_ioDefinePM.xml 25 KB

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  1. <?xml version="1.0"?>
  2. <IO_DEFINE xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  3. <Dig_In>
  4. <DI_ITEM Index="00" Name="DI_1_SlitDoorOpenPos" BufferOffset="00" Addr="w20.00" Description="1_SlitDoorOpenPos" />
  5. <DI_ITEM Index="01" Name="DI_1_SlitDoorClosePos" BufferOffset="01" Addr="w20.01" Description="1_SlitDoorClosePos" />
  6. <DI_ITEM Index="02" Name="DI_1_LiftPinUp" BufferOffset="02" Addr="w20.02" Description="1_LiftPinUp" />
  7. <DI_ITEM Index="03" Name="DI_1_LiftPinDown" BufferOffset="03" Addr="w20.03" Description="1_LiftPinDown" />
  8. <DI_ITEM Index="04" Name="DI_1_GuidePinLifterUpPos" BufferOffset="04" Addr="w20.04" Description="1_GuidePinLifterUpPos" />
  9. <DI_ITEM Index="05" Name="DI_1_GuidePinLifterDownPos" BufferOffset="05" Addr="w20.05" Description="1_GuidePinLifterDownPos" />
  10. <DI_ITEM Index="09" Name="DI_MFC1PressureSW" BufferOffset="09" Addr="w20.09" Description="MFC1PressureSW" />
  11. <DI_ITEM Index="10" Name="DI_MFC2PressureSW" BufferOffset="10" Addr="w20.10" Description="MFC2PressureSW" />
  12. <DI_ITEM Index="11" Name="DI_MFC3PressureSW" BufferOffset="11" Addr="w20.11" Description="MFC3PressureSW" />
  13. <DI_ITEM Index="12" Name="DI_MFC4PressureSW" BufferOffset="12" Addr="w20.12" Description="MFC4PressureSW" />
  14. <DI_ITEM Index="13" Name="DI_MFC5PressureSW" BufferOffset="13" Addr="w20.13" Description="MFC5PressureSW" />
  15. <DI_ITEM Index="14" Name="DI_N2PressureSW" BufferOffset="14" Addr="w20.14" Description="N2PressureSW" />
  16. <DI_ITEM Index="15" Name="DI_MFC6PressureSW" BufferOffset="15" Addr="w20.15" Description="MFC6PressureSW" />
  17. <DI_ITEM Index="16" Name="DI_2_SlitDoorOpenPos" BufferOffset="16" Addr="w21.00" Description="2_SlitDoorOpenPos" />
  18. <DI_ITEM Index="17" Name="DI_2_SlitDoorClosePos" BufferOffset="17" Addr="w21.01" Description="2_SlitDoorClosePos" />
  19. <DI_ITEM Index="18" Name="DI_2_LiftPinUp" BufferOffset="18" Addr="w21.02" Description="2_LiftPinUp" />
  20. <DI_ITEM Index="19" Name="DI_2_LiftPinDown" BufferOffset="19" Addr="w21.03" Description="2_LiftPinDown" />
  21. <DI_ITEM Index="20" Name="DI_2_GuidePinLifterUpPos" BufferOffset="20" Addr="w21.04" Description="2_GuidePinLifterUpPos" />
  22. <DI_ITEM Index="21" Name="DI_2_GuidePinLifterDownPos" BufferOffset="21" Addr="w21.05" Description="2_GuidePinLifterDownPos" />
  23. <DI_ITEM Index="26" Name="DI_1_CoolingWaterFlowSW" BufferOffset="26" Addr="w21.10" Description="1_CoolingWaterFlowSW" />
  24. <DI_ITEM Index="27" Name="DI_2_CoolingWaterFlowSW" BufferOffset="27" Addr="w21.11" Description="2_CoolingWaterFlowSW" />
  25. <DI_ITEM Index="28" Name="DI_CHBOTSW" BufferOffset="28" Addr="w21.12" Description="CHBOTSW" />
  26. <DI_ITEM Index="29" Name="DI_SouceFan" BufferOffset="29" Addr="w21.13" Description="SouceFan" />
  27. <DI_ITEM Index="30" Name="DI_1_LEOTSW" BufferOffset="30" Addr="w21.14" Description="1_LEOTSW" />
  28. <DI_ITEM Index="31" Name="DI_2_LEOTSW" BufferOffset="31" Addr="w21.15" Description="2_LEOTSW" />
  29. <DI_ITEM Index="32" Name="DI_LidClosed" BufferOffset="32" Addr="w22.00" Description="LidClosed" />
  30. <DI_ITEM Index="33" Name="DI_ATMSW" BufferOffset="33" Addr="w22.01" Description="ATMSW" />
