Kepler-Release/Venus/Venus_RT/Modules/SystemDispatcher.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Diagnostics;
using Aitex.Core.Common;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.Fsm;

using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.DBCore;

using Venus_Core;

using Venus_RT.Modules.Schedulers;
using Venus_RT.Scheduler;
using Venus_Unity;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using System.Linq.Expressions;

namespace Venus_RT.Modules
{
    public class WaferTask
    {
        public ModuleName sourceMod { get; }
        public int sourceSlot { get; }
        public ModuleName destMod { get; private set; }
        public int destSlot { get; private set; }
        public ModuleName currentMod { get; private set; }
        public int currentSlot { get; private set; }
        public ModuleName nextMod { get; private set; }
        public int nextSlot { get; private set; }
        public ModuleName routedMod { get; private set; }
        public int routedSlot { get; private set; }
        public Hand hand { get; private set; }
        public SequenceLLInOutPath llInOutPath { get; }
        public string processRecipe { get; }
        public string wtwCleanRecipe { get; }
        public float temperature { get; }
        public Guid waferId { get; }
        public int elapseTime { get { return (int)(DateTime.Now - _scheduledTime).TotalSeconds; } }
        public int llDelayTime { get; }
        public RState pressureStatus { get; private set; }
        public RState temperatureStatus { get; private set; }
        public RState movingStatus { get; private set; }

        public bool IsCompleted { get { return movingStatus == RState.End && currentMod == destMod && currentSlot == destSlot; } }
        public bool IsTimeout { get { return elapseTime > 600; } }
        public bool IsAligned { get; set; }

        public bool IsWaitingAtmMoving
        {
            get
            {
                if (movingStatus != RState.Init)
                    return false;

                return !IsWaitingVacMoving;
            }
        }

        public bool IsWaitingVacMoving
        {
            get
            {
                if (movingStatus == RState.Init &&
                    (ModuleHelper.IsPm(nextMod) ||
                     ModuleHelper.IsTMRobot(nextMod) ||
                     ModuleHelper.IsPm(currentMod) ||
                     ModuleHelper.IsTMRobot(currentMod)))
                    return true;

                return false;
            }
        }

        public delegate void WaferMoveHandler(WaferTask wafer, MoveItem item);
        public event WaferMoveHandler OnWaferArrived;
        public event WaferMoveHandler OnWaferLeaved;

        private DateTime _scheduledTime;

        public WaferTask(ModuleName source, int srcSlot, ModuleName dest, int dstSlot, float temp, Guid waferID, string recipeName, string wtwClean, SequenceLLInOutPath inOutPath, int LLDelay, bool needAlign)
        {
            sourceMod = currentMod = nextMod = routedMod = source;
            sourceSlot = currentSlot = nextSlot = routedSlot = srcSlot;

            destMod = dest;
            destSlot = dstSlot;
            hand = Hand.None;
            temperature = temp;
            waferId = waferID;
            processRecipe = recipeName;
            wtwCleanRecipe = wtwClean;
            llInOutPath = inOutPath;
            llDelayTime = LLDelay;
            IsAligned = !needAlign;

            pressureStatus = RState.Init;
            temperatureStatus = RState.End;
            movingStatus = RState.Init;
            _scheduledTime = DateTime.Now;
        }

        public RState Run()
        {
            if (movingStatus == RState.Running)
            {
                var wafer = WaferManager.Instance.GetWafer(nextMod, nextSlot);
                if (!wafer.IsEmpty && wafer.InnerId == waferId)
                {
                    LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Wafer {wafer.WaferOrigin} from  {currentMod}.{currentSlot + 1} move to {nextMod}.{nextSlot + 1}");
                    if (!ModuleHelper.IsTMRobot(currentMod) && !ModuleHelper.IsEFEMRobot(currentMod))
                    {
                        OnWaferLeaved(this, new MoveItem(currentMod, currentSlot, nextMod, nextSlot, hand));
                    }

                    if (!ModuleHelper.IsTMRobot(nextMod) && !ModuleHelper.IsEFEMRobot(nextMod))
                    {
                        _scheduledTime = DateTime.Now;
                        wafer.NextSequenceStep++;
                        OnWaferArrived(this, new MoveItem(currentMod, currentSlot, nextMod, nextSlot, hand));
                    }

                    currentMod = nextMod;
                    currentSlot = nextSlot;
                    movingStatus = RState.End;
                }
            }

            return RState.Running;
        }

        public void RouteTo(ModuleName mod, int slot)
        {
            routedMod = mod;
            routedSlot = slot;
            movingStatus = RState.Init;
        }

        public void MoveTo(ModuleName mod, int slot)
        {
            nextMod = mod;
            nextSlot = slot;
            movingStatus = RState.Running;

            if (ModuleHelper.IsLoadLock(currentMod) && ModuleHelper.IsTMRobot(nextMod) && ModuleHelper.IsLoadLock(routedMod))
            {
                routedMod = ModuleName.TMRobot; // fix the bug which missing call RouteTo() on Vac side
            }
        }

        public void ReAssignPM(ModuleName pm, int slot)
        {
            destMod = pm;
            destSlot = slot;
        }

        public void Return()
        {
            destMod = sourceMod;
            destSlot = sourceSlot;
            movingStatus = RState.End;
            pressureStatus = RState.End;
            temperatureStatus = RState.End;
        }
    }

    public enum ModuleStatus
    {
        Idle,
        WaitMove,
        Moving,
        NotReady,

        // PM Status
        WaitProcess,
        StartProcess,
        Processing,

        StartIdleClean,
        IdleClean,

        WaitPreJobClean,
        StartPreJobClean,
        PreJobClean,

        WaitPostJobClean,
        StartPostJobClean,
        PostJobClean,

        WaitWTWClean,
        StartWTWClean,
        WTWClean,

        // Align Status
        WaitAlign,
        StartAlign,
        Aligning,

        // Loadlock Status
        StartPump,
        Pumping,
        VacReady,
        StartVent,
        Venting,
        AtmReady,
        WaitCooling,
        StartCooling,
        Cooling,
        CoolingDone,

        // Unknown
        Unknown,
    }

    public class ModuleTask
    {
        public ModuleName Module { get; }
        public ModuleStatus Status { get; set; }
        public SchedulerModule Scheduler { get; }
        public virtual int SlotNum { get; protected set; }
        public virtual bool IsIdle { get { return Status == ModuleStatus.Idle; } }

        public virtual bool HasWafer { get { return WaferManager.Instance.CheckHasWafer(Module, 0); } }

        private int _currentActionTime = 0;

        public virtual int IdleTime
        {
            get
            {
                if (Status != ModuleStatus.Idle)
                    return 0;

                return (int)(DateTime.Now - _moduleTimer).TotalSeconds;
            }
        }

        public virtual int BusyTime
        {
            get
            {
                if (Status == ModuleStatus.Idle)
                    return 0;

                return (int)(DateTime.Now - _moduleTimer).TotalSeconds;
            }
        }

        public virtual int BusyLastTime
        {
            get
            {
                if (Status == ModuleStatus.Idle)
                    return 0;

                return _currentActionTime - BusyTime;
            }
        }

        public virtual int TimeToReady
        {
            get
            {
                if (Scheduler.IsAvailable)
                    return 0;

                return int.MaxValue / 2;
            }
        }

        protected DateTime _moduleTimer;

        public ModuleTask(ModuleName mod)
        {
            Module = mod;
            Scheduler = Singleton<TransferModule>.Instance.GetScheduler(mod);
            SlotNum = 1;
            _moduleTimer = DateTime.Now;
        }

        public virtual RState Run()
        {
            Status = Scheduler.IsAvailable ? ModuleStatus.Idle : ModuleStatus.NotReady;
            return RState.Running;
        }

        public virtual void WaferArrived(WaferTask wafer, int slot)
        {

        }

        public virtual void WaferLeaved(WaferTask wafer, int slot)
        {

        }

        public virtual void ResetTask()
        {

        }
    }

    public class PMTask : ModuleTask
    {
        enum CleanType
        {
            IdleClean,
            PreJobClean,
            PostJobClean,
            WTWClean,
        }

        public override int TimeToReady
        {
            get
            {
                switch (Status)
                {
                    case ModuleStatus.Idle:
                    case ModuleStatus.Processing:
                    case ModuleStatus.IdleClean:
                    case ModuleStatus.PreJobClean:
                        {
                            return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
                        }
                    case ModuleStatus.PostJobClean:
                    case ModuleStatus.WTWClean:
                        {
                            if (_pendingCleanTask.Count == 0)
                            {
                                return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
                            }
                        }
                        break;
                }

                return int.MaxValue / 2;
            }
        }

        private WaferTask _wafer;
        private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;

        private string _preJobCleanRecipe;
        private string _postJobCleanRecipe;
        private string _wtwCleanRecipe;
        private Queue<CleanType> _pendingCleanTask = new Queue<CleanType>();

        public PMTask(ModuleName pm) : base(pm)
        {
        }

        public override RState Run()
        {
            if (Scheduler.IsIdle)
            {
                switch (Status)
                {
                    case ModuleStatus.Idle:
                        {
                            if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
                            {
                                if (_pendingCleanTask.Count > 0)
                                {
                                    var cleanTask = _pendingCleanTask.Dequeue();
                                    if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
                                    {
                                        Status = ModuleStatus.WaitPostJobClean;
                                    }
                                    else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                                    {
                                        Status = ModuleStatus.WaitPreJobClean;
                                    }
                                }
                                else if (_pmScheduler.RunIdleCleanTask())  // Check Idle Clean
                                {
                                    Status = ModuleStatus.StartIdleClean;
                                }
                            }
                        }
                        break;
                    case ModuleStatus.WaitProcess:
                        {
                            Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
                            Status = ModuleStatus.StartProcess;
                        }
                        break;
                    case ModuleStatus.WaitPreJobClean:
                        {
                            if (WaferManager.Instance.CheckNoWafer(Module, 0))
                            {
                                if (_pmScheduler.RunJobCleanTask(_preJobCleanRecipe))
                                {
                                    Status = ModuleStatus.StartPreJobClean;
                                }
                                else
                                {
                                    LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe{_preJobCleanRecipe} failed");
                                    Status = ModuleStatus.Idle;
                                    _preJobCleanRecipe = string.Empty;
                                }
                            }
                        }
                        break;
                    case ModuleStatus.WaitPostJobClean:
                        {
                            if (WaferManager.Instance.CheckNoWafer(Module, 0))
                            {
                                if (_pmScheduler.RunJobCleanTask(_postJobCleanRecipe))
                                {
                                    Status = ModuleStatus.StartPostJobClean;
                                }
                                else
                                {
                                    LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe{_postJobCleanRecipe} failed");
                                    Status = ModuleStatus.Idle;
                                    _postJobCleanRecipe = string.Empty;
                                }
                            }
                        }
                        break;

                    case ModuleStatus.WaitWTWClean:
                        {
                            if (WaferManager.Instance.CheckNoWafer(Module, 0))
                            {
                                if (_pmScheduler.RunJobCleanTask(_wtwCleanRecipe))
                                {
                                    Status = ModuleStatus.StartWTWClean;
                                }
                                else
                                {
                                    LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW Wafer clean recipe{_wtwCleanRecipe} failed");
                                    Status = ModuleStatus.Idle;
                                    _wtwCleanRecipe = string.Empty;
                                }
                            }
                        }
                        break;
                    case ModuleStatus.Processing:
                        {
                            var wafer = WaferManager.Instance.GetWafer(Module, 0);
                            if (Scheduler.IsOnline)
                            {
                                if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
                                {
                                    _wafer.Return();
                                    Status = ModuleStatus.Idle;
                                }
                            }
                            else  // handle offline exception situation
                            {
                                Status = ModuleStatus.Idle;
                            }
                        }
                        break;
                    case ModuleStatus.PreJobClean:
                        {
                            _preJobCleanRecipe = string.Empty;
                            Status = ModuleStatus.Idle;
                        }
                        break;
                    case ModuleStatus.PostJobClean:
                        {
                            _postJobCleanRecipe = string.Empty;
                            if (_pendingCleanTask.Count > 0)
                            {
                                var cleanTask = _pendingCleanTask.Dequeue();
                                if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                                {
                                    Status = ModuleStatus.WaitPreJobClean;
                                    break;
                                }
                            }

                            Status = ModuleStatus.Idle;
                        }
                        break;
                    case ModuleStatus.WTWClean:
                        {
                            if (_pendingCleanTask.Count > 0)
                            {
                                var cleanTask = _pendingCleanTask.Dequeue();
                                if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
                                {
                                    Status = ModuleStatus.WaitPostJobClean;
                                }
                                else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                                {
                                    Status = ModuleStatus.WaitPreJobClean;
                                }
                            }
                            else
                            {
                                Status = ModuleStatus.Idle;
                            }

                            _wtwCleanRecipe = string.Empty;
                        }
                        break;
                    case ModuleStatus.IdleClean:
                        {
                            Status = ModuleStatus.Idle;
                        }
                        break;
                    case ModuleStatus.StartProcess:
                        {
                            if (RouteManager.IsATMMode)
                            {
                                Status = ModuleStatus.Processing;
                            }
                        }
                        break;
                }
            }
            else
            {
                switch (Status)
                {
                    case ModuleStatus.StartProcess:
                        Status = ModuleStatus.Processing;
                        break;
                    case ModuleStatus.StartIdleClean:
                        Status = ModuleStatus.IdleClean;
                        break;
                    case ModuleStatus.StartPreJobClean:
                        Status = ModuleStatus.PreJobClean;
                        break;
                    case ModuleStatus.StartPostJobClean:
                        Status = ModuleStatus.PostJobClean;
                        break;
                    case ModuleStatus.StartWTWClean:
                        Status = ModuleStatus.WTWClean;
                        break;
                }
            }

            return RState.Running;
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            _wafer = wafer;
            Status = ModuleStatus.WaitProcess;
        }

        public override void WaferLeaved(WaferTask wafer, int slot)
        {
            if (!string.IsNullOrWhiteSpace(_wafer.wtwCleanRecipe.Trim()))
            {
                Status = ModuleStatus.WaitWTWClean;
                _wtwCleanRecipe = _wafer.wtwCleanRecipe;
            }
            else if (_pendingCleanTask.Count > 0)
            {
                var cleanTask = _pendingCleanTask.Dequeue();
                if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
                {
                    Status = ModuleStatus.WaitPostJobClean;
                }
                else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                {
                    Status = ModuleStatus.WaitPreJobClean;
                }
            }

            _wafer = null;
        }

        public void InvokePreJobClean(string preJobClean)
        {
            _preJobCleanRecipe = preJobClean;
            _pendingCleanTask.Enqueue(CleanType.PreJobClean);
        }

        public bool IsPreJobCleanDone()
        {
            return !_pendingCleanTask.Contains(CleanType.PreJobClean) && string.IsNullOrWhiteSpace(_preJobCleanRecipe);
        }

        public void InvokePostJobClean(string postJobClean)
        {
            _postJobCleanRecipe = postJobClean;
            _pendingCleanTask.Enqueue(CleanType.PostJobClean);
        }

        public bool IsPostJobCleanDone()
        {
            return !_pendingCleanTask.Contains(CleanType.PostJobClean) && string.IsNullOrWhiteSpace(_postJobCleanRecipe);
        }
    }

    public class AlignerTask : ModuleTask
    {
        private WaferTask _wafer;
        public AlignerTask(ModuleName aligner) : base(aligner)
        {

        }

        public override RState Run()
        {
            var efemRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot) as SchedulerEfemRobot;
            if (efemRobot == null || !efemRobot.IsAvailable)
                return RState.Running;

            switch (Status)
            {
                case ModuleStatus.WaitAlign:
                    {
                        efemRobot.Align(0);
                        Status = ModuleStatus.Aligning;
                    }
                    break;
                case ModuleStatus.Aligning:
                    {
                        _wafer.IsAligned = true;
                        Status = ModuleStatus.Idle;
                    }
                    break;
            }

            return RState.Running;
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            _wafer = wafer;
            Status = ModuleStatus.WaitAlign;
        }

        public override void WaferLeaved(WaferTask wafer, int slot)
        {
            _wafer = null;
        }
    }

    public class LoadPortTask : ModuleTask
    {
        public LoadPortTask(ModuleName lp) : base(lp)
        {
            SlotNum = SC.GetValue<int>($"EFEM.LoadPort.SlotNumber");
        }

        public override RState Run()
        {
            return base.Run();
        }
    }

    public class TMRobotTask : ModuleTask
    {
        public TMRobotTask(ModuleName tmRobot) : base(tmRobot)
        {
            SlotNum = 2;
        }

        public override RState Run()
        {
            return base.Run();
        }
    }

    public class EFEMRobotTask : ModuleTask
    {
        public EFEMRobotTask(ModuleName efemRobot) : base(efemRobot)
        {
            SlotNum = 2;
        }

        public override RState Run()
        {
            return base.Run();
        }

        public bool PostMoveItems(MoveItem[] items)
        {
            Status = ModuleStatus.Moving;
            return (Scheduler as SchedulerEfemRobot).PostMoveItems(items);
        }
    }

    public enum LLStatus
    {
        StartPump,
        Pumping,
        VacReady,
        StartVent,
        Venting,
        AtmReady,
        Unknow,
    }

    public class LoadlockTask : ModuleTask
    {
        private Dictionary<int, int> _wafersDelayTime = new Dictionary<int, int>();
        public LoadlockTask(ModuleName ll) : base(ll)
        {
            SlotNum = SC.GetValue<int>($"{ll}.SlotNumber");

            for (int slot = 0; slot < SlotNum; slot++)
                _wafersDelayTime[slot] = -1;
        }

        public override int TimeToReady
        {
            get { return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000; }
        }

        public bool ReayForTMInTime(int seconds)
        {
            return (Status == ModuleStatus.Pumping && TimeToReady < seconds) || Status == ModuleStatus.VacReady;
        }

        public bool ReayForEfemInTime(int seconds)
        {
            return (Status == ModuleStatus.Venting && TimeToReady < seconds) || Status == ModuleStatus.AtmReady;
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            Scheduler.WaferArrived(slot);
            if (ModuleHelper.IsLoadPort(wafer.destMod))
            {
                _wafersDelayTime[slot] = wafer.llDelayTime;
            }
            else
            {
                _wafersDelayTime[slot] = -1;
            }
        }

        public override void WaferLeaved(WaferTask wafer, int slot)
        {
            _wafersDelayTime[slot] = -1;
        }

        public bool PreVent()
        {
            if (Scheduler.IsAvailable && !Scheduler.IsAtm)
            {
                if ((Scheduler as SchedulerLoadLock).PreVent())
                {
                    Status = ModuleStatus.StartVent;
                    return true;
                }
            }

            return false;
        }

        public bool PrePump()
        {
            if (Scheduler.IsAvailable && !Scheduler.IsVac)
            {
                if ((Scheduler as SchedulerLoadLock).PrePump())
                {
                    Status = ModuleStatus.StartPump;
                    return true;
                }
            }

            return false;
        }

        public bool Cooling()
        {
            if (Scheduler.IsAvailable && !Scheduler.IsAtm)
            {
                if ((Scheduler as SchedulerLoadLock).Cooling())
                {
                    Status = ModuleStatus.StartCooling;
                    return true;
                }
            }

