SimulatorSystem.cs 44 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. namespace Venus_Simulator.Instances
  13. {
  14. public class SimulatorSystem : Singleton<SimulatorSystem>
  15. {
  16. private PeriodicJob _thread;
  17. private Random _rd = new Random();
  18. private RD_TRIG _trigATM = new RD_TRIG();
  19. private RD_TRIG _trigVAC = new RD_TRIG();
  20. private R_TRIG _trigLLExtend = new R_TRIG();
  21. private R_TRIG _trigLLRetract = new R_TRIG();
  22. private static int count = 0;
  23. private readonly float ATM_THRESHOLD = 750000;
  24. private readonly float ATM_PRESSURE = 760000;
  25. private readonly float ATM_LoadLock_PRESSURE = 760000;
  26. private readonly uint VAC_SW_PRESSURE = 9500;
  27. private readonly uint PROCESS_GAUGE = 10000;
  28. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  29. public SimulatorSystem()
  30. {
  31. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  32. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  33. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  34. // TODO
  35. }
  36. ~SimulatorSystem()
  37. {
  38. _thread?.Stop();
  39. }
  40. public void Initialize()
  41. {
  42. SetDefaultValue(ModuleName.PMA);
  43. SetDefaultValue(ModuleName.PMB);
  44. SetTMDefaultValue();
  45. Singleton<DataManager>.Instance.Initialize(false);
  46. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  47. }
  48. private void SetDefaultValue(ModuleName mod)
  49. {
  50. if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  51. {
  52. // chamber
  53. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  54. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  55. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  56. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  57. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  58. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  59. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  60. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  61. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  62. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  63. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  64. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  65. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  66. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  67. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  68. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  69. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  70. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  71. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  72. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  73. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  74. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  75. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  76. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  78. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  79. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  82. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  83. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  85. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  86. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  88. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  89. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  90. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  91. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  92. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  93. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  94. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  95. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  96. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  97. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  99. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  100. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  101. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  102. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  103. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  104. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  106. //// pressure
  107. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  108. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  109. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  110. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  111. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  112. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", 5000);
  113. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  114. //// Temperature
  115. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  116. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  117. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  118. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  119. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  120. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  121. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  122. if (mod == ModuleName.PMA)
  123. {
  124. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  125. }
  126. else if (mod == ModuleName.PMB)
  127. {
  128. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  129. }
  130. // Datetime
  131. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  132. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  133. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  134. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  135. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  136. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  137. }
  138. else if ((SimulatorJetChamber.CurrentChamber == JetChamber.Kepler))
  139. {
  140. // chamber
  141. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  142. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  143. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  144. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  145. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  146. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  147. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  148. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  149. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  150. IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = false;
  151. IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = true;
  152. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  153. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  154. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  155. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  156. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  157. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  158. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  159. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  160. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  161. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  162. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  165. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  167. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  168. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  169. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  170. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  171. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  172. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  173. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  177. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  179. //// pressure
  180. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  181. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  182. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  183. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  184. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  185. //// Temperature
  186. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  187. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  188. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  189. // Datetime
  190. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  191. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  192. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  193. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  194. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  195. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  196. }
  197. }
  198. private void SetTMDefaultValue()
  199. {
  200. ModuleName mod = ModuleName.TM;
  201. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  202. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  203. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  204. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  205. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  206. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  207. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  208. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  209. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  210. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  211. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  212. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  214. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  215. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  216. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  217. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  218. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  219. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  220. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  221. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  222. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  223. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  224. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  225. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  226. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  227. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  228. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  229. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  231. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  232. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  233. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  234. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  235. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  236. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  237. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  238. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  239. // Datetime
