VenusDispatcher.cs 92 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. using Venus_RT.Modules.TM.VenusEntity;
  25. namespace Venus_RT.Modules
  26. {
  27. class VCETask : ModuleTask
  28. {
  29. public VCETask(ModuleName mod) : base(mod)
  30. {
  31. }
  32. }
  33. class VenusPMTask : ModuleTask
  34. {
  35. public enum RecipeJobType
  36. {
  37. PreClean,
  38. Process,
  39. PostClean,
  40. WtwClean,
  41. }
  42. public override int TimeToReady
  43. {
  44. get
  45. {
  46. switch (Status)
  47. {
  48. case ModuleStatus.Idle:
  49. case ModuleStatus.IdleClean:
  50. case ModuleStatus.PreJobClean:
  51. case ModuleStatus.PostJobClean:
  52. case ModuleStatus.WTWClean:
  53. case ModuleStatus.Processing:
  54. {
  55. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  56. }
  57. }
  58. return int.MaxValue / 2;
  59. }
  60. }
  61. private WaferTask _wafer;
  62. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  63. Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  64. KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  65. public VenusPMTask(ModuleName mod) : base(mod)
  66. { }
  67. public override RState Run()
  68. {
  69. if(_runingWaferTask.Value.Count == 0)
  70. {
  71. if(_pendingWaferTasks.Count > 0)
  72. {
  73. _runingWaferTask = _pendingWaferTasks.Dequeue();
  74. }
  75. else
  76. {
  77. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  78. {
  79. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  80. {
  81. if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  82. {
  83. Status = ModuleStatus.StartIdleClean;
  84. }
  85. }
  86. }
  87. }
  88. }
  89. else
  90. {
  91. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  92. {
  93. switch(_runingWaferTask.Value.First().Key)
  94. {
  95. case RecipeJobType.PreClean:
  96. {
  97. if(WaferManager.Instance.CheckNoWafer(Module,0))
  98. {
  99. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  100. {
  101. Status = ModuleStatus.StartPreJobClean;
  102. }
  103. else
  104. {
  105. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  106. TryDequeueRuningTask(Status);
  107. Status = ModuleStatus.Idle;
  108. }
  109. }
  110. }
  111. break;
  112. case RecipeJobType.Process:
  113. {
  114. if (WaferManager.Instance.CheckHasWafer(Module, 0))
  115. {
  116. if(_wafer.waferId == _runingWaferTask.Key)
  117. {
  118. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  119. Status = ModuleStatus.StartProcess;
  120. }
  121. else
  122. {
  123. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  124. }
  125. }
  126. }
  127. break;
  128. case RecipeJobType.PostClean:
  129. {
  130. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  131. {
  132. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  133. {
  134. Status = ModuleStatus.StartPostJobClean;
  135. }
  136. else
  137. {
  138. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  139. TryDequeueRuningTask(Status);
  140. Status = ModuleStatus.Idle;
  141. }
  142. }
  143. }
  144. break;
  145. case RecipeJobType.WtwClean:
  146. {
  147. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  148. {
  149. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  150. {
  151. Status = ModuleStatus.StartWTWClean;
  152. }
  153. else
  154. {
  155. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  156. TryDequeueRuningTask(Status);
  157. Status = ModuleStatus.Idle;
  158. }
  159. }
  160. }
  161. break;
  162. }
  163. }
  164. }
  165. if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  166. {
  167. if (Scheduler.IsIdle)
  168. {
  169. switch (Status)
  170. {
  171. case ModuleStatus.Processing:
  172. {
  173. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  174. if (Scheduler.IsOnline)
  175. {
  176. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  177. {
  178. _wafer.Return();
  179. TryDequeueRuningTask(Status);
  180. Status = ModuleStatus.Idle;
  181. }
  182. }
  183. else // handle offline exception situation
  184. {
  185. TryDequeueRuningTask(Status);
  186. Status = ModuleStatus.Idle;
  187. }
  188. }
  189. break;
  190. case ModuleStatus.PreJobClean:
  191. case ModuleStatus.PostJobClean:
  192. case ModuleStatus.WTWClean:
  193. {
  194. TryDequeueRuningTask(Status);
  195. Status = ModuleStatus.Idle;
  196. }
  197. break;
  198. case ModuleStatus.IdleClean:
  199. {
  200. Status = ModuleStatus.Idle;
  201. }
  202. break;
  203. case ModuleStatus.StartProcess:
  204. {
  205. if (RouteManager.IsATMMode)
  206. {
  207. Status = ModuleStatus.Processing;
  208. }
  209. }
  210. break;
  211. }
  212. }
  213. else
  214. {
  215. switch (Status)
  216. {
  217. case ModuleStatus.StartProcess:
  218. Status = ModuleStatus.Processing;
  219. break;
  220. case ModuleStatus.StartIdleClean:
  221. Status = ModuleStatus.IdleClean;
  222. break;
  223. case ModuleStatus.StartPreJobClean:
  224. Status = ModuleStatus.PreJobClean;
  225. break;
  226. case ModuleStatus.StartPostJobClean:
  227. Status = ModuleStatus.PostJobClean;
  228. break;
  229. case ModuleStatus.StartWTWClean:
  230. Status = ModuleStatus.WTWClean;
  231. break;
  232. }
  233. }
  234. }
  235. return RState.Running;
  236. }
  237. void TryDequeueRuningTask( ModuleStatus status)
  238. {
  239. bool bMatch = false;
  240. if (_runingWaferTask.Value.Count > 0)
  241. {
  242. switch(status)
  243. {
  244. case ModuleStatus.PreJobClean:
  245. if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  246. {
  247. _runingWaferTask.Value.Dequeue();
  248. bMatch = true;
  249. }
  250. break;
  251. case ModuleStatus.Processing:
  252. if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  253. {
  254. _runingWaferTask.Value.Dequeue();
  255. bMatch = true;
  256. }
  257. break;
  258. case ModuleStatus.PostJobClean:
  259. if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  260. {
  261. _runingWaferTask.Value.Dequeue();
  262. bMatch = true;
  263. }
  264. break;
  265. case ModuleStatus.WTWClean:
  266. if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  267. {
  268. _runingWaferTask.Value.Dequeue();
  269. bMatch = true;
  270. }
  271. break;
  272. case ModuleStatus.WaitPreJobClean:
  273. case ModuleStatus.WaitProcess:
  274. case ModuleStatus.WaitPostJobClean:
  275. case ModuleStatus.WaitWTWClean:
  276. case ModuleStatus.Idle:
  277. _runingWaferTask.Value.Dequeue();
  278. break;
  279. }
  280. }
  281. if(!bMatch)
  282. {
  283. string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  284. LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  285. }
  286. if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  287. {
  288. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  289. }
  290. }
  291. public override void WaferArrived(WaferTask wafer, int slot)
  292. {
  293. _wafer = wafer;
  294. }
  295. public override void WaferLeaved(WaferTask wafer, int slot)
  296. {
  297. _wafer = null;
  298. }
  299. public void SubscribeWaferTask(WaferTask waferTask)
  300. {
  301. var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  302. if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  303. {
  304. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  305. }
  306. if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  307. {
  308. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  309. }