            return false;
        }

        public override RState Run()
        {
            if (Scheduler.IsIdle)
            {
                if (Scheduler.IsAvailable)
                {
                    switch (Status)
                    {
                        case ModuleStatus.Pumping:
                            if (Scheduler.IsVac)
                            {
                                Status = ModuleStatus.VacReady;
                            }
                            break;
                        case ModuleStatus.Venting:
                            if (Scheduler.IsAtm)
                            {
                                Status = ModuleStatus.AtmReady;
                            }
                            break;
                        case ModuleStatus.Cooling:
                            if (Scheduler.IsAtm)
                            {
                                Status = ModuleStatus.CoolingDone;
                            }
                            break;
                        default:
                            {
                                Status = Scheduler.IsAtm ? ModuleStatus.AtmReady : Scheduler.IsVac ? ModuleStatus.VacReady : Status;
                            }
                            break;
                    }
                }
            }
            else
            {
                switch (Status)
                {
                    case ModuleStatus.StartPump:
                        Status = ModuleStatus.Pumping;
                        break;
                    case ModuleStatus.StartVent:
                        Status = ModuleStatus.Venting;
                        break;
                    case ModuleStatus.StartCooling:
                        Status = ModuleStatus.Cooling;
                        break;
                }
            }

            return RState.Running;
        }
    }

    enum LLSlotInOutOpt
    {
        AllInAllOut,
        UpperInLowerOut,
        LowerInUpperOut,
    }

    enum SpecialRoutingPattern
    {
        Disable,
        LongTimeRecipe,
    }

    class SystemDispatcher : ICycle
    {
        private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
        private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
        private Queue<ControlJobInfo> _qePollingJobs = new Queue<ControlJobInfo>();

        private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
        private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
        private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
        private Queue<Guid> _qeWaitInWafers = new Queue<Guid>();

        private Queue<List<MoveItem>> _efemSchdActions = new Queue<List<MoveItem>>();
        private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();

        private List<MoveItem> _curEfemAction = new List<MoveItem>();
        private List<MoveItem> _curTmAction = new List<MoveItem>();


        private RState _efemRobotStatus { get { return (_dictModuleTask[ModuleName.EfemRobot].Scheduler as SchedulerEfemRobot).RobotStatus; } }
        private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerTMRobot).RobotStatus; } }

        private SchedulerFACallback _faCallback;
        private SchedulerDBCallback _dbCallback;

        private readonly int _LLASlotNumber = 4;
        private readonly int _LLBSlotNumber = 4;

        private int _efemRobotSingleArmOption = 0;
        private int _tmRobotSingleArmOption = 0;
        private LLSlotInOutOpt _LLSlotInOutOption = 0;
        private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int> { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
        private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int> { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
        private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int> { { ModuleName.LP1, 1 }, { ModuleName.LP2, 1 }, { ModuleName.LP3, 1 } };
        private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float> { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
        private Dictionary<ModuleName, Stopwatch> _lpCycleWatch = new Dictionary<ModuleName, Stopwatch> { { ModuleName.LP1, new Stopwatch() }, { ModuleName.LP2, new Stopwatch() }, { ModuleName.LP3, new Stopwatch() } };

        private Stopwatch _cycleWatch = new Stopwatch();

        private SequenceLLInOutPath _LLInOutPath = SequenceLLInOutPath.DInDOut;
        private SpecialRoutingPattern _specialRoutingPattern = SpecialRoutingPattern.Disable;

        public SequenceLLInOutPath LLInOutPath => _LLInOutPath;

        public bool HasJobRunning => _lstControlJobs.Count > 0;

        private RState _cycleState = RState.Init;
        public RState CycleState => _cycleState;
        private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
        public List<string> InUseRecipes = new List<string>();
        public List<string> LP1InUseRecipes = new List<string>();
        public List<string> LP2InUseRecipes = new List<string>();
        public List<string> LP3InUseRecipes = new List<string>();

        #region public interface
        public SystemDispatcher()
        {
            _faCallback = new SchedulerFACallback();
            _dbCallback = new SchedulerDBCallback();

            _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
            _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");

            _LLASlotNumber = SC.GetValue<int>("LLA.SlotNumber");
            _LLBSlotNumber = SC.GetValue<int>("LLB.SlotNumber");

            InitModules();

            DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
            DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
            DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);

            DATA.Subscribe("Scheduler.LP1.InUsingRecipe", () => LP1InUseRecipes);
            DATA.Subscribe("Scheduler.LP2.InUsingRecipe", () => LP2InUseRecipes);
            DATA.Subscribe("Scheduler.LP3.InUsingRecipe", () => LP3InUseRecipes);



            foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
            {
                _loadportControlJobDic[lp.ToString()] = null;
                DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);

                DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
                DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
                DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
                DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
            }
        }

        /// <summary>
        /// 获取lp当前的ControlJob
        /// </summary>
        /// <param name="lp"></param>
        /// <returns></returns>
        public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
        {
            if (ModuleHelper.IsLoadPort(lp))
            {
                return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
            }
            else
            {
                return null;
            }
        }

        public RState Start(params object[] objs)
        {
            if (WaferManager.Instance.HasDuplicatedWafer)
            {
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
                return RState.Failed;
            }

            _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
            _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
            _LLSlotInOutOption = (LLSlotInOutOpt)SC.GetValue<int>("System.LoadlockSlotInOutOption");
            _specialRoutingPattern = (SpecialRoutingPattern)SC.GetValue<int>("System.SpecialRoutingPattern");

            // rounding TM robot single arm option
            if (_tmRobotSingleArmOption > 2 && _LLSlotInOutOption == LLSlotInOutOpt.AllInAllOut)
            {
                _tmRobotSingleArmOption = 0;
            }

            _cycleWatch.Stop();
            Clear();

            // reset cycle/throughput couter
            _lpCycleWafer = new Dictionary<ModuleName, int> { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
            _lpCycleCount = new Dictionary<ModuleName, int> { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
            _lpCycleSP = new Dictionary<ModuleName, int> { { ModuleName.LP1, 1 }, { ModuleName.LP2, 1 }, { ModuleName.LP3, 1 } };
            _lpThroughput = new Dictionary<ModuleName, float> { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
            _lpCycleWatch = new Dictionary<ModuleName, Stopwatch> { { ModuleName.LP1, new Stopwatch() }, { ModuleName.LP2, new Stopwatch() }, { ModuleName.LP3, new Stopwatch() } };

            return RState.Running;
        }

        public RState Monitor()
        {
            prelude();

            RunWaferTask();
            RunModuleTasks();

            RoutingATMWafers();
            RoutingVacWafers();

            epilogue();

            return _cycleState;
        }

        public void Abort()
        {
        }

        public bool CreateJob(Dictionary<string, object> param, out string reason)
        {
            reason = "";

            string[] slotSequence = (string[])param["SlotSequence"];
            string module = (string)param["Module"];

            string jobId = (string)param["JobId"];

            if (string.IsNullOrEmpty(jobId))
            {
                jobId = "CJ_Local_" + module;
            }

            foreach (var item in _loadportControlJobDic.Values)
            {
                if (item?.Name == jobId)
                {
                    reason = $"The same jobid {jobId} already exists, please re-enter the jobid";
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                    return false;
                }
            }
            string lotId = (string)param["LotId"];
            if (string.IsNullOrEmpty(lotId))
            {
                lotId = "CJ_Local_" + module;
            }

            string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
            string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;

            int cycleNumber = param.ContainsKey("CycleNumber") ? (int)param["CycleNumber"] : 1;
            if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
            {
                reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
            {
                reason = $"{module} should be LoadPort";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            if (_lstControlJobs.Exists(x => x.Name == jobId))
            {
                reason = $"{jobId} already created";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            ControlJobInfo cj = new ControlJobInfo();
            cj.Name = jobId;
            cj.Module = module;
            cj.LotName = lotId;
            cj.LotInnerId = Guid.NewGuid();
            cj.LotWafers = new List<WaferInfo>();
            cj.SetState(EnumControlJobState.WaitingForStart);
            cj.JetState = EnumJetCtrlJobState.Created;
            cj.PreJobClean = preCleanRecipe;
            cj.PostJobClean = postCleanRecipe;
            cj.SequenceNameList = slotSequence;
            cj.CycleNumber = cycleNumber;

            _lpCycleSP[ModuleHelper.Converter(module)] = cj.CycleNumber;

            Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
            Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
            Dictionary<string, string> indexSequence = new Dictionary<string, string>();

            bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
            for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
            {
                if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
                    continue;

                string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
                indexSequence[groupName] = slotSequence[i];
                if (!seqSlot.ContainsKey(groupName))
                {
                    seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
                }
                if (!seqSlotWafers.ContainsKey(groupName))
                {
                    seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
                }
                seqSlot[groupName][i] = true;

                if (!WaferManager.Instance.CheckHasWafer(module, i))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
                    return false;
                }
                if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
                {
                    reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
                {
                    reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }
                //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
                WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
                cj.LotWafers.Add(waferInfo);
                waferInfo.SequenceName = slotSequence[i];
                waferInfo.LotId = lotId;
                //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---

                seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));

                cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;

                LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
            }

            if (seqSlotWafers.Count == 0)
            {
                reason = $"job has not assign wafer";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
            string[] seqs = seqSlot.Keys.ToArray();
            for (int i = 0; i < seqs.Length; i++)
            {
                ProcessJobInfo pj = new ProcessJobInfo();
                pj.Name = jobId + "_" + (i + 1);
                pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
                if (pj.Sequence == null)
                {
                    reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
                    return false;
                }
                pj.ControlJobName = cj.Name;
                pj.LotName = lotId;
                pj.SlotWafers = seqSlotWafers[seqs[i]];
                pj.SetState(EnumProcessJobState.Queued);

                if (!CheckSequencePmReady(pj.Sequence, out reason))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                pjs.Add(pj);
            }

            _dbCallback.LotUpdate(cj);
            foreach (var pj in pjs)
            {
                cj.ProcessJobNameList.Add(pj.Name);
                _lstProcessJobs.Add(pj);
            }

            _lstControlJobs.Add(cj);
            //AssociatedPMWithLP(cj);
            _loadportControlJobDic[cj.Module] = cj;

            _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
            return true;
        }

        public bool CheckAllJobDone()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
                    return false;
            }
            InUseRecipes.Clear();
            LP1InUseRecipes.Clear();
            LP2InUseRecipes.Clear();
            LP3InUseRecipes.Clear();

            return true;
        }

        public bool CheckJobJustDone(out string sJobName)
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
                {
                    if (cj.Module == "LP1")
                    {
                        LP1InUseRecipes.Clear();
                    }
                    else if (cj.Module == "LP2")
                    {
                        LP2InUseRecipes.Clear();
                    }
                    else if (cj.Module == "LP3")
                    {
                        LP3InUseRecipes.Clear();
                    }                    
                    //_lstControlJobs.Remove(doneJob);
                    _loadportControlJobDic[cj.Module] = null;
                    //LP;WaferSize;Lot;Number;Start;End;
                    sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
                    cj.BeenPosted = true;
                    return true;

                }
            }
            //var doneJob = _lstControlJobs.Where(cj => cj.State == EnumControlJobState.Completed && !cj.BeenPosted).FirstOrDefault();
            //if (doneJob != null)
            //{
               

            //    return true;
            //}
            sJobName = "NULL";
            return false;
        }

        public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                    return pj;
            }

            return null;
        }

        public bool AbortJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"abort job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }

            List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Aborting);
                    pjAbortList.Add(pj);

                    int unprocessed = 0;
                    int aborted = 0;
                    WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
                    foreach (var waferInfo in wafers)
                    {
                        waferInfo.ProcessJob = null;
                        waferInfo.NextSequenceStep = 0;
                        if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
                            unprocessed++;
                    }
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
                }
            }

            _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
            _dbCallback.LotFinished(cj);
            foreach (var pj in pjAbortList)
            {
                _lstProcessJobs.Remove(pj);
            }

            _lstControlJobs.Remove(cj);
            if (_loadportControlJobDic.ContainsKey(cj.Module))
            {
                _loadportControlJobDic[cj.Module] = null;
            }
            return true;
        }

        public bool StopJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"stop job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }

            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Stopping);
                }
            }

            _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
            _dbCallback.LotFinished(cj);
            if (_loadportControlJobDic.ContainsKey(cj.Module))
            {
                _loadportControlJobDic[cj.Module] = null;
            }
            return true;
        }

        public bool ResumeJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"resume job rejected, not found job with id {jobName}";
                //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
                return false;
            }

            if (cj.State == EnumControlJobState.Paused)
            {
                cj.SetState(EnumControlJobState.Executing);
            }

            _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
            _cycleState = RState.Running;
            return true;
        }

        public bool PauseJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"pause job rejected, not found job with id {jobName}";
                //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
                return false;
            }

            if (cj.State == EnumControlJobState.Executing)
            {
                cj.SetState(EnumControlJobState.Paused);
            }
            _faCallback.JobPaused(cj, GetFirstProcessJob(cj));


            if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
                _cycleState = RState.Paused;
            return true;
        }


        public bool StartJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"start job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }



            if (RtInstance.ConfigType == ConfigType.Kepler2200)
            {
                var item = _lstProcessJobs.Where(x => x.LotName == cj.LotName).FirstOrDefault();
                if (item!=null && item.ControlJobName == cj.Name && !CheckSequenceKepler2200TemperatureReady(item.Sequence))
                {
                    return false;
                }
                if (cj.Module == "LP1")
                {
                    GetAllJobRecipe(LP1InUseRecipes, cj, item.Sequence);
                }
                else if (cj.Module == "LP2")
                {
                    GetAllJobRecipe(LP2InUseRecipes, cj, item.Sequence);
                }
                else if (cj.Module == "LP3")
                { 
                    GetAllJobRecipe(LP3InUseRecipes, cj, item.Sequence);
                }
            }
            
            //_lstProcessJobs.Where(x=>x.m)

            if (cj.State == EnumControlJobState.WaitingForStart)
            {
                cj.SetState(EnumControlJobState.Executing);
                //PreJobClean(cj);

                cj.JetState = EnumJetCtrlJobState.Quequed;

                cj.StartTime = DateTime.Now;

                _dbCallback.LotCreated(cj);
                _faCallback.JobStarted(cj, GetFirstProcessJob(cj));

                //if (!_blockingWatcher.IsRunning)
                //    _blockingWatcher.Restart();

                //ResetTraceFlag();
            }

            if (!_cycleWatch.IsRunning)
            {
                _cycleWatch.Restart();
            }

            var lp = ModuleHelper.Converter(cj.Module);
            _lpCycleCount[lp] = 0;
            _lpCycleWafer[lp] = 0;
            _lpThroughput[lp] = 0;

            _cycleState = RState.Running;
            return true;
        }

        public void Clear()
        {
            foreach (var module in _dictModuleTask)
            {
                module.Value.Status = ModuleStatus.Idle;
                module.Value.Scheduler.ResetTask();
            }

            List<string> keys = _loadportControlJobDic.Keys.ToList();
            foreach (var key in keys)
            {
                _loadportControlJobDic[key] = null;
            }

            _lstWaferTasks.Clear();
            _qeWaitInWafers.Clear();
            _tmSchdActions.Clear();
            _curTmAction.Clear();
            _efemSchdActions.Clear();
            _curEfemAction.Clear();
            _lstControlJobs.Clear();
            _lstProcessJobs.Clear();
            InUseRecipes.Clear();
            LP1InUseRecipes.Clear();
            LP2InUseRecipes.Clear();
            LP3InUseRecipes.Clear();
            _qePollingJobs.Clear();
            _cycleState = RState.End;
        }

        // manual return one wafer while system is auto running
        public bool ManualReturnWafer(object[] objs)
        {
            ModuleName SourceModule = (ModuleName)objs[0];
            int SourceSlot = (int)objs[1];

            if (!_dictModuleTask.Keys.Contains(SourceModule))
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
                return false;
            }

            if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
                return false;
            }

            if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
                return false;
            }

            var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
            LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return  wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");

            _qeReturnWafers.Enqueue(wafer);
            return true;
        }

        public RState CheckManualReturnWafer()
        {
            var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
            var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
            if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
            {
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
                return RState.Failed;
            }

            if (!_dictModuleTask[ModuleName.EfemRobot].Scheduler.IsIdle)
            {
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"The EFEM Robot is not ready for return wafer.");
                return RState.Failed;
            }

            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsLoadPort(mod.Key))
                    continue;

                if (!mod.Value.Scheduler.IsInclude)
                    continue;

                if (!mod.Value.Scheduler.IsIdle)
                {
                    LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
                    return RState.Failed;
                }

                int nSlotNumber = ModuleHelper.IsLoadLock(mod.Key) ? (mod.Key == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber) : (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsEFEMRobot(mod.Key) ? 2 : 1);
                for (int slot = 0; slot < nSlotNumber; slot++)
                {
                    var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
                    if (wafer.IsEmpty)
                        continue;

                    var destLP = (ModuleName)wafer.OriginStation;
                    if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
                    {
                        LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
                        return RState.Failed;
                    }

                    if (!ModuleHelper.IsLoadPort(destLP))
                    {
                        LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
                        return RState.Failed;
                    }
                }
            }

            Clear();
            return RState.Running;
        }

        public RState ReturnAllWafers()
        {
            int systemWaferCount = 0;
            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsLoadPort(mod.Key) || !mod.Value.Scheduler.IsInclude)
                    continue;

                int nSlotNumber = ModuleHelper.IsLoadLock(mod.Key) ? (mod.Key == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber) : (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsEFEMRobot(mod.Key) ? 2 : 1);
                for (int slot = 0; slot < nSlotNumber; slot++)
                {
                    var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
                    if (!wafer.IsEmpty)
                        systemWaferCount++;
                }
            }

            if (systemWaferCount == 0)
                return RState.End;

            ReturnVacWafers();
            ReturnAtmWafers();

            return RState.Running;
        }


        #endregion


        #region internal implementation
        private void InitModules()
        {
            foreach (var module in ModuleHelper.InstalledModules)
            {
                if (ModuleHelper.IsInstalled(module))
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        _dictModuleTask[module] = new PMTask(module);
                    }
                    else if (ModuleHelper.IsLoadLock(module))
                    {
                        _dictModuleTask[module] = new LoadlockTask(module);
                    }
                    else if (ModuleHelper.IsLoadPort(module))
                    {
                        _dictModuleTask[module] = new LoadPortTask(module);
                    }
                    else if (ModuleHelper.IsTMRobot(module))
                    {
                        _dictModuleTask[module] = new TMRobotTask(module);
                    }
                    else if (ModuleHelper.IsEFEMRobot(module))
                    {
                        _dictModuleTask[module] = new EFEMRobotTask(module);
                    }
                    else if (ModuleHelper.IsAligner(module))
                    {
                        _dictModuleTask[module] = new AlignerTask(module);
                    }
                }
            }
        }

        private void prelude()
        {
            bool available = true;
            foreach (var mod in _dictModuleTask)
            {
                available = mod.Value.Scheduler.IsAvailable; // force scheduler update
            }
        }

        private void epilogue()
        {
            UpdateProcessJobStatus();
            UpdateControlJobStatus();
            UpdateLLInOutPathProperty();
            PrepareLLPressure();

            CreateNewWaferTask();
            _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);

