Mars200/JetVirgoPM/PMs/Routines/PMLeakCheckRoutine.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using JetVirgoPM.Devices;
using MECF.Framework.Common.CommonData;
using MECF.Framework.Common.Routine;

namespace JetVirgoPM.PMs.Routines
{
    class LeakCheckRoutine : PMRoutineBase
    {
        private enum LeakCheckStep
        {
            PumpDown,
            CheckDoor,
            CheckDryPump,

            CloseAllValve,

            OpenPumpingValve,

            OpenPurgeValve,
            OpenGasFinalValve,
            ClosePurgeValve,
            CloseGasFinalValve,

            OpenMfc1Valve,
            OpenMfc2Valve,
            OpenMfc3Valve,
            OpenMfc4Valve,
            OpenMfc5Valve,
            OpenMfc6Valve,
            CloseMfc1Valve,
            CloseMfc2Valve,
            CloseMfc3Valve,
            CloseMfc4Valve,
            CloseMfc5Valve,
            CloseMfc6Valve,
            StartFlow,
            StopFlow,
            RecordStartPressure,

            RecordEndPressure,

            PumpDownDelay,

            StartPressureDelay,

            EndPressureDelay,

            ClosePumpValve,

            LeakCheckDelay,

            CalcLeakCheck,

            End,
            EndLeakCheck,
            AbortLeakCheck,
            CheckPressure,
            OpenVentValve,
            OpenN2Valve,
            CloseVentValve,
            CloseN2Valve
        };

        // Fields
        private double _beginPressure = 0;
        private double _endPressure = 0;
        private double _leakRate;
        public double LeakRate { get; private set; }
        private int _leakCheckPumpDownTime;
        private int _leakCheckWaitTime;
        private LeakCheckMode _mode;
        private bool[] _enableGasLineOrN2 = new bool[7];
        private string[] _gasLineName = new string[7] { "MfcGas1", "MfcGas2", "MfcGas3", "MfcGas4", "MfcGas5", "MfcGas6", "Vent N2" };
        private Dictionary<string, string> _leakCheckModeMapToText = new Dictionary<string, string>()
        {
            {LeakCheckMode.ChamberOnly.ToString(),"ChamberOnly" },
            {LeakCheckMode.ChamberAndGasLine.ToString(),"Chamber To Gasline" },
            {LeakCheckMode.ChamberAndGasLineAndFAC.ToString(), "Chamber To FAC" },
            {LeakCheckMode.ChamberAndGasBox.ToString(), "Chamber To Gas Box Manual Valve" },
        };
        private double[] _mfcFlow = new double[6];
        private readonly PumpDownRoutine _pumpdownRoutine;
        private DeviceTimer _delayTimer = new DeviceTimer();

        // Properties
        //
        public int ElapseTime => (int)(_delayTimer.GetElapseTime() / 1000.0);

        // Constructor
        //
        public LeakCheckRoutine(JetDualPM chamber, PumpDownRoutine _pdRoutine) : base(chamber)
        {
            Name = "leak check";
            bUINotify = true;
            _pumpdownRoutine = _pdRoutine;
        }

        public void Terminate()
        {
        }

        public RState Start(params object[] objs)
        {
            // 预检查
            if (CheckLid() == RState.Running &&
                CheckSlitDoor1() == RState.Running && CheckSlitDoor2() == RState.Running &&
                CheckDryPump() == RState.Running)
            {
                _enableGasLineOrN2 = new bool[7];
                _mfcFlow = new double[6] { 0.0, 0.0, 0.0, 0.0, 0.0 , 0.0 };

                Reset();

