OverKepler2200AViewModel.cs 68 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. using System.Windows.Controls;
  20. using Aitex.Core.RT.Log;
  21. using System.Windows.Input;
  22. namespace Venus_MainPages.ViewModels
  23. {
  24. internal class OverKepler2200AViewModel : BindableBase
  25. {
  26. #region 私有字段
  27. private double m_TurboN2FlowSetPoint;
  28. private List<string> m_CurrentModuleRecipes = new List<string>();
  29. private bool m_PVN21ValveIsOpen;
  30. private bool m_PVN22ValveIsOpen;
  31. private bool m_N2ValveIsOpen;
  32. private bool m_PV11ValveIsOpen;
  33. private bool m_PV12ValveIsOpen;
  34. private bool m_PV21ValveIsOpen;
  35. private bool m_PV22ValveIsOpen;
  36. private bool m_PV31ValveIsOpen;
  37. private bool m_PV32ValveIsOpen;
  38. private bool m_PV41ValveIsOpen;
  39. private bool m_PV42ValveIsOpen;
  40. private bool m_MFC1ValveIsOpen;
  41. private bool m_MFC2ValveIsOpen;
  42. private bool m_MFC3ValveIsOpen;
  43. private bool m_MFC4ValveIsOpen;
  44. private bool m_MFC5ValveIsOpen;
  45. private bool m_MFC6ValveIsOpen;
  46. private bool m_MFC7ValveIsOpen;
  47. private bool m_MFC8ValveIsOpen;
  48. private bool m_GasFinalValveIsOpen;
  49. private bool m_SoftPumpValveIsOpen;
  50. private bool m_FastPumpValveIsOpen;
  51. //private bool m_PVHe1ValveIsOpen;
  52. //private bool m_PVHe2ValveIsOpen;
  53. private bool m_TurboPumpPumpingValveIsOpen;
  54. private bool m_TurboPumpPurgeValveIsOpen;
  55. private bool m_GuageValveIsOpen;
  56. private bool m_PendulumValveIsOpen;
  57. private bool m_PurgeValveIsOpen;
  58. //private double m_HeGasSetpoint;
  59. //private int m_HePressureSetpoint;
  60. private float m_SRFFwdPowerSetpoint;
  61. //private float m_BRFFwdPowerSetpoint;
  62. private float m_SRFMatchC1;
  63. private float m_SRFMatchC2;
  64. //private float m_BRFMatchC1;
  65. //private float m_BRFMatchC2;
  66. private double m_MFC1SetPoint;
  67. private double m_MFC2SetPoint;
  68. private double m_MFC3SetPoint;
  69. private double m_MFC4SetPoint;
  70. private double m_MFC5SetPoint;
  71. private double m_MFC6SetPoint;
  72. private double m_MFC7SetPoint;
  73. private double m_MFC8SetPoint;
  74. private double m_N2SetPoint;
  75. private AITMfcData m_MFC1Data;
  76. private AITMfcData m_MFC2Data;
  77. private AITMfcData m_MFC3Data;
  78. private AITMfcData m_MFC4Data;
  79. private AITMfcData m_MFC5Data;
  80. private AITMfcData m_MFC6Data;
  81. private AITMfcData m_MFC7Data;
  82. private AITMfcData m_MFC8Data;
  83. private AITMfcData m_MFCHeData;
  84. private AITMfcData m_MFCN2Data;
  85. private AITHeaterData m_PendulumHeaterData;
  86. private AITRfData m_SRFData;
  87. //private AITRfData m_BRFData;
  88. private AITPendulumValveData m_PendulumValveData;
  89. //private AITHVData m_ESCHVData;
  90. private PMState m_PMCurrentState;
  91. private bool m_SourceRFMatchInterlock;
  92. private bool m_IsWLK;
  93. private bool m_IsWaterFlowOk;
  94. private bool m_IsTurboPumpInterlock;
  95. private bool m_IsCDAOK;
  96. private bool m_SensorGasBoxDoor;
  97. private bool m_SensorGasBoxPressure;
  98. private bool m_PumpIsOpen;
  99. private bool m_TurboIsOpen;
  100. private bool m_IsATM;
  101. private bool m_IsVAC;
  102. private List<string> m_RtDataKeys;
  103. private Dictionary<string, object> m_RtDataValues;
  104. private int m_PositionValue;
  105. private bool m_IsPositionMode;
  106. //private int m_ESCVoltage;
  107. private bool m_GasIsFlowing;
  108. private bool m_IsProcessing;
  109. private bool m_IsAutoMode;
  110. private string m_SelectedRecipe;
  111. //private float m_ChillerTempSetpoint;
  112. private float m_WallTempSetpoint;
  113. private bool m_HeIsPressureMode = true;
  114. //private bool m_ChillerIsOn;
  115. private float m_ChamberPressure;
  116. private float m_ProcessPressure;
  117. private float m_ForelinePressurePressure;
  118. //private float m_ESCHePressure;
  119. ButterflyValveView butterflyValveMessageBox;
  120. HeaterView heaterView;
  121. private int m_TurboPumpRotationalSpeed;
  122. private bool m_LiftPinIsUp;
  123. private bool m_IsSlitDoorClosed;
  124. private bool m_IsLidClosed;
  125. //private float m_ChillerTemperature;
  126. //private float m_HVTemperature;
  127. //private int m_ESCHVOutputVoltage;
  128. //private float m_SRfReflectPower;
  129. //private float m_SRfForwardPowerFeedBack;
  130. //private float m_BRfReflectPower;
  131. //private float m_BRfForwardPowerFeedBack;
  132. //private int m_MatchWorkMode;
  133. //private int m_BiasMatchWorkMode;
  134. private float m_MatchC1;
  135. private float m_MatchC2;
  136. private string m_MatchWorkMode;
  137. //private float m_BiasMatchC1;
  138. //private float m_BiasMatchC2;
  139. private float m_PendulumValvePosition;
  140. private bool m_IsTurboPumpAtSpeed;
  141. private bool m_TurboPumpWaterFlowSwitch;
  142. private bool m_IsHasWafer;
  143. private Recipe m_CurrentRecipe = new Recipe();
  144. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  145. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  146. private double m_ChamberPressureFeedBack;
  147. private string m_WaferID;
  148. private string m_ModuleName;
  149. private int? currentRecipeNumber;
  150. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  151. private ComboBoxItem m_SelectedPosition;
  152. private int m_HighTemperatureHeaterTemperatureSetpoint;
  153. private float m_HighTemperatureHeaterRatioSetpoint;
  154. private PressureType m_PressureType;
  155. //private JetChamber m_ChamberType;
  156. #endregion
  157. #region 属性
  158. public PressureType PressureType
  159. {
  160. get { return m_PressureType; }
  161. set { SetProperty(ref m_PressureType, value); }
  162. }
  163. public double TurboN2FlowSetPoint
  164. {
  165. get { return m_TurboN2FlowSetPoint; }
  166. set
  167. {
  168. if (value != m_TurboN2FlowSetPoint)
  169. {
  170. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  171. }
  172. SetProperty(ref m_TurboN2FlowSetPoint, value);
  173. }
  174. }
  175. public List<string> CurrentModuleRecipes
  176. {
  177. get { return m_CurrentModuleRecipes; }
  178. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  179. }
  180. public Recipe CurrentRecipe
  181. {
  182. get { return m_CurrentRecipe; }
  183. set { SetProperty(ref m_CurrentRecipe, value); }
  184. }
  185. public RecipeResult CurrentRecipeResult
  186. {
  187. get { return m_CurrentRecipeResult; }
  188. set { SetProperty(ref m_CurrentRecipeResult, value); }
  189. }
  190. public RecipeStep CurrentRecipeStep
  191. {
  192. get { return m_CurrentRecipeStep; }
  193. set { SetProperty(ref m_CurrentRecipeStep, value); }
  194. }
  195. public bool IsHasWafer
  196. {
  197. get { return m_IsHasWafer; }
  198. set { SetProperty(ref m_IsHasWafer, value); }
