMessage((int)MSG.PostTransfer, transferType.ToString(), targetSlot);
            reason = string.Empty;
            return true;
        }

        public override bool CheckTempReady(double Temp1, double Temp2)
        {
            double _checkTemp1;
            double _checkTemp2;
            double _tolerance = SC.GetValue<double>($"System.MaxTemperatureToleranceToTarget");

            if (SC.GetValue<bool>($"{Module}.Chiller1.EnableChiller"))
            {
                _checkTemp1 = (double)_chamber.CoolantOutletTempFB1;
            }
            else
            {
                _checkTemp1 = (double)_chamber.LETempFB1;
            }

            if (SC.GetValue<bool>($"{Module}.Chiller2.EnableChiller"))
            {
                _checkTemp2 = (double)_chamber.CoolantOutletTempFB2;
            }
            else
            {
                _checkTemp2 = (double)_chamber.LETempFB2;
            }
            return ((_chamber1Disabled || Temp1 <= 0) || ((Temp1 - _tolerance) <= _checkTemp1 && _checkTemp1 <= (Temp1 + _tolerance))) &&
               ((_chamber2Disabled || Temp2 <= 0) || ((Temp2 - _tolerance) <= _checkTemp2 && _checkTemp2 <= (Temp2 + _tolerance)));
        }

        public override bool CheckTemp1Alarm(double recipeTemp1)
        {
            double _checkTemp1;
            double _tolerance = SC.GetValue<double>($"System.MaxTemperatureToleranceTransferWafer");
            if (SC.GetValue<bool>($"{Module}.Chiller2.EnableChiller"))
            {
                _checkTemp1 = (double)_chamber.CoolantOutletTempFB1;
            }
            else
            {
                _checkTemp1 = (double)_chamber.LETempFB1;
            }
            return recipeTemp1 > (_checkTemp1 + _tolerance);
        }
        public override bool CheckTemp2Alarm(double recipeTemp2)
        {
            double _checkTemp2;
            double _tolerance = SC.GetValue<double>($"System.MaxTemperatureToleranceTransferWafer");
            if (SC.GetValue<bool>($"{Module}.Chiller1.EnableChiller"))
            {
                _checkTemp2 = (double)_chamber.CoolantOutletTempFB2;
            }
            else
            {
                _checkTemp2 = (double)_chamber.LETempFB2;
            }
            return recipeTemp2 > (_checkTemp2 + _tolerance);
        }

        public override bool CheckTransferTempReady(double Temp1, double Temp2)
        {
            double _checkTemp1;
            double _checkTemp2;
            double _tolerance = SC.GetValue<double>($"System.MaxTemperatureToleranceTransferWafer");

            if (SC.GetValue<bool>($"{Module}.Chiller1.EnableChiller"))
            {
                _checkTemp1 = (double)_chamber.CoolantOutletTempFB1;
            }
            else
            {
                _checkTemp1 = (double)_chamber.LETempFB1;
            }

            if (SC.GetValue<bool>($"{Module}.Chiller2.EnableChiller"))
            {
                _checkTemp2 = (double)_chamber.CoolantOutletTempFB2;
            }
            else
            {
                _checkTemp2 = (double)_chamber.LETempFB2;
            }

            return ((_chamber1Disabled || Temp1 <= 0 ) || ((Temp1 - _tolerance) <= _checkTemp1 && _checkTemp1 <= (Temp1 + _tolerance))) &&
                   ((_chamber2Disabled || Temp2 <= 0 ) || ((Temp2 - _tolerance) <= _checkTemp2 && _checkTemp2 <= (Temp2 + _tolerance)));
        }

        public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
        {
            reason = string.Empty;
            if (targetSlot == 0)
            {
                if (transferType == EnumTransferType.Pick)
                {
                    if (!_chamber.CheckSlitDoor1Open())
                    {
                        reason = "Slit door is closed";
                        return false;
                    }
                    if (!_chamber.CheckLift1Up())
                    {
                        reason = "Lift pin is down";
                        return false;
                    }

                    return _chamber.CheckSlitDoor1Open() && _chamber.CheckLift1Up();
                }
                else if (transferType == EnumTransferType.Place)
                {
                    if (!_chamber.CheckSlitDoor1Open())
                    {
                        reason = "Slit door is closed";
                        return false;
                    }
                    if (!_chamber.CheckLift1Down())
                    {
                        reason = "Lift pin is Up";
                        return false;
                    }
                    return _chamber.CheckSlitDoor1Open() && _chamber.CheckLift1Down();
                }
            }