            ReDispatchBlockingWafers();
        }

        private void RunWaferTask()
        {
            foreach (var task in _lstWaferTasks)
            {
                task.Run();
            }
        }

        private void RunModuleTasks()
        {
            foreach (var task in _dictModuleTask)
            {
                task.Value.Run();
            }
        }

        private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
        {
            bool allWaferReturn = true;
            foreach (var slot in pj.SlotWafers)
            {
                var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
                if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
                {
                    allWaferReturn = false;
                    break;
                }
            }

            return allWaferReturn;
        }

        private void UpdateProcessJobStatus()
        {
            if (_efemRobotStatus == RState.Running || _tmRobotStatus == RState.Running)
                return;

            foreach (var pj in _lstProcessJobs)
            {
                if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
                {
                    pj.SetState(EnumProcessJobState.ProcessingComplete);
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
                }
            }
        }

        private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
        {
            var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
            var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);

            return cj1Pms.Intersect(cj2Pms).Count() > 0;
        }

        private void UpdateControlJobStatus()
        {
            if (_lstControlJobs.Count == 0 || _efemRobotStatus == RState.Running || _tmRobotStatus == RState.Running)
                return;

            var runningJobs = _lstControlJobs.FindAll(cj => IsCtrlJobRuning(cj));
            var queueJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.Quequed).OrderBy(cj => cj.StartTime);
            if (runningJobs.Count == 0)
            {
                if (queueJobs.Count() > 0)
                {
                    // start the first waiting job
                    RunControlJob(queueJobs.First());
                }
            }
            else
            {
                foreach (var runningjob in runningJobs)
                {
                    // update the running job
                    RunControlJob(runningjob);
                }

                foreach (var queueJob in queueJobs)
                {
                    if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
                    {
                        // parallelly start the not intersect job
                        RunControlJob(queueJob);
                    }
                    else
                    {
                        foreach (var cj in runningJobs)
                        {
                            if (!_qePollingJobs.Contains(cj))
                                _qePollingJobs.Enqueue(cj);
                        }

                        RunControlJob(queueJob);

                        if (!_qePollingJobs.Contains(queueJob))
                            _qePollingJobs.Enqueue(queueJob);
                    }
                }
            }

            // update system cycle status
            if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
                _cycleState = RState.End;

            List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
            foreach (var cj in _lstControlJobs)
            {
                LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
                if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
                {
                    cjRemoveList.Add(cj);
                }
            }

            foreach (var cj in cjRemoveList)
            {
                List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name)
                        pjRemoveList.Add(pj);
                }

                foreach (var pj in pjRemoveList)
                {
                    _lstProcessJobs.Remove(pj);
                }

                _lstControlJobs.Remove(cj);
            }
        }

        private bool ActiveProcessJob(ProcessJobInfo pj)
        {
            foreach (var pjSlotWafer in pj.SlotWafers)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                wafer.ProcessJob = pj;
                wafer.NextSequenceStep = 0;

                WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
            }

            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);

            CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
            JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);

            pj.SetState(EnumProcessJobState.Processing);

            return true;
        }

        private bool ActiveControlJob(ControlJobInfo cj)
        {
            cj.JetState = EnumJetCtrlJobState.Processing;
            foreach (var pjName in cj.ProcessJobNameList)
            {
                var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                if (pj == null)
                {
                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
                    continue;
                }

                if (pj.State == EnumProcessJobState.Queued)
                {
                    ActiveProcessJob(pj);
                }
            }

            return true;
        }

        private bool RunControlJob(ControlJobInfo cj)
        {
            // polling the sequencial jobs
            if (_qePollingJobs.Contains(cj))
            {
                if (_qePollingJobs.First() == cj)
                {
                    if (!cj.LotWafers.Exists(wafer => !wafer.IsEmpty && wafer.NextSequenceStep == 0) &&
                            ((!IsCtrlJobNeedPostClean(cj) && !_lstWaferTasks.Exists(wt => !string.IsNullOrEmpty(wt.wtwCleanRecipe) && (_qePollingJobs.Count <= 1 || !IsCtrlJobNeedPreClean(_qePollingJobs.ElementAt(1))))) ||
                                (IsAllProcessJobComplete(cj) && IsPostJobCleanDone(cj))))
                    {
                        _qePollingJobs.Dequeue();
                        _qePollingJobs.Enqueue(cj);
                    }
                }
            }


            switch (cj.JetState)
            {
                case EnumJetCtrlJobState.Quequed:
                    {
                        if (IsCtrlJobNeedPreClean(cj))
                        {
                            cj.JetState = EnumJetCtrlJobState.PreJobClean;

                            var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
                            foreach (var pm in PMs)
                            {
                                var pmTask = _dictModuleTask[pm] as PMTask;
                                if (pmTask != null && pmTask.Scheduler.IsOnline)
                                {
                                    pmTask.InvokePreJobClean(cj.PreJobClean);
                                }
                            }
                        }
                        else
                        {
                            ActiveControlJob(cj);
                        }
                    }
                    break;
                case EnumJetCtrlJobState.PreJobClean:
                    {
                        if (IsPreJobCleanDone(cj))
                        {
                            ActiveControlJob(cj);
                        }
                    }
                    break;
                case EnumJetCtrlJobState.Processing:
                    {
                        if (IsCtrlJobNeedPostClean(cj))
                        {
                            if (IsAllJobWaferProcessedOrProcessing(cj))
                            {
                                cj.JetState = EnumJetCtrlJobState.PostJobClean;
                                var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
                                foreach (var pm in PMs)
                                {
                                    var pmTask = _dictModuleTask[pm] as PMTask;
                                    if (pmTask != null && pmTask.Scheduler.IsOnline)
                                    {
                                        pmTask.InvokePostJobClean(cj.PostJobClean);
                                    }
                                }
                            }
                        }
                        else
                        {
                            if (IsAllProcessJobComplete(cj))
                            {
                                cj.JetState = EnumJetCtrlJobState.Completed;
                            }
                        }
                    }
                    break;
                case EnumJetCtrlJobState.PostJobClean:
                    {
                        if (IsPostJobCleanDone(cj))
                        {
                            cj.JetState = EnumJetCtrlJobState.Completed;
                        }
                    }
                    break;
            }

            // caculate processed wafer by control job
            var lp = ModuleHelper.Converter(cj.Module);
            int countProcessed = 0;
            foreach (var pjName in cj.ProcessJobNameList)
            {
                var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                if (pj == null)
                {
                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
                    continue;
                }

                // caculate process wafer by process
                if (_lpCycleCount[lp] < cj.CycleNumber)
                {
                    foreach (var pjSlotWafer in pj.SlotWafers)
                    {
                        WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
                        if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
                            countProcessed++;
                    }
                }
            }

            int lpCycleWafer = 0;
            if (cj.JetState == EnumJetCtrlJobState.Completed)
            {
                cj.EndTime = DateTime.Now;

                _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
                _dbCallback.LotFinished(cj);

                if (_lpCycleCount[lp] >= cj.CycleNumber)
                    (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();

                _lpCycleCount[lp]++;
                lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
                _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
                LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");

                if (_lpCycleCount[lp] < cj.CycleNumber)
                {
                    cj.SetState(EnumControlJobState.Executing);
                    cj.JetState = EnumJetCtrlJobState.Quequed;

                    cj.LotInnerId = Guid.NewGuid();

                    _dbCallback.LotCreated(cj);

                    foreach (var pj in _lstProcessJobs)
                    {
                        if (pj.ControlJobName == cj.Name)
                        {
                            pj.SetState(EnumProcessJobState.Queued);
                            pj.InnerId = Guid.NewGuid();
                            foreach (var pjSlotWafer in pj.SlotWafers)
                            {
                                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                                wafer.ProcessJob = null;
                                wafer.NextSequenceStep = 0;
                                wafer.ProcessState = EnumWaferProcessStatus.Idle;
                            }
                        }
                    }

                    _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
                }
                else
                {
                    cj.SetState(EnumControlJobState.Completed);
                    if (_qePollingJobs.Contains(cj))
                    {
                        Queue<ControlJobInfo> removedPolingJobs = new Queue<ControlJobInfo>();
                        foreach (var pj in _qePollingJobs)
                        {
                            if (pj != cj)
                                removedPolingJobs.Enqueue(pj);
                        }

                        if (removedPolingJobs.Count > 1)
                            _qePollingJobs = removedPolingJobs;
                        else
                            _qePollingJobs.Clear();
                    }
                }
            }
            else
            {
                lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
            }

            if (lpCycleWafer != _lpCycleWafer[lp])
            {
                _lpCycleWafer[lp] = lpCycleWafer;
                RefreshThroughput();
            }

            return cj.State == EnumControlJobState.Completed;
        }

        void RefreshThroughput()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing)
                {
                    var lp = ModuleHelper.Converter(cj.Module);
                    if (_lpCycleCount[lp] > 0)
                    {
                        _lpThroughput[lp] = (float)((_lpCycleWafer[lp] - 2) / _lpCycleWatch[lp].Elapsed.TotalHours);
                    }
                }
            }
        }

        private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
        {
            List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
            int original = (int)ModuleHelper.Converter(cj.Module);
            foreach (var mod in allModules)
            {
                if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
                    continue;

                var wafers = WaferManager.Instance.GetWafers(mod);
                foreach (var wafer in wafers)
                {
                    if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
                        continue;

                    if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
                        return false; ;
                }
            }

            return true;
        }

        private bool IsAllProcessJobComplete(ControlJobInfo cj)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
                {
                    return false;
                }
            }

            return true;
        }

        private bool IsCtrlJobExecuting(ModuleName lp)
        {
            var cJob = _lstControlJobs.Find(cj => ModuleHelper.Converter(cj.Module) == lp);
            if (cJob != null && cJob.State == EnumControlJobState.Executing)
                return true;

            return false;
        }

        private bool IsCtrlJobRuning(ControlJobInfo cj)
        {
            return cj.JetState == EnumJetCtrlJobState.PreJobClean ||
                cj.JetState == EnumJetCtrlJobState.Processing ||
                cj.JetState == EnumJetCtrlJobState.PostJobClean;
        }

        private bool IsCtrlJobEndingState(ControlJobInfo cj)
        {
            return cj.JetState == EnumJetCtrlJobState.PostJobClean ||
                (cj.JetState == EnumJetCtrlJobState.Processing
                && IsAllJobWaferProcessedOrProcessing(cj)
                && !IsCtrlJobNeedPostClean(cj));
        }

        private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
        {
            return !string.IsNullOrWhiteSpace(cj.PreJobClean);
        }

        private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
        {
            return !string.IsNullOrWhiteSpace(cj.PostJobClean.Trim());
        }

        private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
        {
            var pmlist = new List<ModuleName>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    foreach (var pm in pj.Sequence.PMs)
                    {
                        if (!pmlist.Contains(pm))
                            pmlist.Add(pm);
                    }
                }
            }

            return pmlist;
        }

        private bool IsPreJobCleanDone(ControlJobInfo cj)
        {
            var pms = GetWaitPreCleanPMsByCtrlJob(cj);
            foreach (var pm in pms)
            {
                var pmTask = _dictModuleTask[pm] as PMTask;
                if (pmTask.Scheduler.IsOnline && !pmTask.IsPreJobCleanDone())
                    return false;
            }

            return true;
        }

        private bool IsPostJobCleanDone(ControlJobInfo cj)
        {
            var pms = GetWaitPreCleanPMsByCtrlJob(cj);
            foreach (var pm in pms)
            {
                var pmTask = _dictModuleTask[pm] as PMTask;
                if (pmTask.Scheduler.IsOnline && !pmTask.IsPostJobCleanDone())
                    return false;
            }

            return true;
        }

        private void WaferArrived(WaferTask wafer, MoveItem item)
        {
            _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);

            //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
            if (ModuleHelper.IsLoadPort(item.DestinationModule))
            {
                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
                if (currentControlJob != null)
                {
                    _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
                }
            }

            if (ModuleHelper.IsLoadPort(item.DestinationModule))
            {
                if (!_lpCycleWatch[wafer.sourceMod].IsRunning)
                    _lpCycleWatch[wafer.sourceMod].Start();
            }
            //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
        }

        private void WaferLeaved(WaferTask wafer, MoveItem item)
        {
            _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);

            //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
            if (ModuleHelper.IsLoadPort(item.SourceModule))
            {
                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
                if (currentControlJob != null)
                {
                    _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
                }
            }
            //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
        }

        private ModuleName GetComingAvailablePM(ControlJobInfo cj)
        {
            var lstInProcessPMs = new List<ModuleName>();
            foreach (var wafer in cj.LotWafers)
            {
                if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
                {
                    foreach (var pm in wafer.ProcessJob.Sequence.PMs)
                    {
                        if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
                            lstInProcessPMs.Add(pm);
                    }
                }
            }

            // blocking check while only one loadlock in out
            if (LLInOutPath == SequenceLLInOutPath.AInAOut ||
                LLInOutPath == SequenceLLInOutPath.BInBOut ||
                !_dictModuleTask[ModuleName.LLA].Scheduler.IsOnline ||
                !_dictModuleTask[ModuleName.LLB].Scheduler.IsOnline)
            {
                if (_lstWaferTasks.Count >= lstInProcessPMs.Count + _LLASlotNumber / 2)
                    return ModuleName.System;
            }

            Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
                {
                    pmAssociatedWaferCount[mod.Key] = 0;
                }
            }

            var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
            foreach (var wafer in unprocessedWafer)
            {
                if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
                {
                    pmAssociatedWaferCount[wafer.destMod]++;
                }
            }

            var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
            if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
                return oderedPMCount.First().Key;

            return ModuleName.System;
        }

        private void CreateNewWaferTask()
        {
            var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
            var onDutyPms = new Dictionary<ModuleName, int>();
            foreach (var job in runningJobs)
            {
                var pms = GetWaitPreCleanPMsByCtrlJob(job);
                foreach (var pm in pms)
                {
                    if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
                    {
                        onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm || wt.currentMod == pm).Count();
                    }
                }
            }

            if (runningJobs.Count == 0 || onDutyPms.Count == 0)
                return;

            var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
            if (oderedPMs.First().Value < 1)
            {
                foreach (var runningJob in runningJobs)
                {
                    if (_qePollingJobs.Contains(runningJob) && _qePollingJobs.First() != runningJob)
                        continue;

                    foreach (var wafer in runningJob.LotWafers)
                    {
                        if (wafer.IsEmpty || wafer.ProcessJob == null)
                            continue;

                        if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
                        {
                            CreateWaferTasks(wafer, oderedPMs.First().Key);
                            return;
                        }
                    }
                }
            }

            if (_tmRobotStatus == RState.Running)
                return;

            // keep two raw atm wafer, try match a double place to LL
            var atmWaferCount = _lstWaferTasks.Count(wt => ModuleHelper.IsPm(wt.destMod) && (ModuleHelper.IsLoadPort(wt.currentMod) || ModuleHelper.IsAligner(wt.currentMod) || ModuleHelper.IsEFEMRobot(wt.currentMod) || ModuleHelper.IsLoadLock(wt.currentMod)));
            if (atmWaferCount < 2)
            {
                var busyPMs = oderedPMs.Where(pv => pv.Value == 1 && _dictModuleTask[pv.Key].HasWafer).OrderBy(pv => _dictModuleTask[pv.Key].TimeToReady);
                if (busyPMs.Count() == 0)
                    return;

                ModuleName nextPM = busyPMs.First().Key;
                if (_lpCycleWafer.Sum(kv => kv.Value) == 0)
                {
                    if (busyPMs.ToList().Exists(kv => _dictModuleTask[kv.Key].TimeToReady > 36000) && busyPMs.ToList().Exists(pv => _dictModuleTask[pv.Key].TimeToReady < 3600))
                    {
                        foreach (var pm in busyPMs)
                        {
                            if (_dictModuleTask[pm.Key].TimeToReady > 36000)
                            {
                                nextPM = pm.Key;
                                break;
                            }
                        }
                    }
                }

                foreach (var runningJob in runningJobs)
                {
                    if (_qePollingJobs.Contains(runningJob) && _qePollingJobs.First() != runningJob)
                        continue;

                    foreach (var wafer in runningJob.LotWafers)
                    {
                        if (wafer.IsEmpty || wafer.ProcessJob == null)
                            continue;

                        if (wafer.ProcessJob.Sequence.PMs.Contains(nextPM) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
                        {
                            CreateWaferTasks(wafer, nextPM);
                            return;
                        }
                    }
                }
            }
        }

        private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
        {
            var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
            var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
            Recipe recipe = Recipe.Load(recipeContent);
            int temperature = 0;

            if (int.TryParse(recipe.Header.Temperature, out int temp))
            {
                temperature = temp;
            }

            var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
                                            wafer.OriginSlot,
                                            pm,
                                            0,
                                            temperature,
                                            wafer.InnerId,
                                            recipeName,
                                            wafer.ProcessJob.Sequence.WTWCleanRecipe,
                                            wafer.ProcessJob.Sequence.LLInOutPath,
                                            wafer.ProcessJob.Sequence.LLDelayTime,
                                            IsSequenceNeedAlign(wafer.ProcessJob.Sequence));

            waferTask.OnWaferArrived += WaferArrived;
            waferTask.OnWaferLeaved += WaferLeaved;

            _lstWaferTasks.Add(waferTask);
            _qeWaitInWafers.Enqueue(wafer.InnerId);

            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, waferTask.sourceMod, $"Routing wafer: {waferTask.sourceMod}.{waferTask.sourceSlot + 1} to {pm}");
        }

        private void ReDispatchBlockingWafers()
        {
            foreach (var wt in _lstWaferTasks)
            {
                if (ModuleHelper.IsPm(wt.destMod) && !ModuleHelper.IsPm(wt.currentMod) && !ModuleHelper.IsLoadPort(wt.currentMod))
                {
                    if (!_dictModuleTask[wt.destMod].Scheduler.IsOnline && wt.elapseTime > 120)
                    {
                        var wafer = WaferManager.Instance.GetWafer(wt.currentMod, wt.currentSlot);
                        var otherPMs = _dictModuleTask.Where(mod => wafer.ProcessJob.Sequence.PMs.Contains(mod.Key) && mod.Value.Scheduler.IsOnline).OrderBy(mod => _lstWaferTasks.Where(task => task.destMod == mod.Key).Count()).ToList();
                        if (otherPMs.Count > 0)
                        {
                            LOG.Write(eEvent.WARN_ROUTER, wt.currentMod, $"Re-assign process chamber {otherPMs.First().Key} for {wafer.WaferOrigin} as {wt.destMod} unexpected offline");
                            wt.ReAssignPM(otherPMs.First().Key, 0);
                        }
                    }
                }
            }
        }

        private bool ForwardATMWafers(ModuleName ll)
        {
            if (_qeWaitInWafers.Count == 0)
                return false;

            var emptySlots = GetLLReadyInOutSlots(ll).emptySlot;
            var atmWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && (ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod))).ToList();
            var notAlignedWafer = atmWafers.Where(wafer => !wafer.IsAligned).ToList();
            var freeHands = GetEFEMFreeHand();
            var waitInWafer = _lstWaferTasks.Find(wt => wt.waferId == _qeWaitInWafers.First());

            if (atmWafers.Count >= 2 && freeHands.Count == 0 || waitInWafer == null)
                return false;

