Mars200/Mars/EfemDualRT/Config/EfemDualGemModel.xml

<?xml version="1.0" encoding="UTF-8"?>
<Equipment xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" persistence="true" schemaVersion="1.0.3" productInfo="Mars">
  <License licenseId="" licensePath="" />
  <Nameable id="EfemDual" description="EfemDual" locator="" alias="EfemDual" make="EfemDual" model="EfemDual" softwareRev="3.6" />
  <GemConnection protocol="Hsms" defaultCommunicationState="Enabled" defaultControlState="Online" defaultOnlineSubState="Local" deviceId="0" multipleOpen="true" maxOpenTransactions="3">
    <HSMS connectionMode="Passive" linktestInterval="0" localIPAddress="127.0.0.1" localPortNumber="5021" remoteIPAddress="127.0.0.1" remotePortNumber="5020" T3Timeout="45" T5Timeout="10" T6Timeout="5" T7Timeout="10" T8Timeout="5" />
    <RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
  </GemConnection>
  <SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="U1" opid="U1" length="U4" cmda="U1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="U1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="U1" prdct="U1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
  <Logger logLevel="Verbose" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
  <Clock timeFormat="yyyymmddhhmmsscc" />
  <RemoteCommand allowLocalMode="false">
    <S2F21>
      <S2F21Command name="100" logicalName="START" description=" " />
      <S2F21Command name="101" logicalName="PAUSE" description=" " />
      <S2F21Command name="102" logicalName="STOP" description=" " />
      <S2F21Command name="103" logicalName="PP-SELECT" description=" " />
      <S2F21Command name="104" logicalName="RESUME" description=" " />
      <S2F21Command name="105" logicalName="ABORT" description=" " />
    </S2F21>
    <S2F41>
      <S2F41Command name="ReadCarrierID" logicalName="ReadCarrierID" description=" " />
    </S2F41>
    <S2F49>
      <S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
      </S2F49Command>
      <S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
      </S2F49Command>
      <S2F49Command name="START" logicalName="START" description=" ">
      </S2F49Command>
      <S2F49Command name="STOP" logicalName="STOP" description=" ">
      </S2F49Command>
      <S2F49Command name="ABORT" logicalName="ABORT" description=" ">
      </S2F49Command>
      <S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
      </S2F49Command>
      <S2F49Command name="RESUME" logicalName="RESUME" description=" ">
      </S2F49Command>
    </S2F49>
  </RemoteCommand>
  <StatusVariables>
    <SVID id="1" valueType="List" logicalName="AlarmsEnabled" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="3" valueType="Ascii" logicalName="Clock" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="4" valueType="U4" logicalName="ControlState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="5" valueType="List" logicalName="EventsEnabled" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="6" valueType="Ascii" logicalName="PPExecName" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="7" valueType="U1" logicalName="PreviousProcessState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="8" valueType="U1" logicalName="ProcessState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="9" valueType="U4" logicalName="SpoolCountActual" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10" valueType="U4" logicalName="SpoolCountTotal" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="11" valueType="Ascii" logicalName="SpoolFullTime" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="13" valueType="Ascii" logicalName="SpoolState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101001" valueType="Ascii" logicalName="CJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101002" valueType="Ascii" logicalName="PJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101003" valueType="Boolean" logicalName="System.HasActiveAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101004" valueType="Boolean" logicalName="System.IsAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101005" valueType="Boolean" logicalName="System.IsAutoRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101006" valueType="Boolean" logicalName="System.IsBusy" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101007" valueType="Boolean" logicalName="System.IsIdle" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101008" valueType="Boolean" logicalName="System.IsSpoolingEnable" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101009" valueType="Ascii" logicalName="System.SpoolingState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101010" valueType="Boolean" logicalName="System.IsAutoMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101011" valueType="Boolean" logicalName="System.IsConnectedWithHost" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101012" valueType="Ascii" logicalName="System.EquipmentMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10101013" valueType="Ascii" logicalName="System.EquipmentStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201001" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.ControlTcFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201002" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.ControlTcSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201003" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.ControlTcSetPointView" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201004" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.CoolantInletTempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201005" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.CoolantOutletTempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201006" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsControlTcBroken" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201007" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsMonitorTcBroken" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201008" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsPowerOnFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201009" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsPowerOnSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201010" valueType="Boolean" logicalName="System.IoHeater.HeaterBuffer.IsTcDeviation" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10201011" valueType="F8" logicalName="System.IoHeater.HeaterBuffer.MonitorTcFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202001" valueType="Boolean" logicalName="System.EFEM.AirErrorForRobot" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202002" valueType="Boolean" logicalName="System.EFEM.DoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202003" valueType="Boolean" logicalName="System.EFEM.EmoAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202004" valueType="Boolean" logicalName="System.EFEM.FFUAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202005" valueType="Boolean" logicalName="System.EFEM.IonizerAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202006" valueType="Boolean" logicalName="System.EFEM.IsMaintain" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202007" valueType="Boolean" logicalName="System.EFEM.CompressedAirPressureAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202008" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting1Alarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202009" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting2Alarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202010" valueType="Boolean" logicalName="System.EFEM.DrivePowerAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202011" valueType="Boolean" logicalName="System.EFEM.FlowGaugeWarning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202012" valueType="Boolean" logicalName="System.EFEM.VacuumSourcePressureAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10202013" valueType="Boolean" logicalName="System.EFEM.WaterLeakWarning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10203001" valueType="Boolean" logicalName="System.io.IsConnected" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10204001" valueType="F8" logicalName="System.HeaterBuffer.Temperature" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10205001" valueType="Boolean" logicalName="System.SensorBuffer_AControlTCBrokenAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10206001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATFinished.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10207001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATRunning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10208001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATStart_Fb.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10209001" valueType="Boolean" logicalName="System.SensorBuffer_AHeatPIDATStop_Fb.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10210001" valueType="Boolean" logicalName="System.SensorBuffer_AMonitorTCBrokenAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10211001" valueType="Boolean" logicalName="System.SensorBuffer_ATCDeviationOutOfRange.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10212001" valueType="Boolean" logicalName="System.SensorBufferABigWaferProtrusion.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10213001" valueType="Boolean" logicalName="System.SensorBufferBBigWaferProtrusion.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10214001" valueType="Boolean" logicalName="System.SensorCDAPressureSW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10215001" valueType="Boolean" logicalName="System.SensorEFEMSidePlanClosed.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10216001" valueType="Boolean" logicalName="System.SensorINONormal.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10217001" valueType="Boolean" logicalName="System.SensorLowArmPressure.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10218001" valueType="Boolean" logicalName="System.SensorTMBufferOTSW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10219001" valueType="Boolean" logicalName="System.SensorTMFFUNormal.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10220001" valueType="Boolean" logicalName="System.SensorTMInSafety.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10221001" valueType="Boolean" logicalName="System.SensorTMPowerOn.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10222001" valueType="Boolean" logicalName="System.SensorTMRobotAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10223001" valueType="Boolean" logicalName="System.SensorUpArmPressure.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10224001" valueType="Boolean" logicalName="System.SensorVaccumPressureSW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10225001" valueType="Boolean" logicalName="System.SensorWaterFlowSW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10226001" valueType="Boolean" logicalName="System.SensorWaterLeakSW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10227001" valueType="Boolean" logicalName="System.SensorTMSideDoorClosed.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10228001" valueType="Boolean" logicalName="System.SensorWaterInletValve.Value" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10301001" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="10301002" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.Status" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101001" valueType="Ascii" logicalName="LP1.CasstleType" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101002" valueType="Ascii" logicalName="LP1.InfoPadCarrierIndex" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101003" valueType="Ascii" logicalName="LP1.intAccessMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101004" valueType="Ascii" logicalName="LP1.intAccessStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101005" valueType="Ascii" logicalName="LP1.intAssociationState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101006" valueType="Ascii" logicalName="LP1.intCarrierIDStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101007" valueType="Ascii" logicalName="LP1.intReserveState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101008" valueType="Ascii" logicalName="LP1.intSlotMapStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101009" valueType="Ascii" logicalName="LP1.intTransferState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101010" valueType="Boolean" logicalName="LP1.IsClamped" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101011" valueType="Boolean" logicalName="LP1.IsDocked" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101012" valueType="Boolean" logicalName="LP1.IsDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101013" valueType="Boolean" logicalName="LP1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101014" valueType="Boolean" logicalName="LP1.IsMapped" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101015" valueType="Boolean" logicalName="LP1.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101016" valueType="Boolean" logicalName="LP1.IsPlaced" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101017" valueType="Boolean" logicalName="LP1.IsPresent" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101018" valueType="Boolean" logicalName="LP1.IsWaferProtrude" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101019" valueType="Boolean" logicalName="LP1.LoadportBusy" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="20101020" valueType="Boolean" logicalName="LP1.JobDone" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101001" valueType="Ascii" logicalName="LP2.CasstleType" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101002" valueType="Ascii" logicalName="LP2.InfoPadCarrierIndex" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101003" valueType="Ascii" logicalName="LP2.intAccessMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101004" valueType="Ascii" logicalName="LP2.intAccessStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101005" valueType="Ascii" logicalName="LP2.intAssociationState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101006" valueType="Ascii" logicalName="LP2.intCarrierIDStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101007" valueType="Ascii" logicalName="LP2.intReserveState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101008" valueType="Ascii" logicalName="LP2.intSlotMapStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101009" valueType="Ascii" logicalName="LP2.intTransferState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101010" valueType="Boolean" logicalName="LP2.IsClamped" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101011" valueType="Boolean" logicalName="LP2.IsDocked" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101012" valueType="Boolean" logicalName="LP2.IsDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101013" valueType="Boolean" logicalName="LP2.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101014" valueType="Boolean" logicalName="LP2.IsMapped" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101015" valueType="Boolean" logicalName="LP2.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101016" valueType="Boolean" logicalName="LP2.IsPlaced" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101017" valueType="Boolean" logicalName="LP2.IsPresent" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101018" valueType="Boolean" logicalName="LP2.IsWaferProtrude" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101019" valueType="Boolean" logicalName="LP2.LoadportBusy" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="30101020" valueType="Boolean" logicalName="LP2.JobDone" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101001" valueType="Ascii" logicalName="LP3.CasstleType" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101002" valueType="Ascii" logicalName="LP3.InfoPadCarrierIndex" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101003" valueType="Ascii" logicalName="LP3.intAccessMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101004" valueType="Ascii" logicalName="LP3.intAccessStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101005" valueType="Ascii" logicalName="LP3.intAssociationState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101006" valueType="Ascii" logicalName="LP3.intCarrierIDStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101007" valueType="Ascii" logicalName="LP3.intReserveState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101008" valueType="Ascii" logicalName="LP3.intSlotMapStatus" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101009" valueType="Ascii" logicalName="LP3.intTransferState" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101010" valueType="Boolean" logicalName="LP3.IsClamped" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101011" valueType="Boolean" logicalName="LP3.IsDocked" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101012" valueType="Boolean" logicalName="LP3.IsDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101013" valueType="Boolean" logicalName="LP3.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101014" valueType="Boolean" logicalName="LP3.IsMapped" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101015" valueType="Boolean" logicalName="LP3.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101016" valueType="Boolean" logicalName="LP3.IsPlaced" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101017" valueType="Boolean" logicalName="LP3.IsPresent" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101018" valueType="Boolean" logicalName="LP3.IsWaferProtrude" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="40101019" valueType="Boolean" logicalName="LP3.LoadportBusy" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="150101001" valueType="Ascii" logicalName="TMRobot.RobotSpeed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="170101001" valueType="Boolean" logicalName="EFEM.IsConnected" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="170101002" valueType="Boolean" logicalName="EFEM.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="170101003" valueType="Boolean" logicalName="EFEM.IsHomed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="170101004" valueType="Boolean" logicalName="EFEM.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="180101001" valueType="Boolean" logicalName="Aligner.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="190101001" valueType="Boolean" logicalName="Aligner1.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="200101001" valueType="Boolean" logicalName="Aligner2.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="310101001" valueType="Boolean" logicalName="LLA.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="320101001" valueType="Boolean" logicalName="LLB.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430101001" valueType="Boolean" logicalName="TM.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430101002" valueType="Boolean" logicalName="TM.IsHomed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430101003" valueType="Boolean" logicalName="TM.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430202001" valueType="Ascii" logicalName="TM.TMRobot.CurrentReadAData" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430202002" valueType="Ascii" logicalName="TM.TMRobot.CurrentReadSpeedData" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430202003" valueType="Boolean" logicalName="TM.TMRobot.IsLeftArmPressureSensorON" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430202004" valueType="Boolean" logicalName="TM.TMRobot.IsRightArmPressureSensorON" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="430202005" valueType="Ascii" logicalName="TM.TMRobot.ReadPosLeftArmPostion" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="630813001" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPumping.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="630813002" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPumping.Status" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="631001001" valueType="F8" logicalName="PMB.Rf1.RfOnTime.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410101003" valueType="F8" logicalName="IO.PMA.AI_1_LEControlTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101004" valueType="F8" logicalName="IO.PMA.AI_1_LEMonitorTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101005" valueType="F8" logicalName="IO.PMA.AI_2_CoolantInletTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101006" valueType="F8" logicalName="IO.PMA.AI_2_CoolantOutletTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101007" valueType="F8" logicalName="IO.PMA.AI_2_LEControlTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101008" valueType="F8" logicalName="IO.PMA.AI_2_LEMonitorTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410101011" valueType="F8" logicalName="IO.PMA.AI_CHBMonitorTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410101014" valueType="F8" logicalName="IO.PMA.AI_ForelineMonitorTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101015" valueType="F8" logicalName="IO.PMA.AI_ForelinePressure" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101016" valueType="F8" logicalName="IO.PMA.AI_HeartbeatFB" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410101019" valueType="F8" logicalName="IO.PMA.AI_MFC3Flow" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101020" valueType="F8" logicalName="IO.PMA.AI_MFC4Flow" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101021" valueType="F8" logicalName="IO.PMA.AI_MFC5Flow" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101022" valueType="F8" logicalName="IO.PMA.AI_MFC6Flow" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101023" valueType="F8" logicalName="IO.PMA.AI_Minute" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101024" valueType="F8" logicalName="IO.PMA.AI_Month" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101025" valueType="F8" logicalName="IO.PMA.AI_ProcessPressure" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101026" valueType="F8" logicalName="IO.PMA.AI_Second" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101027" valueType="F8" logicalName="IO.PMA.AI_ThrottleValveRealPosition" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101028" valueType="F8" logicalName="IO.PMA.AI_ThrottleValveRealPressure" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101029" valueType="F8" logicalName="IO.PMA.AI_Time" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101030" valueType="F8" logicalName="IO.PMA.AI_Year" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101031" valueType="F8" logicalName="IO.PMA.AO_1_LETemperatureSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101032" valueType="F8" logicalName="IO.PMA.AO_1_LETempLimitSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101033" valueType="F8" logicalName="IO.PMA.AO_2_LETemperatureSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101034" valueType="F8" logicalName="IO.PMA.AO_2_LETempLimitSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101035" valueType="F8" logicalName="IO.PMA.AO_BaisRFEnable" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101036" valueType="F8" logicalName="IO.PMA.AO_CHBTemperatureSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101037" valueType="F8" logicalName="IO.PMA.AO_CHBTempLimitSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101038" valueType="F8" logicalName="IO.PMA.AO_ForelineTemperatureSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101039" valueType="F8" logicalName="IO.PMA.AO_ForelineTempLimitSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101040" valueType="F8" logicalName="IO.PMA.AO_Heartbeat" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101041" valueType="F8" logicalName="IO.PMA.AO_MFC1FlowSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101042" valueType="F8" logicalName="IO.PMA.AO_MFC2FlowSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101043" valueType="F8" logicalName="IO.PMA.AO_MFC3FlowSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101044" valueType="F8" logicalName="IO.PMA.AO_MFC4FlowSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101045" valueType="F8" logicalName="IO.PMA.AO_MFC5FlowSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101046" valueType="F8" logicalName="IO.PMA.AO_MFC6FlowSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410101048" valueType="F8" logicalName="IO.PMA.AO_ThrottleValvePressureSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101049" valueType="F8" logicalName="IO.PMA.AO_ThrottleValveWorkMode" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410101053" valueType="Boolean" logicalName="IO.PMA.DI_1_GuidePinLifterDownPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101054" valueType="Boolean" logicalName="IO.PMA.DI_1_GuidePinLifterUpPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101055" valueType="Boolean" logicalName="IO.PMA.DI_1_LEControlTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101056" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeaterOn_FB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101057" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101058" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101059" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101060" valueType="Boolean" logicalName="IO.PMA.DI_1_LEHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101061" valueType="Boolean" logicalName="IO.PMA.DI_1_LEMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410101064" valueType="Boolean" logicalName="IO.PMA.DI_1_LiftPinDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101065" valueType="Boolean" logicalName="IO.PMA.DI_1_LiftPinUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101066" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorClosePos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101067" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorOpenPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101068" valueType="Boolean" logicalName="IO.PMA.DI_2_CoolantInletTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101069" valueType="Boolean" logicalName="IO.PMA.DI_2_CoolantOutletTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101070" valueType="Boolean" logicalName="IO.PMA.DI_2_CoolingWaterFlowSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101071" valueType="Boolean" logicalName="IO.PMA.DI_2_GuidePinLifterDownPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101072" valueType="Boolean" logicalName="IO.PMA.DI_2_GuidePinLifterUpPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101073" valueType="Boolean" logicalName="IO.PMA.DI_2_LEControlTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101074" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeaterOn_FB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101075" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101076" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101077" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101078" valueType="Boolean" logicalName="IO.PMA.DI_2_LEHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101079" valueType="Boolean" logicalName="IO.PMA.DI_2_LEMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101080" valueType="Boolean" logicalName="IO.PMA.DI_2_LEOTSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101081" valueType="Boolean" logicalName="IO.PMA.DI_2_LETCDeviationOutOfRange" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101082" valueType="Boolean" logicalName="IO.PMA.DI_2_LiftPinDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101083" valueType="Boolean" logicalName="IO.PMA.DI_2_LiftPinUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101084" valueType="Boolean" logicalName="IO.PMA.DI_2_SlitDoorClosePos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101085" valueType="Boolean" logicalName="IO.PMA.DI_2_SlitDoorOpenPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101086" valueType="Boolean" logicalName="IO.PMA.DI_ATMSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101087" valueType="Boolean" logicalName="IO.PMA.DI_ChamberPressureGaugeAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101088" valueType="Boolean" logicalName="IO.PMA.DI_CHBControlTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101089" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeaterOn_FB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101090" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101091" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101092" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101093" valueType="Boolean" logicalName="IO.PMA.DI_CHBHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101094" valueType="Boolean" logicalName="IO.PMA.DI_CHBMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101095" valueType="Boolean" logicalName="IO.PMA.DI_CHBOTSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101096" valueType="Boolean" logicalName="IO.PMA.DI_CHBTCDeviationOutOfRange" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101097" valueType="Boolean" logicalName="IO.PMA.DI_ForelineControlTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101098" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeaterOn_FB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101099" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101100" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101101" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101102" valueType="Boolean" logicalName="IO.PMA.DI_ForelineHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101103" valueType="Boolean" logicalName="IO.PMA.DI_ForelineMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