Kepler-Release/Venus/Venus_RT/Config/TM/DeviceModelVenus_MF.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="TM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
	<IoValves>
		<IoValve id="TMValveN2" display="N2 Valve" schematicId="N2" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />

		<IoValve id="TMSoftPumpValve" display="Soft Pump Valve" schematicId="SoftPump" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />
		<IoValve id="TMFastPumpValve" display="Fast Pump Valve" schematicId="FastPump" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />

		<IoValve id="TMPurgeValve" display="Purge Valve" schematicId="Purge" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_TM" diCloseSensor="" diOpenSensor="" />
		<IoValve id="TMVentValve" display="Vent Valve" schematicId="Vent" unit="" isNc="true"
			  isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_TM" diCloseSensor="" diOpenSensor="" />

		<IoValve id="LLASoftPumpValve" display="LLA Soft Pump Valve" schematicId="SoftPumpLLA" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />
		<IoValve id="LLAFastPumpValve" display="LLA Fast Pump Valve" schematicId="FastPumpLLA" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />

		<IoValve id="LLAPurgeValve" display="LLA Purge Valve" schematicId="PurgeLLA" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLA" diCloseSensor="" diOpenSensor="" />
		<IoValve id="LLAVentValve" display="LLA Vent Valve" schematicId="VentLLA" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLA" diCloseSensor="" diOpenSensor="" />


		<IoValve id="LLBSoftPumpValve" display="LLB Soft Pump Valve" schematicId="SoftPumpLLB" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />
		<IoValve id="LLBFastPumpValve" display="LLB Fast Pump Valve" schematicId="FastPumpLLB" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />

		<IoValve id="LLBPurgeValve" display="LLB Purge Valve" schematicId="PurgeLLB" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLB" diCloseSensor="" diOpenSensor="" />
		<IoValve id="LLBVentValve" display="LLB Vent Valve" schematicId="VentLLB" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLB" diCloseSensor="" diOpenSensor="" />

		<IoValve id="ValveWaterRelay" display="Water Relay Valve" schematicId="WaterRelay" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Water_Valve_Relay" diCloseSensor="" diOpenSensor="" />

		<IoValve id="TMVacAtmMode" display="TM Vacuum/Atm Mode" schematicId="TMVacAtmMode" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_TM_VAC_ATM_MODE" diCloseSensor="" diOpenSensor="" />

		<IoValve id="TMVentExhaustValve" display="TM Vent Exhaust Valve" schematicId="TMVentExhaustValve" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Exhaust_Valve_TM" diCloseSensor="" diOpenSensor="" />

		<IoValve id="LLAVentExhaustValve" display="LLA Vent Exhaust Valve" schematicId="LLAVentExhaustValve" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Exhaust_Valve_LLA" diCloseSensor="" diOpenSensor="" />

		<IoValve id="LLBVentExhaustValve" display="LLB Vent Exhaust Valve" schematicId="LLBVentExhaustValve" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Exhaust_Valve_LLB" diCloseSensor="" diOpenSensor="" />

	</IoValves>

	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
		<IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
				aiFlow="AI_TM_MFC1_Flow" aoFlow="AO_TM_MFC1_Flow_Setpoint" diOffline="" aoRange="AO_TM_MFC_Range_Setpoint"
				diPressureAlarm="DI_N2_Pressure_Switch"/>
		<IoMfc id="LLA_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
				aiFlow="AI_LLA_MFC1_Flow" aoFlow="AO_LLA_MFC1_Flow_Setpoint" diOffline="" aoRange="AO_LLA_MFC_Range_Setpoint"
				diPressureAlarm="DI_N2_Pressure_Switch"/>
		<IoMfc id="LLB_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
				aiFlow="AI_LLB_MFC1_Flow" aoFlow="AO_LLB_MFC1_Flow_Setpoint" diOffline="" aoRange="AO_LLB_MFC_Range_Setpoint"
				diPressureAlarm="DI_N2_Pressure_Switch"/>
	</IoMfcs>

	<IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
		<IoGasStick id="GasStickMFC1" display="" mfc ="TM_MFC1" downvalve="TMValveN2" />
	</IoGasSticks>