  31. <DI_ITEM Index="34" Name="DI_VACSW" BufferOffset="34" Addr="w22.02" Description="VACSW" />
  32. <DI_ITEM Index="35" Name="DI_WaterLeak" BufferOffset="35" Addr="w22.03" Description="WaterLeak" />
  33. <DI_ITEM Index="48" Name="DI_TMRBNotExtendToPM1" BufferOffset="48" Addr="w23.00" Description="TMRBNotExtendToPM1" />
  34. <DI_ITEM Index="49" Name="DI_TMRBNotExtendToPM2" BufferOffset="49" Addr="w23.01" Description="TMRBNotExtendToPM2" />
  35. <DI_ITEM Index="50" Name="DI_TMInSafety" BufferOffset="50" Addr="w23.02" Description="TMInSafety" />
  36. <DI_ITEM Index="51" Name="DI_1_RFHardwareInterlock" BufferOffset="51" Addr="w23.03" Description="" />
  37. <!--<DI_ITEM Index="52" Name="DI_GBPressureSW" BufferOffset="52" Addr="w23.04" Description="GBPressureSW" />-->
  38. <DI_ITEM Index="53" Name="DI_GB_Interlock" BufferOffset="53" Addr="w23.05" Description="GB Interlock" />
  39. <DI_ITEM Index="54" Name="DI_2_RFHardwareInterlock" BufferOffset="54" Addr="w23.06" Description="" />
  40. <DI_ITEM Index="64" Name="DI_CHBHeaterOn_FB" BufferOffset="64" Addr="w24.00" Description="CHBHeaterOn_FB" />
  41. <DI_ITEM Index="65" Name="DI_ForelineHeaterOn_FB" BufferOffset="65" Addr="w24.01" Description="ForelineHeaterOn_FB" />
  42. <DI_ITEM Index="66" Name="DI_1_LEHeaterOn_FB" BufferOffset="66" Addr="w24.02" Description="1_LEHeaterOn_FB" />
  43. <DI_ITEM Index="67" Name="DI_2_LEHeaterOn_FB" BufferOffset="67" Addr="w24.03" Description="2_LEHeaterOn_FB" />
  44. <DI_ITEM Index="68" Name="DI_ProcessPressureGaugeAlarm" BufferOffset="68" Addr="w24.04" Description="ProcessPressureGaugeAlarm" />
  45. <DI_ITEM Index="69" Name="DI_ChamberPressureGaugeAlarm" BufferOffset="69" Addr="w24.25" Description="ChamberPressureGaugeAlarm" />
  46. <DI_ITEM Index="70" Name="DI_ForelinePressureGaugeAlarm" BufferOffset="70" Addr="w24.06" Description="ForelinePressureGaugeAlarm" />
  47. <DI_ITEM Index="71" Name="DI_ForelineTCDeviationOutOfRange" BufferOffset="71" Addr="w24.07" Description="ForelineTCDeviationOutOfRange" />
  48. <DI_ITEM Index="72" Name="DI_ForelineControlTCBrokenAlarm" BufferOffset="72" Addr="w24.08" Description="ForelineControlTCBrokenAlarm" />
  49. <DI_ITEM Index="73" Name="DI_ForelineMonitorTCBrokenAlarm" BufferOffset="73" Addr="w24.09" Description="ForelineMonitorTCBrokenAlarm" />
  50. <DI_ITEM Index="74" Name="DI_CHBTCDeviationOutOfRange" BufferOffset="74" Addr="w24.10" Description="CHBTCDeviationOutOfRange" />
  51. <DI_ITEM Index="75" Name="DI_CHBControlTCBrokenAlarm" BufferOffset="75" Addr="w24.11" Description="CHBControlTCBrokenAlarm" />
  52. <DI_ITEM Index="76" Name="DI_CHBMonitorTCBrokenAlarm" BufferOffset="76" Addr="w24.12" Description="CHBMonitorTCBrokenAlarm" />
  53. <DI_ITEM Index="81" Name="DI_1_CoolantInletTCBrokenAlarm" BufferOffset="81" Addr="w25.01" Description="1_CoolantInletTCBrokenAlarm" />
  54. <DI_ITEM Index="82" Name="DI_1_CoolantOutletTCBrokenAlarm" BufferOffset="82" Addr="w25.02" Description="1_CoolantOutletTCBrokenAlarm" />
  55. <DI_ITEM Index="83" Name="DI_1_LEControlTCBrokenAlarm" BufferOffset="83" Addr="w25.03" Description="1_LEControlTCBrokenAlarm" />
  56. <DI_ITEM Index="84" Name="DI_1_LEMonitorTCBrokenAlarm" BufferOffset="84" Addr="w25.04" Description="1_LEMonitorTCBrokenAlarm" />