101104" valueType="Boolean" logicalName="IO.PMA.DI_ForelinePressureGaugeAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101105" valueType="Boolean" logicalName="IO.PMA.DI_ForelineTCDeviationOutOfRange" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101106" valueType="Boolean" logicalName="IO.PMA.DI_GB_Interlock" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101107" valueType="Boolean" logicalName="IO.PMA.DI_GeneratorHardwareInterlock" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101108" valueType="Boolean" logicalName="IO.PMA.DI_LidClosed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101109" valueType="Boolean" logicalName="IO.PMA.DI_MFC1PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101110" valueType="Boolean" logicalName="IO.PMA.DI_MFC2PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101111" valueType="Boolean" logicalName="IO.PMA.DI_MFC3PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101112" valueType="Boolean" logicalName="IO.PMA.DI_MFC4PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101113" valueType="Boolean" logicalName="IO.PMA.DI_MFC5PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101114" valueType="Boolean" logicalName="IO.PMA.DI_MFC6PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101115" valueType="Boolean" logicalName="IO.PMA.DI_N2PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101116" valueType="Boolean" logicalName="IO.PMA.DI_ProcessPressureGaugeAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101117" valueType="Boolean" logicalName="IO.PMA.DI_SouceFan" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101118" valueType="Boolean" logicalName="IO.PMA.DI_TMInSafety" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101119" valueType="Boolean" logicalName="IO.PMA.DI_TMRBNotExtendToPM1" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101120" valueType="Boolean" logicalName="IO.PMA.DI_TMRBNotExtendToPM2" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101121" valueType="Boolean" logicalName="IO.PMA.DI_VACSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101122" valueType="Boolean" logicalName="IO.PMA.DI_WaterLeak" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101123" valueType="Boolean" logicalName="IO.PMA.DO_1_GuidePinLifterDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101124" valueType="Boolean" logicalName="IO.PMA.DO_1_GuidePinLifterUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101125" valueType="Boolean" logicalName="IO.PMA.DO_1_LEHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101126" valueType="Boolean" logicalName="IO.PMA.DO_1_LEHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101127" valueType="Boolean" logicalName="IO.PMA.DO_1_LEHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101128" valueType="Boolean" logicalName="IO.PMA.DO_1_LiftPinDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101129" valueType="Boolean" logicalName="IO.PMA.DO_1_LiftPinUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101130" valueType="Boolean" logicalName="IO.PMA.DO_1_SlitDoorClose" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101131" valueType="Boolean" logicalName="IO.PMA.DO_1_SlitDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101132" valueType="Boolean" logicalName="IO.PMA.DO_2_GuidePinLifterDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101133" valueType="Boolean" logicalName="IO.PMA.DO_2_GuidePinLifterUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101134" valueType="Boolean" logicalName="IO.PMA.DO_2_LEHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101135" valueType="Boolean" logicalName="IO.PMA.DO_2_LEHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101136" valueType="Boolean" logicalName="IO.PMA.DO_2_LEHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101137" valueType="Boolean" logicalName="IO.PMA.DO_2_LiftPinDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101138" valueType="Boolean" logicalName="IO.PMA.DO_2_LiftPinUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101139" valueType="Boolean" logicalName="IO.PMA.DO_2_SlitDoorClose" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101140" valueType="Boolean" logicalName="IO.PMA.DO_2_SlitDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101141" valueType="Boolean" logicalName="IO.PMA.DO_CDAPressureNormal" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101142" valueType="Boolean" logicalName="IO.PMA.DO_ChamberPurgeValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101143" valueType="Boolean" logicalName="IO.PMA.DO_ChamberVentValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101144" valueType="Boolean" logicalName="IO.PMA.DO_CHBHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101145" valueType="Boolean" logicalName="IO.PMA.DO_CHBHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101146" valueType="Boolean" logicalName="IO.PMA.DO_CHBHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101147" valueType="Boolean" logicalName="IO.PMA.DO_FastPumpingValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101148" valueType="Boolean" logicalName="IO.PMA.DO_ForelineHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101149" valueType="Boolean" logicalName="IO.PMA.DO_ForelineHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101150" valueType="Boolean" logicalName="IO.PMA.DO_ForelineHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101151" valueType="Boolean" logicalName="IO.PMA.DO_MFC1Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101152" valueType="Boolean" logicalName="IO.PMA.DO_MFC2Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101153" valueType="Boolean" logicalName="IO.PMA.DO_MFC3Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410101154" valueType="Boolean" logicalName="IO.PMA.DO_MFC4Valve" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202027" valueType="F8" logicalName="IO.PMB.AI_ThrottleValveRealPosition" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202072" valueType="Boolean" logicalName="IO.PMB.DI_2_GuidePinLifterUpPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202073" valueType="Boolean" logicalName="IO.PMB.DI_2_LEControlTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202074" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeaterOn_FB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202075" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202076" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202077" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202078" valueType="Boolean" logicalName="IO.PMB.DI_2_LEHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202079" valueType="Boolean" logicalName="IO.PMB.DI_2_LEMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202080" valueType="Boolean" logicalName="IO.PMB.DI_2_LEOTSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202081" valueType="Boolean" logicalName="IO.PMB.DI_2_LETCDeviationOutOfRange" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202083" valueType="Boolean" logicalName="IO.PMB.DI_2_LiftPinUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202084" valueType="Boolean" logicalName="IO.PMB.DI_2_SlitDoorClosePos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202085" valueType="Boolean" logicalName="IO.PMB.DI_2_SlitDoorOpenPos" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202089" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeaterOn_FB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202090" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202091" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202092" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202093" valueType="Boolean" logicalName="IO.PMB.DI_CHBHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202094" valueType="Boolean" logicalName="IO.PMB.DI_CHBMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202096" valueType="Boolean" logicalName="IO.PMB.DI_CHBTCDeviationOutOfRange" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202097" valueType="Boolean" logicalName="IO.PMB.DI_ForelineControlTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202099" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202100" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202101" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202102" valueType="Boolean" logicalName="IO.PMB.DI_ForelineHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202103" valueType="Boolean" logicalName="IO.PMB.DI_ForelineMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202104" valueType="Boolean" logicalName="IO.PMB.DI_ForelinePressureGaugeAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202105" valueType="Boolean" logicalName="IO.PMB.DI_ForelineTCDeviationOutOfRange" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202108" valueType="Boolean" logicalName="IO.PMB.DI_LidClosed" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202110" valueType="Boolean" logicalName="IO.PMB.DI_MFC2PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202112" valueType="Boolean" logicalName="IO.PMB.DI_MFC4PressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202116" valueType="Boolean" logicalName="IO.PMB.DI_ProcessPressureGaugeAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202117" valueType="Boolean" logicalName="IO.PMB.DI_SouceFan" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202118" valueType="Boolean" logicalName="IO.PMB.DI_TMInSafety" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202119" valueType="Boolean" logicalName="IO.PMB.DI_TMRBNotExtendToPM1" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202120" valueType="Boolean" logicalName="IO.PMB.DI_TMRBNotExtendToPM2" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202121" valueType="Boolean" logicalName="IO.PMB.DI_VACSW" value="" eventTrigger="" units="" description="" isArray="false" />
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    <SVID id="1410202124" valueType="Boolean" logicalName="IO.PMB.DO_1_GuidePinLifterUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202125" valueType="Boolean" logicalName="IO.PMB.DO_1_LEHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202126" valueType="Boolean" logicalName="IO.PMB.DO_1_LEHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202127" valueType="Boolean" logicalName="IO.PMB.DO_1_LEHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202128" valueType="Boolean" logicalName="IO.PMB.DO_1_LiftPinDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202129" valueType="Boolean" logicalName="IO.PMB.DO_1_LiftPinUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202130" valueType="Boolean" logicalName="IO.PMB.DO_1_SlitDoorClose" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202131" valueType="Boolean" logicalName="IO.PMB.DO_1_SlitDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202132" valueType="Boolean" logicalName="IO.PMB.DO_2_GuidePinLifterDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202133" valueType="Boolean" logicalName="IO.PMB.DO_2_GuidePinLifterUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202134" valueType="Boolean" logicalName="IO.PMB.DO_2_LEHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202135" valueType="Boolean" logicalName="IO.PMB.DO_2_LEHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202136" valueType="Boolean" logicalName="IO.PMB.DO_2_LEHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202137" valueType="Boolean" logicalName="IO.PMB.DO_2_LiftPinDown" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202138" valueType="Boolean" logicalName="IO.PMB.DO_2_LiftPinUp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202139" valueType="Boolean" logicalName="IO.PMB.DO_2_SlitDoorClose" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202140" valueType="Boolean" logicalName="IO.PMB.DO_2_SlitDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202141" valueType="Boolean" logicalName="IO.PMB.DO_CDAPressureNormal" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202142" valueType="Boolean" logicalName="IO.PMB.DO_ChamberPurgeValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202143" valueType="Boolean" logicalName="IO.PMB.DO_ChamberVentValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202144" valueType="Boolean" logicalName="IO.PMB.DO_CHBHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202145" valueType="Boolean" logicalName="IO.PMB.DO_CHBHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202146" valueType="Boolean" logicalName="IO.PMB.DO_CHBHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202147" valueType="Boolean" logicalName="IO.PMB.DO_FastPumpingValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202148" valueType="Boolean" logicalName="IO.PMB.DO_ForelineHeaterOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202149" valueType="Boolean" logicalName="IO.PMB.DO_ForelineHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202150" valueType="Boolean" logicalName="IO.PMB.DO_ForelineHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202151" valueType="Boolean" logicalName="IO.PMB.DO_MFC1Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202152" valueType="Boolean" logicalName="IO.PMB.DO_MFC2Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202153" valueType="Boolean" logicalName="IO.PMB.DO_MFC3Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202154" valueType="Boolean" logicalName="IO.PMB.DO_MFC4Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202155" valueType="Boolean" logicalName="IO.PMB.DO_MFC5Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202156" valueType="Boolean" logicalName="IO.PMB.DO_MFC6Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202157" valueType="Boolean" logicalName="IO.PMB.DO_N2Valve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202158" valueType="Boolean" logicalName="IO.PMB.DO_ProcessGasFinalValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202159" valueType="Boolean" logicalName="IO.PMB.DO_ResetSignal" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410202160" valueType="Boolean" logicalName="IO.PMB.DO_SoftPumpingValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203001" valueType="F8" logicalName="IO.System.AI_Buffer_AControlTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203002" valueType="F8" logicalName="IO.System.AI_Buffer_AMonitorTCTemp" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203003" valueType="F8" logicalName="IO.System.AI_Day" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203004" valueType="F8" logicalName="IO.System.AI_HeartbeatFB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203005" valueType="F8" logicalName="IO.System.AI_Minute" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203006" valueType="F8" logicalName="IO.System.AI_Month" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203007" valueType="F8" logicalName="IO.System.AI_Second" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203008" valueType="F8" logicalName="IO.System.AI_Time" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203009" valueType="F8" logicalName="IO.System.AI_Year" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203010" valueType="F8" logicalName="IO.System.AO_Buffer_ATemperatureSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203011" valueType="F8" logicalName="IO.System.AO_Buffer_ATempLimitSetpoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203012" valueType="F8" logicalName="IO.System.AO_Heartbeat" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203013" valueType="Boolean" logicalName="IO.System.DI_Buffer_ABigWaferProtrusion" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203014" valueType="Boolean" logicalName="IO.System.DI_Buffer_AControlTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203015" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatOn_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203016" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATFinished" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203017" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATRunning" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203018" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATStart_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203019" valueType="Boolean" logicalName="IO.System.DI_Buffer_AHeatPIDATStop_Fb" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203020" valueType="Boolean" logicalName="IO.System.DI_Buffer_AMonitorTCBrokenAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203021" valueType="Boolean" logicalName="IO.System.DI_Buffer_ASmallWaferProtrusion" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203022" valueType="Boolean" logicalName="IO.System.DI_Buffer_ATCDeviationOutOfRange" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203023" valueType="Boolean" logicalName="IO.System.DI_Buffer_AWaferInPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203024" valueType="Boolean" logicalName="IO.System.DI_Buffer_BBigWaferProtrusion" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203025" valueType="Boolean" logicalName="IO.System.DI_Buffer_BSmallWaferProtrusion" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203026" valueType="Boolean" logicalName="IO.System.DI_Buffer_BWaferInPos" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203027" valueType="Boolean" logicalName="IO.System.DI_CDAPressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203028" valueType="Boolean" logicalName="IO.System.DI_EFEMRBNotExtendBFA" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203029" valueType="Boolean" logicalName="IO.System.DI_EFEMRBNotExtendBFB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203030" valueType="Boolean" logicalName="IO.System.DI_EFEMSidePlanClosed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203031" valueType="Boolean" logicalName="IO.System.DI_INONormal" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203032" valueType="Boolean" logicalName="IO.System.DI_MaintenanceMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203033" valueType="Boolean" logicalName="IO.System.DI_RunMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203034" valueType="Boolean" logicalName="IO.System.DI_TMBufferOTSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203035" valueType="Boolean" logicalName="IO.System.DI_TMFFUNormal" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203036" valueType="Boolean" logicalName="IO.System.DI_TMInSafety" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203037" valueType="Boolean" logicalName="IO.System.DI_TMPowerOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203038" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendBFA" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203039" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendBFB" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203040" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMA1" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203041" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMA2" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203042" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMB1" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203043" valueType="Boolean" logicalName="IO.System.DI_TMRBNotExtendPMB2" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203044" valueType="Boolean" logicalName="IO.System.DI_TMRobotAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203045" valueType="Boolean" logicalName="IO.System.DI_TMSideDoorClosed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203046" valueType="Boolean" logicalName="IO.System.DI_VaccumPressureSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203047" valueType="Boolean" logicalName="IO.System.DI_WaterFlowSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203048" valueType="Boolean" logicalName="IO.System.DI_WaterLeakSW" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203049" valueType="Boolean" logicalName="IO.System.DO_Buffer_AHeatPIDATStart" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203050" valueType="Boolean" logicalName="IO.System.DO_Buffer_AHeatPIDATStop" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203051" valueType="Boolean" logicalName="IO.System.DO_BufferHeatOn" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203052" valueType="Boolean" logicalName="IO.System.DO_WaterInletValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203053" valueType="Boolean" logicalName="IO.System.DI_TMRBEMS" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203054" valueType="Boolean" logicalName="IO.System.DI_TMRBTeachMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203055" valueType="Boolean" logicalName="IO.System.DI_WaterInletValve" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1410203056" valueType="Boolean" logicalName="IO.System.DO_IonizerInterrupt" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1420101001" valueType="Ascii" logicalName="Scheduler.CycledWaferCount" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1420101002" valueType="Ascii" logicalName="Scheduler.CycleWaferCountSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1420101003" valueType="Boolean" logicalName="Scheduler.IsCycleMode" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1420101004" valueType="F8" logicalName="Scheduler.LiveThroughput" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1420101005" valueType="F8" logicalName="Scheduler.Throughput" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1420101006" valueType="Ascii" logicalName="Scheduler.CycleCountSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1420101007" valueType="Ascii" logicalName="Scheduler.CycledCount" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1430101001" valueType="F8" logicalName="BufferA.Heater" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1440101001" valueType="Ascii" logicalName="FFU.FFU1Speed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1440101002" valueType="Ascii" logicalName="FFU.FFU2Speed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1440101003" valueType="Ascii" logicalName="FFU.FFU3Speed" value="" eventTrigger="" units="" description="" isArray="false" />
    <SVID id="1450101001" valueType="Ascii" logicalName="TMCylce.RemainedCycleCount" value="" eventTrigger="" units="" description="" isArray="false" />
  </StatusVariables>
  <EquipmentConstants>
    <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="False" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="10101001" valueType="Ascii" logicalName="System.ATMProcessDelayTime" value="" min="" max="" eventTrigger="" units="" description="ATM Process Delay Time" isArray="false" />
    <ECID id="10101002" valueType="Ascii" logicalName="System.AutoAlignManualTransfer" value="" min="" max="" eventTrigger="" units="" description="Auto Align Manual Transfer" isArray="false" />
    <ECID id="10101003" valueType="Ascii" logicalName="System.AutoPassCooling" value="" min="" max="" eventTrigger="" units="" description="Auto Pass Cooling" isArray="false" />
    <ECID id="10101004" valueType="Ascii" logicalName="System.BigWafer" value="" min="" max="" eventTrigger="" units="" description="大晶圆尺寸" isArray="false" />
    <ECID id="10101005" valueType="Ascii" logicalName="System.BypassInterlock" value="" min="" max="" eventTrigger="" units="" description="Bypass Interlock" isArray="false" />
    <ECID id="10101006" valueType="Ascii" logicalName="System.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
    <ECID id="10101007" valueType="Ascii" logicalName="System.DataCollectionInterval" value="" min="" max="" eventTrigger="" units="" description="Data Collection Interval" isArray="false" />
    <ECID id="10101008" valueType="Ascii" logicalName="System.IsATMMode" value="" min="" max="" eventTrigger="" units="" description="Is ATM Mode" isArray="false" />
    <ECID id="10101009" valueType="Ascii" logicalName="System.IsCycleMode" value="" min="" max="" eventTrigger="" units="" description="Is Cycle Mode" isArray="false" />
    <ECID id="10101010" valueType="Ascii" logicalName="System.IsEnableCompressLogFileFunc" value="" min="" max="" eventTrigger="" units="" description="启用压缩log文件功能" isArray="false" />
    <ECID id="10101011" valueType="Ascii" logicalName="System.IsServiceControlMode" value="" min="" max="" eventTrigger="" units="" description="Is Service Control Mode" isArray="false" />
    <ECID id="10101012" valueType="Ascii" logicalName="System.IsSimulatorMode" value="" min="" max="" eventTrigger="" units="" description="Is Simulator Mode" isArray="false" />
    <ECID id="10101013" valueType="Ascii" logicalName="System.LogsSaveDays" value="" min="" max="" eventTrigger="" units="" description="Logs Save Days" isArray="false" />
    <ECID id="10101014" valueType="Ascii" logicalName="System.MaxTemperatureToleranceToTarget" value="" min="" max="" eventTrigger="" units="" description="MaxTemperatureToleranceToTarget" isArray="false" />
    <ECID id="10101015" valueType="Ascii" logicalName="System.MidWafer" value="" min="" max="" eventTrigger="" units="" description="中晶圆尺寸" isArray="false" />
    <ECID id="10101016" valueType="Ascii" logicalName="System.SingleLogFileMaxSize" value="" min="" max="" eventTrigger="" units="" description="如果已启用压缩log文件功能，当天前超过该设置(M)的log文件将被压缩" isArray="false" />
    <ECID id="10101017" valueType="Ascii" logicalName="System.SmallWafer" value="" min="" max="" eventTrigger="" units="" description="小晶圆尺寸" isArray="false" />
    <ECID id="10101018" valueType="Ascii" logicalName="System.TotalCycledWafer" value="" min="" max="" eventTrigger="" units="" description="Total Cycled Wafer" isArray="false" />
    <ECID id="10101019" valueType="Ascii" logicalName="System.BufferSetPointLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="10101020" valueType="Ascii" logicalName="System.CycleBy" value="" min="" max="" eventTrigger="" units="" description="Cycle By LotCount or WaferCount" isArray="false" />
    <ECID id="10101021" valueType="Ascii" logicalName="System.CycleWaferCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Wafer Count" isArray="false" />
    <ECID id="10101022" valueType="Ascii" logicalName="System.DefaultCoolingTime" value="" min="" max="" eventTrigger="" units="" description="默认Cooling时间(s)" isArray="false" />
    <ECID id="10101023" valueType="Ascii" logicalName="System.DefaultCreateWaferSize" value="" min="" max="" eventTrigger="" units="" description="默认创建Wafer尺寸" isArray="false" />
    <ECID id="10101024" valueType="Ascii" logicalName="System.ProcessEnableCheckLE" value="" min="" max="" eventTrigger="" units="" description="是否在process时检查底座温度是否ON" isArray="false" />
    <ECID id="10101025" valueType="Ascii" logicalName="System.DataKeepDays" value="" min="" max="" eventTrigger="" units="" description="数据库数据保留天数" isArray="false" />
    <ECID id="10101026" valueType="Ascii" logicalName="System.EnableDataClean" value="" min="" max="" eventTrigger="" units="" description="启用数据库自动删除n天前记录" isArray="false" />
    <ECID id="10201001" valueType="Ascii" logicalName="System.SetUp.EPD.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is EPD Installed" isArray="false" />
    <ECID id="10202001" valueType="Ascii" logicalName="System.FDC.DataGroupName" value="" min="" max="" eventTrigger="" units="" description="FDC data group" isArray="false" />
    <ECID id="10202002" valueType="Ascii" logicalName="System.FDC.DelayTime" value="" min="" max="" eventTrigger="" units="" description="Step Delay time before collection data" isArray="false" />
    <ECID id="10202003" valueType="Ascii" logicalName="System.FDC.SampleInterval" value="" min="" max="" eventTrigger="" units="" description="interval time collection sample data" isArray="false" />
    <ECID id="10203001" valueType="Ascii" logicalName="System.Job.BuzzerTimeWhenJobDone" value="" min="" max="" eventTrigger="" units="" description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" isArray="false" />
    <ECID id="10203002" valueType="Ascii" logicalName="System.Job.EnablePopDialogWhenJobDone" value="" min="" max="" eventTrigger="" units="" description="Whether pop window after job done" isArray="false" />
    <ECID id="10204001" valueType="Ascii" logicalName="System.Recipe.ChamberModules" value="" min="" max="" eventTrigger="" units="" description="Chamber Modules" isArray="false" />
    <ECID id="10204002" valueType="Ascii" logicalName="System.Recipe.SupportedChamberType" value="" min="" max="" eventTrigger="" units="" description="Supported Chamber Type" isArray="false" />
    <ECID id="10204003" valueType="Ascii" logicalName="System.Recipe.SupportedProcessType" value="" min="" max="" eventTrigger="" units="" description="Supported Process Type" isArray="false" />
    <ECID id="10205001" valueType="Ascii" logicalName="System.Scheduler.GroupWaferBySequence" value="" min="" max="" eventTrigger="" units="" description="相同sequence的job一起跑" isArray="false" />
    <ECID id="10205002" valueType="Ascii" logicalName="System.Scheduler.IsRunInParallelMode" value="" min="" max="" eventTrigger="" units="" description="IsRunInParallelMode" isArray="false" />
    <ECID id="10205003" valueType="Ascii" logicalName="System.Scheduler.ProcessFromSlotMax" value="" min="" max="" eventTrigger="" units="" description="Process From Slot Max" isArray="false" />
    <ECID id="10205004" valueType="Ascii" logicalName="System.Scheduler.WaferCountBelowWhichStartNewProcessJob" value="" min="" max="" eventTrigger="" units="" description="Wafer Count Below Which Start New Process Job" isArray="false" />
    <ECID id="10205005" valueType="Ascii" logicalName="System.Scheduler.WaitLoadTimeOut" value="" min="" max="" eventTrigger="" units="" description="Wait Load TimeOut" isArray="false" />
    <ECID id="10206001" valueType="Ascii" logicalName="System.SignalTower.Light" value="" min="" max="" eventTrigger="" units="" description="设置灯的种类，顺序" isArray="false" />
