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@@ -52,26 +52,26 @@
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<Step ModuleName="RF1" DeviceType="RF" DisplayName="RF1 Time" ControlName="Rf1.SetPowerOnTime" InputType="NumInput" Min="0" Max="100000" Description="RF1 Power On Time" />
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<Step ModuleName="RF1" DeviceType="RF" DisplayName="Source RF1 Power" ControlName="Rf1.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Source RF1 Power value" />
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<Step ModuleName="RF1" DeviceType="RF" DisplayName="Bias RF1 Power" ControlName="BiasRf1.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Bias RF1 Power value" />
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- <Step ModuleName="RF1" DeviceType="RF" DisplayName="Bias RF1 Mode" ControlName="BiasRf1.SetMatchProcessMode" InputType="ReadOnlySelection" Description="RF1 Match Mode">
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+ <Step ModuleName="RF1" DeviceType="RF" DisplayName="Bias RF1 Mode" ControlName="BiasRf1Match.SetMatchProcessMode" InputType="ReadOnlySelection" Description="RF1 Match Mode">
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<Item DisplayName="Preset Mode" ControlName="Preset" />
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<Item DisplayName="Hold Mode" ControlName="Hold" />
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</Step>
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- <Step ModuleName="RF1" DeviceType="RF" DisplayName="Bias RF1 Match C1" ControlName="BiasRf1.SetMatchPositionC1" InputType="NumInput" Min="0" Max="100" Description="Set RF1 match position C1 value" />
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- <Step ModuleName="RF1" DeviceType="RF" DisplayName="Bias RF1 Match C2" ControlName="BiasRf1.SetMatchPositionC2" InputType="NumInput" Min="0" Max="100" Description="Set RF1 match position C2 value" />
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+ <Step ModuleName="RF1" DeviceType="RF" DisplayName="Bias RF1 Match C1" ControlName="BiasRf1Match.SetMatchPositionC1" InputType="NumInput" Min="0" Max="100" Description="Set RF1 match position C1 value" />
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+ <Step ModuleName="RF1" DeviceType="RF" DisplayName="Bias RF1 Match C2" ControlName="BiasRf1Match.SetMatchPositionC2" InputType="NumInput" Min="0" Max="100" Description="Set RF1 match position C2 value" />
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</Group>
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<Group DisplayName="RF2">
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<Step ModuleName="RF2" DeviceType="RF" DisplayName="RF2 Time" ControlName="Rf2.SetPowerOnTime" InputType="NumInput" Min="0" Max="100000" Description="RF2 Power On Time" />
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<Step ModuleName="RF2" DeviceType="RF" DisplayName="Source RF2 Power" ControlName="Rf2.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Source RF2 Power value" />
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<Step ModuleName="RF2" DeviceType="RF" DisplayName="Bias RF2 Power" ControlName="BiasRf2.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Bias RF2 Power value" />
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- <Step ModuleName="RF2" DeviceType="RF" DisplayName="Bias RF2 Mode" ControlName="BiasRf2.SetMatchProcessMode" InputType="ReadOnlySelection" Description="RF2 Match Mode">
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+ <Step ModuleName="RF2" DeviceType="RF" DisplayName="Bias RF2 Mode" ControlName="BiasRf2Match.SetMatchProcessMode" InputType="ReadOnlySelection" Description="RF2 Match Mode">
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<Item DisplayName="Preset Mode" ControlName="Preset" />
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<Item DisplayName="Hold Mode" ControlName="Hold" />
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</Step>
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- <Step ModuleName="RF2" DeviceType="RF" DisplayName="Bias RF2 Match C1" ControlName="BiasRf2.SetMatchPositionC1" InputType="NumInput" Min="0" Max="100" Description="Set RF2 match position C1 value" />
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- <Step ModuleName="RF2" DeviceType="RF" DisplayName="Bias RF2 Match C2" ControlName="BiasRf2.SetMatchPositionC2" InputType="NumInput" Min="0" Max="100" Description="Set RF2 match position C2 value" />
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+ <Step ModuleName="RF2" DeviceType="RF" DisplayName="Bias RF2 Match C1" ControlName="BiasRf2Match.SetMatchPositionC1" InputType="NumInput" Min="0" Max="100" Description="Set RF2 match position C1 value" />
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+ <Step ModuleName="RF2" DeviceType="RF" DisplayName="Bias RF2 Match C2" ControlName="BiasRf2Match.SetMatchPositionC2" InputType="NumInput" Min="0" Max="100" Description="Set RF2 match position C2 value" />
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</Group>
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</Catalog>
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@@ -142,13 +142,13 @@
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</Restriction>
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</Validation>
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</TableRecipeFormat>
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- <TableRecipeData RecipeVersion="EfemDual" Barcode="" CreatedBy="System" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" PressureMode="TV" BasePressure="0.0" Chamber1Temperature="50" Chamber2Temperature="50" PumpingPinState="Down" PumpDownLimit="120" PurgeActive="false" Description="(Empty)" NotToPurgeOrVent="false" VentingPinState="Down" PinDownPressure="1000">
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+ <TableRecipeData RecipeVersion="EfemDual" Barcode="" CreatedBy="System" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" PressureMode="TV" BasePressure="0.0" Chamber1Temperature="50" Chamber2Temperature="50" PumpingPinState="Down" PumpDownLimit="120" PurgeActive="false" Description="(Empty)" NotToPurgeOrVent="true" VentingPinState="Down" PinDownPressure="1000">
