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EfemDualRT
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Config
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System.sccfg

System.sccfg 234 KB
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
  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="EfemDual">
    3. 

  3.   <configs name="System" display="">
    4. 

  4.     <config default="true" name="IsSimulatorMode" description="Is Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    5. 

  5.     <config default="true" name="IsATMMode" description="Is ATM Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
    6. 

  6.     <config default="15" name="ATMProcessDelayTime" description="ATM Process Delay Time" max="999" min="10" paramter="" tag="" unit="" type="Integer" />
    7. 

  7.     <config default="false" name="IsCycleMode" description="Is Cycle Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
    8. 

  8.     <config default="LotCount" name="CycleBy" description="Cycle By LotCount or WaferCount" max="0" min="0" paramter="LotCount;WaferCount" tag="ReadOnlySelection" unit="" type="String"  visible="false"/>
    9. 

  9.     <config default="3" name="CycleCount" description="Cycle Lot Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
    10. 

  10.     <config default="25" name="CycleWaferCount" description="Cycle Wafer Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    11. 

  11. 

  12.     <config default="true" name="IsServiceControlMode" description="Is Service Control Mode" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    13. 

  13. 

  14.     <config default="true" name="AutoAlignManualTransfer" description="Auto Align Manual Transfer" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    15. 

  15.     <config default="true" name="AutoPassCooling" description="Auto Pass Cooling" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    16. 

  16.     <config default="60" name="DefaultCoolingTime" description="默认Cooling时间(s)" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    17. 

  17. 

  18.     <config default="false" name="BypassInterlock" description="Bypass Interlock" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    19. 

  19. 	  <config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="传片最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    20. 

  20.     <config default="50" name="MaxTemperatureToleranceToTarget" description="MaxTemperatureToleranceToTarget" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    21. 

  21. 

  22.     <config default="1000" name="DataCollectionInterval" description="Data Collection Interval" max="99999" min="20" paramter="" tag="" unit="ms" type="Integer" />
    23. 

  23. 

  24. 

  25.     <config default="true" name="EnableDataClean" description="启用数据库自动删除n天前记录" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    26. 

  26.     <config default="60" name="DataKeepDays" description="数据库数据保留天数" max="365" min="10" paramter="" tag="" unit="" type="Integer" />
    27. 

  27.     <config default="" name="LogFilePath" description="Log File Path" max="" min="" paramter="" tag=""  unit="" type="String" />
    28. 

  28.     <config default="60" name="LogsSaveDays" description="Log文件保留天数" max="365" min="10" paramter="" tag="" unit="" type="Integer" />
    29. 

  29.     <config default="false" name="IsEnableCompressLogFileFunc" description="启用压缩log文件功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    30. 

  30.     <config default="200" name="SingleLogFileMaxSize" description="单个log文件最大字节数(MB),大于将被压缩" max="1000" min="50" paramter="" tag="" unit="" type="Integer" />
    31. 

  31. 

  32. 

  33.     <config default="150" name="BufferSetPointLimit" nameView="Buffer Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    34. 

  34.     <config default="3" name="SmallWafer" nameView="Small Wafer" description="小晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    35. 

  35.     <config default="4" name="MidWafer" nameView="Mid Wafer" description="中晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    36. 

  36.     <config default="6" name="BigWafer" nameView="Big Wafer" description="大晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    37. 

  37.     <config default="8" name="DefaultCreateWaferSize" nameView="Default Create WaferSize" description="默认创建Wafer尺寸" max="12" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    38. 

  38. 

  39.     <config default="false" name="ProcessEnableCheckLE"  description="是否在process时检查底座温度是否ON" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    40. 

  40.     <config default="0" name="PLCSendTimeout" description="PLC send timeout" max="99999" min="0" paramter="" tag="" unit="ms" type="Integer" visible="false" />
    41. 

  41.     <config default="0" name="PLCReceiveTimeout" description="PLC receive timeout" max="99999" min="0" paramter="" tag="" unit="ms" type="Integer" visible="false" />
    42. 

  42.     <config default="0"  name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔，单位为秒，0为不监视" max="65535" min="0" paramter="" tag="" unit="min" type="Integer" visible="false"/>
    43. 

  43.     <config default="" name="COMLogFlag" description="send or receive log(eg:COM13,COM14)" max="" min="" paramter="" tag=""  unit="" type="String" />
    44. 

  44.     <configs name="Scheduler">
    45. 

  45.       <config default="15" name="WaitLoadTimeOut" description="Wait Load TimeOut" max="1000" min="1" paramter="" tag="" unit="s" type="Double" visible="false"/>
    46. 

  46.       <config default="2" name="WaferCountBelowWhichStartNewProcessJob" description="Wafer Count Below Which Start New Process Job" max="25" min="1" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    47. 

  47.       <config default="true" name="IsRunInParallelMode"  description="并行模式" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    48. 

  48.       <config default="true" name="GroupWaferBySequence"  description="相同sequence的job一起跑" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    49. 

  49.       <config default="false" name="ProcessFromSlotMax"  description="Process From Slot Max" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    50. 

  50.       <config default="0" name="ReturnWaferPath" nameView="Loadlock used for return path" description="Loadlock used for return path(0, both, 1, LLA, 2, LLB)" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    51. 

  51.       <config default="0" name="WaferDelayTime" nameView="Loadlock Wafer delay time(unit:s)" description="Loadlock Wafer delay time(unit:s)" max="600" min="0" paramter="" tag="" unit="" type="Integer" />
    52. 

  52.     </configs>
    53. 

  53. 

  54.     <configs name="SetUp" display="">
    55. 

  55. 

  56.       <config default="true" name="PMA.IsInstalled"  description="Is PMA Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    57. 

  57. 

  58.       <config default="false" name="PMAChamber1Disabled.IsInstalled" nameView="PMAChamber1Disabled" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    59. 

  59.       <config default="false" name="PMAChamber2Disabled.IsInstalled" nameView="PMAChamber2Disabled" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    60. 

  60. 

  61.       <config default="true" name="PMB.IsInstalled"  description="Is PMB Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    62. 

  62. 

  63.       <config default="false" name="PMBChamber1Disabled.IsInstalled" nameView="PMBChamber1Disabled" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    64. 

  64.       <config default="false" name="PMBChamber2Disabled.IsInstalled" nameView="PMBChamber2Disabled" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    65. 

  65. 

  66.       <config default="true" name="PMC.IsInstalled"  description="Is PMC Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    67. 

  67. 		<config default="true" name="AlarmPro.IsInstalled"  description="Is DI-86 DI-87 DI-96 DI-97 DI-54 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    68. 

  68. 

  69. 		<config default="true" name="Aligner1.IsInstalled"  description="Is Aligner1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    70. 

  70. 

  71.       <config default="true" name="Aligner2.IsInstalled"  description="Is Aligner2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    72. 

  72. 

  73.       <config default="true" name="Cooling1.IsInstalled"  description="Is Cooling1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    74. 

  74. 

  75.       <config default="true" name="Cooling2.IsInstalled"  description="Is Cooling2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    76. 

  76. 

  77.       <config default="true" name="LLA.IsInstalled"  description="Is LLA Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    78. 

  78. 

  79.       <config default="true" name="LLB.IsInstalled"  description="Is LLB Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    80. 

  80. 

  81.       <config default="true" name="LP1.IsInstalled"  description="Is LP1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    82. 

  82. 

  83.       <config default="true" name="LP2.IsInstalled"  description="Is LP2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    84. 

  84. 

  85.       <config default="false" name="LP3.IsInstalled"  description="Is LP3 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    86. 

  86. 

  87.       <config default="false" name="EPD.IsInstalled"  description="Is EPD Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    88. 

  88.       <config default="0" name="ChillerSetupOp.IsInstalled"  description="0:No Share Chiller 1: Share Chiller" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    89. 

  89.       <config default="true" name="EPDInstalled"  description="Is EPD Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    90. 

  90.     </configs>
    91. 

  91. 

  92.     <configs name="EndPoint" nameView="EndPoint" visible="false">
    93. 

  93.       <config default="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" name="EndPointDefaultValue" nameView="EndPoint Default Value" description="EndPoint Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="false" />
    94. 

  94.     </configs>
    95. 

  95. 

  96.     <configs name="Recipe" visible="false">
    97. 

  97.       <config default="EfemDual" name="SupportedChamberType" description="Supported Chamber Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    98. 

  98.       <config default="Process" name="SupportedProcessType" description="Supported Process Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    99. 

  99.       <config default="PM1,PM2" name="ChamberModules" description="Chamber Modules" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    100. 

  100. 

  101.     </configs>
    102. 

  102. 

  103.     <configs name="SignalTower" visible="false">
    104. 

  104.       <config default="red=1;yellow=2;green=3;blue=4;white=5;buzzer=6" name="Light" description="设置灯的种类，顺序" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    105. 

  105.       <config default="System.IsAlarm=System in alarm status;System.IsIdle=System in idle status" name="Trigger" description="设置触发灯塔的项" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    106. 

  106.       <config default="System.IsAlarm=on,off,off,off,off;System.IsIdle=off,on,off,off,off;" name="Value" description="设置灯塔触发的逻辑关系" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    107. 

  107. 

  108.     </configs>
    109. 

  109. 

  110.     <configs name="FDC" visible="false">
    111. 

  111.       <config default="Fdc" name="DataGroupName" description="FDC data group" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    112. 

  112.       <config default="1000" name="DelayTime" description="Step Delay time before collection data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    113. 

  113.       <config default="100" name="SampleInterval" description="interval time collection sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    114. 

  114.     </configs>
    115. 

  115. 

  116.     <configs name="Job">
    117. 

  117.       <config default="10" name="BuzzerTimeWhenJobDone" description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="-1" paramter="" tag="" unit="s" type="Integer" />
    118. 

  118.       <config default="true" name="EnablePopDialogWhenJobDone"  description="Whether pop window after job done" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    119. 

  119.     </configs>
    120. 

  120. 

  121.   </configs>
    122. 

  122. 

  123.   <configs name="FA">
    124. 

  124.     <config default="HSMS" name="ConnectionMode" description="HSMS/Serial" max="0" min="0" paramter="" tag="" unit="" type="String" />
    125. 

  125.     <config default="127.0.0.1" name="LocalIpAddress" description="Local IP Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
    126. 

  126.     <config default="5021" name="LocalPortNumber" description="Local Port Number" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    127. 

  127.     <config default="127.0.0.1" name="RemoteIpAddress" description="Remote IP Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
    128. 

  128.     <config default="5020" name="RemotePortNumber" description="Remote Port Number" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    129. 

  129.     <config default="45" name="T3Timeout" description="T3 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    130. 

  130.     <config default="10" name="T5Timeout" description="T5 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    131. 

  131.     <config default="5" name="T6Timeout" description="T6 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    132. 

  132.     <config default="10" name="T7Timeout" description="T7 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    133. 

  133.     <config default="5" name="T8Timeout" description="T8 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    134. 

  134.     <config default="false" name="EnableSpooling" description="Enable Spooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    135. 

  135.     <config default="30" name="LinkTestInterval" description="Link Test Interval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    136. 

  136. 	<config default="true" name="IsNeedS6F12ReplyAndRetry" description="Need S6F12 Reply And Retry" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    137. 

  137.     <config default="0" name="DeviceId" description="Device ID" max="0" min="0" paramter="" tag="" unit="" type="String" />
    138. 

  138. 	<config default="0" name="SpoolingCapability" description="Spooling Capacity" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    139. 

  139. 	<config default="0" name="SpoolingMaxTransmit" description="Spooling Max transmit" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    140. 