  199. }
  200. public bool IsTurboPumpAtSpeed
  201. {
  202. get { return m_IsTurboPumpAtSpeed; }
  203. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  204. }
  205. public bool TurboPumpWaterFlowSwitch
  206. {
  207. get { return m_TurboPumpWaterFlowSwitch; }
  208. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  209. }
  210. public float PendulumValvePosition
  211. {
  212. get { return m_PendulumValvePosition; }
  213. set { SetProperty(ref m_PendulumValvePosition, value); }
  214. }
  215. //public float BiasMatchC1
  216. //{
  217. // get { return m_BiasMatchC1; }
  218. // set
  219. // {
  220. // SetProperty(ref m_BiasMatchC1, value);
  221. // }
  222. //}
  223. //public float BiasMatchC2
  224. //{
  225. // get { return m_BiasMatchC2; }
  226. // set
  227. // {
  228. // SetProperty(ref m_BiasMatchC2, value);
  229. // }
  230. //}
  231. public float MatchC1
  232. {
  233. get { return m_MatchC1; }
  234. set
  235. {
  236. SetProperty(ref m_MatchC1, value);
  237. }
  238. }
  239. public float MatchC2
  240. {
  241. get { return m_MatchC2; }
  242. set
  243. {
  244. SetProperty(ref m_MatchC2, value);
  245. }
  246. }
  247. public AITPendulumValveData PendulumValveData
  248. {
  249. get { return m_PendulumValveData; }
  250. set
  251. {
  252. SetProperty(ref m_PendulumValveData, value);
  253. }
  254. }
  255. //public AITHVData ESCHVData
  256. //{
  257. // get { return m_ESCHVData; }
  258. // set
  259. // {
  260. // SetProperty(ref m_ESCHVData, value);
  261. // }
  262. //}
  263. //public int ESCHVOutputVoltage
  264. //{
  265. // get { return m_ESCHVOutputVoltage; }
  266. // set
  267. // {
  268. // SetProperty(ref m_ESCHVOutputVoltage, value);
  269. // }
  270. //}
  271. //public float ChillerTemperature
  272. //{
  273. // get { return m_ChillerTemperature; }
  274. // set
  275. // {
  276. // SetProperty(ref m_ChillerTemperature, value);
  277. // }
  278. //}
  279. //public float HVTemperature
  280. //{
  281. // get { return m_HVTemperature; }
  282. // set
  283. // {
  284. // SetProperty(ref m_HVTemperature, value);
  285. // }
  286. //}
  287. public bool IsLidClosed
  288. {
  289. get { return m_IsLidClosed; }
  290. set
  291. {
  292. SetProperty(ref m_IsLidClosed, value);
  293. }
  294. }
  295. public bool IsSlitDoorClosed
  296. {
  297. get { return m_IsSlitDoorClosed; }
  298. set
  299. {
  300. SetProperty(ref m_IsSlitDoorClosed, value);
  301. }
  302. }
  303. public bool LiftPinIsUp
  304. {
  305. get { return m_LiftPinIsUp; }
  306. set
  307. {
  308. SetProperty(ref m_LiftPinIsUp, value);
  309. }
  310. }
  311. public int TurboPumpRotationalSpeed
  312. {
  313. get { return m_TurboPumpRotationalSpeed; }
  314. set
  315. {
  316. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  317. }
  318. }
  319. //public float ESCHePressure
  320. //{
  321. // get { return m_ESCHePressure; }
  322. // set
  323. // {
  324. // SetProperty(ref m_ESCHePressure, value);
  325. // }
  326. //}
  327. public float ChamberPressure
  328. {
  329. get { return m_ChamberPressure; }
  330. set
  331. {
  332. SetProperty(ref m_ChamberPressure, value);
  333. }
  334. }
  335. public float ProcessPressure
  336. {
  337. get { return m_ProcessPressure; }
  338. set
  339. {
  340. SetProperty(ref m_ProcessPressure, value);
  341. }
  342. }
  343. public float ForelinePressure
  344. {
  345. get { return m_ForelinePressurePressure; }
  346. set
  347. {
  348. SetProperty(ref m_ForelinePressurePressure, value);
  349. }
  350. }
  351. public bool SourceRFMatchInterlock
  352. {
  353. get { return m_SourceRFMatchInterlock; }
  354. set
  355. {
  356. SetProperty(ref m_SourceRFMatchInterlock, value);
  357. }
  358. }
  359. public bool IsWLK
  360. {
  361. get { return m_IsWLK; }
  362. set
  363. {
  364. SetProperty(ref m_IsWLK, value);
  365. }
  366. }
  367. public bool IsWaterFlowOk
  368. {
  369. get { return m_IsWaterFlowOk; }
  370. set
  371. {
  372. SetProperty(ref m_IsWaterFlowOk, value);
  373. }
  374. }
  375. public bool IsCDAOK
  376. {
  377. get { return m_IsCDAOK; }
  378. set
  379. {
  380. SetProperty(ref m_IsCDAOK, value);
  381. }
  382. }
  383. public bool SensorGasBoxDoor
  384. {
  385. get { return m_SensorGasBoxDoor; }
  386. set
  387. {
  388. SetProperty(ref m_SensorGasBoxDoor, value);
  389. }
  390. }
  391. public bool SensorGasBoxPressure
  392. {
  393. get { return m_SensorGasBoxPressure; }
  394. set
  395. {
  396. SetProperty(ref m_SensorGasBoxPressure, value);
  397. }
  398. }
  399. public bool IsTurboPumpInterlock
  400. {
  401. get { return m_IsTurboPumpInterlock; }
  402. set
  403. {
  404. SetProperty(ref m_IsTurboPumpInterlock, value);
  405. }
  406. }
  407. public string ModuleName
  408. {
  409. get { return m_ModuleName; }
  410. set
  411. {
  412. SetProperty(ref m_ModuleName, value);
  413. }
  414. }
  415. public double MFC1SetPoint
  416. {
  417. get { return m_MFC1SetPoint; }
  418. set { SetProperty(ref m_MFC1SetPoint, value); }
  419. }
  420. public double MFC2SetPoint
  421. {
  422. get { return m_MFC2SetPoint; }
  423. set { SetProperty(ref m_MFC2SetPoint, value); }
  424. }
  425. public double MFC3SetPoint
  426. {
  427. get { return m_MFC3SetPoint; }
  428. set { SetProperty(ref m_MFC3SetPoint, value); }
  429. }
  430. public double MFC4SetPoint
  431. {
  432. get { return m_MFC4SetPoint; }
  433. set { SetProperty(ref m_MFC4SetPoint, value); }
  434. }
  435. public double MFC5SetPoint
  436. {
  437. get { return m_MFC5SetPoint; }
  438. set { SetProperty(ref m_MFC5SetPoint, value); }
  439. }
  440. public double MFC6SetPoint
  441. {
  442. get { return m_MFC6SetPoint; }
  443. set { SetProperty(ref m_MFC6SetPoint, value); }
  444. }
  445. public double MFC7SetPoint
  446. {
  447. get { return m_MFC7SetPoint; }
  448. set { SetProperty(ref m_MFC7SetPoint, value); }
  449. }
  450. public double MFC8SetPoint
  451. {
  452. get { return m_MFC8SetPoint; }
  453. set { SetProperty(ref m_MFC8SetPoint, value); }
  454. }
  455. public double N2SetPoint
  456. {
  457. get { return m_N2SetPoint; }
  458. set { SetProperty(ref m_N2SetPoint, value); }
  459. }
  460. public AITMfcData MFC1Data
  461. {
  462. get { return m_MFC1Data; }
  463. set { SetProperty(ref m_MFC1Data, value); }
  464. }
  465. public AITMfcData MFC2Data
  466. {
  467. get { return m_MFC2Data; }
  468. set { SetProperty(ref m_MFC2Data, value); }
  469. }
  470. public AITMfcData MFC3Data
  471. {
  472. get { return m_MFC3Data; }
  473. set { SetProperty(ref m_MFC3Data, value); }
  474. }
  475. public AITMfcData MFC4Data
  476. {
  477. get { return m_MFC4Data; }
  478. set { SetProperty(ref m_MFC4Data, value); }
  479. }
