Kepler-Release/Venus/Venus_RT/Config/PM/Kepler2200B/Kepler2200BDeviceModel.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Kepler2200B" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
	<IoValves>
		<IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />

		<IoValve id="ValveN2" display="N2 valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
				diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
				diCloseSensor="" diOpenSensor="" />

		<IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
			  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
			  diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
				diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveGuage" display="Guage valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Guage_Valve"
				diCloseSensor="" diOpenSensor="" />


		<IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
				isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePurge" display="Purge valve" schematicId="" unit="" isNc="true"
				   isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveO2" display="O2 valve" schematicId=""
				unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_O2_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveN2Purge1" display="N2 Purge1 valve" schematicId=""
				 unit="" isNc="true" isDefaultOpen="false" diOpen="DI_Heater_Purge_Valve" doOpen="DO_N2_Purge1_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValveN2Purge2" display="N2 Purge2 valve" schematicId=""
				   unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Purge2_Valve" diCloseSensor="" diOpenSensor="" />
		<IoValve id="ValvePenningGauge" display="Penning Guage valve" schematicId=""
			   unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PENNING_GAUGE_VALVE" doOpen="DO_Penning_Gauge_Valve" diCloseSensor="" diOpenSensor="" />

	</IoValves>

	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
		<IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
			   aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange="AO_MFC1_Range_Set"
			   diPressureAlarm="DI_MFC1_Pressure_Switch"/>
		<IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
			   aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange="AO_MFC2_Range_Set"
			   diPressureAlarm="DI_MFC2_Pressure_Switch"/>
		<IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
			   aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange="AO_MFC3_Range_Set"
			   diPressureAlarm="DI_MFC3_Pressure_Switch"/>
		<IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
			  aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange="AO_MFC4_Range_Set"
			  diPressureAlarm="DI_MFC4_Pressure_Switch"/>
		<IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
			   aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange="AO_MFC5_Range_Set"
			   diPressureAlarm="DI_MFC5_Pressure_Switch"/>
		<IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
			aiFlow="AI_MFC6_Flow" aoFlow="AO_MFC6_Flow_Setpoint" diOffline="" aoRange="AO_MFC6_Range_Set"
			diPressureAlarm="DI_MFC6_Pressure_Switch"/>
		<IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
			aiFlow="AI_MFC7_Flow" aoFlow="AO_MFC7_Flow_Setpoint" diOffline="" aoRange="AO_MFC7_Range_Set"
			diPressureAlarm="DI_MFC7_Pressure_Switch"/>
		<IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
			aiFlow="AI_MFC8_Flow" aoFlow="AO_MFC8_Flow_Setpoint" diOffline="" aoRange="AO_MFC8_Range_Set"
			diPressureAlarm="DI_MFC8_Pressure_Switch"/>
		<IoMfc id="MfcN2" display="N2" schematicId="N2" unit="sccm"
			aiFlow="AI_Turbo_Pump_N2_Flow" aoFlow="AO_Turbo_Pump_N2_Flow_Setpoint" diOffline="" aoRange="AO_N2_Range_Set"
			diPressureAlarm="DI_PN2_Pressure_Switch"/>
	</IoMfcs>

	<IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
		<IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" upvalve="ValvePV11"/>
		<IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" upvalve="ValvePV21"/>
		<IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" upvalve="ValvePV31"/>
		<IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" upvalve="ValvePV41"/>
		<IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
		<IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
		<IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
		<IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" upvalve="ValveO2"/>
		<IoGasStick id="GasStickN2" display="" mfc ="MfcN2" downvalve="ValveTurboPumpPurge" />
	</IoGasSticks>


	<IoSensors>
		
		<IoSensor id="SensorATMSwitch" display="ATM Switch"  schematicId="" unit="" di="DI_ATM_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
		<!--<IoSensor id="SensorPMLidClosed" display="PM Lid Closed"  schematicId="" unit="" di="DI_Lid_Closed" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />-->

