using System; using System.Collections.Generic; using System.Linq; using System.Threading.Tasks; using Aitex.Core.Common; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Event; using Aitex.Core.RT.Fsm; using Aitex.Core.RT.Log; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.RecipeCenter; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Core.Utilities; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.Core.Applications; using MECF.Framework.RT.Core.IoProviders; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts; using MECF.Framework.RT.ModuleLibrary.Commons; using MECF.Framework.RT.ModuleLibrary.EfemModules; using MECF.Framework.RT.ModuleLibrary.LPModules; using MECF.Framework.RT.ModuleLibrary.SystemModules.Routines; using SecsGem.Core.Application; namespace MECF.Framework.RT.ModuleLibrary.SystemModules { public enum RtState { Init, Initializing, Idle, Transfer, AutoRunning, AutoIdle, ReturnAllWafer, TMCycling, TMCyclePaused, Error, } public class EquipmentManager : FsmDevice, IEquipmentCommand { public enum MSG { MoveWafer, ReturnAllWafer, TMCycleStart, TMCyclePause, TMCycleResume, Stop, HOME, RESET, ABORT, ERROR, ToInit, SetAutoMode, SetManualMode, ResetIdleCleanTime, ResetIdlePurgeTime, FAJobCommand, CreateJob, PauseJob, ResumeJob, StartJob, StopJob, AbortJob, JobDone, ModuleError, Map, } public static Dictionary Modules { get; set; } public bool IsAutoIdle { get { return FsmState == (int)RtState.AutoIdle; } } public bool IsAutoMode { get { return FsmState == (int)RtState.AutoRunning || FsmState == (int)RtState.AutoIdle; } } public bool IsInit { get { return FsmState == (int)RtState.Init; } } public bool IsIdle { get { return FsmState == (int)RtState.Idle; } } public bool IsAlarm { get { return FsmState == (int)RtState.Error; } } public bool IsRunning { get { return !IsAlarm && !IsIdle && !IsInit && (FsmState != (int)RtState.AutoIdle); } } private bool _isInited; protected IRoutine _manualTransfer; protected IAutoTransfer _auto; protected IRoutine _homeAll; protected IRoutine _returnAll; protected IRoutine _tmCycle; private List _modules; public EquipmentManager() { Module = "System"; Name = "System"; Modules = new Dictionary(); _modules = new List() { "System" }; } public override bool Initialize() { InitDevices(); InitModules(); EnumLoop.ForEach((item) => { MapState((int)item, item.ToString()); }); EnumLoop.ForEach((item) => { MapMessage((int)item, item.ToString()); }); EnableFsm(100, RtState.Init); BuildTransitionTable(); SubscribeDataVariable(); SubscribeOperation(); InitRoutine(); Singleton.Instance.OnAlarmEvent += Instance_OnAlarmEvent; return true; } protected void BuildModules(params ModuleFsmDevice[] modules) { if (modules != null && modules.Length > 0) { foreach (var moduleFsmDevice in modules) { Modules[ModuleHelper.Converter(moduleFsmDevice.Module)] = moduleFsmDevice; } foreach (var modulesKey in Modules.Keys) { _modules.Add(modulesKey.ToString()); } foreach (var modulesValue in Modules.Values) { if (modulesValue.Module != ModuleName.TM.ToString() && modulesValue.Module != ModuleName.EFEM.ToString()) { if (!SC.GetValue($"System.SetUp.{modulesValue.Module}.IsInstalled")) { continue; } } modulesValue.Initialize(); } } } protected virtual void InitRoutine() { } protected virtual void InitModules() { } protected virtual void InitDevices() { } //private PeriodicJob _job1; //Stopwatch _sw = new Stopwatch(); //private bool OnJob1() //{ // _sw.Restart(); // BufferModule buffer = Modules[ModuleName.Buffer] as BufferModule; // if (!buffer.CheckToPostMessage(BufferModule.MSG.InTransfer)) // { // System.Diagnostics.Trace.Assert(false) // System.Diagnostics.Trace.WriteLine("fail to in transfer"); // } // if (buffer.IsIdle) // { // System.Diagnostics.Trace.Assert(false); // System.Diagnostics.Trace.WriteLine("!!!==========>IsIdle"); // } // //System.Diagnostics.Trace.Assert(buffer.IsIdle, $"in {buffer.StringFsmStatus}"); // while (buffer.IsIdle) // { // Thread.Sleep(5); // } // //buffer.NoteTransferStop(ModuleName.EfemRobot, Hand.Blade1, 0, EnumTransferType.Place); // //Thread.Sleep(15); // if (!buffer.CheckToPostMessage(BufferModule.MSG.TransferComplete)) // { // System.Diagnostics.Trace.Assert(false); // System.Diagnostics.Trace.WriteLine("fail to complete"); // } // //if (!buffer.IsIdle) // //{ // // System.Diagnostics.Trace.WriteLine("not idle"); // //} // System.Diagnostics.Trace.WriteLine($" === {_sw.ElapsedMilliseconds}"); // while (!buffer.IsIdle) // { // Thread.Sleep(5); // } // return true; //} private void