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Mars200
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Mars
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EfemDualRT
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Config
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EquipmentVariables.xml

EquipmentVariables.xml 415 KB
文件歷史 原始文件

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
  1. <?xml version="1.0"?>
    2. 

  2. <EquipmentVariables xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   <SystemInfo clockFormat="yyMMddHHmmss" traceSampleMax="20" traceMaxCount="5" supportValidIpRestrict="false" validIps="" name="EfemDual" version="3.6" />
    4. 

  4.   <CommunicationInfo remoteIpAddress="127.0.0.1" port="5000" supportHeartCheck="true" heartInterval="5" />
    5. 

  5.   <StatusVariables>
    6. 

  6.     <StatusVariable id="1" valueType="List" logicalName="AlarmsEnabled" eventTrigger="" units="" />
    7. 

  7.     <StatusVariable id="2" valueType="List" logicalName="AlarmsSet" eventTrigger="" units="" />
    8. 

  8.     <StatusVariable id="3" valueType="Ascii" logicalName="Clock" eventTrigger="" units="" />
    9. 

  9.     <StatusVariable id="4" valueType="U4" logicalName="ControlState" eventTrigger="" units="" />
    10. 

  10.     <StatusVariable id="5" valueType="List" logicalName="EventsEnabled" eventTrigger="" units="" />
    11. 

  11.     <StatusVariable id="6" valueType="Ascii" logicalName="PPExecName" eventTrigger="" units="" />
    12. 

  12.     <StatusVariable id="7" valueType="U1" logicalName="PreviousProcessState" eventTrigger="" units="" />
    13. 

  13.     <StatusVariable id="8" valueType="U1" logicalName="ProcessState" eventTrigger="" units="" />
    14. 

  14.     <StatusVariable id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" units="" />
    15. 

  15.     <StatusVariable id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" units="" />
    16. 

  16.     <StatusVariable id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" units="" />
    17. 

  17.     <StatusVariable id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" units="" />
    18. 

  18.     <StatusVariable id="13" valueType="Ascii" logicalName="SpoolState" eventTrigger="" units="" />
    19. 

  19.     <StatusVariable id="14" valueType="Ascii" logicalName="SpoolSubstate" eventTrigger="" units="" />
    20. 

  20.     <StatusVariable id="10101001" valueType="Ascii" logicalName="CJQueue_Space" eventTrigger="" units="" />
    21. 

  21.     <StatusVariable id="10101002" valueType="Ascii" logicalName="PJQueue_Space" eventTrigger="" units="" />
    22. 

  22.     <StatusVariable id="10101003" valueType="Boolean" logicalName="System.HasActiveAlarm" eventTrigger="" units="" />
    23. 

  23.     <StatusVariable id="10101004" valueType="Boolean" logicalName="System.IsAlarm" eventTrigger="" units="" />
    24. 

  24.     <StatusVariable id="10101005" valueType="Boolean" logicalName="System.IsAutoRunning" eventTrigger="" units="" />
    25. 

  25.     <StatusVariable id="10101006" valueType="Boolean" logicalName="System.IsBusy" eventTrigger="" units="" />
    26. 

  26.     <StatusVariable id="10101007" valueType="Boolean" logicalName="System.IsIdle" eventTrigger="" units="" />
    27. 

  27.     <StatusVariable id="10101008" valueType="Boolean" logicalName="System.IsSpoolingEnable" eventTrigger="" units="" />
    28. 

  28.     <StatusVariable id="10101009" valueType="Ascii" logicalName="System.SpoolingState" eventTrigger="" units="" />
    29. 

  29.     <StatusVariable id="10101010" valueType="Boolean" logicalName="System.IsAutoMode" eventTrigger="" units="" />
    30. 

  30.     <StatusVariable id="10101011" valueType="Boolean" logicalName="System.IsConnectedWithHost" eventTrigger="" units="" />
    31. 

  31.     <StatusVariable id="10101012" valueType="Ascii" logicalName="System.EquipmentMode" eventTrigger="" units="" />
    32. 

  32.     <StatusVariable id="10101013" valueType="Ascii" logicalName="System.EquipmentStatus" eventTrigger="" units="" />
    33. 

  33.     <StatusVariable id="10201001" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.ControlTcFeedback" eventTrigger="" units="" />
    34. 

  34.     <StatusVariable id="10201002" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.ControlTcSetPoint" eventTrigger="" units="" />
    35. 

  35.     <StatusVariable id="10201003" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.ControlTcSetPointView" eventTrigger="" units="" />
    36. 

  36.     <StatusVariable id="10201004" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.CoolantInletTempFeedback" eventTrigger="" units="" />
    37. 

  37.     <StatusVariable id="10201005" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.CoolantOutletTempFeedback" eventTrigger="" units="" />
    38. 

  38.     <StatusVariable id="10201006" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsControlTcBroken" eventTrigger="" units="" />
    39. 

  39.     <StatusVariable id="10201007" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsMonitorTcBroken" eventTrigger="" units="" />
    40. 

  40.     <StatusVariable id="10201008" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsPowerOnFeedback" eventTrigger="" units="" />
    41. 

  41.     <StatusVariable id="10201009" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsPowerOnSetPoint" eventTrigger="" units="" />
    42. 

  42.     <StatusVariable id="10201010" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsTcDeviation" eventTrigger="" units="" />
    43. 

  43.     <StatusVariable id="10201011" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.MonitorTcFeedback" eventTrigger="" units="" />
    44. 

  44.     <StatusVariable id="10202001" valueType="Boolean" logicalName="System.EFEM.AirErrorForRobot" eventTrigger="" units="" />
    45. 

  45.     <StatusVariable id="10202002" valueType="Boolean" logicalName="System.EFEM.DoorOpen" eventTrigger="" units="" />
    46. 

  46.     <StatusVariable id="10202003" valueType="Boolean" logicalName="System.EFEM.EmoAlarm" eventTrigger="" units="" />
    47. 

  47.     <StatusVariable id="10202004" valueType="Boolean" logicalName="System.EFEM.FFUAlarm" eventTrigger="" units="" />
    48. 

  48.     <StatusVariable id="10202005" valueType="Boolean" logicalName="System.EFEM.IonizerAlarm" eventTrigger="" units="" />
    49. 

  49.     <StatusVariable id="10202006" valueType="Boolean" logicalName="System.EFEM.IsMaintain" eventTrigger="" units="" />
    50. 

  50.     <StatusVariable id="10202007" valueType="Boolean" logicalName="System.EFEM.CompressedAirPressureAlarm" eventTrigger="" units="" />
    51. 

  51.     <StatusVariable id="10202008" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting1Alarm" eventTrigger="" units="" />
    52. 

  52.     <StatusVariable id="10202009" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting2Alarm" eventTrigger="" units="" />
    53. 

  53.     <StatusVariable id="10202010" valueType="Boolean" logicalName="System.EFEM.DrivePowerAlarm" eventTrigger="" units="" />
    54. 

  54.     <StatusVariable id="10202011" valueType="Boolean" logicalName="System.EFEM.FlowGaugeWarning" eventTrigger="" units="" />
    55. 

  55.     <StatusVariable id="10202012" valueType="Boolean" logicalName="System.EFEM.VacuumSourcePressureAlarm" eventTrigger="" units="" />
    56. 

  56.     <StatusVariable id="10202013" valueType="Boolean" logicalName="System.EFEM.WaterLeakWarning" eventTrigger="" units="" />
    57. 

  57.     <StatusVariable id="10203001" valueType="Boolean" logicalName="System.io.IsConnected" eventTrigger="" units="" />
    58. 

  58.     <StatusVariable id="10204001" valueType="F8" logicalName="System.HeaterBuffer.Temperature" eventTrigger="" units="" />
    59. 

  59.     <StatusVariable id="10205001" valueType="Boolean" logicalName="System.SensorBuffer_AControlTCBrokenAlarm.Value" eventTrigger="" units="" />
    60. 

  60.     <StatusVariable id="10206001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATFinished.Value" eventTrigger="" units="" />
    61. 

  61.     <StatusVariable id="10207001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATRunning.Value" eventTrigger="" units="" />
    62. 

  62.     <StatusVariable id="10208001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATStart_Fb.Value" eventTrigger="" units="" />
    63. 

  63.     <StatusVariable id="10209001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATStop_Fb.Value" eventTrigger="" units="" />
    64. 

  64.     <StatusVariable id="10210001" valueType="Boolean" logicalName="System.SensorBuffer_AMonitorTCBrokenAlarm.Value" eventTrigger="" units="" />
    65. 

  65.     <StatusVariable id="10211001" valueType="Boolean" logicalName="System.SensorBuffer_ATCDeviationOutOfRange.Value" eventTrigger="" units="" />
    66. 

  66.     <StatusVariable id="10212001" valueType="Boolean" logicalName="System.SensorBufferABigWaferProtrusion.Value" eventTrigger="" units="" />
    67. 

  67.     <StatusVariable id="10213001" valueType="Boolean" logicalName="System.SensorBufferBBigWaferProtrusion.Value" eventTrigger="" units="" />
    68. 

  68.     <StatusVariable id="10214001" valueType="Boolean" logicalName="System.SensorCDAPressureSW.Value" eventTrigger="" units="" />
    69. 

  69.     <StatusVariable id="10215001" valueType="Boolean" logicalName="System.SensorEFEMSidePlanClosed.Value" eventTrigger="" units="" />
    70. 

  70.     <StatusVariable id="10216001" valueType="Boolean" logicalName="System.SensorINONormal.Value" eventTrigger="" units="" />
    71. 

  71.     <StatusVariable id="10217001" valueType="Boolean" logicalName="System.SensorLowArmPressure.Value" eventTrigger="" units="" />
    72. 

  72.     <StatusVariable id="10218001" valueType="Boolean" logicalName="System.SensorTMBufferOTSW.Value" eventTrigger="" units="" />
    73. 

  73.     <StatusVariable id="10219001" valueType="Boolean" logicalName="System.SensorTMFFUNormal.Value" eventTrigger="" units="" />
    74. 

  74.     <StatusVariable id="10220001" valueType="Boolean" logicalName="System.SensorTMInSafety.Value" eventTrigger="" units="" />
    75. 

  75.     <StatusVariable id="10221001" valueType="Boolean" logicalName="System.SensorTMPowerOn.Value" eventTrigger="" units="" />
    76. 

  76.     <StatusVariable id="10222001" valueType="Boolean" logicalName="System.SensorTMRobotAlarm.Value" eventTrigger="" units="" />
    77. 

  77.     <StatusVariable id="10223001" valueType="Boolean" logicalName="System.SensorUpArmPressure.Value" eventTrigger="" units="" />
    78. 

  78.     <StatusVariable id="10224001" valueType="Boolean" logicalName="System.SensorVaccumPressureSW.Value" eventTrigger="" units="" />
    79. 

  79.     <StatusVariable id="10225001" valueType="Boolean" logicalName="System.SensorWaterFlowSW.Value" eventTrigger="" units="" />
    80. 

  80.     <StatusVariable id="10226001" valueType="Boolean" logicalName="System.SensorWaterLeakSW.Value" eventTrigger="" units="" />
    81. 

  81.     <StatusVariable id="10227001" valueType="Boolean" logicalName="System.SensorTMSideDoorClosed.Value" eventTrigger="" units="" />
    82. 

  82.     <StatusVariable id="10228001" valueType="Boolean" logicalName="System.SensorWaterInletValve.Value" eventTrigger="" units="" />
    83. 

  83.     <StatusVariable id="10301001" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.SetPoint" eventTrigger="" units="" />
    84. 

  84.     <StatusVariable id="10301002" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.Status" eventTrigger="" units="" />
    85. 

  85.     <StatusVariable id="20101001" valueType="Ascii" logicalName="LP1.CasstleType" eventTrigger="" units="" />
    86. 

  86.     <StatusVariable id="20101002" valueType="Ascii" logicalName="LP1.InfoPadCarrierIndex" eventTrigger="" units="" />
    87. 

  87.     <StatusVariable id="20101003" valueType="Ascii" logicalName="LP1.intAccessMode" eventTrigger="" units="" />
    88. 

  88.     <StatusVariable id="20101004" valueType="Ascii" logicalName="LP1.intAccessStatus" eventTrigger="" units="" />
    89. 

  89.     <StatusVariable id="20101005" valueType="Ascii" logicalName="LP1.intAssociationState" eventTrigger="" units="" />
    90. 

  90.     <StatusVariable id="20101006" valueType="Ascii" logicalName="LP1.intCarrierIDStatus" eventTrigger="" units="" />
    91. 

  91.     <StatusVariable id="20101007" valueType="Ascii" logicalName="LP1.intReserveState" eventTrigger="" units="" />
    92. 

  92.     <StatusVariable id="20101008" valueType="Ascii" logicalName="LP1.intSlotMapStatus" eventTrigger="" units="" />
    93. 

  93.     <StatusVariable id="20101009" valueType="Ascii" logicalName="LP1.intTransferState" eventTrigger="" units="" />
    94. 

  94.     <StatusVariable id="20101010" valueType="Boolean" logicalName="LP1.IsClamped" eventTrigger="" units="" />
    95. 

  95.     <StatusVariable id="20101011" valueType="Boolean" logicalName="LP1.IsDocked" eventTrigger="" units="" />
    96. 

  96.     <StatusVariable id="20101012" valueType="Boolean" logicalName="LP1.IsDoorOpen" eventTrigger="" units="" />
    97. 

  97.     <StatusVariable id="20101013" valueType="Boolean" logicalName="LP1.IsError" eventTrigger="" units="" />
    98. 

  98.     <StatusVariable id="20101014" valueType="Boolean" logicalName="LP1.IsMapped" eventTrigger="" units="" />
    99. 

  99.     <StatusVariable id="20101015" valueType="Boolean" logicalName="LP1.IsOnline" eventTrigger="" units="" />
    100. 

  100.     <StatusVariable id="20101016" valueType="Boolean" logicalName="LP1.IsPlaced" eventTrigger="" units="" />
    101. 

  101.     <StatusVariable id="20101017" valueType="Boolean" logicalName="LP1.IsPresent" eventTrigger="" units="" />
    102. 

  102.     <StatusVariable id="20101018" valueType="Boolean" logicalName="LP1.IsWaferProtrude" eventTrigger="" units="" />
    103. 

  103.     <StatusVariable id="20101019" valueType="Boolean" logicalName="LP1.LoadportBusy" eventTrigger="" units="" />
    104. 

  104.     <StatusVariable id="20101020" valueType="Boolean" logicalName="LP1.JobDone" eventTrigger="" units="" />
    105. 

  105.     <StatusVariable id="30101001" valueType="Ascii" logicalName="LP2.CasstleType" eventTrigger="" units="" />
    106. 

  106.     <StatusVariable id="30101002" valueType="Ascii" logicalName="LP2.InfoPadCarrierIndex" eventTrigger="" units="" />
    107. 

  107.     <StatusVariable id="30101003" valueType="Ascii" logicalName="LP2.intAccessMode" eventTrigger="" units="" />
    108. 

  108.     <StatusVariable id="30101004" valueType="Ascii" logicalName="LP2.intAccessStatus" eventTrigger="" units="" />
    109. 

  109.     <StatusVariable id="30101005" valueType="Ascii" logicalName="LP2.intAssociationState" eventTrigger="" units="" />
    110. 

  110.     <StatusVariable id="30101006" valueType="Ascii" logicalName="LP2.intCarrierIDStatus" eventTrigger="" units="" />
    111. 

  111.     <StatusVariable id="30101007" valueType="Ascii" logicalName="LP2.intReserveState" eventTrigger="" units="" />
    112. 

  112.     <StatusVariable id="30101008" valueType="Ascii" logicalName="LP2.intSlotMapStatus" eventTrigger="" units="" />
    113. 

  113.     <StatusVariable id="30101009" valueType="Ascii" logicalName="LP2.intTransferState" eventTrigger="" units="" />
    114. 

  114.     <StatusVariable id="30101010" valueType="Boolean" logicalName="LP2.IsClamped" eventTrigger="" units="" />
    115. 

  115.     <StatusVariable id="30101011" valueType="Boolean" logicalName="LP2.IsDocked" eventTrigger="" units="" />
    116. 

  116.     <StatusVariable id="30101012" valueType="Boolean" logicalName="LP2.IsDoorOpen" eventTrigger="" units="" />
    117. 

  117.     <StatusVariable id="30101013" valueType="Boolean" logicalName="LP2.IsError" eventTrigger="" units="" />
    118. 

  118.     <StatusVariable id="30101014" valueType="Boolean" logicalName="LP2.IsMapped" eventTrigger="" units="" />
    119. 

  119.     <StatusVariable id="30101015" valueType="Boolean" logicalName="LP2.IsOnline" eventTrigger="" units="" />
    120. 

  120.     <StatusVariable id="30101016" valueType="Boolean" logicalName="LP2.IsPlaced" eventTrigger="" units="" />
    121. 

  121.     <StatusVariable id="30101017" valueType="Boolean" logicalName="LP2.IsPresent" eventTrigger="" units="" />
    122. 

  122.     <StatusVariable id="30101018" valueType="Boolean" logicalName="LP2.IsWaferProtrude" eventTrigger="" units="" />
    123. 

  123.     <StatusVariable id="30101019" valueType="Boolean" logicalName="LP2.LoadportBusy" eventTrigger="" units="" />
    124. 

  124.     <StatusVariable id="30101020" valueType="Boolean" logicalName="LP2.JobDone" eventTrigger="" units="" />
    125. 

  125.     <StatusVariable id="40101001" valueType="Ascii" logicalName="LP3.CasstleType" eventTrigger="" units="" />
    126. 

  126.     <StatusVariable id="40101002" valueType="Ascii" logicalName="LP3.InfoPadCarrierIndex" eventTrigger="" units="" />
    127. 

  127.     <StatusVariable id="40101003" valueType="Ascii" logicalName="LP3.intAccessMode" eventTrigger="" units="" />
    128. 

  128.     <StatusVariable id="40101004" valueType="Ascii" logicalName="LP3.intAccessStatus" eventTrigger="" units="" />
    129. 

  129.     <StatusVariable id="40101005" valueType="Ascii" logicalName="LP3.intAssociationState" eventTrigger="" units="" />
    130. 

  130.     <StatusVariable id="40101006" valueType="Ascii" logicalName="LP3.intCarrierIDStatus" eventTrigger="" units="" />
    131. 

  131.     <StatusVariable id="40101007" valueType="Ascii" logicalName="LP3.intReserveState" eventTrigger="" units="" />
    132. 

  132.     <StatusVariable id="40101008" valueType="Ascii" logicalName="LP3.intSlotMapStatus" eventTrigger="" units="" />
    133. 

  133.     <StatusVariable id="40101009" valueType="Ascii" logicalName="LP3.intTransferState" eventTrigger="" units="" />
    134. 

  134.     <StatusVariable id="40101010" valueType="Boolean" logicalName="LP3.IsClamped" eventTrigger="" units="" />
    135. 

  135.     <StatusVariable id="40101011" valueType="Boolean" logicalName="LP3.IsDocked" eventTrigger="" units="" />
    136. 

  136.     <StatusVariable id="40101012" valueType="Boolean" logicalName="LP3.IsDoorOpen" eventTrigger="" units="" />
    137. 

  137.     <StatusVariable id="40101013" valueType="Boolean" logicalName="LP3.IsError" eventTrigger="" units="" />
    138. 

  138.     <StatusVariable id="40101014" valueType="Boolean" logicalName="LP3.IsMapped" eventTrigger="" units="" />
    139. 

  139.     <StatusVariable id="40101015" valueType="Boolean" logicalName="LP3.IsOnline" eventTrigger="" units="" />
    140. 

  140.     <StatusVariable id="40101016" valueType="Boolean" logicalName="LP3.IsPlaced" eventTrigger="" units="" />
    141. 

  141.     <StatusVariable id="40101017" valueType="Boolean" logicalName="LP3.IsPresent" eventTrigger="" units="" />
    142. 

  142.     <StatusVariable id="40101018" valueType="Boolean" logicalName="LP3.IsWaferProtrude" eventTrigger="" units="" />
    143. 

  143.     <StatusVariable id="40101019" valueType="Boolean" logicalName="LP3.LoadportBusy" eventTrigger="" units="" />
    144. 

  144.     <StatusVariable id="150101001" valueType="Ascii" logicalName="TMRobot.RobotSpeed" eventTrigger="" units="" />
    145. 

  145.     <StatusVariable id="170101001" valueType="Boolean" logicalName="EFEM.IsConnected" eventTrigger="" units="" />
    146. 

  146.     <StatusVariable id="170101002" valueType="Boolean" logicalName="EFEM.IsError" eventTrigger="" units="" />
    147. 

  147.     <StatusVariable id="170101003" valueType="Boolean" logicalName="EFEM.IsHomed" eventTrigger="" units="" />
    148. 

  148.     <StatusVariable id="170101004" valueType="Boolean" logicalName="EFEM.IsOnline" eventTrigger="" units="" />
    149. 

  149.     <StatusVariable id="180101001" valueType="Boolean" logicalName="Aligner.IsOnline" eventTrigger="" units="" />
    150. 

  150.     <StatusVariable id="190101001" valueType="Boolean" logicalName="Aligner1.IsOnline" eventTrigger="" units="" />
    151. 

  151.     <StatusVariable id="200101001" valueType="Boolean" logicalName="Aligner2.IsOnline" eventTrigger="" units="" />
    152. 

  152.     <StatusVariable id="310101001" valueType="Boolean" logicalName="LLA.IsOnline" eventTrigger="" units="" />
    153. 

  153.     <StatusVariable id="320101001" valueType="Boolean" logicalName="LLB.IsOnline" eventTrigger="" units="" />
    154. 

  154.     <StatusVariable id="430101001" valueType="Boolean" logicalName="TM.IsError" eventTrigger="" units="" />
    155. 

  155.     <StatusVariable id="430101002" valueType="Boolean" logicalName="TM.IsHomed" eventTrigger="" units="" />
    156. 

  156.     <StatusVariable id="430101003" valueType="Boolean" logicalName="TM.IsOnline" eventTrigger="" units="" />
    157. 

  157.     <StatusVariable id="430202001" valueType="Ascii" logicalName="TM.TMRobot.CurrentReadAData" eventTrigger="" units="" />
    158. 

  158.     <StatusVariable id="430202002" valueType="Ascii" logicalName="TM.TMRobot.CurrentReadSpeedData" eventTrigger="" units="" />
    159. 

  159.     <StatusVariable id="430202003" valueType="Boolean" logicalName="TM.TMRobot.IsLeftArmPressureSensorON" eventTrigger="" units="" />
    160. 

  160.     <StatusVariable id="430202004" valueType="Boolean" logicalName="TM.TMRobot.IsRightArmPressureSensorON" eventTrigger="" units="" />
    161. 

  161.     <StatusVariable id="430202005" valueType="Ascii" logicalName="TM.TMRobot.ReadPosLeftArmPostion" eventTrigger="" units="" />
    162. 

  162.     <StatusVariable id="430202006" valueType="F8" logicalName="TM.TMRobot.CurrentArm1Position" eventTrigger="" units="" />
    163. 

  163.     <StatusVariable id="430202007" valueType="F8" logicalName="TM.TMRobot.CurrentArm2Position" eventTrigger="" units="" />
    164. 

  164.     <StatusVariable id="430202008" valueType="F8" logicalName="TM.TMRobot.CurrentExtensionPosition" eventTrigger="" units="" />
    165. 

  165.     <StatusVariable id="430202009" valueType="F8" logicalName="TM.TMRobot.CurrentThetaPosition" eventTrigger="" units="" />
    166. 

  166.     <StatusVariable id="430202010" valueType="F8" logicalName="TM.TMRobot.CurrentZPosition" eventTrigger="" units="" />
    167. 

  167.     <StatusVariable id="430202011" valueType="Boolean" logicalName="TM.TMRobot.IsCommandExecutionReady" eventTrigger="" units="" />
    168. 

  168.     <StatusVariable id="430202012" valueType="Boolean" logicalName="TM.TMRobot.IsControllerBatteryLow" eventTrigger="" units="" />
    169. 

  169.     <StatusVariable id="430202013" valueType="Boolean" logicalName="TM.TMRobot.IsErrorOccurred" eventTrigger="" units="" />
    170. 

  170.     <StatusVariable id="430202014" valueType="Boolean" logicalName="TM.TMRobot.IsGrippedBlade1" eventTrigger="" units="" />
    171. 

  171.     <StatusVariable id="430202015" valueType="Boolean" logicalName="TM.TMRobot.IsGrippedBlade2" eventTrigger="" units="" />
    172. 

  172.     <StatusVariable id="430202016" valueType="Boolean" logicalName="TM.TMRobot.IsManipulatorBatteryLow" eventTrigger="" units="" />
    173. 

  173.     <StatusVariable id="430202017" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock1" eventTrigger="" units="" />
    174. 

  174.     <StatusVariable id="430202018" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock2" eventTrigger="" units="" />
    175. 

  175.     <StatusVariable id="430202019" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock3" eventTrigger="" units="" />
    176. 

  176.     <StatusVariable id="430202020" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock4" eventTrigger="" units="" />
    177. 

  177.     <StatusVariable id="430202021" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock5" eventTrigger="" units="" />
    178. 

  178.     <StatusVariable id="430202022" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock6" eventTrigger="" units="" />
    179. 

  179.     <StatusVariable id="430202023" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock7" eventTrigger="" units="" />
    180. 

  180.     <StatusVariable id="430202024" valueType="Boolean" logicalName="TM.TMRobot.IsPermittedInterlock8" eventTrigger="" units="" />
    181. 

  181.     <StatusVariable id="430202025" valueType="Boolean" logicalName="TM.TMRobot.IsServoON" eventTrigger="" units="" />
    182. 

  182.     <StatusVariable id="430202026" valueType="Boolean" logicalName="TM.TMRobot.IsWaferPresenceOnBlade1" eventTrigger="" units="" />
    183. 

  183.     <StatusVariable id="430202027" valueType="Boolean" logicalName="TM.TMRobot.IsWaferPresenceOnBlade2" eventTrigger="" units="" />
    184. 

  184.     <StatusVariable id="440101001" valueType="Boolean" logicalName="Cooling1.IsOnline" eventTrigger="" units="" />
    185. 

  185.     <StatusVariable id="450101001" valueType="Boolean" logicalName="Cooling2.IsOnline" eventTrigger="" units="" />
    186. 

  186.     <StatusVariable id="620101001" valueType="Boolean" logicalName="PMA.BiasRf1.CommunicationStatus" eventTrigger="" units="" />
    187. 

  187.     <StatusVariable id="620101002" valueType="F8" logicalName="PMA.BiasRf1.ForwardPower" eventTrigger="" units="" />
    188. 

  188.     <StatusVariable id="620101003" valueType="F8" logicalName="PMA.BiasRf1.Frequency" eventTrigger="" units="" />
    189. 

  189.     <StatusVariable id="620101004" valueType="F8" logicalName="PMA.BiasRf1.PowerSetPoint" eventTrigger="" units="" />
    190. 

  190.     <StatusVariable id="620101005" valueType="F8" logicalName="PMA.BiasRf1.PulsingDutyCycle" eventTrigger="" units="" />
    191. 

  191.     <StatusVariable id="620101006" valueType="F8" logicalName="PMA.BiasRf1.PulsingFrequency" eventTrigger="" units="" />
    192. 

  192.     <StatusVariable id="620101007" valueType="F8" logicalName="PMA.BiasRf1.ReflectPower" eventTrigger="" units="" />
    193. 

  193.     <StatusVariable id="620201001" valueType="F8" logicalName="PMA.IoHeater.ForelineHeater.ControlTcFeedback" eventTrigger="" units="" />
    194. 

  194.     <StatusVariable id="620201002" valueType="F8" logicalName="PMA.IoHeater.ForelineHeater.ControlTcSetPoint" eventTrigger="" units="" />
    195. 

  195.     <StatusVariable id="620201003" valueType="F8" logicalName="PMA.IoHeater.ForelineHeater.ControlTcSetPointView" eventTrigger="" units="" />
    196. 

  196.     <StatusVariable id="620201004" valueType="F8" logicalName="PMA.IoHeater.ForelineHeater.CoolantInletTempFeedback" eventTrigger="" units="" />
    197. 

  197.     <StatusVariable id="620201005" valueType="F8" logicalName="PMA.IoHeater.ForelineHeater.CoolantOutletTempFeedback" eventTrigger="" units="" />
    198. 

  198.     <StatusVariable id="620201006" valueType="Boolean" logicalName="PMA.IoHeater.ForelineHeater.IsControlTcBroken" eventTrigger="" units="" />
    199. 

  199.     <StatusVariable id="620201007" valueType="Boolean" logicalName="PMA.IoHeater.ForelineHeater.IsMonitorTcBroken" eventTrigger="" units="" />
    200. 

  200.     <StatusVariable id="620201008" valueType="Boolean" logicalName="PMA.IoHeater.ForelineHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    201. 

  201.     <StatusVariable id="620201009" valueType="Boolean" logicalName="PMA.IoHeater.ForelineHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    202. 

  202.     <StatusVariable id="620201010" valueType="Boolean" logicalName="PMA.IoHeater.ForelineHeater.IsTcDeviation" eventTrigger="" units="" />
    203. 

  203.     <StatusVariable id="620201011" valueType="F8" logicalName="PMA.IoHeater.ForelineHeater.MonitorTcFeedback" eventTrigger="" units="" />
    204. 

  204.     <StatusVariable id="620202001" valueType="F8" logicalName="PMA.BiasRf1Match.C1" eventTrigger="" units="" />
    205. 

  205.     <StatusVariable id="620202002" valueType="F8" logicalName="PMA.BiasRf1Match.C2" eventTrigger="" units="" />
    206. 

  206.     <StatusVariable id="620202003" valueType="Ascii" logicalName="PMA.BiasRf1Match.MatchProcessMode" eventTrigger="" units="" />
    207. 

  207.     <StatusVariable id="620202004" valueType="Ascii" logicalName="PMA.BiasRf1Match.VPP" eventTrigger="" units="" />
    208. 

  208.     <StatusVariable id="620202005" valueType="F8" logicalName="PMA.BiasRf1Match.LoadPosition1" eventTrigger="" units="" />
    209. 

  209.     <StatusVariable id="620202006" valueType="F8" logicalName="PMA.BiasRf1Match.LoadPosition2" eventTrigger="" units="" />
    210. 

  210.     <StatusVariable id="620202007" valueType="F8" logicalName="PMA.BiasRf1Match.TunePosition1" eventTrigger="" units="" />
    211. 

  211.     <StatusVariable id="620202008" valueType="F8" logicalName="PMA.BiasRf1Match.TunePosition2" eventTrigger="" units="" />
    212. 

  212.     <StatusVariable id="620203001" valueType="Boolean" logicalName="PMA.BiasRf2.CommunicationStatus" eventTrigger="" units="" />
    213. 

  213.     <StatusVariable id="620203002" valueType="F8" logicalName="PMA.BiasRf2.ForwardPower" eventTrigger="" units="" />
    214. 

  214.     <StatusVariable id="620203003" valueType="F8" logicalName="PMA.BiasRf2.Frequency" eventTrigger="" units="" />
    215. 

  215.     <StatusVariable id="620203004" valueType="F8" logicalName="PMA.BiasRf2.PowerSetPoint" eventTrigger="" units="" />
    216. 

  216.     <StatusVariable id="620203005" valueType="F8" logicalName="PMA.BiasRf2.PulsingDutyCycle" eventTrigger="" units="" />
    217. 

  217.     <StatusVariable id="620203006" valueType="F8" logicalName="PMA.BiasRf2.PulsingFrequency" eventTrigger="" units="" />
    218. 

  218.     <StatusVariable id="620203007" valueType="F8" logicalName="PMA.BiasRf2.ReflectPower" eventTrigger="" units="" />
    219. 

  219.     <StatusVariable id="620204001" valueType="F8" logicalName="PMA.BiasRf2Match.C1" eventTrigger="" units="" />
    220. 

  220.     <StatusVariable id="620204002" valueType="F8" logicalName="PMA.BiasRf2Match.C2" eventTrigger="" units="" />
    221. 

  221.     <StatusVariable id="620204003" valueType="Ascii" logicalName="PMA.BiasRf2Match.MatchProcessMode" eventTrigger="" units="" />
    222. 

  222.     <StatusVariable id="620204004" valueType="Ascii" logicalName="PMA.BiasRf2Match.VPP" eventTrigger="" units="" />
    223. 

  223.     <StatusVariable id="620204005" valueType="F8" logicalName="PMA.BiasRf2Match.LoadPosition1" eventTrigger="" units="" />
    224. 

  224.     <StatusVariable id="620204006" valueType="F8" logicalName="PMA.BiasRf2Match.LoadPosition2" eventTrigger="" units="" />
    225. 

  225.     <StatusVariable id="620204007" valueType="F8" logicalName="PMA.BiasRf2Match.TunePosition1" eventTrigger="" units="" />
    226. 

  226.     <StatusVariable id="620204008" valueType="F8" logicalName="PMA.BiasRf2Match.TunePosition2" eventTrigger="" units="" />
    227. 

  227.     <StatusVariable id="620205001" valueType="Ascii" logicalName="PMA.BigWafer" eventTrigger="" units="" />
    228. 

  228.     <StatusVariable id="620205002" valueType="F8" logicalName="PMA.ChamberPressure" eventTrigger="" units="" />
    229. 

  229.     <StatusVariable id="620205003" valueType="Boolean" logicalName="PMA.IsAlarm" eventTrigger="" units="" />
    230. 

  230.     <StatusVariable id="620205004" valueType="Boolean" logicalName="PMA.IsAtm" eventTrigger="" units="" />
    231. 

  231.     <StatusVariable id="620205005" valueType="Boolean" logicalName="PMA.IsAutoMode" eventTrigger="" units="" />
    232. 

  232.     <StatusVariable id="620205006" valueType="Boolean" logicalName="PMA.IsCDAOK" eventTrigger="" units="" />
    233. 

  233.     <StatusVariable id="620205007" valueType="Boolean" logicalName="PMA.IsCoolantInletTCOK1" eventTrigger="" units="" />
    234. 

  234.     <StatusVariable id="620205008" valueType="Boolean" logicalName="PMA.IsCoolantInletTCOK2" eventTrigger="" units="" />
    235. 

  235.     <StatusVariable id="620205009" valueType="Boolean" logicalName="PMA.IsCoolantOutletTCOK1" eventTrigger="" units="" />
    236. 

  236.     <StatusVariable id="620205010" valueType="Boolean" logicalName="PMA.IsCoolantOutletTCOK2" eventTrigger="" units="" />
    237. 

  237.     <StatusVariable id="620205011" valueType="Boolean" logicalName="PMA.IsError" eventTrigger="" units="" />
    238. 

  238.     <StatusVariable id="620205012" valueType="Boolean" logicalName="PMA.IsInMaintainMode" eventTrigger="" units="" />
    239. 

  239.     <StatusVariable id="620205013" valueType="Boolean" logicalName="PMA.IsOnline" eventTrigger="" units="" />
    240. 

  240.     <StatusVariable id="620205014" valueType="Boolean" logicalName="PMA.IsTMRbotNotExtendToPM1" eventTrigger="" units="" />
    241. 

  241.     <StatusVariable id="620205015" valueType="Boolean" logicalName="PMA.IsTMRbotNotExtendToPM2" eventTrigger="" units="" />
    242. 

  242.     <StatusVariable id="620205016" valueType="Boolean" logicalName="PMA.IsVacuum" eventTrigger="" units="" />
    243. 

  243.     <StatusVariable id="620205017" valueType="Boolean" logicalName="PMA.IsWaterLeak" eventTrigger="" units="" />
    244. 

  244.     <StatusVariable id="620205018" valueType="F8" logicalName="PMA.LeakRate" eventTrigger="" units="" />
    245. 

  245.     <StatusVariable id="620205019" valueType="Ascii" logicalName="PMA.MidWafer" eventTrigger="" units="" />
    246. 

  246.     <StatusVariable id="620205020" valueType="Ascii" logicalName="PMA.RecipeSteps" eventTrigger="" units="" />
    247. 

  247.     <StatusVariable id="620205021" valueType="Ascii" logicalName="PMA.SmallWafer" eventTrigger="" units="" />
    248. 

  248.     <StatusVariable id="620205022" valueType="Ascii" logicalName="PMA.State" eventTrigger="" units="" />
    249. 

  249.     <StatusVariable id="620205023" valueType="Ascii" logicalName="PMA.StepNo" eventTrigger="" units="" />
    250. 

  250.     <StatusVariable id="620206001" valueType="Boolean" logicalName="PMA.CHBHeatPIDATFinished.Value" eventTrigger="" units="" />
    251. 

  251.     <StatusVariable id="620207001" valueType="Boolean" logicalName="PMA.CHBHeatPIDATRunning.Value" eventTrigger="" units="" />
    252. 

  252.     <StatusVariable id="620208001" valueType="Boolean" logicalName="PMA.CHBHeatPIDATStart.Value" eventTrigger="" units="" />
    253. 

  253.     <StatusVariable id="620209001" valueType="Boolean" logicalName="PMA.CHBHeatPIDATStop.Value" eventTrigger="" units="" />
    254. 

  254.     <StatusVariable id="620210001" valueType="F8" logicalName="PMA.Chiller1.ControlTcFeedback" eventTrigger="" units="" />
    255. 

  255.     <StatusVariable id="620210002" valueType="F8" logicalName="PMA.Chiller1.ControlTcSetPoint" eventTrigger="" units="" />
    256. 

  256.     <StatusVariable id="620210003" valueType="F8" logicalName="PMA.Chiller1.CoolantInletTempFeedback" eventTrigger="" units="" />
    257. 

  257.     <StatusVariable id="620210004" valueType="F8" logicalName="PMA.Chiller1.CoolantOutletTempFeedback" eventTrigger="" units="" />
    258. 

  258.     <StatusVariable id="620210005" valueType="Boolean" logicalName="PMA.Chiller1.IsError" eventTrigger="" units="" />
    259. 

  259.     <StatusVariable id="620210006" valueType="Boolean" logicalName="PMA.Chiller1.IsOn" eventTrigger="" units="" />
    260. 

  260.     <StatusVariable id="620210007" valueType="Boolean" logicalName="PMA.Chiller1.IsRunning" eventTrigger="" units="" />
    261. 

  261.     <StatusVariable id="620210008" valueType="F8" logicalName="PMA.Chiller1.Temperature" eventTrigger="" units="" />
    262. 

  262.     <StatusVariable id="620211001" valueType="F8" logicalName="PMA.Chiller2.ControlTcFeedback" eventTrigger="" units="" />
    263. 

  263.     <StatusVariable id="620211002" valueType="F8" logicalName="PMA.Chiller2.ControlTcSetPoint" eventTrigger="" units="" />
    264. 

  264.     <StatusVariable id="620211003" valueType="F8" logicalName="PMA.Chiller2.CoolantInletTempFeedback" eventTrigger="" units="" />
    265. 

  265.     <StatusVariable id="620211004" valueType="F8" logicalName="PMA.Chiller2.CoolantOutletTempFeedback" eventTrigger="" units="" />
    266. 

  266.     <StatusVariable id="620211005" valueType="Boolean" logicalName="PMA.Chiller2.IsError" eventTrigger="" units="" />
    267. 

  267.     <StatusVariable id="620211006" valueType="Boolean" logicalName="PMA.Chiller2.IsOn" eventTrigger="" units="" />
    268. 

  268.     <StatusVariable id="620211007" valueType="Boolean" logicalName="PMA.Chiller2.IsRunning" eventTrigger="" units="" />
    269. 

  269.     <StatusVariable id="620211008" valueType="F8" logicalName="PMA.Chiller2.Temperature" eventTrigger="" units="" />
    270. 

  270.     <StatusVariable id="620212001" valueType="F8" logicalName="PMA.ForelineGauge.Value" eventTrigger="" units="" />
    271. 

  271.     <StatusVariable id="620213001" valueType="F8" logicalName="PMA.ForelineHeater.Temperature" eventTrigger="" units="" />
    272. 

  272.     <StatusVariable id="620214001" valueType="Boolean" logicalName="PMA.ForelineHeatPIDATFinished.Value" eventTrigger="" units="" />
    273. 

  273.     <StatusVariable id="620215001" valueType="Boolean" logicalName="PMA.ForelineHeatPIDATRunning.Value" eventTrigger="" units="" />
    274. 

  274.     <StatusVariable id="620216001" valueType="Boolean" logicalName="PMA.ForelineHeatPIDATStart.Value" eventTrigger="" units="" />
    275. 

  275.     <StatusVariable id="620217001" valueType="Boolean" logicalName="PMA.ForelineHeatPIDATStop.Value" eventTrigger="" units="" />
    276. 

  276.     <StatusVariable id="620218001" valueType="Boolean" logicalName="PMA.GB_Interlock.Value" eventTrigger="" units="" />
    277. 

  277.     <StatusVariable id="620219001" valueType="Boolean" logicalName="PMA.GeneratorInterlock.Value" eventTrigger="" units="" />
    278. 

  278.     <StatusVariable id="620220001" valueType="F8" logicalName="PMA.HeaterChamber1.Temperature" eventTrigger="" units="" />
    279. 

  279.     <StatusVariable id="620221001" valueType="F8" logicalName="PMA.HeaterChamber.Temperature" eventTrigger="" units="" />
    280. 

  280.     <StatusVariable id="620222001" valueType="Boolean" logicalName="PMA.io.IsConnected" eventTrigger="" units="" />
    281. 

  281.     <StatusVariable id="620223001" valueType="Boolean" logicalName="PMA.LE_OT1.Value" eventTrigger="" units="" />
    282. 

  282.     <StatusVariable id="620224001" valueType="Boolean" logicalName="PMA.LE_OT2.Value" eventTrigger="" units="" />
    283. 

  283.     <StatusVariable id="620225001" valueType="Boolean" logicalName="PMA.LEHeat1PIDATFinished.Value" eventTrigger="" units="" />
    284. 

  284.     <StatusVariable id="620226001" valueType="Boolean" logicalName="PMA.LEHeat1PIDATRunning.Value" eventTrigger="" units="" />
    285. 

  285.     <StatusVariable id="620227001" valueType="Boolean" logicalName="PMA.LEHeat1PIDATStart.Value" eventTrigger="" units="" />
    286. 

  286.     <StatusVariable id="620228001" valueType="Boolean" logicalName="PMA.LEHeat1PIDATStop.Value" eventTrigger="" units="" />
    287. 

  287.     <StatusVariable id="620229001" valueType="Boolean" logicalName="PMA.LEHeat2PIDATFinished.Value" eventTrigger="" units="" />
    288. 

  288.     <StatusVariable id="620230001" valueType="Boolean" logicalName="PMA.LEHeat2PIDATRunning.Value" eventTrigger="" units="" />
    289. 

  289.     <StatusVariable id="620231001" valueType="Boolean" logicalName="PMA.LEHeat2PIDATStart.Value" eventTrigger="" units="" />
    290. 

  290.     <StatusVariable id="620232001" valueType="Boolean" logicalName="PMA.LEHeat2PIDATStop.Value" eventTrigger="" units="" />
    291. 

  291.     <StatusVariable id="620233001" valueType="F8" logicalName="PMA.LEHeater1.Temperature" eventTrigger="" units="" />
    292. 

  292.     <StatusVariable id="620234001" valueType="F8" logicalName="PMA.LEHeater2.Temperature" eventTrigger="" units="" />
    293. 

  293.     <StatusVariable id="620235001" valueType="Boolean" logicalName="PMA.MainPump.IsError" eventTrigger="" units="" />
    294. 

  294.     <StatusVariable id="620235002" valueType="Boolean" logicalName="PMA.MainPump.IsOn" eventTrigger="" units="" />
    295. 

  295.     <StatusVariable id="620235003" valueType="Boolean" logicalName="PMA.MainPump.IsRunning" eventTrigger="" units="" />
    296. 

  296.     <StatusVariable id="620235004" valueType="F8" logicalName="PMA.MainPump.Speed" eventTrigger="" units="" />
    297. 

  297.     <StatusVariable id="620235005" valueType="F8" logicalName="PMA.MainPump.Temperature" eventTrigger="" units="" />
    298. 

  298.     <StatusVariable id="620236001" valueType="F8" logicalName="PMA.match1.C1" eventTrigger="" units="" />
    299. 

  299.     <StatusVariable id="620236002" valueType="F8" logicalName="PMA.match1.C2" eventTrigger="" units="" />
    300. 

  300.     <StatusVariable id="620236003" valueType="F8" logicalName="PMA.match1.LoadPosition1" eventTrigger="" units="" />
    301. 

  301.     <StatusVariable id="620236004" valueType="F8" logicalName="PMA.match1.LoadPosition2" eventTrigger="" units="" />
    302. 

  302.     <StatusVariable id="620236005" valueType="F8" logicalName="PMA.match1.TunePosition1" eventTrigger="" units="" />
    303. 

  303.     <StatusVariable id="620236006" valueType="F8" logicalName="PMA.match1.TunePosition2" eventTrigger="" units="" />
    304. 

  304.     <StatusVariable id="620236007" valueType="Ascii" logicalName="PMA.match1.VPP" eventTrigger="" units="" />
    305. 

  305.     <StatusVariable id="620237001" valueType="F8" logicalName="PMA.match2.C1" eventTrigger="" units="" />
    306. 

  306.     <StatusVariable id="620237002" valueType="F8" logicalName="PMA.match2.C2" eventTrigger="" units="" />
    307. 

  307.     <StatusVariable id="620237003" valueType="F8" logicalName="PMA.match2.LoadPosition1" eventTrigger="" units="" />
    308. 

  308.     <StatusVariable id="620237004" valueType="F8" logicalName="PMA.match2.LoadPosition2" eventTrigger="" units="" />
    309. 

  309.     <StatusVariable id="620237005" valueType="F8" logicalName="PMA.match2.TunePosition1" eventTrigger="" units="" />
    310. 

  310.     <StatusVariable id="620237006" valueType="F8" logicalName="PMA.match2.TunePosition2" eventTrigger="" units="" />
    311. 

  311.     <StatusVariable id="620237007" valueType="Ascii" logicalName="PMA.match2.VPP" eventTrigger="" units="" />
    312. 

  312.     <StatusVariable id="620238001" valueType="Boolean" logicalName="PMA.N2PressureOk.Value" eventTrigger="" units="" />
    313. 

  313.     <StatusVariable id="620239001" valueType="F8" logicalName="PMA.PressureGauge.Value" eventTrigger="" units="" />
    314. 

  314.     <StatusVariable id="620240001" valueType="F8" logicalName="PMA.ProcessGauge.Value" eventTrigger="" units="" />
    315. 

  315.     <StatusVariable id="620241001" valueType="F8" logicalName="PMA.Rf1.ForwardPower" eventTrigger="" units="" />
    316. 

  316.     <StatusVariable id="620241002" valueType="F8" logicalName="PMA.Rf1.Frequency" eventTrigger="" units="" />
    317. 

  317.     <StatusVariable id="620241003" valueType="F8" logicalName="PMA.Rf1.PowerSetPoint" eventTrigger="" units="" />
    318. 

