JetVirgoPMRecipeFileContext.cs 21 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.IO;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using System.Xml;
  8. using Aitex.Common.Util;
  9. using Aitex.Core.RT.Event;
  10. using Aitex.Core.RT.Log;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.SCCore;
  13. namespace JetVirgoPM.PMs.RecipeExecutors
  14. {
  15. public class JetVirgoPMRecipeFileContext : IRecipeFileContext
  16. {
  17. public string GetRecipeDefiniton(string chamberType)
  18. {
  19. try
  20. {
  21. string recipeSchema = PathManager.GetCfgDir() + $@"\Recipe\JetVirgoPM\Process\RecipeFormat.xml";
  22. XmlDocument xmlDom = new XmlDocument();
  23. xmlDom.Load(recipeSchema);
  24. bool epdInstalled = SC.ContainsItem("System.SetUp.EPD.IsInstalled") && SC.GetValue<bool>($"System.SetUp.EPD.IsInstalled");
  25. if (!epdInstalled)
  26. {
  27. var nodeEndPoint =
  28. xmlDom.SelectSingleNode(
  29. string.Format(
  30. "/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='System.SetUp.EPDInstalled']"))
  31. as XmlElement;
  32. if (nodeEndPoint != null)
  33. {
  34. nodeEndPoint.ParentNode.RemoveChild(nodeEndPoint);
  35. }
  36. }
  37. double rfPowerRange1 = SC.GetValue<double>($"{chamberType}.Rf1.PowerRange");
  38. double rfPowerRangeBias1 = SC.GetValue<double>($"{chamberType}.BiasRf1.PowerRange");
  39. bool rfEnablePulsing1 = SC.GetValue<bool>($"{chamberType}.Rf1.EnablePulsingFunction");
  40. bool rfEnableBias1 = SC.GetValue<bool>($"{chamberType}.BiasRf1.EnableBiasRF");
  41. var nodeRfPowerBias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetPower']")) as XmlElement;
  42. var nodeMatchModeBias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetMatchProcessMode']")) as XmlElement;
  43. var nodeMatchC1Bias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetMatchPositionC1']")) as XmlElement;
  44. var nodeMatchC2Bias1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SetMatchPositionC2']")) as XmlElement;
  45. var nodeRfPower1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf1.SetPower']")) as XmlElement;
  46. var nodeRfPowerBiasSoft1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.SoftTolerance']")) as XmlElement;
  47. var nodeRfPowerBiasHard1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf1.HardTolerance']")) as XmlElement;
  48. if (nodeRfPower1 != null)
  49. {
  50. nodeRfPower1.SetAttribute("Max", (int)rfPowerRange1 + "");
  51. }
  52. if (nodeRfPowerBias1 != null)
  53. {
  54. nodeRfPowerBias1.SetAttribute("Max", (int)rfPowerRangeBias1 + "");
  55. if (!rfEnableBias1)
  56. {
  57. nodeRfPowerBias1.ParentNode.RemoveChild(nodeRfPowerBias1);
  58. nodeMatchModeBias1.ParentNode.RemoveChild(nodeMatchModeBias1);
  59. nodeMatchC1Bias1.ParentNode.RemoveChild(nodeMatchC1Bias1);
  60. nodeMatchC2Bias1.ParentNode.RemoveChild(nodeMatchC2Bias1);
  61. nodeRfPowerBiasSoft1?.ParentNode.RemoveChild(nodeRfPowerBiasSoft1);
  62. nodeRfPowerBiasHard1?.ParentNode.RemoveChild(nodeRfPowerBiasHard1);
  63. }
  64. }
  65. if (!rfEnablePulsing1)
  66. {
  67. var node11 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf1.SetPulsingFrequency']")) as XmlElement;
  68. if (node11 != null)
  69. node11.ParentNode.RemoveChild(node11);
  70. var node21 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf1.SetPulsingDuty']")) as XmlElement;
  71. if (node21 != null)
  72. node21.ParentNode.RemoveChild(node21);
  73. //var node3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step/Item[@ControlName='PulsingMode']")) as XmlElement;
  74. //if (node3 != null)
  75. // node3.ParentNode.RemoveChild(node3);
  76. }
  77. double rfPowerRange2 = SC.GetValue<double>($"{chamberType}.Rf2.PowerRange");
  78. double rfPowerRangeBias2 = SC.GetValue<double>($"{chamberType}.BiasRf2.PowerRange");
  79. bool rfEnablePulsing2 = SC.GetValue<bool>($"{chamberType}.Rf2.EnablePulsingFunction");
  80. bool rfEnableBias2 = SC.GetValue<bool>($"{chamberType}.BiasRf2.EnableBiasRF");
  81. var nodeRfPowerBias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetPower']")) as XmlElement;