BuildTransitionTable() { //Init sequence Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing); Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing); Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing); Transition(RtState.Error, MSG.ToInit, null, RtState.Init); Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle); Transition(RtState.Initializing, MSG.ERROR, fError, RtState.Error); Transition(RtState.Initializing, MSG.ABORT, FsmAbort, RtState.Init); //Reset AnyStateTransition(MSG.RESET, fStartReset, RtState.Idle); AnyStateTransition(MSG.ERROR, fError, RtState.Error); AnyStateTransition((int)FSM_MSG.ALARM, fError, (int)RtState.Error); //Auto/manual sequence Transition(RtState.Idle, MSG.SetAutoMode, fStartAutoTransfer, RtState.AutoIdle); Transition(RtState.AutoRunning, FSM_MSG.TIMER, fAutoTransfer, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ABORT, FsmAbort, RtState.AutoIdle); Transition(RtState.AutoRunning, MSG.JobDone, null, RtState.AutoIdle); Transition(RtState.AutoRunning, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning); //Transition(RtState.AutoRunning, MSG.FAJobCommand, FsmFAJobCommand, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.StartJob, FsmStartJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.PauseJob, FsmPauseJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ResumeJob, FsmResumeJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.StopJob, FsmStopJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.AbortJob, FsmAbortJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ModuleError, FsmModuleError, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.Map, FsmMap, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ResetIdleCleanTime, FsmResetIdleCleanTime, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ResetIdlePurgeTime, FsmResetIdlePurgeTime, RtState.AutoRunning); EnterExitTransition(RtState.AutoRunning, null, FSM_MSG.NONE, fExitAutoTransfer); Transition(RtState.AutoIdle, FSM_MSG.TIMER, FsmMonitorAutoIdle, RtState.AutoIdle); //Transition(RtState.AutoIdle, MSG.FAJobCommand, FsmFAJobCommand, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle); Transition(RtState.AutoIdle, MSG.CreateJob, FsmCreateJob, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.StartJob, FsmStartJob, RtState.AutoRunning); Transition(RtState.AutoIdle, MSG.ABORT, FsmAbort, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.AbortJob, FsmAbortJob, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.Map, FsmMap, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.ResetIdleCleanTime, FsmResetIdleCleanTime, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.ResetIdlePurgeTime, FsmResetIdlePurgeTime, RtState.AutoIdle); //return all wafer Transition(RtState.Idle, MSG.ReturnAllWafer, FsmStartReturnAllWafer, RtState.ReturnAllWafer); Transition(RtState.ReturnAllWafer, FSM_MSG.TIMER, FsmMonitorReturnAllWafer, RtState.Idle); Transition(RtState.ReturnAllWafer, MSG.ABORT, FsmAbortReturnAllWafer, RtState.Idle); //return all wafer Transition(RtState.Idle, MSG.TMCycleStart, FsmStartTMCycle, RtState.TMCycling); Transition(RtState.TMCycling, MSG.TMCyclePause, null, RtState.TMCyclePaused); Transition(RtState.TMCyclePaused, MSG.TMCycleResume, null, RtState.TMCycling); Transition(RtState.TMCycling, FSM_MSG.TIMER, FsmMonitorTMCycle, RtState.Idle); Transition(RtState.TMCycling, MSG.ABORT, FsmAbortTMCycle, RtState.Idle); //Transfer sequence Transition(RtState.Idle, MSG.MoveWafer, fStartTransfer, RtState.Transfer); Transition(RtState.Transfer, FSM_MSG.TIMER, fTransfer, RtState.Idle); Transition(RtState.Transfer, MSG.ABORT, FsmAbort, RtState.Idle); EnterExitTransition(RtState.Transfer, null, FSM_MSG.NONE, fExitTransfer); } void SubscribeDataVariable() { DATA.Subscribe("Rt.Status", () => StringFsmStatus); DATA.Subscribe("System.IsIdle", () => IsIdle || IsInit|| IsAutoIdle); DATA.Subscribe("System.IsAlarm", () => IsAlarm); DATA.Subscribe("System.IsBusy", () => IsRunning); DATA.Subscribe("System.IsAutoRunning", () => IsRunning); DATA.Subscribe("System.IsAutoMode", () => IsAutoMode); DATA.Subscribe("System.IsConnectedWithHost", () => CheckSecsGemOnline(Singleton.Instance.ControlState)); DATA.Subscribe("System.IsDisconnectWithHost", () => CheckSecsGemOnline(Singleton.Instance.ControlState)); DATA.Subscribe("System.Modules", () => _modules); DATA.Subscribe("System.EquipmentMode", () => IsAutoMode ? 