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TM
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TMInterlock.xml

TMInterlock.xml 20 KB
History Raw

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   
    4. 

  4. 

  5.    <!--TM-->
    6. 

  6.   <Action do="DO_N2_Valve"					value="true" tip="N2 Valve"	tip.zh-CN="" tip.en-US="DO-00" >
    7. 

  7.     <Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
    8. 

  8.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    9. 

  9.     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    10. 

  10.   </Action>
    11. 

  11.   
    12. 

  12.   <Action do="DO_Soft_Pumping_Valve_TM"					value="true" tip="Soft Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-01" >
    13. 

  13.     <Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
    14. 

  14.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    15. 

  15.     <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    16. 

  16.     <Limit di="DI_LLA_T_Slit_Door_close_Position"			value="true" tip="LLA Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-25" />
    17. 

  17.     <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    18. 

  18.     <Limit di="DI_LLB_E_Slit_Door_close_Position"			value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
    19. 

  19.     <Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />    
    20. 

  20.     <Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
    21. 

  21.     <Limit do="DO_Purge_Valve_TM"	value="false" tip="Purge Valve TM"			tip.zh-CN="" tip.en-US="D0-03" />
    22. 

  22.     <Limit do="DO_Vent_Valve_TM"				value="false" tip="Soft Vent Valve TM"					tip.zh-CN="" tip.en-US="DO-04" />
    23. 

  23.   </Action>
    24. 

  24.   
    25. 

  25.   <Action do="DO_Fast_Pumping_Valve_TM"					value="true" tip="Fast Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-02" >
    26. 

  26.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    27. 

  27.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    28. 

  28.     <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    29. 

  29.     <Limit di="DI_LLA_T_Slit_Door_close_Position"			value="true" tip="LLA Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-25" />
    30. 

  30.     <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    31. 

  31.     <Limit di="DI_LLB_E_Slit_Door_close_Position"			value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
    32. 

  32.     <Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
    33. 

  33.     <Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
    34. 

  34.     <Limit do="DO_Purge_Valve_TM"	value="false" tip="Purge Valve TM"			tip.zh-CN="" tip.en-US="D0-03" />
    35. 

  35.     <Limit do="DO_Vent_Valve_TM"				value="false" tip="Soft Vent Valve TM"					tip.zh-CN="" tip.en-US="DO-04" />
    36. 

  36.   </Action>
    37. 

  37. 

  38.   <Action do="DO_Purge_Valve_TM"					value="true" tip="Purge Valve TM"	tip.zh-CN="" tip.en-US="DO-03" >
    39. 

  39.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    40. 

  40.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    41. 

  41.     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    42. 

  42.     <Limit do="DO_Soft_Pumping_Valve_TM"			value="false" tip="Soft Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-01" />
    43. 

  43.     <Limit do="DO_Fast_Pumping_Valve_TM"			value="false" tip="Fast Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-02" />
    44. 

  44.   </Action>
    45. 

  45. 

  46.   <Action do="DO_Vent_Valve_TM"					value="true" tip="Soft Vent Valve TM"	tip.zh-CN="" tip.en-US="DO-04" >
    47. 

  47.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    48. 

  48.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    49. 

  49.     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    50. 

  50.     <Limit do="DO_Soft_Pumping_Valve_TM"			value="false" tip="Soft Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-01" />
    51. 

  51.     <Limit do="DO_Fast_Pumping_Valve_TM"			value="false" tip="Fast Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-02" />
    52. 

  52.   </Action>
    53. 

  53. 

  54.   <Action do="DO_Soft_Pumping_Valve_LLA"					value="true" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" >
    55. 

  55.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    56. 

  56.     <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    57. 

  57.     <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    58. 

  58.     <Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
    59. 

  59.     <Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
    60. 

  60.   </Action>
    61. 

  61. 

  62.   <Action do="DO_Fast_Pumping_Valve_LLA"					value="true" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" >
    63. 

  63.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    64. 

  64.     <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    65. 

  65.     <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    66. 

  66.     <Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
    67. 

  67.     <Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
    68. 

  68.   </Action>
    69. 

  69. 

  70.   <Action do="DO_Purge_Valve_LLA"					value="true" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" >
    71. 

  71.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    72. 

  72.     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    73. 

  73.     <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    74. 

  74.     <Limit do="DO_Soft_Pumping_Valve_LLA"					value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
    75. 

  75.     <Limit do="DO_Fast_Pumping_Valve_LLA"					value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
    76. 