  57. <DI_ITEM Index="85" Name="DI_1_LETCDeviationOutOfRange" BufferOffset="85" Addr="w25.05" Description="1_LETCDeviationOutOfRange" />
  58. <DI_ITEM Index="86" Name="DI_1_SourceMatchinterlockAlarm" BufferOffset="86" Addr="w25.06" Description="1_Source Match interlock Alarm" />
  59. <DI_ITEM Index="87" Name="DI_1_BiasMatchinterlockAlarm" BufferOffset="87" Addr="w25.07" Description="1_Bias Match interlock Alarm" />
  60. <DI_ITEM Index="91" Name="DI_2_CoolantInletTCBrokenAlarm" BufferOffset="91" Addr="w25.11" Description="2_CoolantInletTCBrokenAlarm" />
  61. <DI_ITEM Index="92" Name="DI_2_CoolantOutletTCBrokenAlarm" BufferOffset="92" Addr="w25.12" Description="2_CoolantOutletTCBrokenAlarm" />
  62. <DI_ITEM Index="93" Name="DI_2_LEControlTCBrokenAlarm" BufferOffset="93" Addr="w25.13" Description="2_LEControlTCBrokenAlarm" />
  63. <DI_ITEM Index="94" Name="DI_2_LEMonitorTCBrokenAlarm" BufferOffset="94" Addr="w25.14" Description="2_LEMonitorTCBrokenAlarm" />
  64. <DI_ITEM Index="95" Name="DI_2_LETCDeviationOutOfRange" BufferOffset="95" Addr="w25.15" Description="2_LETCDeviationOutOfRange" />
  65. <DI_ITEM Index="96" Name="DI_2_SourceMatchinterlockAlarm" BufferOffset="96" Addr="w26.00" Description="2_Source Match interlock Alarm" />
  66. <DI_ITEM Index="97" Name="DI_2_BiasMatchinterlockAlarm" BufferOffset="97" Addr="w26.01" Description="2_Bias Match interlock Alarm" />
  67. <DI_ITEM Index="100" Name="DI_CHBHeatPIDATStart_Fb" BufferOffset="100" Addr="w26.04" Description="CHBHeatPIDATStart_Fb" />
  68. <DI_ITEM Index="101" Name="DI_CHBHeatPIDATStop_Fb" BufferOffset="101" Addr="w26.05" Description="CHBHeatPIDATStop_Fb" />
  69. <DI_ITEM Index="102" Name="DI_ForelineHeatPIDATStart_Fb" BufferOffset="102" Addr="w26.06" Description="ForelineHeatPIDATStart_Fb" />
  70. <DI_ITEM Index="103" Name="DI_ForelineHeatPIDATStop_Fb" BufferOffset="103" Addr="w26.07" Description="ForelineHeatPIDATStop_Fb" />
  71. <DI_ITEM Index="104" Name="DI_1_LEHeatPIDATStart_Fb" BufferOffset="104" Addr="w26.08" Description="1_LEHeatPIDATStart_Fb" />
  72. <DI_ITEM Index="105" Name="DI_1_LEHeatPIDATStop_Fb" BufferOffset="105" Addr="w26.09" Description="1_LEHeatPIDATStop_Fb" />
  73. <DI_ITEM Index="106" Name="DI_2_LEHeatPIDATStart_Fb" BufferOffset="106" Addr="w26.10" Description="2_LEHeatPIDATStart_Fb" />
  74. <DI_ITEM Index="107" Name="DI_2_LEHeatPIDATStop_Fb" BufferOffset="107" Addr="w26.11" Description="2_LEHeatPIDATStop_Fb" />
  75. <DI_ITEM Index="116" Name="DI_CHBHeatPIDATRunning" BufferOffset="116" Addr="w27.04" Description="CHBHeatPIDATRunning" />
  76. <DI_ITEM Index="117" Name="DI_CHBHeatPIDATFinished" BufferOffset="117" Addr="w27.05" Description="CHBHeatPIDATFinished" />
  77. <DI_ITEM Index="118" Name="DI_ForelineHeatPIDATRunning" BufferOffset="118" Addr="w27.06" Description="ForelineHeatPIDATRunning" />
  78. <DI_ITEM Index="119" Name="DI_ForelineHeatPIDATFinished" BufferOffset="119" Addr="w27.07" Description="ForelineHeatPIDATFinished" />
  79. <DI_ITEM Index="120" Name="DI_1_LEHeatPIDATRunning" BufferOffset="120" Addr="w27.08" Description="1_LEHeatPIDATRunning" />
  80. <DI_ITEM Index="121" Name="DI_1_LEHeatPIDATFinished" BufferOffset="121" Addr="w27.09" Description="1_LEHeatPIDATFinished" />