  140. 	<config default="true" name="SpoolingFullOverWrite" description="Spooling Full OverWrite" max="0" min="0" paramter="" tag="" unit="" type="String" />
    141. 

  141. 

  142.     <config default="Enabled" name="DefaultCommunicationState" description="Default Communication State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    143. 

  143.     <config default="Online" name="DefaultControlState" description="Default Control State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    144. 

  144.     <config default="Local" name="DefaultControlSubState" description="Default Control SubState" max="0" min="0" paramter="" tag="" unit="" type="String" />
    145. 

  145.     <config default="1" name="LP1DefaultTransferState" description="DefaultTransferState" max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
    146. 

  146.     <config default="1" name="LP2DefaultTransferState" description="DefaultTransferState" max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
    147. 

  147.     <config default="1" name="LP3DefaultTransferState" description="DefaultTransferState" max="5" min="0" paramter="" tag="" unit="s" type="Integer" />
    148. 

  148.   </configs>
    149. 

  149. 

  150. 

  151.   <configs name="LP1" visible="false">
    152. 

  152. 

  153.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    154. 

  154.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    155. 

  155.   </configs>
    156. 

  156. 

  157.   <configs name="LP2" visible="false">
    158. 

  158. 

  159.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    160. 

  160.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    161. 

  161.   </configs>
    162. 

  162. 

  163.   <configs name="LP3" visible="false">
    164. 

  164. 

  165.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    166. 

  166.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    167. 

  167.   </configs>
    168. 

  168. 

  169. 

  170.   <configs name="LLA" visible="false">
    171. 

  171. 

  172.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    173. 

  173.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    174. 

  174.   </configs>
    175. 

  175. 

  176. 

  177.   <configs name="LLB" visible="false">
    178. 

  178. 

  179.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    180. 

  180.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    181. 

  181.   </configs>
    182. 

  182. 

  183. 

  184.   <configs name="CarrierInfo" visible="false">
    185. 

  185. 

  186.     <config default="0" name="UpperBankNumber8" description="Upper Arm BankNumber , WaferSize:8" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    187. 

  187.     <config default="1" name="UpperBankNumber12" description="Upper Arm BankNumber , WaferSize:12" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    188. 

  188.     <config default="2" name="LowerBankNumber8" description="Lower Arm BankNumber , WaferSize:8" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    189. 

  189.     <config default="3" name="LowerBankNumber12" description="Lower Arm BankNumber , WaferSize:12" max="4" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    190. 

  190.     <config default="0" name="LLABankNumber8" description="LLABankNumber8" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    191. 

  191.     <config default="0" name="LLBBankNumber8" description="LLBBankNumber8" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    192. 

  192.     <config default="1" name="LLABankNumber12" description="LLABankNumber12" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    193. 

  193.     <config default="1" name="LLBBankNumber12" description="LLABankNumber12" max="1" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    194. 

  194.     <config default="1" name="LLACassetteNumber" description="LLACassetteNumber" max="2" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
    195. 

  195.     <config default="2" name="LLBCassetteNumber" description="LLBCassetteNumber" max="2" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
    196. 

  196. 

  197.     <config default="1" name="LLAStation8" description="LLAStation8" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    198. 

  198.     <config default="2" name="LLAStation12" description="LLAStation12" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    199. 

  199.     <config default="3" name="LLBStation8" description="LLBStation8" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    200. 

  200.     <config default="4" name="LLBStation12" description="LLBStation12" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    201. 

  201.     <config default="S1" name="PMA1Station8" description="PMA1Station8" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    202. 

  202.     <config default="S1" name="PMA1Station12" description="PMA1Station12" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    203. 

  203.     <config default="7" name="PMA2Station8" description="PMA2Station8" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    204. 

  204.     <config default="8" name="PMA2Station12" description="PMA2Station12" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    205. 

  205.     <config default="9" name="PMB1Station8" description="PMB1Station8" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    206. 

  206.     <config default="10" name="PMB1Station12" description="PMB1Station12" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    207. 

  207.     <config default="11" name="PMB2Station8" description="PMB2Station8" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    208. 

  208.     <config default="12" name="PMB2Station12" description="PMB2Station12" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    209. 

  209.     <config default="13" name="PMC1Station8" description="PMC1Station8" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    210. 

  210.     <config default="14" name="PMC1Station12" description="PMC1Station12" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    211. 

  211.     <config default="15" name="PMC2Station8" description="PMC2Station8" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    212. 

  212.     <config default="16" name="PMC2Station12" description="PMC2Station12" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    213. 

  213. 

  214. 	  <config default="1" name="LLAStation4" description="LLAStation4" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    215. 

  215. 	  <config default="2" name="LLAStation6" description="LLAStation6" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    216. 

  216. 	  <config default="3" name="LLBStation4" description="LLBStation4" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    217. 

  217. 	  <config default="4" name="LLBStation6" description="LLBStation6" max="16" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    218. 

  218. 	  <config default="S1" name="PMA1Station4" description="PMA1Station4" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    219. 

  219. 	  <config default="S1" name="PMA1Station6" description="PMA1Station6" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    220. 

  220. 	  <config default="7" name="PMA2Station4" description="PMA2Station4" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    221. 

  221. 	  <config default="8" name="PMA2Station6" description="PMA2Station6" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    222. 

  222. 	  <config default="9" name="PMB1Station4" description="PMB1Station4" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    223. 

  223. 	  <config default="10" name="PMB1Station6" description="PMB1Station6" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    224. 

  224. 	  <config default="11" name="PMB2Station4" description="PMB2Station4" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    225. 

  225. 	  <config default="12" name="PMB2Station6" description="PMB2Station6" max="" min="0" paramter="" tag="" unit="s" type="String" visible="false" />
    226. 

  226. 	  <config default="13" name="PMC1Station4" description="PMC1Station4" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    227. 

  227. 	  <config default="14" name="PMC1Station6" description="PMC1Station6" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    228. 

  228. 	  <config default="15" name="PMC2Station4" description="PMC2Station4" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    229. 

  229. 	  <config default="16" name="PMC2Station6" description="PMC2Station6" max="16" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
    230. 

  230.   </configs>
    231. 

  231. 

  232.   <configs name="TM">
    233. 

  233.     <configs name="TMRobot">
    234. 

  234.       <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    235. 

  235.       <config default="30" name="PickTimeout" description="Pick Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    236. 

  236.       <config default="30" name="PlaceTimeout" description="Place Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    237. 

  237.       <config default="30" name="GotoTimeout" description="Goto Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    238. 

  238.       <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    239. 

  239. 		<config default="100" name="ExistInterval" description="SpeedLevel" max="60000" min="0" paramter="" tag="" unit="" type="Integer" />
    240. 

  240. 

  241.       <config default="true" name="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    242. 

  242.       <config default="true" name="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    243. 

  243. 

  244.       <config default="1" name="TMRobotType" description="1=Rorze(751) 2=HongHu(HHADR21) 3=SUNWAY(SPaceTRan)" max="10" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    245. 

  245.       <config default="10.0.0.2:10110" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
    246. 

  246.       <config default="COM29" name="PortName" description="TMRobot COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
    247. 

  247.       <config default="true" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    248. 

  248.       <config default="1" name="UnitNumber" description="UnitNumber" max="9" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    249. 

  249.       <config default="2" name="BodyNumber" description="Robot Body Number" max="65535" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    250. 

  250. 

  251.       <config default="true" name="EnableCheckSum" description="EnableCheckSum" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    252. 

  252.       <config default="true" name="EnableSeqNo" description="EnableSeqNo" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    253. 

  253.       <config default="2" name="SpeedLevel" description="SpeedLevel" max="100" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    254. 

  254.       <config default="0" name="CommunicationToken" description="RobotCommunicationToken" max="9999" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    255. 

  255.       <config default="true" name="DualBlade1TransferEnable" description="DualBlade1TransferEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    256. 

  256.       <config default="2" name="SlotCount" description="SlotCount" max="9" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    257. 

  257.       <config default="1" name="Blade2Slots" description="Blade2Slots" max="9" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    258. 

  258. 

  259. 

  260.       <config default="2" name="TimeLimitRobotCommand" description="Robot命令超时设定" max="180" min="0" paramter="" tag="" unit="seconds" type="Integer" />
    261. 

  261.       <config default="30" name="TimeLimitRobotHome" description="Robot回原点命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer" />
    262. 

  262.       <config default="10" name="TimeLimitForPickWafer" description="Pick命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer"  visible="false"/>
    263. 

  263.       <config default="20" name="TimeLimitForPlaceWafer" description="Place命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer"  visible="false"/>
    264. 

  264.       <config default="10" name="TimeLimitForExchangeWafer" description="Exchange命令超时设定" max="180" min="0" paramter="" tag="" unit="second" type="Integer" />
    265. 

  265. 

  266.       <config default="2" name="InitCmdNO" description="Compaud command number for Init" max="90" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    267. 

  267. 

  268.       <config default="30" name="UpperLLAPickCmdNO" description="UpperLLAPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    269. 

  269.       <config default="30" name="UpperLLBPickCmdNO" description="UpperLLBPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    270. 

  270.       <config default="40" name="UpperLLAPlaceCmdNO" description="UpperLLAPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    271. 

  271.       <config default="40" name="UpperLLBPlaceCmdNO" description="UpperLLBPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    272. 

  272.       <config default="50" name="LowerLLAPickCmdNO" description="LowerLLAPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    273. 

  273.       <config default="50" name="LowerLLBPickCmdNO" description="LowerLLBPickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    274. 

  274.       <config default="60" name="LowerLLAPlaceCmdNO" description="LowerLLAPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    275. 

  275.       <config default="60" name="LowerLLBPlaceCmdNO" description="LowerLLBPlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    276. 

  276. 

  277.       <config default="31" name="UpperLLAPickReadyCmdNO" description="UpperLLAPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    278. 

  278.       <config default="31" name="UpperLLBPickReadyCmdNO" description="UpperLLBPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    279. 

  279.       <config default="41" name="UpperLLAPlaceReadyCmdNO" description="UpperLLAPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    280. 

  280.       <config default="41" name="UpperLLBPlaceReadyCmdNO" description="UpperLLBPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    281. 

  281.       <config default="51" name="LowerLLAPickReadyCmdNO" description="LowerLLAPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    282. 

  282.       <config default="51" name="LowerLLBPickReadyCmdNO" description="LowerLLBPickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    283. 

  283.       <config default="61" name="LowerLLAPlaceReadyCmdNO" description="LowerLLAPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    284. 

  284.       <config default="61" name="LowerLLBPlaceReadyCmdNO" description="LowerLLBPlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    285. 

  285. 

  286.       <config default="150" name="UpperLLA1PickCmdNO" description="UpperLLA1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    287. 

  287.       <config default="151" name="UpperLLA1PickReadyCmdNO" description="UpperLLA1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    288. 

  288.       <config default="152" name="UpperLLA2PickCmdNO" description="UpperLLA2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    289. 

  289.       <config default="153" name="UpperLLA2PickReadyCmdNO" description="UpperLLA2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    290. 

  290.       <config default="154" name="UpperLLA3PickCmdNO" description="UpperLLA3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    291. 

  291.       <config default="155" name="UpperLLA3PickReadyCmdNO" description="UpperLLA3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    292. 

  292.       <config default="156" name="UpperLLA4PickCmdNO" description="UpperLLA4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    293. 

  293.       <config default="157" name="UpperLLA4PickReadyCmdNO" description="UpperLLA4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    294. 

  294.       <config default="158" name="UpperLLA5PickCmdNO" description="UpperLLA5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    295. 

  295.       <config default="159" name="UpperLLA5PickReadyCmdNO" description="UpperLLA5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    296. 

