Mars200/JetVirgoPM/PMs/RecipeExecutors/ProcessRoutine.cs

using System;
using System.Collections.Generic;
using System.Xml;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using JetVirgoPM.Devices;
using JetVirgoPM.PMs.Routines;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.ModuleLibrary.PMModules;

namespace JetVirgoPM.PMs.RecipeExecutors
{
    class ProcessRoutine : PMRoutineBase
    {
        private enum RecipeEngineState
        {
            Error,
            RecipeCompleted,
            ExecStep,
            TimeWait,
            EndPointWait,
            StepCompleted,
            Paused,
        }

        private object _lockerTotalCycle = new object();
        private Dictionary<string, int> _recipeTotalCycle = new Dictionary<string, int>();

        private DeviceTimer _beginPauseTimer = new DeviceTimer();


        private object _recipeLocker = new object();


        private RecipeEngineState _state = RecipeEngineState.ExecStep;

        private RecipeEngineState _pausedState = RecipeEngineState.ExecStep;
        private DeviceTimer _estimatedTimeCalcTimer = new DeviceTimer();//用于定时计算工艺程序估计的结束时间

        public DateTime RecipeStartTime { get; private set; }
        public int RecipeChangeNo { get; private set; }
        public string CurrentRecipeBaseName { get; private set; }
        public string CurrentRecipeRunningName { get; private set; }
        public string CurrentRecipeContent { get; private set; }
        public string CurrentLotName { get; set; }

        private List<RecipeStep> _recipeStepList = new List<RecipeStep>();

        public List<RecipeStep> CurrentRecipeStepList
        {
            get
            {
                return _recipeStepList;
            }
            set
            {
                _recipeStepList = value;
            }
        }

        public RecipeHead CurrentRecipeHead { get; set; }

        public int CurStepNum { get; private set; }

        public int CurStepTotalLoopCount { get; private set; }

        public double CurStepTotalTime
        {
            get
            {
                if (_recipeStepList == null || _recipeStepList.Count == 0 || _state == RecipeEngineState.RecipeCompleted || _state == RecipeEngineState.Error)
                    return 0;
                return _recipeStepList[CurStepNum].StepTime * 1000;
            }
        }

        public int CurrentLoopCount
        {
            get;
            private set;
        }

        private DeviceTimer StepTimer = new DeviceTimer();

        public bool IsPaused
        {
            private set;
            get;
        }

        public string CurStepComment
        {
            get
            {
                if (_recipeStepList == null || _recipeStepList.Count == 0)
                    return string.Empty;
                return _recipeStepList[CurStepNum].StepName;
            }
        }

        public double CurStepLeftTime
        {
            get
            {
                if (IsPaused)
                    return StepTimer.GetTotalTime() - StepTimer.GetElapseTime() + _beginPauseTimer.GetElapseTime();
                //return Math.Max(0,StepTimer.GetTotalTime() - StepTimer.GetElapseTime());
                return StepTimer.GetTotalTime() - StepTimer.GetElapseTime();
            }
        }

        public double CurStepElpasedTime
        {
            get
            {
                if (_recipeStepList == null || _recipeStepList.Count == 0 || _state == RecipeEngineState.RecipeCompleted || _state == RecipeEngineState.Error)
                    return 0;

                return StepTimer.GetElapseTime();
            }
        }

        public double CurStepTotalRfTime
        {
            get
            {
                if (_recipeStepList == null || _recipeStepList.Count == 0 || _state == RecipeEngineState.RecipeCompleted || _state == RecipeEngineState.Error)
                    return 0;

                if (_recipeStepList[CurStepNum].RecipeCommands.ContainsKey("Rf.SetPower") &&
                    !string.IsNullOrEmpty(_recipeStepList[CurStepNum].RecipeCommands["Rf.SetPower"]) &&
                    Convert.ToDouble(_recipeStepList[CurStepNum].RecipeCommands["Rf.SetPower"]) > 0.1)
                    return CurStepTotalTime;