            // do not need pass by aligner
            if (waitInWafer.IsAligned)
            {
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafer.currentMod, waitInWafer.currentSlot, ModuleName.EfemRobot, (int)freeHands[0], freeHands[0]) });
                _qeWaitInWafers.Dequeue();
            }
            else
            {
                if (atmWafers.Count == 0)
                {
                    // push one wafer to aligner
                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafer.currentMod, waitInWafer.currentSlot, ModuleName.EfemRobot, (int)freeHands[0], freeHands[0]) });
                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.EfemRobot, (int)freeHands[0], ModuleName.Aligner1, 0, freeHands[0]) });
                    _qeWaitInWafers.Dequeue();
                }
                else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)) && freeHands.Count == 2)
                {
                    // forward another wafer to aligner
                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafer.currentMod, waitInWafer.currentSlot, ModuleName.EfemRobot, (int)freeHands[1], freeHands[1]) });
                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.Aligner1, 0, ModuleName.EfemRobot, (int)freeHands[0], freeHands[0]) });
                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.EfemRobot, (int)freeHands[1], ModuleName.Aligner1, 0, freeHands[1]) });
                    _qeWaitInWafers.Dequeue();
                }
            }

            return _efemSchdActions.Count > 0;
        }

        private bool ExchangeWaferWithLL(ModuleName ll)
        {
            if (IsLLReservedByTM(ll))
                return false;

            var waferStaus = GetLLReadyInOutSlots(ll);
            var atmWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.IsAligned && (ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod))).ToList();
            var freeHands = GetEFEMFreeHand();

            var swapActions = new List<MoveItem>();
            var validHands = new List<Hand>();
            int placeCount = 0;
            if (waferStaus.emptySlot.Count > 0 &&
                 freeHands.Count >= 1 &&
                 atmWafers.Count(wafer => ModuleHelper.IsAligner(wafer.currentMod)) == 1 &&
                (atmWafers.Count(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)) == 0 || waferStaus.emptySlot.Count >= 2))
            {
                var alignerWafer = atmWafers.Where(wafer => ModuleHelper.IsAligner(wafer.currentMod)).First();
                if (CanWaferGotoLL(alignerWafer, ll))
                {
                    alignerWafer.RouteTo(ll, waferStaus.emptySlot[placeCount]);

                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.EfemRobot, (int)freeHands[0], freeHands[0]) });
                    swapActions.Add(new MoveItem(ModuleName.EfemRobot, (int)freeHands[0], ll, waferStaus.emptySlot[placeCount], freeHands[0]));
                    validHands.Add(freeHands[0]);
                    placeCount++;
                }
            }

            var armWafers = atmWafers.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)).ToArray();
            foreach (var wafer in armWafers)
            {
                if (CanWaferGotoLL(wafer, ll) && placeCount < waferStaus.emptySlot.Count)
                {
                    wafer.RouteTo(ll, waferStaus.emptySlot[placeCount]);

                    swapActions.Add(new MoveItem(wafer.currentMod, wafer.currentSlot, ll, waferStaus.emptySlot[placeCount], (Hand)wafer.currentSlot));
                    if (!validHands.Contains((Hand)wafer.currentSlot))
                        validHands.Add((Hand)wafer.currentSlot);

                    placeCount++;
                }
            }

            if (!validHands.Contains(Hand.Blade1) && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)Hand.Blade1) && _efemRobotSingleArmOption != 2)
                validHands.Add(Hand.Blade1);

            if (!validHands.Contains(Hand.Blade2) && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)Hand.Blade2) && _efemRobotSingleArmOption != 1)
                validHands.Add(Hand.Blade2);

            int pickCount = 0;
            var returnActions = new List<MoveItem>();
            foreach (var slot in waferStaus.outSlot)
            {
                if (pickCount < validHands.Count)
                {
                    var outWafer = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == ll && wafer.currentSlot == slot);
                    if (outWafer != null)
                    {
                        outWafer.RouteTo(outWafer.destMod, outWafer.destSlot);

                        swapActions.Add(new MoveItem(ll, waferStaus.outSlot[pickCount], ModuleName.EfemRobot, (int)validHands[pickCount], validHands[pickCount]));
                        returnActions.Add(new MoveItem(ModuleName.EfemRobot, (int)validHands[pickCount], outWafer.destMod, outWafer.destSlot, validHands[pickCount]));
                        pickCount++;
                    }
                }
            }

            if (swapActions.Count > 0)
            {
                _efemSchdActions.Enqueue(swapActions);
            }

            foreach (var action in returnActions)
            {
                _efemSchdActions.Enqueue(new List<MoveItem> { action });
            }

            return _efemSchdActions.Count > 0;
        }

        private bool ExchangeWaferWithFixedSlotLL(ModuleName ll)
        {
            if (IsLLReservedByTM(ll))
                return false;

            var llWaferStatus = GetLLFixedReadyInOutSlots(ll);
            var atmWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.IsAligned && (ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod))).ToList();
            var freeHands = GetEFEMFreeHand();

            var swapActions = new List<MoveItem>();
            var validHands = new List<Hand>();
            int placeCount = 0;
            if (llWaferStatus.eInSlot.Count > 0 &&
                 freeHands.Count >= 1 &&
                 atmWafers.Count(wafer => ModuleHelper.IsAligner(wafer.currentMod)) == 1 &&
                (atmWafers.Count(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)) == 0 || llWaferStatus.eInSlot.Count >= 2))
            {
                var alignerWafer = atmWafers.Where(wafer => ModuleHelper.IsAligner(wafer.currentMod)).First();
                if (CanWaferGotoLL(alignerWafer, ll))
                {
                    alignerWafer.RouteTo(ll, llWaferStatus.eInSlot[placeCount]);

                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.EfemRobot, (int)freeHands[0], freeHands[0]) });
                    swapActions.Add(new MoveItem(ModuleName.EfemRobot, (int)freeHands[0], ll, llWaferStatus.eInSlot[placeCount], freeHands[0]));
                    validHands.Add(freeHands[0]);
                    placeCount++;
                }
            }

            var armWafers = atmWafers.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)).ToArray();
            foreach (var wafer in armWafers)
            {
                if (CanWaferGotoLL(wafer, ll) && placeCount < llWaferStatus.eInSlot.Count)
                {
                    wafer.RouteTo(ll, llWaferStatus.eInSlot[placeCount]);

                    swapActions.Add(new MoveItem(wafer.currentMod, wafer.currentSlot, ll, llWaferStatus.eInSlot[placeCount], (Hand)wafer.currentSlot));
                    if (!validHands.Contains((Hand)wafer.currentSlot))
                        validHands.Add((Hand)wafer.currentSlot);

                    placeCount++;
                }
            }

            if (!validHands.Contains(Hand.Blade1) && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)Hand.Blade1) && _efemRobotSingleArmOption != 2)
                validHands.Add(Hand.Blade1);

            if (!validHands.Contains(Hand.Blade2) && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)Hand.Blade2) && _efemRobotSingleArmOption != 1)
                validHands.Add(Hand.Blade2);

            int pickCount = 0;
            var returnActions = new List<MoveItem>();
            foreach (var slot in llWaferStatus.eOutSlot)
            {
                if (pickCount < validHands.Count)
                {
                    var outWafer = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == ll && wafer.currentSlot == slot);
                    if (outWafer != null)
                    {
                        outWafer.RouteTo(outWafer.destMod, outWafer.destSlot);

                        swapActions.Add(new MoveItem(ll, llWaferStatus.eOutSlot[pickCount], ModuleName.EfemRobot, (int)validHands[pickCount], validHands[pickCount]));
                        returnActions.Add(new MoveItem(ModuleName.EfemRobot, (int)validHands[pickCount], outWafer.destMod, outWafer.destSlot, validHands[pickCount]));
                        pickCount++;
                    }
                }
            }

            if (swapActions.Count > 0)
            {
                _efemSchdActions.Enqueue(swapActions);
            }

            foreach (var action in returnActions)
            {
                _efemSchdActions.Enqueue(new List<MoveItem> { action });
            }

            return _efemSchdActions.Count > 0;
        }

        private void RoutingATMWafers()
        {
            if (_efemSchdActions.Count > 0 || _curEfemAction.Count > 0)
            {
                RunSchdEFEMActions();
                return;
            }

            if (_efemRobotStatus != RState.End)
                return;

            if (_LLSlotInOutOption == LLSlotInOutOpt.AllInAllOut)
            {
                if (_LLASlotNumber == 2)
                {
                    Routing2SlotATMSystem();
                }
                else if (_LLASlotNumber == 4)
                {
                    Routing4SlotATMSystem();
                }
            }
            else
            {
                RoutingFixedSlotATMSystem();
            }
        }

        private void Routing4SlotATMSystem()
        {

            var atmWaferCount = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod)).Count();
            var efemRobotWafers = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)).ToList();
            if (LLInOutPath == SequenceLLInOutPath.AInBOut || LLInOutPath == SequenceLLInOutPath.BInAOut) // don need  check system wafer existence as no blocking risk 
            {
                var inLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLA : ModuleName.LLB;
                var outLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLB : ModuleName.LLA;
                var inLLWaferStatus = GetLLReadyInOutSlots(inLL);
                var outLLWaferStatus = GetLLReadyInOutSlots(outLL);
                if (efemRobotWafers.Count() >= 1)
                {
                    if (inLLWaferStatus.emptySlot.Count >= 2 && !IsLLReservedByTM(inLL)) // wait for in loadlock ready
                    {
                        if (_dictModuleTask[inLL].TimeToReady < 2)
                        {
                            ExchangeWaferWithLL(inLL);
                        }
                    }

                    if ((inLLWaferStatus.emptySlot.Count == 0 || (outLLWaferStatus.outSlot.Count >= 1 && _dictModuleTask[outLL].TimeToReady < 2)) && !IsLLReservedByTM(outLL)) // ready return wafer
                    {
                        ExchangeWaferWithLL(outLL);
                    }
                }
                else
                {
                    if (((outLLWaferStatus.outSlot.Count >= 2 && _dictModuleTask[outLL].TimeToReady < 10) ||
                        (outLLWaferStatus.outSlot.Count == 1 && _dictModuleTask[outLL].TimeToReady < 2)) && !IsLLReservedByTM(outLL))
                    {
                        ExchangeWaferWithLL(outLL);
                    }
                    else if (inLLWaferStatus.emptySlot.Count >= 2)
                    {
                        if (((_dictModuleTask[inLL].TimeToReady > 20 || _dictModuleTask[inLL].Scheduler.IsVac) && atmWaferCount < 2) || atmWaferCount == 0)
                        {
                            ForwardATMWafers(inLL);
                        }
                        else if (atmWaferCount >= 2 && !IsLLReservedByTM(inLL))
                        {
                            ExchangeWaferWithLL(inLL);
                        }
                    }
                }
            }
            else
            {
                RoutingSameLLInOutATMSystem();
            }
        }

        private void Routing2SlotATMSystem()
        {
            var atmWaferCount = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod)).Count();
            var efemRobotWafers = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)).ToList();
            var validHands = (_efemRobotSingleArmOption == 0 ? 2 : 1);
            if (LLInOutPath == SequenceLLInOutPath.AInBOut || LLInOutPath == SequenceLLInOutPath.BInAOut) // don need  check system wafer existence as no blocking risk 
            {
                var inLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLA : ModuleName.LLB;
                var outLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLB : ModuleName.LLA;
                var inLLWaferStatus = GetLLReadyInOutSlots(inLL);
                var outLLWaferStatus = GetLLReadyInOutSlots(outLL);
                var inLLModule = _dictModuleTask[inLL] as LoadlockTask;
                var outLLModule = _dictModuleTask[outLL] as LoadlockTask;
                var needAlign = _lstProcessJobs.Exists(pj => pj.State == EnumProcessJobState.Processing && IsSequenceNeedAlign(pj.Sequence));

                // return wafer while out LL ready or cooling state
                //if ((outLLWaferStatus.outSlot.Count > 0 && outLLWaferStatus.outSlot.Count <= (validHands - efemRobotWafers.Count)) && outLLModule.ReayForEfemInTime(10))
                if (outLLWaferStatus.outSlot.Count > 0 && outLLModule.ReayForEfemInTime(10))
                {
                    if (ExchangeWaferWithLL(outLL))
                    {
                        LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, outLL, $"{outLL} will be ready in {outLLModule.TimeToReady}");
                        return;
                    }
                }

                if (needAlign)
                {
                    if (atmWaferCount == 0 ||
                        (inLLModule.ReayForEfemInTime(20) && Math.Min(validHands, inLLWaferStatus.emptySlot.Count) > atmWaferCount))
                    {
                        if (ForwardATMWafers(inLL))
                        {
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inLL, $"{inLL} will be ready in {inLLModule.TimeToReady}");
                            return;
                        }
                    }
                }
                else
                {
                    if (inLLModule.ReayForEfemInTime(20) && inLLWaferStatus.emptySlot.Count > efemRobotWafers.Count && ((outLLModule.TimeToReady - inLLModule.TimeToReady > 10) || !outLLModule.ReayForEfemInTime(30) || outLLWaferStatus.emptySlot.Count < efemRobotWafers.Count))
                    {
                        if (ForwardATMWafers(inLL))
                        {
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inLL, $"{inLL} will be ready in {inLLModule.TimeToReady}");
                            return;
                        }
                    }
                }

                if (inLLModule.ReayForEfemInTime(5) &&
                    (Math.Min(validHands, inLLWaferStatus.emptySlot.Count) == atmWaferCount || _qeWaitInWafers.Count == 0))
                {
                    if (ExchangeWaferWithLL(inLL))
                    {
                        LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inLL, $"{inLL} will be ready in {inLLModule.TimeToReady}");
                        return;
                    }
                }
            }
            else
            {
                RoutingSameLLInOutATMSystem();
            }
        }

        private void RoutingFixedSlotATMSystem()
        {
            var atmWaferCount = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod)).Count();
            var lls = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && mod.Value.Scheduler.IsOnline);

            if (atmWaferCount == 0 || (_efemRobotSingleArmOption == 0 && atmWaferCount == 1))
            {
                foreach (var ll in lls)
                {
                    if (ForwardATMWafers(ll.Key))
                        return;
                }
            }

            // try to match a ll swap action
            var readyReturnLL = lls.Where(ll => (GetLLFixedReadyInOutSlots(ll.Key).eOutSlot.Count + GetLLFixedReadyInOutSlots(ll.Key).eInSlot.Count > 0) && ll.Value.TimeToReady <= 10)
                                            .OrderByDescending(ll => GetLLFixedReadyInOutSlots(ll.Key).eInSlot.Count + GetLLFixedReadyInOutSlots(ll.Key).eOutSlot.Count)
                                            .OrderBy(ll => ll.Value.TimeToReady);

            foreach (var ll in readyReturnLL)
            {
                if (ExchangeWaferWithFixedSlotLL(ll.Key))
                    return;
            }
        }

        private void RoutingSameLLInOutATMSystem()
        {
            var atmWaferCount = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod)).Count();
            var vacWaferCount = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod) || ModuleHelper.IsLoadLock(task.currentMod)).Count();
            var preferWaferVacCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline).Count() +
                                      (LLInOutPath == SequenceLLInOutPath.AInAOut ? _LLASlotNumber / 2 : (LLInOutPath == SequenceLLInOutPath.BInBOut ? _LLBSlotNumber / 2 : _LLASlotNumber));
            var inOutIndicator = vacWaferCount - preferWaferVacCount;
            if (inOutIndicator < 0)
            {
                // ready to push in 
                var readyLLs = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                        ((mod.Key == ModuleName.LLA && LLInOutPath != SequenceLLInOutPath.BInBOut) || (mod.Key == ModuleName.LLB && LLInOutPath != SequenceLLInOutPath.AInAOut)) &&
                        mod.Value.TimeToReady <= 10 &&
                        !IsLLReservedByTM(mod.Key) &&
                        GetLLReadyInOutSlots(mod.Key).emptySlot.Count >= 1).
                        OrderBy(mod => mod.Value.TimeToReady).ToList();

                if (atmWaferCount >= 1)
                {
                    foreach (var ll in readyLLs)
                    {
                        if (ExchangeWaferWithLL(ll.Key))
                            return;
                    }
                }

                // forward wafer to system
                if (atmWaferCount < 2)
                {
                    var targetLL = readyLLs.Count > 0 ? readyLLs.First().Key : (LLInOutPath == SequenceLLInOutPath.BInBOut ? ModuleName.LLB : ModuleName.LLA);
                    ForwardATMWafers(targetLL);
                }

                if (_efemSchdActions.Count == 0)
                {
                    var readyReturnLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                            ((mod.Key == ModuleName.LLA && LLInOutPath != SequenceLLInOutPath.BInBOut) || (mod.Key == ModuleName.LLB && LLInOutPath != SequenceLLInOutPath.AInAOut)) &&
                            mod.Value.TimeToReady <= 5 &&
                            !IsLLReservedByTM(mod.Key) &&
                            GetLLReadyInOutSlots(mod.Key).outSlot.Count >= 1).
                            OrderByDescending(mod => GetLLReadyInOutSlots(mod.Key).outSlot.Count).ToList();

                    foreach (var ll in readyReturnLL)
                    {
                        if (ExchangeWaferWithLL(readyReturnLL.First().Key))
                            return;
                    }
                }
            }
            else
            {
                // ready double return LL
                var readyDoubleReturnLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                        mod.Value.TimeToReady < 10 &&
                        !IsLLReservedByTM(mod.Key) &&
                        GetLLReadyInOutSlots(mod.Key).outSlot.Count > 1).
                        OrderBy(mod => mod.Value.TimeToReady).ToList();


                foreach (var ll in readyDoubleReturnLL)
                {
                    if (ExchangeWaferWithLL(ll.Key))
                        return;
                }

                // ready single return LL
                var readySingleReturnLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                        mod.Value.TimeToReady < 2 &&
                        !IsLLReservedByTM(mod.Key) &&
                        GetLLReadyInOutSlots(mod.Key).outSlot.Count == 1).
                        OrderBy(mod => mod.Value.TimeToReady).ToList();

                foreach (var ll in readySingleReturnLL)
                {
                    if (ExchangeWaferWithLL(ll.Key))
                        return;
                }

                if (atmWaferCount == 0)
                {
                    // ready to push in 
                    var readyLLs = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                            ((mod.Key != ModuleName.LLA && LLInOutPath == SequenceLLInOutPath.BInBOut) || (mod.Key != ModuleName.LLB && LLInOutPath == SequenceLLInOutPath.AInAOut)) &&
                            mod.Value.TimeToReady <= 10 &&
                            !IsLLReservedByTM(mod.Key) &&
                            GetLLReadyInOutSlots(mod.Key).emptySlot.Count > 1).
                            OrderBy(mod => mod.Value.TimeToReady).ToList();

                    foreach (var ll in readyLLs)
                    {
                        if (ForwardATMWafers(ll.Key))
                            return;
                    }
                }
            }
        }

        private bool isReturnActionsDone(List<MoveItem> items)
        {
            foreach (var item in items)
            {
                if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
                    return false;
            }
            return true;
        }


        private bool IsMovingActionsDone(List<MoveItem> actions)
        {
            bool CheckWaferExistence(ModuleName mod, int slot)
            {
                return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
            }

            if (actions.Count == 1)
            {
                if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
                    !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
                    return false;
            }
            else
            {
                // initialize all the wafer existance before move
                var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
                foreach (var ac in actions)
                {
                    var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
                    var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);

                    if (!slotWafers.ContainsKey(scrSlot))
                    {
                        slotWafers[scrSlot] = true;
                    }

                    if (!slotWafers.ContainsKey(destSlot))
                    {
                        slotWafers[destSlot] = false;
                    }
                }