    <ECID id="10206002" valueType="Ascii" logicalName="System.SignalTower.Trigger" value="" min="" max="" eventTrigger="" units="" description="设置触发灯塔的项" isArray="false" />
    <ECID id="10206003" valueType="Ascii" logicalName="System.SignalTower.Value" value="" min="" max="" eventTrigger="" units="" description="设置灯塔触发的逻辑关系" isArray="false" />
    <ECID id="10207001" valueType="Ascii" logicalName="System.EndPoint.EndPointDefaultValue" value="" min="" max="" eventTrigger="" units="" description="EndPoint Default Value" isArray="false" />
    <ECID id="10302001" valueType="Ascii" logicalName="System.SetUp.LLA.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is LLA Installed" isArray="false" />
    <ECID id="10303001" valueType="Ascii" logicalName="System.SetUp.LLB.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is LLB Installed" isArray="false" />
    <ECID id="10304001" valueType="Ascii" logicalName="System.SetUp.LP1.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is LP1 Installed" isArray="false" />
    <ECID id="10305001" valueType="Ascii" logicalName="System.SetUp.LP2.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is LP2 Installed" isArray="false" />
    <ECID id="10306001" valueType="Ascii" logicalName="System.SetUp.LP3.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is LP3 Installed" isArray="false" />
    <ECID id="10307001" valueType="Ascii" logicalName="System.SetUp.PMA.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is PMA Installed" isArray="false" />
    <ECID id="10308001" valueType="Ascii" logicalName="System.SetUp.PMB.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is PMB Installed" isArray="false" />
    <ECID id="10309001" valueType="Ascii" logicalName="System.SetUp.PMC.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is PMC Installed" isArray="false" />
    <ECID id="10310001" valueType="Ascii" logicalName="System.SetUp.Aligner1.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is Aligner1 Installed" isArray="false" />
    <ECID id="10311001" valueType="Ascii" logicalName="System.SetUp.Aligner2.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is Aligner2 Installed" isArray="false" />
    <ECID id="10312001" valueType="Ascii" logicalName="System.SetUp.Cooling1.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is Cooling1 Installed" isArray="false" />
    <ECID id="10313001" valueType="Ascii" logicalName="System.SetUp.Cooling2.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="Is Cooling2 Installed" isArray="false" />
    <ECID id="10314001" valueType="Ascii" logicalName="System.SetUp.PMAChamber1Disabled.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="10315001" valueType="Ascii" logicalName="System.SetUp.PMAChamber2Disabled.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="10316001" valueType="Ascii" logicalName="System.SetUp.PMBChamber1Disabled.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="10317001" valueType="Ascii" logicalName="System.SetUp.PMBChamber2Disabled.IsInstalled" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="20101001" valueType="Ascii" logicalName="LP1.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="20101002" valueType="Ascii" logicalName="LP1.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="30101001" valueType="Ascii" logicalName="LP2.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="30101002" valueType="Ascii" logicalName="LP2.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="40101001" valueType="Ascii" logicalName="LP3.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="40101002" valueType="Ascii" logicalName="LP3.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="170101001" valueType="Ascii" logicalName="EFEM.Address" value="" min="" max="" eventTrigger="" units="" description="地址" isArray="false" />
    <ECID id="170101002" valueType="Ascii" logicalName="EFEM.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="EFEM初始化超时时间" isArray="false" />
    <ECID id="170101003" valueType="Ascii" logicalName="EFEM.DelayTimeBeforeAlignerLiftDown" value="" min="" max="" eventTrigger="" units="" description="放片到aligner后，lift pin停留多久再落下 (s)" isArray="false" />
    <ECID id="170101004" valueType="Ascii" logicalName="EFEM.DelayTimeBeforeCoolingLiftDown" value="" min="" max="" eventTrigger="" units="" description="放片到cooling后，lift pin停留多久再落下 (s)" isArray="false" />
    <ECID id="170101005" valueType="Ascii" logicalName="EFEM.EfemType" value="" min="" max="" eventTrigger="" units="" description="EFEM类型，1=Future广川 2=Jet自制" isArray="false" />
    <ECID id="170101006" valueType="Ascii" logicalName="EFEM.IgnoreFFUError" value="" min="" max="" eventTrigger="" units="" description="是否忽略FFU报警" isArray="false" />
    <ECID id="170101007" valueType="Ascii" logicalName="EFEM.IgnoreIonizerError" value="" min="" max="" eventTrigger="" units="" description="是否忽略离子发生器报警" isArray="false" />
    <ECID id="170101008" valueType="Ascii" logicalName="EFEM.IgnoreWaterFlowError" value="" min="" max="" eventTrigger="" units="" description="是否忽略冷却水报警" isArray="false" />
    <ECID id="170202001" valueType="Ascii" logicalName="EFEM.Aligner.AlignTimeout" value="" min="" max="" eventTrigger="" units="" description="AlignTimeout" isArray="false" />
    <ECID id="170202002" valueType="Ascii" logicalName="EFEM.Aligner.DefaultNotchDegree" value="" min="" max="" eventTrigger="" units="" description="DefaultNotchDegree" isArray="false" />
    <ECID id="170202003" valueType="Ascii" logicalName="EFEM.Aligner.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="HomeTimeout" isArray="false" />
    <ECID id="170202004" valueType="Ascii" logicalName="EFEM.Aligner.LiftTimeout" value="" min="" max="" eventTrigger="" units="" description="LiftTimeout" isArray="false" />
    <ECID id="170203001" valueType="Ascii" logicalName="EFEM.EfemRobot.GotoTimeout" value="" min="" max="" eventTrigger="" units="" description="Goto超时时间" isArray="false" />
    <ECID id="170203002" valueType="Ascii" logicalName="EFEM.EfemRobot.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="初始化超时时间" isArray="false" />
    <ECID id="170203003" valueType="Ascii" logicalName="EFEM.EfemRobot.LowerBladeEnable" value="" min="" max="" eventTrigger="" units="" description="Lower Blade Enable" isArray="false" />
    <ECID id="170203004" valueType="Ascii" logicalName="EFEM.EfemRobot.MapTimeout" value="" min="" max="" eventTrigger="" units="" description="Map超时时间" isArray="false" />
    <ECID id="170203005" valueType="Ascii" logicalName="EFEM.EfemRobot.PickTimeout" value="" min="" max="" eventTrigger="" units="" description="取片超时时间" isArray="false" />
    <ECID id="170203006" valueType="Ascii" logicalName="EFEM.EfemRobot.PlaceTimeout" value="" min="" max="" eventTrigger="" units="" description="放片超时时间" isArray="false" />
    <ECID id="170203007" valueType="Ascii" logicalName="EFEM.EfemRobot.UpperBladeEnable" value="" min="" max="" eventTrigger="" units="" description="Upper Blade Enable" isArray="false" />
    <ECID id="170203008" valueType="Ascii" logicalName="EFEM.EfemRobot.DefaultMapWaferSize" value="" min="" max="" eventTrigger="" units="" description="Default Map Wafer Size" isArray="false" />
    <ECID id="170204001" valueType="Ascii" logicalName="EFEM.LoadPort.CassetteSlotNumber" value="" min="" max="" eventTrigger="" units="" description="Cassette slot number" isArray="false" />
    <ECID id="170204002" valueType="Ascii" logicalName="EFEM.LoadPort.EnableAutoCarrierIdRead" value="" min="" max="" eventTrigger="" units="" description="自动读取Carrier ID" isArray="false" />
    <ECID id="170204003" valueType="Ascii" logicalName="EFEM.LoadPort.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="LoadPort初始化超时时间" isArray="false" />
    <ECID id="170204004" valueType="Ascii" logicalName="EFEM.LoadPort.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Timeout" isArray="false" />
    <ECID id="170204005" valueType="Ascii" logicalName="EFEM.LoadPort.SlotNumber" value="" min="" max="" eventTrigger="" units="" description="Slot Number" isArray="false" />
    <ECID id="170204006" valueType="Ascii" logicalName="EFEM.LoadPort.EnableAutoUnloadFoup" value="" min="" max="" eventTrigger="" units="" description="Enable Auto Unload Foup" isArray="false" />
    <ECID id="170204007" valueType="Ascii" logicalName="EFEM.LoadPort.HasClampFunction" value="" min="" max="" eventTrigger="" units="" description="是否具有上锁功能" isArray="false" />
    <ECID id="170204008" valueType="Ascii" logicalName="EFEM.LoadPort.HasDockFunction" value="" min="" max="" eventTrigger="" units="" description="是否具有Dock功能" isArray="false" />
    <ECID id="170204009" valueType="Ascii" logicalName="EFEM.LoadPort.HasDoorOpenFunction" value="" min="" max="" eventTrigger="" units="" description="是否具有Open/Close Door功能" isArray="false" />
    <ECID id="170204010" valueType="Ascii" logicalName="EFEM.LoadPort.HasLoadFunction" value="" min="" max="" eventTrigger="" units="" description="是否具有Load/Unload功能" isArray="false" />
    <ECID id="170204011" valueType="Ascii" logicalName="EFEM.LoadPort.HasMapFunction" value="" min="" max="" eventTrigger="" units="" description="是否具有Map功能" isArray="false" />
    <ECID id="170204012" valueType="Ascii" logicalName="EFEM.LoadPort.HasReadSmartTagFunction" value="" min="" max="" eventTrigger="" units="" description="是否具有读取SmartTag功能" isArray="false" />
    <ECID id="170204013" valueType="Ascii" logicalName="EFEM.LoadPort.AutoClampOnFoupOn" value="" min="" max="" eventTrigger="" units="" description="当Foup放上去后自动上锁" isArray="false" />
    <ECID id="170205001" valueType="Ascii" logicalName="EFEM.Cooling.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="HomeTimeout" isArray="false" />
    <ECID id="170205002" valueType="Ascii" logicalName="EFEM.Cooling.LiftTimeout" value="" min="" max="" eventTrigger="" units="" description="LiftTimeout" isArray="false" />
    <ECID id="310101001" valueType="Ascii" logicalName="LLA.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="310101002" valueType="Ascii" logicalName="LLA.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="320101001" valueType="Ascii" logicalName="LLB.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="320101002" valueType="Ascii" logicalName="LLB.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="430101001" valueType="Ascii" logicalName="TM.TMRobot.Address" value="" min="" max="" eventTrigger="" units="" description="ip:port" isArray="false" />
    <ECID id="430101002" valueType="Ascii" logicalName="TM.TMRobot.Blade1Enable" value="" min="" max="" eventTrigger="" units="" description="Blade1Enable" isArray="false" />
    <ECID id="430101003" valueType="Ascii" logicalName="TM.TMRobot.Blade2Enable" value="" min="" max="" eventTrigger="" units="" description="Blade2Enable" isArray="false" />
    <ECID id="430101004" valueType="Ascii" logicalName="TM.TMRobot.Blade2Slots" value="" min="" max="" eventTrigger="" units="" description="Blade2Slots" isArray="false" />
    <ECID id="430101005" valueType="Ascii" logicalName="TM.TMRobot.BodyNumber" value="" min="" max="" eventTrigger="" units="" description="Robot Body Number" isArray="false" />
    <ECID id="430101006" valueType="Ascii" logicalName="TM.TMRobot.CommunicationToken" value="" min="" max="" eventTrigger="" units="" description="RobotCommunicationToken" isArray="false" />
    <ECID id="430101007" valueType="Ascii" logicalName="TM.TMRobot.DualBlade1TransferEnable" value="" min="" max="" eventTrigger="" units="" description="DualBlade1TransferEnable" isArray="false" />
    <ECID id="430101008" valueType="Ascii" logicalName="TM.TMRobot.EnableCheckSum" value="" min="" max="" eventTrigger="" units="" description="EnableCheckSum" isArray="false" />
    <ECID id="430101009" valueType="Ascii" logicalName="TM.TMRobot.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="EnableLogMessage" isArray="false" />
    <ECID id="430101010" valueType="Ascii" logicalName="TM.TMRobot.EnableSeqNo" value="" min="" max="" eventTrigger="" units="" description="EnableSeqNo" isArray="false" />
    <ECID id="430101011" valueType="Ascii" logicalName="TM.TMRobot.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="430101012" valueType="Ascii" logicalName="TM.TMRobot.InitCmdNO" value="" min="" max="" eventTrigger="" units="" description="Compaud command number for Init" isArray="false" />
    <ECID id="430101013" valueType="Ascii" logicalName="TM.TMRobot.LowerBladeEnable" value="" min="" max="" eventTrigger="" units="" description="Lower Blade Enable" isArray="false" />
    <ECID id="430101014" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLAPickCmdNO" isArray="false" />
    <ECID id="430101015" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLAPlaceCmdNO" isArray="false" />
    <ECID id="430101016" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLBPickCmdNO" isArray="false" />
    <ECID id="430101017" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLBPlaceCmdNO" isArray="false" />
    <ECID id="430101018" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA1PickBackCmdNO" isArray="false" />
    <ECID id="430101019" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA1PickCmdNO" isArray="false" />
    <ECID id="430101020" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA1PlaceBackCmdNO" isArray="false" />
    <ECID id="430101021" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA1PlaceCmdNO" isArray="false" />
    <ECID id="430101022" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA2PickBackCmdNO" isArray="false" />
    <ECID id="430101023" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA2PickCmdNO" isArray="false" />
    <ECID id="430101024" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA2PlaceBackCmdNO" isArray="false" />
    <ECID id="430101025" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA2PlaceCmdNO" isArray="false" />
    <ECID id="430101026" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB1PickBackCmdNO" isArray="false" />
    <ECID id="430101027" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB1PickCmdNO" isArray="false" />
    <ECID id="430101028" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB1PlaceBackCmdNO" isArray="false" />
    <ECID id="430101029" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB1PlaceCmdNO" isArray="false" />
    <ECID id="430101030" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB2PickBackCmdNO" isArray="false" />
    <ECID id="430101031" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB2PickCmdNO" isArray="false" />
    <ECID id="430101032" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB2PlaceBackCmdNO" isArray="false" />
    <ECID id="430101033" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB2PlaceCmdNO" isArray="false" />
    <ECID id="430101034" valueType="Ascii" logicalName="TM.TMRobot.PickTimeout" value="" min="" max="" eventTrigger="" units="" description="Pick Timeout" isArray="false" />
    <ECID id="430101035" valueType="Ascii" logicalName="TM.TMRobot.PlaceTimeout" value="" min="" max="" eventTrigger="" units="" description="Place Timeout" isArray="false" />
    <ECID id="430101036" valueType="Ascii" logicalName="TM.TMRobot.PortName" value="" min="" max="" eventTrigger="" units="" description="LP COM串口地址" isArray="false" />
    <ECID id="430101037" valueType="Ascii" logicalName="TM.TMRobot.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="430101038" valueType="Ascii" logicalName="TM.TMRobot.RobotSpeed" value="" min="" max="" eventTrigger="" units="" description="Robot速度" isArray="false" />
    <ECID id="430101039" valueType="Ascii" logicalName="TM.TMRobot.SlotCount" value="" min="" max="" eventTrigger="" units="" description="SlotCount" isArray="false" />
    <ECID id="430101040" valueType="Ascii" logicalName="TM.TMRobot.SpeedLevel" value="" min="" max="" eventTrigger="" units="" description="SpeedLevel" isArray="false" />
    <ECID id="430101041" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForExchangeWafer" value="" min="" max="" eventTrigger="" units="" description="Exchange命令超时设定" isArray="false" />
    <ECID id="430101042" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForPickWafer" value="" min="" max="" eventTrigger="" units="" description="Pick命令超时设定" isArray="false" />
    <ECID id="430101043" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForPlaceWafer" value="" min="" max="" eventTrigger="" units="" description="Place命令超时设定" isArray="false" />
    <ECID id="430101044" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitRobotCommand" value="" min="" max="" eventTrigger="" units="" description="Robot命令超时设定" isArray="false" />
    <ECID id="430101045" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitRobotHome" value="" min="" max="" eventTrigger="" units="" description="Robot回原点命令超时设定" isArray="false" />
    <ECID id="430101046" valueType="Ascii" logicalName="TM.TMRobot.UnitNumber" value="" min="" max="" eventTrigger="" units="" description="UnitNumber" isArray="false" />
    <ECID id="430101047" valueType="Ascii" logicalName="TM.TMRobot.UpperBladeEnable" value="" min="" max="" eventTrigger="" units="" description="Upper Blade Enable" isArray="false" />
    <ECID id="430101048" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLAPickCmdNO" isArray="false" />
    <ECID id="430101049" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLAPlaceCmdNO" isArray="false" />
    <ECID id="430101050" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLBPickCmdNO" isArray="false" />
    <ECID id="430101051" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLBPlaceCmdNO" isArray="false" />
    <ECID id="430101052" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA1PickBackCmdNO" isArray="false" />
    <ECID id="430101053" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA1PickCmdNO" isArray="false" />
    <ECID id="430101054" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA1PlaceBackCmdNO" isArray="false" />
    <ECID id="430101055" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA1PlaceCmdNO" isArray="false" />
    <ECID id="430101056" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA2PickBackCmdNO" isArray="false" />
    <ECID id="430101057" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA2PickCmdNO" isArray="false" />
    <ECID id="430101058" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA2PlaceBackCmdNO" isArray="false" />
    <ECID id="430101059" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA2PlaceCmdNO" isArray="false" />
    <ECID id="430101060" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB1PickBackCmdNO" isArray="false" />
    <ECID id="430101061" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB1PickCmdNO" isArray="false" />
    <ECID id="430101062" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB1PlaceBackCmdNO" isArray="false" />
    <ECID id="430101063" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB1PlaceCmdNO" isArray="false" />
    <ECID id="430101064" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB2PickBackCmdNO" isArray="false" />
    <ECID id="430101065" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB2PickCmdNO" isArray="false" />
    <ECID id="430101066" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceBackCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB2PlaceBackCmdNO" isArray="false" />
    <ECID id="430101067" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB2PlaceCmdNO" isArray="false" />
    <ECID id="430101068" valueType="Ascii" logicalName="TM.TMRobot.GotoTimeout" value="" min="" max="" eventTrigger="" units="" description="Goto Timeout" isArray="false" />
    <ECID id="430101069" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA1PickCmdNO" isArray="false" />
    <ECID id="430101070" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA1PickReadyCmdNO" isArray="false" />
    <ECID id="430101071" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA1PlaceCmdNO" isArray="false" />
    <ECID id="430101072" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101073" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA2PickCmdNO" isArray="false" />
    <ECID id="430101074" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA2PickReadyCmdNO" isArray="false" />
    <ECID id="430101075" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA2PlaceCmdNO" isArray="false" />
    <ECID id="430101076" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101077" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA3PickCmdNO" isArray="false" />
    <ECID id="430101078" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA3PickReadyCmdNO" isArray="false" />
    <ECID id="430101079" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA3PlaceCmdNO" isArray="false" />
    <ECID id="430101080" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA3PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101081" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA4PickCmdNO" isArray="false" />
    <ECID id="430101082" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA4PickReadyCmdNO" isArray="false" />
    <ECID id="430101083" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA4PlaceCmdNO" isArray="false" />
    <ECID id="430101084" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA4PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101085" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA5PickCmdNO" isArray="false" />
    <ECID id="430101086" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA5PickReadyCmdNO" isArray="false" />
    <ECID id="430101087" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA5PlaceCmdNO" isArray="false" />
    <ECID id="430101088" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA5PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101089" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA6PickCmdNO" isArray="false" />
    <ECID id="430101090" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA6PickReadyCmdNO" isArray="false" />
    <ECID id="430101091" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA6PlaceCmdNO" isArray="false" />
    <ECID id="430101092" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA6PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101093" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA7PickCmdNO" isArray="false" />
    <ECID id="430101094" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA7PickReadyCmdNO" isArray="false" />
    <ECID id="430101095" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA7PlaceCmdNO" isArray="false" />
    <ECID id="430101096" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA7PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101097" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA8PickCmdNO" isArray="false" />
    <ECID id="430101098" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA8PickReadyCmdNO" isArray="false" />
    <ECID id="430101099" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA8PlaceCmdNO" isArray="false" />
    <ECID id="430101100" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLA8PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101101" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLAPickReadyCmdNO" isArray="false" />
    <ECID id="430101102" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLAPlaceReadyCmdNO" isArray="false" />
    <ECID id="430101103" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB1PickCmdNO" isArray="false" />
    <ECID id="430101104" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB1PickReadyCmdNO" isArray="false" />
    <ECID id="430101105" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB1PlaceCmdNO" isArray="false" />
    <ECID id="430101106" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101107" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB2PickCmdNO" isArray="false" />
    <ECID id="430101108" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB2PickReadyCmdNO" isArray="false" />
    <ECID id="430101109" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB2PlaceCmdNO" isArray="false" />
    <ECID id="430101110" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101111" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB3PickCmdNO" isArray="false" />
    <ECID id="430101112" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB3PickReadyCmdNO" isArray="false" />
    <ECID id="430101113" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB3PlaceCmdNO" isArray="false" />
    <ECID id="430101114" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB3PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101115" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB4PickCmdNO" isArray="false" />
    <ECID id="430101116" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB4PickReadyCmdNO" isArray="false" />
    <ECID id="430101117" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB4PlaceCmdNO" isArray="false" />
    <ECID id="430101118" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB4PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101119" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB5PickCmdNO" isArray="false" />
    <ECID id="430101120" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB5PickReadyCmdNO" isArray="false" />
    <ECID id="430101121" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB5PlaceCmdNO" isArray="false" />
    <ECID id="430101122" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB5PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101123" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB6PickCmdNO" isArray="false" />
    <ECID id="430101124" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB6PickReadyCmdNO" isArray="false" />
    <ECID id="430101125" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB6PlaceCmdNO" isArray="false" />
    <ECID id="430101126" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB6PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101127" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB7PickCmdNO" isArray="false" />
    <ECID id="430101128" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB7PickReadyCmdNO" isArray="false" />
    <ECID id="430101129" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB7PlaceCmdNO" isArray="false" />
    <ECID id="430101130" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB7PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101131" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB8PickCmdNO" isArray="false" />
    <ECID id="430101132" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB8PickReadyCmdNO" isArray="false" />
    <ECID id="430101133" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB8PlaceCmdNO" isArray="false" />
    <ECID id="430101134" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLB8PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101135" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLBPickReadyCmdNO" isArray="false" />
    <ECID id="430101136" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerLLBPlaceReadyCmdNO" isArray="false" />
    <ECID id="430101137" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA1PickReadyCmdNO" isArray="false" />
    <ECID id="430101138" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101139" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA2PickReadyCmdNO" isArray="false" />
    <ECID id="430101140" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMA2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101141" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB1PickReadyCmdNO" isArray="false" />
    <ECID id="430101142" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101143" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB2PickReadyCmdNO" isArray="false" />
    <ECID id="430101144" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="LowerPMB2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101145" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA1PickCmdNO" isArray="false" />
    <ECID id="430101146" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA1PickReadyCmdNO" isArray="false" />
    <ECID id="430101147" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA1PlaceCmdNO" isArray="false" />
    <ECID id="430101148" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101149" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA2PickCmdNO" isArray="false" />
    <ECID id="430101150" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA2PickReadyCmdNO" isArray="false" />
    <ECID id="430101151" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA2PlaceCmdNO" isArray="false" />
    <ECID id="430101152" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101153" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA3PickCmdNO" isArray="false" />
    <ECID id="430101154" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA3PickReadyCmdNO" isArray="false" />
    <ECID id="430101155" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA3PlaceCmdNO" isArray="false" />
    <ECID id="430101156" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA3PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101157" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA4PickCmdNO" isArray="false" />
    <ECID id="430101158" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA4PickReadyCmdNO" isArray="false" />
    <ECID id="430101159" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA4PlaceCmdNO" isArray="false" />
    <ECID id="430101160" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA4PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101161" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA5PickCmdNO" isArray="false" />
    <ECID id="430101162" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA5PickReadyCmdNO" isArray="false" />
    <ECID id="430101163" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA5PlaceCmdNO" isArray="false" />
