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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using Venus_Core;
- namespace Venus_RT.Modules.PMs
- {
- class StartTurboPumpRoutine : PMRoutineBase, IRoutine
- {
- private enum TurboPumpStep
- {
- kStart,
- kEnd,
- }
- private readonly int FORELINE_PRESSURE_THRESHOLD = 500;
- private readonly int START_TURBO_PUMP_TIMEOUT = 30000;
- public StartTurboPumpRoutine(JetPMBase chamber) : base(chamber)
- {
- Name = "Start TurboPump";
- }
- public RState Start(params object[] objs)
- {
- if (_chamber.IsTurboPumpRunning)
- {
- Stop("Turbo Pump 已经运行");
- return RState.Failed;
- }
- if(!_chamber.IsPumpRunning)
- {
- Stop("干泵没有启动, 请先启动干泵");
- return RState.Failed;
- }
- if(_chamber.ForelinePressure >= FORELINE_PRESSURE_THRESHOLD)
- {
- Stop($"Foreline:{_chamber.ForelinePressure} 压力太高, 不能启动 Turbo Pump");
- return RState.Failed;
- }
- Reset();
- _chamber.OpenValve(ValveType.FastPump, false);
- if (_chamber.ChamberType != JetChamber.VenusDE)
- {
- _chamber.OpenValve(ValveType.SoftPump, false);
- }
- _chamber.TurnTurboPump(true);
- return Runner.Start(Module, Name);
- }
- public RState Monitor()
- {
- Runner.Wait(TurboPumpStep.kStart, () => { return _chamber.IsTurboPumpRunning; }, START_TURBO_PUMP_TIMEOUT)
- .End(TurboPumpStep.kEnd, NullFun, _delay_50ms);
- return Runner.Status;
- }
- public void Abort()
- {
- _chamber.CloseValves();
- _chamber.TurnTurboPump(false);
- }
- }
- }
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