using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace MECF.Framework.Common.FAServices { public static class DataVariables { public const string AlarmsEnabled = "AlarmsEnabled"; public const string AlarmsSet = "AlarmsSet"; public const string Clock = "Clock"; public const string ControlState = "ControlState"; public const string EventsEnabled = "EventsEnabled"; public const string PPExecName = "PPExecName"; public const string PreviousProcessState = "PreviousProcessState"; public const string ProcessState = "ProcessState"; public const string RecipeEndDataSummary = "RecipeEndDataSummary"; public const string RecipeStepEndDataSummary = "RecipeStepEndDataSummary"; public const string EventLimit = "EventLimit"; public const string LimitVariable = "LimitVariable"; public const string PPChangeName = "PPChangeName"; public const string PPChangeStatus = "PPChangeStatus"; public const string TransitionType = "TransitionType"; public const string AlarmID = "AlarmID"; public const string ECChangedID = "ECChangedID"; public const string DVID_NEW = "DVID_NEW"; public const string EventName = "EventName"; public const string LotID = "LotID"; public const string RecipeID = "RecipeID"; public const string JobID = "JobID"; public const string CarrierID = "CarrierID"; public const string SlotMap = "SlotMap"; public const string SequenceID = "SequenceID"; public const string StationName = "StationName"; public const string RecipeStepNumber = "RecipeStepNumber"; public const string SlotID = "SlotID"; public const string AccessMode = "AccessMode"; public const string PortAssociationState = "PortAssociationState"; public const string PortID = "PortID"; public const string CarrierAccessingStatus = "CarrierAccessingStatus"; public const string PortTransferState = "PortTransferState"; public const string Reason = "Reason"; public const string LocationID = "LocationID"; public const string SlotMapStatus = "SlotMapStatus"; public const string WaferID = "WaferID"; public const string PRJobID = "PRJobID"; public const string PRJobState = "PRJobState"; public const string PrvPRJobState = "PrvPRJobState"; public const string PRMtlNameList = "PRMtlNameList"; public const string RecVariableList = "RecVariableList"; public const string CJID = "CJID"; public const string CJState = "CJState"; public const string PrvCJState = "PrvCJState"; public const string SubstDestination = "SubstDestination"; public const string SubstHistory = "SubstHistory"; public const string SubstID = "SubstID"; public const string SubstLocID = "SubstLocID"; public const string SubstLocState = "SubstLocState"; public const string SubstProcState = "SubstProcState"; public const string PrvSubstProcState = "PrvSubstProcState"; public const string ProcessedWaferCount = "ProcessedWaferCount"; public const string WaferProcessResult = "WaferProcessResult"; #region 自定义DVID，在此增加完后需更新DataNameEnum和DataVariablesDictionary public const string TotalStepTimePV = "TotalStepTimePV"; public const string SingleStepTimeList = "SingleStepTimeList"; public const string ChemicalUnitDataSummary = "ChemicalUnitDataSummary"; public const string SmartTag = "SmartTag"; #endregion public enum DataName { AlarmsEnabled=1, AlarmsSet=2, Clock =3, ControlState=4, EventsEnabled=5, PPExecName=6, PreviousProcessState=7, ProcessState=8, RecipeEndDataSummary = 501, RecipeStepEndDataSummary = 502, EventLimit = 3001, LimitVariable = 3002, PPChangeName = 3003, PPChangeStatus = 3004, TransitionType = 3005, AlarmID = 3006, ECChangedID = 3007, DVID_NEW = 3008, EventName = 3101, LotID = 3102, RecipeID = 3103, JobID = 3104, CarrierID = 3105, SlotMap = 3106, SequenceID = 3107, StationName = 3108, RecipeStepNumber = 3109, SlotID = 3110, AccessMode = 