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LoadPrepareRoutine.cs
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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LoadRoutine.cs
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 year ago |
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LoadWithSMIFRoutine.cs
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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UnloadRoutine.cs
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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UnloadWithSMIFRoutine.cs
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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VceEntity.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
zhouhr
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.