Kepler-Release/Venus/Venus_RT/Config/TM/DeviceModelVenusSE_MF.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="TM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
	<IoValves>
		<IoValve id="TMFastPumpValve" display="TM Fast Pump Valve" schematicId="FastPumpTM" unit="" isNc="true"
	        isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Pumping" diCloseSensor="" diOpenSensor="" />
		<IoValve id="TMSoftPumpValve" display="TM Soft Pump Valve" schematicId="SoftPumpTM" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Soft_Pumping" diCloseSensor="" diOpenSensor="" />
		<IoValve id="VCESoftPumpValve" display="VCE Soft Pump Valve" schematicId="SoftPumpVCE" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Soft_Pumping" diCloseSensor="" diOpenSensor="" />
		<IoValve id="VCEFastPumpValve" display="VCE Fast Pump Valve" schematicId="FastPumpVCE" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Fast_Pumping" diCloseSensor="" diOpenSensor="" />
		<IoValve id="TMFastVentValve" display="TM Fast Vent Valve" schematicId="FastVentTM" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Vent" diCloseSensor="" diOpenSensor="" />
		<IoValve id="TMSoftVentValve" display="TM Soft Vent Valve" schematicId="SoftVentTM" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Soft_Vent" diCloseSensor="" diOpenSensor="" />
		<IoValve id="VCESoftVentValve" display="VCE Soft Vent Valve" schematicId="SoftVentVCE" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Soft_Vent" diCloseSensor="" diOpenSensor="" />
		<IoValve id="VCEFastVentValve" display="VCE Fast Vent Valve" schematicId="FastVentVCE" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Fast_Vent" diCloseSensor="" diOpenSensor="" />
	</IoValves>

	<IoSensors>
		<IoSensor id="VCESlitDoorOpenEnable" display="VCE Slit Door Open Enable"  schematicId="" unit="" di="DI_VCE_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="PMASlitDoorOpenEnable" display="PMA Slit Door Open Enable"  schematicId="" unit="" di="DI_PMA_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
						infoText="" warningText="" alarmText="" />
		<IoSensor id="PMBSlitDoorOpenEnable" display="PMB Slit Door Open Enable"  schematicId="" unit="" di="DI_PMB_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="PMCSlitDoorOpenEnable" display="PMC Slit Door Open Enable"  schematicId="" unit="" di="DI_PMC_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		
		<IoSensor id="VCESlitDoorCloseEnable" display="VCE Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_VCE" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="PMASlitDoorCloseEnable" display="PMA Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_PMA" isLowAsNormal="" textOutTrigValue="false"
						infoText="" warningText="" alarmText="" />
		<IoSensor id="PMBSlitDoorCloseEnable" display="PMB Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_PMB" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="PMCSlitDoorCloseEnable" display="PMC Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_PMC" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		
		<IoSensor id="TMVACSensor" display="TM VAC Sensor"  schematicId="" unit="" di="DI_TM_VAC_SW" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="VCEVACSensor" display="VCE VAC Sensor"  schematicId="" unit="" di="DI_VCE_VAC_SW" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="TMATMSensor" display="TM ATM Sensor"  schematicId="" unit="" di="DI_TM_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="VCEATMSensor" display="VCE ATM Sensor"  schematicId="" unit="" di="DI_VCE_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="ROBOTNotExtendVCE" display="ROBOT Not Extend VCE"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_VCE" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		<IoSensor id="VCELOCKED" display="ROBOT Not Extend VCE"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_VCE" isLowAsNormal="" textOutTrigValue="false"
				infoText="" warningText="" alarmText="" />
		
	</IoSensors>
	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
		<IoCylinder id="VCESlitDoor" display="VCE Slit Door" schematicId="" unit="" doMotorRelay=""
                doON="DO_VCE_Slit_Door_Open" doOFF="DO_VCE_Slit_Door_Close" diON="DI_VCE_TM_Slit_Door_Open_Pos" diOFF="DI_VCE_TM_Slit_Door_Close_Pos" />
		<IoCylinder id="PMASlitDoor" display="PMA Slit Door" schematicId="" unit="" doMotorRelay=""
                doON="DO_PMA_Slit_Door_Open" doOFF="DO_PMA_Slit_Door_Close" diON="DI_TM_PMA_Slit_Door_Open_Pos" diOFF="DI_TM_PMA_Slit_Door_Close_Pos" />
		<IoCylinder id="PMBSlitDoor" display="PMB Slit Door" schematicId="" unit="" doMotorRelay=""
				doON="DO_PMB_Slit_Door_Open" doOFF="DO_PMB_Slit_Door_Close" diON="DI_TM_PMB_Slit_Door_Open_Pos" diOFF="DI_TM_PMB_Slit_Door_Close_Pos" />
		<IoCylinder id="PMCSlitDoor" display="PMC Slit Door" schematicId="" unit="" doMotorRelay=""
                doON="DO_PMC_Slit_Door_Open" doOFF="DO_PMC_Slit_Door_Close" diON="DI_TM_PMC_Slit_Door_Open_Pos" diOFF="DI_TM_PMC_Slit_Door_Close_Pos" />
	</IoCylinders>

	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
		<IoPressureMeter id="TMPressure" display="TM Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_TM_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
		<IoPressureMeter id="TMPipelinePressure" display="TM Pipeline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
		<IoPressureMeter id="VCEPressure" display="VCE Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
	</IoPressureMeters>
	
	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
		<IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
				aiFlow="AI_MFC_Flow" aoFlow="AO_MFC_Flow_Setpoint" diOffline="" aoRange=""
				diPressureAlarm="DI_SYSTEM_N2_Pressure_SW"/>
	</IoMfcs>
  
  <IoHongHuControls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHongHuControl">
    <IoHongHuControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="sccm" doMFCFlow="DO_Flow_Mode" doPressureMode="DO_Pressure_Mode" doVent="DO_TM_Soft_Vent" doPump="DO_TM_Soft_Pumping" aoMFCFlow="AO_MFC_Flow_Setpoint" aoPressure="AO_TM_Pressure_SetPoint"/>
  </IoHongHuControls>
	
</DeviceModelDefine>