		<IoSensor id="SensorVacSwitch" display="VAC Switch"  schematicId="" unit="" di="DI_VAC_Switch" isLowAsNormal="" textOutTrigValue="true"
				  infoText="" warningText="" alarmText="" />
		<IoSensor id="SensorWaterLeakOk" display="Water Leak Ok"  schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="Sensor Water Leak" alarmText="" />
		<IoSensor id="TMPWaterFlowOk" display="Water Flow Ok"  schematicId="" unit="" di="DI_TMP-SRF_Water_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
			 infoText="" warningText="" alarmText="" />
		<IoSensor id="ChamberWaterFlowOk" display="Water Flow Ok"  schematicId="" unit="" di="DI_CHB_Water_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="LidWaterFlowOk" display="Water Flow Ok"  schematicId="" unit="" di="DI_Lid_Water_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
			   infoText="" warningText="" alarmText="" />
		<IoSensor id="SensorCDAPressureOk" display="CDA pressure OK"  schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="Sensor CDA Pressure Abnormal" alarmText="" />
		<IoSensor id="N2PressureOk" display="N2 Pressure OK"  schematicId="" unit="" di="DI_PN2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
			   infoText="" warningText="" alarmText="" />
		<IoSensor id="GeneratorInterlock" display="RFG hardware interlock"  schematicId="" unit="" di="DI_Source_RF_Generator_Interlock" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="" />
		<IoSensor id="RFMatchInterlock"  display="Source RF Match"  schematicId="" unit="" di="DI_Source_RF_Match_Interlock" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="" />
		<!--<IoSensor id="SensorSlitDoorClosed" display="Slit Door Closed"  schematicId="" unit="" di="DI_Slit_Door_Close_POS" isLowAsNormal="" textOutTrigValue="false" 
				infoText="" warningText="" alarmText="" />-->
		<IoSensor id="TurboPumpInterlock" display="Turbo Pump Interlock"  schematicId="" unit="" di="DI_Turbo_Pump_Interlock" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="" />
		<IoSensor id="GasBoxDoorSW" display="Gas Box Door SW"  schematicId="" unit="" di="DI_Gas_Box_Door_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="Gas Box Door SW Abnormal" alarmText="" />
		<IoSensor id="GasBoxPressureSW" display="Gas Box Pressure SW"  schematicId="" unit="" di="DI_Gas_Box_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="Gas Box Pressure Abnormal" alarmText="" />
		<IoSensor id="CHBWallOTSWAlarm" display="CHB Wall OT SW Alarm"  schematicId="" unit="" di="DI_CHB_M-HT_OT_Switch_Alarm" isLowAsNormal="" textOutTrigValue="true"
				  infoText="" warningText="" alarmText="CHB Wall OT SW Abnormal" />
		<!--<IoSensor id="SensorSmallWaferInPos" display="Small Wafer in Pos"  schematicId="" unit="" di="DI_Small_Wafer_In_POS" isLowAsNormal="" textOutTrigValue="true"
              infoText="" warningText="" alarmText="" />-->
		<IoSensor id="GasBoxN2FlowSwitch" display="Gas Box N2 Flow Switch"  schematicId="" unit="" di="DI_GasBox_N2_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="GasBox N2 Flow Abnormal" alarmText="" />
		<IoSensor id="N2PurgePressureSwitch" display="N2 Purge Pressure Switch"  schematicId="" unit="" di="DI_N2_Purge_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="N2 Purge Pressure Abnormal" alarmText="" />
		<IoSensor id="PN2PurgePressureSwitch" display="P N2 Purge Pressure Switch"  schematicId="" unit="" di="DI_PN2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="WaferTransferPosi" display="Wafer Transfer Posi"  schematicId="" unit="" di="DI_Wafer_Transfer_Posi_SW" isLowAsNormal="" textOutTrigValue="false"
					infoText="Lift 离开传片位" warningText="" alarmText="" />
		<IoSensor id="TOPShieldCoverClosedAlarm" display="TOP Shield Cover Closed Alarm"  schematicId="" unit="" di="DI_TOP_Shield_Cover_closed" isLowAsNormal="" textOutTrigValue="false"
			  infoText="" warningText="TOP Shield Cover Closed Abnormal" alarmText="" />
		