  296.       <config default="160" name="UpperLLA6PickCmdNO" description="UpperLLA6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    297. 

  297.       <config default="161" name="UpperLLA6PickReadyCmdNO" description="UpperLLA6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    298. 

  298.       <config default="162" name="UpperLLA7PickCmdNO" description="UpperLLA7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    299. 

  299.       <config default="163" name="UpperLLA7PickReadyCmdNO" description="UpperLLA7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    300. 

  300.       <config default="164" name="UpperLLA8PickCmdNO" description="UpperLLA8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    301. 

  301.       <config default="165" name="UpperLLA8PickReadyCmdNO" description="UpperLLA8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    302. 

  302. 

  303.       <config default="170" name="LowerLLA1PickCmdNO" description="LowerLLA1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    304. 

  304.       <config default="171" name="LowerLLA1PickReadyCmdNO" description="LowerLLA1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    305. 

  305.       <config default="172" name="LowerLLA2PickCmdNO" description="LowerLLA2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    306. 

  306.       <config default="173" name="LowerLLA2PickReadyCmdNO" description="LowerLLA2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    307. 

  307.       <config default="174" name="LowerLLA3PickCmdNO" description="LowerLLA3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    308. 

  308.       <config default="175" name="LowerLLA3PickReadyCmdNO" description="LowerLLA3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    309. 

  309.       <config default="176" name="LowerLLA4PickCmdNO" description="LowerLLA4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    310. 

  310.       <config default="177" name="LowerLLA4PickReadyCmdNO" description="LowerLLA4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    311. 

  311.       <config default="178" name="LowerLLA5PickCmdNO" description="LowerLLA5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    312. 

  312.       <config default="179" name="LowerLLA5PickReadyCmdNO" description="LowerLLA5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    313. 

  313.       <config default="180" name="LowerLLA6PickCmdNO" description="LowerLLA6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    314. 

  314.       <config default="181" name="LowerLLA6PickReadyCmdNO" description="LowerLLA6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    315. 

  315.       <config default="182" name="LowerLLA7PickCmdNO" description="LowerLLA7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    316. 

  316.       <config default="183" name="LowerLLA7PickReadyCmdNO" description="LowerLLA7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    317. 

  317.       <config default="184" name="LowerLLA8PickCmdNO" description="LowerLLA8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    318. 

  318.       <config default="185" name="LowerLLA8PickReadyCmdNO" description="LowerLLA8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    319. 

  319. 

  320.       <config default="190" name="UpperLLB1PlaceCmdNO" description="UpperLLB1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    321. 

  321.       <config default="191" name="UpperLLB1PlaceReadyCmdNO" description="UpperLLB1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    322. 

  322.       <config default="192" name="UpperLLB2PlaceCmdNO" description="UpperLLB2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    323. 

  323.       <config default="193" name="UpperLLB2PlaceReadyCmdNO" description="UpperLLB2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    324. 

  324.       <config default="194" name="UpperLLB3PlaceCmdNO" description="UpperLLB3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    325. 

  325.       <config default="195" name="UpperLLB3PlaceReadyCmdNO" description="UpperLLB3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    326. 

  326.       <config default="196" name="UpperLLB4PlaceCmdNO" description="UpperLLB4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    327. 

  327.       <config default="197" name="UpperLLB4PlaceReadyCmdNO" description="UpperLLB4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    328. 

  328.       <config default="198" name="UpperLLB5PlaceCmdNO" description="UpperLLB5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    329. 

  329.       <config default="199" name="UpperLLB5PlaceReadyCmdNO" description="UpperLLB5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    330. 

  330.       <config default="200" name="UpperLLB6PlaceCmdNO" description="UpperLLB6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    331. 

  331.       <config default="201" name="UpperLLB6PlaceReadyCmdNO" description="UpperLLB6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    332. 

  332.       <config default="202" name="UpperLLB7PlaceCmdNO" description="UpperLLB7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    333. 

  333.       <config default="203" name="UpperLLB7PlaceReadyCmdNO" description="UpperLLB7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    334. 

  334.       <config default="204" name="UpperLLB8PlaceCmdNO" description="UpperLLB8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    335. 

  335.       <config default="205" name="UpperLLB8PlaceReadyCmdNO" description="UpperLLB8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    336. 

  336. 

  337.       <config default="210" name="LowerLLB1PlaceCmdNO" description="LowerLLB1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    338. 

  338.       <config default="211" name="LowerLLB1PlaceReadyCmdNO" description="LowerLLB1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    339. 

  339.       <config default="212" name="LowerLLB2PlaceCmdNO" description="LowerLLB2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    340. 

  340.       <config default="213" name="LowerLLB2PlaceReadyCmdNO" description="LowerLLB2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    341. 

  341.       <config default="214" name="LowerLLB3PlaceCmdNO" description="LowerLLB3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    342. 

  342.       <config default="215" name="LowerLLB3PlaceReadyCmdNO" description="LowerLLB3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    343. 

  343.       <config default="216" name="LowerLLB4PlaceCmdNO" description="LowerLLB4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    344. 

  344.       <config default="217" name="LowerLLB4PlaceReadyCmdNO" description="LowerLLB4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    345. 

  345.       <config default="218" name="LowerLLB5PlaceCmdNO" description="LowerLLB5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    346. 

  346.       <config default="219" name="LowerLLB5PlaceReadyCmdNO" description="LowerLLB5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    347. 

  347.       <config default="220" name="LowerLLB6PlaceCmdNO" description="LowerLLB6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    348. 

  348.       <config default="221" name="LowerLLB6PlaceReadyCmdNO" description="LowerLLB6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    349. 

  349.       <config default="222" name="LowerLLB7PlaceCmdNO" description="LowerLLB7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    350. 

  350.       <config default="223" name="LowerLLB7PlaceReadyCmdNO" description="LowerLLB7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    351. 

  351.       <config default="224" name="LowerLLB8PlaceCmdNO" description="LowerLLB8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    352. 

  352.       <config default="225" name="LowerLLB8PlaceReadyCmdNO" description="LowerLLB8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    353. 

  353. 

  354.       <config default="230" name="UpperLLA1PlaceCmdNO" description="UpperLLA1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    355. 

  355.       <config default="231" name="UpperLLA1PlaceReadyCmdNO" description="UpperLLA1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    356. 

  356.       <config default="232" name="UpperLLA2PlaceCmdNO" description="UpperLLA2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    357. 

  357.       <config default="233" name="UpperLLA2PlaceReadyCmdNO" description="UpperLLA2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    358. 

  358.       <config default="234" name="UpperLLA3PlaceCmdNO" description="UpperLLA3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    359. 

  359.       <config default="235" name="UpperLLA3PlaceReadyCmdNO" description="UpperLLA3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    360. 

  360.       <config default="236" name="UpperLLA4PlaceCmdNO" description="UpperLLA4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    361. 

  361.       <config default="237" name="UpperLLA4PlaceReadyCmdNO" description="UpperLLA4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    362. 

  362.       <config default="238" name="UpperLLA5PlaceCmdNO" description="UpperLLA5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    363. 

  363.       <config default="239" name="UpperLLA5PlaceReadyCmdNO" description="UpperLLA5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    364. 

  364.       <config default="240" name="UpperLLA6PlaceCmdNO" description="UpperLLA6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    365. 

  365.       <config default="241" name="UpperLLA6PlaceReadyCmdNO" description="UpperLLA6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    366. 

  366.       <config default="242" name="UpperLLA7PlaceCmdNO" description="UpperLLA7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    367. 

  367.       <config default="243" name="UpperLLA7PlaceReadyCmdNO" description="UpperLLA7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    368. 

  368.       <config default="244" name="UpperLLA8PlaceCmdNO" description="UpperLLA8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    369. 

  369.       <config default="245" name="UpperLLA8PlaceReadyCmdNO" description="UpperLLA8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    370. 

  370. 

  371.       <config default="250" name="LowerLLA1PlaceCmdNO" description="LowerLLA1PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    372. 

  372.       <config default="251" name="LowerLLA1PlaceReadyCmdNO" description="LowerLLA1PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    373. 

  373.       <config default="252" name="LowerLLA2PlaceCmdNO" description="LowerLLA2PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    374. 

  374.       <config default="253" name="LowerLLA2PlaceReadyCmdNO" description="LowerLLA2PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    375. 

  375.       <config default="254" name="LowerLLA3PlaceCmdNO" description="LowerLLA3PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    376. 

  376.       <config default="255" name="LowerLLA3PlaceReadyCmdNO" description="LowerLLA3PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    377. 

  377.       <config default="256" name="LowerLLA4PlaceCmdNO" description="LowerLLA4PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    378. 

  378.       <config default="257" name="LowerLLA4PlaceReadyCmdNO" description="LowerLLA4PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    379. 

  379.       <config default="258" name="LowerLLA5PlaceCmdNO" description="LowerLLA5PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    380. 

  380.       <config default="259" name="LowerLLA5PlaceReadyCmdNO" description="LowerLLA5PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    381. 

  381.       <config default="260" name="LowerLLA6PlaceCmdNO" description="LowerLLA6PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    382. 

  382.       <config default="261" name="LowerLLA6PlaceReadyCmdNO" description="LowerLLA6PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    383. 

  383.       <config default="262" name="LowerLLA7PlaceCmdNO" description="LowerLLA7PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    384. 

  384.       <config default="263" name="LowerLLA7PlaceReadyCmdNO" description="LowerLLA7PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    385. 

  385.       <config default="264" name="LowerLLA8PlaceCmdNO" description="LowerLLA8PlaceCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    386. 

  386.       <config default="265" name="LowerLLA8PlaceReadyCmdNO" description="LowerLLA8PlaceReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    387. 

  387. 

  388.       <config default="270" name="UpperLLB1PickCmdNO" description="UpperLLB1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    389. 

  389.       <config default="271" name="UpperLLB1PickReadyCmdNO" description="UpperLLB1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    390. 

  390.       <config default="272" name="UpperLLB2PickCmdNO" description="UpperLLB2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    391. 

  391.       <config default="273" name="UpperLLB2PickReadyCmdNO" description="UpperLLB2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    392. 

  392.       <config default="274" name="UpperLLB3PickCmdNO" description="UpperLLB3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    393. 

  393.       <config default="275" name="UpperLLB3PickReadyCmdNO" description="UpperLLB3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    394. 

  394.       <config default="276" name="UpperLLB4PickCmdNO" description="UpperLLB4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    395. 

  395.       <config default="277" name="UpperLLB4PickReadyCmdNO" description="UpperLLB4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    396. 

  396.       <config default="278" name="UpperLLB5PickCmdNO" description="UpperLLB5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    397. 

  397.       <config default="279" name="UpperLLB5PickReadyCmdNO" description="UpperLLB5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    398. 

  398.       <config default="280" name="UpperLLB6PickCmdNO" description="UpperLLB6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    399. 

  399.       <config default="281" name="UpperLLB6PickReadyCmdNO" description="UpperLLB6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    400. 

  400.       <config default="282" name="UpperLLB7PickCmdNO" description="UpperLLB7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    401. 

  401.       <config default="283" name="UpperLLB7PickReadyCmdNO" description="UpperLLB7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    402. 

  402.       <config default="284" name="UpperLLB8PickCmdNO" description="UpperLLB8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    403. 

  403.       <config default="285" name="UpperLLB8PickReadyCmdNO" description="UpperLLB8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    404. 

  404. 

  405.       <config default="290" name="LowerLLB1PickCmdNO" description="LowerLLB1PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    406. 