  480. public AITMfcData MFC5Data
  481. {
  482. get { return m_MFC5Data; }
  483. set { SetProperty(ref m_MFC5Data, value); }
  484. }
  485. public AITMfcData MFC6Data
  486. {
  487. get { return m_MFC6Data; }
  488. set { SetProperty(ref m_MFC6Data, value); }
  489. }
  490. public AITMfcData MFC7Data
  491. {
  492. get { return m_MFC7Data; }
  493. set { SetProperty(ref m_MFC7Data, value); }
  494. }
  495. public AITMfcData MFC8Data
  496. {
  497. get { return m_MFC8Data; }
  498. set { SetProperty(ref m_MFC8Data, value); }
  499. }
  500. public AITMfcData MFCHeData
  501. {
  502. get { return m_MFCHeData; }
  503. set { SetProperty(ref m_MFCHeData, value); }
  504. }
  505. public AITMfcData MFCN2Data
  506. {
  507. get { return m_MFCN2Data; }
  508. set { SetProperty(ref m_MFCN2Data, value); }
  509. }
  510. //public AITHeaterData ValveHeaterData
  511. //{
  512. // get { return m_ValveHeaterData; }
  513. // set { SetProperty(ref m_ValveHeaterData, value); }
  514. //}
  515. //public AITHeaterData ForelineHeaterData
  516. //{
  517. // get { return m_ForelineHeaterData; }
  518. // set { SetProperty(ref m_ForelineHeaterData, value); }
  519. //}
  520. //public AITHeaterData WallHeaterData
  521. //{
  522. // get { return m_WallHeaterData; }
  523. // set { SetProperty(ref m_WallHeaterData, value); }
  524. //}
  525. public AITRfData SRFData
  526. {
  527. get { return m_SRFData; }
  528. set { SetProperty(ref m_SRFData, value); }
  529. }
  530. //public AITRfData BRFData
  531. //{
  532. // get { return m_BRFData; }
  533. // set { SetProperty(ref m_BRFData, value); }
  534. //}
  535. public PMState PMCurrentState
  536. {
  537. get { return m_PMCurrentState; }
  538. set { SetProperty(ref m_PMCurrentState, value); }
  539. }
  540. #region 阀
  541. public bool GasFinalValveIsOpen
  542. {
  543. get { return m_GasFinalValveIsOpen; }
  544. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  545. }
  546. public bool PVN21ValveIsOpen
  547. {
  548. get { return m_PVN21ValveIsOpen; }
  549. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  550. }
  551. public bool PVN22ValveIsOpen
  552. {
  553. get { return m_PVN22ValveIsOpen; }
  554. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  555. }
  556. public bool N2ValveIsOpen
  557. {
  558. get { return m_N2ValveIsOpen; }
  559. set { SetProperty(ref m_N2ValveIsOpen, value); }
  560. }
  561. public bool PV11ValveIsOpen
  562. {
  563. get { return m_PV11ValveIsOpen; }
  564. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  565. }
  566. public bool PV12ValveIsOpen
  567. {
  568. get { return m_PV12ValveIsOpen; }
  569. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  570. }
  571. public bool MFC1ValveIsOpen
  572. {
  573. get { return m_MFC1ValveIsOpen; }
  574. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  575. }
  576. public bool PV21ValveIsOpen
  577. {
  578. get { return m_PV21ValveIsOpen; }
  579. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  580. }
  581. public bool PV22ValveIsOpen
  582. {
  583. get { return m_PV22ValveIsOpen; }
  584. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  585. }
  586. public bool MFC2ValveIsOpen
  587. {
  588. get { return m_MFC2ValveIsOpen; }
  589. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  590. }
  591. public bool PV31ValveIsOpen
  592. {
  593. get { return m_PV31ValveIsOpen; }
  594. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  595. }
  596. public bool PV32ValveIsOpen
  597. {
  598. get { return m_PV32ValveIsOpen; }
  599. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  600. }
  601. public bool MFC3ValveIsOpen
  602. {
  603. get { return m_MFC3ValveIsOpen; }
  604. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  605. }
  606. public bool PV41ValveIsOpen
  607. {
  608. get { return m_PV41ValveIsOpen; }
  609. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  610. }
  611. public bool PV42ValveIsOpen
  612. {
  613. get { return m_PV42ValveIsOpen; }
  614. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  615. }
  616. public bool MFC4ValveIsOpen
  617. {
  618. get { return m_MFC4ValveIsOpen; }
  619. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  620. }
  621. public bool MFC5ValveIsOpen
  622. {
  623. get { return m_MFC5ValveIsOpen; }
  624. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  625. }
  626. public bool MFC6ValveIsOpen
  627. {
  628. get { return m_MFC6ValveIsOpen; }
  629. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  630. }
  631. public bool MFC7ValveIsOpen
  632. {
  633. get { return m_MFC7ValveIsOpen; }
  634. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  635. }
  636. public bool MFC8ValveIsOpen
  637. {
  638. get { return m_MFC8ValveIsOpen; }
  639. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  640. }
  641. //public bool PVHe1ValveIsOpen
  642. //{
  643. // get { return m_PVHe1ValveIsOpen; }
  644. // set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  645. //}
  646. //public bool PVHe2ValveIsOpen
  647. //{
  648. // get { return m_PVHe2ValveIsOpen; }
  649. // set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  650. //}
  651. public bool TurboPumpPumpingValveIsOpen
  652. {
  653. get { return m_TurboPumpPumpingValveIsOpen; }
  654. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  655. }
  656. public bool TurboPumpPurgeValveIsOpen
  657. {
  658. get { return m_TurboPumpPurgeValveIsOpen; }
  659. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  660. }
  661. public bool SoftPumpValveIsOpen
  662. {
  663. get { return m_SoftPumpValveIsOpen; }
  664. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  665. }
  666. public bool FastPumpValveIsOpen
  667. {
  668. get { return m_FastPumpValveIsOpen; }
  669. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  670. }
  671. public bool GuageValveIsOpen
  672. {
  673. get { return m_GuageValveIsOpen; }
  674. set { SetProperty(ref m_GuageValveIsOpen, value); }
  675. }
  676. #endregion
  677. public Dictionary<string, object> RtDataValues
  678. {
  679. get { return m_RtDataValues; }
  680. set { SetProperty(ref m_RtDataValues, value); }
  681. }
  682. public bool PumpIsOpen
  683. {
  684. get { return m_PumpIsOpen; }
  685. set { SetProperty(ref m_PumpIsOpen, value); }
  686. }
  687. public bool PendulumValveIsOpen
  688. {
  689. get { return m_PendulumValveIsOpen; }
  690. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  691. }
  692. public bool PurgeValveIsOpen
  693. {
  694. get { return m_PurgeValveIsOpen; }
  695. set { SetProperty(ref m_PurgeValveIsOpen, value); }
  696. }
  697. public bool TurboIsOpen
  698. {
  699. get { return m_TurboIsOpen; }
  700. set { SetProperty(ref m_TurboIsOpen, value); }
  701. }
  702. public bool IsATM
