VenusDispatcher.cs 91 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. namespace Venus_RT.Modules
  25. {
  26. class VCETask : ModuleTask
  27. {
  28. public VCETask(ModuleName mod) : base(mod)
  29. {
  30. }
  31. }
  32. class VenusPMTask : ModuleTask
  33. {
  34. public enum RecipeJobType
  35. {
  36. PreClean,
  37. Process,
  38. PostClean,
  39. WtwClean,
  40. }
  41. public override int TimeToReady
  42. {
  43. get
  44. {
  45. switch (Status)
  46. {
  47. case ModuleStatus.Idle:
  48. case ModuleStatus.IdleClean:
  49. case ModuleStatus.PreJobClean:
  50. case ModuleStatus.PostJobClean:
  51. case ModuleStatus.WTWClean:
  52. case ModuleStatus.Processing:
  53. {
  54. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  55. }
  56. }
  57. return int.MaxValue / 2;
  58. }
  59. }
  60. private WaferTask _wafer;
  61. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  62. Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  63. KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  64. public VenusPMTask(ModuleName mod) : base(mod)
  65. { }
  66. public override RState Run()
  67. {
  68. if(_runingWaferTask.Value.Count == 0)
  69. {
  70. if(_pendingWaferTasks.Count > 0)
  71. {
  72. _runingWaferTask = _pendingWaferTasks.Dequeue();
  73. }
  74. else
  75. {
  76. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  77. {
  78. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  79. {
  80. if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  81. {
  82. Status = ModuleStatus.StartIdleClean;
  83. }
  84. }
  85. }
  86. }
  87. }
  88. else
  89. {
  90. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  91. {
  92. switch(_runingWaferTask.Value.First().Key)
  93. {
  94. case RecipeJobType.PreClean:
  95. {
  96. if(WaferManager.Instance.CheckNoWafer(Module,0))
  97. {
  98. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  99. {
  100. Status = ModuleStatus.StartPreJobClean;
  101. }
  102. else
  103. {
  104. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  105. TryDequeueRuningTask(Status);
  106. Status = ModuleStatus.Idle;
  107. }
  108. }
  109. }
  110. break;
  111. case RecipeJobType.Process:
  112. {
  113. if (WaferManager.Instance.CheckHasWafer(Module, 0))
  114. {
  115. if(_wafer.waferId == _runingWaferTask.Key)
  116. {
  117. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  118. Status = ModuleStatus.StartProcess;
  119. }
  120. else
  121. {
  122. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  123. }
  124. }
  125. }
  126. break;
  127. case RecipeJobType.PostClean:
  128. {
  129. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  130. {
  131. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  132. {
  133. Status = ModuleStatus.StartPostJobClean;
  134. }
  135. else
  136. {
  137. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  138. TryDequeueRuningTask(Status);
  139. Status = ModuleStatus.Idle;
  140. }
  141. }
  142. }
  143. break;
  144. case RecipeJobType.WtwClean:
  145. {
  146. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  147. {
  148. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  149. {
  150. Status = ModuleStatus.StartWTWClean;
  151. }
  152. else
  153. {
  154. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  155. TryDequeueRuningTask(Status);
  156. Status = ModuleStatus.Idle;
  157. }
  158. }
  159. }
  160. break;
  161. }
  162. }
  163. }
  164. if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  165. {
  166. if (Scheduler.IsIdle)
  167. {
  168. switch (Status)
  169. {
  170. case ModuleStatus.Processing:
  171. {
  172. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  173. if (Scheduler.IsOnline)
  174. {
  175. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  176. {
  177. _wafer.Return();
  178. TryDequeueRuningTask(Status);
  179. Status = ModuleStatus.Idle;
  180. }
  181. }
  182. else // handle offline exception situation
  183. {
  184. TryDequeueRuningTask(Status);
  185. Status = ModuleStatus.Idle;
  186. }
  187. }
  188. break;
  189. case ModuleStatus.PreJobClean:
  190. case ModuleStatus.PostJobClean:
  191. case ModuleStatus.WTWClean:
  192. {
  193. TryDequeueRuningTask(Status);
  194. Status = ModuleStatus.Idle;
  195. }
  196. break;
  197. case ModuleStatus.IdleClean:
  198. {
  199. Status = ModuleStatus.Idle;
  200. }
  201. break;
  202. case ModuleStatus.StartProcess:
  203. {
  204. if (RouteManager.IsATMMode)
  205. {
  206. Status = ModuleStatus.Processing;
  207. }
  208. }
  209. break;
  210. }
  211. }
  212. else
  213. {
  214. switch (Status)
  215. {
  216. case ModuleStatus.StartProcess:
  217. Status = ModuleStatus.Processing;
  218. break;
  219. case ModuleStatus.StartIdleClean:
  220. Status = ModuleStatus.IdleClean;
  221. break;
  222. case ModuleStatus.StartPreJobClean:
  223. Status = ModuleStatus.PreJobClean;
  224. break;
  225. case ModuleStatus.StartPostJobClean:
  226. Status = ModuleStatus.PostJobClean;
  227. break;
  228. case ModuleStatus.StartWTWClean:
  229. Status = ModuleStatus.WTWClean;
  230. break;
  231. }
  232. }
  233. }
  234. return RState.Running;
  235. }
  236. void TryDequeueRuningTask( ModuleStatus status)
  237. {
  238. bool bMatch = false;
  239. if (_runingWaferTask.Value.Count > 0)
  240. {
  241. switch(status)
  242. {
  243. case ModuleStatus.PreJobClean:
  244. if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  245. {
  246. _runingWaferTask.Value.Dequeue();
  247. bMatch = true;
  248. }
  249. break;
  250. case ModuleStatus.Processing:
  251. if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  252. {
  253. _runingWaferTask.Value.Dequeue();
  254. bMatch = true;
  255. }
  256. break;
  257. case ModuleStatus.PostJobClean:
  258. if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  259. {
  260. _runingWaferTask.Value.Dequeue();
  261. bMatch = true;
  262. }
  263. break;
  264. case ModuleStatus.WTWClean:
  265. if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  266. {
  267. _runingWaferTask.Value.Dequeue();
  268. bMatch = true;
  269. }
  270. break;
  271. case ModuleStatus.WaitPreJobClean:
  272. case ModuleStatus.WaitProcess:
  273. case ModuleStatus.WaitPostJobClean:
  274. case ModuleStatus.WaitWTWClean:
  275. case ModuleStatus.Idle:
  276. _runingWaferTask.Value.Dequeue();
  277. break;
  278. }
  279. }
  280. if(!bMatch)
  281. {
  282. string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  283. LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  284. }
  285. if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  286. {
  287. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  288. }
  289. }
  290. public override void WaferArrived(WaferTask wafer, int slot)
  291. {
  292. _wafer = wafer;
  293. }
  294. public override void WaferLeaved(WaferTask wafer, int slot)
  295. {
  296. _wafer = null;
  297. }
  298. public void SubscribeWaferTask(WaferTask waferTask)
  299. {
  300. var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  301. if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  302. {
  303. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  304. }
  305. if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  306. {
  307. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  308. }