            if (targetSlot == 1)
            {
                if (transferType == EnumTransferType.Pick)
                {
                    if (!_chamber.CheckSlitDoor2Open())
                    {
                        reason = "Slit door is Closed";
                        return false;
                    }
                    if (!_chamber.CheckLift2Up())
                    {
                        reason = "Lift pin is Down";
                        return false;
                    }
                    return _chamber.CheckSlitDoor2Open() && _chamber.CheckLift2Up();
                }
                else if (transferType == EnumTransferType.Place)
                {
                    if (!_chamber.CheckSlitDoor2Open())
                    {
                        reason = "Slit door is Closed";
                        return false;
                    }
                    if (!_chamber.CheckLift2Down())
                    {
                        reason = "Lift pin is Up";
                        return false;
                    }
                    return _chamber.CheckSlitDoor2Open() && _chamber.CheckLift2Down();
                }
            }
            reason = "Check Ready For Transfer Failed";
            return false;
        }

        public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
        {
            //if (FsmState == (int)STATE.InTransfer)
            //    CheckToPostMessage(MSG.Transfer)
        }

        public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
        {
            //if (FsmState == (int)STATE.InTransfer)
            //    CheckToPostMessage(MSG.Transfer)
        }

        public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, out string reason)
        {
            if (isCleanRecipe)
            {
                CheckToPostMessage((int)MSG.Clean, recipeName, "", withWafer);

                reason = string.Empty;
                return true;
            }

            if (SC.IsATMMode)
            {
                CheckToPostMessage((int)MSG.ATMProcess, recipeName);

                reason = string.Empty;
                return true;
            }

            _recipeRunningInfo.RecipeName = recipeName;

            CheckToPostMessage((int)MSG.RunRecipe, recipeName);

            reason = string.Empty;
            return true;
        }

        public override bool PreparePump(out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool CheckPreparePump()
        {
            throw new NotImplementedException();
        }

        public override bool SlowPump(int tvPosition, out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool FastPump(int tvPosition, out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool TurnOnPump(out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool CheckPumpIsOn()
        {
            throw new NotImplementedException();
        }

        public override bool ShutDownPump(out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool AbortPump()
        {
            throw new NotImplementedException();
        }

        public override bool PrepareVent(out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool CheckPrepareVent()
        {
            throw new NotImplementedException();
        }

        public override bool Vent(out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool StopVent(out string reason)
        {
            throw new NotImplementedException();
        }

        public override bool CloseSlitValve(out string reason)
        {
            return _chamber.SetSlitDoor1(false, out reason) && _chamber.SetSlitDoor2(false, out reason);
        }

        //public override bool CheckSlitValveClose()
        //{
        //    return _chamber.IsSlitDoor1Closed && _chamber.IsSlitDoor2Closed;
        //}

        public override bool CheckLiftUp(int _slot)
        {
            if(_slot == 0)
            {
                return _chamber.CheckLift1Up();
            }
            else if(_slot == 1)
            {
                return _chamber.CheckLift2Up();
            }
            return false;
        }

        public override bool CheckLiftDown(int _slot)
        {
            if (_slot == 0)
            {
                return _chamber.CheckLift1Down();
            }
            else if (_slot == 1)
            {
                return _chamber.CheckLift2Down();
            }
            return false;
        }

        public override bool CheckLidClosed()
        {
            throw new NotImplementedException();
        }



        // Methods
        // 
        private bool FnAbortTask(object[] param)
        {
            //_task.Abort();
            return true;
        }

        private bool FnSetAuto(object[] param)
        {
            this._AutoMode = AutoFlag.Auto;
            return true;
        }

        private bool FnSetManual(object[] param)
        {
            if (FsmState == (int)STATE.PreProcess || FsmState == (int)STATE.Processing || FsmState == (int)STATE.PostProcess)
            {
                EV.PostWarningLog(Module.ToString(), $"{Module} is in {(STATE)FsmState}，can not do SetAutoMode");
                return false;
            }
            this._AutoMode = AutoFlag.Manual;
            return true;
        }

        private bool FnSetOnline(object[] param)
        {
            //if (!SC.IsATMMode && !_chamber.IsVAC)
            //{
            //    EV.PostWarningLog(Module, $"System is not ATM , And {Module} is not VAC cannot online");
            //    return false;
            //}
            //else
            //{
                this._AutoMode = AutoFlag.Auto;
                IsOnline = true;
                return true;
            //}
        }

        private bool FnSetOffline(object[] param)
        {
            IsOnline = false;
            return true;
        }

        #region Gas&RF

        private bool FnStartGasFlow(object[] objs)
        {
            RState ret = _gasFlowRoutine.Start(objs);

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
        }

        private bool FnGasFlowTimeout(object[] objs)
        {
            RState ret = _gasFlowRoutine.Monitor();
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return true;
            }
            return false;
        }

        private bool FnAbortGasFlow(object[] objs)
        {
            _gasFlowRoutine.Abort();
            return true;
        }

        private bool FnStopGasFlow(object[] objs)
        {
            _gasFlowRoutine.StopFlow2();
            return true;
        }

        private bool FnStartRfPower(object[] objs)
        {
            _rfStartTime = DateTime.Now;
            RState ret = _rfPowerRoutine.Start(objs);