                // simulate moved result
                foreach (var ac in actions)
                {
                    var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
                    var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);

                    if (!slotWafers[scrSlot])
                    {
                        LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
                    }
                    else
                    {
                        slotWafers[scrSlot] = false;
                    }

                    if (slotWafers[destSlot])
                    {
                        LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]}  has a wafer");
                    }
                    else
                    {
                        slotWafers[destSlot] = true;
                    }
                }

                foreach (var slot in slotWafers)
                {
                    if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
                        return false;
                }
            }

            return true;
        }

        private bool IsLLReservedByTM(ModuleName ll)
        {
            foreach (var item in _curTmAction)
            {
                if (item.DestinationModule == ll || item.SourceModule == ll)
                    return true;
            }

            foreach (var action in _tmSchdActions)
            {
                foreach (var item in action)
                {
                    if (item.DestinationModule == ll || item.SourceModule == ll)
                        return true;
                }
            }

            return false;
        }

        private bool IsLLReservedByEFEM(ModuleName ll)
        {
            foreach (var item in _curEfemAction)
            {
                if (item.DestinationModule == ll || item.SourceModule == ll)
                    return true;
            }

            foreach (var action in _efemSchdActions)
            {
                foreach (var item in action)
                {
                    if (item.DestinationModule == ll || item.SourceModule == ll)
                        return true;
                }
            }

            return false;
        }

        private void RunSchdEFEMActions()
        {
            var efemRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot) as SchedulerEfemRobot;
            if (efemRobot == null || !efemRobot.IsAvailable)
                return;

            if (_dictModuleTask[ModuleName.EfemRobot].IsIdle)
            {
                if (_efemSchdActions.Count > 0)
                {
                    if (_curEfemAction.Count == 0 || IsMovingActionsDone(_curEfemAction))
                    {
                        var nextActions = _efemSchdActions.First();
                        if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
                            return;

                        var nextModule = nextActions.First().Module;

                        if (ModuleHelper.IsLoadLock(nextModule) && !_dictModuleTask[nextModule].Scheduler.IsAvailable)
                            return;

                        _curEfemAction = _efemSchdActions.Dequeue();
                        foreach (var action in _curEfemAction)
                        {
                            var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
                            waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
                            //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
                            if (ModuleHelper.IsLoadPort(action.SourceModule))
                            {
                                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(action.SourceModule);
                                if (currentControlJob != null)
                                {
                                    _faCallback.JobWaferStart(currentControlJob, action.SourceSlot);
                                }
                            }
                            if (ModuleHelper.IsLoadPort(action.DestinationModule))
                            {
                                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(action.DestinationModule);
                                if (currentControlJob != null)
                                {
                                    _faCallback.JobWaferEnd(currentControlJob, action.SourceSlot);
                                }
                            }
                            //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
                        }

                        (_dictModuleTask[ModuleName.EfemRobot].Scheduler as SchedulerEfemRobot).PostMoveItems(_curEfemAction.ToArray());
                    }
                }
                else if (_curEfemAction.Count >= 0 && IsMovingActionsDone(_curEfemAction)) // all scheduled actions done
                {
                    _curEfemAction.Clear();
                }
            }
        }

        private void RunSchdTMActions()
        {
            if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
            {
                if (_tmSchdActions.Count > 0)
                {
                    if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
                    {
                        var nextActions = _tmSchdActions.First();
                        if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
                            return;

                        if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle)  /// wait PMTask status update to idle
                            return;

                        _curTmAction = _tmSchdActions.Dequeue();
                        foreach (var action in _curTmAction)
                        {
                            var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
                            waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
                        }

                        (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerTMRobot).SendMoveItems(_curTmAction.ToArray());
                    }
                }
                else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
                {
                    _curTmAction.Clear();
                }
            }
        }

        private int TimeForNextModuleReady(WaferTask task)
        {
            if (ModuleHelper.IsPm(task.destMod) && (ModuleHelper.IsLoadLock(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod)))
                return _dictModuleTask[task.destMod].TimeToReady;

            var llbWaferStatus = GetLLReadyInOutSlots(ModuleName.LLB);
            var llaWaferStatus = GetLLReadyInOutSlots(ModuleName.LLA);

            if (ModuleHelper.IsLoadPort(task.destMod) && (ModuleHelper.IsPm(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod)))
            {
                if (task.llInOutPath == SequenceLLInOutPath.AInBOut || task.llInOutPath == SequenceLLInOutPath.BInBOut)
                {
                    if (llbWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLB].TimeToReady;
                    }
                }
                else if (task.llInOutPath == SequenceLLInOutPath.BInAOut || task.llInOutPath == SequenceLLInOutPath.AInAOut)
                {
                    if (llaWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLA].TimeToReady;
                    }
                }
                else if (task.llInOutPath == SequenceLLInOutPath.DInDOut)
                {
                    if (llaWaferStatus.emptySlot.Count > 0 && llbWaferStatus.emptySlot.Count > 0)
                    {
                        if (_dictModuleTask[ModuleName.LLA].TimeToReady == _dictModuleTask[ModuleName.LLB].TimeToReady)
                        {
                            return _dictModuleTask[ModuleName.LLA].TimeToReady;
                        }
                        else
                        {
                            return Math.Min(_dictModuleTask[ModuleName.LLA].TimeToReady, _dictModuleTask[ModuleName.LLB].TimeToReady);
                        }
                    }
                    else if (llaWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLA].TimeToReady;
                    }
                    else if (llbWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLB].TimeToReady;
                    }
                }
            }
            else if (ModuleHelper.IsPm(task.destMod) && (ModuleHelper.IsLoadLock(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod)))
            {
                if (_lstWaferTasks.Find(wafer => wafer.currentMod == task.destMod || wafer.routedMod == task.destMod) == null)
                {
                    return _dictModuleTask[task.destMod].TimeToReady;
                }
            }

            return int.MaxValue / 2;
        }

        List<Hand> GetTMValidFreeHands(List<WaferTask> robotWafers, List<MoveItem> swapActions)
        {
            var hands = new List<Hand>();
            for (int i = 0; i < 2; i++)
            {
                if (_tmRobotSingleArmOption == 0 || _tmRobotSingleArmOption == i + 1)
                {
                    if ((!robotWafers.Exists(wafer => wafer.currentSlot == i) ||
                            (robotWafers.Exists(wafer => wafer.currentSlot == i) &&
                              swapActions.Exists(item => item.SourceModule == ModuleName.TMRobot && item.SourceSlot == i))) &&
                        !swapActions.Exists(item => item.DestinationModule == ModuleName.TMRobot && item.DestinationSlot == i))
                        hands.Add((Hand)i);
                }
            }

            return hands;
        }

        (ModuleName llPath, List<MoveItem> swapActions) FindBestLLSwapPlan(ModuleName ll, List<WaferTask> robotWafers)
        {
            ModuleName path = ll == ModuleName.System ? ModuleName.System : ll;
            List<ModuleName> lls = ll == ModuleName.System ? new List<ModuleName> { ModuleName.LLA, ModuleName.LLB } : new List<ModuleName> { ll };
            List<MoveItem> actions = new List<MoveItem>();

            Dictionary<ModuleName, List<MoveItem>> llSwapActions = new Dictionary<ModuleName, List<MoveItem>>();
            foreach (var loadlock in lls)
            {
                llSwapActions[loadlock] = new List<MoveItem>();

                if (IsLLReservedByEFEM(loadlock))
                    continue;

                var llWaferStatus = GetLLReadyInOutSlots(loadlock);
                foreach (var wafer in robotWafers)
                {
                    if (_dictModuleTask[loadlock].TimeToReady == 0 && !IsLLReservedByEFEM(loadlock) && CanWaferGotoLL(wafer, loadlock) && llWaferStatus.emptySlot.Count > llSwapActions[loadlock].Count)
                    {
                        llSwapActions[loadlock].Add(new MoveItem(ModuleName.TMRobot, wafer.currentSlot, loadlock, llWaferStatus.emptySlot[llSwapActions[loadlock].Count], (Hand)wafer.currentSlot));
                    }
                }

                int prePickTime = 20;
                int prePickCount = 0;
                var hands = GetTMValidFreeHands(robotWafers, llSwapActions[loadlock]);
                foreach (var slot in llWaferStatus.inSlot)
                {
                    var wafer = _lstWaferTasks.Find(task => task.currentMod == loadlock && task.currentSlot == slot);
                    if (wafer != null && _dictModuleTask[wafer.destMod].TimeToReady <= prePickTime && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && hands.Count > prePickCount)
                    {
                        if (_lstWaferTasks.Exists(task => task.currentMod == wafer.destMod))
                        {
                            if (hands.Count == 2 && prePickCount == 0 && (_dictModuleTask.Count(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.TimeToReady < prePickTime && WaferManager.Instance.CheckNoWafer(mod.Key, 0)) == 0 || llWaferStatus.inSlot.Count == 1))
                            {
                                llSwapActions[loadlock].Add(new MoveItem(loadlock, slot, ModuleName.TMRobot, (int)hands[prePickCount], hands[prePickCount]));
                                prePickCount++;
                                break;
                            }
                        }
                        else
                        {
                            llSwapActions[loadlock].Add(new MoveItem(loadlock, slot, ModuleName.TMRobot, (int)hands[prePickCount], hands[prePickCount]));
                            prePickCount++;
                        }
                    }
                }
            }

            var validateActions = llSwapActions.Where(item => item.Value.Count > 0).ToDictionary(k => k.Key, v => v.Value);
            if (validateActions.Count == 1)
            {
                (path, actions) = (validateActions.First().Key, validateActions.First().Value);
            }
            else if (validateActions.Count == 2)
            {
                var sortedActions = validateActions.OrderByDescending(item => item.Value.Count + (_dictModuleTask[item.Key].Scheduler.IsVac ? 2 : 0)).ToDictionary(k => k.Key, v => v.Value);
                (path, actions) = (sortedActions.First().Key, sortedActions.First().Value);
            }

            return (path, actions);
        }

        (List<WaferTask> pmWafers, ModuleName destLL, List<MoveItem> swapAction) FindBestReturnWafersPlan(Hand[] freeHands)
        {
            Dictionary<ModuleName, List<WaferTask>> returnWafers = new Dictionary<ModuleName, List<WaferTask>>();
            Dictionary<ModuleName, List<MoveItem>> llSwapActions = new Dictionary<ModuleName, List<MoveItem>>();
            Dictionary<ModuleName, int> llValues = new Dictionary<ModuleName, int>();
            foreach (var ll in new List<ModuleName> { ModuleName.LLA, ModuleName.LLB })
            {
                var llWaferStatus = GetLLReadyInOutSlots(ll);
                returnWafers[ll] = new List<WaferTask>();
                llSwapActions[ll] = new List<MoveItem>();
                llValues[ll] = 0;

                if (IsLLReservedByEFEM(ll))
                    continue;

                var readyReturnWafers = _lstWaferTasks.Where(wafer => ModuleHelper.IsPm(wafer.currentMod) &&
                                                                ModuleHelper.IsLoadPort(wafer.destMod) &&
                                                                wafer.movingStatus == RState.End &&
                                                                _dictModuleTask[wafer.currentMod].TimeToReady <= 2 &&
                                                                CanWaferGotoLL(wafer, ll)).Take(Math.Min(freeHands.Length, llWaferStatus.emptySlot.Count)).ToList();

                int prePickTime = 10 * llSwapActions[ll].Count;
                int handIndex = 0;
                if (_dictModuleTask[ll].TimeToReady <= prePickTime)
                {
                    foreach (var wafer in readyReturnWafers)
                    {
                        if (handIndex < freeHands.Length)
                        {
                            returnWafers[ll].Add(wafer);
                            llSwapActions[ll].Add(new MoveItem(ModuleName.TMRobot, (int)freeHands[handIndex], ll, llWaferStatus.emptySlot[handIndex], freeHands[handIndex]));
                            handIndex++;
                        }
                    }

                    int prePickCount = 0;
                    handIndex = 0;
                    foreach (var slot in llWaferStatus.inSlot)
                    {
                        var wafer = _lstWaferTasks.Find(task => task.currentMod == ll && task.currentSlot == slot);
                        if (wafer != null && _dictModuleTask[wafer.destMod].TimeToReady <= prePickTime && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && freeHands.Length > prePickCount)
                        {
                            if (_lstWaferTasks.Exists(task => task.currentMod == wafer.destMod))
                            {
                                if (freeHands.Length == 2 && prePickCount == 0 && (_dictModuleTask.Count(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.TimeToReady <= prePickTime && WaferManager.Instance.CheckNoWafer(mod.Key, 0)) == 0 || llWaferStatus.inSlot.Count == 1))
                                {
                                    llSwapActions[ll].Add(new MoveItem(ll, slot, ModuleName.TMRobot, (int)freeHands[prePickCount], freeHands[prePickCount]));
                                    prePickCount++;
                                    break;
                                }
                            }
                            else
                            {
                                llSwapActions[ll].Add(new MoveItem(ll, slot, ModuleName.TMRobot, (int)freeHands[prePickCount], freeHands[prePickCount]));
                                prePickCount++;
                            }
                        }
                    }

                    llValues[ll] = returnWafers[ll].Count * 2 + llSwapActions[ll].Count + (_dictModuleTask[ll].Scheduler.IsVac && returnWafers[ll].Count > 0 ? 2 : 0);
                }
            }

            var preferLL = llValues.OrderByDescending(v => v.Value).First().Key;
            return (returnWafers[preferLL], preferLL, llSwapActions[preferLL]);
        }

        ModuleName FindTheBestMovePathWithFixSlot(IEnumerable<KeyValuePair<ModuleName, ModuleTask>> lls, List<WaferTask> pmWafers)
        {
            Dictionary<ModuleName, int> moveValues = new Dictionary<ModuleName, int>();
            foreach (var ll in lls)
            {
                var llWaferStatus = GetLLFixedReadyInOutSlots(ll.Key);
                moveValues[ll.Key] = Math.Min(pmWafers.Where(wt => CanWaferGotoLL(wt, ll.Key)).Count(), GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count) + llWaferStatus.tOutSlot.Count;
            }

            var preferLL = moveValues.OrderByDescending(v => v.Value).First().Key;
            return moveValues[preferLL] > 0 ? preferLL : ModuleName.System;
        }

        void RoutingTMSwapActions(List<MoveItem> actions)
        {
            foreach (var action in actions)
            {
                if (ModuleHelper.IsTMRobot(action.SourceModule))
                {
                    var waferTask = _lstWaferTasks.Find(wafer => wafer.currentMod == ModuleName.TMRobot && wafer.currentSlot == action.SourceSlot);
                    waferTask.RouteTo(action.DestinationModule, action.DestinationSlot);
                }
                else
                {
                    var waferTask = _lstWaferTasks.Find(wafer => wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
                    waferTask.RouteTo(action.DestinationModule, action.DestinationSlot);
                }
            }
        }

        private bool ManaulReturnPMWafer()
        {
            var mReturnWafer = _qeReturnWafers.Peek();
            if (ModuleHelper.IsPm((ModuleName)mReturnWafer.Station))
            {
                var hands = GetTMValidFreeHands(_lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList(), new List<MoveItem>());
                var waferTask = _lstWaferTasks.Find(wt => wt.currentMod == (ModuleName)mReturnWafer.Station && wt.waferId == mReturnWafer.InnerId);
                if (waferTask != null && hands.Count > 0)
                {
                    waferTask.Return();
                    var outLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && CanWaferGotoLL(waferTask, mod.Key) && GetLLReadyInOutSlots(mod.Key).emptySlot.Count > 0 && !IsLLReservedByEFEM(mod.Key));
                    if (outLL.Count() > 0)
                    {
                        var slot = GetLLReadyInOutSlots(outLL.First().Key).emptySlot.First();
                        waferTask.RouteTo(outLL.First().Key, slot);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waferTask.currentMod, 0, ModuleName.TMRobot, (int)hands.First(), hands.First()) });
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hands.First(), outLL.First().Key, slot, hands.First()) });
                        _qeReturnWafers.Dequeue();
                        return true;
                    }
                }
            }

            return false;
        }

        private void RoutingVacWafers()
        {
            if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
            {
                RunSchdTMActions();
                return;
            }

            if (_tmRobotStatus == RState.End)
            {
                // handle manual return wafer if exist
                if (_qeReturnWafers.Count > 0)
                {
                    if (ManaulReturnPMWafer())
                        return;
                }

                if (_LLSlotInOutOption == LLSlotInOutOpt.AllInAllOut)
                {
                    if (_LLASlotNumber == 2)
                    {
                        Routing2SlotVacSystem();
                    }
                    else if (_LLASlotNumber == 4)
                    {
                        Routing4SlotVacSystem();
                    }
                }
                else
                {
                    RoutingFixedSlotVacSystem();
                }
            }
        }

        private void Routing2SlotVacSystem()
        {
            var robotWafers = _lstWaferTasks.Where(wafer => ModuleHelper.IsTMRobot(wafer.currentMod)).OrderBy(wafer => TimeForNextModuleReady(wafer)).ToList();
            var freeHands = GetTMFreeHand();
            if (LLInOutPath == SequenceLLInOutPath.AInBOut || LLInOutPath == SequenceLLInOutPath.BInAOut)
            {
                var inLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLA : ModuleName.LLB;
                var outLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLB : ModuleName.LLA;
                var inLLWaferStatus = GetLLReadyInOutSlots(inLL);
                var outLLWaferStatus = GetLLReadyInOutSlots(outLL);
                var inLLModule = _dictModuleTask[inLL] as LoadlockTask;
                var outLLModule = _dictModuleTask[outLL] as LoadlockTask;

                if (robotWafers.Count == 0)
                {
                    #region special routing pattern
                    if (_specialRoutingPattern != SpecialRoutingPattern.Disable)
                    {
                        if (_specialRoutingPattern == SpecialRoutingPattern.LongTimeRecipe && freeHands.Count == 2)
                        {
                            if (_dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && !mod.Value.HasWafer).Count() == 0)
                            {
                                var readyOutPMs = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.HasWafer && mod.Value.TimeToReady < 25).OrderBy(mod => mod.Value.TimeToReady).ToList();
                                if (readyOutPMs.Count > 0 && inLLModule.ReayForTMInTime(5) && _lstWaferTasks.Exists(wt => wt.currentMod == inLL && readyOutPMs.Exists(kv => kv.Key == wt.destMod)))
                                {
                                    var llWafer = _lstWaferTasks.Find(wt => wt.currentMod == inLL && wt.destMod == readyOutPMs.First().Key);
                                    if (llWafer != null)
                                    {
                                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(inLL, llWafer.currentSlot, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });

                                        var pmSwap = new List<MoveItem>
                                        {   new MoveItem(readyOutPMs.First().Key, 0, ModuleName.TMRobot, (int)freeHands[1], freeHands[1]),
                                            new MoveItem(ModuleName.TMRobot, (int)freeHands[0], readyOutPMs.First().Key, 0, freeHands[0])
                                        };

                                        _tmSchdActions.Enqueue(pmSwap);

                                        if (outLLModule.ReayForTMInTime(25) && outLLWaferStatus.emptySlot.Count > 0)
                                        {
                                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHands[1], outLL, outLLWaferStatus.emptySlot[0], freeHands[1]) });
                                        }
                                    }
                                }

                                return;
                            }
                        }
                    }

                    #endregion


                    if (_dictModuleTask.Count(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.HasWafer && mod.Value.TimeToReady < 5) > 0 && outLLModule.ReayForTMInTime(30) && outLLWaferStatus.emptySlot.Count > 0)
                    {
                        var readyOutPMs = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.HasWafer && mod.Value.TimeToReady < 25).OrderBy(mod => mod.Value.TimeToReady).ToList();
                        var placeActions = new List<MoveItem>();
                        int pickCount = 0;
                        foreach (var pm in readyOutPMs)
                        {
                            var pmWafer = _lstWaferTasks.Find(wt => wt.currentMod == pm.Key);
                            if (pmWafer != null && pickCount < freeHands.Count && pickCount < outLLWaferStatus.emptySlot.Count)
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(pm.Key, 0, ModuleName.TMRobot, (int)freeHands[pickCount], freeHands[pickCount]) });
                                placeActions.Add(new MoveItem(ModuleName.TMRobot, (int)freeHands[pickCount], outLL, outLLWaferStatus.emptySlot[pickCount], freeHands[pickCount]));
                                pickCount++;
                                LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, pm.Key, $"{pm.Key} will be ready in {pm.Value.TimeToReady} seconds");
                            }
                        }