		<IoSensor id="SCRUBBEROK" display="SCRUBBER OK"  schematicId="" unit="" di="DI_SCRUBBER_OK" isLowAsNormal="" textOutTrigValue="false"
			  infoText="" warningText="" alarmText=""/>
		<IoSensor id="RFBoxInterlock" display="RF Box interlock"  schematicId="" unit="" di="DI_RF_Box_Interlock" isLowAsNormal="" textOutTrigValue="false"
				  infoText="" warningText="" alarmText="" />
		
		<IoSensor id="GasDetector1Alarm1" display="Gas Detector1 Alarm1"  schematicId="" unit="" di="DI_Gas_Detector1_Alarm1" isLowAsNormal="" textOutTrigValue="true"
			infoText="" warningText="" alarmText="Gas Detector1 Alarm1"/>
		<IoSensor id="GasDetector1Alarm2" display="Gas Detector1 Alarm2"  schematicId="" unit="" di="DI_Gas_Detector1_Alarm2" isLowAsNormal="" textOutTrigValue="true"
			  infoText="" warningText="" alarmText="Gas Detector1 Alarm2"/>
		<IoSensor id="GasDetector1Fault" display="Gas Detector1 Fault"  schematicId="" unit="" di="DI_Gas_Detector1_Fault" isLowAsNormal="" textOutTrigValue="true"
			  infoText="" warningText="" alarmText="Gas Detector1 Fault"/>

		<IoSensor id="GasDetector2Alarm1" display="Gas Detector2 Alarm1"  schematicId="" unit="" di="DI_Gas_Detector2_Alarm1" isLowAsNormal="" textOutTrigValue="true"
			 infoText="" warningText="" alarmText="Gas Detector2 Alarm1"/>
		<IoSensor id="GasDetector2Alarm2" display="Gas Detector2 Alarm2"  schematicId="" unit="" di="DI_Gas_Detector2_Alarm2" isLowAsNormal="" textOutTrigValue="true"
			  infoText="" warningText="" alarmText="Gas Detector2 Alarm2"/>
		<IoSensor id="GasDetector2Fault" display="Gas Detector2 Fault"  schematicId="" unit="" di="DI_Gas_Detector2_Fault" isLowAsNormal="" textOutTrigValue="true"
			  infoText="" warningText="" alarmText="Gas Detector2 Fault"/>
	</IoSensors>

	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
		<IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="Pa"
						    aiValue="AI_Process_Pressure_2t" diGaugeFail="" scPrecision="" scOffset=""/>
		<IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="Pa"
						    aiValue="AI_Chamber_Pressure_10t"
						    diGaugeFail=""
						    scPrecision="ChamberPressureGaugePrecision"
						    scOffset=""/>
		<IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="Pa"
						    aiValue="AI_Foreline_Pressure_10t" diGaugeFail="DI_Chamber_Pressure_760t_Gauge_Alarm" scPrecision="" scOffset=""/>
		<IoPressureMeter id="PenningGauge" display="Penning Pressure" schematicId="" unit="Pa"
			   aiValue="AI_Penning_Gauge_Pressure1" diGaugeFail="" scPrecision="" scOffset=""/>

	</IoPressureMeters>

	<IoPumps assembly="Venus_RT" classType="Venus_RT.Devices.IoPump" IsEnabled = "False">
		<IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
				diBreakerState=""
				diRunning="DI_Pump_Running"
				diStart=""
				diStop=""
				diAlarm="DI_Pump_Alarm"
				diWarning="DI_Pump_Warning"
				diPumpTempAlarm=""
				diN2Alarm="DI_Pump_N2_Purge_Alarm"
				diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
				diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"

				doStart="DO_Pump_Start"
				doStop="DO_Pump_Stop"
				doWaterFlowAlarm=""
				doN2PressureAlarm=""