  406.       <config default="291" name="LowerLLB1PickReadyCmdNO" description="LowerLLB1PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    407. 

  407.       <config default="292" name="LowerLLB2PickCmdNO" description="LowerLLB2PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    408. 

  408.       <config default="293" name="LowerLLB2PickReadyCmdNO" description="LowerLLB2PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    409. 

  409.       <config default="294" name="LowerLLB3PickCmdNO" description="LowerLLB3PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    410. 

  410.       <config default="295" name="LowerLLB3PickReadyCmdNO" description="LowerLLB3PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    411. 

  411.       <config default="296" name="LowerLLB4PickCmdNO" description="LowerLLB4PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    412. 

  412.       <config default="297" name="LowerLLB4PickReadyCmdNO" description="LowerLLB4PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    413. 

  413.       <config default="298" name="LowerLLB5PickCmdNO" description="LowerLLB5PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    414. 

  414.       <config default="299" name="LowerLLB5PickReadyCmdNO" description="LowerLLB5PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    415. 

  415.       <config default="300" name="LowerLLB6PickCmdNO" description="LowerLLB6PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    416. 

  416.       <config default="301" name="LowerLLB6PickReadyCmdNO" description="LowerLLB6PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    417. 

  417.       <config default="302" name="LowerLLB7PickCmdNO" description="LowerLLB7PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    418. 

  418.       <config default="303" name="LowerLLB7PickReadyCmdNO" description="LowerLLB7PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    419. 

  419.       <config default="304" name="LowerLLB8PickCmdNO" description="LowerLLB8PickCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    420. 

  420.       <config default="305" name="LowerLLB8PickReadyCmdNO" description="LowerLLB8PickReadyCmdNO" max="999" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    421. 

  421. 

  422. 

  423.       <config default="80" name="UpperPMA1PickCmdNO" description="UpperPMA1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    424. 

  424.       <config default="81" name="UpperPMA1PickBackCmdNO" description="UpperPMA1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    425. 

  425.       <config default="82" name="UpperPMA2PickCmdNO" description="UpperPMA2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    426. 

  426.       <config default="83" name="UpperPMA2PickBackCmdNO" description="UpperPMA2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    427. 

  427.       <config default="84" name="UpperPMB1PickCmdNO" description="UpperPMB1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    428. 

  428.       <config default="85" name="UpperPMB1PickBackCmdNO" description="UpperPMB1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    429. 

  429.       <config default="86" name="UpperPMB2PickCmdNO" description="UpperPMB2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    430. 

  430.       <config default="87" name="UpperPMB2PickBackCmdNO" description="UpperPMB2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    431. 

  431. 

  432.       <config default="88" name="UpperPMA1PickReadyCmdNO" description="UpperPMA1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    433. 

  433.       <config default="89" name="UpperPMA2PickReadyCmdNO" description="UpperPMA2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    434. 

  434.       <config default="90" name="UpperPMB1PickReadyCmdNO" description="UpperPMB1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    435. 

  435.       <config default="91" name="UpperPMB2PickReadyCmdNO" description="UpperPMB2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    436. 

  436. 

  437.       <config default="95" name="UpperPMA1PlaceCmdNO" description="UpperPMA1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    438. 

  438.       <config default="96" name="UpperPMA1PlaceBackCmdNO" description="UpperPMA1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    439. 

  439.       <config default="97" name="UpperPMA2PlaceCmdNO" description="UpperPMA2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    440. 

  440.       <config default="98" name="UpperPMA2PlaceBackCmdNO" description="UpperPMA2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    441. 

  441.       <config default="99" name="UpperPMB1PlaceCmdNO" description="UpperPMB1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    442. 

  442.       <config default="100" name="UpperPMB1PlaceBackCmdNO" description="UpperPMB1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    443. 

  443.       <config default="101" name="UpperPMB2PlaceCmdNO" description="UpperPMB2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    444. 

  444.       <config default="102" name="UpperPMB2PlaceBackCmdNO" description="UpperPMB2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    445. 

  445. 

  446.       <config default="103" name="UpperPMA1PlaceReadyCmdNO" description="UpperPMA1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    447. 

  447.       <config default="104" name="UpperPMA2PlaceReadyCmdNO" description="UpperPMA2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    448. 

  448.       <config default="105" name="UpperPMB1PlaceReadyCmdNO" description="UpperPMB1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    449. 

  449.       <config default="106" name="UpperPMB2PlaceReadyCmdNO" description="UpperPMB2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    450. 

  450. 

  451.       <config default="110" name="LowerPMA1PickCmdNO" description="LowerPMA1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    452. 

  452.       <config default="111" name="LowerPMA1PickBackCmdNO" description="LowerPMA1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    453. 

  453.       <config default="112" name="LowerPMA2PickCmdNO" description="LowerPMA2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    454. 

  454.       <config default="113" name="LowerPMA2PickBackCmdNO" description="LowerPMA2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    455. 

  455.       <config default="114" name="LowerPMB1PickCmdNO" description="LowerPMB1PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    456. 

  456.       <config default="115" name="LowerPMB1PickBackCmdNO" description="LowerPMB1PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    457. 

  457.       <config default="116" name="LowerPMB2PickCmdNO" description="LowerPMB2PickCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    458. 

  458.       <config default="117" name="LowerPMB2PickBackCmdNO" description="LowerPMB2PickBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    459. 

  459. 

  460.       <config default="118" name="LowerPMA1PickReadyCmdNO" description="LowerPMA1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    461. 

  461.       <config default="119" name="LowerPMA2PickReadyCmdNO" description="LowerPMA2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    462. 

  462.       <config default="120" name="LowerPMB1PickReadyCmdNO" description="LowerPMB1PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    463. 

  463.       <config default="121" name="LowerPMB2PickReadyCmdNO" description="LowerPMB2PickReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    464. 

  464. 

  465.       <config default="125" name="LowerPMA1PlaceCmdNO" description="LowerPMA1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    466. 

  466.       <config default="126" name="LowerPMA1PlaceBackCmdNO" description="LowerPMA1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    467. 

  467.       <config default="127" name="LowerPMA2PlaceCmdNO" description="LowerPMA2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    468. 

  468.       <config default="128" name="LowerPMA2PlaceBackCmdNO" description="LowerPMA2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    469. 

  469.       <config default="129" name="LowerPMB1PlaceCmdNO" description="LowerPMB1PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    470. 

  470.       <config default="130" name="LowerPMB1PlaceBackCmdNO" description="LowerPMB1PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    471. 

  471.       <config default="131" name="LowerPMB2PlaceCmdNO" description="LowerPMB2PlaceCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    472. 

  472.       <config default="132" name="LowerPMB2PlaceBackCmdNO" description="LowerPMB2PlaceBackCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    473. 

  473. 

  474.       <config default="133" name="LowerPMA1PlaceReadyCmdNO" description="LowerPMA1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    475. 

  475.       <config default="134" name="LowerPMA2PlaceReadyCmdNO" description="LowerPMA2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    476. 

  476.       <config default="135" name="LowerPMB1PlaceReadyCmdNO" description="LowerPMB1PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    477. 

  477.       <config default="136" name="LowerPMB2PlaceReadyCmdNO" description="LowerPMB2PlaceReadyCmdNO" max="200" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    478. 

  478.     </configs>
    479. 

  479.     <configs name="FFU">
    480. 

  480.       <config default="COM17" name="Address" description="FFU COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    481. 

  481.       <config default="1" name="DeviceAddress" description="风机地址" max="1" min="1" paramter="" tag="" unit="s" type="Integer" />
    482. 

  482.       <config default="1440" name="MaxSpeed" description="最高转速" max="1440" min="1440" paramter="" tag="" unit="s" type="Integer" />
    483. 

  483.       <config default="true" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    484. 

  484. 

  485.     </configs>
    486. 

  486.   </configs>
    487. 

  487. 

  488.   <configs name="EFEM">
    489. 

  489.     <config default="30" name="HomeTimeout" description="EFEM初始化超时时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    490. 

  490.     <config default="192.168.2.8:13000" name="Address" description="地址" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
    491. 

  491.     <config default="2" name="EfemType" nameView="EFEM Type" description="EFEM类型，1=Future广川(2P) 2=Jet自制 3=Future广川(3P)" max="300" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    492. 

  492.     <config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
    493. 

  493.     <config default="false" name="IgnoreIonizerError" nameView="Ignore Ionizer alarm" description="是否忽略离子发生器报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
    494. 

  494.     <config default="false" name="IgnoreFFUError" nameView="Ignore FFU alarm" description="是否忽略FFU报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
    495. 

  495.     <config default="2" name="DelayTimeBeforeAlignerLiftDown" nameView="Delay Time before Aligner lift down" description="放片到aligner后，lift pin停留多久再落下 (s)" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    496. 

  496.     <config default="2" name="DelayTimeBeforeCoolingLiftDown" nameView="Delay Time before Cooling lift down" description="放片到cooling后，lift pin停留多久再落下 (s)" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    497. 

  497.     <configs name="LoadPort">
    498. 

  498.       <config default="true" name="HasReadSmartTagFunction" description="是否具有读取SmartTag功能" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    499. 

  499.       <config default="true" name="HasClampFunction" description="是否具有上锁功能" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    500. 

  500.       <config default="true" name="HasDockFunction" description="是否具有Dock功能" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    501. 

  501.       <config default="true" name="HasMapFunction" description="是否具有Map功能" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    502. 

  502.       <config default="true" name="HasLoadFunction" description="是否具有Load/Unload功能" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    503. 

  503.       <config default="true" name="HasDoorOpenFunction" description="是否具有Open/Close Door功能" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    504. 

  504.       <config default="30" name="MotionTimeout" description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    505. 

  505.       <config default="30" name="HomeTimeout" description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    506. 

  506.       <config default="true" name="EnableAutoUnloadFoup" description="Enable Auto Unload Foup" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    507. 

  507.       <config default="true" name="EnableAutoCarrierIdRead" description="自动读取Carrier ID" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    508. 

  508.       <config default="false" name="AutoClampOnFoupOn" description="当Foup放上去后自动上锁" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    509. 

  509.       <config default="false" name="EnableChangeAccess" description="是否可以更改AccessMode功能" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
    510. 

  510.       <config default="25" name="SlotNumber" description="Slot Number" max="60" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    511. 

  511.       <config default="25" name="CassetteSlotNumber" description="Cassette slot number" max="30" min="1" paramter="" tag="" unit="" type="Integer" visible="false" />
    512. 

  512.     </configs>
    513. 

  513.     <configs name="EfemRobot">
    514. 

  514.       <config default="10" name="PickTimeout" description="取片超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    515. 

  515.       <config default="10" name="PlaceTimeout" description="放片超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    516. 

  516.       <config default="10" name="HomeTimeout" description="初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    517. 

  517.       <config default="20" name="MapTimeout" description="Map超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    518. 

  518.       <config default="20" name="GotoTimeout" description="Goto超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    519. 

  519. 

  520.       <config default="true" name="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    521. 

  521.       <config default="true" name="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    522. 

  522. 

  523.       <config default="12" name="DefaultMapWaferSize" description="Default Map Wafer Size" max="0" min="0" paramter="8;12" tag="ReadOnlySelection" unit="" type="String" />
    524. 

  524. 

  525.     </configs>
    526. 

  526.     <configs name="Aligner"  visible="false" >
    527. 

  527.       <config default="30" name="HomeTimeout" description="HomeTimeout" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
    528. 

  528.       <config default="0" name="DefaultNotchDegree" description="DefaultNotchDegree" max="360" min="0" paramter="" tag="" unit="" type="Integer"/>
    529. 

  529. 