  318.     <StatusVariable id="620241004" valueType="F8" logicalName="PMA.Rf1.PulsingDutyCycle" eventTrigger="" units="" />
    319. 

  319.     <StatusVariable id="620241005" valueType="F8" logicalName="PMA.Rf1.PulsingFrequency" eventTrigger="" units="" />
    320. 

  320.     <StatusVariable id="620241006" valueType="F8" logicalName="PMA.Rf1.ReflectPower" eventTrigger="" units="" />
    321. 

  321.     <StatusVariable id="620242001" valueType="F8" logicalName="PMA.Rf2.ForwardPower" eventTrigger="" units="" />
    322. 

  322.     <StatusVariable id="620242002" valueType="F8" logicalName="PMA.Rf2.Frequency" eventTrigger="" units="" />
    323. 

  323.     <StatusVariable id="620242003" valueType="F8" logicalName="PMA.Rf2.PowerSetPoint" eventTrigger="" units="" />
    324. 

  324.     <StatusVariable id="620242004" valueType="F8" logicalName="PMA.Rf2.PulsingDutyCycle" eventTrigger="" units="" />
    325. 

  325.     <StatusVariable id="620242005" valueType="F8" logicalName="PMA.Rf2.PulsingFrequency" eventTrigger="" units="" />
    326. 

  326.     <StatusVariable id="620242006" valueType="F8" logicalName="PMA.Rf2.ReflectPower" eventTrigger="" units="" />
    327. 

  327.     <StatusVariable id="620243001" valueType="Boolean" logicalName="PMA.SensorATMSwitch.Value" eventTrigger="" units="" />
    328. 

  328.     <StatusVariable id="620244001" valueType="Boolean" logicalName="PMA.SensorCHBOTSW.Value" eventTrigger="" units="" />
    329. 

  329.     <StatusVariable id="620245001" valueType="Boolean" logicalName="PMA.SensorCoolantInletTCOK1.Value" eventTrigger="" units="" />
    330. 

  330.     <StatusVariable id="620246001" valueType="Boolean" logicalName="PMA.SensorCoolantInletTCOK2.Value" eventTrigger="" units="" />
    331. 

  331.     <StatusVariable id="620247001" valueType="Boolean" logicalName="PMA.SensorCoolantOutletTCOK1.Value" eventTrigger="" units="" />
    332. 

  332.     <StatusVariable id="620248001" valueType="Boolean" logicalName="PMA.SensorCoolantOutletTCOK2.Value" eventTrigger="" units="" />
    333. 

  333.     <StatusVariable id="620249001" valueType="Boolean" logicalName="PMA.SensorTMInSafety.Value" eventTrigger="" units="" />
    334. 

  334.     <StatusVariable id="620250001" valueType="Boolean" logicalName="PMA.SensorTMRobotNotExtendToPM1.Value" eventTrigger="" units="" />
    335. 

  335.     <StatusVariable id="620251001" valueType="Boolean" logicalName="PMA.SensorTMRobotNotExtendToPM2.Value" eventTrigger="" units="" />
    336. 

  336.     <StatusVariable id="620252001" valueType="Boolean" logicalName="PMA.SensorVacSwitch.Value" eventTrigger="" units="" />
    337. 

  337.     <StatusVariable id="620253001" valueType="Boolean" logicalName="PMA.SensorWaterFlowOk1.Value" eventTrigger="" units="" />
    338. 

  338.     <StatusVariable id="620254001" valueType="Boolean" logicalName="PMA.SensorWaterFlowOk2.Value" eventTrigger="" units="" />
    339. 

  339.     <StatusVariable id="620255001" valueType="Boolean" logicalName="PMA.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    340. 

  340.     <StatusVariable id="620256001" valueType="Boolean" logicalName="PMA.SourceFan.Value" eventTrigger="" units="" />
    341. 

  341.     <StatusVariable id="620257001" valueType="Ascii" logicalName="PMA.EPD.CurrentChannel" eventTrigger="" units="" />
    342. 

  342.     <StatusVariable id="620257002" valueType="Boolean" logicalName="PMA.EPD.IsConnected" eventTrigger="" units="" />
    343. 

  343.     <StatusVariable id="620258001" valueType="Boolean" logicalName="PMA.LidClosed.Value" eventTrigger="" units="" />
    344. 

  344.     <StatusVariable id="620259001" valueType="Ascii" logicalName="PMA.ProcessedWaferCount1.Value" eventTrigger="" units="" />
    345. 

  345.     <StatusVariable id="620259002" valueType="Ascii" logicalName="PMA.ProcessedWaferCount2.Value" eventTrigger="" units="" />
    346. 

  346.     <StatusVariable id="620260001" valueType="Ascii" logicalName="PMA.ProcessTime1.Value" eventTrigger="" units="" />
    347. 

  347.     <StatusVariable id="620260002" valueType="Ascii" logicalName="PMA.ProcessTime2.Value" eventTrigger="" units="" />
    348. 

  348.     <StatusVariable id="620261001" valueType="F8" logicalName="PMA.PumpOnTime.Value" eventTrigger="" units="" />
    349. 

  349.     <StatusVariable id="620301001" valueType="F8" logicalName="PMA.IoMfc.MfcGas1.AlarmRange" eventTrigger="" units="" />
    350. 

  350.     <StatusVariable id="620301002" valueType="F8" logicalName="PMA.IoMfc.MfcGas1.AlarmTime" eventTrigger="" units="" />
    351. 

  351.     <StatusVariable id="620301003" valueType="F8" logicalName="PMA.IoMfc.MfcGas1.DefaultSetPoint" eventTrigger="" units="" />
    352. 

  352.     <StatusVariable id="620301004" valueType="F8" logicalName="PMA.IoMfc.MfcGas1.FeedBack" eventTrigger="" units="" />
    353. 

  353.     <StatusVariable id="620301005" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas1.IsEnable" eventTrigger="" units="" />
    354. 

  354.     <StatusVariable id="620301006" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas1.IsEnableAlarm" eventTrigger="" units="" />
    355. 

  355.     <StatusVariable id="620301007" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas1.IsOffline" eventTrigger="" units="" />
    356. 

  356.     <StatusVariable id="620301008" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas1.IsOutOfTolerance" eventTrigger="" units="" />
    357. 

  357.     <StatusVariable id="620301009" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas1.MfcAlarm" eventTrigger="" units="" />
    358. 

  358.     <StatusVariable id="620301010" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas1.PressureAlarm" eventTrigger="" units="" />
    359. 

  359.     <StatusVariable id="620301011" valueType="F8" logicalName="PMA.IoMfc.MfcGas1.Scale" eventTrigger="" units="" />
    360. 

  360.     <StatusVariable id="620301012" valueType="F8" logicalName="PMA.IoMfc.MfcGas1.SetPoint" eventTrigger="" units="" />
    361. 

  361.     <StatusVariable id="620302001" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber1.ControlTcFeedback" eventTrigger="" units="" />
    362. 

  362.     <StatusVariable id="620302002" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber1.ControlTcSetPoint" eventTrigger="" units="" />
    363. 

  363.     <StatusVariable id="620302003" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber1.ControlTcSetPointView" eventTrigger="" units="" />
    364. 

  364.     <StatusVariable id="620302004" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber1.CoolantInletTempFeedback" eventTrigger="" units="" />
    365. 

  365.     <StatusVariable id="620302005" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber1.CoolantOutletTempFeedback" eventTrigger="" units="" />
    366. 

  366.     <StatusVariable id="620302006" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber1.IsControlTcBroken" eventTrigger="" units="" />
    367. 

  367.     <StatusVariable id="620302007" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber1.IsMonitorTcBroken" eventTrigger="" units="" />
    368. 

  368.     <StatusVariable id="620302008" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber1.IsPowerOnFeedback" eventTrigger="" units="" />
    369. 

  369.     <StatusVariable id="620302009" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber1.IsPowerOnSetPoint" eventTrigger="" units="" />
    370. 

  370.     <StatusVariable id="620302010" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber1.IsTcDeviation" eventTrigger="" units="" />
    371. 

  371.     <StatusVariable id="620302011" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber1.MonitorTcFeedback" eventTrigger="" units="" />
    372. 

  372.     <StatusVariable id="620303001" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber.ControlTcFeedback" eventTrigger="" units="" />
    373. 

  373.     <StatusVariable id="620303002" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber.ControlTcSetPoint" eventTrigger="" units="" />
    374. 

  374.     <StatusVariable id="620303003" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber.ControlTcSetPointView" eventTrigger="" units="" />
    375. 

  375.     <StatusVariable id="620303004" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber.CoolantInletTempFeedback" eventTrigger="" units="" />
    376. 

  376.     <StatusVariable id="620303005" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber.CoolantOutletTempFeedback" eventTrigger="" units="" />
    377. 

  377.     <StatusVariable id="620303006" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber.IsControlTcBroken" eventTrigger="" units="" />
    378. 

  378.     <StatusVariable id="620303007" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber.IsMonitorTcBroken" eventTrigger="" units="" />
    379. 

  379.     <StatusVariable id="620303008" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber.IsPowerOnFeedback" eventTrigger="" units="" />
    380. 

  380.     <StatusVariable id="620303009" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber.IsPowerOnSetPoint" eventTrigger="" units="" />
    381. 

  381.     <StatusVariable id="620303010" valueType="Boolean" logicalName="PMA.IoHeater.HeaterChamber.IsTcDeviation" eventTrigger="" units="" />
    382. 

  382.     <StatusVariable id="620303011" valueType="F8" logicalName="PMA.IoHeater.HeaterChamber.MonitorTcFeedback" eventTrigger="" units="" />
    383. 

  383.     <StatusVariable id="620304011" valueType="F8" logicalName="PMA.IoHeater.LEHeater1.ControlTcFeedback" eventTrigger="" units="" />
    384. 

  384.     <StatusVariable id="620304002" valueType="F8" logicalName="PMA.IoHeater.LEHeater1.ControlTcSetPoint" eventTrigger="" units="" />
    385. 

  385.     <StatusVariable id="620304003" valueType="F8" logicalName="PMA.IoHeater.LEHeater1.ControlTcSetPointView" eventTrigger="" units="" />
    386. 

  386.     <StatusVariable id="620304004" valueType="F8" logicalName="PMA.IoHeater.LEHeater1.CoolantInletTempFeedback" eventTrigger="" units="" />
    387. 

  387.     <StatusVariable id="620304005" valueType="F8" logicalName="PMA.IoHeater.LEHeater1.CoolantOutletTempFeedback" eventTrigger="" units="" />
    388. 

  388.     <StatusVariable id="620304006" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater1.IsControlTcBroken" eventTrigger="" units="" />
    389. 

  389.     <StatusVariable id="620304007" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater1.IsMonitorTcBroken" eventTrigger="" units="" />
    390. 

  390.     <StatusVariable id="620304008" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater1.IsPowerOnFeedback" eventTrigger="" units="" />
    391. 

  391.     <StatusVariable id="620304009" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater1.IsPowerOnSetPoint" eventTrigger="" units="" />
    392. 

  392.     <StatusVariable id="620304010" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater1.IsTcDeviation" eventTrigger="" units="" />
    393. 

  393.     <StatusVariable id="620304001" valueType="F8" logicalName="PMA.IoHeater.LEHeater1.MonitorTcFeedback" eventTrigger="" units="" />
    394. 

  394.     <StatusVariable id="620305011" valueType="F8" logicalName="PMA.IoHeater.LEHeater2.ControlTcFeedback" eventTrigger="" units="" />
    395. 

  395.     <StatusVariable id="620305002" valueType="F8" logicalName="PMA.IoHeater.LEHeater2.ControlTcSetPoint" eventTrigger="" units="" />
    396. 

  396.     <StatusVariable id="620305003" valueType="F8" logicalName="PMA.IoHeater.LEHeater2.ControlTcSetPointView" eventTrigger="" units="" />
    397. 

  397.     <StatusVariable id="620305004" valueType="F8" logicalName="PMA.IoHeater.LEHeater2.CoolantInletTempFeedback" eventTrigger="" units="" />
    398. 

  398.     <StatusVariable id="620305005" valueType="F8" logicalName="PMA.IoHeater.LEHeater2.CoolantOutletTempFeedback" eventTrigger="" units="" />
    399. 

  399.     <StatusVariable id="620305006" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater2.IsControlTcBroken" eventTrigger="" units="" />
    400. 

  400.     <StatusVariable id="620305007" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater2.IsMonitorTcBroken" eventTrigger="" units="" />
    401. 

  401.     <StatusVariable id="620305008" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater2.IsPowerOnFeedback" eventTrigger="" units="" />
    402. 

  402.     <StatusVariable id="620305009" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater2.IsPowerOnSetPoint" eventTrigger="" units="" />
    403. 

  403.     <StatusVariable id="620305010" valueType="Boolean" logicalName="PMA.IoHeater.LEHeater2.IsTcDeviation" eventTrigger="" units="" />
    404. 

  404.     <StatusVariable id="620305001" valueType="F8" logicalName="PMA.IoHeater.LEHeater2.MonitorTcFeedback" eventTrigger="" units="" />
    405. 

  405.     <StatusVariable id="620401001" valueType="Boolean" logicalName="PMA.IoPressureMeter.ForelineGauge.GaugeAlarm" eventTrigger="" units="" />
    406. 

  406.     <StatusVariable id="620401002" valueType="F8" logicalName="PMA.IoPressureMeter.ForelineGauge.ProcessPressureOffset" eventTrigger="" units="" />
    407. 

  407.     <StatusVariable id="620402001" valueType="F8" logicalName="PMA.IoMfc.MfcGas2.AlarmRange" eventTrigger="" units="" />
    408. 

  408.     <StatusVariable id="620402002" valueType="F8" logicalName="PMA.IoMfc.MfcGas2.AlarmTime" eventTrigger="" units="" />
    409. 

  409.     <StatusVariable id="620402003" valueType="F8" logicalName="PMA.IoMfc.MfcGas2.DefaultSetPoint" eventTrigger="" units="" />
    410. 

  410.     <StatusVariable id="620402004" valueType="F8" logicalName="PMA.IoMfc.MfcGas2.FeedBack" eventTrigger="" units="" />
    411. 

  411.     <StatusVariable id="620402005" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas2.IsEnable" eventTrigger="" units="" />
    412. 

  412.     <StatusVariable id="620402006" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas2.IsEnableAlarm" eventTrigger="" units="" />
    413. 

  413.     <StatusVariable id="620402007" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas2.IsOffline" eventTrigger="" units="" />
    414. 

  414.     <StatusVariable id="620402008" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas2.IsOutOfTolerance" eventTrigger="" units="" />
    415. 

  415.     <StatusVariable id="620402009" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas2.MfcAlarm" eventTrigger="" units="" />
    416. 

  416.     <StatusVariable id="620402010" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas2.PressureAlarm" eventTrigger="" units="" />
    417. 

  417.     <StatusVariable id="620402011" valueType="F8" logicalName="PMA.IoMfc.MfcGas2.Scale" eventTrigger="" units="" />
    418. 

  418.     <StatusVariable id="620402012" valueType="F8" logicalName="PMA.IoMfc.MfcGas2.SetPoint" eventTrigger="" units="" />
    419. 

  419.     <StatusVariable id="620403001" valueType="F8" logicalName="PMA.IoMfc.MfcGas3.AlarmRange" eventTrigger="" units="" />
    420. 

  420.     <StatusVariable id="620403002" valueType="F8" logicalName="PMA.IoMfc.MfcGas3.AlarmTime" eventTrigger="" units="" />
    421. 

  421.     <StatusVariable id="620403003" valueType="F8" logicalName="PMA.IoMfc.MfcGas3.DefaultSetPoint" eventTrigger="" units="" />
    422. 

  422.     <StatusVariable id="620403004" valueType="F8" logicalName="PMA.IoMfc.MfcGas3.FeedBack" eventTrigger="" units="" />
    423. 

  423.     <StatusVariable id="620403005" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas3.IsEnable" eventTrigger="" units="" />
    424. 

  424.     <StatusVariable id="620403006" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas3.IsEnableAlarm" eventTrigger="" units="" />
    425. 

  425.     <StatusVariable id="620403007" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas3.IsOffline" eventTrigger="" units="" />
    426. 

  426.     <StatusVariable id="620403008" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas3.IsOutOfTolerance" eventTrigger="" units="" />
    427. 

  427.     <StatusVariable id="620403009" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas3.MfcAlarm" eventTrigger="" units="" />
    428. 

  428.     <StatusVariable id="620403010" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas3.PressureAlarm" eventTrigger="" units="" />
    429. 

  429.     <StatusVariable id="620403011" valueType="F8" logicalName="PMA.IoMfc.MfcGas3.Scale" eventTrigger="" units="" />
    430. 

  430.     <StatusVariable id="620403012" valueType="F8" logicalName="PMA.IoMfc.MfcGas3.SetPoint" eventTrigger="" units="" />
    431. 

  431.     <StatusVariable id="620404001" valueType="F8" logicalName="PMA.IoMfc.MfcGas4.AlarmRange" eventTrigger="" units="" />
    432. 

  432.     <StatusVariable id="620404002" valueType="F8" logicalName="PMA.IoMfc.MfcGas4.AlarmTime" eventTrigger="" units="" />
    433. 

  433.     <StatusVariable id="620404003" valueType="F8" logicalName="PMA.IoMfc.MfcGas4.DefaultSetPoint" eventTrigger="" units="" />
    434. 

  434.     <StatusVariable id="620404004" valueType="F8" logicalName="PMA.IoMfc.MfcGas4.FeedBack" eventTrigger="" units="" />
    435. 

  435.     <StatusVariable id="620404005" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas4.IsEnable" eventTrigger="" units="" />
    436. 

  436.     <StatusVariable id="620404006" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas4.IsEnableAlarm" eventTrigger="" units="" />
    437. 

  437.     <StatusVariable id="620404007" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas4.IsOffline" eventTrigger="" units="" />
    438. 

  438.     <StatusVariable id="620404008" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas4.IsOutOfTolerance" eventTrigger="" units="" />
    439. 

  439.     <StatusVariable id="620404009" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas4.MfcAlarm" eventTrigger="" units="" />
    440. 

  440.     <StatusVariable id="620404010" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas4.PressureAlarm" eventTrigger="" units="" />
    441. 

  441.     <StatusVariable id="620404011" valueType="F8" logicalName="PMA.IoMfc.MfcGas4.Scale" eventTrigger="" units="" />
    442. 

  442.     <StatusVariable id="620404012" valueType="F8" logicalName="PMA.IoMfc.MfcGas4.SetPoint" eventTrigger="" units="" />
    443. 

  443.     <StatusVariable id="620405001" valueType="F8" logicalName="PMA.IoMfc.MfcGas5.AlarmRange" eventTrigger="" units="" />
    444. 

  444.     <StatusVariable id="620405002" valueType="F8" logicalName="PMA.IoMfc.MfcGas5.AlarmTime" eventTrigger="" units="" />
    445. 

  445.     <StatusVariable id="620405003" valueType="F8" logicalName="PMA.IoMfc.MfcGas5.DefaultSetPoint" eventTrigger="" units="" />
    446. 

  446.     <StatusVariable id="620405004" valueType="F8" logicalName="PMA.IoMfc.MfcGas5.FeedBack" eventTrigger="" units="" />
    447. 

  447.     <StatusVariable id="620405005" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas5.IsEnable" eventTrigger="" units="" />
    448. 

  448.     <StatusVariable id="620405006" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas5.IsEnableAlarm" eventTrigger="" units="" />
    449. 

  449.     <StatusVariable id="620405007" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas5.IsOffline" eventTrigger="" units="" />
    450. 

  450.     <StatusVariable id="620405008" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas5.IsOutOfTolerance" eventTrigger="" units="" />
    451. 

  451.     <StatusVariable id="620405009" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas5.MfcAlarm" eventTrigger="" units="" />
    452. 

  452.     <StatusVariable id="620405010" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas5.PressureAlarm" eventTrigger="" units="" />
    453. 

  453.     <StatusVariable id="620405011" valueType="F8" logicalName="PMA.IoMfc.MfcGas5.Scale" eventTrigger="" units="" />
    454. 

  454.     <StatusVariable id="620405012" valueType="F8" logicalName="PMA.IoMfc.MfcGas5.SetPoint" eventTrigger="" units="" />
    455. 

  455.     <StatusVariable id="620406001" valueType="F8" logicalName="PMA.IoMfc.MfcGas6.AlarmRange" eventTrigger="" units="" />
    456. 

  456.     <StatusVariable id="620406002" valueType="F8" logicalName="PMA.IoMfc.MfcGas6.AlarmTime" eventTrigger="" units="" />
    457. 

  457.     <StatusVariable id="620406003" valueType="F8" logicalName="PMA.IoMfc.MfcGas6.DefaultSetPoint" eventTrigger="" units="" />
    458. 

  458.     <StatusVariable id="620406004" valueType="F8" logicalName="PMA.IoMfc.MfcGas6.FeedBack" eventTrigger="" units="" />
    459. 

  459.     <StatusVariable id="620406005" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas6.IsEnable" eventTrigger="" units="" />
    460. 

  460.     <StatusVariable id="620406006" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas6.IsEnableAlarm" eventTrigger="" units="" />
    461. 

  461.     <StatusVariable id="620406007" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas6.IsOffline" eventTrigger="" units="" />
    462. 

  462.     <StatusVariable id="620406008" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas6.IsOutOfTolerance" eventTrigger="" units="" />
    463. 

  463.     <StatusVariable id="620406009" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas6.MfcAlarm" eventTrigger="" units="" />
    464. 

  464.     <StatusVariable id="620406010" valueType="Boolean" logicalName="PMA.IoMfc.MfcGas6.PressureAlarm" eventTrigger="" units="" />
    465. 

  465.     <StatusVariable id="620406011" valueType="F8" logicalName="PMA.IoMfc.MfcGas6.Scale" eventTrigger="" units="" />
    466. 

  466.     <StatusVariable id="620406012" valueType="F8" logicalName="PMA.IoMfc.MfcGas6.SetPoint" eventTrigger="" units="" />
    467. 

  467.     <StatusVariable id="620501001" valueType="F8" logicalName="PMA.IoTemperatureCtrl.TemperatureControl.Chamber1Temperature" eventTrigger="" units="" />
    468. 

  468.     <StatusVariable id="620501002" valueType="F8" logicalName="PMA.IoTemperatureCtrl.TemperatureControl.Chamber2Temperature" eventTrigger="" units="" />
    469. 

  469.     <StatusVariable id="620502001" valueType="Boolean" logicalName="PMA.IoPressureMeter.PressureGauge.GaugeAlarm" eventTrigger="" units="" />
    470. 

  470.     <StatusVariable id="620502002" valueType="F8" logicalName="PMA.IoPressureMeter.PressureGauge.ProcessPressureOffset" eventTrigger="" units="" />
    471. 

  471.     <StatusVariable id="620503001" valueType="Boolean" logicalName="PMA.IoPressureMeter.ProcessGauge.GaugeAlarm" eventTrigger="" units="" />
    472. 

  472.     <StatusVariable id="620503002" valueType="F8" logicalName="PMA.IoPressureMeter.ProcessGauge.ProcessPressureOffset" eventTrigger="" units="" />
    473. 

  473.     <StatusVariable id="620601001" valueType="F8" logicalName="PMA.IoThrottleValve.ThrottleValve.ProcessPressureOffset" eventTrigger="" units="" />
    474. 

  474.     <StatusVariable id="620601002" valueType="F8" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPosition" eventTrigger="" units="" />
    475. 

  475.     <StatusVariable id="620601003" valueType="F8" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPositionSetPoint" eventTrigger="" units="" />
    476. 

  476.     <StatusVariable id="620601004" valueType="F8" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPressure" eventTrigger="" units="" />
    477. 

  477.     <StatusVariable id="620601005" valueType="F8" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPressureSetPoint" eventTrigger="" units="" />
    478. 

  478.     <StatusVariable id="620701001" valueType="Boolean" logicalName="PMA.IoValve.ValveChamberPurge.SetPoint" eventTrigger="" units="" />
    479. 

  479.     <StatusVariable id="620701002" valueType="Boolean" logicalName="PMA.IoValve.ValveChamberPurge.Status" eventTrigger="" units="" />
    480. 

  480.     <StatusVariable id="620801001" valueType="F8" logicalName="PMA.BiasRf1.RfOnTime.Value" eventTrigger="" units="" />
    481. 

  481.     <StatusVariable id="620802001" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPumping.SetPoint" eventTrigger="" units="" />
    482. 

  482.     <StatusVariable id="620802002" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPumping.Status" eventTrigger="" units="" />
    483. 

  483.     <StatusVariable id="620803001" valueType="Boolean" logicalName="PMA.IoValve.ValveFastVent.SetPoint" eventTrigger="" units="" />
    484. 

  484.     <StatusVariable id="620803002" valueType="Boolean" logicalName="PMA.IoValve.ValveFastVent.Status" eventTrigger="" units="" />
    485. 

  485.     <StatusVariable id="620804001" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    486. 

  486.     <StatusVariable id="620804002" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    487. 

  487.     <StatusVariable id="620805001" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    488. 

  488.     <StatusVariable id="620805002" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    489. 

  489.     <StatusVariable id="620806001" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    490. 

  490.     <StatusVariable id="620806002" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    491. 

  491.     <StatusVariable id="620807001" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    492. 

  492.     <StatusVariable id="620807002" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    493. 

  493.     <StatusVariable id="620808001" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    494. 

  494.     <StatusVariable id="620808002" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    495. 

  495.     <StatusVariable id="620809001" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    496. 

  496.     <StatusVariable id="620809002" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    497. 

  497.     <StatusVariable id="620810001" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    498. 

  498.     <StatusVariable id="620810002" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.Status" eventTrigger="" units="" />
    499. 

  499.     <StatusVariable id="620811001" valueType="Boolean" logicalName="PMA.IoValve.ValveProcess.SetPoint" eventTrigger="" units="" />
    500. 

  500.     <StatusVariable id="620811002" valueType="Boolean" logicalName="PMA.IoValve.ValveProcess.Status" eventTrigger="" units="" />
    501. 

  501.     <StatusVariable id="620812001" valueType="Boolean" logicalName="PMA.IoValve.ValveProcessGasFinal.SetPoint" eventTrigger="" units="" />
    502. 

  502.     <StatusVariable id="620812002" valueType="Boolean" logicalName="PMA.IoValve.ValveProcessGasFinal.Status" eventTrigger="" units="" />
    503. 

  503.     <StatusVariable id="620813001" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPumping.SetPoint" eventTrigger="" units="" />
    504. 

  504.     <StatusVariable id="620813002" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPumping.Status" eventTrigger="" units="" />
    505. 

  505.     <StatusVariable id="620901001" valueType="F8" logicalName="PMA.BiasRf2.RfOnTime.Value" eventTrigger="" units="" />
    506. 

  506.     <StatusVariable id="621001001" valueType="F8" logicalName="PMA.Rf1.RfOnTime.Value" eventTrigger="" units="" />
    507. 

  507.     <StatusVariable id="621101001" valueType="F8" logicalName="PMA.Rf2.RfOnTime.Value" eventTrigger="" units="" />
    508. 

  508.     <StatusVariable id="630101001" valueType="Ascii" logicalName="PMB.BigWafer" eventTrigger="" units="" />
    509. 

  509.     <StatusVariable id="630101002" valueType="F8" logicalName="PMB.ChamberPressure" eventTrigger="" units="" />
    510. 

  510.     <StatusVariable id="630101003" valueType="Boolean" logicalName="PMB.IsAlarm" eventTrigger="" units="" />
    511. 

  511.     <StatusVariable id="630101004" valueType="Boolean" logicalName="PMB.IsAtm" eventTrigger="" units="" />
    512. 

  512.     <StatusVariable id="630101005" valueType="Boolean" logicalName="PMB.IsAutoMode" eventTrigger="" units="" />
    513. 

  513.     <StatusVariable id="630101006" valueType="Boolean" logicalName="PMB.IsCDAOK" eventTrigger="" units="" />
    514. 

  514.     <StatusVariable id="630101007" valueType="Boolean" logicalName="PMB.IsCoolantInletTCOK1" eventTrigger="" units="" />
    515. 

  515.     <StatusVariable id="630101008" valueType="Boolean" logicalName="PMB.IsCoolantInletTCOK2" eventTrigger="" units="" />
    516. 

  516.     <StatusVariable id="630101009" valueType="Boolean" logicalName="PMB.IsCoolantOutletTCOK1" eventTrigger="" units="" />
    517. 

  517.     <StatusVariable id="630101010" valueType="Boolean" logicalName="PMB.IsCoolantOutletTCOK2" eventTrigger="" units="" />
    518. 

  518.     <StatusVariable id="630101011" valueType="Boolean" logicalName="PMB.IsError" eventTrigger="" units="" />
    519. 

  519.     <StatusVariable id="630101012" valueType="Boolean" logicalName="PMB.IsInMaintainMode" eventTrigger="" units="" />
    520. 

  520.     <StatusVariable id="630101013" valueType="Boolean" logicalName="PMB.IsOnline" eventTrigger="" units="" />
    521. 

  521.     <StatusVariable id="630101014" valueType="Boolean" logicalName="PMB.IsTMRbotNotExtendToPM1" eventTrigger="" units="" />
    522. 

  522.     <StatusVariable id="630101015" valueType="Boolean" logicalName="PMB.IsTMRbotNotExtendToPM2" eventTrigger="" units="" />
    523. 

  523.     <StatusVariable id="630101016" valueType="Boolean" logicalName="PMB.IsVacuum" eventTrigger="" units="" />
    524. 

  524.     <StatusVariable id="630101017" valueType="Boolean" logicalName="PMB.IsWaterLeak" eventTrigger="" units="" />
    525. 

  525.     <StatusVariable id="630101018" valueType="F8" logicalName="PMB.LeakRate" eventTrigger="" units="" />
    526. 

  526.     <StatusVariable id="630101019" valueType="Ascii" logicalName="PMB.MidWafer" eventTrigger="" units="" />
    527. 

  527.     <StatusVariable id="630101020" valueType="Ascii" logicalName="PMB.RecipeSteps" eventTrigger="" units="" />
    528. 

  528.     <StatusVariable id="630101021" valueType="Ascii" logicalName="PMB.SmallWafer" eventTrigger="" units="" />
    529. 

  529.     <StatusVariable id="630101022" valueType="Ascii" logicalName="PMB.State" eventTrigger="" units="" />
    530. 

  530.     <StatusVariable id="630101023" valueType="Ascii" logicalName="PMB.StepNo" eventTrigger="" units="" />
    531. 

  531.     <StatusVariable id="630201001" valueType="F8" logicalName="PMB.IoHeater.ForelineHeater.ControlTcFeedback" eventTrigger="" units="" />
    532. 

  532.     <StatusVariable id="630201002" valueType="F8" logicalName="PMB.IoHeater.ForelineHeater.ControlTcSetPoint" eventTrigger="" units="" />
    533. 

  533.     <StatusVariable id="630201003" valueType="F8" logicalName="PMB.IoHeater.ForelineHeater.ControlTcSetPointView" eventTrigger="" units="" />
    534. 

  534.     <StatusVariable id="630201004" valueType="F8" logicalName="PMB.IoHeater.ForelineHeater.CoolantInletTempFeedback" eventTrigger="" units="" />
    535. 

  535.     <StatusVariable id="630201005" valueType="F8" logicalName="PMB.IoHeater.ForelineHeater.CoolantOutletTempFeedback" eventTrigger="" units="" />
    536. 

  536.     <StatusVariable id="630201006" valueType="Boolean" logicalName="PMB.IoHeater.ForelineHeater.IsControlTcBroken" eventTrigger="" units="" />
    537. 

  537.     <StatusVariable id="630201007" valueType="Boolean" logicalName="PMB.IoHeater.ForelineHeater.IsMonitorTcBroken" eventTrigger="" units="" />
    538. 

  538.     <StatusVariable id="630201008" valueType="Boolean" logicalName="PMB.IoHeater.ForelineHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    539. 

  539.     <StatusVariable id="630201009" valueType="Boolean" logicalName="PMB.IoHeater.ForelineHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    540. 

  540.     <StatusVariable id="630201010" valueType="Boolean" logicalName="PMB.IoHeater.ForelineHeater.IsTcDeviation" eventTrigger="" units="" />
    541. 

  541.     <StatusVariable id="630201011" valueType="F8" logicalName="PMB.IoHeater.ForelineHeater.MonitorTcFeedback" eventTrigger="" units="" />
    542. 

  542.     <StatusVariable id="630202001" valueType="Boolean" logicalName="PMB.CHBHeatPIDATFinished.Value" eventTrigger="" units="" />
    543. 

  543.     <StatusVariable id="630203001" valueType="Boolean" logicalName="PMB.CHBHeatPIDATRunning.Value" eventTrigger="" units="" />
    544. 

  544.     <StatusVariable id="630204001" valueType="Boolean" logicalName="PMB.CHBHeatPIDATStart.Value" eventTrigger="" units="" />
    545. 

  545.     <StatusVariable id="630205001" valueType="Boolean" logicalName="PMB.CHBHeatPIDATStop.Value" eventTrigger="" units="" />
    546. 

  546.     <StatusVariable id="630206001" valueType="F8" logicalName="PMB.ForelineGauge.Value" eventTrigger="" units="" />
    547. 

  547.     <StatusVariable id="630207001" valueType="F8" logicalName="PMB.ForelineHeater.Temperature" eventTrigger="" units="" />
    548. 

  548.     <StatusVariable id="630208001" valueType="Boolean" logicalName="PMB.ForelineHeatPIDATFinished.Value" eventTrigger="" units="" />
    549. 

  549.     <StatusVariable id="630209001" valueType="Boolean" logicalName="PMB.ForelineHeatPIDATRunning.Value" eventTrigger="" units="" />
    550. 

  550.     <StatusVariable id="630210001" valueType="Boolean" logicalName="PMB.ForelineHeatPIDATStart.Value" eventTrigger="" units="" />
    551. 

  551.     <StatusVariable id="630211001" valueType="Boolean" logicalName="PMB.ForelineHeatPIDATStop.Value" eventTrigger="" units="" />
    552. 

  552.     <StatusVariable id="630212001" valueType="Boolean" logicalName="PMB.GB_Interlock.Value" eventTrigger="" units="" />
    553. 

  553.     <StatusVariable id="630213001" valueType="Boolean" logicalName="PMB.GeneratorInterlock.Value" eventTrigger="" units="" />
    554. 

  554.     <StatusVariable id="630214001" valueType="F8" logicalName="PMB.HeaterChamber1.Temperature" eventTrigger="" units="" />
    555. 

  555.     <StatusVariable id="630215001" valueType="F8" logicalName="PMB.HeaterChamber.Temperature" eventTrigger="" units="" />
    556. 

  556.     <StatusVariable id="630216001" valueType="Boolean" logicalName="PMB.io.IsConnected" eventTrigger="" units="" />
    557. 

  557.     <StatusVariable id="630217001" valueType="Boolean" logicalName="PMB.LE_OT1.Value" eventTrigger="" units="" />
    558. 

  558.     <StatusVariable id="630218001" valueType="Boolean" logicalName="PMB.LE_OT2.Value" eventTrigger="" units="" />
    559. 

  559.     <StatusVariable id="630219001" valueType="Boolean" logicalName="PMB.LEHeat1PIDATFinished.Value" eventTrigger="" units="" />
    560. 

  560.     <StatusVariable id="630220001" valueType="Boolean" logicalName="PMB.LEHeat1PIDATRunning.Value" eventTrigger="" units="" />
    561. 

  561.     <StatusVariable id="630221001" valueType="Boolean" logicalName="PMB.LEHeat1PIDATStart.Value" eventTrigger="" units="" />
    562. 

  562.     <StatusVariable id="630222001" valueType="Boolean" logicalName="PMB.LEHeat1PIDATStop.Value" eventTrigger="" units="" />
    563. 

  563.     <StatusVariable id="630223001" valueType="Boolean" logicalName="PMB.LEHeat2PIDATFinished.Value" eventTrigger="" units="" />
    564. 

  564.     <StatusVariable id="630224001" valueType="Boolean" logicalName="PMB.LEHeat2PIDATRunning.Value" eventTrigger="" units="" />
    565. 

  565.     <StatusVariable id="630225001" valueType="Boolean" logicalName="PMB.LEHeat2PIDATStart.Value" eventTrigger="" units="" />
    566. 

  566.     <StatusVariable id="630226001" valueType="Boolean" logicalName="PMB.LEHeat2PIDATStop.Value" eventTrigger="" units="" />
    567. 

  567.     <StatusVariable id="630227001" valueType="F8" logicalName="PMB.LEHeater1.Temperature" eventTrigger="" units="" />
    568. 

  568.     <StatusVariable id="630228001" valueType="F8" logicalName="PMB.LEHeater2.Temperature" eventTrigger="" units="" />
    569. 

  569.     <StatusVariable id="630229001" valueType="Boolean" logicalName="PMB.MainPump.IsError" eventTrigger="" units="" />
    570. 

  570.     <StatusVariable id="630229002" valueType="Boolean" logicalName="PMB.MainPump.IsOn" eventTrigger="" units="" />
    571. 

  571.     <StatusVariable id="630229003" valueType="Boolean" logicalName="PMB.MainPump.IsRunning" eventTrigger="" units="" />
    572. 

  572.     <StatusVariable id="630229004" valueType="F8" logicalName="PMB.MainPump.Speed" eventTrigger="" units="" />
    573. 

  573.     <StatusVariable id="630229005" valueType="F8" logicalName="PMB.MainPump.Temperature" eventTrigger="" units="" />
    574. 

  574.     <StatusVariable id="630230001" valueType="Boolean" logicalName="PMB.N2PressureOk.Value" eventTrigger="" units="" />
    575. 

  575.     <StatusVariable id="630231001" valueType="F8" logicalName="PMB.PressureGauge.Value" eventTrigger="" units="" />
    576. 

  576.     <StatusVariable id="630232001" valueType="F8" logicalName="PMB.ProcessGauge.Value" eventTrigger="" units="" />
    577. 

  577.     <StatusVariable id="630233001" valueType="F8" logicalName="PMB.Rf1.ForwardPower" eventTrigger="" units="" />
    578. 

  578.     <StatusVariable id="630233002" valueType="F8" logicalName="PMB.Rf1.Frequency" eventTrigger="" units="" />
    579. 

  579.     <StatusVariable id="630233003" valueType="F8" logicalName="PMB.Rf1.PowerSetPoint" eventTrigger="" units="" />
    580. 

  580.     <StatusVariable id="630233004" valueType="F8" logicalName="PMB.Rf1.PulsingDutyCycle" eventTrigger="" units="" />
    581. 

  581.     <StatusVariable id="630233005" valueType="F8" logicalName="PMB.Rf1.PulsingFrequency" eventTrigger="" units="" />
    582. 

  582.     <StatusVariable id="630233006" valueType="F8" logicalName="PMB.Rf1.ReflectPower" eventTrigger="" units="" />
    583. 

  583.     <StatusVariable id="630234001" valueType="F8" logicalName="PMB.Rf2.ForwardPower" eventTrigger="" units="" />
    584. 

  584.     <StatusVariable id="630234002" valueType="F8" logicalName="PMB.Rf2.Frequency" eventTrigger="" units="" />
    585. 

  585.     <StatusVariable id="630234003" valueType="F8" logicalName="PMB.Rf2.PowerSetPoint" eventTrigger="" units="" />
    586. 

  586.     <StatusVariable id="630234004" valueType="F8" logicalName="PMB.Rf2.PulsingDutyCycle" eventTrigger="" units="" />
    587. 

  587.     <StatusVariable id="630234005" valueType="F8" logicalName="PMB.Rf2.PulsingFrequency" eventTrigger="" units="" />
    588. 

  588.     <StatusVariable id="630234006" valueType="F8" logicalName="PMB.Rf2.ReflectPower" eventTrigger="" units="" />
    589. 

  589.     <StatusVariable id="630235001" valueType="Boolean" logicalName="PMB.SensorATMSwitch.Value" eventTrigger="" units="" />
    590. 

  590.     <StatusVariable id="630236001" valueType="Boolean" logicalName="PMB.SensorCHBOTSW.Value" eventTrigger="" units="" />
    591. 

  591.     <StatusVariable id="630237001" valueType="Boolean" logicalName="PMB.SensorCoolantInletTCOK1.Value" eventTrigger="" units="" />
    592. 

  592.     <StatusVariable id="630238001" valueType="Boolean" logicalName="PMB.SensorCoolantInletTCOK2.Value" eventTrigger="" units="" />
    593. 

  593.     <StatusVariable id="630239001" valueType="Boolean" logicalName="PMB.SensorCoolantOutletTCOK1.Value" eventTrigger="" units="" />
    594. 

  594.     <StatusVariable id="630240001" valueType="Boolean" logicalName="PMB.SensorCoolantOutletTCOK2.Value" eventTrigger="" units="" />
    595. 

  595.     <StatusVariable id="630241001" valueType="Boolean" logicalName="PMB.SensorTMInSafety.Value" eventTrigger="" units="" />
    596. 

  596.     <StatusVariable id="630242001" valueType="Boolean" logicalName="PMB.SensorTMRobotNotExtendToPM1.Value" eventTrigger="" units="" />
    597. 

  597.     <StatusVariable id="630243001" valueType="Boolean" logicalName="PMB.SensorTMRobotNotExtendToPM2.Value" eventTrigger="" units="" />
    598. 

  598.     <StatusVariable id="630244001" valueType="Boolean" logicalName="PMB.SensorVacSwitch.Value" eventTrigger="" units="" />
    599. 

  599.     <StatusVariable id="630245001" valueType="Boolean" logicalName="PMB.SensorWaterFlowOk1.Value" eventTrigger="" units="" />
    600. 

  600.     <StatusVariable id="630246001" valueType="Boolean" logicalName="PMB.SensorWaterFlowOk2.Value" eventTrigger="" units="" />
    601. 

  601.     <StatusVariable id="630247001" valueType="Boolean" logicalName="PMB.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    602. 

  602.     <StatusVariable id="630248001" valueType="Boolean" logicalName="PMB.SourceFan.Value" eventTrigger="" units="" />
    603. 

  603.     <StatusVariable id="630249001" valueType="F8" logicalName="PMB.BiasRf1.ForwardPower" eventTrigger="" units="" />
    604. 

  604.     <StatusVariable id="630249002" valueType="F8" logicalName="PMB.BiasRf1.Frequency" eventTrigger="" units="" />
    605. 

  605.     <StatusVariable id="630249003" valueType="F8" logicalName="PMB.BiasRf1.PowerSetPoint" eventTrigger="" units="" />
    606. 

  606.     <StatusVariable id="630249004" valueType="F8" logicalName="PMB.BiasRf1.PulsingDutyCycle" eventTrigger="" units="" />
    607. 

  607.     <StatusVariable id="630249005" valueType="F8" logicalName="PMB.BiasRf1.PulsingFrequency" eventTrigger="" units="" />
    608. 

  608.     <StatusVariable id="630249006" valueType="F8" logicalName="PMB.BiasRf1.ReflectPower" eventTrigger="" units="" />
    609. 

  609.     <StatusVariable id="630250001" valueType="F8" logicalName="PMB.BiasRf1Match.C1" eventTrigger="" units="" />
    610. 

  610.     <StatusVariable id="630250002" valueType="F8" logicalName="PMB.BiasRf1Match.C2" eventTrigger="" units="" />
    611. 

  611.     <StatusVariable id="630250003" valueType="F8" logicalName="PMB.BiasRf1Match.LoadPosition1" eventTrigger="" units="" />
    612. 

  612.     <StatusVariable id="630250004" valueType="F8" logicalName="PMB.BiasRf1Match.LoadPosition2" eventTrigger="" units="" />
    613. 

  613.     <StatusVariable id="630250005" valueType="F8" logicalName="PMB.BiasRf1Match.TunePosition1" eventTrigger="" units="" />
    614. 

  614.     <StatusVariable id="630250006" valueType="F8" logicalName="PMB.BiasRf1Match.TunePosition2" eventTrigger="" units="" />
    615. 

  615.     <StatusVariable id="630250007" valueType="Ascii" logicalName="PMB.BiasRf1Match.VPP" eventTrigger="" units="" />
    616. 

  616.     <StatusVariable id="630251001" valueType="F8" logicalName="PMB.BiasRf2.ForwardPower" eventTrigger="" units="" />
    617. 

  617.     <StatusVariable id="630251002" valueType="F8" logicalName="PMB.BiasRf2.Frequency" eventTrigger="" units="" />
    618. 

  618.     <StatusVariable id="630251003" valueType="F8" logicalName="PMB.BiasRf2.PowerSetPoint" eventTrigger="" units="" />
    619. 

  619.     <StatusVariable id="630251004" valueType="F8" logicalName="PMB.BiasRf2.PulsingDutyCycle" eventTrigger="" units="" />
    620. 

  620.     <StatusVariable id="630251005" valueType="F8" logicalName="PMB.BiasRf2.PulsingFrequency" eventTrigger="" units="" />
    621. 

  621.     <StatusVariable id="630251006" valueType="F8" logicalName="PMB.BiasRf2.ReflectPower" eventTrigger="" units="" />
    622. 

  622.     <StatusVariable id="630252001" valueType="F8" logicalName="PMB.BiasRf2Match.C1" eventTrigger="" units="" />
    623. 

  623.     <StatusVariable id="630252002" valueType="F8" logicalName="PMB.BiasRf2Match.C2" eventTrigger="" units="" />
    624. 

  624.     <StatusVariable id="630252003" valueType="F8" logicalName="PMB.BiasRf2Match.LoadPosition1" eventTrigger="" units="" />
    625. 

  625.     <StatusVariable id="630252004" valueType="F8" logicalName="PMB.BiasRf2Match.LoadPosition2" eventTrigger="" units="" />
    626. 

  626.     <StatusVariable id="630252005" valueType="F8" logicalName="PMB.BiasRf2Match.TunePosition1" eventTrigger="" units="" />
    627. 

  627.     <StatusVariable id="630252006" valueType="F8" logicalName="PMB.BiasRf2Match.TunePosition2" eventTrigger="" units="" />
    628. 

  628.     <StatusVariable id="630252007" valueType="Ascii" logicalName="PMB.BiasRf2Match.VPP" eventTrigger="" units="" />
    629. 

  629.     <StatusVariable id="630253001" valueType="Ascii" logicalName="PMB.EPD.CurrentChannel" eventTrigger="" units="" />
    630. 

  630.     <StatusVariable id="630253002" valueType="Boolean" logicalName="PMB.EPD.IsConnected" eventTrigger="" units="" />
    631. 

  631.     <StatusVariable id="630254001" valueType="Boolean" logicalName="PMB.LidClosed.Value" eventTrigger="" units="" />
    632. 

  632.     <StatusVariable id="630255001" valueType="F8" logicalName="PMB.match1.C1" eventTrigger="" units="" />
    633. 

  633.     <StatusVariable id="630255002" valueType="F8" logicalName="PMB.match1.C2" eventTrigger="" units="" />
    634. 