    <ECID id="430101164" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA5PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101165" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA6PickCmdNO" isArray="false" />
    <ECID id="430101166" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA6PickReadyCmdNO" isArray="false" />
    <ECID id="430101167" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA6PlaceCmdNO" isArray="false" />
    <ECID id="430101168" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA6PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101169" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA7PickCmdNO" isArray="false" />
    <ECID id="430101170" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA7PickReadyCmdNO" isArray="false" />
    <ECID id="430101171" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA7PlaceCmdNO" isArray="false" />
    <ECID id="430101172" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA7PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101173" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA8PickCmdNO" isArray="false" />
    <ECID id="430101174" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA8PickReadyCmdNO" isArray="false" />
    <ECID id="430101175" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA8PlaceCmdNO" isArray="false" />
    <ECID id="430101176" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLA8PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101177" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLAPickReadyCmdNO" isArray="false" />
    <ECID id="430101178" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLAPlaceReadyCmdNO" isArray="false" />
    <ECID id="430101179" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB1PickCmdNO" isArray="false" />
    <ECID id="430101180" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB1PickReadyCmdNO" isArray="false" />
    <ECID id="430101181" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB1PlaceCmdNO" isArray="false" />
    <ECID id="430101182" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101183" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB2PickCmdNO" isArray="false" />
    <ECID id="430101184" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB2PickReadyCmdNO" isArray="false" />
    <ECID id="430101185" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB2PlaceCmdNO" isArray="false" />
    <ECID id="430101186" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101187" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB3PickCmdNO" isArray="false" />
    <ECID id="430101188" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB3PickReadyCmdNO" isArray="false" />
    <ECID id="430101189" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB3PlaceCmdNO" isArray="false" />
    <ECID id="430101190" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB3PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101191" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB4PickCmdNO" isArray="false" />
    <ECID id="430101192" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB4PickReadyCmdNO" isArray="false" />
    <ECID id="430101193" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB4PlaceCmdNO" isArray="false" />
    <ECID id="430101194" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB4PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101195" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB5PickCmdNO" isArray="false" />
    <ECID id="430101196" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB5PickReadyCmdNO" isArray="false" />
    <ECID id="430101197" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB5PlaceCmdNO" isArray="false" />
    <ECID id="430101198" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB5PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101199" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB6PickCmdNO" isArray="false" />
    <ECID id="430101200" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB6PickReadyCmdNO" isArray="false" />
    <ECID id="430101201" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB6PlaceCmdNO" isArray="false" />
    <ECID id="430101202" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB6PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101203" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB7PickCmdNO" isArray="false" />
    <ECID id="430101204" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB7PickReadyCmdNO" isArray="false" />
    <ECID id="430101205" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB7PlaceCmdNO" isArray="false" />
    <ECID id="430101206" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB7PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101207" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PickCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB8PickCmdNO" isArray="false" />
    <ECID id="430101208" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB8PickReadyCmdNO" isArray="false" />
    <ECID id="430101209" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PlaceCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB8PlaceCmdNO" isArray="false" />
    <ECID id="430101210" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLB8PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101211" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLBPickReadyCmdNO" isArray="false" />
    <ECID id="430101212" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperLLBPlaceReadyCmdNO" isArray="false" />
    <ECID id="430101213" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA1PickReadyCmdNO" isArray="false" />
    <ECID id="430101214" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101215" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA2PickReadyCmdNO" isArray="false" />
    <ECID id="430101216" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMA2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101217" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB1PickReadyCmdNO" isArray="false" />
    <ECID id="430101218" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB1PlaceReadyCmdNO" isArray="false" />
    <ECID id="430101219" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB2PickReadyCmdNO" isArray="false" />
    <ECID id="430101220" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceReadyCmdNO" value="" min="" max="" eventTrigger="" units="" description="UpperPMB2PlaceReadyCmdNO" isArray="false" />
    <ECID id="430202001" valueType="Ascii" logicalName="TM.FFU.Address" value="" min="" max="" eventTrigger="" units="" description="FFU COM串口地址" isArray="false" />
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    <ECID id="430202004" valueType="Ascii" logicalName="TM.FFU.MaxSpeed" value="" min="" max="" eventTrigger="" units="" description="最高转速" isArray="false" />
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    <ECID id="620101004" valueType="Ascii" logicalName="PMA.BiasRf1.EnableBiasRF" value="" min="" max="" eventTrigger="" units="" description="enable bias RF or not" isArray="false" />
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    <ECID id="620101007" valueType="Ascii" logicalName="PMA.BiasRf1.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101008" valueType="Ascii" logicalName="PMA.BiasRf1.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620101019" valueType="Ascii" logicalName="PMA.BiasRf1.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101020" valueType="Ascii" logicalName="PMA.BiasRf1.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101021" valueType="Ascii" logicalName="PMA.BiasRf1.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101022" valueType="Ascii" logicalName="PMA.BiasRf1.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101023" valueType="Ascii" logicalName="PMA.BiasRf1.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620101025" valueType="Ascii" logicalName="PMA.BiasRf1.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101026" valueType="Ascii" logicalName="PMA.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101027" valueType="Ascii" logicalName="PMA.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620101028" valueType="Ascii" logicalName="PMA.BiasRf1.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620202002" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620202003" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable bias match or not" isArray="false" />
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    <ECID id="620202006" valueType="Ascii" logicalName="PMA.BiasRf1Match.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="620202007" valueType="Ascii" logicalName="PMA.BiasRf1Match.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="620202008" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620203002" valueType="Ascii" logicalName="PMA.BiasRf2.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203003" valueType="Ascii" logicalName="PMA.BiasRf2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="620203004" valueType="Ascii" logicalName="PMA.BiasRf2.EnableBiasRF" value="" min="" max="" eventTrigger="" units="" description="enable bias RF or not" isArray="false" />
    <ECID id="620203005" valueType="Ascii" logicalName="PMA.BiasRf2.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203006" valueType="Ascii" logicalName="PMA.BiasRf2.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203007" valueType="Ascii" logicalName="PMA.BiasRf2.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203008" valueType="Ascii" logicalName="PMA.BiasRf2.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203009" valueType="Ascii" logicalName="PMA.BiasRf2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="620203010" valueType="Ascii" logicalName="PMA.BiasRf2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="620203011" valueType="Ascii" logicalName="PMA.BiasRf2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="620203012" valueType="Ascii" logicalName="PMA.BiasRf2.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203013" valueType="Ascii" logicalName="PMA.BiasRf2.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203014" valueType="Ascii" logicalName="PMA.BiasRf2.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203015" valueType="Ascii" logicalName="PMA.BiasRf2.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203016" valueType="Ascii" logicalName="PMA.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203017" valueType="Ascii" logicalName="PMA.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203018" valueType="Ascii" logicalName="PMA.BiasRf2.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203019" valueType="Ascii" logicalName="PMA.BiasRf2.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203020" valueType="Ascii" logicalName="PMA.BiasRf2.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203021" valueType="Ascii" logicalName="PMA.BiasRf2.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203022" valueType="Ascii" logicalName="PMA.BiasRf2.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203023" valueType="Ascii" logicalName="PMA.BiasRf2.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203024" valueType="Ascii" logicalName="PMA.BiasRf2.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203025" valueType="Ascii" logicalName="PMA.BiasRf2.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203026" valueType="Ascii" logicalName="PMA.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203027" valueType="Ascii" logicalName="PMA.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620203028" valueType="Ascii" logicalName="PMA.BiasRf2.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620204002" valueType="Ascii" logicalName="PMA.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620204005" valueType="Ascii" logicalName="PMA.BiasRf2Match.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620205007" valueType="Ascii" logicalName="PMA.CheckChamberTempTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620205008" valueType="Ascii" logicalName="PMA.EnableThrottleValve" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620205011" valueType="Ascii" logicalName="PMA.GasFlowPressureAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="620205018" valueType="Ascii" logicalName="PMA.OpenGasValveTimeout" value="" min="" max="" eventTrigger="" units="" description="开阀超时" isArray="false" />
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    <ECID id="620205035" valueType="Ascii" logicalName="PMA.CloseDoorDelay" value="" min="" max="" eventTrigger="" units="" description=" Close Chamber Door Delay Time" isArray="false" />
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    <ECID id="620206008" valueType="Ascii" logicalName="PMA.Chiller1.EnableToleranceAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Tolerance Alarm" isArray="false" />
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    <ECID id="620206010" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Time" isArray="false" />
    <ECID id="620206011" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceWarningRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Range" isArray="false" />
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    <ECID id="620207001" valueType="Ascii" logicalName="PMA.Chiller2.ChillerTemperatureOffset" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620207002" valueType="Ascii" logicalName="PMA.Chiller2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="620207003" valueType="Ascii" logicalName="PMA.Chiller2.EnableChiller" value="" min="" max="" eventTrigger="" units="" description="enable chiller or not" isArray="false" />
    <ECID id="620207004" valueType="Ascii" logicalName="PMA.Chiller2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:SMC;" isArray="false" />
    <ECID id="620207005" valueType="Ascii" logicalName="PMA.Chiller2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
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    <ECID id="620207007" valueType="Ascii" logicalName="PMA.Chiller2.SetPointLimitMin" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620207008" valueType="Ascii" logicalName="PMA.Chiller2.EnableToleranceAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Tolerance Alarm" isArray="false" />
    <ECID id="620207009" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Range" isArray="false" />
    <ECID id="620207010" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Time" isArray="false" />
    <ECID id="620207011" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceWarningRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Range" isArray="false" />
    <ECID id="620207012" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceWarningTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Time" isArray="false" />
    <ECID id="620208001" valueType="Ascii" logicalName="PMA.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620208002" valueType="Ascii" logicalName="PMA.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620208003" valueType="Ascii" logicalName="PMA.DryPump.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="620208004" valueType="Ascii" logicalName="PMA.DryPump.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:Sky; 2:Edwards" isArray="false" />
    <ECID id="620208005" valueType="Ascii" logicalName="PMA.DryPump.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
    <ECID id="620208006" valueType="Ascii" logicalName="PMA.DryPump.NeedUpdateComm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620209001" valueType="Ascii" logicalName="PMA.ElectrodeHeart1.Heart" value="" min="" max="" eventTrigger="" units="" description="Electrode Heart" isArray="false" />
    <ECID id="620210001" valueType="Ascii" logicalName="PMA.ElectrodeHeart2.Heart" value="" min="" max="" eventTrigger="" units="" description="Electrode Heart" isArray="false" />
    <ECID id="620211001" valueType="Ascii" logicalName="PMA.EPD.ChannelNumber" value="" min="" max="" eventTrigger="" units="" description="channel number" isArray="false" />
    <ECID id="620211002" valueType="Ascii" logicalName="PMA.EPD.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="620212001" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_1" value="" min="" max="" eventTrigger="" units="" description="补偿值 1" isArray="false" />
    <ECID id="620212002" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_2" value="" min="" max="" eventTrigger="" units="" description="补偿值 2" isArray="false" />
    <ECID id="620212003" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_3" value="" min="" max="" eventTrigger="" units="" description="补偿值 3" isArray="false" />
    <ECID id="620212004" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_4" value="" min="" max="" eventTrigger="" units="" description="补偿值 4" isArray="false" />
    <ECID id="620212005" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_5" value="" min="" max="" eventTrigger="" units="" description="补偿值 5" isArray="false" />
    <ECID id="620212006" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_6" value="" min="" max="" eventTrigger="" units="" description="补偿值 6" isArray="false" />
    <ECID id="620212007" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_7" value="" min="" max="" eventTrigger="" units="" description="补偿值 7" isArray="false" />
    <ECID id="620212008" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_8" value="" min="" max="" eventTrigger="" units="" description="补偿值 8" isArray="false" />
    <ECID id="620212009" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_9" value="" min="" max="" eventTrigger="" units="" description="补偿值 9" isArray="false" />
    <ECID id="620212010" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 1" isArray="false" />
    <ECID id="620212011" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 2" isArray="false" />
    <ECID id="620212012" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 3" isArray="false" />
    <ECID id="620212013" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 4" isArray="false" />
    <ECID id="620212014" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 5" isArray="false" />
    <ECID id="620212015" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 6" isArray="false" />
    <ECID id="620212016" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 7" isArray="false" />
    <ECID id="620212017" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 8" isArray="false" />
    <ECID id="620212018" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 9" isArray="false" />
    <ECID id="620212019" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620212020" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620212021" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterEnableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620212022" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620212023" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620213001" valueType="Ascii" logicalName="PMA.IdleClean.IdleCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="Purge recipe name" isArray="false" />
    <ECID id="620213002" valueType="Ascii" logicalName="PMA.IdleClean.IdleCleanTime" value="" min="" max="" eventTrigger="" units="" description="Idle seconds after which run purge" isArray="false" />
    <ECID id="620213003" valueType="Ascii" logicalName="PMA.IdleClean.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="620214001" valueType="Ascii" logicalName="PMA.JobClean.CompleteJobCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="complete job clean recipe name" isArray="false" />
    <ECID id="620214002" valueType="Ascii" logicalName="PMA.JobClean.EnableCompleteJobClean" value="" min="" max="" eventTrigger="" units="" description="Enable Complete Job Clean" isArray="false" />
    <ECID id="620214003" valueType="Ascii" logicalName="PMA.JobClean.EnablePreJobClean" value="" min="" max="" eventTrigger="" units="" description="Enable PreJob Clean" isArray="false" />
    <ECID id="620214004" valueType="Ascii" logicalName="PMA.JobClean.IdleCleanTime" value="" min="" max="" eventTrigger="" units="" description="Idle seconds after which run purge" isArray="false" />
    <ECID id="620214005" valueType="Ascii" logicalName="PMA.JobClean.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="620214006" valueType="Ascii" logicalName="PMA.JobClean.PreJobCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="pre job clean recipe name" isArray="false" />
    <ECID id="620215001" valueType="Ascii" logicalName="PMA.match1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="620215002" valueType="Ascii" logicalName="PMA.match1.EnableC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620215003" valueType="Ascii" logicalName="PMA.match1.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable match or not" isArray="false" />
    <ECID id="620215004" valueType="Ascii" logicalName="PMA.match1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="620215005" valueType="Ascii" logicalName="PMA.match1.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620215006" valueType="Ascii" logicalName="PMA.match1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="620215007" valueType="Ascii" logicalName="PMA.match1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="620216001" valueType="Ascii" logicalName="PMA.match2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="620216002" valueType="Ascii" logicalName="PMA.match2.EnableC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620216003" valueType="Ascii" logicalName="PMA.match2.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable match or not" isArray="false" />
    <ECID id="620216004" valueType="Ascii" logicalName="PMA.match2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="620216005" valueType="Ascii" logicalName="PMA.match2.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620216006" valueType="Ascii" logicalName="PMA.match2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="620216007" valueType="Ascii" logicalName="PMA.match2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="620217001" valueType="Ascii" logicalName="PMA.MfcGas1.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="620217002" valueType="Ascii" logicalName="PMA.MfcGas1.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 1 or not" isArray="false" />
    <ECID id="620217003" valueType="Ascii" logicalName="PMA.MfcGas1.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="620217004" valueType="Ascii" logicalName="PMA.MfcGas1.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.1 gas stick" isArray="false" />
    <ECID id="620217005" valueType="Ascii" logicalName="PMA.MfcGas1.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620217006" valueType="Ascii" logicalName="PMA.MfcGas1.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620217007" valueType="Ascii" logicalName="PMA.MfcGas1.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620217008" valueType="Ascii" logicalName="PMA.MfcGas1.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="620217009" valueType="Ascii" logicalName="PMA.MfcGas1.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="620217010" valueType="Ascii" logicalName="PMA.MfcGas1.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620217011" valueType="Ascii" logicalName="PMA.MfcGas1.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620218001" valueType="Ascii" logicalName="PMA.MfcGas2.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="620218002" valueType="Ascii" logicalName="PMA.MfcGas2.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 2 or not" isArray="false" />
    <ECID id="620218003" valueType="Ascii" logicalName="PMA.MfcGas2.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="620218004" valueType="Ascii" logicalName="PMA.MfcGas2.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.2 gas stick" isArray="false" />
    <ECID id="620218005" valueType="Ascii" logicalName="PMA.MfcGas2.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620218006" valueType="Ascii" logicalName="PMA.MfcGas2.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620218007" valueType="Ascii" logicalName="PMA.MfcGas2.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620218008" valueType="Ascii" logicalName="PMA.MfcGas2.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="620218009" valueType="Ascii" logicalName="PMA.MfcGas2.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="620218010" valueType="Ascii" logicalName="PMA.MfcGas2.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620218011" valueType="Ascii" logicalName="PMA.MfcGas2.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620219001" valueType="Ascii" logicalName="PMA.MfcGas3.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="620219002" valueType="Ascii" logicalName="PMA.MfcGas3.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 3 or not" isArray="false" />
    <ECID id="620219003" valueType="Ascii" logicalName="PMA.MfcGas3.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="620219004" valueType="Ascii" logicalName="PMA.MfcGas3.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.3 gas stick" isArray="false" />
    <ECID id="620219005" valueType="Ascii" logicalName="PMA.MfcGas3.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620219006" valueType="Ascii" logicalName="PMA.MfcGas3.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620219007" valueType="Ascii" logicalName="PMA.MfcGas3.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620219008" valueType="Ascii" logicalName="PMA.MfcGas3.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="620219009" valueType="Ascii" logicalName="PMA.MfcGas3.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="620219010" valueType="Ascii" logicalName="PMA.MfcGas3.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620219011" valueType="Ascii" logicalName="PMA.MfcGas3.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620220001" valueType="Ascii" logicalName="PMA.MfcGas4.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="620220002" valueType="Ascii" logicalName="PMA.MfcGas4.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 4 or not" isArray="false" />
    <ECID id="620220003" valueType="Ascii" logicalName="PMA.MfcGas4.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="620220004" valueType="Ascii" logicalName="PMA.MfcGas4.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.4 gas stick" isArray="false" />
    <ECID id="620220005" valueType="Ascii" logicalName="PMA.MfcGas4.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="620220006" valueType="Ascii" logicalName="PMA.MfcGas4.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="620220007" valueType="Ascii" logicalName="PMA.MfcGas4.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="620220008" valueType="Ascii" logicalName="PMA.MfcGas4.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="620220009" valueType="Ascii" logicalName="PMA.MfcGas4.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="620220010" valueType="Ascii" logicalName="PMA.MfcGas4.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620220011" valueType="Ascii" logicalName="PMA.MfcGas4.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620221001" valueType="Ascii" logicalName="PMA.MfcGas5.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="620221002" valueType="Ascii" logicalName="PMA.MfcGas5.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 5 or not" isArray="false" />
    <ECID id="620221003" valueType="Ascii" logicalName="PMA.MfcGas5.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="620221004" valueType="Ascii" logicalName="PMA.MfcGas5.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.5 gas stick" isArray="false" />
    <ECID id="620221005" valueType="Ascii" logicalName="PMA.MfcGas5.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="620221006" valueType="Ascii" logicalName="PMA.MfcGas5.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="620221007" valueType="Ascii" logicalName="PMA.MfcGas5.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="620221008" valueType="Ascii" logicalName="PMA.MfcGas5.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="620221009" valueType="Ascii" logicalName="PMA.MfcGas5.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="620221010" valueType="Ascii" logicalName="PMA.MfcGas5.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620221011" valueType="Ascii" logicalName="PMA.MfcGas5.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620222001" valueType="Ascii" logicalName="PMA.MfcGas6.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="620222002" valueType="Ascii" logicalName="PMA.MfcGas6.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 6 or not" isArray="false" />
    <ECID id="620222003" valueType="Ascii" logicalName="PMA.MfcGas6.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="620222004" valueType="Ascii" logicalName="PMA.MfcGas6.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.6 gas stick" isArray="false" />