  81. <DI_ITEM Index="122" Name="DI_2_LEHeatPIDATRunning" BufferOffset="122" Addr="w27.10" Description="2_LEHeatPIDATRunning" />
  82. <DI_ITEM Index="123" Name="DI_2_LEHeatPIDATFinished" BufferOffset="123" Addr="w27.11" Description="2_LEHeatPIDATFinished" />
  83. </Dig_In>
  84. <Dig_Out>
  85. <DO_ITEM Index="00" Name="DO_1_SlitDoorOpen" BufferOffset="00" Addr="w0.00" Description="1_SlitDoorOpen" />
  86. <DO_ITEM Index="01" Name="DO_1_SlitDoorClose" BufferOffset="01" Addr="w0.01" Description="1_SlitDoorClose" />
  87. <DO_ITEM Index="02" Name="DO_1_LiftPinUp" BufferOffset="02" Addr="w0.02" Description="1_LiftPinUp" />
  88. <DO_ITEM Index="03" Name="DO_1_LiftPinDown" BufferOffset="03" Addr="w0.03" Description="1_LiftPinDown" />
  89. <DO_ITEM Index="04" Name="DO_1_GuidePinLifterUp" BufferOffset="04" Addr="w0.04" Description="1_GuidePinLifterUp" />
  90. <DO_ITEM Index="05" Name="DO_1_GuidePinLifterDown" BufferOffset="05" Addr="w0.05" Description="1_GuidePinLifterDown" />
  91. <DO_ITEM Index="09" Name="DO_MFC1Valve" BufferOffset="09" Addr="w0.09" Description="MFC1Valve" />
  92. <DO_ITEM Index="10" Name="DO_MFC2Valve" BufferOffset="10" Addr="w0.10" Description="MFC2Valve" />
  93. <DO_ITEM Index="11" Name="DO_MFC3Valve" BufferOffset="11" Addr="w0.11" Description="MFC3Valve" />
  94. <DO_ITEM Index="12" Name="DO_MFC4Valve" BufferOffset="12" Addr="w0.12" Description="MFC4Valve" />
  95. <DO_ITEM Index="13" Name="DO_MFC5Valve" BufferOffset="13" Addr="w0.13" Description="MFC5Valve" />
  96. <DO_ITEM Index="14" Name="DO_ChamberPurgeValve" BufferOffset="14" Addr="w0.14" Description="ChamberPurgeValve" />
  97. <DO_ITEM Index="15" Name="DO_ChamberVentValve" BufferOffset="15" Addr="w0.15" Description="ChamberVentValve" />
  98. <DO_ITEM Index="16" Name="DO_2_SlitDoorOpen" BufferOffset="16" Addr="w1.00" Description="2_SlitDoorOpen" />
  99. <DO_ITEM Index="17" Name="DO_2_SlitDoorClose" BufferOffset="17" Addr="w1.01" Description="2_SlitDoorClose" />
  100. <DO_ITEM Index="18" Name="DO_2_LiftPinUp" BufferOffset="18" Addr="w1.02" Description="2_LiftPinUp" />
  101. <DO_ITEM Index="19" Name="DO_2_LiftPinDown" BufferOffset="19" Addr="w1.03" Description="2_LiftPinDown" />
  102. <DO_ITEM Index="20" Name="DO_2_GuidePinLifterUp" BufferOffset="20" Addr="w1.04" Description="2_GuidePinLifterUp" />
  103. <DO_ITEM Index="21" Name="DO_2_GuidePinLifterDown" BufferOffset="21" Addr="w1.05" Description="2_GuidePinLifterDown" />
  104. <DO_ITEM Index="22" Name="DO_ProcessGasFinalValve" BufferOffset="22" Addr="w1.06" Description="ProcessGasFinalValve" />
  105. <DO_ITEM Index="23" Name="DO_SoftPumpingValve" BufferOffset="23" Addr="w1.07" Description="SoftPumpingValve" />
  106. <DO_ITEM Index="24" Name="DO_FastPumpingValve" BufferOffset="24" Addr="w1.08" Description="FastPumpingValve" />
  107. <DO_ITEM Index="25" Name="DO_N2Valve" BufferOffset="25" Addr="w1.09" Description="N2Valve" />
  108. <DO_ITEM Index="26" Name="DO_MFC6Valve" BufferOffset="26" Addr="w1.10" Description="MFC6Valve" />
  109. <DO_ITEM Index="28" Name="DO_CHBHeaterOn" BufferOffset="28" Addr="w1.12" Description="CHBHeaterOn" />
  110. <DO_ITEM Index="29" Name="DO_ForelineHeaterOn" BufferOffset="29" Addr="w1.13" Description="ForelineHeaterOn" />
  111. <DO_ITEM Index="30" Name="DO_1_LEHeaterOn" BufferOffset="30" Addr="w1.14" Description="1_LEHeaterOn" />