  634.     <StatusVariable id="630255003" valueType="F8" logicalName="PMB.match1.LoadPosition1" eventTrigger="" units="" />
    635. 

  635.     <StatusVariable id="630255004" valueType="F8" logicalName="PMB.match1.LoadPosition2" eventTrigger="" units="" />
    636. 

  636.     <StatusVariable id="630255005" valueType="F8" logicalName="PMB.match1.TunePosition1" eventTrigger="" units="" />
    637. 

  637.     <StatusVariable id="630255006" valueType="F8" logicalName="PMB.match1.TunePosition2" eventTrigger="" units="" />
    638. 

  638.     <StatusVariable id="630255007" valueType="Ascii" logicalName="PMB.match1.VPP" eventTrigger="" units="" />
    639. 

  639.     <StatusVariable id="630256001" valueType="F8" logicalName="PMB.match2.C1" eventTrigger="" units="" />
    640. 

  640.     <StatusVariable id="630256002" valueType="F8" logicalName="PMB.match2.C2" eventTrigger="" units="" />
    641. 

  641.     <StatusVariable id="630256003" valueType="F8" logicalName="PMB.match2.LoadPosition1" eventTrigger="" units="" />
    642. 

  642.     <StatusVariable id="630256004" valueType="F8" logicalName="PMB.match2.LoadPosition2" eventTrigger="" units="" />
    643. 

  643.     <StatusVariable id="630256005" valueType="F8" logicalName="PMB.match2.TunePosition1" eventTrigger="" units="" />
    644. 

  644.     <StatusVariable id="630256006" valueType="F8" logicalName="PMB.match2.TunePosition2" eventTrigger="" units="" />
    645. 

  645.     <StatusVariable id="630256007" valueType="Ascii" logicalName="PMB.match2.VPP" eventTrigger="" units="" />
    646. 

  646.     <StatusVariable id="630257001" valueType="Ascii" logicalName="PMB.ProcessedWaferCount1.Value" eventTrigger="" units="" />
    647. 

  647.     <StatusVariable id="630257002" valueType="Ascii" logicalName="PMB.ProcessedWaferCount2.Value" eventTrigger="" units="" />
    648. 

  648.     <StatusVariable id="630258001" valueType="Ascii" logicalName="PMB.ProcessTime1.Value" eventTrigger="" units="" />
    649. 

  649.     <StatusVariable id="630258002" valueType="Ascii" logicalName="PMB.ProcessTime2.Value" eventTrigger="" units="" />
    650. 

  650.     <StatusVariable id="630259001" valueType="F8" logicalName="PMB.PumpOnTime.Value" eventTrigger="" units="" />
    651. 

  651.     <StatusVariable id="630301001" valueType="F8" logicalName="PMB.IoMfc.MfcGas1.AlarmRange" eventTrigger="" units="" />
    652. 

  652.     <StatusVariable id="630301002" valueType="F8" logicalName="PMB.IoMfc.MfcGas1.AlarmTime" eventTrigger="" units="" />
    653. 

  653.     <StatusVariable id="630301003" valueType="F8" logicalName="PMB.IoMfc.MfcGas1.DefaultSetPoint" eventTrigger="" units="" />
    654. 

  654.     <StatusVariable id="630301004" valueType="F8" logicalName="PMB.IoMfc.MfcGas1.FeedBack" eventTrigger="" units="" />
    655. 

  655.     <StatusVariable id="630301005" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas1.IsEnable" eventTrigger="" units="" />
    656. 

  656.     <StatusVariable id="630301006" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas1.IsEnableAlarm" eventTrigger="" units="" />
    657. 

  657.     <StatusVariable id="630301007" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas1.IsOffline" eventTrigger="" units="" />
    658. 

  658.     <StatusVariable id="630301008" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas1.IsOutOfTolerance" eventTrigger="" units="" />
    659. 

  659.     <StatusVariable id="630301009" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas1.MfcAlarm" eventTrigger="" units="" />
    660. 

  660.     <StatusVariable id="630301010" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas1.PressureAlarm" eventTrigger="" units="" />
    661. 

  661.     <StatusVariable id="630301011" valueType="F8" logicalName="PMB.IoMfc.MfcGas1.Scale" eventTrigger="" units="" />
    662. 

  662.     <StatusVariable id="630301012" valueType="F8" logicalName="PMB.IoMfc.MfcGas1.SetPoint" eventTrigger="" units="" />
    663. 

  663.     <StatusVariable id="630302001" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber1.ControlTcFeedback" eventTrigger="" units="" />
    664. 

  664.     <StatusVariable id="630302002" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber1.ControlTcSetPoint" eventTrigger="" units="" />
    665. 

  665.     <StatusVariable id="630302003" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber1.ControlTcSetPointView" eventTrigger="" units="" />
    666. 

  666.     <StatusVariable id="630302004" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber1.CoolantInletTempFeedback" eventTrigger="" units="" />
    667. 

  667.     <StatusVariable id="630302005" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber1.CoolantOutletTempFeedback" eventTrigger="" units="" />
    668. 

  668.     <StatusVariable id="630302006" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber1.IsControlTcBroken" eventTrigger="" units="" />
    669. 

  669.     <StatusVariable id="630302007" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber1.IsMonitorTcBroken" eventTrigger="" units="" />
    670. 

  670.     <StatusVariable id="630302008" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber1.IsPowerOnFeedback" eventTrigger="" units="" />
    671. 

  671.     <StatusVariable id="630302009" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber1.IsPowerOnSetPoint" eventTrigger="" units="" />
    672. 

  672.     <StatusVariable id="630302010" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber1.IsTcDeviation" eventTrigger="" units="" />
    673. 

  673.     <StatusVariable id="630302011" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber1.MonitorTcFeedback" eventTrigger="" units="" />
    674. 

  674.     <StatusVariable id="630303001" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber.ControlTcFeedback" eventTrigger="" units="" />
    675. 

  675.     <StatusVariable id="630303002" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber.ControlTcSetPoint" eventTrigger="" units="" />
    676. 

  676.     <StatusVariable id="630303003" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber.ControlTcSetPointView" eventTrigger="" units="" />
    677. 

  677.     <StatusVariable id="630303004" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber.CoolantInletTempFeedback" eventTrigger="" units="" />
    678. 

  678.     <StatusVariable id="630303005" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber.CoolantOutletTempFeedback" eventTrigger="" units="" />
    679. 

  679.     <StatusVariable id="630303006" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber.IsControlTcBroken" eventTrigger="" units="" />
    680. 

  680.     <StatusVariable id="630303007" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber.IsMonitorTcBroken" eventTrigger="" units="" />
    681. 

  681.     <StatusVariable id="630303008" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber.IsPowerOnFeedback" eventTrigger="" units="" />
    682. 

  682.     <StatusVariable id="630303009" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber.IsPowerOnSetPoint" eventTrigger="" units="" />
    683. 

  683.     <StatusVariable id="630303010" valueType="Boolean" logicalName="PMB.IoHeater.HeaterChamber.IsTcDeviation" eventTrigger="" units="" />
    684. 

  684.     <StatusVariable id="630303011" valueType="F8" logicalName="PMB.IoHeater.HeaterChamber.MonitorTcFeedback" eventTrigger="" units="" />
    685. 

  685.     <StatusVariable id="630304011" valueType="F8" logicalName="PMB.IoHeater.LEHeater1.ControlTcFeedback" eventTrigger="" units="" />
    686. 

  686.     <StatusVariable id="630304002" valueType="F8" logicalName="PMB.IoHeater.LEHeater1.ControlTcSetPoint" eventTrigger="" units="" />
    687. 

  687.     <StatusVariable id="630304003" valueType="F8" logicalName="PMB.IoHeater.LEHeater1.ControlTcSetPointView" eventTrigger="" units="" />
    688. 

  688.     <StatusVariable id="630304004" valueType="F8" logicalName="PMB.IoHeater.LEHeater1.CoolantInletTempFeedback" eventTrigger="" units="" />
    689. 

  689.     <StatusVariable id="630304005" valueType="F8" logicalName="PMB.IoHeater.LEHeater1.CoolantOutletTempFeedback" eventTrigger="" units="" />
    690. 

  690.     <StatusVariable id="630304006" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater1.IsControlTcBroken" eventTrigger="" units="" />
    691. 

  691.     <StatusVariable id="630304007" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater1.IsMonitorTcBroken" eventTrigger="" units="" />
    692. 

  692.     <StatusVariable id="630304008" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater1.IsPowerOnFeedback" eventTrigger="" units="" />
    693. 

  693.     <StatusVariable id="630304009" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater1.IsPowerOnSetPoint" eventTrigger="" units="" />
    694. 

  694.     <StatusVariable id="630304010" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater1.IsTcDeviation" eventTrigger="" units="" />
    695. 

  695.     <StatusVariable id="630304001" valueType="F8" logicalName="PMB.IoHeater.LEHeater1.MonitorTcFeedback" eventTrigger="" units="" />
    696. 

  696.     <StatusVariable id="630305011" valueType="F8" logicalName="PMB.IoHeater.LEHeater2.ControlTcFeedback" eventTrigger="" units="" />
    697. 

  697.     <StatusVariable id="630305002" valueType="F8" logicalName="PMB.IoHeater.LEHeater2.ControlTcSetPoint" eventTrigger="" units="" />
    698. 

  698.     <StatusVariable id="630305003" valueType="F8" logicalName="PMB.IoHeater.LEHeater2.ControlTcSetPointView" eventTrigger="" units="" />
    699. 

  699.     <StatusVariable id="630305004" valueType="F8" logicalName="PMB.IoHeater.LEHeater2.CoolantInletTempFeedback" eventTrigger="" units="" />
    700. 

  700.     <StatusVariable id="630305005" valueType="F8" logicalName="PMB.IoHeater.LEHeater2.CoolantOutletTempFeedback" eventTrigger="" units="" />
    701. 

  701.     <StatusVariable id="630305006" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater2.IsControlTcBroken" eventTrigger="" units="" />
    702. 

  702.     <StatusVariable id="630305007" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater2.IsMonitorTcBroken" eventTrigger="" units="" />
    703. 

  703.     <StatusVariable id="630305008" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater2.IsPowerOnFeedback" eventTrigger="" units="" />
    704. 

  704.     <StatusVariable id="630305009" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater2.IsPowerOnSetPoint" eventTrigger="" units="" />
    705. 

  705.     <StatusVariable id="630305010" valueType="Boolean" logicalName="PMB.IoHeater.LEHeater2.IsTcDeviation" eventTrigger="" units="" />
    706. 

  706.     <StatusVariable id="630305001" valueType="F8" logicalName="PMB.IoHeater.LEHeater2.MonitorTcFeedback" eventTrigger="" units="" />
    707. 

  707.     <StatusVariable id="630401001" valueType="Boolean" logicalName="PMB.IoPressureMeter.ForelineGauge.GaugeAlarm" eventTrigger="" units="" />
    708. 

  708.     <StatusVariable id="630401002" valueType="F8" logicalName="PMB.IoPressureMeter.ForelineGauge.ProcessPressureOffset" eventTrigger="" units="" />
    709. 

  709.     <StatusVariable id="630402001" valueType="F8" logicalName="PMB.IoMfc.MfcGas2.AlarmRange" eventTrigger="" units="" />
    710. 

  710.     <StatusVariable id="630402002" valueType="F8" logicalName="PMB.IoMfc.MfcGas2.AlarmTime" eventTrigger="" units="" />
    711. 

  711.     <StatusVariable id="630402003" valueType="F8" logicalName="PMB.IoMfc.MfcGas2.DefaultSetPoint" eventTrigger="" units="" />
    712. 

  712.     <StatusVariable id="630402004" valueType="F8" logicalName="PMB.IoMfc.MfcGas2.FeedBack" eventTrigger="" units="" />
    713. 

  713.     <StatusVariable id="630402005" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas2.IsEnable" eventTrigger="" units="" />
    714. 

  714.     <StatusVariable id="630402006" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas2.IsEnableAlarm" eventTrigger="" units="" />
    715. 

  715.     <StatusVariable id="630402007" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas2.IsOffline" eventTrigger="" units="" />
    716. 

  716.     <StatusVariable id="630402008" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas2.IsOutOfTolerance" eventTrigger="" units="" />
    717. 

  717.     <StatusVariable id="630402009" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas2.MfcAlarm" eventTrigger="" units="" />
    718. 

  718.     <StatusVariable id="630402010" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas2.PressureAlarm" eventTrigger="" units="" />
    719. 

  719.     <StatusVariable id="630402011" valueType="F8" logicalName="PMB.IoMfc.MfcGas2.Scale" eventTrigger="" units="" />
    720. 

  720.     <StatusVariable id="630402012" valueType="F8" logicalName="PMB.IoMfc.MfcGas2.SetPoint" eventTrigger="" units="" />
    721. 

  721.     <StatusVariable id="630403001" valueType="F8" logicalName="PMB.IoMfc.MfcGas3.AlarmRange" eventTrigger="" units="" />
    722. 

  722.     <StatusVariable id="630403002" valueType="F8" logicalName="PMB.IoMfc.MfcGas3.AlarmTime" eventTrigger="" units="" />
    723. 

  723.     <StatusVariable id="630403003" valueType="F8" logicalName="PMB.IoMfc.MfcGas3.DefaultSetPoint" eventTrigger="" units="" />
    724. 

  724.     <StatusVariable id="630403004" valueType="F8" logicalName="PMB.IoMfc.MfcGas3.FeedBack" eventTrigger="" units="" />
    725. 

  725.     <StatusVariable id="630403005" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas3.IsEnable" eventTrigger="" units="" />
    726. 

  726.     <StatusVariable id="630403006" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas3.IsEnableAlarm" eventTrigger="" units="" />
    727. 

  727.     <StatusVariable id="630403007" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas3.IsOffline" eventTrigger="" units="" />
    728. 

  728.     <StatusVariable id="630403008" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas3.IsOutOfTolerance" eventTrigger="" units="" />
    729. 

  729.     <StatusVariable id="630403009" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas3.MfcAlarm" eventTrigger="" units="" />
    730. 

  730.     <StatusVariable id="630403010" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas3.PressureAlarm" eventTrigger="" units="" />
    731. 

  731.     <StatusVariable id="630403011" valueType="F8" logicalName="PMB.IoMfc.MfcGas3.Scale" eventTrigger="" units="" />
    732. 

  732.     <StatusVariable id="630403012" valueType="F8" logicalName="PMB.IoMfc.MfcGas3.SetPoint" eventTrigger="" units="" />
    733. 

  733.     <StatusVariable id="630404001" valueType="F8" logicalName="PMB.IoMfc.MfcGas4.AlarmRange" eventTrigger="" units="" />
    734. 

  734.     <StatusVariable id="630404002" valueType="F8" logicalName="PMB.IoMfc.MfcGas4.AlarmTime" eventTrigger="" units="" />
    735. 

  735.     <StatusVariable id="630404003" valueType="F8" logicalName="PMB.IoMfc.MfcGas4.DefaultSetPoint" eventTrigger="" units="" />
    736. 

  736.     <StatusVariable id="630404004" valueType="F8" logicalName="PMB.IoMfc.MfcGas4.FeedBack" eventTrigger="" units="" />
    737. 

  737.     <StatusVariable id="630404005" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas4.IsEnable" eventTrigger="" units="" />
    738. 

  738.     <StatusVariable id="630404006" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas4.IsEnableAlarm" eventTrigger="" units="" />
    739. 

  739.     <StatusVariable id="630404007" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas4.IsOffline" eventTrigger="" units="" />
    740. 

  740.     <StatusVariable id="630404008" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas4.IsOutOfTolerance" eventTrigger="" units="" />
    741. 

  741.     <StatusVariable id="630404009" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas4.MfcAlarm" eventTrigger="" units="" />
    742. 

  742.     <StatusVariable id="630404010" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas4.PressureAlarm" eventTrigger="" units="" />
    743. 

  743.     <StatusVariable id="630404011" valueType="F8" logicalName="PMB.IoMfc.MfcGas4.Scale" eventTrigger="" units="" />
    744. 

  744.     <StatusVariable id="630404012" valueType="F8" logicalName="PMB.IoMfc.MfcGas4.SetPoint" eventTrigger="" units="" />
    745. 

  745.     <StatusVariable id="630405001" valueType="F8" logicalName="PMB.IoMfc.MfcGas5.AlarmRange" eventTrigger="" units="" />
    746. 

  746.     <StatusVariable id="630405002" valueType="F8" logicalName="PMB.IoMfc.MfcGas5.AlarmTime" eventTrigger="" units="" />
    747. 

  747.     <StatusVariable id="630405003" valueType="F8" logicalName="PMB.IoMfc.MfcGas5.DefaultSetPoint" eventTrigger="" units="" />
    748. 

  748.     <StatusVariable id="630405004" valueType="F8" logicalName="PMB.IoMfc.MfcGas5.FeedBack" eventTrigger="" units="" />
    749. 

  749.     <StatusVariable id="630405005" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas5.IsEnable" eventTrigger="" units="" />
    750. 

  750.     <StatusVariable id="630405006" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas5.IsEnableAlarm" eventTrigger="" units="" />
    751. 

  751.     <StatusVariable id="630405007" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas5.IsOffline" eventTrigger="" units="" />
    752. 

  752.     <StatusVariable id="630405008" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas5.IsOutOfTolerance" eventTrigger="" units="" />
    753. 

  753.     <StatusVariable id="630405009" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas5.MfcAlarm" eventTrigger="" units="" />
    754. 

  754.     <StatusVariable id="630405010" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas5.PressureAlarm" eventTrigger="" units="" />
    755. 

  755.     <StatusVariable id="630405011" valueType="F8" logicalName="PMB.IoMfc.MfcGas5.Scale" eventTrigger="" units="" />
    756. 

  756.     <StatusVariable id="630405012" valueType="F8" logicalName="PMB.IoMfc.MfcGas5.SetPoint" eventTrigger="" units="" />
    757. 

  757.     <StatusVariable id="630406001" valueType="F8" logicalName="PMB.IoMfc.MfcGas6.AlarmRange" eventTrigger="" units="" />
    758. 

  758.     <StatusVariable id="630406002" valueType="F8" logicalName="PMB.IoMfc.MfcGas6.AlarmTime" eventTrigger="" units="" />
    759. 

  759.     <StatusVariable id="630406003" valueType="F8" logicalName="PMB.IoMfc.MfcGas6.DefaultSetPoint" eventTrigger="" units="" />
    760. 

  760.     <StatusVariable id="630406004" valueType="F8" logicalName="PMB.IoMfc.MfcGas6.FeedBack" eventTrigger="" units="" />
    761. 

  761.     <StatusVariable id="630406005" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas6.IsEnable" eventTrigger="" units="" />
    762. 

  762.     <StatusVariable id="630406006" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas6.IsEnableAlarm" eventTrigger="" units="" />
    763. 

  763.     <StatusVariable id="630406007" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas6.IsOffline" eventTrigger="" units="" />
    764. 

  764.     <StatusVariable id="630406008" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas6.IsOutOfTolerance" eventTrigger="" units="" />
    765. 

  765.     <StatusVariable id="630406009" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas6.MfcAlarm" eventTrigger="" units="" />
    766. 

  766.     <StatusVariable id="630406010" valueType="Boolean" logicalName="PMB.IoMfc.MfcGas6.PressureAlarm" eventTrigger="" units="" />
    767. 

  767.     <StatusVariable id="630406011" valueType="F8" logicalName="PMB.IoMfc.MfcGas6.Scale" eventTrigger="" units="" />
    768. 

  768.     <StatusVariable id="630406012" valueType="F8" logicalName="PMB.IoMfc.MfcGas6.SetPoint" eventTrigger="" units="" />
    769. 

  769.     <StatusVariable id="630501001" valueType="F8" logicalName="PMB.IoTemperatureCtrl.TemperatureControl.Chamber1Temperature" eventTrigger="" units="" />
    770. 

  770.     <StatusVariable id="630501002" valueType="F8" logicalName="PMB.IoTemperatureCtrl.TemperatureControl.Chamber2Temperature" eventTrigger="" units="" />
    771. 

  771.     <StatusVariable id="630502001" valueType="Boolean" logicalName="PMB.IoPressureMeter.PressureGauge.GaugeAlarm" eventTrigger="" units="" />
    772. 

  772.     <StatusVariable id="630502002" valueType="F8" logicalName="PMB.IoPressureMeter.PressureGauge.ProcessPressureOffset" eventTrigger="" units="" />
    773. 

  773.     <StatusVariable id="630503001" valueType="Boolean" logicalName="PMB.IoPressureMeter.ProcessGauge.GaugeAlarm" eventTrigger="" units="" />
    774. 

  774.     <StatusVariable id="630503002" valueType="F8" logicalName="PMB.IoPressureMeter.ProcessGauge.ProcessPressureOffset" eventTrigger="" units="" />
    775. 

  775.     <StatusVariable id="630601001" valueType="F8" logicalName="PMB.IoThrottleValve.ThrottleValve.ProcessPressureOffset" eventTrigger="" units="" />
    776. 

  776.     <StatusVariable id="630601002" valueType="F8" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPosition" eventTrigger="" units="" />
    777. 

  777.     <StatusVariable id="630601003" valueType="F8" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPositionSetPoint" eventTrigger="" units="" />
    778. 

  778.     <StatusVariable id="630601004" valueType="F8" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPressure" eventTrigger="" units="" />
    779. 

  779.     <StatusVariable id="630601005" valueType="F8" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPressureSetPoint" eventTrigger="" units="" />
    780. 

  780.     <StatusVariable id="630701001" valueType="Boolean" logicalName="PMB.IoValve.ValveChamberPurge.SetPoint" eventTrigger="" units="" />
    781. 

  781.     <StatusVariable id="630701002" valueType="Boolean" logicalName="PMB.IoValve.ValveChamberPurge.Status" eventTrigger="" units="" />
    782. 

  782.     <StatusVariable id="630801001" valueType="F8" logicalName="PMB.BiasRf1.RfOnTime.Value" eventTrigger="" units="" />
    783. 

  783.     <StatusVariable id="630802001" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPumping.SetPoint" eventTrigger="" units="" />
    784. 

  784.     <StatusVariable id="630802002" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPumping.Status" eventTrigger="" units="" />
    785. 

  785.     <StatusVariable id="630803001" valueType="Boolean" logicalName="PMB.IoValve.ValveFastVent.SetPoint" eventTrigger="" units="" />
    786. 

  786.     <StatusVariable id="630803002" valueType="Boolean" logicalName="PMB.IoValve.ValveFastVent.Status" eventTrigger="" units="" />
    787. 

  787.     <StatusVariable id="630804001" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    788. 

  788.     <StatusVariable id="630804002" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    789. 

  789.     <StatusVariable id="630805001" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    790. 

  790.     <StatusVariable id="630805002" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    791. 

  791.     <StatusVariable id="630806001" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    792. 

  792.     <StatusVariable id="630806002" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    793. 

  793.     <StatusVariable id="630807001" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    794. 

  794.     <StatusVariable id="630807002" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    795. 

  795.     <StatusVariable id="630808001" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    796. 

  796.     <StatusVariable id="630808002" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    797. 

  797.     <StatusVariable id="630809001" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    798. 

  798.     <StatusVariable id="630809002" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    799. 

  799.     <StatusVariable id="630810001" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    800. 

  800.     <StatusVariable id="630810002" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.Status" eventTrigger="" units="" />
    801. 

  801.     <StatusVariable id="630811001" valueType="Boolean" logicalName="PMB.IoValve.ValveProcess.SetPoint" eventTrigger="" units="" />
    802. 

  802.     <StatusVariable id="630811002" valueType="Boolean" logicalName="PMB.IoValve.ValveProcess.Status" eventTrigger="" units="" />
    803. 

  803.     <StatusVariable id="630812001" valueType="Boolean" logicalName="PMB.IoValve.ValveProcessGasFinal.SetPoint" eventTrigger="" units="" />
    804. 

  804.     <StatusVariable id="630812002" valueType="Boolean" logicalName="PMB.IoValve.ValveProcessGasFinal.Status" eventTrigger="" units="" />
    805. 

  805.     <StatusVariable id="630813001" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPumping.SetPoint" eventTrigger="" units="" />
    806. 

  806.     <StatusVariable id="630813002" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPumping.Status" eventTrigger="" units="" />
    807. 

  807.     <StatusVariable id="630901001" valueType="F8" logicalName="PMB.BiasRf2.RfOnTime.Value" eventTrigger="" units="" />
    808. 

  808.     <StatusVariable id="631001001" valueType="F8" logicalName="PMB.Rf1.RfOnTime.Value" eventTrigger="" units="" />
    809. 

  809.     <StatusVariable id="631101001" valueType="F8" logicalName="PMB.Rf2.RfOnTime.Value" eventTrigger="" units="" />
    810. 

  810.     <StatusVariable id="1410101001" valueType="F8" logicalName="IO.PMA.AI_1_CoolantInletTemp" eventTrigger="" units="" />
    811. 

  811.     <StatusVariable id="1410101002" valueType="F8" logicalName="IO.PMA.AI_1_CoolantOutletTemp" eventTrigger="" units="" />
    812. 

  812.     <StatusVariable id="1410101003" valueType="F8" logicalName="IO.PMA.AI_1_LEControlTCTemp" eventTrigger="" units="" />
    813. 

  813.     <StatusVariable id="1410101004" valueType="F8" logicalName="IO.PMA.AI_1_LEMonitorTCTemp" eventTrigger="" units="" />
    814. 

  814.     <StatusVariable id="1410101005" valueType="F8" logicalName="IO.PMA.AI_2_CoolantInletTemp" eventTrigger="" units="" />
    815. 

  815.     <StatusVariable id="1410101006" valueType="F8" logicalName="IO.PMA.AI_2_CoolantOutletTemp" eventTrigger="" units="" />
    816. 

  816.     <StatusVariable id="1410101007" valueType="F8" logicalName="IO.PMA.AI_2_LEControlTCTemp" eventTrigger="" units="" />
    817. 

  817.     <StatusVariable id="1410101008" valueType="F8" logicalName="IO.PMA.AI_2_LEMonitorTCTemp" eventTrigger="" units="" />
    818. 

  818.     <StatusVariable id="1410101009" valueType="F8" logicalName="IO.PMA.AI_ChamberPressure" eventTrigger="" units="" />
    819. 

  819.     <StatusVariable id="1410101010" valueType="F8" logicalName="IO.PMA.AI_CHBControlTCTemp" eventTrigger="" units="" />
    820. 

  820.     <StatusVariable id="1410101011" valueType="F8" logicalName="IO.PMA.AI_CHBMonitorTCTemp" eventTrigger="" units="" />
    821. 

  821.     <StatusVariable id="1410101012" valueType="F8" logicalName="IO.PMA.AI_Day" eventTrigger="" units="" />
    822. 

  822.     <StatusVariable id="1410101013" valueType="F8" logicalName="IO.PMA.AI_ForelineControlTCTemp" eventTrigger="" units="" />
    823. 

  823.     <StatusVariable id="1410101014" valueType="F8" logicalName="IO.PMA.AI_ForelineMonitorTCTemp" eventTrigger="" units="" />
    824. 

  824.     <StatusVariable id="1410101015" valueType="F8" logicalName="IO.PMA.AI_ForelinePressure" eventTrigger="" units="" />
    825. 

  825.     <StatusVariable id="1410101016" valueType="F8" logicalName="IO.PMA.AI_HeartbeatFB" eventTrigger="" units="" />
    826. 

  826.     <StatusVariable id="1410101017" valueType="F8" logicalName="IO.PMA.AI_MFC1Flow" eventTrigger="" units="" />
    827. 

  827.     <StatusVariable id="1410101018" valueType="F8" logicalName="IO.PMA.AI_MFC2Flow" eventTrigger="" units="" />
    828. 

  828.     <StatusVariable id="1410101019" valueType="F8" logicalName="IO.PMA.AI_MFC3Flow" eventTrigger="" units="" />
    829. 

  829.     <StatusVariable id="1410101020" valueType="F8" logicalName="IO.PMA.AI_MFC4Flow" eventTrigger="" units="" />
    830. 

  830.     <StatusVariable id="1410101021" valueType="F8" logicalName="IO.PMA.AI_MFC5Flow" eventTrigger="" units="" />
    831. 

  831.     <StatusVariable id="1410101022" valueType="F8" logicalName="IO.PMA.AI_MFC6Flow" eventTrigger="" units="" />
    832. 

  832.     <StatusVariable id="1410101023" valueType="F8" logicalName="IO.PMA.AI_Minute" eventTrigger="" units="" />
    833. 

  833.     <StatusVariable id="1410101024" valueType="F8" logicalName="IO.PMA.AI_Month" eventTrigger="" units="" />
    834. 

  834.     <StatusVariable id="1410101025" valueType="F8" logicalName="IO.PMA.AI_ProcessPressure" eventTrigger="" units="" />
    835. 

  835.     <StatusVariable id="1410101026" valueType="F8" logicalName="IO.PMA.AI_Second" eventTrigger="" units="" />
    836. 

  836.     <StatusVariable id="1410101027" valueType="F8" logicalName="IO.PMA.AI_ThrottleValveRealPosition" eventTrigger="" units="" />
    837. 

  837.     <StatusVariable id="1410101028" valueType="F8" logicalName="IO.PMA.AI_ThrottleValveRealPressure" eventTrigger="" units="" />
    838. 

  838.     <StatusVariable id="1410101029" valueType="F8" logicalName="IO.PMA.AI_Time" eventTrigger="" units="" />
    839. 

  839.     <StatusVariable id="1410101030" valueType="F8" logicalName="IO.PMA.AI_Year" eventTrigger="" units="" />
    840. 

  840.     <StatusVariable id="1410101031" valueType="F8" logicalName="IO.PMA.AO_1_LETemperatureSetpoint" eventTrigger="" units="" />
    841. 

  841.     <StatusVariable id="1410101032" valueType="F8" logicalName="IO.PMA.AO_1_LETempLimitSetpoint" eventTrigger="" units="" />
    842. 

  842.     <StatusVariable id="1410101033" valueType="F8" logicalName="IO.PMA.AO_2_LETemperatureSetpoint" eventTrigger="" units="" />
    843. 

  843.     <StatusVariable id="1410101034" valueType="F8" logicalName="IO.PMA.AO_2_LETempLimitSetpoint" eventTrigger="" units="" />
    844. 

  844.     <StatusVariable id="1410101035" valueType="F8" logicalName="IO.PMA.AO_BaisRFEnable" eventTrigger="" units="" />
    845. 

  845.     <StatusVariable id="1410101036" valueType="F8" logicalName="IO.PMA.AO_CHBTemperatureSetpoint" eventTrigger="" units="" />
    846. 

  846.     <StatusVariable id="1410101037" valueType="F8" logicalName="IO.PMA.AO_CHBTempLimitSetpoint" eventTrigger="" units="" />
    847. 

  847.     <StatusVariable id="1410101038" valueType="F8" logicalName="IO.PMA.AO_ForelineTemperatureSetpoint" eventTrigger="" units="" />
    848. 

  848.     <StatusVariable id="1410101039" valueType="F8" logicalName="IO.PMA.AO_ForelineTempLimitSetpoint" eventTrigger="" units="" />
    849. 

  849.     <StatusVariable id="1410101040" valueType="F8" logicalName="IO.PMA.AO_Heartbeat" eventTrigger="" units="" />
    850. 

  850.     <StatusVariable id="1410101041" valueType="F8" logicalName="IO.PMA.AO_MFC1FlowSetpoint" eventTrigger="" units="" />
    851. 

  851.     <StatusVariable id="1410101042" valueType="F8" logicalName="IO.PMA.AO_MFC2FlowSetpoint" eventTrigger="" units="" />
    852. 

  852.     <StatusVariable id="1410101043" valueType="F8" logicalName="IO.PMA.AO_MFC3FlowSetpoint" eventTrigger="" units="" />
    853. 

  853.     <StatusVariable id="1410101044" valueType="F8" logicalName="IO.PMA.AO_MFC4FlowSetpoint" eventTrigger="" units="" />
    854. 

  854.     <StatusVariable id="1410101045" valueType="F8" logicalName="IO.PMA.AO_MFC5FlowSetpoint" eventTrigger="" units="" />
    855. 

  855.     <StatusVariable id="1410101046" valueType="F8" logicalName="IO.PMA.AO_MFC6FlowSetpoint" eventTrigger="" units="" />
    856. 

  856.     <StatusVariable id="1410101047" valueType="F8" logicalName="IO.PMA.AO_ThrottleValvePositionSetpoint" eventTrigger="" units="" />
    857. 

  857.     <StatusVariable id="1410101048" valueType="F8" logicalName="IO.PMA.AO_ThrottleValvePressureSetpoint" eventTrigger="" units="" />
    858. 

  858.     <StatusVariable id="1410101049" valueType="F8" logicalName="IO.PMA.AO_ThrottleValveWorkMode" eventTrigger="" units="" />
    859. 

  859.     <StatusVariable id="1410101050" valueType="Boolean" logicalName="IO.PMA.DI_1_CoolantInletTCBrokenAlarm" eventTrigger="" units="" />
    860. 

  860.     <StatusVariable id="1410101051" valueType="Boolean" logicalName="IO.PMA.DI_1_CoolantOutletTCBrokenAlarm" eventTrigger="" units="" />
    861. 

  861.     <StatusVariable id="1410101052" valueType="Boolean" logicalName="IO.PMA.DI_1_CoolingWaterFlowSW" eventTrigger="" units="" />
    862. 

  862.     <StatusVariable id="1410101053" valueType="Boolean" logicalName="IO.PMA.DI_1_GuidePinLifterDownPos" eventTrigger="" units="" />
    863. 

  863.     <StatusVariable id="1410101054" valueType="Boolean" logicalName="IO.PMA.DI_1_GuidePinLifterUpPos" eventTrigger="" units="" />
    864. 

  864.     <StatusVariable id="1410101055" valueType="Boolean" logicalName="IO.PMA.DI_1_LEControlTCBrokenAlarm" eventTrigger="" units="" />
    865. 

  865.     <StatusVariable id="1410101056" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeaterOn_FB" eventTrigger="" units="" />
    866. 

  866.     <StatusVariable id="1410101057" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATFinished" eventTrigger="" units="" />
    867. 

  867.     <StatusVariable id="1410101058" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATRunning" eventTrigger="" units="" />
    868. 

  868.     <StatusVariable id="1410101059" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATStart_Fb" eventTrigger="" units="" />
    869. 

  869.     <StatusVariable id="1410101060" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATStop_Fb" eventTrigger="" units="" />
    870. 

  870.     <StatusVariable id="1410101061" valueType="Boolean" logicalName="IO.PMA.DI_1_LEMonitorTCBrokenAlarm" eventTrigger="" units="" />
    871. 

  871.     <StatusVariable id="1410101062" valueType="Boolean" logicalName="IO.PMA.DI_1_LEOTSW" eventTrigger="" units="" />
    872. 

  872.     <StatusVariable id="1410101063" valueType="Boolean" logicalName="IO.PMA.DI_1_LETCDeviationOutOfRange" eventTrigger="" units="" />
    873. 

  873.     <StatusVariable id="1410101064" valueType="Boolean" logicalName="IO.PMA.DI_1_LiftPinDown" eventTrigger="" units="" />
    874. 

  874.     <StatusVariable id="1410101065" valueType="Boolean" logicalName="IO.PMA.DI_1_LiftPinUp" eventTrigger="" units="" />
    875. 

  875.     <StatusVariable id="1410101066" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    876. 

  876.     <StatusVariable id="1410101067" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    877. 

  877.     <StatusVariable id="1410101068" valueType="Boolean" logicalName="IO.PMA.DI_2_CoolantInletTCBrokenAlarm" eventTrigger="" units="" />
    878. 

  878.     <StatusVariable id="1410101069" valueType="Boolean" logicalName="IO.PMA.DI_2_CoolantOutletTCBrokenAlarm" eventTrigger="" units="" />
    879. 

  879.     <StatusVariable id="1410101070" valueType="Boolean" logicalName="IO.PMA.DI_2_CoolingWaterFlowSW" eventTrigger="" units="" />
    880. 

  880.     <StatusVariable id="1410101071" valueType="Boolean" logicalName="IO.PMA.DI_2_GuidePinLifterDownPos" eventTrigger="" units="" />
    881. 

  881.     <StatusVariable id="1410101072" valueType="Boolean" logicalName="IO.PMA.DI_2_GuidePinLifterUpPos" eventTrigger="" units="" />
    882. 

  882.     <StatusVariable id="1410101073" valueType="Boolean" logicalName="IO.PMA.DI_2_LEControlTCBrokenAlarm" eventTrigger="" units="" />
    883. 

  883.     <StatusVariable id="1410101074" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeaterOn_FB" eventTrigger="" units="" />
    884. 

  884.     <StatusVariable id="1410101075" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATFinished" eventTrigger="" units="" />
    885. 

  885.     <StatusVariable id="1410101076" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATRunning" eventTrigger="" units="" />
    886. 

  886.     <StatusVariable id="1410101077" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATStart_Fb" eventTrigger="" units="" />
    887. 

  887.     <StatusVariable id="1410101078" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATStop_Fb" eventTrigger="" units="" />
    888. 

  888.     <StatusVariable id="1410101079" valueType="Boolean" logicalName="IO.PMA.DI_2_LEMonitorTCBrokenAlarm" eventTrigger="" units="" />
    889. 

  889.     <StatusVariable id="1410101080" valueType="Boolean" logicalName="IO.PMA.DI_2_LEOTSW" eventTrigger="" units="" />
    890. 

  890.     <StatusVariable id="1410101081" valueType="Boolean" logicalName="IO.PMA.DI_2_LETCDeviationOutOfRange" eventTrigger="" units="" />
    891. 

  891.     <StatusVariable id="1410101082" valueType="Boolean" logicalName="IO.PMA.DI_2_LiftPinDown" eventTrigger="" units="" />
    892. 

  892.     <StatusVariable id="1410101083" valueType="Boolean" logicalName="IO.PMA.DI_2_LiftPinUp" eventTrigger="" units="" />
    893. 

  893.     <StatusVariable id="1410101084" valueType="Boolean" logicalName="IO.PMA.DI_2_SlitDoorClosePos" eventTrigger="" units="" />
    894. 

  894.     <StatusVariable id="1410101085" valueType="Boolean" logicalName="IO.PMA.DI_2_SlitDoorOpenPos" eventTrigger="" units="" />
    895. 

  895.     <StatusVariable id="1410101086" valueType="Boolean" logicalName="IO.PMA.DI_ATMSW" eventTrigger="" units="" />
    896. 

  896.     <StatusVariable id="1410101087" valueType="Boolean" logicalName="IO.PMA.DI_ChamberPressureGaugeAlarm" eventTrigger="" units="" />
    897. 

  897.     <StatusVariable id="1410101088" valueType="Boolean" logicalName="IO.PMA.DI_CHBControlTCBrokenAlarm" eventTrigger="" units="" />
    898. 

  898.     <StatusVariable id="1410101089" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeaterOn_FB" eventTrigger="" units="" />
    899. 

  899.     <StatusVariable id="1410101090" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATFinished" eventTrigger="" units="" />
    900. 

  900.     <StatusVariable id="1410101091" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATRunning" eventTrigger="" units="" />
    901. 

  901.     <StatusVariable id="1410101092" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATStart_Fb" eventTrigger="" units="" />
    902. 

  902.     <StatusVariable id="1410101093" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATStop_Fb" eventTrigger="" units="" />
    903. 

  903.     <StatusVariable id="1410101094" valueType="Boolean" logicalName="IO.PMA.DI_CHBMonitorTCBrokenAlarm" eventTrigger="" units="" />
    904. 

  904.     <StatusVariable id="1410101095" valueType="Boolean" logicalName="IO.PMA.DI_CHBOTSW" eventTrigger="" units="" />
    905. 

  905.     <StatusVariable id="1410101096" valueType="Boolean" logicalName="IO.PMA.DI_CHBTCDeviationOutOfRange" eventTrigger="" units="" />
    906. 

  906.     <StatusVariable id="1410101097" valueType="Boolean" logicalName="IO.PMA.DI_ForelineControlTCBrokenAlarm" eventTrigger="" units="" />
    907. 

  907.     <StatusVariable id="1410101098" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeaterOn_FB" eventTrigger="" units="" />
    908. 

  908.     <StatusVariable id="1410101099" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATFinished" eventTrigger="" units="" />
    909. 

  909.     <StatusVariable id="1410101100" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATRunning" eventTrigger="" units="" />
    910. 

  910.     <StatusVariable id="1410101101" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATStart_Fb" eventTrigger="" units="" />
    911. 

  911.     <StatusVariable id="1410101102" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATStop_Fb" eventTrigger="" units="" />
    912. 

  912.     <StatusVariable id="1410101103" valueType="Boolean" logicalName="IO.PMA.DI_ForelineMonitorTCBrokenAlarm" eventTrigger="" units="" />
    913. 

  913.     <StatusVariable id="1410101104" valueType="Boolean" logicalName="IO.PMA.DI_ForelinePressureGaugeAlarm" eventTrigger="" units="" />
    914. 

  914.     <StatusVariable id="1410101105" valueType="Boolean" logicalName="IO.PMA.DI_ForelineTCDeviationOutOfRange" eventTrigger="" units="" />
    915. 

  915.     <StatusVariable id="1410101106" valueType="Boolean" logicalName="IO.PMA.DI_GB_Interlock" eventTrigger="" units="" />
    916. 

  916.     <StatusVariable id="1410101107" valueType="Boolean" logicalName="IO.PMA.DI_GeneratorHardwareInterlock" eventTrigger="" units="" />
    917. 

  917.     <StatusVariable id="1410101108" valueType="Boolean" logicalName="IO.PMA.DI_LidClosed" eventTrigger="" units="" />
    918. 

  918.     <StatusVariable id="1410101109" valueType="Boolean" logicalName="IO.PMA.DI_MFC1PressureSW" eventTrigger="" units="" />
    919. 

  919.     <StatusVariable id="1410101110" valueType="Boolean" logicalName="IO.PMA.DI_MFC2PressureSW" eventTrigger="" units="" />
    920. 

  920.     <StatusVariable id="1410101111" valueType="Boolean" logicalName="IO.PMA.DI_MFC3PressureSW" eventTrigger="" units="" />
    921. 

  921.     <StatusVariable id="1410101112" valueType="Boolean" logicalName="IO.PMA.DI_MFC4PressureSW" eventTrigger="" units="" />
    922. 

  922.     <StatusVariable id="1410101113" valueType="Boolean" logicalName="IO.PMA.DI_MFC5PressureSW" eventTrigger="" units="" />
    923. 

  923.     <StatusVariable id="1410101114" valueType="Boolean" logicalName="IO.PMA.DI_MFC6PressureSW" eventTrigger="" units="" />
    924. 

  924.     <StatusVariable id="1410101115" valueType="Boolean" logicalName="IO.PMA.DI_N2PressureSW" eventTrigger="" units="" />
    925. 

  925.     <StatusVariable id="1410101116" valueType="Boolean" logicalName="IO.PMA.DI_ProcessPressureGaugeAlarm" eventTrigger="" units="" />
    926. 

  926.     <StatusVariable id="1410101117" valueType="Boolean" logicalName="IO.PMA.DI_SouceFan" eventTrigger="" units="" />
    927. 

  927.     <StatusVariable id="1410101118" valueType="Boolean" logicalName="IO.PMA.DI_TMInSafety" eventTrigger="" units="" />
    928. 

  928.     <StatusVariable id="1410101119" valueType="Boolean" logicalName="IO.PMA.DI_TMRBNotExtendToPM1" eventTrigger="" units="" />
    929. 

  929.     <StatusVariable id="1410101120" valueType="Boolean" logicalName="IO.PMA.DI_TMRBNotExtendToPM2" eventTrigger="" units="" />
    930. 

  930.     <StatusVariable id="1410101121" valueType="Boolean" logicalName="IO.PMA.DI_VACSW" eventTrigger="" units="" />
    931. 

  931.     <StatusVariable id="1410101122" valueType="Boolean" logicalName="IO.PMA.DI_WaterLeak" eventTrigger="" units="" />
    932. 

  932.     <StatusVariable id="1410101123" valueType="Boolean" logicalName="IO.PMA.DO_1_GuidePinLifterDown" eventTrigger="" units="" />
    933. 

  933.     <StatusVariable id="1410101124" valueType="Boolean" logicalName="IO.PMA.DO_1_GuidePinLifterUp" eventTrigger="" units="" />
    934. 

  934.     <StatusVariable id="1410101125" valueType="Boolean" logicalName="IO.PMA.DO_1_LEHeaterOn" eventTrigger="" units="" />
    935. 

  935.     <StatusVariable id="1410101126" valueType="Boolean" logicalName="IO.PMA.DO_1_LEHeatPIDATStart" eventTrigger="" units="" />
    936. 

  936.     <StatusVariable id="1410101127" valueType="Boolean" logicalName="IO.PMA.DO_1_LEHeatPIDATStop" eventTrigger="" units="" />
    937. 

  937.     <StatusVariable id="1410101128" valueType="Boolean" logicalName="IO.PMA.DO_1_LiftPinDown" eventTrigger="" units="" />
    938. 

  938.     <StatusVariable id="1410101129" valueType="Boolean" logicalName="IO.PMA.DO_1_LiftPinUp" eventTrigger="" units="" />
    939. 

  939.     <StatusVariable id="1410101130" valueType="Boolean" logicalName="IO.PMA.DO_1_SlitDoorClose" eventTrigger="" units="" />
    940. 

  940.     <StatusVariable id="1410101131" valueType="Boolean" logicalName="IO.PMA.DO_1_SlitDoorOpen" eventTrigger="" units="" />
    941. 

  941.     <StatusVariable id="1410101132" valueType="Boolean" logicalName="IO.PMA.DO_2_GuidePinLifterDown" eventTrigger="" units="" />
    942. 

  942.     <StatusVariable id="1410101133" valueType="Boolean" logicalName="IO.PMA.DO_2_GuidePinLifterUp" eventTrigger="" units="" />
    943. 

  943.     <StatusVariable id="1410101134" valueType="Boolean" logicalName="IO.PMA.DO_2_LEHeaterOn" eventTrigger="" units="" />
    944. 

  944.     <StatusVariable id="1410101135" valueType="Boolean" logicalName="IO.PMA.DO_2_LEHeatPIDATStart" eventTrigger="" units="" />
    945. 

  945.     <StatusVariable id="1410101136" valueType="Boolean" logicalName="IO.PMA.DO_2_LEHeatPIDATStop" eventTrigger="" units="" />
    946. 

  946.     <StatusVariable id="1410101137" valueType="Boolean" logicalName="IO.PMA.DO_2_LiftPinDown" eventTrigger="" units="" />
    947. 

  947.     <StatusVariable id="1410101138" valueType="Boolean" logicalName="IO.PMA.DO_2_LiftPinUp" eventTrigger="" units="" />
    948. 