  703. {
  704. get { return m_IsATM; }
  705. set { SetProperty(ref m_IsATM, value); }
  706. }
  707. public bool IsVAC
  708. {
  709. get { return m_IsVAC; }
  710. set { SetProperty(ref m_IsVAC, value); }
  711. }
  712. //public bool BRFIsOn
  713. //{
  714. // get { return m_BRFIsOn; }
  715. // set { SetProperty(ref m_BRFIsOn, value); }
  716. //}
  717. //public bool SRFIsOn
  718. //{
  719. // get { return m_SRFIsOn; }
  720. // set { SetProperty(ref m_SRFIsOn, value); }
  721. //}
  722. public int PositionValue
  723. {
  724. get { return m_PositionValue; }
  725. set { SetProperty(ref m_PositionValue, value); }
  726. }
  727. public bool IsPositionMode
  728. {
  729. get { return m_IsPositionMode; }
  730. set { SetProperty(ref m_IsPositionMode, value); }
  731. }
  732. //public double HeGasSetpoint
  733. //{
  734. // get { return m_HeGasSetpoint; }
  735. // set
  736. // {
  737. // SetProperty(ref m_HeGasSetpoint, value);
  738. // }
  739. //}
  740. //public int HePressureSetpoint
  741. //{
  742. // get { return m_HePressureSetpoint; }
  743. // set
  744. // {
  745. // SetProperty(ref m_HePressureSetpoint, value);
  746. // }
  747. //}
  748. public float SRFFwdPowerSetpoint
  749. {
  750. get { return m_SRFFwdPowerSetpoint; }
  751. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  752. }
  753. //public float BRFFwdPowerSetpoint
  754. //{
  755. // get { return m_BRFFwdPowerSetpoint; }
  756. // set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  757. //}
  758. //public int ESCVoltage
  759. //{
  760. // get { return m_ESCVoltage; }
  761. // set { SetProperty(ref m_ESCVoltage, value); }
  762. //}
  763. public float SRFMatchC1
  764. {
  765. get { return m_SRFMatchC1; }
  766. set { SetProperty(ref m_SRFMatchC1, value); }
  767. }
  768. public float SRFMatchC2
  769. {
  770. get { return m_SRFMatchC2; }
  771. set { SetProperty(ref m_SRFMatchC2, value); }
  772. }
  773. public string MatchWorkMode
  774. {
  775. get { return m_MatchWorkMode; }
  776. set
  777. {
  778. SetProperty(ref m_MatchWorkMode, value);
  779. }
  780. }
  781. //public float BRFMatchC1
  782. //{
  783. // get { return m_BRFMatchC1; }
  784. // set { SetProperty(ref m_BRFMatchC1, value); }
  785. //}
  786. //public float BRFMatchC2
  787. //{
  788. // get { return m_BRFMatchC2; }
  789. // set { SetProperty(ref m_BRFMatchC2, value); }
  790. //}
  791. public bool GasIsFlowing
  792. {
  793. get { return m_GasIsFlowing; }
  794. set { SetProperty(ref m_GasIsFlowing, value); }
  795. }
  796. public bool IsProcessing
  797. {
  798. get { return m_IsProcessing; }
  799. set { SetProperty(ref m_IsProcessing, value); }
  800. }
  801. public bool IsAutoMode
  802. {
  803. get { return m_IsAutoMode; }
  804. set { SetProperty(ref m_IsAutoMode, value); }
  805. }
  806. public string SelectedRecipe
  807. {
  808. get { return m_SelectedRecipe; }
  809. set { SetProperty(ref m_SelectedRecipe, value); }
  810. }
  811. //public float ChillerTempSetpoint
  812. //{
  813. // get { return m_ChillerTempSetpoint; }
  814. // set { SetProperty(ref m_ChillerTempSetpoint, value); }
  815. //}
  816. public float WallTempSetpoint
  817. {
  818. get { return m_WallTempSetpoint; }
  819. set { SetProperty(ref m_WallTempSetpoint, value); }
  820. }
  821. public bool HeIsPressureMode
  822. {
  823. get { return m_HeIsPressureMode; }
  824. set { SetProperty(ref m_HeIsPressureMode, value); }
  825. }
  826. //public bool ChillerIsOn
  827. //{
  828. // get { return m_ChillerIsOn; }
  829. // set { SetProperty(ref m_ChillerIsOn, value); }
  830. //}
  831. public double ChamberPressureFeedBack
  832. {
  833. get { return m_ChamberPressureFeedBack; }
  834. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  835. }
  836. public string WaferID
  837. {
  838. get { return m_WaferID; }
  839. set { SetProperty(ref m_WaferID, value); }
  840. }
  841. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  842. {
  843. get { return m_HighTemperatureHeaterData; }
  844. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  845. }
  846. public ComboBoxItem SelectedPosition
  847. {
  848. get { return m_SelectedPosition; }
  849. set { SetProperty(ref m_SelectedPosition, value); }
  850. }
  851. public int HighTemperatureHeaterTemperatureSetpoint
  852. {
  853. get { return m_HighTemperatureHeaterTemperatureSetpoint; }
  854. set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
  855. }
  856. public float HighTemperatureHeaterRatioSetpoint
  857. {
  858. get { return m_HighTemperatureHeaterRatioSetpoint; }
  859. set { SetProperty(ref m_HighTemperatureHeaterRatioSetpoint, value); }
  860. }
  861. public AITHeaterData PendulumHeaterData
  862. {
  863. get { return m_PendulumHeaterData; }
  864. set { SetProperty(ref m_PendulumHeaterData, value); }
  865. }
  866. #endregion
  867. #region 命令
  868. private DelegateCommand _PMInitCommnad;
  869. public DelegateCommand PMInitCommnad =>
  870. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  871. private DelegateCommand _PMAbortCommnad;
  872. public DelegateCommand PMAbortCommnad =>
  873. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  874. private DelegateCommand _GasCommand;
  875. public DelegateCommand GasCommand =>
  876. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  877. //private DelegateCommand _HeCommand;
  878. //public DelegateCommand HeCommand =>
  879. // _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  880. private DelegateCommand _RfCommand;
  881. public DelegateCommand RfCommand =>
  882. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  883. private DelegateCommand _PurgeCommand;
  884. public DelegateCommand PurgeCommand =>
  885. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  886. private DelegateCommand _VentCommand;
  887. public DelegateCommand VentCommand =>
  888. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  889. private DelegateCommand _PumpCommand;
  890. public DelegateCommand PumpCommand =>
  891. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  892. private DelegateCommand _OpenPumpCommand;
  893. public DelegateCommand OpenPumpCommand =>
  894. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  895. private DelegateCommand _ClosePumpCommand;
  896. public DelegateCommand ClosePumpCommand =>
  897. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  898. private DelegateCommand _OpenTurboPumpCommand;
  899. public DelegateCommand OpenTurboPumpCommand =>
  900. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  901. private DelegateCommand _CloseTurboPumpCommand;
  902. public DelegateCommand CloseTurboPumpCommand =>
  903. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  904. private DelegateCommand _OpenPendulumValveCommand;
