Mars200/JetVirgoPM/PMs/Routines/RfPowerRoutine.cs

using System;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using JetVirgoPM.Devices;

namespace JetVirgoPM.PMs.Routines
{
    class RfPowerRoutine : PMRoutineBase, IStepRoutine
    {
        private enum RoutineStep
        {
            kRFPowerOn,
            kRFPowerOFF,
            MatchOn,
            End,
        };

        private readonly bool _ON;
        private R_TRIG _rf1TimeoutTrig = new R_TRIG();
        private R_TRIG _rf2TimeoutTrig = new R_TRIG();

        public bool EnableRF1 => Math.Abs(_rf1PowerOnTime) > 0.01;
        public bool EnableRF2 => Math.Abs(_rf2PowerOnTime) > 0.01;

        private bool _enableBias1;
        private double _rf1Power;
        private double _rf1PowerBias;
        private BiasRfMatchMode _match1Mode;
        private double _match1C1;
        private double _match1C2;
        private double _rf1PowerOnTime;

        private bool _enableBias2;
        private double _rf2Power;
        private double _rf2PowerBias;
        private BiasRfMatchMode _match2Mode;
        private double _match2C1;
        private double _match2C2;
        private double _rf2PowerOnTime;

        public RfPowerRoutine(JetDualPM chamber, bool bON) : base(chamber)
        {
            Name = "RF Power";
            _ON = bON;
        }

        public RState Start(params object[] objs)
        {
            if (!_chamber.IsFastPumpOpened)
            {
                Stop("Pump 阀没有打开");
                return RState.Failed;
            }

            if (_ON && _chamber.TotalGasSetpoint <= 0)
            {
                Stop("No gas flowing for RF power on");
                return RState.Failed;
            }

            Reset();
            _enableBias1 = SC.GetValue<bool>($"{_chamber.Module}.BiasRf1.EnableBiasRF");
            _enableBias2 = SC.GetValue<bool>($"{_chamber.Module}.BiasRf2.EnableBiasRF");
            if (_ON)
            {
                if (objs == null || objs.Length < 12)
                    throw new ArgumentException("RF routine argument error");

                _rf1Power = Convert.ToDouble(objs[0]);
                _rf1PowerBias = Convert.ToDouble(objs[1]);
                _rf1PowerOnTime = Convert.ToDouble(objs[2]);
                _match1Mode = objs[3].ToString() == "Preset" ? BiasRfMatchMode.Preset : BiasRfMatchMode.Hold;
                _match1C1 = Convert.ToDouble(objs[4]);
                _match1C2 = Convert.ToDouble(objs[5]);

                _rf2Power = Convert.ToDouble(objs[6]);
                _rf2PowerBias = Convert.ToDouble(objs[7]);
                _rf2PowerOnTime = Convert.ToDouble(objs[8]);
                _match2Mode = objs[9].ToString() == "Preset" ? BiasRfMatchMode.Preset : BiasRfMatchMode.Hold;
                _match2C1 = Convert.ToDouble(objs[10]);
                _match2C2 = Convert.ToDouble(objs[11]);
            }
            else
            {
                _rf1Power = 0.0;
                _rf1PowerBias = 0.0;
                _match1Mode = BiasRfMatchMode.Preset;
                _match1C1 = 0.0;
                _match1C2 = 0.0;
                _rf1PowerOnTime = 0.0;

                _rf2Power = 0.0;
                _rf2PowerBias = 0.0;
                _match2Mode = BiasRfMatchMode.Preset;
                _match2C1 = 0.0;
                _match2C2 = 0.0;
                _rf2PowerOnTime = 0.0;
            }

            return Runner.Start(_chamber.Module.ToString(), Name);
        }

        public RState Monitor()
        {
            if (_ON)
            {
                Runner.Run(RoutineStep.kRFPowerOn,  RFPowerOn,  CheckRFPowerOn, Math.Max((int)_rf1PowerOnTime, (int)_rf2PowerOnTime) * 1000)
                      .End(RoutineStep.End,         EndFunc,    _delay_0s);
            }
            else
            {
                Runner.Run(RoutineStep.kRFPowerOFF, RFPowerOFF, CheckRFPowerOff, 2000)
                      .End(RoutineStep.End,         EndFunc,    _delay_0s);
            }

            return Runner.Status;
        }

        bool RFPowerOn()
        {
            if (!EnableRF1 && !EnableRF2)
            {
                Notify($"放电结束");
                return false;
            }

            if (EnableRF1)
            {
                if (_enableBias1)
                    Notify($"放电开始, 源射频1设定值 {_rf1Power}, 偏压射频1设定值 {_rf1PowerBias}");
                else
                    Notify($"放电开始, 源射频1设定值 {_rf1Power}");

                if (Math.Abs(_rf1Power) > 0.01 && Math.Abs(_rf1PowerBias) > 0.01)
                {
                    _chamber.Generator1Setpower((float)_rf1Power);
                    _chamber.GeneratorBias1Setpower((float)_rf1PowerBias);
                    if (_match1Mode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBias1SetMatchMode(true);
                        Notify($"Bias RF 1 Match C1设定值 {_match1C1}, Bias RF 1 Match C2设定值 {_match1C2}");
                        _chamber.SetBias1MatchPosition((float)_match1C1, (float)_match1C2);
                    }
                    else if (_match1Mode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBias1SetMatchMode(false);
                    }

