Mars200/Metis/EfemDualSimulator/Instances/SimulatorSystem.cs

using System;
using System.Collections.Generic;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using Aitex.Core.WCF;
using EfemDualSimulator.Devices;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Simulator.Core.Driver;

namespace EfemDualSimulator.Instances
{
    public class SimulatorSystem : Singleton<SimulatorSystem>
    {
        private PeriodicJob _thread;

        private Random _rd = new Random();

        private RD_TRIG _trigATM = new RD_TRIG();
        private RD_TRIG _trigVAC = new RD_TRIG();

        private readonly float ATM_THRESHOLD = 750000;
        private readonly float ATM_PRESSURE = 760000;
        private readonly uint VAC_SW_PRESSURE = 9500;
        private readonly uint PROCESS_GAUGE = 10000;

        private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();

        public SimulatorSystem()
        {
            //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
            //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
            //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());

            // TODO
        }

        ~SimulatorSystem()
        {
            _thread?.Stop();
        }

        public void Initialize()
        {
            SetDefaultValue(ModuleName.PMA);
            SetDefaultValue(ModuleName.PMB);

            Singleton<DataManager>.Instance.Initialize(false);

            WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorPlc0) });
            WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorPlc1) });
            WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorPlc2) });

            _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
        }

        private void SetDefaultValue(ModuleName mod)
        {
            // TM
            IO.DI[$"System.DI_EFEMRBNotExtendBFA"].Value = true;
            IO.DI[$"System.DI_EFEMRBNotExtendBFB"].Value = true;
            IO.DI[$"System.DI_TMRBNotExtendBFA"].Value = true;
            IO.DI[$"System.DI_TMRBNotExtendBFB"].Value = true;
            IO.DI[$"System.DI_TMPowerOn"].Value = true;
            IO.DI[$"System.DI_TMSideDoorClosed"].Value = true;
            IO.DI[$"System.DI_TMInSafety"].Value = true;
            IO.DI[$"System.DI_TMBufferOTSW"].Value = true;
            IO.DI[$"System.DI_WaterFlowSW"].Value = true;
            IO.DI[$"System.DI_WaterLeakSW"].Value = true;
            IO.DI[$"System.DI_TMFFUNormal"].Value = true;
            IO.DI[$"System.DI_EFEMSidePlanClosed"].Value = true;
            IO.DI[$"System.DI_CDAPressureSW"].Value = true;
            IO.DI[$"System.DI_VaccumPressureSW"].Value = true;
            IO.DI[$"System.DI_Buffer_ASmallWaferProtrusion"].Value = false;
            IO.DI[$"System.DI_Buffer_ABigWaferProtrusion"].Value = false;
            IO.DI[$"System.DI_Buffer_BSmallWaferProtrusion"].Value = false;
            IO.DI[$"System.DI_Buffer_BBigWaferProtrusion"].Value = false;
            IO.DI[$"System.DI_INONormal"].Value = true;
            IO.DI[$"System.DI_TMRobotAlarm"].Value = true;
            IO.DI[$"System.DI_Buffer_ATCDeviationOutOfRange"].Value = false;
            IO.DI[$"System.DI_Buffer_AControlTCBrokenAlarm"].Value = false;
            IO.DI[$"System.DI_Buffer_AMonitorTCBrokenAlarm"].Value = false;