                return 0;
            }
        }

        public int TotalCycle
        {
            get
            {
                if (string.IsNullOrEmpty(DateTimeRecipeBaseName))
                    return 0;

                lock (_lockerTotalCycle)
                {
                    if (_recipeTotalCycle.ContainsKey(DateTimeRecipeBaseName))
                        return _recipeTotalCycle[DateTimeRecipeBaseName];
                }

                return 0;
            }
        }

        public string DateTimeRecipeBaseName
        {
            get
            {
                if (string.IsNullOrEmpty(CurrentRecipeBaseName))
                    return "";
                return DateTime.Now.ToString("yyyyMMdd") + CurrentRecipeBaseName;
            }
        }

        public double PausedTime
        {
            get
            {
                return IsPaused ? _beginPauseTimer.GetElapseTime() : 0;
            }
        }

        public double EstimatedTotalLeftTime
        {
            get;
            private set;
        }

        public int RecipeTotalStepNum
        {
            get
            {
                return _recipeStepList.Count;
            }
        }

        protected PMModule _chamberEntity;

        private RecipeFACallback _faCallback;
        private RecipeDBCallback _dbCallback;
        private Fdc _fdc;
        private bool _processEnableCheckLE;

        public ProcessRoutine(JetDualPM chamber, PMModule pmModule) : base(chamber)
        {
            Name = "ProcessRoutine";

            RecipeStartTime = new DateTime(0);
            EstimatedTotalLeftTime = 0;
            CalcEstimatedRecipeEndTime();

            _chamberEntity = pmModule;

            _faCallback = new RecipeFACallback();
            _dbCallback = new RecipeDBCallback();
            _fdc = new Fdc(Module);
        }

        public RState Start(params object[] param)
        {
            RecipeStartTime = DateTime.Now;
            CurrentRecipeBaseName = (string)param[0];
            CurrentRecipeRunningName = (string)param[1];
            RecipeChangeNo = (int)param[2];

            CurrentLotName = (string)param[3];
            CurrentRecipeContent = (string)param[4];
            CurrentRecipeHead = (RecipeHead)param[5];
            CurrentRecipeStepList = (List<RecipeStep>)param[6];
            _processEnableCheckLE = SC.GetValue<bool>($"System.ProcessEnableCheckLE");

            if (!_chamber.NotHasInterlock)
            {
                EV.PostAlarmLog(Module, "射频电源 Interlock条件不满足");
                return RState.Failed;
            }

            lock (_lockerTotalCycle)
            {
                if (_recipeTotalCycle.ContainsKey(DateTimeRecipeBaseName))
                    _recipeTotalCycle[DateTimeRecipeBaseName] += 1;
                else
                {
                    _recipeTotalCycle[DateTimeRecipeBaseName] = 1;
                }

                List<string> keys = new List<string>();
                foreach (KeyValuePair<string, int> item in _recipeTotalCycle)
                {
                    if (!item.Key.StartsWith(DateTime.Now.ToString("yyyyMMdd")))
                        keys.Add(item.Key);
                }
                foreach (string key in keys)
                {
                    _recipeTotalCycle.Remove(key);
                }
            }

            _chamber.OpenValve(ValveType.PURGE, true);
            _chamber.OpenValve(ValveType.PROCESS, true);

            CurStepNum = CurStepTotalLoopCount = 0;
            _estimatedTimeCalcTimer.Start(1000);

            EV.PostInfoLog(Module, $"工艺程序 {CurrentRecipeRunningName} 开始运行");

            _chamberEntity.RecipeRunningInfo.InnerId = Guid.NewGuid();
            _chamberEntity.RecipeRunningInfo.BeginTime = DateTime.Now;
            _chamberEntity.RecipeRunningInfo.RecipeName = CurrentRecipeBaseName;
            _chamberEntity.RecipeRunningInfo.RecipeStepList = CurrentRecipeStepList;

