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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Diagnostics;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.RecipeCenter;
- using Aitex.Core.RT.Fsm;
- using MECF.Framework.Common.Jobs;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.DBCore;
- using Venus_Core;
- using Venus_RT.Modules.Schedulers;
- using Venus_RT.Scheduler;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using Venus_RT.Modules.TM.VenusEntity;
- namespace Venus_RT.Modules
- {
- class VCETask : ModuleTask
- {
- public VCETask(ModuleName mod) : base(mod)
- {
- }
- }
- class VenusPMTask : ModuleTask
- {
- public enum RecipeJobType
- {
- PreClean,
- Process,
- PostClean,
- WtwClean,
- }
- public override int TimeToReady
- {
- get
- {
- switch (Status)
- {
- case ModuleStatus.Idle:
- case ModuleStatus.IdleClean:
- case ModuleStatus.PreJobClean:
- case ModuleStatus.PostJobClean:
- case ModuleStatus.WTWClean:
- case ModuleStatus.Processing:
- {
- return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
- }
- }
- return int.MaxValue / 2;
- }
- }
- private WaferTask _wafer;
- private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
- Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
- KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
- public VenusPMTask(ModuleName mod) : base(mod)
- { }
- public override RState Run()
- {
- if(_runingWaferTask.Value.Count == 0)
- {
- if(_pendingWaferTasks.Count > 0)
- {
- _runingWaferTask = _pendingWaferTasks.Dequeue();
- }
- else
- {
- if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
- {
- if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
- {
- if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
- {
- Status = ModuleStatus.StartIdleClean;
- }
- }
- }
- }
- }
- else
- {
- if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
- {
- switch(_runingWaferTask.Value.First().Key)
- {
- case RecipeJobType.PreClean:
- {
- if(WaferManager.Instance.CheckNoWafer(Module,0))
- {
- if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
- {
- Status = ModuleStatus.StartPreJobClean;
- }
- else
- {
- LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
- TryDequeueRuningTask(Status);
- Status = ModuleStatus.Idle;
- }
- }
- }
- break;
- case RecipeJobType.Process:
- {
- if (WaferManager.Instance.CheckHasWafer(Module, 0))
- {
- if(_wafer.waferId == _runingWaferTask.Key)
- {
- Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
- Status = ModuleStatus.StartProcess;
- }
- else
- {
- LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
- }
- }
- }
- break;
- case RecipeJobType.PostClean:
- {
- if (WaferManager.Instance.CheckNoWafer(Module, 0))
- {
- if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
- {
- Status = ModuleStatus.StartPostJobClean;
- }
- else
- {
- LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
- TryDequeueRuningTask(Status);
- Status = ModuleStatus.Idle;
- }
- }
- }
- break;
- case RecipeJobType.WtwClean:
- {
- if (WaferManager.Instance.CheckNoWafer(Module, 0))
- {
- if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
- {
- Status = ModuleStatus.StartWTWClean;
- }
- else
- {
- LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
- TryDequeueRuningTask(Status);
- Status = ModuleStatus.Idle;
- }
- }
- }
- break;
- }
- }
- }
- if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
- {
- if (Scheduler.IsIdle)
- {
- switch (Status)
- {
- case ModuleStatus.Processing:
- {
- var wafer = WaferManager.Instance.GetWafer(Module, 0);
- if (Scheduler.IsOnline)
- {
- if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
- {
- _wafer.Return();
- TryDequeueRuningTask(Status);
- Status = ModuleStatus.Idle;
- }
- }
- else // handle offline exception situation
- {
- TryDequeueRuningTask(Status);
- Status = ModuleStatus.Idle;
- }
- }
- break;
- case ModuleStatus.PreJobClean:
- case ModuleStatus.PostJobClean:
- case ModuleStatus.WTWClean:
- {
- TryDequeueRuningTask(Status);
- Status = ModuleStatus.Idle;
- }
- break;
- case ModuleStatus.IdleClean:
- {
- Status = ModuleStatus.Idle;
- }
- break;
- case ModuleStatus.StartProcess:
- {
- if (RouteManager.IsATMMode)
- {
- Status = ModuleStatus.Processing;
- }
- }
- break;
- }
- }
- else
- {
- switch (Status)
- {
- case ModuleStatus.StartProcess:
- Status = ModuleStatus.Processing;
- break;
- case ModuleStatus.StartIdleClean:
- Status = ModuleStatus.IdleClean;
- break;
- case ModuleStatus.StartPreJobClean:
- Status = ModuleStatus.PreJobClean;
- break;
- case ModuleStatus.StartPostJobClean:
- Status = ModuleStatus.PostJobClean;
- break;
- case ModuleStatus.StartWTWClean:
- Status = ModuleStatus.WTWClean;
- break;
- }
- }
- }
- return RState.Running;
- }
- void TryDequeueRuningTask( ModuleStatus status)
- {
- bool bMatch = false;
- if (_runingWaferTask.Value.Count > 0)
- {
- switch(status)
- {
- case ModuleStatus.PreJobClean:
- if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
- {
- _runingWaferTask.Value.Dequeue();
- bMatch = true;
- }
- break;
- case ModuleStatus.Processing:
- if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
- {
- _runingWaferTask.Value.Dequeue();
- bMatch = true;
- }
- break;
- case ModuleStatus.PostJobClean:
- if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
- {
- _runingWaferTask.Value.Dequeue();
- bMatch = true;
- }
- break;
- case ModuleStatus.WTWClean:
- if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
- {
- _runingWaferTask.Value.Dequeue();
- bMatch = true;
- }
- break;
- case ModuleStatus.WaitPreJobClean:
- case ModuleStatus.WaitProcess:
- case ModuleStatus.WaitPostJobClean:
- case ModuleStatus.WaitWTWClean:
- case ModuleStatus.Idle:
- _runingWaferTask.Value.Dequeue();
- break;
- }
- }
- if(!bMatch)
- {
- string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
- LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
- }
- if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
- {
- _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
- }
- }
- public override void WaferArrived(WaferTask wafer, int slot)
- {
