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- //using Aitex.Core.RT.Routine;
- //using Aitex.Core.RT.SCCore;
- //using Venus_RT.Devices;
- //using MECF.Framework.Common.Routine;
- //using Venus_Core;
- //namespace Venus_RT.Modules.PMs
- //{
- // class LoadLockPurgeRoutine : PMRoutineBase, IRoutine
- // {
- // private enum PurgeStep
- // {
- // kCloseValves,
- // kPumpToBase,
- // kPurgeDelay_1,
- // kPurgeVent,
- // kPurgeDelay_2,
- // kPurgePumpToBase,
- // kPurgePumpDelay,
- // kPurgeEnd,
- // kEnd,
- // }
- // public int PurgeCounter { get; private set; }
- // private int _basePressureLL = 100;
- // private int _purgeVentPressureLL = 10;
- // private int _purgeCycleCounter = 30;
- // private int _purgePumpTime = 120;
- // public LoadLockPurgeRoutine(JetPMBase chamber) : base(chamber)
- // {
- // Name = "Loadlock Purge";
- // }
- // public RState Start(params object[] objs)
- // {
- // if (CheckLidLoadLock() &&
- // CheckSlitDoor() &&
- // CheckDryPump())
- // {
- // Reset();
- // _chamber.CloseValves();
- // _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
- // _purgeVentPressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeVentPressure");
- // _purgeCycleCounter = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeCycleCount");
- // _purgePumpTime = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgePumpTime");
- // PurgeCounter = 0;
- // return Runner.Start(Module, Name);
- // }
- // return RState.Failed;
- // }
- // public RState Monitor()
- // {
- // Runner.Delay(PurgeStep.kCloseValves, _delay_1s)
- // .Run(PurgeStep.kPumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
- // .LoopStart(PurgeStep.kPurgeDelay_1, "Purge", _purgeCycleCounter, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_1s)
- // .LoopRun(PurgeStep.kPurgeVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _purgeVentPressureLL; })
- // .LoopRun(PurgeStep.kPurgeDelay_2, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false), _delay_1s)
- // .LoopRun(PurgeStep.kPurgePumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
- // .LoopRun(PurgeStep.kPurgePumpDelay, NullFun, _purgePumpTime * 1000)
- // .LoopEnd(PurgeStep.kPurgeEnd, ClosePumpValve, _delay_1s)
- // .End(PurgeStep.kEnd, NullFun, _delay_50ms);
-
- // return Runner.Status;
- // }
- // public void Abort()
- // {
- // CloseAllValves();
- // }
- // private bool ClosePumpValve()
- // {
- // _chamber.OpenValve(ValveType.LoadlockPumping, false);
- // return true;
- // }
- // }
- //}
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