  310. if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  311. {
  312. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  313. }
  314. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  315. {
  316. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  317. }
  318. else
  319. {
  320. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  321. }
  322. }
  323. public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  324. {
  325. var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  326. if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  327. {
  328. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  329. }
  330. else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  331. {
  332. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  333. }
  334. else
  335. {
  336. return;
  337. }
  338. if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  339. {
  340. LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  341. }
  342. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  343. {
  344. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  345. }
  346. else
  347. {
  348. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  349. }
  350. }
  351. public bool ReadyMoveIn(WaferTask wafer)
  352. {
  353. return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  354. }
  355. public bool IsAllJobCompleted()
  356. {
  357. return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  358. }
  359. public bool IsRecipeJobDone(RecipeJobType job)
  360. {
  361. return (_runingWaferTask.Key == Guid.Empty || !_runingWaferTask.Value.ToList().Exists(kv => kv.Key == job)) && (_pendingWaferTasks.Count == 0 || !_pendingWaferTasks.ToList().Exists(kv => kv.Value.Count > 0 && kv.Value.ToList().Exists(kvv => kvv.Key == job)));
  362. }
  363. public override void ResetTask()
  364. {
  365. base.ResetTask();
  366. _wafer = null;
  367. _pendingWaferTasks.Clear();
  368. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  369. }
  370. }
  371. class PreAlignTask : ModuleTask
  372. {
  373. private WaferTask _wafer;
  374. public PreAlignTask(ModuleName aligner) : base(aligner)
  375. {
  376. }
  377. public override RState Run()
  378. {
  379. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  380. if (tmRobot == null || !tmRobot.IsAvailable)
  381. return RState.Running;
  382. switch (Status)
  383. {
  384. case ModuleStatus.WaitAlign:
  385. {
  386. tmRobot.Align(0);
  387. Status = ModuleStatus.Aligning;
  388. }
  389. break;
  390. case ModuleStatus.Aligning:
  391. {
  392. _wafer.IsAligned = true;
  393. Status = ModuleStatus.Idle;
  394. }
  395. break;
  396. }
  397. return RState.Running;
  398. }
  399. public override void WaferArrived(WaferTask wafer, int slot)
  400. {
  401. _wafer = wafer;
  402. Status = ModuleStatus.WaitAlign;
  403. }
  404. public override void WaferLeaved(WaferTask wafer, int slot)
  405. {
  406. _wafer = null;
  407. }
  408. }
  409. class VenusTMRobotTask : ModuleTask
  410. {
  411. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  412. public override RState Run()
  413. {
  414. return base.Run();
  415. }
  416. }
  417. class VenusDispatcher : ICycle
  418. {
  419. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  420. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  421. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  422. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  423. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  424. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  425. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  426. private List<MoveItem> _curTmAction = new List<MoveItem>();
  427. private bool _isCycleMode;
  428. private int _cycleSetPoint = 0;
  429. private int _cycledCount = 0;
  430. private int _cycledWafer = 0;
  431. private float _throughput = 0.0f;
  432. private int _tmRobotSingleArmOption = 0;
  433. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 },{ ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  434. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  435. private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  436. private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  437. private Stopwatch _cycleWatch = new Stopwatch();
  438. private SchedulerFACallback _faCallback;
  439. private SchedulerDBCallback _dbCallback;
  440. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  441. public bool HasJobRunning => _lstControlJobs.Count > 0;
  442. private RState _cycleState = RState.Init;
  443. public RState CycleState => _cycleState;
  444. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  445. public List<string> InUseRecipes = new List<string>();
  446. public VenusDispatcher()
  447. {
  448. _faCallback = new SchedulerFACallback();
  449. _dbCallback = new SchedulerDBCallback();
  450. InitModules();
  451. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  452. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  453. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  454. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  455. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  456. foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
  457. {
  458. _loadportControlJobDic[lp.ToString()] = null;
  459. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  460. DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  461. DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  462. DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  463. DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  464. }
  465. DATA.Subscribe("Scheduler.CurrentRecipeList", () => _lstProcessJobs);
  466. }
  467. #region public interface
  468. /// <summary>
  469. /// 获取lp当前的ControlJob
  470. /// </summary>
  471. /// <param name="lp"></param>
  472. /// <returns></returns>
  473. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  474. {
  475. if (ModuleHelper.IsLoadPort(lp))
  476. {
  477. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  478. }
  479. else
  480. {
  481. return null;
  482. }
  483. }
  484. public RState Start(params object[] objs)
  485. {
  486. if (WaferManager.Instance.HasDuplicatedWafer)
  487. {
  488. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  489. return RState.Failed;
  490. }
  491. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  492. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  493. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  494. _cycledWafer = 0;
  495. _cycledCount = 0;
  496. _throughput = 0;
  497. Clear();
  498. _cycleWatch.Stop();
  499. _lpCycleWafer[ModuleName.LP1] = 0;
  500. _lpCycleWafer[ModuleName.LP2] = 0;
  501. _lpCycleCount[ModuleName.LP1] = 0;
  502. _lpCycleCount[ModuleName.LP2] = 0;
  503. return RState.Running;
  504. }
  505. public bool CreateJob(Dictionary<string, object> param, out string reason)
  506. {
  507. reason = "";
  508. //_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  509. //_cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  510. string[] slotSequence = (string[])param["SlotSequence"];
  511. string jobId = (string)param["JobId"];
  512. string module = (string)param["Module"];
  513. if (string.IsNullOrEmpty(jobId))
  514. {
  515. jobId = "CJ_Local_" + module;
  516. }
  517. //bool autoStart = (bool)param["AutoStart"];
  518. string lotId = jobId;