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<Step StepNo="Step 1" Name="initial" Loop=" " Time="0" EndBy="EndByStepTime">
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<Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="50" PressureControl.SetBoostPressure="100" PressureControl.SetChamberPressure="100" />
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<Pin1 LiftPin1.SetState="Down"/>
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<Pin2 LiftPin2.SetState="Down"/>
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- <RF1 Rf1.SetPowerOnTime ="0" Rf1.SetMode ="ContinuousWaveMode" Match1.SetMatchProcessMode="PresetMode" Rf1.SetPower="0" BiasRf1.SetPower="0" BiasRf1.SetMatchProcessMode="Preset" BiasRf1.SetMatchPositionC1="50" BiasRf1.SetMatchPositionC2="50" Rf1.SetPulsingDuty="0" Rf1.SetPulsingFrequency="0" Match1.SetMatchPositionC1="50" Match1.SetMatchPositionC2="50" />
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- <RF2 Rf2.SetPowerOnTime ="0" Rf2.SetMode ="ContinuousWaveMode" Match2.SetMatchProcessMode="PresetMode" Rf2.SetPower="0" BiasRf2.SetPower="0" BiasRf2.SetMatchProcessMode="Preset" BiasRf2.SetMatchPositionC1="50" BiasRf2.SetMatchPositionC2="50" Rf2.SetPulsingDuty="0" Rf2.SetPulsingFrequency="0" Match2.SetMatchPositionC1="50" Match2.SetMatchPositionC2="50" />
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+ <RF1 Rf1.SetPowerOnTime ="0" Rf1.SetMode ="ContinuousWaveMode" Match1.SetMatchProcessMode="PresetMode" Rf1.SetPower="0" BiasRf1.SetPower="0" BiasRf1Match.SetMatchProcessMode="Preset" BiasRf1Match.SetMatchPositionC1="50" BiasRf1Match.SetMatchPositionC2="50" Rf1.SetPulsingDuty="0" Rf1.SetPulsingFrequency="0" Match1.SetMatchPositionC1="50" Match1.SetMatchPositionC2="50" />
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+ <RF2 Rf2.SetPowerOnTime ="0" Rf2.SetMode ="ContinuousWaveMode" Match2.SetMatchProcessMode="PresetMode" Rf2.SetPower="0" BiasRf2.SetPower="0" BiasRf2Match.SetMatchProcessMode="Preset" BiasRf2Match.SetMatchPositionC1="50" BiasRf2Match.SetMatchPositionC2="50" Rf2.SetPulsingDuty="0" Rf2.SetPulsingFrequency="0" Match2.SetMatchPositionC1="50" Match2.SetMatchPositionC2="50" />
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<Mfc MfcGas1 ="0" MfcGas2="0" MfcGas3="0" MfcGas4="0" MfcGas5="0" MfcGas6="0"/>
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<EndPoint EPD.SetConfig=""/>
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<SoftTolerance MfcGas1.SoftTolerance ="5" MfcGas2.SoftTolerance="5" MfcGas3.SoftTolerance="5" MfcGas4.SoftTolerance="5" MfcGas5.SoftTolerance="5" MfcGas6.SoftTolerance="5" PressureControl.SoftTolerance="0" Rf1.SoftTolerance="5" Rf2.SoftTolerance="5" BiasRf1.SoftTolerance="5" BiasRf2.SoftTolerance="5" />
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@@ -206,9 +206,9 @@
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<xs:attribute name="Rf1.SetPulsingDuty" type="xs:double" use="optional" />
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<xs:attribute name="Rf1.SetPower" type="xs:double" use="required" />
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<xs:attribute name="BiasRf1.SetPower" type="xs:double" use="required" />
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- <xs:attribute name="BiasRf1.SetMatchProcessMode" type="xs:string" use="required" />
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- <xs:attribute name="BiasRf1.SetMatchPositionC1" type="xs:double" use="required" />
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- <xs:attribute name="BiasRf1.SetMatchPositionC2" type="xs:double" use="required" />
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+ <xs:attribute name="BiasRf1Match.SetMatchProcessMode" type="xs:string" use="required" />
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+ <xs:attribute name="BiasRf1Match.SetMatchPositionC1" type="xs:double" use="required" />
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+ <xs:attribute name="BiasRf1Match.SetMatchPositionC2" type="xs:double" use="required" />
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<xs:attribute name="Match1.SetMatchProcessMode" type="xs:string" use="required" />
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<xs:attribute name="Match1.SetMatchPositionC1" type="xs:double" use="required" />
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<xs:attribute name="Match1.SetMatchPositionC2" type="xs:double" use="required" />
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@@ -222,9 +222,9 @@
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<xs:attribute name="Rf2.SetPulsingDuty" type="xs:double" use="optional" />
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<xs:attribute name="Rf2.SetPower" type="xs:double" use="required" />
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<xs:attribute name="BiasRf2.SetPower" type="xs:double" use="required" />
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- <xs:attribute name="BiasRf2.SetMatchProcessMode" type="xs:string" use="required" />
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- <xs:attribute name="BiasRf2.SetMatchPositionC1" type="xs:double" use="required" />
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- <xs:attribute name="BiasRf2.SetMatchPositionC2" type="xs:double" use="required" />
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+ <xs:attribute name="BiasRf2Match.SetMatchProcessMode" type="xs:string" use="required" />
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+ <xs:attribute name="BiasRf2Match.SetMatchPositionC1" type="xs:double" use="required" />
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+ <xs:attribute name="BiasRf2Match.SetMatchPositionC2" type="xs:double" use="required" />
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<xs:attribute name="Match2.SetMatchProcessMode" type="xs:string" use="required" />
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<xs:attribute name="Match2.SetMatchPositionC1" type="xs:double" use="required" />
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<xs:attribute name="Match2.SetMatchPositionC2" type="xs:double" use="required" />
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