  309. if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  310. {
  311. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  312. }
  313. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  314. {
  315. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  316. }
  317. else
  318. {
  319. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  320. }
  321. }
  322. public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  323. {
  324. var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  325. if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  326. {
  327. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  328. }
  329. else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  330. {
  331. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  332. }
  333. else
  334. {
  335. return;
  336. }
  337. if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  338. {
  339. LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  340. }
  341. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  342. {
  343. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  344. }
  345. else
  346. {
  347. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  348. }
  349. }
  350. public bool ReadyMoveIn(WaferTask wafer)
  351. {
  352. return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  353. }
  354. public bool IsAllJobCompleted()
  355. {
  356. return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  357. }
  358. public bool IsRecipeJobDone(RecipeJobType job)
  359. {
  360. return (_runingWaferTask.Key == Guid.Empty || !_runingWaferTask.Value.ToList().Exists(kv => kv.Key == job)) && (_pendingWaferTasks.Count == 0 || !_pendingWaferTasks.ToList().Exists(kv => kv.Value.Count > 0 && kv.Value.ToList().Exists(kvv => kvv.Key == job)));
  361. }
  362. public override void ResetTask()
  363. {
  364. base.ResetTask();
  365. _wafer = null;
  366. _pendingWaferTasks.Clear();
  367. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  368. }
  369. }
  370. class PreAlignTask : ModuleTask
  371. {
  372. private WaferTask _wafer;
  373. public PreAlignTask(ModuleName aligner) : base(aligner)
  374. {
  375. }
  376. public override RState Run()
  377. {
  378. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  379. if (tmRobot == null || !tmRobot.IsAvailable)
  380. return RState.Running;
  381. switch (Status)
  382. {
  383. case ModuleStatus.WaitAlign:
  384. {
  385. tmRobot.Align(0);
  386. Status = ModuleStatus.Aligning;
  387. }
  388. break;
  389. case ModuleStatus.Aligning:
  390. {
  391. _wafer.IsAligned = true;
  392. Status = ModuleStatus.Idle;
  393. }
  394. break;
  395. }
  396. return RState.Running;
  397. }
  398. public override void WaferArrived(WaferTask wafer, int slot)
  399. {
  400. _wafer = wafer;
  401. Status = ModuleStatus.WaitAlign;
  402. }
  403. public override void WaferLeaved(WaferTask wafer, int slot)
  404. {
  405. _wafer = null;
  406. }
  407. }
  408. class VenusTMRobotTask : ModuleTask
  409. {
  410. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  411. public override RState Run()
  412. {
  413. return base.Run();
  414. }
  415. }
  416. class VenusDispatcher : ICycle
  417. {
  418. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  419. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  420. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  421. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  422. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  423. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  424. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  425. private List<MoveItem> _curTmAction = new List<MoveItem>();
  426. private bool _isCycleMode;
  427. private int _cycleSetPoint = 0;
  428. private int _cycledCount = 0;
  429. private int _cycledWafer = 0;
  430. private float _throughput = 0.0f;
  431. private int _tmRobotSingleArmOption = 0;
  432. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 },{ ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  433. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  434. private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  435. private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  436. private Stopwatch _cycleWatch = new Stopwatch();
  437. private SchedulerFACallback _faCallback;
  438. private SchedulerDBCallback _dbCallback;
  439. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  440. public bool HasJobRunning => _lstControlJobs.Count > 0;
  441. private RState _cycleState = RState.Init;
  442. public RState CycleState => _cycleState;
  443. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  444. public List<string> InUseRecipes = new List<string>();
  445. public VenusDispatcher()
  446. {
  447. _faCallback = new SchedulerFACallback();
  448. _dbCallback = new SchedulerDBCallback();
  449. InitModules();
  450. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  451. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  452. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  453. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  454. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  455. foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
  456. {
  457. _loadportControlJobDic[lp.ToString()] = null;
  458. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  459. DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  460. DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  461. DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  462. DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  463. }
  464. }
  465. #region public interface
  466. /// <summary>
  467. /// 获取lp当前的ControlJob
  468. /// </summary>
  469. /// <param name="lp"></param>
  470. /// <returns></returns>
  471. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  472. {
  473. if (ModuleHelper.IsLoadPort(lp))
  474. {
  475. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  476. }
  477. else
  478. {
  479. return null;
  480. }
  481. }
  482. public RState Start(params object[] objs)
  483. {
  484. if (WaferManager.Instance.HasDuplicatedWafer)
  485. {
  486. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  487. return RState.Failed;
  488. }
  489. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  490. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  491. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  492. _cycledWafer = 0;
  493. _cycledCount = 0;
  494. _throughput = 0;
  495. Clear();
  496. _cycleWatch.Stop();
  497. _lpCycleWafer.Clear();
  498. _lpCycleCount.Clear();
  499. return RState.Running;
  500. }
  501. public bool CreateJob(Dictionary<string, object> param, out string reason)
  502. {
  503. reason = "";
  504. //_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  505. //_cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  506. string[] slotSequence = (string[])param["SlotSequence"];
  507. string jobId = (string)param["JobId"];
  508. string module = (string)param["Module"];
  509. if (string.IsNullOrEmpty(jobId))
  510. {
  511. jobId = "CJ_Local_" + module;
  512. }
  513. //bool autoStart = (bool)param["AutoStart"];
  514. string lotId = jobId;
  515. if (param.ContainsKey("LotId"))
  516. lotId = (string)param["LotId"];
  517. string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