0 : 1, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.EquipmentStatus", () => { //"0 = Uninit //1 = Idle //2 = Running //3 = Error //4 = Pause //" if (IsInit) return 0; if (IsIdle) return 1; if (IsAlarm) return 3; return 2; }, SubscriptionAttribute.FLAG.IgnoreSaveDB); } /// /// 检验Secsgem在线情况 /// /// /// private bool CheckSecsGemOnline(SecsGem.Core.EnumData.ControlState controlState) { if(controlState==SecsGem.Core.EnumData.ControlState.OnlineLocal||controlState==SecsGem.Core.EnumData.ControlState.OnlineRemote) { return true; } return false; } void SubscribeOperation() { OP.Subscribe("Create8InchWafer", InvokeCreate8InchWafer); OP.Subscribe("Create12InchWafer", InvokeCreate12InchWafer); OP.Subscribe("CreateWafer", InvokeCreateWafer); OP.Subscribe("DeleteWafer", InvokeDeleteWafer); OP.Subscribe("ReturnWafer", InvokeReturnWafer); OP.Subscribe("System.ReturnAllWafer", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ReturnAllWafer, args); }); OP.Subscribe("System.TMCycleStart", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.TMCycleStart, args); }); OP.Subscribe("System.TMCyclePause", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.TMCyclePause); }); OP.Subscribe("System.TMCycleResume", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.TMCycleResume); }); OP.Subscribe("System.ResetIdleCleanTime", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ResetIdleCleanTime, args[0]); }); OP.Subscribe("System.ResetIdlePurgeTime", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ResetIdlePurgeTime, args[0]); }); OP.Subscribe("System.MoveWafer", (string cmd, object[] args) => { if (!Enum.TryParse((string)args[0], out ModuleName source)) { EV.PostWarningLog(Name, $"Parameter source {(string)args[0]} not valid"); return false; } if (!Enum.TryParse((string)args[2], out ModuleName destination)) { EV.PostWarningLog(Name, $"Parameter destination {(string)args[1]} not valid"); return false; } if (args.Length > 8) { return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3], (bool)args[4], (int)args[5], (bool)args[6], (int)args[7]); } else if (args.Length > 5) { return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3], (bool)args[4]); } return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3]); }); OP.Subscribe("System.HomeAll", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.HOME); }); OP.Subscribe("System.Abort", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ABORT); }); OP.Subscribe("System.Reset", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.RESET); }); OP.Subscribe("System.SetAutoMode", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.SetAutoMode); }); OP.Subscribe("System.SetManualMode", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.SetManualMode); }); OP.Subscribe("System.CreateJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.CreateJob, args[0]); }); OP.Subscribe("System.StartJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.StartJob, args[0]); }); OP.Subscribe("System.PauseJob", (string cmd, object[] args) => { bool result= CheckToPostMessage((int)MSG.PauseJob, args[0]); //if(result) //{ // OP.DoOperation("E94PauseJob",args); //} return result; }); OP.Subscribe("System.ResumeJob", (string cmd, object[] args) => { bool result = CheckToPostMessage((int)MSG.ResumeJob, args[0]); //if(result) //{ // OP.DoOperation("E94ResumeJob", args); //} return result; }); OP.Subscribe("System.StopJob", (string cmd, object[] args) => { bool result= CheckToPostMessage((int)MSG.StopJob, args[0]); //if(result) //{ // OP.DoOperation("E94StopJob", args); //} return result; }); OP.Subscribe("System.AbortJob", (string cmd, object[] args) => { bool result= CheckToPostMessage((int)MSG.AbortJob, args[0]); //if(result) //{ // OP.DoOperation("E94AbortJob", args); //} return result; }); OP.Subscribe("System.ShutDown", InvokeShutDown); OP.Subscribe("System.MapWafer", InvokeEfemMap); OP.Subscribe("System.LP1.Map", (string cmd, object[] args) => { if (IsAutoMode) { return CheckToPostMessage((int)MSG.Map, ModuleName.LP1.ToString()); } return false; }); OP.Subscribe("System.LP2.Map", (string cmd, object[] args) => { if (IsAutoMode) { return CheckToPostMessage((int)MSG.Map, ModuleName.LP2.ToString()); } return false; }); OP.Subscribe("System.LP3.Map", (string cmd, object[] args) => { if (IsAutoMode) { return CheckToPostMessage((int)MSG.Map, ModuleName.LP3.ToString()); } return false; }); } private void Instance_OnAlarmEvent(EventItem obj) { } #region Init private bool FsmStartHome(object[] objs) { _isInited = false; return _homeAll.Start() == Result.RUN; } private bool FsmMonitorHome(object[] objs) { Result ret = _homeAll.Monitor(); if (ret == Result.DONE) { _isInited = true; return true; } if (ret == Result.FAIL) { PostMsg(MSG.ERROR); } return false; } private bool fError(object[] objs) { if (FsmState == (int)RtState.Transfer) { } return true; } #endregion #region AutoTransfer private bool FsmMonitorAutoIdle(object[] param) { //fMonitorFAJob(param); //return true; Result ret = _auto.Monitor(); if (!