            // chamber
            IO.DI[$"{mod}.DI_LidClosed"].Value = true;
            IO.DI[$"{mod}.DI_ATMSW"].Value = true;
            IO.DI[$"{mod}.DI_SouceFan"].Value = true;
            IO.DI[$"{mod}.DI_1_CoolingWaterFlowSW"].Value = true;
            IO.DI[$"{mod}.DI_2_CoolingWaterFlowSW"].Value = true;
            IO.DI[$"{mod}.DI_1_CoolantInletTCBrokenAlarm"].Value = false;
            IO.DI[$"{mod}.DI_1_CoolantOutletTCBrokenAlarm"].Value = false;
            IO.DI[$"{mod}.DI_2_CoolantInletTCBrokenAlarm"].Value = false;
            IO.DI[$"{mod}.DI_2_CoolantOutletTCBrokenAlarm"].Value = false;
            IO.DI[$"{mod}.DI_WaterLeak"].Value = true;
            IO.DI[$"{mod}.DI_TMRBNotExtendToPM1"].Value = true;
            IO.DI[$"{mod}.DI_TMRBNotExtendToPM2"].Value = true;
            IO.DI[$"{mod}.DI_TMInSafety"].Value = true;
            IO.DI[$"{mod}.DI_MFC1PressureSW"].Value = true;
            IO.DI[$"{mod}.DI_MFC2PressureSW"].Value = true;
            IO.DI[$"{mod}.DI_MFC3PressureSW"].Value = true;
            IO.DI[$"{mod}.DI_MFC4PressureSW"].Value = true;
            IO.DI[$"{mod}.DI_MFC5PressureSW"].Value = true;
            IO.DI[$"{mod}.DI_MFC6PressureSW"].Value = true;
            IO.DI[$"{mod}.DI_GeneratorHardwareInterlock"].Value = true;
            IO.DI[$"{mod}.DI_N2PressureSW"].Value = true;
            // slit door
            IO.DI[$"{mod}.DI_1_SlitDoorOpenPos"].Value = false;
            IO.DI[$"{mod}.DI_1_SlitDoorClosePos"].Value = true;
            IO.DI[$"{mod}.DI_2_SlitDoorOpenPos"].Value = false;
            IO.DI[$"{mod}.DI_2_SlitDoorClosePos"].Value = true;

            // lift pin
            IO.DI[$"{mod}.DI_1_LiftPinUp"].Value = false;
            IO.DI[$"{mod}.DI_1_LiftPinDown"].Value = true;
            IO.DI[$"{mod}.DI_2_LiftPinUp"].Value = false;
            IO.DI[$"{mod}.DI_2_LiftPinDown"].Value = true;
            //
            IO.DI[$"{mod}.DI_1_LEOTSW"].Value = false;
            IO.DI[$"{mod}.DI_2_LEOTSW"].Value = false;
            IO.DI[$"{mod}.DI_GB_Interlock"].Value = true;
            //Guide pin
            IO.DI[$"{mod}.DI_1_GuidePinLifterUpPos"].Value = false;
            IO.DI[$"{mod}.DI_1_GuidePinLifterDownPos"].Value = true;
            IO.DI[$"{mod}.DI_2_GuidePinLifterUpPos"].Value = false;
            IO.DI[$"{mod}.DI_2_GuidePinLifterDownPos"].Value = true;


            // pressure
            SetAiValue($"{mod}.AI_ForelinePressure", 5000);
            SetAiValue($"{mod}.AI_ChamberPressure", ATM_PRESSURE);
            SetAiValue($"{mod}.AI_ProcessPressure", PROCESS_GAUGE);
            //SetAiValue($"{mod}.AI_Throttle_Valve_State", 1);
            //IO.AI[$"{mod}.AI_Throttle_Valve_State"].Value = 1;
            IO.AI[$"{mod}.AI_ThrottleValveRealPosition"].Value = 10;

            // Temperature
            SetAiValue($"{mod}.AI_CHBControlTCTemp", 28);
            SetAiValue($"{mod}.AI_CHBMonitorTCTemp", 27);
            SetAiValue($"{mod}.AI_ForelineControlTCTemp", 28);
            SetAiValue($"{mod}.AI_ForelineMonitorTCTemp", 27);
            SetAiValue($"{mod}.AI_1_LEControlTCTemp", 28);
            SetAiValue($"{mod}.AI_1_LEMonitorTCTemp", 27);
            SetAiValue($"{mod}.AI_2_LEControlTCTemp", 28);
            SetAiValue($"{mod}.AI_2_LEMonitorTCTemp", 27);
            SetAiValue($"{mod}.AI_1_CoolantInletTemp", 28);
            SetAiValue($"{mod}.AI_2_CoolantInletTemp", 28);
            if (mod == ModuleName.PMA)
            {
                SetAiValue($"{mod}.AI_1_CoolantOutletTemp", 29);
                SetAiValue($"{mod}.AI_2_CoolantOutletTemp", 29);
            }
            else if (mod == ModuleName.PMB)
            {
                SetAiValue($"{mod}.AI_1_CoolantOutletTemp", 29);
                SetAiValue($"{mod}.AI_2_CoolantOutletTemp", 29);
            }
            // Datetime
            SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
            SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
            SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
            SetAiValue($"{mod}.AI_Time", DateTime.Today.Hour);
            SetAiValue($"{mod}.AI_Minute", DateTime.Today.Minute);
            SetAiValue($"{mod}.AI_Second", DateTime.Today.Second);
        }

