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- using System;
- using System.Xml;
- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.RT.Tolerance;
- using Aitex.Core.Util;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
- namespace Aitex.Core.RT.Device.Unit
- {
- public class IoMfc2 : BaseDevice, IDevice, IMfc
- {
- public string Unit
- {
- get; set;
- }
- [Subscription(AITMfcDataPropertyName.Scale)]
- public double Scale
- {
- get
- {
- if (_scN2Scale == null || _scScaleFactor == null)
- return 0;
- return _scN2Scale.DoubleValue * _scScaleFactor.DoubleValue;
- }
- }
- [Subscription(AITMfcDataPropertyName.SetPoint)]
- public double SetPoint
- {
- get
- {
- if (_aoFlow != null)
- {
- return _aoFlow.Value;
- }
- return 0;
- }
- set
- {
- if (_aoFlow != null)
- {
- _aoFlow.Value = (short)value;
- }
- }
- }
- [Subscription(AITMfcDataPropertyName.DefaultSetPoint)]
- public double DefaultSetPoint
- {
- get
- {
- if (_scDefaultSetPoint != null)
- return _scDefaultSetPoint.DoubleValue;
- return 0;
- }
- }
- [Subscription(AITMfcDataPropertyName.FeedBack)]
- public double FeedBack
- {
- get
- {
- if (_aiFlow != null)
- return (_scRegulationFactor!=null && _scRegulationFactor.DoubleValue > 0.001) ? _aiFlow.Value / _scRegulationFactor.DoubleValue : _aiFlow.Value;
- return 0;
- }
- }
- [Subscription(AITMfcDataPropertyName.IsOutOfTolerance)]
- public bool IsOutOfTolerance
- {
- get
- {
- return _toleranceChecker.Result;
- }
- }
- [Subscription(AITMfcDataPropertyName.IsEnableAlarm)]
- public bool EnableAlarm
- {
- get
- {
- if (_scEnableAlarm != null)
- return _scEnableAlarm.BoolValue;
- return false;
- }
- }
- [Subscription(AITMfcDataPropertyName.AlarmRange)]
- public double AlarmRange
- {
- get
- {
- if (_scAlarmRange != null)
- return _scAlarmRange.DoubleValue;
- return 0;
- }
- }
- [Subscription(AITMfcDataPropertyName.AlarmTime)]
- public double AlarmTime
- {
- get
- {
- if (_scAlarmTime != null)
- return _scAlarmTime.IntValue;
- return 0;
- }
- }
-
- [Subscription(AITMfcDataPropertyName.IsOffline)]
- public bool IsOffline
- {
- get
- {
- if (_diOffline != null)
- return _diOffline.Value;
- return false;
- }
- }
- public string DisplayName
- {
- get
- {
- if (_scGasName != null)
- return _scGasName.StringValue;
- return Display;
- }
- }
- private AITMfcData DeviceData
- {
- get
- {
- AITMfcData data = new AITMfcData()
- {
- UniqueName = _uniqueName,
- Type = "MFC",
- DeviceName = Name,
- DeviceSchematicId = DeviceID,
- DisplayName = DisplayName,
- FeedBack = FeedBack,
- SetPoint = SetPoint,
- Scale = Scale,
- IsOffline = IsOffline,
- };
- return data;
- }
- }
- private DeviceTimer rampTimer = new DeviceTimer();
- private double rampTarget;
- private double rampInitValue;
- private int rampTime;
- private ToleranceChecker _toleranceChecker = new ToleranceChecker();
- private AIAccessor _aiFlow;
- private AOAccessor _aoFlow;
- private AOAccessor _aoRange;
- private DIAccessor _diOffline;
- private SCConfigItem _scGasName;
- private SCConfigItem _scEnable;
- private SCConfigItem _scN2Scale;
- private SCConfigItem _scScaleFactor;
- private SCConfigItem _scAlarmRange;
- private SCConfigItem _scEnableAlarm;
- private SCConfigItem _scAlarmTime;
- private SCConfigItem _scDefaultSetPoint;
- private SCConfigItem _scRegulationFactor;
-
- private R_TRIG _trigOffline = new R_TRIG();
- private string _uniqueName;
- public IoMfc2(string module, XmlElement node, string ioModule="")
- {
- Unit = node.GetAttribute("unit");
- base.Module = string.IsNullOrEmpty(node.GetAttribute("module")) ? module : node.GetAttribute("module");
- base.Name = node.GetAttribute("id");
- base.Display = node.GetAttribute("display");
- base.DeviceID = node.GetAttribute("schematicId");
- _aoRange = ParseAoNode("aoRange", node, ioModule);
- _diOffline = ParseDiNode("diOffline", node, ioModule);
- _aiFlow = ParseAiNode("aiFlow", node, ioModule);
- _aoFlow = ParseAoNode("aoFlow", node, ioModule);
-
- string scBasePath = node.GetAttribute("scBasePath");
- if (string.IsNullOrEmpty(scBasePath))
- scBasePath = $"{Module}.{Name}";
- else
- {
- scBasePath = scBasePath.Replace("{module}", Module);
- }
- _scGasName = ParseScNode("scGasName",node, ioModule, $"{scBasePath}.{Name}.GasName");
