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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes
- {
- public enum RorzeEfemBasicMessage
- {
- READY, //Ready , ACK, INF
- INIT, //EFEM initialization MOV, ACK, INF
- ORGSH, //Origin search
- LOCK, //Pod lock MOV, ACK, INF
- UNLOCK, //Pod unlock
- DOCK, //Moving to pod dock position MOV, ACK, INF
- UNDOCK, //Moving to pod undock position MOV, ACK, INF
- OPEN, //Pod open MOV, ACK, INF
- CLOSE, //Pod close MOV, ACK, INF
- WAFSH, //Wafer mapping MOV, ACK, INF
- MAPDT, //Wafer map information GET, ACK, INF, EVT
- LOAD, //Wafer carry-out MOV, ACK, INF
- UNLOAD, //Wafer carry-in MOV, ACK, INF
- GOTO, //Move to specified object MOV, ACK, INF
- TRANS, //Wafer transfer MOV, ACK, INF
- CHANGE, //Wafer exchange MOV, ACK, INF
- ALIGN, //Alignment MOV, SET, ACK, INF
- HOME, //Home MOV, ACK, INF
- HOLD, //Hold MOV, ACK, INF
- RESTR, //Restart MOV, ACK
- ABORT, //Abort termination MOV, ACK, INF
- EMS, //Emergency stop MOV, ACK, INF
- ERROR, //Error GET, SET, ACK, INF
- CLAMP, //Clamp output, get state GET, SET, ACK, INF
- STATE, //Get status GET, ACK, INF
- MODE, //E84 mode setting GET, SET, ACK, INF
- TRANSREQ, //E84 automatic transfer request MOV, GET, ACK, INF, EVT
- SIGOUT, //Signal output SET, ACK
- SIGSTAT, //Signal input/output information GET, ACK, INF, EVT
- EVENT, //Event setting GET, SET, ACK, INF
- CSTID, //Carrier ID GET, ACK, INF
- USDEFINE, //User Define
- FFU, //Ffu SET,ACK,INF
- WTYPE, //Wtype Set and acquire wafer type SET,ACK,GET,ACK,INF
- PURGE, //Purge SET,ACK,GET,ACK,INF
- ADPLOCK, //Adplock MOV,ACK,INF
- ADPUNLOCK, //Adpunlock SET,ACK,INF
- LED, //Led SET,ACK,INF
- WORKCHK, //Workchk MOV,ACK,INF
- LIFT,
- }
-
- }
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