  530.       <config default="30" name="AlignTimeout" description="AlignTimeout" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
    531. 

  531.       <config default="30" name="LiftTimeout" description="LiftTimeout" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
    532. 

  532. 

  533.     </configs>
    534. 

  534. 

  535.     <configs name="Cooling"  visible="false" >
    536. 

  536.       <config default="30" name="HomeTimeout" description="HomeTimeout" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
    537. 

  537. 

  538.       <config default="30" name="LiftTimeout" description="LiftTimeout" max="60" min="1" paramter="" tag="" unit="" type="Integer"/>
    539. 

  539. 

  540.     </configs>
    541. 

  541.   </configs>
    542. 

  542. 

  543. 

  544. 

  545.   <configs name="PMA">
    546. 

  546. 

  547.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    548. 

  548.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    549. 

  549.     <config default="30" name="PrepareTransferTimeout" description="PrepareTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    550. 

  550. 

  551. 	  <config default="true" name="GuidePin.IsInstalled"  description="Is GuidePin Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    552. 

  552. 	  
    553. 

  553.     <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
    554. 

  554.     <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    555. 

  555.     <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    556. 

  556.     <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    557. 

  557.     <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" visible="false"  unit="sccm" type="Double" />
    558. 

  558.     <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" visible="false"  type="Double" />
    559. 

  559.     <config default="100" name="ProcessPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    560. 

  560.     <config default="60" name="ProcessPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    561. 

  561.     <config default="100" name="ProcessPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    562. 

  562.     <config default="60" name="ProcessPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    563. 

  563.     <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    564. 

  564.     <config default="120" name="CheckChamberTempTimeout" nameView="Check Chamber Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    565. 

  565.     <config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    566. 

  566.     <config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    567. 

  567.     <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    568. 

  568.     <config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    569. 

  569.     <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    570. 

  570. 	  <!-- <config default="0" name="PlaceAndPickDelayTime" nameView="Place And Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />-->
    571. 

  571. 	  <config default="0" name="PickDelayTime" nameView="Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    572. 

  572. 	  <config default="0" name="PlaceDelayTime" nameView="Place Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    573. 

  573.     <config default="0" name="PlaceRetractDelayTime" nameView="Place Retract Before Delay Time" description="" max="3000" min="0" paramter="" tag="" unit="ms" visible="true" type="Integer"  />
    574. 

  574.     <config default="0" name="PickRetractDelayTime" nameView="Pick Retract Before Delay Time" description="" max="3000" min="0" paramter="" tag="" unit="ms" visible="true" type="Integer"  />
    575. 

  575. 

  576.     <!--<config default="150" name="ChamberHeater1SetPointLimit" nameView="Chamber Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />-->
    577. 

  577.     <config default="150" name="HeaterChamberSetPointLimit" nameView="Chamber Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    578. 

  578.     <config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    579. 

  579.     <config default="140" name="LEHeaterSetPointLimit1" nameView="LE Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    580. 

  580.     <config default="140" name="LEHeaterSetPointLimit2" nameView="LE Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    581. 

  581.     <config default="false" name="EnableChamberWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    582. 

  582.     <config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    583. 

  583. 

  584. 

  585.     <configs name="MFCVerification" nameView="MFC Verification" >
    586. 

  586.       <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    587. 

  587.       <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    588. 

  588.       <config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    589. 

  589.       <config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    590. 

  590.       <config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    591. 

  591.       <config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    592. 

  592.       <config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    593. 

  593.       <config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    594. 

  594.     </configs>
    595. 

  595. 

  596.     <configs name="Chiller1" nameView="Chiller1" >
    597. 

  597.       <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    598. 

  598.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;2:AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    599. 

  599.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    600. 

  600.       <config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    601. 

  601.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    602. 

  602.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    603. 

  603.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    604. 

  604.       <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    605. 

  605.       <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    606. 

  606.       <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    607. 

  607.       <config default="20" name="ToleranceWarningRange" nameView="Tolerance Warning Range" description="Tolerance Warning Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    608. 

  608.       <config default="60" name="ToleranceWarningTime" nameView="Tolerance Warning Time" description="Tolerance Warning Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    609. 

  609.     </configs>
    610. 

  610.     <configs name="Chiller2" nameView="Chiller2" >
    611. 

  611.       <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    612. 

  612.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;2:AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    613. 

  613.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    614. 

  614.       <config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    615. 

  615.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    616. 

  616.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    617. 

  617.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    618. 

  618.       <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    619. 

  619.       <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    620. 

  620.       <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    621. 

  621.       <config default="20" name="ToleranceWarningRange" nameView="Tolerance Warning Range" description="Tolerance Warning Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    622. 

  622.       <config default="60" name="ToleranceWarningTime" nameView="Tolerance Warning Time" description="Tolerance Warning Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    623. 

  623.     </configs>
    624. 

  624.     <configs name="ElectrodeHeart1" nameView="Electrode Heart1" visible="false">
    625. 

  625.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    626. 

  626.     </configs>
    627. 

  627.     <configs name="ElectrodeHeart2" nameView="Electrode Heart1" visible="false">
    628. 

  628.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    629. 

  629.     </configs>
    630. 

  630.     <configs name="DryPump" nameView="Dry Pump" >
    631. 

  631.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    632. 

  632.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    633. 

  633.       <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    634. 

  634.       <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    635. 

  635.       <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    636. 

  636.       <config default="true" name="NeedUpdateComm" nameView="Need Update Comm" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    637. 

  637.     </configs>
    638. 

  638.     <configs name="Rf1" nameView="Source RF" >
    639. 

  639.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Wattsine" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    640. 

  640.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    641. 

  641.       <config default="COM38" name="Port" nameView="Port" description="serial port name of RFG(3:Wattsine default simulator port COM92)" max="" min="" paramter="" tag="" unit="" type="String" />
    642. 

  642.       <config default="false" name="EnableLog" nameView="Enable Microware Source " description="enable microware or not" max="1" min="0" tag="" unit="" type="Bool" />
    643. 

  643.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="RF1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    644. 

  644.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    645. 

  645.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    646. 

  646.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    647. 

  647.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    648. 

  648.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    649. 

  649.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    650. 

  650.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    651. 

  651. 

  652.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    653. 

  653.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    654. 

  654.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    655. 

  655.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    656. 

  656.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    657. 

  657.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    658. 

  658.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    659. 

  659.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    660. 

  660.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    661. 

  661.       <config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    662. 

  662.       <config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    663. 

  663.       <config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    664. 

  664.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    665. 

  665.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    666. 

  666.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    667. 

  667.     </configs>
    668. 

  668.     <configs name="Rf2" nameView="Source RF2" >
    669. 

  669.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Wattsine" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    670. 

  670.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    671. 

  671.       <config default="COM36" name="Port" nameView="Port" description="serial port name of RFG(3:Wattsine default simulator port COM94)" max="" min="" paramter="" tag="" unit="" type="String" />
    672. 

  672.       <config default="false" name="EnableLog" nameView="Enable Microware Source " description="enable microware or not" max="1" min="0" tag="" unit="" type="Bool" />
    673. 

  673.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="RF2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    674. 

  674.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    675. 

  675.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    676. 

  676.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    677. 

  677.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    678. 

  678.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    679. 

  679.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    680. 

  680.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    681. 

  681. 

  682.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    683. 

  683.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    684. 

  684.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    685. 

  685.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    686. 

  686.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    687. 

  687.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    688. 

  688.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    689. 

  689.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    690. 

  690.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    691. 

  691.       <config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    692. 

  692.       <config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    693. 

  693.       <config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    694. 

  694.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    695. 

  695.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    696. 

  696.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    697. 

  697.     </configs>
    698. 

  698.     <configs name="match1" nameView="Source Match" >
    699. 

  699.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    700. 

  700.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    701. 

  701.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    702. 

  702.       <config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    703. 

  703.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    704. 

  704.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    705. 

  705.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    706. 

  706.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    707. 

  707. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    708. 

  708.     </configs>
    709. 

  709.     <configs name="match2" nameView="Source Match" >
    710. 

  710.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    711. 

  711.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    712. 

  712.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    713. 

  713.       <config default="COM42" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    714. 

  714.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    715. 

  715.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    716. 

  716.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    717. 

  717.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    718. 

  718. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    719. 

  719.     </configs>
    720. 

  720. 	  <configs name="BiasRf1" nameView="Bias RF" >
    721. 

  721. 		  <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    722. 

  722. 		  <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    723. 

  723. 		  <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    724. 

  724. 		  <config default="COM64" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    725. 

  725. 		  <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    726. 

  726. 		  <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    727. 

  727. 		  <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    728. 

  728. 		  <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    729. 

  729. 		  <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    730. 

  730. 		  <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    731. 

  731. 		  <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    732. 

  732. 		  <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    733. 

  733. 		  <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    734. 

  734. 		  <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    735. 

  735. 		  <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    736. 

  736. 		  <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    737. 

  737. 		  <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    738. 

  738. 		  <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    739. 

  739. 		  <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    740. 

  740. 		  <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    741. 

  741. 		  <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    742. 

  742. 		  <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    743. 

  743. 		  <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    744. 

  744. 		  <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    745. 

  745. 		  <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    746. 

  746. 		  <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    747. 

  747. 		  <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    748. 

  748. 	  </configs>
    749. 

  749. 	  <configs name="BiasRf2" nameView="Bias RF2" >
    750. 

  750. 		  <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    751. 

  751. 		  <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    752. 

  752. 		  <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    753. 

  753. 		  <config default="COM62" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    754. 

  754. 		  <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    755. 

  755. 		  <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    756. 

  756. 		  <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    757. 

  757. 		  <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    758. 

  758. 		  <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    759. 

  759. 		  <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    760. 

  760. 		  <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    761. 

  761. 		  <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    762. 

  762. 		  <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    763. 

  763. 		  <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    764. 

  764. 		  <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    765. 

  765. 		  <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    766. 

  766. 		  <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    767. 

  767. 		  <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    768. 

  768. 		  <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    769. 

  769. 		  <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    770. 

  770. 		  <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    771. 

  771. 		  <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    772. 

  772. 		  <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    773. 

  773. 		  <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    774. 

  774. 		  <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    775. 

  775. 		  <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    776. 

  776. 		  <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    777. 

  777. 	  </configs>
    778. 

  778.     <configs name="BiasRf1Match" nameView="Bias Match" >
    779. 

  779.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    780. 

  780.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    781. 

  781.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    782. 

  782.       <config default="COM66" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    783. 

  783.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    784. 

  784.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    785. 

  785.       <config default="false" name="EnableC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    786. 

  786.     </configs>
    787. 

  787.     <configs name="BiasRf2Match" nameView="Bias Match2" >
    788. 

  788.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    789. 

  789.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    790. 

  790.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    791. 

  791.       <config default="COM68" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    792. 

  792.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    793. 

  793.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    794. 

  794.       <config default="false" name="EnableC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    795. 

  795.     </configs>
    796. 

  796.     <configs name="MfcGas1" nameView="MFC Gas1" >
    797. 

  797.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    798. 

  798.       <config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    799. 

  799.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    800. 

  800.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    801. 

  801.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    802. 

  802.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    803. 

  803.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    804. 

  804.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    805. 

  805.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    806. 

  806.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    807. 

  807.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    808. 

  808.     </configs>
    809. 

  809.     <configs name="MfcGas2" nameView="MFC Gas2" >
    810. 

  810.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    811. 

  811.       <config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    812. 

  812.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    813. 

  813.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    814. 

  814.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    815. 

  815.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    816. 

  816.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    817. 

  817.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    818. 

  818.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    819. 

  819.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    820. 

  820.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    821. 

