Kepler-Release/Venus/Venus_RT/Config/EquipmentVariables.xml

<?xml version="1.0"?>
<EquipmentVariables xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <SpoolingStreamFunctions />
  <SystemInfo clockFormat="yyMMddHHmmss" traceSampleMax="20" traceMaxCount="5" supportValidIpRestrict="false" validIps="" Encoding="ASCII" name="EfemDual" version="1.0.1" />
  <CommunicationInfo remoteIpAddress="127.0.0.1" port="5000" supportHeartCheck="true" heartInterval="5" />
  <StatusVariables>
    <StatusVariable id="1" valueType="List" logicalName="AlarmsEnabled" eventTrigger="" units="" />
    <StatusVariable id="2" valueType="List" logicalName="AlarmsSet" eventTrigger="" units="" />
    <StatusVariable id="3" valueType="Ascii" logicalName="Clock" eventTrigger="" units="" />
    <StatusVariable id="4" valueType="U4" logicalName="ControlState" eventTrigger="" units="" />
    <StatusVariable id="5" valueType="List" logicalName="EventsEnabled" eventTrigger="" units="" />
    <StatusVariable id="6" valueType="Ascii" logicalName="PPExecName" eventTrigger="" units="" />
    <StatusVariable id="7" valueType="U1" logicalName="PreviousProcessState" eventTrigger="" units="" />
    <StatusVariable id="8" valueType="U1" logicalName="ProcessState" eventTrigger="" units="" />
    <StatusVariable id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" units="" />
    <StatusVariable id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" units="" />
    <StatusVariable id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" units="" />
    <StatusVariable id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" units="" />
    <StatusVariable id="13" valueType="Ascii" logicalName="SpoolState" eventTrigger="" units="" />
    <StatusVariable id="14" valueType="Ascii" logicalName="SpoolSubstate" eventTrigger="" units="" />
    <StatusVariable id="10101001" valueType="Ascii" logicalName="CJQueue_Space" eventTrigger="" units="" />
    <StatusVariable id="10101002" valueType="Ascii" logicalName="PJQueue_Space" eventTrigger="" units="" />
    <StatusVariable id="10101003" valueType="Boolean" logicalName="System.HasActiveAlarm" eventTrigger="" units="" />
    <StatusVariable id="10101004" valueType="Boolean" logicalName="System.IsAlarm" eventTrigger="" units="" />
    <StatusVariable id="10101005" valueType="Boolean" logicalName="System.IsAutoRunning" eventTrigger="" units="" />
    <StatusVariable id="10101006" valueType="Boolean" logicalName="System.IsBusy" eventTrigger="" units="" />
    <StatusVariable id="10101007" valueType="Boolean" logicalName="System.IsIdle" eventTrigger="" units="" />
    <StatusVariable id="10101008" valueType="Boolean" logicalName="System.IsSpoolingEnable" eventTrigger="" units="" />
    <StatusVariable id="10101009" valueType="Ascii" logicalName="System.SpoolingState" eventTrigger="" units="" />
    <StatusVariable id="10101010" valueType="Boolean" logicalName="System.IsAutoMode" eventTrigger="" units="" />
    <StatusVariable id="10101011" valueType="Boolean" logicalName="System.IsConnectedWithHost" eventTrigger="" units="" />
    <StatusVariable id="10101012" valueType="Ascii" logicalName="System.EquipmentMode" eventTrigger="" units="" />
    <StatusVariable id="10101013" valueType="Ascii" logicalName="System.EquipmentStatus" eventTrigger="" units="" />
    <StatusVariable id="10202001" valueType="Boolean" logicalName="System.EFEM.AirErrorForRobot" eventTrigger="" units="" />
    <StatusVariable id="10202002" valueType="Boolean" logicalName="System.EFEM.DoorOpen" eventTrigger="" units="" />
    <StatusVariable id="10202003" valueType="Boolean" logicalName="System.EFEM.EmoAlarm" eventTrigger="" units="" />
    <StatusVariable id="10202004" valueType="Boolean" logicalName="System.EFEM.FFUAlarm" eventTrigger="" units="" />
    <StatusVariable id="10202005" valueType="Boolean" logicalName="System.EFEM.IonizerAlarm" eventTrigger="" units="" />
    <StatusVariable id="10202006" valueType="Boolean" logicalName="System.EFEM.IsMaintain" eventTrigger="" units="" />
    <StatusVariable id="10202007" valueType="Boolean" logicalName="System.EFEM.CompressedAirPressuF8arm" eventTrigger="" units="" />
    <StatusVariable id="10202008" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting1Alarm" eventTrigger="" units="" />
    <StatusVariable id="10202009" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting2Alarm" eventTrigger="" units="" />
    <StatusVariable id="10202010" valueType="Boolean" logicalName="System.EFEM.DrivePowerAlarm" eventTrigger="" units="" />
    <StatusVariable id="10202011" valueType="Boolean" logicalName="System.EFEM.FlowGaugeWarning" eventTrigger="" units="" />
    <StatusVariable id="10202012" valueType="Boolean" logicalName="System.EFEM.VacuumSourcePressuF8arm" eventTrigger="" units="" />
    <StatusVariable id="10202013" valueType="Boolean" logicalName="System.EFEM.WaterLeakWarning" eventTrigger="" units="" />
    <StatusVariable id="10203001" valueType="Boolean" logicalName="System.io.IsConnected" eventTrigger="" units="" />
    <StatusVariable id="10214001" valueType="Boolean" logicalName="System.SensorCDAPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="10215001" valueType="Boolean" logicalName="System.SensorEFEMSidePlanClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="10216001" valueType="Boolean" logicalName="System.SensorINONormal.Value" eventTrigger="" units="" />
    <StatusVariable id="10217001" valueType="Boolean" logicalName="System.SensorLowArmPressure.Value" eventTrigger="" units="" />
    <StatusVariable id="10218001" valueType="Boolean" logicalName="System.SensorTMBufferOTSW.Value" eventTrigger="" units="" />
    <StatusVariable id="10219001" valueType="Boolean" logicalName="System.SensorTMFFUNormal.Value" eventTrigger="" units="" />
    <StatusVariable id="10220001" valueType="Boolean" logicalName="System.SensorTMInSafety.Value" eventTrigger="" units="" />
    <StatusVariable id="10221001" valueType="Boolean" logicalName="System.SensorTMPowerOn.Value" eventTrigger="" units="" />
    <StatusVariable id="10222001" valueType="Boolean" logicalName="System.SensorTMRobotAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="10223001" valueType="Boolean" logicalName="System.SensorUpArmPressure.Value" eventTrigger="" units="" />
    <StatusVariable id="10224001" valueType="Boolean" logicalName="System.SensorVaccumPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="10225001" valueType="Boolean" logicalName="System.SensorWaterFlowSW.Value" eventTrigger="" units="" />
    <StatusVariable id="10226001" valueType="Boolean" logicalName="System.SensorWaterLeakSW.Value" eventTrigger="" units="" />
    <StatusVariable id="10227001" valueType="Boolean" logicalName="System.SensorTMSideDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="10228001" valueType="Boolean" logicalName="System.SensorWaterInletValve.Value" eventTrigger="" units="" />
    <StatusVariable id="10301001" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="10301002" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.Status" eventTrigger="" units="" />
    <StatusVariable id="20101001" valueType="Ascii" logicalName="LP1.CassettePlaced" eventTrigger="" units="" />
    <StatusVariable id="20101002" valueType="Ascii" logicalName="LP1.CassettePresent" eventTrigger="" units="" />
    <StatusVariable id="20101003" valueType="Boolean" logicalName="LP1.IsClamped" eventTrigger="" units="" />
    <StatusVariable id="20101004" valueType="Boolean" logicalName="LP1.IsDocked" eventTrigger="" units="" />
    <StatusVariable id="20101005" valueType="Boolean" logicalName="LP1.IsLoaded" eventTrigger="" units="" />
    <StatusVariable id="20101006" valueType="Boolean" logicalName="LP1.IsMapped" eventTrigger="" units="" />
    <StatusVariable id="20101007" valueType="Boolean" logicalName="LP1.IsWaferProtrude" eventTrigger="" units="" />
    <StatusVariable id="20101008" valueType="Ascii" logicalName="LP2.CassettePlaced" eventTrigger="" units="" />
    <StatusVariable id="20101009" valueType="Ascii" logicalName="LP2.CassettePresent" eventTrigger="" units="" />
    <StatusVariable id="20101010" valueType="Boolean" logicalName="LP2.IsClamped" eventTrigger="" units="" />
    <StatusVariable id="20101011" valueType="Boolean" logicalName="LP2.IsDocked" eventTrigger="" units="" />
    <StatusVariable id="20101012" valueType="Boolean" logicalName="LP2.IsLoaded" eventTrigger="" units="" />
    <StatusVariable id="20101013" valueType="Boolean" logicalName="LP2.IsMapped" eventTrigger="" units="" />
    <StatusVariable id="20101014" valueType="Boolean" logicalName="LP2.IsWaferProtrude" eventTrigger="" units="" />
    <StatusVariable id="20101015" valueType="Ascii" logicalName="LP3.CassettePlaced" eventTrigger="" units="" />
    <StatusVariable id="20101016" valueType="Ascii" logicalName="LP3.CassettePresent" eventTrigger="" units="" />
    <StatusVariable id="20101017" valueType="Boolean" logicalName="LP3.IsClamped" eventTrigger="" units="" />
    <StatusVariable id="20101018" valueType="Boolean" logicalName="LP3.IsDocked" eventTrigger="" units="" />
    <StatusVariable id="20101019" valueType="Boolean" logicalName="LP3.IsLoaded" eventTrigger="" units="" />
    <StatusVariable id="20101020" valueType="Boolean" logicalName="LP3.IsMapped" eventTrigger="" units="" />
    <StatusVariable id="20101021" valueType="Boolean" logicalName="LP3.IsWaferProtrude" eventTrigger="" units="" />
    <StatusVariable id="310101001" valueType="Boolean" logicalName="LLA.MainPump" eventTrigger="" units="" />
    <StatusVariable id="310101002" valueType="Boolean" logicalName="LLA.MainPump.IsEoor" eventTrigger="" units="" />
    <StatusVariable id="310101003" valueType="Boolean" logicalName="LLA.MainPump.IsOn" eventTrigger="" units="" />
    <StatusVariable id="310101004" valueType="Boolean" logicalName="LLA.MainPump.IsRunning" eventTrigger="" units="" />
    <StatusVariable id="310101005" valueType="F8" logicalName="LLA.MainPump.Speed" eventTrigger="" units="" />
    <StatusVariable id="310101006" valueType="F8" logicalName="LLA.MainPump.Temperature" eventTrigger="" units="" />
    <StatusVariable id="310101007" valueType="Boolean" logicalName="LLB.MainPump" eventTrigger="" units="" />
    <StatusVariable id="310101008" valueType="Boolean" logicalName="LLB.MainPump.IsEoor" eventTrigger="" units="" />
    <StatusVariable id="310101009" valueType="Boolean" logicalName="LLB.MainPump.IsOn" eventTrigger="" units="" />
    <StatusVariable id="310101010" valueType="Boolean" logicalName="LLB.MainPump.IsRunning" eventTrigger="" units="" />
    <StatusVariable id="310101011" valueType="F8" logicalName="LLB.MainPump.Speed" eventTrigger="" units="" />
    <StatusVariable id="310101012" valueType="F8" logicalName="LLB.MainPump.Temperature" eventTrigger="" units="" />
    <StatusVariable id="430101001" valueType="Boolean" logicalName="TM.CDAPressureSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101002" valueType="Boolean" logicalName="TM.CDAPressureSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101003" valueType="F8" logicalName="TM.ChamberPressure" eventTrigger="" units="" />
    <StatusVariable id="430101004" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLA" eventTrigger="" units="" />
    <StatusVariable id="430101005" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLA.Value" eventTrigger="" units="" />
    <StatusVariable id="430101006" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLB" eventTrigger="" units="" />
    <StatusVariable id="430101007" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLB.Value" eventTrigger="" units="" />
    <StatusVariable id="430101008" valueType="Boolean" logicalName="TM.EFEMSideDoorClosed" eventTrigger="" units="" />
    <StatusVariable id="430101009" valueType="Boolean" logicalName="TM.EFEMSideDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="430101010" valueType="F8" logicalName="TM.ForelinePressure" eventTrigger="" units="" />
    <StatusVariable id="430101011" valueType="F8" logicalName="TM.IoSensor" eventTrigger="" units="" />
    <StatusVariable id="430101012" valueType="Boolean" logicalName="TM.IoSensor.CDAPressureSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101013" valueType="Boolean" logicalName="TM.IoSensor.CDAPressureSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101014" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLA" eventTrigger="" units="" />
    <StatusVariable id="430101015" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLA.Value" eventTrigger="" units="" />
    <StatusVariable id="430101016" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLB" eventTrigger="" units="" />
    <StatusVariable id="430101017" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLB.Value" eventTrigger="" units="" />
    <StatusVariable id="430101018" valueType="Boolean" logicalName="TM.IoSensor.EFEMSideDoorClosed" eventTrigger="" units="" />
    <StatusVariable id="430101019" valueType="Boolean" logicalName="TM.IoSensor.EFEMSideDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="430101020" valueType="Boolean" logicalName="TM.IoSensor.LLAATMSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101021" valueType="Boolean" logicalName="TM.IoSensor.LLAATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101022" valueType="Boolean" logicalName="TM.IoSensor.LLAPCWFlowSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101023" valueType="Boolean" logicalName="TM.IoSensor.LLAPCWFlowSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101024" valueType="Boolean" logicalName="TM.IoSensor.LLAVacSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101025" valueType="Boolean" logicalName="TM.IoSensor.LLAVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101026" valueType="Boolean" logicalName="TM.IoSensor.LLBATMSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101027" valueType="Boolean" logicalName="TM.IoSensor.LLBATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101028" valueType="Boolean" logicalName="TM.IoSensor.LLBPCWFlowSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101029" valueType="Boolean" logicalName="TM.IoSensor.LLBPCWFlowSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101030" valueType="Boolean" logicalName="TM.IoSensor.LLBVacSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101031" valueType="Boolean" logicalName="TM.IoSensor.LLBVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101032" valueType="Boolean" logicalName="TM.IoSensor.N2PressureSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101033" valueType="Boolean" logicalName="TM.IoSensor.N2PressureSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101034" valueType="Boolean" logicalName="TM.IoSensor.TMATMSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101035" valueType="Boolean" logicalName="TM.IoSensor.TMATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101036" valueType="Boolean" logicalName="TM.IoSensor.TMInSafety" eventTrigger="" units="" />
    <StatusVariable id="430101037" valueType="Boolean" logicalName="TM.IoSensor.TMInSafety.Value" eventTrigger="" units="" />
    <StatusVariable id="430101038" valueType="Boolean" logicalName="TM.IoSensor.TMLidClosed" eventTrigger="" units="" />
    <StatusVariable id="430101039" valueType="Boolean" logicalName="TM.IoSensor.TMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="430101040" valueType="Boolean" logicalName="TM.IoSensor.TMPCWFlowSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101041" valueType="Boolean" logicalName="TM.IoSensor.TMPCWFlowSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101042" valueType="Boolean" logicalName="TM.IoSensor.TMPowerOn" eventTrigger="" units="" />
    <StatusVariable id="430101043" valueType="Boolean" logicalName="TM.IoSensor.TMPowerOn.Value" eventTrigger="" units="" />
    <StatusVariable id="430101044" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLA" eventTrigger="" units="" />
    <StatusVariable id="430101045" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLA.Value" eventTrigger="" units="" />
    <StatusVariable id="430101046" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLB" eventTrigger="" units="" />
    <StatusVariable id="430101047" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLB.Value" eventTrigger="" units="" />
    <StatusVariable id="430101048" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMA" eventTrigger="" units="" />
    <StatusVariable id="430101049" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMA.Value" eventTrigger="" units="" />
    <StatusVariable id="430101050" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMB" eventTrigger="" units="" />
    <StatusVariable id="430101051" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMB.Value" eventTrigger="" units="" />
    <StatusVariable id="430101052" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMC" eventTrigger="" units="" />
    <StatusVariable id="430101053" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMC.Value" eventTrigger="" units="" />
    <StatusVariable id="430101054" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMD" eventTrigger="" units="" />
    <StatusVariable id="430101055" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMD.Value" eventTrigger="" units="" />
    <StatusVariable id="430101056" valueType="Boolean" logicalName="TM.IoSensor.TMVacSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101057" valueType="Boolean" logicalName="TM.IoSensor.TMVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101058" valueType="Boolean" logicalName="TM.IoSensor.VaccumPressureSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101059" valueType="Boolean" logicalName="TM.IoSensor.VaccumPressureSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101060" valueType="Boolean" logicalName="TM.IoSensor.WaferLeakSensor" eventTrigger="" units="" />
    <StatusVariable id="430101061" valueType="Boolean" logicalName="TM.IoSensor.WaferLeakSensor.Value" eventTrigger="" units="" />
    <StatusVariable id="430101062" valueType="Boolean" logicalName="TM.IoValve" eventTrigger="" units="" />
    <StatusVariable id="430101063" valueType="Boolean" logicalName="TM.IoValve.LLAFastPumpValve" eventTrigger="" units="" />
    <StatusVariable id="430101064" valueType="Boolean" logicalName="TM.IoValve.LLAFastPumpValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101065" valueType="Boolean" logicalName="TM.IoValve.LLAFastPumpValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101066" valueType="Boolean" logicalName="TM.IoValve.LLAPurgeValve" eventTrigger="" units="" />
    <StatusVariable id="430101067" valueType="Boolean" logicalName="TM.IoValve.LLAPurgeValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101068" valueType="Boolean" logicalName="TM.IoValve.LLAPurgeValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101069" valueType="Boolean" logicalName="TM.IoValve.LLASoftPumpValve" eventTrigger="" units="" />
    <StatusVariable id="430101070" valueType="Boolean" logicalName="TM.IoValve.LLASoftPumpValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101071" valueType="Boolean" logicalName="TM.IoValve.LLASoftPumpValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101072" valueType="Boolean" logicalName="TM.IoValve.LLAVentValve" eventTrigger="" units="" />
    <StatusVariable id="430101073" valueType="Boolean" logicalName="TM.IoValve.LLAVentValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101074" valueType="Boolean" logicalName="TM.IoValve.LLAVentValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101075" valueType="Boolean" logicalName="TM.IoValve.LLBFastPumpValve" eventTrigger="" units="" />
    <StatusVariable id="430101076" valueType="Boolean" logicalName="TM.IoValve.LLBFastPumpValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101077" valueType="Boolean" logicalName="TM.IoValve.LLBFastPumpValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101078" valueType="Boolean" logicalName="TM.IoValve.LLBPurgeValve" eventTrigger="" units="" />
    <StatusVariable id="430101079" valueType="Boolean" logicalName="TM.IoValve.LLBPurgeValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101080" valueType="Boolean" logicalName="TM.IoValve.LLBPurgeValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101081" valueType="Boolean" logicalName="TM.IoValve.LLBSoftPumpValve" eventTrigger="" units="" />
    <StatusVariable id="430101082" valueType="Boolean" logicalName="TM.IoValve.LLBSoftPumpValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101083" valueType="Boolean" logicalName="TM.IoValve.LLBSoftPumpValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101084" valueType="Boolean" logicalName="TM.IoValve.LLBVentValve" eventTrigger="" units="" />
    <StatusVariable id="430101085" valueType="Boolean" logicalName="TM.IoValve.LLBVentValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101086" valueType="Boolean" logicalName="TM.IoValve.LLBVentValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101087" valueType="Boolean" logicalName="TM.IoValve.TMFastPumpValve" eventTrigger="" units="" />
    <StatusVariable id="430101088" valueType="Boolean" logicalName="TM.IoValve.TMFastPumpValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101089" valueType="Boolean" logicalName="TM.IoValve.TMFastPumpValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101090" valueType="Boolean" logicalName="TM.IoValve.TMPurgeValve" eventTrigger="" units="" />
    <StatusVariable id="430101091" valueType="Boolean" logicalName="TM.IoValve.TMPurgeValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101092" valueType="Boolean" logicalName="TM.IoValve.TMPurgeValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101093" valueType="Boolean" logicalName="TM.IoValve.TMSoftPumpValve" eventTrigger="" units="" />
    <StatusVariable id="430101094" valueType="Boolean" logicalName="TM.IoValve.TMSoftPumpValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101095" valueType="Boolean" logicalName="TM.IoValve.TMSoftPumpValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101096" valueType="Boolean" logicalName="TM.IoValve.TMVacAtmMode" eventTrigger="" units="" />
    <StatusVariable id="430101097" valueType="Boolean" logicalName="TM.IoValve.TMVacAtmMode.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101098" valueType="Boolean" logicalName="TM.IoValve.TMVacAtmMode.Status" eventTrigger="" units="" />
    <StatusVariable id="430101099" valueType="Boolean" logicalName="TM.IoValve.TMValveN2" eventTrigger="" units="" />
    <StatusVariable id="430101100" valueType="Boolean" logicalName="TM.IoValve.TMValveN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101101" valueType="Boolean" logicalName="TM.IoValve.TMValveN2.Status" eventTrigger="" units="" />
    <StatusVariable id="430101102" valueType="Boolean" logicalName="TM.IoValve.TMVentValve" eventTrigger="" units="" />
    <StatusVariable id="430101103" valueType="Boolean" logicalName="TM.IoValve.TMVentValve.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101104" valueType="Boolean" logicalName="TM.IoValve.TMVentValve.Status" eventTrigger="" units="" />
    <StatusVariable id="430101105" valueType="Boolean" logicalName="TM.IoValve.ValveWaterRelay" eventTrigger="" units="" />
    <StatusVariable id="430101106" valueType="Boolean" logicalName="TM.IoValve.ValveWaterRelay.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101107" valueType="Boolean" logicalName="TM.IoValve.ValveWaterRelay.Status" eventTrigger="" units="" />
    <StatusVariable id="430101108" valueType="Boolean" logicalName="TM.IsAtm" eventTrigger="" units="" />
    <StatusVariable id="430101109" valueType="Boolean" logicalName="TM.IsOnline" eventTrigger="" units="" />
    <StatusVariable id="430101110" valueType="Boolean" logicalName="TM.IsVacuum" eventTrigger="" units="" />
    <StatusVariable id="430101111" valueType="Boolean" logicalName="TM.LLA_MFC1" eventTrigger="" units="" />
    <StatusVariable id="430101112" valueType="F8" logicalName="TM.LLA_MFC1.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="430101113" valueType="F8" logicalName="TM.LLA_MFC1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101114" valueType="Boolean" logicalName="TM.LLAATMSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101115" valueType="Boolean" logicalName="TM.LLAATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101116" valueType="Boolean" logicalName="TM.LLAESlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101117" valueType="Boolean" logicalName="TM.LLAESlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101118" valueType="Boolean" logicalName="TM.LLALid" eventTrigger="" units="" />
    <StatusVariable id="430101119" valueType="Boolean" logicalName="TM.LLALid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101120" valueType="F8" logicalName="TM.LLAPCWFlowSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101121" valueType="F8" logicalName="TM.LLAPCWFlowSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101122" valueType="Boolean" logicalName="TM.LLAPressure" eventTrigger="" units="" />
    <StatusVariable id="430101123" valueType="Boolean" logicalName="TM.LLATSlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101124" valueType="Boolean" logicalName="TM.LLATSlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101125" valueType="Boolean" logicalName="TM.LLAVacSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101126" valueType="Boolean" logicalName="TM.LLAVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101127" valueType="F8" logicalName="TM.LLB_MFC1" eventTrigger="" units="" />
    <StatusVariable id="430101128" valueType="F8" logicalName="TM.LLB_MFC1.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="430101129" valueType="F8" logicalName="TM.LLB_MFC1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101130" valueType="Boolean" logicalName="TM.LLBATMSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101131" valueType="Boolean" logicalName="TM.LLBATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101132" valueType="Boolean" logicalName="TM.LLBESlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101133" valueType="Boolean" logicalName="TM.LLBESlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101134" valueType="Boolean" logicalName="TM.LLBLid" eventTrigger="" units="" />
    <StatusVariable id="430101135" valueType="Boolean" logicalName="TM.LLBLid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101136" valueType="F8" logicalName="TM.LLBPCWFlowSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101137" valueType="F8" logicalName="TM.LLBPCWFlowSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101138" valueType="Boolean" logicalName="TM.LLBPressure" eventTrigger="" units="" />
    <StatusVariable id="430101139" valueType="Boolean" logicalName="TM.LLBTSlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101140" valueType="Boolean" logicalName="TM.LLBTSlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101141" valueType="Boolean" logicalName="TM.LLBVacSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101142" valueType="Boolean" logicalName="TM.LLBVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101143" valueType="Boolean" logicalName="TM.MainPump" eventTrigger="" units="" />
    <StatusVariable id="430101144" valueType="Boolean" logicalName="TM.MainPump.IsError" eventTrigger="" units="" />
    <StatusVariable id="430101145" valueType="Boolean" logicalName="TM.MainPump.IsOn" eventTrigger="" units="" />
    <StatusVariable id="430101146" valueType="Boolean" logicalName="TM.MainPump.IsRunning" eventTrigger="" units="" />
    <StatusVariable id="430101147" valueType="Boolean" logicalName="TM.MainPump.Speed" eventTrigger="" units="" />
    <StatusVariable id="430101148" valueType="Boolean" logicalName="TM.MainPump.Temperature" eventTrigger="" units="" />
    <StatusVariable id="430101149" valueType="Boolean" logicalName="TM.N2PressureSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101150" valueType="Boolean" logicalName="TM.N2PressureSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101151" valueType="Boolean" logicalName="TM.PMALid" eventTrigger="" units="" />
    <StatusVariable id="430101152" valueType="Boolean" logicalName="TM.PMALid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101153" valueType="Boolean" logicalName="TM.PMASlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101154" valueType="Boolean" logicalName="TM.PMASlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101155" valueType="Boolean" logicalName="TM.PMBLid" eventTrigger="" units="" />
    <StatusVariable id="430101156" valueType="Boolean" logicalName="TM.PMBLid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101157" valueType="Boolean" logicalName="TM.PMBSlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101158" valueType="Boolean" logicalName="TM.PMBSlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101159" valueType="Boolean" logicalName="TM.PMCLid" eventTrigger="" units="" />
    <StatusVariable id="430101160" valueType="Boolean" logicalName="TM.PMCLid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101161" valueType="Boolean" logicalName="TM.PMCSlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101162" valueType="Boolean" logicalName="TM.PMCSlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101163" valueType="Boolean" logicalName="TM.PMDLid" eventTrigger="" units="" />
    <StatusVariable id="430101164" valueType="Boolean" logicalName="TM.PMDLid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101165" valueType="Boolean" logicalName="TM.PMDSlitDoor" eventTrigger="" units="" />
    <StatusVariable id="430101166" valueType="Boolean" logicalName="TM.PMDSlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101167" valueType="F8" logicalName="TM.TM_MFC1" eventTrigger="" units="" />
    <StatusVariable id="430101168" valueType="F8" logicalName="TM.TM_MFC1.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="430101169" valueType="F8" logicalName="TM.TM_MFC1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101170" valueType="Boolean" logicalName="TM.TMATMSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101171" valueType="Boolean" logicalName="TM.TMATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101172" valueType="Boolean" logicalName="TM.TMInSafty" eventTrigger="" units="" />
    <StatusVariable id="430101173" valueType="Boolean" logicalName="TM.TMInSafty.Value" eventTrigger="" units="" />
    <StatusVariable id="430101174" valueType="Boolean" logicalName="TM.TMLid" eventTrigger="" units="" />
    <StatusVariable id="430101175" valueType="Boolean" logicalName="TM.TMLid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="430101176" valueType="Boolean" logicalName="TM.TMLidClosed" eventTrigger="" units="" />
    <StatusVariable id="430101177" valueType="Boolean" logicalName="TM.TMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="430101178" valueType="Boolean" logicalName="TM.TMPCWFlowSwith" eventTrigger="" units="" />
    <StatusVariable id="430101179" valueType="Boolean" logicalName="TM.TMPCWFlowSwith.Value" eventTrigger="" units="" />
    <StatusVariable id="430101180" valueType="Boolean" logicalName="TM.TMPowerOn" eventTrigger="" units="" />
    <StatusVariable id="430101181" valueType="Boolean" logicalName="TM.TMPowerOn.Value" eventTrigger="" units="" />
    <StatusVariable id="430101182" valueType="Boolean" logicalName="TM.TMPressureCtrl" eventTrigger="" units="" />
    <StatusVariable id="430101183" valueType="Boolean" logicalName="TM.TMPressureCtrl.LLAChamberSetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101184" valueType="Boolean" logicalName="TM.TMPressureCtrl.LLBChamberSetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101185" valueType="Boolean" logicalName="TM.TMPressureCtrl.TMChamberSetPoint" eventTrigger="" units="" />
    <StatusVariable id="430101186" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLA" eventTrigger="" units="" />
    <StatusVariable id="430101187" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLA.Value" eventTrigger="" units="" />
    <StatusVariable id="430101188" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLB" eventTrigger="" units="" />
    <StatusVariable id="430101189" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLB.Value" eventTrigger="" units="" />
    <StatusVariable id="430101190" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMA" eventTrigger="" units="" />
    <StatusVariable id="430101191" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMA.Value" eventTrigger="" units="" />
    <StatusVariable id="430101192" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMB" eventTrigger="" units="" />
    <StatusVariable id="430101193" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMB.Value" eventTrigger="" units="" />
    <StatusVariable id="430101194" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMC" eventTrigger="" units="" />
    <StatusVariable id="430101195" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMC.Value" eventTrigger="" units="" />
    <StatusVariable id="430101196" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMD" eventTrigger="" units="" />
    <StatusVariable id="430101197" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMD.Value" eventTrigger="" units="" />
    <StatusVariable id="430101198" valueType="Boolean" logicalName="TM.TMVacSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101199" valueType="Boolean" logicalName="TM.TMVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101200" valueType="Boolean" logicalName="TM.VaccumPressureSwitch" eventTrigger="" units="" />
    <StatusVariable id="430101201" valueType="Boolean" logicalName="TM.VaccumPressureSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="430101202" valueType="Boolean" logicalName="TM.WaferLeakSensor" eventTrigger="" units="" />
    <StatusVariable id="430101203" valueType="Boolean" logicalName="TM.WaferLeakSensor.Value" eventTrigger="" units="" />
    <StatusVariable id="620101001" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="620101002" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="620101003" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="620101004" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
    <StatusVariable id="620101005" valueType="F4" logicalName="PMA.ChamberPressure" eventTrigger="" units="" />
    <StatusVariable id="620101006" valueType="Boolean" logicalName="PMA.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="620101007" valueType="F8" logicalName="PMA.Chiller.Temp" eventTrigger="" units="" />
    <StatusVariable id="620101008" valueType="F4" logicalName="PMA.ChillerInnerTemp" eventTrigger="" units="" />
    <StatusVariable id="620101009" valueType="F4" logicalName="PMA.ChillerOuterTemp" eventTrigger="" units="" />
    <StatusVariable id="620101010" valueType="F4" logicalName="PMA.ChillerTopTemp" eventTrigger="" units="" />
    <StatusVariable id="620101011" valueType="F8" logicalName="PMA.ESCHePressure" eventTrigger="" units="" />
    <StatusVariable id="620101012" valueType="F8" logicalName="PMA.ESCHV.Temp" eventTrigger="" units="" />
    <StatusVariable id="620101013" valueType="F8" logicalName="PMA.ForelinePressure" eventTrigger="" units="" />
    <StatusVariable id="620101014" valueType="Boolean" logicalName="PMA.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="620101015" valueType="Boolean" logicalName="PMA.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="620101016" valueType="Boolean" logicalName="PMA.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="620101017" valueType="F8" logicalName="PMA.GetPVPosition" eventTrigger="" units="" />
    <StatusVariable id="620101018" valueType="F8" logicalName="PMA.HighTemperatureHeater.Position" eventTrigger="" units="" />
    <StatusVariable id="620101019" valueType="F8" logicalName="PMA.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
    <StatusVariable id="620101020" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="620101021" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="620101022" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="620101023" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101024" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="620101025" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="620101026" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="620101027" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101028" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="620101029" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="620101030" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="620101031" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101032" valueType="Boolean" logicalName="PMA.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="620101033" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="620101034" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="620101035" valueType="Boolean" logicalName="PMA.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="620101036" valueType="Boolean" logicalName="PMA.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="620101037" valueType="Boolean" logicalName="PMA.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="620101038" valueType="Boolean" logicalName="PMA.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="620101039" valueType="Boolean" logicalName="PMA.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="620101040" valueType="Boolean" logicalName="PMA.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="620101041" valueType="Boolean" logicalName="PMA.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="620101042" valueType="Boolean" logicalName="PMA.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="620101043" valueType="Boolean" logicalName="PMA.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="620101044" valueType="Boolean" logicalName="PMA.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="620101045" valueType="Boolean" logicalName="PMA.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="620101046" valueType="Boolean" logicalName="PMA.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="620101047" valueType="Boolean" logicalName="PMA.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="620101048" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101049" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
    <StatusVariable id="620101050" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101051" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
    <StatusVariable id="620101052" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101053" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.Status" eventTrigger="" units="" />
    <StatusVariable id="620101054" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101055" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    <StatusVariable id="620101056" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101057" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    <StatusVariable id="620101058" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101059" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    <StatusVariable id="620101060" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101061" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    <StatusVariable id="620101062" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101063" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    <StatusVariable id="620101064" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101065" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    <StatusVariable id="620101066" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101067" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
    <StatusVariable id="620101068" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101069" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
    <StatusVariable id="620101070" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101071" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.Status" eventTrigger="" units="" />
    <StatusVariable id="620101072" valueType="Boolean" logicalName="PMA.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101073" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101074" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.Status" eventTrigger="" units="" />
    <StatusVariable id="620101075" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101076" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.Status" eventTrigger="" units="" />
    <StatusVariable id="620101077" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101078" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.Status" eventTrigger="" units="" />
    <StatusVariable id="620101079" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101080" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.Status" eventTrigger="" units="" />
    <StatusVariable id="620101081" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101082" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.Status" eventTrigger="" units="" />
    <StatusVariable id="620101083" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101084" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.Status" eventTrigger="" units="" />
    <StatusVariable id="620101085" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101086" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.Status" eventTrigger="" units="" />
    <StatusVariable id="620101087" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101088" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.Status" eventTrigger="" units="" />
    <StatusVariable id="620101089" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101090" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
    <StatusVariable id="620101091" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101092" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
