using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace JetVirgoPM.Devices { public enum VirgoDevice { ValveMfc1, ValveMfc2, ValveMfc3, ValveMfc4, ValveMfc5, ValveMfc6, ValveChamberPurge, ValveProcess, ValveN2, ValveSoftPumping, ValveFastPumping, ValveFastVent, ValveN2Supply, MfcGas1, MfcGas2, MfcGas3, MfcGas4, MfcGas5, GasStick1, GasStick2, GasStick3, TemperatureControl, ChamberLid, ATM_SW, VAC_SW, WaterFlow_SW, N2_Pressure, ProcessGauge, PressureGauge, ForelineGauge, MainPump, Chiller1, Chiller2, Rf1, Rf2, BiasRf1, BiasRf2, Match1, Match2, BiasRf1Match, BiasRf2Match, PressureControl, ThrottleValve, HeaterChamber1, HeaterChamber, ForelineHeater, LEHeater1, LEHeater2, Heartbeat, ResetPlcSignal, LiftPin1, LiftPin2, SlitDoor1, SlitDoor2, GuidePin1, GuidePin2, StatisticsRfOnTime, StatisticsPumpOnTime, PlcDateTime, Lid, LidLocker } public enum StateData { RecipeProcessTime, RecipeStepNo, RecipeStepMode, RecipeName, RecipeBaseName, RecipeStepTimeElapsed, RecipeStepTimeSetPoint, RecipeStepRfTimeSetPoint, RecipeStepElectrodeTemp, SmallWafer, MidWafer, BigWafer, RfTimeElapsed, PumpTime, PMState, TMState, IsAutoMode, IsPmOnline, IsTmOnline, PMJobState, TMJobState, PmPlatformState, JobState, JobTmRecipe, JobPmRecipe, JobStartTime, JobStopTime, JobProcessCount, IsPumpingOkForProcess, IsCoolingOkForProcess, IsGasFlowingOkForProcess, IsRfPowering, TotalCycle, ProcessStatus, AlarmEvent, LeakCheckElapseTime, DataLogName, LotName, CurrentMagazineType, SchedulerRecipe, SchedulerState, SchedulerLoadStationInSubstrate, SchedulerRailInSubstrate, SchedulerPmSubstrate, SchedulerRailOutSubstrate, SchedulerLoadStationOutSubstrate, } public enum RtOperation { DeviceOperation, LockLid, UnlockLid, StartPump, Pump, StopPump, GasFlow, StopGasFlow, Cooling, StopCooling, /// /// /// 0:Step mode /// 1:Power on time /// 2:Electrode temperature /// 3:Electrode Critical temperature /// RfPower, Vent, Purge, Abort, Heat, SetConfig, SetPMBChillerState, SetHardwareConfig, RunRecipe, SkipCurrentStep, ResumeRecipe, AbortRecipe, Reset, LeakCheck, DeleteLeakCheck, MFCVerification, SwitchOffBuzzer, // Lift pin & Guide pin MoveLiftPin, MoveGuidePin, StartAutoRun, StopAutoRun, PauseAutoRun, ResumeAutoRun, InitAll, AckError, TmRun, TmStop, PmAuto, PmManual, PmOnline, PmOffline, JobAuto, JobManual, JobRun, JobStop, JobAbort, JobPmLoadRecipe, JobTmLoadRecipe, JobTmRun, JobTmStop, JobPmOnline, JobPmOffline, JobPmProcessDone, JobTmRecovered, } public enum MovementPosition { Unknown, Down, Up, Left, Right, Middle } }