        private bool OnMonitor()
        {
            try
            {


                // Buffer

                IO.DI[$"System.DI_Buffer_AHeatPIDATStart_Fb"].Value = IO.DO[$"System.DO_Buffer_AHeatPIDATStart"].Value;
                IO.DI[$"System.DI_Buffer_AHeatPIDATStop_Fb"].Value = IO.DO[$"System.DO_Buffer_AHeatPIDATStop"].Value;


                IO.DI[$"System.DI_WaterInletValve"].Value = IO.DO[$"System.DO_WaterInletValve"].Value;

                IO.DI[$"System.DI_Buffer_AHeatOn_Fb"].Value = IO.DO[$"System.DO_BufferHeatOn"].Value;

                if (IO.DO[$"System.DO_BufferHeatOn"].Value &&
                    GetAiValue($"System.AI_Buffer_AControlTCTemp") < GetAoValue($"System.AO_Buffer_ATemperatureSetpoint"))
                {
                    SetAiValue($"System.AI_Buffer_AControlTCTemp", GetAiValue($"System.AI_Buffer_AControlTCTemp") + _rd.Next(1, 2));
                    SetAiValue($"System.AI_Buffer_AMonitorTCTemp", GetAiValue($"System.AI_Buffer_AMonitorTCTemp") + _rd.Next(1, 2));
                }
                else if (IO.DO[$"System.DO_BufferHeatOn"].Value &&
                         GetAiValue($"System.AI_Buffer_AControlTCTemp") > GetAoValue($"System.AO_Buffer_ATemperatureSetpoint"))
                {
                    SetAiValue($"System.AI_Buffer_AControlTCTemp", GetAiValue($"System.AI_Buffer_AControlTCTemp") - _rd.Next(1, 2));
                    SetAiValue($"System.AI_Buffer_AMonitorTCTemp", GetAiValue($"System.AI_Buffer_AMonitorTCTemp") - _rd.Next(1, 2));
                }

                ChangeTime(ModuleName.System);
                // PMA
                MonitorPID(ModuleName.PMA);
                MonitorSlitDoor(ModuleName.PMA);
                MonitorPin(ModuleName.PMA);
                MonitorPressure(ModuleName.PMA);
                MonitorTemperature(ModuleName.PMA);
                MonitorGas(ModuleName.PMA);
                //MonitorRF(ModuleName.PMA);
                ChangeTime(ModuleName.PMA);

                // PMB
                MonitorPID(ModuleName.PMB);
                MonitorSlitDoor(ModuleName.PMB);
                MonitorPin(ModuleName.PMB);
                MonitorPressure(ModuleName.PMB);
                MonitorTemperature(ModuleName.PMB);
                MonitorGas(ModuleName.PMB);
                //MonitorRF(ModuleName.PMB);
                ChangeTime(ModuleName.PMB);
            }
            catch (Exception e)
            {
                LOG.Write(e);
            }
            return true;
        }