  82. var nodeMatchModeBias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetMatchProcessMode']")) as XmlElement;
  83. var nodeMatchC1Bias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetMatchPositionC1']")) as XmlElement;
  84. var nodeMatchC2Bias2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SetMatchPositionC2']")) as XmlElement;
  85. var nodeRfPower2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf2.SetPower']")) as XmlElement;
  86. var nodeRfPowerBiasSoft2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.SoftTolerance']")) as XmlElement;
  87. var nodeRfPowerBiasHard2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='BiasRf2.HardTolerance']")) as XmlElement;
  88. if (nodeRfPower2 != null)
  89. {
  90. nodeRfPower2.SetAttribute("Max", (int)rfPowerRange2 + "");
  91. }
  92. if (nodeRfPowerBias2 != null)
  93. {
  94. nodeRfPowerBias2.SetAttribute("Max", (int)rfPowerRangeBias2 + "");
  95. if (!rfEnableBias2)
  96. {
  97. nodeRfPowerBias2.ParentNode.RemoveChild(nodeRfPowerBias2);
  98. nodeMatchModeBias2.ParentNode.RemoveChild(nodeMatchModeBias2);
  99. nodeMatchC1Bias2.ParentNode.RemoveChild(nodeMatchC1Bias2);
  100. nodeMatchC2Bias2.ParentNode.RemoveChild(nodeMatchC2Bias2);
  101. nodeRfPowerBiasSoft2?.ParentNode.RemoveChild(nodeRfPowerBiasSoft2);
  102. nodeRfPowerBiasHard2?.ParentNode.RemoveChild(nodeRfPowerBiasHard2);
  103. }
  104. }
  105. if (!rfEnablePulsing2)
  106. {
  107. var node12 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf2.SetPulsingFrequency']")) as XmlElement;
  108. if (node12 != null)
  109. node12.ParentNode.RemoveChild(node12);
  110. var node22 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf2.SetPulsingDuty']")) as XmlElement;
  111. if (node22 != null)
  112. node22.ParentNode.RemoveChild(node22);
  113. //var node3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step/Item[@ControlName='PulsingMode']")) as XmlElement;
  114. //if (node3 != null)
  115. // node3.ParentNode.RemoveChild(node3);
  116. }
  117. string gas1Name = SC.GetStringValue($"{chamberType}.MfcGas1.GasName");
  118. bool gas1Enable = SC.GetValue<bool>($"{chamberType}.MfcGas1.Enable");
  119. int gas1N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas1.MfcN2Scale");
  120. double gas1ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas1.MfcScaleFactor");
  121. var nodeGas1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas1']")) as XmlElement;
  122. var nodeGas1Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas1.SoftTolerance']")) as XmlElement;
  123. var nodeGas1Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas1.HardTolerance']")) as XmlElement;
  124. if (nodeGas1 != null)
  125. {
  126. if (!gas1Enable)
  127. {
  128. nodeGas1.ParentNode.RemoveChild(nodeGas1);
  129. nodeGas1Soft.ParentNode.RemoveChild(nodeGas1Soft);
  130. nodeGas1Hard.ParentNode.RemoveChild(nodeGas1Hard);
  131. }
  132. else
  133. {
  134. nodeGas1.SetAttribute("DisplayName", "Gas1 " + gas1Name + " " + gas1N2Scale * gas1ScaleFactor + " " + "sccm");
  135. nodeGas1.SetAttribute("Max", (int)(gas1N2Scale * gas1ScaleFactor) + "");
  136. nodeGas1Soft.SetAttribute("DisplayName", $"{gas1Name} (Soft)(%)");
  137. nodeGas1Hard.SetAttribute("DisplayName", $"{gas1Name} (Hard)(%)");
  138. }
  139. }
  140. string gas2Name = SC.GetStringValue($"{chamberType}.MfcGas2.GasName");
  141. bool gas2Enable = SC.GetValue<bool>($"{chamberType}.MfcGas2.Enable");
  142. int gas2N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas2.MfcN2Scale");
  143. double gas2ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas2.MfcScaleFactor");
  144. var nodeGas2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas2']")) as XmlElement;
  145. var nodeGas2Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas2.SoftTolerance']")) as XmlElement;
  146. var nodeGas2Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas2.HardTolerance']")) as XmlElement;
  147. if (nodeGas2 != null)
  148. {
  149. if (!gas2Enable)
  150. {