    <ECID id="620222005" valueType="Ascii" logicalName="PMA.MfcGas6.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="620222006" valueType="Ascii" logicalName="PMA.MfcGas6.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="620222007" valueType="Ascii" logicalName="PMA.MfcGas6.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="620222008" valueType="Ascii" logicalName="PMA.MfcGas6.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="620222009" valueType="Ascii" logicalName="PMA.MfcGas6.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="620222010" valueType="Ascii" logicalName="PMA.MfcGas6.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620222011" valueType="Ascii" logicalName="PMA.MfcGas6.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620223001" valueType="Ascii" logicalName="PMA.Pump.LeakCheckPumpingTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620223002" valueType="Ascii" logicalName="PMA.Pump.LeakCheckWaitTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620223003" valueType="Ascii" logicalName="PMA.Pump.LeakRate" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620223004" valueType="Ascii" logicalName="PMA.Pump.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620223005" valueType="Ascii" logicalName="PMA.Pump.PumpTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620223006" valueType="Ascii" logicalName="PMA.Pump.PumpValveDelay" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620224001" valueType="Ascii" logicalName="PMA.Purge.PurgeCycleCount" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620224002" valueType="Ascii" logicalName="PMA.Purge.PurgePumpPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620224003" valueType="Ascii" logicalName="PMA.Purge.PurgePumpStableTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620224004" valueType="Ascii" logicalName="PMA.Purge.PurgePumpTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620224005" valueType="Ascii" logicalName="PMA.Purge.PurgeVentPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620224006" valueType="Ascii" logicalName="PMA.Purge.PurgeVentStableTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620224007" valueType="Ascii" logicalName="PMA.Purge.PurgeVentTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225001" valueType="Ascii" logicalName="PMA.Rf1.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225002" valueType="Ascii" logicalName="PMA.Rf1.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225003" valueType="Ascii" logicalName="PMA.Rf1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="620225004" valueType="Ascii" logicalName="PMA.Rf1.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225005" valueType="Ascii" logicalName="PMA.Rf1.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225006" valueType="Ascii" logicalName="PMA.Rf1.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225007" valueType="Ascii" logicalName="PMA.Rf1.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225008" valueType="Ascii" logicalName="PMA.Rf1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="620225009" valueType="Ascii" logicalName="PMA.Rf1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="620225010" valueType="Ascii" logicalName="PMA.Rf1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="620225011" valueType="Ascii" logicalName="PMA.Rf1.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225012" valueType="Ascii" logicalName="PMA.Rf1.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225013" valueType="Ascii" logicalName="PMA.Rf1.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225014" valueType="Ascii" logicalName="PMA.Rf1.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225015" valueType="Ascii" logicalName="PMA.Rf1.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225016" valueType="Ascii" logicalName="PMA.Rf1.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225017" valueType="Ascii" logicalName="PMA.Rf1.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225018" valueType="Ascii" logicalName="PMA.Rf1.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225019" valueType="Ascii" logicalName="PMA.Rf1.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225020" valueType="Ascii" logicalName="PMA.Rf1.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225021" valueType="Ascii" logicalName="PMA.Rf1.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225022" valueType="Ascii" logicalName="PMA.Rf1.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225023" valueType="Ascii" logicalName="PMA.Rf1.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225024" valueType="Ascii" logicalName="PMA.Rf1.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225025" valueType="Ascii" logicalName="PMA.Rf1.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225026" valueType="Ascii" logicalName="PMA.Rf1.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620225027" valueType="Ascii" logicalName="PMA.Rf1.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226001" valueType="Ascii" logicalName="PMA.Rf2.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226002" valueType="Ascii" logicalName="PMA.Rf2.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226003" valueType="Ascii" logicalName="PMA.Rf2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="620226004" valueType="Ascii" logicalName="PMA.Rf2.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226005" valueType="Ascii" logicalName="PMA.Rf2.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226006" valueType="Ascii" logicalName="PMA.Rf2.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226007" valueType="Ascii" logicalName="PMA.Rf2.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226008" valueType="Ascii" logicalName="PMA.Rf2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="620226009" valueType="Ascii" logicalName="PMA.Rf2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="620226010" valueType="Ascii" logicalName="PMA.Rf2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="620226011" valueType="Ascii" logicalName="PMA.Rf2.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226012" valueType="Ascii" logicalName="PMA.Rf2.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226013" valueType="Ascii" logicalName="PMA.Rf2.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226014" valueType="Ascii" logicalName="PMA.Rf2.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226015" valueType="Ascii" logicalName="PMA.Rf2.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226016" valueType="Ascii" logicalName="PMA.Rf2.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226017" valueType="Ascii" logicalName="PMA.Rf2.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226018" valueType="Ascii" logicalName="PMA.Rf2.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226019" valueType="Ascii" logicalName="PMA.Rf2.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226020" valueType="Ascii" logicalName="PMA.Rf2.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226021" valueType="Ascii" logicalName="PMA.Rf2.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226022" valueType="Ascii" logicalName="PMA.Rf2.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226023" valueType="Ascii" logicalName="PMA.Rf2.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226024" valueType="Ascii" logicalName="PMA.Rf2.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226025" valueType="Ascii" logicalName="PMA.Rf2.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226026" valueType="Ascii" logicalName="PMA.Rf2.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620226027" valueType="Ascii" logicalName="PMA.Rf2.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227001" valueType="Ascii" logicalName="PMA.MFCVerification.ChamberVolume" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227002" valueType="Ascii" logicalName="PMA.MFCVerification.CheckStableTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227003" valueType="Ascii" logicalName="PMA.MFCVerification.FlowStableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227004" valueType="Ascii" logicalName="PMA.MFCVerification.GasFlowTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227005" valueType="Ascii" logicalName="PMA.MFCVerification.GasTemperature" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227006" valueType="Ascii" logicalName="PMA.MFCVerification.MaxDeviation" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227007" valueType="Ascii" logicalName="PMA.MFCVerification.PressureStableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620227008" valueType="Ascii" logicalName="PMA.MFCVerification.TargetPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="620228001" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_1" value="" min="" max="" eventTrigger="" units="" description="补偿值 1" isArray="false" />
    <ECID id="620228002" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_2" value="" min="" max="" eventTrigger="" units="" description="补偿值 2" isArray="false" />
    <ECID id="620228003" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_3" value="" min="" max="" eventTrigger="" units="" description="补偿值 3" isArray="false" />
    <ECID id="620228004" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_4" value="" min="" max="" eventTrigger="" units="" description="补偿值 4" isArray="false" />
    <ECID id="620228005" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_5" value="" min="" max="" eventTrigger="" units="" description="补偿值 5" isArray="false" />
    <ECID id="620228006" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_6" value="" min="" max="" eventTrigger="" units="" description="补偿值 6" isArray="false" />
    <ECID id="620228007" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_7" value="" min="" max="" eventTrigger="" units="" description="补偿值 7" isArray="false" />
    <ECID id="620228008" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_8" value="" min="" max="" eventTrigger="" units="" description="补偿值 8" isArray="false" />
    <ECID id="620228009" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_9" value="" min="" max="" eventTrigger="" units="" description="补偿值 9" isArray="false" />
    <ECID id="620228010" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_1" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 1" isArray="false" />
    <ECID id="620228011" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_2" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 2" isArray="false" />
    <ECID id="620228012" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_3" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 3" isArray="false" />
    <ECID id="620228013" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_4" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 4" isArray="false" />
    <ECID id="620228014" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_5" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 5" isArray="false" />
    <ECID id="620228015" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_6" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 6" isArray="false" />
    <ECID id="620228016" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_7" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 7" isArray="false" />
    <ECID id="620228017" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_8" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 8" isArray="false" />
    <ECID id="620228018" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_9" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 9" isArray="false" />
    <ECID id="620229001" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_1" value="" min="" max="" eventTrigger="" units="" description="补偿值 1" isArray="false" />
    <ECID id="620229002" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_2" value="" min="" max="" eventTrigger="" units="" description="补偿值 2" isArray="false" />
    <ECID id="620229003" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_3" value="" min="" max="" eventTrigger="" units="" description="补偿值 3" isArray="false" />
    <ECID id="620229004" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_4" value="" min="" max="" eventTrigger="" units="" description="补偿值 4" isArray="false" />
    <ECID id="620229005" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_5" value="" min="" max="" eventTrigger="" units="" description="补偿值 5" isArray="false" />
    <ECID id="620229006" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_6" value="" min="" max="" eventTrigger="" units="" description="补偿值 6" isArray="false" />
    <ECID id="620229007" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_7" value="" min="" max="" eventTrigger="" units="" description="补偿值 7" isArray="false" />
    <ECID id="620229008" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_8" value="" min="" max="" eventTrigger="" units="" description="补偿值 8" isArray="false" />
    <ECID id="620229009" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_9" value="" min="" max="" eventTrigger="" units="" description="补偿值 9" isArray="false" />
    <ECID id="620229010" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_1" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 1" isArray="false" />
    <ECID id="620229011" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_2" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 2" isArray="false" />
    <ECID id="620229012" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_3" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 3" isArray="false" />
    <ECID id="620229013" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_4" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 4" isArray="false" />
    <ECID id="620229014" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_5" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 5" isArray="false" />
    <ECID id="620229015" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_6" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 6" isArray="false" />
    <ECID id="620229016" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_7" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 7" isArray="false" />
    <ECID id="620229017" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_8" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 8" isArray="false" />
    <ECID id="620229018" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_9" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 9" isArray="false" />
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    <ECID id="630101003" valueType="Ascii" logicalName="PMB.BiasRf1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630101004" valueType="Ascii" logicalName="PMB.BiasRf1.EnableBiasRF" value="" min="" max="" eventTrigger="" units="" description="enable bias RF or not" isArray="false" />
    <ECID id="630101005" valueType="Ascii" logicalName="PMB.BiasRf1.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101006" valueType="Ascii" logicalName="PMB.BiasRf1.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101007" valueType="Ascii" logicalName="PMB.BiasRf1.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101008" valueType="Ascii" logicalName="PMB.BiasRf1.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101009" valueType="Ascii" logicalName="PMB.BiasRf1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630101010" valueType="Ascii" logicalName="PMB.BiasRf1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630101011" valueType="Ascii" logicalName="PMB.BiasRf1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
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    <ECID id="630101013" valueType="Ascii" logicalName="PMB.BiasRf1.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101014" valueType="Ascii" logicalName="PMB.BiasRf1.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101015" valueType="Ascii" logicalName="PMB.BiasRf1.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="630101017" valueType="Ascii" logicalName="PMB.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101018" valueType="Ascii" logicalName="PMB.BiasRf1.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101019" valueType="Ascii" logicalName="PMB.BiasRf1.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101020" valueType="Ascii" logicalName="PMB.BiasRf1.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101021" valueType="Ascii" logicalName="PMB.BiasRf1.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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    <ECID id="630101023" valueType="Ascii" logicalName="PMB.BiasRf1.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101024" valueType="Ascii" logicalName="PMB.BiasRf1.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101025" valueType="Ascii" logicalName="PMB.BiasRf1.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101026" valueType="Ascii" logicalName="PMB.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101027" valueType="Ascii" logicalName="PMB.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630101028" valueType="Ascii" logicalName="PMB.BiasRf1.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630202001" valueType="Ascii" logicalName="PMB.BiasRf1Match.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630202002" valueType="Ascii" logicalName="PMB.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630202003" valueType="Ascii" logicalName="PMB.BiasRf1Match.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable bias match or not" isArray="false" />
    <ECID id="630202004" valueType="Ascii" logicalName="PMB.BiasRf1Match.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630202005" valueType="Ascii" logicalName="PMB.BiasRf1Match.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630202006" valueType="Ascii" logicalName="PMB.BiasRf1Match.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630202007" valueType="Ascii" logicalName="PMB.BiasRf1Match.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="630203001" valueType="Ascii" logicalName="PMB.BiasRf2.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203002" valueType="Ascii" logicalName="PMB.BiasRf2.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203003" valueType="Ascii" logicalName="PMB.BiasRf2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630203004" valueType="Ascii" logicalName="PMB.BiasRf2.EnableBiasRF" value="" min="" max="" eventTrigger="" units="" description="enable bias RF or not" isArray="false" />
    <ECID id="630203005" valueType="Ascii" logicalName="PMB.BiasRf2.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203006" valueType="Ascii" logicalName="PMB.BiasRf2.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203007" valueType="Ascii" logicalName="PMB.BiasRf2.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203008" valueType="Ascii" logicalName="PMB.BiasRf2.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203009" valueType="Ascii" logicalName="PMB.BiasRf2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630203010" valueType="Ascii" logicalName="PMB.BiasRf2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630203011" valueType="Ascii" logicalName="PMB.BiasRf2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="630203012" valueType="Ascii" logicalName="PMB.BiasRf2.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203013" valueType="Ascii" logicalName="PMB.BiasRf2.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203014" valueType="Ascii" logicalName="PMB.BiasRf2.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203015" valueType="Ascii" logicalName="PMB.BiasRf2.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203016" valueType="Ascii" logicalName="PMB.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203017" valueType="Ascii" logicalName="PMB.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203018" valueType="Ascii" logicalName="PMB.BiasRf2.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203019" valueType="Ascii" logicalName="PMB.BiasRf2.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203020" valueType="Ascii" logicalName="PMB.BiasRf2.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203021" valueType="Ascii" logicalName="PMB.BiasRf2.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203022" valueType="Ascii" logicalName="PMB.BiasRf2.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203023" valueType="Ascii" logicalName="PMB.BiasRf2.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203024" valueType="Ascii" logicalName="PMB.BiasRf2.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203025" valueType="Ascii" logicalName="PMB.BiasRf2.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203026" valueType="Ascii" logicalName="PMB.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203027" valueType="Ascii" logicalName="PMB.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630203028" valueType="Ascii" logicalName="PMB.BiasRf2.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630204001" valueType="Ascii" logicalName="PMB.BiasRf2Match.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630204002" valueType="Ascii" logicalName="PMB.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630204003" valueType="Ascii" logicalName="PMB.BiasRf2Match.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable bias match or not" isArray="false" />
    <ECID id="630204004" valueType="Ascii" logicalName="PMB.BiasRf2Match.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630204005" valueType="Ascii" logicalName="PMB.BiasRf2Match.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630204006" valueType="Ascii" logicalName="PMB.BiasRf2Match.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630204007" valueType="Ascii" logicalName="PMB.BiasRf2Match.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="630205001" valueType="Ascii" logicalName="PMB.ChamberBasePressureThreshold" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205002" valueType="Ascii" logicalName="PMB.ChamberBaseTemperatureThreshold" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205003" valueType="Ascii" logicalName="PMB.ChamberHeater1SetPointLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205004" valueType="Ascii" logicalName="PMB.HeaterChamberSetPointLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205005" valueType="Ascii" logicalName="PMB.ChamberVolume" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205006" valueType="Ascii" logicalName="PMB.CheckATMTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205007" valueType="Ascii" logicalName="PMB.CheckChamberTempTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205008" valueType="Ascii" logicalName="PMB.EnableThrottleValve" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205009" valueType="Ascii" logicalName="PMB.ForeLineHeaterSetPointLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205010" valueType="Ascii" logicalName="PMB.GasFlowPressureAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205011" valueType="Ascii" logicalName="PMB.GasFlowPressureAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205012" valueType="Ascii" logicalName="PMB.GasFlowTimeInMFCVerification" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205013" valueType="Ascii" logicalName="PMB.GasTemperature" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205014" valueType="Ascii" logicalName="PMB.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="630205015" valueType="Ascii" logicalName="PMB.LEHeaterSetPointLimit1" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205016" valueType="Ascii" logicalName="PMB.LEHeaterSetPointLimit2" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205017" valueType="Ascii" logicalName="PMB.OpenCloseSlitValveTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205018" valueType="Ascii" logicalName="PMB.OpenGasValveTimeout" value="" min="" max="" eventTrigger="" units="" description="开阀超时" isArray="false" />
    <ECID id="630205019" valueType="Ascii" logicalName="PMB.PlaceAndPickDelayTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205020" valueType="Ascii" logicalName="PMB.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="630205021" valueType="Ascii" logicalName="PMB.PrepareTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PrepareTransfer Timeout" isArray="false" />
    <ECID id="630205022" valueType="Ascii" logicalName="PMB.ProcessPressureOffset" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205023" valueType="Ascii" logicalName="PMB.TargetPressureInMFCVerification" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205024" valueType="Ascii" logicalName="PMB.TimeLimitOfCloseGasValve" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205025" valueType="Ascii" logicalName="PMB.VentTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205026" valueType="Ascii" logicalName="PMB.VentTimeDelay" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205027" valueType="Ascii" logicalName="PMB.EnableChamberWallHeater" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205028" valueType="Ascii" logicalName="PMB.GasFlowPressureWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205029" valueType="Ascii" logicalName="PMB.GasFlowPressureWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205030" valueType="Ascii" logicalName="PMB.RecipeToleranceIgnoreTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205031" valueType="Ascii" logicalName="PMB.ProcessPressureAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205032" valueType="Ascii" logicalName="PMB.ProcessPressureAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205033" valueType="Ascii" logicalName="PMB.ProcessPressureWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205034" valueType="Ascii" logicalName="PMB.ProcessPressureWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630205035" valueType="Ascii" logicalName="PMB.CloseDoorDelay" value="" min="" max="" eventTrigger="" units="" description=" Close Chamber Door Delay Time" isArray="false" />
    <ECID id="630206001" valueType="Ascii" logicalName="PMB.Chiller1.ChillerTemperatureOffset" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630206002" valueType="Ascii" logicalName="PMB.Chiller1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630206003" valueType="Ascii" logicalName="PMB.Chiller1.EnableChiller" value="" min="" max="" eventTrigger="" units="" description="enable chiller or not" isArray="false" />
    <ECID id="630206004" valueType="Ascii" logicalName="PMB.Chiller1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:SMC;" isArray="false" />
    <ECID id="630206005" valueType="Ascii" logicalName="PMB.Chiller1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
    <ECID id="630206006" valueType="Ascii" logicalName="PMB.Chiller1.SetPointLimitMax" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630206007" valueType="Ascii" logicalName="PMB.Chiller1.SetPointLimitMin" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630206008" valueType="Ascii" logicalName="PMB.Chiller1.EnableToleranceAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Tolerance Alarm" isArray="false" />
    <ECID id="630206009" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Range" isArray="false" />
    <ECID id="630206010" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Time" isArray="false" />
    <ECID id="630206011" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceWarningRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Range" isArray="false" />
    <ECID id="630206012" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceWarningTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Time" isArray="false" />
    <ECID id="630207001" valueType="Ascii" logicalName="PMB.Chiller2.ChillerTemperatureOffset" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630207002" valueType="Ascii" logicalName="PMB.Chiller2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630207003" valueType="Ascii" logicalName="PMB.Chiller2.EnableChiller" value="" min="" max="" eventTrigger="" units="" description="enable chiller or not" isArray="false" />
    <ECID id="630207004" valueType="Ascii" logicalName="PMB.Chiller2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:SMC;" isArray="false" />
    <ECID id="630207005" valueType="Ascii" logicalName="PMB.Chiller2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
    <ECID id="630207006" valueType="Ascii" logicalName="PMB.Chiller2.SetPointLimitMax" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630207007" valueType="Ascii" logicalName="PMB.Chiller2.SetPointLimitMin" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630207008" valueType="Ascii" logicalName="PMB.Chiller2.EnableToleranceAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Tolerance Alarm" isArray="false" />
    <ECID id="630207009" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Range" isArray="false" />
    <ECID id="630207010" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Time" isArray="false" />
    <ECID id="630207011" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceWarningRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Range" isArray="false" />
    <ECID id="630207012" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceWarningTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Time" isArray="false" />
    <ECID id="630208001" valueType="Ascii" logicalName="PMB.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630208002" valueType="Ascii" logicalName="PMB.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630208003" valueType="Ascii" logicalName="PMB.DryPump.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630208004" valueType="Ascii" logicalName="PMB.DryPump.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:Sky; 2:Edwards" isArray="false" />
    <ECID id="630208005" valueType="Ascii" logicalName="PMB.DryPump.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
    <ECID id="630208006" valueType="Ascii" logicalName="PMB.DryPump.NeedUpdateComm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630209001" valueType="Ascii" logicalName="PMB.ElectrodeHeart1.Heart" value="" min="" max="" eventTrigger="" units="" description="Electrode Heart" isArray="false" />
    <ECID id="630210001" valueType="Ascii" logicalName="PMB.ElectrodeHeart2.Heart" value="" min="" max="" eventTrigger="" units="" description="Electrode Heart" isArray="false" />
    <ECID id="630211001" valueType="Ascii" logicalName="PMB.EPD.ChannelNumber" value="" min="" max="" eventTrigger="" units="" description="channel number" isArray="false" />