            //ProcessDataRecorder.UpdateStatus(RecipeRunGuid.ToString(), SusceptorStatus.InProcessing.ToString(), Module);

            _state = RecipeEngineState.ExecStep;

            double totalTime = 0;
            foreach (var step in CurrentRecipeStepList)
            {
                totalTime += step.StepTime;
            }

            _faCallback.RecipeStart(_chamber.Module.ToString(), CurrentRecipeBaseName);

            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).IsEmpty)
                _dbCallback.RecipeStart(_chamber.Module.ToString(), 0, _chamberEntity.RecipeRunningInfo.InnerId.ToString(), _chamberEntity.RecipeRunningInfo.RecipeName);
            if (!WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 1).IsEmpty)
                _dbCallback.RecipeStart(_chamber.Module.ToString(), 1, _chamberEntity.RecipeRunningInfo.InnerId.ToString(), _chamberEntity.RecipeRunningInfo.RecipeName);

            _dbCallback.RecipeUpdateStatus(_chamberEntity.RecipeRunningInfo.InnerId.ToString(), "InProcess", (float)totalTime);

            _fdc.Reset();

            _chamberEntity.EndPointRecipeStart(CurrentRecipeBaseName);


            return Runner.Start(_chamber.Module.ToString(), Name);
        }

        /// <summary>
        /// quiting current state
        /// </summary>
        /// <param name="nextState"></param>
        public void Exit()
        {
            _chamber.IsPressureToleranceEnabled = false;

            var ts = DateTime.Now - RecipeStartTime;
            var totalTime = $"{Convert.ToInt32(ts.TotalHours)}:{ts.Minutes}:{ts.Seconds}";

            bool isProcessCompleted = _state == RecipeEngineState.RecipeCompleted;

            if (isProcessCompleted)
            {

                EV.PostInfoLog(Module, $"工艺程序 {CurrentRecipeRunningName} 正常运行完毕");


                _faCallback.RecipeComplete(_chamber.Module.ToString(), CurrentRecipeBaseName);

                _dbCallback.RecipeComplete(_chamberEntity.RecipeRunningInfo.InnerId.ToString());

                _fdc.Stop();
            }
            else
            {
                _faCallback.RecipeFailed(_chamber.Module.ToString(), CurrentRecipeBaseName);
                _dbCallback.RecipeFailed(_chamberEntity.RecipeRunningInfo.InnerId.ToString());


                _chamberEntity.StopEndPoint();


                string info = string.Format("Recipe：{0}\r\nStart time：{1:yyyy/MM/dd HH:mm:ss}\r\nEnd time：{2:yyyy/MM/dd HH:mm:ss}\r\nTotal time：{3}",
                    CurrentRecipeRunningName, RecipeStartTime, DateTime.Now, totalTime);

                EV.PostWarningLog(Module, info);
                EV.PostPopDialogMessage(EventLevel.Warning, $"{Module} recipe was aborted", info);

            }


            _chamberEntity.EndPointRecipeStop();

            //重置工艺程序名
            CurrentRecipeRunningName = string.Empty;
            CurrentLotName = string.Empty;

            var tolerance = _chamberEntity.RecipeRunningInfo.RecipeStepList[0].ToleranceCommands;
            foreach (var cmd in tolerance)
            {
                OP.DoOperation($"{Module}.{cmd.Key}", out string reason1, 0, new object[] { "0", "0", "0" });
            }

        }

        public RState Monitor()
        {
            string reason = string.Empty;

            CalcEstimatedRecipeEndTime();


            //工艺程序运行监控，自动打开阀门如果对应的MFC设定设置大于0
            _chamber.Monitor();
            if (_chamber.IsError)
                return RState.Failed;

            if (_processEnableCheckLE)
            {
                if ((!_chamber.LETemp1ON && !_chamber.Chamber1Disable) || (!_chamber.LETemp2ON && !_chamber.Chamber2Disable))
                {
                    EV.PostAlarmLog(Module, $"腔体工艺时底座温度不能被关闭");
                    return RState.Failed;
                }
            }
            