    <StatusVariable id="620101093" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101094" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
    <StatusVariable id="620101095" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101096" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
    <StatusVariable id="620101097" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101098" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
    <StatusVariable id="620101099" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101100" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
    <StatusVariable id="620101101" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101102" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
    <StatusVariable id="620101103" valueType="Boolean" logicalName="PMA.IsTurboPumpAtSpeed" eventTrigger="" units="" />
    <StatusVariable id="620101104" valueType="Boolean" logicalName="PMA.Lid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="620101105" valueType="F8" logicalName="PMA.LoadlockPressure" eventTrigger="" units="" />
    <StatusVariable id="620101106" valueType="Boolean" logicalName="PMA.MainPump.IsError" eventTrigger="" units="" />
    <StatusVariable id="620101107" valueType="Boolean" logicalName="PMA.MainPump.IsOn" eventTrigger="" units="" />
    <StatusVariable id="620101108" valueType="Boolean" logicalName="PMA.MainPump.IsRunning" eventTrigger="" units="" />
    <StatusVariable id="620101109" valueType="F8" logicalName="PMA.MainPump.Speed" eventTrigger="" units="" />
    <StatusVariable id="620101110" valueType="F8" logicalName="PMA.MainPump.Temperature" eventTrigger="" units="" />
    <StatusVariable id="620101111" valueType="F8" logicalName="PMA.Match.C1" eventTrigger="" units="" />
    <StatusVariable id="620101112" valueType="F8" logicalName="PMA.Match.C2" eventTrigger="" units="" />
    <StatusVariable id="620101113" valueType="F8" logicalName="PMA.MfcGas1.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101114" valueType="F8" logicalName="PMA.MfcGas1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101115" valueType="F8" logicalName="PMA.MfcGas2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101116" valueType="F8" logicalName="PMA.MfcGas2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101117" valueType="F8" logicalName="PMA.MfcGas3.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101118" valueType="F8" logicalName="PMA.MfcGas3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101119" valueType="F8" logicalName="PMA.MfcGas4.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101120" valueType="F8" logicalName="PMA.MfcGas4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101121" valueType="F8" logicalName="PMA.MfcGas5.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101122" valueType="F8" logicalName="PMA.MfcGas5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101123" valueType="F8" logicalName="PMA.MfcGas6.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101124" valueType="F8" logicalName="PMA.MfcGas6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101125" valueType="F8" logicalName="PMA.MfcGas7.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101126" valueType="F8" logicalName="PMA.MfcGas7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101127" valueType="F8" logicalName="PMA.MfcGas8.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101128" valueType="F8" logicalName="PMA.MfcGas8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101129" valueType="F8" logicalName="PMA.MfcHe.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101130" valueType="F8" logicalName="PMA.MfcHe.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101131" valueType="F8" logicalName="PMA.MfcN2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="620101132" valueType="F8" logicalName="PMA.MfcN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101133" valueType="Boolean" logicalName="PMA.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="620101134" valueType="F8" logicalName="PMA.ProcessPressure" eventTrigger="" units="" />
    <StatusVariable id="620101135" valueType="F8" logicalName="PMA.Rf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="620101136" valueType="F8" logicalName="PMA.Rf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="620101137" valueType="F8" logicalName="PMA.Rf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101138" valueType="F8" logicalName="PMA.Rf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="620101139" valueType="F8" logicalName="PMA.Rf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="620101140" valueType="F8" logicalName="PMA.Rf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="620101141" valueType="Boolean" logicalName="PMA.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="620101142" valueType="F8" logicalName="PMA.SCR1" eventTrigger="" units="" />
    <StatusVariable id="620101143" valueType="F8" logicalName="PMA.SCR2" eventTrigger="" units="" />
    <StatusVariable id="620101144" valueType="Boolean" logicalName="PMA.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="620101145" valueType="Boolean" logicalName="PMA.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="620101146" valueType="Boolean" logicalName="PMA.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="620101147" valueType="Boolean" logicalName="PMA.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="620101148" valueType="Boolean" logicalName="PMA.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="620101149" valueType="Boolean" logicalName="PMA.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="620101150" valueType="Boolean" logicalName="PMA.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="620101151" valueType="Boolean" logicalName="PMA.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="620101152" valueType="Boolean" logicalName="PMA.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="620101153" valueType="Boolean" logicalName="PMA.SlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="620101154" valueType="Boolean" logicalName="PMA.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="620101155" valueType="F8" logicalName="PMA.TurboPumpRotationalSpeed" eventTrigger="" units="" />
    <StatusVariable id="620101156" valueType="Boolean" logicalName="PMA.BiasRf.CommunicationStatus" eventTrigger="" units="" />
    <StatusVariable id="620101157" valueType="F8" logicalName="PMA.BiasRf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="620101158" valueType="F8" logicalName="PMA.BiasRf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="620101159" valueType="F8" logicalName="PMA.BiasRf.IsPowerOn" eventTrigger="" units="" />
    <StatusVariable id="620101160" valueType="F8" logicalName="PMA.BiasRf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="620101161" valueType="F8" logicalName="PMA.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="620101162" valueType="F8" logicalName="PMA.BiasRf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="620101163" valueType="F8" logicalName="PMA.BiasRf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="620101164" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="620101165" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="620101166" valueType="F8" logicalName="IO.PMA.AI_Day" eventTrigger="" units="" />
    <StatusVariable id="620101167" valueType="F8" logicalName="IO.PMA.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="620101168" valueType="F8" logicalName="IO.PMA.AI_Heartbeat_FB" eventTrigger="" units="" />
    <StatusVariable id="620101169" valueType="F8" logicalName="IO.PMA.AI_MFC1_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101170" valueType="F8" logicalName="IO.PMA.AI_MFC2_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101171" valueType="F8" logicalName="IO.PMA.AI_MFC3_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101172" valueType="F8" logicalName="IO.PMA.AI_MFC4_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101173" valueType="F8" logicalName="IO.PMA.AI_MFC5_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101174" valueType="F8" logicalName="IO.PMA.AI_MFC6_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101175" valueType="F8" logicalName="IO.PMA.AI_Minute" eventTrigger="" units="" />
    <StatusVariable id="620101176" valueType="F8" logicalName="IO.PMA.AI_Month" eventTrigger="" units="" />
    <StatusVariable id="620101177" valueType="F8" logicalName="IO.PMA.AI_Process_Pressure_2t" eventTrigger="" units="" />
    <StatusVariable id="620101178" valueType="F8" logicalName="IO.PMA.AI_Second" eventTrigger="" units="" />
    <StatusVariable id="620101179" valueType="F8" logicalName="IO.PMA.AI_Time" eventTrigger="" units="" />
    <StatusVariable id="620101180" valueType="F8" logicalName="IO.PMA.AI_Year" eventTrigger="" units="" />
    <StatusVariable id="620101181" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101182" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101183" valueType="F8" logicalName="IO.PMA.AO_Heartbeat" eventTrigger="" units="" />
    <StatusVariable id="620101184" valueType="F8" logicalName="IO.PMA.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101185" valueType="F8" logicalName="IO.PMA.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101186" valueType="F8" logicalName="IO.PMA.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101187" valueType="F8" logicalName="IO.PMA.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101188" valueType="F8" logicalName="IO.PMA.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101189" valueType="F8" logicalName="IO.PMA.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101190" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    <StatusVariable id="620101191" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    <StatusVariable id="620101192" valueType="Boolean" logicalName="IO.PMA.DI_ATMSW" eventTrigger="" units="" />
    <StatusVariable id="620101193" valueType="Boolean" logicalName="IO.PMA.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101194" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101195" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="620101196" valueType="Boolean" logicalName="IO.PMA.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101197" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101198" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101199" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101200" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101201" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101202" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101203" valueType="Boolean" logicalName="IO.PMA.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101204" valueType="Boolean" logicalName="IO.PMA.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101205" valueType="Boolean" logicalName="IO.PMA.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
    <StatusVariable id="620101206" valueType="Boolean" logicalName="IO.PMA.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
    <StatusVariable id="620101207" valueType="Boolean" logicalName="IO.PMA.DI_VACSW" eventTrigger="" units="" />
    <StatusVariable id="620101208" valueType="Boolean" logicalName="IO.PMA.DI_WaterLeak" eventTrigger="" units="" />
    <StatusVariable id="620101209" valueType="Boolean" logicalName="IO.PMA.DO_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101210" valueType="Boolean" logicalName="IO.PMA.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="620101211" valueType="Boolean" logicalName="IO.PMA.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101212" valueType="Boolean" logicalName="IO.PMA.DO_MFC1_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101213" valueType="Boolean" logicalName="IO.PMA.DO_MFC2_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101214" valueType="Boolean" logicalName="IO.PMA.DO_MFC3_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101215" valueType="Boolean" logicalName="IO.PMA.DO_MFC4_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101216" valueType="Boolean" logicalName="IO.PMA.DO_MFC5_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101217" valueType="Boolean" logicalName="IO.PMA.DO_MFC6_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101218" valueType="Boolean" logicalName="IO.PMA.DO_N2_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101219" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Final_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101220" valueType="Boolean" logicalName="IO.PMA.DO_Reset_Signal" eventTrigger="" units="" />
    <StatusVariable id="620101221" valueType="Boolean" logicalName="IO.PMA.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101222" valueType="Boolean" logicalName="IO.PMA.DI_RF_BOX_Interlock" eventTrigger="" units="" />
    <StatusVariable id="620101223" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
    <StatusVariable id="620101224" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
    <StatusVariable id="620101225" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
    <StatusVariable id="620101226" valueType="Boolean" logicalName="IO.PMA.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101227" valueType="Boolean" logicalName="IO.PMA.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
    <StatusVariable id="620101228" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101229" valueType="Boolean" logicalName="IO.PMA.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101230" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101231" valueType="Boolean" logicalName="IO.PMA.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101232" valueType="F8" logicalName="IO.PMA.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101233" valueType="F8" logicalName="IO.PMA.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101234" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101235" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101236" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101237" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101238" valueType="Boolean" logicalName="IO.PMA.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="620101239" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
    <StatusVariable id="620101240" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101241" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101242" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="620101243" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101244" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="620101245" valueType="Boolean" logicalName="IO.PMA.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101246" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101247" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
    <StatusVariable id="620101248" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
    <StatusVariable id="620101249" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Button" eventTrigger="" units="" />
    <StatusVariable id="620101250" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Button" eventTrigger="" units="" />
    <StatusVariable id="620101251" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="620101252" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="620101253" valueType="Boolean" logicalName="IO.PMA.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
    <StatusVariable id="620101254" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
    <StatusVariable id="620101255" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101256" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101257" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101258" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101259" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101260" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101261" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101262" valueType="Boolean" logicalName="IO.PMA.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101263" valueType="Boolean" logicalName="IO.PMA.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="620101264" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
    <StatusVariable id="620101265" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="620101266" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="620101267" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="620101268" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
    <StatusVariable id="620101269" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
    <StatusVariable id="620101270" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_alarm" eventTrigger="" units="" />
    <StatusVariable id="620101271" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="620101272" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="620101273" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
    <StatusVariable id="620101274" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
    <StatusVariable id="620101275" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
    <StatusVariable id="620101276" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
    <StatusVariable id="620101277" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
    <StatusVariable id="620101278" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
    <StatusVariable id="620101279" valueType="Boolean" logicalName="IO.PMA.DO_PVN21" eventTrigger="" units="" />
    <StatusVariable id="620101280" valueType="Boolean" logicalName="IO.PMA.DO_PVN22" eventTrigger="" units="" />
    <StatusVariable id="620101281" valueType="Boolean" logicalName="IO.PMA.DO_PV11" eventTrigger="" units="" />
    <StatusVariable id="620101282" valueType="Boolean" logicalName="IO.PMA.DO_PV12" eventTrigger="" units="" />
    <StatusVariable id="620101283" valueType="Boolean" logicalName="IO.PMA.DO_PV21" eventTrigger="" units="" />
    <StatusVariable id="620101284" valueType="Boolean" logicalName="IO.PMA.DO_PV22" eventTrigger="" units="" />
    <StatusVariable id="620101285" valueType="Boolean" logicalName="IO.PMA.DO_PV31" eventTrigger="" units="" />
    <StatusVariable id="620101286" valueType="Boolean" logicalName="IO.PMA.DO_PV32" eventTrigger="" units="" />
    <StatusVariable id="620101287" valueType="Boolean" logicalName="IO.PMA.DO_PV41" eventTrigger="" units="" />
    <StatusVariable id="620101288" valueType="Boolean" logicalName="IO.PMA.DO_PV42" eventTrigger="" units="" />
    <StatusVariable id="620101289" valueType="Boolean" logicalName="IO.PMA.DO_MFC7_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101290" valueType="Boolean" logicalName="IO.PMA.DO_MFC8_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101291" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge1_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101292" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge2_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101293" valueType="Boolean" logicalName="IO.PMA.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101294" valueType="Boolean" logicalName="IO.PMA.DO_Pump_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101295" valueType="Boolean" logicalName="IO.PMA.DO_Gauge_Valve" eventTrigger="" units="" />
    <StatusVariable id="620101296" valueType="Boolean" logicalName="IO.PMA.DO_P_Valve_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="620101297" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="620101298" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Up" eventTrigger="" units="" />
    <StatusVariable id="620101299" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Down" eventTrigger="" units="" />
    <StatusVariable id="620101300" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
    <StatusVariable id="620101301" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
    <StatusVariable id="620101302" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
    <StatusVariable id="620101303" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Origin" eventTrigger="" units="" />
    <StatusVariable id="620101304" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Enable" eventTrigger="" units="" />
    <StatusVariable id="620101305" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
    <StatusVariable id="620101306" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
    <StatusVariable id="620101307" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
    <StatusVariable id="620101308" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
    <StatusVariable id="620101309" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Estop" eventTrigger="" units="" />
    <StatusVariable id="620101310" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
    <StatusVariable id="620101311" valueType="F8" logicalName="IO.PMA.AI_MFC7_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101312" valueType="F8" logicalName="IO.PMA.AI_MFC8_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101313" valueType="F8" logicalName="IO.PMA.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
    <StatusVariable id="620101314" valueType="F8" logicalName="IO.PMA.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
    <StatusVariable id="620101315" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="620101316" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="620101317" valueType="F8" logicalName="IO.PMA.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="620101318" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
    <StatusVariable id="620101319" valueType="F8" logicalName="IO.PMA.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="620101320" valueType="F8" logicalName="IO.PMA.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="620101321" valueType="F8" logicalName="IO.PMA.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
    <StatusVariable id="620101322" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
    <StatusVariable id="620101323" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="620101324" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="620101325" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="620101326" valueType="F8" logicalName="IO.PMA.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="620101327" valueType="F8" logicalName="IO.PMA.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="620101328" valueType="F8" logicalName="IO.PMA.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101329" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101330" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101331" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101332" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="620101333" valueType="F8" logicalName="IO.PMA.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
    <StatusVariable id="630101001" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="630101002" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="630101003" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="630101004" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
    <StatusVariable id="630101005" valueType="F4" logicalName="PMB.ChamberPressure" eventTrigger="" units="" />
    <StatusVariable id="630101006" valueType="Boolean" logicalName="PMB.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="630101007" valueType="F8" logicalName="PMB.Chiller.Temp" eventTrigger="" units="" />
    <StatusVariable id="630101008" valueType="F4" logicalName="PMB.ChillerInnerTemp" eventTrigger="" units="" />
    <StatusVariable id="630101009" valueType="F4" logicalName="PMB.ChillerOuterTemp" eventTrigger="" units="" />
    <StatusVariable id="630101010" valueType="F4" logicalName="PMB.ChillerTopTemp" eventTrigger="" units="" />
    <StatusVariable id="630101011" valueType="F8" logicalName="PMB.ESCHePressure" eventTrigger="" units="" />
    <StatusVariable id="630101012" valueType="F8" logicalName="PMB.ESCHV.Temp" eventTrigger="" units="" />
    <StatusVariable id="630101013" valueType="F8" logicalName="PMB.ForelinePressure" eventTrigger="" units="" />
    <StatusVariable id="630101014" valueType="Boolean" logicalName="PMB.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="630101015" valueType="Boolean" logicalName="PMB.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="630101016" valueType="Boolean" logicalName="PMB.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="630101017" valueType="F8" logicalName="PMB.GetPVPosition" eventTrigger="" units="" />
    <StatusVariable id="630101018" valueType="F8" logicalName="PMB.HighTemperatureHeater.Position" eventTrigger="" units="" />
    <StatusVariable id="630101019" valueType="F8" logicalName="PMB.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
    <StatusVariable id="630101020" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="630101021" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="630101022" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="630101023" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101024" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="630101025" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="630101026" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="630101027" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101028" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="630101029" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="630101030" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="630101031" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101032" valueType="Boolean" logicalName="PMB.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="630101033" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="630101034" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="630101035" valueType="Boolean" logicalName="PMB.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="630101036" valueType="Boolean" logicalName="PMB.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="630101037" valueType="Boolean" logicalName="PMB.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="630101038" valueType="Boolean" logicalName="PMB.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="630101039" valueType="Boolean" logicalName="PMB.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="630101040" valueType="Boolean" logicalName="PMB.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="630101041" valueType="Boolean" logicalName="PMB.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="630101042" valueType="Boolean" logicalName="PMB.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="630101043" valueType="Boolean" logicalName="PMB.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="630101044" valueType="Boolean" logicalName="PMB.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="630101045" valueType="Boolean" logicalName="PMB.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="630101046" valueType="Boolean" logicalName="PMB.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="630101047" valueType="Boolean" logicalName="PMB.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="630101048" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101049" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
    <StatusVariable id="630101050" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101051" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
    <StatusVariable id="630101052" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101053" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.Status" eventTrigger="" units="" />
    <StatusVariable id="630101054" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101055" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    <StatusVariable id="630101056" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101057" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    <StatusVariable id="630101058" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101059" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    <StatusVariable id="630101060" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101061" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    <StatusVariable id="630101062" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101063" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    <StatusVariable id="630101064" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101065" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    <StatusVariable id="630101066" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101067" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
    <StatusVariable id="630101068" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101069" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
    <StatusVariable id="630101070" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101071" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.Status" eventTrigger="" units="" />
    <StatusVariable id="630101072" valueType="Boolean" logicalName="PMB.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101073" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101074" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.Status" eventTrigger="" units="" />
    <StatusVariable id="630101075" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101076" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.Status" eventTrigger="" units="" />
    <StatusVariable id="630101077" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101078" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.Status" eventTrigger="" units="" />
    <StatusVariable id="630101079" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101080" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.Status" eventTrigger="" units="" />
    <StatusVariable id="630101081" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101082" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.Status" eventTrigger="" units="" />
    <StatusVariable id="630101083" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101084" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.Status" eventTrigger="" units="" />
    <StatusVariable id="630101085" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101086" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.Status" eventTrigger="" units="" />
    <StatusVariable id="630101087" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101088" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.Status" eventTrigger="" units="" />
    <StatusVariable id="630101089" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101090" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
    <StatusVariable id="630101091" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101092" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
    <StatusVariable id="630101093" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101094" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
    <StatusVariable id="630101095" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101096" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
    <StatusVariable id="630101097" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101098" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
    <StatusVariable id="630101099" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101100" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
    <StatusVariable id="630101101" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101102" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
    <StatusVariable id="630101103" valueType="Boolean" logicalName="PMB.IsTurboPumpAtSpeed" eventTrigger="" units="" />
    <StatusVariable id="630101104" valueType="Boolean" logicalName="PMB.Lid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="630101105" valueType="F8" logicalName="PMB.LoadlockPressure" eventTrigger="" units="" />
    <StatusVariable id="630101106" valueType="Boolean" logicalName="PMB.MainPump.IsError" eventTrigger="" units="" />
    <StatusVariable id="630101107" valueType="Boolean" logicalName="PMB.MainPump.IsOn" eventTrigger="" units="" />
    <StatusVariable id="630101108" valueType="Boolean" logicalName="PMB.MainPump.IsRunning" eventTrigger="" units="" />
    <StatusVariable id="630101109" valueType="F8" logicalName="PMB.MainPump.Speed" eventTrigger="" units="" />
    <StatusVariable id="630101110" valueType="F8" logicalName="PMB.MainPump.Temperature" eventTrigger="" units="" />
    <StatusVariable id="630101111" valueType="F8" logicalName="PMB.Match.C1" eventTrigger="" units="" />
    <StatusVariable id="630101112" valueType="F8" logicalName="PMB.Match.C2" eventTrigger="" units="" />
    <StatusVariable id="630101113" valueType="F8" logicalName="PMB.MfcGas1.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101114" valueType="F8" logicalName="PMB.MfcGas1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101115" valueType="F8" logicalName="PMB.MfcGas2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101116" valueType="F8" logicalName="PMB.MfcGas2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101117" valueType="F8" logicalName="PMB.MfcGas3.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101118" valueType="F8" logicalName="PMB.MfcGas3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101119" valueType="F8" logicalName="PMB.MfcGas4.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101120" valueType="F8" logicalName="PMB.MfcGas4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101121" valueType="F8" logicalName="PMB.MfcGas5.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101122" valueType="F8" logicalName="PMB.MfcGas5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101123" valueType="F8" logicalName="PMB.MfcGas6.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101124" valueType="F8" logicalName="PMB.MfcGas6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101125" valueType="F8" logicalName="PMB.MfcGas7.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101126" valueType="F8" logicalName="PMB.MfcGas7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101127" valueType="F8" logicalName="PMB.MfcGas8.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101128" valueType="F8" logicalName="PMB.MfcGas8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101129" valueType="F8" logicalName="PMB.MfcHe.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101130" valueType="F8" logicalName="PMB.MfcHe.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101131" valueType="F8" logicalName="PMB.MfcN2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="630101132" valueType="F8" logicalName="PMB.MfcN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101133" valueType="Boolean" logicalName="PMB.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="630101134" valueType="F8" logicalName="PMB.ProcessPressure" eventTrigger="" units="" />
    <StatusVariable id="630101135" valueType="F8" logicalName="PMB.Rf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="630101136" valueType="F8" logicalName="PMB.Rf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="630101137" valueType="F8" logicalName="PMB.Rf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101138" valueType="F8" logicalName="PMB.Rf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="630101139" valueType="F8" logicalName="PMB.Rf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="630101140" valueType="F8" logicalName="PMB.Rf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="630101141" valueType="Boolean" logicalName="PMB.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="630101142" valueType="F8" logicalName="PMB.SCR1" eventTrigger="" units="" />
    <StatusVariable id="630101143" valueType="F8" logicalName="PMB.SCR2" eventTrigger="" units="" />
    <StatusVariable id="630101144" valueType="Boolean" logicalName="PMB.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="630101145" valueType="Boolean" logicalName="PMB.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="630101146" valueType="Boolean" logicalName="PMB.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="630101147" valueType="Boolean" logicalName="PMB.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="630101148" valueType="Boolean" logicalName="PMB.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="630101149" valueType="Boolean" logicalName="PMB.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="630101150" valueType="Boolean" logicalName="PMB.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="630101151" valueType="Boolean" logicalName="PMB.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="630101152" valueType="Boolean" logicalName="PMB.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="630101153" valueType="Boolean" logicalName="PMB.SlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="630101154" valueType="Boolean" logicalName="PMB.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="630101155" valueType="F8" logicalName="PMB.TurboPumpRotationalSpeed" eventTrigger="" units="" />
    <StatusVariable id="630101156" valueType="Boolean" logicalName="PMB.BiasRf.CommunicationStatus" eventTrigger="" units="" />
    <StatusVariable id="630101157" valueType="F8" logicalName="PMB.BiasRf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="630101158" valueType="F8" logicalName="PMB.BiasRf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="630101159" valueType="F8" logicalName="PMB.BiasRf.IsPowerOn" eventTrigger="" units="" />
    <StatusVariable id="630101160" valueType="F8" logicalName="PMB.BiasRf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="630101161" valueType="F8" logicalName="PMB.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="630101162" valueType="F8" logicalName="PMB.BiasRf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="630101163" valueType="F8" logicalName="PMB.BiasRf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="630101164" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="630101165" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="630101166" valueType="F8" logicalName="IO.PMB.AI_Day" eventTrigger="" units="" />
    <StatusVariable id="630101167" valueType="F8" logicalName="IO.PMB.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="630101168" valueType="F8" logicalName="IO.PMB.AI_Heartbeat_FB" eventTrigger="" units="" />
    <StatusVariable id="630101169" valueType="F8" logicalName="IO.PMB.AI_MFC1_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101170" valueType="F8" logicalName="IO.PMB.AI_MFC2_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101171" valueType="F8" logicalName="IO.PMB.AI_MFC3_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101172" valueType="F8" logicalName="IO.PMB.AI_MFC4_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101173" valueType="F8" logicalName="IO.PMB.AI_MFC5_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101174" valueType="F8" logicalName="IO.PMB.AI_MFC6_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101175" valueType="F8" logicalName="IO.PMB.AI_Minute" eventTrigger="" units="" />
    <StatusVariable id="630101176" valueType="F8" logicalName="IO.PMB.AI_Month" eventTrigger="" units="" />
    <StatusVariable id="630101177" valueType="F8" logicalName="IO.PMB.AI_Process_Pressure_2t" eventTrigger="" units="" />
    <StatusVariable id="630101178" valueType="F8" logicalName="IO.PMB.AI_Second" eventTrigger="" units="" />
    <StatusVariable id="630101179" valueType="F8" logicalName="IO.PMB.AI_Time" eventTrigger="" units="" />
    <StatusVariable id="630101180" valueType="F8" logicalName="IO.PMB.AI_Year" eventTrigger="" units="" />
    <StatusVariable id="630101181" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101182" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101183" valueType="F8" logicalName="IO.PMB.AO_Heartbeat" eventTrigger="" units="" />
    <StatusVariable id="630101184" valueType="F8" logicalName="IO.PMB.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101185" valueType="F8" logicalName="IO.PMB.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101186" valueType="F8" logicalName="IO.PMB.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101187" valueType="F8" logicalName="IO.PMB.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101188" valueType="F8" logicalName="IO.PMB.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101189" valueType="F8" logicalName="IO.PMB.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101190" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    <StatusVariable id="630101191" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    <StatusVariable id="630101192" valueType="Boolean" logicalName="IO.PMB.DI_ATMSW" eventTrigger="" units="" />
    <StatusVariable id="630101193" valueType="Boolean" logicalName="IO.PMB.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101194" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101195" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="630101196" valueType="Boolean" logicalName="IO.PMB.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101197" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101198" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101199" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101200" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101201" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101202" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101203" valueType="Boolean" logicalName="IO.PMB.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101204" valueType="Boolean" logicalName="IO.PMB.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101205" valueType="Boolean" logicalName="IO.PMB.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
    <StatusVariable id="630101206" valueType="Boolean" logicalName="IO.PMB.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
    <StatusVariable id="630101207" valueType="Boolean" logicalName="IO.PMB.DI_VACSW" eventTrigger="" units="" />
    <StatusVariable id="630101208" valueType="Boolean" logicalName="IO.PMB.DI_WaterLeak" eventTrigger="" units="" />
