Mars200/Mars/EfemDualRT/Config/SequenceFormat.xml

<?xml version="1.0" encoding="utf-8"?>
<Aitex>
  <TableSequenceFormat RecipeVersion="EfemDual">
    <Catalog Type="Position">
      <Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection" >

        <Selection Name="Aligner" DisplayName="Aligner" Parameter="AlignerSelection" />
        <Selection Name="LL" DisplayName="LL" Parameter="LLSelection" />
        <Selection Name="PM" DisplayName="PM" Parameter="PMSelection,PMARecipe,PMBRecipe" />
        <Selection Name="Cooling" DisplayName="Cooling" Parameter="CoolingSelection,CoolingTime" />
      </Item>
    </Catalog>

    <Catalog Type="Parameter">

      <!--
      <Item Name="LPSelection" DisplayName="LP Selection" InputType="MultiSelection" >
        <Selection Name="LP1" DisplayName="LP1"/>
        <Selection Name="LP2" DisplayName="LP2"/>
        <Selection Name="LP3" DisplayName="LP3"/>
      </Item>
            -->

      <Item Name="AlignerSelection" DisplayName="Aligner Selection" InputType="MultiSelection" >
        <Selection Name="Aligner1" DisplayName="Aligner1"/>
        <Selection Name="Aligner2" DisplayName="Aligner2"/>
      </Item>

      <Item Name="CoolingSelection" DisplayName="Cooling Selection" InputType="MultiSelection" >
        <Selection Name="Cooling1" DisplayName="Cooling1"/>
        <Selection Name="Cooling2" DisplayName="Cooling2"/>
      </Item>

      <Item Name="LLSelection" DisplayName="LL Selection" InputType="MultiSelection" >
        <Selection Name="LLA" DisplayName="LLA"/>
        <Selection Name="LLB" DisplayName="LLB"/>
      </Item>

      <Item Name="SlotSelection" DisplayName="SlotSelection" InputType="MultiSelection" >
        <Selection Name="0" DisplayName="1"/>
        <Selection Name="1" DisplayName="2"/>
      </Item>

      <Item Name="PMSelection" DisplayName="PM Selection" InputType="MultiSelection" >
        <Selection Name="PMA1" DisplayName="PMA1"/>
        <Selection Name="PMA2" DisplayName="PMA2"/>
        <Selection Name="PMB1" DisplayName="PMB1"/>
        <Selection Name="PMB2" DisplayName="PMB2"/>
      </Item>

      <Item Name="PMARecipe" DisplayName="PMA Recipe" InputType="RecipeSelection" Parameter="PMA"    Min="0" Max="999999"  />
      <Item Name="PMBRecipe" DisplayName="PMB Recipe" InputType="RecipeSelection" Parameter="PMB"    Min="0" Max="999999"  />

      <Item Name="CoolingTime" DisplayName="Cooling Time(s)" InputType="NumInput"   Min="0" Max="360"  />

    </Catalog>
  </TableSequenceFormat>

  <TableSequenceData RecipeVersion="EfemDual" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
    <Step></Step>
  </TableSequenceData>
  <TableRecipeSchema>
    <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
      <xs:simpleType name="booleanType">
        <xs:restriction base="xs:string">
          <xs:enumeration value="0" />
          <xs:enumeration value="1" />
          <xs:enumeration value="False" />
          <xs:enumeration value="True" />
          <xs:enumeration value="false" />
          <xs:enumeration value="true" />
        </xs:restriction>
      </xs:simpleType>
      <xs:element name="TableSequenceData">
        <xs:complexType>
          <xs:sequence>
            <xs:element maxOccurs="unbounded" name="Step">

            </xs:element>
          </xs:sequence>
          <xs:attribute name="RecipeVersion" type="xs:string" fixed="PeeTwo" use="required" />
          <xs:attribute name="CreatedBy" type="xs:string" use="required" />
          <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
          <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
          <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
          <xs:attribute name="Barcode" type="xs:string" use="required" />
          <xs:attribute name="Description" type="xs:string" use="required" />
        </xs:complexType>
      </xs:element>
    </xs:schema>
  </TableRecipeSchema>
  <Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
</Aitex>