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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes
- {
- public class RorzeEfemAbsError
- {
- public static Dictionary<string, string> AbsCode = new Dictionary<string, string>()
- {
- {"VAC", "Lack of vacuum source"},
- {"AIR", " Lack of positive source pressure"},
- {"STALL", " Stall"},
- {"LIMIT", " Limit"},
- {"EMS", " Controller emergency stop"},
- {"COMM", " Internal communication error"},
- {"VACON", " Vacuum on error"},
- {"VACON2", " Vacuum pressure drops during transfer"},
- {"VACOF", " Vacuum OFF error"},
- {"CLAMPON", " Clamp error (*)"},
- {"CLAMPOF", " Clamp OFF error"},
- {"PRTWAF", " Wafer protrusion"},
- {"CRSWAF", " Cross wafer detection"},
- {"THICKWAF", " Wafer thickness error detection (Thick)"},
- {"THINWAF", " Wafer thickness error detection (Thin)"},
- {"DBLWAF", " Double wafers detection"},
- {"BOWWAF", " Wafer front down detection"},
- {"COMMAND", " Robot command error"},
- {"PODNG", " Carrier placement error"},
- {"VAC_S", " Vacuum sensor error"},
- {"UNIWIRE", " Uniwire error"},
- {"SAFTY", " Pinch sensor reaction"},
- {"LOCKNG", " Carrier lock disabled"},
- {"UNLOCKNG", " Carrier unlock disabled"},
- {"L-KEY_OV", " Latch key over-rotation"},
- {"L-KEY_LK", " Latch key reverse disabled"},
- {"L-KEY_UL", " Latch key release disabled"},
- {"MAP_S1", " Mapping sensor ready disabled"},
- {"MAP_S2", " Mapping sensor return disabled"},
- {"NONWAF", " No wafer on arm"},
- {"ALIGNNG", " Alignment failure"},
- {"ORG_NG", " Origin search uncompleted"},
- {"HARDWARE", " Hardware error"},
- {"UNSETUP", " Setting data is not set"},
- {"SETUPDT_NG", " Setting data error"},
- {"CONTROLLER", " Controller malfunction"},
- {"SYSTEM", " System (unit)malfunction"},
- {"SYSTEM_FFxx", " System (unit) malfunction"},
- {"N2", " Lack of N2 source pressure"},
- {"PURGE", " N2 purge error"},
- {"INTERNAL", " Internal error"},
- {"UNDEFINITION", " Undefined error"},
- };
- public static string GetError(string code)
- {
- if (AbsCode.ContainsKey(code))
- return AbsCode[code];
- return code;
- }
- }
-
- }
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