                
            //工艺程序运行引擎
            lock (_recipeLocker)
            {
                try
                {
                    switch (_state)
                    {
                        case RecipeEngineState.ExecStep:
                            {
                                //工艺程序循环设置
                                if (_recipeStepList[CurStepNum].IsLoopStartStep)
                                {
                                    CurStepTotalLoopCount = _recipeStepList[CurStepNum].LoopCount;
                                    if (CurStepTotalLoopCount == 0)
                                    {
                                        CurrentLoopCount = 0;
                                    }
                                    else
                                    {
                                        CurrentLoopCount++;
                                    }
                                }
                                //当前工艺程序步的定时器设定
                                StepTimer.Start(_recipeStepList[CurStepNum].StepTime * 1000);


                                //发送信息到用户界面
                                EV.PostInfoLog(Module, $"工艺程序 {CurrentRecipeRunningName} 第{CurStepNum + 1} 步开始：{_recipeStepList[CurStepNum].StepName}");

                                //执行工艺程序命令
                                foreach (var cmdkey in _recipeStepList[CurStepNum].RecipeCommands.Keys)
                                {
                                    string recipeCmd = cmdkey;
                                    string param = _recipeStepList[CurStepNum].RecipeCommands[recipeCmd];

                                    if (string.IsNullOrWhiteSpace(param)) continue;
                                    if (recipeCmd == "EPD.SetConfig" && !_chamber.EPDIsEnable)
                                        continue;

                                    if (!OP.CanDoOperation($"{Module}." + recipeCmd, out reason, param))
                                    {
                                        EV.PostAlarmLog(Module, $"不能执行 {recipeCmd}, {reason}");
                                        return RState.Failed;
                                    }
                                    else
                                    {
                                        var rampTime_ms = (int)(_recipeStepList[CurStepNum].StepTime * 1000);

                                        if (_recipeStepList[CurStepNum].IsJumpStep)
                                            rampTime_ms = 0;

                                        if (recipeCmd.StartsWith("Rf1"))
                                        {
                                            if (!SC.IsATMMode && !_chamber.Chamber1Disable)
                                                OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, param);
                                        }
                                        else if (recipeCmd.StartsWith("BiasRf1"))
                                        {
                                            if (!SC.IsATMMode && !_chamber.Chamber1Disable && WaferManager.Instance.CheckHasWafer(Module, 0))
                                                OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, param);
                                        }
                                        else if (recipeCmd.StartsWith("Rf2"))
                                        {
                                            if (!SC.IsATMMode && !_chamber.Chamber2Disable)
                                                OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, param);
                                        }
                                        else if (recipeCmd.StartsWith("BiasRf2"))
                                        {
                                            if (!SC.IsATMMode && !_chamber.Chamber2Disable && WaferManager.Instance.CheckHasWafer(Module, 1))
                                                OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, param);
                                        }
                                        else if (recipeCmd == "EPD.SetConfig")
                                        {
                                            if (_chamber.EPDIsEnable)
                                                OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, CurStepNum, _recipeStepList[CurStepNum].RecipeCommands[recipeCmd]);
                                        }
                                        else if (recipeCmd == "LiftPin1.SetState")
                                        {
                                            if (!_chamber.Chamber1Disable)
                                            {
                                                OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, param);
                                            }
                                        }
                                        else if (recipeCmd == "LiftPin2.SetState")
                                        {
                                            if (!_chamber.Chamber2Disable)
                                            {
                                                OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, param);
                                            }
                                        }
                                        else
                                        {
                                            OP.DoOperation($"{Module}." + recipeCmd, out string reason1, rampTime_ms, param);
                                        }