- _wafer = wafer;
- }
- public override void WaferLeaved(WaferTask wafer, int slot)
- {
- _wafer = null;
- }
- public void SubscribeWaferTask(WaferTask waferTask)
- {
- var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
- if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
- {
- waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
- }
- if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
- {
- waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
- }
- if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
- {
- LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
- }
- else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
- {
- _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
- }
- else
- {
- _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
- }
- }
- public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
- {
- var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
- if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
- {
- lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
- }
- else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
- {
- lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
- }
- else
- {
- return;
- }
- if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
- {
- LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
- }
- else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
- {
- _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
- }
- else
- {
- _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
- }
- }
- public bool ReadyMoveIn(WaferTask wafer)
- {
- return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
- }
- public bool IsAllJobCompleted()
- {
- return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
- }
- public bool IsRecipeJobDone(RecipeJobType job)
- {
- return (_runingWaferTask.Key == Guid.Empty || !_runingWaferTask.Value.ToList().Exists(kv => kv.Key == job)) && (_pendingWaferTasks.Count == 0 || !_pendingWaferTasks.ToList().Exists(kv => kv.Value.Count > 0 && kv.Value.ToList().Exists(kvv => kvv.Key == job)));
- }
- public override void ResetTask()
- {
- base.ResetTask();
- _wafer = null;
- _pendingWaferTasks.Clear();
- _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
- }
- }
- class PreAlignTask : ModuleTask
- {
- private WaferTask _wafer;
- public PreAlignTask(ModuleName aligner) : base(aligner)
- {
- }
- public override RState Run()
- {
- var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
- if (tmRobot == null || !tmRobot.IsAvailable)
- return RState.Running;
- switch (Status)
- {
- case ModuleStatus.WaitAlign:
- {
- tmRobot.Align(0);
- Status = ModuleStatus.Aligning;
- }
- break;
- case ModuleStatus.Aligning:
- {
- _wafer.IsAligned = true;
- Status = ModuleStatus.Idle;
- }
- break;
- }
- return RState.Running;
- }
- public override void WaferArrived(WaferTask wafer, int slot)
- {
- _wafer = wafer;
- Status = ModuleStatus.WaitAlign;
- }
- public override void WaferLeaved(WaferTask wafer, int slot)
- {
- _wafer = null;
- }
- }
- class VenusTMRobotTask : ModuleTask
- {
- public VenusTMRobotTask(ModuleName mod) : base(mod) { }
- public override RState Run()
- {
- return base.Run();
- }
- }
- class VenusDispatcher : ICycle
- {
- private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
- private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
- private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
- private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
- private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
- private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
- private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
- private List<MoveItem> _curTmAction = new List<MoveItem>();
- private bool _isCycleMode;
- private int _cycleSetPoint = 0;
- private int _cycledCount = 0;
- private int _cycledWafer = 0;
- private float _throughput = 0.0f;
- private int _tmRobotSingleArmOption = 0;
- private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 },{ ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
- private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
- private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
- private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
- private Stopwatch _cycleWatch = new Stopwatch();
- private SchedulerFACallback _faCallback;
- private SchedulerDBCallback _dbCallback;
- public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
- public bool HasJobRunning => _lstControlJobs.Count > 0;
- private RState _cycleState = RState.Init;
- public RState CycleState => _cycleState;
- private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
- public List<string> InUseRecipes = new List<string>();
- public VenusDispatcher()
- {
- _faCallback = new SchedulerFACallback();
- _dbCallback = new SchedulerDBCallback();
- InitModules();
- DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
- DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
- DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
- _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
- _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
- foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
- {
- _loadportControlJobDic[lp.ToString()] = null;
- DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- DATA.Subscribe("Scheduler.CurrentRecipeList", () => _lstProcessJobs);
- }
- #region public interface
- /// <summary>
- /// 获取lp当前的ControlJob
- /// </summary>
- /// <param name="lp"></param>
- /// <returns></returns>
- public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
- {
- if (ModuleHelper.IsLoadPort(lp))
- {
- return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
- }
- else
- {
- return null;
- }
- }
- public RState Start(params object[] objs)
- {
- if (WaferManager.Instance.HasDuplicatedWafer)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
- return RState.Failed;
- }
- _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
- _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
- _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
