SEMFPMPickRoutine.cs 12 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.DBCore;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using System.Windows;
  19. using System.Windows.Interop;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Devices.IODevices;
  23. using Venus_RT.Devices.TM;
  24. using Venus_RT.Modules.PMs;
  25. namespace Venus_RT.Modules.TM.VenusEntity
  26. {
  27. public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine
  28. {
  29. private enum PickStep
  30. {
  31. WaitPMReady,
  32. WaitforControlPressure,
  33. PMPrepare,
  34. ArmExtend,
  35. QueryAWC,
  36. DropDownWafer,
  37. PickDelay,
  38. PickDelay2,
  39. ArmRetract,
  40. SavePickeData,
  41. NotifyDone,
  42. CloseSlitDoor,
  43. CloseLinerDoor,
  44. EndDelay
  45. }
  46. private readonly TMBase _tm;
  47. private readonly ITransferRobot _robot;
  48. private int _pickdelay = 0;
  49. private ModuleName _targetModule;
  50. private Hand _hand;
  51. private int _targetSlot;
  52. private PMEntity _pmModule;
  53. private int _ExtendTimeout = 120 * 1000;
  54. private int _RetractTimeout = 120 * 1000;
  55. private JetPMBase _chamber;
  56. private bool NeedControlPressure;
  57. private int _controlPressureSetPoint = 90;
  58. private int _controlFlowSetPoint = 10;
  59. //private DateTime _starttime;
  60. private bool _queryAwc;
  61. private bool havelinerdoor;
  62. public SEMFPMPickRoutine(TMBase honghutm, ITransferRobot robot,ModuleName module) : base(module)
  63. {
  64. _tm = honghutm;
  65. _robot = robot;
  66. _queryAwc = false;
  67. }
  68. public RState Start(params object[] objs)
  69. {
  70. //_starttime = DateTime.Now;
  71. if (!_robot.IsHomed)
  72. {
  73. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  74. return RState.Failed;
  75. }
  76. var pickItem = (Queue<MoveItem>)objs[0];
  77. _targetModule = pickItem.Peek().SourceModule;
  78. _targetSlot = pickItem.Peek().SourceSlot;
  79. _hand = pickItem.Peek().RobotHand;
  80. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());//(JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");
  81. if ( _chamber.ChamberType== JetChamber.VenusDE)
  82. {
  83. havelinerdoor = true;
  84. }
  85. else
  86. {
  87. havelinerdoor = false;
  88. }
  89. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  90. {
  91. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  92. }
  93. else
  94. {
  95. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
  96. return RState.Failed;
  97. }
  98. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  99. {
  100. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  101. return RState.Failed;
  102. }
  103. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  104. {
  105. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  106. return RState.Failed;
  107. }
  108. var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
  109. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
  110. _ExtendTimeout = SC.GetValue<int>($"{Module}.ExtendTimeout") * 1000;
  111. _RetractTimeout = SC.GetValue<int>($"{Module}.RetractTimeout") * 1000;
  112. _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  113. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  114. {
  115. NeedControlPressure = true;
  116. }
  117. else
  118. {
  119. NeedControlPressure = false;
  120. }
  121. Reset();
  122. return Runner.Start(Module, $"Pick from {_targetModule}");
  123. }
  124. public RState Monitor()
  125. {
  126. Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
  127. .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
  128. .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady)
  129. .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)
  130. .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
  131. .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  132. .Delay(PickStep.PickDelay, _pickdelay)
  133. .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)
  134. .Run(PickStep.SavePickeData, RecordAWCData, NullFun)
  135. .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)
  136. .Delay(PickStep.PickDelay2, _delay_50ms)
  137. .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)
  138. .RunIf(PickStep.CloseLinerDoor, havelinerdoor, PMLinerDoorClose, WaitPMLinerDoorClose)
  139. .End(PickStep.EndDelay, NullFun, _delay_50ms);
  140. return Runner.Status;
  141. }
  142. private bool ModulePrepare()
  143. {
  144. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  145. //_tm.TurnSlitDoor(_targetModule, true);
  146. return true;
  147. }
  148. private bool IsModulePrepareReady()
  149. {
  150. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  151. }
  152. private bool ArmExtend()
  153. {
  154. if (!_pmModule.IsSlitDoorOpen)
  155. {
  156. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");
  157. return false;
  158. }
  159. return _robot.PickExtend(_targetModule, _targetSlot, _hand);
  160. }
  161. private bool ArmRetract()
  162. {
  163. return _robot.PickRetract(_targetModule, _targetSlot, _hand);
  164. }
  165. private bool WaitRobotExtendDone()
  166. {
  167. if (_robot.Status == RState.Running)
  168. {
  169. return false;
  170. }
  171. else if (_robot.Status == RState.End)
  172. {
  173. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  174. return true;
  175. }
  176. else
  177. {
  178. Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
  179. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  180. return true;
  181. }
  182. }
  183. private bool IsPressureReady()
  184. {
  185. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  186. //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
  187. double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
  188. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  189. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  190. {
  191. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);
  192. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));
  193. //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
  194. //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  195. return true;
  196. }
  197. else return false;
  198. }
  199. private bool StartControlPressure()
  200. {
  201. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
  202. _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  203. _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
  204. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  205. return true;
  206. }
  207. private bool QueryAWC()
  208. {
  209. if (!_queryAwc)
  210. return true;
  211. else
  212. return _robot.QueryAwc(); ;
  213. }
  214. private bool WaitRobotQueryDone()
  215. {
  216. if (!_queryAwc)
  217. return true;
  218. if (_robot.Status == RState.Running)
  219. {
  220. return false;
  221. }
  222. else if (_robot.Status == RState.End)
  223. {
  224. return true;
  225. }
  226. else
  227. {
  228. Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
  229. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  230. return true;
  231. }
  232. }
  233. private bool RecordAWCData()
  234. {
  235. if (!_queryAwc)
  236. return true;
  237. return true;
  238. }
  239. private bool NotifyPMPickWafer()
  240. {
  241. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  242. return true;
  243. }
  244. private bool WaitPMWaferDropDown()
  245. {
  246. return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
  247. }
  248. private bool WaitRobotRetractDone()
  249. {
  250. if (_robot.Status == RState.Running)
  251. {
  252. return false;
  253. }
  254. else if (_robot.Status == RState.End)
  255. {
  256. return true;
  257. }
  258. else
  259. {
  260. Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
  261. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  262. return true;
  263. }
  264. }
  265. private bool NotifyPMDone()
  266. {
  267. _pmModule.PostMsg(PMEntity.MSG.PickReady);
  268. return true;
  269. }
  270. private bool PMDoorClose()
  271. {
  272. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");
  273. return _tm.TurnSlitDoor(_targetModule, false);
  274. }
  275. private bool PMLinerDoorClose()
  276. {
  277. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Liner Door Again");
  278. return _chamber.SetLinerDoor(false, out _);
  279. }
  280. private bool WaitPMDoorClose()
  281. {
  282. if (_tm.CheckSlitValveClose(_targetModule))
  283. {
  284. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");
  285. return true;
  286. }
  287. else
  288. {
  289. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");
  290. return false;
  291. }
  292. }
  293. private bool WaitPMLinerDoorClose()
  294. {
  295. if (_chamber.CheckLinerDoorClose())
  296. {
  297. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check LinerDoor Close");
  298. return true;
  299. }
  300. else
  301. {
  302. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close LinerDoor");
  303. return false;
  304. }
  305. }
  306. public void Abort()
  307. {
  308. _robot.Halt();
  309. }
  310. }
  311. }