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
        }

        private bool FnRfPowerTimeout(object[] objs)
        {
            RState ret = _rfPowerRoutine.Monitor();
            if (ret == RState.End)
                return true;
            else if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing  
                return true;
            }
            return false;
            ;
        }

        private bool FnAbortRfPower(object[] objs)
        {
            _rfPowerRoutine.Abort();
            if (_gasFlowRoutine._gasStatus)
                _gasFlowRoutine.Abort();
            return true;
        }

        private bool FnHeat(object[] objs)
        {
            _tcStartTime = DateTime.Now;
            RState ret = _temperatureControlRoutine.Start(objs);

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
            //return _temperatureControlRoutine.Start(objs) == RState.RUN;
        }

        private bool FnHeatTimeout(object[] param)
        {
            RState ret = _temperatureControlRoutine.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
        }

        private bool FnAbortHeating(object[] param)
        {
            _temperatureControlRoutine.Abort();
            return true;
        }

        #endregion Gas&RF

        #region Subroutine

        private bool FnStartLeakCheck(object[] param)
        {
            _leakCheckStartTime = DateTime.Now;
            RState ret = _leakCheckRoutine.Start(param);

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
            //return _leakCheckRoutine.Start(param) == Result.RUN;
        }

        private bool FnLeakCheckTimeout(object[] param)
        {
            RState ret = _leakCheckRoutine.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
            //return res == Result.DONE || res == Result.FAIL;
        }

        private bool FnDeleteLeakCheck(object[] param)
        {
            _leakCheckRoutine.DeleteLeadCheck(param);
            return true;
        }

        private bool FnAbortLeakCheck(object[] param)
        {
            _leakCheckRoutine.Abort();
            return true;
        }

        private bool FnStartMFCVerification(object[] param)
        {
            _mfcVerification.Init((string)param[0], (float)param[1], (int)param[2]);
            RState ret = _mfcVerification.Start(param);

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
            //return _mfcVerification.Start(param) == Result.RUN;
        }

        private bool FnMFCVerificationTimeout(object[] param)
        {
            RState ret = _mfcVerification.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
            //return res == Result.DONE || res == Result.FAIL;
        }

        private bool FnAbortMFCVerification(object[] param)
        {
            _mfcVerification.Abort();
            return true;
        }

        private bool FnStartVent(object[] param)
        {
            RState ret = _ventRoutine.Start();
            if (ret == RState.End)
            {
                return false;
            }
            else if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
        }

        private bool FnVentTimeout(object[] param)
        {
            RState ret = _ventRoutine.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
        }

        private bool FnVentToPumping(object[] param)
        {
            _ventRoutine.Abort();
            return FnStartPumpDown(param);
        }

        private bool FnAbortVent(object[] param)
        {
            _ventRoutine.Abort();
            return true;
        }

        private bool FnLaunchPump(object[] param)
        {
            _pumpStartTime = DateTime.Now;
            RState ret = _startPumpRoutine.Start(param);

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
            //return _startPumpRoutine.Start() == Result.RUN;
        }

        private bool FnLaunchPumpTimeout(object[] param)
        {
            RState ret = _startPumpRoutine.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
        }

        private bool FnAbortStartPumping(object[] param)
        {
            _startPumpRoutine.Abort();
            return true;
        }

        private bool FnStartPumpDown(object[] param)
        {
            _pumpStartTime = DateTime.Now;
            RState ret = _pumpRoutine.Start(param);

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
            //return _pumpRoutine.Start() == Result.RUN;
        }

        private bool FnPumpDownTimeout(object[] param)
        {
            RState ret = _pumpRoutine.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
        }

        private bool FnPumpingToVent(object[] param)
        {
            _pumpRoutine.Abort();
            return FnStartVent(param);
        }

        private bool FnAbortPumping(object[] param)
        {
            _pumpRoutine.Abort();
            return true;
        }

        private bool FnStartPurge(object[] param)
        {
            RState ret = _cyclePurgeRoutine.Start(param);

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
            //return _cyclePurgeRoutine.Start(param) == Result.RUN;
        }

        private bool FnPurgeTimeout(object[] param)
        {
            RState ret = _cyclePurgeRoutine.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            else if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return true;
            }
            return false;
        }

        private bool FnAbortPurge(object[] param)
        {
            _cyclePurgeRoutine.Abort();
            return true;
        }