  905. public DelegateCommand OpenPendulumValveCommand =>
  906. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  907. private DelegateCommand _ClosePendulumValveCommand;
  908. public DelegateCommand ClosePendulumValveCommand =>
  909. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  910. private DelegateCommand<object> _PinUpDownCommand;
  911. public DelegateCommand<object> PinUpDownCommand =>
  912. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  913. private DelegateCommand<object> _LidUpDownCommand;
  914. public DelegateCommand<object> LidUpDownCommand =>
  915. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  916. private DelegateCommand _SetSRfCommand;
  917. public DelegateCommand SetSRfCommand =>
  918. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  919. //private DelegateCommand _SetBRfCommand;
  920. //public DelegateCommand SetBRfCommand =>
  921. // _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  922. private DelegateCommand _OpenButterflyValveViewCommand;
  923. public DelegateCommand OpenButterflyValveViewCommand =>
  924. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  925. //private DelegateCommand _HVCommand;
  926. //public DelegateCommand HVCommand =>
  927. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  928. //private DelegateCommand _HVSetCommand;
  929. //public DelegateCommand HVSetCommand =>
  930. // _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  931. private DelegateCommand _LoadRecipeCommand;
  932. public DelegateCommand LoadRecipeCommand =>
  933. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  934. private DelegateCommand<object> _ControlValveCommand;
  935. public DelegateCommand<object> ControlValveCommand =>
  936. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  937. private DelegateCommand<object> _RunRecipeCommand;
  938. public DelegateCommand<object> RunRecipeCommand =>
  939. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  940. private DelegateCommand _SetChillerTempCommand;
  941. public DelegateCommand SetChillerTempCommand =>
  942. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  943. private DelegateCommand _SetHeaterRatioCommand;
  944. public DelegateCommand SetHeaterRatioCommand =>
  945. _SetHeaterRatioCommand ?? (_SetHeaterRatioCommand = new DelegateCommand(OnSetHeaterRatio));
  946. //private DelegateCommand _OnOffChillerCommand;
  947. //public DelegateCommand OnOffChillerCommand =>
  948. // _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  949. private DelegateCommand<object> _HeaterCommand;
  950. public DelegateCommand<object> HeaterCommand =>
  951. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  952. private DelegateCommand _EndStepCommand;
  953. public DelegateCommand EndStepCommand =>
  954. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  955. private DelegateCommand _GotoPositionCommand;
  956. public DelegateCommand GotoPositionCommand =>
  957. _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
  958. private DelegateCommand _SwitchHighTemperatureHeaterCommand;
  959. public DelegateCommand SwitchHighTemperatureHeaterCommand =>
  960. _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
  961. private DelegateCommand<object> _AbortRecipeCommnad;
  962. public DelegateCommand<object> AbortRecipeCommnad =>
  963. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  964. #endregion
  965. #region 构造函数
  966. public OverKepler2200AViewModel()
  967. {
  968. m_RtDataKeys = new List<string>();
  969. m_IsATM = true;
  970. ModuleName = "PMA";
  971. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  972. DispatcherTimer timer = new DispatcherTimer();
  973. timer.Interval = TimeSpan.FromSeconds(0.1);
  974. timer.Tick += timer_Tick;
  975. timer.Start();
  976. //PressureType = (PressureType)Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig("System.PressureUnitType"));
  977. //m_ChamberType=(JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString());
  978. PressureType = PressureType.Pa;
  979. }
  980. #endregion
  981. #region 命令方法
  982. private void OnControlValve(object obj)
  983. {
  984. CommonValveControl commonValveControl = (CommonValveControl)obj;
  985. if (commonValveControl.IsCanEdit == true)
  986. {
  987. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  988. string operation = commonValveControl.Status ? "关闭" : "打开";
  989. LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
  990. }
  991. }
  992. private void OnPMInit()
  993. {
  994. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  995. LOG.Info($"{ModuleName},初始化");
  996. }
  997. private async void OnGas()
  998. {
  999. await Task.Run(async () =>
  1000. {
  1001. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  1002. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  1003. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  1004. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  1005. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  1006. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  1007. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  1008. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  1009. await Task.Delay(1000);
  1010. object[] mfc = new object[8];
  1011. string[] mfcSetPoint = new string[8];
  1012. mfc[0] = MFC1Data.SetPoint;
  1013. mfc[1] = MFC2Data.SetPoint;
  1014. mfc[2] = MFC3Data.SetPoint;
  1015. mfc[3] = MFC4Data.SetPoint;
  1016. mfc[4] = MFC5Data.SetPoint;
  1017. mfc[5] = MFC6Data.SetPoint;
  1018. mfc[6] = MFC7Data.SetPoint;
  1019. mfc[7] = MFC8Data.SetPoint;
  1020. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1021. string operation = GasIsFlowing ? "关闭" : "打开";
  1022. LOG.Info($"{ModuleName},{operation}GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
  1023. });
  1024. }
  1025. //private void OnHe()
  1026. //{
  1027. // if (PVHe1ValveIsOpen == true)
  1028. // {
  1029. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1030. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1031. // }
  1032. // else
  1033. // {
  1034. // if (HeIsPressureMode)
  1035. // {
  1036. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1037. // }
  1038. // else
  1039. // {
  1040. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1041. // }
  1042. // }
  1043. //}
  1044. private void OnRf()
  1045. {
  1046. if (PMCurrentState == PMState.RfPowering)
  1047. {
  1048. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1049. }
  1050. else
  1051. {
  1052. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1053. }
  1054. }
  1055. private void OnPurge()
  1056. {
  1057. if (PMCurrentState == PMState.Purging)
  1058. {
  1059. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1060. }
  1061. else
  1062. {
  1063. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1064. }