  519. if (param.ContainsKey("LotId"))
  520. lotId = (string)param["LotId"];
  521. //string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
  522. //string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;
  523. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  524. {
  525. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  526. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  527. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  528. return false;
  529. }
  530. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  531. {
  532. reason = $"{module} should be LoadPort";
  533. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  534. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  535. return false;
  536. }
  537. if (_lstControlJobs.Exists(x => x.Name == jobId))
  538. {
  539. reason = $"{jobId} already created";
  540. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  541. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  542. return false;
  543. }
  544. ControlJobInfo cj = new ControlJobInfo();
  545. cj.Name = jobId;
  546. cj.Module = module;
  547. cj.LotName = lotId;
  548. cj.LotInnerId = Guid.NewGuid();
  549. cj.LotWafers = new List<WaferInfo>();
  550. cj.SetState(EnumControlJobState.WaitingForStart);
  551. cj.JetState = EnumJetCtrlJobState.Quequed;
  552. cj.SequenceNameList = slotSequence;
  553. cj.CycleNumber = _cycleSetPoint; // only for temperary debug
  554. _lpCycleSP[ModuleHelper.Converter(module)] = _cycleSetPoint;
  555. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  556. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  557. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  558. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  559. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  560. {
  561. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  562. continue;
  563. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  564. indexSequence[groupName] = slotSequence[i];
  565. if (!seqSlot.ContainsKey(groupName))
  566. {
  567. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  568. }
  569. if (!seqSlotWafers.ContainsKey(groupName))
  570. {
  571. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  572. }
  573. seqSlot[groupName][i] = true;
  574. if (!WaferManager.Instance.CheckHasWafer(module, i))
  575. {
  576. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  577. return false;
  578. }
  579. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  580. {
  581. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  582. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  583. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  584. return false;
  585. }
  586. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  587. {
  588. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  589. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  590. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  591. return false;
  592. }
  593. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  594. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  595. cj.LotWafers.Add(waferInfo);
  596. waferInfo.SequenceName = slotSequence[i];
  597. waferInfo.LotId = lotId;
  598. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  599. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  600. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  601. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  602. }
  603. if (seqSlotWafers.Count == 0)
  604. {
  605. reason = $"job has not assign wafer";
  606. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  607. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  608. return false;
  609. }
  610. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  611. string[] seqs = seqSlot.Keys.ToArray();
  612. for (int i = 0; i < seqs.Length; i++)
  613. {
  614. ProcessJobInfo pj = new ProcessJobInfo();
  615. pj.Name = jobId + "_" + (i + 1);
  616. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  617. if (pj.Sequence == null)
  618. {
  619. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  620. return false;
  621. }
  622. pj.ControlJobName = cj.Name;
  623. pj.LotName = lotId;
  624. pj.SlotWafers = seqSlotWafers[seqs[i]];
  625. pj.SetState(EnumProcessJobState.Queued);
  626. if (!CheckSequencePmReady(pj.Sequence, out reason))
  627. {
  628. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  629. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  630. return false;
  631. }
  632. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  633. {
  634. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  635. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  636. return false;
  637. }
  638. pjs.Add(pj);
  639. }
  640. _dbCallback.LotUpdate(cj);
  641. foreach (var pj in pjs)
  642. {
  643. cj.ProcessJobNameList.Add(pj.Name);
  644. _lstProcessJobs.Add(pj);
  645. }
  646. _lstControlJobs.Add(cj);
  647. //AssociatedPMWithLP(cj);
  648. _loadportControlJobDic[cj.Module] = cj;
  649. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  650. return true;
  651. }
  652. public bool CheckAllJobDone()
  653. {
  654. foreach (var cj in _lstControlJobs)
  655. {
  656. if (cj.State != EnumControlJobState.Completed)
  657. return false;
  658. }
  659. InUseRecipes.Clear();
  660. return true;
  661. }
  662. public bool CheckJobJustDone(out string sJobName)
  663. {
  664. foreach (var cj in _lstControlJobs)
  665. {
  666. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  667. {
  668. //LP;WaferSize;Lot;Number;Start;End;
  669. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  670. cj.BeenPosted = true;
  671. return true;
  672. }
  673. }
  674. sJobName = "NULL";
  675. return false;
  676. }
  677. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  678. {
  679. foreach (var pj in _lstProcessJobs)
  680. {
  681. if (pj.ControlJobName == cj.Name)
  682. return pj;
  683. }
  684. return null;
  685. }
  686. public bool AbortJob(string jobName, out string reason)
  687. {
  688. reason = "";
  689. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  690. if (cj == null)
  691. {
  692. reason = $"abort job rejected, not found job with id {jobName}";
  693. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  694. return false;
  695. }
  696. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  697. foreach (var pj in _lstProcessJobs)
  698. {
  699. if (pj.ControlJobName == cj.Name)
  700. {
  701. pj.SetState(EnumProcessJobState.Aborting);
  702. pjAbortList.Add(pj);
  703. int unprocessed = 0;
  704. int aborted = 0;
  705. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  706. foreach (var waferInfo in wafers)
  707. {
  708. waferInfo.ProcessJob = null;
  709. waferInfo.NextSequenceStep = 0;
  710. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  711. unprocessed++;
  712. }
  713. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  714. }
  715. }
  716. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  717. _dbCallback.LotFinished(cj);
  718. foreach (var pj in pjAbortList)
  719. {
  720. _lstProcessJobs.Remove(pj);
  721. }
  722. _lstControlJobs.Remove(cj);
  723. if (_loadportControlJobDic.ContainsKey(cj.Module))
  724. {
  725. _loadportControlJobDic[cj.Module] = null;
  726. }
  727. return true;
  728. }
  729. public bool StopJob(string jobName, out string reason)