        #endregion Subroutine

        #region Transfer
        private bool FnStartPrepareTransfer(object[] param)
        {
            //if (param.Length > 2)
            //    _prepareTrans.Init((EnumTransferType)Enum.Parse(typeof(EnumTransferType), (string)param[0]), (EnumDualPM)Enum.Parse(typeof(EnumDualPM), (string)param[1]), (float)param[2], (WaferSize)param[3]);
            //else if (param.Length > 1)
            //    _prepareTrans.Init((EnumTransferType)Enum.Parse(typeof(EnumTransferType), (string)param[0]), (EnumDualPM)Enum.Parse(typeof(EnumDualPM), (string)param[1]), (float)param[2]);
            //else
            int blade = -1;
            int bladeIndex = 5;
            if(param.Length > bladeIndex)
            {
                int.TryParse(param[bladeIndex].ToString(), out blade);
            }
            EnumDualPM pos = EnumDualPM.None;
            int posIndex = 6;
            if(param.Length > posIndex)
            {
                pos = (EnumDualPM)Enum.Parse(typeof(EnumDualPM), (string)param[posIndex]);
            }
            _prepareTrans.Init((EnumTransferType)Enum.Parse(typeof(EnumTransferType), (string)param[0]), (int[])param[1], (double)param[2], (double)param[3], (bool)param[4], blade, pos);
            RState ret = _prepareTrans.Start();

            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            return true;
            //Result ret = _prepareTrans.Start();
            //if (ret == Result.FAIL || ret == Result.DONE)
            //    return false;
            //return ret == Result.RUN;
        }

        private bool FnPreTransferTimeout(object[] param)
        {
            RState ret = _prepareTrans.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
        }

        private bool FnStartPostTransfer(object[] param)
        {
            _postTrans.Init((EnumTransferType)Enum.Parse(typeof(EnumTransferType), (string)param[0]), (int[])param[1]);
            RState ret = _postTrans.Start();
            if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return false;
            }

            return ret == RState.Running;
        }

        private bool FnPostTransferTimeout(object[] param)
        {
            RState ret = _postTrans.Monitor();
            if (ret == RState.End)
            {
                return true;
            }
            if (ret == RState.Failed || ret == RState.Timeout)
            {
                PostMsg(MSG.Error);
                //do nothing
                return true;
            }
            return false;
        }

        private bool FnStartTransferHandoff(object[] param)
        {
            _transferHandoff.Init((EnumTransferType)Enum.Parse(typeof(EnumTransferType), (string)param[0]), (int[])param[1]);
            RState ret = _transferHandoff.Start();
            if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return false;
            }

            return ret == RState.Running;
        }

        private bool FnTransferHandoffTimeout(object[] param)
        {
            RState ret = _transferHandoff.Monitor();
            if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return false;
            }

            return ret == RState.End;
        }

        private bool FnSetLiftPin1(object[] param)
        {
            MovementPosition pos = (MovementPosition)param[0];
            _ActivatedActionID = (ushort)param[1];

            if (pos == MovementPosition.Down)   //增加Place & Pick的Delay功能
            {
                int LiftDelayTime = SC.GetValue<int>($"{Module}.PlaceAndPickDelayTime") * 1000;
                System.Threading.Thread.Sleep(LiftDelayTime);
            }

            _chamber.SetLiftPin1(pos, out _);
            EV.PostInfoLog(Module.ToString(), $"执行 lift pin {pos}");
            _goalLiftPin = pos;
            return true;
        }

        private bool FnSetLiftPin2(object[] param)
        {
            MovementPosition pos = (MovementPosition)param[0];
            _ActivatedActionID = (ushort)param[1];

            if (pos == MovementPosition.Down)   //增加Place & Pick的Delay功能
            {
                int LiftDelayTime = SC.GetValue<int>($"{Module}.PlaceAndPickDelayTime") * 1000;
                System.Threading.Thread.Sleep(LiftDelayTime);
            }

            _chamber.SetLiftPin2(pos, out _);
            EV.PostInfoLog(Module.ToString(), $"执行 lift pin {pos}");
            _goalLiftPin = pos;
            return true;
        }

        private bool FnLiftpin1Timeout(object[] param)
        {
            if (_chamber.LiftPinPosition == _goalLiftPin)
            {
                EV.PostInfoLog(Module.ToString(), $"lift pin 当前位置 {_chamber.LiftPinPosition}");

                //EquipmentManager.Modules[ModuleName.EFEM].PostMsg(
                //    _goalLiftPin == MovementPosition.Up ? EfemEntity.MSG.PMLiftPinUp : EfemEntity.MSG.PMLiftPinDown, _ActivatedActionID);

                _goalLiftPin = MovementPosition.Unknown;
                _ActivatedActionID = 0;
                return true;
            }
            return false;
        }
        private bool FnLiftpin2Timeout(object[] param)
        {
            if (_chamber.LiftPinPosition == _goalLiftPin)
            {
                EV.PostInfoLog(Module.ToString(), $"lift pin 当前位置 {_chamber.LiftPinPosition}");

                //EquipmentManager.Modules[ModuleName.EFEM].PostMsg(
                //    _goalLiftPin == MovementPosition.Up ? EfemEntity.MSG.PMLiftPinUp : EfemEntity.MSG.PMLiftPinDown, _ActivatedActionID);

                _goalLiftPin = MovementPosition.Unknown;
                _ActivatedActionID = 0;
                return true;
            }
            return false;
        }

        private bool FnSetGuidePin(object[] param)
        {
            WaferSize ws = (WaferSize)param[0];
            MovementPosition pos = (MovementPosition)param[1];

