| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using Aitex.Core.Common;using Venus_RT.Devices;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using Venus_Core;using Aitex.Core.RT.Log;using Aitex.Core.Util;using Venus_RT.Modules.PMs;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;using System;using MECF.Framework.Common.DBCore;namespace Venus_RT.Modules.TM{    class MFPMPickRoutine : ModuleRoutineBase, IRoutine    {        private enum PickStep        {            WaitPMReady,            OpenPMSlitDoor,            PMPrepare,            ArmExtend,            QueryAWC,            DropDownWafer,            PickDelay,            ArmRetract,            SavePickeData,            ClosePMSlitDoor,            CheckAWC,            NotifyDone,        }        private enum PickStepWithHeater        {            WaitPMReady,            WaitPressreDifference,            OpenPMSlitDoor,            PMPrepare,            Picking,               QueryAWC,            SavePickeData,            ClosePMSlitDoor,            CheckAWC,            NotifyDone,        }        private readonly JetTM _JetTM;        private readonly ITransferRobot _robot;        private int _pickingTimeout = 20 * 1000;        private int _liftPinTimeout = 10 * 1000;        private int _pickDelayTime = 0;        private ModuleName _targetModule;        private PMEntity  _pmModule;        //private TMEntity _tmModule;        private int _targetSlot;        private Hand _hand;        private DateTime _starttime;        private bool _queryAwc;        double maxPressureDifference ;        int awcAlarmRange;        int awcWarningRange;        public MFPMPickRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)        {            _JetTM = tm;            _robot = robot;            Name = "Pick from PM";            if (SC.GetValue<int>($"TM.QueryAWCOption") == 1 || SC.GetValue<int>($"TM.QueryAWCOption") == 3)                _queryAwc = true;            else                _queryAwc = false;            maxPressureDifference=SC.GetValue<double>("System.PMTMMaxPressureDifference");        }        public RState Start(params object[] objs)        {            _starttime = DateTime.Now;            if (!_robot.IsHomed)            {                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");                return RState.Failed;            }            var pickItem = (Queue<MoveItem>)objs[0];            if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(pickItem))                return RState.Failed;            _targetModule = pickItem.Peek().SourceModule;            _targetSlot = pickItem.Peek().SourceSlot;            _hand = pickItem.Peek().RobotHand;            if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);            }            else            {                LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");                return RState.Failed;            }            if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");                return RState.Failed;            }            if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");                return RState.Failed;            }            var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);            if(wafer.ChuckState == EnumWaferChuckStatus.Chucked)            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick the wafer in {_targetModule }as the wafer is chucked");                return RState.Failed;            }            LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");            Reset();            _pickingTimeout = SC.GetValue<int>("TM.PickTimeout") * 1000;            _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");            awcAlarmRange = SC.GetValue<int>($"TM.AWCAlarmRange");            awcWarningRange = SC.GetValue<int>($"TM.AWCWarningRange");            return Runner.Start(Module, $"Pick from {_targetModule}");        }        public RState Monitor()        {            switch (_pmModule.ChamberType)            {                //case JetChamber.Venus:                case JetChamber.Kepler2300:          Runner.Wait(PickStep.WaitPMReady,          () => _pmModule.IsIdle, _delay_60s)                .Run(PickStep.OpenPMSlitDoor,        OpenPMSlitDoor,     OpenPMSlitDoorIsOK)                .Run(PickStep.PMPrepare,             PMPrepare,          IsPMPrepareReady)                             .Run(PickStep.ArmExtend,             ArmExtend,          WaitRobotExtendDone)                .Run(PickStep.QueryAWC,              QueryAWC,           WaitRobotQueryDone,    _delay_1s)                .Run(PickStep.DropDownWafer,         NotifyPMPickWafer,  WaitPMWaferDropDown)                .Delay(PickStep.PickDelay, _pickDelayTime)                .Run(PickStep.ArmRetract,            ArmRetract,         WaitRobotRetractDone)                .Run(PickStep.ClosePMSlitDoor,       ClosePMSlitDoor,     ClosePMSlitDoorIsOK)                //.Run(PickStep.CheckAWC,              CheckAwc                                )                .End(PickStep.NotifyDone,            NotifyPMDone,                               _delay_50ms);                break;                case JetChamber.Kepler2200A:                case JetChamber.Kepler2200B:         Runner.Wait(PickStepWithHeater.WaitPMReady,           () => _pmModule.IsIdle, _delay_60s)               .Wait(PickStepWithHeater.WaitPressreDifference, TMPMPressureIsOK,   _delay_60s)               .Run(PickStepWithHeater.OpenPMSlitDoor,                   OpenPMSlitDoor,     OpenPMSlitDoorIsOK)               .Run(PickStepWithHeater.PMPrepare,              PMPrepare,          IsPMPrepareReady)               .Run(PickStepWithHeater.Picking,                Picking,            WaitPickDone)               .Run(PickStepWithHeater.QueryAWC,               