                        if (pickCount > 0)
                        {
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, outLL, $"{outLL} will be ready in {outLLModule.TimeToReady} seconds");
                            _tmSchdActions.Enqueue(placeActions);
                            return;
                        }
                    }

                    // push wafer from LL to PM and avoid blocking two robot arms
                    if (inLLModule.ReayForTMInTime(10) && inLLWaferStatus.inSlot.Count > 0)
                    {
                        var pickActions = new List<MoveItem>();
                        var inLLWafers = _lstWaferTasks.FindAll(wt => wt.currentMod == inLL).ToList();
                        if (inLLWaferStatus.inSlot.Count < 2 || inLLWafers.Exists(wt => !_dictModuleTask[wt.destMod].HasWafer && _dictModuleTask[wt.destMod].TimeToReady < 20))
                        {
                            for (int i = 0; i < Math.Min(inLLWaferStatus.inSlot.Count, freeHands.Count); i++)
                            {
                                pickActions.Add(new MoveItem(inLL, inLLWaferStatus.inSlot[i], ModuleName.TMRobot, (int)freeHands[i], freeHands[i]));
                            }
                        }

                        if (pickActions.Count > 0)
                        {
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inLL, $"{inLL} will be ready in {inLLModule.TimeToReady} seconds");
                            _tmSchdActions.Enqueue(pickActions);
                            return;
                        }
                    }
                }
                else
                {
                    #region special routing pattern
                    if (_specialRoutingPattern != SpecialRoutingPattern.Disable)
                    {
                        if (_specialRoutingPattern == SpecialRoutingPattern.LongTimeRecipe && _tmRobotSingleArmOption == 0)
                        {
                            if (_dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && !mod.Value.HasWafer).Count() == 0)
                            {
                                if (ModuleHelper.IsLoadPort(robotWafers[0].destMod))
                                {
                                    if (outLLModule.ReayForTMInTime(10) && outLLWaferStatus.emptySlot.Count > 0)
                                    {
                                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, outLL, outLLWaferStatus.emptySlot[0], (Hand)(robotWafers[0].currentSlot)) });
                                    }
                                }

                                return;
                            }
                        }
                    }

                    #endregion

                    foreach (var robotWafer in robotWafers)
                    {
                        if (ModuleHelper.IsPm(robotWafer.destMod))
                        {
                            if (_dictModuleTask[robotWafer.destMod].TimeToReady < 5)
                            {
                                if (_dictModuleTask[robotWafer.destMod].HasWafer)
                                {
                                    // PM Swap
                                    if (freeHands.Count > 0)
                                    {
                                        var pmActions = new List<MoveItem>
                                        {
                                            new MoveItem(robotWafer.destMod, 0, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]),
                                            new MoveItem(ModuleName.TMRobot, robotWafer.currentSlot, robotWafer.destMod, 0, (Hand)robotWafer.currentSlot)
                                        };
                                        _tmSchdActions.Enqueue(pmActions);
                                        LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, robotWafer.destMod, $"{robotWafer.destMod} will be ready in {_dictModuleTask[robotWafer.destMod].TimeToReady} seconds");
                                        return;
                                    }
                                }
                                else
                                {
                                    LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, robotWafer.destMod, $"{robotWafer.destMod} will be ready in {_dictModuleTask[robotWafer.destMod].TimeToReady} seconds");
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafer.currentSlot, robotWafer.destMod, 0, (Hand)robotWafer.currentSlot) });
                                    return;
                                }
                            }
                            else if (_dictModuleTask[robotWafer.destMod].TimeToReady > 20 && freeHands.Count > 0)
                            {
                                if (outLLWaferStatus.emptySlot.Count > 0 && outLLModule.ReayForTMInTime(10) && _lstWaferTasks.Count(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)) > 0)
                                {
                                    // try to return one wafer from PM to LL
                                    var readyOutWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod));
                                    if (readyOutWafer != null && _dictModuleTask[readyOutWafer.currentMod].TimeToReady < 5)
                                    {
                                        LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, readyOutWafer.currentMod, $"{readyOutWafer.currentMod} will be ready in {_dictModuleTask[readyOutWafer.currentMod].TimeToReady} seconds");
                                        LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, outLL, $"{outLL} will be ready in {outLLModule.TimeToReady} seconds");
                                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyOutWafer.currentMod, 0, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });
                                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHands[0], outLL, outLLWaferStatus.emptySlot[0], freeHands[0]) });
                                        return;
                                    }
                                }

                                if (inLLModule.ReayForTMInTime(5) && inLLWaferStatus.inSlot.Count > 0)
                                {
                                    var inLLWafers = _lstWaferTasks.FindAll(wt => wt.currentMod == inLL).OrderBy(wt => _dictModuleTask[wt.destMod].TimeToReady);
                                    foreach (var inWafer in inLLWafers)
                                    {
                                        if (!_dictModuleTask[inWafer.destMod].HasWafer && _dictModuleTask[inWafer.destMod].TimeToReady < 10)
                                        {
                                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inWafer.destMod, $"{inWafer.destMod} will be ready in {_dictModuleTask[inWafer.destMod].TimeToReady} seconds");
                                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inLL, $"{inLL} will be ready in {inLLModule.TimeToReady} seconds");
                                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(inLL, inWafer.currentSlot, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });
                                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHands[0], inWafer.destMod, 0, freeHands[0]) });
                                            return;
                                        }
                                    }
                                }
                            }
                        }
                        else
                        {
                            if (freeHands.Count > 0 &&
                                outLLWaferStatus.emptySlot.Count == 2 &&
                                outLLModule.ReayForTMInTime(10) &&
                                _lstWaferTasks.Count(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)) > 0)
                            {
                                // try to get one wafer from PM, and match a double place next time
                                var readyOutWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod));
                                if (readyOutWafer != null && _dictModuleTask[readyOutWafer.currentMod].TimeToReady < 5)
                                {
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyOutWafer.currentMod, 0, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });
                                    return;
                                }
                            }

                            if (outLLModule.ReayForTMInTime(5))
                            {
                                // try match a double place
                                if (robotWafers.Count == 2 && robotWafers.All(wt => ModuleHelper.IsLoadPort(wt.destMod)) && outLLWaferStatus.emptySlot.Count == 2)
                                {
                                    var doublePlace = new List<MoveItem>
                                    {
                                        new MoveItem(ModuleName.TMRobot, 0, outLL, 0, Hand.Blade1),
                                        new MoveItem(ModuleName.TMRobot, 1, outLL, 1, Hand.Blade2)
                                    };

                                    LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, outLL, $"{outLL} will be ready in {outLLModule.TimeToReady} seconds");
                                    _tmSchdActions.Enqueue(doublePlace);
                                    return;
                                }

                                if (outLLWaferStatus.emptySlot.Count > 0)
                                {
                                    LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, outLL, $"{outLL} will be ready in {outLLModule.TimeToReady} seconds");
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafer.currentSlot, outLL, outLLWaferStatus.emptySlot[0], (Hand)robotWafer.currentSlot) });
                                    return;
                                }
                            }
                        }
                    }

                    if (freeHands.Count == 0)
                        return;

                    // try to push one wafer in pm
                    if (inLLWaferStatus.inSlot.Count == 1 && inLLModule.ReayForTMInTime(5))
                    {
                        var inWafer = _lstWaferTasks.Find(wt => wt.currentMod == inLL && wt.currentSlot == inLLWaferStatus.inSlot.First());
                        if (inWafer != null && !_dictModuleTask[inWafer.destMod].HasWafer && _dictModuleTask[inWafer.destMod].TimeToReady < 20)
                        {
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inWafer.destMod, $"{inWafer.destMod} will be ready in {_dictModuleTask[inWafer.destMod].TimeToReady} seconds");
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, inLL, $"{inLL} will be ready in {inLLModule.TimeToReady} seconds");
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(inLL, inLLWaferStatus.inSlot.First(), ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHands[0], inWafer.destMod, 0, freeHands[0]) });
                            return;
                        }
                    }


                    // try to return one wafer
                    if (outLLModule.ReayForTMInTime(15) && outLLWaferStatus.emptySlot.Count > 0)
                    {
                        var readyReturnPMs = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.HasWafer && mod.Value.TimeToReady < 5).OrderBy(mod => mod.Value.TimeToReady).ToList();
                        if (readyReturnPMs.Count > 0)
                        {
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, readyReturnPMs.First().Key, $"{readyReturnPMs.First().Key} will be ready in {readyReturnPMs.First().Value.TimeToReady} seconds");
                            LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, outLL, $"{outLL} will be ready in {outLLModule.TimeToReady} seconds");
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnPMs.First().Key, 0, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHands[0], outLL, outLLWaferStatus.emptySlot.First(), freeHands[0]) });
                            return;
                        }
                    }
                }
            }
            else
            {
                if (robotWafers.Count == 2)
                {
                    foreach (var wafer in robotWafers)
                    {
                        if (wafer.movingStatus == RState.End &&
                            ModuleHelper.IsPm(wafer.destMod) &&
                            _dictModuleTask[wafer.destMod].TimeToReady == 0 &&
                            !_lstWaferTasks.Exists(waferT => waferT.currentMod == wafer.destMod) &&
                            !_lstWaferTasks.Exists(waferT => waferT.routedMod == wafer.destMod))
                        {
                            wafer.RouteTo(wafer.destMod, 0);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, 0, (Hand)wafer.currentSlot) });
                        }
                    }

                    if (_tmSchdActions.Count == 0)
                    {
                        var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                        if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                        {
                            RoutingTMSwapActions(swapActions.swapActions);
                            _tmSchdActions.Enqueue(swapActions.swapActions);
                        }
                    }
                }
                else if (robotWafers.Count == 1)
                {
                    if (ModuleHelper.IsPm(robotWafers[0].destMod) && _dictModuleTask[robotWafers[0].destMod].TimeToReady == 0)
                    {
                        var pmActions = new List<MoveItem>();
                        var pmWafer = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == robotWafers[0].destMod && ModuleHelper.IsLoadPort(wafer.destMod));
                        if (pmWafer != null && string.IsNullOrWhiteSpace(pmWafer.wtwCleanRecipe))
                        {
                            int pickSlot = 1 - robotWafers[0].currentSlot;
                            pmWafer.RouteTo(ModuleName.TMRobot, pickSlot);
                            pmActions.Add(new MoveItem(pmWafer.currentMod, 0, ModuleName.TMRobot, pickSlot, (Hand)pickSlot));
                            pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, pmWafer.currentMod, 0, (Hand)robotWafers[0].currentSlot));
                            _tmSchdActions.Enqueue(pmActions);
                            return;
                        }

                        if (!_lstWaferTasks.Exists(wafer => wafer.currentMod == robotWafers[0].destMod))
                        {
                            robotWafers[0].RouteTo(robotWafers[0].destMod, 0);
                            pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, robotWafers[0].destMod, 0, (Hand)robotWafers[0].currentSlot));
                            _tmSchdActions.Enqueue(pmActions);
                            return;
                        }
                    }

                    // try to pick a wafer from LL
                    if (_tmSchdActions.Count == 0)
                    {
                        var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                        if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                        {
                            RoutingTMSwapActions(swapActions.swapActions);
                            _tmSchdActions.Enqueue(swapActions.swapActions);
                            return;
                        }
                    }

                    // try to return a wafer from PM
                    var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                    var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                    if (moveActions.pmWafers.Count > 0)
                    {
                        MoveItem placeAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                        moveActions.pmWafers.First().RouteTo(placeAction.DestinationModule, placeAction.DestinationSlot);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand[0], freeHand[0]) });

                        MoveItem pickAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.SourceModule));
                        if (pickAction != null)
                        {
                            var pickWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == pickAction.SourceModule && wafer.currentSlot == pickAction.SourceSlot);
                            pickWafer.RouteTo(pickAction.DestinationModule, pickAction.DestinationSlot);
                        }

                        _tmSchdActions.Enqueue(moveActions.swapAction);
                    }
                }
                else  // robot arm is empty
                {
                    // try return wafers from PM
                    var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                    var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                    if (moveActions.pmWafers.Count > 0)
                    {
                        int handIndex = 0;
                        var placeActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                        foreach (var action in placeActions)
                        {
                            moveActions.pmWafers[handIndex].RouteTo(action.DestinationModule, action.DestinationSlot);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers[handIndex].currentMod, 0, ModuleName.TMRobot, (int)freeHand[handIndex], freeHand[handIndex]) });
                            handIndex++;
                        }

                        var pickActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.SourceModule)).ToList();
                        foreach (var ac in pickActions)
                        {
                            var llWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == ac.SourceModule && wafer.currentSlot == ac.SourceSlot);
                            llWafer.RouteTo(ac.DestinationModule, ac.DestinationSlot);
                        }

                        _tmSchdActions.Enqueue(moveActions.swapAction);
                    }

                    if (_tmSchdActions.Count == 0)
                    {
                        var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                        if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                        {
                            RoutingTMSwapActions(swapActions.swapActions);
                            _tmSchdActions.Enqueue(swapActions.swapActions);
                        }
                    }
                }
            }
        }

        private void Routing4SlotVacSystem()
        {
            var robotWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && ModuleHelper.IsTMRobot(wafer.currentMod)).OrderBy(wafer => TimeForNextModuleReady(wafer)).ToList();
            if (robotWafers.Count == 2)
            {
                foreach (var wafer in robotWafers)
                {
                    if (wafer.movingStatus == RState.End &&
                        ModuleHelper.IsPm(wafer.destMod) &&
                        _dictModuleTask[wafer.destMod].TimeToReady == 0 &&
                        !_lstWaferTasks.Exists(waferT => waferT.currentMod == wafer.destMod) &&
                        !_lstWaferTasks.Exists(waferT => waferT.routedMod == wafer.destMod))
                    {
                        wafer.RouteTo(wafer.destMod, 0);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, 0, (Hand)wafer.currentSlot) });
                    }
                }

                if (_tmSchdActions.Count == 0)
                {
                    var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                    if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                    {
                        RoutingTMSwapActions(swapActions.swapActions);
                        _tmSchdActions.Enqueue(swapActions.swapActions);
                    }
                }
            }
            else if (robotWafers.Count == 1)
            {
                if (ModuleHelper.IsPm(robotWafers[0].destMod) && _dictModuleTask[robotWafers[0].destMod].TimeToReady == 0)
                {
                    var pmActions = new List<MoveItem>();
                    var pmWafer = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == robotWafers[0].destMod && ModuleHelper.IsLoadPort(wafer.destMod));
                    if (pmWafer != null && string.IsNullOrWhiteSpace(pmWafer.wtwCleanRecipe))
                    {
                        int pickSlot = 1 - robotWafers[0].currentSlot;
                        pmWafer.RouteTo(ModuleName.TMRobot, pickSlot);
                        pmActions.Add(new MoveItem(pmWafer.currentMod, 0, ModuleName.TMRobot, pickSlot, (Hand)pickSlot));
                        pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, pmWafer.currentMod, 0, (Hand)robotWafers[0].currentSlot));
                        _tmSchdActions.Enqueue(pmActions);
                        return;
                    }

                    if (!_lstWaferTasks.Exists(wafer => wafer.currentMod == robotWafers[0].destMod))
                    {
                        robotWafers[0].RouteTo(robotWafers[0].destMod, 0);
                        pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, robotWafers[0].destMod, 0, (Hand)robotWafers[0].currentSlot));
                        _tmSchdActions.Enqueue(pmActions);
                        return;
                    }
                }

                // try to pick a wafer from LL
                if (_tmSchdActions.Count == 0)
                {
                    var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                    if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                    {
                        RoutingTMSwapActions(swapActions.swapActions);
                        _tmSchdActions.Enqueue(swapActions.swapActions);
                        return;
                    }
                }

                // try to return a wafer from PM
                var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                if (moveActions.pmWafers.Count > 0)
                {
                    MoveItem placeAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                    moveActions.pmWafers.First().RouteTo(placeAction.DestinationModule, placeAction.DestinationSlot);
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand[0], freeHand[0]) });

                    MoveItem pickAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.SourceModule));
                    if (pickAction != null)
                    {
                        var pickWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == pickAction.SourceModule && wafer.currentSlot == pickAction.SourceSlot);
                        pickWafer.RouteTo(pickAction.DestinationModule, pickAction.DestinationSlot);
                    }

                    _tmSchdActions.Enqueue(moveActions.swapAction);
                }
            }
            else  // robot arm is empty
            {
                // try return wafers from PM
                var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                if (moveActions.pmWafers.Count > 0)
                {
                    int handIndex = 0;
                    var placeActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                    foreach (var action in placeActions)
                    {
                        moveActions.pmWafers[handIndex].RouteTo(action.DestinationModule, action.DestinationSlot);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers[handIndex].currentMod, 0, ModuleName.TMRobot, (int)freeHand[handIndex], freeHand[handIndex]) });
                        handIndex++;
                    }

                    var pickActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.SourceModule)).ToList();
                    foreach (var ac in pickActions)
                    {
                        var llWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == ac.SourceModule && wafer.currentSlot == ac.SourceSlot);
                        llWafer.RouteTo(ac.DestinationModule, ac.DestinationSlot);
                    }

                    _tmSchdActions.Enqueue(moveActions.swapAction);
                }

                if (_tmSchdActions.Count == 0)
                {
                    var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                    if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                    {
                        RoutingTMSwapActions(swapActions.swapActions);
                        _tmSchdActions.Enqueue(swapActions.swapActions);
                    }
                }
            }
        }

        private void RoutingFixedSlotVacSystem()
        {
            var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod));
            var lls = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && mod.Value.Scheduler.IsOnline);
            if (_LLASlotNumber == 2)
            {
                if (robotWafers.Count() == 1)
                {
                    if (ModuleHelper.IsPm(robotWafers.First().destMod))
                    {
                        var destPM = robotWafers.First().destMod;
                        if (_dictModuleTask[destPM].TimeToReady <= 5)
                        {
                            if (_lstWaferTasks.Exists(wt => wt.currentMod == destPM))
                            {
                                var pickHand = SelectTMPickArm(destPM);
                                if (pickHand != Hand.None)
                                {
                                    var pmSwap = new List<MoveItem>
                                    {
                                        new MoveItem(destPM, 0, ModuleName.TMRobot, (int)pickHand, pickHand),
                                        new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, destPM, 0, (Hand)robotWafers.First().currentSlot)
                                    };
                                    _tmSchdActions.Enqueue(pmSwap);
                                    return;
                                }

                            }
                            else
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, destPM, 0, (Hand)robotWafers.First().currentSlot) });
                                return;
                            }
                        }
                    }
                    else
                    {
                        var readySwapLL = lls.Where(ll => CanWaferGotoLL(robotWafers.First(), ll.Key) &&
                            GetLLFixedReadyInOutSlots(ll.Key).tOutSlot.Count == 1 &&
                            GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count == 1 &&
                            ll.Value.TimeToReady <= 10);

