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- using System;
- using System.Collections.Generic;
- using System.Xml;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.CommonData;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- namespace JetEfemLib.Efems
- {
- public class JetEfemRobot : RobotBaseDevice, IEfemRobotCallback
- {
- private ModuleName _module;
- private string _efemName;
- private IRorzeEfemController _efem;
- public string Address { get; }
- public bool IsConnected { get; }
- public string EFEMGripStateBlade1
- {
- get;
- set;
- }
- public string EFEMGripStateBlade2
- {
- get;
- set;
- }
- //EfemRobotHomeRoutine _homeRoutine;
- public JetEfemRobot(string module, XmlElement node, string ioModule = "") : base("EfemRobot", "EfemRobot")
- {
- var attrModule = node.GetAttribute("module");
- base.Module = string.IsNullOrEmpty(attrModule) ? module : attrModule;
- base.Name = node.GetAttribute("id");
- _efemName = node.GetAttribute("efem");
- _module = ModuleHelper.Converter(Module);
- }
- public JetEfemRobot(string module, string name, string efemName) : base("EfemRobot", "EfemRobot")
- {
- _efemName = efemName;
- _module = ModuleHelper.Converter(module);
- }
- public bool Connect()
- {
- return true;
- }
- public bool Disconnect()
- {
- return true;
- }
- protected override bool Init()
- {
- if (_efem == null && !string.IsNullOrEmpty(_efemName))
- {
- _efem = DEVICE.GetDevice<RorzeEfem>(_efemName);
- _efem.SetRobotCallback(ModuleHelper.Converter(Module), this);
- }
- RorzeEfemHandler.ParameterModuleMap = new Dictionary<string, ModuleName>()
- {
- {"SYSTEM", ModuleName.System},
- {"System", ModuleName.System},
- {"ROB", ModuleName.EfemRobot},
- {"P1", ModuleName.LP1},
- {"P2", ModuleName.LP2},
- {"P3", ModuleName.LP3},
- {"P4", ModuleName.LP4},
- {"LLA", ModuleName.LLA},
- {"LLB", ModuleName.LLB},
- //{"BF1", ModuleName.Buffer},
- //{"ALIGN", ModuleName.Aligner},
- {"ALIGN3", ModuleName.Aligner1},
- {"ALIGN4", ModuleName.Aligner2},
- {"ALIGN", ModuleName.Cooling1},
- {"ALIGN2", ModuleName.Cooling2},
- };
- DATA.Subscribe($"{Module}1.WaferSize", () => WaferManager.Instance.GetWaferSize(_module, 0).ToString());
- DATA.Subscribe($"{Module}2.WaferSize", () => WaferManager.Instance.GetWaferSize(_module, 1).ToString());
- DATA.Subscribe("EfemRobot.GripStateBlade1", () => EFEMGripStateBlade1);
- DATA.Subscribe("EfemRobot.GripStateBlade2", () => EFEMGripStateBlade2);
- IsOnline = true;
- return true;
- }
- protected override bool fClear(object[] param)
- {
- return true;
- }
- protected override bool fStartReadData(object[] param)
- {
- ModuleName tempmodule = (ModuleName)Enum.Parse(typeof(ModuleName), param[0].ToString());
- _efem.QueryMapResult(tempmodule.ToString(), out string reason);
- return true;
- }
- protected override bool fStartSetParameters(object[] param)
- {
- return true;
- }
- protected override bool fStartTransferWafer(object[] param)
- {
- return true;
- }
- protected override bool fStartUnGrip(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- if (!_efem.RobotGrip((Hand)(int)arm, false, out string reason))
- {
- EV.PostAlarmLog(Module, $"EFEMRobot can not UnGrip " + reason);
- return false;
- }
- if (arm == RobotArmEnum.Lower)
- {
- EFEMGripStateBlade1 = "OFF";
- }
- if (arm == RobotArmEnum.Upper)
- {
- EFEMGripStateBlade2 = "OFF";
- }
- return true;
- }
- protected override bool fStartGrip(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- if (!_efem.RobotGrip((Hand)(int)arm , true , out string reason))
- {
- EV.PostAlarmLog(Module, $"EFEMRobot can not Grip " + reason);
- return false;
- }
- if(arm== RobotArmEnum.Lower)
- {
- EFEMGripStateBlade1 = "ON";
- }
- if (arm == RobotArmEnum.Upper)
- {
- EFEMGripStateBlade2 = "ON";
- }
- return true;
- }
- protected override bool fStartGoTo(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
- int slot = int.Parse(param[2].ToString());
- if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, arm == RobotArmEnum.Lower ? 0 : 1))