  730. {
  731. reason = "";
  732. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  733. if (cj == null)
  734. {
  735. reason = $"stop job rejected, not found job with id {jobName}";
  736. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  737. return false;
  738. }
  739. foreach (var pj in _lstProcessJobs)
  740. {
  741. if (pj.ControlJobName == cj.Name)
  742. {
  743. pj.SetState(EnumProcessJobState.Stopping);
  744. }
  745. }
  746. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  747. _dbCallback.LotFinished(cj);
  748. if (_loadportControlJobDic.ContainsKey(cj.Module))
  749. {
  750. _loadportControlJobDic[cj.Module] = null;
  751. }
  752. return true;
  753. }
  754. public bool ResumeJob(string jobName, out string reason)
  755. {
  756. reason = "";
  757. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  758. if (cj == null)
  759. {
  760. reason = $"resume job rejected, not found job with id {jobName}";
  761. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  762. return false;
  763. }
  764. if (cj.State == EnumControlJobState.Paused)
  765. {
  766. cj.SetState(EnumControlJobState.Executing);
  767. }
  768. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  769. _cycleState = RState.Running;
  770. return true;
  771. }
  772. public bool PauseJob(string jobName, out string reason)
  773. {
  774. reason = "";
  775. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  776. if (cj == null)
  777. {
  778. reason = $"pause job rejected, not found job with id {jobName}";
  779. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  780. return false;
  781. }
  782. if (cj.State == EnumControlJobState.Executing)
  783. {
  784. cj.SetState(EnumControlJobState.Paused);
  785. }
  786. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  787. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  788. _cycleState = RState.Paused;
  789. return true;
  790. }
  791. public bool StartJob(string jobName, out string reason)
  792. {
  793. reason = "";
  794. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  795. if (cj == null)
  796. {
  797. reason = $"start job rejected, not found job with id {jobName}";
  798. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  799. return false;
  800. }
  801. if (cj.State == EnumControlJobState.WaitingForStart)
  802. {
  803. cj.SetState(EnumControlJobState.Queued);
  804. //PreJobClean(cj);
  805. cj.StartTime = DateTime.Now;
  806. _dbCallback.LotCreated(cj);
  807. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  808. //if (!_blockingWatcher.IsRunning)
  809. // _blockingWatcher.Restart();
  810. //ResetTraceFlag();
  811. }
  812. if (!_cycleWatch.IsRunning)
  813. {
  814. _cycleWatch.Restart();
  815. }
  816. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  817. {
  818. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  819. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  820. }
  821. _cycleState = RState.Running;
  822. return true;
  823. }
  824. public RState Monitor()
  825. {
  826. prelude();
  827. RunWaferTask();
  828. RunModuleTasks();
  829. RoutingWafers();
  830. epilogue();
  831. return _cycleState;
  832. }
  833. public void Abort()
  834. {
  835. }
  836. public void Clear()
  837. {
  838. foreach (var module in _dictModuleTask)
  839. {
  840. module.Value.Status = ModuleStatus.Idle;
  841. module.Value.Scheduler.ResetTask();
  842. module.Value.ResetTask();
  843. }
  844. List<string> keys = _loadportControlJobDic.Keys.ToList();
  845. foreach (var key in keys)
  846. {
  847. _loadportControlJobDic[key] = null;
  848. }
  849. _lstWaferTasks.Clear();
  850. _tmSchdActions.Clear();
  851. _curTmAction.Clear();
  852. _lstControlJobs.Clear();
  853. _lstProcessJobs.Clear();
  854. InUseRecipes.Clear();
  855. _lpCycleWafer[ModuleName.LP1] = 0;
  856. _lpCycleWafer[ModuleName.LP2] = 0;
  857. _lpCycleCount[ModuleName.LP1] = 0;
  858. _lpCycleCount[ModuleName.LP2] = 0;
  859. _lpThroughput[ModuleName.LP1] = 0;
  860. _lpThroughput[ModuleName.LP2] = 0;
  861. _cycleState = RState.End;
  862. }
  863. #endregion
  864. #region manual return wafer
  865. // manual return one wafer while system is auto running
  866. public bool ManualReturnWafer(object[] objs)
  867. {
  868. ModuleName SourceModule = (ModuleName)objs[0];
  869. int SourceSlot = (int)objs[1];
  870. if (!_dictModuleTask.Keys.Contains(SourceModule))
  871. {
  872. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  873. return false;
  874. }
  875. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  876. {
  877. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  878. return false;
  879. }
  880. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  881. {
  882. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  883. return false;
  884. }
  885. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  886. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  887. _qeReturnWafers.Enqueue(wafer);
  888. return true;
  889. }
  890. public RState CheckManualReturnWafer()
  891. {
  892. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  893. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  894. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  895. {
  896. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  897. return RState.Failed;
  898. }
  899. foreach (var mod in _dictModuleTask)
  900. {
  901. if (ModuleHelper.IsLoadPort(mod.Key))
  902. continue;
  903. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  904. {
  905. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  906. return RState.Failed;
  907. }
  908. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  909. for (int slot = 0; slot < nSlotNumber; slot++)
  910. {
  911. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  912. if (wafer.IsEmpty)
  913. continue;
  914. var destLP = (ModuleName)wafer.OriginStation;
  915. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  916. {
  917. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  918. return RState.Failed;
  919. }
  920. if (!ModuleHelper.IsLoadPort(destLP))
  921. {
  922. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  923. return RState.Failed;
  924. }
  925. }
  926. }
  927. Clear();
  928. return RState.Running;
  929. }
  930. public RState ReturnAllWafers()
  931. {
  932. int systemWaferCount = 0;
  933. foreach (var mod in _dictModuleTask)
  934. {
  935. if (ModuleHelper.IsLoadPort(mod.Key))
  936. continue;
  937. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  938. for (int slot = 0; slot < nSlotNumber; slot++)
  939. {
  940. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  941. if (!wafer.IsEmpty)
  942. systemWaferCount++;
  943. }
  944. }
  945. if (systemWaferCount == 0)
  946. return RState.End;
  947. ReturnInternalWafers();
  948. return RState.Running;
  949. }
  950. #endregion
  951. #region internal implementation
  952. private void InitModules()
  953. {
  954. foreach (var module in ModuleHelper.InstalledModules)
  955. {
  956. if (ModuleHelper.IsInstalled(module))
  957. {
  958. if (ModuleHelper.IsPm(module))
  959. {
  960. _dictModuleTask[module] = new VenusPMTask(module);
  961. }
  962. else if (ModuleHelper.IsTMRobot(module))
  963. {
  964. _dictModuleTask[module] = new VenusTMRobotTask(module);
  965. }