3111, PortAssociationState = 3112, PortID = 3113, CarrierAccessingStatus = 3114, PortTransferState=3116, Reason = 3117, LocationID =3118, SlotMapStatus =3119, WaferID =3120, WaferStatus = 3121, ContentMap = 3122, ChamberID = 3123, ProcessedWaferCount = 3124, WaferProcessResult = 3125, PRJobID =3201, PRJobState = 3202, PrvPRJobState = 3203, PRMtlNameList = 3205, RecVariableList = 3210, CJID =3301, CJState=3302, PrvCJState=3303, CarrierInputSpec = 3304, SubstDestination=3402, SubstHistory = 3403, SubstID=3404, SubstLocID = 3405, SubstLocState = 3406, SubstProcState = 3407, PrvSubstProcState = 3408, #region 自定义DVID，添加到 3500-4000 范围内 ChemicalUnitDataSummary = 3500, TotalStepTimePV =3501, SingleStepTimeList = 3502, SmartTag = 3503, #endregion } public static Dictionary DataVariablesDictionary = new Dictionary() { {AlarmsEnabled, new VIDItem() {Name = AlarmsEnabled, Index = (int) DataName.AlarmsEnabled,DataType = "List",Description = "Effective Alarm ID list"}}, {AlarmsSet, new VIDItem() {Name = AlarmsSet, Index = (int) DataName.AlarmsSet,DataType = "List",Description = "Raised Alarm ID List"}}, {Clock, new VIDItem() {Name = Clock, Index = (int) DataName.Clock,DataType = "String",Description = "Present date time\r\nYYYYMMDDhhmmsscc"}}, {ControlState, new VIDItem() {Name = ControlState, Index = (int) DataName.ControlState,DataType = "String",Description = "Current control state\r\n\"1\"= Not defined\r\n\"2\"= Offline-Equipment OffLine\r\n\"3\"= Offline-Attempt OnLine\r\n\"4\"= On-Line Local\r\n \"5\"= On-Line Remote"}}, {EventsEnabled, new VIDItem() {Name = EventsEnabled, Index = (int) DataName.EventsEnabled,DataType = "List",Description = "Raised EventID list"}}, {PPExecName, new VIDItem() {Name = PPExecName, Index = (int) DataName.PPExecName,DataType = "String",Description = "Process program ID for the current or recently started process=Recipe name"}}, {PreviousProcessState, new VIDItem() {Name = PreviousProcessState, Index = (int) DataName.PreviousProcessState,DataType = "Int",Description = "Immediately before process status\r\nRef.: VID8 ProcessState"}}, {ProcessState, new VIDItem() {Name = ProcessState, Index = (int) DataName.ProcessState,DataType = "Int",Description = "Current process state\r\n0= init\r\n1= idle\r\n2= ready\r\n3= run\r\n4= pause\r\n5 = abort\r\n6= down"}}, {RecipeEndDataSummary, new VIDItem() {Name = RecipeEndDataSummary, Index = (int) DataName.RecipeEndDataSummary,DataType = "List",Description = "Process data summary thrown when recipe end"}}, {RecipeStepEndDataSummary, new VIDItem() {Name = RecipeStepEndDataSummary, Index = (int) DataName.RecipeStepEndDataSummary,DataType = "List",Description = "Process data summary thrown when recipe step end"}}, {EventLimit, new VIDItem() {Name = EventLimit, Index = (int) DataName.EventLimit,DataType = "Int"}}, {LimitVariable, new VIDItem() {Name = LimitVariable, Index = (int) DataName.LimitVariable,DataType = "Int"}}, {PPChangeName, new VIDItem() {Name = PPChangeName, Index = (int) DataName.PPChangeName,DataType = "String",Description = "Recipe change name(RCPID)"}}, {PPChangeStatus, new VIDItem() {Name = PPChangeStatus, Index = (int) DataName.PPChangeStatus,DataType = "Int",Description = "The type of change that occurred for the recipe indicated in RcpChangeName \r\n 0=No change\r\n 1=Created\r\n 2=Updated (modified)\r\n 3=Stored (new)\r\n 4=Replaced\r\n 5=Deleted\r\n 6=Copied\r\n 7=Renamed"}}, {TransitionType, new VIDItem() {Name = TransitionType, Index = (int) DataName.TransitionType,DataType = "Binary"}}, {AlarmID, new VIDItem() {Name = AlarmID, Index = (int) DataName.AlarmID,DataType = "Int",Description = "This variable is valid only upon the setting or clearing of an alarm condition and contains the current alarm identification (ALID), regardless of whether that alarm is enabled for reporting."