- _cycledWafer = 0;
- _cycledCount = 0;
- _throughput = 0;
-
- Clear();
- _cycleWatch.Stop();
- _lpCycleWafer[ModuleName.LP1] = 0;
- _lpCycleWafer[ModuleName.LP2] = 0;
- _lpCycleCount[ModuleName.LP1] = 0;
- _lpCycleCount[ModuleName.LP2] = 0;
- return RState.Running;
- }
- public bool CreateJob(Dictionary<string, object> param, out string reason)
- {
- reason = "";
- //_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
- //_cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
- string[] slotSequence = (string[])param["SlotSequence"];
- string jobId = (string)param["JobId"];
- string module = (string)param["Module"];
- if (string.IsNullOrEmpty(jobId))
- {
- jobId = "CJ_Local_" + module;
- }
- //bool autoStart = (bool)param["AutoStart"];
- string lotId = jobId;
- if (param.ContainsKey("LotId"))
- lotId = (string)param["LotId"];
- //string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
- //string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;
- if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
- {
- reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
- {
- reason = $"{module} should be LoadPort";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- if (_lstControlJobs.Exists(x => x.Name == jobId))
- {
- reason = $"{jobId} already created";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- ControlJobInfo cj = new ControlJobInfo();
- cj.Name = jobId;
- cj.Module = module;
- cj.LotName = lotId;
- cj.LotInnerId = Guid.NewGuid();
- cj.LotWafers = new List<WaferInfo>();
- cj.SetState(EnumControlJobState.WaitingForStart);
- cj.JetState = EnumJetCtrlJobState.Quequed;
- cj.SequenceNameList = slotSequence;
- cj.CycleNumber = _cycleSetPoint; // only for temperary debug
- _lpCycleSP[ModuleHelper.Converter(module)] = _cycleSetPoint;
- Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
- Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
- Dictionary<string, string> indexSequence = new Dictionary<string, string>();
- bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
- for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
- {
- if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
- continue;
- string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
- indexSequence[groupName] = slotSequence[i];
- if (!seqSlot.ContainsKey(groupName))
- {
- seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
- }
- if (!seqSlotWafers.ContainsKey(groupName))
- {
- seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
- }
- seqSlot[groupName][i] = true;
- if (!WaferManager.Instance.CheckHasWafer(module, i))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
- return false;
- }
- if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
- {
- reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
- {
- reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
- WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
- cj.LotWafers.Add(waferInfo);
- waferInfo.SequenceName = slotSequence[i];
- waferInfo.LotId = lotId;
- //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
- seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
- cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
- LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
- }
- if (seqSlotWafers.Count == 0)
- {
- reason = $"job has not assign wafer";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
- string[] seqs = seqSlot.Keys.ToArray();
- for (int i = 0; i < seqs.Length; i++)
- {
- ProcessJobInfo pj = new ProcessJobInfo();
- pj.Name = jobId + "_" + (i + 1);
- pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
- if (pj.Sequence == null)
- {
- reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
- return false;
- }
- pj.ControlJobName = cj.Name;
- pj.LotName = lotId;
- pj.SlotWafers = seqSlotWafers[seqs[i]];
- pj.SetState(EnumProcessJobState.Queued);
- if (!CheckSequencePmReady(pj.Sequence, out reason))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return false;
- }
- pjs.Add(pj);
- }
- _dbCallback.LotUpdate(cj);
- foreach (var pj in pjs)
- {
- cj.ProcessJobNameList.Add(pj.Name);
- _lstProcessJobs.Add(pj);
- }
- _lstControlJobs.Add(cj);
- //AssociatedPMWithLP(cj);
- _loadportControlJobDic[cj.Module] = cj;
- _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
- return true;
- }
- public bool CheckAllJobDone()
- {
- foreach (var cj in _lstControlJobs)
- {
- if (cj.State != EnumControlJobState.Completed)
- return false;
- }
- InUseRecipes.Clear();
- return true;
- }
- public bool CheckJobJustDone(out string sJobName)
- {
- foreach (var cj in _lstControlJobs)
- {
- if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
- {
- //LP;WaferSize;Lot;Number;Start;End;
- sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
- cj.BeenPosted = true;
- return true;
- }
- }
- sJobName = "NULL";
- return false;
- }
- public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
- {
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name)
- return pj;
- }
- return null;
- }
- public bool AbortJob(string jobName, out string reason)
- {
- reason = "";
- ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
- if (cj == null)
- {
- reason = $"abort job rejected, not found job with id {jobName}";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- return false;
- }
- List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name)
- {
- pj.SetState(EnumProcessJobState.Aborting);
- pjAbortList.Add(pj);
- int unprocessed = 0;
- int aborted = 0;
- WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
- foreach (var waferInfo in wafers)
- {
- waferInfo.ProcessJob = null;
- waferInfo.NextSequenceStep = 0;
- if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
- unprocessed++;
- }
- JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
- }
- }
- _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
- _dbCallback.LotFinished(cj);
- foreach (var pj in pjAbortList)
- {
- _lstProcessJobs.Remove(pj);
- }
- _lstControlJobs.Remove(cj);
- if (_loadportControlJobDic.ContainsKey(cj.Module))
- {