_auto.CheckAllJobDone()) { return false; } return ret == Result.DONE; } private bool FsmStartSetManualMode(object[] objs) { if (_auto.HasJobRunning) { EV.PostWarningLog("System", "Can not change to manual mode, abort running job first"); return false; } return true; } private bool fStartAutoTransfer(object[] objs) { Result ret = _auto.Start(objs); return ret == Result.RUN; } private bool fAutoTransfer(object[] objs) { //fMonitorFAJob(objs); Result ret = _auto.Monitor(); if (_auto.CheckAllJobDone()) { if (!CheckToPostMessage((int)MSG.JobDone)) return false; } return ret == Result.DONE; } private bool fExitAutoTransfer(object[] objs) { return true; } private bool fAbortAutoTransfer(object[] objs) { return true; } #endregion #region return all wafer private bool FsmAbortReturnAllWafer(object[] param) { _returnAll.Abort(); return true; } private bool FsmMonitorReturnAllWafer(object[] param) { return _returnAll.Monitor() == Result.DONE; } private bool FsmStartReturnAllWafer(object[] param) { return _returnAll.Start(param) == Result.RUN; } #endregion #region return all wafer private bool FsmAbortTMCycle(object[] param) { _tmCycle.Abort(); return true; } private bool FsmMonitorTMCycle(object[] param) { return _tmCycle.Monitor() == Result.DONE; } private bool FsmStartTMCycle(object[] param) { return _tmCycle.Start(param) == Result.RUN; } #endregion #region Transfer private bool fStartTransfer(object[] objs) { Result ret = _manualTransfer.Start(objs); if (ret == Result.FAIL || ret == Result.DONE) return false; return ret == Result.RUN; } private bool fTransfer(object[] objs) { Result ret = _manualTransfer.Monitor(); if (ret == Result.FAIL) { PostMsg(MSG.ERROR); return false; } return ret == Result.DONE; } private bool fExitTransfer(object[] objs) { return true; } private bool fAbortTransfer(object[] objs) { return true; } #endregion #region reset private bool fStartReset(object[] objs) { EV.ClearAlarmEvent(); //Singleton.Instance.PostMsg(DeviceEntity.MSG.RESET); IoProviderManager.Instance.Reset(); foreach (var modulesValue in Modules.Values) { if (modulesValue.Module != ModuleName.TM.ToString() && modulesValue.Module != ModuleName.EFEM.ToString() && !SC.GetValue($"System.SetUp.{modulesValue.Module}.IsInstalled")) continue; modulesValue.Reset(); } if (FsmState == (int)RtState.Error) { if (!_isInited) { PostMsg(MSG.ToInit); return false; } return true; } return false; } #endregion private bool FsmCreateJob(object[] param) { _auto.CreateJob((Dictionary)param[0]); return true; } private bool FsmAbortJob(object[] param) { _auto.AbortJob((string)param[0]); return true; } private bool FsmStopJob(object[] param) { _auto.StopJob((string)param[0]); //CheckToPostMessage((int)MSG.StopJob);// return true; } private bool FsmResumeJob(object[] param) { _auto.ResumeJob((string)param[0]); return true; } private bool FsmPauseJob(object[] param) { _auto.PauseJob((string)param[0]); return true; } private bool FsmStartJob(object[] param) { return _auto.StartJob((string)param[0]); } private bool FsmAbort(object[] param) { if (FsmState == (int)RtState.Transfer) { // _manualTransfer.Clear(); } if (FsmState == (int)RtState.AutoRunning || FsmState == (int)RtState.AutoIdle) { _auto.Clear(); } if (FsmState == (int)RtState.Initializing) { _homeAll.Abort(); } return true; } private bool FsmModuleError(object[] param) { _auto.ModuleError((string)param[0]); return true; } private bool FsmMap(object[] param) { _auto.Map((string)param[0]); return true; } private bool FsmResetIdlePurgeTime(object[] param) { _auto.ResetIdlePurgeTime((string)param[0]); return true; } private bool FsmResetIdleCleanTime(object[] param) { _auto.ResetIdleCleanTime((string)param[0]); return true; } private bool InvokeReturnWafer(string arg1, object[] args) { ModuleName target = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; if (ModuleHelper.IsLoadPort(target)) { EV.PostInfoLog("System", string.Format("Wafer already at LoadPort {0} {1}, return operation is not valid", target.ToString(), slot + 1)); return false; } if (!WaferManager.Instance.IsWaferSlotLocationValid(target, slot)) { EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", target.ToString(), slot.ToString())); return