            _chamber.SetGuidePin(ws, pos);

            return true;
        }

        private bool FnGuidePin1Timeout(object[] param)
        {
            return true;
        }
        private bool FnGuidePin2Timeout(object[] param)
        {
            return true;
        }

        private bool FnPreClean(object[] param)
        {
            _cleanRoutine.param = param;
            _chamber.SetSlitDoor1(false, out _);
            _chamber.SetSlitDoor2(false, out _);
            return true;
        }

        private bool FnPreCleanTimeout(object[] param)
        {
            if (_chamber.IsSlitDoor1Closed && _chamber.IsSlitDoor2Closed)
            {
                if (!FnProcessLoadRecipe(_cleanRoutine.param))
                {
                    EV.PostAlarmLog(_chamber.Module.ToString(), "Clean recipe read failed");
                    PostMsg(FSM_MSG.ALARM);
                    return false;
                }
                return true;
            }
            return false;
        }

        #endregion Transfer

        #region Process

        private bool FnStartATMProcess(object[] param)
        {
            RState ret = _ATMProcessRoutine.Start(param);
            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.InProcess);
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.InProcess);
            return true;
        }

        private bool FnATMProcessTimeout(object[] param)
        {

            RState ret = _ATMProcessRoutine.Monitor();
            if (ret == RState.End)
            {
                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Completed);
                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Completed);
                return true;
            }

            if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return true;
            }
            return false;
        }

        private bool FnAbortATMProcess(object[] param)
        {
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Failed);
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Failed);

            _ATMProcessRoutine.Abort();
            return true;
        }

        private bool FnProcessLoadRecipe(object[] param)
        {
            _processStatus = "Succeed to load recipe";
            _recipeStartTime = DateTime.Now;
            RState ret = _preProcessRoutine.LoadRecipe(param);
            if (ret == RState.End)
            {
                PostMsg(MSG.PreProcess);
            }
            else if (ret == RState.Failed)
            {
                _processStatus = "Failed to load recipe";
                return false;
            }
            return true;
        }

        private bool FnStartPreProcess(object[] param)
        {
            _pumpStartTime = DateTime.Now;

            //_processStatus = Resources.PMEntity_fStartPreProcess_PreparingRunningRecipe;

            RState ret = _preProcessRoutine.Start(param);
            if (ret == RState.End)
            {
                return false;
            }

            if (ret == RState.Failed)
            {
                //_processStatus = Resources.PMEntity_fStartPreProcess_PreparingRunningRecipeFailed;
                PostMsg(MSG.Error);
                return false;  //do noting
            }
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.InProcess);
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.InProcess);
            return true;
        }

        private bool FnPreProcessTimeout(object[] param)
        {
            //_processStatus = Resources.PMEntity_fPreProcess_RunRecipePumpingDown;

            RState ret = _preProcessRoutine.Monitor();
            if (ret == RState.End)
            {
                PostMsg(MSG.Process,
                    _preProcessRoutine.CurrentRecipeBaseName,
                    _preProcessRoutine.CurrentRecipeRunningName,
                    0,
                    _preProcessRoutine.CurrentLotName,
                    _preProcessRoutine.CurrentRecipeContent,
                    _preProcessRoutine.CurrentRecipeHead,
                    _preProcessRoutine.CurrentRecipeStepList);
                return true;
            }

            if (ret == RState.Failed)
            {
                //_processStatus = Resources.PMEntity_fPreProcess_RunRecipePumpingDownFailed;
                PostMsg(MSG.Error);
                return true;
            }
            return false; ;
        }

        private bool FnAbortPreProcess(object[] param)
        {
            //_processStatus = Resources.PMEntity_fAbortPreProcess_RunRecipePumpingDownAborted;

            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Failed);
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Failed);

            _preProcessRoutine.Abort();
            return true;
        }

        private bool FnStartProcess(object[] param)
        {
            //_processStatus = Resources.PMEntity_fStartProcess_StartRunningRecipe;

            RState ret = _processRoutine.Start(param);
            if (ret == RState.End)
            {
                return true;
            }
            else if (ret == RState.Failed)
            {
                //_processStatus = Resources.PMEntity_fStartProcess_RunRecipeFailed;
                PostMsg(MSG.Error);
                return true;  //do noting
            }
            return true;
        }

        private bool FnProcessTimeout(object[] param)
        {
            //_processStatus = Resources.PMEntity_fProcess_RunningRecipe;
            RState ret = _processRoutine.Monitor();
            {
                if (ret == RState.End)
                {
                    PostMsg(MSG.PostProcess, _processRoutine.CurrentRecipeRunningName, _processRoutine.CurrentRecipeContent);
                    return true;
                }
                else if (ret == RState.Failed)
                {
                    //_processStatus = Resources.PMEntity_fStartProcess_RunRecipeFailed;
                    PostMsg(MSG.Error);
                    return true;
                }
                return false;
            }
        }