                        if (readySwapLL.Count() > 0)
                        {
                            var destLL = readySwapLL.First().Key;
                            Hand pickHand = SelectTMPickArm(destLL);
                            if (pickHand != Hand.None)
                            {
                                Hand placeHand = (Hand)robotWafers.First().currentSlot;
                                var llSwap = new List<MoveItem>();
                                var llSlots = GetLLFixedReadyInOutSlots(destLL);
                                llSwap.Add(new MoveItem(destLL, llSlots.tOutSlot.First(), ModuleName.TMRobot, (int)pickHand, pickHand));
                                llSwap.Add(new MoveItem(ModuleName.TMRobot, (int)placeHand, destLL, llSlots.tInSlot.First(), placeHand));
                                _tmSchdActions.Enqueue(llSwap);
                                return;
                            }
                        }

                        var emptyLL = lls.Where(ll => CanWaferGotoLL(robotWafers.First(), ll.Key) &&
                                                        GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count == 1 &&
                                                        ll.Value.TimeToReady <= 2);
                        if (emptyLL.Count() > 0)
                        {
                            var destLL = emptyLL.First().Key;
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem( ModuleName.TMRobot,
                                                                                            robotWafers.First().currentSlot,
                                                                                            destLL,
                                                                                            GetLLFixedReadyInOutSlots(destLL).tInSlot.First(),
                                                                                            (Hand)robotWafers.First().currentSlot) });

                            return;
                        }
                    }


                    // try to return a wafer 
                    var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod) && _dictModuleTask[wt.currentMod].TimeToReady <= 2);
                    foreach (var pmWafer in readyReturnWafers)
                    {
                        var readyLL = lls.Where(ll => CanWaferGotoLL(pmWafer, ll.Key) && GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count > 0 && ll.Value.TimeToReady <= 2).OrderBy(ll => ll.Value.Scheduler.IsVac ? 0 : 1);
                        if (readyLL.Count() > 0)
                        {
                            var validHand = (Hand)(1 - robotWafers.First().currentSlot);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(pmWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyLL.First().Key, GetLLFixedReadyInOutSlots(readyLL.First().Key).tInSlot.First(), validHand) });
                            return;
                        }
                    }


                    // try to push in a wafer 
                    var readyInLL = lls.Where(ll => GetLLFixedReadyInOutSlots(ll.Key).tOutSlot.Count > 0 && ll.Value.TimeToReady <= 2).OrderBy(ll => ll.Value.Scheduler.IsVac ? 0 : 1);
                    foreach (var ll in readyInLL)
                    {
                        var waferStatus = GetLLFixedReadyInOutSlots(ll.Key);
                        var wafer = _lstWaferTasks.Find(wt => wt.currentMod == ll.Key && wt.currentSlot == waferStatus.tOutSlot.First());
                        if (wafer != null &&
                            ModuleHelper.IsPm(wafer.destMod) &&
                            !_lstWaferTasks.Exists(wt => wt.currentMod == wafer.destMod) &&
                            _dictModuleTask[wafer.destMod].TimeToReady <= 2)
                        {
                            var validHand = (Hand)(1 - robotWafers.First().currentSlot);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, wafer.destMod, 0, validHand) });
                            return;
                        }
                    }
                }
                else if (robotWafers.Count() == 0)
                {
                    var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
                    if (readyReturnWafers.Count > 0)
                    {
                        // try to do a LL swap action
                        var readySwapLL = lls.Where(ll => GetLLFixedReadyInOutSlots(ll.Key).tOutSlot.Count == 1 && GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count == 1 && ll.Value.TimeToReady <= 10);
                        foreach (var pmWafer in readyReturnWafers)
                        {
                            foreach (var ll in readySwapLL)
                            {
                                if (CanWaferGotoLL(pmWafer, ll.Key))
                                {
                                    var returnHand = SelectTMPickArm(pmWafer.currentMod);
                                    var pickHand = SelectTMPickArm(ll.Key);
                                    var llWaferStatus = GetLLFixedReadyInOutSlots(ll.Key);
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(pmWafer.currentMod, pmWafer.currentSlot, ModuleName.TMRobot, (int)returnHand, returnHand) });

                                    var llSwapActions = new List<MoveItem>();
                                    llSwapActions.Add(new MoveItem(ModuleName.TMRobot, (int)returnHand, ll.Key, llWaferStatus.tInSlot.First(), returnHand));
                                    llSwapActions.Add(new MoveItem(ll.Key, llWaferStatus.tOutSlot.First(), ModuleName.TMRobot, (int)pickHand, pickHand));
                                    _tmSchdActions.Enqueue(llSwapActions);
                                    return;
                                }
                            }
                        }

                        // just return to LL
                        var readyInLL = lls.Where(ll => GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count == 1 && ll.Value.TimeToReady <= 5);
                        foreach (var pmWafer in readyReturnWafers)
                        {
                            foreach (var ll in readyInLL)
                            {
                                if (CanWaferGotoLL(pmWafer, ll.Key))
                                {
                                    var returnHand = SelectTMPickArm(pmWafer.currentMod);
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(pmWafer.currentMod, pmWafer.currentSlot, ModuleName.TMRobot, (int)returnHand, returnHand) });
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)returnHand, ll.Key, GetLLFixedReadyInOutSlots(ll.Key).tInSlot.First(), returnHand) });
                                    return;
                                }
                            }
                        }
                    }

                    var readyPushInLLs = lls.Where(ll => GetLLFixedReadyInOutSlots(ll.Key).tOutSlot.Count == 1 && ll.Value.TimeToReady <= 2);
                    if (readyPushInLLs.Count() > 0)
                    {
                        var destLL = readyPushInLLs.First().Key;
                        if (readyPushInLLs.Count() == 2 && readyPushInLLs.First().Value.Scheduler.IsAtm && readyPushInLLs.Last().Value.Scheduler.IsVac)
                        {
                            destLL = readyPushInLLs.Last().Key;
                        }

                        var pickHand = SelectTMPickArm(destLL);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(destLL, GetLLFixedReadyInOutSlots(destLL).tOutSlot.First(), ModuleName.TMRobot, (int)pickHand, pickHand) });
                        return;
                    }
                }
                else
                {
                    // should not go here
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, "Had better avoid picking two wafers on TM robot arms under Loadlock fixed slot pattern");
                    foreach (var wafer in robotWafers)
                    {
                        if (ModuleHelper.IsPm(wafer.destMod))
                        {
                            if (!_lstWaferTasks.Exists(wt => wt.currentMod == wafer.destMod) && _dictModuleTask[wafer.destMod].TimeToReady <= 2)
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, 0, (Hand)wafer.currentSlot) });
                                return;
                            }
                        }
                        else
                        {
                            var readyInLL = lls.Where(ll => GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count == 1 && CanWaferGotoLL(wafer, ll.Key) && ll.Value.TimeToReady <= 2);
                            if (readyInLL.Count() > 0)
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, readyInLL.First().Key, GetLLFixedReadyInOutSlots(readyInLL.First().Key).tInSlot.First(), (Hand)wafer.currentSlot) });
                                return;
                            }
                        }
                    }
                }
            }
            else //  4 slot Loadlock
            {
                if (robotWafers.Count() > 0)
                {
                    if (robotWafers.Count() == 2)
                    {
                        if (robotWafers.All(wt => ModuleHelper.IsLoadPort(wt.destMod)))
                        {
                            var destLL = lls.Where(ll => robotWafers.All(wt => CanWaferGotoLL(wt, ll.Key)) &&
                                                    ll.Value.TimeToReady <= 10 &&
                                                    GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count == 2).
                                                    OrderByDescending(ll => GetLLFixedReadyInOutSlots(ll.Key).tOutSlot.Count).
                                                    OrderBy(ll => ll.Value.TimeToReady);

                            if (destLL.Count() > 0)
                            {
                                var swapLL = destLL.First().Key;
                                var llWaferStatus = GetLLFixedReadyInOutSlots(swapLL);

                                var swapActions = new List<MoveItem>();
                                swapActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, swapLL, llWaferStatus.tInSlot.First(), (Hand)robotWafers.First().currentSlot));
                                swapActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers.Last().currentSlot, swapLL, llWaferStatus.tInSlot.Last(), (Hand)robotWafers.Last().currentSlot));

                                int pickCount = 0;
                                foreach (var slot in llWaferStatus.eOutSlot)
                                {
                                    swapActions.Add(new MoveItem(swapLL, slot, ModuleName.TMRobot, pickCount, (Hand)pickCount));
                                }
                                _tmSchdActions.Enqueue(swapActions);
                                return;
                            }
                        }

                        foreach (var wafer in robotWafers)
                        {
                            if (ModuleHelper.IsPm(wafer.destMod))
                            {
                                if (!_lstWaferTasks.Exists(wt => wt.currentMod == wafer.destMod) && _dictModuleTask[wafer.destMod].TimeToReady <= 5)
                                {
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, 0, (Hand)wafer.currentSlot) });
                                    return;
                                }
                            }
                            else
                            {
                                var placeLL = lls.Where(ll => CanWaferGotoLL(wafer, ll.Key) && ll.Value.TimeToReady <= 5 && GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count > 0).OrderBy(ll => ll.Value.TimeToReady);
                                if (placeLL.Count() > 0)
                                {
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, placeLL.First().Key, GetLLFixedReadyInOutSlots(placeLL.First().Key).tInSlot.First(), (Hand)wafer.currentSlot) });
                                    return;
                                }
                            }
                        }
                    }
                    else if (robotWafers.Count() == 1)
                    {
                        var robotWafer = robotWafers.First();
                        if (ModuleHelper.IsPm(robotWafer.destMod))
                        {
                            if (_dictModuleTask[robotWafer.destMod].TimeToReady <= 5)
                            {
                                if (_lstWaferTasks.Exists(wt => wt.currentMod == robotWafer.destMod))
                                {
                                    var pmSwap = new List<MoveItem>();
                                    pmSwap.Add(new MoveItem(robotWafer.destMod, 0, ModuleName.TMRobot, 1 - robotWafer.currentSlot, (Hand)(1 - robotWafer.currentSlot)));
                                    pmSwap.Add(new MoveItem(ModuleName.TMRobot, robotWafer.currentSlot, robotWafer.destMod, 0, (Hand)robotWafer.currentSlot));
                                    _tmSchdActions.Enqueue(pmSwap);
                                    return;
                                }
                                else
                                {
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafer.currentSlot, robotWafer.destMod, 0, (Hand)robotWafer.currentSlot) });
                                    return;
                                }
                            }
                        }
                        else
                        {
                            var destLL = lls.Where(ll => CanWaferGotoLL(robotWafer, ll.Key) &&
                                                    ll.Value.TimeToReady <= 10 &&
                                                    GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count > 0).
                                                    OrderByDescending(ll => GetLLFixedReadyInOutSlots(ll.Key).tOutSlot.Count).
                                                    OrderBy(ll => ll.Value.TimeToReady);

                            if (destLL.Count() > 0)
                            {
                                var swapLL = destLL.First().Key;
                                var llWaferStatus = GetLLFixedReadyInOutSlots(swapLL);
                                var llSwap = new List<MoveItem>();
                                llSwap.Add(new MoveItem(ModuleName.TMRobot, robotWafer.currentSlot, swapLL, llWaferStatus.tInSlot.First(), (Hand)robotWafer.currentSlot));
                                int pickCount = 0;
                                foreach (var slot in llWaferStatus.tOutSlot)
                                {
                                    llSwap.Add(new MoveItem(swapLL, slot, ModuleName.TMRobot, pickCount, (Hand)pickCount));
                                    pickCount++;
                                }

                                _tmSchdActions.Enqueue(llSwap);
                                return;
                            }
                        }

                        // try to return a wafer 
                        var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod) && _dictModuleTask[wt.currentMod].TimeToReady <= 2);
                        foreach (var pmWafer in readyReturnWafers)
                        {
                            var readyLL = lls.Where(ll => CanWaferGotoLL(pmWafer, ll.Key) && GetLLFixedReadyInOutSlots(ll.Key).tInSlot.Count > 0 && ll.Value.TimeToReady <= 2).OrderBy(ll => ll.Value.Scheduler.IsVac ? 0 : 1);
                            if (readyLL.Count() > 0)
                            {
                                var validHand = (Hand)(1 - robotWafers.First().currentSlot);
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(pmWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyLL.First().Key, GetLLFixedReadyInOutSlots(readyLL.First().Key).tInSlot.First(), validHand) });
                                return;
                            }
                        }


                        // try to push in a wafer 
                        var readyInLL = lls.Where(ll => GetLLFixedReadyInOutSlots(ll.Key).tOutSlot.Count > 0 && ll.Value.TimeToReady <= 2).OrderBy(ll => ll.Value.Scheduler.IsVac ? 0 : 1);
                        foreach (var ll in readyInLL)
                        {
                            var waferStatus = GetLLFixedReadyInOutSlots(ll.Key);
                            var wafer = _lstWaferTasks.Find(wt => wt.currentMod == ll.Key && wt.currentSlot == waferStatus.tOutSlot.First());
                            if (wafer != null &&
                                ModuleHelper.IsPm(wafer.destMod) &&
                                !_lstWaferTasks.Exists(wt => wt.currentMod == wafer.destMod) &&
                                _dictModuleTask[wafer.destMod].TimeToReady <= 2)
                            {
                                var validHand = (Hand)(1 - robotWafers.First().currentSlot);
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, wafer.destMod, 0, validHand) });
                                return;
                            }
                        }
                    }
                }
                else // robot empty
                {
                    var nearlyReadyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && (ModuleHelper.IsLoadPort(wt.destMod) || _dictModuleTask[wt.currentMod].TimeToReady <= 10)).OrderBy(wt => _dictModuleTask[wt.currentMod].TimeToReady).ToList();
                    var readyLL = lls.Where(ll => ll.Value.TimeToReady <= 10);
                    if (readyLL.Count() > 0)
                    {
                        var llPath = FindTheBestMovePathWithFixSlot(readyLL, nearlyReadyReturnWafers);
                        if (ModuleHelper.IsLoadLock(llPath))
                        {
                            int returnCount = 0;
                            var llWaferStatus = GetLLFixedReadyInOutSlots(llPath);
                            var llSwapActions = new List<MoveItem>();
                            foreach (var wafer in nearlyReadyReturnWafers)
                            {
                                if (CanWaferGotoLL(wafer, llPath) && returnCount < Math.Min(llWaferStatus.tInSlot.Count, 2))
                                {
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, 0, ModuleName.TMRobot, returnCount, (Hand)returnCount) });
                                    llSwapActions.Add(new MoveItem(ModuleName.TMRobot, returnCount, llPath, llWaferStatus.tInSlot[returnCount], (Hand)returnCount));
                                    returnCount++;
                                }
                            }

                            int pickCount = 0;
                            foreach (var slot in llWaferStatus.tOutSlot)
                            {
                                if (pickCount < 2)
                                {
                                    llSwapActions.Add(new MoveItem(llPath, slot, ModuleName.TMRobot, pickCount, (Hand)pickCount));
                                    pickCount++;
                                }
                            }

                            if (llSwapActions.Count > 0)
                            {
                                _tmSchdActions.Enqueue(llSwapActions);
                            }

                            return;
                        }
                    }
                }
            }
        }

        private bool IsTMRobotArmNotReserved(Hand hand)
        {
            if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)hand) || _lstWaferTasks.Exists(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)hand))
                return false;

            foreach (var acs in _tmSchdActions)
            {
                foreach (var ac in acs)
                {
                    if ((ac.DestinationModule == ModuleName.TMRobot || ac.SourceModule == ModuleName.TMRobot) && ac.DestinationSlot == (int)hand)
                        return false;
                }
            }

            return true;
        }

        private Hand SelectTMPickArm(ModuleName mod)
        {
            switch (_tmRobotSingleArmOption)
            {
                case 0:
                    {
                        if (IsTMRobotArmNotReserved(Hand.Blade1))
                            return Hand.Blade1;

                        if (IsTMRobotArmNotReserved(Hand.Blade2))
                            return Hand.Blade2;
                    }
                    break;
                case 1:
                    {
                        if (IsTMRobotArmNotReserved(Hand.Blade1))
                            return Hand.Blade1;
                    }
                    break;
                case 2:
                    {
                        if (IsTMRobotArmNotReserved(Hand.Blade2))
                            return Hand.Blade2;
                    }
                    break;
                // Blade1 In Blade2 Out
                case 3:
                    {
                        if (ModuleHelper.IsLoadLock(mod) && IsTMRobotArmNotReserved(Hand.Blade1))
                            return Hand.Blade1;

                        if (ModuleHelper.IsPm(mod) && IsTMRobotArmNotReserved(Hand.Blade2))
                            return Hand.Blade2;
                    }
                    break;
                // Blade2 In Blade1 Out
                case 4:
                    {
                        if (ModuleHelper.IsLoadLock(mod) && IsTMRobotArmNotReserved(Hand.Blade2))
                            return Hand.Blade2;

                        if (ModuleHelper.IsPm(mod) && IsTMRobotArmNotReserved(Hand.Blade1))
                            return Hand.Blade1;
                    }
                    break;
            }

            return Hand.None;
        }

        private List<Hand> GetTMFreeHand()
        {
            var lstHands = new List<Hand>();
            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
                lstHands.Add(Hand.Blade1);

            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
                lstHands.Add(Hand.Blade2);

            return lstHands;
        }

        private List<Hand> GetEFEMFreeHand()
        {
            var lstHands = new List<Hand>();
            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) && _efemRobotSingleArmOption != 2)
                lstHands.Add(Hand.Blade1);