false; } WaferInfo wafer = WaferManager.Instance.GetWafer(target, slot); if (wafer.IsEmpty) { EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, return operation is not valid", target.ToString(), slot + 1)); return false; } return CheckToPostMessage((int)MSG.MoveWafer, target, slot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, false, 0, false, 0); } private bool InvokeDeleteWafer(string arg1, object[] args) { ModuleName chamber = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot)) { if (WaferManager.Instance.CheckHasWafer(chamber, slot)) { WaferManager.Instance.DeleteWafer(chamber, slot); EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1); } else { EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1)); } } else { EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString())); return false; } return true; } private bool InvokeCreateWafer(string arg1, object[] args) { ModuleName chamber = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; WaferStatus state = WaferStatus.Normal; //if (ModuleHelper.IsLoadPort(chamber)) //{ // var lp = Modules[chamber] as LoadPortModule; // if (lp.LPDevice.CassetteState != LoadportCassetteState.Normal) // { // EV.PostWarningLog("System", $"Can not create wafer at {chamber}.{slot + 1}, Cassette not placed."); // return false; // } //} WaferSize ws = WaferSize.WS0; switch (SC.GetValueOrDefault("System.DefaultCreateWaferSize")) { case 0: ws = WaferSize.WS0; break; case 4: ws = WaferSize.WS4; break; case 6: ws = WaferSize.WS6; break; case 8: ws = WaferSize.WS8; break; case 12: ws = WaferSize.WS12; break; } if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot)) { var wafer = WaferManager.Instance.GetWafer(chamber,slot); if(wafer != null && !wafer.IsEmpty) { EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot)); } else if (WaferManager.Instance.CreateWafer(chamber, slot, state, ws) != null) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString()); } } else { EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString())); return false; } return true; } private bool InvokeCreate8InchWafer(string arg1, object[] args) { ModuleName chamber = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; WaferStatus state = WaferStatus.Normal; //if (ModuleHelper.IsLoadPort(chamber)) //{ // var lp = Modules[chamber] as LoadPortModule; // if (lp.LPDevice.CassetteState != LoadportCassetteState.Normal) // { // EV.PostWarningLog("System", $"Can not create wafer at {chamber}.{slot + 1}, Cassette not placed."); // return false; // } //} if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot)) { if (WaferManager.Instance.CheckHasWafer(chamber, slot)) { EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot)); } else if (WaferManager.Instance.CreateWafer(chamber, slot, state, WaferSize.WS8) != null) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString()); } } else { EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString())); return false; } return true; } private bool InvokeCreate12InchWafer(string arg1, object[] args) { ModuleName chamber = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; WaferStatus state = WaferStatus.Normal; //if (ModuleHelper.IsLoadPort(chamber)) //{ // var lp = Modules[chamber] as LoadPortModule; // if (lp.LPDevice.CassetteState != LoadportCassetteState.Normal) // { // EV.PostWarningLog("System", $"Can not create wafer at {chamber}.{slot + 1}, Cassette not placed."); // return false; // } //} if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot)) { if (WaferManager.Instance.CheckHasWafer(chamber, slot)) { EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot)); } else if (WaferManager.Instance.CreateWafer(chamber, slot, state, WaferSize.WS12) != null) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString()); } } else { EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString())); return false; } return true; } private bool InvokeShutDown(string arg1, object[] arg2) { if (IsAlarm || IsIdle || IsInit) { EV.PostWarningLog(Module, $"System start shut down"); EV.PostKickoutMessage("ShutDown"); RtApplication.Instance.Terminate(); return true; } EV.PostWarningLog(Module, $"System in {StringFsmStatus} mode, can not shut down"); return false; } private bool InvokeEfemMap(string arg1, object[] arg2) { ModuleName target = ModuleHelper.Converter((string)arg2[0]); if (!ModuleHelper.IsLoadPort(target)) { EV.PostWarningLog("System", $"Invalid map target {target}"); return false; } for (int i = 0; i < 25; i++) { WaferInfo wafer = WaferManager.Instance.GetWafer(target, i); if (wafer.IsEmpty) continue; if (wafer.ProcessState == EnumWaferProcessStatus.Completed || wafer.ProcessState == EnumWaferProcessStatus.Failed) { EV.PostWarningLog("System", $"{target} wafer is processed, can not map again"); return false; } } if (IsAutoMode) { _auto.Map((string)arg2[0]); return true; } //EfemModule efem = Modules[ModuleName.EfemRobot] as EfemModule; //if (!efem.Map(ModuleHelper.Converter((string) arg2[0]), out string reason)) //{ // EV.PostWarningLog(Module, reason); //} return true; } private void OnModuleError(string module) { if (FsmState == (int)RtState.AutoRunning) { ModuleName mod = ModuleHelper.Converter(module); PostMsg(MSG.ModuleError, module); } } public override void Monitor() { base.Monitor(); } string sourceModule = ""; #region control job /process job nnotation /* private bool fMonitorFAJob(object[] param) { //Singleton.Instance.MonitorJob(); E40ProcessJob[] pjs = Singleton.Instance.FAProcessJobs.Values.ToArray(); E94ControlJob[] cjs = Singleton.Instance.FAControlJobs.Values.ToArray(); foreach (var pj in pjs) { if ((pj.PJstate == ProcessJobState.NONE || pj.PJstate == ProcessJobState.PROCESS_COMPLETE) && Singleton.Instance.FAProcessJobs.ContainsKey(pj.ObjtID)) Singleton.Instance.FAProcessJobs.Remove(pj.ObjtID); if (pj.PJstate == ProcessJobState.ABORTING) Singleton.Instance.FAProcessJobs[pj.ObjtID].PJAborted(); if (pj.PJstate == ProcessJobState.ABORTED) Singleton.Instance.FAProcessJobs.Remove(pj.ObjtID); } foreach (var cj in cjs) { if ((cj.state == ControlJobState.NONE || cj.state == ControlJobState.COMPLETED) && Singleton.Instance.FAControlJobs.ContainsKey(cj.ObjtID)) Singleton.Instance.FAControlJobs.Remove(cj.ObjtID); } if (Singleton.Instance.FAProcessJobs.Count == 0) return true; if (Singleton.Instance.FAControlJobs.Count == 0) return true; foreach (var pj in pjs) { if (pj.PJstate == ProcessJobState.POOLED) { foreach (var mtrlname in pj.PRMtlNameList) { string lp = CarrierManager.Instance.GetLocationByCarrierId(mtrlname.CarrierID); if (lp == null) continue; if (Singleton.Instance.FAloadports[lp].GetCarrierIDStatus() == CarrierIDStatus.ID_VERIFICATION_OK && Singleton.Instance.FAloadports[lp].GetSlotMapStatus() == SlotMapStatus.SLOT_MAP_VERIFICATION_OK) { pj.MaterialPresentAndResourceReady(); AssignProcessJob(mtrlname, pj.RecID, pj.PRRecipeMethod, pj.RecVariableList, pj.ObjtID); } } } } foreach (var cj in cjs) { if (cj.state == ControlJobState.QUEUED) { bool allPjSetUp = true; cj.MtrlOutSpec = new List(); foreach (var pj in cj.ProcessingCtrlSpec) { if (!Singleton.Instance.FAProcessJobs.ContainsKey(pj)) { allPjSetUp = false; break; } if (Singleton.Instance.FAProcessJobs[pj].PJstate != ProcessJobState.SETTING_UP) { allPjSetUp = false; break; } foreach (var PRMtl in Singleton.Instance.FAProcessJobs[pj].PRMtlNameList) { cj.MtrlOutSpec.Add(new MtrlOutSpecPair() { sourceCarID = PRMtl.CarrierID, DestCarID = PRMtl.CarrierID, sourceSlots = PRMtl.SlotID, destSlots = PRMtl.SlotID }); } } if (allPjSetUp) { cj.ProcessResourceReady(); } } if (cj.MtrlOutSpec == null || cj.MtrlOutSpec.Count == 0) continue; //string sourceModule = ""; //检查source ready if (cj.state == ControlJobState.SELECTED) { bool sourceReady = true; for (int i = 0; i < cj.MtrlOutSpec.Count; i++) { sourceModule = cj.MtrlOutSpec[i].sourceCarID; if (!CheckCJMaterialSourceReady(cj.MtrlOutSpec[i]) || !CheckCJMaterialDestReady(cj.MtrlOutSpec[i])) { sourceReady = false; break; } } if (!sourceReady) continue; Task.Delay(500).ContinueWith(x => { cj.MaterialArrived(); }); Task.Delay(1000).ContinueWith(x => { foreach (var pj in cj.ProcessingCtrlSpec) { Singleton.Instance.FAProcessJobs[pj].MaterialReadyForProcessing(); } }); } if (cj.state == ControlJobState.EXECUTING) { cj.MtrlOutSpec.Clear(); AssignControlJob(cj.ObjtID, CarrierManager.Instance.GetLocationByCarrierId(sourceModule), cj.ProcessingCtrlSpec); } } return true; } public bool CheckCJMaterialSourceReady(MtrlOutSpecPair mtp) { string lp = CarrierManager.Instance.GetLocationByCarrierId(mtp.sourceCarID); if (string.IsNullOrEmpty(lp)) return false; if (Singleton.Instance.FAloadports[lp].GetSlotMapStatus() != SlotMapStatus.SLOT_MAP_VERIFICATION_OK) return false; if (Singleton.Instance.FAloadports[lp].GetCarrierIDStatus() != CarrierIDStatus.ID_VERIFICATION_OK) return false; foreach (var slot in mtp.sourceSlots) { var wafer = WaferManager.Instance.GetWafer((ModuleName)Enum.Parse(typeof(ModuleName), lp), slot - 1); if (wafer.IsEmpty) return false; if (wafer.SubstE90Status != EnumE90Status.NeedProcessing) return false; } return true; } public bool CheckCJMaterialDestReady(MtrlOutSpecPair mtp) { string lp = CarrierManager.Instance.GetLocationByCarrierId(mtp.DestCarID); if (string.IsNullOrEmpty(lp)) return false; if (Singleton.Instance.FAloadports[lp].GetSlotMapStatus() != SlotMapStatus.SLOT_MAP_VERIFICATION_OK) return false; if (Singleton.Instance.FAloadports[lp].GetCarrierIDStatus() != CarrierIDStatus.ID_VERIFICATION_OK) return false; return true; } public bool AssignProcessJob(ProcessMaterialName matrial, string recipe, ProcessRecipeMethod method, Dictionary RecVariableList, string pjID) { string lp = CarrierManager.Instance.GetLocationByCarrierId(matrial.CarrierID); string[] slotsequence = new string[25]; for (int i = 0; i < 25; i++) { if (matrial.SlotID.Contains(i + 1)) slotsequence[i] = recipe; else slotsequence[i] = ""; } Dictionary para = new Dictionary(); para.Add("JobId", pjID); para.Add("Module", lp); para.Add("SlotSequence", slotsequence); para.Add("AutoStart", true); //OP.DoOperation("System.CreateJob", new object[] { para }); List slot = new List(); foreach (var i in matrial.SlotID) { slot.Add(i - 1); } CheckToPostMessage((int)MSG.FAJobCommand, new object[] { "CreateProcessJob", pjID, recipe, slot, true }); return true; } public bool AssignControlJob(string cjID, string module, List pjList) { //OP.DoOperation("System.StartJob", new object[] { pjID }); CheckToPostMessage((int)MSG.FAJobCommand, new object[] { "CreateControlJob", cjID, module, pjList, true }); return true; } private bool FsmFAJobCommand(object[] param) { switch ((string)param[0]) { case "CreateProcessJob": _auto.CreateProcessJob((string)param[1], (string)param[2], (List)param[3], (bool)param[4]); break; case "CreateControlJob": _auto.CreateControlJob((string)param[1], (string)param[2], (List)param[3], (bool)param[4]); CheckToPostMessage((int)MSG.StartJob, (string)param[1]); break; } return true; } */ #endregion public bool RegisterEvent(bool isAlarm, string eventname, string eventcontext) { return true; } public bool PostEvent(bool isAlarm, string eventname, Dictionary dvid, Dictionary objdvid) { return true; } public bool ExcuteCommand(string command, object[] paras, out string reason) { reason = ""; int portID; string jobID; string lotId; object[] sequence; string[] slotsequence; LoadPortModuleBase lp; switch (command.ToUpper()) { case "PP-SELECT": if(!IsAutoMode) { reason = "system is not auto"; return false; } portID = int.Parse(paras[0].ToString()); jobID = paras[1].ToString(); lotId = paras[2].ToString(); sequence = (object[])paras[3]; slotsequence = new string[25]; for (int i = 0; i < 25; i++) { slotsequence[i] = sequence[i].ToString() == "*null*" ? "" : sequence[i].ToString(); } Dictionary para = new Dictionary(); para.Add("JobId", jobID); para.Add("LotId", lotId); para.Add("Module", ((ModuleName)portID).ToString()); para.Add("SlotSequence", slotsequence); para.Add("AutoStart", true); return CheckToPostMessage((int)MSG.CreateJob, para); case "STARTJOB": jobID = paras[0].ToString(); return CheckToPostMessage((int)MSG.StartJob, jobID); case "ABORTJOB": jobID = paras[0].ToString(); return _auto.AbortJob(jobID); case "PAUSEJOB": jobID = paras[0].ToString(); return _auto.PauseJob(jobID); case "RESUMEJOB": jobID = paras[0].ToString(); return _auto.ResumeJob(jobID); case "STOPJOB": jobID = paras[0].ToString(); return _auto.StopJob(jobID); case "LOAD": portID = int.Parse(paras[0].ToString()); lp = Modules[(ModuleName)portID] as LoadPortModuleBase; if (lp != null) { return lp.Load(); } reason = $"Not Find LP{portID}"; return false; case "UNLOAD": portID = int.Parse(paras[0].ToString()); lp = Modules[(ModuleName)portID] as LoadPortModuleBase; if (lp != null) { return lp.Unload(); } reason = $"Not Find LP{portID}"; return false; case "MAPCASSETTE": portID = int.Parse(paras[0].ToString()); var efem = Modules[ModuleName.EFEM] as EfemModuleBase; if (efem != null && (portID == 1 || portID == 2)) { return efem.Map((ModuleName)portID, out reason); } reason = $"Not Find LP{portID}"; return false; case "READID": case "READRFID": case "READTAG": portID = int.Parse(paras[0].ToString()); LoadPort lpDevice = DEVICE.GetDevice("LP" + portID.ToString()); if (lpDevice != null) { return lpDevice.ReadRfId(out reason); } else { reason = $"Not Find LP{portID}"; return false; } case "CLAMP": case "LOCK": { portID = int.Parse(paras[0].ToString()); lpDevice = DEVICE.GetDevice("LP" + portID.ToString()); if (lpDevice != null) { return lpDevice.Clamp(out reason); } else { reason = $"Not Find LP{portID}"; return false; } } case "UNCLAMP": case "UNLOCK": { portID = int.Parse(paras[0].ToString()); lpDevice = DEVICE.GetDevice("LP" + portID.ToString()); if (lpDevice != null) { return lpDevice.Unclamp(out reason); } else { reason = $"Not Find LP{portID}"; return false; } } case "WRITEID": case "WRITERFID": case "WRITETAG": { portID = int.Parse(paras[0].ToString()); string rfid = paras[1].ToString(); lpDevice = DEVICE.GetDevice("LP" + portID.ToString()); if (lpDevice != null) { return lpDevice.WriteRfId(rfid, out reason); } else { reason = $"Not Find LP{portID}"; return false; } } } return true; } public string[] GetRecipeList(string param) { if (param == "SEQUENCE") return RecipeFileManager.Instance.GetSequenceNameList().ToArray(); if (param == "PMA") return RecipeFileManager.Instance.GetRecipes("PMA", true).ToArray(); if (param == "PMB") return RecipeFileManager.Instance.GetRecipes("PMB", true).ToArray(); return RecipeFileManager.Instance.GetSequenceNameList().ToArray(); } public string GetRecipeBody(string param, string recipename) { if (param == "SEQUENCE") return RecipeFileManager.Instance.GetSequence(recipename, false); if (param == "PMA") return RecipeFileManager.Instance.LoadRecipe("PMA", recipename, false); if (param == "PMB") return RecipeFileManager.Instance.LoadRecipe("PMB", recipename, false); return RecipeFileManager.Instance.GetSequence(recipename, false); } public string[] GetSequenceList() { return RecipeFileManager.Instance.GetSequenceNameList().ToArray(); } public string GetSequenceBody(string ppid) { return RecipeFileManager.Instance.GetSequence(ppid, false); } public List GetFormatedSequence(string ppid) { List result = new List(); string reason = string.Empty; try { string content = ""; if (ppid.StartsWith("PMA") || ppid.StartsWith("PMB") || ppid.StartsWith("PMC")) { content = RecipeFileManager.Instance.LoadRecipe("", ppid, false); } else { content = RecipeFileManager.Instance.GetSequence(ppid, false); } result.Add(content); } catch (Exception ex) { reason = ex.Message; } return result; } public bool deleteSequence(string ppid) { return RecipeFileManager.Instance.DeleteSequence(ppid); } public bool UpdateSequence(string ppid, string body) { return RecipeFileManager.Instance.SaveSequence(ppid, body, false); } public void ShowTerminalMessage(string message) { } /// /// 创建ProcessJob /// /// /// /// /// public bool CreateProcessJob(string processJobId, string sequenceName,string carrierId,out string reason) { if(!IsAutoMode) { reason = "system is not auto"; return false; } return _auto.CreateProcessJob(processJobId, sequenceName,carrierId, out reason); } /// /// 更新processJob carrierSlot信息 /// /// /// /// public void UpdateProcessJobCarrierSlot(string processJobId, string moduleName, List slots) { _auto.UpdateProcessJobSlotWafer(processJobId, moduleName, slots); } /// /// 检验创建ControlJob的条件 /// /// public bool CheckCreateControlJobCondition(List modules, out string reason) { if (!IsAutoMode) { reason = "system is not auto"; return false; } return _auto.CheckCreateControlJobCondition(modules,out reason); } /// /// 创建ControlJob /// /// /// /// /// /// /// public void CreateControlJob(string controlJobId, string carrierId, List processJobs) { _auto.CreateControlJob(controlJobId, carrierId, processJobs); } /// /// 更新ControlJob Module信息 /// /// /// public void UpdateControlJobModule(string controlJobId, string moduleName) { _auto.UpdateControlJobModule(controlJobId, moduleName); } /// /// 启动任务 /// /// /// public bool StartControlJob(string controlJob) { return CheckToPostMessage((int)MSG.StartJob, controlJob); } /// /// 停止任务 /// /// /// public bool StopControlJob(string controlJob) { return CheckToPostMessage((int)MSG.StopJob, controlJob); } /// /// 中止任务 /// /// /// public bool AbortControlJob(string controlJob) { return CheckToPostMessage((int)MSG.AbortJob, controlJob); } /// /// 暂停任务 /// /// /// public bool PauseControlJob(string controlJob) { return CheckToPostMessage((int)MSG.PauseJob, controlJob); } /// /// 启动任务 /// /// /// public bool ResumeControlJob(string controlJob) { return CheckToPostMessage((int)MSG.ResumeJob, controlJob); } /// /// 检验Auto /// /// public bool CheckAuto() { return IsAutoMode; } /// /// 告警日志 /// /// public void WriteWarningLog(string message) { LOG.Warning($"EAP {message}"); } /// /// 错误日志 /// /// public void WriteErrorLog(string message) { EV.PostAlarmLog("EAP", $"EAP {message}"); } /// /// 正常日志 /// /// public void WriteInfoLog(string message) { LOG.Write($"EAP {message}" ); } } }