PumpDownRoutine.cs 9.8 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. using Aitex.Core.RT.Log;
  8. namespace Venus_RT.Modules.PMs
  9. {
  10. class PumpDownRoutine : PMRoutineBase, IRoutine
  11. {
  12. private enum PumpStep
  13. {
  14. kDelay_2s,
  15. kCloseISOValve,
  16. kSoftPump,
  17. kFastPump,
  18. kHe2ExDelay,
  19. kPVHe2,
  20. kISOValve,
  21. kTurboN2Purge,
  22. kVATValve,
  23. kOpenTurboPumpPurgeGasFinal,
  24. kOpenTurboPump,
  25. kGasFinal,
  26. kFinalStep,
  27. kCloseValve,
  28. vFastPump,
  29. kEnd,
  30. }
  31. //private int _ventTime;
  32. private int _pump_delay = 5000;
  33. private int _roughPumpPressure = 75000;
  34. private int _vHe2FlowPressure = 200;
  35. private int _forelinePressure = 200;
  36. private int _basePressure = 10;
  37. private JetChamber jetChamber = JetChamber.None;
  38. //private bool needsoft = true;
  39. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  40. {
  41. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  42. Name = "PumpDown";
  43. //if (jetChamber == JetChamber.VenusDE)
  44. //{
  45. // needsoft = false;
  46. //}
  47. }
  48. public RState Start(params object[] objs)
  49. {
  50. if (CheckLid() &&
  51. CheckSlitDoor())
  52. {
  53. Reset();
  54. _chamber.CloseValves();
  55. if(_chamber.ChamberType == JetChamber.VenusSE || _chamber.ChamberType == JetChamber.VenusDE)
  56. _chamber.OpenValve(ValveType.TurboPumpPurge, false);
  57. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  58. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  59. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  60. //if(jetChamber != JetChamber.VenusSE && jetChamber != JetChamber.VenusDE)
  61. // _chamber.OpenValve(ValveType.PVN22, true);
  62. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  63. _chamber.TurnPendulumValve(false);
  64. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  65. //前端压力值高于某个数值
  66. _forelinePressure = SC.GetValue<int>($"{Module}.Pump.ForelinePressure");
  67. if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > _forelinePressure)
  68. {
  69. LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}=>Target:{_forelinePressure}");
  70. return RState.Failed;
  71. }
  72. return Runner.Start(Module, Name);
  73. }
  74. return RState.Failed;
  75. }
  76. public RState Monitor()
  77. {
  78. switch (jetChamber)
  79. {
  80. case JetChamber.VenusSE:
  81. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  82. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  83. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
  84. .Run(PumpStep.vFastPump, VenusFastPump, () => { return _chamber.ChamberPressure <= _vHe2FlowPressure; })
  85. .Delay(PumpStep.kHe2ExDelay, 3000)
  86. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  87. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  88. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  89. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  90. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  91. .Run(PumpStep.kCloseValve, CloseValve, NullFun)
  92. .End(PumpStep.kEnd, NullFun, _delay_1s);
  93. break;
  94. case JetChamber.Kepler2300:
  95. case JetChamber.Kepler2200A:
  96. case JetChamber.Kepler2200B:
  97. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  98. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  99. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
  100. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  101. .Run(PumpStep.kISOValve, OpenKeplerISOValve, _delay_2s)
  102. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  103. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  104. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  105. .End(PumpStep.kEnd, NullFun, _delay_1s);
  106. break;
  107. case JetChamber.VenusDE:
  108. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  109. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  110. .Run(PumpStep.kFastPump, OpenDEFastPump, VenusFastPumpOver )
  111. .Delay(PumpStep.kHe2ExDelay, 3000)
  112. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  113. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  114. .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  115. .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  116. .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  117. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  118. .Run(PumpStep.kCloseValve,CloseValve,NullFun)
  119. .End(PumpStep.kEnd, NullFun, _delay_1s);
  120. break;
  121. }
  122. return Runner.Status;
  123. }
  124. private bool CheckToCrossPressure()
  125. {
  126. if (_chamber.ChamberPressure < _roughPumpPressure)
  127. {
  128. _chamber.OpenValve(ValveType.SoftPump, false);
  129. return true;
  130. }
  131. else
  132. return false;
  133. }
  134. private bool CloseValve()
  135. {
  136. _chamber.OpenValve(ValveType.PVN22, false);
  137. return true;
  138. }
  139. private bool OpenTurboPumpPurgeGasFinalValve()
  140. {
  141. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  142. _chamber.OpenValve(ValveType.GasFinal, true);
  143. return true;
  144. }
  145. private bool OpenTurboValve()
  146. {
  147. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  148. return true;
  149. }
  150. private bool OpenGuageGasFinalValve()
  151. {
  152. _chamber.OpenValve(ValveType.GasFinal, true);
  153. _chamber.OpenValve(ValveType.Guage, true);
  154. return true;
  155. }
  156. private bool VenusFastPumpOver()
  157. {
  158. if (_chamber.ChamberPressure < _vHe2FlowPressure)
  159. {
  160. _chamber.OpenValve(ValveType.FastPump, false);
  161. return true;
  162. }
  163. else
  164. return false;
  165. }
  166. private bool VenusFastPump()
  167. {
  168. _chamber.OpenValve(ValveType.SoftPump, false);
  169. if (_chamber.ChamberPressure > _vHe2FlowPressure)
  170. {
  171. _chamber.OpenValve(ValveType.FastPump, true);
  172. }
  173. return true;
  174. }
  175. private bool OpenFastPump()
  176. {
  177. _chamber.OpenValve(ValveType.SoftPump, false);
  178. _chamber.OpenValve(ValveType.FastPump, true);
  179. return true;
  180. }
  181. private bool OpenDEFastPump()
  182. {
  183. _chamber.OpenValve(ValveType.PVHe2, false);
  184. //_chamber.OpenValve(ValveType.SoftPump, false);
  185. if (_chamber.ChamberPressure > _vHe2FlowPressure)
  186. {
  187. _chamber.OpenValve(ValveType.FastPump, true);
  188. }
  189. return true;
  190. }
  191. private bool OpenHe2Valve()
  192. {
  193. _chamber.OpenValve(ValveType.FastPump, false);
  194. _chamber.OpenValve(ValveType.PVHe2, true);
  195. return true;
  196. }
  197. private bool OpenISOValve()
  198. {
  199. _chamber.OpenValve(ValveType.FastPump, false);
  200. _chamber.OpenValve(ValveType.PVHe2, false);
  201. // ISO Valve
  202. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  203. return true;
  204. }
  205. private bool OpenKeplerISOValve()
  206. {
  207. _chamber.OpenValve(ValveType.FastPump, false);
  208. // ISO Valve
  209. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  210. return true;
  211. }
  212. private bool OpenVATValve()
  213. {
  214. return _chamber.TurnPendulumValve(true);
  215. }
  216. private bool FinalStep()
  217. {
  218. //_chamber.OpenValve(ValveType.Guage, true);
  219. //2023/04/25修改
  220. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  221. //_chamber.OpenValve(ValveType.GasFinal, true);
  222. return true;
  223. }
  224. public void Abort()
  225. {
  226. CloseAllValves();
  227. }
  228. }
  229. }