  518. string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;
  519. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  520. {
  521. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  522. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  523. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  524. return false;
  525. }
  526. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  527. {
  528. reason = $"{module} should be LoadPort";
  529. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  530. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  531. return false;
  532. }
  533. if (_lstControlJobs.Exists(x => x.Name == jobId))
  534. {
  535. reason = $"{jobId} already created";
  536. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  537. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  538. return false;
  539. }
  540. ControlJobInfo cj = new ControlJobInfo();
  541. cj.Name = jobId;
  542. cj.Module = module;
  543. cj.LotName = lotId;
  544. cj.LotInnerId = Guid.NewGuid();
  545. cj.LotWafers = new List<WaferInfo>();
  546. cj.SetState(EnumControlJobState.WaitingForStart);
  547. cj.JetState = EnumJetCtrlJobState.Quequed;
  548. cj.PreJobClean = preCleanRecipe;
  549. cj.PostJobClean = postCleanRecipe;
  550. cj.SequenceNameList = slotSequence;
  551. cj.CycleNumber = _cycleSetPoint; // only for temperary debug
  552. _lpCycleSP[ModuleHelper.Converter(module)] = _cycleSetPoint;
  553. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  554. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  555. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  556. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  557. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  558. {
  559. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  560. continue;
  561. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  562. indexSequence[groupName] = slotSequence[i];
  563. if (!seqSlot.ContainsKey(groupName))
  564. {
  565. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  566. }
  567. if (!seqSlotWafers.ContainsKey(groupName))
  568. {
  569. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  570. }
  571. seqSlot[groupName][i] = true;
  572. if (!WaferManager.Instance.CheckHasWafer(module, i))
  573. {
  574. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  575. return false;
  576. }
  577. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  578. {
  579. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  580. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  581. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  582. return false;
  583. }
  584. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  585. {
  586. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  587. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  588. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  589. return false;
  590. }
  591. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  592. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  593. cj.LotWafers.Add(waferInfo);
  594. waferInfo.SequenceName = slotSequence[i];
  595. waferInfo.LotId = lotId;
  596. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  597. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  598. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  599. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  600. }
  601. if (seqSlotWafers.Count == 0)
  602. {
  603. reason = $"job has not assign wafer";
  604. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  605. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  606. return false;
  607. }
  608. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  609. string[] seqs = seqSlot.Keys.ToArray();
  610. for (int i = 0; i < seqs.Length; i++)
  611. {
  612. ProcessJobInfo pj = new ProcessJobInfo();
  613. pj.Name = jobId + "_" + (i + 1);
  614. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  615. if (pj.Sequence == null)
  616. {
  617. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  618. return false;
  619. }
  620. pj.ControlJobName = cj.Name;
  621. pj.LotName = lotId;
  622. pj.SlotWafers = seqSlotWafers[seqs[i]];
  623. pj.SetState(EnumProcessJobState.Queued);
  624. if (!CheckSequencePmReady(pj.Sequence, out reason))
  625. {
  626. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  627. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  628. return false;
  629. }
  630. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  631. {
  632. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  633. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  634. return false;
  635. }
  636. pjs.Add(pj);
  637. }
  638. _dbCallback.LotUpdate(cj);
  639. foreach (var pj in pjs)
  640. {
  641. cj.ProcessJobNameList.Add(pj.Name);
  642. _lstProcessJobs.Add(pj);
  643. }
  644. _lstControlJobs.Add(cj);
  645. //AssociatedPMWithLP(cj);
  646. _loadportControlJobDic[cj.Module] = cj;
  647. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  648. return true;
  649. }
  650. public bool CheckAllJobDone()
  651. {
  652. foreach (var cj in _lstControlJobs)
  653. {
  654. if (cj.State != EnumControlJobState.Completed)
  655. return false;
  656. }
  657. InUseRecipes.Clear();
  658. return true;
  659. }
  660. public bool CheckJobJustDone(out string sJobName)
  661. {
  662. foreach (var cj in _lstControlJobs)
  663. {
  664. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  665. {
  666. //LP;WaferSize;Lot;Number;Start;End;
  667. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  668. cj.BeenPosted = true;
  669. return true;
  670. }
  671. }
  672. sJobName = "NULL";
  673. return false;
  674. }
  675. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  676. {
  677. foreach (var pj in _lstProcessJobs)
  678. {
  679. if (pj.ControlJobName == cj.Name)
  680. return pj;
  681. }
  682. return null;
  683. }
  684. public bool AbortJob(string jobName, out string reason)
  685. {
  686. reason = "";
  687. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  688. if (cj == null)
  689. {
  690. reason = $"abort job rejected, not found job with id {jobName}";
  691. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  692. return false;
  693. }
  694. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  695. foreach (var pj in _lstProcessJobs)
  696. {
  697. if (pj.ControlJobName == cj.Name)
  698. {
  699. pj.SetState(EnumProcessJobState.Aborting);
  700. pjAbortList.Add(pj);
  701. int unprocessed = 0;
  702. int aborted = 0;
  703. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  704. foreach (var waferInfo in wafers)
  705. {
  706. waferInfo.ProcessJob = null;
  707. waferInfo.NextSequenceStep = 0;
  708. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  709. unprocessed++;
  710. }
  711. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  712. }
  713. }
  714. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  715. _dbCallback.LotFinished(cj);
  716. foreach (var pj in pjAbortList)
  717. {
  718. _lstProcessJobs.Remove(pj);
  719. }
  720. _lstControlJobs.Remove(cj);
  721. if (_loadportControlJobDic.ContainsKey(cj.Module))
  722. {
  723. _loadportControlJobDic[cj.Module] = null;
  724. }
  725. return true;
  726. }
  727. public bool StopJob(string jobName, out string reason)
  728. {
  729. reason = "";