        private bool FnAbortProcess(object[] param)
        {
            //_processStatus = Resources.PMEntity_fAbortProcess_RunningRecipeAborted;
            _processRoutine.AbortRecipe();
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Failed);
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Failed);
            _processRoutine.Abort();
            RState ret = _postProcessRoutine.Start(new object[] { _processRoutine.CurrentRecipeRunningName, _processRoutine.CurrentRecipeContent });
            if (ret == RState.End)
            {
                return false;
            }
            else if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                //_processStatus = Resources.PMEntity_fAbortProcess_RunRecipeAborted;
                return false;  //do noting
            }
            return true;
        }

        private bool FnPauseProcess(object[] param)
        {
            return true;
        }

        private bool FnResumeRecipe(object[] param)
        {
            return true;
        }

        private bool FnUpdateRecipe(object[] param)
        {
            return true;
        }

        private bool FnSkipStep(object[] param)
        {
            _processRoutine.SkipCurrentRecipeStep();
            return true;
        }

        private bool FnExitProcess(object[] param)
        {
            _processRoutine.Exit();
            

            return true;
        }

        private bool FnEnterProcess(object[] param)
        {
            return true;
        }

        private bool FnStartPostProcess(object[] param)
        {
            //_processStatus = Resources.PMEntity_fStartPostProcess_RunRecipePostProcess;

            RState ret = _postProcessRoutine.Start(param);
            if (ret == RState.End)
            {
                return false;
            }
            else if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return false;
            }
            return true;
        }

        private bool FnPostProcessTimeout(object[] param)
        {
            //_processStatus = Resources.PMEntity_fPostProcess_RunRecipeCyclePurge;

            RState ret = _postProcessRoutine.Monitor();
            if (ret == RState.End)
            {

                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Completed);
                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Completed);

                //_processStatus = Resources.PMEntity_fPostProcess_RecipeCompleted;
                return true;
            }
            else if (ret == RState.Failed)
            {
                //_processStatus = Resources.PMEntity_fPostProcess_RunRecipeCyclePurgeError;
                PostMsg(MSG.Error);
                return true;
            }
            return false;
        }

        private bool FnAbortPostProcess(object[] param)
        {
            //_processStatus = Resources.PMEntity_fAbortPostProcess_RecipeAborted;
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Failed);
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Failed);
            _postProcessRoutine.Abort();
            return true;
        }

        private bool fExitPostProcess(object[] objs)
        {
            _postProcessRoutine.Exit();


            //EV.Notify(EventLotFinished, new SerializableDictionary<string, string>()
            //{
            //    {DVIDName.LotId,  preProcessRoutine.CurrentLotName},
            //    {DVIDName.JobId,  preProcessRoutine.CurrentJobName},
            //    {DVIDName.RecipeId, preProcessRoutine.CurrentRecipeBaseName }
            //});

            return true;
        }

        #endregion PROCESS

        private bool FnReset(object[] param)
        {
            _isAlarm = false;
            if ((STATE)FsmState == STATE.Error)
                return true;

            return false;
        }

        public bool Check(int msg, out string reason, object[] objs)
        {
            reason = "";
            return true;
        }

        public bool IsProcessed()
        {
            return IsIdle;
        }

        public override bool IsPrepareTransferReady(EnumTransferType type, EnumDualPM pos, WaferSize waferSize)
        {
            return _chamber.CheckEnableTransfer(type, pos, waferSize);
        }

        public void Home()
        {
            CheckToPostMessage((int)MSG.Home);
        }

        private bool FnExitHome(object[] param)
        {
            return true;
        }

        private bool FnEnterHome(object[] param)
        {
            return true;
        }

        private bool FnStartHome(object[] objs)
        {
            RState ret = _home.Start();
            if (ret == RState.Failed || ret == RState.End)
                return false;
            return ret == RState.Running;
        }

        private bool FnMonitorHome(object[] objs)
        {
            RState ret = _home.Monitor();
            if (ret == RState.Failed)
            {
                PostMsg(MSG.Error);
                return false;
            }

            return ret == RState.End;
        }

        private bool fExitTransfer(object[] objs)
        {
            return true;
        }

        private bool fEnterError(object[] objs)
        {
            //if (IsProcessMode)
            //{

            //    EV.Notify(EventLotFinished, new SerializableDictionary<string, string>()
            //    {
            //        {DVIDName.LotId,  preProcessRoutine.CurrentLotName},
            //        {DVIDName.JobId,  preProcessRoutine.CurrentJobName},
            //        {DVIDName.RecipeId, preProcessRoutine.CurrentRecipeBaseName }
            //    });
            //}