	<IoSensors>
		<IoSensor id="TMPowerOn" display="TM Power On"  schematicId="" unit="" di="DI_TM_Power_On" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="TM Power Off" />
		<IoSensor id="TMInSafty" display="TM In Safty"  schematicId="" unit="" di="DI_TM_In_Safety" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="TM Safty Alarm" />
		<IoSensor id="WaferLeakSensor" display="Water Leak Sensor"  schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="TM Wafer Leak" />
		<IoSensor id="EFEMSideDoorClosed" display="EFEM Side Door Closed"  schematicId="" unit="" di="DI_EFEM_Side_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="EFEM Side Door Not Closed" />
		<IoSensor id="TMPCWFlowSwitch" display="TM PCW Flow Switch"  schematicId="" unit="" di="DI_TM_CHB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="TM PCW Flow Switch abnormal" alarmText="" />
		<IoSensor id="LLAPCWFlowSwitch" display="LLA PCW Flow Switch"  schematicId="" unit="" di="DI_LLA_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="LLA PCW Flow Switch abnormal" alarmText="" />
		<IoSensor id="LLBPCWFlowSwitch" display="LLB PCW Flow Switch"  schematicId="" unit="" di="DI_LLB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="LLB PCW Flow Switch abnormal" alarmText="" />
		<IoSensor id="TMLidClosed" display="TM Lid Closed"  schematicId="" unit="" di="DI_TM_CHB_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="TM Lid Not Closed" />
		<IoSensor id="CDAPressureSwitch" display="CDA pressure Switch"  schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="TM CDA pressure abnormal" />
		<!--<IoSensor id="VaccumPressureSwitch" display="Vaccum Pressure Switch"  schematicId="" unit="" di="DI_Vaccum_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
			   infoText="" warningText="" alarmText="Vaccum Pressure Switch abnormal" />-->
		<IoSensor id="N2PressureSwitch" display="N2 Pressure Switch"  schematicId="" unit="" di="DI_N2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Switch abnormal" />

		<IoSensor id="TMRobotNotExtendPMA" display="TM Robot Not Extend To PMA"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="TMRobotNotExtendPMB" display="TM Robot Not Extend To PMB"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="TMRobotNotExtendPMC" display="TM Robot Not Extend To PMC"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMC" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="TMRobotNotExtendPMD" display="TM Robot Not Extend To PMD"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMD" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="TMRobotNotExtendLLA" display="TM Robot Not Extend To LLA"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_LLA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="TMRobotNotExtendLLB" display="TM Robot Not Extend To LLB"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_LLB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="EfemRobotNotExtendLLA" display="EFEM Robot Not Extend To LLA"  schematicId="" unit="" di="DI_EFEM_RB_Not_Extend_LLA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="EfemRobotNotExtendLLB" display="EFEM Robot Not Extend To LLB"  schematicId="" unit="" di="DI_EFEM_RB_Not_Extend_LLB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />

		<IoSensor id="TMVacSwitch" display="TM Vaccum Switch"  schematicId="" unit="" di="DI_TM_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="LLAVacSwitch" display="LLA Vaccum Switch"  schematicId="" unit="" di="DI_LLA_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="LLBVacSwitch" display="LLB Vaccum Switch"  schematicId="" unit="" di="DI_LLB_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="TMATMSwitch" display="TM ATM Switch"  schematicId="" unit="" di="DI_TM_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="LLAATMSwitch" display="LLA ATM Switch"  schematicId="" unit="" di="DI_LLA_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
		<IoSensor id="LLBATMSwitch" display="LLB ATM Switch"  schematicId="" unit="" di="DI_LLB_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />

	</IoSensors>

	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
		<IoPressureMeter id="TMProcessGauge" display="TM Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_TM_CHB_Pressure" diGaugeFail="DI_TM_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="TMForelineGauge" display="TM Foreline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_TM_Foreline_Pressure" diGaugeFail="TMForelineGaugeAlarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="LLAPressureGauge" display="LLA Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_LLA_CHB_Pressure" diGaugeFail="DI_LLA_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="LLBPressureGauge" display="LLB Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_LLB_CHB_Pressure" diGaugeFail="DI_LLB_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="LLAForelineGauge" display="Loadlock A Foreline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_LLA_Foreline_Pressure" diGaugeFail="DI_LLA_Foreline_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="LLBForelineGauge" display="Loadlock B Foreline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_LLB_Foreline_Pressure" diGaugeFail="DI_LLB_Foreline_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
	</IoPressureMeters>

	<IoTMPressureCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IoTMPressureCtrl">
		<IoTMPressureCtrl id="TMPressureCtrl" display="MFPressureControl" schematicId="MFPressureControl" unit="mTorr"
						   aoMFPressure="AO_TM_CHB_Pressure"
						   aoLLAPressure="AO_LLA_CHB_Pressure"
						   aoLLBPressure="AO_LLB_CHB_Pressure"
						  
						   MFPressureMeter ="TMProcessGauge" LLAPressureMeter="LLAPressureGauge" LLBPressureMeter="LLBPressureGauge" MFForelineMeter="TMForelineGauge" LLAForelineMeter="LLAForelineGauge" LLBForelineMeter="LLBForelineGauge"/>
	</IoTMPressureCtrls>

	<IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
		<IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
	</IoHeartbeats>

	<IoPlcDateTimes>
		<IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
					  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
	</IoPlcDateTimes>