- _loadportControlJobDic[cj.Module] = null;
- }
- return true;
- }
- public bool StopJob(string jobName, out string reason)
- {
- reason = "";
- ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
- if (cj == null)
- {
- reason = $"stop job rejected, not found job with id {jobName}";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- return false;
- }
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name)
- {
- pj.SetState(EnumProcessJobState.Stopping);
- }
- }
- _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
- _dbCallback.LotFinished(cj);
- if (_loadportControlJobDic.ContainsKey(cj.Module))
- {
- _loadportControlJobDic[cj.Module] = null;
- }
- return true;
- }
- public bool ResumeJob(string jobName, out string reason)
- {
- reason = "";
- ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
- if (cj == null)
- {
- reason = $"resume job rejected, not found job with id {jobName}";
- //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
- return false;
- }
- if (cj.State == EnumControlJobState.Paused)
- {
- cj.SetState(EnumControlJobState.Executing);
- }
- _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
- _cycleState = RState.Running;
- return true;
- }
- public bool PauseJob(string jobName, out string reason)
- {
- reason = "";
- ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
- if (cj == null)
- {
- reason = $"pause job rejected, not found job with id {jobName}";
- //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
- return false;
- }
- if (cj.State == EnumControlJobState.Executing)
- {
- cj.SetState(EnumControlJobState.Paused);
- }
- _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
- if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
- _cycleState = RState.Paused;
- return true;
- }
- public bool StartJob(string jobName, out string reason)
- {
- reason = "";
- ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
- if (cj == null)
- {
- reason = $"start job rejected, not found job with id {jobName}";
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
- return false;
- }
- if (cj.State == EnumControlJobState.WaitingForStart)
- {
- cj.SetState(EnumControlJobState.Queued);
- //PreJobClean(cj);
- cj.StartTime = DateTime.Now;
- _dbCallback.LotCreated(cj);
- _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
- //if (!_blockingWatcher.IsRunning)
- // _blockingWatcher.Restart();
- //ResetTraceFlag();
- }
- if (!_cycleWatch.IsRunning)
- {
- _cycleWatch.Restart();
- }
- if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
- {
- _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
- _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
- }
- _cycleState = RState.Running;
- return true;
- }
- public RState Monitor()
- {
- prelude();
- RunWaferTask();
- RunModuleTasks();
- RoutingWafers();
- epilogue();
- return _cycleState;
- }
-
- public void Abort()
- {
- }
- public void Clear()
- {
- foreach (var module in _dictModuleTask)
- {
- module.Value.Status = ModuleStatus.Idle;
- module.Value.Scheduler.ResetTask();
- module.Value.ResetTask();
- }
- List<string> keys = _loadportControlJobDic.Keys.ToList();
- foreach (var key in keys)
- {
- _loadportControlJobDic[key] = null;
- }
- _lstWaferTasks.Clear();
- _tmSchdActions.Clear();
- _curTmAction.Clear();
- _lstControlJobs.Clear();
- _lstProcessJobs.Clear();
- InUseRecipes.Clear();
- _lpCycleWafer[ModuleName.LP1] = 0;
- _lpCycleWafer[ModuleName.LP2] = 0;
- _lpCycleCount[ModuleName.LP1] = 0;
- _lpCycleCount[ModuleName.LP2] = 0;
- _lpThroughput[ModuleName.LP1] = 0;
- _lpThroughput[ModuleName.LP2] = 0;
- _cycleState = RState.End;
- }
- #endregion
- #region manual return wafer
- // manual return one wafer while system is auto running
- public bool ManualReturnWafer(object[] objs)
- {
- ModuleName SourceModule = (ModuleName)objs[0];
- int SourceSlot = (int)objs[1];
- if (!_dictModuleTask.Keys.Contains(SourceModule))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
- return false;
- }
- if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
- return false;
- }
- if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
- return false;
- }
- var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
- LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
- _qeReturnWafers.Enqueue(wafer);
- return true;
- }
- public RState CheckManualReturnWafer()
- {
- var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
- var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
- if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
- return RState.Failed;
- }
- foreach (var mod in _dictModuleTask)
- {
- if (ModuleHelper.IsLoadPort(mod.Key))
- continue;
- if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
- {
- LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
- return RState.Failed;
- }
- int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
- for (int slot = 0; slot < nSlotNumber; slot++)
- {
- var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
- if (wafer.IsEmpty)
- continue;
- var destLP = (ModuleName)wafer.OriginStation;
- if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
- {
- LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
- return RState.Failed;
- }
- if (!ModuleHelper.IsLoadPort(destLP))
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
- return RState.Failed;
- }
- }
- }
- Clear();
- return RState.Running;
- }
- public RState ReturnAllWafers()
- {
- int systemWaferCount = 0;
- foreach (var mod in _dictModuleTask)
- {
- if (ModuleHelper.IsLoadPort(mod.Key))
- continue;
- int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
- for (int slot = 0; slot < nSlotNumber; slot++)
- {
- var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
- if (!wafer.IsEmpty)
- systemWaferCount++;
- }
- }
- if (systemWaferCount == 0)
- return RState.End;
- ReturnInternalWafers();
- return RState.Running;
- }
- #endregion
- #region internal implementation
- private void InitModules()
- {
- foreach (var module in ModuleHelper.InstalledModules)
- {
- if (ModuleHelper.IsInstalled(module))
- {
