_ioDefineMF.xml 8.0 KB

1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980818283848586
  1. <?xml version='1.0'?>
  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
  3. <Dig_In>
  4. <DI_ITEM Index="00" Name="DI_TMPowerOn" BufferOffset="00" Addr="w20.00" Description="TMPowerOn"/>
  5. <DI_ITEM Index="01" Name="DI_TMSideDoorClosed" BufferOffset="01" Addr="w20.01" Description="TMSideDoorClosed"/>
  6. <DI_ITEM Index="02" Name="DI_TMInSafety" BufferOffset="02" Addr="w20.02" Description="TMInSafety"/>
  7. <DI_ITEM Index="03" Name="DI_TMBufferOTSW" BufferOffset="03" Addr="w20.03" Description="TMBufferOTSW"/>
  8. <DI_ITEM Index="04" Name="DI_TMRBNotExtendPMA1" BufferOffset="04" Addr="w20.04" Description="TMRBNotExtendPMA1"/>
  9. <DI_ITEM Index="05" Name="DI_TMRBNotExtendPMB1" BufferOffset="05" Addr="w20.05" Description="TMRBNotExtendPMB1"/>
  10. <DI_ITEM Index="06" Name="DI_TMRBNotExtendPMA2" BufferOffset="06" Addr="w20.06" Description="TMRBNotExtendPMA2"/>
  11. <DI_ITEM Index="07" Name="DI_TMRBNotExtendPMB2" BufferOffset="07" Addr="w20.07" Description="TMRBNotExtendPMB2"/>
  12. <DI_ITEM Index="08" Name="DI_TMRBNotExtendBFA" BufferOffset="08" Addr="w20.08" Description="TMRBNotExtendBFA"/>
  13. <DI_ITEM Index="09" Name="DI_TMRBNotExtendBFB" BufferOffset="09" Addr="w20.09" Description="TMRBNotExtendBFB"/>
  14. <DI_ITEM Index="10" Name="DI_TMRBTeachMode" BufferOffset="10" Addr="w20.10" Description="TMRBTeachMode"/>
  15. <DI_ITEM Index="11" Name="DI_EFEMRBNotExtendBFA" BufferOffset="11" Addr="w20.11" Description="EFEMRBNotExtendBFA"/>
  16. <DI_ITEM Index="12" Name="DI_EFEMRBNotExtendBFB" BufferOffset="12" Addr="W20.12" Description="EFEMRBNotExtendBFB"/>
  17. <DI_ITEM Index="13" Name="DI_EFEMSidePlanClosed" BufferOffset="13" Addr="W20.13" Description="EFEMSidePlanClosed"/>
  18. <DI_ITEM Index="14" Name="DI_WaterFlowSW" BufferOffset="14" Addr="w20.14" Description="WaterFlowSW"/>
  19. <DI_ITEM Index="15" Name="DI_WaterLeakSW" BufferOffsewot="15" Addr="w20.15" Description="WaterLeakSW"/>
  20. <DI_ITEM Index="16" Name="DI_TMFFUNormal" BufferOffset="16" Addr="w21.00" Description="TMFFUNormal"/>
  21. <DI_ITEM Index="17" Name="DI_RunMode" BufferOffset="17" Addr="w21.01" Description="RunMode"/>
  22. <DI_ITEM Index="18" Name="DI_MaintenanceMode" BufferOffset="18" Addr="w21.02" Description="MaintenanceMode"/>
  23. <DI_ITEM Index="19" Name="DI_CDAPressureSW" BufferOffset="19" Addr="w21.03" Description="CDAPressureSW"/>
  24. <DI_ITEM Index="20" Name="DI_VaccumPressureSW" BufferOffset="20" Addr="w21.04" Description="VaccumPressureSW"/>
  25. <DI_ITEM Index="21" Name="DI_Buffer_ASmallWaferProtrusion" BufferOffset="21" Addr="w21.05" Description="Buffer_ASmallWaferProtrusion"/>
  26. <DI_ITEM Index="22" Name="DI_Buffer_ABigWaferProtrusion" BufferOffset="22" Addr="w21.06" Description="Buffer_ABigWaferProtrusion"/>
