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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Windows.Documents;
- using Venus_Core;
- using Venus_RT.Devices;
- using Venus_RT.Devices.TM;
- using Venus_RT.Modules.PMs;
- namespace Venus_RT.Modules.TM.VenusEntity
- {
- public class SEMFPMSwapRoutine : ModuleRoutineBase, IRoutine
- {
- private enum SwapStep
- {
- WaitPMReady,
- OpenMFSlitDoor,
- WaitforControlPressure,
- PickDelay,
- PreRotation,
- PickPrepare,
- PickExtend,
- DropDownWafer,
- PickDelay1,
- PickRetract,
- PlacePrepare,
- PlaceDelay,
- PlaceExtend,
- LiftUpWafer,
- PlaceDelay1,
- PlaceRetract,
- NotifyDone,
- CloseMFSlitDoor,
- EndDone,
- EndDelay
- }
- private readonly TMBase _TM;
- private readonly ITransferRobot _robot;
- private int _swapingTimeout = 120 * 1000;
- private int _placeDelayTime = 0;
- private int _pickDelayTime = 0;
- private ModuleName _targetModule;
- private PMEntity _pmModule;
- private int _targetSlot;
- private Hand _pickHand;
- private Hand _placeHand;
- private JetPMBase _chamber;
- private bool NeedControlPressure;
- private int _controlPressureSetPoint = 90;
- private int _controlFlowSetPoint = 90;
- public SEMFPMSwapRoutine(TMBase tm, ITransferRobot robot, ModuleName module) : base(module)
- {
- _TM = tm;
- _robot = robot;
- Name = "swap for pm";
- }
- public RState Start(params object[] objs)
- {
- if (!_robot.IsHomed)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
- return RState.Failed;
- }
- var swapItem = (Queue<MoveItem>)objs[0];
- _targetModule = swapItem.Peek().SourceModule;
- _targetSlot = swapItem.Peek().SourceSlot;
- _pickHand = swapItem.Peek().RobotHand;
- _placeHand = _pickHand == Hand.Blade2 ? Hand.Blade1 : Hand.Blade2;
- if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
- }
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for swap action");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_placeHand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_placeHand} has no wafer");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_pickHand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_pickHand} has a wafer");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as {_targetModule} Slot {_targetSlot + 1} has no wafer");
- return RState.Failed;
- }
- Reset();
- _swapingTimeout = SC.GetValue<int>($"{Module}.SwapTimeout") * 1000;
- _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
- _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");
- if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
- {
- NeedControlPressure = true;
- }
- else
- {
- NeedControlPressure = false;
- }
- return Runner.Start(Module, $"Swap with {_targetModule}");
- }
- public RState Monitor()
- {
- Runner.Wait(SwapStep.WaitPMReady, PMPrepare, _delay_60s)
- .Run(SwapStep.OpenMFSlitDoor, OpenSlitDoor, CheckSlitDoorOpen)
- .Run(SwapStep.PickPrepare, PickPrepare, IsModuleReadyForPick)
- .Delay(SwapStep.PickDelay, _placeDelayTime)
- .Run(SwapStep.PickExtend, PickExtend, WaitRobotExtendDone)
- .Run(SwapStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
- .Delay(SwapStep.PickDelay1, _pickDelayTime)
- .Run(SwapStep.PickRetract, PickRetract, WaitRobotRetractDone)
- .Run(SwapStep.PlacePrepare, PlacePrepare, IsModuleReadyForPlace)
- .Delay(SwapStep.PlaceDelay, _pickDelayTime)
- .Run(SwapStep.PlaceExtend, PlaceExtend, WaitRobotExtendDone)
- .Run(SwapStep.LiftUpWafer, NotifyLiftUpWafer, WaitPMWaferLiftUp)
- .Delay(SwapStep.PlaceDelay1, _placeDelayTime)
- .Run(SwapStep.PlaceRetract, PlaceRetract, WaitRobotRetractDone)
- .Run(SwapStep.CloseMFSlitDoor, CheckDoorClose, WaitPMDoorClose, 5000)
- .Run(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms)
- .Delay(SwapStep.EndDelay, _delay_50ms)
- .End(SwapStep.EndDone, NullFun, _delay_50ms);
- return Runner.Status;
- }
- private bool PMPrepare()
- {
- return IsPressureReady(_targetModule)&& _pmModule.IsIdle;
- }
- private bool IsPressureReady(ModuleName _targetModule)
- {
- if (RouteManager.IsATMMode)