- if (ModuleHelper.IsPm(module))
- {
- _dictModuleTask[module] = new VenusPMTask(module);
- }
- else if (ModuleHelper.IsTMRobot(module))
- {
- _dictModuleTask[module] = new VenusTMRobotTask(module);
- }
- else if (ModuleHelper.IsAligner(module))
- {
- _dictModuleTask[module] = new PreAlignTask(module);
- }
- else if (ModuleHelper.IsLoadPort(module))
- {
- _dictModuleTask[module] = new LoadPortTask(module);
- }
- }
- }
- }
- private void prelude()
- {
- bool available = true;
- foreach (var mod in _dictModuleTask)
- {
- available = mod.Value.Scheduler.IsAvailable; // force scheduler update
- }
- }
- private void epilogue()
- {
- UpdateProcessJobStatus();
- UpdateControlJobStatus();
- CreateNewWaferTask();
- _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
- }
- private void RunWaferTask()
- {
- foreach (var task in _lstWaferTasks)
- {
- task.Run();
- }
- }
- private void RunModuleTasks()
- {
- foreach (var task in _dictModuleTask)
- {
- task.Value.Run();
- }
- }
- private void RoutingWafers()
- {
- if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
- {
- RunSchdTMActions();
- return;
- }
- if (_tmRobotStatus != RState.End)
- return;
- if (_tmRobotSingleArmOption != 0)
- {
- RoutingWaferWithSingleArm();
- return;
- }
- var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
- var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
- var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
- var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
- var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
- if(robotWafers.Count == 0)
- {
- if(readyReturnWafers.Count > 0)
- {
- if(readyReturnWafers.Count == 1 || readyReturnWafers[0].destMod != readyReturnWafers[1].destMod)
- {
- // return one wafer
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
- }
- else
- {
- // return two wafer
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
- var doublePlaceActions = new List<MoveItem>
- {
- new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
- new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
- };
- _tmSchdActions.Enqueue(doublePlaceActions);
- }
- }
- else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
- {
- var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
- if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
- {
- var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
- if(pmTask.ReadyMoveIn(alignerWafer))
- {
- // move aligner wafer to PM
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
- }
- }
- }
- else
- {
- if(emptyAndReadyIn20sPMs.Count >= 2 && waitInWafers.Count >= 2 && waitInWafers[0].currentMod == waitInWafers[1].currentMod)
- {
- var doublePickActions = new List<MoveItem>()
- {
- new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
- new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
- };
- _tmSchdActions.Enqueue(doublePickActions);
- if(aligner.Count > 0)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
- }
- }
- else if(emptyAndReadyIn20sPMs.Count >= 1 && waitInWafers.Count >= 1)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
- if (aligner.Count > 0)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
- }
- }
- }
- }
- else if(robotWafers.Count == 1)
- {
- var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
- if (readyReturnWafers.Count >= 1)
- {
- // return one wafer
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand) });
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
- }
- else
- {
- if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
- {
- var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
- if(!robotWafers.First().IsAligned)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
- }
- if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
- {
- var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
- if (pmTask.ReadyMoveIn(alignerWafer))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
- }
- }
- }
- else
- {
- if (ModuleHelper.IsPm(robotWafers.First().destMod))
- {
- if (!robotWafers.First().IsAligned)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
- }
- else if (emptyAndReadyIn20sPMs.Contains(robotWafers.First().destMod))
- {
- var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
- if (pmTask.ReadyMoveIn(robotWafers.First()))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
- }
- }
- }
- else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
- }
- }
- }
- }
- else // had better not go here
- {
- foreach(var wafer in robotWafers)
- {
- if (ModuleHelper.IsPm(wafer.destMod))
- {
- if (!wafer.IsAligned)
- {
- if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
- }
- }
- else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
- {
- var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
- if (pmTask.ReadyMoveIn(wafer))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
- }
- }
- }
- else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
- }
- }
- }
- }
- private void RoutingWaferWithSingleArm()
- {
- var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
- var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
- var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
- var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
- var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
- var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
- if (robotWafers.Count == 0)
- {
- if (readyReturnWafers.Count > 0)
- {
- // return one wafer
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
- }
- else
- {
- if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
- {
- var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
- if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
- // move aligner wafer to PM
- var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
- if (pmTask.ReadyMoveIn(alignerWafer))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
- }
- }
- }
- else
- {
- foreach(var wafer in waitInWafers)
- {
- if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
- {
- // move one wafer from LP to aligner
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
