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- <?xml version="1.0" encoding="utf-8" ?>
- <DeviceModelDefine type="TM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
- <IoValves>
- <IoValve id="TMFastPumpValve" display="TM Fast Pump Valve" schematicId="FastPumpTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="DI_TM_Fast_Pump" doOpen="DO_TM_Fast_Pump" diCloseSensor="" diOpenSensor="" />
- <IoValve id="TMSoftPumpValve" display="TM Soft Pump Valve" schematicId="SoftPumpTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="DI_TM_Soft_Pump" doOpen="DO_TM_Soft_Pump" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEASoftPumpValve" display="VCEA Soft Pump Valve" schematicId="SoftPumpVCEA" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Pump" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEAFastPumpValve" display="VCEA Fast Pump Valve" schematicId="FastPumpVCEA" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Pump" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEBSoftPumpValve" display="VCEB Soft Pump Valve" schematicId="SoftPumpVCEB" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Pump" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEBFastPumpValve" display="VCEB Fast Pump Valve" schematicId="FastPumpVCEB" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Pump" diCloseSensor="" diOpenSensor="" />
- <IoValve id="TMFastVentValve" display="TM Fast Vent Valve" schematicId="FastVentTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Vent" diCloseSensor="" diOpenSensor="" />
- <IoValve id="TMSoftVentValve" display="TM Soft Vent Valve" schematicId="SoftVentTM" unit="" isNc="true"
- isDefaultOpen="false" diOpen="DI_TM_Soft_Vent" doOpen="DO_TM_Soft_Vent" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEASoftVentValve" display="VCEA Soft Vent Valve" schematicId="SoftVentVCEA" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Vent" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEAFastVentValve" display="VCEA Fast Vent Valve" schematicId="FastVentVCEA" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Vent" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEBSoftVentValve" display="VCEB Soft Vent Valve" schematicId="SoftVentVCEB" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Vent" diCloseSensor="" diOpenSensor="" />
- <IoValve id="VCEBFastVentValve" display="VCEB Fast Vent Valve" schematicId="FastVentVCEB" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Vent" diCloseSensor="" diOpenSensor="" />
- </IoValves>
- <IoSensors>
- <IoSensor id="TMATMSensor" display="TM ATM Sensor" schematicId="" unit="" di="DI_TM_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEAATMSensor" display="VCEA ATM Sensor" schematicId="" unit="" di="DI_VCEA_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEBATMSensor" display="VCEB ATM Sensor" schematicId="" unit="" di="DI_VCEB_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEACasSensor" display="VCEB Cassette Sensor" schematicId="" unit="" di="DI_VCEA_Cassette_Present" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEBCasSensor" display="VCEB Cassette Sensor" schematicId="" unit="" di="DI_VCEB_Cassette_Present" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEALOCKEDSensor" display="VCEA LOCKED Sensor" schematicId="" unit="" di="DI_VCEA_ADR_LOCKED" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEBLOCKEDSensor" display="VCEB LOCKED Sensor" schematicId="" unit="" di="DI_VCEB_ADR_LOCKED" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEAProtrusionSensor" display="VCEA Protrusion Sensor" schematicId="" unit="" di="DI_VCEA_Protrusion" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="VCEBProtrusionSensor" display="VCEB Protrusion Sensor" schematicId="" unit="" di="DI_VCEB_Protrusion" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="ROBOTNotExtendVCEA" display="ROBOT Not Extend VCEA" schematicId="" unit="" di="DI_ROBOT_TO_VCEA_RETRACT" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- <IoSensor id="ROBOTNotExtendVCEB" display="ROBOT Not Extend VCEB" schematicId="" unit="" di="DI_ROBOT_TO_VCEB_RETRACT" isLowAsNormal="" textOutTrigValue="false"
- infoText="" warningText="" alarmText="" />
- </IoSensors>
- <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
- <IoCylinder id="VCEASlitDoor" display="VCEA Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_VCEA_SlitDoor_Open" doOFF="DO_VCEA_SlitDoor_Close" diON="DI_VCEA_SlitDoor_Open_POS" diOFF="DI_VCEA_SlitDoor_Close_POS" />
- <IoCylinder id="VCEBSlitDoor" display="VCEB Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_VCEB_SlitDoor_Open" doOFF="DO_VCEB_SlitDoor_Close" diON="DI_VCEB_SlitDoor_Open_POS" diOFF="DI_VCEB_SlitDoor_Close_POS" />
- <IoCylinder id="PMASlitDoor" display="PMA Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_PMA_SlitDoor_Open" doOFF="DO_PMA_SlitDoor_Close" diON="DI_PMA_SlitDoor_Open_POS" diOFF="DI_PMA_SlitDoor_Close_POS" />
- <IoCylinder id="PMBSlitDoor" display="PMB Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_PMB_SlitDoor_Open" doOFF="DO_PMB_SlitDoor_Close" diON="DI_PMB_SlitDoor_Open_POS" diOFF="DI_PMB_SlitDoor_Close_POS" />
- <IoCylinder id="PMCSlitDoor" display="PMC Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_PMC_SlitDoor_Open" doOFF="DO_PMC_SlitDoor_Close" diON="DI_PMC_SlitDoor_Open_POS" diOFF="DI_PMC_SlitDoor_Close_POS" />
- <IoCylinder id="PMDSlitDoor" display="PMD Slit Door" schematicId="" unit="" doMotorRelay=""
- doON="DO_PMD_SlitDoor_Open" doOFF="DO_PMD_SlitDoor_Close" diON="DI_PMD_SlitDoor_Open_POS" diOFF="DI_PMD_SlitDoor_Close_POS" />
- </IoCylinders>
- <IoSignalTowers assembly="Venus_RT" classType="Venus_RT.Devices.IoSignalTower">
- <IoSignalTower id="SignalTower" display="SignalTower" schematicId="SignalTower" unit=""
- doRed="DO_RED" doYellow="DO_ORANGE" doGreen="DO_GREEN" doBlue="DO_BLUE" doWhite="" doBuzzer1="DO_BUZZER1"
- doBuzzer2="DO_BUZZER2"/>
- </IoSignalTowers>
- <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
- <IoPressureMeter id="TMPressure" display="TM Pressure" schematicId="" unit="mTorr"
- aiValue="AI_TM_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="TMPipelinePressure" display="TM Pipeline Pressure" schematicId="" unit="mTorr"
- aiValue="AI_TM_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="VCEPipelinePressure" display="VCE Pipeline Pressure" schematicId="" unit="mTorr"
- aiValue="AI_VCE_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="VCEAPressure" display="VCEA Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Left_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
- <IoPressureMeter id="VCEBPressure" display="VCEB Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Right_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
- </IoPressureMeters>
- <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
- <IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
- aiFlow="AI_MFC_Flow" aoFlow="AO_MFC_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_SYSTEM_N2_Pressure_SW"/>
- </IoMfcs>
- <IoHongHuControls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHongHuControl">
- <IoHongHuControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="sccm" doMFCFlow="DO_Flow_Mode" doPressureMode="DO_Pressure_Mode" doVent="DO_TM_Soft_Vent" doPump="DO_TM_Soft_Pumping" aoMFCFlow="AO_MFC_Flow_Setpoint" aoPressure="AO_TM_Pressure_SetPoint"/>
- </IoHongHuControls>
- </DeviceModelDefine>
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