- {
- if (!_efem.MoveToReadyPut(module, slot, arm == RobotArmEnum.Lower ? Hand.Blade1 : Hand.Blade2, out string reason))
- {
- EV.PostAlarmLog(Module, $"Can not move to {module} slot {slot + 1}, " + reason);
- return false;
- }
- }
- else
- {
- if (!_efem.MoveToReadyGet(module, slot, arm == RobotArmEnum.Lower ? Hand.Blade1 : Hand.Blade2, out string reason))
- {
- EV.PostAlarmLog(Module, $"Can not move to {module} slot {slot + 1}, " + reason);
- return false;
- }
- }
- CmdRobotArm = arm;
- CmdTarget = module;
- CmdTargetSlot = slot;
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return true;
- }
- protected override bool fGoToComplete(object[] param)
- {
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return base.fGoToComplete(param);
- }
- protected override bool fStartMapWafer(object[] param)
- {
- ModuleName tempmodule = (ModuleName)Enum.Parse(typeof(ModuleName), param[0].ToString());
- int thicknessIndex = int.Parse(param[1].ToString());
- CmdRobotArm = RobotArmEnum.Lower;
- CmdTarget = tempmodule;
- CmdTargetSlot = 0;
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- RorzeEfem efem = _efem as RorzeEfem;
- efem.MapCarrier(tempmodule.ToString(), out string _, out string reason);
- return true;
- }
- protected override bool fMapComplete(object[] param)
- {
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return base.fMapComplete(param);
- }
- protected override bool fStartSwapWafer(object[] param)
- {
- return true;
- }
- private static Dictionary<ModuleName, ModuleName> _mapLL = new Dictionary<ModuleName, ModuleName>()
- {
- {ModuleName.LLA, ModuleName.LLB},
- {ModuleName.LLB, ModuleName.LLA }
- };
- private static Dictionary<int, int> _slotToFloor = new Dictionary<int, int>() {
- {0,0 },
- {2,1 },
- {4,2 },
- {6,3 }
- };
- protected override bool fStartPlaceWafer(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
- int slot = ((int[])param[2])[0];//int.Parse(param[2].ToString());
- if (!CheckEnablePlace(module, slot, arm, out string reason))
- {
- EV.PostAlarmLog(Module, $"Can not place wafer to {module} slot {slot + 1}, " + reason);
- return false;
- }
- CmdRobotArm = arm;
- CmdTarget = module;
- CmdTargetSlot = slot;
- if (SC.IsDoubleFork)
- {
- if (ModuleHelper.IsLoadLock(module))
- {
- module = ModuleName.LLA;
- if ((slot % 2) > 0)
- {
- module = ModuleName.LLB;
- slot = slot - 1;
- }
- slot = _slotToFloor[slot];
- if ((ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString()) == ModuleName.LLB) slot = slot + 4;
- }
- }
- if (!_efem.PutWafer(module, slot, (Hand)(int)arm, out reason))
- {
- EV.PostAlarmLog(Module, $"Can not place wafer to {module} slot {slot + 1}, " + reason);
- return false;
- }
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Placing,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return true;
- }
- private bool CheckEnablePlace(ModuleName module, int slot, RobotArmEnum arm, out string reason)
- {
- if (arm == RobotArmEnum.Both)
- {
- if (!WaferManager.Instance.CheckNoWafer(module, slot) && !WaferManager.Instance.CheckNoWafer(module, slot + 1))
- {
- reason = "target has wafer";
- return false;
- }
- if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) && !WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
- {
- reason = "robot arm has no wafer";
- return false;
- }
- }
- else
- {
- if (!WaferManager.Instance.CheckNoWafer(module, slot))
- {
- reason = "target has wafer";
- return false;
- }
- if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)arm))
- {
- reason = "robot arm has no wafer";
- return false;
- }
- }
- reason = string.Empty;
- return true;
- }
- protected override bool fPlaceComplete(object[] param)
- {
- if (CmdRobotArm == RobotArmEnum.Both)
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), (int)Hand.Blade1, CmdTarget, CmdTargetSlot);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), (int)Hand.Blade2, CmdTarget, CmdTargetSlot + 1);