  730. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  731. if (cj == null)
  732. {
  733. reason = $"stop job rejected, not found job with id {jobName}";
  734. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  735. return false;
  736. }
  737. foreach (var pj in _lstProcessJobs)
  738. {
  739. if (pj.ControlJobName == cj.Name)
  740. {
  741. pj.SetState(EnumProcessJobState.Stopping);
  742. }
  743. }
  744. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  745. _dbCallback.LotFinished(cj);
  746. if (_loadportControlJobDic.ContainsKey(cj.Module))
  747. {
  748. _loadportControlJobDic[cj.Module] = null;
  749. }
  750. return true;
  751. }
  752. public bool ResumeJob(string jobName, out string reason)
  753. {
  754. reason = "";
  755. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  756. if (cj == null)
  757. {
  758. reason = $"resume job rejected, not found job with id {jobName}";
  759. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  760. return false;
  761. }
  762. if (cj.State == EnumControlJobState.Paused)
  763. {
  764. cj.SetState(EnumControlJobState.Executing);
  765. }
  766. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  767. _cycleState = RState.Running;
  768. return true;
  769. }
  770. public bool PauseJob(string jobName, out string reason)
  771. {
  772. reason = "";
  773. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  774. if (cj == null)
  775. {
  776. reason = $"pause job rejected, not found job with id {jobName}";
  777. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  778. return false;
  779. }
  780. if (cj.State == EnumControlJobState.Executing)
  781. {
  782. cj.SetState(EnumControlJobState.Paused);
  783. }
  784. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  785. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  786. _cycleState = RState.Paused;
  787. return true;
  788. }
  789. public bool StartJob(string jobName, out string reason)
  790. {
  791. reason = "";
  792. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  793. if (cj == null)
  794. {
  795. reason = $"start job rejected, not found job with id {jobName}";
  796. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  797. return false;
  798. }
  799. if (cj.State == EnumControlJobState.WaitingForStart)
  800. {
  801. cj.SetState(EnumControlJobState.Queued);
  802. //PreJobClean(cj);
  803. cj.StartTime = DateTime.Now;
  804. _dbCallback.LotCreated(cj);
  805. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  806. //if (!_blockingWatcher.IsRunning)
  807. // _blockingWatcher.Restart();
  808. //ResetTraceFlag();
  809. }
  810. if (!_cycleWatch.IsRunning)
  811. {
  812. _cycleWatch.Restart();
  813. }
  814. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  815. {
  816. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  817. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  818. }
  819. _cycleState = RState.Running;
  820. return true;
  821. }
  822. public RState Monitor()
  823. {
  824. prelude();
  825. RunWaferTask();
  826. RunModuleTasks();
  827. RoutingWafers();
  828. epilogue();
  829. return _cycleState;
  830. }
  831. public void Abort()
  832. {
  833. }
  834. public void Clear()
  835. {
  836. foreach (var module in _dictModuleTask)
  837. {
  838. module.Value.Status = ModuleStatus.Idle;
  839. module.Value.Scheduler.ResetTask();
  840. module.Value.ResetTask();
  841. }
  842. List<string> keys = _loadportControlJobDic.Keys.ToList();
  843. foreach (var key in keys)
  844. {
  845. _loadportControlJobDic[key] = null;
  846. }
  847. _lstWaferTasks.Clear();
  848. _tmSchdActions.Clear();
  849. _curTmAction.Clear();
  850. _lstControlJobs.Clear();
  851. _lstProcessJobs.Clear();
  852. InUseRecipes.Clear();
  853. _lpCycleWafer[ModuleName.LP1] = 0;
  854. _lpCycleWafer[ModuleName.LP2] = 0;
  855. _lpCycleCount[ModuleName.LP1] = 0;
  856. _lpCycleCount[ModuleName.LP2] = 0;
  857. _lpThroughput[ModuleName.LP1] = 0;
  858. _lpThroughput[ModuleName.LP2] = 0;
  859. _cycleState = RState.End;
  860. }
  861. #endregion
  862. #region manual return wafer
  863. // manual return one wafer while system is auto running
  864. public bool ManualReturnWafer(object[] objs)
  865. {
  866. ModuleName SourceModule = (ModuleName)objs[0];
  867. int SourceSlot = (int)objs[1];
  868. if (!_dictModuleTask.Keys.Contains(SourceModule))
  869. {
  870. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  871. return false;
  872. }
  873. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  874. {
  875. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  876. return false;
  877. }
  878. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  879. {
  880. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  881. return false;
  882. }
  883. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  884. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  885. _qeReturnWafers.Enqueue(wafer);
  886. return true;
  887. }
  888. public RState CheckManualReturnWafer()
  889. {
  890. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  891. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  892. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  893. {
  894. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  895. return RState.Failed;
  896. }
  897. foreach (var mod in _dictModuleTask)
  898. {
  899. if (ModuleHelper.IsLoadPort(mod.Key))
  900. continue;
  901. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  902. {
  903. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  904. return RState.Failed;
  905. }
  906. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  907. for (int slot = 0; slot < nSlotNumber; slot++)
  908. {
  909. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  910. if (wafer.IsEmpty)
  911. continue;
  912. var destLP = (ModuleName)wafer.OriginStation;
  913. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  914. {
  915. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  916. return RState.Failed;
  917. }
  918. if (!ModuleHelper.IsLoadPort(destLP))
  919. {
  920. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  921. return RState.Failed;
  922. }
  923. }
  924. }
  925. Clear();
  926. return RState.Running;
  927. }
  928. public RState ReturnAllWafers()
  929. {
  930. int systemWaferCount = 0;
  931. foreach (var mod in _dictModuleTask)
  932. {
  933. if (ModuleHelper.IsLoadPort(mod.Key))
  934. continue;
  935. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  936. for (int slot = 0; slot < nSlotNumber; slot++)
  937. {
  938. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  939. if (!wafer.IsEmpty)
  940. systemWaferCount++;
  941. }
  942. }
  943. if (systemWaferCount == 0)
  944. return RState.End;
  945. ReturnInternalWafers();
  946. return RState.Running;
  947. }
  948. #endregion
  949. #region internal implementation
  950. private void InitModules()
  951. {
  952. foreach (var module in ModuleHelper.InstalledModules)
  953. {
  954. if (ModuleHelper.IsInstalled(module))
  955. {
  956. if (ModuleHelper.IsPm(module))
  957. {
  958. _dictModuleTask[module] = new VenusPMTask(module);
  959. }
  960. else if (ModuleHelper.IsTMRobot(module))
  961. {
  962. _dictModuleTask[module] = new VenusTMRobotTask(module);
  963. }
  964. else if (ModuleHelper.IsAligner(module))
  965. {