  821.     </configs>
    822. 

  822.     <configs name="MfcGas3" nameView="MFC Gas3" >
    823. 

  823.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    824. 

  824.       <config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    825. 

  825.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    826. 

  826.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    827. 

  827.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    828. 

  828.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    829. 

  829.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    830. 

  830.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    831. 

  831.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    832. 

  832.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    833. 

  833.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    834. 

  834.     </configs>
    835. 

  835.     <configs name="MfcGas4" nameView="MFC Gas4" >
    836. 

  836.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    837. 

  837.       <config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    838. 

  838.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    839. 

  839.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    840. 

  840.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    841. 

  841.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    842. 

  842.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    843. 

  843.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    844. 

  844.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    845. 

  845.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    846. 

  846.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    847. 

  847.     </configs>
    848. 

  848.     <configs name="MfcGas5" nameView="MFC Gas5" >
    849. 

  849.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    850. 

  850.       <config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    851. 

  851.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    852. 

  852.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    853. 

  853.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    854. 

  854.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    855. 

  855.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    856. 

  856.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    857. 

  857.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    858. 

  858.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    859. 

  859.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    860. 

  860.     </configs>
    861. 

  861.     <configs name="MfcGas6" nameView="MFC Gas6" >
    862. 

  862.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    863. 

  863.       <config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    864. 

  864.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    865. 

  865.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    866. 

  866.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    867. 

  867.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    868. 

  868.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    869. 

  869.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    870. 

  870.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    871. 

  871.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    872. 

  872.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    873. 

  873.     </configs>
    874. 

  874.     <configs name="Pump" nameView="Pump" >
    875. 

  875.       <config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    876. 

  876.       <config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    877. 

  877.       <config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    878. 

  878.       <config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    879. 

  879.       <config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    880. 

  880.       <config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    881. 

  881.     </configs>
    882. 

  882.     <configs name="Purge" nameView="Purge" >
    883. 

  883.       <config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    884. 

  884.       <config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    885. 

  885.       <config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    886. 

  886.       <config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    887. 

  887.       <config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    888. 

  888.       <config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    889. 

  889.       <config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    890. 

  890.     </configs>
    891. 

  891.     <configs name="HeaterChamber" nameView="Heater Chamber" >
    892. 

  892.       <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    893. 

  893.       <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    894. 

  894.       <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    895. 

  895.       <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    896. 

  896.       <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    897. 

  897. 

  898.     </configs>
    899. 

  899. 	  <configs name="HeaterChamberWall" nameView="Heater Chamber Wall" >
    900. 

  900. 		  <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    901. 

  901. 		  <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    902. 

  902. 		  <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    903. 

  903. 		  <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    904. 

  904. 		  <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    905. 

  905. 

  906. 	  </configs>
    907. 

  907.     <configs name="HeaterChamber1" nameView="Heater Chamber" >
    908. 

  908. 

  909.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    910. 

  910.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    911. 

  911.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    912. 

  912.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    913. 

  913.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    914. 

  914.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    915. 

  915.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    916. 

  916.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    917. 

  917.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    918. 

  918.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    919. 

  919.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    920. 

  920.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    921. 

  921.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    922. 

  922.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    923. 

  923.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    924. 

  924.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    925. 

  925.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    926. 

  926.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    927. 

  927.     </configs>
    928. 

  928.     <configs name="HeaterChamber2" nameView="Heater Chamber" >
    929. 

  929. 

  930.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    931. 

  931.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    932. 

  932.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    933. 

  933.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    934. 

  934.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    935. 

  935.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    936. 

  936.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    937. 

  937.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    938. 

  938.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    939. 

  939.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    940. 

  940.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    941. 

  941.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    942. 

  942.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    943. 

  943.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    944. 

  944.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    945. 

  945.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    946. 

  946.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    947. 

  947.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    948. 

  948.     </configs>
    949. 

  949.     <configs name="IdleClean" nameView="Idle Clean" visible="false">
    950. 

  950.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    951. 

  951.       <config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    952. 

  952.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    953. 

  953.     </configs>
    954. 

  954.     <configs name="JobClean" nameView="Job Clean" visible="false">
    955. 

  955.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    956. 

  956.       <config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    957. 

  957.       <config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    958. 

  958.       <config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    959. 

  959.       <config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    960. 

  960.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    961. 

  961.     </configs>
    962. 

  962.     <configs name="EPD" nameView="EPD Setting">
    963. 

  963.       <config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    964. 

  964.       <config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    965. 

  965.     </configs>
    966. 

  966.   </configs>
    967. 

  967.   <configs name="PMB">
    968. 

  968.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    969. 

  969.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    970. 

  970.     <config default="30" name="PrepareTransferTimeout" description="PrepareTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    971. 

  971. 

  972. 	  <config default="true" name="GuidePin.IsInstalled"  description="Is GuidePin Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
    973. 

  973. 

  974. 	  <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
    975. 

  975.     <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    976. 

  976.     <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    977. 

  977.     <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    978. 

  978.     <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" visible="false"  unit="sccm" type="Double" />
    979. 

  979.     <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" visible="false"  unit="second" type="Double" />
    980. 

  980.     <config default="100" name="ProcessPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    981. 

  981.     <config default="60" name="ProcessPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    982. 

  982.     <config default="100" name="ProcessPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    983. 

  983.     <config default="60" name="ProcessPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    984. 

  984.     <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    985. 

  985.     <config default="120" name="CheckChamberTempTimeout" nameView="Check Chamber Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    986. 

  986.     <config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    987. 

  987.     <config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    988. 

  988.     <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    989. 

  989.     <config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    990. 

  990.     <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    991. 

  991. 	  <!-- <config default="0" name="PlaceAndPickDelayTime" nameView="Place And Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />-->
    992. 

  992. 	  <config default="0" name="PickDelayTime" nameView="Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    993. 

  993. 	  <config default="0" name="PlaceDelayTime" nameView="Place Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    994. 

  994.     <config default="0" name="PlaceRetractDelayTime" nameView="Place Retract Before Delay Time" description="" max="3000" min="0" paramter="" tag="" unit="ms" visible="true" type="Integer"  />
    995. 

  995.     <config default="0" name="PickRetractDelayTime" nameView="Pick Retract Before Delay Time" description="" max="3000" min="0" paramter="" tag="" unit="ms" visible="true" type="Integer"  />
    996. 

  996.     <!--<config default="150" name="ChamberHeater1SetPointLimit" nameView="Chamber Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />-->
    997. 

  997.     <config default="150" name="HeaterChamberSetPointLimit" nameView="Chamber Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    998. 

  998.     <config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    999. 

  999.     <config default="140" name="LEHeaterSetPointLimit1" nameView="LE Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1000. 

  1000.     <config default="140" name="LEHeaterSetPointLimit2" nameView="LE Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1001. 

  1001.     <config default="false" name="EnableChamberWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1002. 

  1002.     <config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    1003. 

  1003. 

  1004. 

  1005. 

  1006.     <configs name="MFCVerification" nameView="MFC Verification" >
    1007. 

  1007.       <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    1008. 

  1008.       <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    1009. 

  1009.       <config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    1010. 

  1010.       <config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    1011. 

  1011.       <config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1012. 

  1012.       <config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    1013. 

  1013.       <config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1014. 

  1014.       <config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    1015. 

  1015.     </configs>
    1016. 

  1016. 

  1017.     <configs name="Chiller1" nameView="Chiller" >
    1018. 

  1018.       <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1019. 

  1019.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;2:AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1020. 

  1020.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1021. 

  1021.       <config default="COM48" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1022. 

  1022.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1023. 

  1023.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1024. 

  1024.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1025. 

  1025.       <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1026. 

  1026.       <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1027. 

  1027.       <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1028. 

  1028.       <config default="20" name="ToleranceWarningRange" nameView="Tolerance Warning Range" description="Tolerance Warning Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1029. 

  1029.       <config default="60" name="ToleranceWarningTime" nameView="Tolerance Warning Time" description="Tolerance Warning Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1030. 

  1030.     </configs>
    1031. 

  1031.     <configs name="Chiller2" nameView="Chiller" >
    1032. 

  1032.       <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1033. 

  1033.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;2:AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1034. 

  1034.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1035. 

  1035.       <config default="COM50" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1036. 

  1036.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1037. 

  1037.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1038. 

  1038.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1039. 

  1039.       <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1040. 

  1040.       <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1041. 

  1041.       <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1042. 

  1042.       <config default="20" name="ToleranceWarningRange" nameView="Tolerance Warning Range" description="Tolerance Warning Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1043. 

  1043.       <config default="60" name="ToleranceWarningTime" nameView="Tolerance Warning Time" description="Tolerance Warning Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1044. 

  1044.     </configs>
    1045. 

  1045.     <configs name="ElectrodeHeart1" nameView="Electrode Heart1" visible="false">
    1046. 

  1046.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    1047. 

  1047.     </configs>
    1048. 

  1048.     <configs name="ElectrodeHeart2" nameView="Electrode Heart1" visible="false">
    1049. 

  1049.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    1050. 

  1050.     </configs>
    1051. 

  1051.     <configs name="DryPump" nameView="Dry Pump" >
    1052. 

  1052.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1053. 

  1053.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1054. 

  1054.       <config default="COM20" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1055. 

  1055.       <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1056. 

  1056.       <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1057. 

  1057.       <config default="true" name="NeedUpdateComm" nameView="Need Update Comm" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1058. 

  1058.     </configs>
    1059. 

  1059.     <configs name="Rf1" nameView="Source RF" >
    1060. 

  1060.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Wattsine;" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1061. 

  1061.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1062. 

  1062.       <config default="COM32" name="Port" nameView="Port" description="serial port name of RFG(3:Wattsine default simulator port COM96)" max="" min="" paramter="" tag="" unit="" type="String" />
    1063. 

  1063.       <config default="false" name="EnableLog" nameView="Enable Microware Source " description="enable microware or not" max="1" min="0" tag="" unit="" type="Bool" />
    1064. 

  1064.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1065. 

  1065.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1066. 

  1066.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1067. 

  1067.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1068. 

  1068.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1069. 

  1069.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1070. 

  1070.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1071. 

  1071.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1072. 

  1072.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1073. 

  1073.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1074. 

  1074.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1075. 

  1075.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1076. 

  1076.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1077. 

  1077.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1078. 

  1078.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1079. 

  1079.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1080. 

  1080.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1081. 

  1081.       <config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    1082. 

  1082.       <config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    1083. 

  1083.       <config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    1084. 

  1084.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1085. 

  1085.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1086. 

  1086.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1087. 

  1087.     </configs>
    1088. 

  1088.     <configs name="Rf2" nameView="Source RF2" >
    1089. 

  1089.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Wattsine;" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1090. 

  1090.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1091. 

  1091.       <config default="COM34" name="Port" nameView="Port" description="serial port name of RFG(3:Wattsine default simulator port COM98)" max="" min="" paramter="" tag="" unit="" type="String" />
    1092. 

  1092.       <config default="false" name="EnableLog" nameView="Enable Microware Source " description="enable microware or not" max="1" min="0" tag="" unit="" type="Bool" />
    1093. 

  1093.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1094. 

  1094.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1095. 

  1095.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1096. 

  1096.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1097. 

  1097.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1098. 

  1098.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1099. 

  1099.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1100. 

  1100.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1101. 

  1101.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1102. 

  1102.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1103. 

  1103.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1104. 

  1104.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1105. 

  1105.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1106. 

  1106.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1107. 

  1107.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1108. 

  1108.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1109. 

  1109.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1110. 

  1110.       <config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    1111. 

  1111.       <config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    1112. 

  1112.       <config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    1113. 