                    _chamber.Generator1PowerOn(true);
                    _chamber.GeneratorBias1PowerOn(true);
                }
                else if (Math.Abs(_rf1Power) < 0.01 && Math.Abs(_rf1PowerBias) > 0.01)
                {
                    if (_match1Mode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBias1SetMatchMode(true);
                        Notify($"Bias RF 1 Match C1设定值 {_match1C1}, Bias RF 1 Match C2设定值 {_match1C2}");
                        _chamber.SetBias1MatchPosition((float)_match1C1, (float)_match1C2);
                    }
                    else if (_match1Mode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBias1SetMatchMode(false);
                    }
                    _chamber.GeneratorBias1Setpower((float)_rf1PowerBias);
                    _chamber.GeneratorBias1PowerOn(true);
                }
                else if (Math.Abs(_rf1Power) > 0.01 && Math.Abs(_rf1PowerBias) < 0.01)
                {
                    _chamber.Generator1Setpower((float)_rf1Power);
                    _chamber.Generator1PowerOn(true);
                }
            }

            if (EnableRF2)
            {
                if (_enableBias2)
                    Notify($"放电开始, 源射频2设定值 {_rf2Power}, 偏压射频2设定值 {_rf2PowerBias}");
                else
                    Notify($"放电开始, 源射频2设定值 {_rf2Power}");
                if (Math.Abs(_rf2Power) > 0.01 && Math.Abs(_rf2PowerBias) > 0.01)
                {
                    _chamber.Generator2Setpower((float)_rf2Power);
                    _chamber.GeneratorBias2Setpower((float)_rf2PowerBias);
                    if (_match2Mode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBias2SetMatchMode(true);
                        Notify($"Bias RF 2 Match C1设定值 {_match2C1}, Bias RF 2 Match C2设定值 {_match2C2}");
                        _chamber.SetBias2MatchPosition((float)_match2C1, (float)_match2C2);
                    }
                    else if (_match2Mode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBias2SetMatchMode(false);
                    }

                    _chamber.Generator2PowerOn(true);
                    _chamber.GeneratorBias2PowerOn(true);
                }
                else if (Math.Abs(_rf2Power) < 0.01 && Math.Abs(_rf2PowerBias) > 0.01)
                {
                    if (_match2Mode == BiasRfMatchMode.Preset)
                    {
                        _chamber.GeneratorBias2SetMatchMode(true);
                        Notify($"Bias RF 2 Match C1设定值 {_match2C1}, Bias RF 2 Match C2设定值 {_match2C2}");
                        _chamber.SetBias2MatchPosition((float)_match2C1, (float)_match2C2);
                    }
                    else if (_match2Mode == BiasRfMatchMode.Hold)
                    {
                        _chamber.GeneratorBias2SetMatchMode(false);
                    }
                    _chamber.GeneratorBias2Setpower((float)_rf2PowerBias);
                    _chamber.GeneratorBias2PowerOn(true);
                }
                else if (Math.Abs(_rf2Power) > 0.01 && Math.Abs(_rf2PowerBias) < 0.01)
                {
                    _chamber.Generator2Setpower((float)_rf2Power);
                    _chamber.Generator2PowerOn(true);
                }
            }

            return true;
        }
        bool CheckRFPowerOn()
        {
            _rf1TimeoutTrig.CLK = Elapsed >= _rf1PowerOnTime;
            if (_rf1TimeoutTrig.Q)
            {
                Notify("RF1放电结束");
                _chamber.Generator1PowerOn(false);
                _chamber.GeneratorBias1PowerOn(false);
            }

            _rf2TimeoutTrig.CLK = Elapsed >= _rf2PowerOnTime;
            if (_rf2TimeoutTrig.Q)
            {
                Notify("RF2放电结束");
                _chamber.Generator2PowerOn(false);
                _chamber.GeneratorBias2PowerOn(false);
            }

            if (Elapsed >= _rf1PowerOnTime && Elapsed >= _rf2PowerOnTime)
            {
                Notify("结束");

                _chamber.StopAllGases();
                _chamber.OpenValve(ValveType.PROCESS, false);
                _chamber.OpenValve(ValveType.PURGE, false);
                _chamber.Generator1PowerOn(false);
                _chamber.GeneratorBias1PowerOn(false);
                _chamber.Generator2PowerOn(false);
                _chamber.GeneratorBias2PowerOn(false);

                return true;
            }

            return false;
        }

        bool RFPowerOFF()
        {
            Notify("放电停止");
            _chamber.Generator1PowerOn(false);
            _chamber.Generator2PowerOn(false);
            if (_enableBias1)
                _chamber.GeneratorBias1PowerOn(false);
            if (_enableBias2)
                _chamber.GeneratorBias2PowerOn(false);

            return true;
        }

        bool CheckRFPowerOff()
        {
            return true;
        }

        public override void Abort()
        {
            _chamber.Generator1Setpower(0);
            _chamber.GeneratorBias1Setpower(0);
            _chamber.Generator1PowerOn(false);
            _chamber.GeneratorBias1PowerOn(false);
            _chamber.Generator2Setpower(0);
            _chamber.GeneratorBias2Setpower(0);
            _chamber.Generator2PowerOn(false);
            _chamber.GeneratorBias2PowerOn(false);
        }
    }
}