- _scEnable = ParseScNode("scEnable",node, ioModule, $"{scBasePath}.{Name}.Enable");
- _scN2Scale = ParseScNode("scN2Scale",node, ioModule, $"{scBasePath}.{Name}.N2Scale");
-
- _scScaleFactor = ParseScNode("scScaleFactor",node, ioModule, $"{scBasePath}.{Name}.ScaleFactor");
- _scAlarmRange = ParseScNode("scAlarmRange",node, ioModule, $"{scBasePath}.{Name}.AlarmRange");
- _scEnableAlarm = ParseScNode("scEnableAlarm",node, ioModule, $"{scBasePath}.{Name}.EnableAlarm");
- _scAlarmTime = ParseScNode("scAlarmTime",node, ioModule, $"{scBasePath}.{Name}.AlarmTime");
- _scDefaultSetPoint = ParseScNode("scDefaultSetPoint",node, ioModule, $"{scBasePath}.{Name}.DefaultSetPoint");
- _scRegulationFactor = ParseScNode("scFlowRegulationFactor",node, ioModule, $"{scBasePath}.{Name}.RegulationFactor");
- _uniqueName = $"{Module}.{Name}";
- }
- public bool Initialize()
- {
- DATA.Subscribe($"{_uniqueName}.DeviceData", () => DeviceData);
- DATA.Subscribe($"Device.{Module}.{Name}", () => DeviceData);
- OP.Subscribe($"{_uniqueName}.{AITMfcOperation.Ramp}", InvokeRamp);
- DEVICE.Register(String.Format("{0}.{1}", Name, AITMfcOperation.Ramp), (out string reason, int time, object[] param) =>
- {
- double target = Convert.ToDouble((string)param[0]);
- target = Math.Min(target, Scale);
- target = Math.Max(target, 0);
- Ramp(target, time);
- reason = string.Format("{0} ramp to {1}{2}", Display, target, Unit);
- return true;
- });
- //@AAA use recipe
- DEVICE.Register(String.Format("{0}", Name), (out string reason, int time, object[] param) =>
- {
- double target = Convert.ToDouble((string)param[0]);
- target = Math.Min(target, Scale);
- target = Math.Max(target, 0);
- Ramp(target, time);
- reason = string.Format("{0} ramp to {1}{2}", Display, target, Unit);
- return true;
- });
- return true;
- }
- private bool InvokeRamp(string method, object[] args)
- {
- double target = Convert.ToDouble((string)(args[0].ToString()));
- target = Math.Min(target, Scale);
- target = Math.Max(target, 0);
- int time = 0;
- if (args.Length >= 2)
- time = Convert.ToInt32((string)(args[1].ToString()));
- Ramp(target, time);
-
- EV.PostInfoLog(Module, $"{_uniqueName} ramp to {target}{Unit} in {time} seconds");
- return true;
- }
- public void Monitor()
- {
-
- Ramping();
- CheckTolerance();
- if (_aoRange != null)
- _aoRange.Value = (short)Scale;
- _trigOffline.CLK = IsOffline;
- if (_trigOffline.Q)
- {
- EV.PostMessage(Module, EventEnum.DefaultAlarm, string.Format("{0} is offline", DisplayName));
- }
- }
- public void Reset()
- {
-
- _toleranceChecker.Reset(AlarmTime);
- _trigOffline.RST = true;
- }
-
- public void Terminate()
- {
- Ramp(DefaultSetPoint, 0);
- }
- public bool Ramp(double flowSetPoint, int time, out string reason)
- {
- if (HasAlarm)
- {
- reason = $"{DisplayName} in error status, can not flow";
- return false;
- }
- if (flowSetPoint < 0 || flowSetPoint > Scale)
- {
- reason = $"{DisplayName} range is [0, {Scale}], can not flow {flowSetPoint}";
- return false;
- }
- EV.PostInfoLog(Module, $"{DisplayName} flow {flowSetPoint} {Unit} in {time} seconds");
- Ramp(flowSetPoint, time);
- reason = string.Empty;
- return true;
- }
- public void Ramp(int time)
- {
- Ramp(DefaultSetPoint, time);
- }
- public void Ramp(double target, int time)
- {
- target = Math.Max(0, target);
- target = Math.Min(Scale, target);
- rampInitValue = SetPoint; //ramp 初始值取当前设定值,而非实际读取值.零漂问题
- rampTime = time;
- rampTarget = target;
- rampTimer.Start(rampTime);
- }
- public void StopRamp()
- {
- Ramp(SetPoint, 0);
- }
- private void Ramping()
- {
- if (rampTimer.IsTimeout() || rampTime == 0)
- {
- SetPoint = rampTarget;
- }
- else
- {
- SetPoint = rampInitValue + (rampTarget - rampInitValue) * rampTimer.GetElapseTime() / rampTime;
- }
- }
- private void CheckTolerance()
- {
- if (!EnableAlarm)
- {
- _toleranceChecker.RST = true;
- return;
- }
- if (SetPoint < 0.1)
- {
- _toleranceChecker.RST = true;
- return;
- }
- _toleranceChecker.Monitor(FeedBack, (SetPoint-Math.Abs(AlarmRange)), (SetPoint+Math.Abs(AlarmRange)), AlarmTime);
- if (_toleranceChecker.Trig)
- {
- EV.PostAlarmLog(Module, $"{Name} flow out of range {AlarmRange} sccm in {AlarmTime:F0} seconds" );
- }
- }
-
- }
- }
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