SEMFPMSwapRoutine.cs 12 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using System;
  13. using System.Collections.Generic;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. using System.Windows.Documents;
  18. using Venus_Core;
  19. using Venus_RT.Devices;
  20. using Venus_RT.Devices.TM;
  21. using Venus_RT.Modules.PMs;
  22. namespace Venus_RT.Modules.TM.VenusEntity
  23. {
  24. public class SEMFPMSwapRoutine : ModuleRoutineBase, IRoutine
  25. {
  26. private enum SwapStep
  27. {
  28. WaitPMReady,
  29. OpenMFSlitDoor,
  30. WaitforControlPressure,
  31. PickDelay,
  32. PreRotation,
  33. PickPrepare,
  34. PickExtend,
  35. DropDownWafer,
  36. PickDelay1,
  37. PickRetract,
  38. PlacePrepare,
  39. PlaceDelay,
  40. PlaceExtend,
  41. LiftUpWafer,
  42. PlaceDelay1,
  43. PlaceRetract,
  44. NotifyDone,
  45. CloseMFSlitDoor,
  46. EndDone,
  47. EndDelay
  48. }
  49. private readonly TMBase _TM;
  50. private readonly ITransferRobot _robot;
  51. private int _swapingTimeout = 120 * 1000;
  52. private int _placeDelayTime = 0;
  53. private int _pickDelayTime = 0;
  54. private ModuleName _targetModule;
  55. private PMEntity _pmModule;
  56. private int _targetSlot;
  57. private Hand _pickHand;
  58. private Hand _placeHand;
  59. private JetPMBase _chamber;
  60. private bool NeedControlPressure;
  61. private int _controlPressureSetPoint = 90;
  62. private int _controlFlowSetPoint = 90;
  63. public SEMFPMSwapRoutine(TMBase tm, ITransferRobot robot, ModuleName module) : base(module)
  64. {
  65. _TM = tm;
  66. _robot = robot;
  67. Name = "swap for pm";
  68. }
  69. public RState Start(params object[] objs)
  70. {
  71. if (!_robot.IsHomed)
  72. {
  73. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  74. return RState.Failed;
  75. }
  76. var swapItem = (Queue<MoveItem>)objs[0];
  77. _targetModule = swapItem.Peek().SourceModule;
  78. _targetSlot = swapItem.Peek().SourceSlot;
  79. _pickHand = swapItem.Peek().RobotHand;
  80. _placeHand = _pickHand == Hand.Blade2 ? Hand.Blade1 : Hand.Blade2;
  81. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  82. {
  83. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  84. }
  85. else
  86. {
  87. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for swap action");
  88. return RState.Failed;
  89. }
  90. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_placeHand))
  91. {
  92. LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_placeHand} has no wafer");
  93. return RState.Failed;
  94. }
  95. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_pickHand))
  96. {
  97. LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_pickHand} has a wafer");
  98. return RState.Failed;
  99. }
  100. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  101. {
  102. LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  103. return RState.Failed;
  104. }
  105. Reset();
  106. _swapingTimeout = SC.GetValue<int>($"{Module}.SwapTimeout") * 1000;
  107. _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  108. _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");
  109. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  110. {
  111. NeedControlPressure = true;
  112. }
  113. else
  114. {
  115. NeedControlPressure = false;
  116. }
  117. return Runner.Start(Module, $"Swap with {_targetModule}");
  118. }
  119. public RState Monitor()
  120. {
  121. Runner.Wait(SwapStep.WaitPMReady, PMPrepare, _delay_60s)
  122. .Run(SwapStep.OpenMFSlitDoor, OpenSlitDoor, CheckSlitDoorOpen)
  123. .Run(SwapStep.PickPrepare, PickPrepare, IsModuleReadyForPick)
  124. .Delay(SwapStep.PickDelay, _placeDelayTime)
  125. .Run(SwapStep.PickExtend, PickExtend, WaitRobotExtendDone)
  126. .Run(SwapStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  127. .Delay(SwapStep.PickDelay1, _pickDelayTime)
  128. .Run(SwapStep.PickRetract, PickRetract, WaitRobotRetractDone)
  129. .Run(SwapStep.PlacePrepare, PlacePrepare, IsModuleReadyForPlace)
  130. .Delay(SwapStep.PlaceDelay, _pickDelayTime)
  131. .Run(SwapStep.PlaceExtend, PlaceExtend, WaitRobotExtendDone)
  132. .Run(SwapStep.LiftUpWafer, NotifyLiftUpWafer, WaitPMWaferLiftUp)
  133. .Delay(SwapStep.PlaceDelay1, _placeDelayTime)
  134. .Run(SwapStep.PlaceRetract, PlaceRetract, WaitRobotRetractDone)
  135. .Run(SwapStep.CloseMFSlitDoor, CheckDoorClose, WaitPMDoorClose, 5000)
  136. .Run(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms)
  137. .Delay(SwapStep.EndDelay, _delay_50ms)
  138. .End(SwapStep.EndDone, NullFun, _delay_50ms);
  139. return Runner.Status;
  140. }
  141. private bool PMPrepare()
  142. {
  143. return IsPressureReady(_targetModule)&& _pmModule.IsIdle;
  144. }
  145. private bool IsPressureReady(ModuleName _targetModule)
  146. {
  147. if (RouteManager.IsATMMode)
  148. return true;
  149. if (_pmModule.IsOnline)
  150. {
  151. double PMPressure = _pmModule.ProcessPressure;