  112. <DO_ITEM Index="31" Name="DO_2_LEHeaterOn" BufferOffset="31" Addr="w1.15" Description="2_LEHeaterOn" />
  113. <DO_ITEM Index="32" Name="DO_ResetSignal" BufferOffset="32" Addr="w2.00" Description="ResetSignal" />
  114. <DO_ITEM Index="33" Name="DO_CDAPressureNormal" BufferOffset="33" Addr="w2.01" Description="CDAPressureNormal" />
  115. <DO_ITEM Index="35" Name="DO_CHBHeatPIDATStart" BufferOffset="35" Addr="w2.03" Description="CHBHeatPIDATStart" />
  116. <DO_ITEM Index="36" Name="DO_CHBHeatPIDATStop" BufferOffset="36" Addr="w2.04" Description="CHBHeatPIDATStop" />
  117. <DO_ITEM Index="37" Name="DO_ForelineHeatPIDATStart" BufferOffset="37" Addr="w2.05" Description="ForelineHeatPIDATStart" />
  118. <DO_ITEM Index="38" Name="DO_ForelineHeatPIDATStop" BufferOffset="38" Addr="w2.06" Description="ForelineHeatPIDATStop" />
  119. <DO_ITEM Index="39" Name="DO_1_LEHeatPIDATStart" BufferOffset="39" Addr="w2.07" Description="1_LEHeatPIDATStart" />
  120. <DO_ITEM Index="40" Name="DO_1_LEHeatPIDATStop" BufferOffset="40" Addr="w2.08" Description="1_LEHeatPIDATStop" />
  121. <DO_ITEM Index="41" Name="DO_2_LEHeatPIDATStart" BufferOffset="41" Addr="w2.09" Description="2_LEHeatPIDATStart" />
  122. <DO_ITEM Index="42" Name="DO_2_LEHeatPIDATStop" BufferOffset="42" Addr="w2.10" Description="2_LEHeatPIDATStop" />
  123. </Dig_Out>
  124. <Ana_In>
  125. <!--<AI_ITEM Index="00" Name="AI_ProcessPressure" BufferOffset="00" Addr="D2000" Description="ProcessPressure" />
  126. <AI_ITEM Index="01" Name="AI_ChamberPressure" BufferOffset="01" Addr="D2002" Description="ChamberPressure" />
  127. <AI_ITEM Index="02" Name="AI_ForelinePressure" BufferOffset="02" Addr="D2004" Description="ForelinePressure" />
  128. <AI_ITEM Index="04" Name="AI_MFC1Flow" BufferOffset="04" Addr="D2008" Description="MFC1Flow" />
  129. <AI_ITEM Index="05" Name="AI_MFC2Flow" BufferOffset="05" Addr="D2010" Description="MFC2Flow" />
  130. <AI_ITEM Index="06" Name="AI_MFC3Flow" BufferOffset="06" Addr="D2012" Description="MFC3Flow" />
  131. <AI_ITEM Index="07" Name="AI_MFC4Flow" BufferOffset="07" Addr="D2014" Description="MFC4Flow" />
  132. <AI_ITEM Index="08" Name="AI_MFC5Flow" BufferOffset="08" Addr="D2016" Description="MFC5Flow" />
  133. <AI_ITEM Index="09" Name="AI_MFC6Flow" BufferOffset="09" Addr="D2018" Description="MFC6Flow" />
  134. <AI_ITEM Index="14" Name="AI_ThrottleValveRealPosition" BufferOffset="14" Addr="D2028" Description="ThrottleValveRealPosition" />
  135. <AI_ITEM Index="15" Name="AI_ThrottleValveRealPressure" BufferOffset="15" Addr="D2030" Description="ThrottleValveRealPressure" />
  136. <AI_ITEM Index="18" Name="AI_HeartbeatFB" BufferOffset="18" Addr="D2036" Description="HeartbeatFB" />
  137. <AI_ITEM Index="21" Name="AI_Second" BufferOffset="21" Addr="D2042" Description="Second" />
  138. <AI_ITEM Index="22" Name="AI_Minute" BufferOffset="22" Addr="D2044" Description="Minute" />
  139. <AI_ITEM Index="23" Name="AI_Time" BufferOffset="23" Addr="D2046" Description="Time" />
  140. <AI_ITEM Index="24" Name="AI_Day" BufferOffset="24" Addr="D2048" Description="Day" />
  141. <AI_ITEM Index="25" Name="AI_Month" BufferOffset="25" Addr="D2050" Description="Month" />