        private void MonitorPID(ModuleName mod)
        {
            IO.DI[$"{mod}.DI_CHBHeatPIDATStart_Fb"].Value = IO.DO[$"{mod}.DO_CHBHeatPIDATStart"].Value;
            IO.DI[$"{mod}.DI_CHBHeatPIDATStop_Fb"].Value = IO.DO[$"{mod}.DO_CHBHeatPIDATStop"].Value;
            IO.DI[$"{mod}.DI_ForelineHeatPIDATStart_Fb"].Value = IO.DO[$"{mod}.DO_ForelineHeatPIDATStart"].Value;
            IO.DI[$"{mod}.DI_ForelineHeatPIDATStop_Fb"].Value = IO.DO[$"{mod}.DO_ForelineHeatPIDATStop"].Value;
            IO.DI[$"{mod}.DI_1_LEHeatPIDATStart_Fb"].Value = IO.DO[$"{mod}.DO_1_LEHeatPIDATStart"].Value;
            IO.DI[$"{mod}.DI_1_LEHeatPIDATStop_Fb"].Value = IO.DO[$"{mod}.DO_1_LEHeatPIDATStop"].Value;
            IO.DI[$"{mod}.DI_2_LEHeatPIDATStart_Fb"].Value = IO.DO[$"{mod}.DO_2_LEHeatPIDATStart"].Value;
            IO.DI[$"{mod}.DI_2_LEHeatPIDATStop_Fb"].Value = IO.DO[$"{mod}.DO_2_LEHeatPIDATStop"].Value;

        }

        private void ChangeTime(ModuleName mod)
        {
            // Heartbeat with PLC
            SetAiValue($"{mod}.AI_HeartbeatFB", GetAoValue($"{mod}.AO_Heartbeat"));

            SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
            SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
            SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
        }

        void MonitorSlitDoor(ModuleName mod)
        {
            // slit door 1 open
            if (IO.DO[$"{mod}.DO_1_SlitDoorOpen"].Value)
            {
                IO.DI[$"{mod}.DI_1_SlitDoorOpenPos"].Value = true;
                IO.DI[$"{mod}.DI_1_SlitDoorClosePos"].Value = false;
            }

            // slit door 1 close
            if (IO.DO[$"{mod}.DO_1_SlitDoorClose"].Value)
            {
                IO.DI[$"{mod}.DI_1_SlitDoorOpenPos"].Value = false;
                IO.DI[$"{mod}.DI_1_SlitDoorClosePos"].Value = true;
            }

            // slit door 2 open
            if (IO.DO[$"{mod}.DO_2_SlitDoorOpen"].Value)
            {
                IO.DI[$"{mod}.DI_2_SlitDoorOpenPos"].Value = true;
                IO.DI[$"{mod}.DI_2_SlitDoorClosePos"].Value = false;
            }

            // slit door 2 close
            if (IO.DO[$"{mod}.DO_2_SlitDoorClose"].Value)
            {
                IO.DI[$"{mod}.DI_2_SlitDoorOpenPos"].Value = false;
                IO.DI[$"{mod}.DI_2_SlitDoorClosePos"].Value = true;
            }
        }

        void MonitorPin(ModuleName mod)
        {
            // lift pin 1 up
            if (IO.DO[$"{mod}.DO_1_LiftPinUp"].Value != IO.DO[$"{mod}.DO_1_LiftPinDown"].Value)
            {
                IO.DI[$"{mod}.DI_1_LiftPinUp"].Value = IO.DO[$"{mod}.DO_1_LiftPinUp"].Value;
                IO.DI[$"{mod}.DI_1_LiftPinDown"].Value = IO.DO[$"{mod}.DO_1_LiftPinDown"].Value;
            }
            // lift pin 2 up
            if (IO.DO[$"{mod}.DO_2_LiftPinUp"].Value != IO.DO[$"{mod}.DO_2_LiftPinDown"].Value)
            {
                IO.DI[$"{mod}.DI_2_LiftPinUp"].Value = IO.DO[$"{mod}.DO_2_LiftPinUp"].Value;
                IO.DI[$"{mod}.DI_2_LiftPinDown"].Value = IO.DO[$"{mod}.DO_2_LiftPinDown"].Value;
            }