  240. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  241. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  242. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  243. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  244. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  245. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  246. }
  247. private bool OnMonitor()
  248. {
  249. try
  250. {
  251. if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  252. {
  253. // PMA
  254. MonitorSlitDoor(ModuleName.PMA);
  255. MonitorPin(ModuleName.PMA);
  256. MonitorPressure(ModuleName.PMA);
  257. MonitorExtendAndRetract(ModuleName.PMA);
  258. //MonitorTemperature(ModuleName.PMA);
  259. MonitorGas(ModuleName.PMA);
  260. //MonitorRF(ModuleName.PMA);
  261. ChangeTime(ModuleName.PMA);
  262. //MonitorIOPumpCtrl(ModuleName.PMA);
  263. // PMB
  264. MonitorSlitDoor(ModuleName.PMB);
  265. MonitorPin(ModuleName.PMB);
  266. MonitorPressure(ModuleName.PMB);
  267. //MonitorTemperature(ModuleName.PMB);
  268. MonitorGas(ModuleName.PMB);
  269. // MonitorRF(ModuleName.PMB);
  270. ChangeTime(ModuleName.PMB);
  271. //MonitorIOPumpCtrl(ModuleName.PMB);
  272. MonitorMFSlitDoor();
  273. ChangeTime(ModuleName.TM);
  274. }
  275. else if(SimulatorJetChamber.CurrentChamber == JetChamber.Kepler)
  276. {
  277. }
  278. }
  279. catch (Exception e)
  280. {
  281. LOG.WriteExeption(e);
  282. }
  283. return true;
  284. }
  285. private void ChangeTime(ModuleName mod)
  286. {
  287. // Heartbeat with PLC
  288. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  289. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  290. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  291. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  292. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  293. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  294. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  295. }
  296. void MonitorSlitDoor(ModuleName mod)
  297. {
  298. // slit door open
  299. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  300. {
  301. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  302. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  303. }
  304. // slit door close
  305. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  306. {
  307. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  308. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  309. }
  310. }
  311. void MonitorMFSlitDoor()
  312. {
  313. ModuleName mod = ModuleName.TM;
  314. // LLA T door open
  315. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  316. {
  317. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  318. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  319. }
  320. // LLB T door open
  321. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  322. {
  323. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  324. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  325. }
  326. // LLA E door open
  327. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  328. {
  329. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  330. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  331. }
  332. // LLB E door open
  333. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  334. {
  335. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  336. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  337. }
  338. // LLA T door close
  339. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  340. {
  341. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  342. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  343. }
  344. // LLB T door close
  345. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  346. {
  347. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  348. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  349. }
  350. // LLA E door close
  351. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  352. {
  353. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  354. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  355. }
  356. // LLB E door close
  357. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  358. {
  359. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  360. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  361. }
  362. }
  363. void MonitorPin(ModuleName mod)
  364. {
  365. // lift pin up
  366. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  367. {
  368. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  369. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  370. }
  371. }
  372. void MonitorExtendAndRetract(ModuleName mod)
  373. {
  374. // Extend
  375. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  376. if (_trigLLExtend.Q)
  377. {
  378. _trigLLRetract.RST = true;
  379. Thread.Sleep(500);
  380. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  381. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  382. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  383. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  384. }
  385. // Retract
  386. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  387. if (_trigLLRetract.Q)
  388. {
  389. count++;
  390. _trigLLExtend.RST = true;
  391. Thread.Sleep(500);
  392. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  393. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  394. if (count == 1)
  395. {
  396. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  397. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  398. }
  399. else if (count == 2)
  400. {
  401. count = 0;
  402. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  403. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  404. }
  405. }
  406. }
  407. void MonitorPressure(ModuleName mod)
  408. {
  409. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  410. // Loadlock pressure
  411. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  412. // Foreline
  413. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  414. {
  415. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  416. }
  417. else
  418. {
  419. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  420. }
  421. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  422. string sAI_ChamberPressure = "AI_Chamber_Pressure_760t";
  423. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  424. //float chamber_pressure = GetMockChamberPressure(mod);
  425. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  426. // soft pump & fast pump
  427. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  428. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  429. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  430. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  431. {
  432. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  433. {
  434. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  435. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  436. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  437. {
  438. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  439. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  440. }
  441. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  442. {
  443. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  444. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  445. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  446. }
  447. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  448. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  449. }
  450. else if (fast_pump_vlv.Value)
  451. {
  452. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  453. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  454. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  455. {
  456. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  457. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  458. }
  459. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  460. {
  461. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  462. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  463. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  464. }
  465. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  466. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  467. }
  468. else if (soft_pump_vlv.Value)
  469. {
  470. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  471. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  472. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  473. {
  474. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  475. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  476. }
  477. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  478. {
  479. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  480. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  481. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  482. }
  483. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  484. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  485. }
  486. else if (turbo_pump_vlv.Value)
  487. {
  488. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  489. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  490. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  491. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  492. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  493. }
  494. }
  495. // fast vent & purge
  496. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  497. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  498. //if (vent_vlv.Value || purge_vlv.Value)
  499. //{
  500. // if (vent_vlv.Value && purge_vlv.Value)
  501. // {
  502. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  503. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  504. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  505. // {
  506. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  507. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  508. // }