                                    }
                                }

                                foreach (var toleranceCommand in _recipeStepList[CurStepNum].ToleranceCommands)
                                {
                                    OP.DoOperation($"{Module}." + toleranceCommand.Key, out string reason1, 0, toleranceCommand.Value);

                                }

                                string endby = _recipeStepList[CurStepNum].EndBy;

                                if (!string.IsNullOrEmpty(endby) && endby == "EndByEndPoint")
                                {
                                    _state = RecipeEngineState.EndPointWait;
                                }
                                else
                                {
                                    _state = RecipeEngineState.TimeWait;
                                }

                                _faCallback.RecipeStepStart(_chamber.Module.ToString(), CurrentRecipeBaseName, CurStepNum);
                                _dbCallback.RecipeStepStart(_chamberEntity.RecipeRunningInfo.InnerId.ToString(), CurStepNum, _chamberEntity.RecipeRunningInfo.RecipeStepList[CurStepNum].StepName, (float)_chamberEntity.RecipeRunningInfo.RecipeStepList[CurStepNum].StepTime);
                                _fdc.Start(_chamberEntity.RecipeRunningInfo.RecipeStepList[CurStepNum].RecipeCommands);
                            }
                            break;

                        case RecipeEngineState.TimeWait:
                            _chamber.CheckPressureStability();

                            if (StepTimer.IsTimeout())
                            {
                                _state = RecipeEngineState.StepCompleted;
                            }
                            break;

                        case RecipeEngineState.EndPointWait:
                            {
                                if (_chamberEntity.CheckEndPoint())
                                {
                                    _state = RecipeEngineState.StepCompleted;
                                }

                                if (StepTimer.IsTimeout())
                                {
                                    if (_recipeStepList[CurStepNum].FaultIfNoEPDTrigger)
                                    {
                                        EV.PostAlarmLog(Module, $"{_chamberEntity.Module} EPD step not triggered, timeout");
                                        return RState.Failed;
                                    }
                                    else
                                    {
                                        EV.PostWarningLog(Module, $"{_chamberEntity.Module} EPD step not triggered, skipped");
                                    }

                                    _state = RecipeEngineState.StepCompleted;
                                }
                            }
                            break;

                        case RecipeEngineState.Paused:
                            break;

                        case RecipeEngineState.StepCompleted:
                            {
                                _chamber.CheckPressureDisable();
                                EV.PostInfoLog(Module, $"工艺程序 {CurrentRecipeRunningName} 第{CurStepNum + 1}步结束");

                                _chamberEntity.StopEndPoint();

                                _faCallback.RecipeStepEnd(_chamber.Module.ToString(), CurrentRecipeBaseName, CurStepNum);
                                _dbCallback.RecipeStepEnd(_chamberEntity.RecipeRunningInfo.InnerId.ToString(), CurStepNum, _fdc.DataList);
                                _fdc.Stop();

                                //判断是否当前步循环终止
                                if (_recipeStepList[CurStepNum].IsLoopEndStep)
                                {
                                    //重新读取循环的设定次数
                                    for (int nn = CurStepNum; nn >= 0; nn--)
                                    {
                                        if (_recipeStepList[nn].IsLoopStartStep)
                                        {
                                            CurStepTotalLoopCount = _recipeStepList[nn].LoopCount;
                                            break;
                                        }
                                    }
                                    if (CurrentLoopCount >= CurStepTotalLoopCount)
                                    {
                                        CurrentLoopCount = CurStepTotalLoopCount = 0;
                                        CurStepNum++;
                                    }
                                    else
                                    {
                                        int n = CurStepNum - 1;
                                        int next = -1;
                                        while (n >= 0)
                                        {
                                            if (_recipeStepList[n].IsLoopStartStep)
                                            {
                                                next = n;
                                                break;
                                            }
                                            n--;
                                        }
                                        if (next == -1)
                                            throw new Exception("Loop End control error");
                                        CurStepNum = next;
                                    }
                                }
                                else
                                {
                                    if (CurStepNum < _recipeStepList.Count - 1)
                                    {
                                        CurStepNum++;
                                        _state = RecipeEngineState.ExecStep;
                                    }
                                    else
                                    {
                                        EV.PostInfoLog(Module, $"工艺 {CurrentRecipeRunningName} 完毕");