  1065. }
  1066. private void OnVent()
  1067. {
  1068. if (PMCurrentState == PMState.Venting)
  1069. {
  1070. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1071. }
  1072. else
  1073. {
  1074. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1075. }
  1076. }
  1077. private void OnPump()
  1078. {
  1079. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1080. if (PMCurrentState == PMState.Pumping)
  1081. {
  1082. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1083. return;
  1084. }
  1085. //if (PMCurrentState == PMState.pum)
  1086. //{
  1087. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1088. // return;
  1089. //}
  1090. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1091. //{
  1092. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1093. //}
  1094. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1095. //{
  1096. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1097. //}
  1098. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1099. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1100. // 设置底压
  1101. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1102. if (basePressure <= 0.01 || basePressure >= 1000)
  1103. {
  1104. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1105. return;
  1106. }
  1107. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1108. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1109. {
  1110. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1111. return;
  1112. }
  1113. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1114. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1115. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1116. }
  1117. private void OnOpenPump()
  1118. {
  1119. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1120. if (PMCurrentState == PMState.LaunchingPump)
  1121. {
  1122. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1123. return;
  1124. }
  1125. //if (PumpIsOpen == true)
  1126. //{
  1127. // return;
  1128. //}
  1129. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1130. }
  1131. private void OnClosePump()
  1132. {
  1133. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1134. }
  1135. private void OnOpenTurboPump()
  1136. {
  1137. if (PMCurrentState == PMState.LaunchingTurboPump)
  1138. {
  1139. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1140. return;
  1141. }
  1142. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1143. }
  1144. private void OnCloseTurboPump()
  1145. {
  1146. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1147. }
  1148. private void OnOpenPendulumValve()
  1149. {
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1151. }
  1152. private void OnClosePendulumValve()
  1153. {
  1154. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1155. }
  1156. private void OnPinUpDown(object upDown)
  1157. {
  1158. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1159. }
  1160. private void OnLidUpDown(object upDown)
  1161. {
  1162. if (upDown.ToString() == "Up")
  1163. {
  1164. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1165. }
  1166. else
  1167. {
  1168. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1169. }
  1170. }
  1171. private void OnSetSRf()
  1172. {
  1173. if (SRFData.IsRfOn == true)
  1174. {
  1175. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1176. }
  1177. else
  1178. {
  1179. if (GasIsFlowing == true)
  1180. {
  1181. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1182. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1183. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1184. }
  1185. }
  1186. }
  1187. //private void OnSetBRf()
  1188. //{
  1189. // if (BRFData.IsRfOn == true)
  1190. // {
  1191. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1192. // }
  1193. // else
  1194. // {
  1195. // if (GasIsFlowing == true)
  1196. // {
  1197. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1198. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1199. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1200. // }
  1201. // }
  1202. //}
  1203. private void OnPMAbort()
  1204. {
  1205. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1206. }
  1207. private void OnOpenButterflyValveView()
  1208. {
  1209. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1210. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  1211. {
  1212. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1213. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1214. butterflyValveMessageBox.Left = 700;
  1215. butterflyValveMessageBox.Top = 600;
  1216. butterflyValveMessageBox.Show();
  1217. butterflyValveMessageBox.Owner = _mainWindow;
  1218. }
  1219. }
  1220. private void OnLoadRecipe()
  1221. {
  1222. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1223. }
  1224. //private async void OnHV()
  1225. //{
  1226. // if (ESCHVData.IsOn == true)
  1227. // {
  1228. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1229. // }
  1230. // else
  1231. // {
  1232. // await Task.Run(async () =>
  1233. // {
  1234. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1235. // await Task.Delay(1000);
  1236. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1237. // });
  1238. // }
  1239. //}
  1240. //private void OnHVSet()
  1241. //{
  1242. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1243. //}
  1244. private void OnRunRecipe(object obj)
  1245. {
  1246. string recipeName = SelectedRecipe;
  1247. if (recipeName == null)
  1248. {
  1249. return;
  1250. }
  1251. ClearData();
  1252. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1253. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1254. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1255. }
  1256. //private void OnOffChiller()
  1257. //{
  1258. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1259. //}
  1260. private void OnHeater(object obj)
  1261. {
  1262. if (IsAutoMode == true)
  1263. {
  1264. return;
  1265. }
  1266. AITHeaterData heaterData = obj as AITHeaterData;
  1267. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1268. if (heaterView == null || heaterView.IsVisible == false)
  1269. {
  1270. heaterView = new HeaterView(heaterData, ModuleName);
  1271. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1272. heaterView.Owner = _mainWindow;
  1273. heaterView.Show();
  1274. }
  1275. }
  1276. private void OnOnline()
  1277. {
  1278. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1279. }
  1280. private void OnOffline()
  1281. {
  1282. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1283. }
  1284. private void OnEndStep()
  1285. {
  1286. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1287. {
  1288. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1289. }