            // upper guide pin up
            if (IO.DO[$"{mod}.DO_1_GuidePinLifterUp"].Value)
            {
                IO.DI[$"{mod}.DI_1_GuidePinLifterUpPos"].Value = true;
                IO.DI[$"{mod}.DI_1_GuidePinLifterDownPos"].Value = false;
            }

            // upper guide pin down
            if (IO.DO[$"{mod}.DO_1_GuidePinLifterDown"].Value)
            {
                IO.DI[$"{mod}.DI_1_GuidePinLifterUpPos"].Value = false;
                IO.DI[$"{mod}.DI_1_GuidePinLifterDownPos"].Value = true;
            }

            // upper guide pin up
            if (IO.DO[$"{mod}.DO_2_GuidePinLifterUp"].Value)
            {
                IO.DI[$"{mod}.DI_2_GuidePinLifterUpPos"].Value = true;
                IO.DI[$"{mod}.DI_2_GuidePinLifterDownPos"].Value = false;
            }

            // upper guide pin down
            if (IO.DO[$"{mod}.DO_2_GuidePinLifterDown"].Value)
            {
                IO.DI[$"{mod}.DI_2_GuidePinLifterUpPos"].Value = false;
                IO.DI[$"{mod}.DI_2_GuidePinLifterDownPos"].Value = true;
            }

        }

        void MonitorPressure(ModuleName mod)
        {
            // pressure
            string sAI_Foreline = "AI_ForelinePressure";
            // Foreline

            if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
            {
                SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
            }
            else
            {
                SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
            }

            // PLC 模拟量范围[0，4000], 电压[0, 10V], 压力[0, 760Torr]
            string sAI_ChamberPressure = "AI_ChamberPressure";
            string sAI_ProcessPressure = "AI_ProcessPressure";
            //float chamber_pressure = GetMockChamberPressure(mod);
            //float process_pressure = GetAiValue($"{mod}.AI_Process_pressure");

            // soft pump & fast pump
            DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_FastPumpingValve"];
            DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_SoftPumpingValve"];

            if (fast_pump_vlv.Value || soft_pump_vlv.Value)
            {
                if (fast_pump_vlv.Value && soft_pump_vlv.Value)
                {
                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
                    {
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
                    }
                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
                    {
                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
                    }

                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
                }
                else if (fast_pump_vlv.Value)
                {
                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
                    {
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
                    }
                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
                    {
                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
                    }
                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
                }
                else if (soft_pump_vlv.Value)
                {
                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
                    {
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
                    }
                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
                    {
                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
                    }
                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
                }
            }

            // fast vent & purge
            DOAccessor vent_vlv = IO.DO[$"{mod}.DO_ChamberVentValve"];
            DOAccessor purge_vlv = IO.DO[$"{mod}.DO_ChamberPurgeValve"];

            if (vent_vlv.Value || purge_vlv.Value)
            {
                if (vent_vlv.Value && purge_vlv.Value)
                {
                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
                    {
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
                    }
                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
                    {
                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
                    }
                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
                }
                else if (vent_vlv.Value)
                {
                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
                    {
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
                    }
                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
                    {
                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
                    }
                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
                }
                else if (purge_vlv.Value)
                {
                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");

                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
                    {
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
                    }
                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
                    {
                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
                    }
                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(15000, 20000));
                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(100, 120));
                }
            }

            // 压力值越界，复位
            float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
            if (chamber_pressure1 > ATM_PRESSURE)
            {
                SetAiValue($"{mod}.AI_ChamberPressure", ATM_PRESSURE);
            }
            else if (chamber_pressure1 < 20)
            {
                SetAiValue($"{mod}.AI_ChamberPressure", 20);
            }

            float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
            if (process_pressure1 > PROCESS_GAUGE)
            {
                SetAiValue($"{mod}.AI_ProcessPressure", PROCESS_GAUGE);
            }
            else if (process_pressure1 < 20)
            {
                SetAiValue($"{mod}.AI_ProcessPressure", 20);
            }

            float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
            if (foreline_pressure > 10000)
            {
                SetAiValue($"{mod}.AI_ForelinePressure", 10000);
            }
            else if (foreline_pressure < 150)
            {
                SetAiValue($"{mod}.AI_ForelinePressure", 150);
            }