	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">

		<IoCylinder id="LLAESlitDoor" display="LLA EFEM Side Door" schematicId="" unit="" doMotorRelay=""
					doON="DO_LLA_Slit_Door_E_Open" doOFF="DO_LLA_Slit_Door_E_Close" diON="DI_LLA_E_Slit_Door_open_Position" diOFF="DI_LLA_E_Slit_Door_close_Position" />
		<IoCylinder id="LLBESlitDoor" display="LLB EFEM Side Door" schematicId="" unit="" doMotorRelay=""
					doON="DO_LLB_Slit_Door_E_Open" doOFF="DO_LLB_Slit_Door_E_Close" diON="DI_LLB_E_Slit_Door_open_Position" diOFF="DI_LLB_E_Slit_Door_close_Position" />
		<IoCylinder id="LLATSlitDoor" display="LLA TM Side Door" schematicId="" unit="" doMotorRelay=""
					doON="DO_LLA_Slit_Door_T_Open" doOFF="DO_LLA_Slit_Door_T_Close" diON="DI_LLA_T_Slit_Door_open_Position" diOFF="DI_LLA_T_Slit_Door_close_Position" />
		<IoCylinder id="LLBTSlitDoor" display="LLB TM Side Door" schematicId="" unit="" doMotorRelay=""
					doON="DO_LLB_Slit_Door_T_Open" doOFF="DO_LLB_Slit_Door_T_Close" diON="DI_LLB_T_Slit_Door_open_Position" diOFF="DI_LLB_T_Slit_Door_close_Position" />

		<IoCylinder id="PMASlitDoor" display="PMA Slit door" schematicId="" unit="" doMotorRelay=""
						doON="DO_PMA_SlitDoor_Open" doOFF="DO_PMA_SlitDoor_Close" diON="DI_PMA_SlitDoor_Open_Position" diOFF="DI_PMA_SlitDoor_Close_Position" />
		<IoCylinder id="PMBSlitDoor" display="PMB Slit door" schematicId="" unit="" doMotorRelay=""
					doON="DO_PMB_SlitDoor_Open" doOFF="DO_PMB_SlitDoor_Close" diON="DI_PMB_SlitDoor_Open_Position" diOFF="DI_PMB_SlitDoor_Close_Position" />
		<IoCylinder id="PMCSlitDoor" display="PMC Slit door" schematicId="" unit="" doMotorRelay=""
						doON="DO_PMC_SlitDoor_Open" doOFF="DO_PMC_SlitDoor_Close" diON="DI_PMC_SlitDoor_Open_Position" diOFF="DI_PMC_SlitDoor_Close_Position" />
		<IoCylinder id="PMDSlitDoor" display="PMD Slit door" schematicId="" unit="" doMotorRelay=""
						doON="DO_PMD_SlitDoor_Open" doOFF="DO_PMD_SlitDoor_Close" diON="DI_PMD_SlitDoor_Open_Position" diOFF="DI_PMD_SlitDoor_Close_Position" />
	</IoCylinders>

	<IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
		<IoLid id="TMLid" display="TM Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_TM_CHB_Door_Closed" />
		<IoLid id="LLALid" display="LoadLock A Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLA_Lid_Door_Closed" />
		<IoLid id="LLBLid" display="LoadLock B Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLB_Lid_Door_Closed" />
		<IoLid id="PMALid" display="PMA Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMA_Lid_Closed" />
		<IoLid id="PMBLid" display="PMB Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMB_Lid_Closed" />
		<IoLid id="PMCLid" display="PMC Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMC_Lid_Closed" />
		<IoLid id="PMDLid" display="PMD Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_PMD_Lid_Closed" />
	</IoLids>

	<IoSwitchs assembly="Venus_RT" classType="Venus_RT.Devices.IoSwitch">
		<!--<IoSwitch id="LLAWaferSizeCheckSwitch" display="LLA Wafer Size Check" schematicId="" unit="" doMotorRelay=""
                do="DO_LLA_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
		<IoSwitch id="LLBWaferSizeCheckSwitch" display="LLB Wafer Size Check" schematicId="" unit="" doMotorRelay=""
                do="DO_LLB_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
		<IoSwitch id="PMAWaferSizeCheckSwitch" display="PMA Wafer Size Check" schematicId="" unit="" doMotorRelay=""
                do="DO_PMA_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
		<IoSwitch id="PMBWaferSizeCheckSwitch" display="PMB Wafer Size Check" schematicId="" unit="" doMotorRelay=""
                do="DO_PMB_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
		<IoSwitch id="PMCWaferSizeCheckSwitch" display="PMC Wafer Size Check" schematicId="" unit="" doMotorRelay=""
                do="DO_PMC_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
		<IoSwitch id="PMDWaferSizeCheckSwitch" display="PMD Wafer Size Check" schematicId="" unit="" doMotorRelay=""
                do="DO_PMD_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />-->
		<IoSwitch id="TMPressureModeSwitch" display="Pressure Mode Switch" schematicId="" unit="" doMotorRelay=""
                do="DO_TM_MFC_FLOW_MODE_PRESSURE_MODE"  di="" />
		<IoSwitch id="LLAPressureModeSwitch" display="Pressure Mode Switch" schematicId="" unit="" doMotorRelay=""
                do="DO_LLA_MFC_FLOW_MODE_PRESSURE_MODE"  di="" />
		<IoSwitch id="LLBPressureModeSwitch" display="Pressure Mode Switch" schematicId="" unit="" doMotorRelay=""
                do="DO_LLB_MFC_FLOW_MODE_PRESSURE_MODE"  di="" />
	</IoSwitchs>

</DeviceModelDefine>