Mars200/JetVirgoPM/PMs/RecipeExecutors/PostProcessRoutine.cs

using System;
using System.Collections.Generic;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using JetVirgoPM.Devices;
using JetVirgoPM.PMs.Routines;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using MECF.Framework.RT.ModuleLibrary.PMModules;

namespace JetVirgoPM.PMs.RecipeExecutors
{
    class PostProcessRoutine : PMRoutineBase
    {
        private enum PostProcessSequence
        {
            DelayForTest,
            RFPowerOff,
            StopGasFlow,
            CloseAllValves,
            ClosePumpValve,
            DelayWaitValve,
            Loop,
            SetLiftPin1,
            SetLiftPin2,
            Pump,
            PumpDelay,
            Vent,
            VentDelay,
            EndLoop,
            ClosePurgeValve,
            VentEndToPrecision,
            VentEndDelay,
            VentEndCloseVentValve,
            SetSlitDoor,
            VentAndPinDown,
            End,
        };

        private RecipeHead head;
        private int _purgeCycleCount;
        private int _purgeVentPressure;
        private int _purgePumpPressure;
        private int _purgeVentTimeLimit;
        private int _purgePumpTimeLimit;
        private int _purgeVentStableTime;
        private int _purgePumpStableTime;
        private int _ventTime;
        //private int _ventTimeLimit;
        private readonly RfPowerRoutine _rfPowerRoutine;
        private readonly VentRoutine _ventRoutine;
        private readonly int _VentingAndPinUpTimeout = 60 * 1000;
        private bool _isSimulatorMode;
        private bool _isVented = false;

        //---------------------------------Properties------------------------------------
        // 
        public string RecipeName { get; private set; }

        public string RecipeContext { get; private set; }

        private bool PurgeActive
        {
            get
            {
                if (head != null)
                {
                    if (!string.IsNullOrEmpty(head.PurgeActive))
                    {
                        return Convert.ToBoolean(head.PurgeActive);
                    }
                }
                return true;
            }
        }

        //For keep vacuum after idle clean
        private bool NotToPurgeOrVent
        {
            get
            {
                if (head != null)
                {
                    if (!string.IsNullOrEmpty(head.NotToPurgeOrVent))
                    {
                        return Convert.ToBoolean(head.NotToPurgeOrVent);
                    }
                }
                return false;
            }
        }

        private bool LiftPinWhileVenting
        {
            get
            {
                if (head != null)
                {
                    if (!string.IsNullOrEmpty(head.VentingPinState))
                    {
                        return head.VentingPinState == "Up" ? true : false;
                    }
                }
                return false;
            }
        }

        //--------------------------------Constructor------------------------------------
        // 
        public PostProcessRoutine(JetDualPM chamber, VentRoutine _vRoutine) : base(chamber)
        {
            Name = "PostProcess";
            _rfPowerRoutine = new RfPowerRoutine(_chamber, false);
            _ventRoutine = _vRoutine;
        }

        public void Terminate()
        {
        }

        public RState Start(params object[] objs)
        {
            try
            {
                Reset();
                //this.UpdateSCValue();

                RecipeName = (string)objs[0];
                RecipeContext = (string)objs[1];

                List<RecipeStep> recipeSteps;
                if (!Recipe.Parse(Module, RecipeContext, out head, out recipeSteps))
                {
                    return RState.Failed;
                }

                _purgeCycleCount = (int)SC.GetValue<double>($"{_chamber.Module}.Purge.PurgeCycleCount");
                _purgeVentPressure = (int)SC.GetValue<double>($"{_chamber.Module}.Purge.PurgeVentPressure");
                _purgePumpPressure = (int)SC.GetValue<double>($"{_chamber.Module}.Purge.PurgePumpPressure");
                _purgeVentTimeLimit = (int)SC.GetValue<double>($"{_chamber.Module}.Purge.PurgeVentTimeLimit");
                _purgePumpTimeLimit = (int)SC.GetValue<double>($"{_chamber.Module}.Purge.PurgePumpTimeLimit");
                _purgeVentStableTime = (int)SC.GetValue<double>($"{_chamber.Module}.Purge.PurgeVentStableTime");
                _purgePumpStableTime = (int)SC.GetValue<double>($"{_chamber.Module}.Purge.PurgePumpStableTime");
                _isSimulatorMode = SC.GetValue<bool>("System.IsSimulatorMode");