}}, {ECChangedID, new VIDItem() {Name = ECChangedID, Index = (int) DataName.ECChangedID,DataType = "Int",Description = "Changed ECID list L,n"}}, {DVID_NEW, new VIDItem() {Name = DVID_NEW, Index = (int) DataName.DVID_NEW,DataType = "String"}}, {EventName, new VIDItem() {Name = EventName, Index = (int) DataName.EventName,DataType = "String"}}, {LotID, new VIDItem() {Name = LotID, Index = (int) DataName.LotID,DataType = "String"}}, {RecipeID, new VIDItem() {Name = RecipeID, Index = (int) DataName.RecipeID,DataType = "String"}}, {JobID, new VIDItem() {Name = JobID, Index = (int) DataName.JobID,DataType = "String"}}, {CarrierID, new VIDItem() {Name = CarrierID, Index = (int) DataName.CarrierID,DataType = "String",Description = "The ID of the carrier."}}, {SlotMap, new VIDItem() {Name = SlotMap, Index = (int) DataName.SlotMap,DataType = "String",Description = "Presence status of wafers in the carrier.\r\nL, n (n = Number of SLOTSTATEs)\r\n\r\n0=UNDEFINED\r\n1=EMPTY\r\n2=NOT EMPTY\r\n3=CORRECTLY OCCUPIED\r\n4=DOUBLE SLOTTED\r\n5=CROSS SLOTTED"}}, {SequenceID, new VIDItem() {Name = SequenceID, Index = (int) DataName.SequenceID,DataType = "String"}}, {StationName, new VIDItem() {Name = StationName, Index = (int) DataName.StationName,DataType = "String"}}, {RecipeStepNumber, new VIDItem() {Name = RecipeStepNumber, Index = (int) DataName.RecipeStepNumber,DataType = "String"}}, {SlotID, new VIDItem() {Name = SlotID, Index = (int) DataName.SlotID,DataType = "String"}}, {AccessMode, new VIDItem() {Name = AccessMode, Index = (int) DataName.AccessMode,DataType = "Int",Description = "Load Port Access Mode.\r\n0=MANUAL\r\n1=AUTO"}}, {PortAssociationState, new VIDItem() {Name = PortAssociationState, Index = (int) DataName.PortAssociationState,DataType = "Int",Description = "The association state of a load port.\r\n0=NOT ASSOCIATED\r\n1= ASSOCIATED"}}, {PortID, new VIDItem() {Name = PortID, Index = (int) DataName.PortID,DataType = "Int",Description = "Load port ID"}}, {CarrierAccessingStatus, new VIDItem() {Name = CarrierAccessingStatus, Index = (int) DataName.CarrierAccessingStatus,DataType = "Int",Description = "The current accessing state of the carrier by the equipment.\r\n0=NOT ACCESSED\r\n1=IN ACCESS\r\n2=CARRIER COMPLETE\r\n3=CARRIER STOPPED"}}, {PortTransferState, new VIDItem() {Name = PortTransferState, Index = (int) DataName.PortTransferState,DataType = "Int",Description = "The current transfer state of a load port. \r\n0=OUT OF SERVICE\r\n1=TRANSFER BLOCKED\r\n2=READY TO LOAD\r\n3=READY TO UNLOAD"}}, {Reason, new VIDItem() {Name = Reason, Index = (int) DataName.Reason,DataType = "Int",Description = "The reason for slot map status, SLOT MAP NOT READ to WAITING FOR HOST\r\n0=Verification Needed\r\n1=Verification By Equipment Unsuccessful\r\n2=Read Fail\r\n3=Improper Substrate Position"}}, {LocationID, new VIDItem() {Name = LocationID, Index = (int) DataName.LocationID,DataType = "String",Description = "The ID of a carrier location."}}, {SlotMapStatus, new VIDItem() {Name = SlotMapStatus, Index = (int) DataName.SlotMapStatus,DataType = "Int",Description = "State of the carrier slot map status. \r\n0=SLOT MAP NOT READ\r\n1=WAITING FOR HOST\r\n2=SLOT MAP VERIFICATION OK\r\n3=SLOT MAP VERIFICATION FAIL"}}, {WaferID, new VIDItem() {Name = WaferID, Index = (int) DataName.WaferID,DataType = "String"}}, {ProcessedWaferCount, new VIDItem() {Name = ProcessedWaferCount, Index = (int) DataName.ProcessedWaferCount,DataType = "Int"}}, {WaferProcessResult, new VIDItem() {Name = WaferProcessResult, Index = (int) DataName.WaferProcessResult,DataType = "Int",Description = "Wafer Process Result. \r\n0=Failed\r\n1=Successful"}}, {PRJobID, new VIDItem() {Name = PRJobID, Index = (int) DataName.PRJobID,DataType = "String",Description = "Process job ID"}}, {PRJobState, new VIDItem() {Name = PRJobState, Index = (int) DataName.PRJobState,DataType = "Int",Description = "Indicates the current state of a Process Job.