- }
- else
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), (int)CmdRobotArm, CmdTarget, CmdTargetSlot);
- }
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return base.fPlaceComplete(param);
- }
- private string BuildBladeTarget()
- {
- return (CmdRobotArm == RobotArmEnum.Upper ? "ArmB" : "ArmA") + "." + CmdTarget;
- }
- protected override bool fStartPickWafer(object[] param)
- {
- RobotArmEnum arm = (RobotArmEnum)param[0];
- ModuleName module = (ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString());
- int slot = ((int[])param[2])[0];//int.Parse(param[2].ToString());
- if (!CheckEnablePick(module, slot, arm, out string reason))
- {
- EV.PostAlarmLog(Module, $"Can not pick wafer from {module} slot {slot + 1}, " + reason);
- return false;
- }
- CmdRobotArm = arm;
- CmdTarget = module;
- CmdTargetSlot = slot;
- if (SC.IsDoubleFork)
- {
- if (ModuleHelper.IsLoadLock(module))
- {
- module = ModuleName.LLA;
- if ((slot % 2) > 0)
- {
- module = ModuleName.LLB;
- slot = slot - 1;
- }
- slot = _slotToFloor[slot];
- if ((ModuleName)Enum.Parse(typeof(ModuleName), param[1].ToString()) == ModuleName.LLB) slot = slot + 4;
- }
- }
- if (!_efem.GetWafer(module, slot, (Hand)(int)arm, out reason))
- {
- EV.PostAlarmLog(Module, $"Can not pick wafer from {module} slot {slot + 1}, " + reason);
- return false;
- }
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Picking,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return true;
- }
- private bool CheckEnablePick(ModuleName module, int slot, RobotArmEnum arm, out string reason)
- {
- if (arm == RobotArmEnum.Both)
- {
- if (!WaferManager.Instance.CheckHasWafer(module, slot) && !WaferManager.Instance.CheckHasWafer(module, slot + 1))
- {
- reason = "source has no wafer";
- return false;
- }
- if (!WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) && !WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
- {
- reason = "robot arm has wafer";
- return false;
- }
- }
- else
- {
- if (!WaferManager.Instance.CheckHasWafer(module, slot))
- {
- reason = "source has no wafer";
- return false;
- }
- if (!WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)arm))
- {
- reason = "robot arm has wafer";
- return false;
- }
- }
- reason = string.Empty;
- return true;
- }
- protected override bool fPickComplete(object[] param)
- {
- if (CmdRobotArm == RobotArmEnum.Both)
- {
- WaferManager.Instance.WaferMoved(CmdTarget, CmdTargetSlot, ModuleHelper.Converter(Module), (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(CmdTarget, CmdTargetSlot + 1, ModuleHelper.Converter(Module), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferMoved(CmdTarget, CmdTargetSlot, ModuleHelper.Converter(Module), (int)CmdRobotArm);
- }
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return base.fPickComplete(param);
- }
- protected override bool fResetToReady(object[] param)
- {
- return true;
- }
- protected override bool fReset(object[] param)
- {
- return true;
- }
- #region Init/Home
- public bool Home(out string reason)
- {
- if (!CheckToPostMessage((int)RobotMsg.StartInit))
- {
- reason = $"Can not home at {(RobotStateEnum)fsm.State} state";
- return false;
- }
- reason = string.Empty;
- return true;
- }
- protected override bool fStartInit(object[] param)
- {
- CmdRobotArm = RobotArmEnum.Lower;
- CmdTarget = ModuleName.System;
- CmdTargetSlot = 0;
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Retracting,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return true;
- }
- protected override bool fInitComplete(object[] param)
- {
- return base.fInitComplete(param);
- }
- protected override bool fMonitorInit(object[] param)
- {
- IsBusy = false;
- return true;
- }
- protected override bool fMonitorReadData(object[] param)
- {
- return base.fMonitorReadData(param);
- }
- #endregion
- public override bool HomeAllAxes(out string reason)
- {
- if (!_efem.HomeAllAxes(out reason))
- return false;
- IsBusy = true;
- return true;