  966. _dictModuleTask[module] = new PreAlignTask(module);
  967. }
  968. else if (ModuleHelper.IsLoadPort(module))
  969. {
  970. _dictModuleTask[module] = new LoadPortTask(module);
  971. }
  972. }
  973. }
  974. }
  975. private void prelude()
  976. {
  977. bool available = true;
  978. foreach (var mod in _dictModuleTask)
  979. {
  980. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  981. }
  982. }
  983. private void epilogue()
  984. {
  985. UpdateProcessJobStatus();
  986. UpdateControlJobStatus();
  987. CreateNewWaferTask();
  988. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  989. }
  990. private void RunWaferTask()
  991. {
  992. foreach (var task in _lstWaferTasks)
  993. {
  994. task.Run();
  995. }
  996. }
  997. private void RunModuleTasks()
  998. {
  999. foreach (var task in _dictModuleTask)
  1000. {
  1001. task.Value.Run();
  1002. }
  1003. }
  1004. private void RoutingWafers()
  1005. {
  1006. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1007. {
  1008. RunSchdTMActions();
  1009. return;
  1010. }
  1011. if (_tmRobotStatus != RState.End)
  1012. return;
  1013. if (_tmRobotSingleArmOption != 0)
  1014. {
  1015. RoutingWaferWithSingleArm();
  1016. return;
  1017. }
  1018. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1019. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1020. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1021. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1022. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1023. if(robotWafers.Count == 0)
  1024. {
  1025. if(readyReturnWafers.Count > 0)
  1026. {
  1027. if(readyReturnWafers.Count == 1 || readyReturnWafers[0].destMod != readyReturnWafers[1].destMod)
  1028. {
  1029. // return one wafer
  1030. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1031. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1032. }
  1033. else
  1034. {
  1035. // return two wafer
  1036. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1037. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1038. var doublePlaceActions = new List<MoveItem>
  1039. {
  1040. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1041. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1042. };
  1043. _tmSchdActions.Enqueue(doublePlaceActions);
  1044. }
  1045. }
  1046. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1047. {
  1048. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1049. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1050. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1051. {
  1052. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1053. if(pmTask.ReadyMoveIn(alignerWafer))
  1054. {
  1055. // move aligner wafer to PM
  1056. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1057. }
  1058. }
  1059. }
  1060. else
  1061. {
  1062. if(emptyAndReadyIn20sPMs.Count >= 2 && waitInWafers.Count >= 2 && waitInWafers[0].currentMod == waitInWafers[1].currentMod)
  1063. {
  1064. var doublePickActions = new List<MoveItem>()
  1065. {
  1066. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1067. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1068. };
  1069. _tmSchdActions.Enqueue(doublePickActions);
  1070. if(aligner.Count > 0)
  1071. {
  1072. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1073. }
  1074. }
  1075. else if(emptyAndReadyIn20sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1076. {
  1077. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1078. if (aligner.Count > 0)
  1079. {
  1080. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1081. }
  1082. }
  1083. }
  1084. }
  1085. else if(robotWafers.Count == 1)
  1086. {
  1087. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1088. if (readyReturnWafers.Count >= 1)
  1089. {
  1090. // return one wafer
  1091. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1092. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1093. }
  1094. else
  1095. {
  1096. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1097. {
  1098. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1099. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1100. if(!robotWafers.First().IsAligned)
  1101. {
  1102. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1103. }
  1104. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1105. {
  1106. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1107. if (pmTask.ReadyMoveIn(alignerWafer))
  1108. {
  1109. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1110. }
  1111. }
  1112. }
  1113. else
  1114. {
  1115. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1116. {
  1117. if (!robotWafers.First().IsAligned)
  1118. {
  1119. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1120. }
  1121. else if (emptyAndReadyIn20sPMs.Contains(robotWafers.First().destMod))
  1122. {
  1123. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1124. if (pmTask.ReadyMoveIn(robotWafers.First()))
  1125. {
  1126. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1127. }
  1128. }
  1129. }
  1130. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1131. {
  1132. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1133. }
  1134. }
  1135. }
  1136. }
  1137. else // had better not go here
  1138. {
  1139. foreach(var wafer in robotWafers)
  1140. {
  1141. if (ModuleHelper.IsPm(wafer.destMod))
  1142. {
  1143. if (!wafer.IsAligned)
  1144. {
  1145. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1146. {
  1147. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1148. }
  1149. }
  1150. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1151. {
  1152. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1153. if (pmTask.ReadyMoveIn(wafer))
  1154. {
  1155. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1156. }
  1157. }
  1158. }
  1159. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1160. {
  1161. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1162. }
  1163. }
  1164. }
  1165. }
  1166. private void RoutingWaferWithSingleArm()
  1167. {
  1168. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1169. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1170. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1171. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1172. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1173. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1174. if (robotWafers.Count == 0)
  1175. {
  1176. if (readyReturnWafers.Count > 0)
  1177. {
  1178. // return one wafer
  1179. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1180. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1181. }
  1182. else
  1183. {
  1184. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1185. {
  1186. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1187. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1188. {
  1189. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1190. // move aligner wafer to PM
  1191. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1192. if (pmTask.ReadyMoveIn(alignerWafer))
  1193. {
  1194. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1195. }
  1196. }
  1197. }
  1198. else
  1199. {
  1200. foreach(var wafer in waitInWafers)
  1201. {
  1202. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1203. {
  1204. // move one wafer from LP to aligner