    <StatusVariable id="630101209" valueType="Boolean" logicalName="IO.PMB.DO_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101210" valueType="Boolean" logicalName="IO.PMB.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="630101211" valueType="Boolean" logicalName="IO.PMB.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101212" valueType="Boolean" logicalName="IO.PMB.DO_MFC1_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101213" valueType="Boolean" logicalName="IO.PMB.DO_MFC2_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101214" valueType="Boolean" logicalName="IO.PMB.DO_MFC3_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101215" valueType="Boolean" logicalName="IO.PMB.DO_MFC4_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101216" valueType="Boolean" logicalName="IO.PMB.DO_MFC5_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101217" valueType="Boolean" logicalName="IO.PMB.DO_MFC6_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101218" valueType="Boolean" logicalName="IO.PMB.DO_N2_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101219" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Final_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101220" valueType="Boolean" logicalName="IO.PMB.DO_Reset_Signal" eventTrigger="" units="" />
    <StatusVariable id="630101221" valueType="Boolean" logicalName="IO.PMB.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101222" valueType="Boolean" logicalName="IO.PMB.DI_RF_BOX_Interlock" eventTrigger="" units="" />
    <StatusVariable id="630101223" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
    <StatusVariable id="630101224" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
    <StatusVariable id="630101225" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
    <StatusVariable id="630101226" valueType="Boolean" logicalName="IO.PMB.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101227" valueType="Boolean" logicalName="IO.PMB.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
    <StatusVariable id="630101228" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101229" valueType="Boolean" logicalName="IO.PMB.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101230" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101231" valueType="Boolean" logicalName="IO.PMB.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101232" valueType="F8" logicalName="IO.PMB.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101233" valueType="F8" logicalName="IO.PMB.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101234" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101235" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101236" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101237" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101238" valueType="Boolean" logicalName="IO.PMB.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="630101239" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
    <StatusVariable id="630101240" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101241" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101242" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="630101243" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101244" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="630101245" valueType="Boolean" logicalName="IO.PMB.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101246" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101247" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
    <StatusVariable id="630101248" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
    <StatusVariable id="630101249" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Button" eventTrigger="" units="" />
    <StatusVariable id="630101250" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Button" eventTrigger="" units="" />
    <StatusVariable id="630101251" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="630101252" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="630101253" valueType="Boolean" logicalName="IO.PMB.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
    <StatusVariable id="630101254" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
    <StatusVariable id="630101255" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101256" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101257" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101258" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101259" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101260" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101261" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101262" valueType="Boolean" logicalName="IO.PMB.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101263" valueType="Boolean" logicalName="IO.PMB.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="630101264" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
    <StatusVariable id="630101265" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="630101266" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="630101267" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="630101268" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
    <StatusVariable id="630101269" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
    <StatusVariable id="630101270" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_alarm" eventTrigger="" units="" />
    <StatusVariable id="630101271" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="630101272" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="630101273" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
    <StatusVariable id="630101274" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
    <StatusVariable id="630101275" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
    <StatusVariable id="630101276" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
    <StatusVariable id="630101277" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
    <StatusVariable id="630101278" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
    <StatusVariable id="630101279" valueType="Boolean" logicalName="IO.PMB.DO_PVN21" eventTrigger="" units="" />
    <StatusVariable id="630101280" valueType="Boolean" logicalName="IO.PMB.DO_PVN22" eventTrigger="" units="" />
    <StatusVariable id="630101281" valueType="Boolean" logicalName="IO.PMB.DO_PV11" eventTrigger="" units="" />
    <StatusVariable id="630101282" valueType="Boolean" logicalName="IO.PMB.DO_PV12" eventTrigger="" units="" />
    <StatusVariable id="630101283" valueType="Boolean" logicalName="IO.PMB.DO_PV21" eventTrigger="" units="" />
    <StatusVariable id="630101284" valueType="Boolean" logicalName="IO.PMB.DO_PV22" eventTrigger="" units="" />
    <StatusVariable id="630101285" valueType="Boolean" logicalName="IO.PMB.DO_PV31" eventTrigger="" units="" />
    <StatusVariable id="630101286" valueType="Boolean" logicalName="IO.PMB.DO_PV32" eventTrigger="" units="" />
    <StatusVariable id="630101287" valueType="Boolean" logicalName="IO.PMB.DO_PV41" eventTrigger="" units="" />
    <StatusVariable id="630101288" valueType="Boolean" logicalName="IO.PMB.DO_PV42" eventTrigger="" units="" />
    <StatusVariable id="630101289" valueType="Boolean" logicalName="IO.PMB.DO_MFC7_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101290" valueType="Boolean" logicalName="IO.PMB.DO_MFC8_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101291" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge1_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101292" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge2_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101293" valueType="Boolean" logicalName="IO.PMB.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101294" valueType="Boolean" logicalName="IO.PMB.DO_Pump_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101295" valueType="Boolean" logicalName="IO.PMB.DO_Gauge_Valve" eventTrigger="" units="" />
    <StatusVariable id="630101296" valueType="Boolean" logicalName="IO.PMB.DO_P_Valve_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="630101297" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="630101298" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Up" eventTrigger="" units="" />
    <StatusVariable id="630101299" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Down" eventTrigger="" units="" />
    <StatusVariable id="630101300" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
    <StatusVariable id="630101301" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
    <StatusVariable id="630101302" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
    <StatusVariable id="630101303" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Origin" eventTrigger="" units="" />
    <StatusVariable id="630101304" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Enable" eventTrigger="" units="" />
    <StatusVariable id="630101305" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
    <StatusVariable id="630101306" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
    <StatusVariable id="630101307" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
    <StatusVariable id="630101308" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
    <StatusVariable id="630101309" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Estop" eventTrigger="" units="" />
    <StatusVariable id="630101310" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
    <StatusVariable id="630101311" valueType="F8" logicalName="IO.PMB.AI_MFC7_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101312" valueType="F8" logicalName="IO.PMB.AI_MFC8_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101313" valueType="F8" logicalName="IO.PMB.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
    <StatusVariable id="630101314" valueType="F8" logicalName="IO.PMB.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
    <StatusVariable id="630101315" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="630101316" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="630101317" valueType="F8" logicalName="IO.PMB.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="630101318" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
    <StatusVariable id="630101319" valueType="F8" logicalName="IO.PMB.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="630101320" valueType="F8" logicalName="IO.PMB.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="630101321" valueType="F8" logicalName="IO.PMB.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
    <StatusVariable id="630101322" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
    <StatusVariable id="630101323" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="630101324" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="630101325" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="630101326" valueType="F8" logicalName="IO.PMB.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="630101327" valueType="F8" logicalName="IO.PMB.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="630101328" valueType="F8" logicalName="IO.PMB.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101329" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101330" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101331" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101332" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="630101333" valueType="F8" logicalName="IO.PMB.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
    <StatusVariable id="640101001" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="640101002" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="640101003" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="640101004" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
    <StatusVariable id="640101005" valueType="F4" logicalName="PMC.ChamberPressure" eventTrigger="" units="" />
    <StatusVariable id="640101006" valueType="Boolean" logicalName="PMC.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="640101007" valueType="F8" logicalName="PMC.Chiller.Temp" eventTrigger="" units="" />
    <StatusVariable id="640101008" valueType="F4" logicalName="PMC.ChillerInnerTemp" eventTrigger="" units="" />
    <StatusVariable id="640101009" valueType="F4" logicalName="PMC.ChillerOuterTemp" eventTrigger="" units="" />
    <StatusVariable id="640101010" valueType="F4" logicalName="PMC.ChillerTopTemp" eventTrigger="" units="" />
    <StatusVariable id="640101011" valueType="F8" logicalName="PMC.ESCHePressure" eventTrigger="" units="" />
    <StatusVariable id="640101012" valueType="F8" logicalName="PMC.ESCHV.Temp" eventTrigger="" units="" />
    <StatusVariable id="640101013" valueType="F8" logicalName="PMC.ForelinePressure" eventTrigger="" units="" />
    <StatusVariable id="640101014" valueType="Boolean" logicalName="PMC.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="640101015" valueType="Boolean" logicalName="PMC.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="640101016" valueType="Boolean" logicalName="PMC.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="640101017" valueType="F8" logicalName="PMC.GetPVPosition" eventTrigger="" units="" />
    <StatusVariable id="640101018" valueType="F8" logicalName="PMC.HighTemperatureHeater.Position" eventTrigger="" units="" />
    <StatusVariable id="640101019" valueType="F8" logicalName="PMC.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
    <StatusVariable id="640101020" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="640101021" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="640101022" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="640101023" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101024" valueType="Boolean" logicalName="PMC.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="640101025" valueType="Boolean" logicalName="PMC.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="640101026" valueType="Boolean" logicalName="PMC.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="640101027" valueType="Boolean" logicalName="PMC.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101028" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="640101029" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="640101030" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="640101031" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101032" valueType="Boolean" logicalName="PMC.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="640101033" valueType="Boolean" logicalName="PMC.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="640101034" valueType="Boolean" logicalName="PMC.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="640101035" valueType="Boolean" logicalName="PMC.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="640101036" valueType="Boolean" logicalName="PMC.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="640101037" valueType="Boolean" logicalName="PMC.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="640101038" valueType="Boolean" logicalName="PMC.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="640101039" valueType="Boolean" logicalName="PMC.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="640101040" valueType="Boolean" logicalName="PMC.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="640101041" valueType="Boolean" logicalName="PMC.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="640101042" valueType="Boolean" logicalName="PMC.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="640101043" valueType="Boolean" logicalName="PMC.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="640101044" valueType="Boolean" logicalName="PMC.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="640101045" valueType="Boolean" logicalName="PMC.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="640101046" valueType="Boolean" logicalName="PMC.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="640101047" valueType="Boolean" logicalName="PMC.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="640101048" valueType="Boolean" logicalName="PMC.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101049" valueType="Boolean" logicalName="PMC.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
    <StatusVariable id="640101050" valueType="Boolean" logicalName="PMC.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101051" valueType="Boolean" logicalName="PMC.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
    <StatusVariable id="640101052" valueType="Boolean" logicalName="PMC.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101053" valueType="Boolean" logicalName="PMC.IoValve.ValveGuage.Status" eventTrigger="" units="" />
    <StatusVariable id="640101054" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101055" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    <StatusVariable id="640101056" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101057" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    <StatusVariable id="640101058" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101059" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    <StatusVariable id="640101060" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101061" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    <StatusVariable id="640101062" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101063" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    <StatusVariable id="640101064" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101065" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    <StatusVariable id="640101066" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101067" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
    <StatusVariable id="640101068" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101069" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
    <StatusVariable id="640101070" valueType="Boolean" logicalName="PMC.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101071" valueType="Boolean" logicalName="PMC.IoValve.ValveN2.Status" eventTrigger="" units="" />
    <StatusVariable id="640101072" valueType="Boolean" logicalName="PMC.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101073" valueType="Boolean" logicalName="PMC.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101074" valueType="Boolean" logicalName="PMC.IoValve.ValvePV11.Status" eventTrigger="" units="" />
    <StatusVariable id="640101075" valueType="Boolean" logicalName="PMC.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101076" valueType="Boolean" logicalName="PMC.IoValve.ValvePV12.Status" eventTrigger="" units="" />
    <StatusVariable id="640101077" valueType="Boolean" logicalName="PMC.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101078" valueType="Boolean" logicalName="PMC.IoValve.ValvePV21.Status" eventTrigger="" units="" />
    <StatusVariable id="640101079" valueType="Boolean" logicalName="PMC.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101080" valueType="Boolean" logicalName="PMC.IoValve.ValvePV22.Status" eventTrigger="" units="" />
    <StatusVariable id="640101081" valueType="Boolean" logicalName="PMC.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101082" valueType="Boolean" logicalName="PMC.IoValve.ValvePV31.Status" eventTrigger="" units="" />
    <StatusVariable id="640101083" valueType="Boolean" logicalName="PMC.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101084" valueType="Boolean" logicalName="PMC.IoValve.ValvePV32.Status" eventTrigger="" units="" />
    <StatusVariable id="640101085" valueType="Boolean" logicalName="PMC.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101086" valueType="Boolean" logicalName="PMC.IoValve.ValvePV41.Status" eventTrigger="" units="" />
    <StatusVariable id="640101087" valueType="Boolean" logicalName="PMC.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101088" valueType="Boolean" logicalName="PMC.IoValve.ValvePV42.Status" eventTrigger="" units="" />
    <StatusVariable id="640101089" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101090" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
    <StatusVariable id="640101091" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101092" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
    <StatusVariable id="640101093" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101094" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
    <StatusVariable id="640101095" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101096" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
    <StatusVariable id="640101097" valueType="Boolean" logicalName="PMC.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101098" valueType="Boolean" logicalName="PMC.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
    <StatusVariable id="640101099" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101100" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
    <StatusVariable id="640101101" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101102" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
    <StatusVariable id="640101103" valueType="Boolean" logicalName="PMC.IsTurboPumpAtSpeed" eventTrigger="" units="" />
    <StatusVariable id="640101104" valueType="Boolean" logicalName="PMC.Lid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="640101105" valueType="F8" logicalName="PMC.LoadlockPressure" eventTrigger="" units="" />
    <StatusVariable id="640101106" valueType="Boolean" logicalName="PMC.MainPump.IsError" eventTrigger="" units="" />
    <StatusVariable id="640101107" valueType="Boolean" logicalName="PMC.MainPump.IsOn" eventTrigger="" units="" />
    <StatusVariable id="640101108" valueType="Boolean" logicalName="PMC.MainPump.IsRunning" eventTrigger="" units="" />
    <StatusVariable id="640101109" valueType="F8" logicalName="PMC.MainPump.Speed" eventTrigger="" units="" />
    <StatusVariable id="640101110" valueType="F8" logicalName="PMC.MainPump.Temperature" eventTrigger="" units="" />
    <StatusVariable id="640101111" valueType="F8" logicalName="PMC.Match.C1" eventTrigger="" units="" />
    <StatusVariable id="640101112" valueType="F8" logicalName="PMC.Match.C2" eventTrigger="" units="" />
    <StatusVariable id="640101113" valueType="F8" logicalName="PMC.MfcGas1.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101114" valueType="F8" logicalName="PMC.MfcGas1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101115" valueType="F8" logicalName="PMC.MfcGas2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101116" valueType="F8" logicalName="PMC.MfcGas2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101117" valueType="F8" logicalName="PMC.MfcGas3.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101118" valueType="F8" logicalName="PMC.MfcGas3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101119" valueType="F8" logicalName="PMC.MfcGas4.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101120" valueType="F8" logicalName="PMC.MfcGas4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101121" valueType="F8" logicalName="PMC.MfcGas5.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101122" valueType="F8" logicalName="PMC.MfcGas5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101123" valueType="F8" logicalName="PMC.MfcGas6.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101124" valueType="F8" logicalName="PMC.MfcGas6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101125" valueType="F8" logicalName="PMC.MfcGas7.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101126" valueType="F8" logicalName="PMC.MfcGas7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101127" valueType="F8" logicalName="PMC.MfcGas8.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101128" valueType="F8" logicalName="PMC.MfcGas8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101129" valueType="F8" logicalName="PMC.MfcHe.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101130" valueType="F8" logicalName="PMC.MfcHe.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101131" valueType="F8" logicalName="PMC.MfcN2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="640101132" valueType="F8" logicalName="PMC.MfcN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101133" valueType="Boolean" logicalName="PMC.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="640101134" valueType="F8" logicalName="PMC.ProcessPressure" eventTrigger="" units="" />
    <StatusVariable id="640101135" valueType="F8" logicalName="PMC.Rf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="640101136" valueType="F8" logicalName="PMC.Rf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="640101137" valueType="F8" logicalName="PMC.Rf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101138" valueType="F8" logicalName="PMC.Rf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="640101139" valueType="F8" logicalName="PMC.Rf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="640101140" valueType="F8" logicalName="PMC.Rf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="640101141" valueType="Boolean" logicalName="PMC.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="640101142" valueType="F8" logicalName="PMC.SCR1" eventTrigger="" units="" />
    <StatusVariable id="640101143" valueType="F8" logicalName="PMC.SCR2" eventTrigger="" units="" />
    <StatusVariable id="640101144" valueType="Boolean" logicalName="PMC.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="640101145" valueType="Boolean" logicalName="PMC.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="640101146" valueType="Boolean" logicalName="PMC.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="640101147" valueType="Boolean" logicalName="PMC.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="640101148" valueType="Boolean" logicalName="PMC.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="640101149" valueType="Boolean" logicalName="PMC.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="640101150" valueType="Boolean" logicalName="PMC.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="640101151" valueType="Boolean" logicalName="PMC.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="640101152" valueType="Boolean" logicalName="PMC.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="640101153" valueType="Boolean" logicalName="PMC.SlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="640101154" valueType="Boolean" logicalName="PMC.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="640101155" valueType="F8" logicalName="PMC.TurboPumpRotationalSpeed" eventTrigger="" units="" />
    <StatusVariable id="640101156" valueType="Boolean" logicalName="PMC.BiasRf.CommunicationStatus" eventTrigger="" units="" />
    <StatusVariable id="640101157" valueType="F8" logicalName="PMC.BiasRf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="640101158" valueType="F8" logicalName="PMC.BiasRf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="640101159" valueType="F8" logicalName="PMC.BiasRf.IsPowerOn" eventTrigger="" units="" />
    <StatusVariable id="640101160" valueType="F8" logicalName="PMC.BiasRf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="640101161" valueType="F8" logicalName="PMC.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="640101162" valueType="F8" logicalName="PMC.BiasRf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="640101163" valueType="F8" logicalName="PMC.BiasRf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="640101164" valueType="F8" logicalName="IO.PMC.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="640101165" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="640101166" valueType="F8" logicalName="IO.PMC.AI_Day" eventTrigger="" units="" />
    <StatusVariable id="640101167" valueType="F8" logicalName="IO.PMC.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="640101168" valueType="F8" logicalName="IO.PMC.AI_Heartbeat_FB" eventTrigger="" units="" />
    <StatusVariable id="640101169" valueType="F8" logicalName="IO.PMC.AI_MFC1_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101170" valueType="F8" logicalName="IO.PMC.AI_MFC2_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101171" valueType="F8" logicalName="IO.PMC.AI_MFC3_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101172" valueType="F8" logicalName="IO.PMC.AI_MFC4_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101173" valueType="F8" logicalName="IO.PMC.AI_MFC5_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101174" valueType="F8" logicalName="IO.PMC.AI_MFC6_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101175" valueType="F8" logicalName="IO.PMC.AI_Minute" eventTrigger="" units="" />
    <StatusVariable id="640101176" valueType="F8" logicalName="IO.PMC.AI_Month" eventTrigger="" units="" />
    <StatusVariable id="640101177" valueType="F8" logicalName="IO.PMC.AI_Process_Pressure_2t" eventTrigger="" units="" />
    <StatusVariable id="640101178" valueType="F8" logicalName="IO.PMC.AI_Second" eventTrigger="" units="" />
    <StatusVariable id="640101179" valueType="F8" logicalName="IO.PMC.AI_Time" eventTrigger="" units="" />
    <StatusVariable id="640101180" valueType="F8" logicalName="IO.PMC.AI_Year" eventTrigger="" units="" />
    <StatusVariable id="640101181" valueType="F8" logicalName="IO.PMC.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101182" valueType="F8" logicalName="IO.PMC.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101183" valueType="F8" logicalName="IO.PMC.AO_Heartbeat" eventTrigger="" units="" />
    <StatusVariable id="640101184" valueType="F8" logicalName="IO.PMC.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101185" valueType="F8" logicalName="IO.PMC.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101186" valueType="F8" logicalName="IO.PMC.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101187" valueType="F8" logicalName="IO.PMC.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101188" valueType="F8" logicalName="IO.PMC.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101189" valueType="F8" logicalName="IO.PMC.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101190" valueType="Boolean" logicalName="IO.PMC.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    <StatusVariable id="640101191" valueType="Boolean" logicalName="IO.PMC.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    <StatusVariable id="640101192" valueType="Boolean" logicalName="IO.PMC.DI_ATMSW" eventTrigger="" units="" />
    <StatusVariable id="640101193" valueType="Boolean" logicalName="IO.PMC.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101194" valueType="Boolean" logicalName="IO.PMC.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101195" valueType="Boolean" logicalName="IO.PMC.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="640101196" valueType="Boolean" logicalName="IO.PMC.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101197" valueType="Boolean" logicalName="IO.PMC.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101198" valueType="Boolean" logicalName="IO.PMC.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101199" valueType="Boolean" logicalName="IO.PMC.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101200" valueType="Boolean" logicalName="IO.PMC.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101201" valueType="Boolean" logicalName="IO.PMC.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101202" valueType="Boolean" logicalName="IO.PMC.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101203" valueType="Boolean" logicalName="IO.PMC.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101204" valueType="Boolean" logicalName="IO.PMC.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101205" valueType="Boolean" logicalName="IO.PMC.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
    <StatusVariable id="640101206" valueType="Boolean" logicalName="IO.PMC.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
    <StatusVariable id="640101207" valueType="Boolean" logicalName="IO.PMC.DI_VACSW" eventTrigger="" units="" />
    <StatusVariable id="640101208" valueType="Boolean" logicalName="IO.PMC.DI_WaterLeak" eventTrigger="" units="" />
    <StatusVariable id="640101209" valueType="Boolean" logicalName="IO.PMC.DO_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101210" valueType="Boolean" logicalName="IO.PMC.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="640101211" valueType="Boolean" logicalName="IO.PMC.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101212" valueType="Boolean" logicalName="IO.PMC.DO_MFC1_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101213" valueType="Boolean" logicalName="IO.PMC.DO_MFC2_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101214" valueType="Boolean" logicalName="IO.PMC.DO_MFC3_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101215" valueType="Boolean" logicalName="IO.PMC.DO_MFC4_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101216" valueType="Boolean" logicalName="IO.PMC.DO_MFC5_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101217" valueType="Boolean" logicalName="IO.PMC.DO_MFC6_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101218" valueType="Boolean" logicalName="IO.PMC.DO_N2_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101219" valueType="Boolean" logicalName="IO.PMC.DO_Gas_Final_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101220" valueType="Boolean" logicalName="IO.PMC.DO_Reset_Signal" eventTrigger="" units="" />
    <StatusVariable id="640101221" valueType="Boolean" logicalName="IO.PMC.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101222" valueType="Boolean" logicalName="IO.PMC.DI_RF_BOX_Interlock" eventTrigger="" units="" />
    <StatusVariable id="640101223" valueType="Boolean" logicalName="IO.PMC.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
    <StatusVariable id="640101224" valueType="Boolean" logicalName="IO.PMC.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
    <StatusVariable id="640101225" valueType="Boolean" logicalName="IO.PMC.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
    <StatusVariable id="640101226" valueType="Boolean" logicalName="IO.PMC.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101227" valueType="Boolean" logicalName="IO.PMC.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
    <StatusVariable id="640101228" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101229" valueType="Boolean" logicalName="IO.PMC.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101230" valueType="Boolean" logicalName="IO.PMC.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101231" valueType="Boolean" logicalName="IO.PMC.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101232" valueType="F8" logicalName="IO.PMC.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101233" valueType="F8" logicalName="IO.PMC.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101234" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101235" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101236" valueType="Boolean" logicalName="IO.PMC.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101237" valueType="Boolean" logicalName="IO.PMC.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101238" valueType="Boolean" logicalName="IO.PMC.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="640101239" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
    <StatusVariable id="640101240" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101241" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101242" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="640101243" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101244" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="640101245" valueType="Boolean" logicalName="IO.PMC.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101246" valueType="Boolean" logicalName="IO.PMC.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101247" valueType="Boolean" logicalName="IO.PMC.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
    <StatusVariable id="640101248" valueType="Boolean" logicalName="IO.PMC.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
    <StatusVariable id="640101249" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Up_Button" eventTrigger="" units="" />
    <StatusVariable id="640101250" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Down_Button" eventTrigger="" units="" />
    <StatusVariable id="640101251" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="640101252" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="640101253" valueType="Boolean" logicalName="IO.PMC.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
    <StatusVariable id="640101254" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
    <StatusVariable id="640101255" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101256" valueType="Boolean" logicalName="IO.PMC.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101257" valueType="Boolean" logicalName="IO.PMC.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101258" valueType="Boolean" logicalName="IO.PMC.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101259" valueType="Boolean" logicalName="IO.PMC.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101260" valueType="Boolean" logicalName="IO.PMC.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101261" valueType="Boolean" logicalName="IO.PMC.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101262" valueType="Boolean" logicalName="IO.PMC.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101263" valueType="Boolean" logicalName="IO.PMC.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="640101264" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
    <StatusVariable id="640101265" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="640101266" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="640101267" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="640101268" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
    <StatusVariable id="640101269" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
    <StatusVariable id="640101270" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_alarm" eventTrigger="" units="" />
    <StatusVariable id="640101271" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="640101272" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="640101273" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
    <StatusVariable id="640101274" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
    <StatusVariable id="640101275" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
    <StatusVariable id="640101276" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
    <StatusVariable id="640101277" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
    <StatusVariable id="640101278" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
    <StatusVariable id="640101279" valueType="Boolean" logicalName="IO.PMC.DO_PVN21" eventTrigger="" units="" />
    <StatusVariable id="640101280" valueType="Boolean" logicalName="IO.PMC.DO_PVN22" eventTrigger="" units="" />
    <StatusVariable id="640101281" valueType="Boolean" logicalName="IO.PMC.DO_PV11" eventTrigger="" units="" />
    <StatusVariable id="640101282" valueType="Boolean" logicalName="IO.PMC.DO_PV12" eventTrigger="" units="" />
    <StatusVariable id="640101283" valueType="Boolean" logicalName="IO.PMC.DO_PV21" eventTrigger="" units="" />
    <StatusVariable id="640101284" valueType="Boolean" logicalName="IO.PMC.DO_PV22" eventTrigger="" units="" />
    <StatusVariable id="640101285" valueType="Boolean" logicalName="IO.PMC.DO_PV31" eventTrigger="" units="" />
    <StatusVariable id="640101286" valueType="Boolean" logicalName="IO.PMC.DO_PV32" eventTrigger="" units="" />
    <StatusVariable id="640101287" valueType="Boolean" logicalName="IO.PMC.DO_PV41" eventTrigger="" units="" />
    <StatusVariable id="640101288" valueType="Boolean" logicalName="IO.PMC.DO_PV42" eventTrigger="" units="" />
    <StatusVariable id="640101289" valueType="Boolean" logicalName="IO.PMC.DO_MFC7_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101290" valueType="Boolean" logicalName="IO.PMC.DO_MFC8_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101291" valueType="Boolean" logicalName="IO.PMC.DO_N2_Purge1_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101292" valueType="Boolean" logicalName="IO.PMC.DO_N2_Purge2_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101293" valueType="Boolean" logicalName="IO.PMC.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101294" valueType="Boolean" logicalName="IO.PMC.DO_Pump_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101295" valueType="Boolean" logicalName="IO.PMC.DO_Gauge_Valve" eventTrigger="" units="" />
    <StatusVariable id="640101296" valueType="Boolean" logicalName="IO.PMC.DO_P_Valve_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="640101297" valueType="Boolean" logicalName="IO.PMC.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="640101298" valueType="Boolean" logicalName="IO.PMC.DO_Lid_Up" eventTrigger="" units="" />
    <StatusVariable id="640101299" valueType="Boolean" logicalName="IO.PMC.DO_Lid_Down" eventTrigger="" units="" />
    <StatusVariable id="640101300" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
    <StatusVariable id="640101301" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
    <StatusVariable id="640101302" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
    <StatusVariable id="640101303" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Origin" eventTrigger="" units="" />
    <StatusVariable id="640101304" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Enable" eventTrigger="" units="" />
    <StatusVariable id="640101305" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
    <StatusVariable id="640101306" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
    <StatusVariable id="640101307" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