				aiWaterFlow=""
				aiN2Pressure=""
				aoN2PressureAlarmMaxValue=""
				aoN2PressureAlarmMinValue=""
				aoWaterFlowAlarmMaxValue=""
				aoWaterFlowAlarmMinValue=""

				scEnableDryPump="EnableDryPump"
				scEnableWaterFlow="PumpEnableWaterFlow"
				scWaterFlowMinValue="PumpWaterFlowMinValue"
				scWaterFlowMaxValue="PumpWaterFlowMaxValue"
				scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
				scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
				scEnableN2Pressure="PumpEnableN2Pressure"
				scN2PressureMinValue="PumpN2PressureMinValue"
				scN2PressureMaxValue="PumpN2PressureMaxValue"
				scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
				scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
	</IoPumps>

	<IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
		<IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="Pa"
						   diLogicProcessGasFlowing=""
						   scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
						   scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
						   scIsIndependentControl="IsIndependentControl"
						   scIsBoostPumpInstalled="EnableBoosterPump"
						   scTvInstalled="EnableThrottleValve"
						   boost="" tv="ThrottleValve" drypump="MainPump"
						   pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" penningMeter="PenningGauge"/>
	</IoPressureControls>

	<IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
		<IoHeater id="PendulumHeater" display="Pendulum Heater" schematicId="" unit="℃"
				  doPowerOn="DO_P_Valve_Heater_On"
				  diDeviation="DI_P_Valve_TC_Deviation_out_of_range"
				  diPowerOnFeedback="DI_P_Wall_Heater_On_FB"
				  diControlTcBroken="DI_P_Valve_Control_TC_Broken_Alarm"
				  diMonitorTcBroken="DI_P_Valve_Monitor_TC_Broken_Alarm"

				  aoSetPoint="AO_P_Valve_Temperature_Setpoint"
				  aoSetPointLimit="AO_P_Valve_Temp_Limit_Setpoint"

				  aiFeedback="AI_P_Valve_Control_TC_Temp"
				  scSetPointLimit="PendulumHeaterSetPointLimit"
               />

	</IoHeaters>

	<IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
		<IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
	</IoHeartbeats>

	<!--<IoResets>
		<IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
	</IoResets>-->

	<!--<IoSetConfigs>
		<IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
	</IoSetConfigs>-->

	<IoStatisticss>
		<IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
					  diMonitorSignal="DI_Generator_Power_Status"
					  scLastPMTime="RfOnTimeLastPMTime"
					  scTimeFromLastPM="RfOnTimeFromLastPM"
					  scTimeTotal="RfOnTimeTotal"
					  scEnableAlarm="RfOnTimeEnableAlarm"
					  scPMInterval="RfOnTimePMInterval" />

		<IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
					  diMonitorSignal="DI_Pump_Running"
					  scLastPMTime="PumpOnTimeLastPMTime"
					  scTimeFromLastPM="PumpOnTimeFromLastPM"
					  scTimeTotal="PumpOnTimeTotal"
					  scEnableAlarm="PumpOnTimeEnableAlarm"
					  scPMInterval="PumpOnTimePMInterval" />
	</IoStatisticss>

	<IoPlcDateTimes>
		<IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
					  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
	</IoPlcDateTimes>

	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">

		<IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
					doON="" doOFF="" diON="DI_Slit_Door_Open_POS" diOFF="DI_Slit_Door_Close_POS" />


	</IoCylinders>

	<IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
		<IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="DO_Lid_Up" doOFF="DO_Lid_Down" diON="" diOFF="DI_Lid_Closed" />
	</IoLids>

	<!--<IoMessages assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoMessage">
		<IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
	</IoMessages>-->

	<IoPumpCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPumpCtrl">
		<IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
	</IoPumpCtrls>