                _ventTime = (int)SC.GetValue<double>($"{_chamber.Module}.VentTime");
                //_ventTimeLimit = (int)SC.GetSC<double>(SCName.System_VentTimeLimit).Value;
            }
            catch (Exception ex)
            {
                LOG.Write(ex, "Post process Start has exception");
                return RState.Failed;
            }

            return Runner.Start(_chamber.Module.ToString(), Name);
        }

        public RState Monitor()
        {
            var hasWafer0 = WaferManager.Instance.CheckHasWafer(Module, 0);
            var hasWafer1 = WaferManager.Instance.CheckHasWafer(Module, 1);
            var pos = (hasWafer0 && hasWafer1) ? EnumDualPM.Both : hasWafer0 ? EnumDualPM.Left : hasWafer1 ? EnumDualPM.Right : EnumDualPM.None;
            var pos2 = LiftPinWhileVenting ? EnumDualPM.None : EnumDualPM.Both;

            if (!NotToPurgeOrVent && PurgeActive)   //For keep vacuum after idle clean
            {
                Runner.Run(PostProcessSequence.DelayForTest,                   HOFs.Apply(DelayTime, _isSimulatorMode ? _delay_1s : 0), _isSimulatorMode ? _delay_1s : 0)
                    .Run(PostProcessSequence.RFPowerOff,                       RFPowerOff, CheckRFPowerOff)
                    .Wait(PostProcessSequence.CloseAllValves,                  CloseAllValve, _delay_1s)
                    .LoopStart(PostProcessSequence.Loop, "", _purgeCycleCount, HOFs.Apply(Pump, _purgePumpPressure),      HOFs.Apply(CheckPump, _purgePumpPressure, true), _purgePumpTimeLimit * 1000)
                    .LoopDelay(PostProcessSequence.PumpDelay, _purgePumpStableTime * 1000)
                    .LoopRun(PostProcessSequence.Vent,                         HOFs.Apply(Vent, _purgeVentPressure),      HOFs.Apply(CheckVent, _purgeVentPressure, true), _purgeVentTimeLimit * 1000)
                    .LoopDelay(PostProcessSequence.VentDelay, _purgeVentStableTime * 1000)
                    .LoopEnd(PostProcessSequence.EndLoop,                      NullFun, _delay_1s)
                    .Run(PostProcessSequence.VentAndPinDown,                   ParallellyVentAndLiftPin,                  CheckParallellyVentAndLiftPin, _VentingAndPinUpTimeout * 1000)
                    .Run(PostProcessSequence.SetLiftPin1,                      HOFs.Apply(SetLiftPinUpDown, pos2, false), HOFs.Apply(ChecktLiftPinUpDown, pos2, false), _delay_5s)
                    .Run(PostProcessSequence.VentEndToPrecision,               Vent, CheckVent)
                    .Wait(PostProcessSequence.VentEndCloseVentValve,           CloseValve, valveOpenCloseTimeout*1000)
                    .Run(PostProcessSequence.SetLiftPin2,                      HOFs.Apply(SetLiftPinUpDown, pos, true),   HOFs.Apply(ChecktLiftPinUpDown, pos, true), _delay_5s)
                    .Run(PostProcessSequence.SetSlitDoor,                      HOFs.Apply(SetSlitDoor, pos, true),        HOFs.Apply(CheckSlitDoor, pos, true), _delay_5s)
                    .End(PostProcessSequence.End,                              EndFunc, _delay_1s);
            }
            else if(!NotToPurgeOrVent)
            {
                Runner.Run(PostProcessSequence.DelayForTest,         HOFs.Apply(DelayTime, _isSimulatorMode ? _delay_1s : 0), _isSimulatorMode ? _delay_1s : 0)
                    .Run(PostProcessSequence.RFPowerOff,             RFPowerOff,                                CheckRFPowerOff)
                    .Wait(PostProcessSequence.CloseAllValves,        CloseAllValve, _delay_1s)
                    .Run(PostProcessSequence.VentAndPinDown,         ParallellyVentAndLiftPin,                  CheckParallellyVentAndLiftPin, _VentingAndPinUpTimeout * 1000)
                    .Run(PostProcessSequence.SetLiftPin1,            HOFs.Apply(SetLiftPinUpDown, pos2, false), HOFs.Apply(ChecktLiftPinUpDown, pos2, false), _delay_5s)
                    .Run(PostProcessSequence.VentEndToPrecision,     Vent, CheckVent)
                    .Wait(PostProcessSequence.VentEndCloseVentValve, CloseValve, valveOpenCloseTimeout * 1000)
                    .Run(PostProcessSequence.SetLiftPin2,            HOFs.Apply(SetLiftPinUpDown, pos, true),   HOFs.Apply(ChecktLiftPinUpDown, pos, true), _delay_5s)
                    .Run(PostProcessSequence.SetSlitDoor,            HOFs.Apply(SetSlitDoor, pos, true),        HOFs.Apply(CheckSlitDoor, pos, true), _delay_5s)
                    .End(PostProcessSequence.End,                    EndFunc, _delay_1s);
            }
            else
            {
                Runner.Run(PostProcessSequence.DelayForTest,  HOFs.Apply(DelayTime, _isSimulatorMode ? _delay_1s : 0), _isSimulatorMode ? _delay_1s : 0)
                    .Run(PostProcessSequence.RFPowerOff,      RFPowerOff, CheckRFPowerOff)
                    .Wait(PostProcessSequence.CloseAllValves, CloseAllValve, _delay_1s)
                    .End(PostProcessSequence.End,             EndFunc, _delay_1s);
            }

