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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.RT.Device.Unit;
- using MECF.Framework.Common.Equipment;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs
- {
- public interface ITM
- {
- bool CheckAtm();
- bool CheckVacuum();
- bool SetFastVentValve(bool isOpen, out string reason);
- bool SetSlowVentValve(bool isOpen, out string reason);
- bool SetFastPumpValve(bool isOpen, out string reason);
- bool SetSlowPumpValve(bool isOpen, out string reason);
- bool SetTurboPumpIsoValve(bool isOpen, out string reason);
- bool SetTurboPumpBackingValve(bool isOpen, out string reason);
- bool CheckTurboPumpStable();
- bool CheckTurboPumpOn();
- bool CheckTurboPumpOff();
- bool CheckTurboPumpError();
- bool TurboPumpOn();
- bool TurboPumpOff();
- bool SetSlitValve(ModuleName module, bool isOpen, out string reason);
- bool CheckSlitValveOpen(ModuleName module);
- bool CheckSlitValveClose(ModuleName module);
- }
- }
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