    <StatusVariable id="640101308" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
    <StatusVariable id="640101309" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Estop" eventTrigger="" units="" />
    <StatusVariable id="640101310" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
    <StatusVariable id="640101311" valueType="F8" logicalName="IO.PMC.AI_MFC7_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101312" valueType="F8" logicalName="IO.PMC.AI_MFC8_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101313" valueType="F8" logicalName="IO.PMC.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
    <StatusVariable id="640101314" valueType="F8" logicalName="IO.PMC.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
    <StatusVariable id="640101315" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="640101316" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="640101317" valueType="F8" logicalName="IO.PMC.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="640101318" valueType="F8" logicalName="IO.PMC.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
    <StatusVariable id="640101319" valueType="F8" logicalName="IO.PMC.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="640101320" valueType="F8" logicalName="IO.PMC.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="640101321" valueType="F8" logicalName="IO.PMC.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
    <StatusVariable id="640101322" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
    <StatusVariable id="640101323" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="640101324" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="640101325" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="640101326" valueType="F8" logicalName="IO.PMC.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="640101327" valueType="F8" logicalName="IO.PMC.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="640101328" valueType="F8" logicalName="IO.PMC.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101329" valueType="F8" logicalName="IO.PMC.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101330" valueType="F8" logicalName="IO.PMC.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101331" valueType="F8" logicalName="IO.PMC.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101332" valueType="F8" logicalName="IO.PMC.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="640101333" valueType="F8" logicalName="IO.PMC.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
    <StatusVariable id="650101001" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="650101002" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="650101003" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="650101004" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
    <StatusVariable id="650101005" valueType="F4" logicalName="PMD.ChamberPressure" eventTrigger="" units="" />
    <StatusVariable id="650101006" valueType="Boolean" logicalName="PMD.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="650101007" valueType="F8" logicalName="PMD.Chiller.Temp" eventTrigger="" units="" />
    <StatusVariable id="650101008" valueType="F4" logicalName="PMD.ChillerInnerTemp" eventTrigger="" units="" />
    <StatusVariable id="650101009" valueType="F4" logicalName="PMD.ChillerOuterTemp" eventTrigger="" units="" />
    <StatusVariable id="650101010" valueType="F4" logicalName="PMD.ChillerTopTemp" eventTrigger="" units="" />
    <StatusVariable id="650101011" valueType="F8" logicalName="PMD.ESCHePressure" eventTrigger="" units="" />
    <StatusVariable id="650101012" valueType="F8" logicalName="PMD.ESCHV.Temp" eventTrigger="" units="" />
    <StatusVariable id="650101013" valueType="F8" logicalName="PMD.ForelinePressure" eventTrigger="" units="" />
    <StatusVariable id="650101014" valueType="Boolean" logicalName="PMD.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="650101015" valueType="Boolean" logicalName="PMD.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="650101016" valueType="Boolean" logicalName="PMD.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="650101017" valueType="F8" logicalName="PMD.GetPVPosition" eventTrigger="" units="" />
    <StatusVariable id="650101018" valueType="F8" logicalName="PMD.HighTemperatureHeater.Position" eventTrigger="" units="" />
    <StatusVariable id="650101019" valueType="F8" logicalName="PMD.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
    <StatusVariable id="650101020" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="650101021" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="650101022" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="650101023" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101024" valueType="Boolean" logicalName="PMD.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="650101025" valueType="Boolean" logicalName="PMD.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="650101026" valueType="Boolean" logicalName="PMD.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="650101027" valueType="Boolean" logicalName="PMD.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101028" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
    <StatusVariable id="650101029" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
    <StatusVariable id="650101030" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
    <StatusVariable id="650101031" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101032" valueType="Boolean" logicalName="PMD.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
    <StatusVariable id="650101033" valueType="Boolean" logicalName="PMD.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
    <StatusVariable id="650101034" valueType="Boolean" logicalName="PMD.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
    <StatusVariable id="650101035" valueType="Boolean" logicalName="PMD.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="650101036" valueType="Boolean" logicalName="PMD.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="650101037" valueType="Boolean" logicalName="PMD.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="650101038" valueType="Boolean" logicalName="PMD.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="650101039" valueType="Boolean" logicalName="PMD.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="650101040" valueType="Boolean" logicalName="PMD.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="650101041" valueType="Boolean" logicalName="PMD.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="650101042" valueType="Boolean" logicalName="PMD.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="650101043" valueType="Boolean" logicalName="PMD.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="650101044" valueType="Boolean" logicalName="PMD.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="650101045" valueType="Boolean" logicalName="PMD.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="650101046" valueType="Boolean" logicalName="PMD.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="650101047" valueType="Boolean" logicalName="PMD.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="650101048" valueType="Boolean" logicalName="PMD.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101049" valueType="Boolean" logicalName="PMD.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
    <StatusVariable id="650101050" valueType="Boolean" logicalName="PMD.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101051" valueType="Boolean" logicalName="PMD.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
    <StatusVariable id="650101052" valueType="Boolean" logicalName="PMD.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101053" valueType="Boolean" logicalName="PMD.IoValve.ValveGuage.Status" eventTrigger="" units="" />
    <StatusVariable id="650101054" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101055" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
    <StatusVariable id="650101056" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101057" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
    <StatusVariable id="650101058" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101059" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
    <StatusVariable id="650101060" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101061" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
    <StatusVariable id="650101062" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101063" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
    <StatusVariable id="650101064" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101065" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
    <StatusVariable id="650101066" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101067" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
    <StatusVariable id="650101068" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101069" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
    <StatusVariable id="650101070" valueType="Boolean" logicalName="PMD.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101071" valueType="Boolean" logicalName="PMD.IoValve.ValveN2.Status" eventTrigger="" units="" />
    <StatusVariable id="650101072" valueType="Boolean" logicalName="PMD.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101073" valueType="Boolean" logicalName="PMD.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101074" valueType="Boolean" logicalName="PMD.IoValve.ValvePV11.Status" eventTrigger="" units="" />
    <StatusVariable id="650101075" valueType="Boolean" logicalName="PMD.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101076" valueType="Boolean" logicalName="PMD.IoValve.ValvePV12.Status" eventTrigger="" units="" />
    <StatusVariable id="650101077" valueType="Boolean" logicalName="PMD.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101078" valueType="Boolean" logicalName="PMD.IoValve.ValvePV21.Status" eventTrigger="" units="" />
    <StatusVariable id="650101079" valueType="Boolean" logicalName="PMD.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101080" valueType="Boolean" logicalName="PMD.IoValve.ValvePV22.Status" eventTrigger="" units="" />
    <StatusVariable id="650101081" valueType="Boolean" logicalName="PMD.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101082" valueType="Boolean" logicalName="PMD.IoValve.ValvePV31.Status" eventTrigger="" units="" />
    <StatusVariable id="650101083" valueType="Boolean" logicalName="PMD.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101084" valueType="Boolean" logicalName="PMD.IoValve.ValvePV32.Status" eventTrigger="" units="" />
    <StatusVariable id="650101085" valueType="Boolean" logicalName="PMD.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101086" valueType="Boolean" logicalName="PMD.IoValve.ValvePV41.Status" eventTrigger="" units="" />
    <StatusVariable id="650101087" valueType="Boolean" logicalName="PMD.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101088" valueType="Boolean" logicalName="PMD.IoValve.ValvePV42.Status" eventTrigger="" units="" />
    <StatusVariable id="650101089" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101090" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
    <StatusVariable id="650101091" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101092" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
    <StatusVariable id="650101093" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101094" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
    <StatusVariable id="650101095" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101096" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
    <StatusVariable id="650101097" valueType="Boolean" logicalName="PMD.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101098" valueType="Boolean" logicalName="PMD.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
    <StatusVariable id="650101099" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101100" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
    <StatusVariable id="650101101" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101102" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
    <StatusVariable id="650101103" valueType="Boolean" logicalName="PMD.IsTurboPumpAtSpeed" eventTrigger="" units="" />
    <StatusVariable id="650101104" valueType="Boolean" logicalName="PMD.Lid.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="650101105" valueType="F8" logicalName="PMD.LoadlockPressure" eventTrigger="" units="" />
    <StatusVariable id="650101106" valueType="Boolean" logicalName="PMD.MainPump.IsError" eventTrigger="" units="" />
    <StatusVariable id="650101107" valueType="Boolean" logicalName="PMD.MainPump.IsOn" eventTrigger="" units="" />
    <StatusVariable id="650101108" valueType="Boolean" logicalName="PMD.MainPump.IsRunning" eventTrigger="" units="" />
    <StatusVariable id="650101109" valueType="F8" logicalName="PMD.MainPump.Speed" eventTrigger="" units="" />
    <StatusVariable id="650101110" valueType="F8" logicalName="PMD.MainPump.Temperature" eventTrigger="" units="" />
    <StatusVariable id="650101111" valueType="F8" logicalName="PMD.Match.C1" eventTrigger="" units="" />
    <StatusVariable id="650101112" valueType="F8" logicalName="PMD.Match.C2" eventTrigger="" units="" />
    <StatusVariable id="650101113" valueType="F8" logicalName="PMD.MfcGas1.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101114" valueType="F8" logicalName="PMD.MfcGas1.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101115" valueType="F8" logicalName="PMD.MfcGas2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101116" valueType="F8" logicalName="PMD.MfcGas2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101117" valueType="F8" logicalName="PMD.MfcGas3.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101118" valueType="F8" logicalName="PMD.MfcGas3.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101119" valueType="F8" logicalName="PMD.MfcGas4.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101120" valueType="F8" logicalName="PMD.MfcGas4.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101121" valueType="F8" logicalName="PMD.MfcGas5.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101122" valueType="F8" logicalName="PMD.MfcGas5.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101123" valueType="F8" logicalName="PMD.MfcGas6.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101124" valueType="F8" logicalName="PMD.MfcGas6.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101125" valueType="F8" logicalName="PMD.MfcGas7.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101126" valueType="F8" logicalName="PMD.MfcGas7.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101127" valueType="F8" logicalName="PMD.MfcGas8.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101128" valueType="F8" logicalName="PMD.MfcGas8.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101129" valueType="F8" logicalName="PMD.MfcHe.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101130" valueType="F8" logicalName="PMD.MfcHe.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101131" valueType="F8" logicalName="PMD.MfcN2.FeedBack" eventTrigger="" units="" />
    <StatusVariable id="650101132" valueType="F8" logicalName="PMD.MfcN2.SetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101133" valueType="Boolean" logicalName="PMD.N2PressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="650101134" valueType="F8" logicalName="PMD.ProcessPressure" eventTrigger="" units="" />
    <StatusVariable id="650101135" valueType="F8" logicalName="PMD.Rf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="650101136" valueType="F8" logicalName="PMD.Rf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="650101137" valueType="F8" logicalName="PMD.Rf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101138" valueType="F8" logicalName="PMD.Rf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="650101139" valueType="F8" logicalName="PMD.Rf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="650101140" valueType="F8" logicalName="PMD.Rf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="650101141" valueType="Boolean" logicalName="PMD.RFMatchInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="650101142" valueType="F8" logicalName="PMD.SCR1" eventTrigger="" units="" />
    <StatusVariable id="650101143" valueType="F8" logicalName="PMD.SCR2" eventTrigger="" units="" />
    <StatusVariable id="650101144" valueType="Boolean" logicalName="PMD.SensorATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="650101145" valueType="Boolean" logicalName="PMD.SensorCDAPressureOk.Value" eventTrigger="" units="" />
    <StatusVariable id="650101146" valueType="Boolean" logicalName="PMD.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="650101147" valueType="Boolean" logicalName="PMD.SensorPMLidClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="650101148" valueType="Boolean" logicalName="PMD.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
    <StatusVariable id="650101149" valueType="Boolean" logicalName="PMD.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
    <StatusVariable id="650101150" valueType="Boolean" logicalName="PMD.SensorSourceRFFan.Value" eventTrigger="" units="" />
    <StatusVariable id="650101151" valueType="Boolean" logicalName="PMD.SensorVacSwitch.Value" eventTrigger="" units="" />
    <StatusVariable id="650101152" valueType="Boolean" logicalName="PMD.SensorWaterLeakOk.Value" eventTrigger="" units="" />
    <StatusVariable id="650101153" valueType="Boolean" logicalName="PMD.SlitDoor.IsClosed" eventTrigger="" units="" />
    <StatusVariable id="650101154" valueType="Boolean" logicalName="PMD.TurboPumpInterlock.Value" eventTrigger="" units="" />
    <StatusVariable id="650101155" valueType="F8" logicalName="PMD.TurboPumpRotationalSpeed" eventTrigger="" units="" />
    <StatusVariable id="650101156" valueType="Boolean" logicalName="PMD.BiasRf.CommunicationStatus" eventTrigger="" units="" />
    <StatusVariable id="650101157" valueType="F8" logicalName="PMD.BiasRf.ForwardPower" eventTrigger="" units="" />
    <StatusVariable id="650101158" valueType="F8" logicalName="PMD.BiasRf.Frequency" eventTrigger="" units="" />
    <StatusVariable id="650101159" valueType="F8" logicalName="PMD.BiasRf.IsPowerOn" eventTrigger="" units="" />
    <StatusVariable id="650101160" valueType="F8" logicalName="PMD.BiasRf.PowerSetPoint" eventTrigger="" units="" />
    <StatusVariable id="650101161" valueType="F8" logicalName="PMD.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
    <StatusVariable id="650101162" valueType="F8" logicalName="PMD.BiasRf.PulsingFrequency" eventTrigger="" units="" />
    <StatusVariable id="650101163" valueType="F8" logicalName="PMD.BiasRf.ReflectPower" eventTrigger="" units="" />
    <StatusVariable id="650101164" valueType="F8" logicalName="IO.PMD.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="650101165" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="650101166" valueType="F8" logicalName="IO.PMD.AI_Day" eventTrigger="" units="" />
    <StatusVariable id="650101167" valueType="F8" logicalName="IO.PMD.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
    <StatusVariable id="650101168" valueType="F8" logicalName="IO.PMD.AI_Heartbeat_FB" eventTrigger="" units="" />
    <StatusVariable id="650101169" valueType="F8" logicalName="IO.PMD.AI_MFC1_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101170" valueType="F8" logicalName="IO.PMD.AI_MFC2_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101171" valueType="F8" logicalName="IO.PMD.AI_MFC3_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101172" valueType="F8" logicalName="IO.PMD.AI_MFC4_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101173" valueType="F8" logicalName="IO.PMD.AI_MFC5_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101174" valueType="F8" logicalName="IO.PMD.AI_MFC6_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101175" valueType="F8" logicalName="IO.PMD.AI_Minute" eventTrigger="" units="" />
    <StatusVariable id="650101176" valueType="F8" logicalName="IO.PMD.AI_Month" eventTrigger="" units="" />
    <StatusVariable id="650101177" valueType="F8" logicalName="IO.PMD.AI_Process_Pressure_2t" eventTrigger="" units="" />
    <StatusVariable id="650101178" valueType="F8" logicalName="IO.PMD.AI_Second" eventTrigger="" units="" />
    <StatusVariable id="650101179" valueType="F8" logicalName="IO.PMD.AI_Time" eventTrigger="" units="" />
    <StatusVariable id="650101180" valueType="F8" logicalName="IO.PMD.AI_Year" eventTrigger="" units="" />
    <StatusVariable id="650101181" valueType="F8" logicalName="IO.PMD.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101182" valueType="F8" logicalName="IO.PMD.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101183" valueType="F8" logicalName="IO.PMD.AO_Heartbeat" eventTrigger="" units="" />
    <StatusVariable id="650101184" valueType="F8" logicalName="IO.PMD.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101185" valueType="F8" logicalName="IO.PMD.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101186" valueType="F8" logicalName="IO.PMD.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101187" valueType="F8" logicalName="IO.PMD.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101188" valueType="F8" logicalName="IO.PMD.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101189" valueType="F8" logicalName="IO.PMD.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101190" valueType="Boolean" logicalName="IO.PMD.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
    <StatusVariable id="650101191" valueType="Boolean" logicalName="IO.PMD.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
    <StatusVariable id="650101192" valueType="Boolean" logicalName="IO.PMD.DI_ATMSW" eventTrigger="" units="" />
    <StatusVariable id="650101193" valueType="Boolean" logicalName="IO.PMD.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101194" valueType="Boolean" logicalName="IO.PMD.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101195" valueType="Boolean" logicalName="IO.PMD.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="650101196" valueType="Boolean" logicalName="IO.PMD.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101197" valueType="Boolean" logicalName="IO.PMD.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101198" valueType="Boolean" logicalName="IO.PMD.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101199" valueType="Boolean" logicalName="IO.PMD.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101200" valueType="Boolean" logicalName="IO.PMD.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101201" valueType="Boolean" logicalName="IO.PMD.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101202" valueType="Boolean" logicalName="IO.PMD.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101203" valueType="Boolean" logicalName="IO.PMD.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101204" valueType="Boolean" logicalName="IO.PMD.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101205" valueType="Boolean" logicalName="IO.PMD.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
    <StatusVariable id="650101206" valueType="Boolean" logicalName="IO.PMD.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
    <StatusVariable id="650101207" valueType="Boolean" logicalName="IO.PMD.DI_VACSW" eventTrigger="" units="" />
    <StatusVariable id="650101208" valueType="Boolean" logicalName="IO.PMD.DI_WaterLeak" eventTrigger="" units="" />
    <StatusVariable id="650101209" valueType="Boolean" logicalName="IO.PMD.DO_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101210" valueType="Boolean" logicalName="IO.PMD.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="650101211" valueType="Boolean" logicalName="IO.PMD.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101212" valueType="Boolean" logicalName="IO.PMD.DO_MFC1_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101213" valueType="Boolean" logicalName="IO.PMD.DO_MFC2_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101214" valueType="Boolean" logicalName="IO.PMD.DO_MFC3_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101215" valueType="Boolean" logicalName="IO.PMD.DO_MFC4_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101216" valueType="Boolean" logicalName="IO.PMD.DO_MFC5_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101217" valueType="Boolean" logicalName="IO.PMD.DO_MFC6_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101218" valueType="Boolean" logicalName="IO.PMD.DO_N2_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101219" valueType="Boolean" logicalName="IO.PMD.DO_Gas_Final_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101220" valueType="Boolean" logicalName="IO.PMD.DO_Reset_Signal" eventTrigger="" units="" />
    <StatusVariable id="650101221" valueType="Boolean" logicalName="IO.PMD.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101222" valueType="Boolean" logicalName="IO.PMD.DI_RF_BOX_Interlock" eventTrigger="" units="" />
    <StatusVariable id="650101223" valueType="Boolean" logicalName="IO.PMD.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
    <StatusVariable id="650101224" valueType="Boolean" logicalName="IO.PMD.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
    <StatusVariable id="650101225" valueType="Boolean" logicalName="IO.PMD.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
    <StatusVariable id="650101226" valueType="Boolean" logicalName="IO.PMD.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101227" valueType="Boolean" logicalName="IO.PMD.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
    <StatusVariable id="650101228" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101229" valueType="Boolean" logicalName="IO.PMD.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101230" valueType="Boolean" logicalName="IO.PMD.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101231" valueType="Boolean" logicalName="IO.PMD.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101232" valueType="F8" logicalName="IO.PMD.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101233" valueType="F8" logicalName="IO.PMD.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101234" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101235" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101236" valueType="Boolean" logicalName="IO.PMD.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101237" valueType="Boolean" logicalName="IO.PMD.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101238" valueType="Boolean" logicalName="IO.PMD.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
    <StatusVariable id="650101239" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
    <StatusVariable id="650101240" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101241" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101242" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="650101243" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101244" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
    <StatusVariable id="650101245" valueType="Boolean" logicalName="IO.PMD.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101246" valueType="Boolean" logicalName="IO.PMD.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101247" valueType="Boolean" logicalName="IO.PMD.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
    <StatusVariable id="650101248" valueType="Boolean" logicalName="IO.PMD.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
    <StatusVariable id="650101249" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Up_Button" eventTrigger="" units="" />
    <StatusVariable id="650101250" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Down_Button" eventTrigger="" units="" />
    <StatusVariable id="650101251" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="650101252" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="650101253" valueType="Boolean" logicalName="IO.PMD.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
    <StatusVariable id="650101254" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
    <StatusVariable id="650101255" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101256" valueType="Boolean" logicalName="IO.PMD.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101257" valueType="Boolean" logicalName="IO.PMD.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101258" valueType="Boolean" logicalName="IO.PMD.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101259" valueType="Boolean" logicalName="IO.PMD.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101260" valueType="Boolean" logicalName="IO.PMD.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101261" valueType="Boolean" logicalName="IO.PMD.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101262" valueType="Boolean" logicalName="IO.PMD.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101263" valueType="Boolean" logicalName="IO.PMD.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
    <StatusVariable id="650101264" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
    <StatusVariable id="650101265" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="650101266" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="650101267" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
    <StatusVariable id="650101268" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
    <StatusVariable id="650101269" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
    <StatusVariable id="650101270" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_alarm" eventTrigger="" units="" />
    <StatusVariable id="650101271" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="650101272" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
    <StatusVariable id="650101273" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
    <StatusVariable id="650101274" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
    <StatusVariable id="650101275" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
    <StatusVariable id="650101276" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
    <StatusVariable id="650101277" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
    <StatusVariable id="650101278" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
    <StatusVariable id="650101279" valueType="Boolean" logicalName="IO.PMD.DO_PVN21" eventTrigger="" units="" />
    <StatusVariable id="650101280" valueType="Boolean" logicalName="IO.PMD.DO_PVN22" eventTrigger="" units="" />
    <StatusVariable id="650101281" valueType="Boolean" logicalName="IO.PMD.DO_PV11" eventTrigger="" units="" />
    <StatusVariable id="650101282" valueType="Boolean" logicalName="IO.PMD.DO_PV12" eventTrigger="" units="" />
    <StatusVariable id="650101283" valueType="Boolean" logicalName="IO.PMD.DO_PV21" eventTrigger="" units="" />
    <StatusVariable id="650101284" valueType="Boolean" logicalName="IO.PMD.DO_PV22" eventTrigger="" units="" />
    <StatusVariable id="650101285" valueType="Boolean" logicalName="IO.PMD.DO_PV31" eventTrigger="" units="" />
    <StatusVariable id="650101286" valueType="Boolean" logicalName="IO.PMD.DO_PV32" eventTrigger="" units="" />
    <StatusVariable id="650101287" valueType="Boolean" logicalName="IO.PMD.DO_PV41" eventTrigger="" units="" />
    <StatusVariable id="650101288" valueType="Boolean" logicalName="IO.PMD.DO_PV42" eventTrigger="" units="" />
    <StatusVariable id="650101289" valueType="Boolean" logicalName="IO.PMD.DO_MFC7_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101290" valueType="Boolean" logicalName="IO.PMD.DO_MFC8_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101291" valueType="Boolean" logicalName="IO.PMD.DO_N2_Purge1_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101292" valueType="Boolean" logicalName="IO.PMD.DO_N2_Purge2_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101293" valueType="Boolean" logicalName="IO.PMD.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101294" valueType="Boolean" logicalName="IO.PMD.DO_Pump_Purge_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101295" valueType="Boolean" logicalName="IO.PMD.DO_Gauge_Valve" eventTrigger="" units="" />
    <StatusVariable id="650101296" valueType="Boolean" logicalName="IO.PMD.DO_P_Valve_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="650101297" valueType="Boolean" logicalName="IO.PMD.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
    <StatusVariable id="650101298" valueType="Boolean" logicalName="IO.PMD.DO_Lid_Up" eventTrigger="" units="" />
    <StatusVariable id="650101299" valueType="Boolean" logicalName="IO.PMD.DO_Lid_Down" eventTrigger="" units="" />
    <StatusVariable id="650101300" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
    <StatusVariable id="650101301" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
    <StatusVariable id="650101302" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
    <StatusVariable id="650101303" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Origin" eventTrigger="" units="" />
    <StatusVariable id="650101304" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Enable" eventTrigger="" units="" />
    <StatusVariable id="650101305" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
    <StatusVariable id="650101306" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
    <StatusVariable id="650101307" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
    <StatusVariable id="650101308" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
    <StatusVariable id="650101309" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Estop" eventTrigger="" units="" />
    <StatusVariable id="650101310" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
    <StatusVariable id="650101311" valueType="F8" logicalName="IO.PMD.AI_MFC7_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101312" valueType="F8" logicalName="IO.PMD.AI_MFC8_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101313" valueType="F8" logicalName="IO.PMD.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
    <StatusVariable id="650101314" valueType="F8" logicalName="IO.PMD.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
    <StatusVariable id="650101315" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="650101316" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
    <StatusVariable id="650101317" valueType="F8" logicalName="IO.PMD.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="650101318" valueType="F8" logicalName="IO.PMD.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
    <StatusVariable id="650101319" valueType="F8" logicalName="IO.PMD.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="650101320" valueType="F8" logicalName="IO.PMD.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
    <StatusVariable id="650101321" valueType="F8" logicalName="IO.PMD.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
    <StatusVariable id="650101322" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
    <StatusVariable id="650101323" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
    <StatusVariable id="650101324" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
    <StatusVariable id="650101325" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
    <StatusVariable id="650101326" valueType="F8" logicalName="IO.PMD.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="650101327" valueType="F8" logicalName="IO.PMD.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
    <StatusVariable id="650101328" valueType="F8" logicalName="IO.PMD.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101329" valueType="F8" logicalName="IO.PMD.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101330" valueType="F8" logicalName="IO.PMD.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101331" valueType="F8" logicalName="IO.PMD.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
    <StatusVariable id="650101332" valueType="F8" logicalName="IO.PMD.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
  </StatusVariables>
  <EquipmentConstants>