            _chamber.Generator1PowerOn(false);
            _chamber.GeneratorBias1PowerOn(false);
            _chamber.Generator2PowerOn(false);
            _chamber.GeneratorBias2PowerOn(false);
            _chamber.StopAllGases();
            return true;
        }

        private bool FnError(object[] objs)
        {
            OP.DoOperation("TM.SignalTower.ResetBuzzer");

            if (((STATE)FsmState == STATE.Processing) || ((STATE)FsmState == STATE.PreProcess)
                                                      || ((STATE)FsmState == STATE.Homing) || ((STATE)FsmState == STATE.LoadProcessRecipe))
                return false;

            if (IsProcessing)
            {
                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Failed);
                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Failed);
            }

            return true;
        }

        private bool fWarning(object[] objs)
        {
            //IsWarning = false;
            return true;
        }

        private bool fAlarm(object[] objs)
        {

            OP.DoOperation("TM.SignalTower.ResetBuzzer");

            _isAlarm = true;

            if (FsmState == (int)STATE.Init)
                return false;

            if (FsmState == (int)STATE.GasFlowing)
            {
                FnAbortGasFlow(null);
            }

            if (FsmState == (int)STATE.RfPowering)
            {
                FnAbortRfPower(null);
            }
            if (IsProcessing || FsmState == (int)STATE.ATMProcessing)
            {
                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.Failed);
                if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 1, EnumWaferProcessStatus.Failed);
            }
            return true;
        }

        private bool FnIdle(object[] objs)
        {
            return true;
        }

        public int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
        {
            if (CheckToPostMessage((int)MSG.PrepareTransfer, type.ToString()))
                return (int)MSG.PrepareTransfer;

            return (int)FSM_MSG.NONE;
        }
        public int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp)
        {
            if (CheckToPostMessage((int)MSG.PrepareTransfer, type.ToString(), temp))
                return (int)MSG.PrepareTransfer;

            return (int)FSM_MSG.NONE;
        }
        public int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, WaferSize size)
        {
            if (CheckToPostMessage((int)MSG.PrepareTransfer, type.ToString(), temp, size))
                return (int)MSG.PrepareTransfer;

            return (int)FSM_MSG.NONE;
        }
        public int InvokePostTransfer(ModuleName robot, EnumTransferType type, int slot)
        {
            if (CheckToPostMessage((int)MSG.PostTransfer, type.ToString()))
                return (int)MSG.PostTransfer;

            return (int)FSM_MSG.NONE;
        }

        public int InvokeClean(string recipeName, string waferID, bool withWafer)
        {
            if (CheckToPostMessage((int)MSG.Clean, recipeName, waferID, withWafer))
            {
                return (int)MSG.Clean;
            }
            return (int)FSM_MSG.NONE;
        }

        public int InvokeProcess(string recipeName, string waferID, bool withWafer)
        {
            if (CheckToPostMessage((int)MSG.RunRecipe, recipeName, waferID, withWafer))
                return (int)MSG.RunRecipe;

            return (int)FSM_MSG.NONE;
        }

        public override bool InvokePreHeat(double temperature1, double temperature2)
        {
            if (CheckToPostMessage((int)MSG.Heat, (double)temperature1, (double)temperature2))
                return true;

            return false;
        }

        public void InvokeReset()
        {
            PostMsg((int)MSG.Reset);
        }

        public void SetAuto()
        {
            this._AutoMode = AutoFlag.Auto;
        }

        private bool firstflag = false;
        private bool SoftPumpFlag = false;//表示在pump
        private bool FastPumpFlag = false;//表示在pump
        private bool ControlFlag = false;
        private bool InitFlag = true;

        public bool FnControlPressure(object[] objs)
        {
            if (SC.IsATMMode)
            {
                return true;
            }

            if (InitFlag)
            {
                if(_chamber.IsFastPumpOpened)
                {
                    _chamber.OpenValve(ValveType.FAST_PUMP, false);
                }
                InitFlag = false;
            }

            if (!IsIdle)
            {
                firstflag = false;
                SoftPumpFlag = false;
                FastPumpFlag = false;
                ControlFlag = false;
                return true;
            }

            if (IsOnline)
            {
                //控压采用两种方式
                //1. 底压下抽（取决于腔体）
                //2. 联合控压（取决于压力配置）
                if (SC.IsSmartControlPressure)
                {
                    //压力大 softpump先抽
                    if (_chamber.ChamberPressurePressure >= 10000 && !SoftPumpFlag)
                    {
                        if(_chamber.CheckValveSwitchStatus(ValveType.FAST_PUMP, true))
                            _chamber.OpenValve(ValveType.FAST_PUMP,false);

                        if (_chamber.CheckValveSwitchStatus(ValveType.SOFT_PUMP, false))
                            _chamber.OpenValve(ValveType.SOFT_PUMP,true);

                        SoftPumpFlag = true;
                        FastPumpFlag = false;
                    }

                    if (_chamber.ChamberPressurePressure < 10000 && !FastPumpFlag)
                    {
                        if (_chamber.CheckValveSwitchStatus(ValveType.SOFT_PUMP, true))
                            _chamber.OpenValve(ValveType.SOFT_PUMP, false);
                        if (_chamber.CheckValveSwitchStatus(ValveType.FAST_PUMP, false))
                            _chamber.OpenValve(ValveType.FAST_PUMP, true);