                                        CurStepNum = _recipeStepList.Count - 1;
                                        _state = RecipeEngineState.RecipeCompleted;

                                        return RState.End;
                                    }
                                }
                            }
                            break;

                        case RecipeEngineState.RecipeCompleted:
                            return RState.End;

                        case RecipeEngineState.Error:
                            return RState.Failed;
                        default:
                            break;
                    }
                }
                catch (Exception ex)
                {
                    EV.PostAlarmLog(Module, $"{CurStepNum + 1}, 语法错误, {ex.Message}");
                    return RState.Failed;
                }
            }
            return RState.Running;
        }

        /// <summary>
        /// 暂停工艺程序运行
        /// </summary>
        public void PauseRecipe()
        {
            if (_state != RecipeEngineState.TimeWait && _state != RecipeEngineState.EndPointWait)
                return;

            if (!IsPaused)
            {
                string reason = string.Empty;
                IsPaused = true;
                _pausedState = _state;
                _state = RecipeEngineState.Paused;
                _beginPauseTimer.Start(0);



                EV.PostInfoLog(Module, $"工艺程序'{CurrentRecipeRunningName}'第{CurStepNum + 1}步暂停");

            }
        }

        /// <summary>
        /// 恢复工艺程序运行
        /// </summary>
        public void ResumeRecipe()
        {
            if (IsPaused)
            {
                //update current recipe step time
                string recipeXml = CurrentRecipeContent;
                int currentStepNo = CurStepNum;
                XmlDocument xmlDoc = new XmlDocument();
                xmlDoc.LoadXml(recipeXml);
                var stepNodes = xmlDoc.SelectNodes("/TableRecipeData/Step");
                if (currentStepNo >= 0 && currentStepNo < stepNodes.Count)
                {
                    var curStepNode = stepNodes[currentStepNo] as XmlElement;
                    var curStepNewTime = CurStepTotalTime + PausedTime;
                    if (curStepNewTime < 0)
                        curStepNewTime = 0;
                    TimeSpan tspan = new TimeSpan(0, 0, 0, 0, (int)curStepNewTime);
                    var timeString =
                        $"{((int)tspan.TotalHours).ToString("00")}:{tspan.Minutes.ToString("00")}:{tspan.Seconds.ToString("00")}";
                    curStepNode.SetAttribute("Time", timeString);
                    LOG.Write($"执行Resume命令，将当前第{currentStepNo}步时间修改为{timeString}");

                    UpdateRecipe(xmlDoc.OuterXml);
                }

                //Resume recipe

                IsPaused = false;
                _state = _pausedState;

                EV.PostInfoLog(Module, $"工艺程序'{CurrentRecipeRunningName}'第{CurStepNum + 1}步继续");

                //resume recipe
                double stepElapsedTime = StepTimer.GetElapseTime() - _beginPauseTimer.GetElapseTime();
                double stepLeftTime = StepTimer.GetTotalTime() - stepElapsedTime;
                if (stepLeftTime < 0)
                    stepLeftTime = 0;

                //更新当前步的定时器时间
                StepTimer.Restart(StepTimer.GetTotalTime() + _beginPauseTimer.GetElapseTime());

                //重新执行当前工艺程序步
                foreach (var recipeCmd in _recipeStepList[CurStepNum].RecipeCommands.Keys)
                {
                    if (!DEVICE.CanDo(recipeCmd))
                    {
                        EV.PostInfoLog(Module, $"不可识别的工艺程序控制命令{recipeCmd}");
                    }
                    else
                    {
                        var rampTime_ms = (int)(_recipeStepList[CurStepNum].StepTime * 1000);
                        if (_recipeStepList[CurStepNum].IsJumpStep)
                            rampTime_ms = 0;
                        DEVICE.Do(recipeCmd, rampTime_ms, false, _recipeStepList[CurStepNum].RecipeCommands[recipeCmd]);
                    }
                }
            }
        }