  1205. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1206. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1207. }
  1208. }
  1209. }
  1210. }
  1211. }
  1212. else
  1213. {
  1214. var wafer = robotWafers[0];
  1215. if (ModuleHelper.IsPm(wafer.destMod))
  1216. {
  1217. if (!wafer.IsAligned)
  1218. {
  1219. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1220. {
  1221. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1222. }
  1223. }
  1224. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1225. {
  1226. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1227. if (pmTask.ReadyMoveIn(wafer))
  1228. {
  1229. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1230. }
  1231. }
  1232. }
  1233. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1234. {
  1235. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1236. }
  1237. }
  1238. }
  1239. private void RunSchdTMActions()
  1240. {
  1241. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1242. {
  1243. if (_tmSchdActions.Count > 0)
  1244. {
  1245. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1246. {
  1247. var nextActions = _tmSchdActions.First();
  1248. if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1249. return;
  1250. if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1251. return;
  1252. _curTmAction = _tmSchdActions.Dequeue();
  1253. foreach (var action in _curTmAction)
  1254. {
  1255. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1256. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1257. }
  1258. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1259. }
  1260. }
  1261. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1262. {
  1263. _curTmAction.Clear();
  1264. }
  1265. }
  1266. }
  1267. private bool isReturnActionsDone(List<MoveItem> items)
  1268. {
  1269. foreach (var item in items)
  1270. {
  1271. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1272. return false;
  1273. }
  1274. return true;
  1275. }
  1276. private bool IsMovingActionsDone(List<MoveItem> actions)
  1277. {
  1278. bool CheckWaferExistence(ModuleName mod, int slot)
  1279. {
  1280. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1281. }
  1282. if (actions.Count == 1)
  1283. {
  1284. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1285. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1286. return false;
  1287. }
  1288. else
  1289. {
  1290. // initialize all the wafer existance before move
  1291. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1292. foreach (var ac in actions)
  1293. {
  1294. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1295. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1296. if (!slotWafers.ContainsKey(scrSlot))
  1297. {
  1298. slotWafers[scrSlot] = true;
  1299. }
  1300. if (!slotWafers.ContainsKey(destSlot))
  1301. {
  1302. slotWafers[destSlot] = false;
  1303. }
  1304. }
  1305. // simulate moved result
  1306. foreach (var ac in actions)
  1307. {
  1308. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1309. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1310. if (!slotWafers[scrSlot])
  1311. {
  1312. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1313. }
  1314. else
  1315. {
  1316. slotWafers[scrSlot] = false;
  1317. }
  1318. if (slotWafers[destSlot])
  1319. {
  1320. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1321. }
  1322. else
  1323. {
  1324. slotWafers[destSlot] = true;
  1325. }
  1326. }
  1327. foreach (var slot in slotWafers)
  1328. {
  1329. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1330. return false;
  1331. }
  1332. }
  1333. return true;
  1334. }
  1335. private void WaferArrived(WaferTask wafer, MoveItem item)
  1336. {
  1337. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1338. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1339. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1340. {
  1341. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1342. if (currentControlJob != null)
  1343. {
  1344. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1345. }
  1346. }
  1347. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1348. }
  1349. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1350. {
  1351. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1352. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1353. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1354. {
  1355. (_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1356. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1357. if (currentControlJob != null)
  1358. {
  1359. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1360. }
  1361. }
  1362. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1363. }
  1364. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1365. {
  1366. bool allWaferReturn = true;
  1367. foreach (var slot in pj.SlotWafers)
  1368. {
  1369. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1370. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1371. {
  1372. allWaferReturn = false;
  1373. break;
  1374. }
  1375. }
  1376. return allWaferReturn;
  1377. }
  1378. private void ReturnInternalWafers()
  1379. {
  1380. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1381. {
  1382. RunSchdTMReturnActions();
  1383. return;
  1384. }
  1385. if (_tmRobotStatus != RState.End)
  1386. return;
  1387. for (int i = 0; i < 2; i++)
  1388. {
  1389. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1390. {
  1391. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1392. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1393. return;
  1394. }
  1395. }
  1396. foreach(var mod in _dictModuleTask)
  1397. {
  1398. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1399. continue;
  1400. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1401. {
  1402. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1403. var freeHands = GetTMFreeHand();
  1404. if(freeHands.Count > 0)
  1405. {
  1406. var hand = freeHands[0];
  1407. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1408. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1409. return;
  1410. }
  1411. }
  1412. }
  1413. }
  1414. private List<Hand> GetTMFreeHand()
  1415. {
  1416. var lstHands = new List<Hand>();
  1417. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1418. lstHands.Add(Hand.Blade1);
  1419. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1420. lstHands.Add(Hand.Blade2);
  1421. return lstHands;
  1422. }
  1423. private void UpdateProcessJobStatus()
  1424. {
  1425. if (_tmRobotStatus == RState.Running)
  1426. return;
  1427. foreach (var pj in _lstProcessJobs)
  1428. {
  1429. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1430. {
  1431. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1432. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1433. }
  1434. }
  1435. }
  1436. private void UpdateControlJobStatus()
  1437. {
  1438. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1439. return;
  1440. var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1441. var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1442. if (runningJobs.Count == 0)
  1443. {
  1444. if (queueJobs.Count() > 0)
  1445. {
  1446. // start the first waiting job
  1447. RunControlJob(queueJobs.First());
  1448. }
  1449. }
  1450. else
  1451. {
  1452. foreach (var runningjob in runningJobs)