  966. else if (ModuleHelper.IsAligner(module))
  967. {
  968. _dictModuleTask[module] = new PreAlignTask(module);
  969. }
  970. else if (ModuleHelper.IsLoadPort(module))
  971. {
  972. _dictModuleTask[module] = new LoadPortTask(module);
  973. }
  974. }
  975. }
  976. }
  977. private void prelude()
  978. {
  979. bool available = true;
  980. foreach (var mod in _dictModuleTask)
  981. {
  982. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  983. }
  984. }
  985. private void epilogue()
  986. {
  987. UpdateProcessJobStatus();
  988. UpdateControlJobStatus();
  989. CreateNewWaferTask();
  990. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  991. }
  992. private void RunWaferTask()
  993. {
  994. foreach (var task in _lstWaferTasks)
  995. {
  996. task.Run();
  997. }
  998. }
  999. private void RunModuleTasks()
  1000. {
  1001. foreach (var task in _dictModuleTask)
  1002. {
  1003. task.Value.Run();
  1004. }
  1005. }
  1006. private void RoutingWafers()
  1007. {
  1008. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1009. {
  1010. RunSchdTMActions();
  1011. return;
  1012. }
  1013. if (_tmRobotStatus != RState.End)
  1014. return;
  1015. if (_tmRobotSingleArmOption != 0)
  1016. {
  1017. RoutingWaferWithSingleArm();
  1018. return;
  1019. }
  1020. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1021. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1022. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1023. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1024. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1025. if(robotWafers.Count == 0)
  1026. {
  1027. if(readyReturnWafers.Count > 0)
  1028. {
  1029. if(readyReturnWafers.Count == 1 || readyReturnWafers[0].destMod != readyReturnWafers[1].destMod)
  1030. {
  1031. // return one wafer
  1032. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1033. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1034. }
  1035. else
  1036. {
  1037. // return two wafer
  1038. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1039. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1040. var doublePlaceActions = new List<MoveItem>
  1041. {
  1042. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1043. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1044. };
  1045. _tmSchdActions.Enqueue(doublePlaceActions);
  1046. }
  1047. }
  1048. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1049. {
  1050. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1051. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1052. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1053. {
  1054. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1055. if(pmTask.ReadyMoveIn(alignerWafer))
  1056. {
  1057. // move aligner wafer to PM
  1058. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1059. }
  1060. }
  1061. }
  1062. else
  1063. {
  1064. if(emptyAndReadyIn20sPMs.Count >= 2 && waitInWafers.Count >= 2 && waitInWafers[0].currentMod == waitInWafers[1].currentMod)
  1065. {
  1066. var doublePickActions = new List<MoveItem>()
  1067. {
  1068. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1069. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1070. };
  1071. _tmSchdActions.Enqueue(doublePickActions);
  1072. if(aligner.Count > 0)
  1073. {
  1074. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1075. }
  1076. }
  1077. else if(emptyAndReadyIn20sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1078. {
  1079. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1080. if (aligner.Count > 0)
  1081. {
  1082. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1083. }
  1084. }
  1085. }
  1086. }
  1087. else if(robotWafers.Count == 1)
  1088. {
  1089. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1090. if (readyReturnWafers.Count >= 1)
  1091. {
  1092. // return one wafer
  1093. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1094. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1095. }
  1096. else
  1097. {
  1098. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1099. {
  1100. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1101. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1102. if(!robotWafers.First().IsAligned)
  1103. {
  1104. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1105. }
  1106. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1107. {
  1108. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1109. if (pmTask.ReadyMoveIn(alignerWafer))
  1110. {
  1111. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1112. }
  1113. }
  1114. }
  1115. else
  1116. {
  1117. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1118. {
  1119. if (!robotWafers.First().IsAligned)
  1120. {
  1121. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1122. }
  1123. else if (emptyAndReadyIn20sPMs.Contains(robotWafers.First().destMod))
  1124. {
  1125. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1126. if (pmTask.ReadyMoveIn(robotWafers.First()))
  1127. {
  1128. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1129. }
  1130. }
  1131. }
  1132. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1133. {
  1134. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1135. }
  1136. }
  1137. }
  1138. }
  1139. else // had better not go here
  1140. {
  1141. foreach(var wafer in robotWafers)
  1142. {
  1143. if (ModuleHelper.IsPm(wafer.destMod))
  1144. {
  1145. if (!wafer.IsAligned)
  1146. {
  1147. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1148. {
  1149. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1150. }
  1151. }
  1152. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1153. {
  1154. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1155. if (pmTask.ReadyMoveIn(wafer))
  1156. {
  1157. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1158. }
  1159. }
  1160. }
  1161. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1162. {
  1163. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1164. }
  1165. }
  1166. }
  1167. }
  1168. private void RoutingWaferWithSingleArm()
  1169. {
  1170. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1171. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1172. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1173. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1174. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1175. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1176. if (robotWafers.Count == 0)
  1177. {
  1178. if (readyReturnWafers.Count > 0)
  1179. {
  1180. // return one wafer
  1181. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1182. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1183. }
  1184. else
  1185. {
  1186. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1187. {
  1188. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1189. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1190. {
  1191. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1192. // move aligner wafer to PM
  1193. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1194. if (pmTask.ReadyMoveIn(alignerWafer))
  1195. {
  1196. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1197. }
  1198. }
  1199. }
  1200. else
  1201. {
  1202. foreach(var wafer in waitInWafers)
  1203. {
  1204. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1205. {
  1206. // move one wafer from LP to aligner
