LoadLockPumpRoutine.cs 2.7 KB

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  1. //using Aitex.Core.RT.Routine;
  2. //using Aitex.Core.RT.SCCore;
  3. //using Venus_RT.Devices;
  4. //using MECF.Framework.Common.Routine;
  5. //using Venus_Core;
  6. //namespace Venus_RT.Modules.PMs
  7. //{
  8. // class LoadLockPumpRoutine : PMRoutineBase, IRoutine
  9. // {
  10. // private enum PumpStep
  11. // {
  12. // kClosePendulumValve,
  13. // kCloseValves,
  14. // KCloseISO,
  15. // kPump,
  16. // kClosePumpValves,
  17. // }
  18. // private int _basePressureLL = 100;
  19. // private int _pumpTimeLimitLL = 120;
  20. // public LoadLockPumpRoutine(JetPMBase chamber) : base(chamber)
  21. // {
  22. // Name = "Loadlock Pump";
  23. // }
  24. // public RState Start(params object[] objs)
  25. // {
  26. // if (CheckLidLoadLock() &&
  27. // CheckSlitDoor() &&
  28. // CheckDryPump())
  29. // {
  30. // Reset();
  31. // //_chamber.CloseValves();
  32. // _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
  33. // _pumpTimeLimitLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpTimeLimit");
  34. // return Runner.Start(Module, Name);
  35. // }
  36. // return RState.Failed;
  37. // }
  38. // public RState Monitor()
  39. // {
  40. // Runner.Run(PumpStep.kClosePendulumValve, ClosePendulumValve, _delay_1s)
  41. // .Run(PumpStep.kCloseValves, CloseValves, _delay_1s)
  42. // .Run(PumpStep.KCloseISO, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false))
  43. // .Run(PumpStep.kPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure <= _basePressureLL; }, _pumpTimeLimitLL * 1000)
  44. // .End(PumpStep.kClosePumpValves, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_1s);
  45. // return Runner.Status;
  46. // }
  47. // public bool ClosePendulumValve()
  48. // {
  49. // if (_chamber.PendulumValveIsOpen() == true)
  50. // {
  51. // _chamber.TurnPendulumValve(false);
  52. // }
  53. // _chamber.OpenValve(ValveType.TurboPumpPurge, false);
  54. // _chamber.OpenValve(ValveType.Guage, false);
  55. // return true;
  56. // }
  57. // public bool CloseValves()
  58. // {
  59. // _chamber.OpenValve(ValveType.TurboPumpPumping, false);
  60. // return true;
  61. // }
  62. // public void Abort()
  63. // {
  64. // CloseAllValves();
  65. // }
  66. // }
  67. //}