- }
- }
- }
- }
- }
- else
- {
- var wafer = robotWafers[0];
- if (ModuleHelper.IsPm(wafer.destMod))
- {
- if (!wafer.IsAligned)
- {
- if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
- }
- }
- else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
- {
- var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
- if (pmTask.ReadyMoveIn(wafer))
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
- }
- }
- }
- else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
- {
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
- }
- }
- }
- private void RunSchdTMActions()
- {
- if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
- {
- if (_tmSchdActions.Count > 0)
- {
- if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
- {
- var nextActions = _tmSchdActions.First();
- if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
- return;
- if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
- return;
- _curTmAction = _tmSchdActions.Dequeue();
- foreach (var action in _curTmAction)
- {
- var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
- waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
- }
- (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
- }
- }
- else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
- {
- _curTmAction.Clear();
- }
- }
- }
- private bool isReturnActionsDone(List<MoveItem> items)
- {
- foreach (var item in items)
- {
- if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
- return false;
- }
- return true;
- }
- private bool IsMovingActionsDone(List<MoveItem> actions)
- {
- bool CheckWaferExistence(ModuleName mod, int slot)
- {
- return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
- }
- if (actions.Count == 1)
- {
- if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
- !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
- return false;
- }
- else
- {
- // initialize all the wafer existance before move
- var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
- foreach (var ac in actions)
- {
- var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
- var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
- if (!slotWafers.ContainsKey(scrSlot))
- {
- slotWafers[scrSlot] = true;
- }
- if (!slotWafers.ContainsKey(destSlot))
- {
- slotWafers[destSlot] = false;
- }
- }
- // simulate moved result
- foreach (var ac in actions)
- {
- var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
- var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
- if (!slotWafers[scrSlot])
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
- }
- else
- {
- slotWafers[scrSlot] = false;
- }
- if (slotWafers[destSlot])
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
- }
- else
- {
- slotWafers[destSlot] = true;
- }
- }
- foreach (var slot in slotWafers)
- {
- if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
- return false;
- }
- }
- return true;
- }
- private void WaferArrived(WaferTask wafer, MoveItem item)
- {
- _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
- //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
- if (ModuleHelper.IsLoadPort(item.DestinationModule))
- {
- ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
- if (currentControlJob != null)
- {
- _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
- }
- }
- //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
- }
- private void WaferLeaved(WaferTask wafer, MoveItem item)
- {
- _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
- //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
- if (ModuleHelper.IsLoadPort(item.SourceModule))
- {
- (_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
- ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
- if (currentControlJob != null)
- {
- _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
- }
- }
- //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
- }
- private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
- {
- bool allWaferReturn = true;
- foreach (var slot in pj.SlotWafers)
- {
- var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
- if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
- {
- allWaferReturn = false;
- break;
- }
- }
- return allWaferReturn;
- }
- private void ReturnInternalWafers()
- {
- if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
- {
- RunSchdTMReturnActions();
- return;
- }
- if (_tmRobotStatus != RState.End)
- return;
- for (int i = 0; i < 2; i++)
- {
- if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
- {
- var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
- return;
- }
- }
- foreach(var mod in _dictModuleTask)
- {
- if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
- continue;
- if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
- {
- var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
- var freeHands = GetTMFreeHand();
- if(freeHands.Count > 0)
- {
- var hand = freeHands[0];
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
- _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
- return;
- }
- }
- }
- }
- private List<Hand> GetTMFreeHand()
- {
- var lstHands = new List<Hand>();
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
- lstHands.Add(Hand.Blade1);
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
- lstHands.Add(Hand.Blade2);
- return lstHands;
- }
- private void UpdateProcessJobStatus()
- {
- if (_tmRobotStatus == RState.Running)
- return;
- foreach (var pj in _lstProcessJobs)
- {
- if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
- {
- pj.SetState(EnumProcessJobState.ProcessingComplete);
- JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
- }
- }
- }
- private void UpdateControlJobStatus()
- {
- if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
- return;
- var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
- var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
- if (runningJobs.Count == 0)
- {
- if (queueJobs.Count() > 0)
- {
- // start the first waiting job
- RunControlJob(queueJobs.First());
- }
- }
- else
- {
- foreach (var runningjob in runningJobs)
- {