  1453. {
  1454. // update the running job
  1455. RunControlJob(runningjob);
  1456. }
  1457. foreach (var queueJob in queueJobs)
  1458. {
  1459. if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
  1460. {
  1461. // parallelly start the not intersect job
  1462. RunControlJob(queueJob);
  1463. }
  1464. }
  1465. }
  1466. // update system cycle status
  1467. if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
  1468. _cycleState = RState.End;
  1469. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1470. foreach (var cj in _lstControlJobs)
  1471. {
  1472. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1473. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1474. {
  1475. cjRemoveList.Add(cj);
  1476. }
  1477. }
  1478. foreach (var cj in cjRemoveList)
  1479. {
  1480. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1481. foreach (var pj in _lstProcessJobs)
  1482. {
  1483. if (pj.ControlJobName == cj.Name)
  1484. pjRemoveList.Add(pj);
  1485. }
  1486. foreach (var pj in pjRemoveList)
  1487. {
  1488. _lstProcessJobs.Remove(pj);
  1489. }
  1490. _lstControlJobs.Remove(cj);
  1491. }
  1492. }
  1493. private bool RunControlJob(ControlJobInfo cj)
  1494. {
  1495. switch (cj.JetState)
  1496. {
  1497. case EnumJetCtrlJobState.Quequed:
  1498. {
  1499. if (IsCtrlJobNeedPreClean(cj))
  1500. {
  1501. cj.JetState = EnumJetCtrlJobState.PreJobClean;
  1502. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1503. foreach (var pm in PMs)
  1504. {
  1505. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1506. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1507. {
  1508. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
  1509. }
  1510. }
  1511. }
  1512. else
  1513. {
  1514. ActiveControlJob(cj);
  1515. }
  1516. cj.SetState(EnumControlJobState.Executing);
  1517. }
  1518. break;
  1519. case EnumJetCtrlJobState.PreJobClean:
  1520. {
  1521. if (IsPreJobCleanDone(cj))
  1522. {
  1523. ActiveControlJob(cj);
  1524. }
  1525. }
  1526. break;
  1527. case EnumJetCtrlJobState.Processing:
  1528. {
  1529. if (IsCtrlJobNeedPostClean(cj))
  1530. {
  1531. if (IsAllJobWaferProcessedOrProcessing(cj))
  1532. {
  1533. cj.JetState = EnumJetCtrlJobState.PostJobClean;
  1534. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1535. foreach (var pm in PMs)
  1536. {
  1537. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1538. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1539. {
  1540. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
  1541. }
  1542. }
  1543. }
  1544. }
  1545. else
  1546. {
  1547. if (IsAllProcessJobComplete(cj))
  1548. {
  1549. cj.JetState = EnumJetCtrlJobState.Completed;
  1550. }
  1551. }
  1552. }
  1553. break;
  1554. case EnumJetCtrlJobState.PostJobClean:
  1555. {
  1556. if (IsPostJobCleanDone(cj))
  1557. {
  1558. cj.JetState = EnumJetCtrlJobState.Completed;
  1559. }
  1560. }
  1561. break;
  1562. }
  1563. // caculate processed wafer by control job
  1564. var lp = ModuleHelper.Converter(cj.Module);
  1565. int countProcessed = 0;
  1566. foreach (var pjName in cj.ProcessJobNameList)
  1567. {
  1568. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1569. if (pj == null)
  1570. {
  1571. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1572. continue;
  1573. }
  1574. // caculate process wafer by process
  1575. if (_lpCycleCount[lp] < cj.CycleNumber)
  1576. {
  1577. foreach (var pjSlotWafer in pj.SlotWafers)
  1578. {
  1579. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1580. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  1581. countProcessed++;
  1582. }
  1583. }
  1584. }
  1585. int lpCycleWafer = 0;
  1586. if (cj.JetState == EnumJetCtrlJobState.Completed)
  1587. {
  1588. cj.EndTime = DateTime.Now;
  1589. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  1590. _dbCallback.LotFinished(cj);
  1591. if (_lpCycleCount[lp] >= cj.CycleNumber)
  1592. (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
  1593. _lpCycleCount[lp]++;
  1594. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
  1595. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1596. LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
  1597. if (_lpCycleCount[lp] < cj.CycleNumber)
  1598. {
  1599. cj.SetState(EnumControlJobState.Executing);
  1600. cj.JetState = EnumJetCtrlJobState.Quequed;
  1601. cj.LotInnerId = Guid.NewGuid();
  1602. _dbCallback.LotCreated(cj);
  1603. foreach (var pj in _lstProcessJobs)
  1604. {
  1605. if (pj.ControlJobName == cj.Name)
  1606. {
  1607. pj.SetState(EnumProcessJobState.Queued);
  1608. pj.InnerId = Guid.NewGuid();
  1609. foreach (var pjSlotWafer in pj.SlotWafers)
  1610. {
  1611. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1612. wafer.ProcessJob = null;
  1613. wafer.NextSequenceStep = 0;
  1614. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1615. }
  1616. }
  1617. }
  1618. _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
  1619. }
  1620. else
  1621. {
  1622. cj.SetState(EnumControlJobState.Completed);
  1623. }
  1624. }
  1625. else
  1626. {
  1627. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
  1628. }
  1629. if (lpCycleWafer != _lpCycleWafer[lp])
  1630. {
  1631. _lpCycleWafer[lp] = lpCycleWafer;
  1632. if (_lpCycleCount[lp] > 0)
  1633. {
  1634. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1635. }
  1636. }
  1637. return cj.State == EnumControlJobState.Completed;
  1638. }
  1639. private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
  1640. {
  1641. var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
  1642. var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
  1643. return cj1Pms.Intersect(cj2Pms).Count() > 0;
  1644. }
  1645. private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
  1646. {
  1647. return !string.IsNullOrWhiteSpace(cj.PreJobClean);
  1648. }
  1649. private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
  1650. {
  1651. return !string.IsNullOrWhiteSpace(cj.PostJobClean.Trim());
  1652. }
  1653. private bool IsPreJobCleanDone(ControlJobInfo cj)
  1654. {
  1655. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1656. foreach (var pm in pms)
  1657. {
  1658. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1659. if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PreClean))
  1660. return false;
  1661. }
  1662. return true;
  1663. }
  1664. private bool IsPostJobCleanDone(ControlJobInfo cj)
  1665. {
  1666. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1667. foreach (var pm in pms)
  1668. {
  1669. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1670. if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PostClean))
  1671. return false;
  1672. }
  1673. return true;
  1674. }
  1675. private bool ActiveProcessJob(ProcessJobInfo pj)
  1676. {
  1677. foreach (var pjSlotWafer in pj.SlotWafers)
  1678. {
  1679. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1680. wafer.ProcessJob = pj;
  1681. wafer.NextSequenceStep = 0;
  1682. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  1683. }
  1684. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  1685. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  1686. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  1687. pj.SetState(EnumProcessJobState.Processing);
  1688. return true;