    <ECID id="630211002" valueType="Ascii" logicalName="PMB.EPD.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="630212001" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_1" value="" min="" max="" eventTrigger="" units="" description="补偿值 1" isArray="false" />
    <ECID id="630212002" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_2" value="" min="" max="" eventTrigger="" units="" description="补偿值 2" isArray="false" />
    <ECID id="630212003" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_3" value="" min="" max="" eventTrigger="" units="" description="补偿值 3" isArray="false" />
    <ECID id="630212004" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_4" value="" min="" max="" eventTrigger="" units="" description="补偿值 4" isArray="false" />
    <ECID id="630212005" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_5" value="" min="" max="" eventTrigger="" units="" description="补偿值 5" isArray="false" />
    <ECID id="630212006" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_6" value="" min="" max="" eventTrigger="" units="" description="补偿值 6" isArray="false" />
    <ECID id="630212007" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_7" value="" min="" max="" eventTrigger="" units="" description="补偿值 7" isArray="false" />
    <ECID id="630212008" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_8" value="" min="" max="" eventTrigger="" units="" description="补偿值 8" isArray="false" />
    <ECID id="630212009" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_9" value="" min="" max="" eventTrigger="" units="" description="补偿值 9" isArray="false" />
    <ECID id="630212010" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 1" isArray="false" />
    <ECID id="630212011" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 2" isArray="false" />
    <ECID id="630212012" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 3" isArray="false" />
    <ECID id="630212013" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 4" isArray="false" />
    <ECID id="630212014" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 5" isArray="false" />
    <ECID id="630212015" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 6" isArray="false" />
    <ECID id="630212016" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 7" isArray="false" />
    <ECID id="630212017" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 8" isArray="false" />
    <ECID id="630212018" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 9" isArray="false" />
    <ECID id="630212019" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630212020" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630212021" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterEnableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630212022" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630212023" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630213001" valueType="Ascii" logicalName="PMB.IdleClean.IdleCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="Purge recipe name" isArray="false" />
    <ECID id="630213002" valueType="Ascii" logicalName="PMB.IdleClean.IdleCleanTime" value="" min="" max="" eventTrigger="" units="" description="Idle seconds after which run purge" isArray="false" />
    <ECID id="630213003" valueType="Ascii" logicalName="PMB.IdleClean.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="630214001" valueType="Ascii" logicalName="PMB.JobClean.CompleteJobCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="complete job clean recipe name" isArray="false" />
    <ECID id="630214002" valueType="Ascii" logicalName="PMB.JobClean.EnableCompleteJobClean" value="" min="" max="" eventTrigger="" units="" description="Enable Complete Job Clean" isArray="false" />
    <ECID id="630214003" valueType="Ascii" logicalName="PMB.JobClean.EnablePreJobClean" value="" min="" max="" eventTrigger="" units="" description="Enable PreJob Clean" isArray="false" />
    <ECID id="630214004" valueType="Ascii" logicalName="PMB.JobClean.IdleCleanTime" value="" min="" max="" eventTrigger="" units="" description="Idle seconds after which run purge" isArray="false" />
    <ECID id="630214005" valueType="Ascii" logicalName="PMB.JobClean.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="630214006" valueType="Ascii" logicalName="PMB.JobClean.PreJobCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="pre job clean recipe name" isArray="false" />
    <ECID id="630215001" valueType="Ascii" logicalName="PMB.match1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630215002" valueType="Ascii" logicalName="PMB.match1.EnableC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630215003" valueType="Ascii" logicalName="PMB.match1.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable match or not" isArray="false" />
    <ECID id="630215004" valueType="Ascii" logicalName="PMB.match1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630215005" valueType="Ascii" logicalName="PMB.match1.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630215006" valueType="Ascii" logicalName="PMB.match1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630215007" valueType="Ascii" logicalName="PMB.match1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="630216001" valueType="Ascii" logicalName="PMB.match2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630216002" valueType="Ascii" logicalName="PMB.match2.EnableC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630216003" valueType="Ascii" logicalName="PMB.match2.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable match or not" isArray="false" />
    <ECID id="630216004" valueType="Ascii" logicalName="PMB.match2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630216005" valueType="Ascii" logicalName="PMB.match2.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630216006" valueType="Ascii" logicalName="PMB.match2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630216007" valueType="Ascii" logicalName="PMB.match2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="630217001" valueType="Ascii" logicalName="PMB.MfcGas1.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="630217002" valueType="Ascii" logicalName="PMB.MfcGas1.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 1 or not" isArray="false" />
    <ECID id="630217003" valueType="Ascii" logicalName="PMB.MfcGas1.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="630217004" valueType="Ascii" logicalName="PMB.MfcGas1.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.1 gas stick" isArray="false" />
    <ECID id="630217005" valueType="Ascii" logicalName="PMB.MfcGas1.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630217006" valueType="Ascii" logicalName="PMB.MfcGas1.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630217007" valueType="Ascii" logicalName="PMB.MfcGas1.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630217008" valueType="Ascii" logicalName="PMB.MfcGas1.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="630217009" valueType="Ascii" logicalName="PMB.MfcGas1.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="630217010" valueType="Ascii" logicalName="PMB.MfcGas1.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630217011" valueType="Ascii" logicalName="PMB.MfcGas1.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630218001" valueType="Ascii" logicalName="PMB.MfcGas2.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="630218002" valueType="Ascii" logicalName="PMB.MfcGas2.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 2 or not" isArray="false" />
    <ECID id="630218003" valueType="Ascii" logicalName="PMB.MfcGas2.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="630218004" valueType="Ascii" logicalName="PMB.MfcGas2.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.2 gas stick" isArray="false" />
    <ECID id="630218005" valueType="Ascii" logicalName="PMB.MfcGas2.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630218006" valueType="Ascii" logicalName="PMB.MfcGas2.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630218007" valueType="Ascii" logicalName="PMB.MfcGas2.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630218008" valueType="Ascii" logicalName="PMB.MfcGas2.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="630218009" valueType="Ascii" logicalName="PMB.MfcGas2.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="630218010" valueType="Ascii" logicalName="PMB.MfcGas2.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630218011" valueType="Ascii" logicalName="PMB.MfcGas2.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630219001" valueType="Ascii" logicalName="PMB.MfcGas3.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="630219002" valueType="Ascii" logicalName="PMB.MfcGas3.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 3 or not" isArray="false" />
    <ECID id="630219003" valueType="Ascii" logicalName="PMB.MfcGas3.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="630219004" valueType="Ascii" logicalName="PMB.MfcGas3.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.3 gas stick" isArray="false" />
    <ECID id="630219005" valueType="Ascii" logicalName="PMB.MfcGas3.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630219006" valueType="Ascii" logicalName="PMB.MfcGas3.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630219007" valueType="Ascii" logicalName="PMB.MfcGas3.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630219008" valueType="Ascii" logicalName="PMB.MfcGas3.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="630219009" valueType="Ascii" logicalName="PMB.MfcGas3.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="630219010" valueType="Ascii" logicalName="PMB.MfcGas3.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630219011" valueType="Ascii" logicalName="PMB.MfcGas3.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630220001" valueType="Ascii" logicalName="PMB.MfcGas4.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="630220002" valueType="Ascii" logicalName="PMB.MfcGas4.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 4 or not" isArray="false" />
    <ECID id="630220003" valueType="Ascii" logicalName="PMB.MfcGas4.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="630220004" valueType="Ascii" logicalName="PMB.MfcGas4.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.4 gas stick" isArray="false" />
    <ECID id="630220005" valueType="Ascii" logicalName="PMB.MfcGas4.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="630220006" valueType="Ascii" logicalName="PMB.MfcGas4.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="630220007" valueType="Ascii" logicalName="PMB.MfcGas4.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="630220008" valueType="Ascii" logicalName="PMB.MfcGas4.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="630220009" valueType="Ascii" logicalName="PMB.MfcGas4.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="630220010" valueType="Ascii" logicalName="PMB.MfcGas4.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630220011" valueType="Ascii" logicalName="PMB.MfcGas4.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630221001" valueType="Ascii" logicalName="PMB.MfcGas5.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="630221002" valueType="Ascii" logicalName="PMB.MfcGas5.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 5 or not" isArray="false" />
    <ECID id="630221003" valueType="Ascii" logicalName="PMB.MfcGas5.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="630221004" valueType="Ascii" logicalName="PMB.MfcGas5.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.5 gas stick" isArray="false" />
    <ECID id="630221005" valueType="Ascii" logicalName="PMB.MfcGas5.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="630221006" valueType="Ascii" logicalName="PMB.MfcGas5.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="630221007" valueType="Ascii" logicalName="PMB.MfcGas5.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="630221008" valueType="Ascii" logicalName="PMB.MfcGas5.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="630221009" valueType="Ascii" logicalName="PMB.MfcGas5.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="630221010" valueType="Ascii" logicalName="PMB.MfcGas5.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630221011" valueType="Ascii" logicalName="PMB.MfcGas5.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630222001" valueType="Ascii" logicalName="PMB.MfcGas6.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="630222002" valueType="Ascii" logicalName="PMB.MfcGas6.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 6 or not" isArray="false" />
    <ECID id="630222003" valueType="Ascii" logicalName="PMB.MfcGas6.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="630222004" valueType="Ascii" logicalName="PMB.MfcGas6.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.6 gas stick" isArray="false" />
    <ECID id="630222005" valueType="Ascii" logicalName="PMB.MfcGas6.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="630222006" valueType="Ascii" logicalName="PMB.MfcGas6.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="630222007" valueType="Ascii" logicalName="PMB.MfcGas6.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="630222008" valueType="Ascii" logicalName="PMB.MfcGas6.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="630222009" valueType="Ascii" logicalName="PMB.MfcGas6.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="630222010" valueType="Ascii" logicalName="PMB.MfcGas6.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630222011" valueType="Ascii" logicalName="PMB.MfcGas6.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630223001" valueType="Ascii" logicalName="PMB.Pump.LeakCheckPumpingTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630223002" valueType="Ascii" logicalName="PMB.Pump.LeakCheckWaitTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630223003" valueType="Ascii" logicalName="PMB.Pump.LeakRate" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630223004" valueType="Ascii" logicalName="PMB.Pump.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630223005" valueType="Ascii" logicalName="PMB.Pump.PumpTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630223006" valueType="Ascii" logicalName="PMB.Pump.PumpValveDelay" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630224001" valueType="Ascii" logicalName="PMB.Purge.PurgeCycleCount" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630224002" valueType="Ascii" logicalName="PMB.Purge.PurgePumpPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630224003" valueType="Ascii" logicalName="PMB.Purge.PurgePumpStableTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630224004" valueType="Ascii" logicalName="PMB.Purge.PurgePumpTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630224005" valueType="Ascii" logicalName="PMB.Purge.PurgeVentPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630224006" valueType="Ascii" logicalName="PMB.Purge.PurgeVentStableTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630224007" valueType="Ascii" logicalName="PMB.Purge.PurgeVentTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225001" valueType="Ascii" logicalName="PMB.Rf1.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225002" valueType="Ascii" logicalName="PMB.Rf1.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225003" valueType="Ascii" logicalName="PMB.Rf1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630225004" valueType="Ascii" logicalName="PMB.Rf1.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225005" valueType="Ascii" logicalName="PMB.Rf1.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225006" valueType="Ascii" logicalName="PMB.Rf1.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225007" valueType="Ascii" logicalName="PMB.Rf1.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225008" valueType="Ascii" logicalName="PMB.Rf1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630225009" valueType="Ascii" logicalName="PMB.Rf1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630225010" valueType="Ascii" logicalName="PMB.Rf1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="630225011" valueType="Ascii" logicalName="PMB.Rf1.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225012" valueType="Ascii" logicalName="PMB.Rf1.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225013" valueType="Ascii" logicalName="PMB.Rf1.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225014" valueType="Ascii" logicalName="PMB.Rf1.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225015" valueType="Ascii" logicalName="PMB.Rf1.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225016" valueType="Ascii" logicalName="PMB.Rf1.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225017" valueType="Ascii" logicalName="PMB.Rf1.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225018" valueType="Ascii" logicalName="PMB.Rf1.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225019" valueType="Ascii" logicalName="PMB.Rf1.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225020" valueType="Ascii" logicalName="PMB.Rf1.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225021" valueType="Ascii" logicalName="PMB.Rf1.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225022" valueType="Ascii" logicalName="PMB.Rf1.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225023" valueType="Ascii" logicalName="PMB.Rf1.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225024" valueType="Ascii" logicalName="PMB.Rf1.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225025" valueType="Ascii" logicalName="PMB.Rf1.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225026" valueType="Ascii" logicalName="PMB.Rf1.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630225027" valueType="Ascii" logicalName="PMB.Rf1.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226001" valueType="Ascii" logicalName="PMB.Rf2.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226002" valueType="Ascii" logicalName="PMB.Rf2.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226003" valueType="Ascii" logicalName="PMB.Rf2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="630226004" valueType="Ascii" logicalName="PMB.Rf2.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226005" valueType="Ascii" logicalName="PMB.Rf2.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226006" valueType="Ascii" logicalName="PMB.Rf2.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226007" valueType="Ascii" logicalName="PMB.Rf2.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226008" valueType="Ascii" logicalName="PMB.Rf2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="630226009" valueType="Ascii" logicalName="PMB.Rf2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="630226010" valueType="Ascii" logicalName="PMB.Rf2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="630226011" valueType="Ascii" logicalName="PMB.Rf2.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226012" valueType="Ascii" logicalName="PMB.Rf2.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226013" valueType="Ascii" logicalName="PMB.Rf2.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226014" valueType="Ascii" logicalName="PMB.Rf2.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226015" valueType="Ascii" logicalName="PMB.Rf2.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226016" valueType="Ascii" logicalName="PMB.Rf2.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226017" valueType="Ascii" logicalName="PMB.Rf2.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226018" valueType="Ascii" logicalName="PMB.Rf2.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226019" valueType="Ascii" logicalName="PMB.Rf2.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226020" valueType="Ascii" logicalName="PMB.Rf2.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226021" valueType="Ascii" logicalName="PMB.Rf2.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226022" valueType="Ascii" logicalName="PMB.Rf2.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226023" valueType="Ascii" logicalName="PMB.Rf2.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226024" valueType="Ascii" logicalName="PMB.Rf2.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226025" valueType="Ascii" logicalName="PMB.Rf2.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226026" valueType="Ascii" logicalName="PMB.Rf2.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630226027" valueType="Ascii" logicalName="PMB.Rf2.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227001" valueType="Ascii" logicalName="PMB.MFCVerification.ChamberVolume" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227002" valueType="Ascii" logicalName="PMB.MFCVerification.CheckStableTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227003" valueType="Ascii" logicalName="PMB.MFCVerification.FlowStableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227004" valueType="Ascii" logicalName="PMB.MFCVerification.GasFlowTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227005" valueType="Ascii" logicalName="PMB.MFCVerification.GasTemperature" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227006" valueType="Ascii" logicalName="PMB.MFCVerification.MaxDeviation" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227007" valueType="Ascii" logicalName="PMB.MFCVerification.PressureStableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630227008" valueType="Ascii" logicalName="PMB.MFCVerification.TargetPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="630228001" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_1" value="" min="" max="" eventTrigger="" units="" description="补偿值 1" isArray="false" />
    <ECID id="630228002" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_2" value="" min="" max="" eventTrigger="" units="" description="补偿值 2" isArray="false" />
    <ECID id="630228003" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_3" value="" min="" max="" eventTrigger="" units="" description="补偿值 3" isArray="false" />
    <ECID id="630228004" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_4" value="" min="" max="" eventTrigger="" units="" description="补偿值 4" isArray="false" />
    <ECID id="630228005" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_5" value="" min="" max="" eventTrigger="" units="" description="补偿值 5" isArray="false" />
    <ECID id="630228006" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_6" value="" min="" max="" eventTrigger="" units="" description="补偿值 6" isArray="false" />
    <ECID id="630228007" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_7" value="" min="" max="" eventTrigger="" units="" description="补偿值 7" isArray="false" />
    <ECID id="630228008" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_8" value="" min="" max="" eventTrigger="" units="" description="补偿值 8" isArray="false" />
    <ECID id="630228009" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_9" value="" min="" max="" eventTrigger="" units="" description="补偿值 9" isArray="false" />
    <ECID id="630228010" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_1" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 1" isArray="false" />
    <ECID id="630228011" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_2" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 2" isArray="false" />
    <ECID id="630228012" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_3" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 3" isArray="false" />
    <ECID id="630228013" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_4" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 4" isArray="false" />
    <ECID id="630228014" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_5" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 5" isArray="false" />
    <ECID id="630228015" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_6" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 6" isArray="false" />
    <ECID id="630228016" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_7" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 7" isArray="false" />
    <ECID id="630228017" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_8" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 8" isArray="false" />
    <ECID id="630228018" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_9" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 9" isArray="false" />
    <ECID id="630229001" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_1" value="" min="" max="" eventTrigger="" units="" description="补偿值 1" isArray="false" />
    <ECID id="630229002" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_2" value="" min="" max="" eventTrigger="" units="" description="补偿值 2" isArray="false" />
    <ECID id="630229003" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_3" value="" min="" max="" eventTrigger="" units="" description="补偿值 3" isArray="false" />
    <ECID id="630229004" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_4" value="" min="" max="" eventTrigger="" units="" description="补偿值 4" isArray="false" />
    <ECID id="630229005" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_5" value="" min="" max="" eventTrigger="" units="" description="补偿值 5" isArray="false" />
    <ECID id="630229006" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_6" value="" min="" max="" eventTrigger="" units="" description="补偿值 6" isArray="false" />
    <ECID id="630229007" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_7" value="" min="" max="" eventTrigger="" units="" description="补偿值 7" isArray="false" />
    <ECID id="630229008" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_8" value="" min="" max="" eventTrigger="" units="" description="补偿值 8" isArray="false" />
    <ECID id="630229009" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_9" value="" min="" max="" eventTrigger="" units="" description="补偿值 9" isArray="false" />
    <ECID id="630229010" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_1" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 1" isArray="false" />
    <ECID id="630229011" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_2" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 2" isArray="false" />
    <ECID id="630229012" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_3" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 3" isArray="false" />
    <ECID id="630229013" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_4" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 4" isArray="false" />
    <ECID id="630229014" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_5" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 5" isArray="false" />
    <ECID id="630229015" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_6" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 6" isArray="false" />
    <ECID id="630229016" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_7" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 7" isArray="false" />
    <ECID id="630229017" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_8" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 8" isArray="false" />
    <ECID id="630229018" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_9" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 9" isArray="false" />
    <ECID id="640101001" valueType="Ascii" logicalName="PMC.BiasRf1.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101002" valueType="Ascii" logicalName="PMC.BiasRf1.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101003" valueType="Ascii" logicalName="PMC.BiasRf1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640101004" valueType="Ascii" logicalName="PMC.BiasRf1.EnableBiasRF" value="" min="" max="" eventTrigger="" units="" description="enable bias RF or not" isArray="false" />
    <ECID id="640101005" valueType="Ascii" logicalName="PMC.BiasRf1.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101006" valueType="Ascii" logicalName="PMC.BiasRf1.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101007" valueType="Ascii" logicalName="PMC.BiasRf1.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101008" valueType="Ascii" logicalName="PMC.BiasRf1.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101009" valueType="Ascii" logicalName="PMC.BiasRf1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640101010" valueType="Ascii" logicalName="PMC.BiasRf1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640101011" valueType="Ascii" logicalName="PMC.BiasRf1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="640101012" valueType="Ascii" logicalName="PMC.BiasRf1.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101013" valueType="Ascii" logicalName="PMC.BiasRf1.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101014" valueType="Ascii" logicalName="PMC.BiasRf1.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101015" valueType="Ascii" logicalName="PMC.BiasRf1.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101016" valueType="Ascii" logicalName="PMC.BiasRf1.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101017" valueType="Ascii" logicalName="PMC.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101018" valueType="Ascii" logicalName="PMC.BiasRf1.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101019" valueType="Ascii" logicalName="PMC.BiasRf1.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101020" valueType="Ascii" logicalName="PMC.BiasRf1.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101021" valueType="Ascii" logicalName="PMC.BiasRf1.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101022" valueType="Ascii" logicalName="PMC.BiasRf1.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101023" valueType="Ascii" logicalName="PMC.BiasRf1.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101024" valueType="Ascii" logicalName="PMC.BiasRf1.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101025" valueType="Ascii" logicalName="PMC.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101026" valueType="Ascii" logicalName="PMC.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101027" valueType="Ascii" logicalName="PMC.BiasRf1.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640101028" valueType="Ascii" logicalName="PMC.BiasRf1.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640202001" valueType="Ascii" logicalName="PMC.BiasRf1Match.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640202002" valueType="Ascii" logicalName="PMC.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640202003" valueType="Ascii" logicalName="PMC.BiasRf1Match.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable bias match or not" isArray="false" />