  76.   </Action>
    77. 

  77. 

  78.   <Action do="DO_Vent_Valve_LLA"					value="true" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" >
    79. 

  79.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    80. 

  80.     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    81. 

  81.     <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    82. 

  82.     <Limit do="DO_Soft_Pumping_Valve_LLA"					value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
    83. 

  83.     <Limit do="DO_Fast_Pumping_Valve_LLA"					value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
    84. 

  84.   </Action>
    85. 

  85.   
    86. 

  86. 	<Action do="DO_LLA_Slit_Door_E_Open"					value="true" tip="LLA Slit Door/I Open"	tip.zh-CN="" tip.en-US="DO-11" >
    87. 

  87.     <Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    88. 

  88.     <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    89. 

  89.     <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    90. 

  90.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    91. 

  91.     <Limit di="DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
    92. 

  92. 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    93. 

  93.     <Limit di="DI_LLA_ATM_Switch"				value="true" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
    94. 

  94. 	</Action>
    95. 

  95. 	
    96. 

  96. 	<Action do="DO_LLA_Slit_Door_E_Close"				value="true" tip="LLA Slit Door/I Close"	tip.zh-CN="" tip.en-US="DO-12" >
    97. 

  97.     <Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    98. 

  98.     <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    99. 

  99.     <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    100. 

  100.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    101. 

  101.     <Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    102. 

  102. 	</Action>
    103. 

  103. 	
    104. 

  104. 

  105. 

  106. 	<Action do="DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
    107. 

  107. 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    108. 

  108.     <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    109. 

  109.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    110. 

  110.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    111. 

  111. 		<Limit di="DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
    112. 

  112. 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    113. 

  113.     <Limit di="DI_LLA_VAC_Switch"				value="true" tip="LLA VAC Switch"					tip.zh-CN="" tip.en-US="DI-34" />
    114. 

  114.     <Limit di="DI_LLA_ATM_Switch"				value="false" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
    115. 

  115.     <Limit do="DO_TM_VAC_ATM_MODE"				value="false" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
    116. 

  116. 	</Action>
    117. 

  117. 

  118.   <Action do="DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
    119. 

  119.     <Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    120. 

  120.     <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    121. 

  121.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    122. 

  122.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    123. 

  123.     <Limit di="DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
    124. 

  124.     <Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    125. 

  125.     <Limit di="DI_LLA_VAC_Switch"				value="false" tip="LLA VAC Switch"					tip.zh-CN="" tip.en-US="DI-34" />
    126. 

  126.     <Limit di="DI_LLA_ATM_Switch"				value="true" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
    127. 

  127.     <Limit do="DO_TM_VAC_ATM_MODE"				value="true" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
    128. 

  128.   </Action>
    129. 

  129.   
    130. 

  130. 	<Action do="DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
    131. 

  131. 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    132. 

  132.     <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    133. 

  133.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    134. 

  134.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    135. 

  135. 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    136. 

  136. 	</Action>
    137. 

  137.   
    138. 

  138.   <Action do="DO_Soft_Pumping_Valve_LLB"				value="true" tip="Soft Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-16" >
    139. 

  139.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    140. 

  140.     <Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
    141. 

  141.     <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-31" />
    142. 

  142.     <Limit do="DO_Purge_Valve_LLB"	value="false" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" />
    143. 

  143.     <Limit do="DO_Vent_Valve_LLB"				value="false" tip="Vent Valve LLB"			tip.zh-CN="" tip.en-US="DO-19" />
    144. 

  144.   </Action>
    145. 

  145. 

  146.   <Action do="DO_Fast_Pumping_Valve_LLB"					value="true" tip="Fast Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-17" >
    147. 

  147.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    148. 

  148.     <Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
    149. 

  149.     <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    150. 

  150.     <Limit do="DO_Purge_Valve_LLB"	value="false" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" />
    151. 

  151.     <Limit do="DO_Vent_Valve_LLB"				value="false" tip="Vent Valve LLB"			tip.zh-CN="" tip.en-US="DO-19" />
    152. 

  152.   </Action>
    153. 

  153. 

  154.   <Action do="DO_Purge_Valve_LLB"					value="true" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" >
    155. 

  155.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    156. 

  156.     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    157. 

  157.     <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    158. 

  158.     <Limit do="DO_Soft_Pumping_Valve_LLB"	value="false" tip="Soft Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-16" />
    159. 