  142. <AI_ITEM Index="26" Name="AI_Year" BufferOffset="26" Addr="D2052" Description="Year" />
  143. <AI_ITEM Index="28" Name="AI_CHBControlTCTemp" BufferOffset="28" Addr="D2056" Description="CHBControlTCTemp" />
  144. <AI_ITEM Index="29" Name="AI_CHBMonitorTCTemp" BufferOffset="29" Addr="D2058" Description="CHBMonitorTCTemp" />
  145. <AI_ITEM Index="30" Name="AI_ForelineControlTCTemp" BufferOffset="30" Addr="D2060" Description="ForelineControlTCTemp" />
  146. <AI_ITEM Index="31" Name="AI_ForelineMonitorTCTemp" BufferOffset="31" Addr="D2062" Description="ForelineMonitorTCTemp" />
  147. <AI_ITEM Index="32" Name="AI_1_LEControlTCTemp" BufferOffset="32" Addr="D2064" Description="1_LEControlTCTemp" />
  148. <AI_ITEM Index="33" Name="AI_1_LEMonitorTCTemp" BufferOffset="33" Addr="D2066" Description="1_LEMonitorTCTemp" />
  149. <AI_ITEM Index="34" Name="AI_2_LEControlTCTemp" BufferOffset="34" Addr="D2068" Description="2_LEControlTCTemp" />
  150. <AI_ITEM Index="35" Name="AI_2_LEMonitorTCTemp" BufferOffset="35" Addr="D2070" Description="2_LEMonitorTCTemp" />
  151. <AI_ITEM Index="36" Name="AI_1_CoolantInletTemp" BufferOffset="36" Addr="D2072" Description="1_CoolantInletTemp" />
  152. <AI_ITEM Index="37" Name="AI_1_CoolantOutletTemp" BufferOffset="37" Addr="D2074" Description="1_CoolantOutletTemp" />
  153. <AI_ITEM Index="38" Name="AI_2_CoolantInletTemp" BufferOffset="38" Addr="D2076" Description="2_CoolantInletTemp" />
  154. <AI_ITEM Index="39" Name="AI_2_CoolantOutletTemp" BufferOffset="39" Addr="D2078" Description="2_CoolantOutletTemp" />-->
  155. <AI_ITEM Index="00" Name="AI_ProcessPressure" BufferOffset="00" Addr="D2000" Description="ProcessPressure" />
  156. <AI_ITEM Index="01" Name="AI_ChamberPressure" BufferOffset="02" Addr="D2002" Description="ChamberPressure" />
  157. <AI_ITEM Index="02" Name="AI_ForelinePressure" BufferOffset="04" Addr="D2004" Description="ForelinePressure" />
  158. <AI_ITEM Index="04" Name="AI_MFC1Flow" BufferOffset="08" Addr="D2008" Description="MFC1Flow" />
  159. <AI_ITEM Index="05" Name="AI_MFC2Flow" BufferOffset="10" Addr="D2010" Description="MFC2Flow" />
  160. <AI_ITEM Index="06" Name="AI_MFC3Flow" BufferOffset="12" Addr="D2012" Description="MFC3Flow" />
  161. <AI_ITEM Index="07" Name="AI_MFC4Flow" BufferOffset="14" Addr="D2014" Description="MFC4Flow" />
  162. <AI_ITEM Index="08" Name="AI_MFC5Flow" BufferOffset="16" Addr="D2016" Description="MFC5Flow" />
  163. <AI_ITEM Index="09" Name="AI_MFC6Flow" BufferOffset="18" Addr="D2018" Description="MFC6Flow" />
  164. <AI_ITEM Index="14" Name="AI_ThrottleValveRealPosition" BufferOffset="28" Addr="D2028" Description="ThrottleValveRealPosition" />
  165. <AI_ITEM Index="15" Name="AI_ThrottleValveRealPressure" BufferOffset="30" Addr="D2030" Description="ThrottleValveRealPressure" />
  166. <AI_ITEM Index="18" Name="AI_HeartbeatFB" BufferOffset="36" Addr="D2036" Description="HeartbeatFB" />
  167. <AI_ITEM Index="21" Name="AI_Second" BufferOffset="42" Addr="D2042" Description="Second" />
  168. <AI_ITEM Index="22" Name="AI_Minute" BufferOffset="44" Addr="D2044" Description="Minute" />
  169. <AI_ITEM Index="23" Name="AI_Time" BufferOffset="46" Addr="D2046" Description="Time" />
  170. <AI_ITEM Index="24" Name="AI_Day" BufferOffset="48" Addr="D2048" Description="Day" />
