Mars200/JetVirgoPM/PMs/Routines/PMRoutineBase.cs

using System;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using JetVirgoPM.Devices;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;

namespace JetVirgoPM.PMs.Routines
{
    public enum MonitorStepState
    {
        Continue,
        Failed,
        Break,
    }

    class PMRoutineBase : ModuleRoutineBase
    {
        // ----------------------------Fields--------------------------
        //
        //private SCConfigItem scOpenGasValveTimeout = null;
        private int dOpenGasValveTimeout = 1;  //1S
        //private SCConfigItem scCloseGasValveTimeout = null;
        public int dCloseGasValveTimeout = 2;  //2s
        //private SCConfigItem scOpenCloseSlitValveTimeout = null;
        protected int valveOpenCloseTimeout = 2;  //2s
        protected int _PressureTrip1 = 80;
        protected bool bUINotify;
        //public static Guid RecipeRunGuid;
        protected readonly JetDualPM _chamber;

        // --------------------------Properties------------------------
        //

        //状态持续时间，单位为秒
        public int Elapsed { get { return (int)(counter.GetElapseTime() / 1000); } }
        public string Display { get; set; }
        public string WaferID { get; set; }

        // Constructor
        protected PMRoutineBase(JetDualPM chamber):base(chamber.Module.ToString())
        {
            _chamber = chamber;
            bUINotify = true;

            dOpenGasValveTimeout = SC.GetValue<int>($"{Module}.OpenGasValveTimeout");
            dCloseGasValveTimeout = SC.GetValue<int>($"{Module}.TimeLimitOfCloseGasValve");
            valveOpenCloseTimeout = SC.GetValue<int>($"{Module}.OpenCloseSlitValveTimeout");
        }

        public RState CheckLid()
        {
            if (!_chamber.IsLidClosed)
            {
                this.Stop("Chamber 盖子必须关");
                return RState.Failed;
            }
            return RState.Running;
        }

        protected RState CheckSlitDoor1()
        {
            if (!_chamber.IsSlitDoor1Closed)
            {
                Stop("传送门1必须关");
                return RState.Failed;
            }
            return RState.Running;
        }

        protected RState CheckSlitDoor2()
        {
            if (!_chamber.IsSlitDoor2Closed)
            {
                Stop("传送门2必须关");
                return RState.Failed;
            }
            return RState.Running;
        }

        protected RState CheckDryPump()
        {
            if (!_chamber.IsPumpRunning)
            {
                Stop("泵没有启动");
                return RState.Failed;
            }
            if (_chamber.HasPumpError)
            {
                Stop("泵状态有错误");
                return RState.Failed;
            }
            return RState.Running;
        }

        protected bool FullOpenTV()
        {
            Notify("完全打开蝶阀");
            _chamber.FullOpenTV();
            return true;
        }

        protected bool CheckFullOpenTV()
        {
            if (_chamber.TVPosition >= 98)
            {
                Notify("蝶阀已经完全打开");
                return true;
            }

            return false;
        }
        protected bool CloseAllValve()
        {
            Notify("关闭所有的阀门");
            _chamber.CloseValves();
            return true;
        }

        protected bool OpenValve(ValveType vlv, bool bOpen)
        {
            _chamber.OpenValve(vlv, bOpen);
            Notify($"{(bOpen ? "打开" : "关闭")} {vlv} 阀");
            return true;
        }
        protected bool CheckValve(ValveType vlv, bool bOpen)
        {
            return _chamber.CheckValveSwitchStatus(vlv, bOpen);
        }

        protected bool ATM2(bool on)
        {
            Notify($"等待 ATM 信号 {(on ? "ON" : "OFF")}");
            return true;
        }
        protected bool CheckATM2(bool on)
        {
            return on ? _chamber.IsATM : !_chamber.IsATM;
        }

        protected bool WaitPressure(int targetPressure, bool morethan)
        {
            Notify($"等待压力{(morethan ? "上升" : "下降")} 到 {targetPressure:N} mTorr");
            return true;
        }
        protected bool CheckPressure(int targetPressure, bool morethan)
        {
            bool res = morethan ? _chamber.ChamberPressure > targetPressure : _chamber.ChamberPressure < targetPressure;
            if (res)
            {
                Notify($"压力已经到达 {targetPressure:N} mTorr");
            }
            return res;
        }

        protected bool Foreline(uint target)
        {
            Notify($"Check foreline pressure, 目标 {target} mTorr");
            return true;
        }
        protected bool CheckForeline(uint target)
        {
            return _chamber.ForelinePressure < target;
        }