  1207. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1208. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1209. }
  1210. }
  1211. }
  1212. }
  1213. }
  1214. else
  1215. {
  1216. var wafer = robotWafers[0];
  1217. if (ModuleHelper.IsPm(wafer.destMod))
  1218. {
  1219. if (!wafer.IsAligned)
  1220. {
  1221. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1222. {
  1223. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1224. }
  1225. }
  1226. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1227. {
  1228. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1229. if (pmTask.ReadyMoveIn(wafer))
  1230. {
  1231. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1232. }
  1233. }
  1234. }
  1235. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1236. {
  1237. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1238. }
  1239. }
  1240. }
  1241. private void RunSchdTMActions()
  1242. {
  1243. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1244. {
  1245. if (_tmSchdActions.Count > 0)
  1246. {
  1247. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1248. {
  1249. var nextActions = _tmSchdActions.First();
  1250. if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1251. return;
  1252. if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1253. return;
  1254. _curTmAction = _tmSchdActions.Dequeue();
  1255. foreach (var action in _curTmAction)
  1256. {
  1257. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1258. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1259. }
  1260. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1261. }
  1262. }
  1263. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1264. {
  1265. _curTmAction.Clear();
  1266. }
  1267. }
  1268. }
  1269. private bool isReturnActionsDone(List<MoveItem> items)
  1270. {
  1271. foreach (var item in items)
  1272. {
  1273. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1274. return false;
  1275. }
  1276. return true;
  1277. }
  1278. private bool IsMovingActionsDone(List<MoveItem> actions)
  1279. {
  1280. bool CheckWaferExistence(ModuleName mod, int slot)
  1281. {
  1282. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1283. }
  1284. if (actions.Count == 1)
  1285. {
  1286. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1287. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1288. return false;
  1289. }
  1290. else
  1291. {
  1292. // initialize all the wafer existance before move
  1293. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1294. foreach (var ac in actions)
  1295. {
  1296. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1297. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1298. if (!slotWafers.ContainsKey(scrSlot))
  1299. {
  1300. slotWafers[scrSlot] = true;
  1301. }
  1302. if (!slotWafers.ContainsKey(destSlot))
  1303. {
  1304. slotWafers[destSlot] = false;
  1305. }
  1306. }
  1307. // simulate moved result
  1308. foreach (var ac in actions)
  1309. {
  1310. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1311. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1312. if (!slotWafers[scrSlot])
  1313. {
  1314. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1315. }
  1316. else
  1317. {
  1318. slotWafers[scrSlot] = false;
  1319. }
  1320. if (slotWafers[destSlot])
  1321. {
  1322. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1323. }
  1324. else
  1325. {
  1326. slotWafers[destSlot] = true;
  1327. }
  1328. }
  1329. foreach (var slot in slotWafers)
  1330. {
  1331. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1332. return false;
  1333. }
  1334. }
  1335. return true;
  1336. }
  1337. private void WaferArrived(WaferTask wafer, MoveItem item)
  1338. {
  1339. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1340. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1341. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1342. {
  1343. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1344. if (currentControlJob != null)
  1345. {
  1346. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1347. }
  1348. }
  1349. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1350. }
  1351. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1352. {
  1353. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1354. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1355. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1356. {
  1357. (_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1358. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1359. if (currentControlJob != null)
  1360. {
  1361. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1362. }
  1363. }
  1364. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1365. }
  1366. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1367. {
  1368. bool allWaferReturn = true;
  1369. foreach (var slot in pj.SlotWafers)
  1370. {
  1371. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1372. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1373. {
  1374. allWaferReturn = false;
  1375. break;
  1376. }
  1377. }
  1378. return allWaferReturn;
  1379. }
  1380. private void ReturnInternalWafers()
  1381. {
  1382. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1383. {
  1384. RunSchdTMReturnActions();
  1385. return;
  1386. }
  1387. if (_tmRobotStatus != RState.End)
  1388. return;
  1389. for (int i = 0; i < 2; i++)
  1390. {
  1391. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1392. {
  1393. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1394. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1395. return;
  1396. }
  1397. }
  1398. foreach(var mod in _dictModuleTask)
  1399. {
  1400. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1401. continue;
  1402. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1403. {
  1404. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1405. var freeHands = GetTMFreeHand();
  1406. if(freeHands.Count > 0)
  1407. {
  1408. var hand = freeHands[0];
  1409. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1410. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1411. return;
  1412. }
  1413. }
  1414. }
  1415. }
  1416. private List<Hand> GetTMFreeHand()
  1417. {
  1418. var lstHands = new List<Hand>();
  1419. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1420. lstHands.Add(Hand.Blade1);
  1421. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1422. lstHands.Add(Hand.Blade2);
  1423. return lstHands;
  1424. }
  1425. private void UpdateProcessJobStatus()
  1426. {
  1427. if (_tmRobotStatus == RState.Running)
  1428. return;
  1429. foreach (var pj in _lstProcessJobs)
  1430. {
  1431. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1432. {
  1433. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1434. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1435. }
  1436. }
  1437. }
  1438. private void UpdateControlJobStatus()
  1439. {
  1440. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1441. return;
  1442. var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1443. var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1444. if (runningJobs.Count == 0)
  1445. {
  1446. if (queueJobs.Count() > 0)
  1447. {
  1448. // start the first waiting job
  1449. RunControlJob(queueJobs.First());
  1450. }
  1451. }
  1452. else
  1453. {
  1454. foreach (var runningjob in runningJobs)