  27. <DI_ITEM Index="23" Name="DI_Buffer_AWaferInPos" BufferOffset="23" Addr="w21.07" Description="Buffer_AWaferInPos"/>
  28. <DI_ITEM Index="24" Name="DI_Buffer_BSmallWaferProtrusion" BufferOffset="24" Addr="w21.08" Description="Buffer_BSmallWaferProtrusion"/>
  29. <DI_ITEM Index="25" Name="DI_Buffer_BBigWaferProtrusion" BufferOffset="25" Addr="w21.09" Description="Buffer_BBigWaferProtrusion"/>
  30. <DI_ITEM Index="26" Name="DI_Buffer_BWaferInPos" BufferOffset="26" Addr="w21.10" Description="Buffer_BWaferInPos"/>
  31. <DI_ITEM Index="27" Name="DI_INONormal" BufferOffset="27" Addr="w21.11" Description="INONormal"/>
  32. <DI_ITEM Index="28" Name="DI_TMRobotAlarm" BufferOffset="28" Addr="w21.12" Description="TMRobotAlarm"/>
  33. <DI_ITEM Index="29" Name="DI_UPPERARMPressureSensorspare" BufferOffset="29" Addr="w21.13" Description="UPPER ARM Pressure Sensor---spare"/>
  34. <DI_ITEM Index="30" Name="DI_LOWERARMPressureSensorspar" BufferOffset="30" Addr="w21.14" Description="LOWER ARM Pressure Sensor---spare"/>
  35. <DI_ITEM Index="31" Name="DI_TMRBEMS" BufferOffset="31" Addr="w21.15" Description="TM RB EMS"/>
  36. <DI_ITEM Index="32" Name="DI_Buffer_AHeatOn_Fb" BufferOffset="32" Addr="w22.00" Description="Buffer_A HeatOn_Fb"/>
  37. <DI_ITEM Index="33" Name="DI_Buffer_ATCDeviationOutOfRange" BufferOffset="33" Addr="w22.01" Description="Buffer_ATCDeviationOutOfRange"/>
  38. <DI_ITEM Index="34" Name="DI_Buffer_AControlTCBrokenAlarm" BufferOffset="34" Addr="w22.02" Description="Buffer_AControlTCBrokenAlarm"/>
  39. <DI_ITEM Index="35" Name="DI_Buffer_AMonitorTCBrokenAlarm" BufferOffset="35" Addr="w22.03" Description="Buffer_AMonitorTCBrokenAlarm"/>
  40. <DI_ITEM Index="37" Name="DI_WaterInletValve" BufferOffset="37" Addr="w22.05" Description="WaterInletValve"/>
  41. <DI_ITEM Index="38" Name="DI_Buffer_AHeatPIDATStart_Fb" BufferOffset="38" Addr="w22.06" Description="Buffer_AHeatPIDATStart_Fb"/>
  42. <DI_ITEM Index="39" Name="DI_Buffer_AHeatPIDATStop_Fb" BufferOffset="39" Addr="w22.07" Description="Buffer_AHeatPIDATStop_Fb"/>
  43. <DI_ITEM Index="44" Name="DI_Buffer_AHeatPIDATRunning" BufferOffset="44" Addr="w22.12" Description="Buffer_AHeatPIDATRunning"/>
  44. <DI_ITEM Index="45" Name="DI_Buffer_AHeatPIDATFinished" BufferOffset="45" Addr="w22.13" Description="Buffer_AHeatPIDATFinished"/>
  45. </Dig_In>
  46. <Dig_Out>
  47. <DO_ITEM Index="00" Name="DO_BufferHeatOn" BufferOffset="00" Addr="w0.00" Description="BufferHeatOn"/>
  48. <DO_ITEM Index="01" Name="DO_WaterInletValve" BufferOffset="01" Addr="w0.01" Description="WaterInletValve"/>
  49. <DO_ITEM Index="32" Name="DO_Buffer_AHeatPIDATStart" BufferOffset="32" Addr="w2.00" Description="Buffer_AHeatPIDATStart"/>