  171. <AI_ITEM Index="25" Name="AI_Month" BufferOffset="50" Addr="D2050" Description="Month" />
  172. <AI_ITEM Index="26" Name="AI_Year" BufferOffset="52" Addr="D2052" Description="Year" />
  173. <AI_ITEM Index="28" Name="AI_CHBControlTCTemp" BufferOffset="56" Addr="D2056" Description="CHBControlTCTemp" />
  174. <AI_ITEM Index="29" Name="AI_CHBMonitorTCTemp" BufferOffset="58" Addr="D2058" Description="CHBMonitorTCTemp" />
  175. <AI_ITEM Index="30" Name="AI_ForelineControlTCTemp" BufferOffset="60" Addr="D2060" Description="ForelineControlTCTemp" />
  176. <AI_ITEM Index="31" Name="AI_ForelineMonitorTCTemp" BufferOffset="62" Addr="D2062" Description="ForelineMonitorTCTemp" />
  177. <AI_ITEM Index="32" Name="AI_1_LEControlTCTemp" BufferOffset="64" Addr="D2064" Description="1_LEControlTCTemp" />
  178. <AI_ITEM Index="33" Name="AI_1_LEMonitorTCTemp" BufferOffset="66" Addr="D2066" Description="1_LEMonitorTCTemp" />
  179. <AI_ITEM Index="34" Name="AI_2_LEControlTCTemp" BufferOffset="68" Addr="D2068" Description="2_LEControlTCTemp" />
  180. <AI_ITEM Index="35" Name="AI_2_LEMonitorTCTemp" BufferOffset="70" Addr="D2070" Description="2_LEMonitorTCTemp" />
  181. <AI_ITEM Index="36" Name="AI_1_CoolantInletTemp" BufferOffset="72" Addr="D2072" Description="1_CoolantInletTemp" />
  182. <AI_ITEM Index="37" Name="AI_1_CoolantOutletTemp" BufferOffset="74" Addr="D2074" Description="1_CoolantOutletTemp" />
  183. <AI_ITEM Index="38" Name="AI_2_CoolantInletTemp" BufferOffset="76" Addr="D2076" Description="2_CoolantInletTemp" />
  184. <AI_ITEM Index="39" Name="AI_2_CoolantOutletTemp" BufferOffset="78" Addr="D2078" Description="2_CoolantOutletTemp" />
  185. </Ana_In>
  186. <Ana_Out>
  187. <!--<AO_ITEM Index="02" Name="AO_MFC1FlowSetpoint" BufferOffset="02" Addr="D1004" Description="MFC1FlowSetpoint" />
  188. <AO_ITEM Index="03" Name="AO_MFC2FlowSetpoint" BufferOffset="03" Addr="D1006" Description="MFC2FlowSetpoint" />
  189. <AO_ITEM Index="04" Name="AO_MFC3FlowSetpoint" BufferOffset="04" Addr="D1008" Description="MFC3FlowSetpoint" />
  190. <AO_ITEM Index="05" Name="AO_MFC4FlowSetpoint" BufferOffset="05" Addr="D1010" Description="MFC4FlowSetpoint" />
  191. <AO_ITEM Index="06" Name="AO_MFC5FlowSetpoint" BufferOffset="06" Addr="D1012" Description="MFC5FlowSetpoint" />
  192. <AO_ITEM Index="07" Name="AO_ThrottleValveWorkMode" BufferOffset="07" Addr="D1014" Description="ThrottleValveWorkMode" />
  193. <AO_ITEM Index="08" Name="AO_ThrottleValvePressureSetpoint" BufferOffset="08" Addr="D1016" Description="ThrottleValvePressureSetpoint" />
  194. <AO_ITEM Index="09" Name="AO_ThrottleValvePositionSetpoint" BufferOffset="09" Addr="D1018" Description="ThrottleValvePositionSetpoint" />
  195. <AO_ITEM Index="10" Name="AO_MFC6FlowSetpoint" BufferOffset="10" Addr="D1020" Description="MFC6FlowSetpoint" />
  196. <AO_ITEM Index="18" Name="AO_Heartbeat" BufferOffset="18" Addr="D1036" Description="Heartbeat" />
  197. <AO_ITEM Index="21" Name="AO_BaisRFEnable" BufferOffset="21" Addr="D1042" Description="BaisRFEnable" />
  198. <AO_ITEM Index="28" Name="AO_CHBTemperatureSetpoint" BufferOffset="28" Addr="D1056" Description="CHBTemperatureSetpoint" />
  199. <AO_ITEM Index="29" Name="AO_CHBTempLimitSetpoint" BufferOffset="29" Addr="D1058" Description="CHBTempLimitSetpoint" />