            // 模拟压力计漂移
            //int p1 = (int)GetMockChamberPressure(mod);
            //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
            //SetAiValue($"{mod}.AI_Chamber_pressure", new_p1);

            //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_pressure");
            //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
            //SetAiValue($"{mod}.AI_Foreline_pressure", new_p2);

            //int p3 = (int)GetAiValue($"{mod}.AI_Process_pressure");
            //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
            //SetAiValue($"{mod}.AI_Process_pressure", new_p3);

            // 根据当前压力值设定信号
            //float chamber_pressure2 = GetMockChamberPressure(mod);

            // ATM switch
            IO.DI[$"{mod}.DI_ATMSW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;

            // VAC switch
            IO.DI[$"{mod}.DI_VACSW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;

            // Throttle valve

            //var pos_sp = IO.AO[$"{mod}.AO_ThrottleValvePressureSetpoint"].Value;
            //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
            ////IO.AI[$"{mod}.AI_ThrottleValveRealPressure"].Value = (short)mock_pos_fb;
            //SetAiValue($"{mod}.AI_ThrottleValveRealPressure", mock_pos_fb);

            // 压力值
            if (GetAiValue($"{mod}.AI_ThrottleValveRealPressure") < GetAoValue($"{mod}.AO_ThrottleValvePressureSetpoint"))
            {
                short increase = (short)_rd.Next(20, 30);
                SetAiValue($"{mod}.AI_ThrottleValveRealPressure", GetAiValue($"{mod}.AI_ThrottleValveRealPressure") + increase);
                if (GetAiValue($"{mod}.AI_ThrottleValveRealPressure") > GetAoValue($"{mod}.AO_ThrottleValvePressureSetpoint"))
                {
                    SetAiValue($"{mod}.AI_ThrottleValveRealPressure", GetAoValue($"{mod}.AO_ThrottleValvePressureSetpoint"));
                }
            }
            else
            {
                short increase = (short)_rd.Next(20, 30);

                SetAiValue($"{mod}.AI_ThrottleValveRealPressure", GetAiValue($"{mod}.AI_ThrottleValveRealPressure") - increase);
                if (GetAiValue($"{mod}.AI_ThrottleValveRealPressure") < GetAoValue($"{mod}.AO_ThrottleValvePressureSetpoint"))
                {
                    SetAiValue($"{mod}.AI_ThrottleValveRealPressure", GetAoValue($"{mod}.AO_ThrottleValvePressureSetpoint"));
                }
            }

            // 位置值
            if (GetAiValue($"{mod}.AI_ThrottleValveRealPosition") < GetAoValue($"{mod}.AO_ThrottleValvePositionSetpoint"))
            {
                short increase = (short)_rd.Next(20, 30);
                SetAiValue($"{mod}.AI_ThrottleValveRealPosition", GetAiValue($"{mod}.AI_ThrottleValveRealPosition") + increase);
                if (GetAiValue($"{mod}.AI_ThrottleValveRealPosition") > GetAoValue($"{mod}.AO_ThrottleValvePositionSetpoint"))
                {
                    SetAiValue($"{mod}.AI_ThrottleValveRealPosition", GetAoValue($"{mod}.AO_ThrottleValvePositionSetpoint"));
                }
            }
            else
            {
                short increase = (short)_rd.Next(20, 30);

                SetAiValue($"{mod}.AI_ThrottleValveRealPosition", GetAiValue($"{mod}.AI_ThrottleValveRealPosition") - increase);
                if (GetAiValue($"{mod}.AI_ThrottleValveRealPosition") < GetAoValue($"{mod}.AO_ThrottleValvePositionSetpoint"))
                {
                    SetAiValue($"{mod}.AI_ThrottleValveRealPosition", GetAoValue($"{mod}.AO_ThrottleValvePositionSetpoint"));
                }
            }
        }