- // update the running job
- RunControlJob(runningjob);
- }
- foreach (var queueJob in queueJobs)
- {
- if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
- {
- // parallelly start the not intersect job
- RunControlJob(queueJob);
- }
- }
- }
- // update system cycle status
- if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
- _cycleState = RState.End;
- List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
- foreach (var cj in _lstControlJobs)
- {
- LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
- if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
- {
- cjRemoveList.Add(cj);
- }
- }
- foreach (var cj in cjRemoveList)
- {
- List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name)
- pjRemoveList.Add(pj);
- }
- foreach (var pj in pjRemoveList)
- {
- _lstProcessJobs.Remove(pj);
- }
- _lstControlJobs.Remove(cj);
- }
- }
- private bool RunControlJob(ControlJobInfo cj)
- {
- switch (cj.JetState)
- {
- case EnumJetCtrlJobState.Quequed:
- {
- if (IsCtrlJobNeedPreClean(cj))
- {
- cj.JetState = EnumJetCtrlJobState.PreJobClean;
- var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
- foreach (var pm in PMs)
- {
- var pmTask = _dictModuleTask[pm] as VenusPMTask;
- if (pmTask != null && pmTask.Scheduler.IsOnline)
- {
- pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
- }
- }
- }
- else
- {
- ActiveControlJob(cj);
- }
- cj.SetState(EnumControlJobState.Executing);
- }
- break;
- case EnumJetCtrlJobState.PreJobClean:
- {
- if (IsPreJobCleanDone(cj))
- {
- ActiveControlJob(cj);
- }
- }
- break;
- case EnumJetCtrlJobState.Processing:
- {
- if (IsCtrlJobNeedPostClean(cj))
- {
- if (IsAllJobWaferProcessedOrProcessing(cj))
- {
- cj.JetState = EnumJetCtrlJobState.PostJobClean;
- var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
- foreach (var pm in PMs)
- {
- var pmTask = _dictModuleTask[pm] as VenusPMTask;
- if (pmTask != null && pmTask.Scheduler.IsOnline)
- {
- pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
- }
- }
- }
- }
- else
- {
- if (IsAllProcessJobComplete(cj))
- {
- cj.JetState = EnumJetCtrlJobState.Completed;
- }
- }
- }
- break;
- case EnumJetCtrlJobState.PostJobClean:
- {
- if (IsPostJobCleanDone(cj))
- {
- cj.JetState = EnumJetCtrlJobState.Completed;
- }
- }
- break;
- }
- // caculate processed wafer by control job
- var lp = ModuleHelper.Converter(cj.Module);
- int countProcessed = 0;
- foreach (var pjName in cj.ProcessJobNameList)
- {
- var pj = _lstProcessJobs.Find(x => x.Name == pjName);
- if (pj == null)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
- continue;
- }
- // caculate process wafer by process
- if (_lpCycleCount[lp] < cj.CycleNumber)
- {
- foreach (var pjSlotWafer in pj.SlotWafers)
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
- if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
- countProcessed++;
- }
- }
- }
- int lpCycleWafer = 0;
- if (cj.JetState == EnumJetCtrlJobState.Completed)
- {
- cj.EndTime = DateTime.Now;
- _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
- _dbCallback.LotFinished(cj);
- if (_lpCycleCount[lp] >= cj.CycleNumber - 1 || !_isCycleMode)
- (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
- _lpCycleCount[lp]++;
- lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
- _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
- LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
- if (_lpCycleCount[lp] < cj.CycleNumber)
- {
- cj.SetState(EnumControlJobState.Executing);
- cj.JetState = EnumJetCtrlJobState.Quequed;
- cj.LotInnerId = Guid.NewGuid();
- _dbCallback.LotCreated(cj);
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name)
- {
- pj.SetState(EnumProcessJobState.Queued);
- pj.InnerId = Guid.NewGuid();
- foreach (var pjSlotWafer in pj.SlotWafers)
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
- wafer.ProcessJob = null;
- wafer.NextSequenceStep = 0;
- wafer.ProcessState = EnumWaferProcessStatus.Idle;
- }
- }
- }
- _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
- }
- else
- {
- cj.SetState(EnumControlJobState.Completed);
- }
- }
- else
- {
- lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
- }
- if (lpCycleWafer != _lpCycleWafer[lp])
- {
- _lpCycleWafer[lp] = lpCycleWafer;
- if (_lpCycleCount[lp] > 0)
- {
- _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
- }
- }
- return cj.State == EnumControlJobState.Completed;
- }
- private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
- {
- var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
- var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
- return cj1Pms.Intersect(cj2Pms).Count() > 0;
- }
- private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
- {
- return !string.IsNullOrWhiteSpace(cj.PreJobClean);
- }
- private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
- {
- return !string.IsNullOrWhiteSpace(cj.PostJobClean.Trim());
- }
- private bool IsPreJobCleanDone(ControlJobInfo cj)
- {
- var pms = GetWaitPreCleanPMsByCtrlJob(cj);
- foreach (var pm in pms)
- {
- var pmTask = _dictModuleTask[pm] as VenusPMTask;
- if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PreClean))
- return false;
- }
- return true;
- }
- private bool IsPostJobCleanDone(ControlJobInfo cj)
- {
- var pms = GetWaitPreCleanPMsByCtrlJob(cj);
- foreach (var pm in pms)
- {
- var pmTask = _dictModuleTask[pm] as VenusPMTask;
- if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PostClean))
- return false;
- }
- return true;
- }
- private bool ActiveProcessJob(ProcessJobInfo pj)
- {
- foreach (var pjSlotWafer in pj.SlotWafers)
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
- wafer.ProcessJob = pj;
- wafer.NextSequenceStep = 0;
- WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
- }
- ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
- CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
- JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
- pj.SetState(EnumProcessJobState.Processing);
- return true;
- }
- private bool ActiveControlJob(ControlJobInfo cj)
- {
- cj.JetState = EnumJetCtrlJobState.Processing;