  159.     <Limit do="DO_Fast_Pumping_Valve_LLB"				value="false" tip="Fast Pumping Valve LLB"			tip.zh-CN="" tip.en-US="DO-17" />
    160. 

  160.   </Action>
    161. 

  161. 

  162.   <Action do="DO_Vent_Valve_LLB"					value="true" tip="Vent Valve LLB"		tip.zh-CN="" tip.en-US="DO-19" >
    163. 

  163.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    164. 

  164.     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    165. 

  165.     <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    166. 

  166.     <Limit do="DO_Soft_Pumping_Valve_LLB"	value="false" tip="Soft Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-16" />
    167. 

  167.     <Limit do="DO_Fast_Pumping_Valve_LLB"				value="false" tip="Fast Pumping Valve LLB"			tip.zh-CN="" tip.en-US="DO-17" />
    168. 

  168.   </Action>
    169. 

  169. 

  170.   <Action do="DO_LLB_Slit_Door_E_Open"					value="true" tip="LLB Slit Door/I Open"		tip.zh-CN="" tip.en-US="DO-21" >
    171. 

  171.     <Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
    172. 

  172.     <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    173. 

  173.     <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    174. 

  174.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    175. 

  175.     <Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
    176. 

  176.     <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    177. 

  177.     <Limit di="DI_LLB_ATM_Switch"	value="true" tip="LLB ATM Switch"		tip.zh-CN="" tip.en-US="DI-37" />
    178. 

  178.   </Action>
    179. 

  179. 

  180.   <Action do="DO_LLB_Slit_Door_E_Close"					value="true" tip="LLB Slit Door/I Close"		tip.zh-CN="" tip.en-US="DO-22" >
    181. 

  181.     <Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
    182. 

  182.     <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    183. 

  183.     <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    184. 

  184.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    185. 

  185.     <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    186. 

  186.   </Action>
    187. 

  187.   
    188. 

  188. 	<Action do="DO_LLB_Slit_Door_T_Open"					value="true" tip="LLB Slit Door/O Open"		tip.zh-CN="" tip.en-US="DO-23" >
    189. 

  189. 		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    190. 

  190.     <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    191. 

  191.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    192. 

  192.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    193. 

  193. 		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
    194. 

  194. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    195. 

  195. 		<Limit di="DI_LLB_VAC_Switch"				value="true" tip="LLB VAC Switch"			tip.zh-CN="" tip.en-US="DI-36" />
    196. 

  196.     <Limit di="DI_LLB_ATM_Switch"				value="false" tip="LLB ATM Switch"			tip.zh-CN="" tip.en-US="DI-37" />
    197. 

  197.     <Limit do="DO_TM_VAC_ATM_MODE"				value="false" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
    198. 

  198. 	</Action>
    199. 

  199. 

  200.   <Action do="DO_LLB_Slit_Door_T_Open"					value="true" tip="LLB Slit Door/O Open"		tip.zh-CN="" tip.en-US="DO-23" >
    201. 

  201.     <Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    202. 

  202.     <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    203. 

  203.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    204. 

  204.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    205. 

  205.     <Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
    206. 

  206.     <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    207. 

  207.     <Limit di="DI_LLB_VAC_Switch"				value="false" tip="LLB VAC Switch"			tip.zh-CN="" tip.en-US="DI-36" />
    208. 

  208.     <Limit di="DI_LLB_ATM_Switch"				value="true" tip="LLB ATM Switch"			tip.zh-CN="" tip.en-US="DI-37" />
    209. 

  209.     <Limit do="DO_TM_VAC_ATM_MODE"				value="true" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
    210. 

  210.   </Action>
    211. 

  211. 	
    212. 

  212. 	<Action do="DO_LLB_Slit_Door_T_Close"				value="true" tip="LLB Slit Door/O Close"	tip.zh-CN="" tip.en-US="DO-24" >
    213. 

  213. 		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    214. 

  214.     <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    215. 

  215.     <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    216. 

  216.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    217. 

  217. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    218. 

  218. 	</Action>
    219. 

  219.   
    220. 

  220.   <Action do="DO_Water_Valve_Relay"				value="true" tip="Water Valve Relay"	tip.zh-CN="" tip.en-US="DO-26" >
    221. 

  221.     <Limit di="DI_Water_Leak_Sensor"				value="true" tip="Water Leak Sensor"		tip.zh-CN="" tip.en-US="DI-3" />
    222. 

  222.   </Action>
    223. 

  223. 	
    224. 

  224. </Interlock>
    225.