  509. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  510. // {
  511. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  512. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  513. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  514. // }
  515. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  516. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  517. // }
  518. // else
  519. //
  520. if (vent_vlv.Value)
  521. {
  522. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  523. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  524. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  525. {
  526. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  527. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  528. }
  529. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  530. {
  531. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  532. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  533. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  534. }
  535. else
  536. {
  537. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  538. }
  539. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  540. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  541. }
  542. // Loadlock Pumping Valve
  543. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  544. if (Loadlock_pump_vlv.Value)
  545. {
  546. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  547. }
  548. // Loadlock vent
  549. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  550. if (Loadlock_vent_vlv.Value)
  551. {
  552. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  553. }
  554. // 压力值越界,复位
  555. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  556. if (chamber_pressure1 > ATM_PRESSURE)
  557. {
  558. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  559. }
  560. else if (chamber_pressure1 < 20)
  561. {
  562. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", 20);
  563. }
  564. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  565. if (process_pressure1 > PROCESS_GAUGE)
  566. {
  567. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  568. }
  569. else if (process_pressure1 < 20)
  570. {
  571. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  572. }
  573. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  574. if (foreline_pressure > 10000)
  575. {
  576. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  577. }
  578. else if (foreline_pressure < 150)
  579. {
  580. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  581. }
  582. // 模拟压力计漂移
  583. //int p1 = (int)GetMockChamberPressure(mod);
  584. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  585. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  586. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  587. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  588. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  589. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  590. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  591. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  592. // 根据当前压力值设定信号
  593. //float chamber_pressure2 = GetMockChamberPressure(mod);
  594. // ATM switch
  595. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  596. // VAC switch
  597. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  598. // Throttle valve
  599. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  600. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  601. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  602. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  603. // 压力值
  604. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  605. //{
  606. // short increase = (short)_rd.Next(20, 30);
  607. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  608. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  609. // {
  610. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  611. // }
  612. //}
  613. //else
  614. //{
  615. // short increase = (short)_rd.Next(20, 30);
  616. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  617. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  618. // {
  619. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  620. // }
  621. //}
  622. //// 位置值
  623. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  624. //{
  625. // short increase = (short)_rd.Next(20, 30);
  626. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  627. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  628. // {
  629. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  630. // }
  631. //}
  632. //else
  633. //{
  634. // short increase = (short)_rd.Next(20, 30);
  635. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  636. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  637. // {
  638. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  639. // }
  640. //}
  641. }
  642. //float GetMockChamberPressure(ModuleName mod)
  643. //{
  644. // return GetAiValue($"{mod}.AI_Chamber_Pressure_760t");
  645. //}
  646. //void SetMockChamberPressure(ModuleName mod, float val)
  647. //{
  648. // SetAiValue($"{mod}.AI_Chamber_Pressure_760t", val);
  649. //}
  650. void SetAiValue(string name, float value)
  651. {
  652. byte[] flow = BitConverter.GetBytes(value);
  653. short high1 = BitConverter.ToInt16(flow, 0);
  654. short low1 = BitConverter.ToInt16(flow, 2);
  655. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  656. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  657. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  658. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  659. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  660. }
  661. float GetAiValue(string name)
  662. {
  663. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  664. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  665. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  666. return flow;
  667. }
  668. float GetAoValue(string name)
  669. {
  670. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  671. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  672. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  673. return flow;
  674. }
  675. void MonitorTemperature(ModuleName mod)
  676. {
  677. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  678. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  679. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  680. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  681. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  682. // 底座
  683. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  684. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  685. //{
  686. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  687. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  688. //}
  689. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  690. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  691. //{
  692. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  693. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  694. //}
  695. // Foreline
  696. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  697. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  698. {
  699. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  700. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  701. }
  702. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  703. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  704. {
  705. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  706. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  707. }
  708. // Wall
  709. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  710. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  711. {
  712. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  713. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  714. }
  715. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  716. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  717. {
  718. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  719. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  720. }
  721. }
  722. void MonitorGas(ModuleName mod)
  723. {
  724. // gas
  725. this.SimulateMFC(ModuleName.PMA, 1);
  726. this.SimulateMFC(ModuleName.PMA, 2);
  727. this.SimulateMFC(ModuleName.PMA, 3);
  728. this.SimulateMFC(ModuleName.PMA, 4);
  729. this.SimulateMFC(ModuleName.PMA, 5);
  730. this.SimulateMFC(ModuleName.PMA, 6);
  731. this.SimulateMFC(ModuleName.PMA, 7);
  732. this.SimulateMFC(ModuleName.PMA, 8);
  733. this.SimulateN2(ModuleName.PMA);
  734. this.SimulateHe(ModuleName.PMA);
  735. }
  736. private void SimulateMFC(ModuleName mod, byte gasNum)
  737. {
  738. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  739. if (gasNum == 3)
  740. {
  741. sp = Math.Max(0, sp - 150);
  742. }
  743. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  744. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  745. }
  746. private void SimulateN2(ModuleName mod)
  747. {
  748. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  749. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  750. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  751. }
  752. private void SimulateHe(ModuleName mod)
  753. {
  754. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  755. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  756. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  757. }
  758. void MonitorRF(ModuleName mod)
  759. {
  760. // RF generator
  761. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  762. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  763. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  764. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  765. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  766. }
  767. void MonitorIOPumpCtrl(ModuleName mod)
  768. {
  769. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  770. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  771. }
  772. public void Terminate()
  773. {
  774. _thread.Stop();
  775. }
  776. ////////////////////////////////////////////////////////////////////////
  777. ////////////////////////////////////////////////////////////////////////
  778. public void SetCoolantOutletTemp(string module, int Temp)
  779. {
  780. SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  781. }
  782. }
  783. }