  1113.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1114. 

  1114.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1115. 

  1115.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1116. 

  1116.     </configs>
    1117. 

  1117.     <configs name="match1" nameView="Source Match" >
    1118. 

  1118.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1119. 

  1119.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1120. 

  1120.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1121. 

  1121.       <config default="COM52" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1122. 

  1122.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1123. 

  1123.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1124. 

  1124.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1125. 

  1125.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    1126. 

  1126. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    1127. 

  1127.     </configs>
    1128. 

  1128.     <configs name="match2" nameView="Source Match" >
    1129. 

  1129.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1130. 

  1130.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1131. 

  1131.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1132. 

  1132.       <config default="COM54" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1133. 

  1133.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1134. 

  1134.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1135. 

  1135.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1136. 

  1136.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    1137. 

  1137. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    1138. 

  1138.     </configs>
    1139. 

  1139.     <configs name="BiasRf1" nameView="Bias RF" >
    1140. 

  1140.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1141. 

  1141.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1142. 

  1142.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1143. 

  1143.       <config default="COM56" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1144. 

  1144.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1145. 

  1145.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1146. 

  1146.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1147. 

  1147.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1148. 

  1148.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1149. 

  1149.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1150. 

  1150.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1151. 

  1151.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1152. 

  1152.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1153. 

  1153.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1154. 

  1154.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1155. 

  1155.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1156. 

  1156.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1157. 

  1157.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1158. 

  1158.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1159. 

  1159.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1160. 

  1160.       <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    1161. 

  1161.       <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    1162. 

  1162.       <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    1163. 

  1163.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1164. 

  1164.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1165. 

  1165.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1166. 

  1166.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1167. 

  1167.     </configs>
    1168. 

  1168.     <configs name="BiasRf2" nameView="Bias RF2" >
    1169. 

  1169.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1170. 

  1170.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1171. 

  1171.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1172. 

  1172.       <config default="COM58" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1173. 

  1173.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1174. 

  1174.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1175. 

  1175.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1176. 

  1176.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1177. 

  1177.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1178. 

  1178.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1179. 

  1179.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1180. 

  1180.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1181. 

  1181.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1182. 

  1182.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1183. 

  1183.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1184. 

  1184.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1185. 

  1185.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1186. 

  1186.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1187. 

  1187.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1188. 

  1188.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1189. 

  1189.       <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    1190. 

  1190.       <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    1191. 

  1191.       <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    1192. 

  1192.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1193. 

  1193.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1194. 

  1194.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1195. 

  1195.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1196. 

  1196.     </configs>
    1197. 

  1197.     <configs name="BiasRf1Match" nameView="Bias Match" >
    1198. 

  1198.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1199. 

  1199.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1200. 

  1200.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1201. 

  1201.       <config default="COM70" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1202. 

  1202.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1203. 

  1203.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1204. 

  1204.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1205. 

  1205.     </configs>
    1206. 

  1206.     <configs name="BiasRf2Match" nameView="Bias Match2" >
    1207. 

  1207.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1208. 

  1208.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1209. 

  1209.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
    1210. 

  1210.       <config default="COM72" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1211. 

  1211.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
    1212. 

  1212.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1213. 

  1213.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1214. 

  1214.     </configs>
    1215. 

  1215.     <configs name="MfcGas1" nameView="MFC Gas1" >
    1216. 

  1216.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    1217. 

  1217.       <config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    1218. 

  1218.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1219. 

  1219.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1220. 

  1220.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1221. 

  1221.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1222. 

  1222.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1223. 

  1223.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1224. 

  1224.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1225. 

  1225.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1226. 

  1226.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1227. 

  1227.     </configs>
    1228. 

  1228.     <configs name="MfcGas2" nameView="MFC Gas2" >
    1229. 

  1229.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    1230. 

  1230.       <config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    1231. 

  1231.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1232. 

  1232.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1233. 

  1233.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1234. 

  1234.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1235. 

  1235.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1236. 

  1236.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1237. 

  1237.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1238. 

  1238.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1239. 

  1239.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1240. 

  1240.     </configs>
    1241. 

  1241.     <configs name="MfcGas3" nameView="MFC Gas3" >
    1242. 

  1242.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    1243. 

  1243.       <config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    1244. 

  1244.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1245. 

  1245.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1246. 

  1246.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1247. 

  1247.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1248. 

  1248.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1249. 

  1249.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1250. 

  1250.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1251. 

  1251.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1252. 

  1252.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1253. 

  1253.     </configs>
    1254. 

  1254.     <configs name="MfcGas4" nameView="MFC Gas4" >
    1255. 

  1255.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    1256. 

  1256.       <config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    1257. 

  1257.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1258. 

  1258.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1259. 

  1259.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1260. 

  1260.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1261. 

  1261.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1262. 

  1262.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1263. 

  1263.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1264. 

  1264.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1265. 

  1265.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1266. 

  1266.     </configs>
    1267. 

  1267.     <configs name="MfcGas5" nameView="MFC Gas5" >
    1268. 

  1268.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    1269. 

  1269.       <config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    1270. 

  1270.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1271. 

  1271.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1272. 

  1272.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1273. 

  1273.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1274. 

  1274.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1275. 

  1275.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1276. 

  1276.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1277. 

  1277.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1278. 

  1278.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1279. 

  1279.     </configs>
    1280. 

  1280.     <configs name="MfcGas6" nameView="MFC Gas6" >
    1281. 

  1281.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    1282. 

  1282.       <config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    1283. 

  1283.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1284. 

  1284.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1285. 

  1285.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1286. 

  1286.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1287. 

  1287.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1288. 

  1288.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1289. 

  1289.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1290. 

  1290.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1291. 

  1291.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1292. 

  1292.     </configs>
    1293. 

  1293.     <configs name="Pump" nameView="Pump" >
    1294. 

  1294.       <config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    1295. 

  1295.       <config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1296. 

  1296.       <config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1297. 

  1297.       <config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1298. 

  1298.       <config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    1299. 

  1299.       <config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1300. 

  1300.     </configs>
    1301. 

  1301.     <configs name="Purge" nameView="Purge" >
    1302. 

  1302.       <config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    1303. 

  1303.       <config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1304. 

  1304.       <config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1305. 

  1305.       <config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1306. 

  1306.       <config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1307. 

  1307.       <config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1308. 

  1308.       <config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1309. 

  1309.     </configs>
    1310. 

  1310.     <configs name="HeaterChamber" nameView="Heater Chamber" >
    1311. 

  1311.       <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1312. 

  1312.       <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1313. 

  1313.       <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1314. 

  1314.       <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1315. 

  1315.       <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1316. 

  1316. 

  1317.     </configs>
    1318. 

  1318. 	  <configs name="HeaterChamberWall" nameView="Heater Chamber Wall" >
    1319. 

  1319. 		  <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1320. 

  1320. 		  <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1321. 

  1321. 		  <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1322. 

  1322. 		  <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1323. 

  1323. 		  <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1324. 

  1324. 

  1325. 	  </configs>
    1326. 

  1326.     <configs name="HeaterChamber1" nameView="Heater Chamber" >
    1327. 

  1327. 

  1328.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1329. 

  1329.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1330. 

  1330.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1331. 

  1331.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1332. 

  1332.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1333. 

  1333.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1334. 

  1334.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1335. 

  1335.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1336. 

  1336.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1337. 

  1337.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1338. 

  1338.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1339. 

  1339.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1340. 

  1340.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1341. 

  1341.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1342. 

  1342.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1343. 

  1343.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1344. 

  1344.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1345. 

  1345.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1346. 

  1346.     </configs>
    1347. 

  1347.     <configs name="HeaterChamber2" nameView="Heater Chamber" >
    1348. 

  1348. 

  1349.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1350. 

  1350.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1351. 

  1351.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1352. 

  1352.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1353. 

  1353.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1354. 

  1354.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1355. 

  1355.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1356. 

  1356.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1357. 

  1357.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1358. 

  1358.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1359. 

  1359.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1360. 

  1360.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1361. 

  1361.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1362. 

  1362.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1363. 

  1363.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1364. 

  1364.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1365. 

  1365.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1366. 

  1366.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1367. 

  1367.     </configs>
    1368. 

  1368.     <configs name="IdleClean" nameView="Idle Clean" visible="false">
    1369. 

  1369.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1370. 

  1370.       <config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1371. 

  1371.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1372. 

  1372.     </configs>
    1373. 

  1373.     <configs name="JobClean" nameView="Job Clean" visible="false">
    1374. 

  1374.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1375. 

  1375.       <config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1376. 

  1376.       <config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1377. 

  1377.       <config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1378. 

  1378.       <config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1379. 

  1379.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1380. 

  1380.     </configs>
    1381. 

  1381.     <configs name="EPD" nameView="EPD Setting">
    1382. 

  1382.       <config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1383. 

  1383.       <config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1384. 

  1384.     </configs>
    1385. 

  1385.   </configs>
    1386. 

  1386.   <configs name="PMC" visible="false">
    1387. 

  1387. 

  1388.     <config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    1389. 

  1389.     <config default="30" name="PostTransferTimeout" description="PostTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    1390. 

  1390.     <config default="30" name="PrepareTransferTimeout" description="PrepareTransfer Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    1391. 

  1391. 

  1392. 	  <config default="true" name="GuidePin.IsInstalled"  description="Is GuidePin Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1393. 

  1393. 	  
    1394. 

  1394.     <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1395. 

  1395.     <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1396. 

  1396.     <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1397. 

  1397.     <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1398. 

  1398.     <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" visible="false"  unit="sccm" type="Double" />
    1399. 

  1399.     <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" visible="false"  unit="second" type="Double" />
    1400. 

  1400.     <config default="100" name="ProcessPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    1401. 

  1401.     <config default="60" name="ProcessPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1402. 

  1402.     <config default="100" name="ProcessPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1403. 

  1403.     <config default="60" name="ProcessPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1404. 

  1404.     <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1405. 

  1405.     <config default="120" name="CheckChamberTempTimeout" nameView="Check Chamber Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    1406. 

  1406.     <config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1407. 

  1407.     <config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1408. 

  1408.     <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1409. 

  1409.     <config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    1410. 

  1410.     <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1411. 

  1411. 	  <!-- <config default="0" name="PlaceAndPickDelayTime" nameView="Place And Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />-->
    1412. 

  1412. 	  <config default="0" name="PickDelayTime" nameView="Pick Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    1413. 

  1413. 	  <config default="0" name="PlaceDelayTime" nameView="Place Delay Time" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    1414. 

  1414.     <config default="0" name="PlaceRetractDelayTime" nameView="Place Retract Before Delay Time" description="" max="3000" min="0" paramter="" tag="" unit="ms" visible="true" type="Integer"  />
    1415. 

  1415.     <config default="0" name="PickRetractDelayTime" nameView="Pick Retract Before Delay Time" description="" max="3000" min="0" paramter="" tag="" unit="ms" visible="true" type="Integer"  />
    1416. 

  1416.     <!--<config default="150" name="ChamberHeater1SetPointLimit" nameView="Chamber Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />-->
    1417. 

  1417.     <config default="150" name="HeaterChamberSetPointLimit" nameView="Chamber Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1418. 

  1418.     <config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1419. 

  1419.     <config default="140" name="LEHeaterSetPointLimit1" nameView="LE Heater 1 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1420. 

  1420.     <config default="140" name="LEHeaterSetPointLimit2" nameView="LE Heater 2 Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1421. 

  1421.     <config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    1422. 

  1422. 

  1423.     <configs name="MFCVerification" nameView="MFC Verification" >
    1424. 

  1424.       <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    1425. 