  151. nodeGas2.ParentNode.RemoveChild(nodeGas2);
  152. nodeGas2Soft.ParentNode.RemoveChild(nodeGas2Soft);
  153. nodeGas2Hard.ParentNode.RemoveChild(nodeGas2Hard);
  154. }
  155. else
  156. {
  157. nodeGas2.SetAttribute("DisplayName", "Gas2 " + gas2Name + " " + gas2N2Scale * gas2ScaleFactor + " " + "sccm");
  158. nodeGas2.SetAttribute("Max", (int)(gas2N2Scale * gas2ScaleFactor) + "");
  159. nodeGas2Soft.SetAttribute("DisplayName", $"{gas2Name} (Soft)(%)");
  160. nodeGas2Hard.SetAttribute("DisplayName", $"{gas2Name} (Hard)(%)");
  161. }
  162. }
  163. string gas3Name = SC.GetStringValue($"{chamberType}.MfcGas3.GasName");
  164. bool gas3Enable = SC.GetValue<bool>($"{chamberType}.MfcGas3.Enable");
  165. int gas3N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas3.MfcN2Scale");
  166. double gas3ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas3.MfcScaleFactor");
  167. var nodeGas3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas3']")) as XmlElement;
  168. var nodeGas3Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas3.SoftTolerance']")) as XmlElement;
  169. var nodeGas3Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas3.HardTolerance']")) as XmlElement;
  170. if (nodeGas3 != null)
  171. {
  172. if (!gas3Enable)
  173. {
  174. nodeGas3.ParentNode.RemoveChild(nodeGas3);
  175. nodeGas3Soft.ParentNode.RemoveChild(nodeGas3Soft);
  176. nodeGas3Hard.ParentNode.RemoveChild(nodeGas3Hard);
  177. }
  178. else
  179. {
  180. nodeGas3.SetAttribute("DisplayName", "Gas3 " + gas3Name + " " + gas3N2Scale * gas3ScaleFactor + " " + "sccm");
  181. nodeGas3.SetAttribute("Max", (int)(gas3N2Scale * gas3ScaleFactor) + "");
  182. nodeGas3Soft.SetAttribute("DisplayName", $"{gas3Name} (Soft)(%)");
  183. nodeGas3Hard.SetAttribute("DisplayName", $"{gas3Name} (Hard)(%)");
  184. }
  185. }
  186. string gas4Name = SC.GetStringValue($"{chamberType}.MfcGas4.GasName");
  187. bool gas4Enable = SC.GetValue<bool>($"{chamberType}.MfcGas4.Enable");
  188. int gas4N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas4.MfcN2Scale");
  189. double gas4ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas4.MfcScaleFactor");
  190. var nodeGas4 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas4']")) as XmlElement;
  191. var nodeGas4Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas4.SoftTolerance']")) as XmlElement;
  192. var nodeGas4Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas4.HardTolerance']")) as XmlElement;
  193. if (nodeGas4 != null)
  194. {
  195. if (!gas4Enable)
  196. {
  197. nodeGas4.ParentNode.RemoveChild(nodeGas4);
  198. nodeGas4Soft.ParentNode.RemoveChild(nodeGas4Soft);
  199. nodeGas4Hard.ParentNode.RemoveChild(nodeGas4Hard);
  200. }
  201. else
  202. {
  203. nodeGas4.SetAttribute("DisplayName", "Gas4 " + gas4Name + " " + gas4N2Scale * gas4ScaleFactor + " " + "sccm");
  204. nodeGas4.SetAttribute("Max", (int)(gas4N2Scale * gas4ScaleFactor) + "");
  205. nodeGas4Soft.SetAttribute("DisplayName", $"{gas4Name} (Soft)(%)");
  206. nodeGas4Hard.SetAttribute("DisplayName", $"{gas4Name} (Hard)(%)");
  207. }
  208. }
  209. string gas5Name = SC.GetStringValue($"{chamberType}.MfcGas5.GasName");
  210. bool gas5Enable = SC.GetValue<bool>($"{chamberType}.MfcGas5.Enable");
  211. int gas5N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas5.MfcN2Scale");
  212. double gas5ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas5.MfcScaleFactor");
  213. var nodeGas5 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas5']")) as XmlElement;
  214. var nodeGas5Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas5.SoftTolerance']")) as XmlElement;
  215. var nodeGas5Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas5.HardTolerance']")) as XmlElement;
  216. if (nodeGas5 != null)
  217. {
  218. if (!gas5Enable)
  219. {
  220. nodeGas5.ParentNode.RemoveChild(nodeGas5);
  221. nodeGas5Soft.ParentNode.RemoveChild(nodeGas5Soft);
  222. nodeGas5Hard.ParentNode.RemoveChild(nodeGas5Hard);
  223. }
  224. else
  225. {