  152. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  153. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  154. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  155. {
  156. return true;
  157. }
  158. else return false;
  159. }
  160. else return true;
  161. }
  162. private bool OpenSlitDoor()
  163. {
  164. return _TM.TurnSlitDoor(_targetModule, true);
  165. }
  166. private bool CheckSlitDoorOpen()
  167. {
  168. return _TM.CheckSlitValveOpen(_targetModule);
  169. }
  170. private bool PickPrepare()
  171. {
  172. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  173. //_TM.TurnSlitDoor(_targetModule, true);
  174. return true;
  175. }
  176. private bool PlacePrepare()
  177. {
  178. _pmModule.PostMsg(PMEntity.MSG.PreparePlace);
  179. //_TM.TurnSlitDoor(_targetModule, true);
  180. return true;
  181. }
  182. private bool IsModuleReadyForPick()
  183. {
  184. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  185. }
  186. private bool PickExtend()
  187. {
  188. return _robot.PickExtend(_targetModule, _targetSlot, _pickHand);
  189. }
  190. private bool PickRetract()
  191. {
  192. return _robot.PickRetract(_targetModule, _targetSlot, _pickHand);
  193. }
  194. private bool IsModuleReadyForPlace()
  195. {
  196. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place && _pmModule.IsSlitDoorOpen;
  197. }
  198. private bool PlaceExtend()
  199. {
  200. return _robot.PlaceExtend(_targetModule, _targetSlot, _placeHand);
  201. }
  202. private bool PlaceRetract()
  203. {
  204. return _robot.PlaceRetract(_targetModule, _targetSlot, _placeHand);
  205. }
  206. private bool WaitRobotExtendDone()
  207. {
  208. if (_robot.Status == RState.Running)
  209. {
  210. return false;
  211. }
  212. else if (_robot.Status == RState.End)
  213. {
  214. return true;
  215. }
  216. else
  217. {
  218. Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");
  219. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  220. return true;
  221. }
  222. }
  223. //private bool RotateArm()
  224. //{
  225. // _pmModule.PostMsg(PMEntity.MSG.PreparePick); // Notify PM to Serv pressure in advance for throughput enhancement
  226. // return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _placeHand);
  227. //}
  228. //private bool WaitRotateDone()
  229. //{
  230. // if (_robot.Status == RState.Running)
  231. // {
  232. // return false;
  233. // }
  234. // else if (_robot.Status == RState.End)
  235. // {
  236. // return true;
  237. // }
  238. // else
  239. // {
  240. // Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
  241. // return true;
  242. // }
  243. //}
  244. private bool NotifyPMPickWafer()
  245. {
  246. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  247. return true;
  248. }
  249. private bool WaitPMWaferDropDown()
  250. {
  251. if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
  252. {
  253. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);
  254. return true;
  255. }
  256. return false;
  257. }
  258. private bool WaitRobotRetractDone()
  259. {
  260. if (_robot.Status == RState.Running)
  261. {
  262. return false;
  263. }
  264. else if (_robot.Status == RState.End)
  265. {
  266. return true;
  267. }
  268. else
  269. {
  270. Runner.Stop($"TM Robot Swap Retract failed, {_robot.Status}");
  271. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  272. return true;
  273. }
  274. }
  275. private bool NotifyLiftUpWafer()
  276. {
  277. _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);
  278. return true;
  279. }
  280. private bool WaitPMWaferLiftUp()
  281. {
  282. if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
  283. {
  284. WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);
  285. return true;
  286. }
  287. return false;
  288. }
  289. private bool NotifyPMDone()
  290. {
  291. _pmModule.PostMsg(PMEntity.MSG.PlaceReady);
  292. //_TM.TurnSlitDoor(_targetModule, false);
  293. return true;
  294. }
  295. private bool CheckDoorClose()
  296. {
  297. LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Close Door Again");
  298. return _TM.TurnSlitDoor(_targetModule, false);
  299. }
  300. private bool WaitPMDoorClose()
  301. {
  302. if (_TM.CheckSlitValveClose(_targetModule))
  303. {
  304. LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check Door Close");
  305. return true;
  306. }
  307. else
  308. {
  309. if (DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetPoint != (int)CylinderState.Close)
  310. {
  311. LOG.Write(eEvent.WARN_TM, Module, $"PMSwap {_targetModule}SlitDoor set close again");
  312. DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetCylinder(false, out string reason);
  313. }
  314. //LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check not Close Door");
  315. return false;
  316. }
  317. }
  318. public void Abort()
  319. {
  320. //_robot.Halt();
  321. }
  322. }
  323. }