    <EquipmentConstant id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="False" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101001" valueType="Ascii" logicalName="System.ATMProcessDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101002" valueType="Ascii" logicalName="System.AutoAlignManualTransfer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101003" valueType="Ascii" logicalName="System.AutoPassCooling" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101004" valueType="Ascii" logicalName="System.BigWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101005" valueType="Ascii" logicalName="System.BypassInterlock" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101006" valueType="Ascii" logicalName="System.CycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101007" valueType="Ascii" logicalName="System.DataCollectionInterval" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101008" valueType="Ascii" logicalName="System.IsATMMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101009" valueType="Ascii" logicalName="System.IsCycleMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101010" valueType="Ascii" logicalName="System.IsEnableCompressLogFileFunc" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101011" valueType="Ascii" logicalName="System.IsServiceControlMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101012" valueType="Ascii" logicalName="System.IsSimulatorMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101013" valueType="Ascii" logicalName="System.LogsSaveDays" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101014" valueType="Ascii" logicalName="System.MaxTemperatureToleranceToTarget" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101015" valueType="Ascii" logicalName="System.MidWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101016" valueType="Ascii" logicalName="System.SingleLogFileMaxSize" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101017" valueType="Ascii" logicalName="System.SmallWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101018" valueType="Ascii" logicalName="System.TotalCycledWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101019" valueType="Ascii" logicalName="System.BufferSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101020" valueType="Ascii" logicalName="System.CycleBy" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101021" valueType="Ascii" logicalName="System.CycleWaferCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101022" valueType="Ascii" logicalName="System.DefaultCoolingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101023" valueType="Ascii" logicalName="System.DefaultCreateWaferSize" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101024" valueType="Ascii" logicalName="System.ProcessEnableCheckLE" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101025" valueType="Ascii" logicalName="System.DataKeepDays" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10101026" valueType="Ascii" logicalName="System.EnableDataClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10201001" valueType="Ascii" logicalName="System.SetUp.EPD.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10202001" valueType="Ascii" logicalName="System.FDC.DataGroupName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10202002" valueType="Ascii" logicalName="System.FDC.DelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10202003" valueType="Ascii" logicalName="System.FDC.SampleInterval" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10203001" valueType="Ascii" logicalName="System.Job.BuzzerTimeWhenJobDone" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10203002" valueType="Ascii" logicalName="System.Job.EnablePopDialogWhenJobDone" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10204001" valueType="Ascii" logicalName="System.Recipe.ChamberModules" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10204002" valueType="Ascii" logicalName="System.Recipe.SupportedChamberType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10204003" valueType="Ascii" logicalName="System.Recipe.SupportedProcessType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10205001" valueType="Ascii" logicalName="System.Scheduler.GroupWaferBySequence" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10205002" valueType="Ascii" logicalName="System.Scheduler.IsRunInParallelMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10205003" valueType="Ascii" logicalName="System.Scheduler.ProcessFromSlotMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10205004" valueType="Ascii" logicalName="System.Scheduler.WaferCountBelowWhichStartNewProcessJob" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10205005" valueType="Ascii" logicalName="System.Scheduler.WaitLoadTimeOut" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10206001" valueType="Ascii" logicalName="System.SignalTower.Light" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10206002" valueType="Ascii" logicalName="System.SignalTower.Trigger" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10206003" valueType="Ascii" logicalName="System.SignalTower.Value" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10207001" valueType="Ascii" logicalName="System.EndPoint.EndPointDefaultValue" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10302001" valueType="Ascii" logicalName="System.SetUp.LLA.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10303001" valueType="Ascii" logicalName="System.SetUp.LLB.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10304001" valueType="Ascii" logicalName="System.SetUp.LP1.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10305001" valueType="Ascii" logicalName="System.SetUp.LP2.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10306001" valueType="Ascii" logicalName="System.SetUp.LP3.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10307001" valueType="Ascii" logicalName="System.SetUp.PMA.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10308001" valueType="Ascii" logicalName="System.SetUp.PMB.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10309001" valueType="Ascii" logicalName="System.SetUp.PMC.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10310001" valueType="Ascii" logicalName="System.SetUp.Aligner1.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10311001" valueType="Ascii" logicalName="System.SetUp.Aligner2.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10312001" valueType="Ascii" logicalName="System.SetUp.Cooling1.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10313001" valueType="Ascii" logicalName="System.SetUp.Cooling2.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10314001" valueType="Ascii" logicalName="System.SetUp.PMAChamber1Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10315001" valueType="Ascii" logicalName="System.SetUp.PMAChamber2Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10316001" valueType="Ascii" logicalName="System.SetUp.PMBChamber1Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="10317001" valueType="Ascii" logicalName="System.SetUp.PMBChamber2Disabled.IsInstalled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="20101001" valueType="Ascii" logicalName="LP1.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="20101002" valueType="Ascii" logicalName="LP1.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="30101001" valueType="Ascii" logicalName="LP2.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="30101002" valueType="Ascii" logicalName="LP2.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="40101001" valueType="Ascii" logicalName="LP3.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="40101002" valueType="Ascii" logicalName="LP3.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101001" valueType="Ascii" logicalName="EFEM.Address" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101002" valueType="Ascii" logicalName="EFEM.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101003" valueType="Ascii" logicalName="EFEM.DelayTimeBeforeAlignerLiftDown" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101004" valueType="Ascii" logicalName="EFEM.DelayTimeBeforeCoolingLiftDown" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101005" valueType="Ascii" logicalName="EFEM.EfemType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101006" valueType="Ascii" logicalName="EFEM.IgnoreFFUError" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101007" valueType="Ascii" logicalName="EFEM.IgnoreIonizerError" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170101008" valueType="Ascii" logicalName="EFEM.IgnoreWaterFlowError" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170202001" valueType="Ascii" logicalName="EFEM.Aligner.AlignTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170202002" valueType="Ascii" logicalName="EFEM.Aligner.DefaultNotchDegree" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170202003" valueType="Ascii" logicalName="EFEM.Aligner.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170202004" valueType="Ascii" logicalName="EFEM.Aligner.LiftTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203001" valueType="Ascii" logicalName="EFEM.EfemRobot.GotoTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203002" valueType="Ascii" logicalName="EFEM.EfemRobot.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203003" valueType="Ascii" logicalName="EFEM.EfemRobot.LowerBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203004" valueType="Ascii" logicalName="EFEM.EfemRobot.MapTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203005" valueType="Ascii" logicalName="EFEM.EfemRobot.PickTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203006" valueType="Ascii" logicalName="EFEM.EfemRobot.PlaceTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203007" valueType="Ascii" logicalName="EFEM.EfemRobot.UpperBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170203008" valueType="Ascii" logicalName="EFEM.EfemRobot.DefaultMapWaferSize" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204001" valueType="Ascii" logicalName="EFEM.LoadPort.CassetteSlotNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204002" valueType="Ascii" logicalName="EFEM.LoadPort.EnableAutoCarrierIdRead" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204003" valueType="Ascii" logicalName="EFEM.LoadPort.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204004" valueType="Ascii" logicalName="EFEM.LoadPort.MotionTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204005" valueType="Ascii" logicalName="EFEM.LoadPort.SlotNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204006" valueType="Ascii" logicalName="EFEM.LoadPort.EnableAutoUnloadFoup" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204007" valueType="Ascii" logicalName="EFEM.LoadPort.HasClampFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204008" valueType="Ascii" logicalName="EFEM.LoadPort.HasDockFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204009" valueType="Ascii" logicalName="EFEM.LoadPort.HasDoorOpenFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204010" valueType="Ascii" logicalName="EFEM.LoadPort.HasLoadFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204011" valueType="Ascii" logicalName="EFEM.LoadPort.HasMapFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204012" valueType="Ascii" logicalName="EFEM.LoadPort.HasReadSmartTagFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170204013" valueType="Ascii" logicalName="EFEM.LoadPort.AutoClampOnFoupOn" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170205001" valueType="Ascii" logicalName="EFEM.Cooling.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="170205002" valueType="Ascii" logicalName="EFEM.Cooling.LiftTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="310101001" valueType="Ascii" logicalName="LLA.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="310101002" valueType="Ascii" logicalName="LLA.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="320101001" valueType="Ascii" logicalName="LLB.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="320101002" valueType="Ascii" logicalName="LLB.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101001" valueType="Ascii" logicalName="TM.TMRobot.Address" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101002" valueType="Ascii" logicalName="TM.TMRobot.Blade1Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101003" valueType="Ascii" logicalName="TM.TMRobot.Blade2Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101004" valueType="Ascii" logicalName="TM.TMRobot.Blade2Slots" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101005" valueType="Ascii" logicalName="TM.TMRobot.BodyNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101006" valueType="Ascii" logicalName="TM.TMRobot.CommunicationToken" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101007" valueType="Ascii" logicalName="TM.TMRobot.DualBlade1TransferEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101008" valueType="Ascii" logicalName="TM.TMRobot.EnableCheckSum" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101009" valueType="Ascii" logicalName="TM.TMRobot.EnableLogMessage" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101010" valueType="Ascii" logicalName="TM.TMRobot.EnableSeqNo" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101011" valueType="Ascii" logicalName="TM.TMRobot.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101012" valueType="Ascii" logicalName="TM.TMRobot.InitCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101013" valueType="Ascii" logicalName="TM.TMRobot.LowerBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101014" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101015" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101016" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101017" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101018" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101019" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101020" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101021" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101022" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101023" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101024" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101025" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101026" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101027" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101028" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101029" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101030" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101031" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101032" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101033" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101034" valueType="Ascii" logicalName="TM.TMRobot.PickTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101035" valueType="Ascii" logicalName="TM.TMRobot.PlaceTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101036" valueType="Ascii" logicalName="TM.TMRobot.PortName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101037" valueType="Ascii" logicalName="TM.TMRobot.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101038" valueType="Ascii" logicalName="TM.TMRobot.RobotSpeed" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101039" valueType="Ascii" logicalName="TM.TMRobot.SlotCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101040" valueType="Ascii" logicalName="TM.TMRobot.SpeedLevel" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101041" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForExchangeWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101042" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForPickWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101043" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitForPlaceWafer" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101044" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitRobotCommand" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101045" valueType="Ascii" logicalName="TM.TMRobot.TimeLimitRobotHome" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101046" valueType="Ascii" logicalName="TM.TMRobot.UnitNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101047" valueType="Ascii" logicalName="TM.TMRobot.UpperBladeEnable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101048" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101049" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101050" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101051" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101052" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101053" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101054" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101055" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101056" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101057" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101058" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101059" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101060" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101061" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101062" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101063" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101064" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101065" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101066" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceBackCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101067" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101068" valueType="Ascii" logicalName="TM.TMRobot.GotoTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101069" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101070" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101071" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101072" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101073" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101074" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101075" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101076" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101077" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101078" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101079" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101080" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101081" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101082" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101083" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101084" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101085" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101086" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101087" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101088" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101089" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101090" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101091" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101092" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101093" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101094" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101095" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101096" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101097" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101098" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101099" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101100" valueType="Ascii" logicalName="TM.TMRobot.LowerLLA8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101101" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101102" valueType="Ascii" logicalName="TM.TMRobot.LowerLLAPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101103" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101104" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101105" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101106" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101107" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101108" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101109" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101110" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101111" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101112" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101113" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101114" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101115" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101116" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101117" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101118" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101119" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101120" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101121" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101122" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101123" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101124" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101125" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101126" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101127" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101128" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101129" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101130" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101131" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101132" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101133" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101134" valueType="Ascii" logicalName="TM.TMRobot.LowerLLB8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101135" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101136" valueType="Ascii" logicalName="TM.TMRobot.LowerLLBPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101137" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101138" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101139" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101140" valueType="Ascii" logicalName="TM.TMRobot.LowerPMA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101141" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101142" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101143" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101144" valueType="Ascii" logicalName="TM.TMRobot.LowerPMB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101145" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101146" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101147" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101148" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101149" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101150" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101151" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101152" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101153" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101154" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101155" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101156" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101157" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101158" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101159" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101160" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101161" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101162" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101163" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101164" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101165" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101166" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101167" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101168" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101169" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101170" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101171" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101172" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101173" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101174" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101175" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101176" valueType="Ascii" logicalName="TM.TMRobot.UpperLLA8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101177" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101178" valueType="Ascii" logicalName="TM.TMRobot.UpperLLAPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101179" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101180" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101181" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101182" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101183" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101184" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101185" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101186" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101187" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101188" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101189" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101190" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB3PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101191" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101192" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101193" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101194" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB4PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101195" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101196" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101197" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101198" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB5PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101199" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101200" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101201" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101202" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB6PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101203" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101204" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101205" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101206" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB7PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101207" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PickCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101208" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101209" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PlaceCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101210" valueType="Ascii" logicalName="TM.TMRobot.UpperLLB8PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101211" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101212" valueType="Ascii" logicalName="TM.TMRobot.UpperLLBPlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101213" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101214" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101215" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101216" valueType="Ascii" logicalName="TM.TMRobot.UpperPMA2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101217" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101218" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB1PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101219" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PickReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430101220" valueType="Ascii" logicalName="TM.TMRobot.UpperPMB2PlaceReadyCmdNO" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430202001" valueType="Ascii" logicalName="TM.FFU.Address" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430202002" valueType="Ascii" logicalName="TM.FFU.DeviceAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430202003" valueType="Ascii" logicalName="TM.FFU.EnableLogMessage" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="430202004" valueType="Ascii" logicalName="TM.FFU.MaxSpeed" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101001" valueType="Ascii" logicalName="PMA.BiasRf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101002" valueType="Ascii" logicalName="PMA.BiasRf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101003" valueType="Ascii" logicalName="PMA.BiasRf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101004" valueType="Ascii" logicalName="PMA.BiasRf1.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101005" valueType="Ascii" logicalName="PMA.BiasRf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101006" valueType="Ascii" logicalName="PMA.BiasRf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101007" valueType="Ascii" logicalName="PMA.BiasRf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101008" valueType="Ascii" logicalName="PMA.BiasRf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101009" valueType="Ascii" logicalName="PMA.BiasRf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101010" valueType="Ascii" logicalName="PMA.BiasRf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101011" valueType="Ascii" logicalName="PMA.BiasRf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101012" valueType="Ascii" logicalName="PMA.BiasRf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101013" valueType="Ascii" logicalName="PMA.BiasRf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101014" valueType="Ascii" logicalName="PMA.BiasRf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101015" valueType="Ascii" logicalName="PMA.BiasRf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101016" valueType="Ascii" logicalName="PMA.BiasRf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101017" valueType="Ascii" logicalName="PMA.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101018" valueType="Ascii" logicalName="PMA.BiasRf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101019" valueType="Ascii" logicalName="PMA.BiasRf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101020" valueType="Ascii" logicalName="PMA.BiasRf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101021" valueType="Ascii" logicalName="PMA.BiasRf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101022" valueType="Ascii" logicalName="PMA.BiasRf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101023" valueType="Ascii" logicalName="PMA.BiasRf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101024" valueType="Ascii" logicalName="PMA.BiasRf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101025" valueType="Ascii" logicalName="PMA.BiasRf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101026" valueType="Ascii" logicalName="PMA.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101027" valueType="Ascii" logicalName="PMA.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620101028" valueType="Ascii" logicalName="PMA.BiasRf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202001" valueType="Ascii" logicalName="PMA.BiasRf1Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202002" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202003" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202004" valueType="Ascii" logicalName="PMA.BiasRf1Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202005" valueType="Ascii" logicalName="PMA.BiasRf1Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202006" valueType="Ascii" logicalName="PMA.BiasRf1Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202007" valueType="Ascii" logicalName="PMA.BiasRf1Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620202008" valueType="Ascii" logicalName="PMA.BiasRf1Match.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203001" valueType="Ascii" logicalName="PMA.BiasRf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203002" valueType="Ascii" logicalName="PMA.BiasRf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203003" valueType="Ascii" logicalName="PMA.BiasRf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203004" valueType="Ascii" logicalName="PMA.BiasRf2.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203005" valueType="Ascii" logicalName="PMA.BiasRf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203006" valueType="Ascii" logicalName="PMA.BiasRf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203007" valueType="Ascii" logicalName="PMA.BiasRf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203008" valueType="Ascii" logicalName="PMA.BiasRf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203009" valueType="Ascii" logicalName="PMA.BiasRf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203010" valueType="Ascii" logicalName="PMA.BiasRf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203011" valueType="Ascii" logicalName="PMA.BiasRf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203012" valueType="Ascii" logicalName="PMA.BiasRf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203013" valueType="Ascii" logicalName="PMA.BiasRf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203014" valueType="Ascii" logicalName="PMA.BiasRf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203015" valueType="Ascii" logicalName="PMA.BiasRf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203016" valueType="Ascii" logicalName="PMA.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203017" valueType="Ascii" logicalName="PMA.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203018" valueType="Ascii" logicalName="PMA.BiasRf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203019" valueType="Ascii" logicalName="PMA.BiasRf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203020" valueType="Ascii" logicalName="PMA.BiasRf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203021" valueType="Ascii" logicalName="PMA.BiasRf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203022" valueType="Ascii" logicalName="PMA.BiasRf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203023" valueType="Ascii" logicalName="PMA.BiasRf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203024" valueType="Ascii" logicalName="PMA.BiasRf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203025" valueType="Ascii" logicalName="PMA.BiasRf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203026" valueType="Ascii" logicalName="PMA.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203027" valueType="Ascii" logicalName="PMA.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620203028" valueType="Ascii" logicalName="PMA.BiasRf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204001" valueType="Ascii" logicalName="PMA.BiasRf2Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204002" valueType="Ascii" logicalName="PMA.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204003" valueType="Ascii" logicalName="PMA.BiasRf2Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204004" valueType="Ascii" logicalName="PMA.BiasRf2Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204005" valueType="Ascii" logicalName="PMA.BiasRf2Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204006" valueType="Ascii" logicalName="PMA.BiasRf2Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204007" valueType="Ascii" logicalName="PMA.BiasRf2Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620204008" valueType="Ascii" logicalName="PMA.BiasRf2Match.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205001" valueType="Ascii" logicalName="PMA.ChamberBasePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205002" valueType="Ascii" logicalName="PMA.ChamberBaseTemperatureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205003" valueType="Ascii" logicalName="PMA.ChamberHeater1SetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205004" valueType="Ascii" logicalName="PMA.HeaterChamberSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205005" valueType="Ascii" logicalName="PMA.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205006" valueType="Ascii" logicalName="PMA.CheckATMTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205007" valueType="Ascii" logicalName="PMA.CheckChamberTempTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205008" valueType="Ascii" logicalName="PMA.EnableThrottleValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205009" valueType="Ascii" logicalName="PMA.ForeLineHeaterSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205010" valueType="Ascii" logicalName="PMA.GasFlowPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205011" valueType="Ascii" logicalName="PMA.GasFlowPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205012" valueType="Ascii" logicalName="PMA.GasFlowTimeInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205013" valueType="Ascii" logicalName="PMA.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205014" valueType="Ascii" logicalName="PMA.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205015" valueType="Ascii" logicalName="PMA.LEHeaterSetPointLimit1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205016" valueType="Ascii" logicalName="PMA.LEHeaterSetPointLimit2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205017" valueType="Ascii" logicalName="PMA.OpenCloseSlitValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205018" valueType="Ascii" logicalName="PMA.OpenGasValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205019" valueType="Ascii" logicalName="PMA.PlaceAndPickDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205020" valueType="Ascii" logicalName="PMA.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205021" valueType="Ascii" logicalName="PMA.PrepareTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205022" valueType="Ascii" logicalName="PMA.ProcessPressureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205023" valueType="Ascii" logicalName="PMA.TargetPressureInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205024" valueType="Ascii" logicalName="PMA.TimeLimitOfCloseGasValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205025" valueType="Ascii" logicalName="PMA.VentTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205026" valueType="Ascii" logicalName="PMA.VentTimeDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205027" valueType="Ascii" logicalName="PMA.EnableChamberWallHeater" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205028" valueType="Ascii" logicalName="PMA.GasFlowPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205029" valueType="Ascii" logicalName="PMA.GasFlowPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205030" valueType="Ascii" logicalName="PMA.RecipeToleranceIgnoreTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205031" valueType="Ascii" logicalName="PMA.ProcessPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205032" valueType="Ascii" logicalName="PMA.ProcessPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205033" valueType="Ascii" logicalName="PMA.ProcessPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205034" valueType="Ascii" logicalName="PMA.ProcessPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620205035" valueType="Ascii" logicalName="PMA.CloseDoorDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206001" valueType="Ascii" logicalName="PMA.Chiller1.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206002" valueType="Ascii" logicalName="PMA.Chiller1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206003" valueType="Ascii" logicalName="PMA.Chiller1.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206004" valueType="Ascii" logicalName="PMA.Chiller1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206005" valueType="Ascii" logicalName="PMA.Chiller1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206006" valueType="Ascii" logicalName="PMA.Chiller1.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206007" valueType="Ascii" logicalName="PMA.Chiller1.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206008" valueType="Ascii" logicalName="PMA.Chiller1.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206009" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206010" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206011" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620206012" valueType="Ascii" logicalName="PMA.Chiller1.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207001" valueType="Ascii" logicalName="PMA.Chiller2.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207002" valueType="Ascii" logicalName="PMA.Chiller2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207003" valueType="Ascii" logicalName="PMA.Chiller2.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207004" valueType="Ascii" logicalName="PMA.Chiller2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207005" valueType="Ascii" logicalName="PMA.Chiller2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207006" valueType="Ascii" logicalName="PMA.Chiller2.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207007" valueType="Ascii" logicalName="PMA.Chiller2.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207008" valueType="Ascii" logicalName="PMA.Chiller2.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207009" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207010" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207011" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620207012" valueType="Ascii" logicalName="PMA.Chiller2.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620208001" valueType="Ascii" logicalName="PMA.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620208002" valueType="Ascii" logicalName="PMA.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620208003" valueType="Ascii" logicalName="PMA.DryPump.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620208004" valueType="Ascii" logicalName="PMA.DryPump.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620208005" valueType="Ascii" logicalName="PMA.DryPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620208006" valueType="Ascii" logicalName="PMA.DryPump.NeedUpdateComm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620209001" valueType="Ascii" logicalName="PMA.ElectrodeHeart1.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620210001" valueType="Ascii" logicalName="PMA.ElectrodeHeart2.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620211001" valueType="Ascii" logicalName="PMA.EPD.ChannelNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620211002" valueType="Ascii" logicalName="PMA.EPD.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212001" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212002" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212003" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212004" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212005" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212006" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212007" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212008" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212009" valueType="Ascii" logicalName="PMA.HeaterChamber.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212010" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212011" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212012" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212013" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212014" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212015" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212016" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212017" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212018" valueType="Ascii" logicalName="PMA.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212019" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212020" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212021" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterEnableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212022" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620212023" valueType="Ascii" logicalName="PMA.HeaterChamber.HeaterWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620213001" valueType="Ascii" logicalName="PMA.IdleClean.IdleCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620213002" valueType="Ascii" logicalName="PMA.IdleClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620213003" valueType="Ascii" logicalName="PMA.IdleClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620214001" valueType="Ascii" logicalName="PMA.JobClean.CompleteJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620214002" valueType="Ascii" logicalName="PMA.JobClean.EnableCompleteJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620214003" valueType="Ascii" logicalName="PMA.JobClean.EnablePreJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620214004" valueType="Ascii" logicalName="PMA.JobClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620214005" valueType="Ascii" logicalName="PMA.JobClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620214006" valueType="Ascii" logicalName="PMA.JobClean.PreJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620215001" valueType="Ascii" logicalName="PMA.match1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620215002" valueType="Ascii" logicalName="PMA.match1.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620215003" valueType="Ascii" logicalName="PMA.match1.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620215004" valueType="Ascii" logicalName="PMA.match1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620215005" valueType="Ascii" logicalName="PMA.match1.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620215006" valueType="Ascii" logicalName="PMA.match1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620215007" valueType="Ascii" logicalName="PMA.match1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620216001" valueType="Ascii" logicalName="PMA.match2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620216002" valueType="Ascii" logicalName="PMA.match2.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620216003" valueType="Ascii" logicalName="PMA.match2.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620216004" valueType="Ascii" logicalName="PMA.match2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620216005" valueType="Ascii" logicalName="PMA.match2.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620216006" valueType="Ascii" logicalName="PMA.match2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620216007" valueType="Ascii" logicalName="PMA.match2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217001" valueType="Ascii" logicalName="PMA.MfcGas1.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217002" valueType="Ascii" logicalName="PMA.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217003" valueType="Ascii" logicalName="PMA.MfcGas1.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217004" valueType="Ascii" logicalName="PMA.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217005" valueType="Ascii" logicalName="PMA.MfcGas1.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217006" valueType="Ascii" logicalName="PMA.MfcGas1.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217007" valueType="Ascii" logicalName="PMA.MfcGas1.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217008" valueType="Ascii" logicalName="PMA.MfcGas1.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217009" valueType="Ascii" logicalName="PMA.MfcGas1.