        /// <summary>
        /// 终止工艺程序运行
        /// </summary>
        public void AbortRecipe()
        {
            ResumeRecipe();

            _chamberEntity.StopEndPoint();

            _state = RecipeEngineState.Error;
            CalcEstimatedRecipeEndTime();

            _faCallback.RecipeFailed(_chamber.Module.ToString(), CurrentRecipeBaseName);
            _dbCallback.RecipeFailed(_chamberEntity.RecipeRunningInfo.InnerId.ToString());
            _fdc.Stop();

            EV.PostInfoLog(Module, "工艺程序被终止运行");
        }

        /// <summary>
        /// 跳至工艺程序下一步
        /// </summary>
        public void SkipCurrentRecipeStep()
        {
            if (_state == RecipeEngineState.Paused)
            {
                EV.PostInfoLog(Module, "在 Pause Recipe 状态下不能执行 Skip to next step 命令");
                return;
            }
            try
            {
                //update current recipe step time
                string recipeXml = CurrentRecipeContent;
                int currentStepNo = CurStepNum;
                XmlDocument xmlDoc = new XmlDocument();
                xmlDoc.LoadXml(recipeXml);
                var stepNodes = xmlDoc.SelectNodes("/TableRecipeData/Step");

                if (currentStepNo >= 0 && currentStepNo < stepNodes.Count)
                {
                    var curStepNode = stepNodes[currentStepNo] as XmlElement;
                    var curStepElapsedTime = CurStepTotalTime - CurStepLeftTime;//ms
                    if (curStepElapsedTime < 0)
                        curStepElapsedTime = 0;

                    //TimeSpan tspan = new TimeSpan(0, 0, 0, 0, (int)curStepElapsedTime);
                    //var timeString =
                    //    $"{((int)tspan.TotalHours).ToString("00")}:{tspan.Minutes.ToString("00")}:{tspan.Seconds.ToString("00")}";

                    string timeString = ((int)(curStepElapsedTime / 1000)).ToString();
                    curStepNode.SetAttribute("Time", timeString);

                    LOG.Write($"step skipped，step {currentStepNo} time changed to {timeString}");
                    //recipe update command
                    UpdateRecipe(xmlDoc.OuterXml);
                }
            }
            catch (Exception ex)
            {
                LOG.Write(ex);
            }

            if (_state == RecipeEngineState.EndPointWait || _state == RecipeEngineState.TimeWait)
            {
                _state = RecipeEngineState.StepCompleted;

                //send informational event
                EV.PostMessage(Module, EventEnum.GeneralInfo, Module, CurrentRecipeRunningName, CurStepNum + 1);

            }
        }

        public bool UpdateRecipe(string newRecipeContent)
        {
            lock (_recipeLocker)
            {
                RecipeHead head = null;
                List<RecipeStep> newRecipeData = null;

                if (!Recipe.Parse(Module, newRecipeContent, out head, out newRecipeData))
                {
                    EV.PostMessage(Module, EventEnum.DefaultAlarm, Module, CurrentRecipeRunningName);
                    return false;
                }
                else
                {
                    string oldRecipeName = CurrentRecipeRunningName;
                    CurrentRecipeRunningName =
                        $"{DateTime.Now:yyyyMMddHHmmss}-{CurrentRecipeBaseName}-({RecipeChangeNo++})";

                    //update local recipe data

                    _recipeStepList = newRecipeData;
                    CurrentRecipeContent = newRecipeContent;



                    //send informational event
                    EV.PostInfoLog(Module, $"运行工艺程序'{oldRecipeName}'第{CurStepNum + 1}步时更新工艺程序为'{CurrentRecipeRunningName}");


