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- using System;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- namespace Venus_RT.Modules.PMs
- {
- class PumpDownRoutine : PMRoutineBase, IRoutine
- {
- private enum PumpStep
- {
- kDelay_2s,
- kCloseISOValve,
- kSoftPump,
- kFastPump,
- kHe2ExDelay,
- kPVHe2,
- kISOValve,
- kTurboN2Purge,
- kVATValve,
- kOpenTurboPumpPurgeGasFinal,
- kOpenTurboPump,
- kGasFinal,
- kFinalStep,
- kCloseValve,
- vFastPump,
- kEnd,
- }
- //private int _ventTime;
- private int _pump_delay = 5000;
- private int _roughPumpPressure = 75000;
- private int _vHe2FlowPressure = 200;
- private int _forelinePressure = 200;
- private int _basePressure = 10;
- private JetChamber jetChamber = JetChamber.None;
- //private bool needsoft = true;
- public PumpDownRoutine(JetPMBase chamber) : base(chamber)
- {
- jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
- Name = "PumpDown";
- //if (jetChamber == JetChamber.VenusDE)
- //{
- // needsoft = false;
- //}
- }
- public RState Start(params object[] objs)
- {
- if (CheckLid() &&
- CheckSlitDoor())
- {
- Reset();
- _chamber.CloseValves();
- if(_chamber.ChamberType == JetChamber.VenusSE || _chamber.ChamberType == JetChamber.VenusDE)
- _chamber.OpenValve(ValveType.TurboPumpPurge, false);
- _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
- _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
- _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
-
- //if(jetChamber != JetChamber.VenusSE && jetChamber != JetChamber.VenusDE)
- // _chamber.OpenValve(ValveType.PVN22, true);
- _chamber.OpenValve(ValveType.TurboPumpPumping, true);
- _chamber.TurnPendulumValve(false);
-
- _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
- //前端压力值高于某个数值
- _forelinePressure = SC.GetValue<int>($"{Module}.Pump.ForelinePressure");
- if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > _forelinePressure)
- {
- LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}=>Target:{_forelinePressure}");
- return RState.Failed;
- }
-
- return Runner.Start(Module, Name);
- }
- return RState.Failed;
- }
- public RState Monitor()
- {
- switch (jetChamber)
- {
- case JetChamber.VenusSE:
- Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
- .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
- .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
- .Run(PumpStep.vFastPump, VenusFastPump, () => { return _chamber.ChamberPressure <= _vHe2FlowPressure; })
- .Delay(PumpStep.kHe2ExDelay, 3000)
- .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
- .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
- .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
- .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
- .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
- .Run(PumpStep.kCloseValve, CloseValve, NullFun)
- .End(PumpStep.kEnd, NullFun, _delay_1s);
- break;
- case JetChamber.Kepler2300:
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
- .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
- .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
- .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
- .Run(PumpStep.kISOValve, OpenKeplerISOValve, _delay_2s)
- .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
- .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
- .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
- .End(PumpStep.kEnd, NullFun, _delay_1s);
- break;
- case JetChamber.VenusDE:
- Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
- .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
- .Run(PumpStep.kFastPump, OpenDEFastPump, VenusFastPumpOver )
- .Delay(PumpStep.kHe2ExDelay, 3000)
- .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
- .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
- .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
- .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
- .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
- .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
- .Run(PumpStep.kCloseValve,CloseValve,NullFun)
- .End(PumpStep.kEnd, NullFun, _delay_1s);
- break;
- }
- return Runner.Status;
- }
- private bool CheckToCrossPressure()
- {
- if (_chamber.ChamberPressure < _roughPumpPressure)
- {
- _chamber.OpenValve(ValveType.SoftPump, false);
- return true;
- }
- else
- return false;
- }
- private bool CloseValve()
- {
- _chamber.OpenValve(ValveType.PVN22, false);
- return true;
- }
- private bool OpenTurboPumpPurgeGasFinalValve()
- {
- _chamber.OpenValve(ValveType.TurboPumpPurge, true);
- _chamber.OpenValve(ValveType.GasFinal, true);
- return true;
- }
- private bool OpenTurboValve()
- {
- _chamber.OpenValve(ValveType.TurboPumpPurge, true);
- return true;
- }
- private bool OpenGuageGasFinalValve()
- {
- _chamber.OpenValve(ValveType.GasFinal, true);
- _chamber.OpenValve(ValveType.Guage, true);
- return true;
- }
- private bool VenusFastPumpOver()
- {
- if (_chamber.ChamberPressure < _vHe2FlowPressure)
- {
- _chamber.OpenValve(ValveType.FastPump, false);
- return true;
- }
- else
- return false;
- }
- private bool VenusFastPump()
- {
- _chamber.OpenValve(ValveType.SoftPump, false);
- if (_chamber.ChamberPressure > _vHe2FlowPressure)
- {
- _chamber.OpenValve(ValveType.FastPump, true);
- }
- return true;
- }
- private bool OpenFastPump()
- {
- _chamber.OpenValve(ValveType.SoftPump, false);
- _chamber.OpenValve(ValveType.FastPump, true);
- return true;
- }
- private bool OpenDEFastPump()
- {
- _chamber.OpenValve(ValveType.PVHe2, false);
- //_chamber.OpenValve(ValveType.SoftPump, false);
- if (_chamber.ChamberPressure > _vHe2FlowPressure)
- {
- _chamber.OpenValve(ValveType.FastPump, true);
- }
- return true;
- }
- private bool OpenHe2Valve()
- {
- _chamber.OpenValve(ValveType.FastPump, false);
- _chamber.OpenValve(ValveType.PVHe2, true);
- return true;
- }
- private bool OpenISOValve()
- {
- _chamber.OpenValve(ValveType.FastPump, false);
- _chamber.OpenValve(ValveType.PVHe2, false);
- // ISO Valve
- _chamber.OpenValve(ValveType.TurboPumpPumping, true);
- return true;
- }
- private bool OpenKeplerISOValve()
- {
- _chamber.OpenValve(ValveType.FastPump, false);
- // ISO Valve
- _chamber.OpenValve(ValveType.TurboPumpPumping, true);
- return true;
- }
- private bool OpenVATValve()
- {
- return _chamber.TurnPendulumValve(true);
- }
- private bool FinalStep()
- {
- //_chamber.OpenValve(ValveType.Guage, true);
- //2023/04/25修改
- //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
- //_chamber.OpenValve(ValveType.GasFinal, true);
- return true;
- }
- public void Abort()
- {
- CloseAllValves();
- }
- }
- }
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