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217010" valueType="Ascii" logicalName="PMA.MfcGas1.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620217011" valueType="Ascii" logicalName="PMA.MfcGas1.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218001" valueType="Ascii" logicalName="PMA.MfcGas2.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218002" valueType="Ascii" logicalName="PMA.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218003" valueType="Ascii" logicalName="PMA.MfcGas2.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218004" valueType="Ascii" logicalName="PMA.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218005" valueType="Ascii" logicalName="PMA.MfcGas2.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218006" valueType="Ascii" logicalName="PMA.MfcGas2.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218007" valueType="Ascii" logicalName="PMA.MfcGas2.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218008" valueType="Ascii" logicalName="PMA.MfcGas2.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218009" valueType="Ascii" logicalName="PMA.MfcGas2.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218010" valueType="Ascii" logicalName="PMA.MfcGas2.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620218011" valueType="Ascii" logicalName="PMA.MfcGas2.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219001" valueType="Ascii" logicalName="PMA.MfcGas3.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219002" valueType="Ascii" logicalName="PMA.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219003" valueType="Ascii" logicalName="PMA.MfcGas3.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219004" valueType="Ascii" logicalName="PMA.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219005" valueType="Ascii" logicalName="PMA.MfcGas3.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219006" valueType="Ascii" logicalName="PMA.MfcGas3.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219007" valueType="Ascii" logicalName="PMA.MfcGas3.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219008" valueType="Ascii" logicalName="PMA.MfcGas3.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219009" valueType="Ascii" logicalName="PMA.MfcGas3.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219010" valueType="Ascii" logicalName="PMA.MfcGas3.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620219011" valueType="Ascii" logicalName="PMA.MfcGas3.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220001" valueType="Ascii" logicalName="PMA.MfcGas4.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220002" valueType="Ascii" logicalName="PMA.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220003" valueType="Ascii" logicalName="PMA.MfcGas4.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220004" valueType="Ascii" logicalName="PMA.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220005" valueType="Ascii" logicalName="PMA.MfcGas4.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220006" valueType="Ascii" logicalName="PMA.MfcGas4.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220007" valueType="Ascii" logicalName="PMA.MfcGas4.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220008" valueType="Ascii" logicalName="PMA.MfcGas4.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220009" valueType="Ascii" logicalName="PMA.MfcGas4.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220010" valueType="Ascii" logicalName="PMA.MfcGas4.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620220011" valueType="Ascii" logicalName="PMA.MfcGas4.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221001" valueType="Ascii" logicalName="PMA.MfcGas5.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221002" valueType="Ascii" logicalName="PMA.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221003" valueType="Ascii" logicalName="PMA.MfcGas5.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221004" valueType="Ascii" logicalName="PMA.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221005" valueType="Ascii" logicalName="PMA.MfcGas5.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221006" valueType="Ascii" logicalName="PMA.MfcGas5.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221007" valueType="Ascii" logicalName="PMA.MfcGas5.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221008" valueType="Ascii" logicalName="PMA.MfcGas5.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221009" valueType="Ascii" logicalName="PMA.MfcGas5.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221010" valueType="Ascii" logicalName="PMA.MfcGas5.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620221011" valueType="Ascii" logicalName="PMA.MfcGas5.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222001" valueType="Ascii" logicalName="PMA.MfcGas6.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222002" valueType="Ascii" logicalName="PMA.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222003" valueType="Ascii" logicalName="PMA.MfcGas6.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222004" valueType="Ascii" logicalName="PMA.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222005" valueType="Ascii" logicalName="PMA.MfcGas6.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222006" valueType="Ascii" logicalName="PMA.MfcGas6.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222007" valueType="Ascii" logicalName="PMA.MfcGas6.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222008" valueType="Ascii" logicalName="PMA.MfcGas6.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222009" valueType="Ascii" logicalName="PMA.MfcGas6.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222010" valueType="Ascii" logicalName="PMA.MfcGas6.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620222011" valueType="Ascii" logicalName="PMA.MfcGas6.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620223001" valueType="Ascii" logicalName="PMA.Pump.LeakCheckPumpingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620223002" valueType="Ascii" logicalName="PMA.Pump.LeakCheckWaitTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620223003" valueType="Ascii" logicalName="PMA.Pump.LeakRate" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620223004" valueType="Ascii" logicalName="PMA.Pump.PumpBasePressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620223005" valueType="Ascii" logicalName="PMA.Pump.PumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620223006" valueType="Ascii" logicalName="PMA.Pump.PumpValveDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620224001" valueType="Ascii" logicalName="PMA.Purge.PurgeCycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620224002" valueType="Ascii" logicalName="PMA.Purge.PurgePumpPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620224003" valueType="Ascii" logicalName="PMA.Purge.PurgePumpStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620224004" valueType="Ascii" logicalName="PMA.Purge.PurgePumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620224005" valueType="Ascii" logicalName="PMA.Purge.PurgeVentPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620224006" valueType="Ascii" logicalName="PMA.Purge.PurgeVentStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620224007" valueType="Ascii" logicalName="PMA.Purge.PurgeVentTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225001" valueType="Ascii" logicalName="PMA.Rf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225002" valueType="Ascii" logicalName="PMA.Rf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225003" valueType="Ascii" logicalName="PMA.Rf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225004" valueType="Ascii" logicalName="PMA.Rf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225005" valueType="Ascii" logicalName="PMA.Rf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225006" valueType="Ascii" logicalName="PMA.Rf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225007" valueType="Ascii" logicalName="PMA.Rf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225008" valueType="Ascii" logicalName="PMA.Rf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225009" valueType="Ascii" logicalName="PMA.Rf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225010" valueType="Ascii" logicalName="PMA.Rf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225011" valueType="Ascii" logicalName="PMA.Rf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225012" valueType="Ascii" logicalName="PMA.Rf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225013" valueType="Ascii" logicalName="PMA.Rf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225014" valueType="Ascii" logicalName="PMA.Rf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225015" valueType="Ascii" logicalName="PMA.Rf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225016" valueType="Ascii" logicalName="PMA.Rf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225017" valueType="Ascii" logicalName="PMA.Rf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225018" valueType="Ascii" logicalName="PMA.Rf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225019" valueType="Ascii" logicalName="PMA.Rf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225020" valueType="Ascii" logicalName="PMA.Rf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225021" valueType="Ascii" logicalName="PMA.Rf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225022" valueType="Ascii" logicalName="PMA.Rf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225023" valueType="Ascii" logicalName="PMA.Rf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225024" valueType="Ascii" logicalName="PMA.Rf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225025" valueType="Ascii" logicalName="PMA.Rf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225026" valueType="Ascii" logicalName="PMA.Rf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620225027" valueType="Ascii" logicalName="PMA.Rf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226001" valueType="Ascii" logicalName="PMA.Rf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226002" valueType="Ascii" logicalName="PMA.Rf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226003" valueType="Ascii" logicalName="PMA.Rf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226004" valueType="Ascii" logicalName="PMA.Rf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226005" valueType="Ascii" logicalName="PMA.Rf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226006" valueType="Ascii" logicalName="PMA.Rf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226007" valueType="Ascii" logicalName="PMA.Rf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226008" valueType="Ascii" logicalName="PMA.Rf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226009" valueType="Ascii" logicalName="PMA.Rf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226010" valueType="Ascii" logicalName="PMA.Rf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226011" valueType="Ascii" logicalName="PMA.Rf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226012" valueType="Ascii" logicalName="PMA.Rf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226013" valueType="Ascii" logicalName="PMA.Rf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226014" valueType="Ascii" logicalName="PMA.Rf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226015" valueType="Ascii" logicalName="PMA.Rf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226016" valueType="Ascii" logicalName="PMA.Rf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226017" valueType="Ascii" logicalName="PMA.Rf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226018" valueType="Ascii" logicalName="PMA.Rf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226019" valueType="Ascii" logicalName="PMA.Rf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226020" valueType="Ascii" logicalName="PMA.Rf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226021" valueType="Ascii" logicalName="PMA.Rf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226022" valueType="Ascii" logicalName="PMA.Rf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226023" valueType="Ascii" logicalName="PMA.Rf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226024" valueType="Ascii" logicalName="PMA.Rf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226025" valueType="Ascii" logicalName="PMA.Rf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226026" valueType="Ascii" logicalName="PMA.Rf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620226027" valueType="Ascii" logicalName="PMA.Rf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227001" valueType="Ascii" logicalName="PMA.MFCVerification.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227002" valueType="Ascii" logicalName="PMA.MFCVerification.CheckStableTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227003" valueType="Ascii" logicalName="PMA.MFCVerification.FlowStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227004" valueType="Ascii" logicalName="PMA.MFCVerification.GasFlowTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227005" valueType="Ascii" logicalName="PMA.MFCVerification.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227006" valueType="Ascii" logicalName="PMA.MFCVerification.MaxDeviation" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227007" valueType="Ascii" logicalName="PMA.MFCVerification.PressureStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620227008" valueType="Ascii" logicalName="PMA.MFCVerification.TargetPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228001" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228002" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228003" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228004" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228005" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228006" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228007" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228008" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228009" valueType="Ascii" logicalName="PMA.HeaterChamber1.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228010" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228011" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228012" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228013" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228014" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228015" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228016" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228017" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620228018" valueType="Ascii" logicalName="PMA.HeaterChamber1.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229001" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229002" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229003" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229004" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229005" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229006" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229007" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229008" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229009" valueType="Ascii" logicalName="PMA.HeaterChamber2.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229010" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229011" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229012" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229013" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229014" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229015" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229016" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229017" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="620229018" valueType="Ascii" logicalName="PMA.HeaterChamber2.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101001" valueType="Ascii" logicalName="PMB.BiasRf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101002" valueType="Ascii" logicalName="PMB.BiasRf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101003" valueType="Ascii" logicalName="PMB.BiasRf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101004" valueType="Ascii" logicalName="PMB.BiasRf1.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101005" valueType="Ascii" logicalName="PMB.BiasRf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101006" valueType="Ascii" logicalName="PMB.BiasRf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101007" valueType="Ascii" logicalName="PMB.BiasRf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101008" valueType="Ascii" logicalName="PMB.BiasRf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101009" valueType="Ascii" logicalName="PMB.BiasRf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101010" valueType="Ascii" logicalName="PMB.BiasRf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101011" valueType="Ascii" logicalName="PMB.BiasRf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101012" valueType="Ascii" logicalName="PMB.BiasRf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101013" valueType="Ascii" logicalName="PMB.BiasRf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101014" valueType="Ascii" logicalName="PMB.BiasRf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101015" valueType="Ascii" logicalName="PMB.BiasRf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101016" valueType="Ascii" logicalName="PMB.BiasRf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101017" valueType="Ascii" logicalName="PMB.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101018" valueType="Ascii" logicalName="PMB.BiasRf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101019" valueType="Ascii" logicalName="PMB.BiasRf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101020" valueType="Ascii" logicalName="PMB.BiasRf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101021" valueType="Ascii" logicalName="PMB.BiasRf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101022" valueType="Ascii" logicalName="PMB.BiasRf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101023" valueType="Ascii" logicalName="PMB.BiasRf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101024" valueType="Ascii" logicalName="PMB.BiasRf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101025" valueType="Ascii" logicalName="PMB.BiasRf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101026" valueType="Ascii" logicalName="PMB.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101027" valueType="Ascii" logicalName="PMB.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630101028" valueType="Ascii" logicalName="PMB.BiasRf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630202001" valueType="Ascii" logicalName="PMB.BiasRf1Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630202002" valueType="Ascii" logicalName="PMB.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630202003" valueType="Ascii" logicalName="PMB.BiasRf1Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630202004" valueType="Ascii" logicalName="PMB.BiasRf1Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630202005" valueType="Ascii" logicalName="PMB.BiasRf1Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630202006" valueType="Ascii" logicalName="PMB.BiasRf1Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630202007" valueType="Ascii" logicalName="PMB.BiasRf1Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203001" valueType="Ascii" logicalName="PMB.BiasRf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203002" valueType="Ascii" logicalName="PMB.BiasRf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203003" valueType="Ascii" logicalName="PMB.BiasRf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203004" valueType="Ascii" logicalName="PMB.BiasRf2.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203005" valueType="Ascii" logicalName="PMB.BiasRf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203006" valueType="Ascii" logicalName="PMB.BiasRf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203007" valueType="Ascii" logicalName="PMB.BiasRf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203008" valueType="Ascii" logicalName="PMB.BiasRf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203009" valueType="Ascii" logicalName="PMB.BiasRf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203010" valueType="Ascii" logicalName="PMB.BiasRf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203011" valueType="Ascii" logicalName="PMB.BiasRf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203012" valueType="Ascii" logicalName="PMB.BiasRf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203013" valueType="Ascii" logicalName="PMB.BiasRf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203014" valueType="Ascii" logicalName="PMB.BiasRf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203015" valueType="Ascii" logicalName="PMB.BiasRf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203016" valueType="Ascii" logicalName="PMB.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203017" valueType="Ascii" logicalName="PMB.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203018" valueType="Ascii" logicalName="PMB.BiasRf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203019" valueType="Ascii" logicalName="PMB.BiasRf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203020" valueType="Ascii" logicalName="PMB.BiasRf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203021" valueType="Ascii" logicalName="PMB.BiasRf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203022" valueType="Ascii" logicalName="PMB.BiasRf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203023" valueType="Ascii" logicalName="PMB.BiasRf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203024" valueType="Ascii" logicalName="PMB.BiasRf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203025" valueType="Ascii" logicalName="PMB.BiasRf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203026" valueType="Ascii" logicalName="PMB.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203027" valueType="Ascii" logicalName="PMB.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630203028" valueType="Ascii" logicalName="PMB.BiasRf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630204001" valueType="Ascii" logicalName="PMB.BiasRf2Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630204002" valueType="Ascii" logicalName="PMB.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630204003" valueType="Ascii" logicalName="PMB.BiasRf2Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630204004" valueType="Ascii" logicalName="PMB.BiasRf2Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630204005" valueType="Ascii" logicalName="PMB.BiasRf2Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630204006" valueType="Ascii" logicalName="PMB.BiasRf2Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630204007" valueType="Ascii" logicalName="PMB.BiasRf2Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205001" valueType="Ascii" logicalName="PMB.ChamberBasePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205002" valueType="Ascii" logicalName="PMB.ChamberBaseTemperatureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205003" valueType="Ascii" logicalName="PMB.ChamberHeater1SetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205004" valueType="Ascii" logicalName="PMB.HeaterChamberSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205005" valueType="Ascii" logicalName="PMB.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205006" valueType="Ascii" logicalName="PMB.CheckATMTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205007" valueType="Ascii" logicalName="PMB.CheckChamberTempTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205008" valueType="Ascii" logicalName="PMB.EnableThrottleValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205009" valueType="Ascii" logicalName="PMB.ForeLineHeaterSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205010" valueType="Ascii" logicalName="PMB.GasFlowPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205011" valueType="Ascii" logicalName="PMB.GasFlowPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205012" valueType="Ascii" logicalName="PMB.GasFlowTimeInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205013" valueType="Ascii" logicalName="PMB.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205014" valueType="Ascii" logicalName="PMB.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205015" valueType="Ascii" logicalName="PMB.LEHeaterSetPointLimit1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205016" valueType="Ascii" logicalName="PMB.LEHeaterSetPointLimit2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205017" valueType="Ascii" logicalName="PMB.OpenCloseSlitValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205018" valueType="Ascii" logicalName="PMB.OpenGasValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205019" valueType="Ascii" logicalName="PMB.PlaceAndPickDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205020" valueType="Ascii" logicalName="PMB.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205021" valueType="Ascii" logicalName="PMB.PrepareTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205022" valueType="Ascii" logicalName="PMB.ProcessPressureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205023" valueType="Ascii" logicalName="PMB.TargetPressureInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205024" valueType="Ascii" logicalName="PMB.TimeLimitOfCloseGasValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205025" valueType="Ascii" logicalName="PMB.VentTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205026" valueType="Ascii" logicalName="PMB.VentTimeDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205027" valueType="Ascii" logicalName="PMB.EnableChamberWallHeater" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205028" valueType="Ascii" logicalName="PMB.GasFlowPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205029" valueType="Ascii" logicalName="PMB.GasFlowPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205030" valueType="Ascii" logicalName="PMB.RecipeToleranceIgnoreTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205031" valueType="Ascii" logicalName="PMB.ProcessPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205032" valueType="Ascii" logicalName="PMB.ProcessPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205033" valueType="Ascii" logicalName="PMB.ProcessPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205034" valueType="Ascii" logicalName="PMB.ProcessPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630205035" valueType="Ascii" logicalName="PMB.CloseDoorDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206001" valueType="Ascii" logicalName="PMB.Chiller1.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206002" valueType="Ascii" logicalName="PMB.Chiller1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206003" valueType="Ascii" logicalName="PMB.Chiller1.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206004" valueType="Ascii" logicalName="PMB.Chiller1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206005" valueType="Ascii" logicalName="PMB.Chiller1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206006" valueType="Ascii" logicalName="PMB.Chiller1.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206007" valueType="Ascii" logicalName="PMB.Chiller1.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206008" valueType="Ascii" logicalName="PMB.Chiller1.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206009" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206010" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206011" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630206012" valueType="Ascii" logicalName="PMB.Chiller1.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207001" valueType="Ascii" logicalName="PMB.Chiller2.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207002" valueType="Ascii" logicalName="PMB.Chiller2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207003" valueType="Ascii" logicalName="PMB.Chiller2.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207004" valueType="Ascii" logicalName="PMB.Chiller2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207005" valueType="Ascii" logicalName="PMB.Chiller2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207006" valueType="Ascii" logicalName="PMB.Chiller2.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207007" valueType="Ascii" logicalName="PMB.Chiller2.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207008" valueType="Ascii" logicalName="PMB.Chiller2.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207009" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207010" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207011" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630207012" valueType="Ascii" logicalName="PMB.Chiller2.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630208001" valueType="Ascii" logicalName="PMB.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630208002" valueType="Ascii" logicalName="PMB.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630208003" valueType="Ascii" logicalName="PMB.DryPump.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630208004" valueType="Ascii" logicalName="PMB.DryPump.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630208005" valueType="Ascii" logicalName="PMB.DryPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630208006" valueType="Ascii" logicalName="PMB.DryPump.NeedUpdateComm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630209001" valueType="Ascii" logicalName="PMB.ElectrodeHeart1.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630210001" valueType="Ascii" logicalName="PMB.ElectrodeHeart2.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630211001" valueType="Ascii" logicalName="PMB.EPD.ChannelNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630211002" valueType="Ascii" logicalName="PMB.EPD.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212001" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212002" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212003" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212004" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212005" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212006" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212007" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212008" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212009" valueType="Ascii" logicalName="PMB.HeaterChamber.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212010" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212011" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212012" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212013" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212014" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212015" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212016" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212017" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212018" valueType="Ascii" logicalName="PMB.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212019" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212020" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212021" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterEnableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212022" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630212023" valueType="Ascii" logicalName="PMB.HeaterChamber.HeaterWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630213001" valueType="Ascii" logicalName="PMB.IdleClean.IdleCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630213002" valueType="Ascii" logicalName="PMB.IdleClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630213003" valueType="Ascii" logicalName="PMB.IdleClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630214001" valueType="Ascii" logicalName="PMB.JobClean.CompleteJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630214002" valueType="Ascii" logicalName="PMB.JobClean.EnableCompleteJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630214003" valueType="Ascii" logicalName="PMB.JobClean.EnablePreJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630214004" valueType="Ascii" logicalName="PMB.JobClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630214005" valueType="Ascii" logicalName="PMB.JobClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630214006" valueType="Ascii" logicalName="PMB.JobClean.PreJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630215001" valueType="Ascii" logicalName="PMB.match1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630215002" valueType="Ascii" logicalName="PMB.match1.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630215003" valueType="Ascii" logicalName="PMB.match1.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630215004" valueType="Ascii" logicalName="PMB.match1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630215005" valueType="Ascii" logicalName="PMB.match1.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630215006" valueType="Ascii" logicalName="PMB.match1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630215007" valueType="Ascii" logicalName="PMB.match1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630216001" valueType="Ascii" logicalName="PMB.match2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630216002" valueType="Ascii" logicalName="PMB.match2.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630216003" valueType="Ascii" logicalName="PMB.match2.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630216004" valueType="Ascii" logicalName="PMB.match2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630216005" valueType="Ascii" logicalName="PMB.match2.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630216006" valueType="Ascii" logicalName="PMB.match2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630216007" valueType="Ascii" logicalName="PMB.match2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217001" valueType="Ascii" logicalName="PMB.MfcGas1.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217002" valueType="Ascii" logicalName="PMB.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217003" valueType="Ascii" logicalName="PMB.MfcGas1.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217004" valueType="Ascii" logicalName="PMB.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217005" valueType="Ascii" logicalName="PMB.MfcGas1.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217006" valueType="Ascii" logicalName="PMB.MfcGas1.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217007" valueType="Ascii" logicalName="PMB.MfcGas1.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217008" valueType="Ascii" logicalName="PMB.MfcGas1.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217009" valueType="Ascii" logicalName="PMB.MfcGas1.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217010" valueType="Ascii" logicalName="PMB.MfcGas1.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630217011" valueType="Ascii" logicalName="PMB.MfcGas1.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218001" valueType="Ascii" logicalName="PMB.MfcGas2.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218002" valueType="Ascii" logicalName="PMB.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218003" valueType="Ascii" logicalName="PMB.MfcGas2.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218004" valueType="Ascii" logicalName="PMB.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218005" valueType="Ascii" logicalName="PMB.MfcGas2.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218006" valueType="Ascii" logicalName="PMB.MfcGas2.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218007" valueType="Ascii" logicalName="PMB.MfcGas2.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218008" valueType="Ascii" logicalName="PMB.MfcGas2.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218009" valueType="Ascii" logicalName="PMB.MfcGas2.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218010" valueType="Ascii" logicalName="PMB.MfcGas2.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630218011" valueType="Ascii" logicalName="PMB.MfcGas2.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219001" valueType="Ascii" logicalName="PMB.MfcGas3.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219002" valueType="Ascii" logicalName="PMB.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219003" valueType="Ascii" logicalName="PMB.MfcGas3.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219004" valueType="Ascii" logicalName="PMB.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219005" valueType="Ascii" logicalName="PMB.MfcGas3.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219006" valueType="Ascii" logicalName="PMB.MfcGas3.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219007" valueType="Ascii" logicalName="PMB.MfcGas3.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219008" valueType="Ascii" logicalName="PMB.MfcGas3.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219009" valueType="Ascii" logicalName="PMB.MfcGas3.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219010" valueType="Ascii" logicalName="PMB.MfcGas3.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630219011" valueType="Ascii" logicalName="PMB.MfcGas3.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220001" valueType="Ascii" logicalName="PMB.MfcGas4.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220002" valueType="Ascii" logicalName="PMB.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220003" valueType="Ascii" logicalName="PMB.MfcGas4.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220004" valueType="Ascii" logicalName="PMB.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220005" valueType="Ascii" logicalName="PMB.MfcGas4.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220006" valueType="Ascii" logicalName="PMB.MfcGas4.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220007" valueType="Ascii" logicalName="PMB.MfcGas4.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220008" valueType="Ascii" logicalName="PMB.MfcGas4.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220009" valueType="Ascii" logicalName="PMB.MfcGas4.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220010" valueType="Ascii" logicalName="PMB.MfcGas4.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630220011" valueType="Ascii" logicalName="PMB.MfcGas4.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221001" valueType="Ascii" logicalName="PMB.MfcGas5.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221002" valueType="Ascii" logicalName="PMB.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221003" valueType="Ascii" logicalName="PMB.MfcGas5.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221004" valueType="Ascii" logicalName="PMB.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221005" valueType="Ascii" logicalName="PMB.MfcGas5.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221006" valueType="Ascii" logicalName="PMB.MfcGas5.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221007" valueType="Ascii" logicalName="PMB.MfcGas5.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221008" valueType="Ascii" logicalName="PMB.MfcGas5.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221009" valueType="Ascii" logicalName="PMB.MfcGas5.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221010" valueType="Ascii" logicalName="PMB.MfcGas5.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630221011" valueType="Ascii" logicalName="PMB.MfcGas5.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222001" valueType="Ascii" logicalName="PMB.MfcGas6.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222002" valueType="Ascii" logicalName="PMB.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222003" valueType="Ascii" logicalName="PMB.MfcGas6.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222004" valueType="Ascii" logicalName="PMB.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222005" valueType="Ascii" logicalName="PMB.MfcGas6.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222006" valueType="Ascii" logicalName="PMB.MfcGas6.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222007" valueType="Ascii" logicalName="PMB.MfcGas6.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222008" valueType="Ascii" logicalName="PMB.MfcGas6.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222009" valueType="Ascii" logicalName="PMB.MfcGas6.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222010" valueType="Ascii" logicalName="PMB.MfcGas6.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630222011" valueType="Ascii" logicalName="PMB.MfcGas6.