  1425.       <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    1426. 

  1426.       <config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    1427. 

  1427.       <config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    1428. 

  1428.       <config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1429. 

  1429.       <config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    1430. 

  1430.       <config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1431. 

  1431.       <config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    1432. 

  1432.     </configs>
    1433. 

  1433. 

  1434.     <configs name="Chiller1" nameView="Chiller1" >
    1435. 

  1435.       <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1436. 

  1436.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;2:AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1437. 

  1437.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1438. 

  1438.       <config default="COM21" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1439. 

  1439.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1440. 

  1440.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1441. 

  1441.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1442. 

  1442.       <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1443. 

  1443.       <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1444. 

  1444.       <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1445. 

  1445.       <config default="20" name="ToleranceWarningRange" nameView="Tolerance Warning Range" description="Tolerance Warning Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1446. 

  1446.       <config default="60" name="ToleranceWarningTime" nameView="Tolerance Warning Time" description="Tolerance Warning Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1447. 

  1447.     </configs>
    1448. 

  1448.     <configs name="Chiller2" nameView="Chiller2" >
    1449. 

  1449.       <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1450. 

  1450.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;2:AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1451. 

  1451.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1452. 

  1452.       <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1453. 

  1453.       <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1454. 

  1454.       <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1455. 

  1455.       <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1456. 

  1456.       <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1457. 

  1457.       <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1458. 

  1458.       <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1459. 

  1459.       <config default="20" name="ToleranceWarningRange" nameView="Tolerance Warning Range" description="Tolerance Warning Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1460. 

  1460.       <config default="60" name="ToleranceWarningTime" nameView="Tolerance Warning Time" description="Tolerance Warning Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1461. 

  1461.     </configs>
    1462. 

  1462.     <configs name="ElectrodeHeart1" nameView="Electrode Heart1" >
    1463. 

  1463.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    1464. 

  1464.     </configs>
    1465. 

  1465.     <configs name="ElectrodeHeart2" nameView="Electrode Heart1" >
    1466. 

  1466.       <config default="0" name="Heart" nameView="Electrode Heart" description="Electrode Heart" max="10" min="0" tag="" unit="℃" type="Double" />
    1467. 

  1467.     </configs>
    1468. 

  1468.     <configs name="DryPump" nameView="Dry Pump" >
    1469. 

  1469.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1470. 

  1470.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1471. 

  1471.       <config default="COM23" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1472. 

  1472.       <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1473. 

  1473.       <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1474. 

  1474.       <config default="true" name="NeedUpdateComm" nameView="Need Update Comm" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1475. 

  1475.     </configs>
    1476. 

  1476.     <configs name="Rf1" nameView="Source RF" >
    1477. 

  1477.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1478. 

  1478.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1479. 

  1479.       <config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1480. 

  1480.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1481. 

  1481.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1482. 

  1482.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1483. 

  1483.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1484. 

  1484.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1485. 

  1485.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1486. 

  1486.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1487. 

  1487.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1488. 

  1488.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1489. 

  1489.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1490. 

  1490.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1491. 

  1491.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1492. 

  1492.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1493. 

  1493.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1494. 

  1494.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1495. 

  1495.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1496. 

  1496.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1497. 

  1497.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1498. 

  1498.     </configs>
    1499. 

  1499.     <configs name="Rf2" nameView="Source RF2" >
    1500. 

  1500.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1501. 

  1501.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1502. 

  1502.       <config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1503. 

  1503.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Rf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1504. 

  1504.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1505. 

  1505.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1506. 

  1506.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1507. 

  1507.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1508. 

  1508.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1509. 

  1509.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1510. 

  1510.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1511. 

  1511.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1512. 

  1512.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1513. 

  1513.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1514. 

  1514.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1515. 

  1515.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1516. 

  1516.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1517. 

  1517.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1518. 

  1518.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1519. 

  1519.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1520. 

  1520.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1521. 

  1521.     </configs>
    1522. 

  1522.     <configs name="match1" nameView="Source Match" >
    1523. 

  1523.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1524. 

  1524.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1525. 

  1525.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1526. 

  1526.       <config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1527. 

  1527.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1528. 

  1528.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1529. 

  1529.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1530. 

  1530.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    1531. 

  1531. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    1532. 

  1532.     </configs>
    1533. 

  1533.     <configs name="match2" nameView="Source Match" >
    1534. 

  1534.       <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1535. 

  1535.       <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1536. 

  1536.       <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1537. 

  1537.       <config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1538. 

  1538.       <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="match2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1539. 

  1539.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1540. 

  1540.       <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1541. 

  1541.       <!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    1542. 

  1542. 			<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    1543. 

  1543.     </configs>
    1544. 

  1544.     <configs name="BiasRf1" nameView="Bias RF" >
    1545. 

  1545.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1546. 

  1546.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1547. 

  1547.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1548. 

  1548.       <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1549. 

  1549.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1550. 

  1550.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1551. 

  1551.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1552. 

  1552.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1553. 

  1553.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1554. 

  1554.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1555. 

  1555.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1556. 

  1556.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1557. 

  1557.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1558. 

  1558.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1559. 

  1559.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1560. 

  1560.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1561. 

  1561.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1562. 

  1562.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1563. 

  1563.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1564. 

  1564.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1565. 

  1565.       <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    1566. 

  1566.       <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    1567. 

  1567.       <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    1568. 

  1568.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1569. 

  1569.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1570. 

  1570.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1571. 

  1571.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1572. 

  1572.     </configs>
    1573. 

  1573.     <configs name="BiasRf2" nameView="Bias RF2" >
    1574. 

  1574.       <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1575. 

  1575.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1576. 

  1576.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1577. 

  1577.       <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1578. 

  1578.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2 IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1579. 

  1579.       <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1580. 

  1580.       <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1581. 

  1581.       <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1582. 

  1582.       <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1583. 

  1583.       <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1584. 

  1584.       <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1585. 

  1585.       <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1586. 

  1586.       <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1587. 

  1587.       <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1588. 

  1588.       <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1589. 

  1589.       <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1590. 

  1590.       <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1591. 

  1591.       <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer"  visible="false"/>
    1592. 

  1592.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1593. 

  1593.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    1594. 

  1594.       <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    1595. 

  1595.       <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    1596. 

  1596.       <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    1597. 

  1597.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1598. 

  1598.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1599. 

  1599.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1600. 

  1600.       <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1601. 

  1601.     </configs>
    1602. 

  1602.     <configs name="BiasRf1Match" nameView="Bias Match" >
    1603. 

  1603.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1604. 

  1604.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1605. 

  1605.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1606. 

  1606.       <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1607. 

  1607.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf1Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1608. 

  1608.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1609. 

  1609.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1610. 

  1610.     </configs>
    1611. 

  1611.     <configs name="BiasRf2Match" nameView="Bias Match2" >
    1612. 

  1612.       <config default="false" name="EnableMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1613. 

  1613.       <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1614. 

  1614.       <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1615. 

  1615.       <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1616. 

  1616.       <config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="BiasRf2Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1617. 

  1617.       <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1618. 

  1618.       <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1619. 

  1619.     </configs>
    1620. 

  1620.     <configs name="MfcGas1" nameView="MFC Gas1" >
    1621. 

  1621.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    1622. 

  1622.       <config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    1623. 

  1623.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1624. 

  1624.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1625. 

  1625.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1626. 

  1626.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1627. 

  1627.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1628. 

  1628.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1629. 

  1629.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1630. 

  1630.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1631. 

  1631.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1632. 

  1632.     </configs>
    1633. 

  1633.     <configs name="MfcGas2" nameView="MFC Gas2" >
    1634. 

  1634.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    1635. 

  1635.       <config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    1636. 

  1636.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1637. 

  1637.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1638. 

  1638.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1639. 

  1639.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1640. 

  1640.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1641. 

  1641.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1642. 

  1642.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1643. 

  1643.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1644. 

  1644.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1645. 

  1645.     </configs>
    1646. 

  1646.     <configs name="MfcGas3" nameView="MFC Gas3" >
    1647. 

  1647.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    1648. 

  1648.       <config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    1649. 

  1649.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1650. 

  1650.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1651. 

  1651.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1652. 

  1652.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1653. 

  1653.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1654. 

  1654.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1655. 

  1655.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1656. 

  1656.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1657. 

  1657.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1658. 

  1658.     </configs>
    1659. 

  1659.     <configs name="MfcGas4" nameView="MFC Gas4" >
    1660. 

  1660.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    1661. 

  1661.       <config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    1662. 

  1662.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1663. 

  1663.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1664. 

  1664.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1665. 

  1665.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1666. 

  1666.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1667. 

  1667.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1668. 

  1668.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1669. 

  1669.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1670. 

  1670.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1671. 

  1671.     </configs>
    1672. 

  1672.     <configs name="MfcGas5" nameView="MFC Gas5" >
    1673. 

  1673.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    1674. 

  1674.       <config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    1675. 

  1675.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1676. 

  1676.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1677. 

  1677.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1678. 

  1678.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1679. 

  1679.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1680. 

  1680.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1681. 

  1681.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1682. 

  1682.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1683. 

  1683.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1684. 

  1684.     </configs>
    1685. 

  1685.     <configs name="MfcGas6" nameView="MFC Gas6" >
    1686. 

  1686.       <config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    1687. 

  1687.       <config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    1688. 

  1688.       <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1689. 

  1689.       <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1690. 

  1690.       <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1691. 

  1691.       <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1692. 

  1692.       <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1693. 

  1693.       <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1694. 

  1694.       <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1695. 

  1695.       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1696. 

  1696.       <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1697. 

  1697.     </configs>
    1698. 

  1698.     <configs name="Pump" nameView="Pump" >
    1699. 

  1699.       <config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    1700. 

  1700.       <config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1701. 

  1701.       <config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1702. 

  1702.       <config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1703. 

  1703.       <config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    1704. 

  1704.       <config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1705. 

  1705.     </configs>
    1706. 

  1706.     <configs name="Purge" nameView="Purge" >
    1707. 

  1707.       <config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    1708. 

  1708.       <config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1709. 

  1709.       <config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1710. 

  1710.       <config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1711. 

  1711.       <config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1712. 

  1712.       <config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1713. 

  1713.       <config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    1714. 

  1714.     </configs>
    1715. 

  1715.     <configs name="HeaterChamber" nameView="Heater Chamber" >
    1716. 

  1716.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1717. 

  1717.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1718. 

  1718.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1719. 

  1719.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1720. 

  1720.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1721. 

  1721.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1722. 

  1722.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1723. 

  1723.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1724. 

  1724.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1725. 

  1725.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1726. 

  1726.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1727. 

  1727.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1728. 

  1728.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1729. 

  1729.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1730. 

  1730.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1731. 

  1731.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1732. 

  1732.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1733. 

  1733.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1734. 

  1734.     </configs>
    1735. 

  1735.     <configs name="IdleClean" nameView="Idle Clean" visible="false">
    1736. 

  1736.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1737. 

  1737.       <config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1738. 

  1738.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1739. 

  1739.     </configs>
    1740. 

  1740.     <configs name="JobClean" nameView="Job Clean" visible="false">
    1741. 

  1741.       <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1742. 

  1742.       <config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1743. 

  1743.       <config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1744. 

  1744.       <config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1745. 

  1745.       <config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1746. 

  1746.       <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1747. 

  1747.     </configs>
    1748. 

  1748.     <configs name="EPD" nameView="EPD Setting">
    1749. 

  1749.       <config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1750. 

  1750.       <config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1751. 

  1751.     </configs>
    1752. 

  1752.   </configs>
    1753. 

  1753. </root>
    1754.