    <ECID id="640202004" valueType="Ascii" logicalName="PMC.BiasRf1Match.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640202005" valueType="Ascii" logicalName="PMC.BiasRf1Match.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640202006" valueType="Ascii" logicalName="PMC.BiasRf1Match.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640202007" valueType="Ascii" logicalName="PMC.BiasRf1Match.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="640203001" valueType="Ascii" logicalName="PMC.BiasRf2.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203002" valueType="Ascii" logicalName="PMC.BiasRf2.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203003" valueType="Ascii" logicalName="PMC.BiasRf2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640203004" valueType="Ascii" logicalName="PMC.BiasRf2.EnableBiasRF" value="" min="" max="" eventTrigger="" units="" description="enable bias RF or not" isArray="false" />
    <ECID id="640203005" valueType="Ascii" logicalName="PMC.BiasRf2.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203006" valueType="Ascii" logicalName="PMC.BiasRf2.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203007" valueType="Ascii" logicalName="PMC.BiasRf2.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203008" valueType="Ascii" logicalName="PMC.BiasRf2.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203009" valueType="Ascii" logicalName="PMC.BiasRf2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640203010" valueType="Ascii" logicalName="PMC.BiasRf2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640203011" valueType="Ascii" logicalName="PMC.BiasRf2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="640203012" valueType="Ascii" logicalName="PMC.BiasRf2.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203013" valueType="Ascii" logicalName="PMC.BiasRf2.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203014" valueType="Ascii" logicalName="PMC.BiasRf2.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203015" valueType="Ascii" logicalName="PMC.BiasRf2.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203016" valueType="Ascii" logicalName="PMC.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203017" valueType="Ascii" logicalName="PMC.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203018" valueType="Ascii" logicalName="PMC.BiasRf2.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203019" valueType="Ascii" logicalName="PMC.BiasRf2.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203020" valueType="Ascii" logicalName="PMC.BiasRf2.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203021" valueType="Ascii" logicalName="PMC.BiasRf2.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203022" valueType="Ascii" logicalName="PMC.BiasRf2.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203023" valueType="Ascii" logicalName="PMC.BiasRf2.CurrentRFMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203024" valueType="Ascii" logicalName="PMC.BiasRf2.GeneratorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203025" valueType="Ascii" logicalName="PMC.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203026" valueType="Ascii" logicalName="PMC.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203027" valueType="Ascii" logicalName="PMC.BiasRf2.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640203028" valueType="Ascii" logicalName="PMC.BiasRf2.SensorSerialNumber" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640204001" valueType="Ascii" logicalName="PMC.BiasRf2Match.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640204002" valueType="Ascii" logicalName="PMC.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640204003" valueType="Ascii" logicalName="PMC.BiasRf2Match.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable bias match or not" isArray="false" />
    <ECID id="640204004" valueType="Ascii" logicalName="PMC.BiasRf2Match.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640204005" valueType="Ascii" logicalName="PMC.BiasRf2Match.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640204006" valueType="Ascii" logicalName="PMC.BiasRf2Match.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640204007" valueType="Ascii" logicalName="PMC.BiasRf2Match.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="640205001" valueType="Ascii" logicalName="PMC.ChamberBasePressureThreshold" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205002" valueType="Ascii" logicalName="PMC.ChamberBaseTemperatureThreshold" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205003" valueType="Ascii" logicalName="PMC.ChamberHeater1SetPointLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205004" valueType="Ascii" logicalName="PMC.HeaterChamberSetPointLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205005" valueType="Ascii" logicalName="PMC.ChamberVolume" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205006" valueType="Ascii" logicalName="PMC.CheckATMTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205007" valueType="Ascii" logicalName="PMC.CheckChamberTempTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205008" valueType="Ascii" logicalName="PMC.EnableThrottleValve" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205009" valueType="Ascii" logicalName="PMC.ForeLineHeaterSetPointLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205010" valueType="Ascii" logicalName="PMC.GasFlowPressureAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205011" valueType="Ascii" logicalName="PMC.GasFlowPressureAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205012" valueType="Ascii" logicalName="PMC.GasFlowTimeInMFCVerification" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205013" valueType="Ascii" logicalName="PMC.GasTemperature" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205014" valueType="Ascii" logicalName="PMC.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
    <ECID id="640205015" valueType="Ascii" logicalName="PMC.LEHeaterSetPointLimit1" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205016" valueType="Ascii" logicalName="PMC.LEHeaterSetPointLimit2" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205017" valueType="Ascii" logicalName="PMC.OpenCloseSlitValveTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205018" valueType="Ascii" logicalName="PMC.OpenGasValveTimeout" value="" min="" max="" eventTrigger="" units="" description="开阀超时" isArray="false" />
    <ECID id="640205019" valueType="Ascii" logicalName="PMC.PlaceAndPickDelayTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205020" valueType="Ascii" logicalName="PMC.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PostTransfer Timeout" isArray="false" />
    <ECID id="640205021" valueType="Ascii" logicalName="PMC.PrepareTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="PrepareTransfer Timeout" isArray="false" />
    <ECID id="640205022" valueType="Ascii" logicalName="PMC.ProcessPressureOffset" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205023" valueType="Ascii" logicalName="PMC.TargetPressureInMFCVerification" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205024" valueType="Ascii" logicalName="PMC.TimeLimitOfCloseGasValve" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205025" valueType="Ascii" logicalName="PMC.VentTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205026" valueType="Ascii" logicalName="PMC.VentTimeDelay" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205027" valueType="Ascii" logicalName="PMC.GasFlowPressureWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205028" valueType="Ascii" logicalName="PMC.GasFlowPressureWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205029" valueType="Ascii" logicalName="PMC.RecipeToleranceIgnoreTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205030" valueType="Ascii" logicalName="PMC.ProcessPressureAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205031" valueType="Ascii" logicalName="PMC.ProcessPressureAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205032" valueType="Ascii" logicalName="PMC.ProcessPressureWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205033" valueType="Ascii" logicalName="PMC.ProcessPressureWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640205034" valueType="Ascii" logicalName="PMC.CloseDoorDelay" value="" min="" max="" eventTrigger="" units="" description=" Close Chamber Door Delay Time" isArray="false" />
    <ECID id="640206001" valueType="Ascii" logicalName="PMC.Chiller1.ChillerTemperatureOffset" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640206002" valueType="Ascii" logicalName="PMC.Chiller1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640206003" valueType="Ascii" logicalName="PMC.Chiller1.EnableChiller" value="" min="" max="" eventTrigger="" units="" description="enable chiller or not" isArray="false" />
    <ECID id="640206004" valueType="Ascii" logicalName="PMC.Chiller1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:SMC;" isArray="false" />
    <ECID id="640206005" valueType="Ascii" logicalName="PMC.Chiller1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
    <ECID id="640206006" valueType="Ascii" logicalName="PMC.Chiller1.SetPointLimitMax" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640206007" valueType="Ascii" logicalName="PMC.Chiller1.SetPointLimitMin" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640206008" valueType="Ascii" logicalName="PMC.Chiller1.EnableToleranceAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Tolerance Alarm" isArray="false" />
    <ECID id="640206009" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Range" isArray="false" />
    <ECID id="640206010" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Time" isArray="false" />
    <ECID id="640206011" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceWarningRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Range" isArray="false" />
    <ECID id="640206012" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceWarningTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Time" isArray="false" />
    <ECID id="640207001" valueType="Ascii" logicalName="PMC.Chiller2.ChillerTemperatureOffset" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640207002" valueType="Ascii" logicalName="PMC.Chiller2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640207003" valueType="Ascii" logicalName="PMC.Chiller2.EnableChiller" value="" min="" max="" eventTrigger="" units="" description="enable chiller or not" isArray="false" />
    <ECID id="640207004" valueType="Ascii" logicalName="PMC.Chiller2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:SMC;" isArray="false" />
    <ECID id="640207005" valueType="Ascii" logicalName="PMC.Chiller2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
    <ECID id="640207006" valueType="Ascii" logicalName="PMC.Chiller2.SetPointLimitMax" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640207007" valueType="Ascii" logicalName="PMC.Chiller2.SetPointLimitMin" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640207008" valueType="Ascii" logicalName="PMC.Chiller2.EnableToleranceAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Tolerance Alarm" isArray="false" />
    <ECID id="640207009" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Range" isArray="false" />
    <ECID id="640207010" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm Time" isArray="false" />
    <ECID id="640207011" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceWarningRange" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Range" isArray="false" />
    <ECID id="640207012" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceWarningTime" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning Time" isArray="false" />
    <ECID id="640208001" valueType="Ascii" logicalName="PMC.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640208002" valueType="Ascii" logicalName="PMC.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640208003" valueType="Ascii" logicalName="PMC.DryPump.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640208004" valueType="Ascii" logicalName="PMC.DryPump.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:Sky; 2:Edwards" isArray="false" />
    <ECID id="640208005" valueType="Ascii" logicalName="PMC.DryPump.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of pump" isArray="false" />
    <ECID id="640208006" valueType="Ascii" logicalName="PMC.DryPump.NeedUpdateComm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640209001" valueType="Ascii" logicalName="PMC.ElectrodeHeart1.Heart" value="" min="" max="" eventTrigger="" units="" description="Electrode Heart" isArray="false" />
    <ECID id="640210001" valueType="Ascii" logicalName="PMC.ElectrodeHeart2.Heart" value="" min="" max="" eventTrigger="" units="" description="Electrode Heart" isArray="false" />
    <ECID id="640211001" valueType="Ascii" logicalName="PMC.EPD.ChannelNumber" value="" min="" max="" eventTrigger="" units="" description="channel number" isArray="false" />
    <ECID id="640211002" valueType="Ascii" logicalName="PMC.EPD.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="640212001" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_1" value="" min="" max="" eventTrigger="" units="" description="补偿值 1" isArray="false" />
    <ECID id="640212002" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_2" value="" min="" max="" eventTrigger="" units="" description="补偿值 2" isArray="false" />
    <ECID id="640212003" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_3" value="" min="" max="" eventTrigger="" units="" description="补偿值 3" isArray="false" />
    <ECID id="640212004" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_4" value="" min="" max="" eventTrigger="" units="" description="补偿值 4" isArray="false" />
    <ECID id="640212005" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_5" value="" min="" max="" eventTrigger="" units="" description="补偿值 5" isArray="false" />
    <ECID id="640212006" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_6" value="" min="" max="" eventTrigger="" units="" description="补偿值 6" isArray="false" />
    <ECID id="640212007" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_7" value="" min="" max="" eventTrigger="" units="" description="补偿值 7" isArray="false" />
    <ECID id="640212008" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_8" value="" min="" max="" eventTrigger="" units="" description="补偿值 8" isArray="false" />
    <ECID id="640212009" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_9" value="" min="" max="" eventTrigger="" units="" description="补偿值 9" isArray="false" />
    <ECID id="640212010" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 1" isArray="false" />
    <ECID id="640212011" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 2" isArray="false" />
    <ECID id="640212012" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 3" isArray="false" />
    <ECID id="640212013" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 4" isArray="false" />
    <ECID id="640212014" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 5" isArray="false" />
    <ECID id="640212015" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 6" isArray="false" />
    <ECID id="640212016" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 7" isArray="false" />
    <ECID id="640212017" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 8" isArray="false" />
    <ECID id="640212018" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" eventTrigger="" units="" description="温度补偿点 9" isArray="false" />
    <ECID id="640213001" valueType="Ascii" logicalName="PMC.IdleClean.IdleCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="Purge recipe name" isArray="false" />
    <ECID id="640213002" valueType="Ascii" logicalName="PMC.IdleClean.IdleCleanTime" value="" min="" max="" eventTrigger="" units="" description="Idle seconds after which run purge" isArray="false" />
    <ECID id="640213003" valueType="Ascii" logicalName="PMC.IdleClean.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="640214001" valueType="Ascii" logicalName="PMC.JobClean.CompleteJobCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="complete job clean recipe name" isArray="false" />
    <ECID id="640214002" valueType="Ascii" logicalName="PMC.JobClean.EnableCompleteJobClean" value="" min="" max="" eventTrigger="" units="" description="Enable Complete Job Clean" isArray="false" />
    <ECID id="640214003" valueType="Ascii" logicalName="PMC.JobClean.EnablePreJobClean" value="" min="" max="" eventTrigger="" units="" description="Enable PreJob Clean" isArray="false" />
    <ECID id="640214004" valueType="Ascii" logicalName="PMC.JobClean.IdleCleanTime" value="" min="" max="" eventTrigger="" units="" description="Idle seconds after which run purge" isArray="false" />
    <ECID id="640214005" valueType="Ascii" logicalName="PMC.JobClean.IsEnabled" value="" min="" max="" eventTrigger="" units="" description="IsEnabled" isArray="false" />
    <ECID id="640214006" valueType="Ascii" logicalName="PMC.JobClean.PreJobCleanRecipe" value="" min="" max="" eventTrigger="" units="" description="pre job clean recipe name" isArray="false" />
    <ECID id="640215001" valueType="Ascii" logicalName="PMC.match1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640215002" valueType="Ascii" logicalName="PMC.match1.EnableC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640215003" valueType="Ascii" logicalName="PMC.match1.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable match or not" isArray="false" />
    <ECID id="640215004" valueType="Ascii" logicalName="PMC.match1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640215005" valueType="Ascii" logicalName="PMC.match1.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640215006" valueType="Ascii" logicalName="PMC.match1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640215007" valueType="Ascii" logicalName="PMC.match1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="640216001" valueType="Ascii" logicalName="PMC.match2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640216002" valueType="Ascii" logicalName="PMC.match2.EnableC1C2Position" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640216003" valueType="Ascii" logicalName="PMC.match2.EnableMatch" value="" min="" max="" eventTrigger="" units="" description="enable match or not" isArray="false" />
    <ECID id="640216004" valueType="Ascii" logicalName="PMC.match2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640216005" valueType="Ascii" logicalName="PMC.match2.MatchMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640216006" valueType="Ascii" logicalName="PMC.match2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640216007" valueType="Ascii" logicalName="PMC.match2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of match" isArray="false" />
    <ECID id="640217001" valueType="Ascii" logicalName="PMC.MfcGas1.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="640217002" valueType="Ascii" logicalName="PMC.MfcGas1.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 1 or not" isArray="false" />
    <ECID id="640217003" valueType="Ascii" logicalName="PMC.MfcGas1.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="640217004" valueType="Ascii" logicalName="PMC.MfcGas1.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.1 gas stick" isArray="false" />
    <ECID id="640217005" valueType="Ascii" logicalName="PMC.MfcGas1.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640217006" valueType="Ascii" logicalName="PMC.MfcGas1.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640217007" valueType="Ascii" logicalName="PMC.MfcGas1.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640217008" valueType="Ascii" logicalName="PMC.MfcGas1.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="640217009" valueType="Ascii" logicalName="PMC.MfcGas1.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="640217010" valueType="Ascii" logicalName="PMC.MfcGas1.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640217011" valueType="Ascii" logicalName="PMC.MfcGas1.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640218001" valueType="Ascii" logicalName="PMC.MfcGas2.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="640218002" valueType="Ascii" logicalName="PMC.MfcGas2.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 2 or not" isArray="false" />
    <ECID id="640218003" valueType="Ascii" logicalName="PMC.MfcGas2.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="640218004" valueType="Ascii" logicalName="PMC.MfcGas2.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.2 gas stick" isArray="false" />
    <ECID id="640218005" valueType="Ascii" logicalName="PMC.MfcGas2.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640218006" valueType="Ascii" logicalName="PMC.MfcGas2.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640218007" valueType="Ascii" logicalName="PMC.MfcGas2.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640218008" valueType="Ascii" logicalName="PMC.MfcGas2.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="640218009" valueType="Ascii" logicalName="PMC.MfcGas2.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="640218010" valueType="Ascii" logicalName="PMC.MfcGas2.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640218011" valueType="Ascii" logicalName="PMC.MfcGas2.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640219001" valueType="Ascii" logicalName="PMC.MfcGas3.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="640219002" valueType="Ascii" logicalName="PMC.MfcGas3.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 3 or not" isArray="false" />
    <ECID id="640219003" valueType="Ascii" logicalName="PMC.MfcGas3.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="640219004" valueType="Ascii" logicalName="PMC.MfcGas3.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.3 gas stick" isArray="false" />
    <ECID id="640219005" valueType="Ascii" logicalName="PMC.MfcGas3.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640219006" valueType="Ascii" logicalName="PMC.MfcGas3.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640219007" valueType="Ascii" logicalName="PMC.MfcGas3.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640219008" valueType="Ascii" logicalName="PMC.MfcGas3.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="640219009" valueType="Ascii" logicalName="PMC.MfcGas3.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="640219010" valueType="Ascii" logicalName="PMC.MfcGas3.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640219011" valueType="Ascii" logicalName="PMC.MfcGas3.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640220001" valueType="Ascii" logicalName="PMC.MfcGas4.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="640220002" valueType="Ascii" logicalName="PMC.MfcGas4.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 4 or not" isArray="false" />
    <ECID id="640220003" valueType="Ascii" logicalName="PMC.MfcGas4.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="640220004" valueType="Ascii" logicalName="PMC.MfcGas4.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.4 gas stick" isArray="false" />
    <ECID id="640220005" valueType="Ascii" logicalName="PMC.MfcGas4.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="640220006" valueType="Ascii" logicalName="PMC.MfcGas4.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="640220007" valueType="Ascii" logicalName="PMC.MfcGas4.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="640220008" valueType="Ascii" logicalName="PMC.MfcGas4.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="640220009" valueType="Ascii" logicalName="PMC.MfcGas4.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="640220010" valueType="Ascii" logicalName="PMC.MfcGas4.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640220011" valueType="Ascii" logicalName="PMC.MfcGas4.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640221001" valueType="Ascii" logicalName="PMC.MfcGas5.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="640221002" valueType="Ascii" logicalName="PMC.MfcGas5.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 5 or not" isArray="false" />
    <ECID id="640221003" valueType="Ascii" logicalName="PMC.MfcGas5.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="640221004" valueType="Ascii" logicalName="PMC.MfcGas5.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.5 gas stick" isArray="false" />
    <ECID id="640221005" valueType="Ascii" logicalName="PMC.MfcGas5.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="640221006" valueType="Ascii" logicalName="PMC.MfcGas5.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="640221007" valueType="Ascii" logicalName="PMC.MfcGas5.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="640221008" valueType="Ascii" logicalName="PMC.MfcGas5.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="640221009" valueType="Ascii" logicalName="PMC.MfcGas5.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="640221010" valueType="Ascii" logicalName="PMC.MfcGas5.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640221011" valueType="Ascii" logicalName="PMC.MfcGas5.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640222001" valueType="Ascii" logicalName="PMC.MfcGas6.DefaultSetPoint" value="" min="" max="" eventTrigger="" units="" description="default setpoint" isArray="false" />
    <ECID id="640222002" valueType="Ascii" logicalName="PMC.MfcGas6.Enable" value="" min="" max="" eventTrigger="" units="" description="Enable gas 6 or not" isArray="false" />
    <ECID id="640222003" valueType="Ascii" logicalName="PMC.MfcGas6.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="flow regulation factor" isArray="false" />
    <ECID id="640222004" valueType="Ascii" logicalName="PMC.MfcGas6.GasName" value="" min="" max="" eventTrigger="" units="" description="Name of NO.6 gas stick" isArray="false" />
    <ECID id="640222005" valueType="Ascii" logicalName="PMC.MfcGas6.MfcAlarmRange" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Range" isArray="false" />
    <ECID id="640222006" valueType="Ascii" logicalName="PMC.MfcGas6.MfcAlarmTime" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Time" isArray="false" />
    <ECID id="640222007" valueType="Ascii" logicalName="PMC.MfcGas6.MfcEnableAlarm" value="" min="" max="" eventTrigger="" units="" description="MFC Enable Alarm" isArray="false" />
    <ECID id="640222008" valueType="Ascii" logicalName="PMC.MfcGas6.MfcN2Scale" value="" min="" max="" eventTrigger="" units="" description="Max scale by N2 tuning" isArray="false" />
    <ECID id="640222009" valueType="Ascii" logicalName="PMC.MfcGas6.MfcScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale factor" isArray="false" />