        //float GetMockChamberPressure(ModuleName mod)
        //{
        //    return GetAiValue($"{mod}.AI_Chamber_pressure");
        //}

        //void SetMockChamberPressure(ModuleName mod, float val)
        //{
        //    SetAiValue($"{mod}.AI_Chamber_pressure", val);
        //}

        void SetAiValue(string name, float value)
        {
            IO.AI[name].FloatValue = value;
            //byte[] flow = BitConverter.GetBytes(value);
            //short high1 = BitConverter.ToInt16(flow, 0);
            //short low1 = BitConverter.ToInt16(flow, 2);

            //IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
            //IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);

            //byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
            //byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
            //float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
        }

        float GetAiValue(string name)
        {
            return IO.AI[name].FloatValue;
            //byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
            //byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
            //float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
            //return flow;
        }

        float GetAoValue(string name)
        {
            return IO.AO[name].FloatValue;
            //byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
            //byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
            //float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
            //return flow;
        }

        void MonitorTemperature(ModuleName mod)
        {
            SetAiValue($"{mod}.AI_1_CoolantInletTemp", 50);
            SetAiValue($"{mod}.AI_2_CoolantInletTemp", 50);
            SetAiValue($"{mod}.AI_1_CoolantOutletTemp", 50);
            SetAiValue($"{mod}.AI_2_CoolantOutletTemp", 50);
            IO.DI[$"{mod}.DI_CHBHeaterOn_FB"].Value = IO.DO[$"{mod}.DO_CHBHeaterOn"].Value;
            IO.DI[$"{mod}.DI_ForelineHeaterOn_FB"].Value = IO.DO[$"{mod}.DO_ForelineHeaterOn"].Value;
            IO.DI[$"{mod}.DI_1_LEHeaterOn_FB"].Value = IO.DO[$"{mod}.DO_1_LEHeaterOn"].Value;
            IO.DI[$"{mod}.DI_2_LEHeaterOn_FB"].Value = IO.DO[$"{mod}.DO_2_LEHeaterOn"].Value;
            IO.DI[$"{mod}.DI_ForelineTCDeviationOutOfRange"].Value = false;
            IO.DI[$"{mod}.DI_CHBTCDeviationOutOfRange"].Value = false;
            IO.DI[$"{mod}.DI_1_LETCDeviationOutOfRange"].Value = false;
            IO.DI[$"{mod}.DI_2_LETCDeviationOutOfRange"].Value = false;
            // 底座
            if (IO.DO[$"{mod}.DO_CHBHeaterOn"].Value &&
                GetAiValue($"{mod}.AI_CHBControlTCTemp") < GetAoValue($"{mod}.AO_CHBTemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_CHBControlTCTemp", GetAiValue($"{mod}.AI_CHBControlTCTemp") + _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_CHBMonitorTCTemp", GetAiValue($"{mod}.AI_CHBMonitorTCTemp") + _rd.Next(1, 2));
            }
            else if (IO.DO[$"{mod}.DO_CHBHeaterOn"].Value &&
                     GetAiValue($"{mod}.AI_CHBControlTCTemp") > GetAoValue($"{mod}.AO_CHBTemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_CHBControlTCTemp", GetAiValue($"{mod}.AI_CHBControlTCTemp") - _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_CHBMonitorTCTemp", GetAiValue($"{mod}.AI_CHBMonitorTCTemp") - _rd.Next(1, 2));
            }

            // Foreline
            if (IO.DO[$"{mod}.DO_ForelineHeaterOn"].Value &&
                GetAiValue($"{mod}.AI_ForelineControlTCTemp") < GetAoValue($"{mod}.AO_ForelineTemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_ForelineControlTCTemp", GetAiValue($"{mod}.AI_ForelineControlTCTemp") + _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_ForelineMonitorTCTemp", GetAiValue($"{mod}.AI_ForelineMonitorTCTemp") + _rd.Next(1, 2));
            }
            else if (IO.DO[$"{mod}.DO_ForelineHeaterOn"].Value &&
                     GetAiValue($"{mod}.AI_ForelineControlTCTemp") > GetAoValue($"{mod}.AO_ForelineTemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_ForelineControlTCTemp", GetAiValue($"{mod}.AI_ForelineControlTCTemp") - _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_ForelineMonitorTCTemp", GetAiValue($"{mod}.AI_ForelineMonitorTCTemp") - _rd.Next(1, 2));
            }