        protected bool CheckVAC()
        {
            return _chamber.IsVAC;
        }

        protected bool SetLiftPinUpDown(EnumDualPM pos, bool isUp)
        {
            if (pos == EnumDualPM.Left || pos == EnumDualPM.Both)
            {
                Notify($"设置 lift pin 1 {_chamber.Name} " + (isUp ? "升" : "降"));
                if (!_chamber.SetLiftPin1(isUp ? MovementPosition.Up : MovementPosition.Down, out string reason))
                {
                    Stop(reason);
                    return false;
                }
            }

            if (pos == EnumDualPM.Right || pos == EnumDualPM.Both)
            {
                Notify($"设置 lift pin 2 {_chamber.Name} " + (isUp ? "升" : "降"));
                if (!_chamber.SetLiftPin2(isUp ? MovementPosition.Up : MovementPosition.Down, out string reason))
                {
                    Stop(reason);
                    return false;
                }
            }
            return true;
        }

        protected bool ChecktLiftPinUpDown(EnumDualPM pos, bool isUp)
        {
            return ((pos != EnumDualPM.Left && pos != EnumDualPM.Both) || (isUp ? _chamber.CheckLift1Up() : _chamber.CheckLift1Down())) &&
                  ((pos != EnumDualPM.Right && pos != EnumDualPM.Both) || (isUp ? _chamber.CheckLift2Up() : _chamber.CheckLift2Down()));
        }
        
        protected bool SetSlitDoor(EnumDualPM pos, bool isOpen)
        {
            if(pos == EnumDualPM.Left || pos ==  EnumDualPM.Both)
            {
                Notify($"设置 {_chamber.Name} Slit Door 1 {(isOpen ? "开" : "关")} ");

                if (!_chamber.SetSlitDoor1(isOpen, out string reason1))
                {
                    Stop(reason1);
                    return false;
                }
            }

            if (pos == EnumDualPM.Right || pos == EnumDualPM.Both)
            {
                Notify($"设置 {_chamber.Name} Slit Door 2 {(isOpen ? "开" : "关")} ");
                if (!_chamber.SetSlitDoor2(isOpen, out string reason2))
                {
                    Stop(reason2);
                    return false;
                }
            }
            return true;
        }

        protected bool CheckSlitDoor(EnumDualPM pos, bool isOpen)
        {
            return ((pos != EnumDualPM.Left && pos != EnumDualPM.Both) || (isOpen ? _chamber.CheckSlitDoor1Open() : _chamber.CheckSlitDoor1Close())) &&
                   ((pos != EnumDualPM.Right && pos != EnumDualPM.Both) || (isOpen ? _chamber.CheckSlitDoor2Open() : _chamber.CheckSlitDoor2Close()));
        }
        protected void End(int id)
        {
            bool Func()
            {
                double duration_min = counter.GetElapseTime();
                TimeSpan ts = TimeSpan.FromMilliseconds(duration_min);

                string info = $"完成 in {ts.Minutes} minutes {ts.Seconds} seconds";
                Notify(info);

                //if (bUINotify)
                //    EV.PostPopDialogMessage(EventLevel.Information, Name, $"{Module} {info} Finished");

                return true;
            }

            //Runner.End(id, Func, _delay_1s);
        }

        protected bool EndFunc()
        {
            double duration_min = counter.GetElapseTime();
            TimeSpan ts = TimeSpan.FromMilliseconds(duration_min);

            string info = $"完成 in {ts.Minutes} minutes {ts.Seconds} seconds";
            Notify(info);
            return true;
        }

        public virtual void Abort()
        {
            _chamber.Generator1PowerOn(false);
            _chamber.GeneratorBias1PowerOn(false);
            _chamber.Generator2PowerOn(false);
            _chamber.GeneratorBias2PowerOn(false);
            _chamber.StopAllGases();
            //ProcessDataRecorder.UpdateStatus(RecipeRunGuid.ToString(), SusceptorStatus.Failed.ToString(), Module);
        }

        public bool CloseValve()
        {
            Notify("Vent End Close Vent Valve");

            _chamber.OpenValve(ValveType.PURGE, false);
            _chamber.OpenValve(ValveType.FAST_VENT, false);
            _chamber.OpenValve(ValveType.PROCESS, false);
            //_chamber.OpenValve(ValveType.SOFT_PUMP, true);
            //_chamber.OpenValve(ValveType.FAST_PUMP, true);

            return true;
        }

        protected bool Pump(int target)
        {
            Notify($"Pumping to {target} mTorr");