  226. nodeGas5.SetAttribute("DisplayName", "Gas5 " + gas5Name + " " + gas5N2Scale * gas5ScaleFactor + " " + "sccm");
  227. nodeGas5.SetAttribute("Max", (int)(gas5N2Scale * gas5ScaleFactor) + "");
  228. nodeGas5Soft.SetAttribute("DisplayName", $"{gas5Name} (Soft)(%)");
  229. nodeGas5Hard.SetAttribute("DisplayName", $"{gas5Name} (Hard)(%)");
  230. }
  231. }
  232. string gas6Name = SC.GetStringValue($"{chamberType}.MfcGas6.GasName");
  233. bool gas6Enable = SC.GetValue<bool>($"{chamberType}.MfcGas6.Enable");
  234. int gas6N2Scale = SC.GetValue<int>($"{chamberType}.MfcGas6.MfcN2Scale");
  235. double gas6ScaleFactor = SC.GetValue<double>($"{chamberType}.MfcGas6.MfcScaleFactor");
  236. var nodeGas6 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas6']")) as XmlElement;
  237. var nodeGas6Soft = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas6.SoftTolerance']")) as XmlElement;
  238. var nodeGas6Hard = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas6.HardTolerance']")) as XmlElement;
  239. if (nodeGas6 != null)
  240. {
  241. if (!gas5Enable)
  242. {
  243. nodeGas6.ParentNode.RemoveChild(nodeGas6);
  244. nodeGas6Soft.ParentNode.RemoveChild(nodeGas6Soft);
  245. nodeGas6Hard.ParentNode.RemoveChild(nodeGas6Hard);
  246. }
  247. else
  248. {
  249. nodeGas6.SetAttribute("DisplayName", "Gas6 " + gas6Name + " " + gas6N2Scale + " " + "sccm");
  250. nodeGas6.SetAttribute("Max", (int)(gas6N2Scale * gas6ScaleFactor) + "");
  251. nodeGas6Soft.SetAttribute("DisplayName", $"{gas6Name} (Soft)(%)");
  252. nodeGas6Hard.SetAttribute("DisplayName", $"{gas6Name} (Hard)(%)");
  253. }
  254. }
  255. return xmlDom.OuterXml;
  256. }
  257. catch (Exception ex)
  258. {
  259. LOG.Write(ex);
  260. return "";
  261. }
  262. }
  263. public IEnumerable<string> GetRecipes(string path, bool includingUsedRecipe)
  264. {
  265. try
  266. {
  267. var recipes = new List<string>();
  268. string recipePath = PathManager.GetRecipeDir() + path + "\\";
  269. if (!Directory.Exists(recipePath))
  270. return recipes;
  271. var di = new DirectoryInfo(recipePath);
  272. var fis = di.GetFiles("*.rcp", SearchOption.AllDirectories);
  273. foreach (var fi in fis)
  274. {
  275. string str = fi.FullName.Substring(di.FullName.Length);
  276. str = str.Substring(0, str.LastIndexOf('.'));
  277. if (includingUsedRecipe || (!includingUsedRecipe && !str.Contains("HistoryRecipe\\")))
  278. {
  279. recipes.Add(str);
  280. }
  281. }
  282. return recipes;
  283. }
  284. catch (Exception ex)
  285. {
  286. LOG.Write(ex);
  287. return new List<string>();
  288. }
  289. }
  290. public void PostInfoEvent(string message)
  291. {
  292. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  293. }
  294. public void PostWarningEvent(string message)
  295. {
  296. EV.PostMessage("System", EventEnum.DefaultWarning, message);
  297. }
  298. public void PostAlarmEvent(string message)
  299. {
  300. EV.PostMessage("System", EventEnum.DefaultAlarm, message);
  301. }
  302. public void PostDialogEvent(string message)
  303. {
  304. EV.PostNotificationMessage(message);
  305. }
  306. public void PostInfoDialogMessage(string message)
  307. {
  308. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  309. EV.PostPopDialogMessage(EventLevel.Information, "System Information", message);
  310. }
  311. public void PostWarningDialogMessage(string message)
  312. {
  313. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  314. EV.PostPopDialogMessage(EventLevel.Warning, "System Warning", message);
  315. }
  316. public void PostAlarmDialogMessage(string message)
  317. {
  318. EV.PostMessage("System", EventEnum.GeneralInfo, message);
  319. EV.PostPopDialogMessage(EventLevel.Alarm, "System Alarm", message);
  320. }
  321. public string GetRecipeTemplate(string chamberId)
  322. {
  323. string schema = GetRecipeDefiniton(chamberId);
  324. XmlDocument dom = new XmlDocument();
  325. dom.LoadXml(schema);
  326. XmlNode nodeTemplate = dom.SelectSingleNode("/Aitex/TableRecipeData");
  327. return nodeTemplate.OuterXml;
  328. }
  329. }
  330. }