                _delayTimer.Start(0);

                try
                {
                    if (objs.Length == 0)
                    {
                        _leakCheckPumpDownTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckPumpingTime");
                        _leakCheckWaitTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckWaitTime");
                        _leakRate = SC.GetValue<double>($"{Module}.Pump.LeakRate");
                        _mode = LeakCheckMode.ChamberOnly;
                    }
                    else
                    {
                        _leakCheckPumpDownTime = Convert.ToInt32(objs[0].ToString());
                        _leakCheckWaitTime = Convert.ToInt32(objs[1].ToString());
                        _mode = (LeakCheckMode)Enum.Parse(typeof(LeakCheckMode), objs[2].ToString());
                        _leakRate = Convert.ToSingle(objs[3].ToString());
                        for (int i = 0; i < _enableGasLineOrN2.Length; i++)
                            _enableGasLineOrN2[i] = Convert.ToBoolean(objs[4 + i].ToString());
                    }
                    for (int i = 0; i < 6; i++)
                    {
                        if (_enableGasLineOrN2[i]) _mfcFlow[i] = SC.GetValue<int>($"{Module}.MfcGas{i + 1}.MfcN2Scale");
                    }
                }
                catch (Exception ex)
                {
                    LOG.Write(ex);
                    return RState.Failed;
                }