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630223001" valueType="Ascii" logicalName="PMB.Pump.LeakCheckPumpingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630223002" valueType="Ascii" logicalName="PMB.Pump.LeakCheckWaitTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630223003" valueType="Ascii" logicalName="PMB.Pump.LeakRate" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630223004" valueType="Ascii" logicalName="PMB.Pump.PumpBasePressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630223005" valueType="Ascii" logicalName="PMB.Pump.PumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630223006" valueType="Ascii" logicalName="PMB.Pump.PumpValveDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630224001" valueType="Ascii" logicalName="PMB.Purge.PurgeCycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630224002" valueType="Ascii" logicalName="PMB.Purge.PurgePumpPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630224003" valueType="Ascii" logicalName="PMB.Purge.PurgePumpStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630224004" valueType="Ascii" logicalName="PMB.Purge.PurgePumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630224005" valueType="Ascii" logicalName="PMB.Purge.PurgeVentPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630224006" valueType="Ascii" logicalName="PMB.Purge.PurgeVentStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630224007" valueType="Ascii" logicalName="PMB.Purge.PurgeVentTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225001" valueType="Ascii" logicalName="PMB.Rf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225002" valueType="Ascii" logicalName="PMB.Rf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225003" valueType="Ascii" logicalName="PMB.Rf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225004" valueType="Ascii" logicalName="PMB.Rf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225005" valueType="Ascii" logicalName="PMB.Rf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225006" valueType="Ascii" logicalName="PMB.Rf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225007" valueType="Ascii" logicalName="PMB.Rf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225008" valueType="Ascii" logicalName="PMB.Rf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225009" valueType="Ascii" logicalName="PMB.Rf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225010" valueType="Ascii" logicalName="PMB.Rf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225011" valueType="Ascii" logicalName="PMB.Rf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225012" valueType="Ascii" logicalName="PMB.Rf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225013" valueType="Ascii" logicalName="PMB.Rf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225014" valueType="Ascii" logicalName="PMB.Rf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225015" valueType="Ascii" logicalName="PMB.Rf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225016" valueType="Ascii" logicalName="PMB.Rf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225017" valueType="Ascii" logicalName="PMB.Rf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225018" valueType="Ascii" logicalName="PMB.Rf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225019" valueType="Ascii" logicalName="PMB.Rf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225020" valueType="Ascii" logicalName="PMB.Rf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225021" valueType="Ascii" logicalName="PMB.Rf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225022" valueType="Ascii" logicalName="PMB.Rf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225023" valueType="Ascii" logicalName="PMB.Rf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225024" valueType="Ascii" logicalName="PMB.Rf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225025" valueType="Ascii" logicalName="PMB.Rf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225026" valueType="Ascii" logicalName="PMB.Rf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630225027" valueType="Ascii" logicalName="PMB.Rf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226001" valueType="Ascii" logicalName="PMB.Rf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226002" valueType="Ascii" logicalName="PMB.Rf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226003" valueType="Ascii" logicalName="PMB.Rf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226004" valueType="Ascii" logicalName="PMB.Rf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226005" valueType="Ascii" logicalName="PMB.Rf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226006" valueType="Ascii" logicalName="PMB.Rf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226007" valueType="Ascii" logicalName="PMB.Rf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226008" valueType="Ascii" logicalName="PMB.Rf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226009" valueType="Ascii" logicalName="PMB.Rf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226010" valueType="Ascii" logicalName="PMB.Rf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226011" valueType="Ascii" logicalName="PMB.Rf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226012" valueType="Ascii" logicalName="PMB.Rf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226013" valueType="Ascii" logicalName="PMB.Rf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226014" valueType="Ascii" logicalName="PMB.Rf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226015" valueType="Ascii" logicalName="PMB.Rf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226016" valueType="Ascii" logicalName="PMB.Rf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226017" valueType="Ascii" logicalName="PMB.Rf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226018" valueType="Ascii" logicalName="PMB.Rf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226019" valueType="Ascii" logicalName="PMB.Rf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226020" valueType="Ascii" logicalName="PMB.Rf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226021" valueType="Ascii" logicalName="PMB.Rf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226022" valueType="Ascii" logicalName="PMB.Rf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226023" valueType="Ascii" logicalName="PMB.Rf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226024" valueType="Ascii" logicalName="PMB.Rf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226025" valueType="Ascii" logicalName="PMB.Rf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226026" valueType="Ascii" logicalName="PMB.Rf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630226027" valueType="Ascii" logicalName="PMB.Rf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227001" valueType="Ascii" logicalName="PMB.MFCVerification.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227002" valueType="Ascii" logicalName="PMB.MFCVerification.CheckStableTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227003" valueType="Ascii" logicalName="PMB.MFCVerification.FlowStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227004" valueType="Ascii" logicalName="PMB.MFCVerification.GasFlowTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227005" valueType="Ascii" logicalName="PMB.MFCVerification.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227006" valueType="Ascii" logicalName="PMB.MFCVerification.MaxDeviation" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227007" valueType="Ascii" logicalName="PMB.MFCVerification.PressureStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630227008" valueType="Ascii" logicalName="PMB.MFCVerification.TargetPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228001" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228002" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228003" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228004" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228005" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228006" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228007" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228008" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228009" valueType="Ascii" logicalName="PMB.HeaterChamber1.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228010" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228011" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228012" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228013" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228014" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228015" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228016" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228017" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630228018" valueType="Ascii" logicalName="PMB.HeaterChamber1.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229001" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229002" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229003" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229004" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229005" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229006" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229007" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229008" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229009" valueType="Ascii" logicalName="PMB.HeaterChamber2.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229010" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229011" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229012" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229013" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229014" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229015" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229016" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229017" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="630229018" valueType="Ascii" logicalName="PMB.HeaterChamber2.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101001" valueType="Ascii" logicalName="PMC.BiasRf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101002" valueType="Ascii" logicalName="PMC.BiasRf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101003" valueType="Ascii" logicalName="PMC.BiasRf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101004" valueType="Ascii" logicalName="PMC.BiasRf1.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101005" valueType="Ascii" logicalName="PMC.BiasRf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101006" valueType="Ascii" logicalName="PMC.BiasRf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101007" valueType="Ascii" logicalName="PMC.BiasRf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101008" valueType="Ascii" logicalName="PMC.BiasRf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101009" valueType="Ascii" logicalName="PMC.BiasRf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101010" valueType="Ascii" logicalName="PMC.BiasRf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101011" valueType="Ascii" logicalName="PMC.BiasRf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101012" valueType="Ascii" logicalName="PMC.BiasRf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101013" valueType="Ascii" logicalName="PMC.BiasRf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101014" valueType="Ascii" logicalName="PMC.BiasRf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101015" valueType="Ascii" logicalName="PMC.BiasRf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101016" valueType="Ascii" logicalName="PMC.BiasRf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101017" valueType="Ascii" logicalName="PMC.BiasRf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101018" valueType="Ascii" logicalName="PMC.BiasRf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101019" valueType="Ascii" logicalName="PMC.BiasRf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101020" valueType="Ascii" logicalName="PMC.BiasRf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101021" valueType="Ascii" logicalName="PMC.BiasRf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101022" valueType="Ascii" logicalName="PMC.BiasRf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101023" valueType="Ascii" logicalName="PMC.BiasRf1.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101024" valueType="Ascii" logicalName="PMC.BiasRf1.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101025" valueType="Ascii" logicalName="PMC.BiasRf1.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101026" valueType="Ascii" logicalName="PMC.BiasRf1.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101027" valueType="Ascii" logicalName="PMC.BiasRf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640101028" valueType="Ascii" logicalName="PMC.BiasRf1.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640202001" valueType="Ascii" logicalName="PMC.BiasRf1Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640202002" valueType="Ascii" logicalName="PMC.BiasRf1Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640202003" valueType="Ascii" logicalName="PMC.BiasRf1Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640202004" valueType="Ascii" logicalName="PMC.BiasRf1Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640202005" valueType="Ascii" logicalName="PMC.BiasRf1Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640202006" valueType="Ascii" logicalName="PMC.BiasRf1Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640202007" valueType="Ascii" logicalName="PMC.BiasRf1Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203001" valueType="Ascii" logicalName="PMC.BiasRf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203002" valueType="Ascii" logicalName="PMC.BiasRf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203003" valueType="Ascii" logicalName="PMC.BiasRf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203004" valueType="Ascii" logicalName="PMC.BiasRf2.EnableBiasRF" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203005" valueType="Ascii" logicalName="PMC.BiasRf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203006" valueType="Ascii" logicalName="PMC.BiasRf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203007" valueType="Ascii" logicalName="PMC.BiasRf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203008" valueType="Ascii" logicalName="PMC.BiasRf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203009" valueType="Ascii" logicalName="PMC.BiasRf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203010" valueType="Ascii" logicalName="PMC.BiasRf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203011" valueType="Ascii" logicalName="PMC.BiasRf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203012" valueType="Ascii" logicalName="PMC.BiasRf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203013" valueType="Ascii" logicalName="PMC.BiasRf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203014" valueType="Ascii" logicalName="PMC.BiasRf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203015" valueType="Ascii" logicalName="PMC.BiasRf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203016" valueType="Ascii" logicalName="PMC.BiasRf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203017" valueType="Ascii" logicalName="PMC.BiasRf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203018" valueType="Ascii" logicalName="PMC.BiasRf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203019" valueType="Ascii" logicalName="PMC.BiasRf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203020" valueType="Ascii" logicalName="PMC.BiasRf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203021" valueType="Ascii" logicalName="PMC.BiasRf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203022" valueType="Ascii" logicalName="PMC.BiasRf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203023" valueType="Ascii" logicalName="PMC.BiasRf2.CurrentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203024" valueType="Ascii" logicalName="PMC.BiasRf2.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203025" valueType="Ascii" logicalName="PMC.BiasRf2.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203026" valueType="Ascii" logicalName="PMC.BiasRf2.RFPhysicalMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203027" valueType="Ascii" logicalName="PMC.BiasRf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640203028" valueType="Ascii" logicalName="PMC.BiasRf2.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640204001" valueType="Ascii" logicalName="PMC.BiasRf2Match.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640204002" valueType="Ascii" logicalName="PMC.BiasRf2Match.EnableBiasC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640204003" valueType="Ascii" logicalName="PMC.BiasRf2Match.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640204004" valueType="Ascii" logicalName="PMC.BiasRf2Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640204005" valueType="Ascii" logicalName="PMC.BiasRf2Match.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640204006" valueType="Ascii" logicalName="PMC.BiasRf2Match.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640204007" valueType="Ascii" logicalName="PMC.BiasRf2Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205001" valueType="Ascii" logicalName="PMC.ChamberBasePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205002" valueType="Ascii" logicalName="PMC.ChamberBaseTemperatureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205003" valueType="Ascii" logicalName="PMC.ChamberHeater1SetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205004" valueType="Ascii" logicalName="PMC.HeaterChamberSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205005" valueType="Ascii" logicalName="PMC.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205006" valueType="Ascii" logicalName="PMC.CheckATMTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205007" valueType="Ascii" logicalName="PMC.CheckChamberTempTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205008" valueType="Ascii" logicalName="PMC.EnableThrottleValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205009" valueType="Ascii" logicalName="PMC.ForeLineHeaterSetPointLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205010" valueType="Ascii" logicalName="PMC.GasFlowPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205011" valueType="Ascii" logicalName="PMC.GasFlowPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205012" valueType="Ascii" logicalName="PMC.GasFlowTimeInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205013" valueType="Ascii" logicalName="PMC.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205014" valueType="Ascii" logicalName="PMC.HomeTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205015" valueType="Ascii" logicalName="PMC.LEHeaterSetPointLimit1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205016" valueType="Ascii" logicalName="PMC.LEHeaterSetPointLimit2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205017" valueType="Ascii" logicalName="PMC.OpenCloseSlitValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205018" valueType="Ascii" logicalName="PMC.OpenGasValveTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205019" valueType="Ascii" logicalName="PMC.PlaceAndPickDelayTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205020" valueType="Ascii" logicalName="PMC.PostTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205021" valueType="Ascii" logicalName="PMC.PrepareTransferTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205022" valueType="Ascii" logicalName="PMC.ProcessPressureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205023" valueType="Ascii" logicalName="PMC.TargetPressureInMFCVerification" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205024" valueType="Ascii" logicalName="PMC.TimeLimitOfCloseGasValve" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205025" valueType="Ascii" logicalName="PMC.VentTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205026" valueType="Ascii" logicalName="PMC.VentTimeDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205027" valueType="Ascii" logicalName="PMC.GasFlowPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205028" valueType="Ascii" logicalName="PMC.GasFlowPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205029" valueType="Ascii" logicalName="PMC.RecipeToleranceIgnoreTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205030" valueType="Ascii" logicalName="PMC.ProcessPressureAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205031" valueType="Ascii" logicalName="PMC.ProcessPressureAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205032" valueType="Ascii" logicalName="PMC.ProcessPressureWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205033" valueType="Ascii" logicalName="PMC.ProcessPressureWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640205034" valueType="Ascii" logicalName="PMC.CloseDoorDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206001" valueType="Ascii" logicalName="PMC.Chiller1.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206002" valueType="Ascii" logicalName="PMC.Chiller1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206003" valueType="Ascii" logicalName="PMC.Chiller1.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206004" valueType="Ascii" logicalName="PMC.Chiller1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206005" valueType="Ascii" logicalName="PMC.Chiller1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206006" valueType="Ascii" logicalName="PMC.Chiller1.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206007" valueType="Ascii" logicalName="PMC.Chiller1.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206008" valueType="Ascii" logicalName="PMC.Chiller1.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206009" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206010" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206011" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640206012" valueType="Ascii" logicalName="PMC.Chiller1.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207001" valueType="Ascii" logicalName="PMC.Chiller2.ChillerTemperatureOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207002" valueType="Ascii" logicalName="PMC.Chiller2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207003" valueType="Ascii" logicalName="PMC.Chiller2.EnableChiller" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207004" valueType="Ascii" logicalName="PMC.Chiller2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207005" valueType="Ascii" logicalName="PMC.Chiller2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207006" valueType="Ascii" logicalName="PMC.Chiller2.SetPointLimitMax" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207007" valueType="Ascii" logicalName="PMC.Chiller2.SetPointLimitMin" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207008" valueType="Ascii" logicalName="PMC.Chiller2.EnableToleranceAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207009" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207010" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207011" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640207012" valueType="Ascii" logicalName="PMC.Chiller2.ToleranceWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640208001" valueType="Ascii" logicalName="PMC.DryPump.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640208002" valueType="Ascii" logicalName="PMC.DryPump.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640208003" valueType="Ascii" logicalName="PMC.DryPump.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640208004" valueType="Ascii" logicalName="PMC.DryPump.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640208005" valueType="Ascii" logicalName="PMC.DryPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640208006" valueType="Ascii" logicalName="PMC.DryPump.NeedUpdateComm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640209001" valueType="Ascii" logicalName="PMC.ElectrodeHeart1.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640210001" valueType="Ascii" logicalName="PMC.ElectrodeHeart2.Heart" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640211001" valueType="Ascii" logicalName="PMC.EPD.ChannelNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640211002" valueType="Ascii" logicalName="PMC.EPD.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212001" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212002" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212003" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212004" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212005" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212006" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212007" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212008" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212009" valueType="Ascii" logicalName="PMC.HeaterChamber.OffsetValue_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212010" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_1" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212011" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_2" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212012" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_3" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212013" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_4" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212014" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_5" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212015" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_6" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212016" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_7" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212017" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640212018" valueType="Ascii" logicalName="PMC.HeaterChamber.TempOffsetPoint_9" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640213001" valueType="Ascii" logicalName="PMC.IdleClean.IdleCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640213002" valueType="Ascii" logicalName="PMC.IdleClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640213003" valueType="Ascii" logicalName="PMC.IdleClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640214001" valueType="Ascii" logicalName="PMC.JobClean.CompleteJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640214002" valueType="Ascii" logicalName="PMC.JobClean.EnableCompleteJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640214003" valueType="Ascii" logicalName="PMC.JobClean.EnablePreJobClean" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640214004" valueType="Ascii" logicalName="PMC.JobClean.IdleCleanTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640214005" valueType="Ascii" logicalName="PMC.JobClean.IsEnabled" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640214006" valueType="Ascii" logicalName="PMC.JobClean.PreJobCleanRecipe" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640215001" valueType="Ascii" logicalName="PMC.match1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640215002" valueType="Ascii" logicalName="PMC.match1.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640215003" valueType="Ascii" logicalName="PMC.match1.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640215004" valueType="Ascii" logicalName="PMC.match1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640215005" valueType="Ascii" logicalName="PMC.match1.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640215006" valueType="Ascii" logicalName="PMC.match1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640215007" valueType="Ascii" logicalName="PMC.match1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640216001" valueType="Ascii" logicalName="PMC.match2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640216002" valueType="Ascii" logicalName="PMC.match2.EnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640216003" valueType="Ascii" logicalName="PMC.match2.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640216004" valueType="Ascii" logicalName="PMC.match2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640216005" valueType="Ascii" logicalName="PMC.match2.MatchMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640216006" valueType="Ascii" logicalName="PMC.match2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640216007" valueType="Ascii" logicalName="PMC.match2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217001" valueType="Ascii" logicalName="PMC.MfcGas1.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217002" valueType="Ascii" logicalName="PMC.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217003" valueType="Ascii" logicalName="PMC.MfcGas1.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217004" valueType="Ascii" logicalName="PMC.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217005" valueType="Ascii" logicalName="PMC.MfcGas1.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217006" valueType="Ascii" logicalName="PMC.MfcGas1.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217007" valueType="Ascii" logicalName="PMC.MfcGas1.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217008" valueType="Ascii" logicalName="PMC.MfcGas1.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217009" valueType="Ascii" logicalName="PMC.MfcGas1.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217010" valueType="Ascii" logicalName="PMC.MfcGas1.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640217011" valueType="Ascii" logicalName="PMC.MfcGas1.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218001" valueType="Ascii" logicalName="PMC.MfcGas2.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218002" valueType="Ascii" logicalName="PMC.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218003" valueType="Ascii" logicalName="PMC.MfcGas2.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218004" valueType="Ascii" logicalName="PMC.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218005" valueType="Ascii" logicalName="PMC.MfcGas2.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218006" valueType="Ascii" logicalName="PMC.MfcGas2.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218007" valueType="Ascii" logicalName="PMC.MfcGas2.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218008" valueType="Ascii" logicalName="PMC.MfcGas2.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218009" valueType="Ascii" logicalName="PMC.MfcGas2.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218010" valueType="Ascii" logicalName="PMC.MfcGas2.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640218011" valueType="Ascii" logicalName="PMC.MfcGas2.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219001" valueType="Ascii" logicalName="PMC.MfcGas3.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219002" valueType="Ascii" logicalName="PMC.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219003" valueType="Ascii" logicalName="PMC.MfcGas3.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219004" valueType="Ascii" logicalName="PMC.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219005" valueType="Ascii" logicalName="PMC.MfcGas3.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219006" valueType="Ascii" logicalName="PMC.MfcGas3.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219007" valueType="Ascii" logicalName="PMC.MfcGas3.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219008" valueType="Ascii" logicalName="PMC.MfcGas3.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219009" valueType="Ascii" logicalName="PMC.MfcGas3.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219010" valueType="Ascii" logicalName="PMC.MfcGas3.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640219011" valueType="Ascii" logicalName="PMC.MfcGas3.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220001" valueType="Ascii" logicalName="PMC.MfcGas4.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220002" valueType="Ascii" logicalName="PMC.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220003" valueType="Ascii" logicalName="PMC.MfcGas4.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220004" valueType="Ascii" logicalName="PMC.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220005" valueType="Ascii" logicalName="PMC.MfcGas4.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220006" valueType="Ascii" logicalName="PMC.MfcGas4.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220007" valueType="Ascii" logicalName="PMC.MfcGas4.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220008" valueType="Ascii" logicalName="PMC.MfcGas4.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220009" valueType="Ascii" logicalName="PMC.MfcGas4.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220010" valueType="Ascii" logicalName="PMC.MfcGas4.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640220011" valueType="Ascii" logicalName="PMC.MfcGas4.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221001" valueType="Ascii" logicalName="PMC.MfcGas5.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221002" valueType="Ascii" logicalName="PMC.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221003" valueType="Ascii" logicalName="PMC.MfcGas5.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221004" valueType="Ascii" logicalName="PMC.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221005" valueType="Ascii" logicalName="PMC.MfcGas5.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221006" valueType="Ascii" logicalName="PMC.MfcGas5.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221007" valueType="Ascii" logicalName="PMC.MfcGas5.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221008" valueType="Ascii" logicalName="PMC.MfcGas5.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221009" valueType="Ascii" logicalName="PMC.MfcGas5.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221010" valueType="Ascii" logicalName="PMC.MfcGas5.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640221011" valueType="Ascii" logicalName="PMC.MfcGas5.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222001" valueType="Ascii" logicalName="PMC.MfcGas6.DefaultSetPoint" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222002" valueType="Ascii" logicalName="PMC.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222003" valueType="Ascii" logicalName="PMC.MfcGas6.FlowRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222004" valueType="Ascii" logicalName="PMC.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222005" valueType="Ascii" logicalName="PMC.MfcGas6.MfcAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222006" valueType="Ascii" logicalName="PMC.MfcGas6.MfcAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222007" valueType="Ascii" logicalName="PMC.MfcGas6.MfcEnableAlarm" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222008" valueType="Ascii" logicalName="PMC.MfcGas6.MfcN2Scale" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222009" valueType="Ascii" logicalName="PMC.MfcGas6.MfcScaleFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222010" valueType="Ascii" logicalName="PMC.MfcGas6.MfcWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640222011" valueType="Ascii" logicalName="PMC.MfcGas6.MfcWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640223001" valueType="Ascii" logicalName="PMC.Pump.LeakCheckPumpingTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640223002" valueType="Ascii" logicalName="PMC.Pump.LeakCheckWaitTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640223003" valueType="Ascii" logicalName="PMC.Pump.LeakRate" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640223004" valueType="Ascii" logicalName="PMC.Pump.PumpBasePressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640223005" valueType="Ascii" logicalName="PMC.Pump.PumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640223006" valueType="Ascii" logicalName="PMC.Pump.PumpValveDelay" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640224001" valueType="Ascii" logicalName="PMC.Purge.PurgeCycleCount" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640224002" valueType="Ascii" logicalName="PMC.Purge.PurgePumpPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640224003" valueType="Ascii" logicalName="PMC.Purge.PurgePumpStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640224004" valueType="Ascii" logicalName="PMC.Purge.PurgePumpTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640224005" valueType="Ascii" logicalName="PMC.Purge.PurgeVentPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640224006" valueType="Ascii" logicalName="PMC.Purge.PurgeVentStableTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640224007" valueType="Ascii" logicalName="PMC.Purge.PurgeVentTimeLimit" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225001" valueType="Ascii" logicalName="PMC.Rf1.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225002" valueType="Ascii" logicalName="PMC.Rf1.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225003" valueType="Ascii" logicalName="PMC.Rf1.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225004" valueType="Ascii" logicalName="PMC.Rf1.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225005" valueType="Ascii" logicalName="PMC.Rf1.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225006" valueType="Ascii" logicalName="PMC.Rf1.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225007" valueType="Ascii" logicalName="PMC.Rf1.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225008" valueType="Ascii" logicalName="PMC.Rf1.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225009" valueType="Ascii" logicalName="PMC.Rf1.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225010" valueType="Ascii" logicalName="PMC.Rf1.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225011" valueType="Ascii" logicalName="PMC.Rf1.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225012" valueType="Ascii" logicalName="PMC.Rf1.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225013" valueType="Ascii" logicalName="PMC.Rf1.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225014" valueType="Ascii" logicalName="PMC.Rf1.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225015" valueType="Ascii" logicalName="PMC.Rf1.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225016" valueType="Ascii" logicalName="PMC.Rf1.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225017" valueType="Ascii" logicalName="PMC.Rf1.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225018" valueType="Ascii" logicalName="PMC.Rf1.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225019" valueType="Ascii" logicalName="PMC.Rf1.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225020" valueType="Ascii" logicalName="PMC.Rf1.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225021" valueType="Ascii" logicalName="PMC.Rf1.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640225022" valueType="Ascii" logicalName="PMC.Rf1.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226001" valueType="Ascii" logicalName="PMC.Rf2.CalibrationTable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226002" valueType="Ascii" logicalName="PMC.Rf2.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226003" valueType="Ascii" logicalName="PMC.Rf2.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226004" valueType="Ascii" logicalName="PMC.Rf2.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226005" valueType="Ascii" logicalName="PMC.Rf2.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226006" valueType="Ascii" logicalName="PMC.Rf2.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226007" valueType="Ascii" logicalName="PMC.Rf2.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226008" valueType="Ascii" logicalName="PMC.Rf2.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226009" valueType="Ascii" logicalName="PMC.Rf2.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226010" valueType="Ascii" logicalName="PMC.Rf2.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226011" valueType="Ascii" logicalName="PMC.Rf2.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226012" valueType="Ascii" logicalName="PMC.Rf2.PowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226013" valueType="Ascii" logicalName="PMC.Rf2.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226014" valueType="Ascii" logicalName="PMC.Rf2.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226015" valueType="Ascii" logicalName="PMC.Rf2.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226016" valueType="Ascii" logicalName="PMC.Rf2.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226017" valueType="Ascii" logicalName="PMC.Rf2.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226018" valueType="Ascii" logicalName="PMC.Rf2.RfPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226019" valueType="Ascii" logicalName="PMC.Rf2.RFTurnOnTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226020" valueType="Ascii" logicalName="PMC.Rf2.CalibrationTableDetail" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226021" valueType="Ascii" logicalName="PMC.Rf2.PowerWarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640226022" valueType="Ascii" logicalName="PMC.Rf2.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227001" valueType="Ascii" logicalName="PMC.MFCVerification.ChamberVolume" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227002" valueType="Ascii" logicalName="PMC.MFCVerification.CheckStableTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227003" valueType="Ascii" logicalName="PMC.MFCVerification.FlowStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227004" valueType="Ascii" logicalName="PMC.MFCVerification.GasFlowTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227005" valueType="Ascii" logicalName="PMC.MFCVerification.GasTemperature" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227006" valueType="Ascii" logicalName="PMC.MFCVerification.MaxDeviation" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227007" valueType="Ascii" logicalName="PMC.MFCVerification.PressureStableTolerance" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="640227008" valueType="Ascii" logicalName="PMC.MFCVerification.TargetPressure" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101001" valueType="Ascii" logicalName="CarrierInfo.LLABankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101002" valueType="Ascii" logicalName="CarrierInfo.LLABankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101003" valueType="Ascii" logicalName="CarrierInfo.LLACassetteNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101004" valueType="Ascii" logicalName="CarrierInfo.LLBBankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101005" valueType="Ascii" logicalName="CarrierInfo.LLBBankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101006" valueType="Ascii" logicalName="CarrierInfo.LLBCassetteNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101007" valueType="Ascii" logicalName="CarrierInfo.LowerBankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101008" valueType="Ascii" logicalName="CarrierInfo.LowerBankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101009" valueType="Ascii" logicalName="CarrierInfo.UpperBankNumber12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101010" valueType="Ascii" logicalName="CarrierInfo.UpperBankNumber8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101011" valueType="Ascii" logicalName="CarrierInfo.LLAStation12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101012" valueType="Ascii" logicalName="CarrierInfo.LLAStation8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101013" valueType="Ascii" logicalName="CarrierInfo.LLBStation12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101014" valueType="Ascii" logicalName="CarrierInfo.LLBStation8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101015" valueType="Ascii" logicalName="CarrierInfo.PMA1Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101016" valueType="Ascii" logicalName="CarrierInfo.PMA1Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101017" valueType="Ascii" logicalName="CarrierInfo.PMA2Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101018" valueType="Ascii" logicalName="CarrierInfo.PMA2Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101019" valueType="Ascii" logicalName="CarrierInfo.PMB1Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101020" valueType="Ascii" logicalName="CarrierInfo.PMB1Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101021" valueType="Ascii" logicalName="CarrierInfo.PMB2Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101022" valueType="Ascii" logicalName="CarrierInfo.PMB2Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101023" valueType="Ascii" logicalName="CarrierInfo.PMC1Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101024" valueType="Ascii" logicalName="CarrierInfo.PMC1Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101025" valueType="Ascii" logicalName="CarrierInfo.PMC2Station12" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1410101026" valueType="Ascii" logicalName="CarrierInfo.PMC2Station8" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101001" valueType="Ascii" logicalName="FA.DefaultCommunicationState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101002" valueType="Ascii" logicalName="FA.DefaultControlState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101003" valueType="Ascii" logicalName="FA.DefaultControlSubState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101004" valueType="Ascii" logicalName="FA.DeviCollectionEvent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101005" valueType="Ascii" logicalName="FA.EnableSpooling" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101006" valueType="Ascii" logicalName="FA.LinkTestInterval" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101007" valueType="Ascii" logicalName="FA.LocalIpAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101008" valueType="Ascii" logicalName="FA.LocalPortNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101009" valueType="Ascii" logicalName="FA.RemoteIpAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101010" valueType="Ascii" logicalName="FA.RemotePortNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101011" valueType="Ascii" logicalName="FA.T3Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101012" valueType="Ascii" logicalName="FA.T5Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101013" valueType="Ascii" logicalName="FA.T6Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101014" valueType="Ascii" logicalName="FA.T7Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101015" valueType="Ascii" logicalName="FA.T8Timeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101016" valueType="Ascii" logicalName="FA.ConnectionMode" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101017" valueType="Ascii" logicalName="FA.LP1DefaultTransferState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101018" valueType="Ascii" logicalName="FA.LP2DefaultTransferState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
