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ISchedulerDBCallback.cs
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5b037046f9
Add TM/LL modules.
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2 år sedan |
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SchedulerAligner.cs
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e61f018b66
Manual Return wafer while running cycle.
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1 år sedan |
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SchedulerDBCallback.cs
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5b037046f9
Add TM/LL modules.
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2 år sedan |
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SchedulerEfemRobot.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 år sedan |
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SchedulerLoadLock.cs
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e61f018b66
Manual Return wafer while running cycle.
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1 år sedan |
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SchedulerLoadPort.cs
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e61f018b66
Manual Return wafer while running cycle.
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1 år sedan |
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SchedulerModule.cs
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 år sedan |
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SchedulerPM.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 år sedan |
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SchedulerSETMRobot.cs
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 år sedan |
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SchedulerTMRobot.cs
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d714771195
fix atm prepare pressure bugs.
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1 år sedan |
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SchedulerVCE.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 år sedan |
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TransferModule.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 år sedan |
lixiang
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置