JetPlasma
/
Mars200


			
				
					
						
						
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							<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
	<Dig_In>
		<DI_ITEM Index="00"  Name="DI_TMPowerOn" BufferOffset="00" Addr="w20.00" Description="TMPowerOn"/>
		<DI_ITEM Index="01"  Name="DI_TMSideDoorClosed" BufferOffset="01" Addr="w20.01" Description="TMSideDoorClosed"/>
		<DI_ITEM Index="02"  Name="DI_TMInSafety" BufferOffset="02" Addr="w20.02" Description="TMInSafety"/>
		<DI_ITEM Index="03"  Name="DI_TMBufferOTSW" BufferOffset="03" Addr="w20.03" Description="TMBufferOTSW"/>
		<DI_ITEM Index="04"  Name="DI_TMRBNotExtendPMA1" BufferOffset="04" Addr="w20.04" Description="TMRBNotExtendPMA1"/>
		<DI_ITEM Index="05"  Name="DI_TMRBNotExtendPMB1" BufferOffset="05" Addr="w20.05"  Description="TMRBNotExtendPMB1"/>
		<DI_ITEM Index="06"  Name="DI_TMRBNotExtendPMA2" BufferOffset="06" Addr="w20.06"  Description="TMRBNotExtendPMA2"/>
		<DI_ITEM Index="07"  Name="DI_TMRBNotExtendPMB2" BufferOffset="07" Addr="w20.07"  Description="TMRBNotExtendPMB2"/>
		<DI_ITEM Index="08"  Name="DI_TMRBNotExtendBFA" BufferOffset="08" Addr="w20.08" Description="TMRBNotExtendBFA"/>
		<DI_ITEM Index="09"  Name="DI_TMRBNotExtendBFB" BufferOffset="09" Addr="w20.09"  Description="TMRBNotExtendBFB"/>
		<!--<DI_ITEM Index="10"  Name="DI_TMRBNotInTeachMode" BufferOffset="10" Addr="w20.10" Description="TMRBNotInTeachMode"/>-->
		<DI_ITEM Index="11"  Name="DI_EFEMRBNotExtendBFA" BufferOffset="11" Addr="w20.11" Description="EFEMRBNotExtendBFA"/>
		<DI_ITEM Index="12"  Name="DI_EFEMRBNotExtendBFB" BufferOffset="12" Addr="W20.12" Description="EFEMRBNotExtendBFB"/>
		<DI_ITEM Index="13"  Name="DI_EFEMSidePlanClosed" BufferOffset="13" Addr="W20.13" Description="EFEMSidePlanClosed"/>
		<DI_ITEM Index="14"  Name="DI_WaterFlowSW" BufferOffset="14" Addr="w20.14" Description="WaterFlowSW"/>
		<DI_ITEM Index="15"  Name="DI_WaterLeakSW" BufferOffsewot="15" Addr="w20.15" Description="WaterLeakSW"/>
		<DI_ITEM Index="16"  Name="DI_TMFFUNormal" BufferOffset="16" Addr="w21.00" Description="TMFFUNormal"/>
		<DI_ITEM Index="17"  Name="DI_RunMode" BufferOffset="17" Addr="w21.01" Description="RunMode"/>
		<DI_ITEM Index="18"  Name="DI_MaintenanceMode" BufferOffset="18" Addr="w21.02" Description="MaintenanceMode"/>
		<DI_ITEM Index="19"  Name="DI_CDAPressureSW" BufferOffset="19" Addr="w21.03" Description="CDAPressureSW"/>
		<DI_ITEM Index="20"  Name="DI_VaccumPressureSW" BufferOffset="20" Addr="w21.04" Description="VaccumPressureSW"/>
		<DI_ITEM Index="21"  Name="DI_Buffer_ASmallWaferProtrusion" BufferOffset="21" Addr="w21.05" Description="Buffer_ASmallWaferProtrusion"/>
		<DI_ITEM Index="22"  Name="DI_Buffer_ABigWaferProtrusion" BufferOffset="22" Addr="w21.06" Description="Buffer_ABigWaferProtrusion"/>
		<DI_ITEM Index="23"  Name="DI_Buffer_AWaferInPos" BufferOffset="23" Addr="w21.07" Description="Buffer_AWaferInPos"/>
		<DI_ITEM Index="24"  Name="DI_Buffer_BSmallWaferProtrusion" BufferOffset="24" Addr="w21.08" Description="Buffer_BSmallWaferProtrusion"/>
		<DI_ITEM Index="25"  Name="DI_Buffer_BBigWaferProtrusion" BufferOffset="25" Addr="w21.09" Description="Buffer_BBigWaferProtrusion"/>
		<DI_ITEM Index="26"  Name="DI_Buffer_BWaferInPos" BufferOffset="26" Addr="w21.10" Description="Buffer_BWaferInPos"/>
		<DI_ITEM Index="27"  Name="DI_INONormal" BufferOffset="27"  Addr="w21.11" Description="INONormal"/>
		<DI_ITEM Index="28"  Name="DI_TMRobotAlarm" BufferOffset="28"  Addr="w21.12" Description="TMRobotAlarm"/>
		<DI_ITEM Index="32"  Name="DI_Buffer_AHeatOn_Fb" BufferOffset="32" Addr="w22.00" Description="Buffer_A HeatOn_Fb"/>
		<DI_ITEM Index="33"  Name="DI_Buffer_ATCDeviationOutOfRange" BufferOffset="33" Addr="w22.01" Description="Buffer_ATCDeviationOutOfRange"/>
		<DI_ITEM Index="34"  Name="DI_Buffer_AControlTCBrokenAlarm" BufferOffset="34" Addr="w22.02" Description="Buffer_AControlTCBrokenAlarm"/>
		<DI_ITEM Index="35"  Name="DI_Buffer_AMonitorTCBrokenAlarm" BufferOffset="35" Addr="w22.03" Description="Buffer_AMonitorTCBrokenAlarm"/>
		<DI_ITEM Index="37"  Name="DI_WaterInletValve" BufferOffset="37" Addr="w22.05" Description="WaterInletValve"/>
		<DI_ITEM Index="38"  Name="DI_Buffer_AHeatPIDATStart_Fb" BufferOffset="38" Addr="w22.06" Description="Buffer_AHeatPIDATStart_Fb"/>
		<DI_ITEM Index="39"  Name="DI_Buffer_AHeatPIDATStop_Fb" BufferOffset="39" Addr="w22.07" Description="Buffer_AHeatPIDATStop_Fb"/>
		<DI_ITEM Index="44"  Name="DI_Buffer_AHeatPIDATRunning" BufferOffset="44" Addr="w22.12" Description="Buffer_AHeatPIDATRunning"/>
		<DI_ITEM Index="45"  Name="DI_Buffer_AHeatPIDATFinished" BufferOffset="45" Addr="w22.13" Description="Buffer_AHeatPIDATFinished"/>
	</Dig_In>