    <EquipmentConstant id="1420101019" valueType="Ascii" logicalName="FA.LP3DefaultTransferState" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
  </EquipmentConstants>
  <DataVariables>
    <DataVariable id="3007" valueType="I4" logicalName="ECChangedID" eventTrigger="" />
    <DataVariable id="3102" valueType="Ascii" logicalName="LotID" eventTrigger="" />
    <DataVariable id="3103" valueType="Ascii" logicalName="RecipeID" eventTrigger="" />
    <DataVariable id="3104" valueType="Ascii" logicalName="JobID" eventTrigger="" />
    <DataVariable id="3105" valueType="Ascii" logicalName="CarrierID" eventTrigger="" />
    <DataVariable id="3106" valueType="Ascii" logicalName="SlotMap" eventTrigger="" />
    <DataVariable id="3107" valueType="Ascii" logicalName="SequenceID" eventTrigger="" />
    <DataVariable id="3108" valueType="Ascii" logicalName="StationName" eventTrigger="" />
    <DataVariable id="3109" valueType="Ascii" logicalName="RecipeStepNumber" eventTrigger="" />
    <DataVariable id="3110" valueType="Ascii" logicalName="SlotID" eventTrigger="" />
    <DataVariable id="3113" valueType="I4" logicalName="PortID" eventTrigger="" />
    <DataVariable id="3124" valueType="I4" logicalName="ProcessedWaferCount" eventTrigger="" />
    <DataVariable id="3125" valueType="I4" logicalName="WaferProcessResult" eventTrigger="" />
    <DataVariable id="3404" valueType="Ascii" logicalName="SubstID" eventTrigger="" />
    <DataVariable id="3405" valueType="Ascii" logicalName="SubstLocID" eventTrigger="" />
    <DataVariable id="3406" valueType="I4" logicalName="SubstLocState" eventTrigger="" />
    <DataVariable id="3503" valueType="Ascii" logicalName="SmartTag" eventTrigger="" />
    <DataVariable id="10000" valueType="Ascii" logicalName="ControlJobID" eventTrigger="" />
    <DataVariable id="10001" valueType="I4" logicalName="ControlJobState" eventTrigger="" />
    <DataVariable id="10002" valueType="I4" logicalName="PortTransferState" eventTrigger="" />
  </DataVariables>
  <AlarmVariables>
    <AlarmVariable id="10101001" logicalName="ERR_LOGOFF_ERROR" description="注销用户发生异常" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101002" logicalName="ERR_UPDATE_PW_ERROR" description="修改账号的密码失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101003" logicalName="ERR_DELETE_USER_ERROR" description="删除账号发生异常" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101004" logicalName="ERR_UPDATE_USER_ERROR" description="更新账号资料发生异常" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101005" logicalName="ERR_WCF_OPEN_ERROR" description="wcf未能打开" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101006" logicalName="ERR_ROUTINE_FAILED" description="例程失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101007" logicalName="ERR_SIGNAL_TOWER_UNDEFINE" description="未定义信号" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101008" logicalName="ERR_SIGNAL_TOWER_INVALID_CFG" description="信号塔配置文件设置无效报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101009" logicalName="ERR_PLC_HEARTBEAT_FAIL" description="心跳停止,判PLC运行失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101010" logicalName="ERR_DEVICE_INFO" description="设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
    <AlarmVariable id="10101011" logicalName="ERR_EXCEPTION" description="设备异常报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101012" logicalName="ERR_WAFER_MANAGER_FAILED" description="晶圆管理失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101013" logicalName="ERR_FSM_FAILED" description="FSM失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101014" logicalName="ERR_ROUTER" description="状态机报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101015" logicalName="ERR_SEQUENCE" description="序列失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101016" logicalName="ERR_INTERLOCK_FAIL" description="互锁失败报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101017" logicalName="ERR_DEVICE_ENTITY" description="设备状态机错误" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101028" logicalName="ERR_EFEM_COMMON_FAILED" description="EFEM报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101029" logicalName="ERR_EFEM_ROBOT" description="EFEM机器人报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101030" logicalName="ERR_EFEM_VAC_SOURCE_PRESSURE_LOW" description="EFEM报错解析，压力低" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101031" logicalName="ERR_EFEM_IONIZER_COMPRESSED_AIR" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101032" logicalName="ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101033" logicalName="ERR_EFEM_FLOW_GUAGE_SENSOR" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101034" logicalName="ERR_EFEM_LEAKAGE" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101035" logicalName="ERR_EFEM_IONIZER" description="EFEM报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101036" logicalName="ERR_EFEM_FFU" description="EFEM报错解析，ffu" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101037" logicalName="ERR_EFEM_SWITCH_TO_MAINTAIN_MODE" description="EFEM报错解析，维护模式" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101056" logicalName="ERR_TM_ROBOT" description="TM机器人报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101057" logicalName="ERR_TM" description="TM报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101058" logicalName="ERR_TM_HEARTBEAT" description="TM PLC心跳停止" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101059" logicalName="ERR_TM_ROBOT_PICKSLOTOVERRANGE" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101060" logicalName="ERR_TM_ROBOT_PLACESLOTOVERRange" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101061" logicalName="ERR_TM_ROBOT_SETINTLOCKWAF_SEN" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101062" logicalName="ERR_TM_ROBOT_SETINTLOCKRZ" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101063" logicalName="ERR_TM_ROBOT_SETINTLOCK" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101064" logicalName="ERR_TM_ROBOT_SETIOECHO" description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101065" logicalName="ERR_TM_ROBOT_SETIOSTATE " description="TM 报错解析" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101066" logicalName="ERR_TM_PUPMCONNECT" description="TM 干泵连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101067" logicalName="ERR_TM_LeakCheck" description="TM漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101068" logicalName="ERR_TM_LL_PressureDifference" description="TM LL压差过大，不能开门" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101069" logicalName="ERR_TM_PM_PressureDifference" description="TM PM压差过大，不能开门" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101084" logicalName="ERR_LLA_PUPMCONNECT" description="LLA 干泵连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101085" logicalName="ERR_LLB_PUPMCONNECT" description=" LLB 干泵连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101086" logicalName="ERR_LLA_MFC1FLOWOVERRANGE" description="LLA 流气超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101087" logicalName="ERR_LLB_MFC1FLOWOVERRANGE" description="LLB 流气超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101088" logicalName="ERR_LLA_MFCPRESSURE" description="LLA 压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101089" logicalName="ERR_LLB_MFCPRESSURE" description="LLB 压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101090" logicalName="ERR_LLA_LeakCheck" description="LLA漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101091" logicalName="ERR_LLB_LeakCheck" description="LLB漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101092" logicalName="ERR_LLA_Vent" description="LLA vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101093" logicalName="ERR_LLA_PumpDown" description="LLA pumpdown失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101094" logicalName="ERR_LLB_Vent" description="LLB vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101095" logicalName="ERR_LLB_PumpDown" description="LLB pumpdown失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101100" logicalName="ERR_PMA_DEVICE_IO_HEATER" description="IO加热报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101101" logicalName="ERR_PMA_DRY_PUMP" description="干泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101102" logicalName="ERR_PMA_PENDULUM_VALVE" description="钟摆阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101103" logicalName="ERR_PMA_ESC_HV" description="ESC高压告警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101104" logicalName="ERR_PMA_TURBO_PUMP" description="分子泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101105" logicalName="ERR_PMA_RF" description="射频报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101106" logicalName="ERR_PMA_DEVICE_CHILLER" description="冷水机报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101107" logicalName="ERR_PMA_ENDPOINT" description="EPD设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101108" logicalName="ERR_PMA_BACKSIDE_HE" description="氦气报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101109" logicalName="ERR_PMA_PROCESS" description="过程报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101110" logicalName="ERR_PMA_IoGasValve" description="气体阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101111" logicalName="ERR_PMA_PM" description="腔体报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101112" logicalName="ERR_PMA_Sensor" description="传感器报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101113" logicalName="ERR_PMA_IO_VALVE" description="IO阀门报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101114" logicalName="ERR_PMA_MATCH" description="射频匹配报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101115" logicalName="ERR_PMA_RFBox" description="RF Box报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101116" logicalName="ERR_PMA_HighTemperatureHeater" description="高温加热器错误" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101117" logicalName="ERR_PMA_PM_TOLERANCE" description="PM误差报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101118" logicalName="ERR_PMA_HEARTBEAT" description=" PLC心跳停止" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101119" logicalName="ERR_PMA_RF_Connect" description="RF连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101120" logicalName="ERR_PMA_RF_WaterFlow" description="开RF Water flow条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101121" logicalName="ERR_PMA_RF_RFGInterlock" description="开RF PLC interlock条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101122" logicalName="ERR_PMA_RF_GASOFF" description="流气关闭，RF自动关闭" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101123" logicalName="ERR_PMA_PV_INTERLOCK_FORELINRPRESSURE" description="开钟摆阀，foreline压力不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101124" logicalName="ERR_PMA_PV_INTERLOCK_TURBOPUMPNOTATSPEED" description="开钟摆阀，turbo 速度条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101125" logicalName="ERR_PMA_PV_PARITY" description="钟摆阀报错parity" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101126" logicalName="ERR_PMA_MFC_MFC1FLOWOVERRANGE" description="mfc1流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101127" logicalName="ERR_PMA_MFC_MFC2FLOWOVERRANGE" description="mfc2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101128" logicalName="ERR_PMA_MFC_MFC3FLOWOVERRANGE" description="mfc3流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101129" logicalName="ERR_PMA_MFC_MFC4FLOWOVERRANGE" description="mfc4流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101130" logicalName="ERR_PMA_MFC_MFC5FLOWOVERRANGE" description="mfc5流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101131" logicalName="ERR_PMA_MFC_MFC6FLOWOVERRANGE" description="mfc6流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101132" logicalName="ERR_PMA_MFC_MFC7FLOWOVERRANGE" description="mfc7流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101133" logicalName="ERR_PMA_MFC_MFC8FLOWOVERRANGE" description="mfc8流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101134" logicalName="ERR_PMA_MFC_N2FLOWOVERRANGE" description="N2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101135" logicalName="ERR_PMA_MFC1_PRESSURE" description="mfc1压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101136" logicalName="ERR_PMA_MFC2_PRESSURE" description="mfc2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101137" logicalName="ERR_PMA_MFC3_PRESSURE" description="mfc3压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101138" logicalName="ERR_PMA_MFC4_PRESSURE" description="mfc4压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101139" logicalName="ERR_PMA_MFC5_PRESSURE" description="mfc5压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101140" logicalName="ERR_PMA_MFC6_PRESSURE" description="mfc6压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101141" logicalName="ERR_PMA_MFC7_PRESSURE" description="mfc7压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101142" logicalName="ERR_PMA_MFC8_PRESSURE" description="mfc8压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101143" logicalName="ERR_PMA_N2_PRESSURE" description="N2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101144" logicalName="ERR_PMA_HighTemperatureHeater_SetRatio_OverRange" description="Heater set ratio 超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101145" logicalName="ERR_PMA_HighTemperatureHeater_SetTemperature_OverRange" description="Heater set 温度超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101146" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition1TimeOut" description="Heater去位置1超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101147" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition2TimeOut" description="Heater去位置2超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101148" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition3TimeOut" description="Heater去位置3超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101149" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition4TimeOut" description="Heater去位置4超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101150" logicalName="ERR_PMA_HighTemperatureHeater_GoPosition5TimeOut" description="Heater去位置5超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101151" logicalName="ERR_PMA_HighTemperatureHeater_TransferPosition" description="pick/place heater不在传送位置" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101152" logicalName="ERR_PMA_HighTemperatureHeater_LiftDriverAlarm" description="plc heater driver报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101153" logicalName="ERR_PMA_HighTemperatureHeater_LiftPosiModuleAlarm" description="heater lift 位置报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101154" logicalName="ERR_PMA_HighTemperatureHeater_LiftORGAlarm" description="heater lift 原点报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101155" logicalName="ERR_PMA_HighTemperatureHeater_GoOriginTimeOut" description="Heater 去原点超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101156" logicalName="ERR_PMA_LeakCheck" description="漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101157" logicalName="ERR_PMA_Vent" description="Vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101158" logicalName="ERR_PMA_PumpDown" description="pump down失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101176" logicalName="ERR_PMB_DEVICE_IO_HEATER" description="IO加热报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101177" logicalName="ERR_PMB_DRY_PUMP" description="干泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101178" logicalName="ERR_PMB_PENDULUM_VALVE" description="钟摆阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101179" logicalName="ERR_PMB_ESC_HV" description="ESC高压告警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101180" logicalName="ERR_PMB_TURBO_PUMP" description="分子泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101181" logicalName="ERR_PMB_RF" description="射频报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101182" logicalName="ERR_PMA_DEVICE_CHILLER" description="冷水机报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101183" logicalName="ERR_PMB_ENDPOINT" description="EPD设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101184" logicalName="ERR_PMB_BACKSIDE_HE" description="氦气报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101185" logicalName="ERR_PMB_PROCESS" description="过程报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101186" logicalName="ERR_PMB_IoGasValve" description="气体阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101187" logicalName="ERR_PMB_PM" description="腔体报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101188" logicalName="ERR_PMB_Sensor" description="传感器报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101189" logicalName="ERR_PMB_IO_VALVE" description="IO阀门报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101190" logicalName="ERR_PMB_MATCH" description="射频匹配报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101191" logicalName="ERR_PMB_RFBox" description="RF Box报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101192" logicalName="ERR_PMB_HighTemperatureHeater" description="高温加热器错误" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101193" logicalName="ERR_PMB_PM_TOLERANCE" description="PM误差报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101194" logicalName="ERR_PMB_HEARTBEAT" description=" PLC心跳停止" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101195" logicalName="ERR_PMB_RF_Connect" description="RF连接失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101196" logicalName="ERR_PMB_RF_WaterFlow" description="开RF Water flow条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101197" logicalName="ERR_PMB_RF_RFGInterlock" description="开RF PLC interlock条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101198" logicalName="ERR_PMB_RF_GASOFF" description="流气关闭，RF自动关闭" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101199" logicalName="ERR_PMB_PV_INTERLOCK_FORELINRPRESSURE" description="开钟摆阀，foreline压力不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101200" logicalName="ERR_PMB_PV_INTERLOCK_TURBOPUMPNOTATSPEED" description="开钟摆阀，turbo 速度条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101201" logicalName="ERR_PMB_PV_PARITY" description="钟摆阀报错parity" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101202" logicalName="ERR_PMB_MFC_MFC1FLOWOVERRANGE" description="mfc1流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101203" logicalName="ERR_PMB_MFC_MFC2FLOWOVERRANGE" description="mfc2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101204" logicalName="ERR_PMB_MFC_MFC3FLOWOVERRANGE" description="mfc3流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101205" logicalName="ERR_PMB_MFC_MFC4FLOWOVERRANGE" description="mfc4流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101206" logicalName="ERR_PMB_MFC_MFC5FLOWOVERRANGE" description="mfc5流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101207" logicalName="ERR_PMB_MFC_MFC6FLOWOVERRANGE" description="mfc6流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101208" logicalName="ERR_PMB_MFC_MFC7FLOWOVERRANGE" description="mfc7流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101209" logicalName="ERR_PMB_MFC_MFC8FLOWOVERRANGE" description="mfc8流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101210" logicalName="ERR_PMB_MFC_N2FLOWOVERRANGE" description="N2流气误差大" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101211" logicalName="ERR_PMB_MFC1_PRESSURE" description="mfc1压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101212" logicalName="ERR_PMB_MFC2_PRESSURE" description="mfc2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101213" logicalName="ERR_PMB_MFC3_PRESSURE" description="mfc3压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101214" logicalName="ERR_PMB_MFC4_PRESSURE" description="mfc4压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101215" logicalName="ERR_PMB_MFC5_PRESSURE" description="mfc5压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101216" logicalName="ERR_PMB_MFC6_PRESSURE" description="mfc6压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101217" logicalName="ERR_PMB_MFC7_PRESSURE" description="mfc7压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101218" logicalName="ERR_PMB_MFC8_PRESSURE" description="mfc8压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101219" logicalName="ERR_PMB_N2_PRESSURE" description="N2压力条件不满足" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101220" logicalName="ERR_PMB_HighTemperatureHeater_SetRatio_OverRange" description="Heater set ratio 超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101221" logicalName="ERR_PMB_HighTemperatureHeater_SetTemperature_OverRange" description="Heater set 温度超范围" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101222" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition1TimeOut" description="Heater去位置1超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101223" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition2TimeOut" description="Heater去位置2超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101224" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition3TimeOut" description="Heater去位置3超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101225" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition4TimeOut" description="Heater去位置4超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101226" logicalName="ERR_PMB_HighTemperatureHeater_GoPosition5TimeOut" description="Heater去位置5超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101227" logicalName="ERR_PMB_HighTemperatureHeater_TransferPosition" description="pick/place heater不在传送位置" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101228" logicalName="ERR_PMB_HighTemperatureHeater_LiftDriverAlarm" description="plc heater driver报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101229" logicalName="ERR_PMB_HighTemperatureHeater_LiftPosiModuleAlarm" description="heater lift 位置报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101230" logicalName="ERR_PMB_HighTemperatureHeater_LiftORGAlarm" description="heater lift 原点报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101231" logicalName="ERR_PMB_HighTemperatureHeater_GoOriginTimeOut" description="Heater 去原点超时" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101232" logicalName="ERR_PMB_LeakCheck" description="漏气检测失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101233" logicalName="ERR_PMB_Vent" description="Vent失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	<AlarmVariable id="10101234" logicalName="ERR_PMB_PumpDown" description="pump down失败" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
  </AlarmVariables>
  <Reports>
    <Report id="1" logicalName="HostDefinedReport_1">
      <Variables>
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
        <ReportVariable id="4" variableType="StatusVariable" logicalName="ControlState" />
      </Variables>
    </Report>
    <Report id="10" logicalName="HostDefinedReport_10">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="11" logicalName="HostDefinedReport_11">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="12" logicalName="HostDefinedReport_12">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="13" logicalName="HostDefinedReport_13">
      <Variables>
        <ReportVariable id="3106" variableType="DataVariable" logicalName="SlotMap" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="14" logicalName="HostDefinedReport_14">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="15" logicalName="HostDefinedReport_15">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="16" logicalName="HostDefinedReport_16">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="17" logicalName="HostDefinedReport_17">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="18" logicalName="HostDefinedReport_18">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="19" logicalName="HostDefinedReport_19">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="2" logicalName="HostDefinedReport_2">
      <Variables>
        <ReportVariable id="3007" variableType="DataVariable" logicalName="ECChangedID" />
      </Variables>
    </Report>
    <Report id="20" logicalName="HostDefinedReport_20">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="21" logicalName="HostDefinedReport_21">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3124" variableType="DataVariable" logicalName="ProcessedWaferCount" />
      </Variables>
    </Report>
    <Report id="22" logicalName="HostDefinedReport_22">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="23" logicalName="HostDefinedReport_23">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="24" logicalName="HostDefinedReport_24">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
      </Variables>
    </Report>
    <Report id="25" logicalName="HostDefinedReport_25">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="26" logicalName="HostDefinedReport_26">
      <Variables>
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3125" variableType="DataVariable" logicalName="WaferProcessResult" />
      </Variables>
    </Report>
    <Report id="29" logicalName="HostDefinedReport_29">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3109" variableType="DataVariable" logicalName="RecipeStepNumber" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="3" logicalName="HostDefinedReport_3">
      <Variables>
        <ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
        <ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
        <ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="30" logicalName="HostDefinedReport_30">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3109" variableType="DataVariable" logicalName="RecipeStepNumber" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="31" logicalName="HostDefinedReport_31">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
      </Variables>
    </Report>
    <Report id="32" logicalName="HostDefinedReport_32">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="33" logicalName="HostDefinedReport_33">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="34" logicalName="HostDefinedReport_34">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="35" logicalName="HostDefinedReport_35">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="36" logicalName="HostDefinedReport_36">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="37" logicalName="HostDefinedReport_37">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="38" logicalName="HostDefinedReport_38">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="39" logicalName="HostDefinedReport_39">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="4" logicalName="HostDefinedReport_4">
      <Variables>
        <ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
        <ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
        <ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="40" logicalName="HostDefinedReport_40">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="41" logicalName="HostDefinedReport_41">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="42" logicalName="HostDefinedReport_42">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="43" logicalName="HostDefinedReport_43">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="44" logicalName="HostDefinedReport_44">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="45" logicalName="HostDefinedReport_45">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="46" logicalName="HostDefinedReport_46">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="47" logicalName="HostDefinedReport_47">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="48" logicalName="HostDefinedReport_48">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="49" logicalName="HostDefinedReport_49">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="5" logicalName="HostDefinedReport_5">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="50" logicalName="HostDefinedReport_50">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="51" logicalName="HostDefinedReport_51">
      <Variables>
        <ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
        <ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
        <ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
      </Variables>
    </Report>
    <Report id="6" logicalName="HostDefinedReport_6">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="7" logicalName="HostDefinedReport_7">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3503" variableType="DataVariable" logicalName="SmartTag" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="8" logicalName="HostDefinedReport_8">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="9" logicalName="HostDefinedReport_9">
      <Variables>
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
      </Variables>
    </Report>
    <Report id="10000" logicalName="Define_10000">
      <Variables>
        <ReportVariable id="10000" variableType="DataVariable" logicalName="ControlJobID" />
        <ReportVariable id="10001" variableType="DataVariable" logicalName="ControlJobState" />
      </Variables>
    </Report>
    <Report id="10001" logicalName="Define_10001">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="10002" variableType="DataVariable" logicalName="PortTransferState" />
      </Variables>
    </Report>
    <Report id="10002" logicalName="Define_10002">
      <Variables>
        <ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
        <ReportVariable id="10002" variableType="DataVariable" logicalName="PortTransferState" />
        <ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
      </Variables>
    </Report>
  </Reports>
  <CollectionEvents>
    <CollectionEvent id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
      <Reports>
        <int>1</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="2" logicalName="ControlStateLOCAL" description="" enabled="true">
      <Reports>
        <int>1</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3" logicalName="ControlStateREMOTE" description="" enabled="true">
      <Reports>
        <int>1</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="8" logicalName="EquipmentConstantChanged" description="" enabled="true">
      <Reports>
        <int>2</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="160" logicalName="SpoolingActivated" description="" enabled="true">
      <Reports />
    </CollectionEvent>
    <CollectionEvent id="161" logicalName="SpoolingDeactivated" description="" enabled="true">
      <Reports />
    </CollectionEvent>
    <CollectionEvent id="162" logicalName="SpoolingFailed" description="" enabled="true">
      <Reports />
    </CollectionEvent>
    <CollectionEvent id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="true">
      <Reports>
        <int>3</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="504" logicalName="WAFER_ARRIVE_POSITION" description="" enabled="true">
      <Reports>
        <int>4</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1000" logicalName="CARRIER_ARRIVED" description="" enabled="true">
      <Reports>
        <int>5</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1001" logicalName="CARRIER_REMOVED" description="" enabled="true">
      <Reports>
        <int>6</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1002" logicalName="CARRIER_ID_READ" description="" enabled="true">
      <Reports>
        <int>7</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1003" logicalName="CARRIER_ID_READ_FAILED" description="" enabled="true">
      <Reports>
        <int>8</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1004" logicalName="CARRIER_ID_WRITE" description="" enabled="true">
      <Reports>
        <int>9</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1005" logicalName="CARRIER_ID_WRITE_FAILED" description="" enabled="true">
      <Reports>
        <int>10</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1006" logicalName="CARRIER_LOADED" description="" enabled="true">
      <Reports>
        <int>11</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1007" logicalName="CARRIER_UNLOADED" description="" enabled="true">
      <Reports>
        <int>12</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1008" logicalName="SLOT_MAP_AVAILABLE" description="" enabled="true">
      <Reports>
        <int>13</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1012" logicalName="PortClamped" description="" enabled="true">
      <Reports>
        <int>14</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1013" logicalName="PortUnClamped" description="" enabled="true">
      <Reports>
        <int>15</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1022" logicalName="PortJobStarted" description="" enabled="true">
      <Reports>
        <int>16</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1023" logicalName="PortJobStopped" description="" enabled="true">
      <Reports>
        <int>17</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1024" logicalName="PortJobPaused" description="" enabled="true">
      <Reports>
        <int>18</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1025" logicalName="PortJobResumed" description="" enabled="true">
      <Reports>
        <int>19</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1026" logicalName="PortJobAborted" description="" enabled="true">
      <Reports>
        <int>20</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1027" logicalName="PortJobFinished" description="" enabled="true">
      <Reports>
        <int>21</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1028" logicalName="PortJobFailed" description="" enabled="true">
      <Reports>
        <int>22</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1030" logicalName="PortPPSelected" description="" enabled="true">
      <Reports>
        <int>23</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1031" logicalName="PortPPSelectFailed" description="" enabled="true">
      <Reports>
        <int>24</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1032" logicalName="PortJobWaferStart" description="" enabled="true">
      <Reports>
        <int>25</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="1033" logicalName="PortJobWaferEnd" description="" enabled="true">
      <Reports>
        <int>26</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3001" logicalName="PMARecipeStart" description="" enabled="true">
      <Reports>
        <int>33</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3002" logicalName="PMARecipeComplete" description="" enabled="true">
      <Reports>
        <int>34</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3003" logicalName="PMARecipeStepStart" description="" enabled="true">
      <Reports>
        <int>35</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3004" logicalName="PMARecipeStepEnd" description="" enabled="true">
      <Reports>
        <int>36</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3005" logicalName="PMARecipeFailed" description="" enabled="true">
      <Reports>
        <int>37</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3011" logicalName="PMBRecipeStart" description="" enabled="true">
      <Reports>
        <int>38</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3012" logicalName="PMBRecipeComplete" description="" enabled="true">
      <Reports>
        <int>39</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3013" logicalName="PMBRecipeStepStart" description="" enabled="true">
      <Reports>
        <int>40</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3014" logicalName="PMBRecipeStepEnd" description="" enabled="true">
      <Reports>
        <int>41</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3015" logicalName="PMBRecipeFailed" description="" enabled="true">
      <Reports>
        <int>42</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3021" logicalName="PMCRecipeStart" description="" enabled="true">
      <Reports>
        <int>43</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3022" logicalName="PMCRecipeComplete" description="" enabled="true">
      <Reports>
        <int>44</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3023" logicalName="PMCRecipeStepStart" description="" enabled="true">
      <Reports>
        <int>45</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3024" logicalName="PMCRecipeStepEnd" description="" enabled="true">
      <Reports>
        <int>46</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3025" logicalName="PMCRecipeFailed" description="" enabled="true">
      <Reports>
        <int>47</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3031" logicalName="PMDRecipeStart" description="" enabled="true">
      <Reports>
        <int>48</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3032" logicalName="PMDRecipeComplete" description="" enabled="true">
      <Reports>
        <int>49</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3033" logicalName="PMDRecipeStepStart" description="" enabled="true">
      <Reports>
        <int>50</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3034" logicalName="PMDRecipeStepEnd" description="" enabled="true">
      <Reports>
        <int>51</int>
      </Reports>
    </CollectionEvent>
    <CollectionEvent id="3035" logicalName="PMDRecipeFailed" description="" enabled="true">
      <Reports>
        <int>32</int>
      </Reports>
    </CollectionEvent>
  </CollectionEvents>
</EquipmentVariables>