    <ECID id="640222010" valueType="Ascii" logicalName="PMC.MfcGas6.MfcWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640222011" valueType="Ascii" logicalName="PMC.MfcGas6.MfcWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640223001" valueType="Ascii" logicalName="PMC.Pump.LeakCheckPumpingTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640223002" valueType="Ascii" logicalName="PMC.Pump.LeakCheckWaitTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640223003" valueType="Ascii" logicalName="PMC.Pump.LeakRate" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640223004" valueType="Ascii" logicalName="PMC.Pump.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640223005" valueType="Ascii" logicalName="PMC.Pump.PumpTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640223006" valueType="Ascii" logicalName="PMC.Pump.PumpValveDelay" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640224001" valueType="Ascii" logicalName="PMC.Purge.PurgeCycleCount" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640224002" valueType="Ascii" logicalName="PMC.Purge.PurgePumpPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640224003" valueType="Ascii" logicalName="PMC.Purge.PurgePumpStableTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640224004" valueType="Ascii" logicalName="PMC.Purge.PurgePumpTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640224005" valueType="Ascii" logicalName="PMC.Purge.PurgeVentPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640224006" valueType="Ascii" logicalName="PMC.Purge.PurgeVentStableTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640224007" valueType="Ascii" logicalName="PMC.Purge.PurgeVentTimeLimit" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225001" valueType="Ascii" logicalName="PMC.Rf1.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225002" valueType="Ascii" logicalName="PMC.Rf1.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225003" valueType="Ascii" logicalName="PMC.Rf1.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640225004" valueType="Ascii" logicalName="PMC.Rf1.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225005" valueType="Ascii" logicalName="PMC.Rf1.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225006" valueType="Ascii" logicalName="PMC.Rf1.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225007" valueType="Ascii" logicalName="PMC.Rf1.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225008" valueType="Ascii" logicalName="PMC.Rf1.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640225009" valueType="Ascii" logicalName="PMC.Rf1.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640225010" valueType="Ascii" logicalName="PMC.Rf1.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="640225011" valueType="Ascii" logicalName="PMC.Rf1.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225012" valueType="Ascii" logicalName="PMC.Rf1.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225013" valueType="Ascii" logicalName="PMC.Rf1.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225014" valueType="Ascii" logicalName="PMC.Rf1.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225015" valueType="Ascii" logicalName="PMC.Rf1.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225016" valueType="Ascii" logicalName="PMC.Rf1.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225017" valueType="Ascii" logicalName="PMC.Rf1.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225018" valueType="Ascii" logicalName="PMC.Rf1.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225019" valueType="Ascii" logicalName="PMC.Rf1.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225020" valueType="Ascii" logicalName="PMC.Rf1.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225021" valueType="Ascii" logicalName="PMC.Rf1.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640225022" valueType="Ascii" logicalName="PMC.Rf1.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226001" valueType="Ascii" logicalName="PMC.Rf2.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226002" valueType="Ascii" logicalName="PMC.Rf2.Coefficient" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226003" valueType="Ascii" logicalName="PMC.Rf2.CommunicationType" value="" min="" max="" eventTrigger="" units="" description="0:Analogue; 1:RS232; 2:Ethernet" isArray="false" />
    <ECID id="640226004" valueType="Ascii" logicalName="PMC.Rf2.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226005" valueType="Ascii" logicalName="PMC.Rf2.EnablePulsingFunction" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226006" valueType="Ascii" logicalName="PMC.Rf2.EnableReflectPower" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226007" valueType="Ascii" logicalName="PMC.Rf2.EnableVoltageCurrent" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226008" valueType="Ascii" logicalName="PMC.Rf2.IPAddress" value="" min="" max="" eventTrigger="" units="" description="EFEM IP,default 127.0.0.1:502" isArray="false" />
    <ECID id="640226009" valueType="Ascii" logicalName="PMC.Rf2.MFG" value="" min="" max="" eventTrigger="" units="" description="厂商, 1:AdTec; 2:Comet" isArray="false" />
    <ECID id="640226010" valueType="Ascii" logicalName="PMC.Rf2.Port" value="" min="" max="" eventTrigger="" units="" description="serial port name of RFG" isArray="false" />
    <ECID id="640226011" valueType="Ascii" logicalName="PMC.Rf2.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226012" valueType="Ascii" logicalName="PMC.Rf2.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226013" valueType="Ascii" logicalName="PMC.Rf2.PowerRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226014" valueType="Ascii" logicalName="PMC.Rf2.PowerRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226015" valueType="Ascii" logicalName="PMC.Rf2.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226016" valueType="Ascii" logicalName="PMC.Rf2.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226017" valueType="Ascii" logicalName="PMC.Rf2.RfPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226018" valueType="Ascii" logicalName="PMC.Rf2.RfPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226019" valueType="Ascii" logicalName="PMC.Rf2.RFTurnOnTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226020" valueType="Ascii" logicalName="PMC.Rf2.CalibrationTableDetail" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226021" valueType="Ascii" logicalName="PMC.Rf2.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640226022" valueType="Ascii" logicalName="PMC.Rf2.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227001" valueType="Ascii" logicalName="PMC.MFCVerification.ChamberVolume" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227002" valueType="Ascii" logicalName="PMC.MFCVerification.CheckStableTimeout" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227003" valueType="Ascii" logicalName="PMC.MFCVerification.FlowStableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227004" valueType="Ascii" logicalName="PMC.MFCVerification.GasFlowTime" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227005" valueType="Ascii" logicalName="PMC.MFCVerification.GasTemperature" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227006" valueType="Ascii" logicalName="PMC.MFCVerification.MaxDeviation" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227007" valueType="Ascii" logicalName="PMC.MFCVerification.PressureStableTolerance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="640227008" valueType="Ascii" logicalName="PMC.MFCVerification.TargetPressure" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
    <ECID id="1410101001" valueType="Ascii" logicalName="CarrierInfo.LLABankNumber12" value="" min="" max="" eventTrigger="" units="" description="LLABankNumber12" isArray="false" />
    <ECID id="1410101002" valueType="Ascii" logicalName="CarrierInfo.LLABankNumber8" value="" min="" max="" eventTrigger="" units="" description="LLABankNumber8" isArray="false" />
    <ECID id="1410101003" valueType="Ascii" logicalName="CarrierInfo.LLACassetteNumber" value="" min="" max="" eventTrigger="" units="" description="LLACassetteNumber" isArray="false" />
    <ECID id="1410101004" valueType="Ascii" logicalName="CarrierInfo.LLBBankNumber12" value="" min="" max="" eventTrigger="" units="" description="LLABankNumber12" isArray="false" />
    <ECID id="1410101005" valueType="Ascii" logicalName="CarrierInfo.LLBBankNumber8" value="" min="" max="" eventTrigger="" units="" description="LLBBankNumber8" isArray="false" />
    <ECID id="1410101006" valueType="Ascii" logicalName="CarrierInfo.LLBCassetteNumber" value="" min="" max="" eventTrigger="" units="" description="LLBCassetteNumber" isArray="false" />
    <ECID id="1410101007" valueType="Ascii" logicalName="CarrierInfo.LowerBankNumber12" value="" min="" max="" eventTrigger="" units="" description="Lower Arm BankNumber , WaferSize:12" isArray="false" />
    <ECID id="1410101008" valueType="Ascii" logicalName="CarrierInfo.LowerBankNumber8" value="" min="" max="" eventTrigger="" units="" description="Lower Arm BankNumber , WaferSize:8" isArray="false" />
    <ECID id="1410101009" valueType="Ascii" logicalName="CarrierInfo.UpperBankNumber12" value="" min="" max="" eventTrigger="" units="" description="Upper Arm BankNumber , WaferSize:12" isArray="false" />
    <ECID id="1410101010" valueType="Ascii" logicalName="CarrierInfo.UpperBankNumber8" value="" min="" max="" eventTrigger="" units="" description="Upper Arm BankNumber , WaferSize:8" isArray="false" />
    <ECID id="1410101011" valueType="Ascii" logicalName="CarrierInfo.LLAStation12" value="" min="" max="" eventTrigger="" units="" description="LLAStation12" isArray="false" />
    <ECID id="1410101012" valueType="Ascii" logicalName="CarrierInfo.LLAStation8" value="" min="" max="" eventTrigger="" units="" description="LLAStation8" isArray="false" />
    <ECID id="1410101013" valueType="Ascii" logicalName="CarrierInfo.LLBStation12" value="" min="" max="" eventTrigger="" units="" description="LLBStation12" isArray="false" />
    <ECID id="1410101014" valueType="Ascii" logicalName="CarrierInfo.LLBStation8" value="" min="" max="" eventTrigger="" units="" description="LLBStation8" isArray="false" />
    <ECID id="1410101015" valueType="Ascii" logicalName="CarrierInfo.PMA1Station12" value="" min="" max="" eventTrigger="" units="" description="PMA1Station12" isArray="false" />
    <ECID id="1410101016" valueType="Ascii" logicalName="CarrierInfo.PMA1Station8" value="" min="" max="" eventTrigger="" units="" description="PMA1Station8" isArray="false" />
    <ECID id="1410101017" valueType="Ascii" logicalName="CarrierInfo.PMA2Station12" value="" min="" max="" eventTrigger="" units="" description="PMA2Station12" isArray="false" />
    <ECID id="1410101018" valueType="Ascii" logicalName="CarrierInfo.PMA2Station8" value="" min="" max="" eventTrigger="" units="" description="PMA2Station8" isArray="false" />
    <ECID id="1410101019" valueType="Ascii" logicalName="CarrierInfo.PMB1Station12" value="" min="" max="" eventTrigger="" units="" description="PMB1Station12" isArray="false" />
    <ECID id="1410101020" valueType="Ascii" logicalName="CarrierInfo.PMB1Station8" value="" min="" max="" eventTrigger="" units="" description="PMB1Station8" isArray="false" />
    <ECID id="1410101021" valueType="Ascii" logicalName="CarrierInfo.PMB2Station12" value="" min="" max="" eventTrigger="" units="" description="PMB2Station12" isArray="false" />
    <ECID id="1410101022" valueType="Ascii" logicalName="CarrierInfo.PMB2Station8" value="" min="" max="" eventTrigger="" units="" description="PMB2Station8" isArray="false" />
    <ECID id="1410101023" valueType="Ascii" logicalName="CarrierInfo.PMC1Station12" value="" min="" max="" eventTrigger="" units="" description="PMC1Station12" isArray="false" />
    <ECID id="1410101024" valueType="Ascii" logicalName="CarrierInfo.PMC1Station8" value="" min="" max="" eventTrigger="" units="" description="PMC1Station8" isArray="false" />
    <ECID id="1410101025" valueType="Ascii" logicalName="CarrierInfo.PMC2Station12" value="" min="" max="" eventTrigger="" units="" description="PMC2Station12" isArray="false" />
    <ECID id="1410101026" valueType="Ascii" logicalName="CarrierInfo.PMC2Station8" value="" min="" max="" eventTrigger="" units="" description="PMC2Station8" isArray="false" />
    <ECID id="1420101001" valueType="Ascii" logicalName="FA.DefaultCommunicationState" value="" min="" max="" eventTrigger="" units="" description="Default Communication State" isArray="false" />
    <ECID id="1420101002" valueType="Ascii" logicalName="FA.DefaultControlState" value="" min="" max="" eventTrigger="" units="" description="Default Control State" isArray="false" />
    <ECID id="1420101003" valueType="Ascii" logicalName="FA.DefaultControlSubState" value="" min="" max="" eventTrigger="" units="" description="Default Control SubState" isArray="false" />
    <ECID id="1420101004" valueType="Ascii" logicalName="FA.DeviceId" value="" min="" max="" eventTrigger="" units="" description="Device ID" isArray="false" />
    <ECID id="1420101005" valueType="Ascii" logicalName="FA.EnableSpooling" value="" min="" max="" eventTrigger="" units="" description="Enable Spooling" isArray="false" />
    <ECID id="1420101006" valueType="Ascii" logicalName="FA.LinkTestInterval" value="" min="" max="" eventTrigger="" units="" description="Link Test Interval" isArray="false" />
    <ECID id="1420101007" valueType="Ascii" logicalName="FA.LocalIpAddress" value="" min="" max="" eventTrigger="" units="" description="Local IP Address" isArray="false" />
    <ECID id="1420101008" valueType="Ascii" logicalName="FA.LocalPortNumber" value="" min="" max="" eventTrigger="" units="" description="Local Port Number" isArray="false" />
    <ECID id="1420101009" valueType="Ascii" logicalName="FA.RemoteIpAddress" value="" min="" max="" eventTrigger="" units="" description="Remote IP Address" isArray="false" />
    <ECID id="1420101010" valueType="Ascii" logicalName="FA.RemotePortNumber" value="" min="" max="" eventTrigger="" units="" description="Remote Port Number" isArray="false" />
    <ECID id="1420101011" valueType="Ascii" logicalName="FA.T3Timeout" value="" min="" max="" eventTrigger="" units="" description="T3 Timeout" isArray="false" />
    <ECID id="1420101012" valueType="Ascii" logicalName="FA.T5Timeout" value="" min="" max="" eventTrigger="" units="" description="T5 Timeout" isArray="false" />
    <ECID id="1420101013" valueType="Ascii" logicalName="FA.T6Timeout" value="" min="" max="" eventTrigger="" units="" description="T6 Timeout" isArray="false" />
    <ECID id="1420101014" valueType="Ascii" logicalName="FA.T7Timeout" value="" min="" max="" eventTrigger="" units="" description="T7 Timeout" isArray="false" />
    <ECID id="1420101015" valueType="Ascii" logicalName="FA.T8Timeout" value="" min="" max="" eventTrigger="" units="" description="T8 Timeout" isArray="false" />
    <ECID id="1420101016" valueType="Ascii" logicalName="FA.ConnectionMode" value="" min="" max="" eventTrigger="" units="" description="HSMS/Serial" isArray="false" />
    <ECID id="1420101017" valueType="Ascii" logicalName="FA.LP1DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="DefaultTransferState" isArray="false" />
    <ECID id="1420101018" valueType="Ascii" logicalName="FA.LP2DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="DefaultTransferState" isArray="false" />
    <ECID id="1420101019" valueType="Ascii" logicalName="FA.LP3DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="DefaultTransferState" isArray="false" />
  </EquipmentConstants>
  <DataVariables>
    <DVID id="3007" valueType="I4" logicalName="ECChangedID" value="" eventTrigger="" description="Changed ECID list L,n&lt;ECID&gt;" isArray="false" />
    <DVID id="3102" valueType="Ascii" logicalName="LotID" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3103" valueType="Ascii" logicalName="RecipeID" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3104" valueType="Ascii" logicalName="JobID" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3105" valueType="Ascii" logicalName="CarrierID" value="" eventTrigger="" description="The ID of the carrier." isArray="false" />
    <DVID id="3106" valueType="Ascii" logicalName="SlotMap" value="" eventTrigger="" description="Presence status of wafers in the carrier.&#xD;&#xA;L, n (n = Number of SLOTSTATEs)&#xD;&#xA;&lt;SLOTSTATE&gt;&#xD;&#xA;0=UNDEFINED&#xD;&#xA;1=EMPTY&#xD;&#xA;2=NOT EMPTY&#xD;&#xA;3=CORRECTLY OCCUPIED&#xD;&#xA;4=DOUBLE SLOTTED&#xD;&#xA;5=CROSS SLOTTED" isArray="false" />
    <DVID id="3107" valueType="Ascii" logicalName="SequenceID" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3108" valueType="Ascii" logicalName="StationName" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3109" valueType="Ascii" logicalName="RecipeStepNumber" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3110" valueType="Ascii" logicalName="SlotID" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3113" valueType="I4" logicalName="PortID" value="" eventTrigger="" description="Load port ID" isArray="false" />
    <DVID id="3124" valueType="I4" logicalName="ProcessedWaferCount" value="" eventTrigger="" description="" isArray="false" />
    <DVID id="3125" valueType="I4" logicalName="WaferProcessResult" value="" eventTrigger="" description="Wafer Process Result. &#xD;&#xA;0=Failed&#xD;&#xA;1=Successful" isArray="false" />
    <DVID id="3404" valueType="Ascii" logicalName="SubstID" value="" eventTrigger="" description="Identifier of substrate associated with last event." isArray="false" />
    <DVID id="3405" valueType="Ascii" logicalName="SubstLocID" value="" eventTrigger="" description="Identifier for equipment substrate location associated with the last event." isArray="false" />
    <DVID id="3406" valueType="I4" logicalName="SubstLocState" value="" eventTrigger="" description="State of substrate location associated with the last event.&#xD;&#xA;0=UNOCCUPIED&#xD;&#xA;1=OCCUPIED" isArray="false" />
    <DVID id="3503" valueType="Ascii" logicalName="SmartTag" value="" eventTrigger="" description="TagData" isArray="false" />
  </DataVariables>
  <DataCollections useAnnotatedEvent="false">
    <RPTIDs>
      <RPTID id="1" logicalName="DefaultDefinedReport_1">
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
      </RPTID>
      <RPTID id="2" logicalName="DefaultDefinedReport_2">
        <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
      </RPTID>
      <RPTID id="3" logicalName="DefaultDefinedReport_3">
        <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
        <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
        <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
      </RPTID>
      <RPTID id="4" logicalName="DefaultDefinedReport_4">
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
      </RPTID>
      <RPTID id="5" logicalName="DefaultDefinedReport_5">
        <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
      </RPTID>
      <RPTID id="6" logicalName="DefaultDefinedReport_6">
        <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3503" varType="DataVariable" logicalName="SmartTag" />
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
      </RPTID>
      <RPTID id="7" logicalName="DefaultDefinedReport_7">
        <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
      </RPTID>
      <RPTID id="8" logicalName="DefaultDefinedReport_8">
        <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
      </RPTID>
      <RPTID id="9" logicalName="DefaultDefinedReport_9">
        <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3124" varType="DataVariable" logicalName="ProcessedWaferCount" />
      </RPTID>
      <RPTID id="10" logicalName="DefaultDefinedReport_10">
        <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3125" varType="DataVariable" logicalName="WaferProcessResult" />
      </RPTID>
      <RPTID id="11" logicalName="DefaultDefinedReport_11">
        <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
      </RPTID>
      <RPTID id="12" logicalName="DefaultDefinedReport_12">
        <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
        <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
      </RPTID>
    </RPTIDs>
    <CEIDs>
      <CEID id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
        <RPTID id="1" logicalName="DefaultDefinedReport_1">
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
          <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
        </RPTID>
      </CEID>
      <CEID id="2" logicalName="ControlStateLOCAL" description="" enabled="true">
        <RPTID id="1" logicalName="DefaultDefinedReport_1">
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
          <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
        </RPTID>
      </CEID>
      <CEID id="3" logicalName="ControlStateREMOTE" description="" enabled="true">
        <RPTID id="1" logicalName="DefaultDefinedReport_1">
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
          <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
        </RPTID>
      </CEID>
      <CEID id="8" logicalName="EquipmentConstantChanged" description="" enabled="true">
        <RPTID id="2" logicalName="DefaultDefinedReport_2">
          <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
        </RPTID>
      </CEID>
      <CEID id="160" logicalName="SpoolingActivated" description="" enabled="true" />
      <CEID id="161" logicalName="SpoolingDeactivated" description="" enabled="true" />
      <CEID id="162" logicalName="SpoolingFailed" description="" enabled="true" />
      <CEID id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="false">
        <RPTID id="3" logicalName="DefaultDefinedReport_3">
          <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
          <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
          <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="504" logicalName="WAFER_ARRIVE_POSITION" description="" enabled="false">
        <RPTID id="3" logicalName="DefaultDefinedReport_3">
          <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
          <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
          <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1000" logicalName="CARRIER_ARRIVED" description="" enabled="true">
        <RPTID id="4" logicalName="DefaultDefinedReport_4">
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1001" logicalName="CARRIER_REMOVED" description="" enabled="true">
        <RPTID id="5" logicalName="DefaultDefinedReport_5">
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1002" logicalName="CARRIER_ID_READ" description="" enabled="true">
        <RPTID id="6" logicalName="DefaultDefinedReport_6">
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3503" varType="DataVariable" logicalName="SmartTag" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1003" logicalName="CARRIER_ID_READ_FAILED" description="" enabled="true">
        <RPTID id="4" logicalName="DefaultDefinedReport_4">
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1004" logicalName="CARRIER_ID_WRITE" description="" enabled="true">
        <RPTID id="5" logicalName="DefaultDefinedReport_5">
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1005" logicalName="CARRIER_ID_WRITE_FAILED" description="" enabled="true">
        <RPTID id="4" logicalName="DefaultDefinedReport_4">
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1006" logicalName="CARRIER_LOADED" description="" enabled="true">
        <RPTID id="5" logicalName="DefaultDefinedReport_5">
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1007" logicalName="CARRIER_UNLOADED" description="" enabled="true">
        <RPTID id="5" logicalName="DefaultDefinedReport_5">
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1008" logicalName="SLOT_MAP_AVAILABLE" description="" enabled="true">
        <RPTID id="7" logicalName="DefaultDefinedReport_7">
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1012" logicalName="PortClamped" description="" enabled="true">
        <RPTID id="4" logicalName="DefaultDefinedReport_4">
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1013" logicalName="PortUnClamped" description="" enabled="true">
        <RPTID id="4" logicalName="DefaultDefinedReport_4">
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
        </RPTID>
      </CEID>
      <CEID id="1022" logicalName="PortJobStarted" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1023" logicalName="PortJobStopped" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1024" logicalName="PortJobPaused" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1025" logicalName="PortJobResumed" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1026" logicalName="PortJobAborted" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1027" logicalName="PortJobFinished" description="" enabled="true">
        <RPTID id="9" logicalName="DefaultDefinedReport_9">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
          <ReportVariable id="3124" varType="DataVariable" logicalName="ProcessedWaferCount" />
        </RPTID>
      </CEID>
      <CEID id="1028" logicalName="PortJobFailed" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1030" logicalName="PortPPSelected" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1031" logicalName="PortPPSelectFailed" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1032" logicalName="PortJobWaferStart" description="" enabled="true">
        <RPTID id="8" logicalName="DefaultDefinedReport_8">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
        </RPTID>
      </CEID>
      <CEID id="1033" logicalName="PortJobWaferEnd" description="" enabled="true">
        <RPTID id="10" logicalName="DefaultDefinedReport_10">
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3104" varType="DataVariable" logicalName="JobID" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
          <ReportVariable id="3125" varType="DataVariable" logicalName="WaferProcessResult" />
        </RPTID>
      </CEID>
      <CEID id="3001" logicalName="PMARecipeStart" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3002" logicalName="PMARecipeComplete" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3003" logicalName="PMARecipeStepStart" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3004" logicalName="PMARecipeStepEnd" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3005" logicalName="PMARecipeFailed" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3011" logicalName="PMBRecipeStart" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3012" logicalName="PMBRecipeComplete" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3013" logicalName="PMBRecipeStepStart" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3014" logicalName="PMBRecipeStepEnd" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3015" logicalName="PMBRecipeFailed" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3021" logicalName="PMCRecipeStart" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3022" logicalName="PMCRecipeComplete" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3023" logicalName="PMCRecipeStepStart" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3024" logicalName="PMCRecipeStepEnd" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3025" logicalName="PMCRecipeFailed" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3031" logicalName="PMDRecipeStart" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3032" logicalName="PMDRecipeComplete" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3033" logicalName="PMDRecipeStepStart" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3034" logicalName="PMDRecipeStepEnd" description="" enabled="true">
        <RPTID id="12" logicalName="DefaultDefinedReport_12">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="3035" logicalName="PMDRecipeFailed" description="" enabled="true">
        <RPTID id="11" logicalName="DefaultDefinedReport_11">
          <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
          <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
          <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
          <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
          <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
          <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
        </RPTID>
      </CEID>
      <CEID id="1000101" logicalName="__SYSTEM__1000101__ALARMSET" description="Alarm Set : System Error" enabled="true" />
      <CEID id="2000101" logicalName="__SYSTEM__2000101__ALARMCLEAR" description="Alarm Clear : System Error" enabled="true" />
      <CEID id="1006201" logicalName="__SYSTEM__1006201__ALARMSET" description="Alarm Set : PMA Error" enabled="true" />
      <CEID id="2006201" logicalName="__SYSTEM__2006201__ALARMCLEAR" description="Alarm Clear : PMA Error" enabled="true" />
      <CEID id="1006301" logicalName="__SYSTEM__1006301__ALARMSET" description="Alarm Set : PMB Error" enabled="true" />
      <CEID id="2006301" logicalName="__SYSTEM__2006301__ALARMCLEAR" description="Alarm Clear : PMB Error" enabled="true" />
    </CEIDs>
  </DataCollections>
  <Alarms>
    <ALID id="10101001" logicalName="System.EFEM.AirErrorForRobot" description="EFEM Robot Air Error" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101002" logicalName="System.EFEM.DoorOpen" description="EFEM door open" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101003" logicalName="System.EFEM.EmoAlarm" description="EFEM EMO error" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101004" logicalName="System.EFEM.FFUAlarm" description="EFEM FFU Error" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101005" logicalName="System.EFEM.IonizerAlarm" description="EFEM Ionizer Error" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101006" logicalName="System.EFEM.IsMaintain" description="EFEM in Maintenance Mode, switch to online and turn key to auto" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101007" logicalName="System.EFEM.CompressedAirPressureAlarm" description="EFEM Compressed Air Pressure Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101008" logicalName="System.EFEM.DifferentialPressureSensorSetting1Alarm" description="EFEM Differential Pressure Sensor Setting1 Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101009" logicalName="System.EFEM.DifferentialPressureSensorSetting2Alarm" description="EFEM Differential Pressure Sensor Setting2 Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101010" logicalName="System.EFEM.DrivePowerAlarm" description="EFEM Drive Power Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101011" logicalName="System.EFEM.FlowGaugeWarning" description="EFEM Flow Gauge Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101012" logicalName="System.EFEM.VacuumSourcePressureAlarm" description="EFEM Vacuum Source Pressure Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10101013" logicalName="System.EFEM.WaterLeakWarning" description="EFEM Water Leak Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10202001" logicalName="System.io.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="10202002" logicalName="System.io.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
    <ALID id="620101001" logicalName="PMA.io.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="1006201" eventClear="2006201" />
    <ALID id="620101002" logicalName="PMA.io.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="1006201" eventClear="2006201" />
    <ALID id="630101001" logicalName="PMB.io.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="1006301" eventClear="2006301" />
    <ALID id="630101002" logicalName="PMB.io.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="1006301" eventClear="2006301" />
  </Alarms>
</Equipment>