            // LE1
            if (IO.DO[$"{mod}.DO_1_LEHeaterOn"].Value &&
                GetAiValue($"{mod}.AI_1_LEControlTCTemp") < GetAoValue($"{mod}.AO_1_LETemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_1_LEControlTCTemp", GetAiValue($"{mod}.AI_1_LEControlTCTemp") + _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_1_LEMonitorTCTemp", GetAiValue($"{mod}.AI_1_LEMonitorTCTemp") + _rd.Next(1, 2));
            }
            else if (IO.DO[$"{mod}.DO_1_LEHeaterOn"].Value &&
                     GetAiValue($"{mod}.AI_1_LEControlTCTemp") > GetAoValue($"{mod}.AO_1_LETemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_1_LEControlTCTemp", GetAiValue($"{mod}.AI_1_LEControlTCTemp") - _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_1_LEMonitorTCTemp", GetAiValue($"{mod}.AI_1_LEMonitorTCTemp") - _rd.Next(1, 2));
            }

            // LE2
            if (IO.DO[$"{mod}.DO_2_LEHeaterOn"].Value &&
                GetAiValue($"{mod}.AI_2_LEControlTCTemp") < GetAoValue($"{mod}.AO_2_LETemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_2_LEControlTCTemp", GetAiValue($"{mod}.AI_2_LEControlTCTemp") + _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_2_LEMonitorTCTemp", GetAiValue($"{mod}.AI_2_LEMonitorTCTemp") + _rd.Next(1, 2));
            }
            else if (IO.DO[$"{mod}.DO_2_LEHeaterOn"].Value &&
                     GetAiValue($"{mod}.AI_2_LEControlTCTemp") > GetAoValue($"{mod}.AO_2_LETemperatureSetpoint"))
            {
                SetAiValue($"{mod}.AI_2_LEControlTCTemp", GetAiValue($"{mod}.AI_2_LEControlTCTemp") - _rd.Next(1, 2));
                SetAiValue($"{mod}.AI_2_LEMonitorTCTemp", GetAiValue($"{mod}.AI_2_LEMonitorTCTemp") - _rd.Next(1, 2));
            }
        }

        void MonitorGas(ModuleName mod)
        {
            // gas
            this.SimulateMFC(ModuleName.PMA, 1);
            this.SimulateMFC(ModuleName.PMA, 2);
            this.SimulateMFC(ModuleName.PMA, 3);
            this.SimulateMFC(ModuleName.PMA, 4);
            this.SimulateMFC(ModuleName.PMA, 5);
            this.SimulateMFC(ModuleName.PMA, 6);

            this.SimulateMFC(ModuleName.PMB, 1);
            this.SimulateMFC(ModuleName.PMB, 2);
            this.SimulateMFC(ModuleName.PMB, 3);
            this.SimulateMFC(ModuleName.PMB, 4);
            this.SimulateMFC(ModuleName.PMB, 5);
            this.SimulateMFC(ModuleName.PMB, 6);
        }

        private void SimulateMFC(ModuleName mod, byte gasNum)
        {
            var sp = GetAoValue($"{mod}.AO_MFC{gasNum}FlowSetpoint");

            var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
            SetAiValue($"{mod}.AI_MFC{gasNum}Flow", (float)mock_fb);
        }

        //void MonitorRF(ModuleName mod)
        //{
        //    // RF generator
        //    var sp = GetAoValue($"{mod}.AO_BaisRFEnable");
        //    var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();

        //    //var mock_sp = _rd.Next(sp - 3, sp + 3);
        //    SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);

        //    //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
        //}

        public void Terminate()
        {
            _thread.Stop();
        }
    }
}