LoadLockPurgeRoutine.cs 3.6 KB

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  1. //using Aitex.Core.RT.Routine;
  2. //using Aitex.Core.RT.SCCore;
  3. //using Venus_RT.Devices;
  4. //using MECF.Framework.Common.Routine;
  5. //using Venus_Core;
  6. //namespace Venus_RT.Modules.PMs
  7. //{
  8. // class LoadLockPurgeRoutine : PMRoutineBase, IRoutine
  9. // {
  10. // private enum PurgeStep
  11. // {
  12. // kCloseValves,
  13. // kPumpToBase,
  14. // kPurgeDelay_1,
  15. // kPurgeVent,
  16. // kPurgeDelay_2,
  17. // kPurgePumpToBase,
  18. // kPurgePumpDelay,
  19. // kPurgeEnd,
  20. // kEnd,
  21. // }
  22. // public int PurgeCounter { get; private set; }
  23. // private int _basePressureLL = 100;
  24. // private int _purgeVentPressureLL = 10;
  25. // private int _purgeCycleCounter = 30;
  26. // private int _purgePumpTime = 120;
  27. // public LoadLockPurgeRoutine(JetPMBase chamber) : base(chamber)
  28. // {
  29. // Name = "Loadlock Purge";
  30. // }
  31. // public RState Start(params object[] objs)
  32. // {
  33. // if (CheckLidLoadLock() &&
  34. // CheckSlitDoor() &&
  35. // CheckDryPump())
  36. // {
  37. // Reset();
  38. // _chamber.CloseValves();
  39. // _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
  40. // _purgeVentPressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeVentPressure");
  41. // _purgeCycleCounter = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeCycleCount");
  42. // _purgePumpTime = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgePumpTime");
  43. // PurgeCounter = 0;
  44. // return Runner.Start(Module, Name);
  45. // }
  46. // return RState.Failed;
  47. // }
  48. // public RState Monitor()
  49. // {
  50. // Runner.Delay(PurgeStep.kCloseValves, _delay_1s)
  51. // .Run(PurgeStep.kPumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
  52. // .LoopStart(PurgeStep.kPurgeDelay_1, "Purge", _purgeCycleCounter, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_1s)
  53. // .LoopRun(PurgeStep.kPurgeVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _purgeVentPressureLL; })
  54. // .LoopRun(PurgeStep.kPurgeDelay_2, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false), _delay_1s)
  55. // .LoopRun(PurgeStep.kPurgePumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
  56. // .LoopRun(PurgeStep.kPurgePumpDelay, NullFun, _purgePumpTime * 1000)
  57. // .LoopEnd(PurgeStep.kPurgeEnd, ClosePumpValve, _delay_1s)
  58. // .End(PurgeStep.kEnd, NullFun, _delay_50ms);
  59. // return Runner.Status;
  60. // }
  61. // public void Abort()
  62. // {
  63. // CloseAllValves();
  64. // }
  65. // private bool ClosePumpValve()
  66. // {
  67. // _chamber.OpenValve(ValveType.LoadlockPumping, false);
  68. // return true;
  69. // }
  70. // }
  71. //}