\r\n0=POOLED\r\n1=SETTING UP\r\n2=WAITINGFORHOST\r\n3=PROCESSING\r\n4=PROCESSING COMPLETE\r\n5=EXECUTING\r\n6=PAUSING\r\n7=PAUSED\r\n8=STOPPING\r\n9=ABORTING\r\n255=(no state)"}}, {PrvPRJobState, new VIDItem() {Name = PrvPRJobState, Index = (int) DataName.PrvPRJobState,DataType = "Int",Description = "The last process job state\r\n (Values same as DVVAL: 3202)"}}, {PRMtlNameList, new VIDItem() {Name = PRMtlNameList, Index = (int) DataName.PRMtlNameList,DataType = "List",Description = ""}}, {RecVariableList, new VIDItem() {Name = RecVariableList, Index = (int) DataName.RecVariableList,DataType = "List",Description = ""}}, {CJID, new VIDItem() {Name = CJID, Index = (int) DataName.CJID,DataType = "String",Description = "Control Job ID"}}, {CJState, new VIDItem() {Name = CJState, Index = (int) DataName.CJState,DataType = "Int",Description = "Indicates the current state of a Control Job.\r\n0=QUEUED\r\n1=SELECTED\r\n2=WAITINGFORSTART\r\n3=EXECUTING\r\n4=PAUSED (*1)\r\n5=COMPLETED\r\n255=(no state)"}}, {PrvCJState, new VIDItem() {Name = PrvCJState, Index = (int) DataName.PrvCJState,DataType = "Int",Description = "The last control job state\r\n(Values same as DVVAL: 3302)"}}, {SubstDestination, new VIDItem() {Name = SubstDestination, Index = (int) DataName.SubstDestination,DataType = "String",Description = "Destination Carrier Substrate Location for the substrate associated with the last event."}}, {SubstHistory, new VIDItem() {Name = SubstHistory, Index = (int) DataName.SubstHistory,DataType = "List",Description = "List of history of locations visited for the substrate associated with the last event.\r\nL, n\r\nL, 3\r\n \r\n\r\n"}}, {SubstID, new VIDItem() {Name = SubstID, Index = (int) DataName.SubstID,DataType = "String",Description = "Identifier of substrate associated with last event."}}, {SubstLocID, new VIDItem() {Name = SubstLocID, Index = (int) DataName.SubstLocID,DataType = "String",Description = "Identifier for equipment substrate location associated with the last event."}}, {SubstLocState, new VIDItem() {Name = SubstLocState, Index = (int) DataName.SubstLocState,DataType = "Int",Description = "State of substrate location associated with the last event.\r\n0=UNOCCUPIED\r\n1=OCCUPIED"}}, { SubstProcState, new VIDItem() {Name = SubstProcState, Index = (int) DataName.SubstProcState,DataType = "Int",Description = "Processing state of the substrate associated with the last event.\r\n0=NEEDS PROCESSING\r\n1=IN PROCESS\r\n2=PROCESSED\r\n3=ABORTED\r\n4=STOPPED\r\n5=REJECT\r\n6=LOST\r\n7=SKIPPED\r\n255=(no state)"}}, {PrvSubstProcState, new VIDItem() {Name = PrvSubstProcState, Index = (int) DataName.PrvSubstProcState,DataType = "Int",Description = "The last board process state\r\n(Values same as DVVAL: 3407)"}}, #region 自定义DVID {ChemicalUnitDataSummary, new VIDItem() {Name = ChemicalUnitDataSummary, Index = (int) DataName.ChemicalUnitDataSummary,DataType = "List",Description = "Chemical Unit Data Summary"}}, {TotalStepTimePV, new VIDItem() {Name = TotalStepTimePV, Index = (int) DataName.TotalStepTimePV,DataType = "Int",Description = "Total Step Time PV"}}, {SingleStepTimeList, new VIDItem() {Name = SingleStepTimeList, Index = (int) DataName.SingleStepTimeList,DataType = "List",Description = "Single Step Time List"}}, {SmartTag, new VIDItem() {Name = SmartTag, Index = (int) DataName.SmartTag,DataType = "String",Description = "TagData"}}, #endregion }; } }