  948.     <StatusVariable id="1410101139" valueType="Boolean" logicalName="IO.PMA.DO_2_SlitDoorClose" eventTrigger="" units="" />
    949. 

  949.     <StatusVariable id="1410101140" valueType="Boolean" logicalName="IO.PMA.DO_2_SlitDoorOpen" eventTrigger="" units="" />
    950. 

  950.     <StatusVariable id="1410101141" valueType="Boolean" logicalName="IO.PMA.DO_CDAPressureNormal" eventTrigger="" units="" />
    951. 

  951.     <StatusVariable id="1410101142" valueType="Boolean" logicalName="IO.PMA.DO_ChamberPurgeValve" eventTrigger="" units="" />
    952. 

  952.     <StatusVariable id="1410101143" valueType="Boolean" logicalName="IO.PMA.DO_ChamberVentValve" eventTrigger="" units="" />
    953. 

  953.     <StatusVariable id="1410101144" valueType="Boolean" logicalName="IO.PMA.DO_CHBHeaterOn" eventTrigger="" units="" />
    954. 

  954.     <StatusVariable id="1410101145" valueType="Boolean" logicalName="IO.PMA.DO_CHBHeatPIDATStart" eventTrigger="" units="" />
    955. 

  955.     <StatusVariable id="1410101146" valueType="Boolean" logicalName="IO.PMA.DO_CHBHeatPIDATStop" eventTrigger="" units="" />
    956. 

  956.     <StatusVariable id="1410101147" valueType="Boolean" logicalName="IO.PMA.DO_FastPumpingValve" eventTrigger="" units="" />
    957. 

  957.     <StatusVariable id="1410101148" valueType="Boolean" logicalName="IO.PMA.DO_ForelineHeaterOn" eventTrigger="" units="" />
    958. 

  958.     <StatusVariable id="1410101149" valueType="Boolean" logicalName="IO.PMA.DO_ForelineHeatPIDATStart" eventTrigger="" units="" />
    959. 

  959.     <StatusVariable id="1410101150" valueType="Boolean" logicalName="IO.PMA.DO_ForelineHeatPIDATStop" eventTrigger="" units="" />
    960. 

  960.     <StatusVariable id="1410101151" valueType="Boolean" logicalName="IO.PMA.DO_MFC1Valve" eventTrigger="" units="" />
    961. 

  961.     <StatusVariable id="1410101152" valueType="Boolean" logicalName="IO.PMA.DO_MFC2Valve" eventTrigger="" units="" />
    962. 

  962.     <StatusVariable id="1410101153" valueType="Boolean" logicalName="IO.PMA.DO_MFC3Valve" eventTrigger="" units="" />
    963. 

  963.     <StatusVariable id="1410101154" valueType="Boolean" logicalName="IO.PMA.DO_MFC4Valve" eventTrigger="" units="" />
    964. 

  964.     <StatusVariable id="1410101155" valueType="Boolean" logicalName="IO.PMA.DO_MFC5Valve" eventTrigger="" units="" />
    965. 

  965.     <StatusVariable id="1410101156" valueType="Boolean" logicalName="IO.PMA.DO_MFC6Valve" eventTrigger="" units="" />
    966. 

  966.     <StatusVariable id="1410101157" valueType="Boolean" logicalName="IO.PMA.DO_N2Valve" eventTrigger="" units="" />
    967. 

  967.     <StatusVariable id="1410101158" valueType="Boolean" logicalName="IO.PMA.DO_ProcessGasFinalValve" eventTrigger="" units="" />
    968. 

  968.     <StatusVariable id="1410101159" valueType="Boolean" logicalName="IO.PMA.DO_ResetSignal" eventTrigger="" units="" />
    969. 

  969.     <StatusVariable id="1410101160" valueType="Boolean" logicalName="IO.PMA.DO_SoftPumpingValve" eventTrigger="" units="" />
    970. 

  970.     <StatusVariable id="1410202001" valueType="F8" logicalName="IO.PMB.AI_1_CoolantInletTemp" eventTrigger="" units="" />
    971. 

  971.     <StatusVariable id="1410202002" valueType="F8" logicalName="IO.PMB.AI_1_CoolantOutletTemp" eventTrigger="" units="" />
    972. 

  972.     <StatusVariable id="1410202003" valueType="F8" logicalName="IO.PMB.AI_1_LEControlTCTemp" eventTrigger="" units="" />
    973. 

  973.     <StatusVariable id="1410202004" valueType="F8" logicalName="IO.PMB.AI_1_LEMonitorTCTemp" eventTrigger="" units="" />
    974. 

  974.     <StatusVariable id="1410202005" valueType="F8" logicalName="IO.PMB.AI_2_CoolantInletTemp" eventTrigger="" units="" />
    975. 

  975.     <StatusVariable id="1410202006" valueType="F8" logicalName="IO.PMB.AI_2_CoolantOutletTemp" eventTrigger="" units="" />
    976. 

  976.     <StatusVariable id="1410202007" valueType="F8" logicalName="IO.PMB.AI_2_LEControlTCTemp" eventTrigger="" units="" />
    977. 

  977.     <StatusVariable id="1410202008" valueType="F8" logicalName="IO.PMB.AI_2_LEMonitorTCTemp" eventTrigger="" units="" />
    978. 

  978.     <StatusVariable id="1410202009" valueType="F8" logicalName="IO.PMB.AI_ChamberPressure" eventTrigger="" units="" />
    979. 

  979.     <StatusVariable id="1410202010" valueType="F8" logicalName="IO.PMB.AI_CHBControlTCTemp" eventTrigger="" units="" />
    980. 

  980.     <StatusVariable id="1410202011" valueType="F8" logicalName="IO.PMB.AI_CHBMonitorTCTemp" eventTrigger="" units="" />
    981. 

  981.     <StatusVariable id="1410202012" valueType="F8" logicalName="IO.PMB.AI_Day" eventTrigger="" units="" />
    982. 

  982.     <StatusVariable id="1410202013" valueType="F8" logicalName="IO.PMB.AI_ForelineControlTCTemp" eventTrigger="" units="" />
    983. 

  983.     <StatusVariable id="1410202014" valueType="F8" logicalName="IO.PMB.AI_ForelineMonitorTCTemp" eventTrigger="" units="" />
    984. 

  984.     <StatusVariable id="1410202015" valueType="F8" logicalName="IO.PMB.AI_ForelinePressure" eventTrigger="" units="" />
    985. 

  985.     <StatusVariable id="1410202016" valueType="F8" logicalName="IO.PMB.AI_HeartbeatFB" eventTrigger="" units="" />
    986. 

  986.     <StatusVariable id="1410202017" valueType="F8" logicalName="IO.PMB.AI_MFC1Flow" eventTrigger="" units="" />
    987. 

  987.     <StatusVariable id="1410202018" valueType="F8" logicalName="IO.PMB.AI_MFC2Flow" eventTrigger="" units="" />
    988. 

  988.     <StatusVariable id="1410202019" valueType="F8" logicalName="IO.PMB.AI_MFC3Flow" eventTrigger="" units="" />
    989. 

  989.     <StatusVariable id="1410202020" valueType="F8" logicalName="IO.PMB.AI_MFC4Flow" eventTrigger="" units="" />
    990. 

  990.     <StatusVariable id="1410202021" valueType="F8" logicalName="IO.PMB.AI_MFC5Flow" eventTrigger="" units="" />
    991. 

  991.     <StatusVariable id="1410202022" valueType="F8" logicalName="IO.PMB.AI_MFC6Flow" eventTrigger="" units="" />
    992. 

  992.     <StatusVariable id="1410202023" valueType="F8" logicalName="IO.PMB.AI_Minute" eventTrigger="" units="" />
    993. 

  993.     <StatusVariable id="1410202024" valueType="F8" logicalName="IO.PMB.AI_Month" eventTrigger="" units="" />
    994. 

  994.     <StatusVariable id="1410202025" valueType="F8" logicalName="IO.PMB.AI_ProcessPressure" eventTrigger="" units="" />
    995. 

  995.     <StatusVariable id="1410202026" valueType="F8" logicalName="IO.PMB.AI_Second" eventTrigger="" units="" />
    996. 

  996.     <StatusVariable id="1410202027" valueType="F8" logicalName="IO.PMB.AI_ThrottleValveRealPosition" eventTrigger="" units="" />
    997. 

  997.     <StatusVariable id="1410202028" valueType="F8" logicalName="IO.PMB.AI_ThrottleValveRealPressure" eventTrigger="" units="" />
    998. 

  998.     <StatusVariable id="1410202029" valueType="F8" logicalName="IO.PMB.AI_Time" eventTrigger="" units="" />
    999. 

  999.     <StatusVariable id="1410202030" valueType="F8" logicalName="IO.PMB.AI_Year" eventTrigger="" units="" />
    1000. 

  1000.     <StatusVariable id="1410202031" valueType="F8" logicalName="IO.PMB.AO_1_LETemperatureSetpoint" eventTrigger="" units="" />
    1001. 

  1001.     <StatusVariable id="1410202032" valueType="F8" logicalName="IO.PMB.AO_1_LETempLimitSetpoint" eventTrigger="" units="" />
    1002. 

  1002.     <StatusVariable id="1410202033" valueType="F8" logicalName="IO.PMB.AO_2_LETemperatureSetpoint" eventTrigger="" units="" />
    1003. 

  1003.     <StatusVariable id="1410202034" valueType="F8" logicalName="IO.PMB.AO_2_LETempLimitSetpoint" eventTrigger="" units="" />
    1004. 

  1004.     <StatusVariable id="1410202035" valueType="F8" logicalName="IO.PMB.AO_BaisRFEnable" eventTrigger="" units="" />
    1005. 

  1005.     <StatusVariable id="1410202036" valueType="F8" logicalName="IO.PMB.AO_CHBTemperatureSetpoint" eventTrigger="" units="" />
    1006. 

  1006.     <StatusVariable id="1410202037" valueType="F8" logicalName="IO.PMB.AO_CHBTempLimitSetpoint" eventTrigger="" units="" />
    1007. 

  1007.     <StatusVariable id="1410202038" valueType="F8" logicalName="IO.PMB.AO_ForelineTemperatureSetpoint" eventTrigger="" units="" />
    1008. 

  1008.     <StatusVariable id="1410202039" valueType="F8" logicalName="IO.PMB.AO_ForelineTempLimitSetpoint" eventTrigger="" units="" />
    1009. 

  1009.     <StatusVariable id="1410202040" valueType="F8" logicalName="IO.PMB.AO_Heartbeat" eventTrigger="" units="" />
    1010. 

  1010.     <StatusVariable id="1410202041" valueType="F8" logicalName="IO.PMB.AO_MFC1FlowSetpoint" eventTrigger="" units="" />
    1011. 

  1011.     <StatusVariable id="1410202042" valueType="F8" logicalName="IO.PMB.AO_MFC2FlowSetpoint" eventTrigger="" units="" />
    1012. 

  1012.     <StatusVariable id="1410202043" valueType="F8" logicalName="IO.PMB.AO_MFC3FlowSetpoint" eventTrigger="" units="" />
    1013. 

  1013.     <StatusVariable id="1410202044" valueType="F8" logicalName="IO.PMB.AO_MFC4FlowSetpoint" eventTrigger="" units="" />
    1014. 

  1014.     <StatusVariable id="1410202045" valueType="F8" logicalName="IO.PMB.AO_MFC5FlowSetpoint" eventTrigger="" units="" />
    1015. 

  1015.     <StatusVariable id="1410202046" valueType="F8" logicalName="IO.PMB.AO_MFC6FlowSetpoint" eventTrigger="" units="" />
    1016. 

  1016.     <StatusVariable id="1410202047" valueType="F8" logicalName="IO.PMB.AO_ThrottleValvePositionSetpoint" eventTrigger="" units="" />
    1017. 

  1017.     <StatusVariable id="1410202048" valueType="F8" logicalName="IO.PMB.AO_ThrottleValvePressureSetpoint" eventTrigger="" units="" />
    1018. 

  1018.     <StatusVariable id="1410202049" valueType="F8" logicalName="IO.PMB.AO_ThrottleValveWorkMode" eventTrigger="" units="" />
    1019. 

  1019.     <StatusVariable id="1410202050" valueType="Boolean" logicalName="IO.PMB.DI_1_CoolantInletTCBrokenAlarm" eventTrigger="" units="" />
    1020. 

  1020.     <StatusVariable id="1410202051" valueType="Boolean" logicalName="IO.PMB.DI_1_CoolantOutletTCBrokenAlarm" eventTrigger="" units="" />
    1021. 

  1021.     <StatusVariable id="1410202052" valueType="Boolean" logicalName="IO.PMB.DI_1_CoolingWaterFlowSW" eventTrigger="" units="" />
    1022. 

  1022.     <StatusVariable id="1410202053" valueType="Boolean" logicalName="IO.PMB.DI_1_GuidePinLifterDownPos" eventTrigger="" units="" />
    1023. 

  1023.     <StatusVariable id="1410202054" valueType="Boolean" logicalName="IO.PMB.DI_1_GuidePinLifterUpPos" eventTrigger="" units="" />
    1024. 

  1024.     <StatusVariable id="1410202055" valueType="Boolean" logicalName="IO.PMB.DI_1_LEControlTCBrokenAlarm" eventTrigger="" units="" />
    1025. 

  1025.     <StatusVariable id="1410202056" valueType="Boolean" logicalName="IO.PMB.DI_1_LEHeaterOn_FB" eventTrigger="" units="" />
    1026. 

  1026.     <StatusVariable id="1410202057" valueType="Boolean" logicalName="IO.PMB.DI_1_LEHeatPIDATFinished" eventTrigger="" units="" />
    1027. 

  1027.     <StatusVariable id="1410202058" valueType="Boolean" logicalName="IO.PMB.DI_1_LEHeatPIDATRunning" eventTrigger="" units="" />
    1028. 

  1028.     <StatusVariable id="1410202059" valueType="Boolean" logicalName="IO.PMB.DI_1_LEHeatPIDATStart_Fb" eventTrigger="" units="" />
    1029. 

  1029.     <StatusVariable id="1410202060" valueType="Boolean" logicalName="IO.PMB.DI_1_LEHeatPIDATStop_Fb" eventTrigger="" units="" />
    1030. 

  1030.     <StatusVariable id="1410202061" valueType="Boolean" logicalName="IO.PMB.DI_1_LEMonitorTCBrokenAlarm" eventTrigger="" units="" />
    1031. 

  1031.     <StatusVariable id="1410202062" valueType="Boolean" logicalName="IO.PMB.DI_1_LEOTSW" eventTrigger="" units="" />
    1032. 

  1032.     <StatusVariable id="1410202063" valueType="Boolean" logicalName="IO.PMB.DI_1_LETCDeviationOutOfRange" eventTrigger="" units="" />
    1033. 

  1033.     <StatusVariable id="1410202064" valueType="Boolean" logicalName="IO.PMB.DI_1_LiftPinDown" eventTrigger="" units="" />
    1034. 

  1034.     <StatusVariable id="1410202065" valueType="Boolean" logicalName="IO.PMB.DI_1_LiftPinUp" eventTrigger="" units="" />
    1035. 

  1035.     <StatusVariable id="1410202066" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    1036. 

  1036.     <StatusVariable id="1410202067" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    1037. 

  1037.     <StatusVariable id="1410202068" valueType="Boolean" logicalName="IO.PMB.DI_2_CoolantInletTCBrokenAlarm" eventTrigger="" units="" />
    1038. 

  1038.     <StatusVariable id="1410202069" valueType="Boolean" logicalName="IO.PMB.DI_2_CoolantOutletTCBrokenAlarm" eventTrigger="" units="" />
    1039. 

  1039.     <StatusVariable id="1410202070" valueType="Boolean" logicalName="IO.PMB.DI_2_CoolingWaterFlowSW" eventTrigger="" units="" />
    1040. 

  1040.     <StatusVariable id="1410202071" valueType="Boolean" logicalName="IO.PMB.DI_2_GuidePinLifterDownPos" eventTrigger="" units="" />
    1041. 

  1041.     <StatusVariable id="1410202072" valueType="Boolean" logicalName="IO.PMB.DI_2_GuidePinLifterUpPos" eventTrigger="" units="" />
    1042. 

  1042.     <StatusVariable id="1410202073" valueType="Boolean" logicalName="IO.PMB.DI_2_LEControlTCBrokenAlarm" eventTrigger="" units="" />
    1043. 

  1043.     <StatusVariable id="1410202074" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeaterOn_FB" eventTrigger="" units="" />
    1044. 

  1044.     <StatusVariable id="1410202075" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATFinished" eventTrigger="" units="" />
    1045. 

  1045.     <StatusVariable id="1410202076" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATRunning" eventTrigger="" units="" />
    1046. 

  1046.     <StatusVariable id="1410202077" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATStart_Fb" eventTrigger="" units="" />
    1047. 

  1047.     <StatusVariable id="1410202078" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATStop_Fb" eventTrigger="" units="" />
    1048. 

  1048.     <StatusVariable id="1410202079" valueType="Boolean" logicalName="IO.PMB.DI_2_LEMonitorTCBrokenAlarm" eventTrigger="" units="" />
    1049. 

  1049.     <StatusVariable id="1410202080" valueType="Boolean" logicalName="IO.PMB.DI_2_LEOTSW" eventTrigger="" units="" />
    1050. 

  1050.     <StatusVariable id="1410202081" valueType="Boolean" logicalName="IO.PMB.DI_2_LETCDeviationOutOfRange" eventTrigger="" units="" />
    1051. 

  1051.     <StatusVariable id="1410202082" valueType="Boolean" logicalName="IO.PMB.DI_2_LiftPinDown" eventTrigger="" units="" />
    1052. 

  1052.     <StatusVariable id="1410202083" valueType="Boolean" logicalName="IO.PMB.DI_2_LiftPinUp" eventTrigger="" units="" />
    1053. 

  1053.     <StatusVariable id="1410202084" valueType="Boolean" logicalName="IO.PMB.DI_2_SlitDoorClosePos" eventTrigger="" units="" />
    1054. 

  1054.     <StatusVariable id="1410202085" valueType="Boolean" logicalName="IO.PMB.DI_2_SlitDoorOpenPos" eventTrigger="" units="" />
    1055. 

  1055.     <StatusVariable id="1410202086" valueType="Boolean" logicalName="IO.PMB.DI_ATMSW" eventTrigger="" units="" />
    1056. 

  1056.     <StatusVariable id="1410202087" valueType="Boolean" logicalName="IO.PMB.DI_ChamberPressureGaugeAlarm" eventTrigger="" units="" />
    1057. 

  1057.     <StatusVariable id="1410202088" valueType="Boolean" logicalName="IO.PMB.DI_CHBControlTCBrokenAlarm" eventTrigger="" units="" />
    1058. 

  1058.     <StatusVariable id="1410202089" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeaterOn_FB" eventTrigger="" units="" />
    1059. 

  1059.     <StatusVariable id="1410202090" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATFinished" eventTrigger="" units="" />
    1060. 

  1060.     <StatusVariable id="1410202091" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATRunning" eventTrigger="" units="" />
    1061. 

  1061.     <StatusVariable id="1410202092" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATStart_Fb" eventTrigger="" units="" />
    1062. 

  1062.     <StatusVariable id="1410202093" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATStop_Fb" eventTrigger="" units="" />
    1063. 

  1063.     <StatusVariable id="1410202094" valueType="Boolean" logicalName="IO.PMB.DI_CHBMonitorTCBrokenAlarm" eventTrigger="" units="" />
    1064. 

  1064.     <StatusVariable id="1410202095" valueType="Boolean" logicalName="IO.PMB.DI_CHBOTSW" eventTrigger="" units="" />
    1065. 

  1065.     <StatusVariable id="1410202096" valueType="Boolean" logicalName="IO.PMB.DI_CHBTCDeviationOutOfRange" eventTrigger="" units="" />
    1066. 

  1066.     <StatusVariable id="1410202097" valueType="Boolean" logicalName="IO.PMB.DI_ForelineControlTCBrokenAlarm" eventTrigger="" units="" />
    1067. 

  1067.     <StatusVariable id="1410202098" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeaterOn_FB" eventTrigger="" units="" />
    1068. 

  1068.     <StatusVariable id="1410202099" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATFinished" eventTrigger="" units="" />
    1069. 

  1069.     <StatusVariable id="1410202100" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATRunning" eventTrigger="" units="" />
    1070. 

  1070.     <StatusVariable id="1410202101" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATStart_Fb" eventTrigger="" units="" />
    1071. 

  1071.     <StatusVariable id="1410202102" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATStop_Fb" eventTrigger="" units="" />
    1072. 

  1072.     <StatusVariable id="1410202103" valueType="Boolean" logicalName="IO.PMB.DI_ForelineMonitorTCBrokenAlarm" eventTrigger="" units="" />
    1073. 

  1073.     <StatusVariable id="1410202104" valueType="Boolean" logicalName="IO.PMB.DI_ForelinePressureGaugeAlarm" eventTrigger="" units="" />
    1074. 

  1074.     <StatusVariable id="1410202105" valueType="Boolean" logicalName="IO.PMB.DI_ForelineTCDeviationOutOfRange" eventTrigger="" units="" />
    1075. 

  1075.     <StatusVariable id="1410202106" valueType="Boolean" logicalName="IO.PMB.DI_GB_Interlock" eventTrigger="" units="" />
    1076. 

  1076.     <StatusVariable id="1410202107" valueType="Boolean" logicalName="IO.PMB.DI_GeneratorHardwareInterlock" eventTrigger="" units="" />
    1077. 

  1077.     <StatusVariable id="1410202108" valueType="Boolean" logicalName="IO.PMB.DI_LidClosed" eventTrigger="" units="" />
    1078. 

  1078.     <StatusVariable id="1410202109" valueType="Boolean" logicalName="IO.PMB.DI_MFC1PressureSW" eventTrigger="" units="" />
    1079. 

  1079.     <StatusVariable id="1410202110" valueType="Boolean" logicalName="IO.PMB.DI_MFC2PressureSW" eventTrigger="" units="" />
    1080. 

  1080.     <StatusVariable id="1410202111" valueType="Boolean" logicalName="IO.PMB.DI_MFC3PressureSW" eventTrigger="" units="" />
    1081. 

  1081.     <StatusVariable id="1410202112" valueType="Boolean" logicalName="IO.PMB.DI_MFC4PressureSW" eventTrigger="" units="" />
    1082. 

  1082.     <StatusVariable id="1410202113" valueType="Boolean" logicalName="IO.PMB.DI_MFC5PressureSW" eventTrigger="" units="" />
    1083. 

  1083.     <StatusVariable id="1410202114" valueType="Boolean" logicalName="IO.PMB.DI_MFC6PressureSW" eventTrigger="" units="" />
    1084. 

  1084.     <StatusVariable id="1410202115" valueType="Boolean" logicalName="IO.PMB.DI_N2PressureSW" eventTrigger="" units="" />
    1085. 

  1085.     <StatusVariable id="1410202116" valueType="Boolean" logicalName="IO.PMB.DI_ProcessPressureGaugeAlarm" eventTrigger="" units="" />
    1086. 

  1086.     <StatusVariable id="1410202117" valueType="Boolean" logicalName="IO.PMB.DI_SouceFan" eventTrigger="" units="" />
    1087. 

  1087.     <StatusVariable id="1410202118" valueType="Boolean" logicalName="IO.PMB.DI_TMInSafety" eventTrigger="" units="" />
    1088. 

  1088.     <StatusVariable id="1410202119" valueType="Boolean" logicalName="IO.PMB.DI_TMRBNotExtendToPM1" eventTrigger="" units="" />
    1089. 

  1089.     <StatusVariable id="1410202120" valueType="Boolean" logicalName="IO.PMB.DI_TMRBNotExtendToPM2" eventTrigger="" units="" />
    1090. 

  1090.     <StatusVariable id="1410202121" valueType="Boolean" logicalName="IO.PMB.DI_VACSW" eventTrigger="" units="" />
    1091. 

  1091.     <StatusVariable id="1410202122" valueType="Boolean" logicalName="IO.PMB.DI_WaterLeak" eventTrigger="" units="" />
    1092. 

  1092.     <StatusVariable id="1410202123" valueType="Boolean" logicalName="IO.PMB.DO_1_GuidePinLifterDown" eventTrigger="" units="" />
    1093. 

  1093.     <StatusVariable id="1410202124" valueType="Boolean" logicalName="IO.PMB.DO_1_GuidePinLifterUp" eventTrigger="" units="" />
    1094. 

  1094.     <StatusVariable id="1410202125" valueType="Boolean" logicalName="IO.PMB.DO_1_LEHeaterOn" eventTrigger="" units="" />
    1095. 

  1095.     <StatusVariable id="1410202126" valueType="Boolean" logicalName="IO.PMB.DO_1_LEHeatPIDATStart" eventTrigger="" units="" />
    1096. 

  1096.     <StatusVariable id="1410202127" valueType="Boolean" logicalName="IO.PMB.DO_1_LEHeatPIDATStop" eventTrigger="" units="" />
    1097. 

  1097.     <StatusVariable id="1410202128" valueType="Boolean" logicalName="IO.PMB.DO_1_LiftPinDown" eventTrigger="" units="" />
    1098. 

  1098.     <StatusVariable id="1410202129" valueType="Boolean" logicalName="IO.PMB.DO_1_LiftPinUp" eventTrigger="" units="" />
    1099. 

  1099.     <StatusVariable id="1410202130" valueType="Boolean" logicalName="IO.PMB.DO_1_SlitDoorClose" eventTrigger="" units="" />
    1100. 

  1100.     <StatusVariable id="1410202131" valueType="Boolean" logicalName="IO.PMB.DO_1_SlitDoorOpen" eventTrigger="" units="" />
    1101. 

  1101.     <StatusVariable id="1410202132" valueType="Boolean" logicalName="IO.PMB.DO_2_GuidePinLifterDown" eventTrigger="" units="" />
    1102. 

  1102.     <StatusVariable id="1410202133" valueType="Boolean" logicalName="IO.PMB.DO_2_GuidePinLifterUp" eventTrigger="" units="" />
    1103. 

  1103.     <StatusVariable id="1410202134" valueType="Boolean" logicalName="IO.PMB.DO_2_LEHeaterOn" eventTrigger="" units="" />
    1104. 

  1104.     <StatusVariable id="1410202135" valueType="Boolean" logicalName="IO.PMB.DO_2_LEHeatPIDATStart" eventTrigger="" units="" />
    1105. 

  1105.     <StatusVariable id="1410202136" valueType="Boolean" logicalName="IO.PMB.DO_2_LEHeatPIDATStop" eventTrigger="" units="" />
    1106. 

  1106.     <StatusVariable id="1410202137" valueType="Boolean" logicalName="IO.PMB.DO_2_LiftPinDown" eventTrigger="" units="" />
    1107. 

  1107.     <StatusVariable id="1410202138" valueType="Boolean" logicalName="IO.PMB.DO_2_LiftPinUp" eventTrigger="" units="" />
    1108. 

  1108.     <StatusVariable id="1410202139" valueType="Boolean" logicalName="IO.PMB.DO_2_SlitDoorClose" eventTrigger="" units="" />
    1109. 

  1109.     <StatusVariable id="1410202140" valueType="Boolean" logicalName="IO.PMB.DO_2_SlitDoorOpen" eventTrigger="" units="" />
    1110. 

  1110.     <StatusVariable id="1410202141" valueType="Boolean" logicalName="IO.PMB.DO_CDAPressureNormal" eventTrigger="" units="" />
    1111. 

  1111.     <StatusVariable id="1410202142" valueType="Boolean" logicalName="IO.PMB.DO_ChamberPurgeValve" eventTrigger="" units="" />
    1112. 

  1112.     <StatusVariable id="1410202143" valueType="Boolean" logicalName="IO.PMB.DO_ChamberVentValve" eventTrigger="" units="" />
    1113. 

  1113.     <StatusVariable id="1410202144" valueType="Boolean" logicalName="IO.PMB.DO_CHBHeaterOn" eventTrigger="" units="" />
    1114. 

  1114.     <StatusVariable id="1410202145" valueType="Boolean" logicalName="IO.PMB.DO_CHBHeatPIDATStart" eventTrigger="" units="" />
    1115. 

  1115.     <StatusVariable id="1410202146" valueType="Boolean" logicalName="IO.PMB.DO_CHBHeatPIDATStop" eventTrigger="" units="" />
    1116. 

  1116.     <StatusVariable id="1410202147" valueType="Boolean" logicalName="IO.PMB.DO_FastPumpingValve" eventTrigger="" units="" />
    1117. 

  1117.     <StatusVariable id="1410202148" valueType="Boolean" logicalName="IO.PMB.DO_ForelineHeaterOn" eventTrigger="" units="" />
    1118. 

  1118.     <StatusVariable id="1410202149" valueType="Boolean" logicalName="IO.PMB.DO_ForelineHeatPIDATStart" eventTrigger="" units="" />
    1119. 

  1119.     <StatusVariable id="1410202150" valueType="Boolean" logicalName="IO.PMB.DO_ForelineHeatPIDATStop" eventTrigger="" units="" />
    1120. 

  1120.     <StatusVariable id="1410202151" valueType="Boolean" logicalName="IO.PMB.DO_MFC1Valve" eventTrigger="" units="" />
    1121. 

  1121.     <StatusVariable id="1410202152" valueType="Boolean" logicalName="IO.PMB.DO_MFC2Valve" eventTrigger="" units="" />
    1122. 

  1122.     <StatusVariable id="1410202153" valueType="Boolean" logicalName="IO.PMB.DO_MFC3Valve" eventTrigger="" units="" />
    1123. 

  1123.     <StatusVariable id="1410202154" valueType="Boolean" logicalName="IO.PMB.DO_MFC4Valve" eventTrigger="" units="" />
    1124. 

  1124.     <StatusVariable id="1410202155" valueType="Boolean" logicalName="IO.PMB.DO_MFC5Valve" eventTrigger="" units="" />
    1125. 

  1125.     <StatusVariable id="1410202156" valueType="Boolean" logicalName="IO.PMB.DO_MFC6Valve" eventTrigger="" units="" />
    1126. 

  1126.     <StatusVariable id="1410202157" valueType="Boolean" logicalName="IO.PMB.DO_N2Valve" eventTrigger="" units="" />
    1127. 

  1127.     <StatusVariable id="1410202158" valueType="Boolean" logicalName="IO.PMB.DO_ProcessGasFinalValve" eventTrigger="" units="" />
    1128. 

  1128.     <StatusVariable id="1410202159" valueType="Boolean" logicalName="IO.PMB.DO_ResetSignal" eventTrigger="" units="" />
    1129. 

  1129.     <StatusVariable id="1410202160" valueType="Boolean" logicalName="IO.PMB.DO_SoftPumpingValve" eventTrigger="" units="" />
    1130. 

  1130.     <StatusVariable id="1410203001" valueType="F8" logicalName="IO.System.AI_Buffer_AControlTCTemp" eventTrigger="" units="" />
    1131. 

  1131.     <StatusVariable id="1410203002" valueType="F8" logicalName="IO.System.AI_Buffer_AMonitorTCTemp" eventTrigger="" units="" />
    1132. 

  1132.     <StatusVariable id="1410203003" valueType="F8" logicalName="IO.System.AI_Day" eventTrigger="" units="" />
    1133. 

  1133.     <StatusVariable id="1410203004" valueType="F8" logicalName="IO.System.AI_HeartbeatFB" eventTrigger="" units="" />
    1134. 

  1134.     <StatusVariable id="1410203005" valueType="F8" logicalName="IO.System.AI_Minute" eventTrigger="" units="" />
    1135. 

  1135.     <StatusVariable id="1410203006" valueType="F8" logicalName="IO.System.AI_Month" eventTrigger="" units="" />
    1136. 

  1136.     <StatusVariable id="1410203007" valueType="F8" logicalName="IO.System.AI_Second" eventTrigger="" units="" />
    1137. 

  1137.     <StatusVariable id="1410203008" valueType="F8" logicalName="IO.System.AI_Time" eventTrigger="" units="" />
    1138. 

  1138.     <StatusVariable id="1410203009" valueType="F8" logicalName="IO.System.AI_Year" eventTrigger="" units="" />
    1139. 

  1139.     <StatusVariable id="1410203010" valueType="F8" logicalName="IO.System.AO_Buffer_ATemperatureSetpoint" eventTrigger="" units="" />
    1140. 

  1140.     <StatusVariable id="1410203011" valueType="F8" logicalName="IO.System.AO_Buffer_ATempLimitSetpoint" eventTrigger="" units="" />
    1141. 

  1141.     <StatusVariable id="1410203012" valueType="F8" logicalName="IO.System.AO_Heartbeat" eventTrigger="" units="" />
    1142. 

  1142.     <StatusVariable id="1410203013" valueType="Boolean" logicalName="IO.System.DI_Buffer_ABigWaferProtrusion" eventTrigger="" units="" />
    1143. 

  1143.     <StatusVariable id="1410203014" valueType="Boolean" logicalName="IO.System.DI_Buffer_AControlTCBrokenAlarm" eventTrigger="" units="" />
    1144. 

  1144.     <StatusVariable id="1410203015" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatOn_Fb" eventTrigger="" units="" />
    1145. 

  1145.     <StatusVariable id="1410203016" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATFinished" eventTrigger="" units="" />
    1146. 

  1146.     <StatusVariable id="1410203017" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATRunning" eventTrigger="" units="" />
    1147. 

  1147.     <StatusVariable id="1410203018" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATStart_Fb" eventTrigger="" units="" />
    1148. 

  1148.     <StatusVariable id="1410203019" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATStop_Fb" eventTrigger="" units="" />
    1149. 

  1149.     <StatusVariable id="1410203020" valueType="Boolean" logicalName="IO.System.DI_Buffer_AMonitorTCBrokenAlarm" eventTrigger="" units="" />
    1150. 

  1150.     <StatusVariable id="1410203021" valueType="Boolean" logicalName="IO.System.DI_Buffer_ASmallWaferProtrusion" eventTrigger="" units="" />
    1151. 

  1151.     <StatusVariable id="1410203022" valueType="Boolean" logicalName="IO.System.DI_Buffer_ATCDeviationOutOfRange" eventTrigger="" units="" />
    1152. 

  1152.     <StatusVariable id="1410203023" valueType="Boolean" logicalName="IO.System.DI_Buffer_AWaferInPos" eventTrigger="" units="" />
    1153. 

  1153.     <StatusVariable id="1410203024" valueType="Boolean" logicalName="IO.System.DI_Buffer_BBigWaferProtrusion" eventTrigger="" units="" />
    1154. 

  1154.     <StatusVariable id="1410203025" valueType="Boolean" logicalName="IO.System.DI_Buffer_BSmallWaferProtrusion" eventTrigger="" units="" />
    1155. 

  1155.     <StatusVariable id="1410203026" valueType="Boolean" logicalName="IO.System.DI_Buffer_BWaferInPos" eventTrigger="" units="" />
    1156. 

  1156.     <StatusVariable id="1410203027" valueType="Boolean" logicalName="IO.System.DI_CDAPressureSW" eventTrigger="" units="" />
    1157. 

  1157.     <StatusVariable id="1410203028" valueType="Boolean" logicalName="IO.System.DI_EFEMRBNotExtendBFA" eventTrigger="" units="" />
    1158. 

  1158.     <StatusVariable id="1410203029" valueType="Boolean" logicalName="IO.System.DI_EFEMRBNotExtendBFB" eventTrigger="" units="" />
    1159. 

  1159.     <StatusVariable id="1410203030" valueType="Boolean" logicalName="IO.System.DI_EFEMSidePlanClosed" eventTrigger="" units="" />
    1160. 

  1160.     <StatusVariable id="1410203031" valueType="Boolean" logicalName="IO.System.DI_INONormal" eventTrigger="" units="" />
    1161. 

  1161.     <StatusVariable id="1410203032" valueType="Boolean" logicalName="IO.System.DI_MaintenanceMode" eventTrigger="" units="" />
    1162. 

  1162.     <StatusVariable id="1410203033" valueType="Boolean" logicalName="IO.System.DI_RunMode" eventTrigger="" units="" />
    1163. 

  1163.     <StatusVariable id="1410203034" valueType="Boolean" logicalName="IO.System.DI_TMBufferOTSW" eventTrigger="" units="" />
    1164. 

  1164.     <StatusVariable id="1410203035" valueType="Boolean" logicalName="IO.System.DI_TMFFUNormal" eventTrigger="" units="" />
    1165. 

  1165.     <StatusVariable id="1410203036" valueType="Boolean" logicalName="IO.System.DI_TMInSafety" eventTrigger="" units="" />
    1166. 

  1166.     <StatusVariable id="1410203037" valueType="Boolean" logicalName="IO.System.DI_TMPowerOn" eventTrigger="" units="" />
    1167. 

  1167.     <StatusVariable id="1410203038" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendBFA" eventTrigger="" units="" />
    1168. 

  1168.     <StatusVariable id="1410203039" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendBFB" eventTrigger="" units="" />
    1169. 

  1169.     <StatusVariable id="1410203040" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMA1" eventTrigger="" units="" />
    1170. 

  1170.     <StatusVariable id="1410203041" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMA2" eventTrigger="" units="" />
    1171. 

  1171.     <StatusVariable id="1410203042" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMB1" eventTrigger="" units="" />
    1172. 

  1172.     <StatusVariable id="1410203043" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMB2" eventTrigger="" units="" />
    1173. 

  1173.     <StatusVariable id="1410203044" valueType="Boolean" logicalName="IO.System.DI_TMRobotAlarm" eventTrigger="" units="" />
    1174. 

  1174.     <StatusVariable id="1410203045" valueType="Boolean" logicalName="IO.System.DI_TMSideDoorClosed" eventTrigger="" units="" />
    1175. 

  1175.     <StatusVariable id="1410203046" valueType="Boolean" logicalName="IO.System.DI_VaccumPressureSW" eventTrigger="" units="" />
    1176. 

  1176.     <StatusVariable id="1410203047" valueType="Boolean" logicalName="IO.System.DI_WaterFlowSW" eventTrigger="" units="" />
    1177. 

  1177.     <StatusVariable id="1410203048" valueType="Boolean" logicalName="IO.System.DI_WaterLeakSW" eventTrigger="" units="" />
    1178. 

  1178.     <StatusVariable id="1410203049" valueType="Boolean" logicalName="IO.System.DO_Buffer_AHeatPIDATStart" eventTrigger="" units="" />
    1179. 

  1179.     <StatusVariable id="1410203050" valueType="Boolean" logicalName="IO.System.DO_Buffer_AHeatPIDATStop" eventTrigger="" units="" />
    1180. 

  1180.     <StatusVariable id="1410203051" valueType="Boolean" logicalName="IO.System.DO_BufferHeatOn" eventTrigger="" units="" />
    1181. 

  1181.     <StatusVariable id="1410203052" valueType="Boolean" logicalName="IO.System.DO_WaterInletValve" eventTrigger="" units="" />
    1182. 

  1182.     <StatusVariable id="1410203053" valueType="Boolean" logicalName="IO.System.DI_TMRBEMS" eventTrigger="" units="" />
    1183. 

  1183.     <StatusVariable id="1410203054" valueType="Boolean" logicalName="IO.System.DI_TMRBTeachMode" eventTrigger="" units="" />
    1184. 

  1184.     <StatusVariable id="1410203055" valueType="Boolean" logicalName="IO.System.DI_WaterInletValve" eventTrigger="" units="" />
    1185. 

  1185.     <StatusVariable id="1410203056" valueType="Boolean" logicalName="IO.System.DO_IonizerInterrupt" eventTrigger="" units="" />
    1186. 

  1186.     <StatusVariable id="1420101001" valueType="Ascii" logicalName="Scheduler.CycledWaferCount" eventTrigger="" units="" />
    1187. 

  1187.     <StatusVariable id="1420101002" valueType="Ascii" logicalName="Scheduler.CycleWaferCountSetPoint" eventTrigger="" units="" />
    1188. 

  1188.     <StatusVariable id="1420101003" valueType="Boolean" logicalName="Scheduler.IsCycleMode" eventTrigger="" units="" />
    1189. 

  1189.     <StatusVariable id="1420101004" valueType="F8" logicalName="Scheduler.LiveThroughput" eventTrigger="" units="" />
    1190. 

  1190.     <StatusVariable id="1420101005" valueType="F8" logicalName="Scheduler.Throughput" eventTrigger="" units="" />
    1191. 

  1191.     <StatusVariable id="1420101006" valueType="Ascii" logicalName="Scheduler.CycleCountSetPoint" eventTrigger="" units="" />
    1192. 

  1192.     <StatusVariable id="1420101007" valueType="Ascii" logicalName="Scheduler.CycledCount" eventTrigger="" units="" />
    1193. 

  1193.     <StatusVariable id="1430101001" valueType="F8" logicalName="BufferA.Heater" eventTrigger="" units="" />
    1194. 

  1194.     <StatusVariable id="1440101001" valueType="Ascii" logicalName="FFU.FFU1Speed" eventTrigger="" units="" />
    1195. 

  1195.     <StatusVariable id="1440101002" valueType="Ascii" logicalName="FFU.FFU2Speed" eventTrigger="" units="" />
    1196. 

  1196.     <StatusVariable id="1440101003" valueType="Ascii" logicalName="FFU.FFU3Speed" eventTrigger="" units="" />
    1197. 

  1197.     <StatusVariable id="1450101001" valueType="Ascii" logicalName="TMCylce.RemainedCycleCount" eventTrigger="" units="" />
    1198. 

  1198.   </StatusVariables>
    1199. 

  1199.   <EquipmentConstants>
    1200. 

  1200.     <EquipmentConstant id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    1201. 

  1201.     <EquipmentConstant id="2001" valueType="U4" logicalName="FA.SpoolingMaxTransmit" value="100" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    1202. 

  1202.     <EquipmentConstant id="2003" valueType="Boolean" logicalName="FA.SpoolingFullOverWrite" value="FALSE" min="" max="" units="" defaultValue="" eventTrigger="" />
    1203. 

  1203.     <EquipmentConstant id="2005" valueType="U4" logicalName="FA.SpoolingCapability" value="100" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    1204. 

  1204.     <EquipmentConstant id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="False" min="" max="" units="" defaultValue="" eventTrigger="" />
    1205. 

  1205.     <EquipmentConstant id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    1206. 

  1206.     <EquipmentConstant id="10101001" valueType="Ascii" logicalName="System.ATMProcessDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1207. 

  1207.     <EquipmentConstant id="10101002" valueType="Ascii" logicalName="System.AutoAlignManualTransfer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1208. 

  1208.     <EquipmentConstant id="10101003" valueType="Ascii" logicalName="System.AutoPassCooling" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1209. 

  1209.     <EquipmentConstant id="10101004" valueType="Ascii" logicalName="System.BigWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1210. 

  1210.     <EquipmentConstant id="10101005" valueType="Ascii" logicalName="System.BypassInterlock" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1211. 

  1211.     <EquipmentConstant id="10101006" valueType="Ascii" logicalName="System.CycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1212. 

  1212.     <EquipmentConstant id="10101007" valueType="Ascii" logicalName="System.DataCollectionInterval" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1213. 

  1213.     <EquipmentConstant id="10101008" valueType="Ascii" logicalName="System.IsATMMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1214. 

  1214.     <EquipmentConstant id="10101009" valueType="Ascii" logicalName="System.IsCycleMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1215. 

  1215.     <EquipmentConstant id="10101010" valueType="Ascii" logicalName="System.IsEnableCompressLogFileFunc" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1216. 

  1216.     <EquipmentConstant id="10101011" valueType="Ascii" logicalName="System.IsServiceControlMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1217. 

  1217.     <EquipmentConstant id="10101012" valueType="Ascii" logicalName="System.IsSimulatorMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1218. 

  1218.     <EquipmentConstant id="10101013" valueType="Ascii" logicalName="System.LogsSaveDays" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1219. 

  1219.     <EquipmentConstant id="10101014" valueType="Ascii" logicalName="System.MaxTemperatureToleranceToTarget" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1220. 

  1220.     <EquipmentConstant id="10101015" valueType="Ascii" logicalName="System.MidWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1221. 

  1221.     <EquipmentConstant id="10101016" valueType="Ascii" logicalName="System.SingleLogFileMaxSize" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1222. 

  1222.     <EquipmentConstant id="10101017" valueType="Ascii" logicalName="System.SmallWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1223. 

  1223.     <EquipmentConstant id="10101018" valueType="Ascii" logicalName="System.TotalCycledWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1224. 

  1224.     <EquipmentConstant id="10101019" valueType="Ascii" logicalName="System.BufferSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1225. 

  1225.     <EquipmentConstant id="10101020" valueType="Ascii" logicalName="System.CycleBy" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1226. 

  1226.     <EquipmentConstant id="10101021" valueType="Ascii" logicalName="System.CycleWaferCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1227. 

  1227.     <EquipmentConstant id="10101022" valueType="Ascii" logicalName="System.DefaultCoolingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1228. 

  1228.     <EquipmentConstant id="10101023" valueType="Ascii" logicalName="System.DefaultCreateWaferSize" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1229. 

  1229.     <EquipmentConstant id="10101024" valueType="Ascii" logicalName="System.ProcessEnableCheckLE" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1230. 

  1230.     <EquipmentConstant id="10101025" valueType="Ascii" logicalName="System.DataKeepDays" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1231. 

  1231.     <EquipmentConstant id="10101026" valueType="Ascii" logicalName="System.EnableDataClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1232. 

  1232.     <EquipmentConstant id="10201001" valueType="Ascii" logicalName="System.SetUp.EPD.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1233. 

  1233.     <EquipmentConstant id="10202001" valueType="Ascii" logicalName="System.FDC.DataGroupName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1234. 

  1234.     <EquipmentConstant id="10202002" valueType="Ascii" logicalName="System.FDC.DelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1235. 

  1235.     <EquipmentConstant id="10202003" valueType="Ascii" logicalName="System.FDC.SampleInterval" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1236. 

  1236.     <EquipmentConstant id="10203001" valueType="Ascii" logicalName="System.Job.BuzzerTimeWhenJobDone" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1237. 

  1237.     <EquipmentConstant id="10203002" valueType="Ascii" logicalName="System.Job.EnablePopDialogWhenJobDone" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1238. 

  1238.     <EquipmentConstant id="10204001" valueType="Ascii" logicalName="System.Recipe.ChamberModules" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1239. 

  1239.     <EquipmentConstant id="10204002" valueType="Ascii" logicalName="System.Recipe.SupportedChamberType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1240. 

  1240.     <EquipmentConstant id="10204003" valueType="Ascii" logicalName="System.Recipe.SupportedProcessType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1241. 

  1241.     <EquipmentConstant id="10205001" valueType="Ascii" logicalName="System.Scheduler.GroupWaferBySequence" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1242. 

  1242.     <EquipmentConstant id="10205002" valueType="Ascii" logicalName="System.Scheduler.IsRunInParallelMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1243. 

  1243.     <EquipmentConstant id="10205003" valueType="Ascii" logicalName="System.Scheduler.ProcessFromSlotMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1244. 

  1244.     <EquipmentConstant id="10205004" valueType="Ascii" logicalName="System.Scheduler.WaferCountBelowWhichStartNewProcessJob" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1245. 