  1689. }
  1690. private bool ActiveControlJob(ControlJobInfo cj)
  1691. {
  1692. cj.JetState = EnumJetCtrlJobState.Processing;
  1693. foreach (var pjName in cj.ProcessJobNameList)
  1694. {
  1695. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1696. if (pj == null)
  1697. {
  1698. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1699. continue;
  1700. }
  1701. if (pj.State == EnumProcessJobState.Queued)
  1702. {
  1703. ActiveProcessJob(pj);
  1704. }
  1705. }
  1706. return true;
  1707. }
  1708. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  1709. {
  1710. foreach (var pj in _lstProcessJobs)
  1711. {
  1712. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  1713. {
  1714. return false;
  1715. }
  1716. }
  1717. return true;
  1718. }
  1719. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  1720. {
  1721. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  1722. int original = (int)ModuleHelper.Converter(cj.Module);
  1723. foreach (var mod in allModules)
  1724. {
  1725. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  1726. continue;
  1727. var wafers = WaferManager.Instance.GetWafers(mod);
  1728. foreach (var wafer in wafers)
  1729. {
  1730. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  1731. continue;
  1732. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  1733. return false; ;
  1734. }
  1735. }
  1736. return true;
  1737. }
  1738. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  1739. {
  1740. var lstInProcessPMs = new List<ModuleName>();
  1741. foreach (var wafer in cj.LotWafers)
  1742. {
  1743. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  1744. {
  1745. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  1746. {
  1747. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  1748. lstInProcessPMs.Add(pm);
  1749. }
  1750. }
  1751. }
  1752. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  1753. foreach (var mod in _dictModuleTask)
  1754. {
  1755. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  1756. {
  1757. pmAssociatedWaferCount[mod.Key] = 0;
  1758. }
  1759. }
  1760. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  1761. foreach (var wafer in unprocessedWafer)
  1762. {
  1763. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  1764. {
  1765. pmAssociatedWaferCount[wafer.destMod]++;
  1766. }
  1767. }
  1768. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  1769. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  1770. return oderedPMCount.First().Key;
  1771. return ModuleName.System;
  1772. }
  1773. private void CreateNewWaferTask()
  1774. {
  1775. var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
  1776. var onDutyPms = new Dictionary<ModuleName, int>();
  1777. foreach (var job in runningJobs)
  1778. {
  1779. var pms = GetWaitPreCleanPMsByCtrlJob(job);
  1780. foreach (var pm in pms)
  1781. {
  1782. if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
  1783. {
  1784. onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
  1785. }
  1786. }
  1787. }
  1788. if (runningJobs.Count == 0 || onDutyPms.Count == 0)
  1789. return;
  1790. var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
  1791. if (oderedPMs.First().Value < 1)
  1792. {
  1793. foreach (var runningJob in runningJobs)
  1794. {
  1795. foreach (var wafer in runningJob.LotWafers)
  1796. {
  1797. if (wafer.IsEmpty || wafer.ProcessJob == null)
  1798. continue;
  1799. if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  1800. {
  1801. CreateWaferTasks(wafer, oderedPMs.First().Key);
  1802. return;
  1803. }
  1804. }
  1805. }
  1806. }
  1807. }
  1808. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  1809. {
  1810. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  1811. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  1812. Recipe recipe = Recipe.Load(recipeContent);
  1813. int temperature = 0;
  1814. if (int.TryParse(recipe.Header.Temperature, out int temp))
  1815. {
  1816. temperature = temp;
  1817. }
  1818. var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  1819. wafer.OriginSlot,
  1820. pm,
  1821. 0,
  1822. temperature,
  1823. wafer.InnerId,
  1824. recipeName,
  1825. wafer.ProcessJob.Sequence.WTWCleanRecipe,
  1826. wafer.ProcessJob.Sequence.LLInOutPath,
  1827. wafer.ProcessJob.Sequence.LLDelayTime,
  1828. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  1829. waferTask.OnWaferArrived += WaferArrived;
  1830. waferTask.OnWaferLeaved += WaferLeaved;
  1831. _lstWaferTasks.Add(waferTask);
  1832. }
  1833. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  1834. {
  1835. // check wether need align
  1836. foreach (var step in sequence.Steps)
  1837. {
  1838. foreach (var mod in step.StepModules)
  1839. {
  1840. if (ModuleHelper.IsAligner(mod))
  1841. return true;
  1842. }
  1843. }
  1844. return false;
  1845. }
  1846. private void RunSchdTMReturnActions()
  1847. {
  1848. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  1849. if (tmRobot == null || !tmRobot.IsAvailable)
  1850. return;
  1851. if (_tmSchdActions.Count > 0)
  1852. {
  1853. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  1854. {
  1855. var nextActions = _tmSchdActions.First();
  1856. var nextModule = nextActions.First().Module;
  1857. if (!_dictModuleTask[nextModule].IsIdle)
  1858. return;
  1859. _curTmAction = _tmSchdActions.Dequeue();
  1860. tmRobot.SendMoveItems(_curTmAction.ToArray());
  1861. }
  1862. }
  1863. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  1864. {
  1865. _curTmAction.Clear();
  1866. }
  1867. }
  1868. #endregion internal implementation
  1869. #region sequence/recipe validation
  1870. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  1871. {
  1872. reason = "";
  1873. foreach (var pm in seq.PMs)
  1874. {
  1875. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  1876. return true;
  1877. }
  1878. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  1879. return false;
  1880. }
  1881. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  1882. {
  1883. for (int i = 0; i < seq.Steps.Count; i++)
  1884. {
  1885. SequenceStepInfo stepInfo = seq.Steps[i];
  1886. foreach (var module in stepInfo.StepModules)
  1887. {
  1888. if (ModuleHelper.IsPm(module))
  1889. {
  1890. string attr = $"{module}Recipe";
  1891. if (stepInfo.StepParameter.ContainsKey(attr)
  1892. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  1893. {
  1894. var recipeName = (string)stepInfo.StepParameter[attr];
  1895. if (!string.IsNullOrWhiteSpace(recipeName))
  1896. {
  1897. var recipeContent =
  1898. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  1899. if (string.IsNullOrWhiteSpace(recipeContent))
  1900. {
  1901. reason = $"Can not find recipe file{recipeName}";
  1902. return false;
  1903. }
  1904. }
  1905. }
  1906. }
  1907. }
  1908. }
  1909. reason = "";
  1910. return true;
  1911. }
  1912. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  1913. {
  1914. var pmlist = new List<ModuleName>();
  1915. foreach (var pj in _lstProcessJobs)
  1916. {
  1917. if (pj.ControlJobName == cj.Name)
  1918. {
  1919. foreach (var pm in pj.Sequence.PMs)
  1920. {
  1921. if (!pmlist.Contains(pm))
  1922. pmlist.Add(pm);
  1923. }
  1924. }
  1925. }
  1926. return pmlist;
  1927. }
  1928. #endregion
  1929. }
  1930. }