                        FastPumpFlag = true;
                        SoftPumpFlag = false;
                    }

                    //如果小于PMControlPressureCheckPoint 开启蝶阀和N2 Purge Gas
                    if (_chamber.ChamberPressurePressure <= SC.PMControlPressureCheckPoint && !ControlFlag)
                    {
                        _chamber.PressureControl(SC.PMControlPressureTarget);

                        if (_chamber.CheckValveSwitchStatus(ValveType.Mfc2, false))
                        {
                            _chamber.OpenValve(ValveType.Mfc2, true);
                            _chamber.SetGas2(SC.GetValue<double>($"{Module}.MFCForPressureControl"));
                        }
                        if (_chamber.CheckValveSwitchStatus(ValveType.PURGE, false))
                            _chamber.OpenValve(ValveType.PURGE, true);
                        if (_chamber.CheckValveSwitchStatus(ValveType.PROCESS, false))
                            _chamber.OpenValve(ValveType.PROCESS, true);
                        

                        ControlFlag = true;
                    }

                    if(_chamber.ChamberPressurePressure > SC.PMControlPressureCheckPoint && ControlFlag)
                    {
                        if (_chamber.CheckValveSwitchStatus(ValveType.Mfc2, true))
                            _chamber.OpenValve(ValveType.Mfc2, false);
                        if (_chamber.CheckValveSwitchStatus(ValveType.PURGE, true))
                            _chamber.OpenValve(ValveType.PURGE, false);
                        if (_chamber.CheckValveSwitchStatus(ValveType.PROCESS, true))
                            _chamber.OpenValve(ValveType.PROCESS, false);
                        ControlFlag = false;
                    }

                }
                else
                {
                    if (_chamber.IsSoftPumpOpened)
                    {
                        if (_chamber.IsFastPumpOpened)
                            _chamber.OpenValve(ValveType.FAST_PUMP, false);

                    }
                    else
                    {
                        if (!_chamber.IsFastPumpOpened)
                        {
                            _chamber.OpenValve(ValveType.FAST_PUMP, true);
                            firstflag = true;
                        }
                    }
                }
            }
            else
            {
                if (SC.IsSmartControlPressure && (SoftPumpFlag || FastPumpFlag || ControlFlag))
                {
                    if (SoftPumpFlag)
                    {

                        if (_chamber.CheckValveSwitchStatus(ValveType.SOFT_PUMP, true))
                            _chamber.OpenValve(ValveType.SOFT_PUMP, false);

                        SoftPumpFlag = false;
                    }

                    if (FastPumpFlag)
                    {
                        if (_chamber.CheckValveSwitchStatus(ValveType.FAST_PUMP, true))
                            _chamber.OpenValve(ValveType.FAST_PUMP, false);
                        FastPumpFlag = false;
                    }

                    if (ControlFlag)
                    {
                        if (_chamber.CheckValveSwitchStatus(ValveType.Mfc2, true))
                            _chamber.OpenValve(ValveType.Mfc2, false);
                        if (_chamber.CheckValveSwitchStatus(ValveType.PURGE, true))
                            _chamber.OpenValve(ValveType.PURGE, false);
                        if (_chamber.CheckValveSwitchStatus(ValveType.PROCESS, true))
                            _chamber.OpenValve(ValveType.PROCESS, false);
                        ControlFlag = false;
                    }

                }
                else
                {
                    if (firstflag && _chamber.IsFastPumpOpened)
                    {
                        _chamber.OpenValve(ValveType.FAST_PUMP, false);
                        firstflag = false;
                    }
                }
            }
            
            
            return true;
        }



        #region EndPoint

        public bool CheckEndPoint()
        {
            EPDDevice epd = DEVICE.GetDevice<EPDDevice>($"{Module}.EPD");

            if (epd == null)
                return false;

            return epd.IsEnd;
        }


        public void StartEndPoint(string config, int index)
        {
            EPDDevice epd = DEVICE.GetDevice<EPDDevice>($"{Module}.EPD");

            if (epd == null)
                return;

            epd.StepStart(config, index);

        }

        public void StopEndPoint()
        {
            EPDDevice epd = DEVICE.GetDevice<EPDDevice>($"{Module}.EPD");

            if (epd == null)
                return;

            epd.StepStop();

        }

        public void EndPointRecipeStop()
        {
            EPDDevice epd = DEVICE.GetDevice<EPDDevice>($"{Module}.EPD");

            if (epd == null)
                return;

            epd.RecipeStop();

        }

        public void EndPointRecipeStart(string recipeName)
        {
            EPDDevice epd = DEVICE.GetDevice<EPDDevice>($"{Module}.EPD");

            if (epd == null)
                return;

            epd.RecipeStart(recipeName);

        }


        #endregion

        #endregion
    }
}