  1245.     <EquipmentConstant id="10205005" valueType="Ascii" logicalName="System.Scheduler.WaitLoadTimeOut" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1246. 

  1246.     <EquipmentConstant id="10206001" valueType="Ascii" logicalName="System.SignalTower.Light" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1247. 

  1247.     <EquipmentConstant id="10206002" valueType="Ascii" logicalName="System.SignalTower.Trigger" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1248. 

  1248.     <EquipmentConstant id="10206003" valueType="Ascii" logicalName="System.SignalTower.Value" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1249. 

  1249.     <EquipmentConstant id="10207001" valueType="Ascii" logicalName="System.EndPoint.EndPointDefaultValue" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1250. 

  1250.     <EquipmentConstant id="10302001" valueType="Ascii" logicalName="System.SetUp.LLA.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1251. 

  1251.     <EquipmentConstant id="10303001" valueType="Ascii" logicalName="System.SetUp.LLB.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1252. 

  1252.     <EquipmentConstant id="10304001" valueType="Ascii" logicalName="System.SetUp.LP1.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1253. 

  1253.     <EquipmentConstant id="10305001" valueType="Ascii" logicalName="System.SetUp.LP2.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1254. 

  1254.     <EquipmentConstant id="10306001" valueType="Ascii" logicalName="System.SetUp.LP3.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1255. 

  1255.     <EquipmentConstant id="10307001" valueType="Ascii" logicalName="System.SetUp.PMA.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1256. 

  1256.     <EquipmentConstant id="10308001" valueType="Ascii" logicalName="System.SetUp.PMB.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1257. 

  1257.     <EquipmentConstant id="10309001" valueType="Ascii" logicalName="System.SetUp.PMC.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1258. 

  1258.     <EquipmentConstant id="10310001" valueType="Ascii" logicalName="System.SetUp.Aligner1.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1259. 

  1259.     <EquipmentConstant id="10311001" valueType="Ascii" logicalName="System.SetUp.Aligner2.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1260. 

  1260.     <EquipmentConstant id="10312001" valueType="Ascii" logicalName="System.SetUp.Cooling1.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1261. 

  1261.     <EquipmentConstant id="10313001" valueType="Ascii" logicalName="System.SetUp.Cooling2.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1262. 

  1262.     <EquipmentConstant id="10314001" valueType="Ascii" logicalName="System.SetUp.PMAChamber1Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1263. 

  1263.     <EquipmentConstant id="10315001" valueType="Ascii" logicalName="System.SetUp.PMAChamber2Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1264. 

  1264.     <EquipmentConstant id="10316001" valueType="Ascii" logicalName="System.SetUp.PMBChamber1Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1265. 

  1265.     <EquipmentConstant id="10317001" valueType="Ascii" logicalName="System.SetUp.PMBChamber2Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1266. 

  1266.     <EquipmentConstant id="20101001" valueType="Ascii" logicalName="LP1.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1267. 

  1267.     <EquipmentConstant id="20101002" valueType="Ascii" logicalName="LP1.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1268. 

  1268.     <EquipmentConstant id="30101001" valueType="Ascii" logicalName="LP2.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1269. 

  1269.     <EquipmentConstant id="30101002" valueType="Ascii" logicalName="LP2.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1270. 

  1270.     <EquipmentConstant id="40101001" valueType="Ascii" logicalName="LP3.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1271. 

  1271.     <EquipmentConstant id="40101002" valueType="Ascii" logicalName="LP3.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1272. 

  1272.     <EquipmentConstant id="170101001" valueType="Ascii" logicalName="EFEM.Address" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1273. 

  1273.     <EquipmentConstant id="170101002" valueType="Ascii" logicalName="EFEM.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1274. 

  1274.     <EquipmentConstant id="170101003" valueType="Ascii" logicalName="EFEM.DelayTimeBeforeAlignerLiftDown" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1275. 

  1275.     <EquipmentConstant id="170101004" valueType="Ascii" logicalName="EFEM.DelayTimeBeforeCoolingLiftDown" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1276. 

  1276.     <EquipmentConstant id="170101005" valueType="Ascii" logicalName="EFEM.EfemType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1277. 

  1277.     <EquipmentConstant id="170101006" valueType="Ascii" logicalName="EFEM.IgnoreFFUError" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1278. 

  1278.     <EquipmentConstant id="170101007" valueType="Ascii" logicalName="EFEM.IgnoreIonizerError" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1279. 

  1279.     <EquipmentConstant id="170101008" valueType="Ascii" logicalName="EFEM.IgnoreWaterFlowError" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1280. 

  1280.     <EquipmentConstant id="170202001" valueType="Ascii" logicalName="EFEM.Aligner.AlignTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1281. 

  1281.     <EquipmentConstant id="170202002" valueType="Ascii" logicalName="EFEM.Aligner.DefaultNotchDegree" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1282. 

  1282.     <EquipmentConstant id="170202003" valueType="Ascii" logicalName="EFEM.Aligner.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1283. 

  1283.     <EquipmentConstant id="170202004" valueType="Ascii" logicalName="EFEM.Aligner.LiftTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1284. 

  1284.     <EquipmentConstant id="170203001" valueType="Ascii" logicalName="EFEM.EfemRobot.GotoTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1285. 

  1285.     <EquipmentConstant id="170203002" valueType="Ascii" logicalName="EFEM.EfemRobot.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1286. 

  1286.     <EquipmentConstant id="170203003" valueType="Ascii" logicalName="EFEM.EfemRobot.LowerBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1287. 

  1287.     <EquipmentConstant id="170203004" valueType="Ascii" logicalName="EFEM.EfemRobot.MapTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1288. 

  1288.     <EquipmentConstant id="170203005" valueType="Ascii" logicalName="EFEM.EfemRobot.PickTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1289. 

  1289.     <EquipmentConstant id="170203006" valueType="Ascii" logicalName="EFEM.EfemRobot.PlaceTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1290. 

  1290.     <EquipmentConstant id="170203007" valueType="Ascii" logicalName="EFEM.EfemRobot.UpperBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1291. 

  1291.     <EquipmentConstant id="170203008" valueType="Ascii" logicalName="EFEM.EfemRobot.DefaultMapWaferSize" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1292. 

  1292.     <EquipmentConstant id="170204001" valueType="Ascii" logicalName="EFEM.LoadPort.CassetteSlotNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1293. 

  1293.     <EquipmentConstant id="170204002" valueType="Ascii" logicalName="EFEM.LoadPort.EnableAutoCarrierIdRead" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1294. 

  1294.     <EquipmentConstant id="170204003" valueType="Ascii" logicalName="EFEM.LoadPort.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1295. 

  1295.     <EquipmentConstant id="170204004" valueType="Ascii" logicalName="EFEM.LoadPort.MotionTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1296. 

  1296.     <EquipmentConstant id="170204005" valueType="Ascii" logicalName="EFEM.LoadPort.SlotNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1297. 

  1297.     <EquipmentConstant id="170204006" valueType="Ascii" logicalName="EFEM.LoadPort.EnableAutoUnloadFoup" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1298. 

  1298.     <EquipmentConstant id="170204007" valueType="Ascii" logicalName="EFEM.LoadPort.HasClampFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1299. 

  1299.     <EquipmentConstant id="170204008" valueType="Ascii" logicalName="EFEM.LoadPort.HasDockFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1300. 

  1300.     <EquipmentConstant id="170204009" valueType="Ascii" logicalName="EFEM.LoadPort.HasDoorOpenFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1301. 

  1301.     <EquipmentConstant id="170204010" valueType="Ascii" logicalName="EFEM.LoadPort.HasLoadFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1302. 

  1302.     <EquipmentConstant id="170204011" valueType="Ascii" logicalName="EFEM.LoadPort.HasMapFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1303. 

  1303.     <EquipmentConstant id="170204012" valueType="Ascii" logicalName="EFEM.LoadPort.HasReadSmartTagFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1304. 

  1304.     <EquipmentConstant id="170204013" valueType="Ascii" logicalName="EFEM.LoadPort.AutoClampOnFoupOn" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1305. 

  1305.     <EquipmentConstant id="170205001" valueType="Ascii" logicalName="EFEM.Cooling.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1306. 

  1306.     <EquipmentConstant id="170205002" valueType="Ascii" logicalName="EFEM.Cooling.LiftTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1307. 

  1307.     <EquipmentConstant id="310101001" valueType="Ascii" logicalName="LLA.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1308. 

  1308.     <EquipmentConstant id="310101002" valueType="Ascii" logicalName="LLA.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1309. 

  1309.     <EquipmentConstant id="320101001" valueType="Ascii" logicalName="LLB.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1310. 

  1310.     <EquipmentConstant id="320101002" valueType="Ascii" logicalName="LLB.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1311. 

  1311.     <EquipmentConstant id="430101001" valueType="Ascii" logicalName="TM.TMRobot.Address" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1312. 

  1312.     <EquipmentConstant id="430101002" valueType="Ascii" logicalName="TM.TMRobot.Blade1Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1313. 

  1313.     <EquipmentConstant id="430101003" valueType="Ascii" logicalName="TM.TMRobot.Blade2Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1314. 

  1314.     <EquipmentConstant id="430101004" valueType="Ascii" logicalName="TM.TMRobot.Blade2Slots" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1315. 

  1315.     <EquipmentConstant id="430101005" valueType="Ascii" logicalName="TM.TMRobot.BodyNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1316. 

  1316.     <EquipmentConstant id="430101006" valueType="Ascii" logicalName="TM.TMRobot.CommunicationToken" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1317. 

  1317.     <EquipmentConstant id="430101007" valueType="Ascii" logicalName="TM.TMRobot.DualBlade1TransferEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1318. 

  1318.     <EquipmentConstant id="430101008" valueType="Ascii" logicalName="TM.TMRobot.EnableCheckSum" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1319. 

  1319.     <EquipmentConstant id="430101009" valueType="Ascii" logicalName="TM.TMRobot.EnableLogMessage" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1320. 

  1320.     <EquipmentConstant id="430101010" valueType="Ascii" logicalName="TM.TMRobot.EnableSeqNo" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1321. 

  1321.     <EquipmentConstant id="430101011" valueType="Ascii" logicalName="TM.TMRobot.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1322. 

  1322.     <EquipmentConstant id="430101012" valueType="Ascii" logicalName="TM.TMRobot.InitCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1323. 

  1323.     <EquipmentConstant id="430101013" valueType="Ascii" logicalName="TM.TMRobot.LowerBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1324. 

  1324.     <EquipmentConstant id="430101014" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1325. 

  1325.     <EquipmentConstant id="430101015" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1326. 

  1326.     <EquipmentConstant id="430101016" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1327. 

  1327.     <EquipmentConstant id="430101017" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1328. 

  1328.     <EquipmentConstant id="430101018" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1329. 

  1329.     <EquipmentConstant id="430101019" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1330. 

  1330.     <EquipmentConstant id="430101020" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1331. 

  1331.     <EquipmentConstant id="430101021" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1332. 

  1332.     <EquipmentConstant id="430101022" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1333. 

  1333.     <EquipmentConstant id="430101023" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1334. 

  1334.     <EquipmentConstant id="430101024" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1335. 

  1335.     <EquipmentConstant id="430101025" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1336. 

  1336.     <EquipmentConstant id="430101026" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1337. 

  1337.     <EquipmentConstant id="430101027" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1338. 

  1338.     <EquipmentConstant id="430101028" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1339. 

  1339.     <EquipmentConstant id="430101029" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1340. 

  1340.     <EquipmentConstant id="430101030" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1341. 

  1341.     <EquipmentConstant id="430101031" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1342. 

  1342.     <EquipmentConstant id="430101032" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1343. 

  1343.     <EquipmentConstant id="430101033" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1344. 

  1344.     <EquipmentConstant id="430101034" valueType="Ascii" logicalName="TM.TMRobot.PickTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1345. 

  1345.     <EquipmentConstant id="430101035" valueType="Ascii" logicalName="TM.TMRobot.PlaceTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1346. 

  1346.     <EquipmentConstant id="430101036" valueType="Ascii" logicalName="TM.TMRobot.PortName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1347. 

  1347.     <EquipmentConstant id="430101037" valueType="Ascii" logicalName="TM.TMRobot.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1348. 

  1348.     <EquipmentConstant id="430101038" valueType="Ascii" logicalName="TM.TMRobot.RobotSpeed" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1349. 

  1349.     <EquipmentConstant id="430101039" valueType="Ascii" logicalName="TM.TMRobot.SlotCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1350. 

  1350.     <EquipmentConstant id="430101040" valueType="Ascii" logicalName="TM.TMRobot.SpeedLevel" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1351. 

  1351.     <EquipmentConstant id="430101041" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForExchangeWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1352. 

  1352.     <EquipmentConstant id="430101042" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForPickWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1353. 

  1353.     <EquipmentConstant id="430101043" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForPlaceWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1354. 

  1354.     <EquipmentConstant id="430101044" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitRobotCommand" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1355. 

  1355.     <EquipmentConstant id="430101045" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitRobotHome" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1356. 

  1356.     <EquipmentConstant id="430101046" valueType="Ascii" logicalName="TM.TMRobot.UnitNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1357. 

  1357.     <EquipmentConstant id="430101047" valueType="Ascii" logicalName="TM.TMRobot.UpperBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1358. 

  1358.     <EquipmentConstant id="430101048" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1359. 

  1359.     <EquipmentConstant id="430101049" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1360. 

  1360.     <EquipmentConstant id="430101050" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1361. 

  1361.     <EquipmentConstant id="430101051" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1362. 

  1362.     <EquipmentConstant id="430101052" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1363. 

  1363.     <EquipmentConstant id="430101053" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1364. 

  1364.     <EquipmentConstant id="430101054" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1365. 

  1365.     <EquipmentConstant id="430101055" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1366. 

  1366.     <EquipmentConstant id="430101056" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1367. 

  1367.     <EquipmentConstant id="430101057" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1368. 

  1368.     <EquipmentConstant id="430101058" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1369. 

  1369.     <EquipmentConstant id="430101059" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1370. 

  1370.     <EquipmentConstant id="430101060" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1371. 

  1371.     <EquipmentConstant id="430101061" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1372. 

  1372.     <EquipmentConstant id="430101062" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1373. 

  1373.     <EquipmentConstant id="430101063" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1374. 

  1374.     <EquipmentConstant id="430101064" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1375. 

  1375.     <EquipmentConstant id="430101065" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1376. 

  1376.     <EquipmentConstant id="430101066" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1377. 

  1377.     <EquipmentConstant id="430101067" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1378. 

  1378.     <EquipmentConstant id="430101068" valueType="Ascii" logicalName="TM.TMRobot.GotoTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1379. 

  1379.     <EquipmentConstant id="430101069" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1380. 

  1380.     <EquipmentConstant id="430101070" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1381. 

  1381.     <EquipmentConstant id="430101071" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1382. 

  1382.     <EquipmentConstant id="430101072" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1383. 

  1383.     <EquipmentConstant id="430101073" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1384. 

  1384.     <EquipmentConstant id="430101074" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1385. 

  1385.     <EquipmentConstant id="430101075" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1386. 

  1386.     <EquipmentConstant id="430101076" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1387. 

  1387.     <EquipmentConstant id="430101077" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1388. 

  1388.     <EquipmentConstant id="430101078" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1389. 

  1389.     <EquipmentConstant id="430101079" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1390. 

  1390.     <EquipmentConstant id="430101080" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1391. 

  1391.     <EquipmentConstant id="430101081" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1392. 

  1392.     <EquipmentConstant id="430101082" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1393. 

  1393.     <EquipmentConstant id="430101083" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1394. 

  1394.     <EquipmentConstant id="430101084" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1395. 

  1395.     <EquipmentConstant id="430101085" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1396. 

  1396.     <EquipmentConstant id="430101086" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1397. 

  1397.     <EquipmentConstant id="430101087" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1398. 

  1398.     <EquipmentConstant id="430101088" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1399. 

  1399.     <EquipmentConstant id="430101089" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1400. 

  1400.     <EquipmentConstant id="430101090" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1401. 

  1401.     <EquipmentConstant id="430101091" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1402. 

  1402.     <EquipmentConstant id="430101092" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1403. 

  1403.     <EquipmentConstant id="430101093" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1404. 

  1404.     <EquipmentConstant id="430101094" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1405. 

  1405.     <EquipmentConstant id="430101095" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1406. 

  1406.     <EquipmentConstant id="430101096" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1407. 

  1407.     <EquipmentConstant id="430101097" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1408. 

  1408.     <EquipmentConstant id="430101098" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1409. 

  1409.     <EquipmentConstant id="430101099" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1410. 

  1410.     <EquipmentConstant id="430101100" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1411. 

  1411.     <EquipmentConstant id="430101101" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1412. 

  1412.     <EquipmentConstant id="430101102" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1413. 

  1413.     <EquipmentConstant id="430101103" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1414. 

  1414.     <EquipmentConstant id="430101104" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1415. 

  1415.     <EquipmentConstant id="430101105" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1416. 

  1416.     <EquipmentConstant id="430101106" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1417. 

  1417.     <EquipmentConstant id="430101107" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1418. 

  1418.     <EquipmentConstant id="430101108" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1419. 

  1419.     <EquipmentConstant id="430101109" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1420. 

  1420.     <EquipmentConstant id="430101110" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1421. 

  1421.     <EquipmentConstant id="430101111" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1422. 

  1422.     <EquipmentConstant id="430101112" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1423. 

  1423.     <EquipmentConstant id="430101113" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1424. 

  1424.     <EquipmentConstant id="430101114" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1425. 

  1425.     <EquipmentConstant id="430101115" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1426. 

  1426.     <EquipmentConstant id="430101116" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1427. 

  1427.     <EquipmentConstant id="430101117" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1428. 

  1428.     <EquipmentConstant id="430101118" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1429. 

  1429.     <EquipmentConstant id="430101119" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1430. 

  1430.     <EquipmentConstant id="430101120" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1431. 

  1431.     <EquipmentConstant id="430101121" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1432. 

  1432.     <EquipmentConstant id="430101122" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1433. 

  1433.     <EquipmentConstant id="430101123" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1434. 

  1434.     <EquipmentConstant id="430101124" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1435. 

  1435.     <EquipmentConstant id="430101125" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1436. 

  1436.     <EquipmentConstant id="430101126" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1437. 

  1437.     <EquipmentConstant id="430101127" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1438. 

  1438.     <EquipmentConstant id="430101128" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1439. 

  1439.     <EquipmentConstant id="430101129" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1440. 

  1440.     <EquipmentConstant id="430101130" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1441. 

  1441.     <EquipmentConstant id="430101131" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1442. 

  1442.     <EquipmentConstant id="430101132" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1443. 

  1443.     <EquipmentConstant id="430101133" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1444. 

  1444.     <EquipmentConstant id="430101134" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1445. 

  1445.     <EquipmentConstant id="430101135" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1446. 

  1446.     <EquipmentConstant id="430101136" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1447. 

  1447.     <EquipmentConstant id="430101137" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1448. 

  1448.     <EquipmentConstant id="430101138" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1449. 

  1449.     <EquipmentConstant id="430101139" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1450. 

  1450.     <EquipmentConstant id="430101140" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1451. 

  1451.     <EquipmentConstant id="430101141" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1452. 

  1452.     <EquipmentConstant id="430101142" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1453. 

  1453.     <EquipmentConstant id="430101143" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1454. 

  1454.     <EquipmentConstant id="430101144" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1455. 

  1455.     <EquipmentConstant id="430101145" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1456. 

  1456.     <EquipmentConstant id="430101146" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1457. 

  1457.     <EquipmentConstant id="430101147" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1458. 

  1458.     <EquipmentConstant id="430101148" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1459. 

  1459.     <EquipmentConstant id="430101149" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1460. 

  1460.     <EquipmentConstant id="430101150" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1461. 

  1461.     <EquipmentConstant id="430101151" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1462. 

  1462.     <EquipmentConstant id="430101152" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1463. 

  1463.     <EquipmentConstant id="430101153" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1464. 

  1464.     <EquipmentConstant id="430101154" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1465. 

  1465.     <EquipmentConstant id="430101155" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1466. 

  1466.     <EquipmentConstant id="430101156" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1467. 

  1467.     <EquipmentConstant id="430101157" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1468. 

  1468.     <EquipmentConstant id="430101158" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1469. 

  1469.     <EquipmentConstant id="430101159" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1470. 

  1470.     <EquipmentConstant id="430101160" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1471. 

  1471.     <EquipmentConstant id="430101161" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1472. 

  1472.     <EquipmentConstant id="430101162" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1473. 

  1473.     <EquipmentConstant id="430101163" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1474. 

  1474.     <EquipmentConstant id="430101164" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1475. 

  1475.     <EquipmentConstant id="430101165" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1476. 

  1476.     <EquipmentConstant id="430101166" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1477. 

  1477.     <EquipmentConstant id="430101167" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1478. 

  1478.     <EquipmentConstant id="430101168" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1479. 

  1479.     <EquipmentConstant id="430101169" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1480. 

  1480.     <EquipmentConstant id="430101170" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1481. 

  1481.     <EquipmentConstant id="430101171" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1482. 

  1482.     <EquipmentConstant id="430101172" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1483. 

  1483.     <EquipmentConstant id="430101173" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1484. 

  1484.     <EquipmentConstant id="430101174" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1485. 

  1485.     <EquipmentConstant id="430101175" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1486. 

  1486.     <EquipmentConstant id="430101176" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1487. 

  1487.     <EquipmentConstant id="430101177" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1488. 

  1488.     <EquipmentConstant id="430101178" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1489. 

  1489.     <EquipmentConstant id="430101179" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1490. 

  1490.     <EquipmentConstant id="430101180" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1491. 

  1491.     <EquipmentConstant id="430101181" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1492. 

  1492.     <EquipmentConstant id="430101182" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1493. 

  1493.     <EquipmentConstant id="430101183" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1494. 

  1494.     <EquipmentConstant id="430101184" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1495. 

  1495.     <EquipmentConstant id="430101185" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1496. 

  1496.     <EquipmentConstant id="430101186" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1497. 

  1497.     <EquipmentConstant id="430101187" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1498. 

  1498.     <EquipmentConstant id="430101188" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1499. 

  1499.     <EquipmentConstant id="430101189" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1500. 

  1500.     <EquipmentConstant id="430101190" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1501. 

  1501.     <EquipmentConstant id="430101191" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1502. 

  1502.     <EquipmentConstant id="430101192" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1503. 

  1503.     <EquipmentConstant id="430101193" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1504. 

  1504.     <EquipmentConstant id="430101194" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1505. 

  1505.     <EquipmentConstant id="430101195" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1506. 

  1506.     <EquipmentConstant id="430101196" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1507. 

  1507.     <EquipmentConstant id="430101197" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1508. 

  1508.     <EquipmentConstant id="430101198" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1509. 

  1509.     <EquipmentConstant id="430101199" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1510. 

  1510.     <EquipmentConstant id="430101200" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1511. 

  1511.     <EquipmentConstant id="430101201" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1512. 

  1512.     <EquipmentConstant id="430101202" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1513. 

  1513.     <EquipmentConstant id="430101203" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1514. 

  1514.     <EquipmentConstant id="430101204" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1515. 

  1515.     <EquipmentConstant id="430101205" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1516. 

  1516.     <EquipmentConstant id="430101206" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1517. 

  1517.     <EquipmentConstant id="430101207" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1518. 

  1518.     <EquipmentConstant id="430101208" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1519. 

  1519.     <EquipmentConstant id="430101209" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1520. 

  1520.     <EquipmentConstant id="430101210" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1521. 

  1521.     <EquipmentConstant id="430101211" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1522. 

  1522.     <EquipmentConstant id="430101212" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1523. 

  1523.     <EquipmentConstant id="430101213" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1524. 

  1524.     <EquipmentConstant id="430101214" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1525. 

  1525.     <EquipmentConstant id="430101215" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1526. 

  1526.     <EquipmentConstant id="430101216" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1527. 

  1527.     <EquipmentConstant id="430101217" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1528. 

  1528.     <EquipmentConstant id="430101218" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1529. 

  1529.     <EquipmentConstant id="430101219" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1530. 

  1530.     <EquipmentConstant id="430101220" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1531. 

  1531.     <EquipmentConstant id="430202001" valueType="Ascii" logicalName="TM.FFU.Address" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1532. 

  1532.     <EquipmentConstant id="430202002" valueType="Ascii" logicalName="TM.FFU.DeviceAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1533. 

  1533.     <EquipmentConstant id="430202003" valueType="Ascii" logicalName="TM.FFU.EnableLogMessage" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1534. 

  1534.     <EquipmentConstant id="430202004" valueType="Ascii" logicalName="TM.FFU.MaxSpeed" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1535. 

  1535.     <EquipmentConstant id="620101001" valueType="Ascii" logicalName="PMA.BiasRf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1536. 

  1536.     <EquipmentConstant id="620101002" valueType="Ascii" logicalName="PMA.BiasRf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1537. 

  1537.     <EquipmentConstant id="620101003" valueType="Ascii" logicalName="PMA.BiasRf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1538. 

  1538.     <EquipmentConstant id="620101004" valueType="Ascii" logicalName="PMA.BiasRf1.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1539. 

  1539.     <EquipmentConstant id="620101005" valueType="Ascii" logicalName="PMA.BiasRf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1540. 

  1540.     <EquipmentConstant id="620101006" valueType="Ascii" logicalName="PMA.BiasRf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1541. 

  1541.     <EquipmentConstant id="620101007" valueType="Ascii" logicalName="PMA.BiasRf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1542. 

  1542.     <EquipmentConstant id="620101008" valueType="Ascii" logicalName="PMA.BiasRf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1543. 

  1543.     <EquipmentConstant id="620101009" valueType="Ascii" logicalName="PMA.BiasRf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1544. 

  1544.     <EquipmentConstant id="620101010" valueType="Ascii" logicalName="PMA.BiasRf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1545. 

  1545.     <EquipmentConstant id="620101011" valueType="Ascii" logicalName="PMA.BiasRf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1546. 

  1546.     <EquipmentConstant id="620101012" valueType="Ascii" logicalName="PMA.BiasRf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1547. 

  1547.     <EquipmentConstant id="620101013" valueType="Ascii" logicalName="PMA.BiasRf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1548. 

  1548.     <EquipmentConstant id="620101014" valueType="Ascii" logicalName="PMA.BiasRf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1549. 

  1549.     <EquipmentConstant id="620101015" valueType="Ascii" logicalName="PMA.BiasRf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1550. 

  1550.     <EquipmentConstant id="620101016" valueType="Ascii" logicalName="PMA.BiasRf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1551. 

  1551.     <EquipmentConstant id="620101017" valueType="Ascii" logicalName="PMA.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1552. 

  1552.     <EquipmentConstant id="620101018" valueType="Ascii" logicalName="PMA.BiasRf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1553. 

  1553.     <EquipmentConstant id="620101019" valueType="Ascii" logicalName="PMA.BiasRf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1554. 

  1554.     <EquipmentConstant id="620101020" valueType="Ascii" logicalName="PMA.BiasRf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1555. 

  1555.     <EquipmentConstant id="620101021" valueType="Ascii" logicalName="PMA.BiasRf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1556. 

  1556.     <EquipmentConstant id="620101022" valueType="Ascii" logicalName="PMA.BiasRf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1557. 

  1557.     <EquipmentConstant id="620101023" valueType="Ascii" logicalName="PMA.BiasRf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1558. 

  1558.     <EquipmentConstant id="620101024" valueType="Ascii" logicalName="PMA.BiasRf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1559. 

  1559.     <EquipmentConstant id="620101025" valueType="Ascii" logicalName="PMA.BiasRf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1560. 

  1560.     <EquipmentConstant id="620101026" valueType="Ascii" logicalName="PMA.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1561. 

  1561.     <EquipmentConstant id="620101027" valueType="Ascii" logicalName="PMA.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1562. 

  1562.     <EquipmentConstant id="620101028" valueType="Ascii" logicalName="PMA.BiasRf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1563. 

  1563.     <EquipmentConstant id="620202001" valueType="Ascii" logicalName="PMA.BiasRf1Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1564. 

  1564.     <EquipmentConstant id="620202002" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1565. 

  1565.     <EquipmentConstant id="620202003" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1566. 

  1566.     <EquipmentConstant id="620202004" valueType="Ascii" logicalName="PMA.BiasRf1Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1567. 

  1567.     <EquipmentConstant id="620202005" valueType="Ascii" logicalName="PMA.BiasRf1Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1568. 

  1568.     <EquipmentConstant id="620202006" valueType="Ascii" logicalName="PMA.BiasRf1Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1569. 

  1569.     <EquipmentConstant id="620202007" valueType="Ascii" logicalName="PMA.BiasRf1Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1570. 

  1570.     <EquipmentConstant id="620202008" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1571. 

  1571.     <EquipmentConstant id="620203001" valueType="Ascii" logicalName="PMA.BiasRf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1572. 

  1572.     <EquipmentConstant id="620203002" valueType="Ascii" logicalName="PMA.BiasRf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1573. 

  1573.     <EquipmentConstant id="620203003" valueType="Ascii" logicalName="PMA.BiasRf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1574. 

  1574.     <EquipmentConstant id="620203004" valueType="Ascii" logicalName="PMA.BiasRf2.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1575. 

  1575.     <EquipmentConstant id="620203005" valueType="Ascii" logicalName="PMA.BiasRf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1576. 

  1576.     <EquipmentConstant id="620203006" valueType="Ascii" logicalName="PMA.BiasRf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1577. 

  1577.     <EquipmentConstant id="620203007" valueType="Ascii" logicalName="PMA.BiasRf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1578. 

  1578.     <EquipmentConstant id="620203008" valueType="Ascii" logicalName="PMA.BiasRf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1579. 

  1579.     <EquipmentConstant id="620203009" valueType="Ascii" logicalName="PMA.BiasRf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1580. 

  1580.     <EquipmentConstant id="620203010" valueType="Ascii" logicalName="PMA.BiasRf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1581. 

  1581.     <EquipmentConstant id="620203011" valueType="Ascii" logicalName="PMA.BiasRf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1582. 

  1582.     <EquipmentConstant id="620203012" valueType="Ascii" logicalName="PMA.BiasRf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1583. 

  1583.     <EquipmentConstant id="620203013" valueType="Ascii" logicalName="PMA.BiasRf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1584. 

  1584.     <EquipmentConstant id="620203014" valueType="Ascii" logicalName="PMA.BiasRf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1585. 

  1585.     <EquipmentConstant id="620203015" valueType="Ascii" logicalName="PMA.BiasRf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1586. 

  1586.     <EquipmentConstant id="620203016" valueType="Ascii" logicalName="PMA.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1587. 

  1587.     <EquipmentConstant id="620203017" valueType="Ascii" logicalName="PMA.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1588. 

  1588.     <EquipmentConstant id="620203018" valueType="Ascii" logicalName="PMA.BiasRf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1589. 

  1589.     <EquipmentConstant id="620203019" valueType="Ascii" logicalName="PMA.BiasRf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1590. 

  1590.     <EquipmentConstant id="620203020" valueType="Ascii" logicalName="PMA.BiasRf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1591. 

  1591.     <EquipmentConstant id="620203021" valueType="Ascii" logicalName="PMA.BiasRf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1592. 

  1592.     <EquipmentConstant id="620203022" valueType="Ascii" logicalName="PMA.BiasRf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1593. 

  1593.     <EquipmentConstant id="620203023" valueType="Ascii" logicalName="PMA.BiasRf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1594. 

  1594.     <EquipmentConstant id="620203024" valueType="Ascii" logicalName="PMA.BiasRf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1595. 

  1595.     <EquipmentConstant id="620203025" valueType="Ascii" logicalName="PMA.BiasRf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1596. 

  1596.     <EquipmentConstant id="620203026" valueType="Ascii" logicalName="PMA.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1597. 

  1597.     <EquipmentConstant id="620203027" valueType="Ascii" logicalName="PMA.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1598. 

  1598.     <EquipmentConstant id="620203028" valueType="Ascii" logicalName="PMA.BiasRf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1599. 

  1599.     <EquipmentConstant id="620204001" valueType="Ascii" logicalName="PMA.BiasRf2Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1600. 

  1600.     <EquipmentConstant id="620204002" valueType="Ascii" logicalName="PMA.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1601. 

  1601.     <EquipmentConstant id="620204003" valueType="Ascii" logicalName="PMA.BiasRf2Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1602. 

  1602.     <EquipmentConstant id="620204004" valueType="Ascii" logicalName="PMA.BiasRf2Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1603. 

  1603.     <EquipmentConstant id="620204005" valueType="Ascii" logicalName="PMA.BiasRf2Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1604. 

  1604.     <EquipmentConstant id="620204006" valueType="Ascii" logicalName="PMA.BiasRf2Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1605. 

  1605.     <EquipmentConstant id="620204007" valueType="Ascii" logicalName="PMA.BiasRf2Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1606. 

  1606.     <EquipmentConstant id="620204008" valueType="Ascii" logicalName="PMA.BiasRf2Match.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1607. 

  1607.     <EquipmentConstant id="620205001" valueType="Ascii" logicalName="PMA.ChamberBasePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1608. 

  1608.     <EquipmentConstant id="620205002" valueType="Ascii" logicalName="PMA.ChamberBaseTemperatureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1609. 

  1609.     <EquipmentConstant id="620205003" valueType="Ascii" logicalName="PMA.ChamberHeater1SetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1610. 

  1610.     <EquipmentConstant id="620205004" valueType="Ascii" logicalName="PMA.HeaterChamberSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1611. 

  1611.     <EquipmentConstant id="620205005" valueType="Ascii" logicalName="PMA.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1612. 

  1612.     <EquipmentConstant id="620205006" valueType="Ascii" logicalName="PMA.CheckATMTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1613. 

  1613.     <EquipmentConstant id="620205007" valueType="Ascii" logicalName="PMA.CheckChamberTempTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1614. 

  1614.     <EquipmentConstant id="620205008" valueType="Ascii" logicalName="PMA.EnableThrottleValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1615. 

  1615.     <EquipmentConstant id="620205009" valueType="Ascii" logicalName="PMA.ForeLineHeaterSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1616. 

  1616.     <EquipmentConstant id="620205010" valueType="Ascii" logicalName="PMA.GasFlowPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1617. 

  1617.     <EquipmentConstant id="620205011" valueType="Ascii" logicalName="PMA.GasFlowPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1618. 

  1618.     <EquipmentConstant id="620205012" valueType="Ascii" logicalName="PMA.GasFlowTimeInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1619. 

  1619.     <EquipmentConstant id="620205013" valueType="Ascii" logicalName="PMA.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1620. 

  1620.     <EquipmentConstant id="620205014" valueType="Ascii" logicalName="PMA.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1621. 

  1621.     <EquipmentConstant id="620205015" valueType="Ascii" logicalName="PMA.LEHeaterSetPointLimit1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1622. 

  1622.     <EquipmentConstant id="620205016" valueType="Ascii" logicalName="PMA.LEHeaterSetPointLimit2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1623. 

  1623.     <EquipmentConstant id="620205017" valueType="Ascii" logicalName="PMA.OpenCloseSlitValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1624. 

  1624.     <EquipmentConstant id="620205018" valueType="Ascii" logicalName="PMA.OpenGasValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1625. 

  1625.     <EquipmentConstant id="620205019" valueType="Ascii" logicalName="PMA.PlaceAndPickDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1626. 

  1626.     <EquipmentConstant id="620205020" valueType="Ascii" logicalName="PMA.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1627. 

  1627.     <EquipmentConstant id="620205021" valueType="Ascii" logicalName="PMA.PrepareTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1628. 

  1628.     <EquipmentConstant id="620205022" valueType="Ascii" logicalName="PMA.ProcessPressureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1629. 

  1629.     <EquipmentConstant id="620205023" valueType="Ascii" logicalName="PMA.TargetPressureInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1630. 

  1630.     <EquipmentConstant id="620205024" valueType="Ascii" logicalName="PMA.TimeLimitOfCloseGasValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1631. 

  1631.     <EquipmentConstant id="620205025" valueType="Ascii" logicalName="PMA.VentTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1632. 

  1632.     <EquipmentConstant id="620205026" valueType="Ascii" logicalName="PMA.VentTimeDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1633. 

  1633.     <EquipmentConstant id="620205027" valueType="Ascii" logicalName="PMA.EnableChamberWallHeater" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1634. 

  1634.     <EquipmentConstant id="620205028" valueType="Ascii" logicalName="PMA.GasFlowPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1635. 

  1635.     <EquipmentConstant id="620205029" valueType="Ascii" logicalName="PMA.GasFlowPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1636. 

  1636.     <EquipmentConstant id="620205030" valueType="Ascii" logicalName="PMA.RecipeToleranceIgnoreTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1637. 

  1637.     <EquipmentConstant id="620205031" valueType="Ascii" logicalName="PMA.ProcessPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1638. 

  1638.     <EquipmentConstant id="620205032" valueType="Ascii" logicalName="PMA.ProcessPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1639. 

  1639.     <EquipmentConstant id="620205033" valueType="Ascii" logicalName="PMA.ProcessPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1640. 

  1640.     <EquipmentConstant id="620205034" valueType="Ascii" logicalName="PMA.ProcessPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1641. 

  1641.     <EquipmentConstant id="620205035" valueType="Ascii" logicalName="PMA.CloseDoorDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1642. 

  1642.     <EquipmentConstant id="620206001" valueType="Ascii" logicalName="PMA.Chiller1.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1643. 

  1643.     <EquipmentConstant id="620206002" valueType="Ascii" logicalName="PMA.Chiller1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1644. 

  1644.     <EquipmentConstant id="620206003" valueType="Ascii" logicalName="PMA.Chiller1.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1645. 

  1645.     <EquipmentConstant id="620206004" valueType="Ascii" logicalName="PMA.Chiller1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1646. 

  1646.     <EquipmentConstant id="620206005" valueType="Ascii" logicalName="PMA.Chiller1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1647. 

  1647.     <EquipmentConstant id="620206006" valueType="Ascii" logicalName="PMA.Chiller1.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1648. 

  1648.     <EquipmentConstant id="620206007" valueType="Ascii" logicalName="PMA.Chiller1.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1649. 

  1649.     <EquipmentConstant id="620206008" valueType="Ascii" logicalName="PMA.Chiller1.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1650. 

  1650.     <EquipmentConstant id="620206009" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1651. 

  1651.     <EquipmentConstant id="620206010" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1652. 

  1652.     <EquipmentConstant id="620206011" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1653. 

  1653.     <EquipmentConstant id="620206012" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1654. 

  1654.     <EquipmentConstant id="620207001" valueType="Ascii" logicalName="PMA.Chiller2.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1655. 

  1655.     <EquipmentConstant id="620207002" valueType="Ascii" logicalName="PMA.Chiller2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1656. 

  1656.     <EquipmentConstant id="620207003" valueType="Ascii" logicalName="PMA.Chiller2.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1657. 

  1657.     <EquipmentConstant id="620207004" valueType="Ascii" logicalName="PMA.Chiller2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1658. 

  1658.     <EquipmentConstant id="620207005" valueType="Ascii" logicalName="PMA.Chiller2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1659. 

  1659.     <EquipmentConstant id="620207006" valueType="Ascii" logicalName="PMA.Chiller2.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1660. 

  1660.     <EquipmentConstant id="620207007" valueType="Ascii" logicalName="PMA.Chiller2.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1661. 

  1661.     <EquipmentConstant id="620207008" valueType="Ascii" logicalName="PMA.Chiller2.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1662. 

  1662.     <EquipmentConstant id="620207009" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1663. 

  1663.     <EquipmentConstant id="620207010" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1664. 

  1664.     <EquipmentConstant id="620207011" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1665. 

  1665.     <EquipmentConstant id="620207012" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1666. 

  1666.     <EquipmentConstant id="620208001" valueType="Ascii" logicalName="PMA.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1667. 

  1667.     <EquipmentConstant id="620208002" valueType="Ascii" logicalName="PMA.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1668. 

  1668.     <EquipmentConstant id="620208003" valueType="Ascii" logicalName="PMA.DryPump.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1669. 

  1669.     <EquipmentConstant id="620208004" valueType="Ascii" logicalName="PMA.DryPump.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1670. 

  1670.     <EquipmentConstant id="620208005" valueType="Ascii" logicalName="PMA.DryPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1671. 

  1671.     <EquipmentConstant id="620208006" valueType="Ascii" logicalName="PMA.DryPump.NeedUpdateComm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1672. 

  1672.     <EquipmentConstant id="620209001" valueType="Ascii" logicalName="PMA.ElectrodeHeart1.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1673. 

  1673.     <EquipmentConstant id="620210001" valueType="Ascii" logicalName="PMA.ElectrodeHeart2.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1674. 

  1674.     <EquipmentConstant id="620211001" valueType="Ascii" logicalName="PMA.EPD.ChannelNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1675. 

  1675.     <EquipmentConstant id="620211002" valueType="Ascii" logicalName="PMA.EPD.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1676. 

  1676.     <EquipmentConstant id="620212001" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1677. 

  1677.     <EquipmentConstant id="620212002" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1678. 

  1678.     <EquipmentConstant id="620212003" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1679. 

  1679.     <EquipmentConstant id="620212004" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1680. 

  1680.     <EquipmentConstant id="620212005" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1681. 

  1681.     <EquipmentConstant id="620212006" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1682. 

  1682.     <EquipmentConstant id="620212007" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1683. 

  1683.     <EquipmentConstant id="620212008" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1684. 

  1684.     <EquipmentConstant id="620212009" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1685. 

  1685.     <EquipmentConstant id="620212010" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1686. 

  1686.     <EquipmentConstant id="620212011" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1687. 

  1687.     <EquipmentConstant id="620212012" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1688. 

  1688.     <EquipmentConstant id="620212013" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1689. 

  1689.     <EquipmentConstant id="620212014" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1690. 

  1690.     <EquipmentConstant id="620212015" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1691. 

  1691.     <EquipmentConstant id="620212016" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1692. 

  1692.     <EquipmentConstant id="620212017" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1693. 

  1693.     <EquipmentConstant id="620212018" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1694. 

  1694.     <EquipmentConstant id="620212019" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1695. 

  1695.     <EquipmentConstant id="620212020" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1696. 

  1696.     <EquipmentConstant id="620212021" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterEnableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1697. 

  1697.     <EquipmentConstant id="620212022" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1698. 

  1698.     <EquipmentConstant id="620212023" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1699. 

  1699.     <EquipmentConstant id="620213001" valueType="Ascii" logicalName="PMA.IdleClean.IdleCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1700. 

  1700.     <EquipmentConstant id="620213002" valueType="Ascii" logicalName="PMA.IdleClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1701. 

  1701.     <EquipmentConstant id="620213003" valueType="Ascii" logicalName="PMA.IdleClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1702. 

  1702.     <EquipmentConstant id="620214001" valueType="Ascii" logicalName="PMA.JobClean.CompleteJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1703. 

  1703.     <EquipmentConstant id="620214002" valueType="Ascii" logicalName="PMA.JobClean.EnableCompleteJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1704. 

  1704.     <EquipmentConstant id="620214003" valueType="Ascii" logicalName="PMA.JobClean.EnablePreJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1705. 

  1705.     <EquipmentConstant id="620214004" valueType="Ascii" logicalName="PMA.JobClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1706. 

  1706.     <EquipmentConstant id="620214005" valueType="Ascii" logicalName="PMA.JobClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1707. 

  1707.     <EquipmentConstant id="620214006" valueType="Ascii" logicalName="PMA.JobClean.PreJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1708. 

  1708.     <EquipmentConstant id="620215001" valueType="Ascii" logicalName="PMA.match1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1709. 

  1709.     <EquipmentConstant id="620215002" valueType="Ascii" logicalName="PMA.match1.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1710. 

  1710.     <EquipmentConstant id="620215003" valueType="Ascii" logicalName="PMA.match1.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1711. 

  1711.     <EquipmentConstant id="620215004" valueType="Ascii" logicalName="PMA.match1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1712. 

  1712.     <EquipmentConstant id="620215005" valueType="Ascii" logicalName="PMA.match1.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1713. 

  1713.     <EquipmentConstant id="620215006" valueType="Ascii" logicalName="PMA.match1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1714. 

  1714.     <EquipmentConstant id="620215007" valueType="Ascii" logicalName="PMA.match1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1715. 

  1715.     <EquipmentConstant id="620216001" valueType="Ascii" logicalName="PMA.match2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1716. 

  1716.     <EquipmentConstant id="620216002" valueType="Ascii" logicalName="PMA.match2.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1717. 

  1717.     <EquipmentConstant id="620216003" valueType="Ascii" logicalName="PMA.match2.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1718. 

  1718.     <EquipmentConstant id="620216004" valueType="Ascii" logicalName="PMA.match2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1719. 

  1719.     <EquipmentConstant id="620216005" valueType="Ascii" logicalName="PMA.match2.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1720. 

  1720.     <EquipmentConstant id="620216006" valueType="Ascii" logicalName="PMA.match2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1721. 

  1721.     <EquipmentConstant id="620216007" valueType="Ascii" logicalName="PMA.match2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1722. 

  1722.     <EquipmentConstant id="620217001" valueType="Ascii" logicalName="PMA.MfcGas1.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1723. 

  1723.     <EquipmentConstant id="620217002" valueType="Ascii" logicalName="PMA.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1724. 

  1724.     <EquipmentConstant id="620217003" valueType="Ascii" logicalName="PMA.MfcGas1.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1725. 

  1725.     <EquipmentConstant id="620217004" valueType="Ascii" logicalName="PMA.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1726. 

  1726.     <EquipmentConstant id="620217005" valueType="Ascii" logicalName="PMA.MfcGas1.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1727. 

  1727.     <EquipmentConstant id="620217006" valueType="Ascii" logicalName="PMA.MfcGas1.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1728. 

  1728.     <EquipmentConstant id="620217007" valueType="Ascii" logicalName="PMA.MfcGas1.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1729. 

  1729.     <EquipmentConstant id="620217008" valueType="Ascii" logicalName="PMA.MfcGas1.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1730. 

  1730.     <EquipmentConstant id="620217009" valueType="Ascii" logicalName="PMA.MfcGas1.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1731. 

  1731.     <EquipmentConstant id="620217010" valueType="Ascii" logicalName="PMA.MfcGas1.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1732. 

  1732.     <EquipmentConstant id="620217011" valueType="Ascii" logicalName="PMA.MfcGas1.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1733. 

  1733.     <EquipmentConstant id="620218001" valueType="Ascii" logicalName="PMA.MfcGas2.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1734. 

  1734.     <EquipmentConstant id="620218002" valueType="Ascii" logicalName="PMA.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1735. 

  1735.     <EquipmentConstant id="620218003" valueType="Ascii" logicalName="PMA.MfcGas2.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1736. 

  1736.     <EquipmentConstant id="620218004" valueType="Ascii" logicalName="PMA.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1737. 

  1737.     <EquipmentConstant id="620218005" valueType="Ascii" logicalName="PMA.MfcGas2.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1738. 

  1738.     <EquipmentConstant id="620218006" valueType="Ascii" logicalName="PMA.MfcGas2.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1739. 