            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1) && _efemRobotSingleArmOption != 1)
                lstHands.Add(Hand.Blade2);

            return lstHands;
        }

        private bool CanWaferGotoLL(WaferTask task, ModuleName ll)
        {
            bool bVacWafer = ModuleHelper.IsPm(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod);
            if (bVacWafer)
            {
                if (ModuleHelper.IsPm(task.destMod))
                    return false;

                switch (task.llInOutPath)
                {
                    case SequenceLLInOutPath.AInAOut:
                    case SequenceLLInOutPath.BInAOut:
                        return ll == ModuleName.LLA;
                    case SequenceLLInOutPath.AInBOut:
                    case SequenceLLInOutPath.BInBOut:
                        return ll == ModuleName.LLB;
                    case SequenceLLInOutPath.DInDOut:
                        return true;
                }
            }
            else
            {
                if (ModuleHelper.IsLoadPort(task.destMod))
                    return false;

                switch (task.llInOutPath)
                {
                    case SequenceLLInOutPath.AInAOut:
                    case SequenceLLInOutPath.AInBOut:
                        return ll == ModuleName.LLA;
                    case SequenceLLInOutPath.BInAOut:
                    case SequenceLLInOutPath.BInBOut:
                        return ll == ModuleName.LLB;
                    case SequenceLLInOutPath.DInDOut:
                        return true;
                }
            }

            return false;
        }

        private (List<int> inSlot, List<int> outSlot, List<int> emptySlot) GetLLReadyInOutSlots(ModuleName ll)
        {
            var readInSlots = new List<int>();
            var readyOutSlots = new List<int>();
            var emptySlots = new List<int>();
            for (int slot = 0; slot < (ll == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber); slot++)
            {
                if (WaferManager.Instance.CheckNoWafer(ll, slot) && !_lstWaferTasks.Exists(wafer => (wafer.routedMod == ll && wafer.routedSlot == slot) || (wafer.currentMod == ll && wafer.currentSlot == slot) || (wafer.nextMod == ll && wafer.nextSlot == slot)))
                {
                    emptySlots.Add(slot);
                }

                if (WaferManager.Instance.CheckHasWafer(ll, slot))
                {
                    Guid waferID = WaferManager.Instance.GetWafer(ll, slot).InnerId;
                    var waferTask = _lstWaferTasks.Find(wafer => wafer.waferId == waferID);
                    if (waferTask != null && waferTask.movingStatus == RState.End)
                    {
                        if (ModuleHelper.IsPm(waferTask.destMod))
                            readInSlots.Add(slot);
                        else if (_dictModuleTask[ll].Scheduler.WaferArrivedTicks(slot) > waferTask.llDelayTime * 1000)
                            readyOutSlots.Add(slot);
                    }
                }
            }

            return (readInSlots, readyOutSlots, emptySlots);
        }

        private (List<int> eInSlot, List<int> eOutSlot, List<int> tInSlot, List<int> tOutSlot) GetLLFixedReadyInOutSlots(ModuleName ll)
        {
            var eInSlot = new List<int>();
            var eOutSlot = new List<int>();
            var tInSlot = new List<int>();
            var tOutSlot = new List<int>();

            int SlotNumber = ll == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber;
            for (int slot = 0; slot < SlotNumber; slot++)
            {
                if (WaferManager.Instance.CheckNoWafer(ll, slot) && !_lstWaferTasks.Exists(wafer => (wafer.routedMod == ll && wafer.routedSlot == slot) || (wafer.currentMod == ll && wafer.currentSlot == slot) || (wafer.nextMod == ll && wafer.nextSlot == slot)))
                {
                    if ((slot >= SlotNumber / 2 && _LLSlotInOutOption == LLSlotInOutOpt.UpperInLowerOut) ||
                        (slot < SlotNumber / 2 && _LLSlotInOutOption == LLSlotInOutOpt.LowerInUpperOut))
                    {
                        eInSlot.Add(slot);
                    }
                    else
                    {
                        tInSlot.Add(slot);
                    }
                }

                if (WaferManager.Instance.CheckHasWafer(ll, slot))
                {
                    var wafer = WaferManager.Instance.GetWafer(ll, slot);
                    var waferTask = _lstWaferTasks.Find(wt => wt.waferId == wafer.InnerId && wt.currentMod == ll && wt.currentSlot == slot);
                    if (waferTask == null)
                    {
                        LOG.Write(eEvent.EV_ROUTER, ll, $"Routing trace: did not find inner task associated with {wafer.WaferOrigin} at {ll}.{slot + 1}");
                    }
                    else if (waferTask.movingStatus == RState.End)
                    {
                        if (ModuleHelper.IsPm(waferTask.destMod))
                            tOutSlot.Add(slot);
                        else if (_dictModuleTask[ll].Scheduler.WaferArrivedTicks(slot) > waferTask.llDelayTime * 1000)
                            eOutSlot.Add(slot);
                    }
                }
            }

            return (eInSlot, eOutSlot, tInSlot, tOutSlot);
        }

        private (List<WaferInfo> wafers, List<int> emptySlots) GetLLWaferExistance(ModuleName ll)
        {
            var lstWafers = new List<WaferInfo>();
            var lstEmptySlots = new List<int>();

            for (int slot = 0; slot < (ll == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber); slot++)
            {
                var wafer = WaferManager.Instance.GetWafer(ll, slot);
                if (wafer != null && !wafer.IsEmpty)
                {
                    lstWafers.Add(wafer);
                }
                else
                {
                    lstEmptySlots.Add(slot);
                }
            }

            return (lstWafers, lstEmptySlots);
        }

        private void PrepareLLPressure()
        {
            if (RouteManager.IsATMMode)
                return;

            var schdPumpingLLs = new List<ModuleName>();
            var schdVentingLLs = new List<ModuleName>();
            var schdCoolingLLs = new List<ModuleName>();
            var llaWaferStatus = GetLLReadyInOutSlots(ModuleName.LLA);
            var llbWaferStatus = GetLLReadyInOutSlots(ModuleName.LLB);

            // pre pumping/venting for schedule actions
            if (_efemSchdActions.Count > 0)
            {
                var ventLLs = _efemSchdActions.Where(acs => ModuleHelper.IsLoadLock(acs.First().Module)).Select(item => item.First().Module).ToList();
                foreach (var ll in ventLLs)
                {
                    if (!schdVentingLLs.Contains(ll))
                        schdVentingLLs.Add(ll);
                }
            }

            if (_tmSchdActions.Count > 0)
            {
                var pumpLLs = _tmSchdActions.Where(acs => ModuleHelper.IsLoadLock(acs.First().Module)).Select(item => item.First().Module).ToList();
                foreach (var ll in pumpLLs)
                {
                    if (!schdPumpingLLs.Contains(ll))
                        schdPumpingLLs.Add(ll);
                }
            }

            // loadlock in out path advance check
            if (_LLInOutPath == SequenceLLInOutPath.AInBOut)
            {
                if (llaWaferStatus.emptySlot.Count == _LLASlotNumber)
                {
                    if (!schdVentingLLs.Contains(ModuleName.LLA))
                        schdVentingLLs.Add(ModuleName.LLA);
                }
                else if ((llaWaferStatus.inSlot.Count == _LLASlotNumber) ||
                         (llaWaferStatus.inSlot.Count > 0 && llaWaferStatus.inSlot.Count < _LLASlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)) == 0))
                {
                    if (!schdPumpingLLs.Contains(ModuleName.LLA))
                        schdPumpingLLs.Add(ModuleName.LLA);
                }

                if (llbWaferStatus.emptySlot.Count == _LLBSlotNumber)
                {
                    if (!schdPumpingLLs.Contains(ModuleName.LLB))
                        schdPumpingLLs.Add(ModuleName.LLB);
                }
                else if ((llbWaferStatus.outSlot.Count == _LLBSlotNumber) ||
                         (llbWaferStatus.outSlot.Count > 0 && llbWaferStatus.outSlot.Count < _LLBSlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsPm(wt.currentMod) || ModuleHelper.IsTMRobot(wt.currentMod)) == 0))
                {
                    schdCoolingLLs.Add(ModuleName.LLB);
                }
            }
            else if (_LLInOutPath == SequenceLLInOutPath.BInAOut)
            {
                if (llbWaferStatus.emptySlot.Count == _LLBSlotNumber)
                {
                    if (!schdVentingLLs.Contains(ModuleName.LLA))
                        schdVentingLLs.Add(ModuleName.LLB);
                }
                else if ((llbWaferStatus.inSlot.Count == _LLBSlotNumber) ||
                         (llbWaferStatus.inSlot.Count > 0 && llbWaferStatus.inSlot.Count < _LLBSlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)) == 0))
                {
                    if (!schdPumpingLLs.Contains(ModuleName.LLB))
                        schdPumpingLLs.Add(ModuleName.LLB);
                }

                if (llaWaferStatus.emptySlot.Count == _LLASlotNumber)
                {
                    if (!schdPumpingLLs.Contains(ModuleName.LLA))
                        schdPumpingLLs.Add(ModuleName.LLA);
                }
                else if ((llaWaferStatus.outSlot.Count == _LLASlotNumber) ||
                         (llaWaferStatus.outSlot.Count > 0 && llaWaferStatus.outSlot.Count < _LLASlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsPm(wt.currentMod)) == 0))
                {
                    schdCoolingLLs.Add(ModuleName.LLA);
                }
            }
            else
            {
                if ((llaWaferStatus.inSlot.Count == _LLASlotNumber) ||
                    (llaWaferStatus.inSlot.Count > 0 && llaWaferStatus.inSlot.Count < _LLASlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)) == 0))
                {
                    if (!schdPumpingLLs.Contains(ModuleName.LLA))
                        schdPumpingLLs.Add(ModuleName.LLA);
                }
                else if ((llaWaferStatus.outSlot.Count == _LLASlotNumber) ||
                         (llaWaferStatus.outSlot.Count > 0 && llaWaferStatus.outSlot.Count < _LLASlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsPm(wt.currentMod)) == 0))
                {
                    if (!schdVentingLLs.Contains(ModuleName.LLA))
                        schdCoolingLLs.Add(ModuleName.LLA);
                }

                if ((llbWaferStatus.inSlot.Count == _LLBSlotNumber) ||
                    (llbWaferStatus.inSlot.Count > 0 && llbWaferStatus.inSlot.Count < _LLBSlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)) == 0))
                {
                    if (!schdPumpingLLs.Contains(ModuleName.LLB))
                        schdPumpingLLs.Add(ModuleName.LLB);
                }
                else if ((llbWaferStatus.outSlot.Count == _LLBSlotNumber) ||
                         (llbWaferStatus.outSlot.Count > 0 && llbWaferStatus.outSlot.Count < _LLBSlotNumber && _lstWaferTasks.Count(wt => ModuleHelper.IsPm(wt.currentMod)) == 0))
                {
                    if (!schdVentingLLs.Contains(ModuleName.LLB))
                        schdCoolingLLs.Add(ModuleName.LLB);
                }
            }

            foreach (var ventLL in schdVentingLLs)
            {
                if (_dictModuleTask[ventLL].Scheduler.IsAvailable && !_dictModuleTask[ventLL].Scheduler.IsAtm && !schdCoolingLLs.Contains(ventLL))
                    (_dictModuleTask[ventLL] as LoadlockTask).PreVent();
            }

            foreach (var pumpLL in schdPumpingLLs)
            {
                if (_dictModuleTask[pumpLL].Scheduler.IsAvailable && !_dictModuleTask[pumpLL].Scheduler.IsVac && !schdVentingLLs.Contains(pumpLL))
                    (_dictModuleTask[pumpLL] as LoadlockTask).PrePump();
            }

            foreach (var coolLL in schdCoolingLLs)
            {
                if (_dictModuleTask[coolLL].Scheduler.IsOnline && !_dictModuleTask[coolLL].Scheduler.IsAtm)
                    (_dictModuleTask[coolLL] as LoadlockTask).Cooling();
            }
        }

        private void ReturnVacWafers()
        {
            if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
            {
                RunSchdTMReturnActions();
                return;
            }

            if (_tmRobotStatus != RState.End)
                return;

            var hands = GetTMFreeHand();
            var lls = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && !IsLLReservedByEFEM(mod.Key) && mod.Value.Scheduler.IsIdle && mod.Value.Scheduler.IsInclude && GetLLWaferExistance(mod.Key).emptySlots.Count > 0).OrderByDescending(mod => GetLLReadyInOutSlots(mod.Key).emptySlot.Count);
            if (lls.Count() > 0)
            {
                // return robot wafers
                int moveCount = 0;
                var llActions = new List<MoveItem>();
                var emptySlots = GetLLWaferExistance(lls.First().Key).emptySlots;
                for (int arm = 0; arm < 2; arm++)
                {
                    var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, arm);
                    if (wafer != null && !wafer.IsEmpty && moveCount < emptySlots.Count)
                    {
                        llActions.Add(new MoveItem(ModuleName.TMRobot, arm, lls.First().Key, emptySlots[moveCount], (Hand)arm));
                        moveCount++;
                    }
                }

                if (moveCount > 0)
                {
                    _tmSchdActions.Enqueue(llActions);
                    return;
                }

                // return PM wafers
                var PickActions = new List<MoveItem>();
                var hasWaferPMs = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsIdle && mod.Value.Scheduler.IsInclude && WaferManager.Instance.CheckHasWafer(mod.Key, 0));
                foreach (var pm in hasWaferPMs)
                {
                    if (moveCount < hands.Count && moveCount < emptySlots.Count)
                    {
                        PickActions.Add(new MoveItem(pm.Key, 0, ModuleName.TMRobot, (int)hands[moveCount], hands[moveCount]));
                        llActions.Add(new MoveItem(ModuleName.TMRobot, (int)hands[moveCount], lls.First().Key, emptySlots[moveCount], hands[moveCount]));
                        moveCount++;
                    }
                }

                if (moveCount > 0)
                {
                    foreach (var ac in PickActions)
                    {
                        _tmSchdActions.Enqueue(new List<MoveItem> { ac });
                    }

                    _tmSchdActions.Enqueue(llActions);
                }
            }
        }

        private void ReturnAtmWafers()
        {
            if (_efemSchdActions.Count > 0 || _curEfemAction.Count > 0)
            {
                RunSchdEFEMReturnActions();
                return;
            }

            if (_efemRobotStatus != RState.End)
                return;

            // return Robot Wafer
            for (int i = 0; i < 2; i++)
            {
                var wafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
                if (wafer != null && !wafer.IsEmpty)
                {
                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.EfemRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
                }
            }

            if (_efemSchdActions.Count > 0)
                return;

            var hands = GetEFEMFreeHand();
            // return Aligner wafer
            var aligner = ModuleHelper.InstalledModules.Where(mod => ModuleHelper.IsAligner(mod)).ToList();
            if (aligner.Count > 0 && WaferManager.Instance.CheckHasWafer(aligner.First(), 0) && hands.Count > 0)
            {
                var wafer = WaferManager.Instance.GetWafer(aligner.First(), 0);
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(aligner.First(), 0, ModuleName.EfemRobot, (int)hands.First(), hands.First()) });
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.EfemRobot, (int)hands.First(), (ModuleName)wafer.OriginStation, wafer.OriginSlot, hands.First()) });
                return;
            }

            // return Loadlock wafer
            var lls = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && !IsLLReservedByTM(mod.Key) && mod.Value.Scheduler.IsIdle && GetLLWaferExistance(mod.Key).wafers.Count > 0).OrderByDescending(mod => GetLLWaferExistance(mod.Key).wafers.Count);
            if (lls.Count() > 0)
            {
                int returnCount = 0;
                var llActions = new List<MoveItem>();
                var placActions = new List<MoveItem>();
                foreach (var wafer in GetLLWaferExistance(lls.First().Key).wafers)
                {
                    if (returnCount < hands.Count)
                    {
                        llActions.Add(new MoveItem(lls.First().Key, wafer.Slot, ModuleName.EfemRobot, (int)hands[returnCount], hands[returnCount]));
                        placActions.Add(new MoveItem(ModuleName.EfemRobot, (int)hands[returnCount], (ModuleName)wafer.OriginStation, wafer.OriginSlot, hands[returnCount]));
                        returnCount++;
                    }
                }

                if (returnCount > 0)
                {
                    _efemSchdActions.Enqueue(llActions);
                    foreach (var ac in placActions)
                    {
                        _efemSchdActions.Enqueue(new List<MoveItem> { ac });
                    }
                }
            }
        }

        private void RunSchdEFEMReturnActions()
        {
            var efemRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot) as SchedulerEfemRobot;
            if (efemRobot == null || !efemRobot.IsAvailable)
                return;

            if (_efemSchdActions.Count > 0)
            {
                if (_curEfemAction.Count == 0 || isReturnActionsDone(_curEfemAction))
                {
                    var nextActions = _efemSchdActions.First();

                    var nextModule = nextActions.First().Module;

                    if (ModuleHelper.IsLoadLock(nextModule) && !_dictModuleTask[nextModule].IsIdle)
                        return;

                    _curEfemAction = _efemSchdActions.Dequeue();

                    efemRobot.PostMoveItems(_curEfemAction.ToArray());
                }
            }
            else if (_curEfemAction.Count >= 0 && isReturnActionsDone(_curEfemAction)) // all scheduled actions done
            {
                _curEfemAction.Clear();
            }
        }

        private void RunSchdTMReturnActions()
        {
            var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerTMRobot;
            if (tmRobot == null || !tmRobot.IsAvailable)
                return;

            if (_tmSchdActions.Count > 0)
            {
                if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
                {
                    var nextActions = _tmSchdActions.First();

                    var nextModule = nextActions.First().Module;

                    if (ModuleHelper.IsLoadLock(nextModule) && !_dictModuleTask[nextModule].IsIdle)
                        return;

                    _curTmAction = _tmSchdActions.Dequeue();

                    tmRobot.SendMoveItems(_curTmAction.ToArray());
                }
            }
            else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
            {
                _curTmAction.Clear();
            }
        }

        #endregion

        #region sequence/recipe operation

        private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
        {
            reason = "";

            foreach (var pm in seq.PMs)
            {
                if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
                    return true;
            }

            reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);

            return false;
        }

        private bool CheckSequenceKepler2200TemperatureReady(SequenceInfo seq)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = $"{module}Recipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
                            var recipe = Recipe.Load(recipeContent);
                            float currentChamberTemperature;
                            switch (module)
                            {
                                case ModuleName.PMA:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMA.ChamberTemperature;
                                    break;
                                case ModuleName.PMB:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMB.ChamberTemperature;
                                    break;
                                case ModuleName.PMC:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMC.ChamberTemperature;
                                    break;
                                case ModuleName.PMD:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMD.ChamberTemperature;
                                    break;
                                default:
                                    currentChamberTemperature = 0;
                                    break;
                            }
                            if (recipe.Header.Temperature != null && recipe.Header.Temperature != "" && (currentChamberTemperature > Convert.ToSingle(recipe.Header.Temperature) + 10 || currentChamberTemperature < Convert.ToSingle(recipe.Header.Temperature) - 10))
                            {
                                LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Start job失败,由于{module}腔体温度{currentChamberTemperature}与{recipeName} Recipe温度{recipe.Header.Temperature}不匹配");
                                return false;
                            }
                        }
                    }

                }
            }
            return true;
        }

        private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = $"{module}Recipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            if (!string.IsNullOrWhiteSpace(recipeName))
                            {
                                var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
                                if (string.IsNullOrWhiteSpace(recipeContent))
                                {
                                    reason = $"Can not find recipe file{recipeName}";
                                    return false;
                                }
                            }
                        }
                    }
                }
            }

            reason = "";
            return true;
        }

        private void UpdateLLInOutPathProperty()
        {
            if (_lstControlJobs.Count == 0)
                return;

            var inOutPaths = new List<SequenceLLInOutPath>();
            foreach (var wt in _lstWaferTasks)
            {
                if (!inOutPaths.Contains(wt.llInOutPath))
                    inOutPaths.Add(wt.llInOutPath);
            }

            if (inOutPaths.Count == 1)
            {
                _LLInOutPath = inOutPaths[0];
            }
            else
                _LLInOutPath = SequenceLLInOutPath.DInDOut;
        }

        private bool GetAllJobRecipe(List<string> InUseRecipes, ControlJobInfo cj, SequenceInfo seq)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = $"{module}Recipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
                            var recipe = Recipe.Load(recipeContent);
                            if (recipe.Header.ChuckRecipe != null && recipe.Header.ChuckRecipe != "")
                            {
                                InUseRecipes.Add($"{module}.ChuckRecipe.{recipe.Header.ChuckRecipe}");
                            }
                            if (recipe.Header.DechuckRecipe != null && recipe.Header.DechuckRecipe != "")
                            {
                                InUseRecipes.Add($"{module}.DechuckRecipe.{recipe.Header.DechuckRecipe}");
                            }
                            InUseRecipes.Add($"{module}.Process.{recipeName}");
                            if (cj.PreJobClean != "")
                            {
                                InUseRecipes.Add($"{module}.Clean.{cj.PreJobClean}");
                            }
                            if (cj.PostJobClean != "")
                            {
                                InUseRecipes.Add($"{module}.Clean.{cj.PostJobClean}");
                            }
                            if (stepInfo.StepParameter["WTWClean"].ToString() != "")
                            {
                                InUseRecipes.Add($"{module}.Clean.{stepInfo.StepParameter["WTWClean"]}");
                            }
                        }
                    }

                }
            }
            return true;
        }

        private bool IsSequenceNeedAlign(SequenceInfo sequence)
        {
            // check wether need align
            foreach (var step in sequence.Steps)
            {
                foreach (var mod in step.StepModules)
                {
                    if (ModuleHelper.IsAligner(mod))
                        return true;
                }
            }

            return false;
        }

        #endregion
    }
}