  50. <DO_ITEM Index="33" Name="DO_Buffer_AHeatPIDATStop" BufferOffset="33" Addr="w2.01" Description="Buffer_AHeatPIDATStop"/>
  51. </Dig_Out>
  52. <Ana_In>
  53. <!--<AI_ITEM Index="18" Name="AI_HeartbeatFB" BufferOffset="18" Addr="D2036" Description="AI_HeartbeatFB"/>
  54. <AI_ITEM Index="21" Name="AI_Second" BufferOffset="21" Addr="D2042" Description="Second"/>
  55. <AI_ITEM Index="22" Name="AI_Minute" BufferOffset="22" Addr="D2044" Description="Minute"/>
  56. <AI_ITEM Index="23" Name="AI_Time" BufferOffset="23" Addr="D2046" Description="Time"/>
  57. <AI_ITEM Index="24" Name="AI_Day" BufferOffset="24" Addr="D2048" Description="Day"/>
  58. <AI_ITEM Index="25" Name="AI_Month" BufferOffset="25" Addr="D2050" Description="Month"/>
  59. <AI_ITEM Index="26" Name="AI_Year" BufferOffset="26" Addr="D2052" Description="Year"/>
  60. <AI_ITEM Index="28" Name="AI_Buffer_AControlTCTemp" BufferOffset="28" Addr="D2056" Description="Buffer_AControlTCTemp"/>
  61. <AI_ITEM Index="29" Name="AI_Buffer_AMonitorTCTemp" BufferOffset="29" Addr="D2058" Description="Buffer_AMonitorTCTemp"/>-->
  62. <AI_ITEM Index="18" Name="AI_HeartbeatFB" BufferOffset="36" Addr="D2036" Description="AI_HeartbeatFB"/>
  63. <AI_ITEM Index="21" Name="AI_Second" BufferOffset="42" Addr="D2042" Description="Second"/>
  64. <AI_ITEM Index="22" Name="AI_Minute" BufferOffset="44" Addr="D2044" Description="Minute"/>
  65. <AI_ITEM Index="23" Name="AI_Time" BufferOffset="46" Addr="D2046" Description="Time"/>
  66. <AI_ITEM Index="24" Name="AI_Day" BufferOffset="48" Addr="D2048" Description="Day"/>
  67. <AI_ITEM Index="25" Name="AI_Month" BufferOffset="50" Addr="D2050" Description="Month"/>
  68. <AI_ITEM Index="26" Name="AI_Year" BufferOffset="52" Addr="D2052" Description="Year"/>
  69. <AI_ITEM Index="28" Name="AI_Buffer_AControlTCTemp" BufferOffset="56" Addr="D2056" Description="Buffer_AControlTCTemp"/>
  70. <AI_ITEM Index="29" Name="AI_Buffer_AMonitorTCTemp" BufferOffset="58" Addr="D2058" Description="Buffer_AMonitorTCTemp"/>
  71. </Ana_In>
  72. <Ana_Out>
  73. <!--<AO_ITEM Index="18" Name="AO_Heartbeat" BufferOffset="18" Addr="D1036" Description="Heartbeat"/>
  74. <AO_ITEM Index="28" Name="AO_Buffer_ATemperatureSetpoint" BufferOffset="28" Addr="D1056" Description="Buffer_ATemperatureSetpoint"/>
  75. <AO_ITEM Index="29" Name="AO_Buffer_ATempLimitSetpoint" BufferOffset="29" Addr="D1058" Description="Buffer_ATempLimitSetpoint"/>-->
  76. <AO_ITEM Index="18" Name="AO_Heartbeat" BufferOffset="36" Addr="D1036" Description="Heartbeat"/>
  77. <AO_ITEM Index="28" Name="AO_Buffer_ATemperatureSetpoint" BufferOffset="56" Addr="D1056" Description="Buffer_ATemperatureSetpoint"/>
  78. <AO_ITEM Index="29" Name="AO_Buffer_ATempLimitSetpoint" BufferOffset="58" Addr="D1058" Description="Buffer_ATempLimitSetpoint"/>
  79. </Ana_Out>
  80. </IO_DEFINE>