            _chamber.OpenValve(ValveType.PROCESS, false);
            _chamber.OpenValve(ValveType.PURGE, false);
            _chamber.OpenValve(ValveType.FAST_VENT, false);
            _chamber.OpenValve(ValveType.FAST_PUMP, true);

            return true;
        }

        protected bool CheckPump(int target, bool isStopPumpOnceDone)
        {
            if (_chamber.ChamberPressure < target)
            {
                if (isStopPumpOnceDone)
                {
                    _chamber.OpenValve(ValveType.FAST_PUMP, false);
                }
                return true;
            }
            return true;
        }

        protected bool Vent(int target)
        {
            Notify($"Venting to {target} mTorr");

            _chamber.OpenValve(ValveType.FAST_VENT, false);
            _chamber.OpenValve(ValveType.FAST_PUMP, false);
            _chamber.OpenValve(ValveType.PROCESS, true);
            _chamber.OpenValve(ValveType.PURGE, true);
            _chamber.OpenValve(ValveType.N2, true);

            return true;
        }

        protected bool CheckVent(int target, bool isStopVentOnceDone)
        {
            if (_chamber.ChamberPressurePressure > target)
            {
                if (isStopVentOnceDone)
                {
                    _chamber.OpenValve(ValveType.PROCESS, false);
                    _chamber.OpenValve(ValveType.PURGE, false);
                    _chamber.OpenValve(ValveType.N2, false);
                }
                return true;
            }
            return false;
        }
        protected bool SetLETemp(double target1, double target2, double tolerance, bool enableLE1, bool enableLE2)
        {
            if (enableLE1)
            {
                if (_chamber.LETempFB1 > target1)
                {
                    Notify($"{_chamber.LETempFB1Name}当前温度{_chamber.LETempFB1} ℃, 大于目标 {target1.ToString()} ℃");
                    //return true;
                }
                //if (!(Math.Abs(_chamber.LETempFB1 - target1) <= tolerance))
                {
                    _chamber.HeatLE1(target1);
                }
                Notify($"检查底座温度值,{_chamber.LETempFB1Name}当前温度{_chamber.LETempFB1} ℃, 目标 {target1.ToString()} ℃");
            }

            if (enableLE2)
            {
                if (_chamber.LETempFB2 > target2)
                {
                    Notify($"{_chamber.LETempFB2Name}当前温度{_chamber.LETempFB2} ℃, 大于目标 {target2.ToString()} ℃");
                    //return true;
                }
                //if (!(Math.Abs(_chamber.LETempFB2 - target2) <= tolerance))
                {
                    _chamber.HeatLE2(target2);
                }
                Notify($"检查底座温度值,{_chamber.LETempFB2Name}当前温度{_chamber.LETempFB2} ℃, 目标 {target2.ToString()} ℃");
            }

            return true;
        }

        protected bool CheckLETemp(double target1, double target2, double tolerance, bool enableLE1, bool enableLE2)
        {
            return (!enableLE1 || Math.Abs(_chamber.LETempFB1 - target1) <= tolerance) &&
                   (!enableLE2 || Math.Abs(_chamber.LETempFB2 - target2) <= tolerance);
        }
        protected bool SetCoolant1Temp(double target, double offset, double tolerance)
        {
            if (_chamber.CoolantOutletTempFB1 > target)
            {
                Notify($"水冷当前温度{_chamber.CoolantOutletTempFB1} ℃, 大于目标 {target.ToString()} ℃");
                //return true;
            }
            //if (!(Math.Abs(_chamber.CoolantOutletTempFB1 - target) <= tolerance))
            {
                _chamber.HeatChiller1(target, offset);
            }

            Notify($"检查水冷温度值,当前温度{_chamber.CoolantOutletTempFB1} ℃, 目标 {target.ToString()} ℃");
            return true;
        }

        protected bool CheckCoolant1Temp(double target, double offset, double tolerance)
        {
            return Math.Abs(_chamber.CoolantOutletTempFB1 - target) <= tolerance;
        }

        protected bool SetCoolant2Temp(double target, double offset, double tolerance)
        {
            if (_chamber.CoolantOutletTempFB2 > target)
            {
                Notify($"水冷当前温度{_chamber.CoolantOutletTempFB2} ℃, 大于目标 {target.ToString()} ℃");
                //return true;
            }
            //if (!(Math.Abs(_chamber.CoolantOutletTempFB2 - target) <= tolerance))
            {
                _chamber.HeatChiller2(target, offset);
            }

            Notify($"检查水冷温度值,当前温度{_chamber.CoolantOutletTempFB2} ℃, 目标 {target.ToString()} ℃");
            return true;
        }

        protected bool CheckCoolant2Temp(double target, double offset, double tolerance)
        {
            return Math.Abs(_chamber.CoolantOutletTempFB2 - target) <= tolerance;
        }
    }
}