  1455. {
  1456. // update the running job
  1457. RunControlJob(runningjob);
  1458. }
  1459. foreach (var queueJob in queueJobs)
  1460. {
  1461. if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
  1462. {
  1463. // parallelly start the not intersect job
  1464. RunControlJob(queueJob);
  1465. }
  1466. }
  1467. }
  1468. // update system cycle status
  1469. if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
  1470. _cycleState = RState.End;
  1471. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1472. foreach (var cj in _lstControlJobs)
  1473. {
  1474. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1475. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1476. {
  1477. cjRemoveList.Add(cj);
  1478. }
  1479. }
  1480. foreach (var cj in cjRemoveList)
  1481. {
  1482. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1483. foreach (var pj in _lstProcessJobs)
  1484. {
  1485. if (pj.ControlJobName == cj.Name)
  1486. pjRemoveList.Add(pj);
  1487. }
  1488. foreach (var pj in pjRemoveList)
  1489. {
  1490. _lstProcessJobs.Remove(pj);
  1491. }
  1492. _lstControlJobs.Remove(cj);
  1493. }
  1494. }
  1495. private bool RunControlJob(ControlJobInfo cj)
  1496. {
  1497. switch (cj.JetState)
  1498. {
  1499. case EnumJetCtrlJobState.Quequed:
  1500. {
  1501. if (IsCtrlJobNeedPreClean(cj))
  1502. {
  1503. cj.JetState = EnumJetCtrlJobState.PreJobClean;
  1504. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1505. foreach (var pm in PMs)
  1506. {
  1507. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1508. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1509. {
  1510. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
  1511. }
  1512. }
  1513. }
  1514. else
  1515. {
  1516. ActiveControlJob(cj);
  1517. }
  1518. cj.SetState(EnumControlJobState.Executing);
  1519. }
  1520. break;
  1521. case EnumJetCtrlJobState.PreJobClean:
  1522. {
  1523. if (IsPreJobCleanDone(cj))
  1524. {
  1525. ActiveControlJob(cj);
  1526. }
  1527. }
  1528. break;
  1529. case EnumJetCtrlJobState.Processing:
  1530. {
  1531. if (IsCtrlJobNeedPostClean(cj))
  1532. {
  1533. if (IsAllJobWaferProcessedOrProcessing(cj))
  1534. {
  1535. cj.JetState = EnumJetCtrlJobState.PostJobClean;
  1536. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1537. foreach (var pm in PMs)
  1538. {
  1539. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1540. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1541. {
  1542. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
  1543. }
  1544. }
  1545. }
  1546. }
  1547. else
  1548. {
  1549. if (IsAllProcessJobComplete(cj))
  1550. {
  1551. cj.JetState = EnumJetCtrlJobState.Completed;
  1552. }
  1553. }
  1554. }
  1555. break;
  1556. case EnumJetCtrlJobState.PostJobClean:
  1557. {
  1558. if (IsPostJobCleanDone(cj))
  1559. {
  1560. cj.JetState = EnumJetCtrlJobState.Completed;
  1561. }
  1562. }
  1563. break;
  1564. }
  1565. // caculate processed wafer by control job
  1566. var lp = ModuleHelper.Converter(cj.Module);
  1567. int countProcessed = 0;
  1568. foreach (var pjName in cj.ProcessJobNameList)
  1569. {
  1570. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1571. if (pj == null)
  1572. {
  1573. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1574. continue;
  1575. }
  1576. // caculate process wafer by process
  1577. if (_lpCycleCount[lp] < cj.CycleNumber)
  1578. {
  1579. foreach (var pjSlotWafer in pj.SlotWafers)
  1580. {
  1581. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1582. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  1583. countProcessed++;
  1584. }
  1585. }
  1586. }
  1587. int lpCycleWafer = 0;
  1588. if (cj.JetState == EnumJetCtrlJobState.Completed)
  1589. {
  1590. cj.EndTime = DateTime.Now;
  1591. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  1592. _dbCallback.LotFinished(cj);
  1593. if (_lpCycleCount[lp] >= cj.CycleNumber - 1 || !_isCycleMode)
  1594. (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
  1595. _lpCycleCount[lp]++;
  1596. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
  1597. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1598. LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
  1599. if (_lpCycleCount[lp] < cj.CycleNumber)
  1600. {
  1601. cj.SetState(EnumControlJobState.Executing);
  1602. cj.JetState = EnumJetCtrlJobState.Quequed;
  1603. cj.LotInnerId = Guid.NewGuid();
  1604. _dbCallback.LotCreated(cj);
  1605. foreach (var pj in _lstProcessJobs)
  1606. {
  1607. if (pj.ControlJobName == cj.Name)
  1608. {
  1609. pj.SetState(EnumProcessJobState.Queued);
  1610. pj.InnerId = Guid.NewGuid();
  1611. foreach (var pjSlotWafer in pj.SlotWafers)
  1612. {
  1613. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1614. wafer.ProcessJob = null;
  1615. wafer.NextSequenceStep = 0;
  1616. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1617. }
  1618. }
  1619. }
  1620. _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
  1621. }
  1622. else
  1623. {
  1624. cj.SetState(EnumControlJobState.Completed);
  1625. }
  1626. }
  1627. else
  1628. {
  1629. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
  1630. }
  1631. if (lpCycleWafer != _lpCycleWafer[lp])
  1632. {
  1633. _lpCycleWafer[lp] = lpCycleWafer;
  1634. if (_lpCycleCount[lp] > 0)
  1635. {
  1636. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1637. }
  1638. }
  1639. return cj.State == EnumControlJobState.Completed;
  1640. }
  1641. private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
  1642. {
  1643. var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
  1644. var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
  1645. return cj1Pms.Intersect(cj2Pms).Count() > 0;
  1646. }
  1647. private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
  1648. {
  1649. return !string.IsNullOrWhiteSpace(cj.PreJobClean);
  1650. }
  1651. private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
  1652. {
  1653. return !string.IsNullOrWhiteSpace(cj.PostJobClean.Trim());
  1654. }
  1655. private bool IsPreJobCleanDone(ControlJobInfo cj)
  1656. {
  1657. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1658. foreach (var pm in pms)
  1659. {
  1660. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1661. if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PreClean))
  1662. return false;
  1663. }
  1664. return true;
  1665. }
  1666. private bool IsPostJobCleanDone(ControlJobInfo cj)
  1667. {
  1668. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1669. foreach (var pm in pms)
  1670. {
  1671. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1672. if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PostClean))
  1673. return false;
  1674. }
  1675. return true;
  1676. }
  1677. private bool ActiveProcessJob(ProcessJobInfo pj)
  1678. {
  1679. foreach (var pjSlotWafer in pj.SlotWafers)
  1680. {
  1681. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1682. wafer.ProcessJob = pj;
  1683. wafer.NextSequenceStep = 0;
  1684. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  1685. }
  1686. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  1687. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  1688. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  1689. pj.SetState(EnumProcessJobState.Processing);
  1690. return true;
  1691. }