  1739.     <EquipmentConstant id="620218007" valueType="Ascii" logicalName="PMA.MfcGas2.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1740. 

  1740.     <EquipmentConstant id="620218008" valueType="Ascii" logicalName="PMA.MfcGas2.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1741. 

  1741.     <EquipmentConstant id="620218009" valueType="Ascii" logicalName="PMA.MfcGas2.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1742. 

  1742.     <EquipmentConstant id="620218010" valueType="Ascii" logicalName="PMA.MfcGas2.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1743. 

  1743.     <EquipmentConstant id="620218011" valueType="Ascii" logicalName="PMA.MfcGas2.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1744. 

  1744.     <EquipmentConstant id="620219001" valueType="Ascii" logicalName="PMA.MfcGas3.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1745. 

  1745.     <EquipmentConstant id="620219002" valueType="Ascii" logicalName="PMA.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1746. 

  1746.     <EquipmentConstant id="620219003" valueType="Ascii" logicalName="PMA.MfcGas3.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1747. 

  1747.     <EquipmentConstant id="620219004" valueType="Ascii" logicalName="PMA.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1748. 

  1748.     <EquipmentConstant id="620219005" valueType="Ascii" logicalName="PMA.MfcGas3.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1749. 

  1749.     <EquipmentConstant id="620219006" valueType="Ascii" logicalName="PMA.MfcGas3.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1750. 

  1750.     <EquipmentConstant id="620219007" valueType="Ascii" logicalName="PMA.MfcGas3.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1751. 

  1751.     <EquipmentConstant id="620219008" valueType="Ascii" logicalName="PMA.MfcGas3.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1752. 

  1752.     <EquipmentConstant id="620219009" valueType="Ascii" logicalName="PMA.MfcGas3.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1753. 

  1753.     <EquipmentConstant id="620219010" valueType="Ascii" logicalName="PMA.MfcGas3.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1754. 

  1754.     <EquipmentConstant id="620219011" valueType="Ascii" logicalName="PMA.MfcGas3.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1755. 

  1755.     <EquipmentConstant id="620220001" valueType="Ascii" logicalName="PMA.MfcGas4.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1756. 

  1756.     <EquipmentConstant id="620220002" valueType="Ascii" logicalName="PMA.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1757. 

  1757.     <EquipmentConstant id="620220003" valueType="Ascii" logicalName="PMA.MfcGas4.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1758. 

  1758.     <EquipmentConstant id="620220004" valueType="Ascii" logicalName="PMA.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1759. 

  1759.     <EquipmentConstant id="620220005" valueType="Ascii" logicalName="PMA.MfcGas4.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1760. 

  1760.     <EquipmentConstant id="620220006" valueType="Ascii" logicalName="PMA.MfcGas4.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1761. 

  1761.     <EquipmentConstant id="620220007" valueType="Ascii" logicalName="PMA.MfcGas4.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1762. 

  1762.     <EquipmentConstant id="620220008" valueType="Ascii" logicalName="PMA.MfcGas4.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1763. 

  1763.     <EquipmentConstant id="620220009" valueType="Ascii" logicalName="PMA.MfcGas4.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1764. 

  1764.     <EquipmentConstant id="620220010" valueType="Ascii" logicalName="PMA.MfcGas4.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1765. 

  1765.     <EquipmentConstant id="620220011" valueType="Ascii" logicalName="PMA.MfcGas4.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1766. 

  1766.     <EquipmentConstant id="620221001" valueType="Ascii" logicalName="PMA.MfcGas5.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1767. 

  1767.     <EquipmentConstant id="620221002" valueType="Ascii" logicalName="PMA.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1768. 

  1768.     <EquipmentConstant id="620221003" valueType="Ascii" logicalName="PMA.MfcGas5.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1769. 

  1769.     <EquipmentConstant id="620221004" valueType="Ascii" logicalName="PMA.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1770. 

  1770.     <EquipmentConstant id="620221005" valueType="Ascii" logicalName="PMA.MfcGas5.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1771. 

  1771.     <EquipmentConstant id="620221006" valueType="Ascii" logicalName="PMA.MfcGas5.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1772. 

  1772.     <EquipmentConstant id="620221007" valueType="Ascii" logicalName="PMA.MfcGas5.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1773. 

  1773.     <EquipmentConstant id="620221008" valueType="Ascii" logicalName="PMA.MfcGas5.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1774. 

  1774.     <EquipmentConstant id="620221009" valueType="Ascii" logicalName="PMA.MfcGas5.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1775. 

  1775.     <EquipmentConstant id="620221010" valueType="Ascii" logicalName="PMA.MfcGas5.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1776. 

  1776.     <EquipmentConstant id="620221011" valueType="Ascii" logicalName="PMA.MfcGas5.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1777. 

  1777.     <EquipmentConstant id="620222001" valueType="Ascii" logicalName="PMA.MfcGas6.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1778. 

  1778.     <EquipmentConstant id="620222002" valueType="Ascii" logicalName="PMA.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1779. 

  1779.     <EquipmentConstant id="620222003" valueType="Ascii" logicalName="PMA.MfcGas6.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1780. 

  1780.     <EquipmentConstant id="620222004" valueType="Ascii" logicalName="PMA.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1781. 

  1781.     <EquipmentConstant id="620222005" valueType="Ascii" logicalName="PMA.MfcGas6.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1782. 

  1782.     <EquipmentConstant id="620222006" valueType="Ascii" logicalName="PMA.MfcGas6.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1783. 

  1783.     <EquipmentConstant id="620222007" valueType="Ascii" logicalName="PMA.MfcGas6.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1784. 

  1784.     <EquipmentConstant id="620222008" valueType="Ascii" logicalName="PMA.MfcGas6.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1785. 

  1785.     <EquipmentConstant id="620222009" valueType="Ascii" logicalName="PMA.MfcGas6.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1786. 

  1786.     <EquipmentConstant id="620222010" valueType="Ascii" logicalName="PMA.MfcGas6.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1787. 

  1787.     <EquipmentConstant id="620222011" valueType="Ascii" logicalName="PMA.MfcGas6.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1788. 

  1788.     <EquipmentConstant id="620223001" valueType="Ascii" logicalName="PMA.Pump.LeakCheckPumpingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1789. 

  1789.     <EquipmentConstant id="620223002" valueType="Ascii" logicalName="PMA.Pump.LeakCheckWaitTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1790. 

  1790.     <EquipmentConstant id="620223003" valueType="Ascii" logicalName="PMA.Pump.LeakRate" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1791. 

  1791.     <EquipmentConstant id="620223004" valueType="Ascii" logicalName="PMA.Pump.PumpBasePressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1792. 

  1792.     <EquipmentConstant id="620223005" valueType="Ascii" logicalName="PMA.Pump.PumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1793. 

  1793.     <EquipmentConstant id="620223006" valueType="Ascii" logicalName="PMA.Pump.PumpValveDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1794. 

  1794.     <EquipmentConstant id="620224001" valueType="Ascii" logicalName="PMA.Purge.PurgeCycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1795. 

  1795.     <EquipmentConstant id="620224002" valueType="Ascii" logicalName="PMA.Purge.PurgePumpPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1796. 

  1796.     <EquipmentConstant id="620224003" valueType="Ascii" logicalName="PMA.Purge.PurgePumpStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1797. 

  1797.     <EquipmentConstant id="620224004" valueType="Ascii" logicalName="PMA.Purge.PurgePumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1798. 

  1798.     <EquipmentConstant id="620224005" valueType="Ascii" logicalName="PMA.Purge.PurgeVentPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1799. 

  1799.     <EquipmentConstant id="620224006" valueType="Ascii" logicalName="PMA.Purge.PurgeVentStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1800. 

  1800.     <EquipmentConstant id="620224007" valueType="Ascii" logicalName="PMA.Purge.PurgeVentTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1801. 

  1801.     <EquipmentConstant id="620225001" valueType="Ascii" logicalName="PMA.Rf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1802. 

  1802.     <EquipmentConstant id="620225002" valueType="Ascii" logicalName="PMA.Rf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1803. 

  1803.     <EquipmentConstant id="620225003" valueType="Ascii" logicalName="PMA.Rf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1804. 

  1804.     <EquipmentConstant id="620225004" valueType="Ascii" logicalName="PMA.Rf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1805. 

  1805.     <EquipmentConstant id="620225005" valueType="Ascii" logicalName="PMA.Rf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1806. 

  1806.     <EquipmentConstant id="620225006" valueType="Ascii" logicalName="PMA.Rf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1807. 

  1807.     <EquipmentConstant id="620225007" valueType="Ascii" logicalName="PMA.Rf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1808. 

  1808.     <EquipmentConstant id="620225008" valueType="Ascii" logicalName="PMA.Rf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1809. 

  1809.     <EquipmentConstant id="620225009" valueType="Ascii" logicalName="PMA.Rf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1810. 

  1810.     <EquipmentConstant id="620225010" valueType="Ascii" logicalName="PMA.Rf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1811. 

  1811.     <EquipmentConstant id="620225011" valueType="Ascii" logicalName="PMA.Rf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1812. 

  1812.     <EquipmentConstant id="620225012" valueType="Ascii" logicalName="PMA.Rf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1813. 

  1813.     <EquipmentConstant id="620225013" valueType="Ascii" logicalName="PMA.Rf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1814. 

  1814.     <EquipmentConstant id="620225014" valueType="Ascii" logicalName="PMA.Rf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1815. 

  1815.     <EquipmentConstant id="620225015" valueType="Ascii" logicalName="PMA.Rf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1816. 

  1816.     <EquipmentConstant id="620225016" valueType="Ascii" logicalName="PMA.Rf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1817. 

  1817.     <EquipmentConstant id="620225017" valueType="Ascii" logicalName="PMA.Rf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1818. 

  1818.     <EquipmentConstant id="620225018" valueType="Ascii" logicalName="PMA.Rf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1819. 

  1819.     <EquipmentConstant id="620225019" valueType="Ascii" logicalName="PMA.Rf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1820. 

  1820.     <EquipmentConstant id="620225020" valueType="Ascii" logicalName="PMA.Rf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1821. 

  1821.     <EquipmentConstant id="620225021" valueType="Ascii" logicalName="PMA.Rf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1822. 

  1822.     <EquipmentConstant id="620225022" valueType="Ascii" logicalName="PMA.Rf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1823. 

  1823.     <EquipmentConstant id="620225023" valueType="Ascii" logicalName="PMA.Rf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1824. 

  1824.     <EquipmentConstant id="620225024" valueType="Ascii" logicalName="PMA.Rf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1825. 

  1825.     <EquipmentConstant id="620225025" valueType="Ascii" logicalName="PMA.Rf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1826. 

  1826.     <EquipmentConstant id="620225026" valueType="Ascii" logicalName="PMA.Rf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1827. 

  1827.     <EquipmentConstant id="620225027" valueType="Ascii" logicalName="PMA.Rf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1828. 

  1828.     <EquipmentConstant id="620226001" valueType="Ascii" logicalName="PMA.Rf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1829. 

  1829.     <EquipmentConstant id="620226002" valueType="Ascii" logicalName="PMA.Rf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1830. 

  1830.     <EquipmentConstant id="620226003" valueType="Ascii" logicalName="PMA.Rf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1831. 

  1831.     <EquipmentConstant id="620226004" valueType="Ascii" logicalName="PMA.Rf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1832. 

  1832.     <EquipmentConstant id="620226005" valueType="Ascii" logicalName="PMA.Rf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1833. 

  1833.     <EquipmentConstant id="620226006" valueType="Ascii" logicalName="PMA.Rf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1834. 

  1834.     <EquipmentConstant id="620226007" valueType="Ascii" logicalName="PMA.Rf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1835. 

  1835.     <EquipmentConstant id="620226008" valueType="Ascii" logicalName="PMA.Rf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1836. 

  1836.     <EquipmentConstant id="620226009" valueType="Ascii" logicalName="PMA.Rf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1837. 

  1837.     <EquipmentConstant id="620226010" valueType="Ascii" logicalName="PMA.Rf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1838. 

  1838.     <EquipmentConstant id="620226011" valueType="Ascii" logicalName="PMA.Rf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1839. 

  1839.     <EquipmentConstant id="620226012" valueType="Ascii" logicalName="PMA.Rf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1840. 

  1840.     <EquipmentConstant id="620226013" valueType="Ascii" logicalName="PMA.Rf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1841. 

  1841.     <EquipmentConstant id="620226014" valueType="Ascii" logicalName="PMA.Rf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1842. 

  1842.     <EquipmentConstant id="620226015" valueType="Ascii" logicalName="PMA.Rf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1843. 

  1843.     <EquipmentConstant id="620226016" valueType="Ascii" logicalName="PMA.Rf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1844. 

  1844.     <EquipmentConstant id="620226017" valueType="Ascii" logicalName="PMA.Rf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1845. 

  1845.     <EquipmentConstant id="620226018" valueType="Ascii" logicalName="PMA.Rf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1846. 

  1846.     <EquipmentConstant id="620226019" valueType="Ascii" logicalName="PMA.Rf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1847. 

  1847.     <EquipmentConstant id="620226020" valueType="Ascii" logicalName="PMA.Rf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1848. 

  1848.     <EquipmentConstant id="620226021" valueType="Ascii" logicalName="PMA.Rf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1849. 

  1849.     <EquipmentConstant id="620226022" valueType="Ascii" logicalName="PMA.Rf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1850. 

  1850.     <EquipmentConstant id="620226023" valueType="Ascii" logicalName="PMA.Rf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1851. 

  1851.     <EquipmentConstant id="620226024" valueType="Ascii" logicalName="PMA.Rf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1852. 

  1852.     <EquipmentConstant id="620226025" valueType="Ascii" logicalName="PMA.Rf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1853. 

  1853.     <EquipmentConstant id="620226026" valueType="Ascii" logicalName="PMA.Rf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1854. 

  1854.     <EquipmentConstant id="620226027" valueType="Ascii" logicalName="PMA.Rf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1855. 

  1855.     <EquipmentConstant id="620227001" valueType="Ascii" logicalName="PMA.MFCVerification.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1856. 

  1856.     <EquipmentConstant id="620227002" valueType="Ascii" logicalName="PMA.MFCVerification.CheckStableTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1857. 

  1857.     <EquipmentConstant id="620227003" valueType="Ascii" logicalName="PMA.MFCVerification.FlowStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1858. 

  1858.     <EquipmentConstant id="620227004" valueType="Ascii" logicalName="PMA.MFCVerification.GasFlowTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1859. 

  1859.     <EquipmentConstant id="620227005" valueType="Ascii" logicalName="PMA.MFCVerification.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1860. 

  1860.     <EquipmentConstant id="620227006" valueType="Ascii" logicalName="PMA.MFCVerification.MaxDeviation" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1861. 

  1861.     <EquipmentConstant id="620227007" valueType="Ascii" logicalName="PMA.MFCVerification.PressureStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1862. 

  1862.     <EquipmentConstant id="620227008" valueType="Ascii" logicalName="PMA.MFCVerification.TargetPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1863. 

  1863.     <EquipmentConstant id="620228001" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1864. 

  1864.     <EquipmentConstant id="620228002" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1865. 

  1865.     <EquipmentConstant id="620228003" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1866. 

  1866.     <EquipmentConstant id="620228004" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1867. 

  1867.     <EquipmentConstant id="620228005" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1868. 

  1868.     <EquipmentConstant id="620228006" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1869. 

  1869.     <EquipmentConstant id="620228007" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1870. 

  1870.     <EquipmentConstant id="620228008" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1871. 

  1871.     <EquipmentConstant id="620228009" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1872. 

  1872.     <EquipmentConstant id="620228010" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1873. 

  1873.     <EquipmentConstant id="620228011" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1874. 

  1874.     <EquipmentConstant id="620228012" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1875. 

  1875.     <EquipmentConstant id="620228013" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1876. 

  1876.     <EquipmentConstant id="620228014" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1877. 

  1877.     <EquipmentConstant id="620228015" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1878. 

  1878.     <EquipmentConstant id="620228016" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1879. 

  1879.     <EquipmentConstant id="620228017" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1880. 

  1880.     <EquipmentConstant id="620228018" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1881. 

  1881.     <EquipmentConstant id="620229001" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1882. 

  1882.     <EquipmentConstant id="620229002" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1883. 

  1883.     <EquipmentConstant id="620229003" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1884. 

  1884.     <EquipmentConstant id="620229004" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1885. 

  1885.     <EquipmentConstant id="620229005" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1886. 

  1886.     <EquipmentConstant id="620229006" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1887. 

  1887.     <EquipmentConstant id="620229007" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1888. 

  1888.     <EquipmentConstant id="620229008" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1889. 

  1889.     <EquipmentConstant id="620229009" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1890. 

  1890.     <EquipmentConstant id="620229010" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1891. 

  1891.     <EquipmentConstant id="620229011" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1892. 

  1892.     <EquipmentConstant id="620229012" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1893. 

  1893.     <EquipmentConstant id="620229013" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1894. 

  1894.     <EquipmentConstant id="620229014" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1895. 

  1895.     <EquipmentConstant id="620229015" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1896. 

  1896.     <EquipmentConstant id="620229016" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1897. 

  1897.     <EquipmentConstant id="620229017" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1898. 

  1898.     <EquipmentConstant id="620229018" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1899. 

  1899.     <EquipmentConstant id="630101001" valueType="Ascii" logicalName="PMB.BiasRf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1900. 

  1900.     <EquipmentConstant id="630101002" valueType="Ascii" logicalName="PMB.BiasRf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1901. 

  1901.     <EquipmentConstant id="630101003" valueType="Ascii" logicalName="PMB.BiasRf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1902. 

  1902.     <EquipmentConstant id="630101004" valueType="Ascii" logicalName="PMB.BiasRf1.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1903. 

  1903.     <EquipmentConstant id="630101005" valueType="Ascii" logicalName="PMB.BiasRf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1904. 

  1904.     <EquipmentConstant id="630101006" valueType="Ascii" logicalName="PMB.BiasRf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1905. 

  1905.     <EquipmentConstant id="630101007" valueType="Ascii" logicalName="PMB.BiasRf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1906. 

  1906.     <EquipmentConstant id="630101008" valueType="Ascii" logicalName="PMB.BiasRf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1907. 

  1907.     <EquipmentConstant id="630101009" valueType="Ascii" logicalName="PMB.BiasRf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1908. 

  1908.     <EquipmentConstant id="630101010" valueType="Ascii" logicalName="PMB.BiasRf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1909. 

  1909.     <EquipmentConstant id="630101011" valueType="Ascii" logicalName="PMB.BiasRf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1910. 

  1910.     <EquipmentConstant id="630101012" valueType="Ascii" logicalName="PMB.BiasRf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1911. 

  1911.     <EquipmentConstant id="630101013" valueType="Ascii" logicalName="PMB.BiasRf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1912. 

  1912.     <EquipmentConstant id="630101014" valueType="Ascii" logicalName="PMB.BiasRf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1913. 

  1913.     <EquipmentConstant id="630101015" valueType="Ascii" logicalName="PMB.BiasRf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1914. 

  1914.     <EquipmentConstant id="630101016" valueType="Ascii" logicalName="PMB.BiasRf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1915. 

  1915.     <EquipmentConstant id="630101017" valueType="Ascii" logicalName="PMB.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1916. 

  1916.     <EquipmentConstant id="630101018" valueType="Ascii" logicalName="PMB.BiasRf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1917. 

  1917.     <EquipmentConstant id="630101019" valueType="Ascii" logicalName="PMB.BiasRf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1918. 

  1918.     <EquipmentConstant id="630101020" valueType="Ascii" logicalName="PMB.BiasRf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1919. 

  1919.     <EquipmentConstant id="630101021" valueType="Ascii" logicalName="PMB.BiasRf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1920. 

  1920.     <EquipmentConstant id="630101022" valueType="Ascii" logicalName="PMB.BiasRf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1921. 

  1921.     <EquipmentConstant id="630101023" valueType="Ascii" logicalName="PMB.BiasRf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1922. 

  1922.     <EquipmentConstant id="630101024" valueType="Ascii" logicalName="PMB.BiasRf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1923. 

  1923.     <EquipmentConstant id="630101025" valueType="Ascii" logicalName="PMB.BiasRf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1924. 

  1924.     <EquipmentConstant id="630101026" valueType="Ascii" logicalName="PMB.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1925. 

  1925.     <EquipmentConstant id="630101027" valueType="Ascii" logicalName="PMB.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1926. 

  1926.     <EquipmentConstant id="630101028" valueType="Ascii" logicalName="PMB.BiasRf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1927. 

  1927.     <EquipmentConstant id="630202001" valueType="Ascii" logicalName="PMB.BiasRf1Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1928. 

  1928.     <EquipmentConstant id="630202002" valueType="Ascii" logicalName="PMB.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1929. 

  1929.     <EquipmentConstant id="630202003" valueType="Ascii" logicalName="PMB.BiasRf1Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1930. 

  1930.     <EquipmentConstant id="630202004" valueType="Ascii" logicalName="PMB.BiasRf1Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1931. 

  1931.     <EquipmentConstant id="630202005" valueType="Ascii" logicalName="PMB.BiasRf1Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1932. 

  1932.     <EquipmentConstant id="630202006" valueType="Ascii" logicalName="PMB.BiasRf1Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1933. 

  1933.     <EquipmentConstant id="630202007" valueType="Ascii" logicalName="PMB.BiasRf1Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1934. 

  1934.     <EquipmentConstant id="630203001" valueType="Ascii" logicalName="PMB.BiasRf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1935. 

  1935.     <EquipmentConstant id="630203002" valueType="Ascii" logicalName="PMB.BiasRf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1936. 

  1936.     <EquipmentConstant id="630203003" valueType="Ascii" logicalName="PMB.BiasRf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1937. 

  1937.     <EquipmentConstant id="630203004" valueType="Ascii" logicalName="PMB.BiasRf2.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1938. 

  1938.     <EquipmentConstant id="630203005" valueType="Ascii" logicalName="PMB.BiasRf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1939. 

  1939.     <EquipmentConstant id="630203006" valueType="Ascii" logicalName="PMB.BiasRf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1940. 

  1940.     <EquipmentConstant id="630203007" valueType="Ascii" logicalName="PMB.BiasRf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1941. 

  1941.     <EquipmentConstant id="630203008" valueType="Ascii" logicalName="PMB.BiasRf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1942. 

  1942.     <EquipmentConstant id="630203009" valueType="Ascii" logicalName="PMB.BiasRf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1943. 

  1943.     <EquipmentConstant id="630203010" valueType="Ascii" logicalName="PMB.BiasRf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1944. 

  1944.     <EquipmentConstant id="630203011" valueType="Ascii" logicalName="PMB.BiasRf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1945. 

  1945.     <EquipmentConstant id="630203012" valueType="Ascii" logicalName="PMB.BiasRf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1946. 

  1946.     <EquipmentConstant id="630203013" valueType="Ascii" logicalName="PMB.BiasRf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1947. 

  1947.     <EquipmentConstant id="630203014" valueType="Ascii" logicalName="PMB.BiasRf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1948. 

  1948.     <EquipmentConstant id="630203015" valueType="Ascii" logicalName="PMB.BiasRf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1949. 

  1949.     <EquipmentConstant id="630203016" valueType="Ascii" logicalName="PMB.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1950. 

  1950.     <EquipmentConstant id="630203017" valueType="Ascii" logicalName="PMB.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1951. 

  1951.     <EquipmentConstant id="630203018" valueType="Ascii" logicalName="PMB.BiasRf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1952. 

  1952.     <EquipmentConstant id="630203019" valueType="Ascii" logicalName="PMB.BiasRf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1953. 

  1953.     <EquipmentConstant id="630203020" valueType="Ascii" logicalName="PMB.BiasRf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1954. 

  1954.     <EquipmentConstant id="630203021" valueType="Ascii" logicalName="PMB.BiasRf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1955. 

  1955.     <EquipmentConstant id="630203022" valueType="Ascii" logicalName="PMB.BiasRf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1956. 

  1956.     <EquipmentConstant id="630203023" valueType="Ascii" logicalName="PMB.BiasRf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1957. 

  1957.     <EquipmentConstant id="630203024" valueType="Ascii" logicalName="PMB.BiasRf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1958. 

  1958.     <EquipmentConstant id="630203025" valueType="Ascii" logicalName="PMB.BiasRf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1959. 

  1959.     <EquipmentConstant id="630203026" valueType="Ascii" logicalName="PMB.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1960. 

  1960.     <EquipmentConstant id="630203027" valueType="Ascii" logicalName="PMB.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1961. 

  1961.     <EquipmentConstant id="630203028" valueType="Ascii" logicalName="PMB.BiasRf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1962. 

  1962.     <EquipmentConstant id="630204001" valueType="Ascii" logicalName="PMB.BiasRf2Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1963. 

  1963.     <EquipmentConstant id="630204002" valueType="Ascii" logicalName="PMB.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1964. 

  1964.     <EquipmentConstant id="630204003" valueType="Ascii" logicalName="PMB.BiasRf2Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1965. 

  1965.     <EquipmentConstant id="630204004" valueType="Ascii" logicalName="PMB.BiasRf2Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1966. 

  1966.     <EquipmentConstant id="630204005" valueType="Ascii" logicalName="PMB.BiasRf2Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1967. 

  1967.     <EquipmentConstant id="630204006" valueType="Ascii" logicalName="PMB.BiasRf2Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1968. 

  1968.     <EquipmentConstant id="630204007" valueType="Ascii" logicalName="PMB.BiasRf2Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1969. 

  1969.     <EquipmentConstant id="630205001" valueType="Ascii" logicalName="PMB.ChamberBasePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1970. 

  1970.     <EquipmentConstant id="630205002" valueType="Ascii" logicalName="PMB.ChamberBaseTemperatureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1971. 

  1971.     <EquipmentConstant id="630205003" valueType="Ascii" logicalName="PMB.ChamberHeater1SetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1972. 

  1972.     <EquipmentConstant id="630205004" valueType="Ascii" logicalName="PMB.HeaterChamberSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1973. 

  1973.     <EquipmentConstant id="630205005" valueType="Ascii" logicalName="PMB.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1974. 

  1974.     <EquipmentConstant id="630205006" valueType="Ascii" logicalName="PMB.CheckATMTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1975. 

  1975.     <EquipmentConstant id="630205007" valueType="Ascii" logicalName="PMB.CheckChamberTempTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1976. 

  1976.     <EquipmentConstant id="630205008" valueType="Ascii" logicalName="PMB.EnableThrottleValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1977. 

  1977.     <EquipmentConstant id="630205009" valueType="Ascii" logicalName="PMB.ForeLineHeaterSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1978. 

  1978.     <EquipmentConstant id="630205010" valueType="Ascii" logicalName="PMB.GasFlowPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1979. 

  1979.     <EquipmentConstant id="630205011" valueType="Ascii" logicalName="PMB.GasFlowPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1980. 

  1980.     <EquipmentConstant id="630205012" valueType="Ascii" logicalName="PMB.GasFlowTimeInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1981. 

  1981.     <EquipmentConstant id="630205013" valueType="Ascii" logicalName="PMB.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1982. 

  1982.     <EquipmentConstant id="630205014" valueType="Ascii" logicalName="PMB.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1983. 

  1983.     <EquipmentConstant id="630205015" valueType="Ascii" logicalName="PMB.LEHeaterSetPointLimit1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1984. 

  1984.     <EquipmentConstant id="630205016" valueType="Ascii" logicalName="PMB.LEHeaterSetPointLimit2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1985. 

  1985.     <EquipmentConstant id="630205017" valueType="Ascii" logicalName="PMB.OpenCloseSlitValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1986. 

  1986.     <EquipmentConstant id="630205018" valueType="Ascii" logicalName="PMB.OpenGasValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1987. 

  1987.     <EquipmentConstant id="630205019" valueType="Ascii" logicalName="PMB.PlaceAndPickDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1988. 

  1988.     <EquipmentConstant id="630205020" valueType="Ascii" logicalName="PMB.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1989. 

  1989.     <EquipmentConstant id="630205021" valueType="Ascii" logicalName="PMB.PrepareTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1990. 

  1990.     <EquipmentConstant id="630205022" valueType="Ascii" logicalName="PMB.ProcessPressureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1991. 

  1991.     <EquipmentConstant id="630205023" valueType="Ascii" logicalName="PMB.TargetPressureInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1992. 

  1992.     <EquipmentConstant id="630205024" valueType="Ascii" logicalName="PMB.TimeLimitOfCloseGasValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1993. 

  1993.     <EquipmentConstant id="630205025" valueType="Ascii" logicalName="PMB.VentTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1994. 

  1994.     <EquipmentConstant id="630205026" valueType="Ascii" logicalName="PMB.VentTimeDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1995. 

  1995.     <EquipmentConstant id="630205027" valueType="Ascii" logicalName="PMB.EnableChamberWallHeater" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1996. 

  1996.     <EquipmentConstant id="630205028" valueType="Ascii" logicalName="PMB.GasFlowPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1997. 

  1997.     <EquipmentConstant id="630205029" valueType="Ascii" logicalName="PMB.GasFlowPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1998. 

  1998.     <EquipmentConstant id="630205030" valueType="Ascii" logicalName="PMB.RecipeToleranceIgnoreTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    1999. 

  1999.     <EquipmentConstant id="630205031" valueType="Ascii" logicalName="PMB.ProcessPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2000. 

  2000.     <EquipmentConstant id="630205032" valueType="Ascii" logicalName="PMB.ProcessPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2001. 

  2001.     <EquipmentConstant id="630205033" valueType="Ascii" logicalName="PMB.ProcessPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2002. 

  2002.     <EquipmentConstant id="630205034" valueType="Ascii" logicalName="PMB.ProcessPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2003. 

  2003.     <EquipmentConstant id="630205035" valueType="Ascii" logicalName="PMB.CloseDoorDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2004. 

  2004.     <EquipmentConstant id="630206001" valueType="Ascii" logicalName="PMB.Chiller1.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2005. 

  2005.     <EquipmentConstant id="630206002" valueType="Ascii" logicalName="PMB.Chiller1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2006. 

  2006.     <EquipmentConstant id="630206003" valueType="Ascii" logicalName="PMB.Chiller1.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2007. 

  2007.     <EquipmentConstant id="630206004" valueType="Ascii" logicalName="PMB.Chiller1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2008. 

  2008.     <EquipmentConstant id="630206005" valueType="Ascii" logicalName="PMB.Chiller1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2009. 

  2009.     <EquipmentConstant id="630206006" valueType="Ascii" logicalName="PMB.Chiller1.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2010. 

  2010.     <EquipmentConstant id="630206007" valueType="Ascii" logicalName="PMB.Chiller1.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2011. 

  2011.     <EquipmentConstant id="630206008" valueType="Ascii" logicalName="PMB.Chiller1.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2012. 

  2012.     <EquipmentConstant id="630206009" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2013. 

  2013.     <EquipmentConstant id="630206010" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2014. 

  2014.     <EquipmentConstant id="630206011" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2015. 

  2015.     <EquipmentConstant id="630206012" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2016. 

  2016.     <EquipmentConstant id="630207001" valueType="Ascii" logicalName="PMB.Chiller2.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2017. 

  2017.     <EquipmentConstant id="630207002" valueType="Ascii" logicalName="PMB.Chiller2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2018. 

  2018.     <EquipmentConstant id="630207003" valueType="Ascii" logicalName="PMB.Chiller2.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2019. 

  2019.     <EquipmentConstant id="630207004" valueType="Ascii" logicalName="PMB.Chiller2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2020. 

  2020.     <EquipmentConstant id="630207005" valueType="Ascii" logicalName="PMB.Chiller2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2021. 

  2021.     <EquipmentConstant id="630207006" valueType="Ascii" logicalName="PMB.Chiller2.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2022. 

  2022.     <EquipmentConstant id="630207007" valueType="Ascii" logicalName="PMB.Chiller2.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2023. 

  2023.     <EquipmentConstant id="630207008" valueType="Ascii" logicalName="PMB.Chiller2.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2024. 

  2024.     <EquipmentConstant id="630207009" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2025. 

  2025.     <EquipmentConstant id="630207010" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2026. 

  2026.     <EquipmentConstant id="630207011" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2027. 

  2027.     <EquipmentConstant id="630207012" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2028. 

  2028.     <EquipmentConstant id="630208001" valueType="Ascii" logicalName="PMB.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2029. 

  2029.     <EquipmentConstant id="630208002" valueType="Ascii" logicalName="PMB.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2030. 

  2030.     <EquipmentConstant id="630208003" valueType="Ascii" logicalName="PMB.DryPump.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2031. 

  2031.     <EquipmentConstant id="630208004" valueType="Ascii" logicalName="PMB.DryPump.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2032. 

  2032.     <EquipmentConstant id="630208005" valueType="Ascii" logicalName="PMB.DryPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2033. 

  2033.     <EquipmentConstant id="630208006" valueType="Ascii" logicalName="PMB.DryPump.NeedUpdateComm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2034. 

  2034.     <EquipmentConstant id="630209001" valueType="Ascii" logicalName="PMB.ElectrodeHeart1.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2035. 

  2035.     <EquipmentConstant id="630210001" valueType="Ascii" logicalName="PMB.ElectrodeHeart2.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2036. 

  2036.     <EquipmentConstant id="630211001" valueType="Ascii" logicalName="PMB.EPD.ChannelNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2037. 

  2037.     <EquipmentConstant id="630211002" valueType="Ascii" logicalName="PMB.EPD.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2038. 

  2038.     <EquipmentConstant id="630212001" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2039. 

  2039.     <EquipmentConstant id="630212002" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2040. 

  2040.     <EquipmentConstant id="630212003" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2041. 

  2041.     <EquipmentConstant id="630212004" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2042. 

  2042.     <EquipmentConstant id="630212005" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2043. 

  2043.     <EquipmentConstant id="630212006" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2044. 

  2044.     <EquipmentConstant id="630212007" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2045. 

  2045.     <EquipmentConstant id="630212008" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2046. 

  2046.     <EquipmentConstant id="630212009" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2047. 

  2047.     <EquipmentConstant id="630212010" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2048. 

  2048.     <EquipmentConstant id="630212011" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2049. 

  2049.     <EquipmentConstant id="630212012" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2050. 

  2050.     <EquipmentConstant id="630212013" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2051. 

  2051.     <EquipmentConstant id="630212014" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2052. 

  2052.     <EquipmentConstant id="630212015" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2053. 

  2053.     <EquipmentConstant id="630212016" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2054. 

  2054.     <EquipmentConstant id="630212017" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2055. 

  2055.     <EquipmentConstant id="630212018" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2056. 

  2056.     <EquipmentConstant id="630212019" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2057. 

  2057.     <EquipmentConstant id="630212020" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2058. 

  2058.     <EquipmentConstant id="630212021" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterEnableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2059. 

  2059.     <EquipmentConstant id="630212022" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2060. 

  2060.     <EquipmentConstant id="630212023" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2061. 

  2061.     <EquipmentConstant id="630213001" valueType="Ascii" logicalName="PMB.IdleClean.IdleCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2062. 

  2062.     <EquipmentConstant id="630213002" valueType="Ascii" logicalName="PMB.IdleClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2063. 

  2063.     <EquipmentConstant id="630213003" valueType="Ascii" logicalName="PMB.IdleClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2064. 

  2064.     <EquipmentConstant id="630214001" valueType="Ascii" logicalName="PMB.JobClean.CompleteJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2065. 

  2065.     <EquipmentConstant id="630214002" valueType="Ascii" logicalName="PMB.JobClean.EnableCompleteJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2066. 

  2066.     <EquipmentConstant id="630214003" valueType="Ascii" logicalName="PMB.JobClean.EnablePreJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2067. 

  2067.     <EquipmentConstant id="630214004" valueType="Ascii" logicalName="PMB.JobClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2068. 

  2068.     <EquipmentConstant id="630214005" valueType="Ascii" logicalName="PMB.JobClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2069. 

  2069.     <EquipmentConstant id="630214006" valueType="Ascii" logicalName="PMB.JobClean.PreJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2070. 

  2070.     <EquipmentConstant id="630215001" valueType="Ascii" logicalName="PMB.match1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2071. 

  2071.     <EquipmentConstant id="630215002" valueType="Ascii" logicalName="PMB.match1.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2072. 

  2072.     <EquipmentConstant id="630215003" valueType="Ascii" logicalName="PMB.match1.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2073. 

  2073.     <EquipmentConstant id="630215004" valueType="Ascii" logicalName="PMB.match1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2074. 

  2074.     <EquipmentConstant id="630215005" valueType="Ascii" logicalName="PMB.match1.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2075. 

  2075.     <EquipmentConstant id="630215006" valueType="Ascii" logicalName="PMB.match1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2076. 

  2076.     <EquipmentConstant id="630215007" valueType="Ascii" logicalName="PMB.match1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2077. 

  2077.     <EquipmentConstant id="630216001" valueType="Ascii" logicalName="PMB.match2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2078. 

  2078.     <EquipmentConstant id="630216002" valueType="Ascii" logicalName="PMB.match2.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2079. 

  2079.     <EquipmentConstant id="630216003" valueType="Ascii" logicalName="PMB.match2.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2080. 

  2080.     <EquipmentConstant id="630216004" valueType="Ascii" logicalName="PMB.match2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2081. 

  2081.     <EquipmentConstant id="630216005" valueType="Ascii" logicalName="PMB.match2.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2082. 

  2082.     <EquipmentConstant id="630216006" valueType="Ascii" logicalName="PMB.match2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2083. 

  2083.     <EquipmentConstant id="630216007" valueType="Ascii" logicalName="PMB.match2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2084. 

  2084.     <EquipmentConstant id="630217001" valueType="Ascii" logicalName="PMB.MfcGas1.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2085. 

  2085.     <EquipmentConstant id="630217002" valueType="Ascii" logicalName="PMB.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2086. 

  2086.     <EquipmentConstant id="630217003" valueType="Ascii" logicalName="PMB.MfcGas1.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2087. 

  2087.     <EquipmentConstant id="630217004" valueType="Ascii" logicalName="PMB.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2088. 

  2088.     <EquipmentConstant id="630217005" valueType="Ascii" logicalName="PMB.MfcGas1.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2089. 

  2089.     <EquipmentConstant id="630217006" valueType="Ascii" logicalName="PMB.MfcGas1.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2090. 

  2090.     <EquipmentConstant id="630217007" valueType="Ascii" logicalName="PMB.MfcGas1.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2091. 

  2091.     <EquipmentConstant id="630217008" valueType="Ascii" logicalName="PMB.MfcGas1.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2092. 

  2092.     <EquipmentConstant id="630217009" valueType="Ascii" logicalName="PMB.MfcGas1.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2093. 

  2093.     <EquipmentConstant id="630217010" valueType="Ascii" logicalName="PMB.MfcGas1.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2094. 

  2094.     <EquipmentConstant id="630217011" valueType="Ascii" logicalName="PMB.MfcGas1.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2095. 

  2095.     <EquipmentConstant id="630218001" valueType="Ascii" logicalName="PMB.MfcGas2.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2096. 

  2096.     <EquipmentConstant id="630218002" valueType="Ascii" logicalName="PMB.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2097. 

  2097.     <EquipmentConstant id="630218003" valueType="Ascii" logicalName="PMB.MfcGas2.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2098. 

  2098.     <EquipmentConstant id="630218004" valueType="Ascii" logicalName="PMB.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2099. 

  2099.     <EquipmentConstant id="630218005" valueType="Ascii" logicalName="PMB.MfcGas2.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2100. 

  2100.     <EquipmentConstant id="630218006" valueType="Ascii" logicalName="PMB.MfcGas2.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2101. 

  2101.     <EquipmentConstant id="630218007" valueType="Ascii" logicalName="PMB.MfcGas2.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2102. 

  2102.     <EquipmentConstant id="630218008" valueType="Ascii" logicalName="PMB.MfcGas2.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2103. 

  2103.     <EquipmentConstant id="630218009" valueType="Ascii" logicalName="PMB.MfcGas2.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2104. 

  2104.     <EquipmentConstant id="630218010" valueType="Ascii" logicalName="PMB.MfcGas2.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2105. 

  2105.     <EquipmentConstant id="630218011" valueType="Ascii" logicalName="PMB.MfcGas2.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2106. 

  2106.     <EquipmentConstant id="630219001" valueType="Ascii" logicalName="PMB.MfcGas3.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2107. 

  2107.     <EquipmentConstant id="630219002" valueType="Ascii" logicalName="PMB.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2108. 

  2108.     <EquipmentConstant id="630219003" valueType="Ascii" logicalName="PMB.MfcGas3.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2109. 

  2109.     <EquipmentConstant id="630219004" valueType="Ascii" logicalName="PMB.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2110. 

  2110.     <EquipmentConstant id="630219005" valueType="Ascii" logicalName="PMB.MfcGas3.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2111. 

  2111.     <EquipmentConstant id="630219006" valueType="Ascii" logicalName="PMB.MfcGas3.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2112. 

  2112.     <EquipmentConstant id="630219007" valueType="Ascii" logicalName="PMB.MfcGas3.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2113. 

  2113.     <EquipmentConstant id="630219008" valueType="Ascii" logicalName="PMB.MfcGas3.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2114. 

  2114.     <EquipmentConstant id="630219009" valueType="Ascii" logicalName="PMB.MfcGas3.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2115. 

  2115.     <EquipmentConstant id="630219010" valueType="Ascii" logicalName="PMB.MfcGas3.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2116. 

  2116.     <EquipmentConstant id="630219011" valueType="Ascii" logicalName="PMB.MfcGas3.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2117. 

  2117.     <EquipmentConstant id="630220001" valueType="Ascii" logicalName="PMB.MfcGas4.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2118. 

  2118.     <EquipmentConstant id="630220002" valueType="Ascii" logicalName="PMB.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2119. 

  2119.     <EquipmentConstant id="630220003" valueType="Ascii" logicalName="PMB.MfcGas4.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2120. 

  2120.     <EquipmentConstant id="630220004" valueType="Ascii" logicalName="PMB.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2121. 

  2121.     <EquipmentConstant id="630220005" valueType="Ascii" logicalName="PMB.MfcGas4.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2122. 

  2122.     <EquipmentConstant id="630220006" valueType="Ascii" logicalName="PMB.MfcGas4.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2123. 

  2123.     <EquipmentConstant id="630220007" valueType="Ascii" logicalName="PMB.MfcGas4.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2124. 

  2124.     <EquipmentConstant id="630220008" valueType="Ascii" logicalName="PMB.MfcGas4.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2125. 

  2125.     <EquipmentConstant id="630220009" valueType="Ascii" logicalName="PMB.MfcGas4.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2126. 

  2126.     <EquipmentConstant id="630220010" valueType="Ascii" logicalName="PMB.MfcGas4.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2127. 

  2127.     <EquipmentConstant id="630220011" valueType="Ascii" logicalName="PMB.MfcGas4.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2128. 

  2128.     <EquipmentConstant id="630221001" valueType="Ascii" logicalName="PMB.MfcGas5.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2129. 

  2129.     <EquipmentConstant id="630221002" valueType="Ascii" logicalName="PMB.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2130. 

  2130.     <EquipmentConstant id="630221003" valueType="Ascii" logicalName="PMB.MfcGas5.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2131. 

  2131.     <EquipmentConstant id="630221004" valueType="Ascii" logicalName="PMB.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2132. 

  2132.     <EquipmentConstant id="630221005" valueType="Ascii" logicalName="PMB.MfcGas5.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2133. 

  2133.     <EquipmentConstant id="630221006" valueType="Ascii" logicalName="PMB.MfcGas5.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2134. 

  2134.     <EquipmentConstant id="630221007" valueType="Ascii" logicalName="PMB.MfcGas5.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2135. 

  2135.     <EquipmentConstant id="630221008" valueType="Ascii" logicalName="PMB.MfcGas5.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2136. 

  2136.     <EquipmentConstant id="630221009" valueType="Ascii" logicalName="PMB.MfcGas5.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2137. 

  2137.     <EquipmentConstant id="630221010" valueType="Ascii" logicalName="PMB.MfcGas5.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2138. 

  2138.     <EquipmentConstant id="630221011" valueType="Ascii" logicalName="PMB.MfcGas5.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2139. 

  2139.     <EquipmentConstant id="630222001" valueType="Ascii" logicalName="PMB.MfcGas6.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2140. 

  2140.     <EquipmentConstant id="630222002" valueType="Ascii" logicalName="PMB.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2141. 

  2141.     <EquipmentConstant id="630222003" valueType="Ascii" logicalName="PMB.MfcGas6.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2142. 

  2142.     <EquipmentConstant id="630222004" valueType="Ascii" logicalName="PMB.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2143. 

  2143.     <EquipmentConstant id="630222005" valueType="Ascii" logicalName="PMB.MfcGas6.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2144. 

  2144.     <EquipmentConstant id="630222006" valueType="Ascii" logicalName="PMB.MfcGas6.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2145. 

  2145.     <EquipmentConstant id="630222007" valueType="Ascii" logicalName="PMB.MfcGas6.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2146. 

  2146.     <EquipmentConstant id="630222008" valueType="Ascii" logicalName="PMB.MfcGas6.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2147. 

  2147.     <EquipmentConstant id="630222009" valueType="Ascii" logicalName="PMB.MfcGas6.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2148. 

  2148.     <EquipmentConstant id="630222010" valueType="Ascii" logicalName="PMB.MfcGas6.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2149. 

  2149.     <EquipmentConstant id="630222011" valueType="Ascii" logicalName="PMB.MfcGas6.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2150. 

  2150.     <EquipmentConstant id="630223001" valueType="Ascii" logicalName="PMB.Pump.LeakCheckPumpingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2151. 

  2151.     <EquipmentConstant id="630223002" valueType="Ascii" logicalName="PMB.Pump.LeakCheckWaitTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2152. 

  2152.     <EquipmentConstant id="630223003" valueType="Ascii" logicalName="PMB.Pump.LeakRate" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2153. 

  2153.     <EquipmentConstant id="630223004" valueType="Ascii" logicalName="PMB.Pump.PumpBasePressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2154. 

  2154.     <EquipmentConstant id="630223005" valueType="Ascii" logicalName="PMB.Pump.PumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2155. 

  2155.     <EquipmentConstant id="630223006" valueType="Ascii" logicalName="PMB.Pump.PumpValveDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2156. 

  2156.     <EquipmentConstant id="630224001" valueType="Ascii" logicalName="PMB.Purge.PurgeCycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2157. 

  2157.     <EquipmentConstant id="630224002" valueType="Ascii" logicalName="PMB.Purge.PurgePumpPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2158. 

  2158.     <EquipmentConstant id="630224003" valueType="Ascii" logicalName="PMB.Purge.PurgePumpStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2159. 

  2159.     <EquipmentConstant id="630224004" valueType="Ascii" logicalName="PMB.Purge.PurgePumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2160. 

  2160.     <EquipmentConstant id="630224005" valueType="Ascii" logicalName="PMB.Purge.PurgeVentPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2161. 

  2161.     <EquipmentConstant id="630224006" valueType="Ascii" logicalName="PMB.Purge.PurgeVentStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2162. 