            return Runner.Status;
        }


        bool RFPowerOff()
        {
            return _rfPowerRoutine.Start() == RState.Running;
        }
        bool CheckRFPowerOff()
        {
            var status = _rfPowerRoutine.Monitor();
            if (status == RState.End)
            {
                return true;
            }
            else if (status == RState.Failed || status == RState.Timeout)
            {
                Runner.Stop($"RF power off failed.");
                return true;
            }

            return false;
        }

        bool Vent()
        {
            if (LiftPinWhileVenting) return true;
            _isVented = _ventRoutine.Start() == RState.End;
            return _ventRoutine.Start() == RState.Running || _isVented;
        }
        bool CheckVent()
        {
            if (LiftPinWhileVenting || _isVented) return true;
            var status = _ventRoutine.Monitor();
            if (status == RState.End)
            {
                return true;
            }
            else if (status == RState.Failed || status == RState.Timeout)
            {
                Runner.Stop($"Vent failed.");
                return true;
            }

            return false;
        }

        public void Exit()
        {
            //ProcessDataRecorder.End(RecipeRunGuid.ToString(), SusceptorStatus.Processed.ToString(), Module);

            //if (DeviceModel.SignalTower != null)
            //{
            //    DeviceModel.SignalTower.BuzzerBlinking(SC.GetValue<double>(SCName.System_BuzzerBlinkingTime));
            //}

            //update processing end time
            //Singleton<ProcessRecorder>.Instance.EndRecipeProcess(Singleton<PMEntity>.Instance.CurrentRunningJob.RecipeRunId, SusceptorStatus.Processed);
        }

        private bool ParallellyVentAndLiftPin()
        {
            if(LiftPinWhileVenting)
            {
                Notify($"设置 lift pin {_chamber.Name} " + "升");


                if (!_chamber.Chamber1Disable)
                {
                    if (!_chamber.SetLiftPin1(MovementPosition.Up, out string reasonPin1))
                    {
                        Stop(reasonPin1);
                        return false;
                    }
                }

                if (!_chamber.Chamber2Disable)
                {
                    if (!_chamber.SetLiftPin2(MovementPosition.Up, out string reasonPin2))
                    {
                        Stop(reasonPin2);
                        return false;
                    }
                }

                _ventRoutine.Start();

                return true;
            }
            else
                return true;
        }
        bool CheckParallellyVentAndLiftPin()
        {
            if (LiftPinWhileVenting)
            {
                bool res1 = _chamber.CheckLift1Up();
                bool res2 = _chamber.CheckLift2Up();

                if (_chamber.Chamber1Disable)
                {
                    res1 = true;
                }

                if (_chamber.Chamber2Disable)
                {
                    res2 = true;
                }

                var result = _ventRoutine.Monitor();
                if (result == RState.Failed || result == RState.Timeout)
                {
                    Runner.Stop($"Vent failed.");
                    if (result == RState.Timeout)
                    {
                        Stop(_chamber.CheckLift1Up() ? $"Set Lift1 Pin Up timeout in {_VentingAndPinUpTimeout / 1000} seconds" : $"Venting timeout  in {_VentingAndPinUpTimeout / 1000} seconds");
                        Stop(_chamber.CheckLift2Up() ? $"Set Lift2 Pin Up timeout in {_VentingAndPinUpTimeout / 1000} seconds" : $"Venting timeout  in {_VentingAndPinUpTimeout / 1000} seconds");
                    }
                    return true;
                }

                return res1 && res2 && result == RState.End;
            }
            else 
                return true;
        }
    }
}