                return Runner.Start(_chamber.Module.ToString(), Name);
            }

            return RState.Failed;
        }
        private string SetGasName()
        {
            if (_enableGasLineOrN2 == null || _enableGasLineOrN2.Length == 0 || _mode == LeakCheckMode.ChamberOnly)
                return string.Empty;
            var checkSBGasName = new StringBuilder();
            for (int i = 0; i < _enableGasLineOrN2.Length; i++)
            {
                if (_enableGasLineOrN2[i] && _gasLineName.Length > i) checkSBGasName.Append($"{_gasLineName[i]},");
            }
            return checkSBGasName.Length > 0 ? $"({checkSBGasName.ToString().Trim(',')})" : string.Empty;
        }
        public RState Monitor()
        {
            Runner.Run(LeakCheckStep.PumpDown,          StartPump,                                                                    CheckPump,                                                                    _delay_60s)
                .Run(LeakCheckStep.OpenPurgeValve,      HOFs.Apply(ExecPurgeOrGasFinalValve, ValveType.PURGE, true),                  HOFs.Apply(CheckPurgeOrGasFinalValve, ValveType.PURGE, true),                 _delay_50ms * 10)
                .Run(LeakCheckStep.OpenGasFinalValve,   HOFs.Apply(ExecPurgeOrGasFinalValve, ValveType.PROCESS, true),                HOFs.Apply(CheckPurgeOrGasFinalValve, ValveType.PROCESS, true),               _delay_50ms * 10)
                .Run(LeakCheckStep.OpenMfc1Valve,       HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[0], ValveType.Mfc1, true),        HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[0], ValveType.Mfc1, true),       _delay_50ms * 10)
                .Run(LeakCheckStep.OpenMfc2Valve,       HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[1], ValveType.Mfc2, true),        HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[1], ValveType.Mfc2, true),       _delay_50ms * 10)
                .Run(LeakCheckStep.OpenMfc3Valve,       HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[2], ValveType.Mfc3, true),        HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[2], ValveType.Mfc3, true),       _delay_50ms * 10)
                .Run(LeakCheckStep.OpenMfc4Valve,       HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[3], ValveType.Mfc4, true),        HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[3], ValveType.Mfc4, true),       _delay_50ms * 10)
                .Run(LeakCheckStep.OpenMfc5Valve,       HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[4], ValveType.Mfc5, true),        HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[4], ValveType.Mfc5, true),       _delay_50ms * 10)
                .Run(LeakCheckStep.OpenMfc6Valve,       HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[5], ValveType.Mfc6, true),        HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[5], ValveType.Mfc6, true),       _delay_50ms * 10)
                .Run(LeakCheckStep.OpenVentValve,       HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[6], ValveType.FAST_VENT, true),   HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[6], ValveType.FAST_VENT, true),  _delay_50ms * 10)
                .Run(LeakCheckStep.OpenN2Valve,         HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[6], ValveType.N2, true),          HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[6], ValveType.N2, true),         _delay_50ms * 10)
                .Run(LeakCheckStep.StartFlow,           StartFlowMFC, _delay_1s)
                .Delay(LeakCheckStep.PumpDownDelay,     _leakCheckPumpDownTime * 1000)
                .Run(LeakCheckStep.ClosePumpValve,      HOFs.Apply(OpenValve, ValveType.FAST_PUMP, false),                            HOFs.Apply(CheckValve, ValveType.FAST_PUMP, false),                           _delay_50ms * 10)
                .Run(LeakCheckStep.RecordStartPressure, RecordBeginPressure,                                                          _delay_1s)
                .Delay(LeakCheckStep.EndPressureDelay,  _leakCheckWaitTime * 1000)
                .Run(LeakCheckStep.RecordEndPressure,   RecordEndPressure,                                                            _delay_50ms)
                .Run(LeakCheckStep.CalcLeakCheck,       CalcLeakCheck,                                                                _delay_1s)
                .Run(LeakCheckStep.ClosePurgeValve,     HOFs.Apply(ExecPurgeOrGasFinalValve, ValveType.PURGE, false),                 HOFs.Apply(CheckPurgeOrGasFinalValve, ValveType.PURGE, false),                _delay_50ms * 10)
                .Run(LeakCheckStep.CloseGasFinalValve,  HOFs.Apply(ExecPurgeOrGasFinalValve, ValveType.PROCESS, false),               HOFs.Apply(CheckPurgeOrGasFinalValve, ValveType.PROCESS, false),              _delay_50ms * 10)
                .Run(LeakCheckStep.CloseMfc1Valve,      HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[0], ValveType.Mfc1, false),       HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[0], ValveType.Mfc1, false),      _delay_50ms * 10)
                .Run(LeakCheckStep.CloseMfc2Valve,      HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[1], ValveType.Mfc2, false),       HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[1], ValveType.Mfc2, false),      _delay_50ms * 10)
                .Run(LeakCheckStep.CloseMfc3Valve,      HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[2], ValveType.Mfc3, false),       HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[2], ValveType.Mfc3, false),      _delay_50ms * 10)
                .Run(LeakCheckStep.CloseMfc4Valve,      HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[3], ValveType.Mfc4, false),       HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[3], ValveType.Mfc4, false),      _delay_50ms * 10)
                .Run(LeakCheckStep.CloseMfc5Valve,      HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[4], ValveType.Mfc5, false),       HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[4], ValveType.Mfc5, false),      _delay_50ms * 10)
                .Run(LeakCheckStep.CloseMfc6Valve,      HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[5], ValveType.Mfc6, false),       HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[5], ValveType.Mfc6, false),      _delay_50ms * 10)
                .Run(LeakCheckStep.CloseVentValve,      HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[6], ValveType.FAST_VENT, false),  HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[6], ValveType.FAST_VENT, false), _delay_50ms * 10)
                .Run(LeakCheckStep.CloseN2Valve,        HOFs.Apply(ExecMfcValve, _enableGasLineOrN2[6], ValveType.N2, false),         HOFs.Apply(CheckMfcValue, _enableGasLineOrN2[6], ValveType.N2, false),        _delay_50ms * 10)
                .Run(LeakCheckStep.StopFlow,            HOFs.WrapAction(_chamber.StopAllGases),                                       NullFun,                                                                      _delay_1s)
                .End(LeakCheckStep.End,                 EndFunc,                                                                      _delay_50ms);

            return Runner.Status;
        }

        bool StartPump()
        {
            return _pumpdownRoutine.Start() == RState.Running;