  1290. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1291. {
  1292. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1293. }
  1294. }
  1295. private void OnGotoPosition()
  1296. {
  1297. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
  1298. }
  1299. private void OnSwitchHighTemperatureHeater()
  1300. {
  1301. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIson);
  1302. }
  1303. private void OnSetChillerTemp()
  1304. {
  1305. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
  1306. }
  1307. private void OnSetHeaterRatio()
  1308. {
  1309. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterRatio", HighTemperatureHeaterRatioSetpoint);
  1310. }
  1311. private DelegateCommand _OnlineCommand;
  1312. public DelegateCommand OnlineCommand =>
  1313. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1314. private DelegateCommand _OfflineCommand;
  1315. public DelegateCommand OfflineCommand =>
  1316. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1317. private async void OnAbortRecipe(object obj)
  1318. {
  1319. if (PMCurrentState != PMState.Processing)
  1320. {
  1321. return;
  1322. }
  1323. switch (obj.ToString())
  1324. {
  1325. case "0":
  1326. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1327. break;
  1328. case "1":
  1329. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1330. //if (ESCHVData.IsOn == true)
  1331. //{
  1332. // await Task.Delay(3000);
  1333. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1334. //}
  1335. break;
  1336. case "2":
  1337. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1338. await Task.Delay(3000);
  1339. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1340. break;
  1341. }
  1342. }
  1343. #endregion
  1344. #region 私有方法
  1345. private void ClearData()
  1346. {
  1347. //ESCVoltage = 0;
  1348. SRFFwdPowerSetpoint = 0;
  1349. SRFMatchC1 = 0;
  1350. SRFMatchC2 = 0;
  1351. //BRFFwdPowerSetpoint = 0;
  1352. //BRFMatchC1 = 0;
  1353. //BRFMatchC2 = 0;
  1354. //HeGasSetpoint = 0;
  1355. MFC1SetPoint = 0;
  1356. MFC2SetPoint = 0;
  1357. MFC3SetPoint = 0;
  1358. MFC4SetPoint = 0;
  1359. MFC5SetPoint = 0;
  1360. MFC6SetPoint = 0;
  1361. MFC7SetPoint = 0;
  1362. MFC8SetPoint = 0;
  1363. }
  1364. private IEnumerable<string> GetFilesNames(string path)
  1365. {
  1366. if (Directory.Exists(path))
  1367. {
  1368. return Directory.GetFiles(path, "*.rcp")?
  1369. .Select(Path.GetFileNameWithoutExtension);
  1370. }
  1371. else
  1372. {
  1373. return new List<string>();
  1374. }
  1375. }
  1376. void timer_Tick(object sender, EventArgs e)
  1377. {
  1378. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1379. if (RtDataValues == null)
  1380. {
  1381. return;
  1382. }
  1383. //var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1384. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1385. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1386. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1387. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1388. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1389. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1390. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1391. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1392. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1393. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1394. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1395. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1396. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1397. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1398. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1399. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1400. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1401. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1402. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1403. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1404. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1405. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1406. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1407. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1408. //PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1409. //PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1410. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1411. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1412. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1413. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1414. PurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen");
  1415. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1416. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1417. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1418. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"TM.{ModuleName}SlitDoor.IsClosed");
  1419. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1420. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1421. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1422. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1423. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1424. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1425. IsProcessing = PMCurrentState == PMState.Processing;
  1426. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1427. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1428. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1429. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1430. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1431. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1432. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1433. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1434. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1435. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1436. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1437. //BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1438. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1439. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1440. //ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1441. //ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1442. //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1443. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1444. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  1445. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  1446. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  1447. //ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1448. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1449. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1450. //ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1451. SourceRFMatchInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFMatchInterlock");