	<Dig_Out>
		<DO_ITEM Index="00"  Name="DO_BufferHeatOn" BufferOffset="00" Addr="w0.00" Description="BufferHeatOn"/>
		<DO_ITEM Index="01"  Name="DO_WaterInletValve" BufferOffset="01" Addr="w0.01" Description="WaterInletValve"/>
		<DO_ITEM Index="32"  Name="DO_Buffer_AHeatPIDATStart" BufferOffset="32" Addr="w2.00" Description="Buffer_AHeatPIDATStart"/>
		<DO_ITEM Index="33"  Name="DO_Buffer_AHeatPIDATStop" BufferOffset="33" Addr="w2.01" Description="Buffer_AHeatPIDATStop"/>
	</Dig_Out>

	<Ana_In>
		<AI_ITEM Index="18"  Name="AI_HeartbeatFB" BufferOffset="18" Addr="D2036" Description="AI_HeartbeatFB"/>
		<AI_ITEM Index="21"  Name="AI_Second" BufferOffset="21" Addr="D2042" Description="Second"/>
		<AI_ITEM Index="22"  Name="AI_Minute" BufferOffset="22" Addr="D2044" Description="Minute"/>
		<AI_ITEM Index="23"  Name="AI_Time" BufferOffset="23" Addr="D2046" Description="Time"/>
		<AI_ITEM Index="24"  Name="AI_Day" BufferOffset="24" Addr="D2048" Description="Day"/>
		<AI_ITEM Index="25"  Name="AI_Month" BufferOffset="25" Addr="D2050" Description="Month"/>
		<AI_ITEM Index="26"  Name="AI_Year" BufferOffset="26" Addr="D2052" Description="Year"/>
		<AI_ITEM Index="28"  Name="AI_Buffer_AControlTCTemp" BufferOffset="28" Addr="D2056" Description="Buffer_AControlTCTemp"/>
		<AI_ITEM Index="29"  Name="AI_Buffer_AMonitorTCTemp" BufferOffset="29" Addr="D2058" Description="Buffer_AMonitorTCTemp"/>
	</Ana_In>

	<Ana_Out>
		<AO_ITEM Index="18"  Name="AO_Heartbeat" BufferOffset="18" Addr="D1036" Description="Heartbeat"/>
		<AO_ITEM Index="28"  Name="AO_Buffer_ATemperatureSetpoint" BufferOffset="28" Addr="D1056" Description="Buffer_ATemperatureSetpoint"/>
		<AO_ITEM Index="29"  Name="AO_Buffer_ATempLimitSetpoint" BufferOffset="29" Addr="D1058" Description="Buffer_ATempLimitSetpoint"/>
	</Ana_Out>
</IO_DEFINE>