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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.DBCore;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Windows;
- using System.Windows.Interop;
- using Venus_Core;
- using Venus_RT.Devices;
- using Venus_RT.Devices.IODevices;
- using Venus_RT.Devices.TM;
- using Venus_RT.Modules.PMs;
- namespace Venus_RT.Modules.TM.VenusEntity
- {
- public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine
- {
- private enum PickStep
- {
- WaitPMReady,
- WaitforControlPressure,
- PMPrepare,
- ArmExtend,
- QueryAWC,
- DropDownWafer,
- PickDelay,
- PickDelay2,
- ArmRetract,
- SavePickeData,
- NotifyDone,
- CloseSlitDoor,
- CloseLinerDoor,
- EndDelay
- }
- private readonly TMBase _tm;
- private readonly ITransferRobot _robot;
- private int _pickdelay = 0;
- private ModuleName _targetModule;
- private Hand _hand;
- private int _targetSlot;
- private PMEntity _pmModule;
- private int _ExtendTimeout = 120 * 1000;
- private int _RetractTimeout = 120 * 1000;
- private JetPMBase _chamber;
- private bool NeedControlPressure;
- private int _controlPressureSetPoint = 90;
- private int _controlFlowSetPoint = 10;
- //private DateTime _starttime;
- private bool _queryAwc;
- private bool havelinerdoor;
- public SEMFPMPickRoutine(TMBase honghutm, ITransferRobot robot,ModuleName module) : base(module)
- {
- _tm = honghutm;
- _robot = robot;
- _queryAwc = false;
- }
- public RState Start(params object[] objs)
- {
- //_starttime = DateTime.Now;
- if (!_robot.IsHomed)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
- return RState.Failed;
- }
- var pickItem = (Queue<MoveItem>)objs[0];
- _targetModule = pickItem.Peek().SourceModule;
- _targetSlot = pickItem.Peek().SourceSlot;
- _hand = pickItem.Peek().RobotHand;
- _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());//(JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");
- if ( _chamber.ChamberType== JetChamber.VenusDE)
- {
- havelinerdoor = true;
- }
- else
- {
- havelinerdoor = false;
- }
- if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
- }
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
- return RState.Failed;
- }
- var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
- LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
- _ExtendTimeout = SC.GetValue<int>($"{Module}.ExtendTimeout") * 1000;
- _RetractTimeout = SC.GetValue<int>($"{Module}.RetractTimeout") * 1000;
- _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
- if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
- {
- NeedControlPressure = true;
- }
- else
- {
- NeedControlPressure = false;
- }
- Reset();
- return Runner.Start(Module, $"Pick from {_targetModule}");
- }
- public RState Monitor()
- {
- Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
- .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady)
- .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)
- .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
- .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
- .Delay(PickStep.PickDelay, _pickdelay)
- .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)
- .Run(PickStep.SavePickeData, RecordAWCData, NullFun)
- .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)
- .Delay(PickStep.PickDelay2, _delay_50ms)
- .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)
- .RunIf(PickStep.CloseLinerDoor, havelinerdoor, PMLinerDoorClose, WaitPMLinerDoorClose)
- .End(PickStep.EndDelay, NullFun, _delay_50ms);
- return Runner.Status;
- }
- private bool ModulePrepare()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePick);
- //_tm.TurnSlitDoor(_targetModule, true);
- return true;
- }
- private bool IsModulePrepareReady()
- {
- return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
- }
- private bool ArmExtend()
- {
- if (!_pmModule.IsSlitDoorOpen)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");
- return false;
- }
- return _robot.PickExtend(_targetModule, _targetSlot, _hand);
- }
- private bool ArmRetract()
- {
- return _robot.PickRetract(_targetModule, _targetSlot, _hand);
- }
- private bool WaitRobotExtendDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
- Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
- return true;
- }
- }
- private bool IsPressureReady()
- {
- double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
- //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
- double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
- double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
- if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
- {
- //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);
- //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));
- //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
- //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
- return true;
- }
- else return false;
- }
- private bool StartControlPressure()
- {
- _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
- _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
- _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
- _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
- return true;
- }
- private bool QueryAWC()
- {
- if (!_queryAwc)
- return true;
- else
- return _robot.QueryAwc(); ;
- }
- private bool WaitRobotQueryDone()
- {
- if (!_queryAwc)
- return true;
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
- Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
- return true;
- }
- }
- private bool RecordAWCData()
- {
- if (!_queryAwc)
- return true;
- return true;
- }
- private bool NotifyPMPickWafer()
- {
- _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
- return true;
- }
- private bool WaitPMWaferDropDown()
- {
- return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
- }
- private bool WaitRobotRetractDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
- Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
- return true;
- }
- }
- private bool NotifyPMDone()
- {
- _pmModule.PostMsg(PMEntity.MSG.PickReady);
- return true;
- }
- private bool PMDoorClose()
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");
- return _tm.TurnSlitDoor(_targetModule, false);
- }
- private bool PMLinerDoorClose()
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Liner Door Again");
- return _chamber.SetLinerDoor(false, out _);
- }
- private bool WaitPMDoorClose()
- {
- if (_tm.CheckSlitValveClose(_targetModule))
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");
- return true;
- }
- else
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");
- return false;
- }
- }
- private bool WaitPMLinerDoorClose()
- {
- if (_chamber.CheckLinerDoorClose())
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check LinerDoor Close");
- return true;
- }
- else
- {
- LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close LinerDoor");
- return false;
- }
- }
- public void Abort()
- {
- _robot.Halt();
- }
- }
- }
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