  2162.     <EquipmentConstant id="630224007" valueType="Ascii" logicalName="PMB.Purge.PurgeVentTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2163. 

  2163.     <EquipmentConstant id="630225001" valueType="Ascii" logicalName="PMB.Rf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2164. 

  2164.     <EquipmentConstant id="630225002" valueType="Ascii" logicalName="PMB.Rf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2165. 

  2165.     <EquipmentConstant id="630225003" valueType="Ascii" logicalName="PMB.Rf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2166. 

  2166.     <EquipmentConstant id="630225004" valueType="Ascii" logicalName="PMB.Rf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2167. 

  2167.     <EquipmentConstant id="630225005" valueType="Ascii" logicalName="PMB.Rf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2168. 

  2168.     <EquipmentConstant id="630225006" valueType="Ascii" logicalName="PMB.Rf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2169. 

  2169.     <EquipmentConstant id="630225007" valueType="Ascii" logicalName="PMB.Rf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2170. 

  2170.     <EquipmentConstant id="630225008" valueType="Ascii" logicalName="PMB.Rf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2171. 

  2171.     <EquipmentConstant id="630225009" valueType="Ascii" logicalName="PMB.Rf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2172. 

  2172.     <EquipmentConstant id="630225010" valueType="Ascii" logicalName="PMB.Rf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2173. 

  2173.     <EquipmentConstant id="630225011" valueType="Ascii" logicalName="PMB.Rf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2174. 

  2174.     <EquipmentConstant id="630225012" valueType="Ascii" logicalName="PMB.Rf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2175. 

  2175.     <EquipmentConstant id="630225013" valueType="Ascii" logicalName="PMB.Rf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2176. 

  2176.     <EquipmentConstant id="630225014" valueType="Ascii" logicalName="PMB.Rf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2177. 

  2177.     <EquipmentConstant id="630225015" valueType="Ascii" logicalName="PMB.Rf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2178. 

  2178.     <EquipmentConstant id="630225016" valueType="Ascii" logicalName="PMB.Rf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2179. 

  2179.     <EquipmentConstant id="630225017" valueType="Ascii" logicalName="PMB.Rf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2180. 

  2180.     <EquipmentConstant id="630225018" valueType="Ascii" logicalName="PMB.Rf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2181. 

  2181.     <EquipmentConstant id="630225019" valueType="Ascii" logicalName="PMB.Rf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2182. 

  2182.     <EquipmentConstant id="630225020" valueType="Ascii" logicalName="PMB.Rf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2183. 

  2183.     <EquipmentConstant id="630225021" valueType="Ascii" logicalName="PMB.Rf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2184. 

  2184.     <EquipmentConstant id="630225022" valueType="Ascii" logicalName="PMB.Rf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2185. 

  2185.     <EquipmentConstant id="630225023" valueType="Ascii" logicalName="PMB.Rf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2186. 

  2186.     <EquipmentConstant id="630225024" valueType="Ascii" logicalName="PMB.Rf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2187. 

  2187.     <EquipmentConstant id="630225025" valueType="Ascii" logicalName="PMB.Rf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2188. 

  2188.     <EquipmentConstant id="630225026" valueType="Ascii" logicalName="PMB.Rf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2189. 

  2189.     <EquipmentConstant id="630225027" valueType="Ascii" logicalName="PMB.Rf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2190. 

  2190.     <EquipmentConstant id="630226001" valueType="Ascii" logicalName="PMB.Rf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2191. 

  2191.     <EquipmentConstant id="630226002" valueType="Ascii" logicalName="PMB.Rf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2192. 

  2192.     <EquipmentConstant id="630226003" valueType="Ascii" logicalName="PMB.Rf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2193. 

  2193.     <EquipmentConstant id="630226004" valueType="Ascii" logicalName="PMB.Rf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2194. 

  2194.     <EquipmentConstant id="630226005" valueType="Ascii" logicalName="PMB.Rf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2195. 

  2195.     <EquipmentConstant id="630226006" valueType="Ascii" logicalName="PMB.Rf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2196. 

  2196.     <EquipmentConstant id="630226007" valueType="Ascii" logicalName="PMB.Rf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2197. 

  2197.     <EquipmentConstant id="630226008" valueType="Ascii" logicalName="PMB.Rf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2198. 

  2198.     <EquipmentConstant id="630226009" valueType="Ascii" logicalName="PMB.Rf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2199. 

  2199.     <EquipmentConstant id="630226010" valueType="Ascii" logicalName="PMB.Rf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2200. 

  2200.     <EquipmentConstant id="630226011" valueType="Ascii" logicalName="PMB.Rf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2201. 

  2201.     <EquipmentConstant id="630226012" valueType="Ascii" logicalName="PMB.Rf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2202. 

  2202.     <EquipmentConstant id="630226013" valueType="Ascii" logicalName="PMB.Rf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2203. 

  2203.     <EquipmentConstant id="630226014" valueType="Ascii" logicalName="PMB.Rf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2204. 

  2204.     <EquipmentConstant id="630226015" valueType="Ascii" logicalName="PMB.Rf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2205. 

  2205.     <EquipmentConstant id="630226016" valueType="Ascii" logicalName="PMB.Rf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2206. 

  2206.     <EquipmentConstant id="630226017" valueType="Ascii" logicalName="PMB.Rf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2207. 

  2207.     <EquipmentConstant id="630226018" valueType="Ascii" logicalName="PMB.Rf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2208. 

  2208.     <EquipmentConstant id="630226019" valueType="Ascii" logicalName="PMB.Rf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2209. 

  2209.     <EquipmentConstant id="630226020" valueType="Ascii" logicalName="PMB.Rf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2210. 

  2210.     <EquipmentConstant id="630226021" valueType="Ascii" logicalName="PMB.Rf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2211. 

  2211.     <EquipmentConstant id="630226022" valueType="Ascii" logicalName="PMB.Rf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2212. 

  2212.     <EquipmentConstant id="630226023" valueType="Ascii" logicalName="PMB.Rf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2213. 

  2213.     <EquipmentConstant id="630226024" valueType="Ascii" logicalName="PMB.Rf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2214. 

  2214.     <EquipmentConstant id="630226025" valueType="Ascii" logicalName="PMB.Rf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2215. 

  2215.     <EquipmentConstant id="630226026" valueType="Ascii" logicalName="PMB.Rf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2216. 

  2216.     <EquipmentConstant id="630226027" valueType="Ascii" logicalName="PMB.Rf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2217. 

  2217.     <EquipmentConstant id="630227001" valueType="Ascii" logicalName="PMB.MFCVerification.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2218. 

  2218.     <EquipmentConstant id="630227002" valueType="Ascii" logicalName="PMB.MFCVerification.CheckStableTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2219. 

  2219.     <EquipmentConstant id="630227003" valueType="Ascii" logicalName="PMB.MFCVerification.FlowStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2220. 

  2220.     <EquipmentConstant id="630227004" valueType="Ascii" logicalName="PMB.MFCVerification.GasFlowTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2221. 

  2221.     <EquipmentConstant id="630227005" valueType="Ascii" logicalName="PMB.MFCVerification.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2222. 

  2222.     <EquipmentConstant id="630227006" valueType="Ascii" logicalName="PMB.MFCVerification.MaxDeviation" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2223. 

  2223.     <EquipmentConstant id="630227007" valueType="Ascii" logicalName="PMB.MFCVerification.PressureStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2224. 

  2224.     <EquipmentConstant id="630227008" valueType="Ascii" logicalName="PMB.MFCVerification.TargetPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2225. 

  2225.     <EquipmentConstant id="630228001" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2226. 

  2226.     <EquipmentConstant id="630228002" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2227. 

  2227.     <EquipmentConstant id="630228003" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2228. 

  2228.     <EquipmentConstant id="630228004" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2229. 

  2229.     <EquipmentConstant id="630228005" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2230. 

  2230.     <EquipmentConstant id="630228006" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2231. 

  2231.     <EquipmentConstant id="630228007" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2232. 

  2232.     <EquipmentConstant id="630228008" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2233. 

  2233.     <EquipmentConstant id="630228009" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2234. 

  2234.     <EquipmentConstant id="630228010" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2235. 

  2235.     <EquipmentConstant id="630228011" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2236. 

  2236.     <EquipmentConstant id="630228012" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2237. 

  2237.     <EquipmentConstant id="630228013" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2238. 

  2238.     <EquipmentConstant id="630228014" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2239. 

  2239.     <EquipmentConstant id="630228015" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2240. 

  2240.     <EquipmentConstant id="630228016" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2241. 

  2241.     <EquipmentConstant id="630228017" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2242. 

  2242.     <EquipmentConstant id="630228018" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2243. 

  2243.     <EquipmentConstant id="630229001" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2244. 

  2244.     <EquipmentConstant id="630229002" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2245. 

  2245.     <EquipmentConstant id="630229003" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2246. 

  2246.     <EquipmentConstant id="630229004" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2247. 

  2247.     <EquipmentConstant id="630229005" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2248. 

  2248.     <EquipmentConstant id="630229006" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2249. 

  2249.     <EquipmentConstant id="630229007" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2250. 

  2250.     <EquipmentConstant id="630229008" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2251. 

  2251.     <EquipmentConstant id="630229009" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2252. 

  2252.     <EquipmentConstant id="630229010" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2253. 

  2253.     <EquipmentConstant id="630229011" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2254. 

  2254.     <EquipmentConstant id="630229012" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2255. 

  2255.     <EquipmentConstant id="630229013" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2256. 

  2256.     <EquipmentConstant id="630229014" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2257. 

  2257.     <EquipmentConstant id="630229015" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2258. 

  2258.     <EquipmentConstant id="630229016" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2259. 

  2259.     <EquipmentConstant id="630229017" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2260. 

  2260.     <EquipmentConstant id="630229018" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2261. 

  2261.     <EquipmentConstant id="640101001" valueType="Ascii" logicalName="PMC.BiasRf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2262. 

  2262.     <EquipmentConstant id="640101002" valueType="Ascii" logicalName="PMC.BiasRf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2263. 

  2263.     <EquipmentConstant id="640101003" valueType="Ascii" logicalName="PMC.BiasRf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2264. 

  2264.     <EquipmentConstant id="640101004" valueType="Ascii" logicalName="PMC.BiasRf1.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2265. 

  2265.     <EquipmentConstant id="640101005" valueType="Ascii" logicalName="PMC.BiasRf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2266. 

  2266.     <EquipmentConstant id="640101006" valueType="Ascii" logicalName="PMC.BiasRf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2267. 

  2267.     <EquipmentConstant id="640101007" valueType="Ascii" logicalName="PMC.BiasRf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2268. 

  2268.     <EquipmentConstant id="640101008" valueType="Ascii" logicalName="PMC.BiasRf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2269. 

  2269.     <EquipmentConstant id="640101009" valueType="Ascii" logicalName="PMC.BiasRf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2270. 

  2270.     <EquipmentConstant id="640101010" valueType="Ascii" logicalName="PMC.BiasRf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2271. 

  2271.     <EquipmentConstant id="640101011" valueType="Ascii" logicalName="PMC.BiasRf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2272. 

  2272.     <EquipmentConstant id="640101012" valueType="Ascii" logicalName="PMC.BiasRf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2273. 

  2273.     <EquipmentConstant id="640101013" valueType="Ascii" logicalName="PMC.BiasRf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2274. 

  2274.     <EquipmentConstant id="640101014" valueType="Ascii" logicalName="PMC.BiasRf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2275. 

  2275.     <EquipmentConstant id="640101015" valueType="Ascii" logicalName="PMC.BiasRf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2276. 

  2276.     <EquipmentConstant id="640101016" valueType="Ascii" logicalName="PMC.BiasRf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2277. 

  2277.     <EquipmentConstant id="640101017" valueType="Ascii" logicalName="PMC.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2278. 

  2278.     <EquipmentConstant id="640101018" valueType="Ascii" logicalName="PMC.BiasRf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2279. 

  2279.     <EquipmentConstant id="640101019" valueType="Ascii" logicalName="PMC.BiasRf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2280. 

  2280.     <EquipmentConstant id="640101020" valueType="Ascii" logicalName="PMC.BiasRf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2281. 

  2281.     <EquipmentConstant id="640101021" valueType="Ascii" logicalName="PMC.BiasRf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2282. 

  2282.     <EquipmentConstant id="640101022" valueType="Ascii" logicalName="PMC.BiasRf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2283. 

  2283.     <EquipmentConstant id="640101023" valueType="Ascii" logicalName="PMC.BiasRf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2284. 

  2284.     <EquipmentConstant id="640101024" valueType="Ascii" logicalName="PMC.BiasRf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2285. 

  2285.     <EquipmentConstant id="640101025" valueType="Ascii" logicalName="PMC.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2286. 

  2286.     <EquipmentConstant id="640101026" valueType="Ascii" logicalName="PMC.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2287. 

  2287.     <EquipmentConstant id="640101027" valueType="Ascii" logicalName="PMC.BiasRf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2288. 

  2288.     <EquipmentConstant id="640101028" valueType="Ascii" logicalName="PMC.BiasRf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2289. 

  2289.     <EquipmentConstant id="640202001" valueType="Ascii" logicalName="PMC.BiasRf1Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2290. 

  2290.     <EquipmentConstant id="640202002" valueType="Ascii" logicalName="PMC.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2291. 

  2291.     <EquipmentConstant id="640202003" valueType="Ascii" logicalName="PMC.BiasRf1Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2292. 

  2292.     <EquipmentConstant id="640202004" valueType="Ascii" logicalName="PMC.BiasRf1Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2293. 

  2293.     <EquipmentConstant id="640202005" valueType="Ascii" logicalName="PMC.BiasRf1Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2294. 

  2294.     <EquipmentConstant id="640202006" valueType="Ascii" logicalName="PMC.BiasRf1Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2295. 

  2295.     <EquipmentConstant id="640202007" valueType="Ascii" logicalName="PMC.BiasRf1Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2296. 

  2296.     <EquipmentConstant id="640203001" valueType="Ascii" logicalName="PMC.BiasRf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2297. 

  2297.     <EquipmentConstant id="640203002" valueType="Ascii" logicalName="PMC.BiasRf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2298. 

  2298.     <EquipmentConstant id="640203003" valueType="Ascii" logicalName="PMC.BiasRf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2299. 

  2299.     <EquipmentConstant id="640203004" valueType="Ascii" logicalName="PMC.BiasRf2.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2300. 

  2300.     <EquipmentConstant id="640203005" valueType="Ascii" logicalName="PMC.BiasRf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2301. 

  2301.     <EquipmentConstant id="640203006" valueType="Ascii" logicalName="PMC.BiasRf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2302. 

  2302.     <EquipmentConstant id="640203007" valueType="Ascii" logicalName="PMC.BiasRf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2303. 

  2303.     <EquipmentConstant id="640203008" valueType="Ascii" logicalName="PMC.BiasRf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2304. 

  2304.     <EquipmentConstant id="640203009" valueType="Ascii" logicalName="PMC.BiasRf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2305. 

  2305.     <EquipmentConstant id="640203010" valueType="Ascii" logicalName="PMC.BiasRf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2306. 

  2306.     <EquipmentConstant id="640203011" valueType="Ascii" logicalName="PMC.BiasRf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2307. 

  2307.     <EquipmentConstant id="640203012" valueType="Ascii" logicalName="PMC.BiasRf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2308. 

  2308.     <EquipmentConstant id="640203013" valueType="Ascii" logicalName="PMC.BiasRf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2309. 

  2309.     <EquipmentConstant id="640203014" valueType="Ascii" logicalName="PMC.BiasRf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2310. 

  2310.     <EquipmentConstant id="640203015" valueType="Ascii" logicalName="PMC.BiasRf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2311. 

  2311.     <EquipmentConstant id="640203016" valueType="Ascii" logicalName="PMC.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2312. 

  2312.     <EquipmentConstant id="640203017" valueType="Ascii" logicalName="PMC.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2313. 

  2313.     <EquipmentConstant id="640203018" valueType="Ascii" logicalName="PMC.BiasRf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2314. 

  2314.     <EquipmentConstant id="640203019" valueType="Ascii" logicalName="PMC.BiasRf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2315. 

  2315.     <EquipmentConstant id="640203020" valueType="Ascii" logicalName="PMC.BiasRf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2316. 

  2316.     <EquipmentConstant id="640203021" valueType="Ascii" logicalName="PMC.BiasRf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2317. 

  2317.     <EquipmentConstant id="640203022" valueType="Ascii" logicalName="PMC.BiasRf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2318. 

  2318.     <EquipmentConstant id="640203023" valueType="Ascii" logicalName="PMC.BiasRf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2319. 

  2319.     <EquipmentConstant id="640203024" valueType="Ascii" logicalName="PMC.BiasRf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2320. 

  2320.     <EquipmentConstant id="640203025" valueType="Ascii" logicalName="PMC.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2321. 

  2321.     <EquipmentConstant id="640203026" valueType="Ascii" logicalName="PMC.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2322. 

  2322.     <EquipmentConstant id="640203027" valueType="Ascii" logicalName="PMC.BiasRf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2323. 

  2323.     <EquipmentConstant id="640203028" valueType="Ascii" logicalName="PMC.BiasRf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2324. 

  2324.     <EquipmentConstant id="640204001" valueType="Ascii" logicalName="PMC.BiasRf2Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2325. 

  2325.     <EquipmentConstant id="640204002" valueType="Ascii" logicalName="PMC.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2326. 

  2326.     <EquipmentConstant id="640204003" valueType="Ascii" logicalName="PMC.BiasRf2Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2327. 

  2327.     <EquipmentConstant id="640204004" valueType="Ascii" logicalName="PMC.BiasRf2Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2328. 

  2328.     <EquipmentConstant id="640204005" valueType="Ascii" logicalName="PMC.BiasRf2Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2329. 

  2329.     <EquipmentConstant id="640204006" valueType="Ascii" logicalName="PMC.BiasRf2Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2330. 

  2330.     <EquipmentConstant id="640204007" valueType="Ascii" logicalName="PMC.BiasRf2Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2331. 

  2331.     <EquipmentConstant id="640205001" valueType="Ascii" logicalName="PMC.ChamberBasePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2332. 

  2332.     <EquipmentConstant id="640205002" valueType="Ascii" logicalName="PMC.ChamberBaseTemperatureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2333. 

  2333.     <EquipmentConstant id="640205003" valueType="Ascii" logicalName="PMC.ChamberHeater1SetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2334. 

  2334.     <EquipmentConstant id="640205004" valueType="Ascii" logicalName="PMC.HeaterChamberSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2335. 

  2335.     <EquipmentConstant id="640205005" valueType="Ascii" logicalName="PMC.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2336. 

  2336.     <EquipmentConstant id="640205006" valueType="Ascii" logicalName="PMC.CheckATMTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2337. 

  2337.     <EquipmentConstant id="640205007" valueType="Ascii" logicalName="PMC.CheckChamberTempTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2338. 

  2338.     <EquipmentConstant id="640205008" valueType="Ascii" logicalName="PMC.EnableThrottleValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2339. 

  2339.     <EquipmentConstant id="640205009" valueType="Ascii" logicalName="PMC.ForeLineHeaterSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2340. 

  2340.     <EquipmentConstant id="640205010" valueType="Ascii" logicalName="PMC.GasFlowPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2341. 

  2341.     <EquipmentConstant id="640205011" valueType="Ascii" logicalName="PMC.GasFlowPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2342. 

  2342.     <EquipmentConstant id="640205012" valueType="Ascii" logicalName="PMC.GasFlowTimeInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2343. 

  2343.     <EquipmentConstant id="640205013" valueType="Ascii" logicalName="PMC.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2344. 

  2344.     <EquipmentConstant id="640205014" valueType="Ascii" logicalName="PMC.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2345. 

  2345.     <EquipmentConstant id="640205015" valueType="Ascii" logicalName="PMC.LEHeaterSetPointLimit1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2346. 

  2346.     <EquipmentConstant id="640205016" valueType="Ascii" logicalName="PMC.LEHeaterSetPointLimit2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2347. 

  2347.     <EquipmentConstant id="640205017" valueType="Ascii" logicalName="PMC.OpenCloseSlitValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2348. 

  2348.     <EquipmentConstant id="640205018" valueType="Ascii" logicalName="PMC.OpenGasValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2349. 

  2349.     <EquipmentConstant id="640205019" valueType="Ascii" logicalName="PMC.PlaceAndPickDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2350. 

  2350.     <EquipmentConstant id="640205020" valueType="Ascii" logicalName="PMC.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2351. 

  2351.     <EquipmentConstant id="640205021" valueType="Ascii" logicalName="PMC.PrepareTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2352. 

  2352.     <EquipmentConstant id="640205022" valueType="Ascii" logicalName="PMC.ProcessPressureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2353. 

  2353.     <EquipmentConstant id="640205023" valueType="Ascii" logicalName="PMC.TargetPressureInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2354. 

  2354.     <EquipmentConstant id="640205024" valueType="Ascii" logicalName="PMC.TimeLimitOfCloseGasValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2355. 

  2355.     <EquipmentConstant id="640205025" valueType="Ascii" logicalName="PMC.VentTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2356. 

  2356.     <EquipmentConstant id="640205026" valueType="Ascii" logicalName="PMC.VentTimeDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2357. 

  2357.     <EquipmentConstant id="640205027" valueType="Ascii" logicalName="PMC.GasFlowPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2358. 

  2358.     <EquipmentConstant id="640205028" valueType="Ascii" logicalName="PMC.GasFlowPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2359. 

  2359.     <EquipmentConstant id="640205029" valueType="Ascii" logicalName="PMC.RecipeToleranceIgnoreTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2360. 

  2360.     <EquipmentConstant id="640205030" valueType="Ascii" logicalName="PMC.ProcessPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2361. 

  2361.     <EquipmentConstant id="640205031" valueType="Ascii" logicalName="PMC.ProcessPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2362. 

  2362.     <EquipmentConstant id="640205032" valueType="Ascii" logicalName="PMC.ProcessPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2363. 

  2363.     <EquipmentConstant id="640205033" valueType="Ascii" logicalName="PMC.ProcessPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2364. 

  2364.     <EquipmentConstant id="640205034" valueType="Ascii" logicalName="PMC.CloseDoorDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2365. 

  2365.     <EquipmentConstant id="640206001" valueType="Ascii" logicalName="PMC.Chiller1.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2366. 

  2366.     <EquipmentConstant id="640206002" valueType="Ascii" logicalName="PMC.Chiller1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2367. 

  2367.     <EquipmentConstant id="640206003" valueType="Ascii" logicalName="PMC.Chiller1.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2368. 

  2368.     <EquipmentConstant id="640206004" valueType="Ascii" logicalName="PMC.Chiller1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2369. 

  2369.     <EquipmentConstant id="640206005" valueType="Ascii" logicalName="PMC.Chiller1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2370. 

  2370.     <EquipmentConstant id="640206006" valueType="Ascii" logicalName="PMC.Chiller1.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2371. 

  2371.     <EquipmentConstant id="640206007" valueType="Ascii" logicalName="PMC.Chiller1.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2372. 

  2372.     <EquipmentConstant id="640206008" valueType="Ascii" logicalName="PMC.Chiller1.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2373. 

  2373.     <EquipmentConstant id="640206009" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2374. 

  2374.     <EquipmentConstant id="640206010" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2375. 

  2375.     <EquipmentConstant id="640206011" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2376. 

  2376.     <EquipmentConstant id="640206012" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2377. 

  2377.     <EquipmentConstant id="640207001" valueType="Ascii" logicalName="PMC.Chiller2.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2378. 

  2378.     <EquipmentConstant id="640207002" valueType="Ascii" logicalName="PMC.Chiller2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2379. 

  2379.     <EquipmentConstant id="640207003" valueType="Ascii" logicalName="PMC.Chiller2.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2380. 

  2380.     <EquipmentConstant id="640207004" valueType="Ascii" logicalName="PMC.Chiller2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2381. 

  2381.     <EquipmentConstant id="640207005" valueType="Ascii" logicalName="PMC.Chiller2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2382. 

  2382.     <EquipmentConstant id="640207006" valueType="Ascii" logicalName="PMC.Chiller2.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2383. 

  2383.     <EquipmentConstant id="640207007" valueType="Ascii" logicalName="PMC.Chiller2.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2384. 

  2384.     <EquipmentConstant id="640207008" valueType="Ascii" logicalName="PMC.Chiller2.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2385. 

  2385.     <EquipmentConstant id="640207009" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2386. 

  2386.     <EquipmentConstant id="640207010" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2387. 

  2387.     <EquipmentConstant id="640207011" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2388. 

  2388.     <EquipmentConstant id="640207012" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2389. 

  2389.     <EquipmentConstant id="640208001" valueType="Ascii" logicalName="PMC.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2390. 

  2390.     <EquipmentConstant id="640208002" valueType="Ascii" logicalName="PMC.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2391. 

  2391.     <EquipmentConstant id="640208003" valueType="Ascii" logicalName="PMC.DryPump.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2392. 

  2392.     <EquipmentConstant id="640208004" valueType="Ascii" logicalName="PMC.DryPump.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2393. 

  2393.     <EquipmentConstant id="640208005" valueType="Ascii" logicalName="PMC.DryPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2394. 

  2394.     <EquipmentConstant id="640208006" valueType="Ascii" logicalName="PMC.DryPump.NeedUpdateComm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2395. 

  2395.     <EquipmentConstant id="640209001" valueType="Ascii" logicalName="PMC.ElectrodeHeart1.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2396. 

  2396.     <EquipmentConstant id="640210001" valueType="Ascii" logicalName="PMC.ElectrodeHeart2.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2397. 

  2397.     <EquipmentConstant id="640211001" valueType="Ascii" logicalName="PMC.EPD.ChannelNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2398. 

  2398.     <EquipmentConstant id="640211002" valueType="Ascii" logicalName="PMC.EPD.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2399. 

  2399.     <EquipmentConstant id="640212001" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2400. 

  2400.     <EquipmentConstant id="640212002" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2401. 

  2401.     <EquipmentConstant id="640212003" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2402. 

  2402.     <EquipmentConstant id="640212004" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2403. 

  2403.     <EquipmentConstant id="640212005" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2404. 

  2404.     <EquipmentConstant id="640212006" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2405. 

  2405.     <EquipmentConstant id="640212007" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2406. 

  2406.     <EquipmentConstant id="640212008" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2407. 

  2407.     <EquipmentConstant id="640212009" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2408. 

  2408.     <EquipmentConstant id="640212010" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2409. 

  2409.     <EquipmentConstant id="640212011" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2410. 

  2410.     <EquipmentConstant id="640212012" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2411. 

  2411.     <EquipmentConstant id="640212013" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2412. 

  2412.     <EquipmentConstant id="640212014" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2413. 

  2413.     <EquipmentConstant id="640212015" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2414. 

  2414.     <EquipmentConstant id="640212016" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2415. 

  2415.     <EquipmentConstant id="640212017" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2416. 

  2416.     <EquipmentConstant id="640212018" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2417. 

  2417.     <EquipmentConstant id="640213001" valueType="Ascii" logicalName="PMC.IdleClean.IdleCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2418. 

  2418.     <EquipmentConstant id="640213002" valueType="Ascii" logicalName="PMC.IdleClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2419. 

  2419.     <EquipmentConstant id="640213003" valueType="Ascii" logicalName="PMC.IdleClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2420. 

  2420.     <EquipmentConstant id="640214001" valueType="Ascii" logicalName="PMC.JobClean.CompleteJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2421. 

  2421.     <EquipmentConstant id="640214002" valueType="Ascii" logicalName="PMC.JobClean.EnableCompleteJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2422. 

  2422.     <EquipmentConstant id="640214003" valueType="Ascii" logicalName="PMC.JobClean.EnablePreJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2423. 

  2423.     <EquipmentConstant id="640214004" valueType="Ascii" logicalName="PMC.JobClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2424. 

  2424.     <EquipmentConstant id="640214005" valueType="Ascii" logicalName="PMC.JobClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2425. 

  2425.     <EquipmentConstant id="640214006" valueType="Ascii" logicalName="PMC.JobClean.PreJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2426. 

  2426.     <EquipmentConstant id="640215001" valueType="Ascii" logicalName="PMC.match1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2427. 

  2427.     <EquipmentConstant id="640215002" valueType="Ascii" logicalName="PMC.match1.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2428. 

  2428.     <EquipmentConstant id="640215003" valueType="Ascii" logicalName="PMC.match1.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2429. 

  2429.     <EquipmentConstant id="640215004" valueType="Ascii" logicalName="PMC.match1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2430. 

  2430.     <EquipmentConstant id="640215005" valueType="Ascii" logicalName="PMC.match1.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2431. 

  2431.     <EquipmentConstant id="640215006" valueType="Ascii" logicalName="PMC.match1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2432. 

  2432.     <EquipmentConstant id="640215007" valueType="Ascii" logicalName="PMC.match1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2433. 

  2433.     <EquipmentConstant id="640216001" valueType="Ascii" logicalName="PMC.match2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2434. 

  2434.     <EquipmentConstant id="640216002" valueType="Ascii" logicalName="PMC.match2.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2435. 

  2435.     <EquipmentConstant id="640216003" valueType="Ascii" logicalName="PMC.match2.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2436. 

  2436.     <EquipmentConstant id="640216004" valueType="Ascii" logicalName="PMC.match2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2437. 

  2437.     <EquipmentConstant id="640216005" valueType="Ascii" logicalName="PMC.match2.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2438. 

  2438.     <EquipmentConstant id="640216006" valueType="Ascii" logicalName="PMC.match2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2439. 

  2439.     <EquipmentConstant id="640216007" valueType="Ascii" logicalName="PMC.match2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2440. 

  2440.     <EquipmentConstant id="640217001" valueType="Ascii" logicalName="PMC.MfcGas1.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2441. 

  2441.     <EquipmentConstant id="640217002" valueType="Ascii" logicalName="PMC.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2442. 

  2442.     <EquipmentConstant id="640217003" valueType="Ascii" logicalName="PMC.MfcGas1.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2443. 

  2443.     <EquipmentConstant id="640217004" valueType="Ascii" logicalName="PMC.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2444. 

  2444.     <EquipmentConstant id="640217005" valueType="Ascii" logicalName="PMC.MfcGas1.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2445. 

  2445.     <EquipmentConstant id="640217006" valueType="Ascii" logicalName="PMC.MfcGas1.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2446. 

  2446.     <EquipmentConstant id="640217007" valueType="Ascii" logicalName="PMC.MfcGas1.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2447. 

  2447.     <EquipmentConstant id="640217008" valueType="Ascii" logicalName="PMC.MfcGas1.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2448. 

  2448.     <EquipmentConstant id="640217009" valueType="Ascii" logicalName="PMC.MfcGas1.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2449. 

  2449.     <EquipmentConstant id="640217010" valueType="Ascii" logicalName="PMC.MfcGas1.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2450. 

  2450.     <EquipmentConstant id="640217011" valueType="Ascii" logicalName="PMC.MfcGas1.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2451. 

  2451.     <EquipmentConstant id="640218001" valueType="Ascii" logicalName="PMC.MfcGas2.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2452. 

  2452.     <EquipmentConstant id="640218002" valueType="Ascii" logicalName="PMC.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2453. 

  2453.     <EquipmentConstant id="640218003" valueType="Ascii" logicalName="PMC.MfcGas2.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2454. 

  2454.     <EquipmentConstant id="640218004" valueType="Ascii" logicalName="PMC.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2455. 

  2455.     <EquipmentConstant id="640218005" valueType="Ascii" logicalName="PMC.MfcGas2.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2456. 

  2456.     <EquipmentConstant id="640218006" valueType="Ascii" logicalName="PMC.MfcGas2.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2457. 

  2457.     <EquipmentConstant id="640218007" valueType="Ascii" logicalName="PMC.MfcGas2.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2458. 

  2458.     <EquipmentConstant id="640218008" valueType="Ascii" logicalName="PMC.MfcGas2.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2459. 

  2459.     <EquipmentConstant id="640218009" valueType="Ascii" logicalName="PMC.MfcGas2.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2460. 

  2460.     <EquipmentConstant id="640218010" valueType="Ascii" logicalName="PMC.MfcGas2.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2461. 

  2461.     <EquipmentConstant id="640218011" valueType="Ascii" logicalName="PMC.MfcGas2.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2462. 

  2462.     <EquipmentConstant id="640219001" valueType="Ascii" logicalName="PMC.MfcGas3.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2463. 

  2463.     <EquipmentConstant id="640219002" valueType="Ascii" logicalName="PMC.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2464. 

  2464.     <EquipmentConstant id="640219003" valueType="Ascii" logicalName="PMC.MfcGas3.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2465. 

  2465.     <EquipmentConstant id="640219004" valueType="Ascii" logicalName="PMC.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2466. 

  2466.     <EquipmentConstant id="640219005" valueType="Ascii" logicalName="PMC.MfcGas3.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2467. 

  2467.     <EquipmentConstant id="640219006" valueType="Ascii" logicalName="PMC.MfcGas3.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2468. 

  2468.     <EquipmentConstant id="640219007" valueType="Ascii" logicalName="PMC.MfcGas3.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2469. 

  2469.     <EquipmentConstant id="640219008" valueType="Ascii" logicalName="PMC.MfcGas3.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2470. 

  2470.     <EquipmentConstant id="640219009" valueType="Ascii" logicalName="PMC.MfcGas3.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2471. 

  2471.     <EquipmentConstant id="640219010" valueType="Ascii" logicalName="PMC.MfcGas3.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2472. 

  2472.     <EquipmentConstant id="640219011" valueType="Ascii" logicalName="PMC.MfcGas3.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2473. 

  2473.     <EquipmentConstant id="640220001" valueType="Ascii" logicalName="PMC.MfcGas4.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2474. 

  2474.     <EquipmentConstant id="640220002" valueType="Ascii" logicalName="PMC.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2475. 

  2475.     <EquipmentConstant id="640220003" valueType="Ascii" logicalName="PMC.MfcGas4.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2476. 

  2476.     <EquipmentConstant id="640220004" valueType="Ascii" logicalName="PMC.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2477. 

  2477.     <EquipmentConstant id="640220005" valueType="Ascii" logicalName="PMC.MfcGas4.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2478. 

  2478.     <EquipmentConstant id="640220006" valueType="Ascii" logicalName="PMC.MfcGas4.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2479. 

  2479.     <EquipmentConstant id="640220007" valueType="Ascii" logicalName="PMC.MfcGas4.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2480. 

  2480.     <EquipmentConstant id="640220008" valueType="Ascii" logicalName="PMC.MfcGas4.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2481. 

  2481.     <EquipmentConstant id="640220009" valueType="Ascii" logicalName="PMC.MfcGas4.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2482. 

  2482.     <EquipmentConstant id="640220010" valueType="Ascii" logicalName="PMC.MfcGas4.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2483. 

  2483.     <EquipmentConstant id="640220011" valueType="Ascii" logicalName="PMC.MfcGas4.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2484. 

  2484.     <EquipmentConstant id="640221001" valueType="Ascii" logicalName="PMC.MfcGas5.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2485. 

  2485.     <EquipmentConstant id="640221002" valueType="Ascii" logicalName="PMC.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2486. 

  2486.     <EquipmentConstant id="640221003" valueType="Ascii" logicalName="PMC.MfcGas5.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2487. 

  2487.     <EquipmentConstant id="640221004" valueType="Ascii" logicalName="PMC.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2488. 

  2488.     <EquipmentConstant id="640221005" valueType="Ascii" logicalName="PMC.MfcGas5.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2489. 

  2489.     <EquipmentConstant id="640221006" valueType="Ascii" logicalName="PMC.MfcGas5.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2490. 

  2490.     <EquipmentConstant id="640221007" valueType="Ascii" logicalName="PMC.MfcGas5.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2491. 

  2491.     <EquipmentConstant id="640221008" valueType="Ascii" logicalName="PMC.MfcGas5.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2492. 

  2492.     <EquipmentConstant id="640221009" valueType="Ascii" logicalName="PMC.MfcGas5.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2493. 

  2493.     <EquipmentConstant id="640221010" valueType="Ascii" logicalName="PMC.MfcGas5.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2494. 

  2494.     <EquipmentConstant id="640221011" valueType="Ascii" logicalName="PMC.MfcGas5.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2495. 

  2495.     <EquipmentConstant id="640222001" valueType="Ascii" logicalName="PMC.MfcGas6.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2496. 

  2496.     <EquipmentConstant id="640222002" valueType="Ascii" logicalName="PMC.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2497. 

  2497.     <EquipmentConstant id="640222003" valueType="Ascii" logicalName="PMC.MfcGas6.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2498. 

  2498.     <EquipmentConstant id="640222004" valueType="Ascii" logicalName="PMC.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2499. 

  2499.     <EquipmentConstant id="640222005" valueType="Ascii" logicalName="PMC.MfcGas6.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2500. 

  2500.     <EquipmentConstant id="640222006" valueType="Ascii" logicalName="PMC.MfcGas6.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2501. 

  2501.     <EquipmentConstant id="640222007" valueType="Ascii" logicalName="PMC.MfcGas6.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2502. 

  2502.     <EquipmentConstant id="640222008" valueType="Ascii" logicalName="PMC.MfcGas6.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2503. 

  2503.     <EquipmentConstant id="640222009" valueType="Ascii" logicalName="PMC.MfcGas6.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2504. 

  2504.     <EquipmentConstant id="640222010" valueType="Ascii" logicalName="PMC.MfcGas6.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2505. 

  2505.     <EquipmentConstant id="640222011" valueType="Ascii" logicalName="PMC.MfcGas6.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2506. 

  2506.     <EquipmentConstant id="640223001" valueType="Ascii" logicalName="PMC.Pump.LeakCheckPumpingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2507. 

  2507.     <EquipmentConstant id="640223002" valueType="Ascii" logicalName="PMC.Pump.LeakCheckWaitTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2508. 

  2508.     <EquipmentConstant id="640223003" valueType="Ascii" logicalName="PMC.Pump.LeakRate" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2509. 

  2509.     <EquipmentConstant id="640223004" valueType="Ascii" logicalName="PMC.Pump.PumpBasePressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2510. 

  2510.     <EquipmentConstant id="640223005" valueType="Ascii" logicalName="PMC.Pump.PumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2511. 

  2511.     <EquipmentConstant id="640223006" valueType="Ascii" logicalName="PMC.Pump.PumpValveDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2512. 

  2512.     <EquipmentConstant id="640224001" valueType="Ascii" logicalName="PMC.Purge.PurgeCycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2513. 

  2513.     <EquipmentConstant id="640224002" valueType="Ascii" logicalName="PMC.Purge.PurgePumpPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2514. 

  2514.     <EquipmentConstant id="640224003" valueType="Ascii" logicalName="PMC.Purge.PurgePumpStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2515. 

  2515.     <EquipmentConstant id="640224004" valueType="Ascii" logicalName="PMC.Purge.PurgePumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2516. 

  2516.     <EquipmentConstant id="640224005" valueType="Ascii" logicalName="PMC.Purge.PurgeVentPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2517. 

  2517.     <EquipmentConstant id="640224006" valueType="Ascii" logicalName="PMC.Purge.PurgeVentStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2518. 

  2518.     <EquipmentConstant id="640224007" valueType="Ascii" logicalName="PMC.Purge.PurgeVentTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2519. 

  2519.     <EquipmentConstant id="640225001" valueType="Ascii" logicalName="PMC.Rf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2520. 

  2520.     <EquipmentConstant id="640225002" valueType="Ascii" logicalName="PMC.Rf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2521. 

  2521.     <EquipmentConstant id="640225003" valueType="Ascii" logicalName="PMC.Rf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2522. 

  2522.     <EquipmentConstant id="640225004" valueType="Ascii" logicalName="PMC.Rf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2523. 

  2523.     <EquipmentConstant id="640225005" valueType="Ascii" logicalName="PMC.Rf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2524. 

  2524.     <EquipmentConstant id="640225006" valueType="Ascii" logicalName="PMC.Rf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2525. 

  2525.     <EquipmentConstant id="640225007" valueType="Ascii" logicalName="PMC.Rf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2526. 

  2526.     <EquipmentConstant id="640225008" valueType="Ascii" logicalName="PMC.Rf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2527. 

  2527.     <EquipmentConstant id="640225009" valueType="Ascii" logicalName="PMC.Rf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2528. 

  2528.     <EquipmentConstant id="640225010" valueType="Ascii" logicalName="PMC.Rf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2529. 

  2529.     <EquipmentConstant id="640225011" valueType="Ascii" logicalName="PMC.Rf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2530. 

  2530.     <EquipmentConstant id="640225012" valueType="Ascii" logicalName="PMC.Rf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2531. 

  2531.     <EquipmentConstant id="640225013" valueType="Ascii" logicalName="PMC.Rf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2532. 

  2532.     <EquipmentConstant id="640225014" valueType="Ascii" logicalName="PMC.Rf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2533. 

  2533.     <EquipmentConstant id="640225015" valueType="Ascii" logicalName="PMC.Rf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2534. 

  2534.     <EquipmentConstant id="640225016" valueType="Ascii" logicalName="PMC.Rf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2535. 

  2535.     <EquipmentConstant id="640225017" valueType="Ascii" logicalName="PMC.Rf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2536. 

  2536.     <EquipmentConstant id="640225018" valueType="Ascii" logicalName="PMC.Rf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2537. 

  2537.     <EquipmentConstant id="640225019" valueType="Ascii" logicalName="PMC.Rf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2538. 

  2538.     <EquipmentConstant id="640225020" valueType="Ascii" logicalName="PMC.Rf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2539. 

  2539.     <EquipmentConstant id="640225021" valueType="Ascii" logicalName="PMC.Rf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2540. 

  2540.     <EquipmentConstant id="640225022" valueType="Ascii" logicalName="PMC.Rf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2541. 

  2541.     <EquipmentConstant id="640226001" valueType="Ascii" logicalName="PMC.Rf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2542. 

  2542.     <EquipmentConstant id="640226002" valueType="Ascii" logicalName="PMC.Rf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2543. 

  2543.     <EquipmentConstant id="640226003" valueType="Ascii" logicalName="PMC.Rf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2544. 

  2544.     <EquipmentConstant id="640226004" valueType="Ascii" logicalName="PMC.Rf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2545. 

  2545.     <EquipmentConstant id="640226005" valueType="Ascii" logicalName="PMC.Rf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2546. 

  2546.     <EquipmentConstant id="640226006" valueType="Ascii" logicalName="PMC.Rf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2547. 

  2547.     <EquipmentConstant id="640226007" valueType="Ascii" logicalName="PMC.Rf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2548. 

  2548.     <EquipmentConstant id="640226008" valueType="Ascii" logicalName="PMC.Rf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2549. 

  2549.     <EquipmentConstant id="640226009" valueType="Ascii" logicalName="PMC.Rf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2550. 

  2550.     <EquipmentConstant id="640226010" valueType="Ascii" logicalName="PMC.Rf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2551. 

  2551.     <EquipmentConstant id="640226011" valueType="Ascii" logicalName="PMC.Rf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2552. 

  2552.     <EquipmentConstant id="640226012" valueType="Ascii" logicalName="PMC.Rf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2553. 

  2553.     <EquipmentConstant id="640226013" valueType="Ascii" logicalName="PMC.Rf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2554. 

  2554.     <EquipmentConstant id="640226014" valueType="Ascii" logicalName="PMC.Rf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2555. 

  2555.     <EquipmentConstant id="640226015" valueType="Ascii" logicalName="PMC.Rf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2556. 

  2556.     <EquipmentConstant id="640226016" valueType="Ascii" logicalName="PMC.Rf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2557. 

  2557.     <EquipmentConstant id="640226017" valueType="Ascii" logicalName="PMC.Rf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2558. 

  2558.     <EquipmentConstant id="640226018" valueType="Ascii" logicalName="PMC.Rf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2559. 

  2559.     <EquipmentConstant id="640226019" valueType="Ascii" logicalName="PMC.Rf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2560. 

  2560.     <EquipmentConstant id="640226020" valueType="Ascii" logicalName="PMC.Rf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2561. 

  2561.     <EquipmentConstant id="640226021" valueType="Ascii" logicalName="PMC.Rf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2562. 

  2562.     <EquipmentConstant id="640226022" valueType="Ascii" logicalName="PMC.Rf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2563. 

  2563.     <EquipmentConstant id="640227001" valueType="Ascii" logicalName="PMC.MFCVerification.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2564. 

  2564.     <EquipmentConstant id="640227002" valueType="Ascii" logicalName="PMC.MFCVerification.CheckStableTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2565. 

  2565.     <EquipmentConstant id="640227003" valueType="Ascii" logicalName="PMC.MFCVerification.FlowStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2566. 

  2566.     <EquipmentConstant id="640227004" valueType="Ascii" logicalName="PMC.MFCVerification.GasFlowTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2567. 

  2567.     <EquipmentConstant id="640227005" valueType="Ascii" logicalName="PMC.MFCVerification.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2568. 

  2568.     <EquipmentConstant id="640227006" valueType="Ascii" logicalName="PMC.MFCVerification.MaxDeviation" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2569. 

  2569.     <EquipmentConstant id="640227007" valueType="Ascii" logicalName="PMC.MFCVerification.PressureStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2570. 

  2570.     <EquipmentConstant id="640227008" valueType="Ascii" logicalName="PMC.MFCVerification.TargetPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2571. 

  2571.     <EquipmentConstant id="1410101001" valueType="Ascii" logicalName="CarrierInfo.LLABankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2572. 

  2572.     <EquipmentConstant id="1410101002" valueType="Ascii" logicalName="CarrierInfo.LLABankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2573. 

  2573.     <EquipmentConstant id="1410101003" valueType="Ascii" logicalName="CarrierInfo.LLACassetteNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2574. 

  2574.     <EquipmentConstant id="1410101004" valueType="Ascii" logicalName="CarrierInfo.LLBBankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2575. 

  2575.     <EquipmentConstant id="1410101005" valueType="Ascii" logicalName="CarrierInfo.LLBBankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2576. 

  2576.     <EquipmentConstant id="1410101006" valueType="Ascii" logicalName="CarrierInfo.LLBCassetteNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2577. 

  2577.     <EquipmentConstant id="1410101007" valueType="Ascii" logicalName="CarrierInfo.LowerBankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2578. 

  2578.     <EquipmentConstant id="1410101008" valueType="Ascii" logicalName="CarrierInfo.LowerBankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2579. 

  2579.     <EquipmentConstant id="1410101009" valueType="Ascii" logicalName="CarrierInfo.UpperBankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2580. 

  2580.     <EquipmentConstant id="1410101010" valueType="Ascii" logicalName="CarrierInfo.UpperBankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2581. 

  2581.     <EquipmentConstant id="1410101011" valueType="Ascii" logicalName="CarrierInfo.LLAStation12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2582. 

  2582.     <EquipmentConstant id="1410101012" valueType="Ascii" logicalName="CarrierInfo.LLAStation8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2583. 

  2583.     <EquipmentConstant id="1410101013" valueType="Ascii" logicalName="CarrierInfo.LLBStation12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2584. 

  2584.     <EquipmentConstant id="1410101014" valueType="Ascii" logicalName="CarrierInfo.LLBStation8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2585. 