                    RecipeFileManager.Instance.SaveRecipeHistory(ModuleName.System.ToString(), CurrentRecipeRunningName, CurrentRecipeContent);
                }
            }
            return true;
        }

        public override void Abort()
        {
            _dbCallback.RecipeFailed(_chamberEntity.RecipeRunningInfo.InnerId.ToString());

            base.Abort();
        }

        public override string ToString()
        {
            return "recipe running";
        }


        /// <summary>
        /// 工艺程序估计结束时间计算
        /// </summary>
        protected void CalcEstimatedRecipeEndTime()
        {
            try
            {
                //(*计算当前工艺程序预计所需的总时间，从当前步开始计算剩余步的估算时间+已经既成事实的时间 => 总的估计时间，采用该种方式进行总工艺时间理论上最为精确*)
                if (!_estimatedTimeCalcTimer.IsTimeout())
                    return;
                _estimatedTimeCalcTimer.Start(1000);

                EstimatedTotalLeftTime = 0;

                if (_state == RecipeEngineState.RecipeCompleted)
                    return;

                if (!(CurStepNum >= 0 && CurStepNum <= _recipeStepList.Count - 1))
                    return;

                if (CurStepLeftTime > 0)
                {
                    EstimatedTotalLeftTime = CurStepLeftTime;
                }

                int nextBegin = CurStepNum;

                //(*判断当前是否处于循环之中*)
                bool IsInLoop = false;
                int iNum1 = 0;
                int iNum2 = 0;
                //int j=i;
                for (int j = CurStepNum; j < _recipeStepList.Count; j++)
                {
                    if (_recipeStepList[j].IsLoopEndStep)
                    {
                        iNum2 = j;
                        IsInLoop = true;
                        break;
                    }
                    else if (j > CurStepNum && _recipeStepList[j].IsLoopStartStep)
                    {
                        IsInLoop = false;
                        break;
                    }
                }

                if (IsInLoop)
                {
                    //(*当前步处于循环中*)
                    iNum1 = CurStepNum;
                    for (int j = CurStepNum; j >= 0; j--)
                    {
                        if (_recipeStepList[j].IsLoopStartStep)
                        {
                            iNum1 = j;
                            break;
                        }
                    }

                    for (int j = CurStepNum + 1; j <= iNum2; j++)
                    {
                        EstimatedTotalLeftTime += _recipeStepList[j].StepTime * 1000 * (_recipeStepList[iNum1].LoopCount - CurrentLoopCount + 1);
                    }

                    for (int j = iNum1; j <= CurStepNum; j++)
                    {
                        EstimatedTotalLeftTime += _recipeStepList[j].StepTime * 1000 * (_recipeStepList[iNum1].LoopCount - CurrentLoopCount);
                    }

                    nextBegin = iNum2 + 1;
                }
                else
                {
                    nextBegin++;
                }

                //(*当前步处于循环外*)
                for (int j = nextBegin; j < _recipeStepList.Count; j++)
                {
                    if (_recipeStepList[j].IsLoopStartStep)
                    {
                        //j=i;
                        iNum1 = j;
                        iNum2 = j + 1;
                        double lr1 = 0;
                        for (int m = j; m < _recipeStepList.Count; m++)
                        {
                            lr1 += _recipeStepList[m].StepTime * 1000;
                            if (_recipeStepList[m].IsLoopEndStep)
                            {
                                iNum2 = m;
                                break;
                            }
                        }
                        EstimatedTotalLeftTime = EstimatedTotalLeftTime + lr1 * _recipeStepList[iNum1].LoopCount;
                        j = iNum2;
                    }
                    else
                    {
                        EstimatedTotalLeftTime += _recipeStepList[j].StepTime * 1000;
                    }
                    //END_WHILE
                }
            }
            catch (Exception ex)
            {
                LOG.Write(ex);
            }
        }
    }
}