- }
- protected override bool fError(object[] param)
- {
- string errorInfo = param[0].ToString();
- if (param.Length > 0)
- EV.PostAlarmLog(Module, errorInfo);
- if (fsm.State == (int)RobotStateEnum.Initializing)
- {
- }
- else if (fsm.State == (int)RobotStateEnum.Picking)
- {
- if(ModuleHelper.IsEfemRobot(Module) || ModuleHelper.IsEfem(ModuleHelper.Converter(Module)))
- EV.PostAlarmLog(ModuleName.EFEM.ToString(), errorInfo);
- bool waferGot = errorInfo.Contains("|WAFER");
- if (waferGot)
- {
- if (CmdRobotArm == RobotArmEnum.Both)
- {
- WaferManager.Instance.WaferMoved(CmdTarget, CmdTargetSlot, ModuleHelper.Converter(Module), (int)Hand.Blade1);
- WaferManager.Instance.WaferMoved(CmdTarget, CmdTargetSlot + 1, ModuleHelper.Converter(Module), (int)Hand.Blade2);
- }
- else
- {
- WaferManager.Instance.WaferMoved(CmdTarget, CmdTargetSlot, ModuleHelper.Converter(Module), (int)CmdRobotArm);
- }
- }
- }
- else if (fsm.State == (int)RobotStateEnum.Placing)
- {
- if (ModuleHelper.IsEfemRobot(Module) || ModuleHelper.IsEfem(ModuleHelper.Converter(Module)))
- EV.PostAlarmLog(ModuleName.EFEM.ToString(), errorInfo);
- bool waferPut = errorInfo.Contains("|NONWAF");
- if (waferPut)
- {
- if (CmdRobotArm == RobotArmEnum.Both)
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), (int)Hand.Blade1, CmdTarget, CmdTargetSlot);
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), (int)Hand.Blade2, CmdTarget, CmdTargetSlot + 1);
- }
- else
- {
- WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Module), (int)CmdRobotArm, CmdTarget, CmdTargetSlot);
- }
- }
- }
- MoveInfo = new RobotMoveInfo()
- {
- Action = RobotAction.Moving,
- ArmTarget = CmdRobotArm == RobotArmEnum.Lower ? RobotArm.ArmA : RobotArm.ArmB,
- BladeTarget = BuildBladeTarget(),
- };
- return true;
- }
- protected override bool fStartExtendForPick(object[] param)
- {
- return true;
- }
- protected override bool fStartExtendForPlace(object[] param)
- {
- return true;
- }
- protected override bool fStartRetractFromPick(object[] param)
- {
- return true;
- }
- protected override bool fStartRetractFromPlace(object[] param)
- {
- return true;
- }
- public override RobotArmWaferStateEnum GetWaferState(RobotArmEnum arm)
- {
- return RobotArmWaferStateEnum.Unknown;
- }
- public bool Pick(ModuleName target, Hand blade, int targetSlot, out string reason)
- {
- reason = string.Empty;
- return base.Pick((RobotArmEnum)(int)blade, target.ToString(), new int[] { targetSlot });
- }
- public bool Place(ModuleName target, Hand blade, int targetSlot, out string reason)
- {
- reason = string.Empty;
- return base.Place((RobotArmEnum)(int)blade, target.ToString(), new int[] { targetSlot });
- }
- public bool PickAndPlace(ModuleName pickTarget, Hand pickHand, int pickSlot, ModuleName placeTarget, Hand placeHand,
- int placeSlot, out string reason)
- {
- reason = string.Empty;
- return false;
- }
- public bool Goto(ModuleName target, Hand blade, int targetSlot, out string reason)
- {
- reason = string.Empty;
- return base.GoTo((RobotArmEnum)(int)blade, target.ToString(), targetSlot, RobotPostionEnum.PickReady);
- }
- public bool Map(ModuleName target, int thicknessIndex, out string reason)
- {
- reason = string.Empty;
- return base.WaferMapping(target, thicknessIndex);
- }
- public void NoteFailed(string error)
- {
- IsBusy = false;
- PostMsg(RobotMsg.ERROR, error);
- }
- public void NoteComplete()
- {
- if (fsm.State == (int)RobotStateEnum.Initializing)
- {
- IsBusy = false;
- return;
- }
- if (fsm.State == (int)RobotStateEnum.Mapping)
- {
- IsBusy = false;
- PostMsg(RobotMsg.ReadData, CmdTarget);
- }
- else
- {
- IsBusy = false;
- PostMsg(RobotMsg.ActionDone);
- }
- }
- public void NoteCancel(string error)
- {
- if (fsm.State == (int)RobotStateEnum.Initializing)
- {
- PostMsg(RobotMsg.ERROR, error);
- IsBusy = false;
- return;
- }
- IsBusy = false;
- PostMsg(RobotMsg.ERROR, error);
- }
- }
- }
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