SchedulerPM.cs 17 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. using MECF.Framework.Common.DataCenter;
  25. using System.IO;
  26. using MECF.Framework.Common.Jobs;
  27. namespace Venus_RT.Scheduler
  28. {
  29. public class SchedulerPM : SchedulerModule
  30. {
  31. public override bool IsAvailable
  32. {
  33. get { return _entity.IsIdle && _entity.IsInclude && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  34. }
  35. public override bool IsOnline
  36. {
  37. get { return _entity != null && _entity.IsOnline; }
  38. }
  39. public override bool IsError
  40. {
  41. get { return _entity.IsError; }
  42. }
  43. public override bool IsIdle
  44. {
  45. get { return _entity.IsIdle; }
  46. }
  47. public override bool IsVac
  48. {
  49. get { return _entity.IsVac; }
  50. }
  51. public override bool IsAtm
  52. {
  53. get { return _entity.IsAtm; }
  54. }
  55. public override int TimeToReady
  56. {
  57. get
  58. {
  59. if (RouteManager.IsATMMode)
  60. {
  61. return 0;
  62. }
  63. return (IsOnline && IsInclude)? _entity.TimeToReady : int.MaxValue / 2;
  64. }
  65. }
  66. public override bool IsInclude { get { return _entity.IsInclude; } }
  67. public TaskType Task => _task;
  68. private PMEntity _entity = null;
  69. private ModuleName _taskRobot;
  70. private EnumTransferType _taskTransferType;
  71. private Hand _taskBlade;
  72. private int _taskSlot;
  73. private int _entityTaskToken = (int)FSM_MSG.NONE;
  74. private DeviceTimer _timerProcess = new DeviceTimer();
  75. private JetPMBase _pm;
  76. private int _idleCleanOpt = 0;
  77. private int _idleCleanHourSetPoint;
  78. private int _idleCleanWaferSetPoint;
  79. private int _idleCleanWaferCount;
  80. private string _idleCleanRecipe;
  81. private DateTime _lastRunTime = new DateTime();
  82. private float _paramTemp;
  83. public float Temperature
  84. {
  85. get
  86. {
  87. return _entity.ChamberTemperature;
  88. }
  89. }
  90. public JetChamber ChamberType
  91. {
  92. get
  93. {
  94. return _entity.ChamberType;
  95. }
  96. }
  97. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  98. {
  99. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  100. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  101. EventWaferArrived += WaferArrived;
  102. LoadIdleCleanOpt();
  103. }
  104. public void InitClean()
  105. {
  106. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  107. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  108. }
  109. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  110. {
  111. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  112. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  113. }
  114. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  115. {
  116. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  117. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  118. }
  119. public bool IsTemperatureReady(float temp)
  120. {
  121. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  122. }
  123. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  124. {
  125. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  126. _taskTransferType == type;
  127. }
  128. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  129. {
  130. _task = TaskType.PrepareTransfer;
  131. _taskRobot = robot;
  132. _taskSlot = slot;
  133. _taskTransferType = type;
  134. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  135. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  136. return _entityTaskToken != (int)FSM_MSG.NONE;
  137. }
  138. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  139. {
  140. _task = TaskType.PrepareTransfer;
  141. _taskRobot = robot;
  142. _taskSlot = slot;
  143. _taskBlade = blade;
  144. _taskTransferType = type;
  145. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  146. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  147. return _entityTaskToken != (int)FSM_MSG.NONE;
  148. }
  149. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  150. {
  151. _task = TaskType.PrepareTransfer;
  152. _taskRobot = robot;
  153. _taskSlot = slot;
  154. _taskBlade = blade;
  155. _taskTransferType = type;
  156. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  157. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  158. return _entityTaskToken != (int)FSM_MSG.NONE;
  159. }
  160. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  161. {
  162. StopWaitTransfer(robot);
  163. _task = TaskType.PostTransfer;
  164. _taskRobot = robot;
  165. _taskSlot = slot;
  166. _taskTransferType = type;
  167. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  168. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  169. return _entityTaskToken != (int)FSM_MSG.NONE;
  170. }
  171. public override bool PostTransfer(ModuleName robot)
  172. {
  173. StopWaitTransfer(robot);
  174. _task = TaskType.PostTransfer;
  175. _taskRobot = robot;
  176. _taskSlot = _inTransferSlot;
  177. _taskTransferType = _inTransferType;
  178. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  179. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  180. return _entityTaskToken != (int)FSM_MSG.NONE;
  181. }
  182. public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
  183. {
  184. bool withWafer;
  185. if (recipeType == RecipeType.Clean)
  186. {
  187. withWafer = false;
  188. }
  189. else
  190. {
  191. withWafer = true;
  192. }
  193. _task = TaskType.Process;
  194. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  195. if (RouteManager.IsATMMode)
  196. {
  197. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  198. _timerProcess.Start(time * 1000);
  199. LOG.Write(eEvent.EV_SCHEDULER, Module, $"System run in ATM mode, process skipped, delay {time} seconds");
  200. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  201. return true;
  202. }
  203. else
  204. {
  205. if(isCleanRecipe)
  206. {
  207. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  208. }
  209. else
  210. {
  211. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
  212. }
  213. return _entityTaskToken != (int)FSM_MSG.NONE;
  214. }
  215. }
  216. public override bool Preheating(float temperature)
  217. {
  218. _task = TaskType.Heating;
  219. _paramTemp = temperature;