  1692. private bool ActiveControlJob(ControlJobInfo cj)
  1693. {
  1694. cj.JetState = EnumJetCtrlJobState.Processing;
  1695. foreach (var pjName in cj.ProcessJobNameList)
  1696. {
  1697. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1698. if (pj == null)
  1699. {
  1700. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1701. continue;
  1702. }
  1703. if (pj.State == EnumProcessJobState.Queued)
  1704. {
  1705. ActiveProcessJob(pj);
  1706. }
  1707. }
  1708. return true;
  1709. }
  1710. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  1711. {
  1712. foreach (var pj in _lstProcessJobs)
  1713. {
  1714. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  1715. {
  1716. return false;
  1717. }
  1718. }
  1719. return true;
  1720. }
  1721. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  1722. {
  1723. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  1724. int original = (int)ModuleHelper.Converter(cj.Module);
  1725. foreach (var mod in allModules)
  1726. {
  1727. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  1728. continue;
  1729. var wafers = WaferManager.Instance.GetWafers(mod);
  1730. foreach (var wafer in wafers)
  1731. {
  1732. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  1733. continue;
  1734. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  1735. return false; ;
  1736. }
  1737. }
  1738. return true;
  1739. }
  1740. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  1741. {
  1742. var lstInProcessPMs = new List<ModuleName>();
  1743. foreach (var wafer in cj.LotWafers)
  1744. {
  1745. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  1746. {
  1747. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  1748. {
  1749. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  1750. lstInProcessPMs.Add(pm);
  1751. }
  1752. }
  1753. }
  1754. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  1755. foreach (var mod in _dictModuleTask)
  1756. {
  1757. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  1758. {
  1759. pmAssociatedWaferCount[mod.Key] = 0;
  1760. }
  1761. }
  1762. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  1763. foreach (var wafer in unprocessedWafer)
  1764. {
  1765. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  1766. {
  1767. pmAssociatedWaferCount[wafer.destMod]++;
  1768. }
  1769. }
  1770. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  1771. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  1772. return oderedPMCount.First().Key;
  1773. return ModuleName.System;
  1774. }
  1775. private void CreateNewWaferTask()
  1776. {
  1777. var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
  1778. var onDutyPms = new Dictionary<ModuleName, int>();
  1779. foreach (var job in runningJobs)
  1780. {
  1781. var pms = GetWaitPreCleanPMsByCtrlJob(job);
  1782. foreach (var pm in pms)
  1783. {
  1784. if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
  1785. {
  1786. onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
  1787. }
  1788. }
  1789. }
  1790. if (runningJobs.Count == 0 || onDutyPms.Count == 0)
  1791. return;
  1792. var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
  1793. if (oderedPMs.First().Value < 1)
  1794. {
  1795. foreach (var runningJob in runningJobs)
  1796. {
  1797. foreach (var wafer in runningJob.LotWafers)
  1798. {
  1799. if (wafer.IsEmpty || wafer.ProcessJob == null)
  1800. continue;
  1801. if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  1802. {
  1803. CreateWaferTasks(wafer, oderedPMs.First().Key);
  1804. return;
  1805. }
  1806. }
  1807. }
  1808. }
  1809. }
  1810. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  1811. {
  1812. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  1813. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  1814. Recipe recipe = Recipe.Load(recipeContent);
  1815. int temperature = 0;
  1816. if (int.TryParse(recipe.Header.Temperature, out int temp))
  1817. {
  1818. temperature = temp;
  1819. }
  1820. var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  1821. wafer.OriginSlot,
  1822. pm,
  1823. 0,
  1824. temperature,
  1825. wafer.InnerId,
  1826. wafer.ProcessJob.Sequence.InnerId,
  1827. recipeName,
  1828. wafer.ProcessJob.Sequence.WTWCleanRecipe,
  1829. wafer.ProcessJob.Sequence.LLInOutPath,
  1830. wafer.ProcessJob.Sequence.LLDelayTime,
  1831. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  1832. waferTask.OnWaferArrived += WaferArrived;
  1833. waferTask.OnWaferLeaved += WaferLeaved;
  1834. _lstWaferTasks.Add(waferTask);
  1835. }
  1836. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  1837. {
  1838. // check wether need align
  1839. foreach (var step in sequence.Steps)
  1840. {
  1841. foreach (var mod in step.StepModules)
  1842. {
  1843. if (ModuleHelper.IsAligner(mod))
  1844. return true;
  1845. }
  1846. }
  1847. return false;
  1848. }
  1849. private void RunSchdTMReturnActions()
  1850. {
  1851. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  1852. if (tmRobot == null || !tmRobot.IsAvailable)
  1853. return;
  1854. if (_tmSchdActions.Count > 0)
  1855. {
  1856. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  1857. {
  1858. var nextActions = _tmSchdActions.First();
  1859. var nextModule = nextActions.First().Module;
  1860. if (!_dictModuleTask[nextModule].IsIdle)
  1861. return;
  1862. _curTmAction = _tmSchdActions.Dequeue();
  1863. tmRobot.SendMoveItems(_curTmAction.ToArray());
  1864. }
  1865. }
  1866. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  1867. {
  1868. _curTmAction.Clear();
  1869. }
  1870. }
  1871. #endregion internal implementation
  1872. #region sequence/recipe validation
  1873. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  1874. {
  1875. reason = "";
  1876. foreach (var pm in seq.PMs)
  1877. {
  1878. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  1879. return true;
  1880. }
  1881. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  1882. return false;
  1883. }
  1884. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  1885. {
  1886. for (int i = 0; i < seq.Steps.Count; i++)
  1887. {
  1888. SequenceStepInfo stepInfo = seq.Steps[i];
  1889. foreach (var module in stepInfo.StepModules)
  1890. {
  1891. if (ModuleHelper.IsPm(module))
  1892. {
  1893. string attr = $"{module}Recipe";
  1894. if (stepInfo.StepParameter.ContainsKey(attr)
  1895. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  1896. {
  1897. var recipeName = (string)stepInfo.StepParameter[attr];
  1898. if (!string.IsNullOrWhiteSpace(recipeName))
  1899. {
  1900. var recipeContent =
  1901. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  1902. if (string.IsNullOrWhiteSpace(recipeContent))
  1903. {
  1904. reason = $"Can not find recipe file{recipeName}";
  1905. return false;
  1906. }
  1907. }
  1908. }
  1909. }
  1910. }
  1911. }
  1912. reason = "";
  1913. return true;
  1914. }
  1915. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  1916. {
  1917. var pmlist = new List<ModuleName>();
  1918. foreach (var pj in _lstProcessJobs)
  1919. {
  1920. if (pj.ControlJobName == cj.Name)
  1921. {
  1922. foreach (var pm in pj.Sequence.PMs)
  1923. {
  1924. if (!pmlist.Contains(pm))
  1925. pmlist.Add(pm);
  1926. }
  1927. }
  1928. }
  1929. return pmlist;
  1930. }
  1931. #endregion
  1932. }
  1933. }