QueryAWC,           WaitRobotQueryDone)               .Run(PickStepWithHeater.SavePickeData,          RecordAWCData,      NullFun)               .Run(PickStepWithHeater.ClosePMSlitDoor,        ClosePMSlitDoor,    ClosePMSlitDoorIsOK)               //.Run(PickStepWithHeater.CheckAWC,               CheckAwc                               )               .End(PickStepWithHeater.NotifyDone,             NotifyPMDone,                                 _delay_1s);                break;            }                        return Runner.Status;        }        private bool TMPMPressureIsOK()        {            if (Math.Abs((_pmModule.ChamberPressure - _JetTM.ChamberPressure)) < maxPressureDifference)            {                return true;            }            else            {                return false;            }        }        private bool PMPrepare()        {            _pmModule.PostMsg(PMEntity.MSG.PreparePick);            return true;        }        private bool OpenPMSlitDoor()        {           return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);        }        private bool OpenPMSlitDoorIsOK()        {           return _JetTM.IsPMSlitdoorOpened(_targetModule);        }        private bool ClosePMSlitDoor()        {           return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);        }        private bool ClosePMSlitDoorIsOK()        {            return _JetTM.IsPMSlitdoorClosed(_targetModule);        }        private bool IsPMPrepareReady()        {            return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick;                    }        private bool Picking()        {            return _robot.Pick(_targetModule, _targetSlot, _hand);        }        private bool WaitPickDone()        {            if (_robot.Status == RState.Running)            {                if(Runner.StepElapsedMS > _pickingTimeout)                {                    WaferManager.Instance.CreateDuplicatedWafer(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);                    Runner.Stop($"TM Robot Picking {_targetModule} wafer timeout, {_pickingTimeout}");                    return true;                }                return false;            }            else if (_robot.Status == RState.End)            {                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);                return true;            }            else            {                WaferManager.Instance.CreateDuplicatedWafer(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);                Runner.Stop($"TM Robot Picking failed, {_robot.Status}");                return true;            }        }        private bool ArmExtend()        {            return _robot.PickExtend(_targetModule, _targetSlot, _hand);        }        private bool ArmRetract()        {            return _robot.PickRetract(_targetModule, _targetSlot, _hand);        }        private bool WaitRobotExtendDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");                return true;            }        }        private bool QueryAWC()        {            if (!_queryAwc)                return true;            else                return _robot.QueryAwc(); ;        }        private bool WaitRobotQueryDone()        {            if (!_queryAwc)                return true;            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");                return true;            }        }        private bool RecordAWCData()        {            if (!_queryAwc)                return true;            //已经move后的数据            string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}";            int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot;            //查询完毕 插入数据            OffsetDataRecorder.RecordOffsetData(                Guid.NewGuid().ToString(),                _targetModule, _targetSlot,                ModuleName.TMRobot, 0,                _origin_module, _origin_slot,                _hand, RobotArmPan.None,                _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D,                _starttime, DateTime.Now);            return true;        }        //private bool CheckAwc()        //{        //    if (Math.Abs(_robot.Offset_D) > awcAlarmRange * 1000)        //    {        //        Stop($"Check AWC 失败, 当前 AWC [{_robot.Offset_D}um], 高于Alarm最大值: [{awcAlarmRange}mm]");        //        return false;        //    }        //    if (Math.Abs(_robot.Offset_D) > awcWarningRange * 1000)        //    {        //        Stop($"Check AWC 报警, 当前 AWC [{_robot.Offset_D}um], 高于Warning最大值: [{awcWarningRange}mm]");        //    }        //    return true;        //}        private bool NotifyPMPickWafer()        {            _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);            return true;        }        private bool WaitPMWaferDropDown()        {            if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)            {                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);                return true;            }            else if (Runner.StepElapsedMS > _liftPinTimeout)            {                WaferManager.Instance.CreateDuplicatedWafer(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);                Runner.Stop($"Wait {_targetModule} Lift Pin down timeout, {Runner.StepElapsedMS}");            }            return false;        }        private bool WaitRobotRetractDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");                return true;            }        }        private bool NotifyPMDone()        {            _pmModule.PostMsg(PMEntity.MSG.PickReady);            return true;        }        public void Abort()        {            _robot.Halt();        }    }}
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