  220. _entityTaskToken = _entity.InvokePreHeat(temperature);
  221. LogTaskStart(_task, $"preheat to {temperature}");
  222. return _entityTaskToken != (int)FSM_MSG.NONE;
  223. }
  224. public bool CheckTaskDone()
  225. {
  226. bool ret = false;
  227. switch (_task)
  228. {
  229. case TaskType.None:
  230. ret = true;
  231. break;
  232. case TaskType.PrepareTransfer:
  233. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  234. break;
  235. case TaskType.PostTransfer:
  236. ret = _entity.CheckAcked(_entityTaskToken);
  237. break;
  238. case TaskType.Heating:
  239. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  240. break;
  241. case TaskType.Process:
  242. case TaskType.IdlePurgeProcess:
  243. case TaskType.IdleCleanProcess:
  244. case TaskType.PreJobProcess:
  245. case TaskType.CompleteJobProcess:
  246. if (RouteManager.IsATMMode)
  247. {
  248. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  249. if (ret)
  250. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  251. }
  252. else
  253. {
  254. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  255. }
  256. break;
  257. }
  258. if (ret && _task != TaskType.None)
  259. {
  260. LogTaskDone(_task, "");
  261. _task = TaskType.None;
  262. }
  263. return ret;
  264. }
  265. public bool Monitor()
  266. {
  267. return true;
  268. }
  269. public void SetPMAuto()
  270. {
  271. _entity.SetAuto();
  272. }
  273. public bool IdlePurgeProcess(string recipeName)
  274. {
  275. _task = TaskType.IdlePurgeProcess;
  276. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  277. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  278. return _entityTaskToken != (int)FSM_MSG.NONE;
  279. }
  280. public bool IdleCleanProcess(string recipeName)
  281. {
  282. _task = TaskType.IdleCleanProcess;
  283. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  284. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  285. return _entityTaskToken != (int)FSM_MSG.NONE;
  286. }
  287. public void PreJobClean()
  288. {
  289. }
  290. public bool PreJobProcess(string recipeName)
  291. {
  292. _task = TaskType.PreJobProcess;
  293. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  294. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  295. return _entityTaskToken != (int)FSM_MSG.NONE;
  296. }
  297. public bool CompleteJobProcess(string recipeName)
  298. {
  299. _task = TaskType.CompleteJobProcess;
  300. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  301. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  302. return _entityTaskToken != (int)FSM_MSG.NONE;
  303. }
  304. private void WaferArrived(object sender, EventArgs e)
  305. {
  306. if(WaferManager.Instance.CheckHasWafer(Module, 0))
  307. {
  308. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  309. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  310. if (recipeName.Length > 0)
  311. {
  312. Process(recipeName, false, RecipeType.Process, wafer);
  313. }
  314. else
  315. {
  316. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as get recipe failed.");
  317. }
  318. }
  319. else
  320. {
  321. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as PM is empty");
  322. }
  323. }
  324. public override void ResetTask()
  325. {
  326. _entity.ResetRecipeTime();
  327. base.ResetTask();
  328. }
  329. #region clean task
  330. private void LoadIdleCleanOpt()
  331. {
  332. // Load Idle Clean Config
  333. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  334. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  335. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  336. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  337. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  338. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  339. if (lastRun.Length > 10)
  340. {
  341. try
  342. {
  343. _lastRunTime = DateTime.Parse(lastRun);
  344. }
  345. catch
  346. {
  347. lastRun = string.Empty;
  348. }
  349. }
  350. if (lastRun.Length <= 10)
  351. {
  352. _lastRunTime = DateTime.Now;
  353. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  354. }
  355. // validate the idle clean recipe name
  356. string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
  357. if (File.Exists(path))
  358. {
  359. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  360. Recipe recipe = Recipe.Load(recipeContent);
  361. if (recipe == null)
  362. {
  363. _idleCleanRecipe = string.Empty;
  364. }
  365. }
  366. }
  367. public void WaferProcessDone()
  368. {
  369. _lastRunTime = DateTime.Now;
  370. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  371. _idleCleanWaferCount++;
  372. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  373. }
  374. private void ResetIdleCleanCounter()
  375. {
  376. _lastRunTime = DateTime.Now;
  377. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  378. _idleCleanWaferCount = 0;
  379. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  380. }
  381. public bool RunIdleCleanTask()
  382. {
  383. if(_idleCleanOpt == 1)
  384. {
  385. TimeSpan span = DateTime.Now - _lastRunTime;
  386. if(span.TotalHours >= _idleCleanHourSetPoint)
  387. {
  388. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  389. ResetIdleCleanCounter();
  390. return true;
  391. }
  392. }
  393. else if(_idleCleanOpt == 2)
  394. {
  395. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  396. {
  397. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  398. ResetIdleCleanCounter();
  399. return true;
  400. }
  401. }
  402. return false;
  403. }
  404. public bool RunJobCleanTask(string jobCleanRecipe)
  405. {
  406. // validate the job clean recipe name
  407. //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  408. string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
  409. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  410. if (recipeContent.Length == 0)
  411. {
  412. return false;
  413. }
  414. Recipe recipe = Recipe.Load(recipeContent);
  415. if (recipe == null)
  416. {
  417. LOG.Write(eEvent.WARN_ROUTER, Module, $"Loading clean recipe: {path} failed");
  418. return false;
  419. }
  420. return Process(jobCleanRecipe, true, RecipeType.Clean, null);
  421. }
  422. #endregion
  423. }
  424. }