- return true;
- if (_pmModule.IsOnline)
- {
- double PMPressure = _pmModule.ProcessPressure;
- double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
- double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
- if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
- {
- return true;
- }
- else return false;
- }
- else return true;
- }
- private bool OpenSlitDoor()
- {
- return _TM.TurnSlitDoor(_targetModule, true);
- }
- private bool CheckSlitDoorOpen()
- {
- return _TM.CheckSlitValveOpen(_targetModule);
- }
- private bool PickPrepare()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePick);
- //_TM.TurnSlitDoor(_targetModule, true);
- return true;
- }
- private bool PlacePrepare()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePlace);
- //_TM.TurnSlitDoor(_targetModule, true);
- return true;
- }
- private bool IsModuleReadyForPick()
- {
- return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
- }
- private bool PickExtend()
- {
- return _robot.PickExtend(_targetModule, _targetSlot, _pickHand);
- }
- private bool PickRetract()
- {
- return _robot.PickRetract(_targetModule, _targetSlot, _pickHand);
- }
- private bool IsModuleReadyForPlace()
- {
- return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place && _pmModule.IsSlitDoorOpen;
- }
- private bool PlaceExtend()
- {
- return _robot.PlaceExtend(_targetModule, _targetSlot, _placeHand);
- }
- private bool PlaceRetract()
- {
- return _robot.PlaceRetract(_targetModule, _targetSlot, _placeHand);
- }
- private bool WaitRobotExtendDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");
- Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
- return true;
- }
- }
- //private bool RotateArm()
- //{
- // _pmModule.PostMsg(PMEntity.MSG.PreparePick); // Notify PM to Serv pressure in advance for throughput enhancement
- // return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _placeHand);
- //}
- //private bool WaitRotateDone()
- //{
- // if (_robot.Status == RState.Running)
- // {
- // return false;
- // }
- // else if (_robot.Status == RState.End)
- // {
- // return true;
- // }
- // else
- // {
- // Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
- // return true;
- // }
- //}
- private bool NotifyPMPickWafer()
- {
- _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
- return true;
- }
- private bool WaitPMWaferDropDown()
- {
- if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);
- return true;
- }
- return false;
- }
- private bool WaitRobotRetractDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Swap Retract failed, {_robot.Status}");
- Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
- return true;
- }
- }
- private bool NotifyLiftUpWafer()
- {
- _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);
- return true;
- }
- private bool WaitPMWaferLiftUp()
- {
- if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
- {
- WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);
- return true;
- }
- return false;
- }
- private bool NotifyPMDone()
- {
- _pmModule.PostMsg(PMEntity.MSG.PlaceReady);
- //_TM.TurnSlitDoor(_targetModule, false);
- return true;
- }
- private bool CheckDoorClose()
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Close Door Again");
- return _TM.TurnSlitDoor(_targetModule, false);
- }
- private bool WaitPMDoorClose()
- {
- if (_TM.CheckSlitValveClose(_targetModule))
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check Door Close");
- return true;
- }
- else
- {
- if (DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetPoint != (int)CylinderState.Close)
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMSwap {_targetModule}SlitDoor set close again");
- DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetCylinder(false, out string reason);
- }
- //LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check not Close Door");
- return false;
- }
- }
- public void Abort()
- {
- //_robot.Halt();
- }
- }
- }
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