RorzeEfemCommand.cs 2.2 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes
  7. {
  8. public enum RorzeEfemBasicMessage
  9. {
  10. READY, //Ready , ACK, INF
  11. INIT, //EFEM initialization MOV, ACK, INF
  12. ORGSH, //Origin search
  13. LOCK, //Pod lock MOV, ACK, INF
  14. UNLOCK, //Pod unlock
  15. DOCK, //Moving to pod dock position MOV, ACK, INF
  16. UNDOCK, //Moving to pod undock position MOV, ACK, INF
  17. OPEN, //Pod open MOV, ACK, INF
  18. CLOSE, //Pod close MOV, ACK, INF
  19. WAFSH, //Wafer mapping MOV, ACK, INF
  20. MAPDT, //Wafer map information GET, ACK, INF, EVT
  21. LOAD, //Wafer carry-out MOV, ACK, INF
  22. UNLOAD, //Wafer carry-in MOV, ACK, INF
  23. GOTO, //Move to specified object MOV, ACK, INF
  24. TRANS, //Wafer transfer MOV, ACK, INF
  25. CHANGE, //Wafer exchange MOV, ACK, INF
  26. ALIGN, //Alignment MOV, SET, ACK, INF
  27. HOME, //Home MOV, ACK, INF
  28. HOLD, //Hold MOV, ACK, INF
  29. RESTR, //Restart MOV, ACK
  30. ABORT, //Abort termination MOV, ACK, INF
  31. EMS, //Emergency stop MOV, ACK, INF
  32. ERROR, //Error GET, SET, ACK, INF
  33. CLAMP, //Clamp output, get state GET, SET, ACK, INF
  34. STATE, //Get status GET, ACK, INF
  35. MODE, //E84 mode setting GET, SET, ACK, INF
  36. TRANSREQ, //E84 automatic transfer request MOV, GET, ACK, INF, EVT
  37. SIGOUT, //Signal output SET, ACK
  38. SIGSTAT, //Signal input/output information GET, ACK, INF, EVT
  39. EVENT, //Event setting GET, SET, ACK, INF
  40. CSTID, //Carrier ID GET, ACK, INF
  41. USDEFINE, //User Define
  42. FFU, //Ffu SET,ACK,INF
  43. WTYPE, //Wtype Set and acquire wafer type SET,ACK,GET,ACK,INF
  44. PURGE, //Purge SET,ACK,GET,ACK,INF
  45. ADPLOCK, //Adplock MOV,ACK,INF
  46. ADPUNLOCK, //Adpunlock SET,ACK,INF
  47. LED, //Led SET,ACK,INF
  48. WORKCHK, //Workchk MOV,ACK,INF
  49. LIFT,
  50. }
  51. }