        }

        bool CheckPump()
        {
            var result = _pumpdownRoutine.Monitor();
            if (result == RState.Failed || result == RState.Timeout)
            {
                Runner.Stop($"设置 Pump {_chamber.Name} failed  ");
                return true;
            }
            return result == RState.End;
        }

        bool ExecPurgeOrGasFinalValve(ValveType vlv, bool isOpen)
        {
            if(_mode == LeakCheckMode.ChamberAndGasLine || 
             ((_mode == LeakCheckMode.ChamberAndGasLineAndFAC || _mode == LeakCheckMode.ChamberAndGasBox) && _enableGasLineOrN2.Take(_enableGasLineOrN2.Count() - 1).Any(p => p)))
            {
                return OpenValve(vlv, isOpen);
            }
            return true;
        }
        bool CheckPurgeOrGasFinalValve(ValveType vlv, bool isOpen)
        {
            if (_mode == LeakCheckMode.ChamberAndGasLine ||
             ((_mode == LeakCheckMode.ChamberAndGasLineAndFAC || _mode == LeakCheckMode.ChamberAndGasBox) && _enableGasLineOrN2.Take(_enableGasLineOrN2.Count() - 1).Any(p => p)))
            {
                return CheckValve(vlv, isOpen);
            }
            return true;
        }

        bool ExecMfcValve(bool canExec, ValveType vlv, bool isOpen)
        {
            if((_mode == LeakCheckMode.ChamberAndGasLineAndFAC || _mode == LeakCheckMode.ChamberAndGasBox) && canExec)
            {
                return OpenValve(vlv, isOpen);
            }
            return true;
        }
        bool CheckMfcValue(bool canExec, ValveType vlv, bool isOpen)
        {
            if ((_mode == LeakCheckMode.ChamberAndGasLineAndFAC || _mode == LeakCheckMode.ChamberAndGasBox) && canExec)
            {
                return CheckValve(vlv, isOpen);
            }
            return true;
        }


        bool RecordBeginPressure()
        {
            _beginPressure = _chamber.ChamberPressure;
            Notify($"腔体压力初始值 {_beginPressure} mt");
            return true;
        }

        bool RecordEndPressure()
        {
            _endPressure = _chamber.ChamberPressure;
            Notify($"腔体压力结束值 {_endPressure} mt");
            return true;
        }

        bool CalcLeakCheck( )
        {
            LeakRate = (_endPressure - _beginPressure) / (_leakCheckWaitTime / 60.0);
            if (LeakRate < _leakRate)
            {
                Notify($"腔体漏率 [{LeakRate}] mt/min, 低于 [{_leakRate}] mt/min");
                LeakCheckResultManager.Instance.AddLeakCheck(Module, DateTime.Now, ElapseTime, (int)_beginPressure, (int)_endPressure, LeakRate, LeakCheckStatus.Succeed.ToString(), _leakCheckModeMapToText[_mode.ToString()] + SetGasName());
                return true;
            }
            Stop($"腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
            LeakCheckResultManager.Instance.AddLeakCheck(Module, DateTime.Now, ElapseTime, (int)_beginPressure, (int)_endPressure, LeakRate, LeakCheckStatus.Failed.ToString(), _leakCheckModeMapToText[_mode.ToString()] + SetGasName());
            return false;
        }

        bool StartFlowMFC()
        {
            if(_mode == LeakCheckMode.ChamberAndGasLineAndFAC || _mode == LeakCheckMode.ChamberAndGasBox)
            {
                for (int index = 0; index < _mfcFlow.Length; index++)
                {
                    _chamber.FlowGas(index, _mfcFlow[index]);
                }
            }
            return true;
        }

        public void DeleteLeadCheck(object[] args)
        {
            LeakCheckResultManager.Instance.Delete(Module, args[0].ToString());
        }

        public override void Abort()
        {
            try
            {
                _chamber.CloseValves();
                LeakCheckResultManager.Instance.AddLeakCheck(Module, DateTime.Now, ElapseTime, (int)_beginPressure, (int)_chamber.ChamberPressure, 0, LeakCheckStatus.Aborted.ToString(), _leakCheckModeMapToText[_mode.ToString()] + SetGasName());
            }
            catch (Exception ex)
            {
                LOG.Write(ex);
            }

        }
    }
}