  2585.     <EquipmentConstant id="1410101015" valueType="Ascii" logicalName="CarrierInfo.PMA1Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2586. 

  2586.     <EquipmentConstant id="1410101016" valueType="Ascii" logicalName="CarrierInfo.PMA1Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2587. 

  2587.     <EquipmentConstant id="1410101017" valueType="Ascii" logicalName="CarrierInfo.PMA2Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2588. 

  2588.     <EquipmentConstant id="1410101018" valueType="Ascii" logicalName="CarrierInfo.PMA2Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2589. 

  2589.     <EquipmentConstant id="1410101019" valueType="Ascii" logicalName="CarrierInfo.PMB1Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2590. 

  2590.     <EquipmentConstant id="1410101020" valueType="Ascii" logicalName="CarrierInfo.PMB1Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2591. 

  2591.     <EquipmentConstant id="1410101021" valueType="Ascii" logicalName="CarrierInfo.PMB2Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2592. 

  2592.     <EquipmentConstant id="1410101022" valueType="Ascii" logicalName="CarrierInfo.PMB2Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2593. 

  2593.     <EquipmentConstant id="1410101023" valueType="Ascii" logicalName="CarrierInfo.PMC1Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2594. 

  2594.     <EquipmentConstant id="1410101024" valueType="Ascii" logicalName="CarrierInfo.PMC1Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2595. 

  2595.     <EquipmentConstant id="1410101025" valueType="Ascii" logicalName="CarrierInfo.PMC2Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2596. 

  2596.     <EquipmentConstant id="1410101026" valueType="Ascii" logicalName="CarrierInfo.PMC2Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2597. 

  2597.     <EquipmentConstant id="1420101001" valueType="Ascii" logicalName="FA.DefaultCommunicationState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2598. 

  2598.     <EquipmentConstant id="1420101002" valueType="Ascii" logicalName="FA.DefaultControlState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2599. 

  2599.     <EquipmentConstant id="1420101003" valueType="Ascii" logicalName="FA.DefaultControlSubState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2600. 

  2600.     <EquipmentConstant id="1420101004" valueType="Ascii" logicalName="FA.DeviCollectionEvent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2601. 

  2601.     <EquipmentConstant id="1420101005" valueType="Ascii" logicalName="FA.EnableSpooling" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2602. 

  2602.     <EquipmentConstant id="1420101006" valueType="Ascii" logicalName="FA.LinkTestInterval" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2603. 

  2603.     <EquipmentConstant id="1420101007" valueType="Ascii" logicalName="FA.LocalIpAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2604. 

  2604.     <EquipmentConstant id="1420101008" valueType="Ascii" logicalName="FA.LocalPortNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2605. 

  2605.     <EquipmentConstant id="1420101009" valueType="Ascii" logicalName="FA.RemoteIpAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2606. 

  2606.     <EquipmentConstant id="1420101010" valueType="Ascii" logicalName="FA.RemotePortNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2607. 

  2607.     <EquipmentConstant id="1420101011" valueType="Ascii" logicalName="FA.T3Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2608. 

  2608.     <EquipmentConstant id="1420101012" valueType="Ascii" logicalName="FA.T5Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2609. 

  2609.     <EquipmentConstant id="1420101013" valueType="Ascii" logicalName="FA.T6Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2610. 

  2610.     <EquipmentConstant id="1420101014" valueType="Ascii" logicalName="FA.T7Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2611. 

  2611.     <EquipmentConstant id="1420101015" valueType="Ascii" logicalName="FA.T8Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2612. 

  2612.     <EquipmentConstant id="1420101016" valueType="Ascii" logicalName="FA.ConnectionMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2613. 

  2613.     <EquipmentConstant id="1420101017" valueType="Ascii" logicalName="FA.LP1DefaultTransferState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2614. 

  2614.     <EquipmentConstant id="1420101018" valueType="Ascii" logicalName="FA.LP2DefaultTransferState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2615. 

  2615.     <EquipmentConstant id="1420101019" valueType="Ascii" logicalName="FA.LP3DefaultTransferState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    2616. 

  2616.   </EquipmentConstants>
    2617. 

  2617.   <DataVariables>
    2618. 

  2618.     <DataVariable id="3007" valueType="I4" logicalName="ECChangedID" eventTrigger="" />
    2619. 

  2619.     <DataVariable id="3102" valueType="Ascii" logicalName="LotID" eventTrigger="" />
    2620. 

  2620.     <DataVariable id="3103" valueType="Ascii" logicalName="RecipeID" eventTrigger="" />
    2621. 

  2621.     <DataVariable id="3104" valueType="Ascii" logicalName="JobID" eventTrigger="" />
    2622. 

  2622.     <DataVariable id="3105" valueType="Ascii" logicalName="CarrierID" eventTrigger="" />
    2623. 

  2623.     <DataVariable id="3106" valueType="Ascii" logicalName="SlotMap" eventTrigger="" />
    2624. 

  2624.     <DataVariable id="3107" valueType="Ascii" logicalName="SequenceID" eventTrigger="" />
    2625. 

  2625.     <DataVariable id="3108" valueType="Ascii" logicalName="StationName" eventTrigger="" />
    2626. 

  2626.     <DataVariable id="3109" valueType="Ascii" logicalName="RecipeStepNumber" eventTrigger="" />
    2627. 

  2627.     <DataVariable id="3110" valueType="Ascii" logicalName="SlotID" eventTrigger="" />
    2628. 

  2628.     <DataVariable id="3113" valueType="I4" logicalName="PortID" eventTrigger="" />
    2629. 

  2629.     <DataVariable id="3124" valueType="I4" logicalName="ProcessedWaferCount" eventTrigger="" />
    2630. 

  2630.     <DataVariable id="3125" valueType="I4" logicalName="WaferProcessResult" eventTrigger="" />
    2631. 

  2631.     <DataVariable id="3404" valueType="Ascii" logicalName="SubstID" eventTrigger="" />
    2632. 

  2632.     <DataVariable id="3405" valueType="Ascii" logicalName="SubstLocID" eventTrigger="" />
    2633. 

  2633.     <DataVariable id="3406" valueType="I4" logicalName="SubstLocState" eventTrigger="" />
    2634. 

  2634.     <DataVariable id="3503" valueType="Ascii" logicalName="SmartTag" eventTrigger="" />
    2635. 

  2635.     <DataVariable id="10000" valueType="Ascii" logicalName="ControlJobID" eventTrigger="" />
    2636. 

  2636.     <DataVariable id="10001" valueType="I4" logicalName="ControlJobState" eventTrigger="" />
    2637. 

  2637.     <DataVariable id="10002" valueType="I4" logicalName="PortTransferState" eventTrigger="" />
    2638. 

  2638.   </DataVariables>
    2639. 

  2639.   <AlarmVariables>
    2640. 

  2640.     <AlarmVariable id="10101001" logicalName="System.EFEM.AirErrorForRobot" description="EFEM Robot Air Error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2641. 

  2641.     <AlarmVariable id="10101002" logicalName="System.EFEM.DoorOpen" description="EFEM door open" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2642. 

  2642.     <AlarmVariable id="10101003" logicalName="System.EFEM.EmoAlarm" description="EFEM EMO error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2643. 

  2643.     <AlarmVariable id="10101004" logicalName="System.EFEM.FFUAlarm" description="EFEM FFU Error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2644. 

  2644.     <AlarmVariable id="10101005" logicalName="System.EFEM.IonizerAlarm" description="EFEM Ionizer Error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2645. 

  2645.     <AlarmVariable id="10101006" logicalName="System.EFEM.IsMaintain" description="EFEM in Maintenance Mode, switch to online and turn key to auto" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2646. 

  2646.     <AlarmVariable id="10101007" logicalName="System.EFEM.CompressedAirPressureAlarm" description="EFEM Compressed Air Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2647. 

  2647.     <AlarmVariable id="10101008" logicalName="System.EFEM.DifferentialPressureSensorSetting1Alarm" description="EFEM Differential Pressure Sensor Setting1 Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2648. 

  2648.     <AlarmVariable id="10101009" logicalName="System.EFEM.DifferentialPressureSensorSetting2Alarm" description="EFEM Differential Pressure Sensor Setting2 Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2649. 

  2649.     <AlarmVariable id="10101010" logicalName="System.EFEM.DrivePowerAlarm" description="EFEM Drive Power Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2650. 

  2650.     <AlarmVariable id="10101011" logicalName="System.EFEM.FlowGaugeWarning" description="EFEM Flow Gauge Warning" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2651. 

  2651.     <AlarmVariable id="10101012" logicalName="System.EFEM.VacuumSourcePressureAlarm" description="EFEM Vacuum Source Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2652. 

  2652.     <AlarmVariable id="10101013" logicalName="System.EFEM.WaterLeakWarning" description="EFEM Water Leak Warning" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2653. 

  2653.     <AlarmVariable id="10202001" logicalName="System.io.CommunicationError" description="Can not Communication " alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2654. 

  2654.     <AlarmVariable id="10202002" logicalName="System.io.ConnectionError" description="Can not connect with " alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
    2655. 

  2655.     <AlarmVariable id="620101001" logicalName="PMA.io.CommunicationError" description="Can not Communication PMA" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006201" eventClear="2006201" />
    2656. 

  2656.     <AlarmVariable id="620101002" logicalName="PMA.io.ConnectionError" description="Can not connect with PMA" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006201" eventClear="2006201" />
    2657. 

  2657.     <AlarmVariable id="630101001" logicalName="PMB.io.CommunicationError" description="Can not Communication PMB" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006301" eventClear="2006301" />
    2658. 

  2658.     <AlarmVariable id="630101002" logicalName="PMB.io.ConnectionError" description="Can not connect with PMB" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006301" eventClear="2006301" />
    2659. 

  2659. 	<AlarmVariable id="630101003" logicalName="LP1MappingError" description="Load Port 1 Mapping Error" alarmLevel="EquipmentStatusWarning" enabled="true"/>
    2660. 

  2660.     <AlarmVariable id="630101004" logicalName="LP2MappingError" description="Load Port 2 Mapping Error" alarmLevel="EquipmentStatusWarning" enabled="true"/>
    2661. 

  2661.   </AlarmVariables>
    2662. 

  2662.   <Reports>
    2663. 

  2663.     <Report id="1" logicalName="HostDefinedReport_1">
    2664. 

  2664.       <Variables>
    2665. 

  2665.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2666. 

  2666.         <ReportVariable id="4" variableType="StatusVariable" logicalName="ControlState" />
    2667. 

  2667.       </Variables>
    2668. 

  2668.     </Report>
    2669. 

  2669.     <Report id="10" logicalName="HostDefinedReport_10">
    2670. 

  2670.       <Variables>
    2671. 

  2671.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2672. 

  2672.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2673. 

  2673.       </Variables>
    2674. 

  2674.     </Report>
    2675. 

  2675.     <Report id="11" logicalName="HostDefinedReport_11">
    2676. 

  2676.       <Variables>
    2677. 

  2677.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2678. 

  2678.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2679. 

  2679.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2680. 

  2680.       </Variables>
    2681. 

  2681.     </Report>
    2682. 

  2682.     <Report id="12" logicalName="HostDefinedReport_12">
    2683. 

  2683.       <Variables>
    2684. 

  2684.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2685. 

  2685.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2686. 

  2686.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2687. 

  2687.       </Variables>
    2688. 

  2688.     </Report>
    2689. 

  2689.     <Report id="13" logicalName="HostDefinedReport_13">
    2690. 

  2690.       <Variables>
    2691. 

  2691.         <ReportVariable id="3106" variableType="DataVariable" logicalName="SlotMap" />
    2692. 

  2692.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2693. 

  2693.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2694. 

  2694.       </Variables>
    2695. 

  2695.     </Report>
    2696. 

  2696.     <Report id="14" logicalName="HostDefinedReport_14">
    2697. 

  2697.       <Variables>
    2698. 

  2698.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2699. 

  2699.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2700. 

  2700.       </Variables>
    2701. 

  2701.     </Report>
    2702. 

  2702.     <Report id="15" logicalName="HostDefinedReport_15">
    2703. 

  2703.       <Variables>
    2704. 

  2704.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2705. 

  2705.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2706. 

  2706.       </Variables>
    2707. 

  2707.     </Report>
    2708. 

  2708.     <Report id="16" logicalName="HostDefinedReport_16">
    2709. 

  2709.       <Variables>
    2710. 

  2710.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2711. 

  2711.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2712. 

  2712.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2713. 

  2713.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2714. 

  2714.       </Variables>
    2715. 

  2715.     </Report>
    2716. 

  2716.     <Report id="17" logicalName="HostDefinedReport_17">
    2717. 

  2717.       <Variables>
    2718. 

  2718.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2719. 

  2719.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2720. 

  2720.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2721. 

  2721.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2722. 

  2722.       </Variables>
    2723. 

  2723.     </Report>
    2724. 

  2724.     <Report id="18" logicalName="HostDefinedReport_18">
    2725. 

  2725.       <Variables>
    2726. 

  2726.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2727. 

  2727.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2728. 

  2728.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2729. 

  2729.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2730. 

  2730.       </Variables>
    2731. 

  2731.     </Report>
    2732. 

  2732.     <Report id="19" logicalName="HostDefinedReport_19">
    2733. 

  2733.       <Variables>
    2734. 

  2734.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2735. 

  2735.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2736. 

  2736.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2737. 

  2737.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2738. 

  2738.       </Variables>
    2739. 

  2739.     </Report>
    2740. 

  2740.     <Report id="2" logicalName="HostDefinedReport_2">
    2741. 

  2741.       <Variables>
    2742. 

  2742.         <ReportVariable id="3007" variableType="DataVariable" logicalName="ECChangedID" />
    2743. 

  2743.       </Variables>
    2744. 

  2744.     </Report>
    2745. 

  2745.     <Report id="20" logicalName="HostDefinedReport_20">
    2746. 

  2746.       <Variables>
    2747. 

  2747.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2748. 

  2748.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2749. 

  2749.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2750. 

  2750.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2751. 

  2751.       </Variables>
    2752. 

  2752.     </Report>
    2753. 

  2753.     <Report id="21" logicalName="HostDefinedReport_21">
    2754. 

  2754.       <Variables>
    2755. 

  2755.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2756. 

  2756.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2757. 

  2757.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2758. 

  2758.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2759. 

  2759.         <ReportVariable id="3124" variableType="DataVariable" logicalName="ProcessedWaferCount" />
    2760. 

  2760.       </Variables>
    2761. 

  2761.     </Report>
    2762. 

  2762.     <Report id="22" logicalName="HostDefinedReport_22">
    2763. 

  2763.       <Variables>
    2764. 

  2764.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2765. 

  2765.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2766. 

  2766.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2767. 

  2767.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2768. 

  2768.       </Variables>
    2769. 

  2769.     </Report>
    2770. 

  2770.     <Report id="23" logicalName="HostDefinedReport_23">
    2771. 

  2771.       <Variables>
    2772. 

  2772.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2773. 

  2773.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2774. 

  2774.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2775. 

  2775.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2776. 

  2776.       </Variables>
    2777. 

  2777.     </Report>
    2778. 

  2778.     <Report id="24" logicalName="HostDefinedReport_24">
    2779. 

  2779.       <Variables>
    2780. 

  2780.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2781. 

  2781.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2782. 

  2782.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2783. 

  2783.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2784. 

  2784.       </Variables>
    2785. 

  2785.     </Report>
    2786. 

  2786.     <Report id="25" logicalName="HostDefinedReport_25">
    2787. 

  2787.       <Variables>
    2788. 

  2788.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2789. 

  2789.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2790. 

  2790.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2791. 

  2791.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2792. 

  2792.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2793. 

  2793.       </Variables>
    2794. 

  2794.     </Report>
    2795. 

  2795.     <Report id="26" logicalName="HostDefinedReport_26">
    2796. 

  2796.       <Variables>
    2797. 

  2797.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2798. 

  2798.         <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
    2799. 

  2799.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2800. 

  2800.         <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
    2801. 

  2801.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2802. 

  2802.         <ReportVariable id="3125" variableType="DataVariable" logicalName="WaferProcessResult" />
    2803. 

  2803.       </Variables>
    2804. 

  2804.     </Report>
    2805. 

  2805.     <Report id="29" logicalName="HostDefinedReport_29">
    2806. 

  2806.       <Variables>
    2807. 

  2807.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2808. 

  2808.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2809. 

  2809.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2810. 

  2810.         <ReportVariable id="3109" variableType="DataVariable" logicalName="RecipeStepNumber" />
    2811. 

  2811.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2812. 

  2812.       </Variables>
    2813. 

  2813.     </Report>
    2814. 

  2814.     <Report id="3" logicalName="HostDefinedReport_3">
    2815. 

  2815.       <Variables>
    2816. 

  2816.         <ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
    2817. 

  2817.         <ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
    2818. 

  2818.         <ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
    2819. 

  2819.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2820. 

  2820.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2821. 

  2821.       </Variables>
    2822. 

  2822.     </Report>
    2823. 

  2823.     <Report id="30" logicalName="HostDefinedReport_30">
    2824. 

  2824.       <Variables>
    2825. 

  2825.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2826. 

  2826.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2827. 

  2827.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2828. 

  2828.         <ReportVariable id="3109" variableType="DataVariable" logicalName="RecipeStepNumber" />
    2829. 

  2829.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2830. 

  2830.       </Variables>
    2831. 

  2831.     </Report>
    2832. 

  2832.     <Report id="31" logicalName="HostDefinedReport_31">
    2833. 

  2833.       <Variables>
    2834. 

  2834.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2835. 

  2835.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    2836. 

  2836.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2837. 

  2837.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2838. 

  2838.       </Variables>
    2839. 

  2839.     </Report>
    2840. 

  2840.     <Report id="32" logicalName="HostDefinedReport_32">
    2841. 

  2841.       <Variables>
    2842. 

  2842.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2843. 

  2843.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2844. 

  2844.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2845. 

  2845.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2846. 

  2846.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2847. 

  2847.       </Variables>
    2848. 

  2848.     </Report>
    2849. 

  2849.     <Report id="33" logicalName="HostDefinedReport_33">
    2850. 

  2850.       <Variables>
    2851. 

  2851.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2852. 

  2852.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2853. 

  2853.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2854. 

  2854.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2855. 

  2855.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2856. 

  2856.       </Variables>
    2857. 

  2857.     </Report>
    2858. 

  2858.     <Report id="34" logicalName="HostDefinedReport_34">
    2859. 

  2859.       <Variables>
    2860. 

  2860.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2861. 

  2861.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2862. 

  2862.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2863. 

  2863.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2864. 

  2864.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2865. 

  2865.       </Variables>
    2866. 

  2866.     </Report>
    2867. 

  2867.     <Report id="35" logicalName="HostDefinedReport_35">
    2868. 

  2868.       <Variables>
    2869. 

  2869.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2870. 

  2870.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2871. 

  2871.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2872. 

  2872.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2873. 

  2873.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2874. 

  2874.       </Variables>
    2875. 

  2875.     </Report>
    2876. 

  2876.     <Report id="36" logicalName="HostDefinedReport_36">
    2877. 

  2877.       <Variables>
    2878. 

  2878.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2879. 

  2879.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2880. 

  2880.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2881. 

  2881.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2882. 

  2882.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2883. 

  2883.       </Variables>
    2884. 

  2884.     </Report>
    2885. 

  2885.     <Report id="37" logicalName="HostDefinedReport_37">
    2886. 

  2886.       <Variables>
    2887. 

  2887.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2888. 

  2888.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2889. 

  2889.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2890. 

  2890.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2891. 

  2891.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2892. 

  2892.       </Variables>
    2893. 

  2893.     </Report>
    2894. 

  2894.     <Report id="38" logicalName="HostDefinedReport_38">
    2895. 

  2895.       <Variables>
    2896. 

  2896.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2897. 

  2897.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2898. 

  2898.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2899. 

  2899.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2900. 

  2900.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2901. 

  2901.       </Variables>
    2902. 

  2902.     </Report>
    2903. 

  2903.     <Report id="39" logicalName="HostDefinedReport_39">
    2904. 

  2904.       <Variables>
    2905. 

  2905.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2906. 

  2906.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2907. 

  2907.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2908. 

  2908.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2909. 

  2909.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2910. 

  2910.       </Variables>
    2911. 

  2911.     </Report>
    2912. 

  2912.     <Report id="4" logicalName="HostDefinedReport_4">
    2913. 

  2913.       <Variables>
    2914. 

  2914.         <ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
    2915. 

  2915.         <ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
    2916. 

  2916.         <ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
    2917. 

  2917.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2918. 

  2918.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    2919. 

  2919.       </Variables>
    2920. 

  2920.     </Report>
    2921. 

  2921.     <Report id="40" logicalName="HostDefinedReport_40">
    2922. 

  2922.       <Variables>
    2923. 

  2923.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2924. 

  2924.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2925. 

  2925.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2926. 

  2926.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2927. 

  2927.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2928. 

  2928.       </Variables>
    2929. 

  2929.     </Report>
    2930. 

  2930.     <Report id="41" logicalName="HostDefinedReport_41">
    2931. 

  2931.       <Variables>
    2932. 

  2932.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2933. 

  2933.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2934. 

  2934.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2935. 

  2935.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2936. 

  2936.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2937. 

  2937.       </Variables>
    2938. 

  2938.     </Report>
    2939. 

  2939.     <Report id="42" logicalName="HostDefinedReport_42">
    2940. 

  2940.       <Variables>
    2941. 

  2941.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2942. 

  2942.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2943. 

  2943.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2944. 

  2944.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2945. 

  2945.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2946. 

  2946.       </Variables>
    2947. 

  2947.     </Report>
    2948. 

  2948.     <Report id="43" logicalName="HostDefinedReport_43">
    2949. 

  2949.       <Variables>
    2950. 

  2950.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2951. 

  2951.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2952. 

  2952.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2953. 

  2953.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2954. 

  2954.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2955. 

  2955.       </Variables>
    2956. 

  2956.     </Report>
    2957. 

  2957.     <Report id="44" logicalName="HostDefinedReport_44">
    2958. 

  2958.       <Variables>
    2959. 

  2959.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2960. 

  2960.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2961. 

  2961.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2962. 

  2962.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2963. 

  2963.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2964. 

  2964.       </Variables>
    2965. 

  2965.     </Report>
    2966. 

  2966.     <Report id="45" logicalName="HostDefinedReport_45">
    2967. 

  2967.       <Variables>
    2968. 

  2968.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2969. 

  2969.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2970. 

  2970.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2971. 

  2971.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2972. 

  2972.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2973. 

  2973.       </Variables>
    2974. 

  2974.     </Report>
    2975. 

  2975.     <Report id="46" logicalName="HostDefinedReport_46">
    2976. 

  2976.       <Variables>
    2977. 

  2977.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2978. 

  2978.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2979. 

  2979.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2980. 

  2980.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2981. 

  2981.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2982. 

  2982.       </Variables>
    2983. 

  2983.     </Report>
    2984. 

  2984.     <Report id="47" logicalName="HostDefinedReport_47">
    2985. 

  2985.       <Variables>
    2986. 

  2986.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2987. 

  2987.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2988. 

  2988.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2989. 

  2989.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2990. 

  2990.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    2991. 

  2991.       </Variables>
    2992. 

  2992.     </Report>
    2993. 

  2993.     <Report id="48" logicalName="HostDefinedReport_48">
    2994. 

  2994.       <Variables>
    2995. 

  2995.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    2996. 

  2996.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    2997. 

  2997.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    2998. 

  2998.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    2999. 

  2999.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    3000. 

  3000.       </Variables>
    3001. 

  3001.     </Report>
    3002. 

  3002.     <Report id="49" logicalName="HostDefinedReport_49">
    3003. 

  3003.       <Variables>
    3004. 

  3004.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    3005. 

  3005.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    3006. 

  3006.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    3007. 

  3007.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    3008. 

  3008.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    3009. 

  3009.       </Variables>
    3010. 

  3010.     </Report>
    3011. 

  3011.     <Report id="5" logicalName="HostDefinedReport_5">
    3012. 

  3012.       <Variables>
    3013. 

  3013.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    3014. 

  3014.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    3015. 

  3015.       </Variables>
    3016. 

  3016.     </Report>
    3017. 

  3017.     <Report id="50" logicalName="HostDefinedReport_50">
    3018. 

  3018.       <Variables>
    3019. 

  3019.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    3020. 

  3020.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    3021. 

  3021.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    3022. 

  3022.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    3023. 

  3023.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    3024. 

  3024.       </Variables>
    3025. 

  3025.     </Report>
    3026. 

  3026.     <Report id="51" logicalName="HostDefinedReport_51">
    3027. 

  3027.       <Variables>
    3028. 

  3028.         <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
    3029. 

  3029.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    3030. 

  3030.         <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
    3031. 

  3031.         <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
    3032. 

  3032.         <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
    3033. 

  3033.       </Variables>
    3034. 

  3034.     </Report>
    3035. 

  3035.     <Report id="6" logicalName="HostDefinedReport_6">
    3036. 

  3036.       <Variables>
    3037. 

  3037.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    3038. 

  3038.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    3039. 

  3039.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    3040. 

  3040.       </Variables>
    3041. 

  3041.     </Report>
    3042. 

  3042.     <Report id="7" logicalName="HostDefinedReport_7">
    3043. 

  3043.       <Variables>
    3044. 

  3044.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    3045. 

  3045.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    3046. 

  3046.         <ReportVariable id="3503" variableType="DataVariable" logicalName="SmartTag" />
    3047. 

  3047.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    3048. 

  3048.       </Variables>
    3049. 

  3049.     </Report>
    3050. 

  3050.     <Report id="8" logicalName="HostDefinedReport_8">
    3051. 

  3051.       <Variables>
    3052. 

  3052.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    3053. 

  3053.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    3054. 

  3054.       </Variables>
    3055. 

  3055.     </Report>
    3056. 

  3056.     <Report id="9" logicalName="HostDefinedReport_9">
    3057. 

  3057.       <Variables>
    3058. 

  3058.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    3059. 

  3059.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    3060. 

  3060.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    3061. 

  3061.       </Variables>
    3062. 

  3062.     </Report>
    3063. 

  3063.     <Report id="10000" logicalName="Define_10000">
    3064. 

  3064.       <Variables>
    3065. 

  3065.         <ReportVariable id="10000" variableType="DataVariable" logicalName="ControlJobID" />
    3066. 

  3066.         <ReportVariable id="10001" variableType="DataVariable" logicalName="ControlJobState" />
    3067. 

  3067.       </Variables>
    3068. 

  3068.     </Report>
    3069. 

  3069.     <Report id="10001" logicalName="Define_10001">
    3070. 

  3070.       <Variables>
    3071. 

  3071.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    3072. 

  3072.         <ReportVariable id="10002" variableType="DataVariable" logicalName="PortTransferState" />
    3073. 

  3073.       </Variables>
    3074. 

  3074.     </Report>
    3075. 

  3075.     <Report id="10002" logicalName="Define_10002">
    3076. 

  3076.       <Variables>
    3077. 

  3077.         <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
    3078. 

  3078.         <ReportVariable id="10002" variableType="DataVariable" logicalName="PortTransferState" />
    3079. 

  3079.         <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
    3080. 

  3080.       </Variables>
    3081. 

  3081.     </Report>
    3082. 

  3082.   </Reports>
    3083. 

  3083.   <CollectionEvents>
    3084. 

  3084.     <CollectionEvent id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
    3085. 

  3085.       <Reports>
    3086. 

  3086.         <int>1</int>
    3087. 

  3087.       </Reports>
    3088. 

  3088.     </CollectionEvent>
    3089. 

  3089.     <CollectionEvent id="2" logicalName="ControlStateLOCAL" description="" enabled="true">
    3090. 

  3090.       <Reports>
    3091. 

  3091.         <int>1</int>
    3092. 

  3092.       </Reports>
    3093. 

  3093.     </CollectionEvent>
    3094. 

  3094.     <CollectionEvent id="3" logicalName="ControlStateREMOTE" description="" enabled="true">
    3095. 

  3095.       <Reports>
    3096. 

  3096.         <int>1</int>
    3097. 

  3097.       </Reports>
    3098. 

  3098.     </CollectionEvent>
    3099. 

  3099.     <CollectionEvent id="8" logicalName="EquipmentConstantChanged" description="" enabled="true">
    3100. 

  3100.       <Reports>
    3101. 

  3101.         <int>2</int>
    3102. 

  3102.       </Reports>
    3103. 

  3103.     </CollectionEvent>
    3104. 

  3104.     <CollectionEvent id="160" logicalName="SpoolingActivated" description="" enabled="true">
    3105. 

  3105.       <Reports />
    3106. 

  3106.     </CollectionEvent>
    3107. 

  3107.     <CollectionEvent id="161" logicalName="SpoolingDeactivated" description="" enabled="true">
    3108. 

  3108.       <Reports />
    3109. 

  3109.     </CollectionEvent>
    3110. 

  3110.     <CollectionEvent id="162" logicalName="SpoolingFailed" description="" enabled="true">
    3111. 

  3111.       <Reports />
    3112. 

  3112.     </CollectionEvent>
    3113. 

  3113.     <CollectionEvent id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="true">
    3114. 

  3114.       <Reports>
    3115. 

  3115.         <int>3</int>
    3116. 

  3116.       </Reports>
    3117. 

  3117.     </CollectionEvent>
    3118. 

  3118.     <CollectionEvent id="504" logicalName="WAFER_ARRIVE_POSITION" description="" enabled="true">
    3119. 

  3119.       <Reports>
    3120. 

  3120.         <int>4</int>
    3121. 

  3121.       </Reports>
    3122. 

  3122.     </CollectionEvent>
    3123. 

  3123.     <CollectionEvent id="1000" logicalName="CARRIER_ARRIVED" description="" enabled="true">
    3124. 

  3124.       <Reports>
    3125. 

  3125.         <int>5</int>
    3126. 

  3126.       </Reports>
    3127. 

  3127.     </CollectionEvent>
    3128. 

  3128.     <CollectionEvent id="1001" logicalName="CARRIER_REMOVED" description="" enabled="true">
    3129. 

  3129.       <Reports>
    3130. 

  3130.         <int>6</int>
    3131. 

  3131.       </Reports>
    3132. 

  3132.     </CollectionEvent>
    3133. 

  3133.     <CollectionEvent id="1002" logicalName="CARRIER_ID_READ" description="" enabled="true">
    3134. 

  3134.       <Reports>
    3135. 

  3135.         <int>7</int>
    3136. 

  3136.       </Reports>
    3137. 

  3137.     </CollectionEvent>
    3138. 

  3138.     <CollectionEvent id="1003" logicalName="CARRIER_ID_READ_FAILED" description="" enabled="true">
    3139. 

  3139.       <Reports>
    3140. 

  3140.         <int>8</int>
    3141. 

  3141.       </Reports>
    3142. 

  3142.     </CollectionEvent>
    3143. 

  3143.     <CollectionEvent id="1004" logicalName="CARRIER_ID_WRITE" description="" enabled="true">
    3144. 

  3144.       <Reports>
    3145. 

  3145.         <int>9</int>
    3146. 

  3146.       </Reports>
    3147. 

  3147.     </CollectionEvent>
    3148. 

  3148.     <CollectionEvent id="1005" logicalName="CARRIER_ID_WRITE_FAILED" description="" enabled="true">
    3149. 

  3149.       <Reports>
    3150. 

  3150.         <int>10</int>
    3151. 

  3151.       </Reports>
    3152. 

  3152.     </CollectionEvent>
    3153. 

  3153.     <CollectionEvent id="1006" logicalName="CARRIER_LOADED" description="" enabled="true">
    3154. 

  3154.       <Reports>
    3155. 

  3155.         <int>11</int>
    3156. 

  3156.       </Reports>
    3157. 

  3157.     </CollectionEvent>
    3158. 

  3158.     <CollectionEvent id="1007" logicalName="CARRIER_UNLOADED" description="" enabled="true">
    3159. 

  3159.       <Reports>
    3160. 

  3160.         <int>12</int>
    3161. 

  3161.       </Reports>
    3162. 

  3162.     </CollectionEvent>
    3163. 

  3163.     <CollectionEvent id="1008" logicalName="SLOT_MAP_AVAILABLE" description="" enabled="true">
    3164. 

  3164.       <Reports>
    3165. 

  3165.         <int>13</int>
    3166. 

  3166.       </Reports>
    3167. 

  3167.     </CollectionEvent>
    3168. 

  3168.     <CollectionEvent id="1012" logicalName="PortClamped" description="" enabled="true">
    3169. 

  3169.       <Reports>
    3170. 

  3170.         <int>14</int>
    3171. 

  3171.       </Reports>
    3172. 

  3172.     </CollectionEvent>
    3173. 

  3173.     <CollectionEvent id="1013" logicalName="PortUnClamped" description="" enabled="true">
    3174. 

  3174.       <Reports>
    3175. 

  3175.         <int>15</int>
    3176. 

  3176.       </Reports>
    3177. 

  3177.     </CollectionEvent>
    3178. 

  3178.     <CollectionEvent id="1022" logicalName="PortJobStarted" description="" enabled="true">
    3179. 

  3179.       <Reports>
    3180. 

  3180.         <int>16</int>
    3181. 

  3181.       </Reports>
    3182. 

  3182.     </CollectionEvent>
    3183. 

  3183.     <CollectionEvent id="1023" logicalName="PortJobStopped" description="" enabled="true">
    3184. 

  3184.       <Reports>
    3185. 

  3185.         <int>17</int>
    3186. 

  3186.       </Reports>
    3187. 

  3187.     </CollectionEvent>
    3188. 

  3188.     <CollectionEvent id="1024" logicalName="PortJobPaused" description="" enabled="true">
    3189. 

  3189.       <Reports>
    3190. 

  3190.         <int>18</int>
    3191. 

  3191.       </Reports>
    3192. 

  3192.     </CollectionEvent>
    3193. 

  3193.     <CollectionEvent id="1025" logicalName="PortJobResumed" description="" enabled="true">
    3194. 

  3194.       <Reports>
    3195. 

  3195.         <int>19</int>
    3196. 

  3196.       </Reports>
    3197. 

  3197.     </CollectionEvent>
    3198. 

  3198.     <CollectionEvent id="1026" logicalName="PortJobAborted" description="" enabled="true">
    3199. 

  3199.       <Reports>
    3200. 

  3200.         <int>20</int>
    3201. 

  3201.       </Reports>
    3202. 

  3202.     </CollectionEvent>
    3203. 

  3203.     <CollectionEvent id="1027" logicalName="PortJobFinished" description="" enabled="true">
    3204. 

  3204.       <Reports>
    3205. 

  3205.         <int>21</int>
    3206. 

  3206.       </Reports>
    3207. 

  3207.     </CollectionEvent>
    3208. 

  3208.     <CollectionEvent id="1028" logicalName="PortJobFailed" description="" enabled="true">
    3209. 

  3209.       <Reports>
    3210. 

  3210.         <int>22</int>
    3211. 

  3211.       </Reports>
    3212. 

  3212.     </CollectionEvent>
    3213. 

  3213.     <CollectionEvent id="1030" logicalName="PortPPSelected" description="" enabled="true">
    3214. 

  3214.       <Reports>
    3215. 

  3215.         <int>23</int>
    3216. 

  3216.       </Reports>
    3217. 

  3217.     </CollectionEvent>
    3218. 

  3218.     <CollectionEvent id="1031" logicalName="PortPPSelectFailed" description="" enabled="true">
    3219. 

  3219.       <Reports>
    3220. 

  3220.         <int>24</int>
    3221. 

  3221.       </Reports>
    3222. 

  3222.     </CollectionEvent>
    3223. 

  3223.     <CollectionEvent id="1032" logicalName="PortJobWaferStart" description="" enabled="true">
    3224. 

  3224.       <Reports>
    3225. 

  3225.         <int>25</int>
    3226. 

  3226.       </Reports>
    3227. 

  3227.     </CollectionEvent>
    3228. 

  3228.     <CollectionEvent id="1033" logicalName="PortJobWaferEnd" description="" enabled="true">
    3229. 

  3229.       <Reports>
    3230. 

  3230.         <int>26</int>
    3231. 

  3231.       </Reports>
    3232. 

  3232.     </CollectionEvent>
    3233. 

  3233.     <CollectionEvent id="3001" logicalName="PMARecipeStart" description="" enabled="true">
    3234. 

  3234.       <Reports>
    3235. 

  3235.         <int>33</int>
    3236. 

  3236.       </Reports>
    3237. 

  3237.     </CollectionEvent>
    3238. 

  3238.     <CollectionEvent id="3002" logicalName="PMARecipeComplete" description="" enabled="true">
    3239. 

  3239.       <Reports>
    3240. 

  3240.         <int>34</int>
    3241. 

  3241.       </Reports>
    3242. 

  3242.     </CollectionEvent>
    3243. 

  3243.     <CollectionEvent id="3003" logicalName="PMARecipeStepStart" description="" enabled="true">
    3244. 

  3244.       <Reports>
    3245. 

  3245.         <int>35</int>
    3246. 

  3246.       </Reports>
    3247. 

  3247.     </CollectionEvent>
    3248. 

  3248.     <CollectionEvent id="3004" logicalName="PMARecipeStepEnd" description="" enabled="true">
    3249. 

  3249.       <Reports>
    3250. 

  3250.         <int>36</int>
    3251. 

  3251.       </Reports>
    3252. 

  3252.     </CollectionEvent>
    3253. 

  3253.     <CollectionEvent id="3005" logicalName="PMARecipeFailed" description="" enabled="true">
    3254. 

  3254.       <Reports>
    3255. 

  3255.         <int>37</int>
    3256. 

  3256.       </Reports>
    3257. 

  3257.     </CollectionEvent>
    3258. 

  3258.     <CollectionEvent id="3011" logicalName="PMBRecipeStart" description="" enabled="true">
    3259. 

  3259.       <Reports>
    3260. 

  3260.         <int>38</int>
    3261. 

  3261.       </Reports>
    3262. 

  3262.     </CollectionEvent>
    3263. 

  3263.     <CollectionEvent id="3012" logicalName="PMBRecipeComplete" description="" enabled="true">
    3264. 

  3264.       <Reports>
    3265. 

  3265.         <int>39</int>
    3266. 

  3266.       </Reports>
    3267. 

  3267.     </CollectionEvent>
    3268. 

  3268.     <CollectionEvent id="3013" logicalName="PMBRecipeStepStart" description="" enabled="true">
    3269. 

  3269.       <Reports>
    3270. 

  3270.         <int>40</int>
    3271. 

  3271.       </Reports>
    3272. 

  3272.     </CollectionEvent>
    3273. 

  3273.     <CollectionEvent id="3014" logicalName="PMBRecipeStepEnd" description="" enabled="true">
    3274. 

  3274.       <Reports>
    3275. 

  3275.         <int>41</int>
    3276. 

  3276.       </Reports>
    3277. 

  3277.     </CollectionEvent>
    3278. 

  3278.     <CollectionEvent id="3015" logicalName="PMBRecipeFailed" description="" enabled="true">
    3279. 

  3279.       <Reports>
    3280. 

  3280.         <int>42</int>
    3281. 

  3281.       </Reports>
    3282. 

  3282.     </CollectionEvent>
    3283. 

  3283.     <CollectionEvent id="3021" logicalName="PMCRecipeStart" description="" enabled="true">
    3284. 

  3284.       <Reports>
    3285. 

  3285.         <int>43</int>
    3286. 

  3286.       </Reports>
    3287. 

  3287.     </CollectionEvent>
    3288. 

  3288.     <CollectionEvent id="3022" logicalName="PMCRecipeComplete" description="" enabled="true">
    3289. 

  3289.       <Reports>
    3290. 

  3290.         <int>44</int>
    3291. 

  3291.       </Reports>
    3292. 

  3292.     </CollectionEvent>
    3293. 

  3293.     <CollectionEvent id="3023" logicalName="PMCRecipeStepStart" description="" enabled="true">
    3294. 

  3294.       <Reports>
    3295. 

  3295.         <int>45</int>
    3296. 

  3296.       </Reports>
    3297. 

  3297.     </CollectionEvent>
    3298. 

  3298.     <CollectionEvent id="3024" logicalName="PMCRecipeStepEnd" description="" enabled="true">
    3299. 

  3299.       <Reports>
    3300. 

  3300.         <int>46</int>
    3301. 

  3301.       </Reports>
    3302. 

  3302.     </CollectionEvent>
    3303. 

  3303.     <CollectionEvent id="3025" logicalName="PMCRecipeFailed" description="" enabled="true">
    3304. 

  3304.       <Reports>
    3305. 

  3305.         <int>47</int>
    3306. 

  3306.       </Reports>
    3307. 

  3307.     </CollectionEvent>
    3308. 

  3308.     <CollectionEvent id="3031" logicalName="PMDRecipeStart" description="" enabled="true">
    3309. 

  3309.       <Reports>
    3310. 

  3310.         <int>48</int>
    3311. 

  3311.       </Reports>
    3312. 

  3312.     </CollectionEvent>
    3313. 

  3313.     <CollectionEvent id="3032" logicalName="PMDRecipeComplete" description="" enabled="true">
    3314. 

  3314.       <Reports>
    3315. 

  3315.         <int>49</int>
    3316. 

  3316.       </Reports>
    3317. 

  3317.     </CollectionEvent>
    3318. 

  3318.     <CollectionEvent id="3033" logicalName="PMDRecipeStepStart" description="" enabled="true">
    3319. 

  3319.       <Reports>
    3320. 

  3320.         <int>50</int>
    3321. 

  3321.       </Reports>
    3322. 

  3322.     </CollectionEvent>
    3323. 

  3323.     <CollectionEvent id="3034" logicalName="PMDRecipeStepEnd" description="" enabled="true">
    3324. 

  3324.       <Reports>
    3325. 

  3325.         <int>51</int>
    3326. 

  3326.       </Reports>
    3327. 

  3327.     </CollectionEvent>
    3328. 

  3328.     <CollectionEvent id="3035" logicalName="PMDRecipeFailed" description="" enabled="true">
    3329. 

  3329.       <Reports>
    3330. 

  3330.         <int>32</int>
    3331. 

  3331.       </Reports>
    3332. 

  3332.     </CollectionEvent>
    3333. 

  3333.     <CollectionEvent id="1000101" logicalName="__SYSTEM__1000101__ALARMSET" description="Alarm Set : System Error" enabled="true">
    3334. 

  3334.       <Reports />
    3335. 

  3335.     </CollectionEvent>
    3336. 

  3336.     <CollectionEvent id="2000101" logicalName="__SYSTEM__2000101__ALARMCLEAR" description="Alarm Clear : System Error" enabled="true">
    3337. 

  3337.       <Reports />
    3338. 

  3338.     </CollectionEvent>
    3339. 

  3339.     <CollectionEvent id="1006201" logicalName="__SYSTEM__1006201__ALARMSET" description="Alarm Set : PMA Error" enabled="true">
    3340. 

  3340.       <Reports />
    3341. 

  3341.     </CollectionEvent>
    3342. 

  3342.     <CollectionEvent id="2006201" logicalName="__SYSTEM__2006201__ALARMCLEAR" description="Alarm Clear : PMA Error" enabled="true">
    3343. 

  3343.       <Reports />
    3344. 

  3344.     </CollectionEvent>
    3345. 

  3345.     <CollectionEvent id="1006301" logicalName="__SYSTEM__1006301__ALARMSET" description="Alarm Set : PMB Error" enabled="true">
    3346. 

  3346.       <Reports />
    3347. 

  3347.     </CollectionEvent>
    3348. 

  3348.     <CollectionEvent id="2006301" logicalName="__SYSTEM__2006301__ALARMCLEAR" description="Alarm Clear : PMB Error" enabled="true">
    3349. 

  3349.       <Reports />
    3350. 

  3350.     </CollectionEvent>
    3351. 

  3351.     <CollectionEvent id="10000" logicalName="ControlJobCalceled" description="" enabled="true">
    3352. 

  3352.       <Reports>
    3353. 

  3353.         <int>10000</int>
    3354. 

  3354.       </Reports>
    3355. 

  3355.     </CollectionEvent>
    3356. 

  3356.     <CollectionEvent id="10001" logicalName="ControlJobSelected" description="" enabled="true">
    3357. 

  3357.       <Reports>
    3358. 

  3358.         <int>10000</int>
    3359. 

  3359.       </Reports>
    3360. 

  3360.     </CollectionEvent>
    3361. 

  3361.     <CollectionEvent id="10002" logicalName="ControlJobExecutionBegan" description="" enabled="true">
    3362. 

  3362.       <Reports>
    3363. 

  3363.         <int>10000</int>
    3364. 

  3364.       </Reports>
    3365. 

  3365.     </CollectionEvent>
    3366. 

  3366.     <CollectionEvent id="10003" logicalName="ControlJobWaitingForStart" description="" enabled="true">
    3367. 

  3367.       <Reports>
    3368. 

  3368.         <int>10000</int>
    3369. 

  3369.       </Reports>
    3370. 

  3370.     </CollectionEvent>
    3371. 

  3371.     <CollectionEvent id="10004" logicalName="ControlJobPaused" description="" enabled="true">
    3372. 

  3372.       <Reports>
    3373. 

  3373.         <int>10000</int>
    3374. 

  3374.       </Reports>
    3375. 

  3375.     </CollectionEvent>
    3376. 

  3376.     <CollectionEvent id="10005" logicalName="ControlJobResume" description="" enabled="true">
    3377. 

  3377.       <Reports>
    3378. 

  3378.         <int>10000</int>
    3379. 

  3379.       </Reports>
    3380. 

  3380.     </CollectionEvent>
    3381. 

  3381.     <CollectionEvent id="10006" logicalName="ControlJobComplete" description="" enabled="true">
    3382. 

  3382.       <Reports>
    3383. 

  3383.         <int>10000</int>
    3384. 

  3384.       </Reports>
    3385. 

  3385.     </CollectionEvent>
    3386. 

  3386.     <CollectionEvent id="10007" logicalName="ControlJobStopped" description="" enabled="true">
    3387. 

  3387.       <Reports>
    3388. 

  3388.         <int>10000</int>
    3389. 

  3389.       </Reports>
    3390. 

  3390.     </CollectionEvent>
    3391. 

  3391.     <CollectionEvent id="10008" logicalName="ControlJobAborted" description="" enabled="true">
    3392. 

  3392.       <Reports>
    3393. 

  3393.         <int>10000</int>
    3394. 

  3394.       </Reports>
    3395. 

  3395.     </CollectionEvent>
    3396. 

  3396.     <CollectionEvent id="10009" logicalName="LoadPortTransferStateChanged" description="" enabled="true">
    3397. 

  3397.       <Reports>
    3398. 

  3398.         <int>10001</int>
    3399. 

  3399.       </Reports>
    3400. 

  3400.     </CollectionEvent>
    3401. 

  3401.     <CollectionEvent id="10010" logicalName="LoadPortReadyToUnload" description="" enabled="true">
    3402. 

  3402.       <Reports>
    3403. 

  3403.         <int>10002</int>
    3404. 

  3404.       </Reports>
    3405. 

  3405.     </CollectionEvent>
    3406. 

  3406.   </CollectionEvents>
    3407. 

  3407. </EquipmentVariables>
    3408.