  200. <AO_ITEM Index="30" Name="AO_ForelineTemperatureSetpoint" BufferOffset="30" Addr="D1060" Description="ForelineTemperatureSetpoint" />
  201. <AO_ITEM Index="31" Name="AO_ForelineTempLimitSetpoint" BufferOffset="31" Addr="D1062" Description="ForelineTempLimitSetpoint" />
  202. <AO_ITEM Index="32" Name="AO_1_LETemperatureSetpoint" BufferOffset="32" Addr="D1064" Description="1_LETemperatureSetpoint" />
  203. <AO_ITEM Index="33" Name="AO_1_LETempLimitSetpoint" BufferOffset="33" Addr="D1066" Description="1_LETempLimitSetpoint" />
  204. <AO_ITEM Index="34" Name="AO_2_LETemperatureSetpoint" BufferOffset="34" Addr="D1068" Description="2_LETemperatureSetpoint" />
  205. <AO_ITEM Index="35" Name="AO_2_LETempLimitSetpoint" BufferOffset="35" Addr="D1070" Description="2_LETempLimitSetpoint" />-->
  206. <AO_ITEM Index="02" Name="AO_MFC1FlowSetpoint" BufferOffset="04" Addr="D1004" Description="MFC1FlowSetpoint" />
  207. <AO_ITEM Index="03" Name="AO_MFC2FlowSetpoint" BufferOffset="06" Addr="D1006" Description="MFC2FlowSetpoint" />
  208. <AO_ITEM Index="04" Name="AO_MFC3FlowSetpoint" BufferOffset="08" Addr="D1008" Description="MFC3FlowSetpoint" />
  209. <AO_ITEM Index="05" Name="AO_MFC4FlowSetpoint" BufferOffset="10" Addr="D1010" Description="MFC4FlowSetpoint" />
  210. <AO_ITEM Index="06" Name="AO_MFC5FlowSetpoint" BufferOffset="12" Addr="D1012" Description="MFC5FlowSetpoint" />
  211. <AO_ITEM Index="07" Name="AO_ThrottleValveWorkMode" BufferOffset="14" Addr="D1014" Description="ThrottleValveWorkMode" />
  212. <AO_ITEM Index="08" Name="AO_ThrottleValvePressureSetpoint" BufferOffset="16" Addr="D1016" Description="ThrottleValvePressureSetpoint" />
  213. <AO_ITEM Index="09" Name="AO_ThrottleValvePositionSetpoint" BufferOffset="18" Addr="D1018" Description="ThrottleValvePositionSetpoint" />
  214. <AO_ITEM Index="10" Name="AO_MFC6FlowSetpoint" BufferOffset="20" Addr="D1020" Description="MFC6FlowSetpoint" />
  215. <AO_ITEM Index="18" Name="AO_Heartbeat" BufferOffset="36" Addr="D1036" Description="Heartbeat" />
  216. <AO_ITEM Index="21" Name="AO_BaisRFEnable" BufferOffset="42" Addr="D1042" Description="BaisRFEnable" />
  217. <AO_ITEM Index="28" Name="AO_CHBTemperatureSetpoint" BufferOffset="56" Addr="D1056" Description="CHBTemperatureSetpoint" />
  218. <AO_ITEM Index="29" Name="AO_CHBTempLimitSetpoint" BufferOffset="58" Addr="D1058" Description="CHBTempLimitSetpoint" />
  219. <AO_ITEM Index="30" Name="AO_ForelineTemperatureSetpoint" BufferOffset="60" Addr="D1060" Description="ForelineTemperatureSetpoint" />
  220. <AO_ITEM Index="31" Name="AO_ForelineTempLimitSetpoint" BufferOffset="62" Addr="D1062" Description="ForelineTempLimitSetpoint" />
  221. <AO_ITEM Index="32" Name="AO_1_LETemperatureSetpoint" BufferOffset="64" Addr="D1064" Description="1_LETemperatureSetpoint" />
  222. <AO_ITEM Index="33" Name="AO_1_LETempLimitSetpoint" BufferOffset="66" Addr="D1066" Description="1_LETempLimitSetpoint" />
  223. <AO_ITEM Index="34" Name="AO_2_LETemperatureSetpoint" BufferOffset="68" Addr="D1068" Description="2_LETemperatureSetpoint" />
  224. <AO_ITEM Index="35" Name="AO_2_LETempLimitSetpoint" BufferOffset="70" Addr="D1070" Description="2_LETempLimitSetpoint" />
  225. </Ana_Out>
  226. </IO_DEFINE>