- foreach (var pjName in cj.ProcessJobNameList)
- {
- var pj = _lstProcessJobs.Find(x => x.Name == pjName);
- if (pj == null)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
- continue;
- }
- if (pj.State == EnumProcessJobState.Queued)
- {
- ActiveProcessJob(pj);
- }
- }
- return true;
- }
- private bool IsAllProcessJobComplete(ControlJobInfo cj)
- {
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
- {
- return false;
- }
- }
- return true;
- }
- private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
- {
- List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
- int original = (int)ModuleHelper.Converter(cj.Module);
- foreach (var mod in allModules)
- {
- if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
- continue;
- var wafers = WaferManager.Instance.GetWafers(mod);
- foreach (var wafer in wafers)
- {
- if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
- continue;
- if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
- return false; ;
- }
- }
- return true;
- }
- private ModuleName GetComingAvailablePM(ControlJobInfo cj)
- {
- var lstInProcessPMs = new List<ModuleName>();
- foreach (var wafer in cj.LotWafers)
- {
- if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
- {
- foreach (var pm in wafer.ProcessJob.Sequence.PMs)
- {
- if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
- lstInProcessPMs.Add(pm);
- }
- }
- }
- Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
- foreach (var mod in _dictModuleTask)
- {
- if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
- {
- pmAssociatedWaferCount[mod.Key] = 0;
- }
- }
- var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
- foreach (var wafer in unprocessedWafer)
- {
- if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
- {
- pmAssociatedWaferCount[wafer.destMod]++;
- }
- }
- var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
- if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
- return oderedPMCount.First().Key;
- return ModuleName.System;
- }
- private void CreateNewWaferTask()
- {
- var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
- var onDutyPms = new Dictionary<ModuleName, int>();
- foreach (var job in runningJobs)
- {
- var pms = GetWaitPreCleanPMsByCtrlJob(job);
- foreach (var pm in pms)
- {
- if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
- {
- onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
- }
- }
- }
- if (runningJobs.Count == 0 || onDutyPms.Count == 0)
- return;
- var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
- if (oderedPMs.First().Value < 1)
- {
- foreach (var runningJob in runningJobs)
- {
- foreach (var wafer in runningJob.LotWafers)
- {
- if (wafer.IsEmpty || wafer.ProcessJob == null)
- continue;
- if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
- {
- CreateWaferTasks(wafer, oderedPMs.First().Key);
- return;
- }
- }
- }
- }
- }
- private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
- {
- var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
- var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
- Recipe recipe = Recipe.Load(recipeContent);
- int temperature = 0;
- if (int.TryParse(recipe.Header.Temperature, out int temp))
- {
- temperature = temp;
- }
- var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
- wafer.OriginSlot,
- pm,
- 0,
- temperature,
- wafer.InnerId,
- wafer.ProcessJob.Sequence.InnerId,
- recipeName,
- wafer.ProcessJob.Sequence.WTWCleanRecipe,
- wafer.ProcessJob.Sequence.LLInOutPath,
- wafer.ProcessJob.Sequence.LLDelayTime,
- IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
- waferTask.OnWaferArrived += WaferArrived;
- waferTask.OnWaferLeaved += WaferLeaved;
- _lstWaferTasks.Add(waferTask);
- }
- private bool IsSequenceNeedAlign(SequenceInfo sequence)
- {
- // check wether need align
- foreach (var step in sequence.Steps)
- {
- foreach (var mod in step.StepModules)
- {
- if (ModuleHelper.IsAligner(mod))
- return true;
- }
- }
- return false;
- }
- private void RunSchdTMReturnActions()
- {
- var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
- if (tmRobot == null || !tmRobot.IsAvailable)
- return;
- if (_tmSchdActions.Count > 0)
- {
- if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
- {
- var nextActions = _tmSchdActions.First();
- var nextModule = nextActions.First().Module;
- if (!_dictModuleTask[nextModule].IsIdle)
- return;
- _curTmAction = _tmSchdActions.Dequeue();
- tmRobot.SendMoveItems(_curTmAction.ToArray());
- }
- }
- else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
- {
- _curTmAction.Clear();
- }
- }
- #endregion internal implementation
- #region sequence/recipe validation
- private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
- {
- reason = "";
- foreach (var pm in seq.PMs)
- {
- if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
- return true;
- }
- reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
- return false;
- }
- private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
- {
- for (int i = 0; i < seq.Steps.Count; i++)
- {
- SequenceStepInfo stepInfo = seq.Steps[i];
- foreach (var module in stepInfo.StepModules)
- {
- if (ModuleHelper.IsPm(module))
- {
- string attr = $"{module}Recipe";
- if (stepInfo.StepParameter.ContainsKey(attr)
- && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
- {
- var recipeName = (string)stepInfo.StepParameter[attr];
- if (!string.IsNullOrWhiteSpace(recipeName))
- {
- var recipeContent =
- RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
- if (string.IsNullOrWhiteSpace(recipeContent))
- {
- reason = $"Can not find recipe file{recipeName}";
- return false;
- }
- }
- }
- }
- }
- }
- reason = "";
- return true;
- }
- private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
- {
- var pmlist = new List<ModuleName>();
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name)
- {
- foreach (var pm in pj.Sequence.PMs)
- {
- if (!pmlist.Contains(pm))
- pmlist.Add(pm);
- }
- }
- }
- return pmlist;
- }
- #endregion
- }
- }
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