	<IoHighTemperatureHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHighTemperatureHeater">
		<IoHighTemperatureHeater id="HighTemperatureHeater" display="High Temperature Heater" schematicId="" unit="℃"
			   doPowerOn                 ="DO_CHB_M-HT_Heater_On"
			   diPowerOnFeedback         ="DI_CHB_M-HT_Heater_On_FB"
			   aiTemperatureFeedback     ="AI_CHB_M-HT_Control_TC_Temp"
			   aoTemperatureSetPoint     ="AO_CHB_M-HT_Temperature_Setpoint"
			   diGoPosition1Feedback     ="DI_Lift_Servo_Go_Position1_Complete"
			   doGoPosition1On           ="DO_Lift_Servo_Go_Position1"
			   diGoPosition2Feedback     ="DI_Lift_Servo_Go_Position2_Complete"
			   doGoPosition2On           ="DO_Lift_Servo_Go_Position2"
			   diGoPosition3Feedback     ="DI_Lift_Servo_Go_Position3_Complete"
			   doGoPosition3On           ="DO_Lift_Servo_Go_Position3"
			   diGoPosition4Feedback     ="DI_Lift_Servo_Go_Position4_Complete"
			   doGoPosition4On           ="DO_Lift_Servo_Go_Position4"
			   diGoPosition5Feedback     ="DI_Lift_Servo_Go_Position5_Complete"
			   doGoPosition5On           ="DO_Lift_Servo_Go_Position5"
			   diGoOriginFeedback        ="DI_Lift_Servo_with_origin"
			   doGoOriginOn              ="DO_Lift_Servo_Origin"
			   aoLiftServoPosition1      ="AO_Lift_Servo_Position1"
			   aoLiftServoPosition2      ="AO_Lift_Servo_Position2"
			   aoLiftServoPosition3      ="AO_Lift_Servo_Position3"
			   aoLiftServoPosition4      ="AO_Lift_Servo_Position4"
			   aoLiftServoPosition5      ="AO_Lift_Servo_Position5"
			   aoOriginSearchHighSpeed   ="AO_Origin_Search_High_Speed"
			   aoOriginSearchLowSpeed    ="AO_Origin_Search_Low_Speed"
			   aoAbsMoveSpeed            ="AO_Abs_Move_Speed"
			   aoMaximusMoveSpeed        ="AO_Max_Move_Speed"
			   aoSoftDownLimit           ="AO_Soft_Down_Limit"
			   aoSoftUpLimit             ="AO_Soft_Up_Limit"
			   aoRatio                   ="AO_CHB_H-HT_Power_Distribute_Percent"
			   diDriverAlarm             ="DI_Lift_Servo_Driver_Alarm"
		       diPosiModuleAlarm         ="DI_Lift_Servo_Posi_module_alarm"
	           diORGFailAlarm            ="DI_Lift_Servo_ORG_fail_alarm"
			   doResetLift               ="DO_Reset_Signal"
		       aiHeaterPurgeN2Flow	     ="AI_Heater_Purge_N2_Flow"	
               doResetHeater             ="DO_CHB_M-HT_Heater_Reset"
		       diMhtrErrorHeatStop       ="DI_MHTR_ERROR_HEAT_STOP"
		       doMhtrErrorReset          ="DO_MHTR_ERROR_RESET"
			   diWaferTransferPosiSW     ="DI_Wafer_Transfer_Posi_SW"
			   aiHeaterInnerAlarmWord1   ="AI_CHB_M-HT_Inner_Alarm_Word1"
		       aiHeaterInnerAlarmWord2   ="AI_CHB_M-HT_Inner_Alarm_Word2"
			   aiHeaterOuterAlarmWord1   ="AI_CHB_M-HT_Outer_Alarm_Word1"
		       aiHeaterOuterAlarmWord2   ="AI_CHB_M-HT_Outer_Alarm_Word2"					 
								 
							   />
	</IoHighTemperatureHeaters>

	<IoSwitchs assembly="Venus_RT" classType="Venus_RT.Devices.IoSwitch">
		<IoSwitch id="LeakCheckModeSwitch" display="Leak Check Mode Switch" schematicId="" unit="" doMotorRelay=""
                do="DO_LEAK_DETECTION_MODE"  di="" />
	</IoSwitchs>
</DeviceModelDefine>