  1452. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1453. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1454. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1455. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1456. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1457. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1458. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1459. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1460. //ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1461. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1462. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1463. MatchWorkMode = CommonFunction.GetValue<string>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1464. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1465. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1466. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1467. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1468. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1469. {
  1470. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1471. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1472. {
  1473. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
  1474. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1475. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1476. }
  1477. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1478. }
  1479. else
  1480. {
  1481. CurrentRecipeResult = null;
  1482. CurrentRecipeStep = null;
  1483. }
  1484. if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 2000)
  1485. {
  1486. ChamberPressureFeedBack = ProcessPressure;
  1487. }
  1488. else
  1489. {
  1490. ChamberPressureFeedBack = ChamberPressure;
  1491. }
  1492. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  1493. IsAutoMode = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1494. }
  1495. public void addDataKeys()
  1496. {
  1497. m_RtDataKeys.Clear();
  1498. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1499. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1500. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1501. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1502. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1503. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1504. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1505. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1506. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1507. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1508. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1509. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1510. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1511. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1512. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1513. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1514. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1515. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1516. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1517. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1518. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1519. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1520. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1521. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1522. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1523. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1524. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1525. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1526. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1527. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1528. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1529. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1530. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1531. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1532. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1533. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1534. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1535. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1536. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1537. //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1538. //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1539. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1540. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1541. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1542. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1543. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1544. m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen");
  1545. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1546. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1547. m_RtDataKeys.Add($"TM.{ModuleName}SlitDoor.IsClosed");
  1548. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1549. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1550. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1551. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1552. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1553. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1554. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1555. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1556. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1557. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1558. //m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1559. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1560. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1561. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1562. m_RtDataKeys.Add($"{ModuleName}.SourceRFMatchInterlock");
  1563. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1564. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1565. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1566. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1567. //m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1568. //m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1569. //m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1570. //m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1571. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1572. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1573. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1574. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1575. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1576. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1577. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1578. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1579. }
  1580. #endregion
  1581. }
  1582. }